TW585998B - Fiber grating sensor of energy modulation type - Google Patents

Fiber grating sensor of energy modulation type Download PDF

Info

Publication number
TW585998B
TW585998B TW92114472A TW92114472A TW585998B TW 585998 B TW585998 B TW 585998B TW 92114472 A TW92114472 A TW 92114472A TW 92114472 A TW92114472 A TW 92114472A TW 585998 B TW585998 B TW 585998B
Authority
TW
Taiwan
Prior art keywords
fiber
energy
light
grating
wavelength
Prior art date
Application number
TW92114472A
Other languages
Chinese (zh)
Other versions
TW200426352A (en
Inventor
Chow-Shing Shin
Chia-Chin Chiang
Original Assignee
Univ Nat Taiwan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Taiwan filed Critical Univ Nat Taiwan
Priority to TW92114472A priority Critical patent/TW585998B/en
Application granted granted Critical
Publication of TW585998B publication Critical patent/TW585998B/en
Publication of TW200426352A publication Critical patent/TW200426352A/en

Links

Abstract

This invention relates to a new technique of measuring physical quantities such as temperature and force by fiber grating sensors. The technique involves the edge filtering of transmitted light that occurs when a narrow bandwidth light of suitable wavelength from a laser source is passed through a long period fiber grating (LPFG). When the characteristics transmission spectrum of the LPFG is shifting, an energy modulation effect will be achieved when one measures the intensity of the transmitted narrow bandwidth light. The narrow bandwidth strong light is best obtained by the reflection of a wide bandwidth light from a fiber Bragg gratings (FBGs). If the reflected narrow band spectrum from the FBGs is kept constant while the LPFG is subjected to temperature changes, applied loading or other type of suitable physical quantity changes, the characteristic transmission spectrum of the LPFG will shift according to the applied physical quantity, thus modulating the eventual transmitted light intensity. By transforming this intensity into a voltage signal, the variation of the physical quantity concerned can be deduced. Conversely, if the transmission spectrum of the LPFG is kept constant and the FBG is subjected to temperature changes, applied loading or other type of suitable physical quantity changes, the same modulation effect will be achieved and the physical quantity concerned can likewise be monitored.

Description

585998 修正 曰 921U/i7〇 五、發明說明(1) 發明所屬之技術領域 11$/、 種利用長週期光纖光柵滤波效應配合短週 f布拉格光纖光栅之窄頻反射效應形成能量調變機制以進 行二系^物理量之感應器有關,可以達到高解析度高反應 速率’溫度、扭轉角、彎曲撓度等物理量之量測的方法, 特別是有f於一種配合布拉格光纖光柵(Fiber計叫忌585998 Amendment 921U / i705. 5. Description of the invention (1) The technical field to which the invention belongs is 11 $ /. A kind of energy modulation mechanism is formed by using a long-period fiber grating filter effect and a narrow-frequency reflection effect of a short-period f Bragg fiber grating. The second series is related to the physical quantity sensor, which can achieve high resolution and high response rate, such as temperature, torsion angle, bending deflection and other physical quantity measurement methods. Especially, there is a f with a Bragg fiber grating (Fiber meter called taboo).

GraUng)窄頻反射與長週期光纖光柵(L〇ng peri〇d FiberGraUng) Narrowband Reflection and Long Period Fiber Gratings (Long Period Fiber)

Grating),波對溫度、應變等有高敏感度之變化之物理量 ,測器’藉由光電二極體(ph〇t〇di〇de)將光能 f訊號轉,為電壓訊號,以便電腦數據擷取與處理,作為 南解析度南反應速率之相關物理量量測。 先前技術: 溫度在基本物理量量測中頗為重要,不論在工程應用 與學術研究皆不可一日無之,目前習知之溫度感測技術 中’可分為接觸式與非接觸式量測技術。 、非,觸式量測技術主要利用量測輻射熱或熱影像的方 式來推算其溫度,其優點可應用於極高溫(大於1〇⑽。c)且 不會影響待測物溫度,但此法必須事先了解待測對象之輻 射率,所以量測對象無法為未知輻射率之材料,另外非接 觸式溫度量測技術之主要侷限在於僅能量測表面溫度場, i其精度非常差’誤差約UTC以上,因此不適合中低溫度 585998 j號 92114472Grating), a physical quantity in which waves have high sensitivity to changes in temperature, strain, etc. The tester 'converts the light energy f signal to a voltage signal through a photodiode (ph0t〇di〇de) for computer data Extraction and processing, as the relative physical quantity measurement of the South Resolution South Response Rate. Prior technology: Temperature is very important in basic physical quantity measurement. It can not be used in engineering and academic research. The current temperature sensing technology can be divided into contact and non-contact measurement technology. Yes, no, touch measurement technology mainly uses the method of measuring radiant heat or thermal image to estimate its temperature. Its advantages can be applied to extremely high temperature (greater than 101.c) without affecting the temperature of the object to be measured, but this method The emissivity of the object to be measured must be known in advance, so the measurement object cannot be a material with unknown emissivity. In addition, the main limitation of non-contact temperature measurement technology is that only the surface temperature field can be measured with energy, and its accuracy is very poor. Above UTC, so it is not suitable for low and medium temperature 585998 j 92114472

