1345625 _ 爭1345625 _
* I - 190年05月04日修正替換頁 γ 100· 5. Q K _ 九、發明說明： 【發明所屬之技術領域】 現代機械製造與加工工業正萬向更精密、快速、自動 化與高效率的方向發展，而三次元座標測量機是為因應此 需求而設計誔生的一種大型精密智慧型量測儀器，其已被 廣泛應用於機械製造、科學儀器製造、電子工業汽車工業 以及航太和國防工業等各部門，具有廣闊的發展與應用前 景。但是現有業界所使用的低效率、檢驗繁複而代價高昂 r 的三次元座標測量機及精密機床等校正方法卻在一定程度 上限制了它的推廣應用，尤其是資金短缺為數眾多的中小 企業的運用更受到影響。 【先前技術】 目前，國内外對三次元座標測量機等之精度校正工作 大致分為兩種方式：一種是運用高精度的儀器量測校正規 程中的受檢專案來完成校正工作。使用的儀器通常包括雙 ( 頻雷射干涉儀、自動光電準直儀、電感測微儀、直角尺、. 零級平尺等。這種方法的優點是校正結果精度高，可靠性 也高，而缺點是對量測儀器、量測人員技術要求較高，校 正工作費時費力，對大部分的座標測量機用戶而言，儀器 設備與定期的校正費用都非常高昂。而第二種校正方法是 使用標準器進行座標測量機的校正工作，它是通過用座標 測量機量測標準器，如精密塊規、步距規、球端棒、球板 或球錐等來完成校正工作；其優點為方便、快捷、較適合 於一般用戶之使用，但是校正工作不符合國際標準 5 096132906 1003156968-0 1345625 -------- ·， 100年05月04日修正替換頁 _360-2之規範；而且標準 校正結果之可靠’標準器必須經常實施鑑定檢驗。以函 種校正方式各有其優點’但它們的缺點是校正工作繁複而 ^便因且校正儀器設備昂責，校正成本高昂且校正 =二因而限制了三次元測量機的推廣與使用。因此在面 +目則座標測1機校正工作不成熟的狀況，正迫切需 究新的校正方法和校正裝置，實現座標測量機可靠、方便 、快捷、低成本的校正工作。 1更 【發明内容】 鑑於目前三次元座標測量機箄 在的檢驗繁複與㈣翻^ 度^正檢定方法存 ㈣檢驗繁複與使關&設備代價昂貴等缺點，本發 出了-種校正三次元座標測量機精度的全新方法—— -維球列對稱聯繫組合自動檢測標定法，設計了—種= 式自動空間座標精密測量校正儀。 本創作具有下列之優點： 1 ·由量測原理可知，只需準確測得球列上任意一對 的條件τ ’用本量測裝置進行對稱組合比較量測， 量機處理測得值’便可得被測三次元座標測 戶〔Μ參閱第一圖〕，本發明使用高精度的滾珠螺 干（3 2 )和贿馬達（3 1 )來驅動球列板（2 )運用 電腦控制伺服馬達（31)，〔請參閱第二圖〕通過預先 按設2程式，其中〇〜20為標定點列、卜谓為球 列使,月塊按照一定標準間距移動，實現自動化量測 6 柯 096132906 1003156968-0 U45625 1紹牟〇备月级萏修正替換頁 由測頭與各標準球觸測，得到量測結果。 3 ·調節水平迴轉軸（丄2)和垂直迴轉定位板（工 β在二間不同位置，按上述第二圖中的程式進行量測可 得到在座標測量機量測空間範圍内的位置誤差，由此再資 料刀解，即可得到座標測量機幾何結構的2丄項誤差此 f述之2 1項誤騎第二圖中所使用程式中的0至2 〇的 2 1個標定點列。 。4 .本發明只需要使用標準塊規等通用高精度量測儀 器’在使用前-定時間週期内對任意一對球心距進行即時 檢測標定，若條件具備也可利用雷射干涉儀〔請參閲第三 圖〕，透過儀器雷射頭（5)進入參考鏡（6)再進入乾 鏡（7)及標準球（2 1 )與電感測微儀（8)，即可得 =球板的標準量。因此本裝置不要求檢測裝置的長期穩定 性’也不需要鮮賴單㈣裝置進較_測校正。 5 ·本量測裝置造價低、檢測校正範圍大，而且輕巧 ’便於攜帶，並可使用於廣泛的CNC等精密機床之檢測與 校正之用。 ' 【實施方式】 首先，〔請參閱第-圖〕，本創作主要係包括支稽座 (1 )、球列板（2)、自動驅動裝置（3)，其中. 支撑座（1)，包括底座（11)、水平迴轉轴u 2，垂直迴轉定位板（13)。底座（11)根據需要 可在測量機平臺上任意位置用螺栓固定，·水平 2)由螺釘緊固於底座（1 i )轴套 f y神贫上，或軸套内作邪〇 096132.906 1003156968-0 1345625 月04日修正替揍頁 度坦轉Μ滿足在任意位置測量機精度校正需要；垂直迴 轉由螺釘緊固于水平迴轉軸（ι 2)上端 ，或根據而要在垂直平面内作90度範圍轉動。 球列板（2)，該球列板（2)上等距設置有 徑相^標準球（21)，球間距為2〇麵，其中 距經過回精度標定作為標準量。 自動驅動裝置（3)，係設置於支撐 括賴馬達（3 U、精密滚珠螺桿組（3 2)、高精； 〃、達（3 1 )和精密滾珠螺桿機 在===動系統，通過連結桿帶動球列板（ 理編制的程式實現自動移動。 杈正原 本發明手式自動空間庙声择 施睥，卜炎_ 標精測置校正儀，校正實 ::〔=第三圖與第四圖〕先將本創作固定於測量 = = 2 Γ〔請參閱第一圖〕，球列板（2)上 作為俨：：\ 1 )構成五個間距，需要-個標準間距 卩可得到其他高精度量·果，準間距由任 第 的方法檢測標定得到 回精度標準間距’也刊用鮮塊規和高精度 測裝置進行校正標定。標準球兩端球心距 動球=(2)在滑軌(33)上按照第二圖量 = 板（2)移動_職’可測得空間 醜範_量測誤差。球列板（2)由伺服馬達（3丄 )和滚珠螺桿組（32)，滑軌（33).自動_’ 096132906 1003156368-0 1345625 it0年0¾ *月修正替換頁 微驅動定位精度為1W ，上述結構原理可實現一維球列 對稱聯繫組合精度檢定。本量測裝置由水平迴轉軸（1 2 )可以實現360度迴轉，由迴轉主軸在底座（1 1 )内上 下移動，以及垂直迴轉定位板（1 3 )可使球列板（2) 垂直平面内任正負90度旋轉。本裝置整個量測過程是由電 腦按預先設置的程序控制伺服馬達（3 1 )驅動，實現整 個量測過程的自動化。 上所述，當知本發明具有新穎性，且本發明未見之於 任何刊物，當符合專利法第2 1、2 2條之規定。 唯以上所述者，僅為本發明之一較佳實施例而已，當 不能以之限定本發明之範圍。即大凡依本發明申請專利範 圍所作之均等變化與修飾，皆應仍屬本發明專利涵蓋之範 圍内。 096132906 1003156968-0 1345625 100. B. OB ' 100年05月04日修正替換頁 【圖式簡單說明】 第一圖：本發明之外觀示意圖 第二圖：本發明之原理圖 第三圖：本發明之標準球心距標定原理示意圖 第四圖：本發明之實體校正照相示意圖 【主要元件符號說明】 1 支撐座 1 1 底座 1 2 水平迴轉轴 1 3 垂直迴轉定位板 2 球列板 2 1 標準球 3 自動驅動裝置 3 1 伺服馬達 3 2 滾珠螺桿組 3 3 滑軌 4 雷射頭 5 參考鏡 6 靶鏡 7 電感測微儀 8 工作台 096132906 1003156968-0 10* I - May 4, 190, revised replacement page γ 100· 5. QK _ IX, invention description: [Technical field of invention] Modern machinery manufacturing and processing industry is more sophisticated, fast, automated and efficient The development of the three-dimensional