1226959 案號92126996_年月日 修正_ 五、發明說明（1) 【發明所屬之技術領域】 本創作與一種影像辨識用面光源裝置改良有關，特別 關於一種在二極體（d i 〇 d e )、功率電晶體（ρ 〇 w e r transistor )等電力元件、或印刷配線電路基板、液晶面 板其他元件類之製造或檢查之際，作為將對象影像之電路 影像圖案等投影至目標物之試料等表面，或將對象影像攝 入檢查裝置所使用的面光源裝置。 【先前技術】 由於科技日趨發達，電子產品不斷推陳出新，不但功 能愈來愈強大，且體積愈做愈小，在此情況下，產品内部 之元件勢必更小更精密。愈精密的元件故障不良的機率愈 大，故元件於製造時的檢測工作顯的特別重要。目前之檢 測方法多利用點光源做為投影或穿透之光源，例如在製造 印刷配線電路基板用的曝光機上，在要將影像圖案對位時 ，乃是以C C D (電荷結合元件影像感知器）攝入影像，而 使用習知之點光源時，多少都會有影像欠缺鮮明的問題。 請參閱第七圖，係為習用點光源k(如第七（a)圖所示）與影 像圖案1 (如第七（c )圖所示）及投影影像之關係，影像圖案 1 ，是利用光的回折，使從邊緣到内側均環繞光線，因為 會產生薄影（ghost ) 1Π ，所以，影像圖案1的輪廓Γ會變 細，在臨界上，將難以區別數字7 (如第七（b )圖所示）與 1 ，為其問題之一。另，很多情況，光源會使用鹵素燈或 L E D (發光二極體），但這些光源仍都會發生上述之問題1226959 Case No. 92126996_Revision of the month, year and year_ 5. Description of the invention (1) [Technical field to which the invention belongs] This creation is related to the improvement of a surface light source device for image recognition, and particularly relates to a diode (diode), When manufacturing or inspecting power components such as power transistor, printed wiring circuit board, and other components of liquid crystal panels, it is used to project the circuit image pattern of the target image onto the surface of the target sample or the like, or A surface light source device used for taking an image of a subject into an inspection device. [Previous technology] Due to the development of technology, electronic products are constantly being introduced. Not only are the functions becoming more powerful, but the size is becoming smaller. In this case, the components inside the product are bound to be smaller and more precise. The more precise the component is, the greater the probability of failure is, so the detection of the component during manufacturing is particularly important. Current detection methods mostly use a point light source as a light source for projection or penetration. For example, on an exposure machine for manufacturing printed wiring circuit boards, when aligning image patterns, a CCD (Charge Coupled Element Image Sensor) is used. ) Ingest images, and when using a conventional point light source, there will be some lack of sharp images. Please refer to the seventh image, which is the relationship between the conventional point light source k (as shown in the seventh (a)) and the image pattern 1 (as shown in the seventh (c)) and the projected image. The image pattern 1 is used The light folds around the light from the edge to the inside. Because ghost 1Π will be generated, the outline Γ of image pattern 1 will become thinner. On the threshold, it will be difficult to distinguish the number 7 (such as the seventh (b )) And 1 as one of its problems. In addition, in many cases, halogen lamps or LEDs (light emitting diodes) are used as the light source, but these problems still occur in these light sources.
第7頁 1226959 案號92126996_年月曰 修正_ 五、發明說明（2) 。這是因為以上之點光源無法避免光之回折及亂反射等問 題。但是，影像圖案周圍產生薄影1 "，在以C C D感知器作 影像處理時，常會發生像素漏失（p i X e 1 - 1 〇 s s )，而無法 正確辨識影像的情形，問題不在少數。 有鑑於習知光源裝置之缺憾，本創作人有感其未至臻 完善，遂竭盡心智，悉心研究克服，憑從事該項產業多年 _ 之經驗累積，進而創作出一種影像辨識用面光源裝置，藉 . 由基於面光源之平行光線，辨識所要的影像圖案。 【發明内容】 爰是，本發明之主要目的即在提供一種可以藉由平行 φ 光線進行影像辨識之面發光源裝置。 本發明之次要目的即在於可攝入高精度之影像。 為達上述目的，本發明乃為一種講求可以發揮具有涵 蓋對象影像之電路影像圖案等全體之大小的電子發光功能 之面發光部，作為面光源使用，並藉由基於面光源之平行 光線，辨識所要的影像圖案之手段。而該面光源裝置，乃 、 使用於二極體（diode)、電源電晶體（power transistor )等電力元件、或印刷配線電路基板、液晶面 板其他元件類之製造或檢查之際，將對象影像之電路影像 圖案等投影至目標物之試料等表面、或將對象影像攝入檢 查裝置。本發明所謂之目標物，在二極體方面是指由單晶 籲 矽構成之晶片類、或CCD結影面等。此外，所謂之對象影 像，是指投影對象之影像的意思。此外，所謂投影，在本Page 7 1226959 Case No. 92126996_Year Month Amendment_ V. Description of Invention (2). This is because the above point light sources cannot avoid problems such as light retracement and random reflection. However, thin shadows 1 are generated around the image pattern. When using a CC sensor as the image processing, pixel loss (p i X e 1-10 s s) often occurs, and the image cannot be correctly identified, and there are not a few problems. In view of the shortcomings of the conventional light source device, the creator felt that it was not perfect, so he tried his best to study and overcome it. Based on the experience accumulated in the industry for many years, he created a surface light source device for image recognition. By means of parallel light based on area light sources, the desired image pattern is identified. [Summary of the Invention] The main purpose of the present invention is to provide a surface light source device capable of image recognition by parallel φ rays. A secondary object of the present invention is to obtain high-resolution images. In order to achieve the above-mentioned object, the present invention is a surface light-emitting portion that can exert electronic light-emitting functions having the entire size of a circuit image pattern covering a target image. The surface light-emitting portion is used as a surface light source, and is identified by parallel light based on the surface light source. Means of desired image pattern. The surface light source device is used in the manufacture or inspection of power components such as diodes, power transistors, printed wiring circuit boards, and other components of liquid crystal panels. Circuit image patterns and the like are projected on the surface of the sample of the target object, or the target image is taken into the inspection device. The so-called target in the present invention means, in terms of a diode, a wafer composed of a single crystal silicon, or a CCD shadow plane. In addition, the so-called object image means the image of the projected object. In addition, the so-called projection, in this
第8頁 1226959 案號 92126996 年 月 曰 修正 五、發明說明（3) 發明中，無論是穿透照明或反射照明，都是指將對象影像 投映或攝入於目標物表面。另，本發明中使用具有涵蓋對 象影像之電路影像圖案等全體之大小的面發光元件或面發 光膜作為面光源。電子發光片（EL sheet)可以適用作為 面發光元件。電子發光片是一種片狀的面發光元件，其配 置有含發光層之表面電極、及背面電極，夾住絕緣層，此 兩電極具有透過變頻器施加交流電壓之構造，發光層則為 有螢光體分散於高誘電率夾片中，因此可以使全面發光。 此外，發揮電子發光功能的面發光部，亦可利用濺鍍法或 印刷法等成膜手段，將有螢光體分散於高誘電率夾片中之 成膜部分形成。 是故，可以將所要的影像圖案，藉由具有電子發光功 能、基於面光源之平行光線，投映在目標物表面。如圖8 (a )所示，影像圖案是藉由將EL發光片作為面光源j的平 行光線，投影在目標物表面的，所以，對象影像L可以在 目標物Μ表面投影出很鮮明的投影像L ’ 。因此，即使是如 圖8(b) 、 （c)所示的7或1之圖形，也不會在邊緣產生 薄影，而可以投影出具有同形同大之清楚的影像。 兹做 ，明 效發 功本 及對 徵， 特式 、圖 的之 目附 之所 明合 發配 本並 解， 瞭例 員施 委實 查之 審體 I貴具 法 述 方使下 施為由 實藉 的 成 構 所 用 明 照 透 穿 明 發 本 係 后圖 如一 明第 說閱 ，參 明請 說’ 細先 詳首Page 8 1226959 Case No. 92126996 Month Amendment V. Explanation of the Invention (3) In the invention, whether it is through-illumination or reflected illumination, it refers to projecting or ingesting the image of the object on the surface of the target. Further, in the present invention, a surface light emitting element or a surface light emitting film having an entire size including a circuit image pattern of an object image is used as the surface light source. An EL sheet can be suitably used as a surface light emitting element. An electronic light-emitting sheet is a sheet-like surface light-emitting element, which is provided with a surface electrode including a light-emitting layer and a back electrode, sandwiching an insulating layer. The two electrodes have a structure for applying an AC voltage through a frequency converter, and the light-emitting layer is fluorescent. The light body is dispersed in the high-inductivity clip, so that it can emit light all over. In addition, the surface light-emitting portion exhibiting an electron-emitting function can also be formed by dispersing phosphors in a film-forming portion of a high-attractivity clip using a film-forming method such as a sputtering method or a printing method. Therefore, the desired image pattern can be projected on the surface of the target by using parallel light rays based on the area light source with electronic light emitting function. As shown in FIG. 8 (a), the image pattern is projected on the surface of the target by using the EL light sheet as the parallel light of the surface light source j, so the target image L can project a very clear projection on the surface of the target M Like L '. Therefore, even a 7 or 1 pattern as shown in Figs. 8 (b) and (c) will not produce thin shadows on the edges, but can project a clear image with the same size and the same size. We are here to make a clear contribution to the performance and countermeasures. The special and graphical designation attached to the specified distribution and reconciliation, the case of the official examination of the Commissioner of the Commission, I have the right to do so under the law. The borrowed Chenggou used the bright photos to see through the Mingfa. After the picture is read, please refer to it. Please refer to it first.
第9頁 1226959 案號92126996_年月日__ 五、發明說明（4) 本發明相關之影像辨識用面光源裝置1 0之例1 ，1 1是作為 面光源的電子發光片、1 2是絕緣盒體、1 3是絕緣電線，電 子發光片1 1是如舖設於圓形框架1 4之平面狀。 請參閱第二圖，係反射照明用所構成的本發明相關之 影像辨識用面光源裝置2 0之例2，2 1是中心部設有開口 2 5 ，平面狀形成的面光源電子發光片，2 2是絕緣盒體、2 3是 絕緣電線，2 4是圓形框架。此外，圖3是反射照明用面光 源裝置3 0之例3，3 1是發揮成膜於圓錐台形狀形成之基材 3 4内面之電子發光功能的面光源之面發光部，3 2是絕緣盒 體、3 3是絕緣電線，3 5是中心部之開口。 請參閱第三圖，圖2及圖3所示之反射照明用面光源裝 置2 0、3 0 ，是以圖6所示之配置使用。亦即，工作目標記 號1 5，設於利用對位機構1 7操作的工作台1 8上，與此相對 的，由C C D影像感知器構成的目標物1 6則配置於外部，在 此之間，配置反射照明用面光源裝置2 0、3 0，工作目標記 號1 5等對象影像，會從各面光源裝置2 0、3 0之中心部開口 2 5、3 5誘導至目標物1 6。是故，面光源裝置2 0之光源光， 會以平行光線照明光具目標記號1 5 ’及工作目標記號1 5， 使該對象影像在目標物1 6結影。此外，高輝度型之面光源 裝置30 ，亦可如上述一樣使用，但因其高輝度，適用於具 有半透明光阻劑（r e s i s t )膜之目標記號，具有加大影像 辨識時之灰階幅度的效果。 請參閱第四圖，係大面積曝光桌所用的影像辨識用面 光源裝置4 0之例4，4 1是大面積之面光源的電子發光片，Page 9 1226959 Case No. 92126996_year month__ V. Description of the invention (4) Example 1 of a surface light source device 10 for image recognition related to the present invention, 1 1 is an electronic light-emitting sheet as a surface light source, 1 2 is The insulated boxes 1 and 3 are insulated wires, and the electronic light-emitting sheet 11 is in a flat shape laid on a circular frame 14. Please refer to the second figure, which is an example 2 of a surface light source device 20 for image recognition related to the present invention, which is constituted for reflective lighting, and 21 is a surface light source electronic light-emitting sheet with an opening 2 5 at the center and a planar shape. 22 is an insulated box body, 23 is an insulated wire, and 24 is a circular frame. In addition, FIG. 3 is an example 3 of a surface light source device 30 for reflective lighting, 31 is a surface light emitting portion of a surface light source that exhibits an electron-emitting function of the inner surface of a substrate 34 formed in the shape of a truncated cone, and 32 is an insulation The boxes 3 and 3 are insulated wires, and 35 are openings in the center. Referring to the third figure, the surface light source devices 20 and 30 for reflective lighting shown in FIGS. 2 and 3 are used in the configuration shown in FIG. 6. That is, the work target mark 15 is set on the work table 18 operated by the alignment mechanism 17, while the target 16 made of a CCD image sensor is arranged outside, and there is The target image such as surface light source devices 20 and 30 for reflective lighting and working target mark 15 will be induced to the target 16 from the center openings 25 and 35 of each surface light source device 20 and 30. Because of this, the light source light of the surface light source device 20 will illuminate the light target mark 15 and the work target mark 15 with parallel light, so that the target image will be formed on the target 16. In addition, the high-brightness type surface light source device 30 can also be used as described above, but because of its high brightness, it is suitable for the target mark with a translucent resist film, which has a larger gray scale when identifying the image. Effect. Please refer to the fourth figure, which is an example 4 of a surface light source device 40 for image recognition used in a large-area exposure table. 41 is an electronic light-emitting sheet of a large-area surface light source.
第10頁 1226959 案號 92126996 年 月 曰 修正 五、發明說明（5) 4 2是絕緣盒體、4 3是絕緣電線，4 4是長方形的框架。該例 4，是如印刷配線電路基板之檢查裝置等大型之影像辨識 所使用的，適用於將例1至例3之面光源裝置1 0、2 0、3 0所 無法涵蓋之對象影像投影至目標物。例4之面光源裝置4 0 ，亦可使用電子發光片形成，此外，亦可如例3 —樣，利 用濺鍍法等成膜手段，將有螢光體分散於高誘電率夾片中 之電子發光物質成膜於基板面上。 再請參閱第五圖與第六圖，係為適用本發明之穿透照 明方式的曝光機說明圖與適用本發明之反射照明方式的曝 光機說明圖。如圖所示，該穿透照明用面光源裝置1 0可將 作為對象影像之工作目標記號（work target mark) 15 ，投影於從C C D影像感知器形成的目標物1 6。工作目標記 號1 5，乃設於利用對位機構1 7操作的工作台（w 〇 r k s t a g e )1 8上。穿透照明用面光源裝置1 0中的光源光，會穿透光 具目標言己號(photo tool target mark ) 15’及作目標 記號1 5，呈平行光線到達目標物1 6，在該處結影成鮮明的 投影像。因為是面光源裝置1 0之平行光線，所以不會發生 習知點光源之光的回折與局部反射等情形，可以大幅減少 影像辨識之攝入錯誤。 因此，本發明可以藉由基於如例示之面光源裝置1 0、 2 0、3 0、4 0之平行光線，將所要對象影像之影像圖案等投 影至目標物1 6，進行影像辨識。各面光源裝置1 0、2 0、3 0 、4 0之自體具體型態可任意決定，形狀亦不拘，構造上亦 可自由選擇採用電子發光片、或藉由發揮電子發光功能的Page 10 1226959 Case No. 92126996 Date of Amendment V. Description of the Invention (5) 4 2 is an insulated box body, 4 3 is an insulated wire, and 4 4 is a rectangular frame. This example 4 is used for large-scale image recognition such as an inspection device of a printed wiring circuit board, and is suitable for projecting an image of an object that cannot be covered by the surface light source devices 10, 20, and 30 of examples 1 to 3 to Target. The surface light source device 40 of Example 4 can also be formed by using an electronic light-emitting sheet. In addition, as in Example 3, a phosphor can be dispersed in a high-inductivity clip by using a film-forming method such as sputtering. The electroluminescent substance is formed on the substrate surface. Please refer to FIGS. 5 and 6 again, which are explanatory diagrams of an exposure machine to which the penetrating illumination method of the present invention is applied and explanatory diagrams of an exposure machine to which the reflection illumination method of the present invention is applied. As shown in the figure, the surface light source device 10 for penetrating illumination can project a work target mark 15 as a target image onto a target 16 formed from a CC image sensor. The work target mark 15 is set on a work table (w ○ rk s t a g e) 18 operated by the alignment mechanism 17. The penetrating light from the surface light source device 10 for illumination will pass through the photo tool target mark 15 'and the target mark 15, and reach the target 16 in parallel light rays. The result is a sharp projection image. Because it is a parallel light of the surface light source device 10, it does not happen that the light of the point light source is reflexed and partially reflected, which can greatly reduce the intake error of image recognition. Therefore, the present invention can perform image recognition by projecting the image pattern of the desired object image to the target object 16 based on the parallel light rays of the surface light source devices 10, 20, 30, and 40 as exemplified. The specific type of each of the surface light source devices 10, 20, 30, and 40 can be arbitrarily determined, and the shape is not limited. The structure can also freely choose to use an electronic light-emitting sheet, or use an electronic light-emitting function.
第11頁 1226959 t 號 92126996 A_η 曰 修正 五、發明說明（6) 成膜部分所形成的膜狀物。 本發明如以上之構造及作用，可利用平行光線進行影 像辨識，所以不會發生如習知點光源進行影像辨識時常發 生的像素漏失，而可以鮮明的辨識影像，達到高精度的影 像攝入，且對成本上或财久性上均為有利。 以上所述僅為本創作之較佳實施例而已，並非用以限 定本創作之申請專利範圍；凡其他未脫離本創作所揭示之 精神下所完成之等效改變或修飾，均應包含在下述之申請 專利範圍内。Page 11 1226959 t No. 92126996 A_η Revision V. Description of the invention (6) The film formed in the film forming part. According to the above structure and function of the present invention, image recognition can be performed by using parallel light, so that pixel leakage, which often occurs in image recognition like a conventional point light source, does not occur, and the image can be clearly recognized to achieve high-precision image intake. And it is beneficial in terms of cost or longevity. The above is only a preferred embodiment of this creation, and is not intended to limit the scope of the patent application for this creation; all other equivalent changes or modifications made without departing from the spirit disclosed by this creation shall be included in the following Within the scope of patent application.
第12頁 1226959 案號 92126996_年月日_Hi_ 圖式簡單說明 第一圖（a )係本發明相關之影像辨識用面光源裝置之實 施型態例1之正面圖。 第一圖（b )係本發明相關之影像辨識用面光源裝置之實 施型態例1之侧面圖。 第二圖（a )係本發明相關之影像辨識用面光源裝置之實 施型態例2之正面圖。 第二圖（b )係本發明相關之影像辨識用面光源裝置之實 施型態例2之側面圖。 第三圖（a )係本發明相關之影像辨識用面光源裝置之實 施型態例3之正面圖。 第三圖（b )係本發明相關之影像辨識用面光源裝置之實 施型態例3之側面圖。 第四圖（a )係本發明相關之影像辨識用面光源裝置之實 施型態例4之正面圖。 第四圖（b )係本發明相關之影像辨識用面光源裝置之實 施型態例4之侧面圖。 第五圖係適用本發明之穿透照明方式的曝光機說明圖。 第六圖係適用本發明之反射照明方式的曝光機說明圖。 第七圖（a )係為習用點光源之結影模式圖。 第七圖（b )係為習用點光源之結影例1圖。 第七圖（c )係為習用點光源之結影例2圖。 第八圖（a )係為本發明之結影模式圖。 第八圖（b )係為本發明之結影例1圖。 第八圖（c )係為本發明之結影例2圖。Page 12 1226959 Case number 92126996_ 年月 日 _Hi_ Brief description of the drawing The first figure (a) is a front view of the implementation example 1 of the surface light source device for image recognition related to the present invention. The first figure (b) is a side view of an implementation example 1 of a surface light source device for image recognition according to the present invention. The second figure (a) is a front view of an implementation example 2 of a surface light source device for image recognition according to the present invention. The second figure (b) is a side view of an implementation example 2 of a surface light source device for image recognition according to the present invention. The third figure (a) is a front view of an implementation example 3 of a surface light source device for image recognition according to the present invention. The third figure (b) is a side view of an embodiment 3 of an embodiment of a surface light source device for image recognition according to the present invention. The fourth figure (a) is a front view of an implementation example 4 of a surface light source device for image recognition according to the present invention. The fourth figure (b) is a side view of an implementation example 4 of a surface light source device for image recognition according to the present invention. The fifth figure is an explanatory diagram of an exposure machine to which the penetrating illumination method of the present invention is applied. The sixth figure is an explanatory diagram of an exposure machine to which the reflection illumination method of the present invention is applied. The seventh picture (a) is a shadowing mode diagram of a conventional point light source. The seventh picture (b) is a picture 1 of an example of a conventional point light source. The seventh image (c) is a second example of a conventional point light source. The eighth figure (a) is a schematic diagram of the present invention. The eighth figure (b) is a drawing 1 of a final example of the present invention. The eighth figure (c) is a second example of the final result of the present invention.
第13頁 1226959 案號 92126996 Λ_η 修正 圖式簡單說明 【圖號對照說明】 影像圖案 L，1〇 1 2 141 5 17 2〇 2 2 2 4 3 0 3 2 3 4 4〇4 2 4 4 Κ · 薄影 投影像 面光源裝置 絕緣盒體 圓形框架 工作目標記號 對位機構 面光源裝置 絕緣盒體 圓形框架 面光源裝置 絕緣盒體 基材 面光源裝置 絕緣盒體 長方形框架 點光源 L Μ 8 22 444 影像圖案輪廓 對象影像 目標物 電子發光片 絕緣電線 工作目標記號 目標物 工作台 電子發光片 絕緣電線 開口 面發光部 絕緣電線 開口 電子發光片 絕緣電線 開口Page 13 1226959 Case No. 92126996 Λ_η A simple explanation of the correction pattern [Pattern number comparison explanation] Image pattern L, 〇1 2 141 5 17 2〇2 2 2 4 3 0 3 2 3 4 4〇4 2 4 4 Κ · Thin shadow projection image surface light source device insulated box circular frame work target mark alignment mechanism surface light source device insulated box circular frame surface light source device insulated box body surface light source device insulated box rectangular frame point light source LM 8 22 444 image pattern outline object image target electronic light-emitting sheet insulated wire work target mark target stage electronic light-emitting sheet insulated wire opening surface light-emitting part insulated wire opening electronic light-emitting sheet insulated wire opening
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