TW522435B - Slurry, display component and process for producing the display component - Google Patents

Slurry, display component and process for producing the display component Download PDF

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Publication number
TW522435B
TW522435B TW090112079A TW90112079A TW522435B TW 522435 B TW522435 B TW 522435B TW 090112079 A TW090112079 A TW 090112079A TW 90112079 A TW90112079 A TW 90112079A TW 522435 B TW522435 B TW 522435B
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Taiwan
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glue
weight
patent application
item
manufacturing
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TW090112079A
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Chinese (zh)
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Hiroko Uegaki
Norikazu Tabata
Takaki Masaki
Hiromitsu Takahashi
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Toray Industries
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D175/00Coating compositions based on polyureas or polyurethanes; Coating compositions based on derivatives of such polymers
    • C09D175/04Polyurethanes
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/035Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes

Abstract

Provided is a display component, especially a plasma display component, produced by applying the slurry of a urethane compound and an inorganic particle to a substrate, and baking it. The pattern formed has no deficiency.

Description

522435522435

五、發明說明(1 ) 【技術領域】 本發明係有關一種膠漿及用它之顯示器構件的製法。本 發明之膠漿及製法,可使用於電漿顯示器、電漿位址液晶 顯示器、場致發射顯示器爲始的各種顯示器之製造及電路 材料等圖像加工。 【先前技術】V. Description of the invention (1) [Technical Field] The present invention relates to a method for manufacturing a glue and a display member using the same. The glue and the manufacturing method of the present invention can be used for the manufacture of various displays starting from plasma displays, plasma-address liquid crystal displays, field emission displays, and image processing of circuit materials. [Prior art]

近年來’有關電路材料及顯示器進行小型化及高精細化 ’企求可對應於此之圖像加工技術。特別是於形成電漿顯 示器之隔壁時,企求使玻璃等無機材料以高精度且高長短 徑比圖像加工的方法。 以往,進行無機材料之圖像加工的方法係如日本特開平 9-310030號公報、美國專利6197480號中提案使用感光性 膠漿、藉由微影術形成圖像的方法。 【發明之揭示】In recent years, "miniaturization and high-definition of circuit materials and displays" has been sought for an image processing technology that can respond to this. In particular, in the case of forming a partition wall of a plasma display, a method of processing an inorganic material such as glass with high accuracy and a high aspect ratio is desired. Conventionally, a method of performing image processing of an inorganic material is a method of forming an image by photolithography using a photosensitive paste, as proposed in Japanese Patent Application Laid-Open No. 9-310030 and U.S. Patent No. 6,197480. [Disclosure of Invention]

然而’上述方法於藉由燒成以除去有機成分時,因有機 成分之父聯引起燒成收縮力作用,於圖像中容易產生剝離 或斷線等缺陷問題。 換言之,本發明係爲含有胺甲酸酯化合物及無機微粒子 之膠漿。 而且,本發明係如申請專利範圍第1項之膠獎,其中升 溫至500°C及1000°C時之重量以下式表示。 (500°C 之重量)/(1000°C 之重量)$ 1.05 另外,本發明提供一種膠漿,其係於含有無機微粒子與 522435 五、發明說明(2) 有機成分之膠漿中,其特徵爲將該膠漿塗覆於矽晶圓上形 成薄膜、且升溫至500°C時藉由薄膜收縮自矽晶圓之差量 算出平均膜應力之最大値爲0.1〜20MPa。 此外,本發明提供一種顯示器構件之製法,其特徵爲包 括有使含胺曱酸酯化合物及無機微粒子之膠漿塗覆於基板 上,予以燒成的步驟。 而且,本發明係提供使用它之顯示器,特別是電漿顯示 器之製法。 本發明之較佳實施形態 本發明之膠漿含有有機成分與無機微粒子。於本發明中 ,有機成分爲膠漿中除去無機微粒子者。本發明之膠漿可 以各種方法形成圖像後,進行燒成、除去有機成分、形成 實質上由無機物所成的圖像爲目的。 本發明使用膠漿所製造實質上由無機物所成的圖像,於 顯示器用途、即電漿顯示器用途中,適合使用作爲電漿顯 示板背面板之隔壁。 本發明使用的膠漿中除含有胺甲酸酯化合物與無機微粒 子外,視其所需可添加黏合劑聚合物、分散劑、可塑劑、 增黏劑、有機溶劑、沉澱防止劑、氧化防止劑等。 本發明使用的胺甲酸酯化合物的分子量以1 5000〜50000 較佳。而且’此處所指之分子量爲重量平均分子量。爲 1 5 000以上時’可以保持胺甲酸酯之柔軟性、以及可減少 燒成時之剝離、斷線等缺陷。爲50000以下時,可降低胺 -4- 522435 五、發明說明(3 ) 甲酸醋之黏度、容易予以處理, 本發明使用的胺甲酸酯化合物例如以下述通式(1 )所示 之化合物。However, when the above-mentioned method removes organic components by firing, the shrinkage force of firing is caused by the paternity of the organic components, and defects such as peeling or disconnection are likely to occur in the image. In other words, the present invention is a paste containing a urethane compound and inorganic fine particles. In addition, the present invention is the glue award of item 1 of the scope of patent application, in which the weight when the temperature rises to 500 ° C and 1000 ° C is expressed by the following formula. (Weight at 500 ° C) / (Weight at 1000 ° C) $ 1.05 In addition, the present invention provides a glue, which is contained in inorganic fine particles and 522435. 5. Description of the invention (2) Organic glue, its characteristics In order to form a thin film by coating the glue on a silicon wafer, and when the temperature is raised to 500 ° C., the maximum value of the average film stress calculated from the difference between the shrinkage of the thin film and the silicon wafer is 0.1 to 20 MPa. In addition, the present invention provides a method for manufacturing a display member, which comprises a step of coating a substrate containing a paste containing a carbamic acid ester compound and inorganic fine particles, and firing the substrate. Moreover, the present invention provides a method for manufacturing a display using the display, particularly a plasma display. A preferred embodiment of the present invention The paste of the present invention contains organic components and inorganic fine particles. In the present invention, the organic component is one in which inorganic fine particles are removed from the cement. The paste of the present invention may be formed by various methods, and then fired, removed organic components, and formed an image substantially formed of an inorganic substance. In the present invention, an image made of a substantially inorganic substance using a paste is suitable for use as a partition wall of a plasma display panel back panel in a display application, that is, a plasma display application. In addition to the urethane compound and inorganic fine particles, the glue used in the present invention may be added with a binder polymer, a dispersant, a plasticizer, a tackifier, an organic solvent, a precipitation preventive agent, and an oxidation preventive agent as required. Wait. The molecular weight of the urethane compound used in the present invention is preferably 15,000 to 50,000. The molecular weight referred to herein is a weight average molecular weight. When it is 15,000 or more, it can maintain the flexibility of the urethane, and can reduce defects such as peeling and disconnection during firing. When it is less than 50,000, the amine can be reduced -4- 522435 V. Description of the invention (3) The viscosity of formic acid vinegar can be easily processed. The urethane compound used in the present invention is, for example, a compound represented by the following general formula (1).

Rl- (R4-R3) n-R4-R2 ( 1 ) (其中’ R1及R2係表示選自於含有乙烯性不飽和基之取 代基、氫、碳數丨〜20之烷基、芳基、芳烷基及羥基芳烷 基者’可爲相同或各不同;R3係表示環氧烷基或環氧烷基 寡聚物;R4係表示含有胺甲酸酯鍵之有機基;n係表示1 〜1〇之自然數) 胺甲酸酯化合物以含有環氧乙烷單元較佳。更佳者爲通 式(1)中R3爲含有環氧乙烷單元與環氧丙烷單元之寡聚物 ’且該寡聚物中環氧乙烷單元含有量爲8〜70重量%。藉 由使環氧乙烷單元含有量爲70重量%以下,可提高柔軟性 、且於形成隔壁時應力減小,故可有效地抑制隔壁斷線等 缺陷。另外,於提高熱分解性、形成隔壁後之燒成步驟中 ,不易產生燒成殘渣的問題。此外,藉由使環氧乙烷單元 含有量爲8重量%以上,可提高與其他有機成分之相溶性 。有機成分之相溶性可藉由塗覆有機成分所形成的塗覆膜 之霧濁値予以測定。霧濁値小係表示有機成分相溶性佳者 。霧濁値於厚度30// m之塗覆膜中以5.0%以下較佳。此處 ,霧濁値(Η :單位% )係以:Π S K7 1 05「塑膠之光學特性試 驗方法」爲基準、使用積分球光線透過率測定裝置、測定 擴散透過率(Td)極權光線透過率(Tt),且藉由求取其比値 522435 五、發明說明(4) (H=(Td/Tt)XlOO)算出◦霧濁値以0.8%以下更佳、最佳者 爲0 . 5 %以下。 R4之含胺甲酸酯鍵的有機基以藉由二異氰酸酯基與羥基 之縮合生成較佳。此處所使用的具有二異氰酸酯基之成分 可使用1 , 4 -二異氰酸丁烷酯、1,6 -二異氰酸己烷酯等之脂 肪族二異氰酸酯化合物、1,4 -二異氰酸伸苯酯、二異氰酸 伸甲苯酯等芳香族二異氰酸酯化合物或1,4 -環伸己基二異 氰酸酯、異佛爾酮二異氰酸酯等脂環式二異氰酸酯化合物 。以使用脂環式二異氰酸酯化合物較佳,更佳者爲使用異 佛爾酮二異氰酸酯,惟不受此等所限制。 本發明所使用的胺甲酸酯化合物之具體例如UA - 2 2 3 5PE ( 分子量 18000、EO 含有率 20%)、UA-3238PE(分子量 19000 、EO含有率10%)、UA- 3 348PE(分子量22000、EO含有率 15%)、UA-2349PE(分子量 27000、EO 含有率 7%)、UA-5 348PE(分子量39000、EO含有率23%)(以上爲新中村化學 (股)製)等,惟不受此等所限制。而且,可使用此等化合 物之混合物。 胺甲酸酯化合物之含有量在膠漿中以0.1〜20重量%較 佳。若含有量爲0.1重量%以上時可得適當的抑制效果。 而若大於20重量%時有機成分與無機微粒子之分散性降低 、且容易產生缺陷。 本發明所使用的膠漿可藉由加入反應性單體、反應性寡 聚物、反應性聚合物、光聚合起始劑、光酸發生劑、光鹼 522435 五、發明說明(5) 發生劑、增感劑、增感助劑、紫外線吸收劑、有機染料、 酸、鹼等,使用作爲感光性膠漿。此處,反應性單體、反 應性寡聚物及反應性聚合物之反應性係指膠漿受到活性光 線照射時,反應性單體、反應性寡聚物或反應性聚合物引 起光交聯、光聚合、光解聚合、光改性等之反應,使化學 構造產生變化。此時,可藉由微影術進行製造顯示器構件 〇 反應性單體、反應性寡聚物及反應性聚合物以具有乙烯 性不飽和鍵較佳。另外,膠漿中乙烯性不飽和鍵濃度對 1 kg活性光線照射前之膠漿而言以0 . 2〜1 . 0莫耳較佳。膠 漿中乙烯性不飽和鍵濃度爲0 . 2莫耳以上時可保持膠漿感 度、具有良好的圖像形成性。乙烯性不飽和鍵濃度爲1 . 0 莫耳以下時,可使圖像形成時之交聯密度保持於適當的範 圍,且脫黏合性佳。而且,藉由光或熱抑制聚合縮合、且 不易引起剝離或斷線之缺陷。 作爲反應性單體,本發明之膠漿以另含有具乙烯性不飽 和基之胺化合物較佳。特別是以至少含有下述通式(3 )或 (4 )所示胺化合物任一方較佳。由於可提高對光而言之感 度。 R5R6R7N (3) R5R6N — M — NR7R8 (4) (其中,R5係表示含乙烯性不飽和基之取代基;R6、R7、 R8係表示選自於含乙烯性不飽和基之取代基、氫、碳數1 522435 五、發明說明(6) 〜20之烷基、芳基、芳烷基及羥基烷基者,r6、r7、Rl- (R4-R3) n-R4-R2 (1) (wherein 'R1 and R2 represent a substituent selected from an ethylenically unsaturated group, hydrogen, an alkyl group having a carbon number of ˜20, an aryl group, The aralkyl group and the hydroxyaralkyl group may be the same or different; R3 represents an alkylene oxide or alkylene oxide oligomer; R4 represents an organic group containing a urethane bond; n represents 1 (Natural number of ~ 10) The urethane compound preferably contains an ethylene oxide unit. More preferably, R3 in the general formula (1) is an oligomer containing an ethylene oxide unit and a propylene oxide unit, and the content of the ethylene oxide unit in the oligomer is 8 to 70% by weight. When the content of the ethylene oxide unit is 70% by weight or less, flexibility can be improved, and stress during formation of the partition wall can be reduced, so defects such as disconnection of the partition wall can be effectively suppressed. In addition, in the step of firing after improving the thermal decomposition property and forming the partition wall, the problem of firing residue is less likely to occur. In addition, when the content of the ethylene oxide unit is 8% by weight or more, compatibility with other organic components can be improved. The compatibility of organic components can be measured by the haze of a coating film formed by coating the organic components. The haze small line means that the organic components have good compatibility. The haze is preferably 5.0% or less in a coating film having a thickness of 30 // m. Here, the haze (Η: unit%) is based on: Π S K7 1 05 "Test method for optical characteristics of plastics", using an integrating sphere light transmittance measuring device, and measuring total transmittance (Td) of total light transmission Rate (Tt), and by calculating its ratio 値 522435 V. Invention description (4) (H = (Td / Tt) XlOO) Calculate 雾 haze is better than 0.8%, the best is 0.5 %the following. The urethane bond-containing organic group of R4 is preferably formed by the condensation of a diisocyanate group and a hydroxyl group. As the component having a diisocyanate group used herein, an aliphatic diisocyanate compound such as 1,4-diisocyanate butane, 1,6-diisocyanate hexane, and the like, and 1,4-diisocyanate can be used. Aromatic diisocyanate compounds such as acid phenylene ester and tolyl diisocyanate; or alicyclic diisocyanate compounds such as 1,4-cyclohexyl diisocyanate and isophorone diisocyanate. It is preferable to use an alicyclic diisocyanate compound, and it is more preferable to use isophorone diisocyanate, but it is not limited to these. Specific examples of the urethane compound used in the present invention are UA-2 2 3 5PE (molecular weight 18000, EO content rate 20%), UA-3238PE (molecular weight 19000, EO content rate 10%), UA-3 348PE (molecular weight 22000, EO content rate of 15%), UA-2349PE (molecular weight 27000, EO content rate of 7%), UA-5 348PE (molecular weight 39000, EO content rate of 23%) (the above is made by Shin Nakamura Chemical Co., Ltd.), etc., But not limited by these. Moreover, a mixture of these compounds can be used. The content of the urethane compound is preferably 0.1 to 20% by weight in the cement. When the content is 0.1% by weight or more, an appropriate inhibitory effect can be obtained. On the other hand, if it is more than 20% by weight, the dispersibility of the organic component and the inorganic fine particles is reduced, and defects are liable to occur. The glue used in the present invention can be added by reactive monomers, reactive oligomers, reactive polymers, photopolymerization initiators, photoacid generators, photobases 522435. 5. Description of the invention (5) generators , Sensitizer, sensitizing aid, ultraviolet absorber, organic dye, acid, alkali, etc., used as photosensitive glue. Here, the reactivity of the reactive monomers, reactive oligomers, and reactive polymers means that when the dope is irradiated with active light, the reactive monomers, reactive oligomers, or reactive polymers cause photocrosslinking. , Photopolymerization, photolysis polymerization, photomodification, etc., change the chemical structure. In this case, it is possible to manufacture a display member by lithography. It is preferable that the reactive monomer, the reactive oligomer, and the reactive polymer have an ethylenically unsaturated bond. In addition, the concentration of ethylenically unsaturated bonds in the glue is preferably 0.2 to 1.0 mole for the glue before 1 kg of active light irradiation. When the concentration of ethylenically unsaturated bonds in the cement is 0.2 mol or more, the sensitivity of the cement is maintained and the image formation property is good. When the ethylenic unsaturated bond concentration is 1.0 mole or less, the crosslink density at the time of image formation can be maintained in a proper range, and the debonding property is good. In addition, the polymerization and condensation are suppressed by light or heat, and defects such as peeling and disconnection are not easily caused. As the reactive monomer, the dope of the present invention preferably contains an amine compound having an ethylenically unsaturated group. In particular, it is preferable to contain at least one of the amine compounds represented by the following general formula (3) or (4). Because it can increase the sensitivity to light. R5R6R7N (3) R5R6N — M — NR7R8 (4) (where R5 represents a substituent containing an ethylenically unsaturated group; R6, R7, R8 represents a substituent selected from an ethylenically unsaturated group, hydrogen, Carbon number 1 522435 5. Description of the invention (6) ~ 20 alkyl, aryl, aralkyl and hydroxyalkyl groups, r6, r7,