coordinate measuring machine is a large-scale precision intelligent measuring instrument designed to meet this demand. It has been widely used in mechanical manufacturing, scientific instrument manufacturing, electronics industry, automotive industry, and aerospace and defense. Various sectors such as industry have broad development and application prospects. However, the three-dimensional coordinate measuring machine and precision machine tool used in the current industry, which are inefficient, complicated and costly, have limited its promotion and application to a certain extent, especially the use of small and medium-sized enterprises with a shortage of funds. More affected. [Prior Art] At present, the accuracy correction work for the three-dimensional coordinate measuring machine at home and abroad is roughly divided into two types: one is to use the high-precision instrument measurement calibration program to complete the calibration work. The instruments used usually include dual (frequency laser interferometer, automatic photoelectric collimator, inductive micrometer, square ruler, zero-level flat ruler, etc. The advantage of this method is that the calibration result is high precision and reliability is high. The disadvantage is that the measurement instrument and the measurement personnel have higher technical requirements, and the calibration work is time-consuming and laborious. For most coordinate measurement machine users, the equipment and the periodic calibration cost are very high. The second correction method is Calibration of the coordinate measuring machine using a standard device, which is accomplished by measuring the standard with a coordinate measuring machine such as a precision block gauge, a step gauge, a ball end rod, a ball plate or a ball cone; Convenient, fast and suitable for general users, but the calibration work does not comply with the international standard 5 096132906 1003156968-0 1345625 -------- ·, May 4, 100 revised the replacement page _360-2 specification And the reliability of the standard calibration results 'standards must always carry out the qualification test. The letter correction method has its own advantages' but their shortcomings are that the calibration work is complicated and the instrument is calibrated Responsibility, the cost of correction is high and the correction = 2 thus limits the promotion and use of the three-dimensional measuring machine. Therefore, in the case of surface + target, the calibration of the coordinate machine is not mature, and new calibration methods and correction devices are urgently needed. Realize the reliable, convenient, fast and low-cost calibration of the coordinate measuring machine. 1More [Summary] In view of the current quaternary coordinate measuring machine, the inspection is complicated and (4) the turning degree ^ positive verification method is stored (4) the inspection is complicated and the customs clearance & equipment is expensive and other shortcomings, this issued a new method to correct the accuracy of the three-dimensional coordinate measuring machine - - Wei ball column symmetrical contact combination automatic detection calibration method, designed - type = automatic space coordinate precision measurement calibration instrument This creation has the following advantages: 1 · According to the measurement principle, it is only necessary to accurately measure the condition τ of any pair on the ball column. 'The symmetrical combination comparison measurement is performed by the measuring device, and the measured value is measured by the measuring machine'. The measured three-dimensional coordinate tester can be obtained (see the first figure), and the present invention uses a high-precision ball screw dry (3 2 ) and a bribe motor (3 1 ) to drive the ball row plate (2). Use the computer to control the servo motor (31), [please refer to the second figure] by pre-pressing 2 programs, where 〇~20 is the calibration point column, the cloth is called the ball column, and the month block is moved according to a certain standard interval to realize the automation amount.测6 柯 096132906 1003156968-0 U45625 1 牟〇 牟〇 牟〇 牟〇 萏 correction replacement page by the probe and each standard ball touch test, get the measurement results. 3 · adjust the horizontal rotary axis (丄 2) and vertical rotary positioning plate ( The work β is measured at two different positions according to the program in the second figure above, and the position error in the measurement space of the coordinate measuring machine can be obtained, and then the data of the coordinate measuring machine can be obtained, and the geometric structure of the coordinate measuring machine can be obtained. 2 误差 误差 此 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 . 4. The invention only needs to use a universal high-precision measuring instrument such as a standard block gauge to perform real-time detection and calibration on any pair of ball center distances before use, and if necessary, a laser interferometer can be used. Refer to the third figure], enter the reference mirror (6) through the instrument laser head (5) and then enter the dry mirror (7) and the standard ball (2 1 ) and the inductance micrometer (8), you can get = ball plate Standard amount. Therefore, the device does not require long-term stability of the detecting device, nor does it require a fresh (single) device to be compared. 5 · The measuring device is low in cost, large in detection and correction range, and lightweight. It is easy to carry and can be used for testing and calibration of a wide range of precision CNC machines. [Embodiment] First, [please refer to the figure], this creation mainly includes the branch seat (1), the ball board (2), and the automatic driving device (3), wherein the support base (1) includes The base (11), the horizontal rotary axis u 2, and the vertical rotary positioning plate (13). The base (11) can be bolted at any position on the measuring machine platform according to requirements. · Level 2) Fastened by screw to the base (1 i ) bushing fy, or the bushing is evil 096132.906 1003156968-0 1345625 On the 4th of April, the correction page is adjusted to meet the accuracy of the measuring machine at any position; the vertical rotation is fastened by screws to the upper end of the horizontal rotary axis (ι 2), or 90 degrees in the vertical plane. Turn. The ball row plate (2) is equidistantly disposed on the ball row plate (2) with a diameter phase ^ standard ball (21), and the ball pitch is 2 turns, wherein the distance is calibrated as a standard amount. The automatic drive unit (3) is installed on the support bracket motor (3 U, precision ball screw set (3 2), high precision; 〃, up (3 1) and precision ball screw machine in the === moving system, through The connecting rod drives the ball column board (the programmed program realizes automatic movement. The original hand-in-the-automatic space temple sounds are selected by Shi Zheng, Bu Yan _ standard precision measuring instrument, correcting the actual:: [= third figure and Figure 4: First fix the creation to the measurement == 2 Γ [please refer to the first figure], the ball column (2) as 俨::\ 1 ) constitutes five pitches, and requires a standard spacing 卩 to get other High-precision quantity and fruit, the quasi-pitch is determined by any method to obtain the standard deviation of the return accuracy. Also, the calibration is performed with a fresh block gauge and a high-precision measuring device. The spherical ball at both ends of the standard ball = (2) On the slide rail (33) according to the second figure = plate (2) movement _ job 'measured space ugly _ measurement error. Ball column board (2) by servo motor (3 丄) and ball screw set (32 ), slide rail (33). Automatic _' 096132906 1003156368-0 1345625 it0 year 03⁄4 * month correction replacement page micro-drive positioning accuracy is 1W, The structural principle can realize the one-dimensional spherical symmetry connection combination precision verification. The measuring device can realize 360-degree rotation by the horizontal rotary axis (1 2 ), and the vertical rotation of the rotary main shaft in the base (1 1 ) and vertical rotation positioning The plate (1 3 ) can rotate the ball plate (2) in both vertical and negative 90 degrees. The whole measurement process of the device is driven by the computer to control the servo motor (3 1 ) according to a preset program to realize the whole measurement process. Automation, as described above, the invention is novel, and the invention is not found in any publication, and is in compliance with the provisions of Articles 21 and 22 of the Patent Law. A preferred embodiment is not intended to limit the scope of the invention, that is, the equivalent variations and modifications of the scope of the invention should still be within the scope of the invention. 096132906 1003156968-0 1345625 100 B. OB 'May 04, 2014 Correction Replacement Page [Simple Description of the Drawing] First Picture: Appearance Schematic of the Invention Second Picture: Schematic of the Invention Third Picture: Standard Ball Center of the Invention Schematic diagram of calibration principle Fourth diagram: Schematic diagram of entity correction photography of the present invention [Description of main components] 1 Support base 1 1 Base 1 2 Horizontal rotary axis 1 3 Vertical rotary positioning plate 2 Ball column 2 1 Standard ball 3 Automatic drive device 3 1 Servo motor 3 2 Ball screw set 3 3 Slide rail 4 Laser head 5 Reference mirror 6 Target mirror 7 Inductance micrometer 8 Workbench 096132906 1003156968-0 10