五、發明說明(2) 場量測。 u二;“某一種物理特性和溫度存在-個已 精:水銀;Ί :;則溫度’常見的接觸式感測器有氣體、酒 ;任音^ 一' 禺:電阻式與熱敏電、被,其優點為測定處 待測:::J t仍党溫度量測探頭大小所限制,難以埋入 ^測,之内部中。氣體、酒精、水銀溫度計之反應速度 ί: ΐ:範、!小ΐ度不高約〇·5 °c,轉換成電壓訊號不 咸、目丨-&,溫度1測探頭之熱容量大,待測物的溫度易因 觸而改變。戶",業界一般常使用的是電子 熱電偶、電阻式與熱敏電阻,其中電阻式也 熱敏電阻準確度高作I旦、、目丨丨r m , ^ $ f用Β 1 ^ 里 圍較而熱電偶溫度計經 ΐ ΐ i t A ’此為極f用的溫度量測方法,唯 實驗精確度不高及不易埋入待測物中量測内部溫度場。並 且由於熱電耦是利用兩種不同金屬因溫度所產生不同熱 動(赛貝克效應:Seebeck effect)來測量溫度,由 於里測的铋頭及導線是兩種不同金屬材料,易受環境腐蝕 (Envlronment Corr〇si〇n)及電化學腐蝕((ϊ3ΐν&η^ Corrosion),儀器之穩定度堪慮,而且其易受電磁雜訊影 響i t不適合在有游離輻射之環境使用,因此不適合較惡 劣環境下使用。此外,熱電偶溫度耦之量測範圍較大但^ 析度較差(約0 · 5 °C左右),所以熱電耦較不適合微溫度場 感測’因此熱電耦之穩定度及解析度問題仍待克服。 ^^5998 曰 _案號92114472 年 曰 五、發明說日77^-- 有關扭轉與彎曲施力的測量,習4 =式應變計、電容及電感 <,這些 勺方法包括使用電 喊,相當方便易帛,但量測之準心$:得到的為電壓訊 :、電磁雜訊等影響,其感測元件二:二:易受到環境磁 中,以測量内部變形量。立它實埋入待測物之内部 ;變形的方法,例如光彈;、光學;:二析用來量測施力 責且體積龐大的儀器,不容易自動化乂’則需複 對實務工程的量測並不實用。肖自動化’貫施困難,故 或濾波 期光纖 射側寫 也可以 前者在 波長或 譜則在 的裝置 溫度變 測器。 的作用,在 光柵之製造 的方式 對適當的週 溫度變化, 穿透頻譜均 溫度變化, 以利用這些 化’轴向, 長週期光纖光柵對特定波長有衰減 ,通訊方面可以用作濾波器。上述長週 :以利用恰當之光柵光罩並以紫外線雷 造成光纖内部之折射率有週期性變化田 期間隔進行㈣改變光纖直徑來達成, =’橫向及扭轉施力τ,其特徵衰減 曰蝥化,後者之特徵衰減波長或穿透頻 橫向及扭轉施力下產生變化,透過適當 變化特性,可以將長週期光纖光栅用作 橫向及扭轉施力後其他相關物理量的感 ^週,布拉格光纖光柵對特定波長有選擇 =且;溫度變化,軸向,橫向及扭轉施力τ, 此變化特性,ί ’透過適當的裝置以利用這 ^,軸向及扭魅u將鈕週期布拉格光纖光柵用作溫度變 土—施力後其他相關物理量的感測器。 第10頁 五、發明說明(4) 目前不論長週期或布拉格光纖光柵波長旦 均需利用複雜之儀器,例如可見光頻譜分里心-般V. Description of the invention (2) Field measurement. u two; "a certain physical characteristic and temperature exist-one has been refined: mercury; 则:; then the temperature 'common contact sensors are gas, wine; Ren Yin ^ one' 禺: resistance and thermistor, The advantage is that the measuring point to be measured :: J t is still limited by the size of the party temperature measurement probe, and it is difficult to embed it in the inside. The reaction speed of gas, alcohol, and mercury thermometers: ΐ: 范,! The degree of smallness is not high about 0.5 ° c, the voltage signal is not salty, and the temperature is high. The thermal capacity of the temperature 1 measuring probe is large, and the temperature of the object to be measured is easily changed by touch. Often used are electronic thermocouples, resistance and thermistors, of which resistance thermistors also have a high accuracy of 1 、, Ø 丨 rm, ^ $ f with Β 1 ^ compared with the thermocouple thermometer ΐ ΐ it A 'This is a temperature measurement method for extreme f, except that the experimental accuracy is not high and it is not easy to measure the internal temperature field in the test object. And because thermocouples use two different metals due to temperature, Different thermal dynamics (Seebeck effect) to measure temperature, due to the measured bismuth head and The wires are two different metal materials, which are susceptible to environmental corrosion (Envlronment Corrosion) and electrochemical corrosion ((ϊ3ΐν & η ^ Corrosion). The stability of the instrument is a concern, and it is easily affected by electromagnetic noise. It is not suitable. It is used in environments with free radiation, so it is not suitable for use in harsh environments. In addition, the measurement range of thermocouple temperature coupling is large but the resolution is poor (about 0 · 5 ° C), so thermocouple is not suitable for micro temperature Field sensing 'therefore the problems of the stability and resolution of thermocouples need to be overcome. ^^ 5998 _ Case No. 92114472 5th, Invention Day 77 ^-For the measurement of torsion and bending force, Xi 4 = Formula Strain gauges, capacitors, and inductors. These methods include the use of electric shouts, which is quite convenient and easy to measure. However, the accuracy of measurement is as follows: the voltage signal and electromagnetic noise are the effects. The sensing elements are two and two. : It is susceptible to environmental magnetism to measure the amount of internal deformation. It is embedded in the inside of the object to be measured; the method of deformation, such as photoelasticity; and optics; , Not easy to automate 乂 ' Need to repeat the measurement of practical engineering is not practical. Xiao Automation's implementation is difficult, so during the filtering period, the optical fiber radiation profile can also be the former in the wavelength or spectrum of the device temperature sensor. The role in the manufacture of gratings In order to make use of these changes in the appropriate peripheral temperature and the average temperature change in the transmission spectrum, the long-period fiber gratings attenuate specific wavelengths and can be used as filters in communication. The grating reticle is made by changing the fiber diameter periodically with the periodic change of the refractive index inside the fiber caused by the ultraviolet light. The change of the fiber diameter is achieved by the lateral and torsional force τ. The transmission frequency changes under lateral and torsional force. Through appropriate change characteristics, a long-period fiber grating can be used as a sensor for other related physical quantities after lateral and torsional force. Bragg fiber gratings have a choice of specific wavelengths; and Temperature change, axial, lateral and torsional force τ, this change characteristic, ί 'use appropriate device to make use of this, shaft And twisting the knob u Charm period fiber Bragg grating as the temperature becomes Soil - sensing a physical quantity related to the force. Page 10 V. Description of the invention (4) At present, regardless of the long period or the wavelength of the fiber Bragg grating, complex instruments are required, such as the visible light spectrum.

Fabry-perot光纖干涉儀等進行波長漂移之 〜 器除了昂貴外,解調速度也受 5周,这類儀 的物理量之量測,# 一定之。度?之限制,對變化快速 發明内容 基於上述討論,本發明之目的在於提供古 速率而且價廉之感測器,可供微 间,析兩反應 或号曲施力,或其它能影響長週期 ^、、 轉 週期布拉格光纖光柵反射頻譜之物理量的量^減波長或短 種適合惡劣環境,例如 (約1 2 5 // m直徑,遠小 感測元件)而且可以埋 以作為智慧型材料結構 本發明之另一目的在於提供一 南磁場、高電磁雜訊、游離輻射, 於現有之溫度、扭轉或彎曲施力的 入到材料内部之小尺寸感測元件, 應用。 本發明之目的在於提供一種能 ^ ^ ^ ^ 件包括:-長週期光纖光栅,上述長週期光 頫本、、盾. 度或其它物理量之感測器;-寬 頻先源,一布拉格光纖光柵, 形成特定波長窄瓶;5射.一 4人布拉格光纖光柵係用來 長乍頻反射,一耦合器,可將上述寬頻光源導 585998 修正 案號 92114472 五、發明說明(5) 入上述布拉格光纖光柵,並導出所形成之特定波長窄頻反 射;以f,一光波能量量測組件,上述光波能量量測組件 係用來量測從上述布拉格光纖光柵反射並經過上述長 光纖光柵之光波能量。 / 本發 感應器, 格光纖光 並用以形 射 寬 柵係用來 射;一麵 柵,並導 量量測組 週期光纖 量0 明之又 其組成 柵係做 成反映 頻光源 調變上 合器, 出所形件,上 光柵反 目的 元件包 作為力 所欲量 :一長 述布拉 可將上 成之特 述光波 射並經 在於提供一 括:一布拉 量、溫度或 測之該物理 週期光纖光 格光纖光柵 述寬頻光源 定波長窄頻 能量量測組 過上述布拉 種能量調變 格光纖光栅 其它物理量 量之特定波 柵,上述長 形成之特定 導入上述布 反射;以及 件係用來量 袼光纖光柵 型光纖光柵 ,上述布拉 之感測器, 長窄頻反 週期光纖光 波長窄頻反 拉格光纖光 ,一光波能 測從上述長 之光波能 A Ϊ發=之再一目的在於提供一種能量調變型光纖光柵 ^ I纖光:ί成元件包括:—長週期光纖光栅,上述長週 3 係做作為力*、溫度或其它物理量之感測器; 波2量詈:丨f光源;以&,一光波能量量測組件,上述光 經:上、f :、且件係用來量測從上述定波長窄頻光源反射並 述長週期光纖光栅調變之光波能量。 減的作用,短週 週^^纖光柵對特定浊县有膏 第12頁 585998 案號 92114472In addition to Fabry-perot fiber optic interferometers that perform wavelength drift, in addition to being expensive, the demodulation speed is also affected by 5 weeks. The physical quantities of such instruments are measured. degree? Based on the above discussion, the purpose of the present invention is to provide a paleo-rate and low-cost sensor that can be used for micro-analysis, analysis of two reactions or song force, or other factors that can affect long periods. The amount of the physical quantity of the reflection spectrum of the cycle fiber Bragg grating ^ minus the wavelength or short type is suitable for harsh environments, such as (about 1 2 5 // m diameter, far smaller sensing element) and can be buried as a smart material structure. Another object is to provide a small-sized sensing element that is applied to the interior of the material at the existing temperature, torsion, or bending force by applying a south magnetic field, high electromagnetic noise, and free radiation. The purpose of the present invention is to provide a device capable of ^ ^ ^ ^ including:-a long-period optical fiber grating, the above-mentioned long-period optical sensor, a shield, a degree or other physical quantity sensor;-a broadband source, a Bragg fiber grating, Form a narrow bottle with a specific wavelength; 5 shots. A 4-person Bragg fiber grating is used for long-frequency reflection. A coupler can guide the above-mentioned broadband light source. 585998 Amendment No. 92114472 5. Description of the invention (5) Into the above-mentioned Bragg fiber grating And derive a specific wavelength narrow-frequency reflection formed; take f, a light wave energy measuring component, the light wave energy measuring component is used to measure the light wave energy reflected from the Bragg fiber grating and passing through the long fiber grating. / This sensor is a grid-shaped optical fiber and is used to shoot a wide grid system for radiation; one side grid and the derivative measurement group have a periodic fiber volume of 0 and the composition grid system is made to reflect the frequency light source modulation. The shape of the component, the upper grating anti-objective component package as the force of the desired amount: a long description of the Brass can be the above-mentioned special light wave and pass to provide a package: a quantity, temperature or the physical period of the fiber The optical grid fiber grating describes the wideband light source with a fixed wavelength and a narrow frequency energy measurement group through the specific grating of other physical quantities of the above-mentioned Brass energy modulation lattice fiber grating, and the specific length formed is introduced into the cloth reflection; and the components are used to measure袼 Optical fiber grating type fiber grating, the above-mentioned Brass sensor, long and narrow frequency anti-periodic fiber light wavelength and narrow frequency anti-rag fiber light, a light wave energy measurement from the above long light wave energy A burst = another purpose is to Provide an energy-modulated fiber grating ^ I fiber optics: the components include:-long-period fiber gratings, the above long cycle 3 is used as a sensor of force *, temperature or other physical quantities; wave 2 Measuring light source: f light source; &, a light wave energy measurement component, the above light beams: up, f :, and pieces are used to measure the reflection from the fixed-wavelength narrow-frequency light source and describe the long period fiber grating modulation Light wave energy. Reduced effect, short cycle Zhou ^^ Fiber grating has a paste for specific turbidity county Page 12 585998 Case No. 92114472

