TWI268339B - Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter - Google Patents

Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter

Info

Publication number
TWI268339B
TWI268339B TW094117011A TW94117011A TWI268339B TW I268339 B TWI268339 B TW I268339B TW 094117011 A TW094117011 A TW 094117011A TW 94117011 A TW94117011 A TW 94117011A TW I268339 B TWI268339 B TW I268339B
Authority
TW
Taiwan
Prior art keywords
displacement
internal diameter
measuring device
wavelength
aforementioned
Prior art date
Application number
TW094117011A
Other languages
Chinese (zh)
Other versions
TW200641325A (en
Inventor
Hong-Xi Cao
Jen-Chuen Liao
Ricky Hsu
Sheng-Jang Cheng
Ji-Bin Horng
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW094117011A priority Critical patent/TWI268339B/en
Priority to US11/439,228 priority patent/US7567350B2/en
Publication of TW200641325A publication Critical patent/TW200641325A/en
Application granted granted Critical
Publication of TWI268339B publication Critical patent/TWI268339B/en
Priority to US12/184,283 priority patent/US7663767B2/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509Color coding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

A displacement measuring device and method, an internal diameter measuring device is presented to measure the displacement, surface profile, surface roughness or an internal diameter of a hollow cylinder for a moving body. The measuring device at least includes a lighting component used to provide the light source, a light dispersion component used to receive the output lights of the aforementioned lighting component and focus the lights with different wavelengths respectively onto the focal points with focuses of different distance, and wavelength measuring module, where when the aforementioned focal points are moving in the region of the aforementioned focus dispersion, the lights with different wavelength distribution will be reflected or scattered. And after the wavelength is measured by the wavelength measuring module, the displacement of the measured body can be obtained by use of the variance of the wavelength. Besides, if a reflection component is installed in the internal center of the aforementioned hollow cylinder, and the principle of the aforementioned displacement measuring device is used, the internal diameter of the hollow cylinder can be measured. Therefore, this invention uses the light dispersion component, the light reaction of a measured body and the wavelength measuring module to obtain the different wavelengths to reach the purpose of measuring the displacement and the internal diameter.
TW094117011A 2005-05-25 2005-05-25 Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter TWI268339B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW094117011A TWI268339B (en) 2005-05-25 2005-05-25 Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter
US11/439,228 US7567350B2 (en) 2005-05-25 2006-05-24 Apparatus and method for measuring displacement, surface profile and inner radius
US12/184,283 US7663767B2 (en) 2005-05-25 2008-08-01 Apparatus and method for measuring displacement, surface profile and inner radius

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094117011A TWI268339B (en) 2005-05-25 2005-05-25 Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter

Publications (2)

Publication Number Publication Date
TW200641325A TW200641325A (en) 2006-12-01
TWI268339B true TWI268339B (en) 2006-12-11

Family

ID=37462949

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117011A TWI268339B (en) 2005-05-25 2005-05-25 Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter

Country Status (2)

Country Link
US (2) US7567350B2 (en)
TW (1) TWI268339B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476427B (en) * 2013-01-14 2015-03-11 Sintai Optical Shenzhen Co Ltd Range finder

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7440120B2 (en) * 2006-06-27 2008-10-21 Barbara E. Parlour Internal and external measuring device
JP5242940B2 (en) 2007-04-24 2013-07-24 三鷹光器株式会社 Non-contact shape measuring device
TWI490444B (en) * 2009-01-23 2015-07-01 Univ Nat Taipei Technology Slit-scan microscopic system and method using the same
US8384890B2 (en) 2009-12-14 2013-02-26 CBC Engineers & Associates Ltd. Apparatus for measuring the inner surface of a culvert or other tunnel defining structure imbedded in the ground
TWI414817B (en) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology Linear chromatic confocal microscope system
DE102015111905B4 (en) * 2015-07-22 2018-06-28 Pepperl + Fuchs Gmbh Optoelectronic triangulation sensor and method of operating such
JP6839928B2 (en) * 2016-04-26 2021-03-10 株式会社三井ハイテック Measurement method for deformed laminated iron core
TWI666422B (en) * 2017-08-09 2019-07-21 億光電子工業股份有限公司 A displacement sensor device and object displacement measurement method
KR102655064B1 (en) * 2020-11-05 2024-04-09 세메스 주식회사 Distance measuring system and distance measuring method
CN116336953B (en) * 2023-05-30 2023-08-11 武汉工程大学 System and method for measuring radius and depth of perforation model

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663466A5 (en) * 1983-09-12 1987-12-15 Battelle Memorial Institute METHOD AND DEVICE FOR DETERMINING THE POSITION OF AN OBJECT IN RELATION TO A REFERENCE.
JPH0762913B2 (en) * 1984-08-17 1995-07-05 株式会社日立製作所 Automatic focus control method
JPH0652170B2 (en) 1986-02-25 1994-07-06 株式会社オカダ Optical imaging type non-contact position measuring device
JPH0652171B2 (en) 1987-02-10 1994-07-06 株式会社オカダ Optical non-contact position measuring device
GB2206690B (en) 1987-06-30 1991-12-11 Matsushita Electric Works Ltd Optically scanning displacement sensor
FR2626383B1 (en) * 1988-01-27 1991-10-25 Commissariat Energie Atomique EXTENDED FIELD SCAN AND DEPTH CONFOCAL OPTICAL MICROSCOPY AND DEVICES FOR CARRYING OUT THE METHOD
US4964727A (en) * 1988-11-23 1990-10-23 The Boeing Company Multi-track analog optical sensing system and method
JPH0743251B2 (en) 1992-06-19 1995-05-15 工業技術院長 Optical displacement meter
JP3206843B2 (en) * 1992-12-18 2001-09-10 株式会社小松製作所 3D image measurement device
US5608529A (en) * 1994-01-31 1997-03-04 Nikon Corporation Optical three-dimensional shape measuring apparatus
US5526338A (en) * 1995-03-10 1996-06-11 Yeda Research & Development Co. Ltd. Method and apparatus for storage and retrieval with multilayer optical disks
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
US6133986A (en) * 1996-02-28 2000-10-17 Johnson; Kenneth C. Microlens scanner for microlithography and wide-field confocal microscopy
DE19713362A1 (en) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Confocal microscopic arrangement
IL121267A0 (en) * 1997-07-09 1998-01-04 Yeda Res & Dev Method and device for determining the profile of an object
IL125659A (en) * 1998-08-05 2002-09-12 Cadent Ltd Method and apparatus for imaging three-dimensional structure
US6724489B2 (en) * 2000-09-22 2004-04-20 Daniel Freifeld Three dimensional scanning camera

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476427B (en) * 2013-01-14 2015-03-11 Sintai Optical Shenzhen Co Ltd Range finder

Also Published As

Publication number Publication date
US20080316502A1 (en) 2008-12-25
US20060268286A1 (en) 2006-11-30
US7567350B2 (en) 2009-07-28
TW200641325A (en) 2006-12-01
US7663767B2 (en) 2010-02-16

Similar Documents

Publication Publication Date Title
TWI268339B (en) Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter
WO2008129073A3 (en) Measuring arrangement and method for the three-dimensional measurement of an object
TW200617372A (en) Method and apparatus for angular-resolved spectroscopic lithography characterization
WO2009075103A1 (en) Moving body device, exposure device, pattern formation device, and device manufacturing method
WO2009120643A3 (en) Dimensional probe and methods of use
ATE553368T1 (en) DEVICE FOR DETERMINING THE DEW POINT TEMPERATURE OF A MEASUREMENT GAS
DE502006004474D1 (en) MEASURING DEVICE
WO2007046528A3 (en) Imprint apparatus, imprint method, and mold for imprint
ATE547745T1 (en) LIGHTING DEVICE AND IMAGE READING DEVICE
TW200739061A (en) Method and system for inspecting surfaces with improved light efficiency
WO2007144880A3 (en) System and method for measurement of biological parameters of a subject
DE602008000765D1 (en) Optical image measuring device
JP2005302036A5 (en)
TW200624860A (en) Systems and methods for measuring color and contrast in specular reflective devices
WO2008114471A1 (en) Film thickness measuring method, its apparatus, and manufacturing system for thin-film device
TW200951396A (en) Position measurement apparatus, position measurement method, and exposure apparatus
ATE426822T1 (en) DISTANCE METER
TWI263035B (en) Optical movement sensing module and its optical movement sensor
CN104596428B (en) White light gauge head based on Spectral Confocal and trigonometry principle
EP1213567A3 (en) Device and process for measurement of the spectral reflectance
TW200715217A (en) Coin detecting apparatus
EA201100067A1 (en) OPTICAL MEASURING DEVICE AND METHOD FOR CONDUCTING REFLECTIVE MEASUREMENTS
TW200736593A (en) Apparatus for measuring reflectance, method for measuring reflectance and method for manufacturing display panel
WO2008038223A3 (en) Apparatus for optical body analysis
SE0601726L (en) angle Measurements

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees