TW202113923A - Microstructure transfer device and microstructure transfer method wherein the microstructure transfer device comprises a winding-out machine, a winding machine, a stage, an imprint roller, and a curing light irradiator - Google Patents

Abstract

The present invention provides a microstructure transfer device and a microstructure transfer method capable of fixing a plurality of replicas to a sheet-like body (film). [Solution] The microstructure transfer device (1) comprises: a winding-out machine (5) for winding a flexible sheet-like body (4) and winding out the sheet-like body (4); a winding machine (6) for winding the sheet-like body (4) conveyed via a plurality of guide rolls (3); a stage (11) arranged between the winding-out machine (5) and the winding machine (6) for carrying a mold (14) coated with a photocurable resin on a surface having a fine uneven pattern; an imprint roller (2) to push the sheet-like body (4) against the mold (14) from above and reciprocate at least between both ends of the mold (14); and a curing light irradiator (8) to irradiate ultraviolet light on the sheet-like body (4) pushed against the mold (14) to continuously fix a plurality of replicas (20) to the sheet-like body (4).

Description

Micro structure transfer device and micro structure transfer method

The present invention relates to a microstructure transfer device and a microstructure transfer method. The microstructure is reversely transferred onto a substrate using a mold on which a nanoscale or other microscopic uneven pattern is formed on the surface.

Ultraviolet/electron beam etching, which uses micro-processing techniques such as exposure equipment used in semiconductor manufacturing, is expensive in equipment and complicated in the process, and it is time-consuming and cost-intensive in manufacturing. There are problems, and it will become a mold that will form micro-concave-convex patterns. (Also called stamper or template, etc.) The advancement of Nanoimprint Lithography (NIL) technology, which is directly transferred to resin materials, etc., can be easily realized with a simple device and process in the range of 10nm to several 100nm. In terms of patterns, device prices and mass production costs gradually have high advantages. For example, Patent Document 1 discloses a microstructure in which a minute concave-convex pattern formed on the surface of the mold is reversely transferred with respect to the mold by an electroless plating method. In particular, Patent Document 1 describes that a buffer material is arranged on the upper surface of the obtained microstructure (the surface opposite to the surface on which the microscopic uneven pattern is formed), and a release agent is coated on the surface of the microscopic uneven pattern to form a stamper.

In addition, Patent Document 2 proposes to improve the time required for the heating and cooling cycle during the heating and pressurization transfer, so that the cross-sectional area of the portion holding the substrate pressurizing surface is smaller than the cross-sectional area of the substrate pressurizing surface of the stamper. NIL device. Patent Document 3 proposes a temporary placement member provided with a temporary placement surface for temporarily placement of a substrate and slowly moves to the substrate placement surface to prevent misalignment caused by the porosity of the substrate and the substrate placement table, enabling high-precision transfer NIL device.

Patent Document 4 proposes a roll-to-roll NIL device in which the buffer material can be sequentially replaced during heating and pressure for the purpose of further high-precision transfer.

In addition, Patent Document 5 discloses a method for improving the production throughput and reducing the mass production cost. Even if the rotation speed of the transfer roller is increased, the pattern can be transferred accurately and with high accuracy. A NIL device in which the mold is heated and pressurized on the resin layer for transfer.

In addition, as the use of photocurable resin, for example, Patent Document 6 discloses a NIL device that uses a film made of ultraviolet curable resin to press a mold against a workpiece for compression molding, and irradiates ultraviolet light to transfer the mold. The light source uses a light source that discontinuously emits heat rays at the same time as ultraviolet light to suppress temperature rise. In addition, Patent Document 7 discloses a roll-to-roll method in which a photocurable transfer sheet with a photocurable transfer layer attached to a transparent film is fed out. After the photocurable transfer layer is exposed, the photocurable transfer sheet is then stamped. It is a NIL device that pushes and irradiates light with a UV lamp, and transfers the micro-concave and convex pattern of the stamper. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] JP 2005-189128 A [Patent Document 2] JP 2004-288784 A [Patent Document 3] JP 2006-62208 A [Patent Document 4] JP 2004-288804 A [Patent Document 5] Japanese Patent Application Publication No. 2006-326948 [Patent Document 6] WO 2009/110596 Publication [Patent Document 7] JP 2011-66100 A

[The problem to be solved by the invention]

The NIL devices disclosed in Patent Document 1 to Patent Document 6 described above have a structure in which a mold is used to imprint each substrate. However, since it is an imprint method that directly contacts the mold, there is a risk that materials or foreign matter may adhere to the mold and cause damage to the mold. The cost related to mold manufacturing is extremely expensive, and the mold manufacturing time also takes a long time, so it is necessary to limit the number of times the mold is used to a minimum. In addition, there is a risk that the mold may be damaged or chipped due to a drop or collision of the mold during the preparation for replacement of the mold.

For this reason, expensive standard molds are not used in production. Instead, standard molds are used to form replica molds with soft materials, and the production method of replica molds is used. However, the frequency of replacement of the replica mold may require replacement every hundreds of times depending on the product or material, and it is expected that the cost will be reduced from the time required for replacement of the replica mold (hereinafter referred to as a replica) and preparation work.

In addition, the NIL device disclosed in Patent Document 7 described above uses a mold to form an intermediate stamp (replica), and then performs pitch transmission between the intermediate stampers, and then uses the intermediate stamper to perform stamping on each substrate. Therefore, expensive molds are often placed on the lower part of the photocurable transfer sheet with the photocurable transfer layer of the transparent film formed with the intermediate stamper. There is a risk of mold damage due to foreign objects falling from the sheet.

In addition, with the rapid popularization of relatively small displays such as smartphones and tablet computers in recent years, it is better to manufacture devices such as liquid crystal panels with higher throughput. In addition, in display panels for televisions, etc., higher-definition next-generation displays are preferred to increase the size of the screen and accelerate the high-resolution.

To this end, the present invention provides a microstructure transfer device and a microstructure transfer method, which can fix a plurality of copies on a sheet (film). In addition, the present invention provides a microstructure transfer device and a microstructure transfer method, which can continuously form a pattern on a substrate by using a plurality of replicas continuous to the above-mentioned sheet-like body (film). [Means used to solve the problem]

In order to solve the above-mentioned problems, the microstructure transfer device of the present invention is characterized by comprising: a winding machine for rewinding a flexible sheet-like body and unwinding the sheet-like body; winding through a plurality of guide rollers A winding machine for the sheet to be conveyed; a stage placed between the unwinding machine and the winding machine, and placed on a mold coated with a photocurable resin on the surface of the micro concave-convex pattern; A platen roller that pushes the sheet-like body toward the mold from above and reciprocates at least between the two ends of the mold; and a curing light irradiator that irradiates the sheet-like body pressed by the mold with curing light , A plurality of replicas are continuously fixed to the sheet-like body.

In addition, the micro-structure transfer device according to the present invention is characterized in that the platen roller is one of a plurality of copies of the sheet-like body fixed to the sheet-like body, and passes through the sheet-like body while facing the carrier. The substrate placed on the stage and coated with the photocurable resin on the surface is pushed and moved back and forth between at least both ends of the substrate. The curing light irradiator is coated with the photocurable resin. The substrate is irradiated with curing light through the sheet-like body and the replica pressed by the embossing roller, and after the photocurable resin is cured, the sheet-like body is peeled off by the embossing roller, thereby transferring the replica The tiny bump pattern.

The microstructure transfer device according to the present invention is characterized by comprising: among the plurality of guide rollers, a first guide roller adjacent to the platen roller in the conveying direction of the sheet-like body and positioned upstream, and When the second guide roller is adjacent to the platen roller in the conveying direction of the sheet-like body and is located on the downstream side, the second guide roller presses the plate-like body and moves on the side of the platen roller, and is higher than the pressure. The printing roller is positioned above, and moves at a constant speed together with the above-mentioned printing roller.

In addition, the microstructure transfer device according to the present invention is characterized in that it is provided with a film clamp, and when the platen roller presses and moves the sheet-like body, the sheet is placed in the end of the mold or the substrate. The sheet-shaped body is clamped at the end on the upstream side in the conveying direction of the shaped body.

In addition, the microstructure transfer device according to the present invention is characterized in that the curing light irradiator is positioned between the platen roller and the first guide roller, and the platen roller moves while pressing the sheet-like body In this case, while irradiating the curing light, it moves to the downstream side to follow the platen roller and the second guide roller.

In addition, the microstructure transfer device according to the present invention is characterized in that the hardening light irradiator is positioned between the platen roller and the first guide roller, and the platen roller presses the sheet-like body and interacts with it. After the above-mentioned second guide roller moves toward the downstream side at a constant speed, it moves toward the downstream side while being irradiated with curing light.

The microstructure transfer device according to the present invention is characterized by having a photocurable resin coating mechanism for coating the photocurable resin on the mold and/or the substrate.

The microstructure transfer device according to the present invention is characterized in that it includes a support roller mechanism capable of individually adjusting the height and pressing force of the platen roller.

The microstructure transfer device according to the present invention is characterized in that the support roller mechanism is provided in plural at predetermined intervals along the longitudinal direction of the platen roller.

In addition, the microstructure transfer device according to the present invention is characterized in that the support roller mechanism has a support roller arranged to be in contact with the peripheral surface of the platen roller directly above the platen roller.

The microstructure transfer method related to the present invention uses a microstructure transfer device. The microstructure transfer device includes: an unwinding machine for rewinding a flexible sheet-like body and unwinding the sheet-like body; A winding machine for winding the above-mentioned sheet-like body conveyed by a plurality of guide rollers; arranged between the above-mentioned unwinding machine and the above-mentioned winding machine, and placed on a surface coated with a photocurable resin on which a microscopic uneven pattern is formed The stage of the mold is characterized in that: an impression roller presses the sheet-like body toward the mold from above, and irradiates the sheet-like body pressed against the mold at least during the reciprocating movement between the two ends of the mold The curing light continuously fixes a plurality of replicas on the sheet-like body.

In addition, the microstructure transfer method according to the present invention is characterized in that the platen roller is one of a plurality of copies fixed on the sheet-like body, and passes through the sheet-like body while facing the carrier. Placed on the stage and coated with the photocurable resin on the surface of the substrate is pressed, and at least during the reciprocating movement between the two ends of the substrate to the substrate coated with the photocurable resin through the imprint The sheet-like body and the replica pressed by the roller are irradiated with hardening light to transfer the fine concavo-convex pattern of the replica. [Effects of the invention]

According to the present invention, it is possible to provide a microstructure transfer device and a microstructure transfer method in which a plurality of copies are continuously fixed to a sheet (film).

For example, since a plurality of copies can be continuously fixed to the sheet-like body, the throughput of the formation of copies can be improved. Moreover, even if one of the multiple copies fixed to the sheet-like body reaches the expiration date, the sheet-like body can be used for the next new copy only by driving the sheet-like body with a pitch. It can reduce the cost of replacement and preparation of duplicates.

The problems, constitution, and effects other than the above can be clarified by the description of the following embodiment.

In this specification, a small pattern area having a mold or a minute concave-convex pattern formed on the surface of a mold is referred to as a "unit".

In addition, in this specification, although the glass substrate has been described as an example of the transfer object to which the minute pattern is transferred by the copy of the minute pattern of the transfer mold (metal mold), it is not limited to this, as the transferred object The body, of course, also includes substrates made of various panel materials such as resin substrates or film substrates. That is, by the copy, the transfer object to which the minute pattern is transferred becomes the substrate.

Hereinafter, the embodiments of the present invention will be described using figures. [Example 1]

FIG. 1 is a side view showing the schematic configuration of a microstructure transfer device of Example 1 related to an embodiment of the present invention, and FIG. 2 is a plan view of the microstructure transfer device shown in FIG. 1. The white arrows shown in FIGS. 1 and 2 indicate the conveyance direction (supply direction) of the sheet (film) 4.

(Configuration of microstructure transfer device)

As shown in Fig. 1, the microstructure transfer device 1 is from the upstream side, and is equipped with: an unwinder 5 for rewinding the unrolled film (sheet); and conveys the sheet (film) 4 sent out from the unwinder 5 The guide roller 3; the air and the sheet (film) 4 to remove the dust attached to the surface of the dry cleaner 9; the sheet (film) 4 is conveyed vertically downwards 2 guide rollers 3; The platen roller 2 described in detail later passes through the upstream guide roller (first guide roller) 3a arranged on the upstream side through the curing light irradiator 8; the curing light irradiator 8; the platen roller 2; and the plate adjacent to the platen roller 2 The downstream guide roller (second guide roller) 3b arranged on the downstream side thereof. Here, the curing light irradiator 8 irradiates ultraviolet rays (ultraviolet light) as curing light, for example.

In addition, the microstructure transfer device 1 includes a guide roller 3 that guides the sheet (film) 4 passing through the downstream guide roller (second guide roller) 3b upward in the vertical direction; The film) 4 is a guide roller 3 that is conveyed horizontally to the downstream side and guides the sheet (film) 4 downward in the vertical direction; the guide roll 3 is equivalent to being formed in the mold (metal) when the sheet (film) 4 passes. The position of the start and end of the micro pattern area of the mold is a laser marker 10 that irradiates laser light for marking; a dry cleaner that makes air contact with the sheet (film) 4 to remove dust adhering to the surface of the film 9; Two guide rollers 3 arranged under the dry cleaner 9; a tension roller 7; a cleaning roller 12; two guide rollers 3; and a winder 6 for winding a sheet (film) 4.

The cleaning roller 12 is a pair of cleaning rollers (peripheral surface) pre-coated with paste or the like, the sheet (film) 4 is sandwiched in the pair of cleaning rollers 12 while contacting and passing, thereby removing the adhesion Dust on the surface of the film, etc. At this time, the replica is hardened as described in detail later, and is firmly fixed to the sheet (film) 4, so when passing through the pair of cleaning rollers 12, the replica will not detach from the sheet (film) 4 Or peel off. In addition, in this embodiment, although the microstructure transfer device 1 has a configuration having the cleaning roller 12, the arrangement of the cleaning roller 12 may be arbitrary. In other words, it is not necessary to have the structure of the cleaning roller 12.

The sheet-like body (film) 4 is flexible and has light-transmitting properties. The dancer roller 7 is left and right in FIG. 1, that is, moves back and forth in the horizontal plane, thereby imparting a predetermined tension to the sheet (film) 4 being conveyed. For example, depending on the diameter of each guide roller, even if the sheet (film) 4 is fed out from the unwinder 5 at a predetermined conveying amount (speed), the film will still be bent. However, by displacing the dancer roller 7 back and forth to adjust the tension of the sheet (film) 4, the aforementioned bending can be prevented.

As shown in FIGS. 1 and 2, the microstructure transfer device 1 includes a mounting mold (metal mold) 14 and a stage 11 that can move in the X-Y direction in a horizontal plane and can be displaced in the rotation direction (θ). The minute concave-convex pattern formed on the surface of the mold (metal mold) 14 is pre-coated with a photocurable resin resin, and the loading (loading) and loading of the stage 11 are carried out by a transport mechanism such as a robot arm not shown in the figure. Unloading (unloading) from the stage 11 (arrow in FIG. 2). In addition, the stage 11 is provided with, for example, a vacuum chuck, and the placed mold (metal mold) 14 is fixed on the stage 11 by the vacuum chuck.

In addition, as shown in FIG. 2, the microstructure transfer device 1 is provided between the upstream guide roller (first guide roller) 3a and the hardening light irradiator 8, and has both ends movably supported by the portal frame 13 for the photographing part support At the two locations of the portion 18, there are two upstream side imaging portions 17a held apart from each other along the width direction of the sheet-like body (film) 4. In addition, between the platen roller 2 and the downstream guide roller (second guide roller) 3b, there are two places where both ends are movably supported by the photographing unit support portion 18 of the portal frame 13, along the sheet (film ) 4 is the two downstream side imaging units 17b held apart from each other in the width direction. As the upstream imaging unit 17a and downstream imaging unit 17b, for example, a CCD or the like is used. The upstream side photographing section 17a and the downstream side photographing section 17b are used for marking four places on the sheet-like body (film) 4 attached by the laser marker 10 when positioning the sheet-like body (film) 4 described later Detection. A film clamp 16 is provided between the downstream guide roller (second guide roller) 3b and the stage 11.

(The action of the transfer device for microstructures when the copy is formed)

Figures 3A to 3E show the steps in the formation of the replica. Fig. 3A shows that in the positioning step by the photographing unit, the downstream guide roller (second guide roller) 3b faces the downstream side while maintaining a predetermined distance from the surface of the mold (metal mold) 14 placed on the stage 11. Move to a position beyond the end of the stage 11. In addition, the upstream side photographing section 17a and the downstream side photographing section 17b are respectively moved above the vertical direction of the sheet-like body (film) 4 to the start end (sheet-like body) corresponding to the minute pattern area on the surface of the mold (metal mold) 14 (Film) 4 at the upstream end of the conveying direction), and a position corresponding to the end of the minute pattern area (the end on the downstream side of the sheet (film) 4 in the conveying direction). When the upstream imaging unit 17a and the downstream imaging unit 17b detect the mark attached to the sheet (film) 4 being conveyed, the winder 6 stops the winding operation of the sheet (film) 4.

Next, in the film clamp and impression roller pressing step shown in FIG. 3B, first, the thin mold clamp 16 is lowered to clamp the sheet-shaped body (film) 4. Thereby, the sheet-like body (film) 4 is fixed. Then, the platen roller 2 is lowered to press the sheet-shaped body (film) 4. In this state, the downstream guide roller (second guide roller) 3b moves to the upstream side together with the guide roller 3 arranged vertically upward, and stops at a predetermined distance from the platen roller 2.

In the nanoimprint operation step shown in FIG. 3C, the imprint roller 2 presses the sheet (film) 4 while moving toward the downstream side at a constant speed with the downstream guide roller (second guide roller) 3b. At this time, in the example shown in FIG. 4C, the curing light irradiator 8 moves following the platen roller 2 and the downstream guide roller (second guide roller) 3b, and the guide roller 3 arranged above the vertical direction. The impression roller 2 and the downstream guide roller (second guide roller) 3b move downstream at a constant speed, so that the positional relationship, that is, the distance, is kept constant, so the path length of the sheet (film) 4 There is no change, and even if the platen roller 2 moves while pressing the sheet (film) 4, the tension applied to the sheet (film) 4 does not change.

The curing light irradiation step shown in FIG. 3D is as described above. The curing light irradiator 8 moves to the downstream side following the platen roller 2 and moves to the downstream side while irradiating ultraviolet rays (curing light). The photocurable resin on the surface of the mold (metal mold) 14 acts in cooperation with the pressing force of the platen roller 2 and is fixed to the sheet (film) 4. Thereby, the minute concavo-convex pattern formed on the surface of the mold (metal mold) 14 is reversely transferred to the sheet-like body (film) 4. In this embodiment, the nanoimprinting action step and the hardening light irradiation step are performed at the same time.

Next, in the peeling step shown in FIG. 3E, the platen roller 2 moves to the upstream side at a constant speed with the downstream guide roller (second guide roller) 3b and the guide roller 3 arranged vertically above it, thereby solidifying The replica attached to the sheet-like body (film) 4 is peeled from the surface of the mold (metal mold) 14 in a uniform state. That is, the replica fixed to the sheet-shaped body (film) 4 and the mold (metal mold) 14 can be peeled off without damage.

As explained above, according to the microstructure transfer device 1 of the present embodiment, the platen roller 2 and the downstream guide roller (second guide roller) 3b and the guide roller 3 arranged vertically above are moved downstream at a constant speed The side and the upstream side move back and forth, which can easily form a replica.

Next, the operations of the upstream guide roller (first guide roller) 3a, the platen roller 2, and the downstream guide roller (second guide roller) 3b will be described in detail using FIGS. 4A to 4K. As shown in FIG. 4A, the downstream guide roller (second guide roller) 3 b moves to the downstream side and stops at a position beyond the downstream end of the mold (metal mold) 14. At this time, the distance L1 between the axial centers of the upstream guide roller (first guide roller) 3a and the downstream guide roller (second guide roller) 3b is, for example, 4000 mm. In addition, the length L2 of the minute pattern area in the area where the minute concave-convex pattern exists on the surface of the mold (metal mold) 14 is, for example, 65 inches. The sheet (film) 4 conveyed between the upstream guide roller (first guide roller) 3a, the platen roller 2 and the downstream guide roller (second guide roller) 3b is positioned vertically above the two upstream The side photographing section 17a and the two downstream side photographing sections 17b detect the positions of the start and end positions of the corresponding micro-patterned area of the sheet-like body (film) 4 that are pre-attached by the laser marker 10. In addition, the sheet-like body (film) 4 is conveyed by the drive pitch of the winder 6 by an amount equivalent to the length of one unit.

As shown in Fig. 4B, when four marks are detected by the upstream side photographing section 17a and the downstream side photographing section 17b, based on the four detected marks, the stage 11 on which the mold (metal mold) 14 is placed is, for example, Rotate in the direction of rotation (θ), and position the 4 marks to overlap the start and end of the tiny pattern area. The confirmation of the positioning is also performed based on the captured images of the upstream side imaging unit 17a and the downstream side imaging unit 17b.

When the positioning is completed, as shown in FIG. 4C, the film clip 16 having a substantially L-shaped longitudinal section presses and clamps the sheet-shaped body (film) 4 toward the surface of the mold (metal mold) 14. In addition, the upstream guide roller (first guide roller) 3a is also sandwiched.

Next, as shown in FIG. 4D, the platen roller 2 is lowered, and as shown in FIG. 4E, the downstream guide roller (second guide roller) 3b stopped at a position beyond the downstream end of the mold (metal mold) 14 to The upstream movement forms a predetermined positional relationship with the platen roller 2. At this time, the downstream guide roller (second guide roller) 3b is vertically above the platen roller 2, and is positioned on the upstream side than the upstream guide roller (first guide roller) 3a. Therefore, the sheet (film) 4 that straddles the downstream guide roller (second guide roller) 3b from the position pressed by the platen roller 2 forms a predetermined angle with the surface of the mold (metal mold) 14.

As shown in Figure 4F, while pressing the sheet (film) 4, the platen roller 2 moves at the same speed with the downstream guide roller (second guide roller) 3b to exceed the downstream end of the mold (metal mold) 14 . With the impression roller 2 and the downstream guide roller (second guide roller) 3b moving at a constant speed, the positional relationship between them is moved to the downstream side in a certain state, thereby preventing the generation of the sheet-like body (film) 4 The change of tension. Here, for example, the moving speed of the platen roller 2 and the downstream guide roller (second guide roller) 3b is 150 mm/s.

Next, as shown in FIG. 4G, the curing light irradiator 8 is lowered to just above the film clamp 16. In addition, the curing light irradiator 8 presses the photocurable resin of the sheet (film) 4 on the micro-pattern area previously coated on the surface of the mold (metal mold) 14 by the pressing force of the embossing roller 2. The sheet-like body (film) 4 is irradiated with ultraviolet rays (curing light) from above, and moves to the vicinity of the platen roller 2 which is positioned beyond the downstream end of the mold (metal mold) 14. Thereby, the photocurable resin is cured, and the minute concave-convex pattern formed on the surface of the mold (metal mold) 14 is reversely transferred to the sheet-like body (film) 4.

As shown in FIG. 4I, next, the film clamp 16 is raised and retracted from the mold (metal mold) 14. In addition, the platen roller 2 starts to move upstream at a constant speed together with the downstream guide roller (second guide roller) 3b. As shown in Figure 4J, the platen roller 2 and the downstream guide roller (second guide roller) 3b move to the upstream side at a constant speed, so that the copy fixed to the sheet (film) 4 is in a uniform state. It peels off from the minute concave-convex pattern formed on the surface of the mold (metal mold) 14. Until the platen roller 2 reaches the vicinity of the upstream end of the mold (metal mold) 14, the upstream guide roller (first guide roller) 3a continues to nip. Finally, as shown in FIG. 4K, when the impression roller 2 reaches the vicinity of the upstream end of the mold (metal mold) 14, the upstream guide roller (first guide roller) 3a is opened from the nip, so that the impression roller 2 and the downstream The measuring guide roller (second guide roller) 3b rises, and a copy of 1 unit amount fixed to the sheet (film) 4 is obtained.

Although not shown, afterwards, the winder 6 winds at least one unit of length (pitch) of the sheet-shaped body (film) 4 so that the unwinder 5 drives the sheet-shaped body (film) 4 at intervals. After that, the operations (step and repeat) shown in FIGS. 4A to 4K are repeated, whereby a plurality of copies transferred from the same mold (metal mold) 14 are fixed to the sheet (film) 4.

3A to 3E described above, although the nanoimprint operation step and the curing light irradiation step are performed at the same time, but in FIGS. 4A to 4K, the curing light irradiation is performed after the nanoimprint operation step is completed. The composition of the steps is different. As described above, the nanoimprint operation step and the hardening light irradiation step may be performed at the same time, or any one of the hardening light irradiation steps may be performed after the nanoimprint operation step is completed. In addition, the strategy related to the curing light irradiation step is based on the characteristics of the irradiation process (irradiation speed, irradiation energy, etc.) such as the photocuring characteristics of the photocurable resin, the amount of resin applied, the fixing characteristics of the film and the substrate material, etc. The curing light irradiator control mechanism, not shown, arbitrarily controls the irradiation start timing, the moving speed of the curing light irradiator, and the irradiation time.

Figure 5 is a diagram showing the outline of the process when the copy is formed, (A) is film positioning, (B) is pressing (imprint), (C) is curing light irradiation, (D) is peeling, and (E) This is the picture at the end of the copy formation. FIG. 5(A) is a state in which a mold (metal mold) 14 having a fine concave-convex pattern formed on the surface is pre-coated with a resin 19 of a photocurable resin, and the sheet-like body (film) 4 is aligned. After that, in FIG. 5(B), the sheet-shaped body (film) 4 is moved to the downstream side while being pressed against the resin 19 by the platen roller 2. FIG. 5(C) shows the sheet-like body (film) 4 which is crimped to the resin 19, while the curing light irradiator 8 is irradiated with ultraviolet rays (curing light), and the curing light irradiator 8 is moved to the downstream side. In FIG. 5(D), the platen roller 2 moves to the upstream side, and the sheet-like body (film) 4 of the fixed and hardened resin is peeled from the mold (metal mold) 14. FIG. 5(E) is completely peeled from the mold (metal mold) 14, thereby forming a replica 20 fixed to the sheet-shaped body (film) 4. As shown in FIG.

(Operation of the transfer device for microstructures during pattern formation on the glass substrate)

Hereinafter, the microstructure transfer device 1 is used to describe the operation of forming (transferring) a micro concave-convex pattern on a glass substrate by a replica. 6 is a side view of the schematic configuration of the microstructure transfer device shown in FIG. 1, a side view of the transfer of the micro-concave pattern on a copy of the glass substrate, and FIG. 7 is a plan view of the microstructure transfer device shown in FIG. 6 . The difference from FIGS. 1 and 2 described above is that the glass substrate 15 is placed on the stage 11 instead of the placement mold (metal mold) 14. Therefore, the description of FIGS. 6 and 7 is omitted here.

Each step shown in the above-mentioned FIGS. 3A to 3E is to mount a glass substrate 15 pre-coated with a photocurable resin on the stage 11, and to have the surface of the glass substrate 15 fixed to the sheet (film) 4 with a fine uneven pattern The copy is pushed by the platen roller 2 toward the photocurable resin of the glass substrate 15 and moves downstream at the same speed as the downstream guide roller (second guide roller) 3b. And, by following the impression roller 2 while irradiating ultraviolet rays (curing light) while moving to the downstream side, the curing light irradiator 8 hardens the photocurable resin of the glass substrate 15, as shown in FIG. After that, the glass substrate 15 of the photocurable resin is peeled off, and a fine concavo-convex pattern is formed on the surface of the glass substrate 15.

In addition, the actions of the upstream guide roller (first guide roller) 3a, platen roller 2 and downstream guide roller (second guide roller) 3b in FIGS. 4A to 4K are also pre-coated with light. The glass substrate 15 of curable resin replaces the mold (metal mold) 14 pre-coated with the photocurable resin, and uses the above-mentioned upstream guide roller (first guide roller) 3a, impression roller 2, and downstream guide roller ( The operation of the second guide roller) 3b forms (transfers) the fine concavo-convex pattern of the replica fixed to the sheet-like body (film) 4 on the glass substrate 15. In addition, when the copy reaches the limit of use, for example, hundreds of times, the winder 6 winds at least one unit of the sheet (film) 4 in length (pitch), and the unwinder 5 performs the sheet (Film) 4 pitch transmission. Thereby, using a new replica, the operations of FIGS. 4A to 4K are repeated again, and the micro concave and convex patterns of the replica are transferred onto a plurality of glass substrates 15 to form a pattern.

As described above, only the pitch transmission sheet (film) 4 can be replaced with a new copy, so the cost of copy replacement and preparation work can be reduced.

In addition, the copy can be continuously fixed to a plurality of sheet-like bodies (films) with the same microstructure transfer device 1, and then the glass substrate can be patterned using the copy. An increase in throughput can be obtained.

Figure 8 is a diagram showing the outline of the process at the time of pattern formation of the glass substrate, (A) is the positioning of the replica, (B) is the pressing (imprint), (C) is the curing light irradiation, (D) is the peeling And (E) are diagrams at the end of pattern formation of the glass substrate. FIG. 8(A) shows that the replica 20 fixed to the sheet-like body (film) 4 is positioned on the glass substrate 15 on which the resin 19 is pre-coated with a photocurable resin. 8(B) shows that the replica 20 fixed to the sheet (film) 4 is moved to the downstream side while being pressed against the glass substrate 15 coated with the resin 19 by the platen roller 2. Fig. 8(C) is directed to the resin 19 on the glass substrate 15, penetrating the replica 20 fixed to the sheet (film) 4, and irradiating ultraviolet light (ultraviolet light) from the curing light irradiator 8 while irradiating the curing light The illuminator 8 moves to the downstream side. FIG. 8(D) shows that by the movement of the platen roller 2 to the upstream side, the replica 20 fixed to the sheet (film) 4 is peeled from the glass substrate 15 having the cured resin 19. FIG. 8(E) shows that the replica 20 fixed to the sheet (film) 4 is completely peeled off from the glass substrate 15, thereby forming a fine concavo-convex pattern of the replica on the glass substrate 15.

In addition, in this embodiment, a microstructure transfer device 1 is used to continuously fix a plurality of replicas 20 on a sheet (film) 4, and then apply the replicas to a glass substrate 15 pre-coated with a photocurable resin. 20. The structure of transferring (forming) the minute concavo-convex pattern, but it is not limited to this. For example, in the microstructure transfer device 1 of this embodiment, after a plurality of replicas 20 are continuously fixed to the sheet (film) 4, the replicas can be used to transfer the microscopic uneven patterns of the replicas with other devices. The composition printed on the glass substrate.

According to this embodiment, it is possible to provide a microstructure transfer device and a microstructure transfer method that continuously fix a plurality of copies to a sheet (film).

In addition, according to this embodiment, by continuously fixing a plurality of replicas to the sheet-like body, the throughput of replica formation can be increased.

Moreover, if the micro-structure transfer device of this embodiment is used to form a pattern to transfer the micro-concave pattern of the replica and the replica on the glass substrate, it will be fixed to the plurality of replicas of the sheet-like body. , Even when a copy reaches its expiration date, only by using the pitch transmission sheet, it can be used as the next new copy, so the cost of replacement and preparation of the copy can be reduced. [Example 2]

Fig. 9 is a plan view showing a microstructure transfer device of Example 2 related to another embodiment of the present invention. As shown in FIG. 9, the present embodiment is different from the first embodiment in that the replica continuous forming device 21, the photocurable resin coating mechanism 22, the replica shape inspection device 31, and the pattern forming device 41 are constituted. Particularly, the continuous copy forming device 21 is provided for the copy forming, and the photocurable resin coating mechanism 22 for applying the photocurable resin to the mold (metal mold) is installed in the continuous copy forming device 21. The point is different In addition, the point that the replica shape inspection device 31 for inspecting the shape of the replica is installed before forming the fine concavo-convex pattern on the glass substrate is different from the first embodiment. The same reference numerals are given to the same constituent elements as those of the first embodiment, and the descriptions that overlap with those of the first embodiment are omitted below.

As shown in FIG. 9, the structure of the continuous copy forming device 21 is substantially the same as that of the minute structure transfer device 1 shown in the first embodiment. Before the mold (metal mold) 14 is loaded into the stage, the photocurable resin coating mechanism 22 is used to apply a photocurable resin to the minute concave-convex pattern formed on the surface of the mold (metal mold) 14. In addition, as the photocurable resin coating mechanism 22, for example, a jet printer or the like is used. The mold (metal mold) 14 coated with the photocurable resin is placed on the stage, and the operations of the impression roller 2, the guide roller 3, the unwinder 5, and the winder 6 are the same as those in the first embodiment. , A plurality of replicas 20 are continuously fixed to the sheet-like body (film) 4.

The copy 20 formed by the copy continuous forming device 21 is sent to the copy shape inspection device 31, and the micro concave and convex pattern formed (transferred) on the copy 20 is inspected for defects or defects. As the shape inspection device used in the replica shape inspection device 31, for example, an atomic force microscope (Atomic Force Microscope: AFM), a scanning electron microscope (Scanning Electron Microscope: SEM), or scattering measurement of an optical inspection device can be used. Scatterometory) and so on. Among them, it is better to use AFM.

When the copy shape inspection device 31 determines that it is a defective copy, the information (arrangement, defective content, etc.) of a specific defective unit is identified and stored in a memory unit not shown. The replica shape inspection device 31 and the pattern forming device 41 share the defective information of the defective unit through a network or the like.

The patterning device 41 is equipped with: a glass substrate 15 coated with a photocurable resin carried in from an upstream device is transported to the patterning device 41, or a glass substrate 15 with a fine concave-convex pattern formed by the patterning device 41 is moved to a downstream device Transporting mechanism 42 for transporting. In addition, the pattern forming device 41 houses the glass substrate 15 coated with the photocurable resin carried by the transport mechanism 42 in the gantry 13, and thus is equipped with the microstructure transfer device shown in the above-mentioned embodiment 1. 1. The same unwinder 5 and winder 6, and various rollers not shown in the figure, pattern (transfer) the fine concavity and convexity pattern of the replica 20 on the glass substrate 15.

According to this embodiment, since the continuous copy forming device 21 can continuously fix a plurality of copies to the sheet-like body, as in the first embodiment, the preparation time for replacement of the copies can be reduced.

In addition, according to this embodiment, the unit that is judged as defective by the copy shape inspection device 31 can be automatically skipped by the pattern forming device 41, and it is possible to perform the formation of minute concavo-convex patterns using only good copies, thereby improving the surface formation. The yield rate of glass substrates with tiny concave-convex patterns. [Example 3]

Fig. 10 is a plan view showing a small structure transfer device of Example 3 related to another embodiment of the present invention. In this example, the microstructure transfer device is different from Example 1 and Example 2 in that the photocurable resin coating mechanism for replicas and the photocurable resin coating mechanism for glass substrates are provided. The same reference numerals are given to the same constituent elements as those of the embodiment 1 and the embodiment 2, and repeated descriptions are omitted below.

As shown in FIG. 10, the microstructure transfer device 1a is provided with a photocurable resin coating mechanism 22a for replicas and a photocurable resin coating mechanism 22b for glass substrates on both sides of the portal frame 13, respectively. Here, in FIG. 10, the longitudinal direction of the minute structure transfer device 1 a is defined as the X direction, and the width direction of the minute structure transfer device 1 a is defined as the Y direction. The photo-curable resin coating mechanism 22a for the replica placed on the stage 11 and placed on the positioning side of the mold (metal mold) 14 in the carrier 13 is configured to move back and forth in the Y direction to remove the photo-curable resin The coating is applied to a mold (metal mold) 14 placed on the stage 11 and carried in the portal frame 13. In addition, the photocurable resin coating mechanism 22b for the glass substrate placed on the stage 11 and arranged on the positioning side of the glass substrate 15 in the carrying portal 13 is configured to move back and forth in the Y direction to coat the photocurable resin. The glass substrate 15 is placed on the stage 11 and carried in the portal type rack 13. As the photocurable resin coating mechanism 22a for replicas and the photocurable resin coating mechanism 22b for glass substrates, for example, a jet printer can be used.

Next, the operation of the microstructure transfer device 1a in the copy forming process will be described. Fig. 11A is a diagram showing the setting state of the mold toward the stage during the copy forming process. As shown in FIG. 11A, the mold (metal mold) 14 is set (mounted) on the stage 11. At this time, the photocurable resin coating mechanism 22a for a copy stands by at the initial position. Fig. 11B is a diagram showing the photocurable resin coating and mold positioning state during the copy formation process. The photocurable resin coating mechanism 22 a for the copy moves in the Y direction, and moves the mold (metal mold) 14 placed on the stage 11 toward the position in the carrying portal frame 13. The photocurable resin coating mechanism 22a for replicas applies a photocurable resin to the surface of the mold (metal mold) 14 when the mold (metal mold) 14 placed on the stage 11 is carried into the portal frame 13. Fig. 11C is a diagram showing a state in which a copy is continuously formed during the copy forming process. FIG. 11C is a sheet-like body (film) not shown in the figure, as shown in the above-mentioned Example 1, in which a replica of the fine uneven pattern formed on the surface of the mold (metal mold) 14 is formed by reverse transfer transfer. Fig. 11D is a diagram showing the state of the mold reset during the formation of the replica. After the replica is formed, the mold (metal mold) 14 is carried out of the portal frame while being placed on the stage 11.

Next, the operation of the microstructure transfer device 1a in the pattern formation process of the glass substrate will be described. It is a figure which shows the setting state of the glass substrate toward a stage in the pattern formation process of a glass substrate. As shown in FIG. 12A, the glass substrate 15 is set (mounted) on the stage 11. At this time, the photocurable resin coating mechanism 22b for a glass substrate stands by in an initial position. Fig. 12B is a diagram showing the photocurable resin coating and the positioning state of the glass substrate in the pattern formation process of the glass substrate. As shown in FIG. 12B, the glass substrate photocurable resin coating mechanism 22b moves in the Y direction, and moves toward the area where the pattern is formed among the glass substrate 15 placed on the stage 11 and moves into the gate holder 13 . When the glass substrate 15 placed on the stage 11 is carried into the portal frame 13, the photocurable resin coating mechanism for glass substrate 22 b applies the photocurable resin to the patterned area of the glass substrate 15. Fig. 12C is a diagram showing a state in which a pattern is continuously formed in a pattern forming process of a glass substrate. In the portal frame 13, among the glass substrates 15 that become the stage 11, the photocurable resin coating mechanism 22b for glass substrates is used to form (transfer) microscopic replicas 20 toward the area coated with the photocurable resin. Bump pattern. Fig. 12D is a diagram showing the reset state of the glass substrate in the pattern formation process of the glass substrate. After patterning the glass substrate 15, the glass substrate 15 is carried out of the portal frame in a state of being placed on the stage 11.

According to this embodiment, the photocurable resin coating mechanism 22a for the replica and the photocurable resin coating mechanism 22b for the glass substrate that can operate independently during the process of forming the replica and the process of forming the pattern on the glass substrate are provided. As a result, the same microstructure transfer device 1a can continuously form replicas after the application of the photocurable resin and further pattern formation on the glass substrate 15 to improve workability. [Example 4]

FIG. 13 is a front view (arrow view in the direction of A in FIGS. 1 and 6) showing a microstructure transfer device of Example 4 related to another embodiment of the present invention, and FIG. 14 is an arrow view in the direction of A in FIG. 13. This embodiment is different from Embodiment 1 to Embodiment 3 in that a urethane rubber liner is provided on the outer surface of the impression roller, and the support roller mechanism is arranged directly above the impression roller.

As shown in FIG. 13, the microstructure transfer device of this embodiment includes: a pair of Z-axis drive portions 51 respectively arranged above the vicinity of both ends in the longitudinal direction of the platen roller 2, and the respective Z-axis drive portions Below 51, a load sensor 52 for monitoring the load. Furthermore, as shown in FIG. 14, the platen roller 2 has a urethane rubber gasket 56 on its outer peripheral surface, and a support roller mechanism 55 is provided directly above the platen roller 2. As shown in Fig. 13, the support roller mechanism 55 is provided in plural along the longitudinal direction of the platen roller 2 at predetermined intervals. The height and pushing force can be adjusted individually by these plural supporting roller mechanisms. In addition, although the example shown in FIG. 13 is in the state where the mold (metal mold) 14 is placed on the stage 11, that is, when a plurality of replicas are continuously fixed on the sheet (film) 4, the glass substrate 15 When using a replica to transfer a fine concavo-convex pattern, the glass substrate 15 can be placed on the stage 11.

According to this embodiment, the height and pressing force of the platen roller 2 can be adjusted individually by the support roller mechanism 55, and therefore the bending of the platen roller 2 itself can be suppressed.

In addition, since the height and pressing force of the impression roller 2 can be adjusted individually by the support roller mechanism 55, the impression roller 2 can make the sheet (film) follow the mold (metal mold) smoothly and press uniformly. Printed.

In addition, since the height and pressing force of the platen roller 2 can be adjusted individually by the support roller mechanism 55, when a plurality of molds (metal molds) are used, the level difference between the molds (metal molds) can be absorbed, and the steps can be smoothly followed. Imprint with uniform pressure. In addition, with respect to high-viscosity resin materials, uniform pressure can be transmitted by the support roller mechanism 55, so that high-precision imprinting can be achieved. In addition, after the curing of the photocurable resin is completed by imprinting, for films with poor peelability or photocurable resins with strong fixing power, the support roller mechanism 55 can be used to prevent roller detachment during peeling, and uniform peeling can be achieved. Force (tension) surely peels off the film.

In addition, in FIG. 13, although the support roller mechanism 55 is arranged at predetermined intervals along the longitudinal direction of the platen roller 2 in a plurality of configurations, but it is not limited to this, and it may be arranged between the platen roller 2. An arbitrary configuration in the longitudinal direction. In addition, the installation number of the support roller mechanism 55 may be appropriately set as required.

In addition, the arrangement at the time of installation of the support roller mechanism 55 is not limited to the one shown in the figure. For example, a configuration in which two rows, three rows, etc., multiple rows, and the support roller mechanism 55 are arranged on the periphery of the platen roller 2 may be used.

In addition, the present invention is not limited to the above-mentioned embodiments, and includes various modifications. For example, the above-mentioned embodiments are detailed descriptions for easy understanding of the present invention, and are not limited to all the configurations provided for the description. In addition, a part of the configuration of a certain embodiment may be replaced with a configuration of another embodiment, and the configuration of a certain embodiment may be added to the configuration of another embodiment. In addition, for a part of the configuration of each embodiment, addition, deletion, and replacement of the configuration of other embodiments can be performed.

1,1a: Micro structure transfer device 2: Embossing roller 3: Guide roller 3a: Upstream guide roller (1st guide roller) 3b: Downstream guide roller (2nd guide roller) 4: Flake (film) 5: Unwinding machine 6: Winding machine 7: Tension adjusting roller 8: Hardening light irradiator 9: Dry cleaning machine 10: Laser marker 11: Stage 12: Cleaning roller 13: Door frame 14: Mold (metal mold) 15: Glass substrate 16: film clip 17a: Upstream side photography department 17b: Downstream side photography department 18: Photography department support 19: Resin 20: Replica 21: Replica continuous forming device 22: Light-curable resin coating mechanism 22a: Light-curing resin coating mechanism for replicas 22b: Light-curing resin coating mechanism for glass substrates 31: Replica shape inspection device 41: Pattern forming device 42: Transport mechanism 51: Z-axis drive unit 52: Load sensor 55: Support roller mechanism 56: Polyurethane rubber liner

[Fig. 1] Fig. 1 is a side view showing the schematic configuration of a microstructure transfer device of Example 1 related to an embodiment of the present invention. [Fig. 2] is a plan view of the microstructure transfer device shown in Fig. 1. [Fig. [Fig. 3A] is a diagram showing the positioning procedure of the borrowing and photographing section when the copy is formed. [Fig. 3B] is a diagram showing the pressing step of the film clamp and the platen roller when the copy is formed. [Fig. 3C] is a diagram showing the steps of the nanoimprint operation when the replica is formed. [Fig. 3D] is a diagram showing the step of irradiating the hardening light when the replica is formed. [Fig. 3E] is a diagram showing the peeling step when the replica is formed. [Fig. 4A] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state at the time of detection of the mark attached to the sheet. [FIG. 4B] is a diagram showing the operations of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state of the positioning operation and the positioning confirmation. [Fig. 4C] is a diagram showing the operations of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state when the film clamp and the upstream guide roller are nipped. [Fig. 4D] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream side guide roller, and shows the state when the platen roller is lowered. [FIG. 4E] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream side guide roller, and shows the state when the platen roller and the downstream guide roller start pressing. [FIG. 4F] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state when the platen roller and the downstream guide roller are moved and pressed to the downstream side together. [Fig. 4G] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state when the curing light irradiator is lowered. [FIG. 4H] is a diagram showing the operations of the upstream guide roller, the platen roller, and the downstream guide roller, and shows the state when the curing light is irradiated. [Figure 4I] is a diagram showing the actions of the upstream guide roller, platen roller, and downstream guide roller, and shows the state when the film clamp rises/retracts, and the platen roller and the downstream guide roller start moving to the upstream side together Figure. [FIG. 4J] is a figure which shows the operation|movement of an upstream guide roller, a platen roller, and a downstream guide roller, and shows the state at the time of peeling. [FIG. 4K] is a diagram showing the actions of the upstream guide roller, the platen roller, and the downstream side guide roller, and shows a state when the platen roller and the downstream guide roller start moving to the upstream side together. [Figure 5] is a diagram showing the outline of the process when the copy is formed, (A) is film positioning, (B) is pressing (imprint), (C) is curing light irradiation, (D) is peeling and ( E) is the picture at the end of the copy formation. [Fig. 6] is a side view of the schematic configuration of the microstructure transfer device shown in Fig. 1, and is a side view when the micro-concave-convex pattern is transferred to a copy of a glass substrate. [Fig. 7] is a plan view of the minute structure transfer device shown in Fig. 6. [Fig. [Figure 8] is a diagram showing the outline of the process at the time of pattern formation on the glass substrate, (A) is the positioning of the replica, (B) is the pressing (imprint), (C) is the curing light irradiation, (D) To peel and (E) are diagrams at the end of pattern formation of the glass substrate. [FIG. 9] is a plan view showing a microstructure transfer device of Example 2 related to another example of the present invention. Fig. 10 is a plan view showing a microstructure transfer device of Example 3 related to another embodiment of the present invention. [Fig. 11A] is a diagram showing the setting state of the mold toward the stage during the replica formation process. [Fig. 11B] is a diagram showing the photocurable resin coating and mold positioning state during the copy formation process. [Fig. 11C] is a diagram showing the continuous formation state of the copy during the copy formation process. [Fig. 11D] is a diagram showing the state of mold reset in the process of forming a replica. [Fig. 12A] is a diagram showing the setting state of the glass substrate toward the stage in the pattern formation process of the glass substrate. [Fig. 12B] is a diagram showing the photocurable resin coating and mold positioning state in the pattern formation process of the glass substrate. [Fig. 12C] is a diagram showing the pattern continuous formation state in the pattern formation process of the glass substrate. [Fig. 12D] is a diagram showing the reset state of the glass substrate in the pattern formation process of the glass substrate. [Fig. 13] is a front view showing a microstructure transfer device of Example 4 related to another embodiment of the present invention. Fig. 14 is a view showing the arrow in the direction of A in Fig. 13 and a cross-sectional view of the support roller mechanism.

1: Micro structure transfer device

2: Embossing roller

3a: Upstream guide roller (1st guide roller)

3b: Downstream guide roller (2nd guide roller)

4: Flake (film)

5: Unwinding machine

6: Winding machine

8: Hardening light irradiator

11: Stage

13: Door frame

14: Mold (metal mold)

16: film clip

17a: Upstream side photography department

17b: Downstream side photography department

18: Photography department support

Claims (18)

A microstructure transfer device, which is characterized in that it has: The unwinding machine rewinds the flexible sheet and unwinds the sheet; Winding machine to wind the above-mentioned sheet conveyed by a plurality of guide rollers; The carrier is arranged between the unwinding machine and the winder, and is placed on a mold coated with a photocurable resin on the surface of the micro concave-convex pattern; An embossing roller, which pushes the sheet-shaped body toward the mold from above, while at least moving back and forth between the two ends of the mold; and A hardening light irradiator irradiates hardening light to the sheet body pressed by the mold, and A plurality of replicas are continuously fixed to the sheet-like body. The microstructure transfer device according to claim 1, wherein the platen roller is one of a plurality of copies fixed on the sheet-like body, and is placed on the side facing through the sheet-like body The stage is pressed against a substrate coated with the photocurable resin on the surface, and one side moves back and forth at least between both ends of the substrate, The curing light irradiator irradiates the substrate coated with the photocurable resin with curing light through the sheet-like body and the replica pressed by the embossing roller, and the photocurable resin is cured by the press The printing roller peels off the sheet-like body, thereby transferring the fine concavo-convex pattern of the replica. The micro-structure transfer device according to claim 1 or claim 2, which includes: among the plurality of guide rollers, the first roller is adjacent to and located on the upstream side in the conveying direction of the sheet-like body. A guide roller, and a second guide roller that is adjacent to the platen roller and located on the downstream side in the conveying direction of the sheet-like body, The second guide roller is positioned above the platen roller when the platen roller moves while pressing the sheet-like body, and moves at a constant speed together with the platen roller. The microstructure transfer device according to claim 3, wherein a film clamp is provided, and when the platen roller moves while pushing the sheet-like body, the end of the mold or the substrate is in the middle of the sheet-like body The above-mentioned sheet-shaped body is clamped at the end located on the upstream side in the conveying direction. The microstructure transfer device according to claim 4, wherein the curing light irradiator is positioned between the platen roller and the first guide roller, and when the platen roller moves while pressing the sheet-like body, It moves to the downstream side while irradiating the curing light so as to follow the platen roller and the second guide roller. The microstructure transfer device according to claim 4, wherein the hardening light irradiator is located between the platen roller and the first guide roller, and the platen roller presses the sheet-like body while contacting the first guide roller. After the 2 guide rollers move toward the downstream side at a constant speed, they move toward the downstream side while being irradiated with curing light. The microstructure transfer device according to claim 5, further comprising a photocurable resin coating mechanism for coating the photocurable resin on the mold and/or the substrate. The microstructure transfer device according to claim 6, which has a photocurable resin coating mechanism for coating the photocurable resin on the mold and/or the substrate. The microstructure transfer device according to claim 4, which has a support roller mechanism capable of individually adjusting the height and pressing force of the platen roller. The microstructure transfer device according to claim 9, wherein the support roller mechanism is provided in plural at predetermined intervals along the longitudinal direction of the platen roller. The microstructure transfer device according to claim 9 or claim 10, wherein the support roller mechanism has a support roller arranged to be in contact with the outer peripheral surface of the platen roller directly above the platen roller. A microstructure transfer method using a microstructure transfer device. The microstructure transfer device is provided with: an unwinding machine that rewinds a flexible sheet-like body and unwinds the sheet-like body; A winding machine for the sheet-like body conveyed by a guide roller; and a mold arranged between the unwinding machine and the winding machine, and placed on a mold coated with a photocurable resin on the surface of the micro concave-convex pattern formed The carrier is characterized by: The embossing roller presses the sheet-like body toward the mold from above, and irradiates the sheet-like body pressed against the mold with curing light at least during the reciprocating movement between the two end portions of the mold, so that the sheet-like body is continuous Multiple copies are fixed on the ground. The microstructure transfer method according to claim 12, wherein the embossing roller is one of a plurality of copies of the sheet-like body fixed on the sheet-like body, and is placed on the side facing the sheet-like body. The stage is pressed against the substrate coated with the photocurable resin on the surface, and the substrate coated with the photocurable resin passes through the imprint roller at least while moving back and forth between the two ends of the substrate. The pressed sheet-like body and the replica are irradiated with hardening light to transfer the fine concavo-convex pattern of the replica. The microstructure transfer method according to claim 12 or claim 13, which includes: among the plurality of guide rollers, a first that is adjacent to and located on the upstream side of the platen roller in the conveying direction of the sheet-like body A guide roller, and a second guide roller that is adjacent to the platen roller and located on the downstream side in the conveying direction of the sheet-like body, The second guide roller is positioned above the platen roller when the platen roller moves while pressing the sheet-like body, and moves at a constant speed together with the platen roller. The microstructure transfer method according to claim 14, wherein when the platen roller moves while pressing the sheet-like body, the end of the mold or the substrate is located upstream in the conveying direction of the sheet-like body The end of the side sandwiches the sheet-like body. The microstructure transfer method according to claim 15, wherein when the platen roller moves while pressing the sheet-like body, the platen roller and the second guide roller move to the downstream side at a constant speed. During the irradiating of hardening light. The microstructure transfer method according to claim 16, wherein the photocurable resin is applied to the mold and/or the substrate. The microstructure transfer method according to claim 15, wherein the height and pressing force of the platen roller are individually adjusted.

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