五、發明說明(6) 期布拉格光纖光柵對特定波長有選擇性之窄頻反射效應, 一寬頻光源如經過布拉格光纖光柵反射後,再經過長週期 光纖光柵’則最後通過之頻譜’將視長週期光纖光柵過遽 波長及布拉格光纖光栅之反射波長之相對位置,其能量^ 零至一個最大值之間變化。 假如布拉格光纖光柵之反 光纖光柵則用作感受溫度或施 隨感測到的物理量的改變,其 使光波穿透頻譜改變,利用此 光纖光柵反射而來的窄頻雷射 過光路的窄頻雷射光源亮度改 能量,可供推算溫度或施力等 換能機構(Transducer me chan 轉換為變形量或溫度,並施加 以感測各種形式物理量。 射波長保 力等物理 衰減波長 變動之穿 光源進行 變,藉由 物理量。 i s m ),將 在長週期 持不變, 量之感測 發生相應 透頻譜對 調變,可 量測此最 此外,若 所欲量測 光纖光柵 而長週期 元件,則 的漂移, 從布拉格 使最後通 後通過之 利用一個 之物理量 ,則可用 波長 力等 反射 ,使 ,亦 能機 理量 可用 持不 理量之 長發生 波穿透 供推算 保 物 波 光 可 構 轉 以 另一方面,假如長週期光纖光柵之衰減 變,而布拉格光纖光柵則用作感受溫度或施 感測元件,則隨感測到的物理量的改變,其 相應的漂移,再經過長週期光纖光柵的衰減 能量達到調變,藉由量測此最後通過之能量 溫度或施力等物理量。此外,若利用一個換 (Transducer mechanism),將所欲量測之物 形量或溫度,並施加在布拉格光纖光柵,則 換為變 感測各V. Description of the invention (6) Period Bragg fiber gratings have a selective narrow-band reflection effect on specific wavelengths. If a broadband light source is reflected by a Bragg fiber grating and then passes through a long-period fiber grating, then the spectrum passed by the fiber will be apparent. The relative position of the periodic fiber grating's chirped wavelength and the Bragg fiber grating's reflected wavelength varies from zero to a maximum. If the inverse fiber Bragg grating of Bragg fiber grating is used to sense the change in temperature or physical quantity, it will make the light wave penetrate the frequency spectrum. The narrow frequency laser reflected by this fiber grating will pass through the narrow frequency laser of the optical path. The brightness of the light source is changed to energy, which can be used to estimate the temperature or force conversion mechanism (Transducer me chan is converted to deformation or temperature, and applied to sense various forms of physical quantities. The physical attenuation of the wavelength such as the radiation wavelength retention force changes through the light source. , By physical quantity ism), will remain unchanged for a long period, and the measurement of the quantity will undergo corresponding trans-spectral spectrum modulation, which can be measured. In addition, if you want to measure a fiber grating and a long-period component, the drift, The use of one physical quantity passed from Prague after the last pass can be reflected by the wavelength force, etc., and the mechanism quantity can also be transmitted through an unreasonable amount of wave penetration for the purpose of estimating the security wave. If the attenuation of the long-period fiber grating is changed, and the Bragg fiber grating is used as a temperature sensing or sensing element, then The change of the sensed physical quantity, its corresponding drift, and then the attenuation energy of the long-period fiber grating reaches the modulation, and the physical quantity such as temperature or force is measured by measuring the energy that finally passed. In addition, if a transducer (transducer mechanism) is used to apply the shape or temperature of the object to be measured to the Bragg fiber grating, then

第13頁 585998 1 號 921U479 五、發明說明(7) 種形式物理量 月 曰 修正 利用此 布拉格光纖 過能量的方 追蹤鎖定長 由量測短週 由掌握負反 的衰減波長 期布拉格光 量。此外, mechanism) 並施加在布 量0 能量調變 光栅之特 式,使短 週期光纖 期布拉格 饋機制之 ,如後者 纖光柵的 亦可利用 ,將所欲 拉格光纖 之機制, 徵波長, 週期布拉 光柵的特 光纖光柵 控制參數 用作物理 特定反射 一個換能 量測之物 光栅,則 加上適當之負反饋機制控制 吾人即可藉由鎖定最高之通 格光纖光柵的特定反射波長 定衰減波長,如此一來,藉 的特定反射波長,或甚至藉 ,即可掌握長週期光纖光柵 量之感測元件,則量測短週 波長即可掌握相關之物理 機構(Transducer 理量轉換為變形量或溫度, 可用以感測各種形式物理 實施方法 變型光纖 纖光柵反 譜產生能 ,·彎曲、 藉由短布 等物理量 到光電二 而有所增 光柵感應器,乃 射後,再經過長 量調變作用,藉 扭轉施力等物理 拉袼光纖光柵對 之擾動改變的窄 極體時將隨著欲 減,以達到利用 用一寬 光纖光 週期光 擾動而 或軸 射頻 量測 第14頁 585998Page 13 585998 No. 1 921U479 V. Description of the invention (7) Various types of physical quantities Month Modification Using this Bragg fiber Over-energy method Tracking the lock length By measuring the short cycle By grasping the negative reflection of the attenuation wavelength period Bragg light quantity. In addition, the mechanism) is also applied to the special type of energy modulation grating with a volume of 0, so that the short period fiber period Bragg feedback mechanism can be used, such as the latter fiber grating, which can be used to draw the desired fiber mechanism, the wavelength, and the period. The Bragg grating's special fiber grating control parameters are used for physical specific reflection. An energy-changing object grating can be added. With the appropriate negative feedback mechanism to control, we can determine the attenuation of the specific reflection wavelength of the highest fiber grating by locking it. Wavelength, in this way, by borrowing a specific reflection wavelength, or even borrowing, you can grasp the sensing element of the long-period fiber grating quantity, and then measure the short-period wavelength to grasp the relevant physical mechanism. Or temperature, it can be used to sense various forms of physical implementation methods. Modification of fiber-optic fiber grating inverse spectrum generation energy. · Bend, increase the grating sensor by the physical quantity such as short cloth to the photoelectric two. Variable action, by twisting and applying physical pulls such as the narrow fiber body to which the fiber grating is disturbed and changed, it will decrease with the desire to achieve Using a Wide Fiber Optic Periodic Light to Perturbate or Axis RF Measurements Page 14 585998

