TWI229024B - Abrasive fluid jet system - Google Patents

Abstract

The invention provides an abrasive jet system having a high-pressure fluid supply means supplying fluid to a vessel which includes a layer of abrasive slurry and a top layer over the layer of abrasive slurry. The abrasive fluid jet system also includes a first conduit which leads from the fluid supply means to the top layer of fluid in the vessel and as high-pressure fluid is fed into the vessel, causes displacement of abrasive slurry from a discharge conduit. The abrasive fluid jet system further includes a second conduit which connects at different points to the first conduit and the discharge conduit, and including a fluid valve between the operative connection to the first conduit and the discharge conduit, which fluid valve controls the fluid flow between the first conduit and the discharge conduit by means of the second conduit. The fluid valve is closed once the system is pressurised to displace abrasive slurry through the discharge conduit and is opened upon de-pressurization of the system to allow fluid flow from the first conduit to the second conduit and to stop discharge of the abrasive slurry.

Description

1229024 _Case No. 92100481_Year Month Date__ V. Description of the Invention (1) < Technical Field to which the Invention belongs > The present invention relates to a polishing fluid jet system, and more particularly to a method for grinding a pressure slurry from a pressure slurry. The storage container is supplied to the abrasive jet nozzle for cutting or other abrasive liquid jet cutting operations. < Prior art >

In process technology, the abrasive liquid jet system is used in many applications that require precision cutting. One example of this application is the single cutting of substrates. One type of abrasive fluid jet system uses an abrasive that is stored under pressure and discharged in a pressure vessel to mix the abrasive and the driving fluid immediately before the nozzle to form an abrasive slurry, which is usually accelerated through the slurry. Nozzle to form a polishing liquid jet tool for cutting a substrate. These existing systems require the abrasive to be separated and transported separately to give each nozzle that must be provided with a multi-nozzle cutting head, and such independent transport must be independently controlled, and the operation of one or more multi-nozzle cutting heads must be increased. Opportunity, and therefore in a less desirable state. Another structure of a liquid-mixed abrasive is shown, for example, in PCT Patent No. W095 / 29792. In PCT Patent No. W095 / 29792, a pressure vessel is provided inside, and an abrasive and a liquid can be mixed under pressure before being conveyed, and then passed through a duct to the nozzle.

As the hydraulic pressure currently used increases, to take advantage of its increased cutting force, the compressibility of the liquid becomes an important factor. When high pressure is generated and it is necessary to stop discharging the grinding slurry and reduce the pressure of the grinding slurry pressure vessel to suspend the operation process or facilitate refilling of the abrasive, the pressure capacity

Page 6 1229024 _ Case No. 92100481 _ Month and Day __ V. Description of the invention (2) A large amount of compressed liquid remains in the device. In the conventional system in this state, when the compressed liquid volume is released under reduced pressure, the only discharge path is through a discharge duct, and the outlet of the discharge duct is located in a sealed slurry container. Therefore, the amount of slurry to be continuously discharged will cause the problem of nozzle clogging, and because the discharged slurry is operated below normal pressure and lacks effective momentum, it cannot be avoided by depositing in the transfer pipe or nozzle. Clogging, so the problem of such clogging occurs.

This undesired discharge may occur, for example, when the pressure valve of the slurry pressure holding vessel fails, because the slurry in the pressure vessel is under high pressure and is compressed by the pressure valve, so when the pressure When the valve fails, the compressed slurry will have to be conveyed through the transfer pipe in a short time to continuously discharge the ground slurry from the nozzle. In designing a solution, it is important to avoid high wear rates and reliability issues, including those caused by high pressure and processing media containing abrasives. < Summary of the Invention > The object of the present invention is to improve the above disadvantages, and to avoid clogging of the nozzles or provide a choice that is beneficial to the public.

