TWI230880B - Semiconductor dispatching integration system and method using the same to dispatch - Google Patents

Abstract

A semiconductor dispatching integration system includes a manufacture scheduling system for generating manufacture schedule and related evaluation result; a dispatching system for generating dispatching schedule and related evaluation result; an automatic transporting system for estimating the transport cost of each transporting route; and a rule base decision engine for determining the dispatching sequence and the corresponding machines for each batch based on the manufacture schedule plan, the dispatching plan and the transport cost calculated by the transporting system, wherein the rule base decision engine changes the decision condition by directly inserting or deleting rules without rebooting the rule base decision engine.

Description

1230880 V. Description of the invention (1) Field of invention… The present invention relates to semiconductor manufacturing and manufacturing management, and in particular, to a semiconductor production integration system and a method for dispatching work through it. BACKGROUND OF THE INVENTION For semiconductor production, due to the variety of foundry production types and process steps, the production schedule and dispatching of semiconductor wafer foundry have become important keys for production management. Generally speaking, the production schedule of the manufacturing plant (ScheduHng SyStem) mainly considers long-term dispatch plans, such as annually, semi-annually or quarterly. ίΪΪΪ 策 ί For several purposes ... increase the wafer soak of the manufacturing plant (, reduce the manufacturing time of each wafer in the manufacturing plant to reduce: the total amount of rate (H, rprocess, WIP), or increase the use of equipment (Tool utility), continuous maintenance of full capacity, etc. However, after the production schedule is formulated, batch conditions in the short-term conditions of each purine plant are not dispatched in real time; the production of 0 temples is based on multi-step manufacturing Procedures and multiple types of manufacturing =, = considerations related to semi-conductor manufacturing, in addition to the priority order of the batch, ^, each batch = the allocation between the amount of labor and the manufacturing process, the number of available machines P_ To the maximum. Because: two === not one is in full compliance with the production scheduling policy. For semiconductor foundry Wei, common _ ^ Zhongtong Che Gudou Fangjin Jin U 4 Mody from the standpoint is manufacturing In the management of the factory, there are production schedules and machine dispatching systems that independently produce production schedules and production batches. 0503-7433TWF; TSMC2001-1314 »peggy.ptd $ 5 pages

1230880 V. Description of the invention (2) The sent watch produced by the manufacturer will be evaluated to the manufacturing factory ", the production schedule is:, sent to work? Negotiation 'will cause difficulties in sending workers online. The superiors are based on the f generated by the scheduling system and the dispatching system. The actual dispatching is based on personal experience. However, this line, two = dispatching department decides dispatching Is subjective based on its own experience and the status of the manufacturing line. It is also difficult for manufacturing plants to internalize the decisions of online personnel into sequential factors as the basis for production management. Furthermore, the production scheduling system and dispatch system of semiconductor manufacturing plants, often :: root: the actual situation in the manufacturing plant Establishing different judgment rules and restrictive systems:? Production scheduling system, unified system, unified system " ^ Deleting the old system or new and new conditions all involve quite complicated processing. One = enter, and then re-run Compilation = system (reboot system) can complete the modification action. The manufacturer with huge manufacturing data is quite inconvenient and inflexible. 4. The process of manufacturing will move towards 12-leaf wafers, and as the area of wafers increases, Yue Zhong Increased, the wafer transport in the manual manufacturing plant must be replaced by an automated transportation system. Therefore, with the fully automated 12-inch wafer, 1 exhibition, the involvement of online personnel in dispatching must be reduced. Also = this β It is necessary to schedule the most appropriate dispatching order in advance to reduce the conflict between production schedule and batch dispatching, in order to avoid the condition of wafers in the automatic transportation system, the uncertain state of the brothers, and wasting manufacturing resources. Brief Description of the Invention of the Invention In order to solve the above problems, an object of the present invention is to provide a

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V. Description of the invention (3) ^ The dispatching integration system that integrates the general semiconductor production scheduling system and dispatching system :, dispatching: method '纟 Simultaneously evaluate the long-term production scheduling and short-term machine dispatching principle' to get the most Best dispatch suggestions. In order to improve the utilization efficiency of the machine, the second purpose of the invention is to =-a semiconductor dispatching integration system and dispatching method, which evaluates the automatic handling cost and replacement cost to achieve the best machine dispatching. Into. The other purpose of V and V # is to provide a rule base (semiconductor base, integrated system and dispatch method), which uses a rule base to regulate the system: it operates immediately after the update, and does not need to be heavy; Γ (reboot) the entire system to increase the efficiency and flexibility of system management. According to the present invention, a semiconductor sentry integrated system includes: a production scheduling system for generating miso, and an industrial system for generating dispatch Results of the work queue assessment;-the delivery system to estimate the results of each transportation path;-automatic warehouse relocation request, used to determine the transportation cost based on the calculation of the transportation system 该 ^ ^ Θ Dispatch work, and its *, the rule base decision engine: =; = sequence and corresponding machine engine.… Page restart (rule) the rule base decision is in a better case, the above system and automation Both the handling system and the production scheduling system, and the dispatching decision engine determine the general commercial system with the following formula, and the batch with the smallest rule is given priority: The cost of dispatching labor is 1230880.

V. Description of the invention (4) F = crs + c2 * D + c3 * T + c4 * C + c5 Among them, 8 is the production schedule, D is the dispatching schedule, and τ is the transportation system: the transportation cost, C is Estimated replacement cost of the handling system, cJ5 :: For immediate response, the number C3 of the automated handling system can be based on the handling record of the automated handling system. T or the constant variable D can determine each batch as follows: And the dispatch schedule D: kl * P + k2 * Q + k3 * M + k4 * R + k5 * 0, where P is the priority of the batch, q is the batch, and M is if the machine A set of processing capacity is required. The batch, time management, I? Helmet, and 疋 匕 meet the processing requirements of the group. R is the relevant condition of the machine, and kl-5 is a constant. Octa is limited in the above system, and the rule base decision engine further sets conditional restriction rules, such as: sudden machine conditions, (a). When the machine product f is lower than the established requirements, first ( monitor wafer); The two sm's are placed for more than a predetermined time, then the thermal machine is performed first. (C) · The batch can be carried out only when the photomask of S is on the machine. (d) & It can only be performed when the group processing capacity is set; etc. Steps: # ί Standard, a semiconductor dispatching method provided by the present invention includes the following steps: First, a priority order and a process requirement for a production batch are regularly generated. # 着 ， RECEPTION_ The machine wants KK cargo finger. According to the running requirements of the machine, only one group of workers was created: Cheng '. Twice, evaluate the required handling costs for each batch in the dispatch schedule. Finally, root &

1230880

泫 The production schedule, the dispatch schedule and the best running batch of each batch. The handling cost determines the machine. By integrating the production schedule and conditions above, the production schedule and dispatch can be avoided and the dispatch batches in the automated manufacturing plant can be further considered. Embodiment ^ = The various processes of scheduling and handling cost produce inconsistent results, and the handling cost is the best to produce a semiconductor dispatcher according to an embodiment of a semiconductor manufacturing plant according to FIG. 1 A detailed description of the present invention includes a production scheduling system 110 and a first system 130. The production scheduling system " 〇 is produced according to the production sequence and requirements of the manufacturing automation handling system to evaluate the production; c (le) e in the batch production sequence or required production schedule (priority), batch manufacturing Requirement, human priority order-general commercial dispatch system12. It is to evaluate the second situation of the V seeding plant to generate the actual dispatching machine 2 ": dispatching each ^ the manufacturing efficiency within a short period of time and the current machine condition, etc. to evaluate the order of dispatching between multiple batches Bai Bai: In an automated semiconductor manufacturing plant, the automated handling system 130 (such as the Material Handling System (Automated Material Handling / AMHS)) is used in the dispatching process to estimate the optimal handling path and each of the handling paths. Transportation cost, etc. The automated handling system 130 may include an automated handling server 134 and a handling database 132. The automated handling server 1 3 4 is mainly based on the current location and expected location of each batch,

1230880 V. Description of the invention (6)-A certain percentage generates a shipping list. The transportation table displays and records the transportation of each batch 丨 shell order, route and transportation time. The records related to the automated handling are stored in the handling database 1 2 3. In the above system, the production scheduling system 110, the dispatching system 120, and the automated handling system 130 can all adopt commercial products or systems developed by various manufacturers, and the present invention is not limited thereto. § Machine 1 14 in the manufacturing area 1 40 completes a batch of processing, then its machine controller 142 sends a machine available message to the rule base decision engine 50, and notifies machine 1 44 to continue The next batch is processed, and the rule base decision engine 150 is used to decide the batch to be dispatched to the machine 44. In order to integrate the data generated by the above-mentioned production scheduling system 丨 丨 〇, dispatching system 丨 20, and the automated handling system 130, the semiconductor dispatching integration system according to the present invention is verified by a rule base decision engine. Integrate the relevant data of the above three systems to make the best suggestions for dispatching. The rule base decision engine 150 is characterized by the use of a rule base (ru 1 e b a s e) architecture, which can flexibly add and delete various dispatch rules according to the actual conditions of the manufacturing plant, without having to restart the entire system. See Figure 2 'for a more detailed description of the architecture of the rule base decision engine. As shown in Fig. 2, the "rule base decision engine 丨 5 〇 can accept the information of the machine in each area" such as the diffusion machine 2 1 〇, etching machine 2 1 2, lithography machine 2 1 4 and other machines Machine condition. The rule base decision engine 丨 50 integrates the information of the production scheduling system 1100, the dispatch system 1200 and the automated handling system 丨 30. In addition to the information integration judgment between the systems, the rule base decision engine 丨 50 also adds a variety of restrictive or conditional rules to the flexibility of new additions and modifications.

0503-7433TWF; TSMC2001-1314; peggy.ptd ^ 1Λ _ brother 1U bay 1230880

V. Description of the invention (7) and delete function. With a rule base-style architecture, various production conditions and restrictions in a semiconductor manufacturing plant can be achieved by flexibly adding or modifying delete rules, without the need to recompile (reboot) and restart (reboot) The entire decision engine caused a shutdown of the manufacturing plant. Therefore, the rule base-style decision engine architecture provides better flexibility and convenience for the dispatch decision of the manufacturing plant, and maintains the stability of the system. In a preferred embodiment, the 'rule base decision engine 50' integrates the manufacturing information between the three systems according to the following formula to evaluate the dispatch cost (F) of each scheduled batch: F = cl * S + c2 * D + c3 * T + c4 * C + c5 / Among them, S is the production schedule, D is the dispatching schedule, τ is the estimated transportation cost of the automated handling system 130, and c is the automated handling system. Estimated replacement cost, cl-5 is constant. The smaller the obtained dispatching cost (F) is, the smaller the production cost of the batch of dispatching production plants is. Therefore, the dispatching priority of Vietnam is the priority. In a general manufacturing plant, the handling cost is rarely included in the dispatching consideration. However, according to the system of the present invention, the transportation of B is too small. This (transport and replacement cost COM) estimates 'can accurately grasp the best dispatching situation. It is tied to an automated handling system 300 in the machine = 3 maps' to further explain the handling costs and dispatch -W Λ,., I, II, and I II on the mmVaf delivery path in order. Among them, the time from machine 1 (31 ◦) to machine transmission is 1 minute, machine KWG) to machine Taiwan ΙΙΙ (33〇)

1230880 V. Description of the invention (8) The transportation time is 10 minutes. When machine 丨 J 丨 (3 3 〇) sends a message that can continue to process the next batch, one batch 342 of machine I (3 1 0) and one batch of machine 1 1 (320) 344 are waiting to be sent to the machine HK330) for the next _stage processing 'and according to the evaluation results of the production schedule and dispatch schedule, if the priority of ^ times 342 is better than batch 344, in general, then Batch 342 should be transported to machine 111 (33 °) for processing. However, the processing time from the machine to μ I I I (3 3 0) is 5 minutes, and the transportation time from the transport batch 3 4 2 to the machine 1 1 1 (33 0) is 10 minutes. Although the priority of batch 344 is lower, if the batch 344 is transported to the machine 丨 丨 1 (33〇) and finished, it will only take hauling time 丨 minutes and processing time 5 minutes, a total of 68 Clock time. Therefore, it is clear that the handling cost of batch 344 is much lower than that of batch knife 342. Therefore, the rule base decision engine 15 will first carry out the transportation and processing of batch 344 to machine In according to the information of the integrated transportation cost, and start at the same time. Transport lot 342 to complete the machine in lot 344! ° Processing of batch 342 can continue. After we sorted it out, the reset cost is considered from the transport state in U0. Take the third picture as an example, when the batch 344 is moved to other machines from the beginning, it will be transported "," Xiang 344 "will be delivered to the security center Λ at the machine 1 1 (320), then ... ^ LI : 7 for this V and give it again ... 4., t 5 ^ 150 ,,, „^ Quantities, with a more accurate grasp of the dispatch cost as the installation cost, is included in the current status of the test system 130, to count τ or a constant Instant response automated moving book number C3 can be based on automated handling system 0503-7433TWF: TSMC200M314; peggy.ptd Page 12 1230880

V. Description of the invention (9) The handling record table of the handling database 132 of 130 is updated, for example, according to each previous handling record update, in order to grasp the current handling status of the automatic handling system 150 in real time to avoid problems with specific handling routes. The master f clerk w. 丨 ·… — · t 'cannot be a preferred embodiment, the rule base decision engine 丨 5 evaluation, dispatching variables in the system 1 20]) data, as follows, The evaluation result of the short-term dispatch of the second batch: /. Set each batch D = kl * P + k2 * Q + k3 * M + k4 * R + k5 * 0, where P is the priority of the batch and Q is the Batch and M are if the machine needs a batch of processing capacity (Batch), the batch, the time meets the requirements of the group of processing capacity, R is the relevant conditions of the machine, whether the manager has been, 0 is other specific restrictions , K 丨 -5 are constants.疋 Whether it meets the various possibilities in the dispatching variable D by considering the above formula, and then evaluates the influence of each of the variables with a weighted algorithm, and then reflects the dispatching status of each batch for rules. Library decision ϋ = Effective integration assessment dispatch order. However, in the above-mentioned system, the rule base decision engine is more available, and conditional restriction rules are further set to determine the dispatch batch: different machines with different machine bars can set the corresponding rules. Beq, = and according to the present invention is not limited to this Γ clever rule, but (a) when the quality of the machine is lower than a predetermined requirement, the first (Amonitor wafer) test. When the quality of the machine is unstable, the control panel cannot continue to process the next batch of goods. After the machine is confirmed, the quality must be within the required range before the regular test batch can be continued.

1230880-mmw 5. Description of the Invention (10). (b) · When the machine has been idle for more than a predetermined time (seaS〇n-fer) 〇f ^ ^ ^ ^; In order to maintain the machine room c: 2: first perform hot machine film and perform two hot machine idle process In the case of no mask method, one person can carry out. When loading the required reticle, Fang ^ sent the workers to "therefore, when the machine must be carried out a certain 3 :: m can be carried out. Some of the machine processing test, so this type of machine You must consider whether you want one or two / :::: treatment *, if not, you need to wait or adjust = the dispatching system generated by the actual operating conditions of the manufacturing plant, the dispatching system 120 is based on the transportation cost assessment of the system 130, , As well as the details of the automated handling system. The rule base can store all the data accumulated in ㈣ 152. Logically, ^ ^ Engine MO will determine the decision database to determine the best dispatch batch. Nose and rule restrictions, etc. Next, referring to FIG. 4, a detailed description is given. According to the process of the above-mentioned semiconductor integrated dispatching system according to an embodiment of the present invention, step S402 is first performed. Sequence and manufacturing process should produce a production schedule in order to schedule and make clothes. Generally speaking, the production schedule is 0503-7433TW; TSMC2001 -1314; peggy.ptd Production schedule for Λ1 growth period. Step S4 04 · After the previous batch has been processed, it will be issued / required to run the goods. When the machine decision engine 1 50 0. Requires the target cargo instruction to the rule base and then proceed to step S406. After the delivery request is received, the dispatcher will send out the actual conditions in the dispatcher j, and list a production schedule: sequence · According to the current step S4G8: Evaluate the dispatcher's schedule to transport costs. In the dispatching system 120, the dispatching system needs to be moved according to all the batches waiting for dispatching in the schedule. Two = ^ times to the machine! 44 Estimated handling costs and replacement costs for processing. Finally Proceed to step S4 10 ·· According to the production schedule and dispatching schedule, move and transport Λ Ben Guangding to determine the best running batch of the machine. The rule base two policy engine 150 can be based on "cost (F, as follows ) Estimates to get the best dispatch batch for machine 1 4 4. F = cl * S + c2 * D + c3 * T + c4 * C + c5 The dispatching cost (F) takes into account s (production schedule), d (dispatch schedule), T (automated handling system) 丨 30 Estimated handling costs), c (replacement costs estimated by the 130th automated handling system) and other variables, and use constants such as cl-5 to adjust the weighting of each variable. And each variable can be further based on logic calculations or rules as the basis for dispatch decisions. For example, the dispatching schedule variable D can further determine the short-term dispatching evaluation result of each batch by using the following logical calculation formula:

0503-7433TWF, TSMC2001-1314; peggy.ptd Page 15 1230880 V. Description of the invention (12) D = krp + k2 * Q + k3 * M + k4 * R + k5 * 0 is the priority for the batch / priority 4 1 is the waiting time of the batch, M needs a batch of processing capacity (Batch), whether the number of offsets has met the requirements, and the processing requirements, R is the specific restriction rules of the machine, and U-5 is a constant .疋 No Man's Thing is 0. Therefore, by the above-mentioned Feng Ququn woman's push of the present invention, I know Λ I thousand conductors integrated dispatching system and borrowed from: ΠΓ \ Its characteristics are that it can effectively integrate the semiconductor factory The relevant factors of the system are determined to determine the best dispatch batch. Avoid order ii: i: Dispatch that may occur with general short-term dispatch system ^^ ^ Avoid relying too much on the personal experience and decision of online personnel, and provide good dispatch in automated semiconductor manufacturing waste. Another feature of the dispatching system and method is the structure of two rule bases, which provides a high degree of flexibility and convenience for the modification of the overall system and the adjustment of the rules, and also for managers. At the same time, it also has the characteristics of easy maintenance. -Too Ϊ The present invention is disclosed in a preferred embodiment, but it is not intended to be limited;! = ,; Anyone familiar with this art can make some changes and retouch without departing from the spirit garden of the present invention. Therefore, Fantian of the present invention shall be subject to the definition in the appended patent application scope.

1230880 Brief description of the drawings In order to make the foregoing objects, features, and advantages of the present invention more comprehensible, the following detailed description is given in conjunction with the accompanying drawings: FIG. 1 shows an embodiment according to the present invention. A schematic diagram of a semiconductor dispatch integration system architecture. Figure 2 shows the schematic diagram of the rule base decision engine 150 of Figure 1. FIG. 3 is a schematic diagram illustrating the handling evaluation of an automated handling system according to an embodiment of the present invention. FIG. 4 shows a method flow of a semiconductor dispatching method according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 11 0 ~ Production scheduling system; 1 2 0 ~ Dispatch system; 1 3 0 ~ Automated handling system; 1 3 2 ~ Handling database; 1 3 4 ~ Automated handling server; 140 ~ Manufacturing area; 1 4 2 ~ machine controller; 144 ~ machine; 15 0 ~ rule base decision engine; 15 2 ~ decision database; 2 1 0 ~ diffuse machine; 2 1 2 ~ etching machine; 2 1 4 ~ lithography machine station;

0503-7433TWF; TSMC200M314; peggy.ptd page 17 1230880 Schematic description 24 0 ~ rule I-III; 3 1 0 ~ machine I; 32 0 ~ machine II; 3 3 0 ~ machine III; 34 2 -344 ~ batch; S4 02-S410 ~ method flow. ΙΙΙ ·· 0503-7433TWF; TSMC2001-1314; peggy.ptd page 18

Claims (1)

1230880 Rev.—Case No. 91118775 6. Scope of Patent Application1. A semiconductor dispatching integration system includes: Production Scheduling System 'is used to periodically evaluate the production of the manufacturing according to the various production orders and requirements of a batch for a manufacturing plant. Long-term production schedule of the factory; A dispatch system to generate a dispatch schedule according to the manufacturing efficiency of the manufacturing plant within a short period of time and the condition of each machine;-an automated handling system to move between these machines Carry out transportation, and calculate the transportation cost between the mother batch and each transportation path between each machine; and: the rule base decision engine, integrate the production scheduling system and dispatch system; Among them-after the machine's request for shipment, = process, the dispatch of the dispatcher and the estimated batch of the automated handling system A: the batch of 21 shipments, i caused the automated handling system to transport the j batch To the machine that transmitted the running cargo request for processing. In the eighth, the rule base decision engine was directly added to change the decision conditions. Method 1 of the method for deleting and deleting rules] According to the semiconductor dispatching integration system in item 1 of the patent scope, the decision engine determines the dispatching cost of each batch according to the following formula, and the batch with the smallest dispatching cost is given priority. Work: F = cl * S + c2 * D + c3 * T + c4 * C + c5, where S is the production schedule; D is the dispatch schedule; T is the estimated handling cost of the handling system; C Estimated replacement cost for the handling system; cl -5 is constant. 0503-7433TWF2 (N) .ptc Page 19, 1230880, Amendment No. 91118775 VI. Patent Application Scope 3. According to Patent Application Scope No. 2 where the constant c3 is based on the automatic broadcasting, Zhifeng conductor dispatching integration system, The handling records of the automated handling system are updated. 、, 5. According to the integration of semiconductor dispatching according to item 2 of the scope of patent application]), the evaluation results of dispatching for each batch are determined by the following formula: / ,, D two kl * P + k2 * Q + k3 * M + k4 * R + k5 * 〇, where P is the priority of the batch; Q is the waiting time of the batch; the amount of processing M is whether the batch has met the group R if the machine needs a set of processing capacity Whether the relevant conditions of the machine are met; 〇 is other specific restrictions; kl-5 is a constant. Straight Λ = Γ! The semiconductor dispatching integration system in the first item of the benefit range, wherein the rule base decision engine further includes a conditional restriction rule based on the machine. The “Research Institute” and “7.” According to the semiconductor patent application No. 6 of the scope of the patent application, the conditional restriction rule is at least one of the following: registration, charging, (a). When the quality of the machine is lower than As soon as a predetermined requirement is obtained, the monitor wafer is advanced;% 仃 仃 控 片 (b). When the machine is idle for more than a predetermined time and the light is completely on the e-machine, the machine- (d) · meets a group It can only be carried out when the amount is processed. Defend 丨 page 20 0503-7433TWF2 (N) .ptc 1230880 ^-case number 9111 __ year month day start X_____ # 'application profile I! ~ &Quot; " 8 ·-a method of semiconductor dispatching, including the following steps ·· According to a manufacturer's batch of Various production sequences and requirements to periodically produce a long-term production schedule for the manufacturing; receive a running order required by a machine; produce a dispatch based on the manufacturing efficiency of the manufacturing plant within a short period of time and the status of each machine Scheduling; Evaluate the handling cost of each batch and each machine in the dispatching schedule according to the running order; determine a run based on the production schedule, the dispatching schedule, and the handling costs of each batch The batch of goods; and transporting the batch of goods to the machine that transmits the order of the goods for processing by an automated handling system. 9 · According to the semiconductor dispatch method described in item 8 of the scope of the patent application, the order of 'the step of determining the running batch based on the production schedule, the dispatch schedule, and the handling cost of each batch is as follows: The formula determines the dispatch cost of each batch, and gives priority to the batch with the lowest dispatch cost: F = cl * S + c2 * D + c3 * T + c4 * C + c5, where S is the production schedule D is the dispatching schedule; D is the moving cost; C is the replacement cost of one of the moving; c 1-5 is a constant. 10 · The semiconductor dispatch method according to item 8 of the scope of the patent application, wherein the constant c3 is updated based on a handling record of an automated handling system. 0503-7433TWF2 (N) .ptc Page 21 1230880 --- Case No. 91118775 VI. Patent application scope jl. According to the semiconductor dispatch method described in item 8 of the patent application scope, where T is based on the handling record of an automated handling system Update. Gan Shi η 2 · According to the semiconductor dispatch method described in Item 8 of the declared patent scope, D in the series determines the dispatch order of each batch as follows: D = kl * P + k2 * Q + k3 * M + k4 * R + k5 * 〇, where P is the priority of the batch; Q is the waiting time of the batch; M is the right 4 machines need a set of processing capacity, whether the batch has enough processing of the group I R is whether the relevant conditions of the machine are met; 0 is other specific restrictions; kl-5 is a constant. = According to the semiconductor dispatch method described in item 8 of the scope of the patent application, the production schedule, the dispatch selection and each offset: the step of the unpaid handling cost batch can further include 1 step: according to the machine conditions A conditional restriction rule to determine the running lot. The method of semiconductor dispatching described in No. 8 of the scope of patent application by Zhizhong Xigen, VIII. The conditional restriction rule of the Eighth Middle School is at least one of the following: 2) · When the quality of the machine is lower than a predetermined requirement, it is performed first. (monitor wafer); ^ ^ ^ j · If the machine is left idle for more than a predetermined period of time, it will be advanced (C). When the required photomask is on the machine, the lot can only be used for two dollars; (d) · Meet A set of processing capacity is performed by Tachimachi. Alas, 0503-7433TWF2 (N) .ptc Page 22