光電一極體所測得光能量的方式來感測物理量變化。 圖:為本發明能量調變型光纖光柵感應器達致能量調 ,原理示意圖。本發明基本可分為四個部分:寬頻光源 1 '紐週期布拉格光纖光柵4、長週期光纖光柵5及光能量 電壓訊號轉換器6。寬頻光源丨經過短週期布拉格光纖光柵 4反射後,變成窄頻強光源,經由耦合器3導入長週期光纖 ,,形成如圖一中所呈現之能量調變效果。通過之光 旎1由光電二極體6轉換成電流訊號,此電流 Λ號經適當轉換、放大電路,可提供容易準確量測之電壓 訊號,而此電壓訊號與通過之光能量成正比。此外,本發 明可以外加換能機構(Transcjucer mechanism),並施加在 作為感測器的光纖光柵上,用以增加其感測靈敏度或將原 來光纖光柵4無法量測之物理量轉換為變形量或溫度量測 後,利用上述能量調變型光纖光柵感應發明來量測。 圖一為本發明之一實施例,此實施例適用於一溫度量 測。凊參考圖二,首先由一波長9 8 〇 nm之雷射二極體8發出 雷射光,經由波長多工器9,打入摻铒光纖放大器(EDFA )10中,產生自發性放射螢光(ASE : Amplifie(i Spontaneous Emission)。再經布拉格光柵4反射特定窄頻 光’所反射窄頻光亦經耦合器3再打到摻铒光纖與反射鏡 11形成共振腔,進而激發雷射效應(lasing)產^特定波 長( 1 542nm)之窄頻強光源。The photoelectric energy is used to sense the change of the physical quantity in a manner of measuring the light energy. Figure: This is a schematic diagram of the principle of the energy modulation fiber grating sensor achieved energy modulation of the present invention. The present invention can be basically divided into four parts: a broadband light source 1'new period fiber Bragg grating 4, long period fiber grating 5 and light energy voltage signal converter 6. The broadband light source 丨 reflected by the short-period Bragg fiber grating 4 becomes a narrow-frequency intense light source, and is introduced into the long-period optical fiber through the coupler 3 to form an energy modulation effect as shown in FIG. 1. The passing light 旎 1 is converted into a current signal by the photodiode 6. This current Λ can provide a voltage signal that can be easily and accurately measured through an appropriate conversion and amplification circuit, and this voltage signal is proportional to the light energy passing through. In addition, the present invention can be added with a transcjucer mechanism and applied to a fiber grating as a sensor to increase its sensing sensitivity or convert a physical quantity that cannot be measured by the original fiber grating 4 into a deformation amount or temperature. After the measurement, the energy modulation fiber grating induction invention described above is used for measurement. FIG. 1 is an embodiment of the present invention. This embodiment is applicable to a temperature measurement.凊 Referring to FIG. 2, a laser diode 8 with a wavelength of 9 800 nm first emits laser light, and then enters an erbium-doped fiber amplifier (EDFA) 10 through a wavelength multiplexer 9 to generate spontaneous emission fluorescent light ( ASE: Amplifie (i Spontaneous Emission). Then the narrow-band light reflected by the Bragg grating 4 is reflected by the narrow-band light. The narrow-band light reflected by the coupler 3 is then hit to the erbium-doped fiber and the mirror 11 to form a resonant cavity, thereby exciting the laser effect ( lasing) produces a narrow-band high-intensity light source with a specific wavelength (1 542 nm).

585998 修正 θ ^號 92ΐι〜7〇 五、發明說明(9) 元二= 週?光纖光栅5為本實施例之溫度感應單 特性,長週期ΐ光纖光柵有邊緣濾波器(edge filter)的 2UC會因溫度擾動使其穿透頻譜漂移, =會因贫波#空t里濾波。因此本發明之定波長之窄頻光 ΐ:Ξίί:ίί之光能量會隨溫度變動而變*,本發明 貫‘之長週肩光纖光柵5穿透頻譜數據顯示 0· 5nm飄移。圖四為善调f日止处A』Γ — ^ ^ m 漂移之量測結果。,、、、 栅受溫度擾動導致頻譜 圖一之光電二極體6,其主要目的乃反應 本發明之特定波長之窄頻光源(1 542nm)使其穿透長週期光 纖光柵5之後,、長週期光纖光柵5因隨溫度變化使光能量會 產生不同效果渡波。經由光電二極體6將穿透 光能量轉成電的訊號,不同溫度會對或應到不同量測電壓 值,其參考數據如圖五所示,其為長週期光纖光柵溫度受 溫度擾動光電二極體6接收能量圖。其量測溫 度之解析能力達0 · 〇 1 °c,而且因感測器體積小,可以鑲 埋在待測物内部,又體積小所以熱容量十分低,不致影響 待測物之溫度。本發明藉著配合長短週期光纖光柵將可^ 易達到精確的溫度感測,而且深具精確性與耐候性,因此 可作為尚精密度溫度感應器。此外,本發明亦可利用一換 能機構(Transducer mechanism)7,如圖三所示,將所欲 量測之物理量轉換為變形量或溫度,並施加在長週期光^^戴 光柵5上,用以增加其感測靈敏度或將原來長週期光纖光 柵5無法量測之物理量轉換為變形量或溫度量測。 第16頁 585998585998 Correction θ ^ No. 92ΐι ~ 7〇 5. Description of the invention (9) Yuan 2 = week? The fiber grating 5 is a single temperature-sensing characteristic of this embodiment. The long-period fiber grating 2UC with an edge filter will drift through the spectrum due to temperature disturbances, and will be filtered by the poor wave #space. Therefore, the narrow-band light of a fixed wavelength of the present invention ΐ: Ξίί: ί The light energy will change with temperature changes *, the long-period fiber optic grating 5 according to the present invention penetrates through the spectrum data to show a 0.5nm shift. Figure 4 shows the measurement results of the drift A ″ Γ — ^ ^ m at the day of good tuning f. The main purpose of the photodiode 6 in the spectrum diagram 1 caused by temperature disturbance of the grid is to reflect the narrow wavelength light source (1 542nm) of the specific wavelength of the present invention so that it penetrates the long-period fiber grating 5. The periodic fiber grating 5 has different effects on the light energy due to the temperature change. The transmitted light energy is converted into an electrical signal through the photodiode 6. Different temperature will or should have different measured voltage values. The reference data is shown in Figure 5. It is a long-period fiber grating temperature. The diode 6 receives an energy map. Its measurement temperature resolution is 0 · 〇 1 ° c, and because the sensor has a small volume, it can be embedded in the object to be measured, and the volume is very small, so the thermal capacity is very low, which will not affect the temperature of the object. The present invention can easily achieve accurate temperature sensing by combining long and short period fiber gratings, and has deep accuracy and weather resistance, so it can be used as a high precision temperature sensor. In addition, the present invention can also utilize a Transducer mechanism 7, as shown in FIG. 3, to convert a physical quantity to be measured into a deformation amount or a temperature, and apply it to a long-period light 5 wearing a grating 5. It is used to increase its sensing sensitivity or to convert physical quantities that could not be measured by the long-period fiber grating 5 into deformation or temperature measurements. Page 585998