^ ~SJ 爲相同或各不相同;Μ爲2價鍵結基) 月女化合物之含乙嫌性不幽和基的取代基R5以下述通# < 、(6 )及(7 )中任一式所不者較佳。 ΟΗ2=ΟΚ9 — A— (L) a—CH (OH) —CH2— ( 5 ) CH2=CR9— (A)b— (L)a—S〇2— (6) CH2=CR9— (A) b— (L) a—C〇— ⑺ (其中,R9係爲氫或甲基,A係表示COO、CONH或經耳又π 或未經取代的伸苯基,L係表示選自於碳數1〜2〇之_@ 或非環式伸烷基、伸芳基及伸方烷基,L可以爲未經_ π 、或以碳數1〜6之烷基、鹵素原子、羥基、芳基等取代 ,而且,a、b係爲0或1) 更佳者爲 CH2 = C(CH3)COOCH2CH(OH)CH2-。 而且,胺化合物係以使用3級胺化合物較佳,更佳者爲 具下述通式(8 )所示構造之化合物。 (CH2 二 CR10—C〇一 Z) 3-m—NR’ m (8), (其中,R1Q係爲氫原子或甲基,R’係爲烷基、芳基、芳 烷基或羥基烷基,Z係爲-0-R’’-或-NHR’’-,R”係爲伸烷基、 伸芳基、伸烷芳基或羥基伸烷基,m係爲〇、1或2 ) 本發明所使用的最佳化合物爲雙(2 -羥基-3 -甲基丙烯醯 氧基丙基)異丙胺。 調製具有乙烯性不飽和鍵之胺化合物時,可使具有乙烯 性不飽和鍵之丙烯酸環氧丙酯、甲基丙烯酸環氧丙酯、丙 522435 五、發明說明(7) 烯酸氯化物、甲基丙烯酸氯化物、丙烯酸酐、甲基丙烯酸 酐等與胺化合物反應。亦可使數個含乙烯性不飽和基之化 合物混合。具有乙嫌性不飽和鍵之胺化合物例如有下述之 化合物,惟不受此等所限制。而且,此等之化合物亦可混 合使用。 於本發明中視其所需亦可使用除上述胺化合物外之具有 乙烯性不飽和鍵之反應性單體。該反應性單體例如有具1 個以上可光聚合之丙烯酸酯基、甲基丙烯酸酯基或丙烯基 之單體等。此等之具體例如醇類(例如乙醇、丙醇、己醇 、辛醇、環己醇、丙三醇、三羥甲基丙烷、季戊四醇等) 之丙烯酸或甲基丙烯酸酯、羧酸(例如醋酸、丙酸、苯甲 酸、丙烯酸、曱基丙烯酸、琥珀酸、馬來酸、酞酸、酒石 酸、檸檬酸等)與丙烯酸環氧丙酯、甲基丙烯酸環氧丙酯 、烯丙基環氧丙基、或四環氧丙基二間苯二甲酚二胺之反 應生成物、醯胺衍生物(例如丙烯醯胺、‘甲基丙烯醯胺、 N-羥甲基丙烯醯胺、伸甲基雙丙烯醯胺等)、環氧化合物 與丙烯酸或甲基丙烯酸之反應物等。而且,多官能單體中 不飽和基亦可以丙烯基、甲基丙烯基、乙烯基及烯丙基混 合存在。此等可單獨使用、或組合使用。 而且,作爲反應性寡聚物之胺甲酸酯化合物以具有乙烯 性不飽和基較佳。藉由胺甲酸酯化合物之乙烯性不飽和基 與反應性單體、反應性聚合物等之乙烯性不飽和基反應含 於交聯物中,另可抑制聚合收縮。 522435 五、發明說明(8 ) 本發明之膠漿亦可含有具羧基之共聚合聚合物。 具有羧基之共聚物例如有選擇丙烯酸、甲基丙烯酸、衣 康酸、檸康酸、馬來酸、富馬酸、醋酸乙烯酯或此等之酸 酐等含羧基之單體及甲基丙烯酸酯、丙烯酸酯、苯乙烯、 丙烯腈、醋酸乙烯酯、2 -羥基丙烯酸酯等單體,使用如偶 氮雙異丁腈之起始劑予以共聚合而得。 具羧基之共聚物由於燒成時熱分解溫度低,以丙烯酸酯 或甲基丙烯酸酯及丙烯酸或甲基丙烯酸共聚合成分較佳。 換言之,以使用苯乙烯/甲基丙烯酸甲酯/甲基丙烯酸共聚 物較佳。 具羧基之共聚物的酸價以50〜150KOH/g較佳。藉由酸 價爲50mgKOH/g以下,可擴大顯像容許寬度。而且,藉由 酸價爲50mgKOH/g以上時不會降低對曝光部之顯像液而言 的解性。因此,不需使顯像液濃度變濃、可防止曝光部剝 離,可得局精細圖像。 另外,具羧基之共聚物以在側鏈上具有乙烯性不飽和基 較佳。乙烯性不飽和基例如有丙烯基、甲基丙烯基、乙烯 基、烯丙基等。 使該側鏈加成於共聚物的方法,對共聚物中之硫醇基、 胺基、羥基或羧基而言使具環氧丙基或異氰酸基之乙烯性 不飽和化合物或丙烯酸氯化物、甲基丙烯酸氯化物或氯化 烯丙基加成反應予以製作的方法。 具有環氧丙基之乙烯性不飽和化合物例如有丙烯酸環氧 -10- 522435 五、發明說明(9) 丙酯、甲基丙烯酸環氧丙酯、烯丙基環氧丙醚、乙基丙烯 酸環氧丙酯、巴豆基環氧丙醚、檸檬酸環氧丙醚、異檸康 酸環氧丙醚等。具有異氰酸酯基之乙烯性不飽和化合物有 異氰酸丙烯醯酯、異氰酸甲基丙烯醯酯、異氰酸丙烯醯基 乙酯、異氰酸甲基丙烯醯氧乙酯。而且,具有環氧丙基或 異氰酸酯基之乙烯性不飽和化合物或丙烯酸氯化物、甲基 丙烯酸氯化物或丙烯酸氯化物對聚合物中之硫醇基、胺基 、羥基或羧基而言以0.05〜1莫耳等量加成較佳。 爲得適當的曝光量時,具有羧基之共聚物的添加量以除 去溶劑之有機成分中之10〜90重量%較佳。 黏合劑成分視其所需作爲聚合物時,可使用聚乙烯醇、 聚乙烯丁醇、甲基丙烯酸酯聚合物、丙烯酸酯聚合物、丙 烯酸酯-甲基丙烯酸共聚物、甲基丙烯酸丁酯樹脂等。 本發明所使用的光聚合起始劑可使用選自產生游離基種 者。光聚合起始劑例如有二乙氧基乙醯苯酮、2 -羥基-2 -甲基-1-苯基丙烷-1-酮、苯甲基二甲縮醛、1-(4 -異丙基 苯基)-2 -羥基-2-甲基丙烷-1-酮、4-(2 -羥基乙氧基)苯基 -(2 -羥基-2-丙基)酮、1-羥基環己基-苯酮、1-苯基-1,2-丙二酮- 2- (鄰-乙氧基羰基)肟、2 -甲基-[4-(甲基硫)苯基 卜2 -嗎啉基丙烷-1 -酮、2 -苯甲基-2 -二甲基胺基-1 - ( 4 -嗎 啉基苯基)-丁酮-1、苯因、苯因甲醚、苯因乙醚、苯因異 丙醚、苯因異丁醚、二苯甲酮、鄰-苯因苯甲酸甲酯、4-苯基二苯甲酮、4,4 -二氯二苯甲酮、羥基二苯甲酮、4 -苯^ ~ SJ are the same or different; M is a divalent bonding group) The substituent R5 of the ethylidene group containing a thiol group of the female compound is any of the following general formulas: (6) and (7) Anything is better. ΟΗ2 = ΟΚ9 — A— (L) a—CH (OH) —CH2— (5) CH2 = CR9— (A) b— (L) a—S〇2— (6) CH2 = CR9— (A) b — (L) a—C〇— ⑺ (wherein R9 is hydrogen or methyl, A is COO, CONH or π or unsubstituted phenylene, and L is selected from carbon number 1 _ @ Of ~ 2〇 or acyclic alkylene, aryl, and square alkyl, L may be an alkyl group, halogen atom, hydroxyl group, aryl group, etc. without _ π or 1 to 6 carbon atoms Instead, and a or b is 0 or 1), more preferably, CH2 = C (CH3) COOCH2CH (OH) CH2-. The amine compound is preferably a tertiary amine compound, and more preferably a compound having a structure represented by the following general formula (8). (CH2 diCR10-C〇-Z) 3-m-NR 'm (8), (wherein R1Q is a hydrogen atom or a methyl group, and R' is an alkyl group, an aryl group, an aralkyl group, or a hydroxyalkyl group , Z is -0-R "-or -NHR"-, R "is alkylene, alkylene, alkylene or hydroxyalkylene, and m is 0, 1 or 2) The best compound used in the invention is bis (2-hydroxy-3 -methacryloxypropyl) isopropylamine. When preparing an amine compound having an ethylenically unsaturated bond, acrylic acid having an ethylenically unsaturated bond can be made. Glycidyl ester, Glycidyl methacrylate, Propylene 522435 V. Description of the invention (7) Acrylic acid chloride, methacrylic acid chloride, acrylic acid anhydride, methacrylic acid anhydride and the like react with amine compounds. An ethylenically unsaturated group-containing compound is mixed. An amine compound having an ethylenically unsaturated bond is, for example, the following compounds, but is not limited to these. In addition, these compounds may be used in combination. In the present invention Depending on its needs, reactive monomers having ethylenically unsaturated bonds other than the above amine compounds can also be used. The reactive monomer If there is more than one photopolymerizable acrylate, methacrylate or propylene-based monomer, etc., the specific examples are alcohols (such as ethanol, propanol, hexanol, octanol, cyclohexanol). , Glycerol, trimethylolpropane, pentaerythritol, etc.), acrylic acid or methacrylate, carboxylic acid (such as acetic acid, propionic acid, benzoic acid, acrylic acid, fluoracrylic acid, succinic acid, maleic acid, phthalic acid, Tartaric acid, citric acid, etc.), reaction product with glycidyl acrylate, glycidyl methacrylate, allyl epoxy, or tetraglycidyl diresorcinol diamine, amidine Derivatives (such as acrylamide, 'methacrylamide, N-hydroxymethacrylamide, methacrylamide, etc.), reactants of epoxy compounds with acrylic acid or methacrylic acid, etc., Unsaturated groups in polyfunctional monomers can also exist as a mixture of propenyl, methacryl, vinyl, and allyl. These can be used alone or in combination. Also, urethanes as reactive oligomers The compound preferably has an ethylenically unsaturated group By reacting the ethylenically unsaturated group of the urethane compound with the ethylenically unsaturated group of the reactive monomer, reactive polymer, etc. contained in the crosslinked material, it is also possible to suppress polymerization shrinkage. 522435 V. Description of the invention ( 8) The glue of the present invention may also contain a copolymer polymer having a carboxyl group. The copolymer having a carboxyl group may be selected from acrylic acid, methacrylic acid, itaconic acid, citraconic acid, maleic acid, fumaric acid, and vinyl acetate. Carboxyl-containing monomers such as esters or these anhydrides, and monomers such as methacrylates, acrylates, styrene, acrylonitrile, vinyl acetate, and 2-hydroxyacrylates, starting with azobisisobutyronitrile It is obtained by copolymerizing the initiator. The copolymer having a carboxyl group is preferably a copolymerized component of acrylic acid or methacrylic acid and acrylic acid or methacrylic acid because of low thermal decomposition temperature during firing. In other words, it is preferable to use a styrene / methyl methacrylate / methacrylic acid copolymer. The acid value of the copolymer having a carboxyl group is preferably 50 to 150 KOH / g. When the acid value is 50 mgKOH / g or less, the allowable development width can be enlarged. In addition, when the acid value is 50 mgKOH / g or more, the resolution of the developer in the exposed portion is not reduced. Therefore, it is not necessary to increase the concentration of the developing solution, and it is possible to prevent the exposed portion from being peeled off, and a fine local image can be obtained. The copolymer having a carboxyl group preferably has an ethylenically unsaturated group in a side chain. Examples of the ethylenically unsaturated group include a propenyl group, a methacryl group, a vinyl group, and an allyl group. A method for adding this side chain to a copolymer, for a thiol group, an amine group, a hydroxyl group, or a carboxyl group in the copolymer, an ethylenically unsaturated compound or acrylic acid chloride having an epoxypropyl group or an isocyanate group , A method for producing by methacrylic acid chloride or chlorinated allyl addition reaction. Examples of ethylenically unsaturated compounds having epoxypropyl groups include acrylic epoxy-10-522435. V. Description of the invention (9) Propyl ester, glycidyl methacrylate, allyl glycidyl ether, ethyl acrylate ring Oxypropyl ester, crotonyl glycidyl ether, glycidyl citrate, glycidyl isocitraconic acid, etc. Examples of the ethylenically unsaturated compound having an isocyanate group include propylene isocyanate, methacrylic acid isocyanate, propyl isocyanate ethyl ester, and methacrylic acid isocyanate. Moreover, the ethylenically unsaturated compound or acrylic chloride, methacrylic acid chloride, or acrylic acid chloride having a glycidyl group or an isocyanate group is 0.05 to thiol group, amine group, hydroxyl group or carboxyl group in the polymer 1 mole equivalent is better. In order to obtain an appropriate exposure amount, it is preferred that the copolymer having a carboxyl group is added in an amount of 10 to 90% by weight of the organic component of the solvent. When the binder component is used as the polymer, polyvinyl alcohol, polyvinyl butanol, methacrylate polymer, acrylate polymer, acrylate-methacrylic acid copolymer, and butyl methacrylate resin can be used. Wait. As the photopolymerization initiator to be used in the present invention, one selected from free radical species can be used. Examples of the photopolymerization initiator include diethoxyacetamiphenone, 2-hydroxy-2-methyl-1-phenylpropane-1-one, benzyldimethylacetal, and 1- (4-isopropyl Phenyl) -2 -hydroxy-2-methylpropane-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy-2-propyl) one, 1-hydroxycyclohexyl- Benzophenone, 1-phenyl-1,2-propanedione- 2- (o-ethoxycarbonyl) oxime, 2-methyl- [4- (methylthio) phenylb- 2-morpholinylpropane -1 -ketone, 2-benzyl-2 -dimethylamino-1-(4-morpholinylphenyl) -butanone-1, phenylene, phenylene ether, phenylene ether, phenylene Isopropyl ether, benzoin isobutyl ether, benzophenone, methyl o-benzoin benzoate, 4-phenylbenzophenone, 4,4-dichlorobenzophenone, hydroxybenzophenone, 4-Benzene

-11- 522435 五、發明說明(1〇) 因- 4’-甲基-二苯基硫醚、烷基化二苯甲酮、3,3’,4, 4’-四 (第3 -丁基過氧化羰基)二苯甲酮、4 -苯甲醯基- N,N -二甲 基- -羰基-2-丙醯氧基)乙基]苯甲胺、(4 -苯因苯 甲基)三甲銨氯化物、2-羥基- 3-(4-苯因苯氧基)-N,N,N-三甲基-l-丙烷鋁氯化物一水鹽、2-異丙基噻噸酮、2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、2-經基- 3- (3,4 - 一^甲基-9-鑛基- 9H-瞳囉-2-釀氧基)-N,N,N-二甲基-1-苯異丙胺氯化物、2,4,6 -三甲基苯因苯基膦氧 化物、2,2’-雙(鄰-氯化苯基)_4,5,4’,5’ -四苯基-1,2-雙 咪D坐啉、10 -丁基-2-氯化吖D定酮、2 -乙基蒽醒、苯甲基、 9, 10 -菲醌、樟腦醌、甲基苯基乙醛酯、π5 -環戊烯基-7/ 6 -枯烯基-鐵(1 + )-六氟磷化物(1 -)、二苯基硫醚衍生物、 雙(7? 5-2,4-環戊二烯-l_基)_雙(2,6-二氟-3-(lH-吡咯-l-基)-苯基)鈦、4,4-雙(二甲基胺基)二苯甲酮、4,4-雙( 二乙基胺基)二苯甲酮、噻噸酮、2 -甲基噻噸酮、2-氯化 噻噸酮4 -苯醯基-4-甲基苯酮、二苯甲酮、莽、2,3 -二乙 氧基乙醯苯酮、2 ,2-二甲氧基-2-苯基-2-苯基乙醯苯酮、 2 -羥基-2-甲基丙基苯酮、對-第3 -丁基二氯化乙醯苯酮' 苯甲基甲氧基乙縮醛、蒽醌、2 -第3 -丁基蒽醌、2 -胺基蒽 醌、卢-氯蒽醌、蒽酮、苯并蒽酮、二苯并環庚酮、伸甲 基蒽酮、4-疊氮苯基乙醯苯酮、2,6-雙(對-疊氮次苯基) 環己烷、2,6 -雙(對-疊氮次苯基)_4_甲基環己酮、2 -苯基 -1,2 -丁二酮- 2- (鄰-甲氧基羰基)肟、ι,3 -二苯基丙烷三 -12- 522435 五、發明說明(11) 酮- 2- (鄰-乙氧基羰基)肟、萘磺醯基氯化物、喹啉基磺醯 基氯化物、N -苯基硫化吖啶酮、4,4 -偶氮雙異丁腈、苯并 噻唑二硫化物、三苯基膦、四溴化碳、三溴化苯基碾、過 氧化苯醯及曙紅、甲基藍等之光還原性色素與抗壞血酸、 三乙醇胺等之還原劑組合等。 本發明可使用此等之1種或2種以上。光聚合起始劑對 有機成分而言以添加0.05〜10重量%較佳、更佳者爲〇.1 〜10重量%。藉由光聚合起始劑之添加量在該範圍內,可 保持曝光部之殘存率及良好的光感度。 光聚合起始劑與增感劑同時使用時,可提高感度、擴大 對反應之有效波長範圍。增感劑之具體例如2,4 -二甲基硫 化咕噸酮、2,4 -二乙基硫化噻噸酮、2 -異丙基硫化噻噸酮 、2,3 -雙(4-二乙基胺基苯并)環己酮、2, 6 -雙(4 -二甲基 胺基苯并)-4 -甲基環己酮、米希勒酮、4,4-雙(二乙基胺 基)二苯甲酮、4,4 -雙(二甲基胺基)苯丙烯醯苯、4,4 -雙( 二乙基胺基)苯丙烯醯苯、對-二甲基胺基肉桂叉茚滿酮、 對-二甲基胺基苄叉茚滿酮、2-(對-二甲基胺基苯基亞乙 烯基)異萘噻唑、1,3 -雙(4 -二甲基胺基苯基亞乙烯基)異 萘噻唑、1,3 -雙(4 -二甲基胺基苯亞甲基)丙酮、1,3 -羰基 雙(4 -二乙基胺基苯亞甲基)丙酮、3,3 -羰基雙(7-二乙基 胺基香豆素)、三乙醇胺、甲基二乙醇胺、三異丙醇胺、 N -苯基-N-乙基乙醇胺、N -苯基乙醇胺、N -甲苯基二乙醇 胺、4 -二甲基胺基苯甲酸甲酯、4 -二甲基胺基苯甲酸乙酯 -13- 五、發明說明(12) 、二甲基胺基苯甲酸異戊酯、二乙基胺基苯甲酸異戊酯、 苯甲酸(2 -二甲基胺基)乙酯、4 -二甲基胺基苯甲酸(正-丁 氧基)乙基、4 -二甲基胺基苯甲酸-2-乙基己酯、3 -苯基_ 5 -苯醯基硫化四唑、1-苯基-5-乙氧基碳基硫化四唑等。 本發明中可使用此等之1種或2種以上。而且,於增感 劑中亦可使用作爲光聚合起始劑。於本發明之膠漿中添加 增感劑時,其添加量對有機成分而言以0.05〜1 0重量%較 佳、更佳者爲0 . 1〜1 0重量%。藉由使增感劑之添加量在 該範圍內,可保持曝光部之殘存率且可得良好的光感度。 本發明以添加抗氧化劑。抗氧化劑爲具有游離基連鏈禁 止作用、三重消去作用、過氧化氫之分解作用者。 膠漿例如於使用於製造電漿顯示器構件的隔壁時,含有 很多的玻璃微粒子。因此,不易避免因曝光光源而產生膠 漿內部之光散射情形、容易產生隔壁圖像形狀變粗或圖像 間之凹陷(及殘膜情形)。隔壁圖像之壁以垂直切入、矩形 較佳。理想者經曝光的膠漿塗覆膜在一定的曝光量以下中 可溶解於顯像液、在該曝光量以上時則不溶於顯像液中。 總之,塗覆膜以藉由光散射即使以低曝光量曝光時可溶解 於顯像液中,即使曝光量愈多時仍不會引起圖像形狀變粗 或圖像間產生凹陷情形’由於可顯像之範圍變大故較佳。 在膠漿中添加抗氧化劑時’抗氧化劑可藉由捕捉游離基 、經激勵的光聚合起始劑或增感劑之能量狀態回復至基底 狀態,可藉由散射光抑制多餘的光反應、無法因抗氧化劑 -14- 522435 五、發明說明(13) 抑制而引起因曝光量之激烈光反應,可提高對顯像液之溶 解、不溶解的對比情形。 抗氧化劑之具體例如對苯醌、萘醌、二甲對苯醌、對甲 苯醌、2,6 -二氯醌、2,5 -二乙醯氧-對-苯醌、2,5 -二己氧 基-對-苯醌、氫醌、對-第3-丁基兒茶酚、2,5 -二丁基氫 醌、單-第3-丁基氫醌、2 ,5 -二-第3 -丁基戊基氫醌、二-第3 -丁基-對-甲酚、氫醌單甲醚、α-萘酚、肼鹽酸鹽、 三甲基苯甲基銨氯化物、三甲基苯甲銨草酸酯、苯基-冷― 萘胺、對苯甲基苯酚、二萘基對伸苯基二胺、二硝基 苯、三硝基苯、苦味酸、醌二肟、環己酮肟、焦培酚、單 寧酸、三乙胺鹽酸鹽、二甲基苯胺鹽酸鹽、苯偶姻肟、 (2,2’-硫化雙(4-第3-辛基苯酸酯)-2-乙基己胺鎳-(I I )、 4.4’-硫化雙(3_甲基-6-第3-丁基苯酚)、2,2’-伸甲基雙 (4 -甲基-6-第3-丁基苯酚)、2,2、硫化雙(4 -甲基-6-第 3 -丁基苯酚)、三乙二醇雙[3-(第3 -丁基-5-甲基-4-羥基 苯基)丙酸酯]、1,6 -己二醇-雙[(3,5 -二-第3 -丁基-4-羥 基苯基)丙酸酯])、1,2, 3 -三羥基苯等,惟不受此等所限 制。本發明可使用此等之一種以上者。 抗氧化劑之添加量在膠漿中以0 · 1〜3 0重量%較佳、更 佳者爲0.5〜20重量%。藉由使抗氧化劑之添加量在該範 圍內,可維持膠漿之光感度、且保持聚合度維持圖像形狀 ’提高對顯像液之溶解與不溶解對比情形。 而且,在膠漿中添加紫外線吸收劑時,可藉由吸收曝光 522435 五、發明說明(14) 光源吸收膠漿內部之散射光且使散射光變弱。紫外線吸收 劑例如有二苯甲酮系化合物、丙烯酸氰酯系化合物、水楊 酸系化合物、苯并三唑系化合物、吲哚系化合物、無機系 微粒子氧化金屬等。於此等之中以二苯甲酮系化合物、丙 烯酸氰酯系化合物、苯并三唑系化合物或吲哚系化合物尤 爲有效。此等之具體例如2,4 -二羥基二苯甲酮、2 -羥基-4 -甲氧基二苯甲酮、2,2’-二羥基-4-甲氧基二苯甲酮、 2,2’-二羥基-4,4’-二甲氧基二苯甲酮、2,2、二羥基-4,4’-二甲氧基-5-磺基二苯甲酮、2-羥基-4 -甲氧基- 2’-羧 基二苯甲酮、2 -羥基-4-甲氧基-5-磺基二苯甲酮三水合物 、2 -羥基-4-正-辛氧基二苯甲酮、2-羥基-4-十八烷氧基 二苯甲酮、2,2’,4,4’-四羥基二苯甲酮、4-十二烷氧基- 2-羥基二苯甲酮、2 -羥基- 4- (2 -羥基-3-甲基丙醯氧基)丙氧 基二苯甲酮、2-(2’-羥基- 5’-甲基苯基)苯并三唑、2-(2’-羥基-3、第3 -丁基- 5’-甲基苯基)-5 -氯化苯并三唑、2-(2,-羥基- 3’,5、二-第3-丁基苯基)-5-氯化苯并三唑、2-(2,-羥基-4,-正-辛氧基苯基)苯并三唑、2-乙基己基-2-氰 基-3 ,3 -二苯基丙烯酸酯、2 -乙基-2-氰基-3,3 -二苯基丙 烯酸酯、吲哚系吸收劑之”BONASORB” UA- 390 1 (歐里恩頓( 譯音)化學公司製)、”B0NAS0RB” UA- 3902(歐里恩頓(譯音) 化學公司製)、SOM-2-0008(歐里恩頓化學公司製)等,惟 不受此等所限制。另外,亦可使用在此等紫外線吸收劑之 架構中導入甲基丙烯酸基等之反應型。本發明可使用此等 -16- 522435 五、發明說明(15) 之一種以上者。 紫外線吸收劑之添加量在膠漿中以0 . 00 1〜1 〇重量%較 佳、更佳者爲0 . 005〜5重量%。藉由在該範圍內,可使透 明臨界波長及波爲傾斜寬度在所企求的範圍內、可保持曝 光光源之透過率及膠漿之感度,並可得散射光之吸收效果 Ο 0 此外,本發明以曝光及顯像爲目的時可在膠漿中添加有 機系染料。藉由添加染料予以著色時,適認性佳、顯像時 殘存以膠漿之部分與經除去之部分可容易區別。有機染料 沒有特別的限制,以燒成後在絕緣膜中不殘留者較佳。具 體例如蒽醌系染料、靛系染料、酞菁系染料、碳鐵系染料 、醌亞胺系染料、次甲基系染料、喹啉系染料、硝基系染 料、亞硝基系染料、苯醌系染料、萘醌系染料、酞醯亞胺 染料等。特別是選擇吸收h線與i線附近之波長光者(如 基礎藍等之碳鏺系染料)時,較容易得到本發明之效果故 較佳。有機染料之添加量以〇 . 〇 〇 1〜1重量%較佳。 將膠漿塗覆於基板時之黏度視塗覆方法予以調整時,可 使用有機溶劑。此時所使用的有機溶劑可使用甲基溶纖劑 、乙基溶纖劑、丁基溶纖劑、甲基乙酮、二噁烷、丙酮、 環己酮、環戊酮、異丁醇、異丙醇、四氫呋喃、二甲基亞 楓、r - 丁內酯、溴化苯、氯化苯、二溴化苯、二氯化苯 、溴化苯甲酸、氯化苯甲酸等、或含有丨種以上此等之有 機溶劑混合物。 -17- 522435 五、發明說明(16 ) 本發明之膠漿以在膠漿中無機微粒子之含量爲4〇〜8〇 重量%較佳。若有機成分過多時,必須以燒成步驟除去的 物質量多,故燒成時間變長、不易予以完全無機化。而且 ’爲形成以燒成收縮率變大爲目的尺寸之隔壁時,必須使 塗覆膜變厚等就圖像形成性而言不佳。就保持隔壁形狀而 言亦不佳。若有機成分過少時,不僅膠漿中無機粒子之混 合•分散不充分,且由於膠漿中黏度上升、膠獎之塗覆性 降低等問題產生,且膠漿之安定性容易受到不良的影響故 不爲企求。而且,爲較低有機成分與無機微粒子之分散性 時,於燒成時容易產生缺陷。 無機微粒子以由60〜97重量%低熔點玻璃粉末與3〜40 重量%平均粒徑1〜4 // m之塡充物所成較佳。塡充物爲控 制燒成收縮率或保持所形成的隔壁之強度時,與低熔點玻 璃同時使用。若小於3重量%時無法發揮其添加效果,而 若大於40重量%時會產生隔壁之強度減小問題,故不爲企 求。 無機微粒子可另含有30重量%以下平均粒徑爲0.003〜 0.02// m之氧化物微粒子。 而且,低熔點玻璃粉末及塡充物之折射率以1.45〜1.65 較佳。膠漿爲在溶解有有機成分之有機溶劑系中分散有無 機微粒子者,在其塗覆膜之有機成分層中存在有相當高濃 度的無機微粒子。在該塗覆膜中以微影術進行圖像形成時 ,以類似膠漿中各成分之折射率較佳。由於所使用的有機 -18- 522435 五、發明說明(17) 成分之平均折射率通常爲1.4〜1.7,無機微粒子之折射率 以選擇折射率在該範圍附近者較佳。由各種氧化物所成的 剝離成分就考慮其配合性而言可控制特性,於本發明中可 使用熱特性、折射率等經控制的低熔點玻璃粉末。低熔點 玻璃粉末之折射率爲1 . 45〜1 . 65,玻璃轉移點爲400〜 550°C,荷重軟化點爲450〜600°C較佳。藉由使荷重軟化 點爲450°C以上,在構件形成及顯示器形成之後步驟中不 會使隔壁變形,藉由使荷重軟化點爲600°C以下,於燒成 時可得熔融且強度高的隔壁。 膠漿所使用的低熔點玻璃粉末爲使於膠漿形成時之塡充 性及分散性佳,膠漿可以均一厚度塗覆以保持圖像形成性 良好時,以平均粒徑爲1〜4 // m、最大粒徑爲3 5 // m以下 較佳。具有該粒度分布之玻璃粉末就對膠漿之塡充性及分 散性而言優異,爲低熔點玻璃粉末時在燒成步驟中幾乎完 全熔融、一體化,故可容許相當大粒徑的粉末。若在該範 圍內時,可滿足塡充性及分散性、可構成塗覆性及圖像形 成性優異的膠漿。 本發明之塡充物以使用至少一種選自於折射率經調整的 高熔點玻璃及塗覆反油酸較佳。高熔點玻璃粉末以具有玻 璃轉移點500〜1200 °C、荷重軟化點爲550〜1200 °C者較 佳。 本發明之膠漿藉由使用金屬微粒子作爲無機微粒子,可 使用作爲導電性膠漿。藉由使用該導電性膠漿,可得高精 -19- 522435 五、發明說明(18) 細且缺陷少的電路圖像。該導電性膠漿例如可使用於形成 電漿顯示器之電極。 金屬微粒子以Au、Ni、Ag、Pd、Pt等貴金屬導電性微 粒子較佳。可各種單獨或混合粉末使用。此等中添加有C r 或Rh者就提高高溫特性而言較佳。 使用感光性膠漿時,此等金屬微粒子之平均粒徑以0 . 5 〜5 // ιώ較佳。若平均粒徑小於0 . 5 /z m時,於紫外線曝光 時光線無法順利透過塗設後之膜中、且不易形成良導體之 線寬爲60 μ m以下之微細圖像。另外,若平均粒徑大於5 // m時,塗設後電路圖像之表面凹凸變粗、圖像經度降低 、且噴嘴會產生問題。金屬微粒子以使用比表面積爲0 . 1 〜3 m2 / g者較佳。若比表面積小於0 . 1 m2 / g時,電路圖像 之精度會降低。而且,若大於3m2/g時,粉末之表面積過 大、紫外線散射、圖像精度降低。 金屬微粒子之形狀可使用片狀(板、圓錐、棒)或球狀者 。爲抑制凝聚、曝光時紫外線散射情形少時,以球狀較佳 〇 使本發明之膠漿在l〇°C/分之升溫條件下昇至500°C及 1 000 °C,藉由熱重量測定裝置測定的重量以下式表示較佳 〇 (500°C 之重量)/(1000°C 之重量1.05 500°C及1000°C之重量比小時係表示有機成分之脫黏合 性佳者。若上述比爲K05以下時,隔壁中殘留有機成分 -20- 522435 五、發明說明(19 ) 減少、且可提高顯示器之信賴性。藉由在膠漿中添加胺甲 酸酯化合物,可使該重量比減小。特別是使胺甲酸酯化合 物中環氧乙烷單元之含量在上述範圍內時,可使重量比較 小故爲所企求。而且,膠漿含有含乙烯性不飽和基之化合 物時,可藉由控制乙烯性不飽和鍵濃度,以控制上述重量 比° 將本發明之膠漿塗覆於矽晶圓上形成3〜1 0 // m之薄膜 ,且在1小時內自30°C升溫至5 00°C時,藉由該薄膜之收 縮可使使用下式自矽晶圓差量算出的平均膜應力之最大値 爲0 · 1〜20MPa較佳,更佳者爲〇 . 1〜1 OMPa。 平均膜應力 σ (Pa)=Eh2/(l-u )6Rt (E / ( 1- u )係爲基板之二軸彈性係數,爲上述矽晶圓時 爲l.SOSxiCTHpa,!!係爲基板之厚度(m),R係爲基板之 曲率半徑(111),t係爲薄膜之厚度(111)) 使上述平均膜應力之最大値爲0.1〜20MPa時,可抑制 燒成時之收縮、可減少剝離或斷線等之燒成缺陷,且藉由 0.1〜lOMPa可減少燒成缺陷。藉由在膠漿中添加胺甲酸酯 化合物,可抑制平均膜應力。而且,膠漿含有含乙烯性不 飽和基之化合物時,藉由控制乙烯性不飽和劑濃度以控制 平均膜應力。 膠漿通常使黏合劑聚合物、分散劑、可塑劑、增黏劑、 有機溶劑、抗沉澱劑、抗氧化劑、反應性單體、反應性寡 聚物、反應性聚合物、光聚合起始劑、光酸發生劑、光鹼 -21 - 522435 五、發明說明(2〇) 發生劑、增感劑、增感助劑、紫外線吸收劑、有機染料、 酸、鹼及有機溶劑等調整於所定組成後,以3條滾筒或混 練機均質混合、分散製作。 膠漿之黏度可藉由無機微粒子、增感劑、有機溶劑、可 塑劑及抗沉澱劑等之添加比例適當地調整,其範圍以2000 〜2 0萬c p s ( c m ·泊)較佳。例如使對基板之塗覆進行篩網 印刷法時,以2000〜5000cps之黏度較佳。對基板之塗覆 進行篩網印刷法製得1次塗覆之膜厚1 0〜20 // m時,以5 萬〜20萬cps之黏度較佳。使用刮刀塗覆法或塑膜塗覆法 等時,以1萬〜5萬c p s之黏度較佳。 藉由使如此所得的本發明膠漿塗覆於基板上、且使用各 種方法形成圖像、及燒成,可製得顯示器構件。本發明之 膠漿特別可適用於製造在基板上具有隔壁之電漿顯示器構 件。形成圖像之方法時,例如可使用篩網印刷法、砂鼓風 法、微影術等。微影術由於可高精細加工較佳。 藉由微影術說明使用上述膠漿進行製造顯示器構件例, 惟本發明不受此等所限制。 在基板上全面或部分塗覆膠漿以形成塗覆膜。塗覆方法 可使用篩網印刷法、棒塗覆法、輥塗覆法、塑膜塗覆法、 刮刀塗覆法等之方法。塗覆厚度可藉由選擇塗覆次數、篩 網之篩目及膠漿之黏度予以調整。 此處將膠漿塗覆於基板上,爲提高基板與塗覆膜之密接 性,進行基板之表面處理。表面處理液可使用矽烷偶合劑 -22- 522435 五、發明說明(21) 、例如乙烯基三氯矽烷、乙烯基三甲氧基矽烷、乙烯基三 乙氧基矽烷、參(2-甲氧基乙氧基)乙烯基矽烷、r -環氧 丙氧基丙基三甲氧基矽烷、甲基丙醯氧基丙基)三甲 氧基矽烷、r - ( 2 -胺基乙基)胺基丙基三甲氧基矽烷、r -氯化丙基三甲氧基矽烷、r -硫醇基丙基三甲氧基矽烷、 r -胺基丙基三乙氧基矽烷等、或有機金屬例如可使用有 機鈦、有機鋁、有機锆等。使矽烷偶合劑或有機金屬使用 有機溶劑、例如乙二醇單甲醚、乙二醇單乙醚、甲醇、乙 醇、丙醇、丁醇等稀釋成〇 . 1〜5%之濃度者。然後,使該 表面處理以旋轉器等均勻地塗覆於基板後,藉由在8 0〜 140 °C下乾燥10〜60分鐘予以表面處理。 於塗覆後使用曝光裝置進行曝光。曝光裝置可使用布羅 奇西米提(譯苜)曝光機等。而且,進行大面積曝光時,於 基板上塗覆膠漿後藉由搬送且進行曝光,可以小曝光面積 之曝光機使大面積曝光。 於曝光後,利用塗覆膜之曝光部與未曝光部分對顯像液 之溶解度差進行顯像。顯像係以浸漬法或噴霧法、刷式法 進行。顯像液可使用可溶解膠漿中之有機成分的有機溶劑 。而且,可在不會使該有機溶劑失去溶解力的範圍內添加 水分。顯像液係以水爲主成分較佳。膠漿中存在有具羧基 等之酸性機的化合物時,可以鹼顯像液顯像。鹼水溶液可 使用氫氧化鈉或碳酸鈉、氫氧化鉀水溶液等,惟使用有機 鹼水溶液者以於燒成時溶液除去鹼成分較佳。 -23- 522435 五、發明說明(22 ) 有機鹼可使用一般的胺化合物。具體例如四甲銨氫氧化 物、三甲基苯甲銨氫氧化物、單乙醇胺、二乙醇胺等。 鹼水溶液之濃度通常爲0.05〜5重量%、更佳者爲ο ι〜 1重量%。鹼濃度過低時無法除去可溶部分,而鹼濃度過高 時圖像部分會產生剝離、且非可溶部分會產生腐蝕情形, 故不爲企求。此外,顯像時之顯像溫度就步驟管理而言以 在20〜50°C下進行較佳。 然後’在燒成爐中進行燒成。燒成氣氛或溫度視膠漿或 基板之種類而不同’在空氣中、氮氣、氫氣等之氣氛中燒 成。燒成爐可使用浴槽式燒成爐或帶狀式燒成爐。 燒成通常在400〜1 000°C下進行。在玻璃基板上進行圖 像加工時,以在480〜6 10°C之溫度下保持1〇〜60分鐘進 行燒成較佳。 藉由上述步驟’可得在基板上形成實質上由無機物所成 圖像之顯示器構件。 於下述中藉由實施例具體地說明本發明。惟本發明不受 此等所限制。而且,濃度(% )特別限定爲重量%。 (實施例1〜1 0、比較例1〜2 ) 在50°C下加熱溶解表1所示之胺甲酸酯、3重量%聚合 物溶液與分散劑、3重量%水平劑、4重量%二丙二醇單甲 醚,以調製有機溶液。將其塗覆於玻璃基板上,在1 00 °C 下乾燥9 0分鐘所得的厚度3 0 // πι塗覆膜之膠漿使用史卡( 譯音)試驗機(股)直接讀取霧濁電腦HGM - 2DP予以測定。 -24- 522435 五、發明說明(23) 測定値如表2所示。 在上述之有機溶液中添加表1之無機微粒子,使用混練 機混練且作成膠漿。 使上述膠漿使用島津製作所(股)製之熱重量測定裝置 ”TGA-5 0”、在空氣中測定以i〇°c /分之升溫速度昇至5〇〇 它及1 000°C時之重量。( 500°C之重量)/(l〇〇〇°c之重量)之 値如表2所示。 然後,將上述膠漿塗覆於信越半導體(股)製之直徑1〇〇 土 0.5mm、G度525 土 25//Π1之石夕晶圓上’以形成厚度3〜 l〇/im之塗覆膜。使用FLEXUS公司製薄膜伸縮測定裝置 ”F2300S”,測定在1小時內自300°C升溫至500°C時之伸 縮。所測定的伸縮最大値如表2所示。 另外,將上述膠漿塗覆於玻璃基板上,形成厚度50// m 之塗覆膜,在560°C下燒成15分鐘。於燒成後,使用(股) 曰立製作所製之自計分光光度計”U-32 10”測定實質上僅由 無機物所成膜之反射率。測定値如表2所示。 在對角42吋大小之玻璃基板上形成條帶狀位址銀電極( 線寬100// m、厚度3// m、間距5 00 // m),於其上形成厚度 1 5 // m之誘電體層後,使用上述膠漿以進行下層之篩網印 刷。使以形成電漿顯示器用格子狀隔壁圖像爲目的之篩網 印刷版(橫隔壁:線寬500 // m、圖像間距1 000 // m、縱隔 壁:線寬60// m、圖像間距500 // m)、在橫隔壁與位址電 極直交下予以配置、固定,直至下層之乾燥厚度爲90//m -25- 522435 五、發明說明(24 ) 時進行位址組合且重複印刷5〜6次印刷及乾燥。 另外,使用上述膠漿、在下層之格子狀隔壁圖像上進行 上層之條帶狀圖像之篩網印刷。篩網印刷版(縱隔壁:線 寬60 // m、圖像間距500 // m)、與位址電極平行下固定、 直至上層之乾燥厚度爲90//m後,進行位址組合及重複5 〜6次印刷及乾燥。 使所作成的格子狀隔壁圖像另藉由在56(TC下燒成15分 鐘,可得間距500//m、線寬60//m、局度130/zm之條帶 狀隔壁,及與其直交的間距1 000 // m、線寬500 // m、高度 6 0 // m之補助隔壁所成的具格子狀隔壁之顯示器構件。於 燒成後,觀察剝離或斷線等之缺陷情形,結果如表2所示 〇 其次,在鄰接上述顯示器構件之隔壁間塗覆螢光物。螢 光物之塗覆藉由使形成口徑30 // m之孔穴、自噴嘴前端吐 出螢光物膠漿之顯示感應法進行。使螢光物塗覆在隔壁側 面燒成後爲25//m、在誘電物層上燒成後厚度爲25//m, 在500°C下進行燒成10分鐘,作成電漿顯示器(以下稱爲 PDP)用背面基板。將另外製作的前面基板使用密接玻璃密 接於該背面基板上,以含50%氙氣之霓虹氣體使內部氣壓 爲66500Pa予以密封。此外,實裝驅動電路,以製作PDP 〇 有關所作成的PDP之信賴性,在沒有點燈下放置2個月 後,在70 °C下進行加速試驗48小時,測定運作電壓之電 -26- 522435 五、發明說明(25 ) 壓上升。結果如表2所示。該加速試驗後電壓上升爲1 V 以下時爲安定、2〜3 V時爲少許增加、4V以上時爲增加。 -27- 522435 五、發明說明(26) 表1 胺甲酸酯 聚合物溶 液 低熔點 玻璃 塡充物 氧化物 微粒子 種類 添加量 重量平均 EO含量 種類 添加量 添加量 添加量 添加量 (%) 分子量 (%) (%) (%) (%) 實施例1 I 10 18000 30% I 20 60 一 一 實施例2 Π 10 19000 10% Π 20 40 20 一 實施例3 m 10 42000 0% I 20 60 一 一 實施例4 IV 10 27000 7% Π 20 40 17 3 實施例5 V 10 24000 80% I 20 60 一 一 實施例6 VI 10 1200 50% Π 20 60 一 一 實施例7 I 0.05 18000 30% I 20 60 — 一 實施例8 Π 25 19000 10% Π 20 50 5 5 實施例9 瓜 10 18000 30% I 50 30 一 一 實施例10 _ _ _ — I 45 40 5 一 比較例1 — _ _ _ I 30 60 一 一 比較例2 — 一 — 一 Π 30 30 10 ——— -28- 522435 五、發明說明(27) 表2 有機成分 塗覆膜之 霧濁値(%) 重量比 (500°C/ 1000°〇 最大應力 (MPa) 反射率(%) 缺陷(個) 運作電壓 實施例1 0.2 1.01 6 20 〇 安定 實施例2 0.3 1.00 5 43 0 安定 實施例3 70.0 1.00 4 20 4 安定 實施例4 15.0 1.01 3 61 0 安定 實施例5 0.1 1.03 13 20 4 增加少許 實施例6 0.0 1.01 15 20 5 安定 實施例7 0.1 1.03 17 20 5 增加少許 實施例8 0.1 1.00 4 79 3 安定 實施例9 0.2 1.04 11 20 4 增加少許 實施例10 0.0 1.04 16 38 5 增加少許 比較例1 0.0 1.08 24 20 >50 增加 比較例2 0.0 1.10 25 48 >50 增加 (實施例1 1〜2 1、比較例3〜4 ) 在50°C下加熱溶解表3所示之胺甲酸酯、胺化合物、單 體及聚合物溶液與5重量%光聚合起始劑、0 · 0 1重量%有機 染料、5重量% r - 丁內酯,以調製有機溶液。在該有機溶 液中添加表3所示之無機微粒子,使用混練機以作成膠漿 -29- 522435 五、發明說明(28) 使有機成分塗覆膜之膠漿、50(TC及1 000°C時之膠漿重 量、膠漿塗覆膜之位址、膠漿塗覆膜於燒成後反射率之測 定與實施例1相同地進行。測定値如表4表示。 在對角42吋大小之玻璃基板上形成條帶狀位址銀電極( 線寬5 0 // m、厚度3 // m、間距2 5 0 // m ),於其上形成厚度 15// m之誘電體層後,使上述膠漿之乾燥厚度爲90 □〇!予 以塗覆•乾燥。 其次,使以形成電漿顯示器用格子狀隔壁圖像爲目的之 光罩(條帶狀圖像、線寬6 0 0 // m、圖像間距1 0 0 0 // m )、在 與位址電極直交下予以配置、固定、曝光。此時,爲防止 該光罩不受污染時,在光罩與塗膜面間設置100//m之蓋 子。顯像時在隔壁圖像不會產生剝離的曝光量中以最小値 爲最低曝光量。 於曝光後,另塗覆上述膠漿、乾燥,形成乾燥厚度爲90 // m之塗覆膜。在該塗覆膜上使光罩(條帶狀圖像、線寬 30// m、圖像間距250 // m)與位址電極平行下予以配置固定 且曝光。於曝光後,在0 . 5%乙醇胺水溶液中顯像、再於 5 60°C下燒成15分鐘。可得間距250 μ m、線寬30// m、高 度1 30 # m之補助隔壁所成的具格子狀隔壁之顯示器構件 。於燒成後,觀察剝離或斷線等之缺陷情形,結果如表4 所示。 其次,在鄰接上述顯示器構件之隔壁間塗覆螢光物。螢 光物之塗覆藉由使形成口徑130//m之孔穴、自噴嘴前端 -30- 522435 五、發明說明(29) 吐出螢光物膠漿之顯示感應法進行。使螢光物塗覆在隔壁 側面燒成後爲2 5 # m、在誘電體層上燒成後厚度爲2 5 V m ,在500°C下進行燒成1〇分鐘’作成電漿顯示器(以下稱 爲PDP )用背面基板。將另外製作的前面塞板使用密接玻璃 密接於該背面基板上,以含50%氙氣之霓虹氣體使內部氣 壓爲66500Pa予以密封。此外,實裝驅動電路,以製作 PDP 〇 有關所作成的PDP之信賴性,在沒有點燈下放置2個月 後,在70°C下進行加速試驗48小時,測定運作電壓之電 壓上升。結果如表4所示。該加速試驗後電壓上升爲1 V 以下時爲安定、2〜3 V時爲少許增加、4 V以上時爲增加。 -31 - 522435 五、發明說明(30) 比較例4 比較例3 實施例21 實施例20 實施例19 實施例18 實施例17 實施例16 實S®例15 實施例14 實施例13 實施例12 實施例11 1 1 1 1 < a _ jgjj Ρφ 纈 胺甲酸酯 〇 ο ο ο -Ρ^ -P^ CO O o L/i -1^ 添加量 (%) 1 1 1 1 1-* t>〇 g 24000 27000 42000 i- 18000 19000 18000 19000 18000 重重平均 分子量 1 1 1 1 s 〇〇 s S OJ S § ο »~·k S 〇〇 DJ> if ο J~! « I~( W w HH w I—ί 1 ㈡ 1 >—* 種類 胺類化合物 〇 \—1 OJ OJ UJ o L>h 〇 〇\ LO 添加量 (%) 1~I 1 1~ί Η w 11 1~1 1 ㈡ 1—i 1 1—i 1S ίΤΠΙϋ 猶 im〇 1ffln Πίφΐ m ο -j oo OJ o i 4.95 On ο UJ 添加量 (%) < θ 曰 < a < 曰 Β 曰 種類 聚合物溶液 OJ OJ OJ i; on U〇 OJ 添加量 (%) g L>rt LA g ^r\ 添加量 (%) ' 低熔點 玻璃 - ο 〇 ◦ 〇 ο ο 添加量 (%) 塡充物 ο ο ο 〇 o 〇 o o 〇〇 ο ο ο 添加量 (%) 氧化物 微粒子 ο ο α\ ο ΟΝ \〇 O 〇〇 v〇 〇 On o ON On o -0 o 〇 〇〇 OJ ο OJ σ\ ο 〇〇 OJ ο 乙烯性不 和鍵濃度 (莫耳/kg) -32- 522435 五、發明說明(31) 表4 有機成分 塗覆膜之 霧濁値(%) 重量比 (500°C/1000°C) 最大應力 (MPa) 反射率 (%) 最低曝 光量 (mJ/cm2) 缺陷 (個) 運作電壓 實施例11 0.2 1.02 6 20 500 0 安定 實施例12 0.3 1.02 5 43 300 0 安定 實施例13 0.2 1.02 4 20 1100 〇 安定 實施例14 0.3 1.03 13 61 300 0 增加少許 實施例15 0.1 1.01 5 20 500 4 安定 實施例16 72.0 1.00 3 20 500 4 安定 實施例17 15.0 1.02 6 38 400 5 安定 實施例18 0.0 1.04 14 40 400 5 增加少許 實施例19 0.0 1.014 13 79 500 4 安定 實施例20 0.0 1.05 17 20 300 7 增加少許 實施例21 0.0 1.04 16 45 400 8 增加少許 比較例3 0.0 1.08 24 20 150 >50 增加 比較例4 0.0 1.10 25 53 1500 >50 增加 (實施例22〜24、比較例5) 在50°C下加熱溶解表5所示之胺甲酸酯、胺化合物、單 體及聚合物溶液與2重量%光聚合起始劑、〇 · 〇 1重量%有機 染料’以調製有機溶液。另外,添加70重量%銀微粒子( 平均k徑1 · 5 // m、比表面積1 . i〇m2/g)、3重量%硼矽酸鉍 玻璃微粒子、以作成膠漿。 -33- 五、發明說明(32) 使有機成分塗覆膜之膠漿、50(TC及1000°C時之膠漿重 量、膠漿塗覆膜之位址、膠漿塗覆膜於燒成後反射率之測 定與實施例1相同地進行。測定値如表4表示。 在對角42吋大小之玻璃基板上藉由篩網印刷塗覆所得 的銀微粒子,製得乾燥膜厚6 // m之塗覆膜。然後,經由 光罩(條帶狀圖像、圖像間距25〇em、線寬100// m)進行 曝光。然後,於曝光後,在0.5%乙醇胺水溶液中顯像、製 得條帶狀電極圖像。使電極圖像加工完成的玻璃基板在80 °C下燒成15分鐘後,再於580°C下燒成15分鐘以形成電 極。於燒成後之電極圖像中,觀察剝離或斷線等之缺陷情 形,結果如表6所示。 在製造電極之玻璃基板上另形成誘電體層,在誘電體層 上藉由實施例1 1之方法形成隔壁圖像。 其次,在鄰接上述顯示器構件之隔壁間塗覆螢光物。螢 光物之塗覆藉由使形成口徑1 3 0 // m之孔穴、自噴嘴前端 吐出螢光物膠漿之顯示感應法進行。使螢光物塗覆在隔壁 側面燒成後爲25vm、在誘電體層上燒成後厚度爲25//m ,在50(TC下進行燒成10分鐘,作成電漿顯示器(以下稱 爲PDP )用背面基板。將另外製作的前面基板使用密接玻璃 密接於該背面基板上,以含50%氙氣之霓虹氣體使內部氣 壓爲66 5OOPa予以密封。此外,實裝驅動電路,以製作 PDP ° -34- 522435 五、發明說明(33) 表5 胺甲酸酯 胺類化合物 單體 聚合物溶液 乙烯性 不飽和 鍵濃度 (莫耳 /kg) 種類 添加量 (%) 重量平 均分子 量 ΕΟ含 有率 種类貧 添加量 (%) 種類 添加量 (%) 種類 添加量 (%) 實施例22 νπ 4 18000 30% I 3 m 3 ΙΠ 15 0.36 實施例23 VII 5 19000 10% Π 2 — 3 IV 15 0.41 實施例24 νπ 7 18000 30% 0 π 3 瓜 15 0.18 比較例5 — 〇 一 一 Π 9 — 1 IV 15 1.05 表6 有機成分塗覆膜 重量达 最大應力 最低曝光量 缺陷 之霧濁値(%) (500°C/1000°C )」 (MPa) (MPa) (個) 實施例22 0.2 1.02 6 400 0 實施例23 0.3 1.02 7 450 0 實施例24 0.3 1.02 4 1100 0 比較例5 0.3 1.11 23 300 >10 聚合物溶液I :乙基纖維素(20重量%萜品醇溶液) 聚合物溶液I I :聚丙烯酸甲酯(50重量%甲苯溶液) 聚合物溶液I I I :苯乙烯/甲基丙烯酸甲酯/甲基丙烯酸 共聚物(重量組成比30 / 30 / 40 )中對1〇〇重量份共聚物而言 -35- 522435 五、發明說明(34 ) 加成40重量份丙烯酸環氧丙酯之聚合物 聚合物溶液I V :甲基丙烯酸甲酯/甲基丙烯酸共聚物(重 量組成比60 / 40 )中對100重量份該共聚物而言加成40重 量份丙烯酸環氧丙酯之聚合物(樹脂酸價1 15mgKOH/g) 聚合物溶液V :甲基丙烯酸甲酯/甲基丙烯酸共聚物(重 量組成比82/18、樹脂酸價90mgKOH/g) 單體I :二季戊四醇六丙酸酯 單體 II : CH2 = C(CH3)CO-(〇CH(CH3)CH2)9-OC〇C(CH3)二 CH2 單體I I I :丙氧基化三羥甲基丙烷三丙烯酸酯 胺-I : N,N -二乙胺乙基甲基丙烯酸酯 胺-II :雙(2 -羥基-3-甲基丙烯醯氧基丙基)正丙胺 胺甲酸酯-I:於通式(I)中R]、R2係爲氫、R3係爲還氧 乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二異氰酸酯殘基 ,環氧乙烷單元之含有率爲30%、全體之分子量爲18,000 〇 胺甲酸酯-II :於通式(I)中R1、R2係爲氫、R3係爲還氧 乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二異氰酸酯,環 氧乙烷單元之含有率爲1〇%、全體之分子量爲19,000。 胺甲酸酯- III :於通式(I)中R1、R2係爲氫、R3係爲還 氧乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二異氰酸酯, 環氧乙烷單元之含有率爲〇%、全體之分子量爲42,000。 胺甲酸酯-IV :於通式(I)中R1、R2係爲氫、R3係爲還氧 乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二異氰酸酯殘基 -36- 522435 五、發明說明(35) ,環氧乙烷單元之含有率爲7%、全體之分子量爲27,〇〇〇 〇 胺甲酸酯-V :於通式(I )中Rl、R2係爲氫、R3係爲還氧 乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二異氰酸酯殘基 ’環氧乙院單元之含有率爲8〇%、全體之分子量爲24,〇〇〇 〇 胺甲酸酯-VI :於通式(I)中R!、R2係爲氫、R3係爲還氧 乙院-環氧丙烷共聚物、R4係爲丨,4 _環伸己烷基二異氰酸 醋殘基,環氧乙烷單元之含有率爲5〇%、全體之分子量爲 1,200 ° 胺甲酸酯-V I I ··於通式(I )中R1、R2係爲甲基丙烯酸基 、R3係爲還氧乙烷-環氧丙烷共聚物、R4係爲異佛爾酮二 異氰酸酯殘基,環氧乙烷單元之含有率爲30%、全體之分 子量爲1 8,0 0 0。 胺甲酸酯-VIII :於通式(I)中R1、R2係爲丙烯酸基、R3 係爲還氧乙院-環氧丙烷共聚物、R4係爲1,4 -環伸己院基 二異氰酸酯殘基,環氧乙烷單元之含有率爲10%'全體之 分子量爲19, 00 0。 低溶點玻璃粉末:以氧化物換算組成,L 120 : 9%、S 1〇2 • 22%、Al2〇3 : 23%、BA : 33%、BaO : 4%、Zn〇:2%、Mg〇 :7%(玻璃轉移點4721、荷重軟化點51 5°C、折射率1.59 、平均粒徑2 . 5 5 // m ) 塡充物:以氧化物換算組成’ Si 02 : 3 8%、B2〇3 : 10%、 -37- 522435 五、發明說明(36 ) 、Mg〇:5%、 Ca〇2 : 4%( ϊ皮-11- 522435 V. Description of the invention (10) Because of 4'-methyl-diphenyl sulfide, alkylated benzophenone, 3,3 ', 4, 4'-tetra (3rd-but Carbonyl peroxide) benzophenone, 4-benzylfluorenyl-N, N-dimethyl- -carbonyl-2-propanyloxy) ethyl] benzylamine, (4-benzylbenzyl ) Trimethylammonium chloride, 2-hydroxy-3- (4-phenylenephenoxy) -N, N, N-trimethyl-1-propanealuminum chloride monohydrate, 2-isopropylthioxanthone , 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 2-Cyclo-3-(3,4 -mono ^- 9-Mineral- 9H-Hindi-2-methyloxy) -N, N, N-Dimethyl-1-phenylisopropylamine chloride, 2,4,6-trimethylphenylphenylphosphine oxidation Compounds, 2,2'-bis (o-chlorophenyl) _4,5,4 ', 5'-tetraphenyl-1,2-bisimide D chloroline, 10-butyl-2-acyl chloride D-Danone, 2-ethylanthracene, benzyl, 9, 10-phenanthrenequinone, camphorquinone, methylphenylacetaldehyde, π5-cyclopentenyl-7 / 6-cumenyl-iron ( 1 +) -hexafluorophosphide (1-), diphenyl sulfide derivative, bis (7? 5-2,4-cyclopentadiene-l_yl) _bis (2,6-difluoro- 3- (lH-pyrrole-l-yl)- Based) titanium, 4,4-bis (dimethylamino) benzophenone, 4,4-bis (diethylamino) benzophenone, thioxanthone, 2-methylthioxanthone, 2-thioxanthone chloride 4-benzyl-4-methylbenzophenone, benzophenone, manganese, 2,3-diethoxyethylacetophenone, 2,2-dimethoxy-2 -Phenyl-2-phenylacetophenone, 2-hydroxy-2-methylpropylbenzophenone, p-3-3-dichloroacetophenone benzophenone 'benzylmethoxyacetal , Anthraquinone, 2-th-3rd-butylanthraquinone, 2-aminoanthraquinone, lu-chloroanthraquinone, anthrone, benzoanthrone, dibenzocycloheptanone, dimethylmethylanthrone, 4- Azidophenylacetophenone, 2,6-bis (p-azidophenylene) cyclohexane, 2,6-bis (p-azidophenylene) _4_methylcyclohexanone, 2 -Phenyl-1,2-butanedione- 2- (o-methoxycarbonyl) oxime, ι, 3-diphenylpropanetri-12- 522435 5. Description of the invention (11) -Ethoxycarbonyl) oxime, naphthylsulfonyl chloride, quinolinylsulfonyl chloride, N-phenyl acridinone sulfide, 4,4-azobisisobutyronitrile, benzothiazole disulfide , Triphenylphosphine, carbon tetrabromide, tribromophenyl bromide, A combination of photoreductive pigments such as benzene oxide, eosin, methyl blue, and reducing agents such as ascorbic acid and triethanolamine. The present invention can use one or more of these. The photopolymerization initiator is preferably added to the organic component in an amount of 0.05 to 10% by weight, and more preferably 0.1 to 10% by weight. When the addition amount of the photopolymerization initiator is within this range, the residual ratio of the exposed portion and good light sensitivity can be maintained. When the photopolymerization initiator and the sensitizer are used together, the sensitivity can be increased and the effective wavelength range for the reaction can be extended. Specific examples of the sensitizer are 2,4-dimethylxanthones, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 2,3-bis (4-diethyl Aminoaminobenzo) cyclohexanone, 2, 6-bis (4-dimethylaminobenzo) -4-methylcyclohexanone, Mishlerone, 4,4-bis (diethylamine) Group) benzophenone, 4,4-bis (dimethylamino) phenylpropenebenzene, 4,4-bis (diethylamino) phenylpropenebenzene, p-dimethylaminocinnamon fork Indanone, p-dimethylaminobenzylideneindanone, 2- (p-dimethylaminophenylvinylidene) isonaphthiazole, 1,3-bis (4-dimethylamino) Phenylvinylene) isonaphthiazole, 1,3-bis (4-dimethylaminobenzylidene) acetone, 1,3-carbonylbis (4-diethylaminobenzylidene) acetone , 3,3-carbonylbis (7-diethylaminocoumarin), triethanolamine, methyldiethanolamine, triisopropanolamine, N-phenyl-N-ethylethanolamine, N-phenylethanolamine N-tolyldiethanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate-13-V. Description of the invention (12), Isoamyl dimethylaminobenzoate, isoamyl diethylaminobenzoate, (2-dimethylamino) ethyl benzoate, n-butoxy 4-dimethylaminobenzoate ) Ethyl, 4-dimethylaminobenzoic acid 2-ethylhexyl ester, 3-phenyl-5 -phenylfluorenyltetrazole sulfide, 1-phenyl-5-ethoxycarbon sulfide Azole and so on. One or more of these may be used in the present invention. Moreover, it can also be used as a photopolymerization initiator in a sensitizer. When a sensitizer is added to the glue of the present invention, the added amount is preferably 0.05 to 10% by weight, and more preferably 0.1 to 10% by weight for the organic component. When the addition amount of the sensitizer is within this range, the residual ratio of the exposed portion can be maintained and a good light sensitivity can be obtained. In the present invention, an antioxidant is added. Antioxidants are those with free radical chain inhibition, triple elimination, and decomposition of hydrogen peroxide. The paste contains, for example, a large amount of glass fine particles when it is used in the partition wall of a plasma display member. Therefore, it is difficult to avoid light scattering inside the glue due to the exposure light source, and it is easy to cause the shape of the image next door to become coarse or the depression between the images (and the situation of residual film). The wall of the image next door is cut in vertically, preferably rectangular. Ideally, the exposed dope coating film is soluble in the developing solution at a certain exposure amount or less, and insoluble in the developing solution at the exposure amount or more. In short, the coating film can be dissolved in the developing solution by light scattering even when exposed with a low exposure amount, and even if the exposure amount is increased, the image shape will not be coarsened or a depression will be generated between the images. The larger the range of development, the better. When antioxidants are added to the glue, the antioxidants can return to the base state by capturing the free radicals, the excited photopolymerization initiator or the energy state of the sensitizer, and can suppress excess light reactions by scattering light. Antioxidant-14-522435 V. Description of the Invention (13) The intense photoreaction due to exposure caused by the inhibition can improve the contrast of the dissolution and insolubility of the developer. Specific examples of the antioxidant include p-benzoquinone, naphthoquinone, dimethyl p-benzoquinone, p-toluenequinone, 2,6-dichloroquinone, 2,5-diacetamido-p-benzoquinone, and 2,5-dihexyl. Oxy-p-benzoquinone, hydroquinone, p-3-butylcatechol, 2,5-dibutylhydroquinone, mono-th-butylhydroquinone, 2,5-di-third -Butylpentylhydroquinone, di-3rd-butyl-p-cresol, hydroquinone monomethyl ether, α-naphthol, hydrazine hydrochloride, trimethylbenzyl ammonium chloride, trimethyl Benzyl oxalate, phenyl-cold-naphthylamine, p-benzylphenol, dinaphthyl p-phenylene diamine, dinitrobenzene, trinitrobenzene, picric acid, quinone dioxime, cyclohexyl Ketooxime, pyrogallol, tannic acid, triethylamine hydrochloride, dimethylaniline hydrochloride, benzoin oxime, (2,2'-sulfide bis (4-th-3-octylbenzoate) ) -2-Ethylhexylamine nickel- (II), 4.4'-bis (3-methyl-6-third-butylphenol) sulfide, 2,2'-methylenebis (4-methyl- 6-third-butylphenol), 2,2 bis (4-methyl-6-third-butylphenol), triethylene glycol bis [3- (3-butyl-5-methyl 4-hydroxyphenyl) propionate], 1,6-hexanediol-bis [(3,5- - 3 - butyl-4-hydroxyphenyl) propionate]), 1, 2, 3 - trihydroxybenzene, such as but not limited. The present invention can use one or more of these. The added amount of the antioxidant is preferably from 0.1 to 30% by weight, and more preferably from 0.5 to 20% by weight. By keeping the amount of the antioxidant in this range, the sensitivity of the glue can be maintained, and the degree of polymerization can be maintained to maintain the shape of the image. In addition, when an ultraviolet absorbent is added to the glue, it can be absorbed and exposed. 522435 V. Description of the invention (14) The light source absorbs the scattered light inside the glue and weakens the scattered light. The ultraviolet absorber includes, for example, a benzophenone-based compound, a cyanoacrylate-based compound, a salicylic acid-based compound, a benzotriazole-based compound, an indole-based compound, an inorganic fine-particle metal oxide, and the like. Among these, a benzophenone-based compound, a cyanoacrylate-based compound, a benzotriazole-based compound, or an indole-based compound is particularly effective. Specific examples of these are 2,4-dihydroxybenzophenone, 2-hydroxy-4 -methoxybenzophenone, 2,2'-dihydroxy-4-methoxybenzophenone, 2, 2'-dihydroxy-4,4'-dimethoxybenzophenone, 2,2 dihydroxy-4,4'-dimethoxy-5-sulfobenzophenone, 2-hydroxy- 4 -methoxy-2'-carboxybenzophenone, 2-hydroxy-4-methoxy-5-sulfobenzophenone trihydrate, 2-hydroxy-4-n-octyloxydiphenyl Methanone, 2-hydroxy-4-octadecyloxybenzophenone, 2,2 ', 4,4'-tetrahydroxybenzophenone, 4-dodecyloxy 2-hydroxybenzophenone Ketone, 2-hydroxy-4- (2-hydroxy-3-methylpropionyloxy) propoxybenzophenone, 2- (2'-hydroxy-5'-methylphenyl) benzotriazole , 2- (2'-hydroxy-3, 3rd-butyl-5'-methylphenyl) -5-chlorobenzotriazole, 2- (2, -hydroxy-3 ', 5, di- 3-butylphenyl) -5-chlorobenzotriazole, 2- (2, -hydroxy-4, -n-octyloxyphenyl) benzotriazole, 2-ethylhexyl-2- Cyano-3,3-diphenylacrylate, 2-ethyl-2-cyano-3,3-diphenylacrylate, "BONASORB" UA-390 1 ( Orionton (manufactured by Orion Chemical Company), "B0NAS0RB" UA-3902 (manufactured by Orionton Chemical Company), SOM-2-0008 (manufactured by Orionton Chemical Company), etc. These restrictions. In addition, a reactive type in which a methacrylic group or the like is introduced into the framework of these ultraviolet absorbers can also be used. The present invention can use these -16- 522435 V. More than one of the invention description (15). The added amount of the ultraviolet absorber in the cement is preferably 0.001 to 10 wt%, and more preferably 0.005 to 5 wt%. By being in this range, the transparent critical wavelength and wave width can be made within the desired range, the transmittance of the exposure light source and the sensitivity of the glue can be maintained, and the absorption effect of scattered light can be obtained. When the invention aims at exposure and development, an organic dye can be added to the glue. When colored by adding a dye, the applicability is good, and the portion remaining with the glue during development can be easily distinguished from the removed portion. The organic dye is not particularly limited, and it is preferred that it does not remain in the insulating film after firing. Specific examples include anthraquinone dyes, indigo dyes, phthalocyanine dyes, carbon iron dyes, quinone imine dyes, methine dyes, quinoline dyes, nitro dyes, nitroso dyes, benzene Quinone dyes, naphthoquinone dyes, phthaloimine dyes, and the like. In particular, it is better to select the one that absorbs light with wavelengths near the h-line and i-line (such as carbon blue dyes such as basic blue) to obtain the effect of the present invention more easily. The addition amount of the organic dye is preferably 0.001 to 1% by weight. When the viscosity of the glue applied to the substrate is adjusted according to the coating method, an organic solvent may be used. The organic solvent used at this time can be methyl cellosolve, ethyl cellosolve, butyl cellosolve, methyl ethyl ketone, dioxane, acetone, cyclohexanone, cyclopentanone, isobutanol, isopropyl Alcohol, tetrahydrofuran, dimethyl sulfene, r-butyrolactone, brominated benzene, chlorinated benzene, dibromobenzene, dichlorobenzene, brominated benzoic acid, chlorobenzoic acid, etc., or more These organic solvent mixtures. -17- 522435 5. Description of the invention (16) The paste of the present invention preferably has an inorganic fine particle content of 40 to 80% by weight. If there are too many organic components, a large amount of substances must be removed in the firing step, so the firing time becomes long and it is difficult to completely inorganicize. In addition, when forming a partition wall having a size for the purpose of increasing the firing shrinkage, it is necessary to thicken the coating film and the like, which is not good in terms of image formability. It is not good to keep the shape of the next door. If the organic component is too small, not only the mixing and dispersion of inorganic particles in the mortar are not sufficient, but also problems such as an increase in the viscosity of the mortar and a decrease in the coatability of the rubber award, and the stability of the mortar is easily affected by adverse effects. Not for desire. In addition, when the dispersibility of the organic component and the inorganic fine particles is low, defects are liable to occur during firing. The inorganic fine particles are preferably made of a filler having 60 to 97% by weight of a low melting point glass powder and 3 to 40% by weight of an average particle diameter of 1 to 4 // m. When the filler is used to control the firing shrinkage rate or maintain the strength of the formed partition wall, it is used together with low melting glass. If it is less than 3% by weight, the addition effect cannot be exhibited, and if it is more than 40% by weight, the problem of reduction in the strength of the partition wall occurs, which is not desirable. The inorganic fine particles may further contain 30% by weight or less of oxide fine particles having an average particle diameter of 0.003 to 0.02 // m. In addition, the refractive index of the low-melting glass powder and the filler is preferably 1.45 to 1.65. The dope is one in which inorganic fine particles are dispersed in an organic solvent system in which organic components are dissolved, and inorganic fine particles having a relatively high concentration are present in the organic component layer of the coating film. When forming an image by lithography in this coating film, the refractive index of each component in a similar paste is better. Since the organic used is -18-522435 5. Explanation of the invention (17) The average refractive index of the components is usually 1.4 ~ 1.7, and the refractive index of the inorganic fine particles is preferably selected in the vicinity of this range. The peeling components made of various oxides have controllable characteristics in view of compatibility, and in the present invention, controlled low-melting glass powders such as thermal characteristics and refractive index can be used. The refractive index of the low melting glass powder is 1.45 ~ 1.65, the glass transition point is 400 ~ 550 ° C, and the load softening point is preferably 450 ~ 600 ° C. By making the load softening point to be 450 ° C or more, the partition wall will not be deformed in the steps after the formation of the component and the display. By making the load softening point to be 600 ° C or less, a melted and high-strength next door. The low-melting glass powder used in the glue is to have good filling and dispersibility during the formation of the glue. When the glue can be coated with a uniform thickness to maintain good image formation, the average particle size is 1 to 4 / / m, the maximum particle size is preferably 3 5 // m or less. The glass powder having this particle size distribution is excellent in filling and dispersing properties of the cement. When the glass powder is a low melting point glass powder, it is almost completely melted and integrated during the firing step, so that a powder having a relatively large particle size can be tolerated. When it is within this range, it is possible to satisfy the filling and dispersing properties, and to form a paste having excellent coatability and image formability. The filling material of the present invention preferably uses at least one selected from the group consisting of high-melting glass with adjusted refractive index and coating with oleic acid. High melting point glass powder is preferably one having a glass transition point of 500 to 1200 ° C and a load softening point of 550 to 1200 ° C. The paste of the present invention can be used as a conductive paste by using metal fine particles as inorganic fine particles. By using this conductive paste, high precision can be obtained -19- 522435 V. Description of the invention (18) A circuit image with fine and few defects. The conductive paste can be used, for example, to form electrodes for a plasma display. The metal fine particles are preferably noble metal conductive fine particles such as Au, Ni, Ag, Pd, and Pt. Various powders can be used alone or in combination. The addition of C r or Rh to these is preferable in terms of improving high-temperature characteristics. When using a photosensitive paste, the average particle size of these metal particles is preferably 0.5 to 5 // ιώ. If the average particle size is less than 0.5 / z m, light cannot pass through the coated film smoothly when exposed to ultraviolet light, and it is difficult to form a fine image with a line width of 60 μm or less for a good conductor. In addition, if the average particle diameter is larger than 5 // m, the surface roughness of the circuit image after coating becomes coarse, the image longitude is reduced, and the nozzle will cause problems. The metal fine particles are preferably those having a specific surface area of 0.1 to 3 m2 / g. If the specific surface area is less than 0.1 m2 / g, the accuracy of the circuit image will decrease. If it is more than 3 m2 / g, the surface area of the powder is too large, the ultraviolet light is scattered, and the image accuracy is lowered. The shape of the metal particles can be flake (plate, cone, rod) or spherical. In order to suppress aggregation, and when there is less ultraviolet scattering during exposure, it is better to use a spherical shape. The paste of the present invention is raised to 500 ° C and 1 000 ° C under a temperature rising condition of 10 ° C / min. The weight measured by the measuring device is preferably expressed by the following formula: 0 (500 ° C weight) / (1000 ° C weight 1.05 500 ° C and 1000 ° C weight ratio are small, which means that the organic component has good debonding. If the above When the ratio is K05 or less, the remaining organic components in the partition wall are -20-522435. 5. The invention description (19) is reduced and the reliability of the display can be improved. By adding a urethane compound to the glue, the weight ratio can be made. Reduced. Especially when the content of ethylene oxide units in the urethane compound is within the above range, it is desirable to make the weight relatively small. Moreover, when the dope contains a compound containing an ethylenically unsaturated group, The above-mentioned weight ratio can be controlled by controlling the concentration of ethylenically unsaturated bonds. The paste of the present invention is coated on a silicon wafer to form a thin film of 3 to 1 0 // m, and from 30 ° C in 1 hour. When the temperature rises to 500 ° C, the following formula can be used to make silicon The maximum value of the average film stress calculated from the wafer difference is 0 · 1 to 20 MPa, more preferably 0.1 to 1 O MPa. The average film stress σ (Pa) = Eh2 / (lu) 6Rt (E / ( 1- u) is the biaxial elasticity coefficient of the substrate, l.SOSxiCTHpa when the above silicon wafer is used !!! is the thickness (m) of the substrate, R is the curvature radius (111) of the substrate, and t is the film Thickness (111)) When the maximum 使 of the average film stress is 0.1 to 20 MPa, shrinkage during firing can be suppressed, firing defects such as peeling or disconnection can be reduced, and firing can be reduced by 0.1 to 10 MPa. Defect. The average film stress can be suppressed by adding a urethane compound to the glue. In addition, when the glue contains a compound containing an ethylenically unsaturated group, the average film stress can be controlled by controlling the concentration of the ethylenic unsaturated agent. Glue usually makes adhesive polymers, dispersants, plasticizers, tackifiers, organic solvents, anti-precipitants, antioxidants, reactive monomers, reactive oligomers, reactive polymers, photopolymerization initiation Agent, photoacid generator, photobase-21-522435 V. Description of the invention (20) Generator Sensitizer, sensitizing aid, ultraviolet absorber, organic dye, acid, alkali and organic solvent are adjusted to a predetermined composition and then homogeneously mixed and dispersed with 3 rollers or kneading machine. The viscosity of the glue can be made of inorganic The addition ratio of microparticles, sensitizers, organic solvents, plasticizers and anti-settling agents is appropriately adjusted, and its range is preferably 2,000 to 200,000 cps (cm · poise). For example, to screen the substrate coating In the printing method, a viscosity of 2000 to 5000 cps is preferred. The screen printing method of the substrate coating method is used to obtain a coating thickness of 1 to 20 // m. When the viscosity is 50,000 to 200,000 cps, good. When a doctor blade coating method or a plastic film coating method is used, a viscosity of 10,000 to 50,000 c p s is preferred. By applying the thus-obtained paste of the present invention to a substrate, forming an image using various methods, and firing, a display member can be obtained. The paste of the present invention is particularly suitable for manufacturing a plasma display device having a partition wall on a substrate. As a method of forming an image, for example, a screen printing method, a sandblasting method, and lithography can be used. Lithoscopy is preferred because it can be processed with high precision. An example of manufacturing a display component using the above-mentioned glue is described by lithography, but the present invention is not limited to these. The substrate is fully or partially coated with glue to form a coating film. The coating method may be a screen printing method, a rod coating method, a roll coating method, a plastic film coating method, a doctor blade coating method, or the like. The coating thickness can be adjusted by selecting the number of coating times, the mesh size of the screen and the viscosity of the glue. Here, the glue is applied to the substrate, and the surface of the substrate is treated in order to improve the adhesion between the substrate and the coating film. The surface treatment liquid can use silane coupling agent-22- 522435 5. Description of the invention (21), such as vinyltrichlorosilane, vinyltrimethoxysilane, vinyltriethoxysilane, ginseng (2-methoxyethyl) Oxy) vinylsilane, r-glycidoxypropyltrimethoxysilane, methylpropoxypropyl) trimethoxysilane, r-(2-aminoethyl) aminopropyltrimethyl Oxysilane, r-chloropropyltrimethoxysilane, r-thiolpropyltrimethoxysilane, r-aminopropyltriethoxysilane, etc., or an organic metal such as organic titanium, organic Aluminum, organic zirconium, etc. The silane coupling agent or organic metal is diluted to a concentration of 0.1 to 5% using an organic solvent such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methanol, ethanol, propanol, butanol, and the like. Then, the surface treatment is uniformly applied to the substrate with a spinner or the like, and then the surface treatment is performed by drying at 80 to 140 ° C for 10 to 60 minutes. After coating, exposure was performed using an exposure device. The exposure device can be a Brochsimiti exposure machine. In addition, in the case of large-area exposure, a large-area exposure can be performed by an exposure machine with a small exposure area by conveying and exposing after coating a paste on a substrate. After exposure, the difference in solubility of the developing solution is developed using the exposed portion and the unexposed portion of the coating film. The development is performed by a dipping method, a spray method, or a brush method. As the developing solution, an organic solvent which can dissolve the organic components in the glue can be used. Further, water can be added within a range that does not lose the organic solvent. The developing liquid is preferably composed of water as the main component. When a compound having an acidic machine such as a carboxyl group is present in the cement, it can be developed with an alkali developing solution. As the alkaline aqueous solution, sodium hydroxide, sodium carbonate, or potassium hydroxide aqueous solution can be used. However, it is preferable that the organic alkaline aqueous solution be used to remove the alkaline component during the firing. -23- 522435 5. Description of the invention (22) Organic amine compounds can be used as the organic base. Specific examples include tetramethylammonium hydroxide, trimethylbenzyl ammonium hydroxide, monoethanolamine, and diethanolamine. The concentration of the alkaline aqueous solution is usually 0.05 to 5% by weight, and more preferably ο to 1% by weight. When the alkali concentration is too low, the soluble part cannot be removed, and when the alkali concentration is too high, the image part will be peeled off, and the non-soluble part will be corroded, so it is not desirable. In addition, the development temperature at the time of development is preferably performed at 20 to 50 ° C in terms of step management. Then, it is fired in a firing furnace. The firing atmosphere or temperature varies depending on the type of the paste or the substrate ', and the firing is performed in an atmosphere of air, nitrogen, hydrogen, or the like. As the firing furnace, a bath firing furnace or a belt firing furnace can be used. Firing is usually performed at 400 to 1 000 ° C. When performing image processing on a glass substrate, it is preferable to perform firing by maintaining the temperature at 480 to 6 at 10 ° C for 10 to 60 minutes. By the above step ', a display member is formed on the substrate to form an image substantially formed of an inorganic substance. The present invention will be specifically described in the following examples. However, the present invention is not limited by these. The concentration (%) is particularly limited to% by weight. (Examples 1 to 10, Comparative Examples 1 to 2) The urethanes shown in Table 1, 3% by weight polymer solution and dispersant, 3% by weight leveling agent, and 4% by weight were dissolved by heating at 50 ° C. Dipropylene glycol monomethyl ether to prepare an organic solution. It was coated on a glass substrate and dried at 100 ° C for 90 minutes to obtain a thickness of 3 0 // π coated film paste. The haze computer was directly read using a Ska test machine. HGM-2DP was measured. -24- 522435 V. Description of the invention (23) The measurement 値 is shown in Table 2. The inorganic fine particles of Table 1 were added to the above-mentioned organic solution, and kneaded with a kneader to prepare a slurry. The above mortar was measured using a thermogravimetric measuring device "TGA-5 0" manufactured by Shimadzu Corporation and measured in air at a temperature rising rate of IO ° C / min to 500 ° C and 1 000 ° C. weight. The weight of (weight at 500 ° C) / (weight at 1000 ° C) is shown in Table 2. Then, the above-mentioned glue is coated on a Shiyoshi wafer made of Shin-Etsu Semiconductor Co., Ltd. with a diameter of 100 to 0.5 mm and a G degree of 525 to 25 // Π1 to form a coating having a thickness of 3 to 10 / im. Laminated. The film expansion and contraction measuring device "F2300S" manufactured by FLEXUS was used to measure the shrinkage when the temperature was raised from 300 ° C to 500 ° C in one hour. The measured maximum expansion is shown in Table 2. In addition, the above-mentioned paste was coated on a glass substrate to form a coating film having a thickness of 50 // m, and fired at 560 ° C for 15 minutes. After firing, the self-scoring spectrophotometer "U-32 10" manufactured by Yueli Manufacturing Co., Ltd. was used to measure the reflectance of a film formed only of an inorganic substance. Measurements are shown in Table 2. A strip-shaped silver address electrode (line width 100 // m, thickness 3 // m, pitch 5 00 // m) is formed on a 42-inch diagonal glass substrate, and a thickness of 1 5 // m is formed thereon After the electrophoretic layer is used, the above-mentioned paste is used for screen printing of the lower layer. A screen printing plate for the purpose of forming a grid-like partition image for a plasma display (transverse partition: line width 500 // m, image pitch 1 000 // m, longitudinal partition wall: line width 60 // m, drawing (Image distance 500 // m), configured and fixed under the transverse partition wall and the address electrode orthogonally, until the dry thickness of the lower layer is 90 // m -25- 522435 V. Address combination and repeat in the description of the invention (24) Printing 5 ~ 6 times printing and drying. In addition, the above-mentioned glue was used to perform screen printing of the upper band image on the lower grid cell image. Screen printing plate (median wall: line width 60 // m, image spacing 500 // m), fixed in parallel with the address electrode, until the dry thickness of the upper layer is 90 // m, address combination and repeat 5 to 6 times printing and drying. By making the grid-like partition wall image fired at 56 ° C for 15 minutes, a strip-shaped partition wall with a pitch of 500 // m, a line width of 60 // m, and a locality of 130 / zm can be obtained, and The orthogonally spaced 1 000 // m, line width 500 // m, and height 6 0 // m are auxiliary display walls with grid-like partition walls. After firing, observe the defects such as peeling or disconnection. The results are shown in Table 2. Secondly, a fluorescent substance was applied between the partition walls adjacent to the above display member. The fluorescent substance was applied by forming a hole with a diameter of 30 // m and spitting out the fluorescent substance glue from the front end of the nozzle. The display method of the slurry is performed. The phosphor is coated on the side of the partition wall and fired to 25 // m, and the thickness of the fired layer is 25 // m, and fired at 500 ° C for 10 minutes. A back substrate for a plasma display (hereinafter referred to as a PDP) was prepared. A separately prepared front substrate was adhered to the back substrate using a contact glass, and an internal gas pressure of 66,500 Pa was sealed with a neon gas containing 50% xenon. In addition, Install the drive circuit to make the PDP. ○ Reliability of the PDP produced, and place it without lighting 2 After a month, an accelerated test was performed at 70 ° C for 48 hours to measure the operating voltage of -26-522435. V. Description of the invention (25) The voltage increased. The results are shown in Table 2. The voltage increased to 1 V after this accelerated test. It is stable at the following time, slightly increased at 2 to 3 V, and increased at 4 V or higher. -27- 522435 V. Description of the invention (26) Table 1 Types of urethane polymer solution low melting point glass-filled oxide fine particles Adding amount Weight average EO content Kind of adding amount Adding amount Adding amount (%) Molecular weight (%) (%) (%) (%) Example 1 I 10 18000 30% I 20 60 One example 2 Π 10 19000 10% Π 20 40 20 one example 3 m 10 42000 0% I 20 60 one example 4 IV 10 27000 7% Π 20 40 17 3 example 5 V 10 24000 80% I 20 60 one example 6 VI 10 1200 50% Π 20 60-one example 7 I 0.05 18000 30% I 20 60-one example 8 Π 25 19000 10% Π 20 50 5 5 example 9 melon 10 18000 30% I 50 30 one example 10 _ _ _ — I 45 40 5 a comparative example 1 — _ _ _ I 30 60 one a comparative example 2 — one — one 30 30 10 ——— -28- 522435 V. Description of the invention (27) Table 2 Haze of organic coating film (%) Weight ratio (500 ° C / 1000 ° 〇 Maximum stress (MPa) Reflectance (%) Defect (number) Operating voltage example 1 0.2 1.01 6 20 0 Stable example 2 0.3 1.00 5 43 0 Stable example 3 70.0 1.00 4 20 4 Stable example 4 15.0 1.01 3 61 0 Stable example 5 0.1 1.03 13 20 4 Add a little example 6 0.0 1.01 15 20 5 Stable example 7 0.1 1.03 17 20 5 Add a little example 8 0.1 1.00 4 79 3 Settle example 9 0.2 1.04 11 20 4 Add a little example 10 0.0 1.04 16 38 5 Add A little Comparative Example 1 0.0 1.08 24 20 > 50 Increase Comparative Example 2 0.0 1.10 25 48 > 50 Increase (Example 1 1 ~ 2 1, Comparative Examples 3 ~ 4) Heat dissolve at 50 ° C as shown in Table 3 The urethane, amine compound, monomer, and polymer solution and 5% by weight of a photopolymerization initiator, 0.01% by weight of an organic dye, and 5% by weight of r-butyrolactone to prepare an organic solution. Add the inorganic fine particles shown in Table 3 to this organic solution, and use a kneading machine to make a slurry -29- 522435 V. Description of the invention (28) A slurry of organic coating film, 50 (TC and 1 000 ° C) The measurement of the mortar weight at the time, the location of the mortar coating film, and the reflectance of the mortar coating film after firing were performed in the same manner as in Example 1. The measurement is shown in Table 4. The size of the diagonal 42 inches A strip-shaped address silver electrode (line width 5 0 // m, thickness 3 // m, pitch 2 5 0 // m) is formed on the glass substrate, and an electromotive layer having a thickness of 15 // m is formed thereon. The above-mentioned paste has a dry thickness of 90 □ 〇! And is applied and dried. Next, a mask (strip-like image, line width 6 0 0 //) is formed for the purpose of forming a grid-like partition image for a plasma display. m, image spacing 1 0 0 0 // m), configured, fixed, and exposed under the orthogonal contact with the address electrode. At this time, to prevent the photomask from being contaminated, set it between the photomask and the coating surface 100 // m cover. The minimum exposure amount is the smallest exposure amount in the next image without peeling during development. After exposure, apply the above Glue and dry to form a coating film with a dry thickness of 90 // m. On this coating film, a photomask (striped image, line width 30 // m, image spacing 250 // m) and The address electrodes are arranged and fixed in parallel and exposed. After exposure, they are developed in a 0.5% ethanolamine aqueous solution, and then fired at 5 60 ° C for 15 minutes. A pitch of 250 μm and a line width of 30 // m, height 1 30 # m The auxiliary display wall with a grid-like partition wall. After firing, observe the defects such as peeling or disconnection, and the results are shown in Table 4. Second, the adjacent display members A fluorescent substance is applied between the walls. The fluorescent substance is applied by forming a hole with a diameter of 130 // m from the front end of the nozzle -30- 522435 V. Description of the invention (29) Display of the fluorescent substance glue The method is as follows. The phosphor is coated on the side of the partition wall and fired to a thickness of 2 5 m, and the thickness of the fired layer is 25 V m. The firing is performed at 500 ° C for 10 minutes to prepare a plasma. A rear substrate for a display (hereinafter referred to as a PDP). A separately-made front plug plate was adhered to the rear substrate with a contact glass to contain The neon gas of 50% xenon seals the internal air pressure to 66500Pa. In addition, the drive circuit is installed to make the PDP. 〇Reliability of the PDP produced, after being left for 2 months without lighting, at 70 ° C The acceleration test was performed for 48 hours to measure the voltage rise of the operating voltage. The results are shown in Table 4. After the acceleration test, the voltage was stable when the voltage increased below 1 V, increased slightly when 2 to 3 V, and increased when the voltage exceeded 4 V. -31-522435 V. Description of the invention (30) Comparative example 4 Comparative example 3 Example 21 Example 20 Example 19 Example 18 Example 17 Example 16 Example 15 Example 14 Example 13 Example 12 Example 11 1 1 1 1 < a _ jgjj φφ valine formate οο ο ο -Ρ ^ -P ^ CO O o L / i -1 ^ Addition amount (%) 1 1 1 1 1- * t > 〇g 24000 27000 42000 i -18000 19000 18000 19000 18000 Weight-average molecular weight 1 1 1 1 s 〇〇s S OJ S § ο »~ · k S 〇〇DJ > if ο J ~!« I ~ (W w HH w I—ί 1 ㈡ 1 > — * Kinds of amine compounds 0 \ —1 OJ OJ UJ o L > h 〇〇 \ LO Addition (%) 1 ~ I 1 1 ~ ί Η w 11 1 ~ 1 1 ㈡ 1-i 1 1-i 1S ίΤΠΙϋ imim〇1ffln Πίφΐ m ο -j oo OJ oi 4.95 On ο UJ Addition (%) < θ < a < B type polymer solution OJ OJ OJ i; on U〇OJ added amount (%) g L > rt LA g ^ r \ added amount (%) 'low melting point glass-ο 〇◦ 〇ο ο added amount (%) Filler ο ο ο 〇o 〇oo 〇〇ο ο ο Addition amount (%) Oxide fine particles ο ο α \ ο 〇Ν \ 〇O 〇〇v〇〇On o ON On o -0 o 〇〇 〇OJ ο OJ σ \ ο 〇〇OJ ο Concentration of ethylenic discordance (mol / kg) -32- 522435 V. Description of the invention (31) Table 4 Haze (%) weight ratio of organic component coating film (500 ° C / 1000 ° C) Maximum stress (MPa) Reflectance (%) Minimum exposure (mJ / cm2) Defect (number) Operating voltage Example 11 0.2 1.02 6 20 500 0 Stable Example 12 0.3 1.02 5 43 300 0 stable example 13 0.2 1.02 4 20 1100 0 stable example 14 0.3 1.03 13 61 300 0 slightly added example 15 0.1 1.01 5 20 500 4 stable example 16 72.0 1.00 3 20 500 4 stable example 17 15.0 1.02 6 38 400 5 Stability Example 18 0.0 1.04 14 40 400 5 Add a little Example 19 0.0 1.014 13 79 500 4 Stability Example 20 0.0 1.05 17 20 300 7 Add a little Example 21 0.0 1.04 16 45 400 8 Add a little Comparative Example 3 0.0 1.08 24 20 150 > 50 Add a Comparative Example 4 0.0 1.10 25 53 1500 > 50 Add (Example 22 ~ 24. Comparative example 5) The carbamate, amine compound, monomer, and polymer solution shown in Table 5 and 2% by weight of a photopolymerization initiator, and 0.001% by weight of an organic dye were dissolved by heating at 50 ° C. 'To prepare an organic solution. In addition, 70% by weight of silver fine particles (average k diameter of 1.5 m / m, specific surface area of 1.10m2 / g) and 3% by weight of bismuth borosilicate glass fine particles were added to prepare a paste. -33- V. Description of the invention (32) Make the glue of organic component coating film, 50 (TC and 1000 ° C weight of glue, the location of glue coating film, glue coating film firing) The measurement of the back reflectance was performed in the same manner as in Example 1. The measurement results are shown in Table 4. The silver fine particles obtained by screen printing were coated on a 42-inch diagonal glass substrate to obtain a dry film thickness of 6 // m coating film. Then, exposure was performed through a photomask (striped image, image pitch of 25 μm, line width of 100 // m). Then, after exposure, it was developed in a 0.5% ethanolamine aqueous solution, A strip-shaped electrode image was obtained. The glass substrate with the electrode image processed was fired at 80 ° C for 15 minutes, and then fired at 580 ° C for 15 minutes to form an electrode. The electrode figure after firing In the image, the defects such as peeling or disconnection are observed, and the results are shown in Table 6. On the glass substrate on which the electrode was manufactured, an additional electrophoretic layer was formed, and the partition wall image was formed by the method of Example 11 on the electrophoretic layer. Next And apply a fluorescent substance between the partition walls adjacent to the above display member. The fluorescent substance is applied by forming a mouth 1 3 0 // m, the display induction method is used to discharge the fluorescent substance glue from the front end of the nozzle. The fluorescent substance is coated on the side of the partition wall and fired to 25 vm, and the thickness of the fired layer is 25 / / m, firing at 50 (TC for 10 minutes, to create a back substrate for plasma display (hereinafter referred to as PDP). The separately prepared front substrate was adhered to the back substrate with a contact glass, and the content was 50% xenon. Neon gas seals the internal air pressure to 66 5OOPa. In addition, the drive circuit is installed to make the PDP ° -34- 522435 5. Description of the invention (33) Table 5 Carbamate amine compound monomer polymer solution ethylenicity Unsaturated bond concentration (mol / kg) Kind addition amount (%) Weight average molecular weight EO Content rate Kind lean addition amount (%) Kind addition amount (%) Kind addition amount (%) Example 22 νπ 4 18000 30% I 3 m 3 IΠ 15 0.36 Example 23 VII 5 19000 10% Π 2 — 3 IV 15 0.41 Example 24 νπ 7 18000 30% 0 π 3 Melon 15 0.18 Comparative Example 5 — 〇 一一 Π 9 — 1 IV 15 1.05 Table 6 The maximum stress of the organic component coating film weight Minimum exposure dose defect haze (%) (500 ° C / 1000 ° C) (MPa) (MPa) (units) Example 22 0.2 1.02 6 400 0 Example 23 0.3 1.02 7 450 0 Example 24 0.3 1.02 4 1100 0 Comparative Example 5 0.3 1.11 23 300 > 10 Polymer solution I: ethyl cellulose (20% by weight terpineol solution) Polymer solution II: polymethyl acrylate (50% by weight toluene solution) polymer Solution III: styrene / methyl methacrylate / methacrylic acid copolymer (weight composition ratio 30/30/40) for 100 parts by weight of copolymer -35- 522435 V. Description of the invention (34) 40 parts by weight of a polymer polymer solution of propylene acrylate IV: 40% by weight of 100 parts by weight of the copolymer of methyl methacrylate / methacrylic acid copolymer (weight composition ratio 60/40) Parts of propylene acrylate polymer (resin acid value 1 15mgKOH / g) polymer solution V: methyl methacrylate / methacrylic acid copolymer (weight composition ratio 82/18, resin acid value 90mgKOH / g) unit Body I: Dipentaerythritol hexapropionate monomer II: CH2 = C (CH3) CO- (〇CH (CH3) CH2) 9-OC〇C (CH3) CH2 monomer III: propoxylated trimethylolpropane triacrylate amine-I: N, N-diethylamine ethylmethacrylate amine-II: bis (2-hydroxy-3-methacrylic acid) (Oxypropyl) n-propylamine carbamate-I: in the general formula (I), R], R2 is hydrogen, R3 is redox ethylene-propylene oxide copolymer, and R4 is isophorone The content of diisocyanate residues, ethylene oxide units is 30%, and the overall molecular weight is 18,000 urethane-II: in the general formula (I), R1 and R2 are hydrogen, and R3 is redox ethyl. The alkane-propylene oxide copolymer and R4 are isophorone diisocyanate, the content of the ethylene oxide unit is 10%, and the molecular weight of the whole is 19,000. Urethane-III: In the general formula (I), R1 and R2 are hydrogen, R3 is redox ethylene-propylene oxide copolymer, R4 is isophorone diisocyanate, and ethylene oxide unit The content rate was 0%, and the molecular weight of the whole was 42,000. Urethane-IV: In the general formula (I), R1 and R2 are hydrogen, R3 is redox ethylene-propylene oxide copolymer, and R4 is isophorone diisocyanate residue-36- 522435 5. Description of the invention (35), the content of the ethylene oxide unit is 7%, and the overall molecular weight is 27,000 urethane-V: in the general formula (I), R1 and R2 are hydrogen The R3 system is a redox ethylene-propylene oxide copolymer, the R4 system is an isophorone diisocyanate residue, and the content of the ethylene oxide unit is 80%, and the molecular weight of the whole is 24,000,000. Carbamate-VI: In the general formula (I), R !, R2 is hydrogen, R3 is redox ethylene-propylene oxide copolymer, R4 is 丨, 4_cyclohexyl diiso The content of cyanic acid residues and ethylene oxide units is 50%, and the molecular weight of the whole is 1,200 °. Carbamate-VII · In the general formula (I), R1 and R2 are methacrylic acid Group, R3 is redox ethylene-propylene oxide copolymer, R4 is isophorone diisocyanate residue, the content of ethylene oxide unit is 30%, and the molecular weight of the whole is 18,000. . Carbamate-VIII: In the general formula (I), R1 and R2 are acrylic groups, R3 is redox ethylene-propylene oxide copolymer, and R4 is 1,4-cyclohexylene diisocyanate The content of the residue and the ethylene oxide unit was 10%, and the molecular weight of the whole was 19,000. Low melting point glass powder: composition in terms of oxides, L 120: 9%, S 102 • 22%, Al203: 23%, BA: 33%, BaO: 4%, Zn〇: 2%, Mg 〇: 7% (glass transition point 4721, load softening point 51 5 ° C, refractive index 1.59, average particle size 2.5 5 // m) 塡 charge: composition in terms of oxides' Si 02: 38%, B2〇3: 10%, -37-522435 V. Description of the invention (36), Mg0: 5%, Ca02: 4% (

Ba〇:5%、A 1 203 : 3 6%、ZnO : 2% 璃轉移點6 5 2 °C、荷重軟化點7 4 6 C、折射+丨· 5 9平均 粒徑2 · 4 μ m ) 氧化物微粒子:氧化物微粒子(平均粒徑0 . 0 0 5 # m ) 產業上之利用價値 藉由本發明之膠槳,可提供一種於燒成後圖像不會也缺 陷情形之顯示器構件。 -38-Ba〇: 5%, A 1 203: 3 6%, ZnO: 2%, glass transition point 6 5 2 ° C, load softening point 7 4 6 C, refraction + 丨 5 9 average particle size 2 · 4 μm) Oxide fine particles: The oxide fine particles (average particle diameter of 0.05 # m) are used in the industry. With the paddle of the present invention, it is possible to provide a display member that does not have defects in the image after firing. -38-

Claims (1)

522435 ?ι年1 A修正 ^ 90 1 1 2079號「膠漿、顯示器構件及顯示器構件之製法」 ί利案 (91年12月16日修正) 又申請專利範圍: 1 . 一種膠漿,其包含胺甲酸酯化合物及無機微粒子,其 在膠獎中,胺甲酸酯化合物之含量爲〇 · 1〜2 0重量%, 而無機微粒子之含量爲40〜80重量%。522435 1 year Amendment ^ 90 1 1 No. 2079 "Making Method for Glue, Display Component and Display Component" ίProblem (Amended on December 16, 91) Patent application scope: 1. A glue, which contains In the rubber award, the content of the urethane compound and the inorganic fine particles is 0.1 to 20% by weight, and the content of the inorganic fine particles is 40 to 80% by weight. 2 .如申請專利範圍第1項之膠漿,其中胺甲酸酯化合物 含有具乙烯性不飽和基之胺甲酸酯化合物。 3 .如申請專利範圍第1項之膠漿,其中胺甲酸酯化合物 之分子量爲1 5000〜50000。 4 ·如申請專利範圍第1項之膠漿,其中胺甲酸酯化合物 含有環氧乙烷單元。 5 ·如申請專利範圍第1項之膠漿,其中胺甲酸酯化合物 以下述通式(1 )所示, R1 - ( R4 - R3 )n - R4 - r2 ( 1 )2. The glue according to item 1 of the patent application range, wherein the urethane compound contains a urethane compound having an ethylenically unsaturated group. 3. The glue according to item 1 of the patent application range, wherein the molecular weight of the urethane compound is 15,000 to 50,000. 4. The glue according to item 1 of the patent application range, wherein the urethane compound contains ethylene oxide units. 5. The glue according to item 1 of the scope of patent application, wherein the urethane compound is represented by the following general formula (1), R1-(R4-R3) n-R4-r2 (1) 其中R1及R2係表示選自於含有乙烯性不飽和基之 取代基、氫、碳數1〜20之烷基、芳基、芳烷基及羥 基芳院基者’各可相同或不同;R3係表示環氧烷基或 環氧院基寡聚物;R4係表示含有胺甲酸酯鍵之有機基 ,η係表不1〜1〇之自然數。 6 ·如申請專利範圍第1項之膠漿,其中R3係爲含有環氧 乙院單兀與環氧丙烷單元之寡聚物,且該寡聚物中環 執乙丨兀早兀之含星爲8〜70重量%。 522435 六、申請專利範圍 7 .如申請專利範圍第1項之膠漿,其中另含有具乙_性 不飽和基之胺化合物。 8 .如申請專利範圍第7項之膠漿,其中胺化合物係以下 述通式(3 )或(4 )所示之化合物, R5R6R7N * (3) R5R6N - Μ - NR7R8 ( 4) 其中R5係表示含乙烯性不飽和基之取代基;R6、R7 、R8係表示選自於含乙烯性不飽和基之取代基、氫、 碳數1〜20之烷基、芳基、芳烷基及羥基烷基者,r6 、R7、R8可爲相同或不相同;Μ爲2價鍵結基。 9 ·如申請專利範圍第丨項之膠漿,其更含有具羧基之聚 合物。 1 0 .如申請專利範圍第9項之膠漿,其中具羧基之聚合 物係具有乙烯性不飽和基。 1 1 ·如申請專利範圍第1項之膠漿,其中無機微粒子含 有荷重軟化點450〜60(TC之低熔點玻璃粉末。 1 2 ·如申請專利範圍第丨項之膠漿,其中無機微粒子含 有60〜97重量%低熔點玻璃粉末與3〜40重量%平均 粒徑1〜4μπι之塡充物。 1 3 ·如申請專利範圍第1 2項之膠漿,其中無機微粒子更 含有30重量%以下平均粒徑0.00 3〜0.02 μπι之氧化物 微粒子。 1 4 .如申請專利範圍第1項之膠漿,其中升溫到500°C 522435 六、申請專利範圍 及1 00 0°c時之重量以下式表示, (500°C 之重量)/(100(TC 之重量)$ 1.05。 1 5 .如申請專利範圍第1項之膠漿,其中膠漿具感光性。 1 6 ·如申請專利範圍第1 5項之膠漿,其中膠漿中乙烯性 不飽和鍵濃度對1 kg活性光照射前之膠漿而言爲〇 · 2 〜1 . 0莫耳。 1 7 .如申請專利範圍第1項之膠漿,其係用於顯示器。 1 8 ·如申請專利範圍第1 7項之膠漿,其中顯示器爲電漿 顯示器。 1 9 . 一種膠漿,其特徵爲在矽晶圓上塗覆如申請專利範圍 第1項之膠漿形成薄膜,且藉由該薄膜之收縮自矽晶 圓之差量算出平均膜應力的最大値爲0.1〜20MPa。 20. —種膠漿,其包含無機微粒子與有機成分,其特徵 爲升溫至500°C及100(TC時之重量以下式表示, ( 5 00°C 之重量)/( 1 000°C 之重量1 ·〇5。 21. —種膠漿,其包含無機微粒子與有機成分,其特徵 爲將該膠漿塗覆於矽晶圓上形成薄膜,且升溫至500 °C時藉由薄膜收縮自矽晶圓之差量算出平均膜應力之 最大値爲0.1〜20MPa。 22 . —種顯示器構件之製法,其特徵爲包括使含胺甲酸 酯化合物及無機微粒子之膠漿塗覆於基板上,予以燒 成的步驟,在膠漿中,胺甲酸酯化合物之含量爲〇 . 1 〜20重量%,而無機微粒子之含量爲40〜80重量%。 522435 六、 申請專利範圍 23 .如申請專利範圍第22項之顯示器構件之製法,其中 月安甲酸酯化合物具有乙儲性不飽和基。 24 .如申請專利範圍第22項之顯示器構件之製法,其中 胺甲酸酯化合物之分子量爲1 5000〜50000。 25 .如申請專利範圍第22項之顯示器構件之製法,其中 胺甲酸酯化合物含有環氧乙烷單元。 26 .如申請專利範圍第22項之顯示器構件之製法,其中 胺甲酸酯化合物以下述通式(1 )表示, R1 - (R4 - R3)n - R4 - R2 ( 1 ) 其中R1及R2係表示選自於含有乙烯性不飽和基之 取代基、氫、碳數1〜20之烷基、芳基、芳烷基及羥 基芳烷基者,可爲相同或各不同;R3係表示環氧烷基 或環氧烷基寡聚物;R4係表示含有胺甲酸酯鍵之有機 基;η係表示1〜10之自然數。 27 ·如申請專利範圍第26項之顯示器構件之製法,其中 R3係爲含有環氧乙烷單元與環氧丙烷單元之寡聚物, 且該寡聚物中環氧乙烷單元之含量爲8〜70重量%。 28 .如申請專利範圍第22項之顯示器構件之製法,其中 膠漿更含有具乙烯性不飽和基之胺化合物。 29 .如申請專利範圍第28項之顯示器構件之製法,其中 胺化合物係以下述通式(3 )或(4 )所示之化合物, r5r6r7nWherein R1 and R2 are each selected from the group consisting of a substituent containing an ethylenically unsaturated group, hydrogen, an alkyl group having 1 to 20 carbon atoms, an aryl group, an aralkyl group, and a hydroxyaromatic group; each may be the same or different; Represents an alkylene oxide or epoxy-based oligomer; R4 represents an organic group containing a urethane bond, and η represents a natural number of 1 to 10; 6 · If the glue of the first patent application range, where R3 is an oligomer containing ethylene oxide units and propylene oxide units, and the star of the oligomer is 8 to 70% by weight. 522435 6. Scope of patent application 7. The glue of item 1 of the scope of patent application, which additionally contains an amine compound with ethylenically unsaturated group. 8. The glue according to item 7 of the scope of patent application, wherein the amine compound is a compound represented by the following general formula (3) or (4), R5R6R7N * (3) R5R6N-M-NR7R8 (4) where R5 represents Substituents containing ethylenic unsaturated groups; R6, R7, R8 represent a substituent selected from ethylenic unsaturated groups, hydrogen, alkyl groups having 1 to 20 carbon atoms, aryl groups, aralkyl groups, and hydroxyalkanes R6, R7, and R8 may be the same or different; M is a divalent bonding group. 9 · The glue according to item 丨 of the patent application scope, which further contains a polymer having a carboxyl group. 10. The glue according to item 9 of the application, wherein the polymer having a carboxyl group has an ethylenically unsaturated group. 1 1 · As for the glue in the first scope of the patent application, the inorganic fine particles contain a low melting point glass powder with a softening point of 450 ~ 60 (TC). 1 2 · As in the glue in the first scope of the patent application, the inorganic fine particles contain 60 to 97% by weight of low melting point glass powder and 3 to 40% by weight of the filler with an average particle size of 1 to 4 μm. 1 3 · As in the glue of item 12 of the patent application scope, the inorganic fine particles further contain 30% by weight or less Oxide fine particles with an average particle diameter of 0.00 3 ~ 0.02 μπι. 1 4. For example, the glue of item 1 in the scope of patent application, in which the temperature rises to 500 ° C 522435 6. The scope of patent application and the weight at 1 00 ° c are as follows: It means that (weight of 500 ° C) / (100 (weight of TC)) $ 1.05. 1 5. If the glue in the scope of patent application No. 1 is used, the glue is photosensitive. 1 6 · As in the scope of patent application No. 1 The glue of 5 items, wherein the concentration of ethylenically unsaturated bonds in the glue is 0.2 to 1.0 moles for the glue before 1 kg of active light irradiation. 1 7. As described in item 1 of the scope of patent application Glue, which is used for display. 1 8 · As the glue in the scope of patent application No. 17 The display is a plasma display. 19. A glue is characterized in that a thin film is coated on the silicon wafer as in the patent application No. 1 to form a thin film, and the film shrinks from the difference between the silicon wafer and the silicon wafer. The maximum value of the average film stress calculated from the measurement is 0.1 to 20 MPa. 20. A kind of glue, which contains inorganic fine particles and organic components, and is characterized by a temperature rise to 500 ° C and 100 (the weight at TC is expressed by the following formula, (5 00 ° C weight) / (1000 ° C weight 1.05. 21. A kind of glue, which contains inorganic particles and organic components, is characterized in that the glue is coated on a silicon wafer to form a thin film, And when the temperature is raised to 500 ° C, the maximum value of the average film stress calculated from the difference between the film shrinkage from the silicon wafer is 0.1 to 20 MPa. 22. A method for manufacturing a display member, characterized in that it comprises a urethane-containing compound 1 and 20% by weight of the urethane compound in the dope, and the content of the inorganic fine particles is 40 to 80% by weight. 522435 6. Scope of patent application 23. The method for manufacturing a display member in the range of item 22, wherein the moon's formate compound has an ethylenically unsaturated group. 24. The method for manufacturing a display member in the scope of the patent application, item 22, wherein the molecular weight of the urethane compound is 1. 5000 ~ 50,000. 25. The method for manufacturing a display member according to item 22 of the patent application, wherein the urethane compound contains an ethylene oxide unit. 26. The method for manufacturing the display member according to item 22 of the patent application, in which aminomethyl The acid ester compound is represented by the following general formula (1), R1-(R4-R3) n-R4-R2 (1) wherein R1 and R2 represent a substituent selected from an ethylenically unsaturated group-containing substituent, hydrogen, and carbon number. The alkyl, aryl, aralkyl, and hydroxyaralkyl groups of 1 to 20 may be the same or different; R3 represents an alkylene oxide or an alkylene oxide oligomer; R4 represents a carbamic acid Organic group of ester bond; η represents a natural number of 1-10. 27. The method for manufacturing a display member according to item 26 of the patent application, wherein R3 is an oligomer containing ethylene oxide units and propylene oxide units, and the content of ethylene oxide units in the oligomer is 8 ~ 70% by weight. 28. The method for manufacturing a display member according to item 22 of the application, wherein the glue further contains an amine compound having an ethylenically unsaturated group. 29. The method for manufacturing a display member according to item 28 of the application, wherein the amine compound is a compound represented by the following general formula (3) or (4), r5r6r7n /、、申請專利範圍 R5R6N - μ - NR7R8 ( 4 ) 其中’ R5係表示含乙烯性不飽和基之取代基;R6、 R7 ' R8係表示選自於含乙烯性不飽和基之取代基、氫 '碳數1〜20之烷基、芳基、芳烷基及羥基烷基者, R6 ' R7、R8可爲相同或各不相同;Μ爲2價鍵結基。 3 Q ·如申請專利範圍第22項之顯示器構件之製法,其中 發更含有具羧基之聚合物。 31 ·如申請專利範圍第30項之顯示器構件之製法,其中 具殘基之聚合物係具有乙烯性不飽和基。 3 2 ·如申請專利範圍第22項之顯示器構件之製法,其中 無機微粒子含有荷重軟化點450〜600°C之低熔點玻璃 粉末。 3 3 .如申請專利範圍第22項之顯示器構件之製法,其中 無機微粒子含有60〜97重量%低熔點玻璃粉末與3〜 40重量%平均粒徑1〜4μΐΏ之塡充物。 34·如申請專利範圍第33項之顯示器構件之製法’其中 無機微粒子更含有30重量%平均粒徑爲0.003〜 0.02μιη之氧化物微粒子。 3 5 ·如申請專利範圍第22項之顯示器構件之製法’其中 膠漿升溫至500°C及1 000°C時之重量爲下式所示的膠 漿, (500°C 之重量)/(1000°C 之重量)$ 1·〇5 ° 3 6.如申請專利範圍第22項之顯示器構件之製法’其中 522435 六、申請專利範圍 將該膠漿塗覆於矽晶圓上形成薄膜,且升溫至500°C 時藉由薄膜收縮自矽晶圓之差量算出平均膜應力之最 大値爲0 . 1〜20MPa。 37·如申請專利範圍第22項之顯示器構件之製法,其中 膠漿具感光性。 38. 如申請專利範圍第37項之顯示器構件之製法,其中 塗覆膠漿、藉由微影術圖像加工後予以燒成。 39. 如申請專利範圍第37項之顯示器構件之製法,其中 膠漿中乙烯性不飽和鍵濃度對每1公斤活性光照射前 之膠漿而言爲0.2〜1.0莫耳。 40. 如申請專利範圍第22項之顯示器構件之製法,其中 顯示器爲電漿顯示器。 4 1 . 一種電漿顯示器構件,其係由包括使含胺甲酸酯化 合物及無機微粒子之膠漿塗覆於基板上,予以燒成的 步驟的製法所製成,在膠漿中,胺甲酸酯化合物之含 量爲0.1〜20重量%,而無機微粒子之含量爲40〜80 重量%。 42 . —種電漿顯示器,其使用一包含使含胺甲酸酯化合 物及無機微粒子之膠漿塗覆於基板上,予以燒成的步 驟的製法所製成的電漿顯示器構件,在膠漿中,胺甲 酸酯化合物之含量爲0.1〜20重量%,而無機微粒子 之含量爲40〜80重量%。 43 . —種顯示器構件之製法,其特徵爲包括將如申請專 利範圍第20或2 1項之膠漿塗覆於基板上,予以燒成 522435 六、申請專利範圍 之步驟。 44. 如申請專利範圍第43項之顯示器構件之製法,其中 顯示器爲電漿顯示器。 45. —種電漿顯示器構件,其係由一含無機微粒子與有 機成分的膠漿,此膠漿在升溫到500°C及1 000°C時之 重量以下式表示, (500°C 之重量)/(1000°C 之重量)$ 1.05, 將該膠漿塗覆於矽晶圓上形成薄膜,且升溫至500°C 時藉由薄膜收縮自矽晶圓之差量算出平均膜應力之最 大値爲0.1〜20Mp a,將此種膠漿塗覆於基板上,予以 燒成之步驟的製法所製成。 46 . —種電漿顯示器,其使用一種電漿顯示器構件,此 電漿顯示器構件係由一含無機微粒子與有機成分的膠 漿,此膠漿在升溫到500°C及1 000°C時之重量以下式 表示, (500°C 之重量)/(1000°C 之重量1.05, 將該膠漿塗覆於矽晶圓上形成薄膜,且升溫至500°C 時藉由薄膜收縮自矽晶圓之差量算出平均膜應力之最 大値爲0 . 1〜20Mpa,將此種膠漿塗覆於基板上,予以 燒成之步驟的製法所製成。/ 、、 Applicable patent range R5R6N-μ-NR7R8 (4) where 'R5 is a substituent containing ethylenic unsaturated group; R6, R7' R8 is a substituent selected from ethylenic unsaturated group, hydrogen For an alkyl group, aryl group, aralkyl group, and hydroxyalkyl group having 1 to 20 carbon atoms, R6, R7, and R8 may be the same or different; M is a divalent bonding group. 3 Q · If the method of manufacturing a display member according to item 22 of the patent application method, which contains a polymer having a carboxyl group. 31. The method for manufacturing a display member according to item 30 of the application, wherein the polymer having a residue has an ethylenically unsaturated group. 3 2 · The method for manufacturing a display member according to item 22 of the application, wherein the inorganic fine particles contain a low-melting glass powder having a softening point of 450 to 600 ° C. 3 3. The method for manufacturing a display member according to item 22 of the scope of patent application, wherein the inorganic fine particles contain 60 to 97% by weight of a low melting point glass powder and 3 to 40% by weight of an average particle size of 1 to 4 μΐΏ. 34. The method for manufacturing a display member according to item 33 of the scope of the patent application, wherein the inorganic fine particles further contain 30% by weight of oxide fine particles having an average particle diameter of 0.003 to 0.02 µm. 3 5 · According to the method of manufacturing the display member No. 22 in the scope of the patent application, wherein the weight of the glue when the temperature rises to 500 ° C and 1 000 ° C is the glue shown in the following formula, (weight of 500 ° C) / ( Weight of 1000 ° C) $ 1.05 ° 3 6. If the method of manufacturing a display component according to item 22 of the patent application 'of which 522435 6. Application of the patent application covers the glue on a silicon wafer to form a thin film, and When the temperature was raised to 500 ° C, the maximum value of the average film stress was calculated from the difference between the film shrinkage from the silicon wafer and 0.1 to 20 MPa. 37. The method for manufacturing a display member according to item 22 of the patent application, wherein the glue is photosensitive. 38. The method for manufacturing a display member according to item 37 of the application, wherein the glue is applied, and then processed by lithography image and then fired. 39. For the method for manufacturing a display component according to item 37 of the application, wherein the concentration of ethylenically unsaturated bonds in the glue is 0.2 to 1.0 mole per 1 kg of the glue before irradiation with active light. 40. The method for manufacturing a display component according to item 22 of the patent application, wherein the display is a plasma display. 41. A plasma display member, which is produced by a manufacturing method including a step of coating a paste containing a urethane compound and inorganic fine particles on a substrate and firing the paste. The content of the acid ester compound is 0.1 to 20% by weight, and the content of the inorganic fine particles is 40 to 80% by weight. 42. A plasma display using a plasma display member produced by a manufacturing method including a step of coating a paste containing a urethane compound and inorganic fine particles on a substrate and firing, The content of the urethane compound is 0.1 to 20% by weight, and the content of the inorganic fine particles is 40 to 80% by weight. 43. A method for manufacturing a display element, which is characterized in that it comprises the steps of applying a glue such as item 20 or 21 on the substrate and firing it 522435 6. Applying for a patent. 44. For the method for manufacturing a display component according to item 43 of the patent application, wherein the display is a plasma display. 45. A plasma display component, which consists of a paste containing inorganic fine particles and organic components. The weight of the paste when heated to 500 ° C and 1,000 ° C is expressed by the following formula, (500 ° C weight ) / (1000 ° C weight) $ 1.05, the glue is coated on a silicon wafer to form a thin film, and when the temperature is raised to 500 ° C, the maximum film stress is calculated from the difference between the film shrinkage and the silicon wafer. Is 0.1 ~ 20Mp a. It is made by the method of coating this glue on the substrate and firing. 46. A plasma display using a plasma display component, the plasma display component is a paste containing inorganic particles and organic components, the paste is heated to 500 ° C and 1 000 ° C The weight is expressed by the following formula: (500 ° C weight) / (1000 ° C weight 1.05), the glue is coated on a silicon wafer to form a thin film, and the film shrinks from the silicon wafer when the temperature rises to 500 ° C. The maximum value of the average film stress calculated by the difference is 0.1 to 20 MPa, which is produced by coating the substrate on the substrate and firing.
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