TWI272371B - Multipoint thickness measurement system - Google Patents

Abstract

A multipoint thickness measurement system is provided to reduce the difference about the sensitivity for radiation of an ionization chamber in the width direction and to accurately measure the thickness of a board. An ionization chamber (5) is arranged in a detecting section (2) and turned around in the clockwise or counterclockwise direction in relation to the direction in which an object (4) to be measured flows. Thereby, a low sensitive region for the radiation existing in conventional arrangement of the ionization chamber is eliminated, and the measurement of the object to be measured is carried out continuously and accurately in the width direction.

Description

1272371 A7 B?

V. INSTRUCTION DESCRIPTION OF THE INVENTION [Background of the Invention and Technical Field] The use of radiation to measure the thickness of an object to be measured by a multi-point thickness gauge contact method other than the present invention [Prior Art] In recent years, due to the rolling in the steel industry Yuyugu, with the need to control the shape of the η# roll, is required to have a plate shape measuring device that is more suitable for the control system. The thickness measurement in the nine-degree direction of the board is ^ ^. ^ t 疋 疋 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知In the :::: occasion, in addition to the scanning type thickness gauge, the center of the measuring board is introduced, and the tenth is used to make correction based on the obtained data to obtain the shape of the board 0: measuring the thickness at multiple points Referring to Fig. 15, a horizontal distance is left and left in the horizontal direction of the plate-shaped object 4 to be placed horizontally, and the detector 3 is disposed above the sacrificial scoop. : Out of 2, the signal is sent to the thickness Actuator 7. Detection unit 2: The production state 3 is fixed in the mouth frame in the detection portion 2, and the ionization chambers 5 of the cartridge are arranged in parallel in the width direction of the object 2 to be measured. Although the fan-shaped radiation output from the generator 3 is known, the shape of the ionization chamber 5 is cylindrical, and the sensitivity of the radiation at the center portion and the edge portion is greatly different. For this, further to FIGS. 16 to 18 Fig. 16 is a perspective view showing the positional relationship between the ionization chamber 5 and the object to be measured 4. The fan-shaped radiation outputted from the generator 3 is indicated by a broken line. Fig. 17 shows the AA seen from the directly above the ionization chamber 5. , view. Ionization box 5, such as X 297 mm) Treasurer 1272371

As shown in Fig. 17, the objects to be measured 4 are arranged in parallel. Since the edge portion of the ionization chamber 5 is less sensitive than the center portion, it is difficult to detect a significant point (defect) of the object 4 to be measured. Fig. 18 shows the sensitivity distribution when the ionization chamber 5 faces the objects 4 to be aligned in parallel. As shown in Fig. 18, since the sensitivity of the ionization chamber 5 is low, there is a thickness value in which the insensitivity region of the thickness cannot be measured with high precision and the continuity in the width direction cannot be obtained. In addition, the edge portion is increased in demand for a device capable of measuring with high resolution and high precision, but in the previous multi-point thickness gauge, in the field of low sensitivity to radiation existing between the ionization chamber and the ionization chamber ( Hereinafter, it is called a dead zone), high-precision measurement cannot be performed, and it is difficult to obtain a continuous edge shape. [Problem to be Solved by the Invention] - As described above, the thickness of the spot-measuring thickness gauge at the measurement position is converted to the plate thickness by the average of the sum of the amounts of radiation incident in the direction of the ionization phase, but because of ionization Since the box is cylindrical, the center portion has the highest sensitivity to radiation, and there is a so-called sensitivity that is lower as it approaches the edge. For this reason, when the number of measurement points is exactly the insensitive area, the height of the ionization box becomes a so-called insensitive area to the entire area. For this reason, it is sensitive at this position: it becomes remarkably lowered, and when measuring the thickness of the width direction of the object to be measured, there is a place where measurement is impossible. In addition, when the thickness of the position at any distance is measured from the edge portion of the object to be measured, the external device such as the width meter will measure the width of the object.

A7 B7 1272371 V. Description of invention (3) Degree value input; #, 异器' Although the amount of snakes of the measured object is combined, the multi-point thickness gauge is moved by moving the drive 6 to measure, but the trolley moves Measurement to the target position cannot be performed until the target position. On the other hand, when the ionization chambers are arranged adjacent to each other, since the scattering lines of the adjacent ionization chambers are incident on the ionization chamber, there is a fear that the accuracy of the edge portion is lowered and the decomposition ability is lowered, which adversely affects the measurement results. The present invention has been made in view of the above circumstances, and its object is to provide a multi-point thickness gauge capable of having a better visibility direction measurement while reducing the difference in sensitivity to radiation due to a measurement position. [Means for Solving the Problem] In order to achieve the above object, the invention of claim i is characterized in that it has a radiation source and an ionization chamber, and has a detection means for obtaining and emitting radiation from a radiation source, An output signal related to the intensity of the radiation incident through the object to be measured; and an arithmetic means for calculating the thickness of the object to be measured by an output signal of the detecting means, and causing the ionization box to face the object to be measured The flow direction is arranged by rotating at an arbitrary angle. According to the invention of the third aspect of the patent application, it is possible to eliminate the portion of the dead zone existing in the previous ionization chamber configuration, and to measure the width direction of the object to be measured continuously and with high precision. In the invention of claim 2, the multi-point thickness measuring instrument according to the first aspect of the patent application, wherein the arithmetic means is input to a thickness value measured by means for measuring the thickness of the object to be measured, The edge position or the center position of the above-mentioned object to be measured; and can determine -6-

1272371

OBJECTS OF THE INVENTION (The thickness of the measured object calculated by the output signal is the position of the edge of the object to be measured, or the position of the distance from the center of the center of the handle. The above measured value is detected: the edge == means is input from the edge position of the object, and the number 'calculates the operation of the measured output signal;;::: off the position by the above detection means. The term of the distance from the edge position of the above-mentioned object to be measured: =!, the invention of the fourth item, according to the scope of the patent application, the external measure, wherein the above-mentioned operation means is input from the center (four) amount, and the above-mentioned The center position of the object to be measured is sufficient to determine the position of the edge position of the object to be measured from the thickness calculated by the output signal of the above-described detection means. The calculation of the patent quantity == thickness meter] wherein the above-mentioned ionization box is arranged in a specific range position including the target "丨1"; the above calculation means is: means for measuring the width of the upper one, Is to detect the edge of the object to be measured 4 or the output signal from the external device is input, to obtain the measurable amount of the above measured, and based on the thickness value of the majority of the measurement position for π out The thickness between the measurement positions is calculated by the above interpolation function, and the thickness value of the target measurement position meander deviation from the position is obtained. From the invention according to the fifth aspect of the patent application, even if the object measurement position of the object to be measured deviates In the case of the invention of claim 6, the invention of claim 6 is based on the scope of the patent application No. 1272371 A7 B7. 5. Description of the invention (5 items of multi-point thickness measurement, wherein the above-mentioned electric system is From the side of the cylinder: the structure of the radiation; and the value of the dead zone obtained by multiplying the total length of the ionization box and the thickness of the side wall of the ionization box by the safety ratio is determined by the opposite object The flow direction, the above-mentioned insensitive area will disappear the rotation angle of the above-mentioned ionization box. About the application of the scope of the seventh item of the eve of the law, according to the patent application range of the first two shots The above-mentioned ionization chamber is a structure from the side of the cylinder: radiation; and the total length of the ionization chamber is used, and the ratio of the gas volume to the inner diameter of the tank and the center of the ionization chamber is used. The value of the sensitization zone determines the rotation angle of the ionization chamber in which the insensitive area disappears in the flow direction of the object to be measured. == The invention of the eighth item, according to the scope of the patent application and the gas fullness coefficient And the insensitivity is obtained, 2:; the flow direction of the two objects, the above-mentioned insensitive area will disappear, the upper part is the rotation angle of the prime phase. -9! : #^ ^ , i I, S ,, between the boxes On the eve of the insertion of the bolster, the end of the meter, in the adjacent two ionization: two = the invention of the ninth patent scope, "without the influence of the scattered line, can carry out the edge without the cargo Reduced, decomposed ability, low-frequency, and so on. in,,. The main influence of the bad influence

1272371 A7 ------- B7 V. EMBODIMENT (6) [Embodiment of the Invention] Hereinafter, the embodiment of the present invention will be described with reference to the drawings, and the following figures are included, including the previous examples. In the figures, the same symbol indicates that it is the same part or the corresponding part. & μ (Embodiment of First Example) An embodiment of the third embodiment of the present invention will be described with reference to Figs. 1 to 4 . In Fig. 1, the width direction movement operation of the lip frame of the thickness gauge moving device 6 by multi-point measurement can be performed by measuring the thickness of the plate-shaped object 4 to be measured. The generator 3 is fixed below the frame i, and the detecting portion 2 is fixed above the frame 1. Further, the ionization tank 5 is arranged in the detecting portion 2. The radiation output from the generator 3 is incident on the ionization chamber $ through the object 4 to be measured. The incident radiation is ionized by the gas enclosed in the ionization chamber 5 by photoelectric absorption, Compton scattering, electron pair generation, etc., and the electric charge generated at this time is pulled by the electrode by the electric field added between the electrodes, and the electrode is further re-electrode Recombined and restored to a neutral original +. The current that has flowed out at this time becomes an output signal of the detecting unit 2, and is sent to the thickness calculator 7 after the A/D conversion, and converted into the thickness value of the object 4 to be measured. In the case of the predecessor, as described above, since the ionization chamber 5 is disposed in parallel to the object to be measured 4, the dead zone is periodically present, and the continuous thickness value in the width direction cannot be obtained. Therefore, in this embodiment, the arrangement of the ionization tank 5 is changed, and the dead zone is removed. Fig. 2 is a perspective view showing the positional relationship between the ionization chamber 5 and the object to be measured 4 which are not in the embodiment. The radiation on the sector output by the generator 3 is indicated by a broken line. Fig. 3 is a view showing the eight-eighth, square -9 - 1272371 A7 ___________ _____ B7 five, hair day - ΓΤ - - ^ - - ~ one ~ - view seen from directly above the ionization box 5. As shown in Fig. 3, the arrangement of the ionization chambers 5 is arranged obliquely to the objects 4 to be measured. In this way, the ionization chamber 5 is arranged in a state of being viewed from directly above the object to be measured 4 in a state of being rotated at an arbitrary angle with respect to the flow direction of the object to be measured 4, the clock f or the counterclockwise direction. It is possible to eliminate the insensitive area existing in the configuration of the previous ionization box & = continuously and extremely accurately measure the width direction of the object 4 to be measured. FIG. 4 shows that the ionization chamber 5 is facing the The flow direction of the measuring object 4 is a sensitivity distribution of the embodiment which is rotated in the clock direction or the counterclockwise direction. It is very clear from the figure that the sensitivity of the direction of the width of the plate 4 of the object to be measured can be obtained to a certain extent or more. Therefore, when the object 4 to be measured has a significant point (defect) locally, it can be easily detected. (Embodiment of the second example) Fig. 5 is a configuration diagram showing an embodiment of the second example of the present invention. In the thickness calculation unit 7 of the embodiment, the thickness of the object 4 is calculated by the output signal of the detecting unit 2, and the plate width measured by the width meter 8 is calculated as in the case of the embodiment of the first example. The value is input to the thickness operator 7, and the board edge position of the object 4 to be measured or the center position of the board is calculated. Therefore, in the arithmetic unit 7, the thickness calculated by the output signal of the detecting unit 2 can determine the position of the board edge of the object 4 or the position of the board center position. (Embodiment of the third example) Fig. 6 is a configuration diagram showing an embodiment of the third example of the present invention. In the implementation -10 _ Cai Jian Jia (CNS) A4 specifications (21〇 X 297 mm) ""~~"" 1272371

(Description of the Invention) In the case of the embodiment of the first embodiment, the thickness of the object to be measured 4 is calculated by the output signal of the detecting unit 2, and the edge sensor 9 is detected. The signal input thickness operator 7 measures the position of the edge of the plate 4 of the object 4. Therefore, the thickness of the object to be measured 4 can be determined by the weight of the object to be measured 4 Position 2 of the position of the edge position of the board (Embodiment of the fourth example) Fig. 7 is a configuration diagram showing an embodiment of the fourth example of the present invention. The implementation of the shape difference device 7 and the implementation of the i-th example In the same manner, the output signal of the detection unit 2 calculates the thickness of the object 4 to be measured, and the thickness of the object is changed by the value of the deviation of the platen heart rate by the high-order computer or the like. In this case, the operator 7 can determine the position from the plate center position of the object 4 by the thickness calculated by the output signal of the detecting unit 2. (Embodiment 5) FIG. 8 Fig. 10 is a view for explaining an embodiment of a fifth example of the present invention. In order to measure the thickness of the distance from the edge of the object 4 by an arbitrary distance, a multi-point thickness gauge of the configuration of the embodiment of the first embodiment is used. The multi-point thickness gauge is used for measurement. The edge of the object 4 is separated from the target position of an arbitrary distance, and the ionization box is arranged in the thickness operator 7 at a position of a specific range centering on the position, and the output signal of the detecting unit 2 is outputted. Find the plate thickness value m, -11 of the majority of the measurement position in the specific range near the target measurement position - This paper size applies to the Chinese National Standard (CNS) A4 specification (21〇X 297 mm) 1272371

V. Description of the invention (9 112, 113, in addition, one 曰, one error is obtained from the indicator 8 or the edge position is obtained from the output signal of the edge sensor 9, 4 gangs are always, as shown in Fig. 9 Plate thickness

111, 112, 113, drawn to the position of the seat A * A t from the respective edge position to the measurement position distance, these will be the board; the measurement results are connected and graphically interpolated by the interpolation function 114. The target measurement position 詈g is set, and the 丄 is set, even if the position is between the actual measurement positions, the 'interpolation letter' U U Naqishan number 114, which is enough to get away from the edge position by any distance 115 The target measurement position is the plate thickness value 丨丨6. Again and again, (4) when the amount of material 4 passes through, almost all of them are snaked along the width direction. The thickness of the plate, or the edge position of the edge sensor 9, or the external device H), or an output signal indicating the thickness of the center deviation (snake amount) is input to the thickness operator 7, and the operation is performed. The amount of snakes of the object 4 to be measured. Then, the plate thickness measurement results near the target measurement position are combined by the interpolation function 20, as shown in Fig. 1A. That is, the plate thickness value 17 near the target measurement position and the position plate thickness values 18, 19 in the vicinity thereof are used for the interpolation function 20. When the plate deviation amount, i.e., the meandering amount 21, is calculated from the edge position obtained from the width meter 8 or the like, the plate thickness value 22 is obtained from the interpolation function 20. Since this value is used as the plate thickness value of the target measurement position, the plate thickness can be continuously measured even when the object 4 is deviated from the target measurement position. (Embodiment of the sixth embodiment) Figs. 11 to 13 are views for explaining a sixth embodiment of the present invention. The radiation sensitivity to the ionization chamber 5 is proportional to the amount of gas in the ionization chamber 5. Since the amount of gas is small at the edge portion of the ionization chamber 5, the sensitivity is lowered, and the sensitivity of the side wall portion of the ionization chamber 5 to the radiation becomes disappeared. -12- This paper scale applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm) 1272371

In this case, the TJ is applied to the ridge of the shape of the thunder -... for the incident radiation from the side of the cylinder: as shown by the second r1, facing the flow direction of the object to be measured, 4 the ionization box 5 where the non-sensitized area is to disappear The angle of rotation α.疋 * : First, the material is determined by the "degree" of the rotation angle α, and the length, and the thickness (thickness) of the side wall of the ionization box are multiplied by the value of the f sensitive area of the safety ratio. Material, the thickness t of the full length of the ionization box 5 multiplied by the safety ratio 丫 is not sensitive: when the value is T (= t •), the flow side of the object 4 is not sensitive The rotation angle α of the ionization chamber 5 to be eliminated in the region is obtained by α = tan - (D / L). The safety ratio γ is an arbitrary constant (for example, 2). Next, as the second method of determining the rotation angle α, The total length of the ionization: and the value of the dead zone determined for the inner diameter of the ionization chamber and the gas amount at the center of the ionization chamber can be used. As shown in Fig. 12, for the center portion of the ionization II 5 The position where the gas amount ratio becomes e is regarded as the position which becomes the boundary of the dead zone 11. The position on the horizontal line of the center portion (10) is regarded as B, that is, when the position B treats the inner diameter of the ionization chamber as 2r, from the position B When the distance to the position c of the inner wall above is ", the position of ii=c·r is changed. The position of the inner wall above the center portion is A, and the position from the center portion to the position B is shown in the figure. The distance is 〖,,, the distance from the position B to the position D of the inner wall in the horizontal direction is t, 〇A and 〇 The angle formed by c is taken as /3. Here, although i1=c · r, from the figure, since it becomes li=rc〇s, c=cos is cold, and therefore, the gas amount ratio for the center of the ionization box Once given, you can get the angle of 10,000. Again, from the figure, because -13- 1272371 A7 B7 five, the invention description (μ t = rsln々, so the value of the insensitive zone 11 can be as follows The formula is obtained. (Formula 1) T = t+t' = t + (rt") == t + r ( 1- sin β ) Then, the value τ of the insensitive zone 求 thus obtained and the ionization chamber 5 The full length 2L' can be obtained by looking at the flow direction of the object 4 and the ionization phase 5 rotation angle α at which the insensitive area is to disappear as α: tan々T/L. Further, for the center of the ionization box The gas amount ratio e can be given an arbitrary f 0.5). Further, as the third method, the entire length of the ionization chamber can be used, and the ionization phase is derived from the gas filling factor (the effective diameter coefficient of gas filling). The insensitive zone value is obtained. When the outer diameter of the ionization chamber is regarded as 2R, as shown in Fig. 13, the horizontal line passing through the center of the ionization chamber 5 From the distance of the middle mouth F ,, the value r which is half the value of the outer diameter of the ionization box multiplied by the value of the gas fullness coefficient c' is regarded as the boundary of the insensitive area ,, and the dead zone is obtained as the following formula 11 The value T. (Formula 2) D = R - cfR ^ R (1 - cf) ..., the value L of the dead zone 11 thus obtained and the full length of the ionization chamber 5 jL " against the object to be measured 4 The flow direction, the ionization phase 5 to be disappeared in the insensitive zone, can be obtained as α =. Furthermore, the gas is filled with a coefficient c, which can give an arbitrary constant (for example, _______ -14 - Recording fault (21 () X297 Gongdong) -- 1272371 A7

value). (Embodiment of the seventh embodiment) Fig. 14 is a view for explaining an embodiment of the seventh example of the present invention. In the first to sixth embodiments, when a plurality of the ionization chambers 5 are arranged adjacent to each other, the ionization chamber 5 is incident on the scattering line 13 from the adjacent ionization chamber 5 in addition to the radiation 14 emitted from the generator 3. The measurement results such as lowering the accuracy of the edge portion and lowering the decomposition ability have an adverse effect. Therefore, in this embodiment, the spacer 12 is disposed between the adjacent ionization boxes 5 in order to reduce the influence of such scattered rays 13. The thickness of the backing plate 12 is such a thickness as to be sufficient to absorb the scattered rays, and the length and height of the backing plate 12 are respectively equal to or exceed the length and height of the ionization chamber 5. ° Further, the material of the backing plate 12 can be made of stainless steel (for example, SUS304), but it is not limited to the material that can absorb the scattered rays. For example, tungsten, lead, or the like can also be used. In addition, it is also possible to make the thickness of the material having a large absorption coefficient of the line thin. Further, when the seesaw 12 is used, the angle of rotation of the ionization chamber 5 in which the insensitive area is to be lost is directed to the flow direction of the object 4, and when the thickness of the backing plate 12 is used, When the case of the sixth embodiment is not used, it is possible to obtain ^:, = 匕 11-1{(1^〇.5^/1^.) [Effect of the invention] According to the present invention, according to the present invention, by arranging the arrangement of the ionization chamber against the flow direction of the object to be measured, it is directed toward the clock direction or the counterclockwise side -15-

1272371 A7 B7 V. OBJECTS OF THE INVENTION (13) In the field of low-radiation sensitivity, it is possible to obtain a multi-point thickness gauge with less sensitivity change in the measurement field, and a significant point (defect) locally in the object to be measured. This can be easily detected. Further, by applying the meandering amount from the input signal, since this is applied to the function of interpolating the respective measurement positions, it is possible to continuously perform the vicinity of the target measurement position in accordance with the target measurement position deviation by the meandering of the object to be measured. measuring. [Brief Description of the Drawings] Fig. 1 is a front elevational view showing the configuration of a multi-point measuring thickness gauge according to a first embodiment of the present invention. Fig. 2 is a perspective view showing the arrangement of the ionization chambers of the first embodiment. Fig. 3 is a view showing the state of aa seen from directly above the ionization tank in Fig. 2. Fig. 4 is a graph showing the sensitivity distribution in the width direction of the ionization chamber in the first embodiment. Fig. 5 is a view showing a configuration of a multi-point measurement thickness of 50 in the second embodiment of the present invention. Fig. 6 is a view showing the configuration of a multi-point measuring thickness gauge according to a third embodiment of the present invention. Fig. 7 is a view showing the configuration of a multipoint measuring thickness gauge according to a fourth embodiment of the present invention. Fig. 8 is a view showing the configuration of a multi-point measuring thickness gauge according to a fifth embodiment of the present invention. Figure 9 is a view showing the target measurement position of the fifth embodiment in the actual measurement - 1 1272371 A7 -------------- B7 5, the description of the invention (14) A pattern obtained by interpolating the plate thickness value of the target measurement position at a certain time. Fig. 10 is a view showing a plate thickness value obtained by interpolating the target measurement position at the time of meandering of the object to be measured in the fifth embodiment. Fig. 11 is a view for explaining a method of determining the rotation angle of the ionization box according to the sixth embodiment of the present invention. Fig. 12 is a view for explaining a method of determining the rotation angle of the ionization chamber by using the ratio of the gas amount of the ionization chamber and the gas amount ratio at the center portion of the ionization chamber in the sixth embodiment of the present invention. Fig. 13 is a view for explaining a method of determining the rotation angle of the ionization chamber by using the outer diameter of the ionization chamber, the gas fullness coefficient, and the like in the embodiment of the sixth embodiment of the present invention. Fig. 14 is a view showing the configuration of a main portion of a multi-point measuring thickness meter according to a seventh embodiment of the present invention. Fig. 15 is a front elevational view showing the configuration of the previous example. Fig. 16 is a perspective view showing the arrangement of the ionization tanks of the previous examples. Fig. 17 is a view showing a view of a view of Fig. 16 as seen from directly above the ionization chamber. Fig. 18 is a graph showing the sensitivity distribution with respect to the width direction of the ionization tank of the previous example. [Description of Symbols] 1··· Mouth Frame 2.. Checkout Section 3.. Generators 4..Measured Objects -17-

A7 B7 1272371 V. Description of invention (15) 5.. Ionization box 6... Multi-point measurement thick total mobile device 7. Thickness operator 8.. Width meter 9.. Edge sensor 10.. External device 11.. Insensitive area 12... Backing plate 13.. Scattering line 14.. . Radiation -18- This paper scale applies to Chinese National Standard (CNS) A4 specification (210 X 297 mm)

Claims (1)

1272 more 7〇ί i 〖03292 patent application Chinese application patent scope replacement (June 95) Patent application garden 1. A multi-point measurement thickness meter 'characterized to have: radiation source; most ionization boxes, The system 蚣+你 a , , 1 /, the amount of incident radiation, that is, the intensity-related output signal, and has a cylindrical shape; the frame 'fixes the radiation source and the ionization chamber to make the object to be measured The plate moves therebetween, and the radiation emitted from the ray source passes through the object to be measured and is incident on the ionization chamber; and the calculation means calculates the thickness of the object to be measured by the output signal of the ionization chamber; The ionization chamber includes an entrance window for incident radiation from a side surface of the cylinder, and the ionization chamber is arranged to rotate in an angular direction other than the parallel and right angles with respect to the moving direction of the object to be measured. 2. The multi-point thickness gauge according to item i of the patent application scope, wherein the calculation means is input with a thickness value measured by means for measuring the thickness of the object to be measured, and the edge position of the object to be measured is different. Or the center position; and it is possible to determine the position of the object to be measured from the thickness calculated by the output signal of the ionization box, or the distance from the center position. 3. The multi-point thickness measuring instrument according to the first aspect of the patent application, wherein the above-mentioned operator & ' is input with an output signal from a means for detecting the edge of the object to be measured, and an edge position of the object to be measured is calculated, and It is possible to determine the distance from the edge position of the object to be measured whose thickness is calculated by the above-described arithmetic means. 4. According to the multi-point measurement thickness meter of the scope of the patent application, the above 76,582-950627.doc paper scale applies to the Chinese National Standard (CNS) eight 4 specifications (21QX297 mm) 1272371 i Π", I apply for a patent The calculation method of the garden is: the center deviation of the object from the external device is input, and the center position of the object is measured, and the thickness of the object calculated by the output signal of the ionization box can be determined. The position of the object from the center position. 5. According to the patent application section of the patent flute 1 s ♦ 〇 multi-point measurement thickness meter, wherein the above: phase separation, is arranged in the target measurement position (4) calculation means is ... measuring the width of the above measured object The means, or the means for detecting the edge of the object to be measured, or the output signal from the external device, is used.広彳〇唬 is input, and the meandering value of the above-mentioned object to be measured is determined, and the thickness between the positions to be measured is determined based on the thickness values of the plurality of measurement positions, and the interpolation function is used to calculate The above target measures the thickness value of the position where the meandering amount deviates from the position. [6] The multi-point measuring thickness meter according to the scope of the patent application, wherein the ionization chamber is a structure in which radiation is incident from a side surface of the cylinder; and the total length of the ionization chamber is used, and the thickness of the side wall of the ionization chamber is multiplied. The value of the dead zone obtained by the safety ratio determines the angle of rotation of the ionization chamber that is opposite to the flow direction of the above-mentioned quantity, and the dead zone disappears. The multi-point measuring thickness meter according to the scope of the patent application, wherein the ionization chamber is a structure in which radiation is incident from a side surface of the cylinder; and the entire length of the ionization chamber is utilized, and the inner diameter of the ionization chamber is utilized. The value of the dead zone obtained by the ratio of the gas amount in the center portion of the ionization chamber determines the rotation angle of the ionization chamber in which the flow direction of the object to be measured is lost. -2. 76852-950627.doc This paper scale applies to China National Standard (CNS) A4 specification (210 X 297 mm) A8 B8 C8 D8 1272371 VI. Patent application i 8 · According to the first paragraph of the patent application scope The thickness gauge is a structure in which the ionization chamber is configured to receive radiation from a side surface of the cylinder; and the total length of the ionization chamber and the value of the dead zone obtained by using the outer diameter of the ionization chamber and the gas fullness coefficient are determined. The rotation angle of the ionization chamber in which the above-mentioned insensitive area disappears against the flow direction of the object to be measured. 9. A multi-point thickness gauge according to any one of the applications of the patent application, wherein a spacer is interposed between two adjacent ionization chambers. 76852-950627.doc This paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm)