1228434 玖、發明說明： L赛^日月戶斤冷頁滅^ 3 發明所屬之技術領域 本發明係有關於一種使用於半導體裝置或液晶顯示裝 5 置製造程序之藥液供給裝置。 於晶圓與液晶基板清洗程序中，係藉由加壓高純度氣 氣並使之流入一收容有高純度藥液之加壓容器内，將高純 度藥液壓送至晶圓與液晶基板清洗裝置等。在這種藥液供 給裝置中，必須穩定地輸送藥液至清洗裝置。 10 【先前技術】 先前技術 15 迄今，在用以將藥液輸送至洗淨裝置之藥液供給裝置 中，藥液係收容於連接於藥液朝洗淨裝置輸送之藥液輸送 配管及壓送用氣體配管之容器内。藥液輪送配管係於叙器 内插入至藥液之液面以下，㈣送用氣體配管係連接成可 將氣體喷出至容器内之上部。 另外，藉由將壓送用氣體供給至容器，則藥液可從容 器内押出至藥液輸送配管，且輪送至洗淨裝置。壓送用氣 體可使用高純度氮氣。 一在-般的驗供給裝置中，設有多細以收容藥液之 ^器，且藥液輸送配管係透過自動開_分歧地連接各容 器。又，壓送用氣體配管在供給目的地與各容器間分歧， 並透過自動開_將氣體分別供給於各容器。 '先巧啟連接於—容11之壓送錢體配管的自動 20 1228434 開關閥，並開啟連接於該容器之藥液輸送配管之自動開關 閥。於是，藥液會從一容器輸送至洗淨裝置。 此時，連接於另一容器之壓送用氣體配管及藥液輸送 配管為關閉狀態。 5 —旦容器内藥液消耗完，連接於該容器之壓送用氣體 配管及藥液輸送配管的自動開關閥就會關閉，並同時開啟 連接於另一容器之壓送用氣體配管及藥液輸送配管的自動 開關閥。因此，可切換容器且持續供給藥液至洗淨裝置。 於上述此類容器的切換動作中，為了檢知容器内藥液 10 消耗完畢情形，藥液輸送配管的一部分係以透明或半透明 之含氟樹脂形成，並以光學式藥液檢知感測器檢出藥液是 否於該配管内流動。 另外，可根據藥液檢知感測器的輸出信號，並藉由控 制裝置來控制自動開關閥的動作。 15 上述以光學式藥液感測器可檢驗容器内有無藥液之構 造係揭示於專利文獻1(特開昭62-237324)中。 又，在專利文獻2(特開2000-15082)中，揭示有一種構 造，該構造於藥液開始供給時，會累計容器内的氣壓從大 氣壓開始至預定藥液輸送氣壓之氣體流量，並算出容器内 20 的初期容積及容器内的藥液量，接著，在藥液供給時，累 計壓送用氣體的壓力與流量，並算出藥液輸送量，且於容 器空了之前，切換容器。 以光學式藥液檢知感測器檢出藥液於藥液輸送配管内 消耗完畢後再切換容器之構造中，由於將壓送用氣體混入 1228434 藥液輪送配管，使藥液輸送壓力變動，故容易發生洗淨不 均之情形。 又’由於混入壓送用氣體，藥液會在洗淨裝置的藥液 供㊉口飛散。因此，有因強酸或強驗溶液之藥液飛散液滴 5而損壞之虞，為防止此一損壞，必須設置防止飛散用之蓋 子。 且’因為使用光學性地檢出藥液之感測器，所以必須 合併輪送藥液的物性與特性等來調整在控制裝置中檢驗標 準之起始值。/者，由於位於感測器設置位置之含氟樹脂 10的配管’因藥液而經年劣化，使透明度降低，故無法進行 穩定地檢知藥液。 由上述可知，在根據藥液檢知感測器的檢出信號切換 容器之構造中，藥液無法穩定地供給，因此會有於洗淨裝 置中，無法獲得穩定的洗淨性能之問題。 15 於專利文獻2所公告之構造中，並無將壓送用氣體混入 藥液輸送配管内之情形，因此不會發生上述之不良狀況。 然而’因為每一容器必須有氣體流量檢出裝置及氣體 壓力檢出裝置，並且必須根據從各檢出裝置輸出之檢出信 號算出輸送藥液量，故會使控制裝置中的運算程式變得複 20 雜。 又’氣體流量檢出裝置及氣體壓力檢出裝置，分別存 在個別差異’因此亦必須有修正此差異之作業，而該修正 作業頗為繁雜。 此外’在已停止供給藥液之容器内的氣體壓力回到大 1228434 乳壓時’容器内殘留之已氣化藥液將逆流主壓送用氣體配 e直到達到氣體流量檢出裝置及氣體壓力檢出裝置為 止’使腐蝕甚至於破損。 由上述可知，於專利文件2所記載之構造中，由於分別 5 °又置乳體流量檢出裝置及氣體壓力檢出裝置而使成本提 兩，所以其調整及維持管理的成本也會提高 。因此，以此 鋪液供給裝置所製造之半導體或液晶顯示裝置會有成本 ν之問題。 【發明内容】 10 發明概要 本發明之目的係提供一種可穩定地供給藥液，並且可 降低其初期成本及維持管理成本之藥液供給裝置。 Μ本發明之-態樣的藥液供給裝置，係由壓送用氣體配 &供、口 [送用氣體至加壓容器，並由預備加壓用氣體配管 15 ^刖述壓适用氣體至前述加壓容器，且在預備加壓後由 」述送用氣體g己官供給前述壓送用氣體至前述加壓容 器並且根據則述氣體流量計之檢測值切換供給前述壓送 氣體之加壓容器。 圖式簡單說明 20 第1圖為表示藥液供給裝置之構造圖。 【】 發明之實施型態 1圖說明一將本發明具體化之藥液供給裝置 之實施型態。 1228434 用以由氣體供給源1將藥液壓送氣體供給至兩個加壓 容器2a、2b之壓送氣體配管，包含氣體流量計3，氣體精製 過濾器4a，插置有止逆閥5a之第一壓送用氣體配管6a，與 從第一壓送氣體配管6a分歧之第二及第三壓送用氣體配管 5 6b 、 6c 〇 且，透過第一壓送用氣體配管6a及第二壓送用氣體配 管6b，可將壓送用氣體供給至一加壓容器2a，並透過第一 壓送用氣體配管6a及第三壓送用氣體配管6c，可將壓送氣 體供給至另一加壓容器2b。 10 其中，前述第二及第三壓送用氣體配管6b、6c，分別 插置有自動開關閥7a及7b。 又，於前述氣體供給源1與加壓容器2a、2b之間，係對 於前述第一及第二壓送用氣體配管6a、6b，與第一及第三 壓送用氣體配管6a、6c，分別並聯地設置預備加壓用氣體 15 配管。 該預備加壓用氣體配管包括氣體精製過濾器4b，插置 有止逆闊5b之第一預備加壓用氣體配管8a，與從第一預備 加壓用氣體配管8a分歧之第二及第三預備加壓用氣體配管 8b、8c 〇 20 又，第一及第二預備加壓用氣體配管8a、8b係並聯地 連接於前述第一及第二預備加壓用氣體配管6a、6b，而第 一及第三之壓送用氣體配管8a、8c則並聯地連接於前述第 一及第三壓送用氣體配管6a、6c。 前述第二及第三預備加壓用氣體配管8b、8c，係分別 1228434 插置有自動開關閥9a、9b。 又，前述一加壓容器2a係透過從前述第二壓送用氣體 配管6b分歧之大氣開放用配管i〇a開放於大氣，而前述另一 加壓容器2b則透過從前述第三壓送用氣體配管6c分歧之大 5 氣開放用配管開放於大氣。 此外，前述大氣開放用配管l〇a、i〇b分別插置有自動 開關閥11a、lib。 於前述加壓容器2a、2b中，藥液輸送配管12a、12b之 一端部係插入至同一容器之底部。前述藥液輸送配管12a、 10 !2b之另一端部則透過自動開關閥13a、13b接於共通之藥液 供給配管14，且由該藥液供給配管14將藥液供給至作為藥 液供給目的地之洗淨裝置。 前述自動開關閥7a、7b、9a、9b、11a、lib、13a、13b 的動作，係由控制部15控制，且前述氣體流量計3的檢出值 15 係由控制部15輸出。 接著’說明依上述所構成之藥液供給裝置的動作。在 加壓容器2a、2b充滿藥液的狀態下，首先開啟自動開關閥 9a ’並透過預備加壓用氣體配管8a、8b，供給加壓氣體至 加壓容器2a，且對加壓容器2a進行預備加壓，此時，其他 20 自動開關閥全部關閉。 在開啟自動開關閥9a—預定時間，且對加壓容器2a進 行預備加壓後，將自動開關閥9a關閉，並開啟第二壓送用 氣體配管6b的自動開關閥7a，再開啟藥液輸送配管12a的自 動開關閥13a。如此一來，加壓容器2a的藥液可經過藥液輸 10 1228434 送配管12a，輸送至洗淨裝置。此時，以氣體流量計3檢出 供給至加壓容器2a之壓送用氣體流量，並由控制部15輸出 其檢出值。在控制部15中，藉由累計氣體流量計3之檢出 值，算出已壓送至加壓容器2a之氣體的體積值。此體積值 5 與從加壓容器2a壓送至洗淨裝置之藥液量大致相同。 又，與上述動作同時進行，開啟第三預備加壓用氣體 配管8c的自動開關閥％，並預備加壓加壓容器2b。 當已壓送至加壓容器2a内之體積值超過事先設定之設 定值時，即，當加壓容器2a内的藥液量已低於預定量時， 10藥液輸送配管12a的自動開關閥13a及第二壓送用氣體配管 6b的自動開關閥乃會關閉。 另外’開啟第三壓送用氣體配管6c的自動開關閥7b， 且開啟藥液輸送配管12b的自動開關閥13b。如此一來，則 可停止從加壓容器2b輸送藥液，並接著開始從加壓容器2b 15輸送藥液至洗淨裝置。此時，開啟大氣開放用配管 10a的自 動開關閥lla，使加壓容器2a内的壓力降至大氣壓。 且，當氣體流量計3檢出值的累計值超過預定值時，則 曰關閉第一壓送用氣體配管6c的自動開關閥7b，且藥液輸 配笞12b的自動開關閥13b也會關閉，以停止從加壓容器 2〇 2b輸送藥液至洗淨裝置。此時，開啟大氣開放用配 管10b的 自動開關閥lib ’並使加壓容II 2b内的壓力降至大氣麼。此 逆閥5a，氣化之藥液就不會發生逆流至氣體精 製過濾器4a、4b及氣體流量計3的情形。 在如上述所形成之構造中，可得到以下所示之作用效 11 1228434 果0 (1) 於切換加壓容器2a、2b，並在加壓氣體混入藥液輸 送配管12a之前，可從加壓容器2&切換至加壓容器21)。因 此，可防止加壓氣體混入藥液供給配管14内，故可防止在 5洗淨裝置中的藥液飛散及發生洗淨不均的情形。 (2) 因未使用光學性地檢出藥液之感測器，所以無須配 合輸送之藥液的物性與特性等，來調整在控制部15檢出標 準之起始值。 (3) 輸送至洗淨裝置的藥液供給量，藉由對加壓容器 10 2a、2b進行預備加壓，就可僅以氣體流量計3檢出。因此， 可簡化在控制部15中用以算出輸送藥液量之程式。 (4) 因為僅使用1個氣體流量計3，所以幾乎不需要修正 該氣體流量計3的檢出值。 (5) 藉由止逆閥5a、5b，可防止加壓容器2a、2b内的氣 15化藥液逆流至氣體精製過濾器4a、4b或氣體流量計3的情 形。因此，可防範氣體精製過濾器4a、4b或氣體流量計3之 腐韻於未然。 (6) 藉由上述(3)、（4)、（5)之作用效果，可降低藥液供 給裝置的初期成本及維修成本。 20 上述之實施型態可以下列方式變更。 即使加壓容器在3個以上，也同樣可實施。 發明之效果 如以上詳述内容，本發明可提供一種可穩定地供給藥 液’且可降低其初期成本及維持管理成本之藥液供給裝置。 12 1228434 c圖式簡單說明3 第1圖為表示藥液供給裝置之構造圖。 【圖式之主要元件代表符號表】 1...供給源 6a4c...壓送用氣體配管 3...氣體流量計 7a、7b、9a、9b、11a、lib、13a、 14...藥液供給配管 13b...自動開關閥 15...控制部 8a〜8c...預備加壓用氣體配管 2a、2b...加壓容器 10a、10b...大氣開放用配管 4a、4b··.氣體精製過濾器 5a、5b...止逆閥 12a、12b····藥液輸送配管 131228434 发明 Description of the invention: L Sai ^ Sun, Moon, and Household Cold Disappearing ^ 3 Field of the Invention The present invention relates to a medicinal solution supply device used in the manufacturing process of a semiconductor device or a liquid crystal display device. In the wafer and liquid crystal substrate cleaning process, the high-purity medicine is hydraulically sent to the wafer and liquid crystal substrate cleaning device by pressurizing high-purity gas and flowing it into a pressurized container containing a high-purity chemical liquid. Wait. In such a chemical liquid supply device, it is necessary to stably transport the chemical liquid to the cleaning device. 10 [Prior art] Prior art 15 So far, in the medicinal solution supply device for transporting medicinal solution to the washing device, the medicinal solution is contained in the medicinal solution delivery pipe and pressure feeding connected to the medicinal solution and conveyed toward the washing device. Inside the container with gas piping. The chemical liquid delivery pipe is inserted below the liquid level of the chemical liquid in the device, and the gas delivery piping system is connected so that the gas can be ejected to the upper part of the container. In addition, by supplying the pressure-feed gas to the container, the medicinal solution can be extruded from the container to the medicinal-solution delivery pipe, and can be rotated to the cleaning device. High-purity nitrogen can be used as the pressure-feed gas. One is a general inspection and supply device, which is provided with a container that is thin enough to contain a medicinal solution, and the medicinal solution conveying piping system is connected to each container by an automatic opening and branching. In addition, the gas pipe for pressure feeding is divided between the supply destination and each container, and the gas is supplied to each container through automatic opening. 'Qiao Qiao Kai's automatic 20 1228434 on-off valve connected to the piping of the pressure delivery body and opened the automatic on-off valve of the medicinal-liquid delivery pipe connected to the container. Then, the chemical solution is transferred from a container to the washing device. At this time, the pressure feeding gas piping and the chemical liquid transporting piping connected to another container are closed. 5 — Once the medicinal solution in the container is consumed, the automatic opening and closing valves of the pressure feeding gas piping and the medicinal liquid delivery piping connected to the container will be closed, and the pressure feeding gas piping and medicinal liquid connected to another container will be opened at the same time. Automatic on-off valve for delivery piping. Therefore, the container can be switched and the chemical liquid can be continuously supplied to the cleaning device. In the above-mentioned switching operation of the container, in order to detect the consumption of the medicinal solution 10 in the container, a part of the medicinal solution delivery pipe is formed of a transparent or translucent fluororesin, and is optically detected and sensed. The device detects whether the medicinal solution flows in the pipe. In addition, the output signal of the sensor can be detected based on the medicinal solution, and the operation of the automatic opening and closing valve can be controlled by the control device. 15 The above-mentioned structure for detecting the presence or absence of a medicinal solution in a container with an optical medicinal liquid sensor is disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 62-237324). In addition, Patent Document 2 (Japanese Patent Application Laid-Open No. 2000-15082) discloses a structure that calculates a gas flow rate from the atmospheric pressure to a predetermined chemical liquid transport pressure when the chemical liquid starts to be supplied, and calculates The initial volume of the container 20 and the amount of the medicinal solution in the container, and then, when the medicinal solution is supplied, the pressure and flow rate of the pressure-feed gas are accumulated to calculate the medicinal solution delivery amount, and the container is switched before the container is empty. The optical liquid detection sensor detects that the chemical liquid is consumed in the chemical liquid delivery pipe and then switches the container. The pressure delivery gas is mixed into the 1228434 chemical liquid delivery pipe, which changes the chemical liquid delivery pressure. Therefore, it is prone to uneven washing. Since the pressure-feed gas is mixed, the chemical solution is scattered at the chemical solution supply port of the cleaning device. Therefore, there is a risk of damage due to the scattered droplets 5 of the strong acid or strong test solution. To prevent such damage, a cover for preventing scattering must be provided. Furthermore, since a sensor that detects the medicinal solution optically is used, it is necessary to adjust the initial value of the inspection standard in the control device by combining the physical properties and characteristics of the medicated solution. In addition, since the piping of the fluororesin 10 located at the sensor installation position is degraded over time due to the chemical solution, the transparency is reduced, and the chemical solution cannot be detected stably. From the above, it can be seen that in the structure of the container that is switched based on the detection signal of the chemical liquid detection sensor, the chemical liquid cannot be stably supplied, and therefore there is a problem that a stable cleaning performance cannot be obtained in the cleaning device. 15 In the structure disclosed in Patent Document 2, there is no case where the pressure-feed gas is mixed into the medicinal-liquid delivery pipe, so the above-mentioned disadvantages do not occur. However, 'Because each container must have a gas flow detection device and a gas pressure detection device, and the amount of liquid medicine to be transported must be calculated based on the detection signals output from each detection device, the calculation program in the control device becomes Complex 20 miscellaneous. There are also individual differences between the "gas flow detection device and the gas pressure detection device", so there must be an operation to correct this difference, and the correction operation is quite complicated. In addition, 'When the gas pressure in the container where the supply of chemical liquid has stopped being returned to a large 1228434 milk pressure', the gasified chemical liquid remaining in the container will be equipped with a countercurrent main pressure feed gas e until the gas flow detection device and the gas pressure are reached. Until the device is detected, it can cause corrosion or even damage. From the above, it can be seen that in the structure described in Patent Document 2, since the milk flow detection device and the gas pressure detection device are separately installed at 5 ° to increase the cost, the cost of adjustment and maintenance management will also increase. Therefore, the semiconductor or liquid crystal display device manufactured by the liquid supply device has a problem of cost ν. [Summary of the invention] 10 Summary of the invention The object of the present invention is to provide a medicinal solution supply device that can stably supply a medicinal solution and reduce its initial cost and maintenance management cost. The chemical liquid supply device according to the aspect of the present invention is composed of a pressure feeding gas & supply and mouth [sending gas to a pressurized container, and a pre-pressurizing gas piping 15 The pressurized container is supplied with the pressurized gas to the pressurized container from the pressurized gas g after the pressurization, and the pressurization of the pressurized gas is switched according to the detection value of the gas flow meter. container. Brief Description of Drawings 20 Fig. 1 is a structural diagram showing a chemical liquid supply device. [Implementation Mode of the Invention] Fig. 1 illustrates an implementation mode of the medicinal solution supply device embodying the present invention. 1228434 Pressure supply gas piping for supplying medicine pressure gas from two gas supply sources 1 to two pressurized containers 2a and 2b, including gas flow meter 3, gas refining filter 4a, and the first one with check valve 5a inserted The first pressure-feed gas pipe 6a is different from the second and third pressure-feed gas pipes 5 6b and 6c from the first pressure-feed gas pipe 6a, and passes through the first pressure-feed gas pipe 6a and the second pressure feed. The gas piping 6b can supply pressure-feeding gas to one pressurized container 2a, and through the first pressure-feeding gas piping 6a and the third pressure-feeding gas piping 6c, the pressure-feeding gas can be supplied to another pressurization. Container 2b. 10 Among them, the above-mentioned second and third pressure feeding gas pipes 6b and 6c are respectively inserted with automatic opening and closing valves 7a and 7b. Further, between the gas supply source 1 and the pressurized containers 2a and 2b, the first and second pressure-feed gas pipes 6a and 6b and the first and third pressure-feed gas pipes 6a and 6c, The preliminary pressurizing gas 15 pipes are provided in parallel. The pre-pressurization gas piping includes a gas purification filter 4b, a first pre-pressurization gas piping 8a in which a check valve 5b is inserted, and second and third branches diverging from the first pre-pressurization gas piping 8a. Pre-pressurization gas piping 8b, 8c 020 The first and second pre-pressurization gas piping 8a, 8b are connected in parallel to the first and second pre-pressurization gas piping 6a, 6b, and the first The first and third pressure feed gas pipes 8a and 8c are connected in parallel to the first and third pressure feed gas pipes 6a and 6c. The second and third pre-pressurization gas pipes 8b and 8c are respectively provided with automatic switching valves 9a and 9b inserted in 1228434. In addition, the one pressurized container 2a is opened to the atmosphere through an atmospheric opening pipe i0a branched from the second pressure-feed gas pipe 6b, and the other pressurized container 2b is transmitted through the third pressure-feed pipe. Gas piping 6c diverges greatly 5 The gas piping is opened to the atmosphere. In addition, the automatic opening and closing valves 11a and 11b are respectively inserted into the atmospheric opening pipes 10a and 10b. In the aforementioned pressurized containers 2a and 2b, one end portions of the medicinal-solution delivery pipes 12a and 12b are inserted into the bottom of the same container. The other ends of the aforementioned medicinal-liquid delivery pipes 12a, 10 and 2b are connected to a common medicinal-liquid supply pipe 14 through automatic opening and closing valves 13a and 13b, and the medicinal-liquid supply pipe 14 supplies the medicinal-liquid to the purpose of medicinal-liquid supply. Ground cleaning device. The operations of the automatic on-off valves 7a, 7b, 9a, 9b, 11a, lib, 13a, 13b are controlled by the control unit 15, and the detection value 15 of the gas flow meter 3 is output by the control unit 15. Next, the operation of the medicinal solution supply device configured as described above will be described. In the state where the pressurized containers 2a and 2b are filled with the medicinal solution, first, the automatic opening and closing valve 9a 'is opened and the pressurized gas is supplied to the pressurized container 2a through the preliminary pressurizing gas pipes 8a and 8b, and the pressurized container 2a is Pre-pressurization, at this time, all other 20 automatic on-off valves are closed. After the automatic on-off valve 9a is opened for a predetermined time and the pressurized container 2a is pre-pressurized, the automatic on-off valve 9a is closed, and the automatic on-off valve 7a of the second pressure feeding gas pipe 6b is opened, and then the liquid medicine delivery is started The automatic opening and closing valve 13a of the piping 12a. In this way, the medicinal solution of the pressurized container 2a can be sent to the washing device through the medicinal solution delivery pipe 10 1228434. At this time, the flow rate of the pressure-feed gas supplied to the pressurized container 2a is detected by the gas flow meter 3, and the detected value is output by the control unit 15. The control unit 15 calculates the volume value of the gas that has been pressure-fed to the pressurized container 2a by accumulating the detected value of the gas flow meter 3. This volume value 5 is approximately the same as the amount of the chemical solution fed from the pressurized container 2a to the cleaning device. Simultaneously with the above operation, the automatic on-off valve% of the third preliminary pressurizing gas pipe 8c is opened, and the preliminary pressurizing container 2b is opened. When the volume value that has been pressure-fed into the pressurized container 2a exceeds a preset value, that is, when the amount of the medicinal solution in the pressurized container 2a has fallen below a predetermined amount, 10 the automatic opening and closing valve of the medicinal-solution delivery pipe 12a 13a and the automatic on-off valve of the second pressure feed gas pipe 6b are closed. In addition, 'the automatic on-off valve 7b of the third pressure-feed gas pipe 6c is opened, and the automatic on-off valve 13b of the chemical liquid delivery pipe 12b is opened. In this way, the delivery of the chemical liquid from the pressurized container 2b can be stopped, and then the delivery of the medical liquid from the pressurized container 2b 15 to the washing device can be started. At this time, the automatic opening / closing valve 11a of the atmosphere release pipe 10a is opened, and the pressure in the pressurized container 2a is reduced to atmospheric pressure. Moreover, when the cumulative value detected by the gas flow meter 3 exceeds a predetermined value, the automatic on-off valve 7b of the first pressure-feed gas piping 6c is closed, and the automatic on-off valve 13b of the medicinal fluid delivery 笞 12b is also closed. To stop the delivery of the medicinal solution from the pressurized container 202b to the washing device. At this time, is the automatic on-off valve lib 'of the atmosphere opening pipe 10b opened to reduce the pressure in the pressurized volume II 2b to the atmosphere. With this reverse valve 5a, the vaporized chemical liquid does not flow back to the gas purification filters 4a, 4b and the gas flow meter 3. In the structure formed as described above, the following effects can be obtained: 11 1228434 Fruit 0 (1) Before switching the pressurized containers 2a and 2b, the pressurized gas can be switched from Container 2 & switches to pressurized container 21). Therefore, it is possible to prevent the pressurized gas from being mixed into the medicinal solution supply pipe 14, so that it is possible to prevent the medicinal solution from being scattered in the cleaning device and uneven washing. (2) Since no sensor for optically detecting the medicinal solution is used, it is not necessary to match the physical properties and characteristics of the medicinal solution being conveyed to adjust the initial value of the detection standard of the control unit 15. (3) The amount of chemical liquid supplied to the cleaning device can be detected only by the gas flow meter 3 by pre-pressurizing the pressure vessels 10 2a and 2b. Therefore, the program for calculating the amount of the medicinal solution to be transported in the control unit 15 can be simplified. (4) Since only one gas flow meter 3 is used, there is almost no need to correct the detection value of the gas flow meter 3. (5) With the check valves 5a and 5b, the gaseous chemical liquid in the pressurized containers 2a and 2b can be prevented from flowing back to the gas purification filters 4a and 4b or the gas flow meter 3. Therefore, it is possible to prevent deterioration of the gas purification filters 4a, 4b or the gas flow meter 3. (6) The above-mentioned effects (3), (4), and (5) can reduce the initial cost and maintenance cost of the chemical liquid supply device. 20 The above implementation modes can be changed in the following ways. The same can be applied even if there are three or more pressurized containers. Effects of the Invention As described in detail above, the present invention can provide a medicinal solution supply device that can stably supply a medicinal solution 'and reduce its initial cost and maintenance management cost. 12 1228434 c Brief description of the diagram 3 Figure 1 shows the structure of the medicinal solution supply device. [Character table of main components of the figure] 1 ... supply source 6a4c ... gas pipe for pressure feeding 3 ... gas flow meters 7a, 7b, 9a, 9b, 11a, lib, 13a, 14 ... Chemical liquid supply piping 13b ... Automatic on-off valve 15 ... Control units 8a to 8c ... Preparation pressurization gas piping 2a, 2b ... Pressurized containers 10a, 10b ... Air release piping 4a, 4b ... Gas purification filters 5a, 5b ... Non-return valves 12a, 12b ... Chemical solution delivery piping 13