TW326497B - The acceleration sensor and its manufacturing method - Google Patents

The acceleration sensor and its manufacturing method

Info

Publication number
TW326497B
TW326497B TW086103828A TW86103828A TW326497B TW 326497 B TW326497 B TW 326497B TW 086103828 A TW086103828 A TW 086103828A TW 86103828 A TW86103828 A TW 86103828A TW 326497 B TW326497 B TW 326497B
Authority
TW
Taiwan
Prior art keywords
length
acceleration sensor
detection device
central portion
manufacturing
Prior art date
Application number
TW086103828A
Other languages
English (en)
Inventor
Tasumi Taho
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of TW326497B publication Critical patent/TW326497B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
TW086103828A 1996-03-29 1997-03-26 The acceleration sensor and its manufacturing method TW326497B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07601596A JP3183158B2 (ja) 1996-03-29 1996-03-29 加速度センサ及びその製造方法

Publications (1)

Publication Number Publication Date
TW326497B true TW326497B (en) 1998-02-11

Family

ID=13593007

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086103828A TW326497B (en) 1996-03-29 1997-03-26 The acceleration sensor and its manufacturing method

Country Status (4)

Country Link
JP (1) JP3183158B2 (zh)
DE (1) DE19712789C2 (zh)
SG (1) SG50014A1 (zh)
TW (1) TW326497B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5144004B2 (ja) * 2005-04-27 2013-02-13 京セラクリスタルデバイス株式会社 慣性センサ素子
CN102937137B (zh) * 2012-11-20 2015-01-14 浙江大学 压电发电滚动轴承单元

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0616222B1 (en) * 1993-03-19 1997-05-21 Murata Manufacturing Co., Ltd. Acceleration sensor
JP2780594B2 (ja) * 1993-03-19 1998-07-30 株式会社村田製作所 加速度センサ

Also Published As

Publication number Publication date
DE19712789A1 (de) 1997-11-06
SG50014A1 (en) 1998-06-15
JP3183158B2 (ja) 2001-07-03
JPH09264902A (ja) 1997-10-07
DE19712789C2 (de) 2002-08-29

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