TW561323B - Integrated trouble shooting system and method - Google Patents

Abstract

The present invention provides an integrated trouble shooting system and method, suitable for a computer integrated manufacturing system. The computer integrated manufacturing system has a plurality of manufacturing apparatuses, controllers, servers, and databases. The controllers get data for controlling the manufacturing apparatuses from specific databases via the servers to make the manufacturing apparatuses perform a semiconductor manufacturing step. The method includes the steps of storing a user interface, a database access object and a plurality of tool objects; displaying the user interface; obtaining first and second input data via the user interface; making the database access object read the first input data and using the first input data to access the database; and making one of the tool objects read the second input data and using the second input data to communicate with one of the servers.

Description

561323

The present invention relates to an integrated problem processing system "" 0111) 16 s citing), and particularly to an integrated problem processing system and method applied to semiconductor j, a brain integrated manufacturing system, and shortening the training of processing personnel. And processing time to increase productivity. Figure 1 shows the integrated computer manufacturing used in a semiconductor process.

Computer Integrated Manufacture (CIM) system architecture diagram. Including a major manufacturing execution system (Manufacture

Executing System (MES) 11, two different servers (Cell server) 21, 22, two storage computers integrated database 23, 24, controller (Cell canon 31), 32. Terminals 33 and 34 that provide operation interface (0PI), manufacturing equipments 311 and 321 for process steps, and client devices 41, 42, 43 that provide other functions such as reports and graphical interfaces. All the above-mentioned devices are connected to each other in a network manner. The controllers 31 and 32 obtain the data for controlling the manufacturing equipment 311 and 321 from the database 23 via the servers 21 and 22 and cause the manufacturing equipment 311 and 321 to perform a semiconductor. Process steps. As shown in Figure 2, when a process engineer finds a problem in the above-mentioned computer integrated manufacturing system, because the systems used by the servers 21 and 22 are different, they may be VAX and Windows NT operating systems. The processing method will vary with Different systems have different steps. Therefore, for each secondary system A, B, and C, there must be separate processing steps for cases i to N. The process personnel must according to the information they can obtain, processing guidelines, system announcements, etc. for each secondary system and each Each case has its own problem-solving process. For example, if the employee forgets the login password, the process staff must first obtain it.

561323

Get the staff, and the action of the data, and then use the wafer type library system to edit 2 or 4 lines. However, regardless of the differences in hardware, familiarity with the problems and the progress of the process should be set up. The process system does not read. The manual may be inconvenient. Account number, direct storage system 23 Allows employees to reconnect product and batch numbers to open and modify the content. Due to the equalization process of electricity and software, the processing process is increased and interrupted quickly, so that after the order, the updater needs to provide the knowledge to electronically Connected by mail and obtained new data. New login label. Printing error. It is stored in the database by using a terminal to retrieve the data. The integrated manufacturing system is very complicated. Every time it is necessary for the process staff, it is manufactured at the same time. time. Therefore, Cheng personnel must ask new questions when they are familiar with them. In addition, due to the huge amount of information required for management, it is possible to use tools such as the transmission of SQL database tools to update the password. For example, the process personnel must first fetch the Telnet and tag files in the data system 24 into the library system 23. Among the sub-systems included in the sub-system, each sub-system and each case need to spend a lot of training time. It also takes a lot of time. The replacement of manufacturing equipment speeds up the already complex problem-handling procedures. There are many types of training procedures for proper processing. All the information produced by traditional computer integration can only be obtained by reading, which causes the process personnel to provide an integrated problem processing in order to solve the above-mentioned problematic systems and methods. Complete a variety of different systems = display; ^ staff can use a single user interface training and processing time to deal with ancient tasks, and shorten the problem processing staff, ^ increase the production capacity. An object of the present invention is to provide an integrated problem processing method,

561323 V. Description of the invention (3) It is suitable for a computer to integrate a plurality of manufacturing equipment, and the controllers pass through the manufacturing steps. The inventory is retrieved by the user. The object is read from the library for storage. The first issue is applicable to the plural system, which controls the manufacturing steps, and the. Store the number of tools. The user takes the object to read the material library and uses the material and the equipment. The method includes manufacturing the system data controller and some server materials to obtain the following steps and multiple tool objects. First and first input data and take. Make the input data of the tools and the two objects to be integrated with another computer control equipment of the manufacturing control system, and the controller passes the data of the equipment to make the system include a storage device to store a user interface to the servos. . The display interface obtains the first access and enables the second input. The server device of the present invention displays a first and input data of the tool data and the access by establishing access and communication. Manufacturing. Save. Display one input, use one of the files, complete the server, set the data, and use the use data. The first input reads one of the servers and provides a unified system, a processor, a multi-processor, and some manufacturing equipment, an integrated data server to serve the data device into the display user interface, and the second input data should be used. And use the object to read one of the servers one-to-one using a single program object manufacturing and multiple libraries to obtain half of the user interface and the user interface to make the input data two rounds of communication-type problem integration controller and Half of the stocks obtained from the restocking and one stock are taken. The process ′ enables the input data to the second user interface, and has a database in the system for controlling the conductor process and a data. This material is used to collect the data into the data and process it. The processing system creates a database to control the conductor process. Processing devices, objects, and equipment. The data is input to the data via the data library. And user interface

0503-7274TWF (N); TSMC2001-1212; Vincent.ptd Page 6 561323 V. Description of the Invention (4) ^ For necessary guidance and work, then use this single # & 乂 ° 4 problem handlers can directly I ○ Early user interface for problem handlers & Beiyue b = straight training and processing time to improve productivity. Operation, while shortening the problem, the embodiment = 3, the figure shows the integration in one embodiment of the present invention, which includes a storage device 51, a processing device 5 ° processing system, and an input device 54. The processing device 52 and One electricity = two—display device 53. This computer integrated manufacturing system is shown in Figure 1 *, the manufacturing system is connected to the execution system U, two feeders of different systems 21 ^ a major manufacturing integrated brain manufacturing Database of required information 23, 24, = Two terminals 33, 34 :: 31, 32, which provide operation interface for storing electricity, and set up coffee, as well as provide other reports such as client devices 41, 42, 43 .All the above installations are connected with each other such as the function 'controller 3 i, 32 via servo 2; =: way of way & Putian 丨, / with a 丨 ... J server? 1, 22 And from the database 23, the data of the manufacturing equipment 311 and 321 are imported to make the manufacturing equipment Sichuan and 321 into the lamp + conductor process steps. The storage device 51 stores a one-on-one Λ1 ^ dynamic feeding page (ASP ) The data library produced takes object D (H, D02 and multiple tool objects plus τ〇2, such as a terminal simulation program. Display device 5 3 is used to display the user interface η. The processing device 52 uses the user interface UI to obtain multiple input data by the process personnel using the data input action of the input device 54 to make the data inventory fetch objects D01 and D02 to read those inputs One of the goods and use the input data obtained to access the database 2g, 24. At the same time, the processing device can also make the tool object T〇1 or 川 2 read one of these input data and use the read input Data and one of the servers 21 and 22 0503-7274TWF (N) · TSMC2001-1212; Vincent.ptd Page 7 561323 V. Description of the invention (5) For comparison with the traditional technology, here is the same staff # 死 A 4 The situation of the password at noon and the production of σ ^ w Let's take a case where the worker forgets to log in to the employee ’s death if :: 仏 dai Printing error is taken as an example to explain in detail. Get the employee piece D01 (Dynamic Servo Page), and the user interface displayed on the display of the material and inventory of the shell material will input this data. After the data, it will be automatically sent to the data library system 23 to update the password. D〇 and its recurrence with negative As an example, the product label is printed incorrectly. At this time, the round model and batch number 'because in the user interface UI displayed in the storage device == 53, enter the label to be modified in the user interface UI, and set the device 52 to obtain this information. It will be automatically sent to: Canton: It and the database system 24 to carry out the update of the collection of the object T01 and from there, in order to provide process staff on duty and to carry out problems, the second device 51 also stores processing instructions, The standard work procedure, the system "event, the personnel contact information, the abnormality report, and the manufacturing processing device 52 display it via the display device 53 on the use fourth.料 The structure diagram of the integrated problem processing system in this embodiment. The decorator can use the user interface UJ to input the necessary data and send it to the object T01, T02 or the database. After taking the object D01, D02, and the VA server, CSVAX, Windows NT server CSNT and data Library DB1 and DB2 can communicate with 0503-7274IW (N); TSMC200M212: Vincent.ptd Page 8 561323 V. Description of the invention (6) ^ and work information provided by the user interface UI 1 obtain necessary knowledge 4 Figure ^ flute ^ And deal with problems in computer integrated manufacturing systems. Comparing the first work and the second time τ diagram, it can be seen that the process personnel only need to handle the individual cases from the processing guidelines provided in the user interface, so that 2 = staff can be in the same user interface. Complete the processing of different sub-systems in υι. The differences between the sub-systems are solved by integrating the problem to understand the program objects created by each and every A5. 'No further steps are required. 'Differences' can reduce the time for problem handling and staff training. Figure 5 is the second integrated problem processing method in one embodiment of the present invention. This method is applicable to a computer integrated manufacturing system. Computer integration $ " Γ ϊ ί ΐ There are multiple manufacturing equipment, control 11, server, and data ^ ^ The server obtains from the database via the server to control the manufacturing equipment; and: Semiconductor process steps. First, in step s1, a user interface, a data library, objects (such as a dynamic feeding page), tool objects (such as a terminal simulation program), and related job information (such as a standard working procedure for processing fingertips, System announcements, non-commissioned personnel contact information, exception reports, manufacturing notifications, etc.). Next, in step S2, the above-mentioned user interface including job information is displayed. Then, in step S3, the process personnel obtain relevant input data through the user interface. Furthermore, in step S4, the database is fetched to read the input data and use the input data to access the database.

In 561323, the tool line is communicated. Provide a user-friendly object and make the problem-solving system more time-consuming to improve a better implementation. Familiarize yourself with this technique. The patent scope object can read the input data and use the integrated surface. Processing capacity. Explained by the example, in the definition with the refining 5. Invention description (7) Finally, in step S5, the input data and the server are summarized as described above. The present method provides guidance for establishing a single process of access and communication. And work information, the user interface to complete the training and processing of a variety of different personnel Although the present invention has been used to limit the present invention, within any scope and scope, when it can be used as a scope of protection, it should be attached to the problem processing system and method and database. In the server interface, it is necessary to use a single operation, and the problem is shortened as above, but it is not used without departing from the essence of the present invention, so the insurer of the present invention shall prevail. 0503-7274TWF (N); TSMC2001-1212; Vincent.ptd Page 10 561323 4 Brief description of the drawings In the following, an embodiment of the integrated problem processing system and method of the present invention will be described with reference to the drawings. Figure 1 is a structural diagram of a computer integrated manufacturing system; Figure 2 is a problem processing method of a traditional computer integrated manufacturing system; Figure 3 is an integrated problem processing system in an embodiment of the present invention; Figure 4 is the present invention FIG. 5 is a flowchart of an integrated problem processing method according to an embodiment of the present invention. [Symbol description] 11 ~ manufacturing execution system; 21, 2 2 ~ server; 23, 24 ~ data system; 31, 3 2 ~ controller; 33, 34 ~ operation interface terminal; 311, 321 ~ manufacturing equipment; 41 , 42, 43 ~ client devices; 51 ~ storage device; 52 ~ processing device; 5 3 ~ display device; 54 ~ input device.

0503-7274TWF (N); TSMC2001-1212; Vincent.ptd page 11

Claims (1)

/ 、、 Scope of patent application 1. An integrated problem processing method, suitable for a computer integrated manufacturing, Wu Zhong 'The computer integrated manufacturing system has a plurality of manufacturing equipment, a complex numerical control =, a complex server and a complex database, these controls The processor obtains data for controlling the manufacturing equipment from the database and causes the manufacturing equipment to perform a semiconductor process step. The method includes the following steps: an object is stored in a user interface, and a plurality of data inventories are stored. Take objects and plural tools to display the user interface; Get a first and second input data; Use one of the first access objects to read the first input data and use the input data to the databases —- accessing 丨 even one of the tool objects is read-two input data and one of the servers are used to feed and use the whole person as described in item 2 of the scope of patent application, where The data collection object is a dynamic feeding method. The method of page-type interrogation is described in the patent scope No. M. Among them, the tool object-system-terminal mold cabinet Λ method 4. King style as described in item i of the patent application. , Which further includes the following steps: σ-type problem processing method stores a job information in the storage device; to display the job information in the user interface. 5. As described in item 4 of the scope of patent application, where the job information includes a private work procedure and system for handling guidelines and methods of problem-solving methods 561323 $ _ II ....... — 6. The scope of patent application " 6 things: a kind of contact information, abnormal report, manufacturing notification. In the system, the problem processing system is applicable to the computer integrated manufacturing system, the dead 1f M electric service integrated manufacturing system with the right if system. Skin preparation, selection i control Controller, a complex server, and a piece of data I. There is a complex system to prepare a complex number: the controllers are obtained from the database and the controllers are used; the words: semiconductor process steps, the system includes: pieces and multiple guard objects Data-user interface, a display device for obtaining multiple data inventories, displaying the user interface; and a processing device, through which the user enters data, to make the second and second data of the data inventories to the databases- Make access to the data of the feeders and use the second input data. 7. The integrated question described in item 6 of the scope of the patent application, where the data library access objects are dynamic servo pages 、、 ', 8. The integrated question described in item 6 of the scope of patent application, wherein one of the tool objects is a terminal simulation program. ,,-' 9 · As described in item 6 of scope of patent application Integrated type, in which the storage device stores a job information, and the display and processing system user interface displays the job information. In the application, the integrated type as described in item 9 of the scope of patent application, wherein the Job information includes a processing guide, standard job = ^, system announcements, personnel contact information, exception reports, manufacturing notifications, system 1 ^ 1 0503 * 7274TW (N); TSMC200M212; Vincent.ptd page 13