According to a first aspect of the present invention, the grinding fluid jet system includes: a pressure vessel including a grinding slurry layer and an upper layer above the grinding slurry layer; a high-pressure liquid supply device that supplies liquid to the pressure container A delivery conduit through which the high-pressure liquid supply device can pass;

Page 7 1229024 _Case No. 92100481_ Year Month Date__ V. Description of the invention (3) The upper layer of the liquid in the pressure vessel is used to move the grinding from the pressure discharge conduit when the high-pressure liquid is introduced into the pressure vessel through the transfer conduit. Grind slurry; and another transfer conduit, enabling the transfer conduit and pressure discharge conduit to be selectively connected at different points thereof, and including a liquid flow control valve at the connection point between the operating connection to the transfer conduit and the discharge conduit The liquid flow control valve can control the liquid flow between the transfer conduit and the discharge conduit through the other transfer conduit;

Wherein, when the system is pressurized, the liquid flow control valve is closed to displace the grinding slurry through the pressure discharge conduit; and when the system is depressurized, the liquid flow control valve is opened to allow liquid flow from the conveyance. The conduit flows to another transfer conduit, and the pressure vessel is stopped from discharging the ground slurry. When starting the system, it is better to open the liquid flow control valve and let water flow through another delivery conduit to pressurize the system, and it is better to have the liquid flow control valve when the container has sufficient pressure. Shut down for operation of the abrasive jet system. Preferably, the high-pressure liquid supply device also feeds liquid to the pressure discharge conduit through a third conduit to produce a mixture of liquid and ground slurry, and sends the liquid through a spraying device provided at the end of the pressure discharge conduit. Squirting.

Preferably, the liquid flow is controlled by a second liquid flow control valve provided in the transfer duct so that the liquid flow flows from the high-pressure liquid supply device to the container. Preferably, the system includes a liquid storage tank and a valve.

Page 8 1229024 _Case No. 92100481_Year_Year _ «_ V. Description of the invention (4) The grinding slurry is supplied to the pressure vessel, and the valve draws liquid from the liquid layer above the pressure vessel, of which, The grinding slurry is sucked into the container from the liquid storage tank by pressure created by suctioning the liquid from the pressure container. According to a second aspect of the present invention, the grinding fluid jet system includes: a pressure vessel, which defines a compartment therein, and the compartment can respectively hold the grinding slurry amount and is substantially located on the grinding slurry amount. Liquid without abrasive material amount; a high-pressure liquid supply device that can be connected to the compartment;

A transfer conduit is used to transfer liquid into the compartment under pressure through a first opening of the pressure vessel, and the first opening is formed in the transfer conduit; a slurry extraction and transfer conduit that transfers the The slurry in the compartment of the pressure vessel is driven by a liquid through a second opening of the pressure vessel into a nozzle, and enters the compartment through the first opening under pressure, wherein the second opening is Formed on the slurry extraction and transfer conduit; and a pressure discharge conduit connected to the substantially abrasive-free liquid flow, the pressure discharge conduit includes a liquid flow control valve to adjust the pressure within the compartment .

Preferably, the pressure discharge conduit is fluidly connected to the compartment through a third opening of the compartment, and the third opening is disposed in the pressure discharge conduit and is located within the substantially abrasive-free liquid. Preferably, the delivery duct extends into the compartment to position the first opening within the grinding slurry. Preferably, the pressure discharge duct is passed through the first opening to be separated from the partition.

Page 9 1229024 _Case No. 92100481_year month__ V. Description of the invention (5) Flow connection, the first opening is located in the substantially abrasive-free liquid. When the liquid flow control valve is not closed, the better way is that the pressure discharge conduit is also in flow connection with the slurry extraction and transfer conduit for remote control from the compartment, and through the nozzle will be in the compartment. Intermittent pressure is released. When the liquid flow control valve is not closed, it is preferable that the pressure discharge duct includes a discharge port to be remotely controlled from the compartment, and the pressure inside the compartment is removed through the discharge port. Release.

Preferably, the liquid flow control valve system is responsive to the hydraulic pressure of the transfer conduit, and if the hydraulic system is a specific pressure that is relatively less than the desired system operating pressure, the liquid flow control valve will be in an unclosed condition. Preferably, the liquid comprises a majority of water. Preferably, the slurry is composed of an abrasive material within the liquid. In another aspect of the invention, the method of operating the aforementioned system may include:

To the compartment containing the amount of ground slurry and the amount of liquid that is substantially free of the amount of ground slurry, the liquid is conveyed through the transfer conduit under pressure, while allowing the pressure to pass through without being closed. The liquid flow control valve releases pressure from the compartment through a pressure discharge conduit; and turns off the liquid flow control when sufficient pressure reaches the compartment to operate the nozzle in the desired material cutting mode Valve, and then push the pressure in the compartment to retrieve and transfer the catheter through the slurry by

Page 10 1229024 _Case No. 921Q0481_Year Month Day _ ^ _ V. The description of the invention (6) is transferred to the nozzle. In yet another aspect of the present invention, the method of operating the aforementioned system may include: operating under pressure the fluid barrier including the amount of ground slurry and the amount of liquid substantially free of the amount of ground slurry on the amount of ground slurry. To transfer liquid through the transfer tube, thereby moving the slurry from the compartment to the nozzle through the slurry extraction and transfer tube; and to move the liquid flow control valve to a closed condition to avoid The slurry is displaced because the pressure within the compartment is lower than the pressure that allows the slurry to move through the slurry extraction and transfer conduit.

In yet another aspect of the present invention, the method of controlling the aforementioned system may include: operating under pressure the liquid barrier including the amount of ground slurry and the amount of liquid substantially free of the amount of ground slurry on the amount of ground slurry. To transfer the liquid through the transfer conduit, thereby moving the slurry from the compartment to the nozzle through the slurry extraction and transfer conduit; and to allow the nozzle to operate if the pressure within the compartment is lower than The desired material cutting mode is to prevent the slurry from moving to the other transfer duct and stop the discharge of the abrasive slurry by moving the liquid flow control valve to an unclosed condition.

In yet another aspect of the present invention, the grinding fluid jet system includes: a) a pressure vessel having a compartment to separately hold (al) the amount of grinding slurry; and (a2) a substantially non-grinding slurry The amount of liquid consisting of a slurry of liquid;

Page 11 1229024 _Case No. 92100481_ Revised Year of the Year_ V. Description of the invention (7) b)-High pressure liquid supply device, which supplies liquid to the pressure vessel; c) A discharge duct, which includes a water inlet, the The water inlet is located within the amount of the grinding slurry and the nozzle; d) a transfer duct that feeds a high-pressure liquid from the high-pressure liquid supply device to the pressure vessel to feed the liquid through the pressure under high pressure Container, while directing the flow of the grinding slurry and flowing into the nozzle through the discharge conduit; and

e) a pressure discharge conduit which is in flow connection with the pressure vessel to be operatively connected between the quantity consisting essentially of liquid and the discharge conduit, and the pressure discharge conduit comprises a liquid flow control valve to control the flow in The fluid therein; f) wherein the liquid flow control valve in an open state is used to selectively release pressure from the pressure vessel by flowing, and to pass through the pressure discharge conduit to the nozzle. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION The present invention relies on the natural tendency of liquids to accept the smallest path, so that the compressed liquid can be discharged into a discharge duct designed to contain no abrasive. < Embodiment >

Reference is made to Fig. 1. Fig. 1 is a block diagram showing a first embodiment of the present invention, in which a pressure vessel 11 is provided, and the pressure vessel 11 is provided with a compartment 3 to hold the ground slurry. The abrasive slurry is a mixture containing a liquid and an abrasive material, and the liquid is, for example, water or a liquid containing water. The pressure vessel 11 contains a liquid 4 provided on the upper layer of the grinding slurry 2. The liquid 4 is

Page 12 1229024 Case No. 92100481 Amendment date 5. Description of the invention (8) Same as the liquid used to store the abrasive particles, provided in the slurry but above the liquid level n L π in the container, but not Mix with abrasive. A high-pressure liquid supply device 10 is combined with a compression valve to feed liquid into the pressure vessel 11 and the liquid feed from the high-pressure liquid supply device 10 passes through the transfer ducts 14 and 15. The transfer conduit 15 is provided to transfer liquid to the slurry extraction and transfer conduit 16 to provide proper dilution of the slurry that is displaced through an opening, and this dilution is necessary to avoid the slurry extraction and transfer Blockage of the conduit 16 is necessary. The transfer conduit 14 is a conduit mainly for a transfer and pressurized container. As shown in the structure of the first figure of the present invention, the transfer conduit 14 has a drainage opening.

24. The drainage opening 24 is defined as the first opening in the container, and the liquid is only in the area of the pressure container 11 (that is, above the liquid level L). The liquid storage tank 17 feeds the ground slurry 2 into the pressure vessel 11 through the conduit 19. The pressure discharge conduit 21 is provided so as to communicate with the amount of liquid in the pressure vessel 11 and to be in contact with the liquid without abrasive. In the structure of Fig. 1, the flow contact is provided through the local delivery conduit 14 and a liquid flow control valve 13 controls the liquid flow across the pressure discharge conduit 21. In the normal operation of this system, the liquid flow control valve and its related systems deliver compressed liquid to the pressure vessel 1 1, which makes the grinding research

The slurry moves to the nozzle 12 through the second opening 30 of the slurry extraction and conveying conduit 16, and the second opening 30 is located below the liquid level L, and is preferably near the bottom of the pressure vessel 11 . The pressure relief duct 21 can be considered to be bypassed to the

Page 13 1229024 Case No. 92100481 Amended on May. 5, V. Description of the invention (9) The liquid flow containing the abrasive in the container can be controlled by the liquid flow control valve 13, and the liquid flow control valve 13 is available To close the pressure discharge duct 21.

In the structure of Fig. 1, the transfer duct 14 is connected to the top of the pressure vessel 11 and there is no grinding slurry 2 on the top. Under reduced pressure (for example, when the high-pressure liquid supply device 10 is insufficient and is about to be shut down), the liquid flow control valve 13 is connected to the pressure discharge conduit 21 to the slurry extraction and transfer conduit 16 , And the pressure vessel 11 is opened. The amount of liquid in the pressure vessel 11 will remain compressed, but there is a tendency to expand outward. It is best to discharge through the pressure discharge conduit 21 with two openings that can accommodate this expansion, instead of passing through the research The second opening 30 of the slurry extraction and transfer duct 16 is discharged because the inner diameter and length of the second opening 30 of the slurry extraction and transfer duct 16 and the resistance of the grinding slurry 2 will result in a higher resistance. Flow resistance.

At the beginning of the system and at the time of pressure delivery, the liquid flow control valve 13 is initially opened, and the liquid will flow from the high-pressure liquid supply device 10 through the transfer conduit 14 into the pressure vessel 11. When the liquid flow control valve 13 is opened, some liquid flow will flow into the pressure discharge conduit 21, and the pressure delivery of the pressure vessel 11 will also be generated, but the pressure will be reduced due to partial liquid flow transfer. A preferred form is that the pressure discharge conduit 21 is connected to the second opening (water inlet) 30 (and preferably outside the pressure vessel) 30 above the slurry extraction and transfer conduit 16 because it passes through the first The combination of the impedance of the flowing slurry in the two openings 30 and the phenomenon of the liquid flowing through the pressure discharge conduit 2 1 and into the slurry extraction and transfer conduit 16 actually creates a back pressure, which lies in the direction of Extraction of the slurry from the second opening 30

Page 14 1229024 _Case No. 92100481_Year_Month__ V. Description of the invention (10) The part of the transfer duct 16 is passed, and no mortar is passed through the nozzle 12. A sufficient amount of liquid will flow into the pressure vessel 11 near the nozzle 12 to displace the abrasive into the second opening (water inlet) 30 of the slurry extraction and transfer duct 16. When the liquid flow control valve 13 is closed, the liquid flow from the high-pressure liquid supply device 10 passes through the transfer conduit 14 and enters the pressure vessel 11, thus displacing the abrasive to the slurry extraction and In the second opening 30 of the transfer duct 16, the main liquid flow from the transfer duct 15 is mixed therein, and is taken into the nozzle 12 through the slurry extraction and transfer duct 16. .

The flow of the grinding slurry can also be stopped by opening the liquid flow control valve 1 3 at any time. During decompression, the liquid flow control valve 1 3 is opened to provide compressed liquid through the pressure discharge duct 21 and can be replaced. And a better path, when the content in the pressure vessel 11 expands, the expansions are formed through the pressure discharge conduit 21. When the transfer duct 14 has an opening on the liquid level L in the pressure vessel 11, the opening can ensure that the ground slurry can reach the liquid flow control valve 13 and therefore, it can normally operate on clean water with a minimum pressure difference. Operation, and can have a longer service life than conventional systems. In addition, the inner diameter of the pressure discharge duct 21 is large enough to ensure that the speed at which the liquid flows out is lower than the set speed of the grinding slurry used. In this way, it is further possible to determine in advance whether any abrasive particles on the liquid surface L in the pressure vessel 11 will pass through the liquid flow control valve 1 3 and enter the transfer duct 1 4 and follow the transfer duct 1 4 Enter this pressure discharge conduit 2 1. Fig. 2 shows a second embodiment of the present invention in which a separate pressure discharge duct 2 1 is provided. Difference between the second embodiment and the first embodiment

Page 15 1229024 _Case No. 92100481_ Revised Year of the Month _ V. The description of the invention (11) lies in that the pressure discharge conduit 21 is not connected to the transfer conduit 15 and is only used as the container 1 1 Path of the amount of compressed fluid flowing out. The second liquid flow control valve 23 is always operated in dry and clean water, and the liquid flow control valve 13 is operated less frequently, which means that the liquid flow control valve 13 is usually used in the pressure delivery and decompression stages. . As a result, the abrasion on the liquid flow control valve 13 can be reduced, and the second liquid flow control valve 23 is preferably a spare rather than an unnecessary one.

In the case where the liquid flow needs to be separated, when the liquid flow control valve 13 compresses the high-pressure liquid supply device 10 and drops it, the pressure loss in the pressure discharge conduit 21 or the valve 13 can be reduced by A pressure sensor (not shown) detects it, so the liquid flow control valve 13 can be automatically opened to release the pressure in the pressure vessel 11 through the pressure discharge conduit 21. In the case where the liquid flow of the grinding slurry needs to be stopped but the high-pressure liquid supply device 10 continues to operate, the second liquid flow control valve 23 can only be opened, and the liquid flow can continue to pass through the transfer ducts 1 4 and 1 5 And flows into the pressure vessel 11; but because the minimum resistance route of the pressure material within the pressure vessel 11 is the pressure discharge duct 2 1, water will enter and flow only above the liquid level L

It is thus ensured that only water will be discharged to the nozzle 12 through the pressure discharge duct 21. As long as the valve 13 continues to compress the pressurized liquid source 10, the liquid flow will continue to operate, and the pressure of the compressed liquid flow cannot be balanced, and the second liquid flow control valve 23 will remain open. The diaphragm valve 18 is used to draw the liquid 4 from the conduit 20, which generates pressure in the pressure vessel 11 and sequentially draws the ground slurry from the liquid storage tank 17 into the pressure vessel 11. In a specific embodiment in Figure 2, the liquid flow control

Page 16 1229024 Case No. 92100481 Amendment V. Description of the invention (12) The valve 1 3 and the second liquid flow control valve 2 3 are closed, and the diaphragm valve 18 is used to pass through the conduit 20 from the The pressure container 11 draws back the liquid to generate a vacuum, and the purpose of drawing the ground slurry from the liquid storage tank 17 through the conduit 19 is achieved. The advantage of this system is that during the pressurization or decompression phase of the system, the abrasive can be avoided from being discharged to the nozzle due to the compressibility of the liquid. By providing the amount of compressed liquid in the pressure vessel 11 The path that has a smaller impedance and can be used during expansion does not bring the abrasive into the nozzle. Therefore, the present invention helps to prevent the nozzle from clogging.

Referring to Fig. 3, there is shown an alternative structure in which the transfer conduit 14 is positioned to have a first opening 2 4 immersed in the slurry. In this structure, the separate opening (ie, the third opening 40) provided by the pressure discharge duct 21 must be positioned above the liquid level L, and the spare first opening 24 is close to the second opening (Water inlet) 30, a mixture of water and abrasive can be obtained closer to the second opening 30.

FIG. 4 shows another alternative structure, in which the pressure discharge duct 21 is not discharged to the slurry extraction and conveying duct 16 but in a different position, which is the next option because in the duct 21, The pressure from liquid 4 cannot be used to provide the back pressure required for the liquid in the slurry extraction and transfer conduit 16, and therefore makes certain slurry (during the expansion of the content of the container) permeable through the first The two openings 30 move into the slurry extraction and transfer conduit 16. The present invention herein permits changes, modifications, and / or other supplementary explanations in addition to the above specific descriptions, and it should be understood that all changes, modifications, and / or additions are within the spirit and scope of the above descriptions of the present invention. The description should be included in the present invention.

Page 17 1229024 _Case No. 92100481_ 年月 日 _Hi_ Brief Description of Drawings Figure 1 is a block diagram showing a first embodiment of the present invention; Figure 2 is a block diagram showing a second embodiment of the present invention; FIG. 3 is a block diagram showing a third embodiment of the present invention; and FIG. 4 is a block diagram showing a fourth embodiment of the present invention. Slurry device valve tube valve mouth research liquid volume control guide guide open grind · force control feed film put one or three research · pressure transmission · ranked first • • flow and force · Ming · · · body removal · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · Jane · · * * · · · · · · · 1368140 Figure CXI 4 -3 ........ Compartment 10 · High-pressure liquid supply device 1 2 ....... Nozzle 1 4,1 5 · • Transfer conduit 17 ...... Liquid tank 1 9 、 2 0 · · · · conduit 2 3 second liquid flow control valve 3 0 ..... second opening L ........ liquid level

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Claims (1)

1229024 _Case No. 92100481_Year Month Date _ «_ VI. Scope of Patent Application 1 · A grinding fluid jet system includes: A pressure vessel with a compartment defined therein, which can hold the grinding slurry amount and A liquid on the amount of the grinding slurry without substantial amount of the grinding material; a high-pressure liquid supply device that can be connected to the compartment; a transfer conduit that passes through the first opening of the pressure vessel under pressure Liquid is delivered into the compartment, and the first opening is formed in the delivery duct; A mortar extraction and conveying duct that conveys the slurry in the compartment of the pressure vessel, is driven by a liquid through a second opening of the pressure vessel, and is introduced into a nozzle, and enters through the first opening under pressure. The compartment, wherein the second opening is formed in the slurry extraction and transfer conduit; and a pressure discharge conduit connected to the substantially abrasive-free liquid flow, the pressure discharge conduit includes a liquid flow control Valve to adjust the pressure within the compartment. 2. The abrasive fluid jet system according to item 1 of the scope of the patent application, wherein the pressure discharge conduit is connected to the compartment through a third opening of the compartment, and the third opening is provided in the pressure control conduit And located within the substantially abrasive-free liquid. 3. The abrasive fluid jet system according to item 1 of the scope of patent application, wherein the transfer duct extends into the compartment to position the first opening within the abrasive slurry. 4 · The abrasive fluid jet system described in item 1 of the scope of patent application, in which IIHII 1 ^ 1 Page 19 1229024 _ Case No. 92100481_ year month and month amendment _ 6. The scope of patent application The pressure discharge duct is through the first The opening is in flow connection with the compartment, and the first opening is located in the substantially abrasive-free liquid. 05. The abrasive fluid jet system as described in the scope of patent application No. 1, 2, 3, or 4, Wherein when the liquid flow control valve is not closed, the pressure discharge conduit is also in flow connection with the slurry extraction and transfer conduit to be remotely controlled from the compartment, and through the nozzle will be in the compartment. The pressure is released. 6 · Abrasive liquid as described in the scope of patent application No. 1, 2, 3 or 4 Jet system, wherein when the liquid flow control valve is not closed, it is preferable that the pressure discharge conduit includes a discharge port to be remotely controlled from the compartment, and the pressure inside the compartment is removed through the discharge port Release 07 • The abrasive fluid jet system as described in item 1 of the scope of patent application, wherein the liquid flow control valve system is responsive to the hydraulic pressure of the transfer duct, and if the hydraulic system is a specific pressure that is relatively smaller than the desired operating pressure of the system , The liquid flow control valve will be left unclosed. 8 • The abrasive fluid jet system as described in item 1 of the scope of the patent application, the fluid including most of the water. 9 · The abrasive fluid jet system described in item 1 of the scope of patent application, the research The slurry is composed of an abrasive material within the liquid. 1 0 · A method of operating a polishing liquid jet system as described in the first item of the patent application, including: to the content including the grinding slurry amount and the substantial amount of the grinding slurry amount 1 ^ 1 l_SH Page 20 1229024 _ No. 92100481_ 年月 日 __ VI. The patented scope of the patent-free liquid compartment without grinding and lapping volume, transmits the liquid through the transfer tube under pressure, while allowing the pressure to be controlled by the liquid flow without closing. The valve releases pressure from the compartment through a pressure discharge conduit; and when sufficient pressure reaches the compartment to operate the nozzle in the desired material cutting mode, close the liquid flow control valve and then push The pressure in the compartment is released to the nozzle through the slurry extraction and transfer conduit, and is transferred by the slurry. 1 1 · A method of operating a polishing fluid jet system as described in item 1 of the patent application scope, comprising: The compartment containing the amount of grinding slurry and a liquid substantially free of the amount of grinding slurry on the amount of grinding slurry is operated under pressure to transfer the liquid through the transfer conduit, thereby capturing and transmitting through the slurry. Duct to move the slurry from the compartment to the nozzle; and to move the liquid flow control valve to the closed position to prevent the slurry from passing through the slurry because the pressure in the compartment is lower than Displacement by capturing and transmitting the pressure of the moving catheter. 1 2 · A method of controlling a polishing liquid jet system as described in item 1 of the scope of patent application, including: The compartment containing the amount of grinding slurry and a liquid substantially free of the amount of grinding slurry on the amount of grinding slurry is operated under pressure to transfer the liquid through the transfer conduit, thereby capturing and transmitting through the slurry. Duct to move the slurry from the compartment to the nozzle; and if the pressure inside the compartment is lower than allows the nozzle to operate the desired material cut Page 21 1229024 _Case No. 92100481_ Modification of the month of the year_ VI. Patent application range cut mode, by moving the liquid flow control valve to the unclosed condition to avoid the slurry moving to the second conduit and stopping The discharge of the grinding slurry. 1 3 · A grinding fluid jet system comprising: a) a pressure vessel having a compartment for separate storage; (a 1) the amount of grinding slurry; and (a2) a liquid having substantially no grinding slurry The amount of liquid b) constituted—a high-pressure liquid supply device that supplies the liquid to the pressure capacity 3 & σσ, C) a pressure discharge conduit including a water inlet, the water inlet is located within the grinding slurry volume and the nozzle; d) a pressure discharge conduit, which is fluidly connected to the pressure vessel to be operatively connected to the substance Between the quantity composed of liquid and the pressure discharge conduit, the pressure discharge conduit contains a liquid flow control valve to control the fluid flowing therein; e) a transfer conduit which feeds a high-pressure liquid from the high-pressure liquid supply device Into the pressure vessel to feed the liquid into the pressure vessel under high pressure, to guide the grinding slurry to flow and flow into the nozzle through the pressure discharge conduit; and f) where the liquid in the opened state A flow control valve is used to selectively release pressure from the pressure vessel by flow and through the pressure discharge conduit to the nozzle. 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