本發 溫度之高 圖三所示 而長週期 或扭轉變 力式長週 穿透頻譜 當之轉換 用外力式 扭轉等施 明上述 度敏感 之方法 光纖光 形或其 期光纖 變化, 機構(t 長週期 力的量 所舉之實施例雖利用長週期光纖光柵5 性,用以作為溫度感應元件,然而圖二 ,並不>侷限於溫度之測量,如溫度不變, 栅5感受到外部施加之力量如軸向、彎曲 它物理量,尤其利用以週期蝕刻製造之外 光柵,可對特定模式之外加施力產生類似 熟習相關領域技藝者皆可瞭解,在採用適 ransducer)配合長週期光纖光柵5,或採 光纖光柵,本發明也可用在拉伸、彎曲、 測0 此外,圖二及圖三所述之測量裝置,其中雷射二極體 8、摻铒光纖放大器(EDFA ) 10及布拉格光纖光栅4 所組成之窄頻雷射強光源,亦可以其它波長適合之窄頻雷 射強光源取代,而不影響本發明之精神之實施。 ’、… 圖六為本發明之另一實施例,有鑑於圖二之實施例中 之雷射光源之亮度穩定穩定性要求十分高,為容許使 用亮度隨時間有所變化之雷射光源,在通過長週期光 纖光柵5感測器之前,利用耦合器3分出部份未經調變之窄 頻光源能量,對經過長週期光纖光栅5調變後之能量進行 比例計算之正常化處理(normal iza t i〇n),並利用兩個 光電二極體6及除法器1 2將光能量正常化,如此 、 則可使量測結果不受雷射光源亮度變化影響The high temperature of this hair is shown in Figure 3. The long-period or torsional variable-force long-period transmission spectrum should be converted by external force-type torsion, etc. The above-mentioned degree-sensitive methods are explained. Although the example of the amount of cyclic force uses the long-period fiber grating as a temperature sensing element, Figure 2 is not limited to the measurement of temperature. If the temperature is constant, the grid 5 feels externally applied. The power such as the axial direction and the bending of its physical quantities, especially the use of periodic etching to manufacture external gratings, can apply a force to a specific mode to generate similar familiarity. Those skilled in the relevant fields can understand that in the use of suitable ransducers) with long-period fiber gratings5 The optical fiber grating can also be used for stretching, bending, and measuring. In addition, the measuring device described in Figs. 2 and 3 includes laser diode 8, erbium-doped fiber amplifier (EDFA) 10, and Bragg fiber. The narrow-band laser-intensity light source composed of the grating 4 can also be replaced by other narrow-band laser-intensity light sources with suitable wavelengths without affecting the implementation of the spirit of the present invention. ', ... FIG. 6 is another embodiment of the present invention. In view of the high stability and stability requirements of the laser light source in the embodiment of FIG. 2, in order to allow the use of a laser light source whose brightness changes with time, Before passing the long-period fiber grating 5 sensor, use the coupler 3 to divide part of the energy of the unmodulated narrow-frequency light source, and perform a normalization process of proportionally calculating the energy after the long-period fiber grating 5 modulation. iza ti〇n), and use two photodiodes 6 and divider 12 to normalize the light energy, so that the measurement results are not affected by the brightness change of the laser light source

IHIH

IH 585998 ___ 案號 92114472 __年月日_修正___ 五、發明說明(11) 圖七為本發明之能量調變型光纖光栅感應器又一實施 例’利用利用換能機構(T r a n s d u c e r m e c h a n i s m) 7將所欲 量測之物理量轉換為變形量或溫度,並施加在布拉格光纖 光栅5上’並利用兩個光電二極體6及除法器1 2 將光能量正常化,可使量測結果不受雷射光源亮度變 化影響。 圖八為本發明之又一實施例,其基本組成元件與上例 相同包括··一波長為98Onm之雷射二極體8、摻餌光纖放大 器(E D F A ) 1 0及布拉格光纖光栅4所組成之窄頻雷射強光 源、一長週期光纖光栅5以及一個由光電二極 體6及放大、轉換電路組成之光波能量量測組件。與上例 不同處,其感測元件為短週期布拉格光纖光柵4,本實施 例是利用布拉格光纖光柵4對溫度、變形或其他物理量之 高度敏感性,以作為溫度、變形或其它物理量之感應元 件。 圖九為本發明之能量調變型光纖光柵感應器又一實施 例之示意圖’本例利用換能機構(T r a n s d u c e r m e c h a n i s m ) 7將所欲量測之溫度轉換為變形量,並施加在布拉格光纖 光栅4之上,以作為溫度感測器。 圖十為本發明之另一實施例,有鑑於圖二之實施例中IH 585998 ___ Case No. 92114472 __Year Month Day_Amendment ___ V. Description of the invention (11) Figure 7 is another embodiment of the energy-modulated fiber Bragg grating sensor of the present invention, 'Transducermechanism' 7 The physical quantity to be measured is converted into the deformation amount or temperature and applied to the Bragg fiber grating 5 'and the light energy is normalized by using two photodiodes 6 and a divider 1 2 to make the measurement result unaffected. Influence of laser light source brightness changes. FIG. 8 shows another embodiment of the present invention, the basic components of which are the same as the above example, including a laser diode with a wavelength of 98 nm, a bait-doped fiber amplifier (EDFA) 10, and a Bragg fiber grating 4. A narrow-frequency laser intense light source, a long-period fiber grating 5 and a light wave energy measurement component composed of a photodiode 6 and an amplification and conversion circuit. Different from the above example, the sensing element is a short-period Bragg fiber grating 4. This embodiment uses the Bragg fiber grating 4's high sensitivity to temperature, deformation, or other physical quantities as a sensing element for temperature, deformation, or other physical quantities. . FIG. 9 is a schematic diagram of another embodiment of the energy-modulated fiber Bragg grating sensor according to the present invention. 'This example uses a transducer mechanism 7 to convert a desired measured temperature into a deformation amount, and applies it to a Bragg fiber grating 4 On top as a temperature sensor. FIG. 10 is another embodiment of the present invention. In view of the embodiment of FIG.

第18頁 585998 _案號92114472 生月日 修 五、發明說明(12)Page 18 585998 _ Case No. 92114472 Birth Month Day Repair V. Description of Invention (12)

長之调變受一者之相對位置影響,此相對位置能容許之改 變有限’以致長週期光纖光柵5能跟縱反映之物理量範圍 夂到侷限,為突破此侷限,本實施例中利用壓電材料變形 之能力’透過適當之反饋電路,例如壓電致動器13,隨 控布拉格光纖光栅4之反射波長,以鎖定最高之通過 能ΐ ’如此一來,長週期光纖光柵5的特定衰減波長與短 週期布拉格光纖光柵4的特定反射波長同步,藉由量測短 週期布拉格光纖光柵4的特定反射波長即可掌握長週期光 ,光柵5的衰減波長,如後者用作物理量之感測元件,則 篁測短週期布拉格光纖光柵4的特定反射 關之物理量。 κ |」手捱相 之干::一ί發明能量調變型光纖光柵感應器又-實施例 ^ ^ 1 * ^.J ^ ^(Transducer mechanism)7 布拉格光纖光:f電致動器13之負反饋控制機制,調控制 減波長 冊4 ’以追縱鎖定長週期光纖光柵5之特徵衰 對 實例闡 度溫度 離本發 =了本發明之領域技藝者,本發明雖已利用一 Μ如何刺田g “ 來達成 作之修The long modulation is affected by one's relative position, and the relative position can only allow limited changes, so that the range of physical quantities that can be reflected by the long-period fiber grating 5 is limited. In order to break through this limitation, piezoelectric is used in this embodiment. The ability of material deformation 'through appropriate feedback circuits, such as piezoelectric actuators 13, to follow the reflected wavelength of the Bragg fiber grating 4 to lock the highest pass energy ΐ' in this way, the specific attenuation wavelength of the long-period fiber grating 5 Synchronized with the specific reflection wavelength of the short-period Bragg fiber grating 4. By measuring the specific reflection wavelength of the short-period Bragg fiber grating 4, the long-period light can be grasped. The attenuation wavelength of the grating 5 is used as a physical quantity sensing element. Then the physical quantity of the specific reflection of the short-period Bragg fiber grating 4 is measured. κ | "Hand-to-hand coherence :: one invention of an energy-modulated fiber Bragg grating sensor-an embodiment ^ ^ 1 * ^. J ^ (Transducer mechanism) 7 Bragg fiber light: f electric actuator 13 negative The feedback control mechanism adjusts and controls the wavelength reduction book 4 'to track and lock the characteristic decay of the long-period fiber grating 5. The example illustrates the temperature. This is a technical expert in the field of the present invention. g "to achieve the completion of the work

第19頁 感測,然兮每/ W光纖光栅咼溫度敏感性作高 明利用Γ列並非用以限定本發明精神。在 高精密产纖光柵高溫度或外加施力敏感 改與類广:施力之感測之精神與範圍 —-均應包含在下述之申請專利 585998Page 19 Sensing, however, the use of the Γ column for temperature sensitivity per W fiber grating is not intended to limit the spirit of the present invention. In high-precision fiber gratings with high temperature or additional force sensitivity, it is widely used: the spirit and scope of force sensing-all should be included in the following patent application 585998

第20頁Page 20

585998 案號 92114472 年月日 修正 圖式簡單說明 之 本發明的目的、特徵、優點與較佳實施例將於往後 說明文字中輔以下列圖形做更詳細的闡述: 圖一為利用長週期光纖光柵濾波效應配合短週期布拉 格光 纖光柵之窄頻反射效應形成能量調變機制示音 圖0 圖二為本發明之能量調變型光纖光柵感應器一實施例 之示意圖。 _ 圖三為本發明之能量調變型光纖光栅感應器並外加一 個換能機構(Transducer mechanism)施加在長週期光 光栅一實施例之示意圖。 ’ 、” 圖 圖四為長週期光纖光柵溫度受溫度擾動導致頻譜漂移 圖五為長週期光纖光柵溫度受溫度擾動光 電二極體接收能量圖。585998 Case No. 92114472 Modified diagram Brief description of the purpose, features, advantages and preferred embodiments of the present invention will be described in more detail in the following description with the following figures: Figure 1 is the use of long-period optical fiber The grating filter effect and the narrow-frequency reflection effect of the short-period Bragg fiber grating form an energy modulation mechanism. Fig. 2 is a schematic diagram of an embodiment of an energy modulation fiber grating sensor according to the present invention. Fig. 3 is a schematic diagram of an embodiment of an energy-modulated fiber grating sensor of the present invention and a transducer mechanism applied to a long-period optical grating. Figure 4 shows the spectral drift caused by temperature disturbance of the long-period fiber grating temperature. Figure 5 shows the energy received by the photodiode with temperature disturbance of the long-period fiber grating.

圖六為本發明之能量調變型光纖光栅感應器又一 2 ’利用兩個光電二極體及除法器將光能量正 也 吊化 了使里/則結果不受雷射光源亮度變化影塑。FIG. 6 shows another 2 ′ of the energy-modulated fiber Bragg grating sensor of the present invention, which uses two photodiodes and a divider to suspend the light energy, so that the result is not affected by the change in the brightness of the laser light source.

585998 --92Π4472 年 月 a 倏正_ 圖式簡單說明 圖七為本發明之能量調變型光纖光柵感應器又一實施 例’利用兩個光電二極體及除法器將光能量正 常化’可使量測結果不受雷射光源亮度變化影響,並 外加一個換能機構(Transciucer mechanism)施加在布拉 格光纖光柵。 圖八為本發明之能量調變型光纖光柵感應器又一實施 例之示意圖,本例利用光纖光柵作為溫度感測器。 圖九為本發明能之量調變型光纖光柵感應器又一實施 例之示意圖,本例利用一個換能機構(Transducer mechanism)施加在布拉格光纖光柵作為溫度感測器。 圖十為本發明之能量調變型光纖光柵感應器又一實施 例之示意圖,本例利用一個壓電致動器負反饋控制機制, 調控制布拉格光纖光柵,以追蹤鎖定長週期光纖光柵之 徵哀減波長。 、 光柵585998 --92Π4472 a 倏 正 _ Brief description of the drawing Figure 7 is another embodiment of the energy-modulated fiber Bragg grating sensor of the present invention 'normalizing light energy using two photodiodes and a divider' enables The measurement result is not affected by the brightness change of the laser light source, and a transciucer mechanism is applied to the Bragg fiber grating. FIG. 8 is a schematic diagram of another embodiment of the energy-modulated fiber Bragg grating sensor of the present invention. In this example, a fiber Bragg grating is used as a temperature sensor. Fig. 9 is a schematic diagram of another embodiment of the energy-modulation-type fiber grating sensor according to the present invention. In this example, a transducer mechanism is applied to the fiber Bragg grating as a temperature sensor. FIG. 10 is a schematic diagram of another embodiment of the energy-modulated fiber Bragg grating sensor of the present invention. In this example, a piezoelectric actuator negative feedback control mechanism is used to adjust and control the Bragg fiber grating to track and lock the long-period fiber grating. Minus the wavelength. Grating

施例之示意圖’本例利用換能機構(Transduc^r 圖Η 為本發明之能量調變型 mechanism)將所欲量測之物理量轉換為變形量或溫产, 施加在長週期光柵上,並用屋電致動器負反饋控制^並 調控制布拉格光纖光柵,以”鎖定長週期光纖 徵衰減波長。 特Schematic illustration of the embodiment 'This example uses a transducer mechanism (Transduc ^ r figure Η is the energy modulation mechanism of the present invention) to convert the physical quantity to be measured into a deformation amount or a warm production, and apply it to a long-period grating, and use the house The negative feedback control of the electric actuator ^ and the Bragg fiber grating is adjusted to lock the long-period fiber sign attenuation wavelength.

585998 案號 92114472 年月曰 修正 圖式簡單說明 圖示符號對照表 寬頻光源1 導波管一光纖2 耦合器3 短週期布拉格光纖光柵4 長週期光纖光柵5 光電二極體(InGaAs Photodiode) 換能機構(Transducer mechanism 雷射二極體8 波長多工器WDM 9 摻餌光纖放大器EDFA 10 反射鏡11 除法器1 2 壓電致動器1 3585998 Case No. 92114472 Revised diagrams Brief description of diagrams Symbol comparison table Broadband light source 1 Waveguide tube 1 Fiber 2 Coupler 3 Short-period fiber Bragg grating 4 Long-period fiber Bragg grating 5 Photodiode (InGaAs Photodiode) Transducer Transducer mechanism Laser Diode 8 Wavelength Multiplexer WDM 9 EDFA 10 Reflector 11 Divider 1 2 Piezoelectric Actuator 1 3

第23頁Page 23

Claims (1)

585998 ±^ 日 j正 種能量調變型光纖光柵感應器,其組 皇號 921U47?. 六、申請專利範圍 _ ^ 成元件包;te 力 一長週期光纖光栅,該長週期光纖光柵係做 里、溫度等物理量之感測器; 彳文作為 一寬頻光源; :布拉格光纖光柵,該布拉格光纖光 定波長窄頻反射; τ用果形成特 以及一耦合器,可將該寬頻光源導入該布拉袼光纖光柵; 圳從能量量測組件,㉟光波能量量測組件係用來量 二处=布拉格光纖光柵反射並經過該長週期光纖光栅之光 L如t請專利範圍第1項之能量調變型光纖光柵 感應器’其中該長週期光纖光柵可為外力式長週期光纖光 柵0 3 ·、如=請專利範圍第1項之能量調變型光纖光柵 感應器’其中該光波能量量測組件為光電二極 體’其能將經調變後之穿透光能量轉換成反應物理量變化 之電壓訊號。 4 ·如申請專利範圍第1項之能量調變型光纖光柵 感應器,更包括一換能機構(Transducer mechanism),該 換能機構係用來將所欲量測之物理量轉換為變形量或溫585998 ± ^ Day j positive energy modulation fiber grating sensor, its group number 921U47? 6. Patent application scope _ ^ into a component package; te force a long-period fiber grating, the long-period fiber grating system, Sensors for physical quantities such as temperature; scriptures as a broadband light source;: Bragg fiber gratings, narrow-band reflections of the Bragg fiber at a fixed wavelength; τ uses features to form features and a coupler, which can be used to introduce the broadband light source into the Bradley Fiber Bragg Gratings; The energy measurement components of the chirped light wave and the energy measurement components of the chirped light wave are used to measure two places = the light reflected by the Bragg fiber grating and passing through the long-period fiber grating. Grating sensor 'wherein the long-period fiber grating can be an external force type long-period fiber grating 0 3 · If = please apply for the energy-modulated fiber grating sensor of the first item of patent scope', where the light wave energy measurement component is a photodiode The body can convert the modulated penetrating light energy into a voltage signal that reflects the change of the physical quantity. 4 · If the energy-modulated fiber Bragg grating sensor in item 1 of the patent application scope further includes a transducer mechanism, the transduction mechanism is used to convert the physical quantity to be measured into deformation or temperature. 第24頁 585998 __塞號92114472 车月日 修正__ 六、申請專利範圍 度’並施加在該長週期光纖光柵。 5 ·如申請專利範圍第1項之能量調變型光纖光柵 感應器’更包括一波長多工器,用以將該雷射二極體所產 生之激光波導入摻铒光纖,使其產生自發性放射螢光 (ASE ’Amplified Spontaneous Emission)之寬頻光源。 6·如申請專利範圍第1項之能量調變型光纖光柵 感應器,更包括一摻铒光纖放大器(EDFA)。Page 24 585998 __plug No. 92114472 car month day correction __ Sixth, the scope of patent application 'is applied to the long-period fiber grating. 5 · If the energy-modulated fiber Bragg grating sensor 'item of the scope of patent application 1' further includes a wavelength multiplexer to introduce the laser wave generated by the laser diode into the erbium-doped fiber to make it spontaneous A broadband light source that emits fluorescence (ASE 'Amplified Spontaneous Emission). 6. The energy-modulated fiber Bragg grating sensor according to item 1 of the patent application scope further includes an erbium-doped fiber amplifier (EDFA). 7 ·如申請專利範圍第1項之能量調變型光纖光柵 感應器’其中該特定波長窄頻反射可由激光效應(lasing) · 產生’雷射二極體發出一波長為9 8 〇ηπι的雷射光,經由該 波長多工器,射入摻餌光纖中,以產生自發性放射螢光 ’ (ASE )寬頻光’再經過該布拉格光栅反射特定窄頻光, 該反射窄頻光亦經由該耦合器再打到摻铒光纖與反射鏡形 成共振腔’進而引發激光效應。 8 ·如申請專利範圍第1項之能量調變型光纖光柵7 · If the energy-modulated fiber Bragg grating sensor of item 1 of the patent application scope 'is used, the narrow-band reflection of the specific wavelength can be lasered. · The laser diode emits a laser light with a wavelength of 9 8 nm. Through the wavelength multiplexer, it is injected into the bait-doped fiber to generate spontaneous emission fluorescent light (ASE) broadband light, and then the Bragg grating is used to reflect specific narrow-band light, and the reflected narrow-band light also passes through the coupler. Then hit the erbium-doped fiber and the reflector to form a resonance cavity, and then trigger the laser effect. 8 · Energy-modulated fiber gratings as in item 1 of the patent application 感應器,其中未經該長週期光纖光栅調變之光能量利用該 耦合器分出部份窄頻光源能量,對經過該 = 調變後之能量進行比例計算之正常化處理 戴先柵 (normalization),使量測結果不受雷射光源亮度變 化影響。Inductor, in which the light energy that has not been modulated by the long-period fiber grating is used by the coupler to divide out a portion of the energy of the narrow-frequency light source, and the normalization processing for the ratio calculation of the energy after the modulation is performed. ), So that the measurement result is not affected by the brightness change of the laser light source. 第25頁 585998 H 虎 92114472 六、申請專利範圍 曰 修正 ^調變型光纖光栅感應器,其組成元件包括: 格光纖光栅,該布拉格光纖光栅係做作為力 度專物理量之.感測器,並用以形成反 映所欲量测之該物理量之特定波長窄頻反射; 一寬頻光源; 2期光纖光柵,該長週期光纖光栅係用來調變該 先纖光柵形成之特定波長窄頻反射; 耦合器,可將該寬頻光源導入該布拉格光纖光柵; $波此里里测組件,该光波能量量測組件係用來量 長週期光纖光柵反射並經過該布拉格光纖光拇之光 〇 量、溫 布拉格 以及 測從該 波能量 U·如巾請專利範圍第9項之能量調變型光纖光柵 感應器,其中該光波能量量測組件為光電二極體’其此將經調變後之穿读伞沾旦二、之電壓訊號。 穿透^里轉換成反應物理量變化 12.如申請專利範圍第9項之能量調變型光纖光栅 第26頁 585998Page 25 585998 H Tiger 92114472 Sixth, the scope of the patent application is modified ^ modulated fiber Bragg grating sensor, its constituent elements include: lattice fiber grating, the Bragg fiber grating is used as a force-specific physical quantity sensor, and used to form A narrow-wavelength reflection of a specific wavelength reflecting the physical quantity to be measured; a broadband light source; a phase 2 fiber grating, the long-period fiber grating is used to modulate a narrow-wavelength reflection of a specific wavelength formed by the fiber-optic grating; a coupler, which can The broadband light source is introduced into the Bragg fiber grating; the wave-in-line measurement module is used for measuring the light reflected by the long-period fiber grating and passing through the Bragg fiber thumb; The wave energy U, such as the energy-modulated fiber Bragg grating sensor of item 9 of the patent scope, wherein the light wave energy measurement component is a photodiode ', which will be tuned with a read-through umbrella. Voltage signal. Penetration is converted into a reaction physical quantity change 12. For example, the energy-modulated fiber grating of item 9 of the patent application page 26 585998 感,器更包括一換能機構(Transducer mechani sm),該 換此機構係用來將所欲量測之物理量轉換為變形量或溫 度,並施加在該布拉格光纖光栅上。 1 3·如^請專利範圍第9項之能量調變型光纖光拇 感應态、’> 更包括一波長多工器,用以將該雷射二極體所產 生之激光波導入摻辑光纖,使其產生自發性放射螢光 (ASE Amplified Spontaneous Emission)之寬頻光源。 1 4·如。申請專利範圍第9項之能量調變型光纖光栅 感應器’更包括一摻铒光纖放大器(EDFA)。 15·如%申請專利範圍第9項之能量調變型光纖光柵 感應器、’其中该特定波長窄頻雷射光源之雷射二極體發出 二波長為980nm的雷射光,經由該波長多工器,射入摻铒 光纖中,以產生自發性放射螢光(ASE )寬頻光,再經過 =布拉格光柵反射特定窄頻光,該反射窄頻光經由該耦合 恭再打到摻铒光纖與反射鏡形成共振腔,進而引發激光效 應(lasing) 〇 1 6 ·如。申請專利範圍第9項之能量調變型光纖光柵 感應器’其中未經該長週期光纖光柵調變之光能量利用該 耦合器分出部份窄頻光源能量,對經過該長週期光纖光柵 調變後之能量進行比例計算之正常化處理The transducer further includes a transducer mechanism (transducer mechani sm), which is used to convert a physical quantity to be measured into a deformation amount or a temperature, and is applied to the Bragg fiber grating. 1 3 · If ^ please request the energy-modulated fiber optic light bulb induced state of item 9 of the patent, '> further includes a wavelength multiplexer for introducing the laser wave generated by the laser diode into the doped fiber To make it a broadband light source with spontaneous emission fluorescence (ASE Amplified Spontaneous Emission). 1 4 · If. The energy-modulated fiber Bragg grating sensor 'of item 9 of the patent application scope further includes an erbium-doped fiber amplifier (EDFA). 15 · For example, the energy-modulated fiber Bragg grating sensor of item 9 of the patent application scope, 'wherein the laser diode of the narrow-wavelength laser light source of the specific wavelength emits two laser lights with a wavelength of 980 nm, and passes through the wavelength multiplexer Into the erbium-doped fiber to generate spontaneous emission fluorescent (ASE) broadband light, and then reflect the specific narrow-band light through the = Bragg grating, and the reflected narrow-band light hits the erbium-doped fiber and the mirror through the coupling. A resonant cavity is formed, which in turn causes a laser effect. The energy-modulated fiber Bragg grating sensor 'in the scope of the patent application No. 9', wherein the light energy that has not been modulated by the long-period fiber grating is used by the coupler to divide part of the energy of the narrow-frequency light source, Normalization of subsequent energy ratio calculation 585998 $號 92114472 六、申請專利範圍 (normalization),使量測結果不受雷射光 化影響。 又I 17. —種能量調變型光纖光柵感應器,其組成元件包括··旦:ΐ Ϊ期光,光拇’該長週期光纖光栅係做作為力 篁、溫度4物理量之感測器; 一定波長窄頻光源,·以及測义琴ί f::二f組件’ f亥光波能量量測組件係用來量 :古lb : ~ ^光源反射並經過該長週期光纖光柵之光 波能置〇 3 日 修正 :二請專Λ範圍第17項之能量調變型光纖光 極體,其能將經調變後之穿先電二 化之電壓訊號。 之穿透先此1轉換成反應物理量變 2W申請專利範圍第17項之能量調變型光纖光 柵感應器,更包括—定波長窄頻雷射?源先:雷〜 化如申請專利範圍第17項之能量調變型光纖光 極體 第28頁 I 585998 __案號92114472_±—_^ 日 鉻庀 六、申請專利範圍 柵感應器,更包括一定波長窄頻雷射光源,可由激光效應 (1 as i ng)產生,雷射二極體發出一波長為98〇nm的雷射 光,經由該波長多工器,射入摻铒光纖中,以產生自發性 放射螢光(ASE)寬頻光,再經過該布拉格光柵反射特X定 窄頻光,該反射窄頻光經由该_合器再打到摻斜光纖與反 射鏡形成共振腔,進而引發激光效應(lasing),產生所需 之定波長窄頻雷射光源。 2 2 ·如申請專利範圍第1 7項之能量調變型光纖光 柵感應器,更包括一布拉格光纖光柵,該布拉格光纖光栅 係用來形成特定波長窄頻反射,該反射窄頻光亦經由該耦 合器再打到摻铒光纖與反射鏡形成共振腔,進而引發激光 效應(1 a s i n g ),產生所需之定波長窄頻雷射光源。 2 3·如申請專利範圍第17項之能量調變型光纖光 柵感應器,更包括一換能機構(Transducer mechanism), 該換能機構係用來將所欲量測之物理量轉換為變形量或溫 度’並施加在該長週期光纖光柵上。 2 4 ·如申請專利範圍第1 7項之能量調變型光纖光 柵感應器’其中未經該長週期光纖光栅調變之光能量利用 该搞合器分出部份窄頻光源能量,對經過該長週期光纖光 柵調變後之能量進行比例計算之正常化處理 (normal izat ion),使量測結果不受雷射光源亮度變585998 $ 92114472 6. Apply for patentization (normalization), so that the measurement results are not affected by laser actinization. I 17. A kind of energy-modulated fiber grating sensor, its constituent elements include: · Denier: ΐ period light, light 'The long-period fiber grating is used as a force sensor, temperature 4 physical quantity sensor; must be Narrow-wavelength light source and measuring instrument: f :: two f components' f Hai light wave energy measurement component is used to measure: ancient lb: ~ ^ The light wave energy reflected by the light source and passing through the long period fiber grating is set. Day correction: Second, the energy-modulated fiber optic polar body of item 17 in the range of Λ, which can transmit the voltage signal after the modulation to the electricity. The penetration of this 1 is converted into a reaction physical quantity change. The energy-modulated fiber-optic grating sensor of the 17th in the scope of patent application for 2W, more specifically, a fixed-wavelength narrow-frequency laser? Source: Lei ~ Huaru Energy-modulated Fiber Optic Optoelectronics, No. 17 in the scope of patent application, page 28 I 585998 __ Case No. 92114472_ ± —_ ^ Chromium 26. Patent scope grating sensor, including certain The narrow-wavelength laser light source can be generated by the laser effect (1 as i ng). The laser diode emits a laser light with a wavelength of 9800 nm, and is radiated into an erbium-doped fiber through the wavelength multiplexer to generate Spontaneous emission of fluorescent (ASE) broad-band light, and then reflecting the special X fixed narrow-band light through the Bragg grating. The reflected narrow-band light hits the doped fiber and the reflector to form a resonant cavity through the combiner, thereby triggering the laser. Effect, which produces the narrow-wavelength laser light source of the desired wavelength. 2 2 · If the energy-modulated fiber Bragg grating sensor in item 17 of the patent application scope includes a Bragg fiber grating, the Bragg fiber grating is used to form a narrow wavelength reflection at a specific wavelength, and the reflected narrow frequency light also passes through the coupling The device hits the erbium-doped fiber and the reflector to form a resonant cavity, which in turn triggers the laser effect (1 asing) and generates the narrow-wavelength laser light source of the desired wavelength. 2 3. If the energy-modulated fiber Bragg grating sensor in item 17 of the scope of patent application, further includes a transducer mechanism, the transduction mechanism is used to convert the physical quantity to be measured into a deformation amount or a temperature 'And applied to the long-period fiber grating. 2 4 · If the energy-modulated fiber Bragg grating sensor of item 17 of the scope of the patent application 'wherein the light energy that has not been modulated by the long-period fiber grating is used by the coupler to divide out a portion of the energy of the narrow-frequency light source, The normalized processing of the ratio calculation of the energy after the modulation of the long-period fiber grating, so that the measurement results are not affected by the brightness of the laser light source 第29頁 585998 案號92114472 年月日 修正Page 29 585998 Case No. 92114472 Revised 第30頁Page 30
TW92114472A 2003-05-28 2003-05-28 Fiber grating sensor of energy modulation type TW585998B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92114472A TW585998B (en) 2003-05-28 2003-05-28 Fiber grating sensor of energy modulation type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92114472A TW585998B (en) 2003-05-28 2003-05-28 Fiber grating sensor of energy modulation type

Publications (2)

Publication Number Publication Date
TW585998B true TW585998B (en) 2004-05-01
TW200426352A TW200426352A (en) 2004-12-01

Family

ID=34059319

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92114472A TW585998B (en) 2003-05-28 2003-05-28 Fiber grating sensor of energy modulation type

Country Status (1)

Country Link
TW (1) TW585998B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406616A (en) * 2014-11-24 2015-03-11 哈尔滨工业大学 Testing device for thermal coupling experiment of high-temperature optical fiber sensor
CN109668518A (en) * 2019-01-03 2019-04-23 广西师范大学 A kind of cascade LPFG is from filtering sensor-based system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110207849B (en) * 2019-07-02 2020-11-06 浙江科技学院 Temperature sensor based on reflective long-period fiber grating and measuring method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104406616A (en) * 2014-11-24 2015-03-11 哈尔滨工业大学 Testing device for thermal coupling experiment of high-temperature optical fiber sensor
CN104406616B (en) * 2014-11-24 2017-01-18 哈尔滨工业大学 Testing device for thermal coupling experiment of high-temperature optical fiber sensor
CN109668518A (en) * 2019-01-03 2019-04-23 广西师范大学 A kind of cascade LPFG is from filtering sensor-based system
CN109668518B (en) * 2019-01-03 2023-09-26 广西师范大学 Cascade LPFG (Low pass filter) self-filtering sensing system

Also Published As

Publication number Publication date
TW200426352A (en) 2004-12-01

Similar Documents

Publication Publication Date Title
US7005630B2 (en) Energy-modulating fiber grating sensor
Werneck et al. A guide to fiber Bragg grating sensors
Alwis et al. Fibre optic long period grating-based humidity sensor probe using a Michelson interferometric arrangement
US7323677B1 (en) Fiber-bragg grating-loop ringdown method and apparatus
JP2015172579A (en) Optical device and method for using fiber bragg grating
JP5894993B2 (en) Slow light fiber Bragg grating sensor
Ju et al. Enhanced sensitivity of the FBG temperature sensor based on the PbO-GeO $ _ {2} $-SiO $ _ {2} $ glass optical fiber
Osuch et al. Coupling independent fiber optic tilt and temperature sensor based on chirped tapered fiber Bragg grating in double-pass configuration
CN110057307B (en) Method for improving strain sensitivity of optical fiber interferometer and optical fiber interferometer
Mądry et al. Simultaneous measurement of temperature and relative humidity using a dual-wavelength erbium-doped fiber ring laser sensor
Mikolajek et al. Temperature measurement using optical fiber methods: overview and evaluation
CN105093136A (en) All-fiber weak magnetic field measuring device
Sun et al. Micro-bending sensing based on single-mode fiber spliced multimode fiber Bragg grating structure
Tang et al. Sensitivity-enhanced hot-wire anemometer by using cladding-etched fiber bragg grating
TW585998B (en) Fiber grating sensor of energy modulation type
CN108801500A (en) Fiber-optical grating temperature sensor based on chaos associated fiber ring attenuation and vibration technique
Park et al. Temperature and pressure sensors based on chiral fibers
EP3298366A1 (en) A temperature sensor
Trpkovski et al. Er3+: Yb3+ doped fibre with embedded FBG for simultaneous measurement of temperature and longitudinal strain
Ruan et al. A high sensitivity temperature sensor realized with cascaded long period fiber grating-based Sagnac loop
CN113551802A (en) Fiber Bragg grating temperature sensor and temperature detection method thereof
Mandal et al. A parallel multiplexed temperature sensor system using Bragg-grating-based fiber lasers
Choi et al. Highly-sensitive and-linear cryogenic temperature response of long-period fiber gratings written on B–Ge-codoped photosensitive fiber
Álvarez-Tamayo et al. Laser Wavelength Estimation Method Based on a High-Birefringence Fiber Loop Mirror
Caucheteur et al. Simultaneous strain and temperature sensor using superimposed tilted Bragg gratings

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees