TW202010701A - Intelligent pallet box capable of detecting the environment in the box body during transportation to ensure the accommodated object therein from being polluted or damaged due to change of environmental conditions - Google Patents

Abstract

The invention relates to an intelligent pallet box, which is suitable for bearing and accommodating at least one clean substrate container, and comprises a pallet base, a box body, and a sensing device. The box body comprises a peripheral wall detachably combined on the periphery of the pallet base and an upper cover detachably combined on the peripheral wall. The pallet base and the peripheral wall together define an accommodating space used for accommodating at least one cleaning substrate container. The upper end and the lower end of the accommodating space is respectively sealed by the upper cover and the pallet base. The sensing device comprises at least one sensor arranged on the pallet base or the box body to sense the state in the accommodating space or of the pallet base.

Description

Wisdom pallet

The invention relates to a pallet box, in particular to a smart pallet box for carrying and accommodating a clean substrate container for semiconductors.

In the semiconductor manufacturing process, the wafer is the main substrate. When the wafer is transported in the external environment outside the semiconductor factory, the wafer is generally placed in a clean substrate container, such as a front-open wafer transport box (front opening shipping box, FOSB). When transporting a plurality of clean substrate containers, the clean substrate containers are usually carried or contained through a pallet or pallet box.

However, the conventional pallets do not have a protection or buffer structure, and monitoring/monitoring functions, and cannot provide sufficient protection, nor can the handling/delivery personnel confirm the status of the wafers carried. Although the conventional pallet box has a box body that can provide simple protection, firstly, the protection effect is not good, and secondly, it also does not have a monitoring/monitoring function, and its large size also causes it to be stored when not in use. Difficulties in storage. At the same time, neither of them can be used with the advanced automation equipment of the semiconductor industry, thus causing a reduction in operational time.

Therefore, the object of the present invention is to provide a smart pallet box.

Therefore, the smart pallet box of the present invention is suitable for carrying and accommodating at least one clean substrate container. The smart pallet box includes a pallet seat, a box body, and a sensing device.

The box body includes a peripheral wall separably combined around the pallet seat, and an upper cover separably coupled to the peripheral wall, the pallet seat and the peripheral wall together define a space for accommodating the at least one The accommodation space of the clean substrate container, and the upper and lower ends of the accommodation space are respectively closed by the upper cover and the pallet seat.

The sensing device includes at least one sensor disposed on the pallet base or the box body to sense the state of the accommodating space or the pallet base.

The effect of the present invention is that a sensor is provided on the pallet seat or the box body, which can instantly detect the environment in the box, the amount of the items contained and the weight and the like in the process of the transportation of the intelligent pallet box to assist Confirm and even control the environmental status inside the box to ensure that the items contained in it are not contaminated or even damaged by changes in environmental conditions.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

Referring to FIGS. 1, 2 and 22, an embodiment of the smart pallet box 1 of the present invention is suitable for carrying and accommodating a plurality of clean substrate containers 100. The clean substrate container 100 may be a sealed clean container commonly used in various semiconductor, solar, or optoelectronic industries, such as a photomask box, a wafer box, etc. In this embodiment, the former open wafer transport box (FOSB) is used as an example.

The smart pallet box 1 includes a pallet holder 2, a box 3 provided on the pallet holder 2, and a sensing device 4 provided on the pallet holder 2 or the box 3.

Specifically, the box body 3 includes a peripheral wall 31 detachably combined with the pallet base 2 and an upper cover 32 detachably combined with the peripheral wall 31. The pallet holder 2 and the peripheral wall 31 together define an accommodating space 300 for accommodating the clean substrate containers 100, and the upper and lower ends of the accommodating space 300 are the upper cover 32 and the pallet holder 2 respectively Closed.

The box 3 includes a positioning buffer unit 5 disposed in the accommodating space 300. The positioning buffer unit 5 includes a buffer bottom plate 51 disposed on the pallet base 2, a buffer top plate 52 disposed adjacent to the upper cover 32, and a buffer partition disposed between the buffer bottom plate 51 and the buffer top plate 52板53.

The buffer partition 53 and the buffer bottom plate 51 and the buffer top plate 52 partition the accommodating space 300 into a first space area 301 and a second space area 302 to accommodate a plurality of clean substrate containers 100 respectively. As for the front-opening wafer transport box exemplified in this embodiment, each front-opening wafer transport box can accommodate multiple wafers.

As shown in FIG. 2, the buffer bottom plate 51, the buffer partition 5 and the buffer top plate 52 also cooperate with the appearance of the clean substrate container 100 to provide positioning and buffering functions, so as to avoid shaking of these clean substrate containers 100 during transportation Or it may be damaged due to impact. In addition, in order to provide better cushioning and protection effects, a cushioning substrate 54 may be further disposed between the upper cover 32 and the cushioning top plate 52.

Preferably, the positioning buffer unit 5 in this embodiment includes a buffer bottom plate 51, a buffer top plate 52, a buffer partition 53 and a buffer base material 54, and the material thereof may be selected from foam materials. For example, polyethylene (Polyethylene, PE), polypropylene (Polypropylene, PP), or ethylene/vinyl acetate copolymer (Ethylene vinyl acetate, EVA) and other foam materials. But it is not limited to this.

More preferably, the foaming ratio of the foamed materials is between 10 and 60 times to provide better cushioning effect. In addition, because products such as semiconductors and other high-tech industries are easily damaged due to electrostatic discharge, anti-static foam materials can also be used for the foam material, and the resistance value of the foam material is preferably 10 ¹² Ω/sq The following is to avoid the discharge after the accumulation of static charge, which may cause damage to the wafer contained therein.

Referring to FIGS. 3 to 5, the pallet base 2 includes a base 21 with a rectangular outline, a plurality of grooves 22 recessed downward from an upper surface of the base 21, and a plurality of grooves 22 respectively disposed in the grooves 22 The inner anti-vibration element 23 and a bearing module 25 provided between the base 21 and the buffer bottom plate 51.

The anti-vibration element 23 is used to support the bearing module 25 and isolate the vibration transmitted from the pallet base 2. The shock-proof member 23 can be made of various materials or structures. For example, it can be a shock-proof rubber block 231 made of natural rubber, silicon rubber, ..., or a spiral shock absorber 232 made of metal, plastic or composite material. . This embodiment does not limit this, as long as it can achieve the functions of support and shockproof.

Specifically, the grooves 22 are arranged on the base 21 in an array. The anti-vibration rubber blocks 231 are disposed in the grooves 22 at four corners, and the spiral anti-vibration devices 232 are disposed in the grooves 22 at the center of the four sides of the base 21, that is, the anti-vibration elements 23 and The spiral shock absorbers 232 are alternately arranged on the outer periphery of the base 21.

Among them, the anti-vibration rubber block 231 is mainly provided to isolate the vibration from the vertical ground direction; the spiral anti-vibration device 232 is arranged in such a manner that the axes are all oriented in the same direction as the stacking direction of the wafers in the clean substrate container 100 to provide The isolation effect of shaking or shaking in the direction. With these two different structures of the shock-proof member 23, a better shock-proof effect is provided.

Referring to FIG. 3, FIG. 6 and FIG. 8 in conjunction with FIG. 2, the carrier module 25 disposed on the base 21 includes two anti-vibration sheets 251 spaced apart, and a plurality of arrays are located between the anti-vibration sheets 251 Block 255. Similar to the anti-vibration rubber block 231, the anti-vibration block 255 can also be made of materials such as natural rubber, silicone rubber, etc.

Each anti-vibration sheet 251 has an inner layer 252, an outer layer 253, and a porous structure 254 between the inner layer 252 and the outer layer 253. Preferably, the porous structure 254 may be a honeycomb structure. In this way, the weight of the anti-vibration sheet 251 can be greatly reduced under the premise of having extremely high structural strength, and the effect of saving transportation costs can be achieved.

Similarly, the peripheral plate 310 of the peripheral wall 31 of the box body 3 can also adopt the same structure as that of the anti-vibration sheet 251. In other words, the peripheral plate 310 also has an inner layer 303, an outer layer 304, and a porous structure 305 between the inner layer 303 and the outer layer 304 (as shown in FIG. 8). In addition, the porous structure 305 may also be a honeycomb structure to have the advantages of high strength and light weight.

Please refer to FIGS. 1 and 7 at the same time. The peripheral wall 31 further includes a plurality of light-permeable windows 33 penetrating the inner layer 303, the porous structure 305 and the outer layer 304. In this way, the user or the automation device can directly confirm the state of the clean substrate containers 100 loaded in the accommodating space 300 through the transparent window 33.

The material of the peripheral wall 31 is also selected from polyethylene or polypropylene. Combined with the porous structure 305, the peripheral wall 31 can have the advantages of light weight, high bearing capacity and durability, and good thermal insulation.

The pallet holder 2 and the upper cover 32 can be manufactured by gas-assisted injection molding, blow molding, or double-layer blister molding technology, so that the pallet holder 2 and the upper cover 32 have the advantages of hollow and light weight, avoiding thick size The depression, shrinkage and warpage at the place can also shorten the molding process cycle and improve the overall strength.

Referring to FIGS. 7 and 9, the concave portions 313 and 314 of the upper peripheral edge 311 and the lower peripheral edge 312 of the peripheral wall 31 can cooperate with the positioning portion 323 of the upper cover 32 and the convex portion 26 of the pallet base 2 to Assemble the three in a simple way. In order to correctly align and assemble, the corresponding sets of concave portions 313 and positioning portions 323 and the corresponding sets of concave portions 314 and convex portions 26 on each side can take different sizes or shapes, so as to facilitate the correct identification by the assembler.

More specifically, in the present embodiment, the upper cover 32 has a body 321, a plurality of grooves 322 recessed toward the body 321 from the upper peripheral edge 311 facing the peripheral wall 31, and the grooves 322 located in the grooves 322 For the positioning portion 323, the upper peripheral edge 311 of the peripheral wall 31 has a plurality of concave portions 313 corresponding to the positioning portions 323 and matching the outline.

Similarly, the pallet base 2 has a plurality of convex portions 26 protruding along the periphery of the upper surface of the base 21, and the lower peripheral edge 312 of the peripheral wall 31 has a plurality of concave portions 314 corresponding to the convex portions 26.

Generally, the width of the groove 322 is the same as the thickness of the peripheral plate 310 of the peripheral wall 31 so that the upper peripheral edge 311 of the peripheral plate 310 can be inserted into the groove 322. Through the cooperation of the groove 322 of the upper cover 32 and the positioning portions 323 with the upper peripheral edge 311 of the peripheral wall 31 and the recessed portions 313, the operator may easily and accurately cover the upper cover 32 to the peripheral wall 31.

Similarly, by matching the convex portions 26 of the pallet base 2 with the concave portions 314 of the lower peripheral edge 312 of the peripheral wall 31, the foolproof positioning function when assembling the pallet base 2 and the peripheral wall 31 can be provided To make assembly fast and reliable.

Referring to FIGS. 7 and 10, the peripheral wall 31 has four peripheral plates 310 connected to each other, wherein two opposing peripheral plates 310 each have a bent portion 316 extending in the height direction of the peripheral plate 310 in the center. Each bent portion 316 divides the peripheral plate 310 where it is located into two peripheral plate portions 315.

After the peripheral wall 31 is detached from the pallet holder 2, the peripheral bending portions 316 can be bent toward each other, so that the peripheral peripheral portions 315 can be brought together to drive the other two opposing peripheral plates 310 to face each other Move to bring the peripheral wall 31 into a folded state.

With reference to FIGS. 11 and 12, if the height H of the upper peripheral edge 311 to the lower peripheral edge 312 of the peripheral wall 31 is less than or equal to the length and width of the pallet base 2, the peripheral wall 31 in the collapsed state can be placed flat on the The upper cover 32 and the pallet base 2 are stacked and stored. Furthermore, as shown in FIG. 12, a plurality of smart pallet boxes 1 in a stored state may be stacked on each other to reduce storage space.

It should be noted that when the smart pallet box 1 is not stored, a plurality of smart stacks can also be provided by respectively providing concave and convex positioning structures that cooperate with each other on the top surface of the upper cover 32 and the bottom surface of the pallet base 2 Through matching of the concave and convex positioning structure, the board boxes 1 are stacked quickly and firmly with each other.

Referring to FIGS. 13 and 14, the other two peripheral plates 310 in the peripheral wall 31 that do not have the bending portion 316 respectively have a peripheral plate portion 315, a side opening 320, and a flip plate portion 317. The side opening 320 is adjacent to the upper cover 32 and communicates with the accommodating space 300. The lift plate portion 317 can be tiltably connected to the peripheral plate portion 315 to close or expose the side opening 320.

Preferably, the box 3 includes a plurality of connectors 34 respectively disposed on the peripheral plate portion 315 and the flip plate portion 317. When the flip plate portion 317 is opened or closed, it exposes or closes the side opening At 320, the lifting plate portion 317 can be fixed through the connecting pieces 34. The connecting piece suitable for the present embodiment is selected from the devil felt as an example to achieve the effect of quickly bonding the lifting plate portion 317 .

Through the design of the lifting plate portions 317, the lifting plate portions 317 are opened to expose the side opening 320, so that the clean substrate containers 100 in the first space area 301 (see FIG. 2) at the lower level can Convenient to be picked and placed.

15, 16 and 22, the sensing device 4 includes a plurality of sensors disposed on the pallet base 2 and the box 3 for sensing the accommodating space 300 or the pallet base 2 status.

In this embodiment, the sensing device 4 includes a pressure sensor 41 disposed on the pallet base 2, a position sensor 43, disposed on the box 3 and located in the accommodating space 300 A temperature sensor and a humidity sensor (not shown), and a temperature and humidity display 44 disposed outside the upper cover 32.

Specifically, the pressure sensor 41 is arranged at the bottom of the pallet holder 2, the weight indicator 42 and the position sensor 43 are arranged around the side of the pallet holder 2. The pressure sensor 41 is electrically connected to the weight indicator 42 and is used to sense the loading status of the clean substrate containers 100 in the accommodating space 300 and can be displayed through the light indicator of the weight indicator 42 to Prevent abnormal conditions such as short packaging materials or lack of wafers.

The temperature sensor and the humidity sensor are electrically connected to the temperature and humidity display 44 to sense the temperature and humidity status in the accommodating space 300 through the temperature sensor and the humidity sensor, and The temperature and humidity information is displayed on the temperature and humidity display 44.

In addition, the sensing device 4 may further include a temperature controller (not shown) and a humidity controller (not shown) disposed in the accommodating space 300, such as an electronic heater or refrigerator and an electronic type Dehumidifier. When the temperature and humidity in the accommodating space 300 are abnormal, the temperature/humidity controller can be adjusted to prevent the temperature and humidity in the accommodating space 300 from being abnormal and affecting the quality of the wafer.

In addition, the smart pallet box 1 provided in this embodiment may also be provided with a position sensor 43, such as a GPS locator, for positioning the smart pallet box 1, and may even further provide a tracking function.

Please also refer to FIG. 1 at the same time. The solar charging device 6 of this embodiment is provided on the upper cover 32, but it can also be optionally provided on the peripheral wall 31 or the side of the pallet holder 2. The power required by the sensing device 4 can be supplied by the battery, and can also be electrically connected to the solar charging device 6 to generate electricity by the solar charging device 6 to provide the power required by the sensing device 4 .

More preferably, the smart pallet 1 of this embodiment may further be provided with a transmission device 92 for outputting the data sensed by the sensing device 4. The transmission device 92 may be a wired electronic device port or a wireless transmission device, which is not limited in this embodiment. The transmission device 92 is electrically connected to the sensing device 4 to receive the data it senses, and then outputs the data to the outside for monitoring or recording purposes.

In addition, the intelligent pallet box 1 may be further provided with an identification means 91. The identification means 91 can use barcodes, including one-dimensional barcodes or two-dimensional barcodes such as QR codes, or a radio frequency identification tag (RFID tag) for easy identification by operators or automated equipment Or management.

Referring to FIGS. 1, 16 to 20, the upper cover 32 of this embodiment may also be provided with a plurality of clamping grooves 72, a plurality of elastic members 73 respectively located in the clamping grooves 72, and a plurality of clamping members The fastener 74 in the groove 72 connected to the elastic member 73 has a plurality of perforations/slots 319 corresponding to the fastener 74 respectively.

The robot arm 8 in the automated handling equipment includes a gripping member 81 having a gripping surface 810, an electromagnetic lock 811 provided on the gripping surface 810, and four corresponding gripping grooves 72 provided in the gripping device The grabbing portion 812 on the fetching surface 810. The number of the gripping parts 812 can be changed correspondingly according to the number of the gripping grooves 72, which is not limited in this embodiment.

When the grasping member 81 of the robot arm 8 faces the upper cover 32 with the grasping surface 810 correspondingly, the four grasping portions 812 can be put into the grasping grooves 72 correspondingly, and the grasping portions 812 can be made Against the fasteners 74 respectively, so that the fasteners 74 are in a closed state (as shown in FIG. 17) of the perforation/slots 319 fixed into the peripheral wall 31 and away from the peripheral wall 31 The punching/slot 319 moves between an open state (as shown in FIG. 18).

Referring to FIGS. 21-23, when the clean substrate containers 100 in the accommodating space 300 of the smart pallet 1 are to be gripped, the gripping portions 812 can be pressed against the fasteners 74, and the The upper cover 32 and the buffer top plate 52 can be taken out by sequence clips, so that the clean substrate container 100 can be clipped (as shown in FIG. 23).

More preferably, in this embodiment, an anti-theft device 7 that can control the card firmware 74 can also be provided on the upper cover 32. The anti-theft device 7 includes an electromagnetic lock 71. An electromagnetic lock 811 is provided on the grasping surface 810 of the grasping member 81 of the robot arm 8 corresponding to the electromagnetic lock 71. The electromagnetic lock 811 on the robot arm 8 and the electromagnetic lock 71 of the anti-theft device 7 sense each other to perform data verification. If the data match, the anti-theft device 7 unlocks the card firmware 74 to achieve the anti-theft effect.

In summary, the smart pallet box 1 provided in this embodiment can be detected in real time during the transportation of the smart pallet box 1 by providing sensors on the pallet base 2 or the box body 3 The temperature and humidity in the box 3 and the weight state of the pallet base 2 are used to assist in confirming and improving the environmental state in the box 3, and the positioning buffer unit 5 is provided in the accommodating space 300 to enhance Its internal anti-collision and shock absorption, and the foldable design of the peripheral wall 31 can also be placed flat between the upper cover 32 and the pallet seat 2 for storage, the peripheral wall 31, the upper cover 32 and the pallet seat 2 The foolproof structure cooperates with each other, so that the overall structure can be quickly and surely assembled. In addition, through the setting of the clamping groove 72, the robot arm 8 can be automatically used to sense the opening, which is convenient for the subsequent robot arm 8 to directly clamp Take the clean substrate container 100. An anti-theft device 7 can also be added to ensure safety. Therefore, the various objects of the invention can be achieved.

However, the above are only examples of the present invention, and the scope of implementation of the present invention cannot be limited by this, any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still classified as Within the scope of the invention patent.

1: Smart pallet box 323: Positioning part 100: Clean substrate container 300: Storage space 2: Pallet holder 301: First space area 21: Substrate 302: Second space area 22: Groove 33: Transparent window 23: Anti-vibration part 34: Connection part 231: Anti-vibration rubber block 4: Sensing device 232: Spiral anti-vibration device 41: Pressure sensor 25: Carrier module 42: Weight indicator 251: Anti-vibration sheet 43: Position sensor 252/303: inner layer 44: temperature and humidity display 253/304: outer layer 5: positioning buffer unit 254/305: porous structure 51: buffer bottom plate 255: shockproof block 52: buffer top plate 26: convex portion 53: buffer partition 3: Box 54: Buffer substrate 31: Perimeter wall 6: Solar charging device 310: Perimeter plate 7: Anti-theft device 311: Upper peripheral edge 71: Electromagnetic lock 312: Lower peripheral edge 72: Grip groove 313: Recess 73: Elastic piece 314: Recessed part 74: Fastener 315: Peripheral plate part 8: Robot arm 316: Bending part 81: Grab 317: Lift plate part 810: Grab surface 319: Perforation/slot 811: Electromagnetic lock 320: Side opening 812: Gripping part 32: upper cover 91: identification means 321: body 92: transmission device 322: groove H: height

Other features and functions of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a perspective view illustrating an embodiment of the smart pallet box of the present invention; FIG. 2 is a perspective view with some parts omitted The components illustrate a positioning buffer unit of the embodiment; FIG. 3 is a perspective view, omitting some components to illustrate a pallet base of the embodiment; FIG. 4 is a partially enlarged view illustrating an anti-vibration rubber block of the pallet base; 5 is a partially enlarged view illustrating a spiral shock absorber of the pallet base; FIG. 6 is a side view to assist in explaining a bearing module of the pallet base in FIG. 3; FIG. 7 is an exploded perspective view illustrating the The combination relationship of the pallet base, a peripheral wall, and an upper cover of the embodiment; FIG. 8 is a side view illustrating the structure of the shockproof sheet or peripheral wall; FIG. 9 is a partially enlarged view to assist in explaining the peripheral wall of FIG. 7 and the Assembly of the upper cover; FIG. 10 is a perspective view illustrating the appearance of the peripheral wall of the embodiment in the folding process; FIG. 11 is an exploded perspective view illustrating the folded state of the peripheral wall of the embodiment and the upper cover and the stack Stacking of plate bases; FIG. 12 is a perspective view illustrating stacking of a plurality of the embodiments; FIG. 13 is a perspective view, omitting some components to illustrate the flip-up portion and side openings of the peripheral plate of the embodiment; FIG. 14 is a perspective view , To assist in explaining the opened state of the flip portion of FIG. 13; FIG. 15 is a perspective view illustrating the sensing device of the embodiment; FIG. 16 is a top view illustrating a solar charging device and a sensing device of the embodiment FIG. 17 is a cross-sectional side view along line II of FIG. 16, illustrating the gripping grooves, fasteners, and perforations/slots of this embodiment; FIG. 18 is a cross-sectional side view along line II of FIG. 16, with auxiliary explanation; FIG. 17 is a gripping slot, a fastener and a perforation/slot; FIG. 19 is a perspective view illustrating the embodiment and a robot arm; FIG. 20 is a perspective view illustrating a gripping part of the robot arm; FIG. 21 is a perspective view illustrating the robot arm gripping the upper cover of the embodiment; FIG. 22 is a perspective view illustrating the robot arm gripping a buffer top plate of the positioning buffer unit of the embodiment; and FIG. 23 is a perspective view, It is explained that the robot arm grips a clean substrate container in this embodiment.

1: wisdom pallet

2: Pallet holder

3: cabinet

31: Zhou Bi

32: upper cover

33: Transparent window

4: Sensing device

6: Solar charging device

7: Anti-theft device

91: Identification method

92: Transmission device

Claims (41)

A smart pallet box, suitable for carrying and accommodating at least one clean substrate container, including: a pallet base; a box body, including a peripheral wall separably assembled around the pallet base, and a detachable base Combined with the upper cover on the peripheral wall, the pallet base and the peripheral wall jointly define an accommodating space for accommodating the at least one clean substrate container, and the upper and lower ends of the accommodating space are the upper cover and the stack, respectively The plate base is closed; and a sensing device includes at least one sensor disposed on the pallet base or the box body to sense the state of the accommodating space or the pallet base. The smart pallet box according to claim 1, further comprising a positioning buffer unit disposed in the accommodating space, the positioning buffer unit includes a buffer bottom plate disposed on the pallet base and a buffer plate disposed adjacent to the upper cover Buffer top plate. The smart pallet box according to claim 2, wherein the positioning buffer unit further includes a buffer partition disposed between the buffer bottom plate and the buffer bottom plate, the buffer partition and the buffer bottom plate and the buffer top plate respectively The accommodating space area is separated to respectively accommodate a first space area and a second space area of at least one clean substrate container. The smart pallet box according to claim 2, wherein the positioning buffer unit further includes a buffer base material disposed between the upper cover and the buffer top plate. The intelligent pallet box according to claim 2 or 3, wherein the material of the positioning buffer unit is selected from foam materials. The smart pallet according to claim 5, wherein the foamed material may be selected from polyethylene (PE), polypropylene (PP) or ethylene-vinyl acetate copolymer (EVA). The smart pallet box according to claim 5, wherein the foaming material has a foaming ratio between 10 and 60 times. The smart pallet box according to claim 5, wherein the foam material is an antistatic foam material, and the impedance value of the foam material is less than 10 ¹² Ω/sq. The intelligent pallet box according to claim 2, wherein the pallet base includes a base body, and a bearing module disposed between the base body and the buffer bottom plate. The smart pallet box according to claim 9, wherein the bearing module includes a shockproof sheet. The smart pallet box according to claim 10, wherein the bearing module includes two shock-proof sheets arranged at intervals. The smart pallet box according to claim 11, wherein the bearing module includes a plurality of anti-vibration blocks arrayed between the anti-vibration sheets. The smart pallet box according to claim 10, 11 or 12, wherein each of the anti-vibration sheets has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer. The intelligent pallet box according to claim 9, wherein the pallet base further includes a plurality of grooves recessed from an upper surface of the base body away from the accommodating space. The intelligent pallet box according to claim 14, wherein the pallet base further includes a plurality of anti-vibration pieces respectively disposed in the grooves to support the bearing module. The smart pallet box according to claim 15, wherein any one of the anti-vibration parts is an anti-vibration rubber block. The smart pallet box according to claim 15, wherein any one of the anti-vibration parts is a spiral anti-vibration device. The smart pallet box according to claim 15, wherein the anti-vibration parts include a plurality of anti-vibration rubber blocks and a plurality of spiral anti-vibration devices, and the anti-vibration rubber blocks and the spiral anti-vibration devices are arranged alternately on the Wait in the groove. The smart pallet box according to claim 17 or 18, wherein, when the pallet base includes a plurality of spiral shock absorbers, the spiral shock absorbers are arranged in the same direction. The smart pallet box according to claim 10, 11 or 12, wherein the shockproof sheet is made of polypropylene. The smart pallet box according to claim 13, wherein the shockproof sheet is made of polypropylene. The smart pallet box according to claim 1, wherein the peripheral wall has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer. The smart pallet box according to claim 1, wherein the pallet base and the upper cover are formed by gas-assisted injection molding, blow molding or double-layer plastic molding. The smart pallet box according to claim 22, wherein the peripheral wall further includes at least one light-permeable window penetrating the inner layer, the porous structure and the outer layer. The smart pallet box according to claim 1, wherein the peripheral wall has four peripheral plates connected to each other, wherein two opposing peripheral plates respectively have at least one bent portion extending along the height direction of the peripheral plate, When the peripheral wall is separated from the pallet base, the bending portions can be bent to drive the two opposing peripheral plates to move toward each other, so that the peripheral wall is in a collapsed state. The smart pallet box according to claim 25, wherein at least one of the peripheral plates has a side opening adjacent to the upper cover communicating with the accommodating space, and a flip part for closing or exposing the side opening, the The box body further includes a plurality of connecting pieces, and the connecting pieces are respectively disposed on the box body and the lift plate portion. When the lift plate portion closes or exposes the side opening, the lift plate portion is fixed through the connection pieces . The intelligent pallet box according to claim 25, wherein the height from the upper peripheral edge of the peripheral wall to the lower peripheral edge of the peripheral wall is less than or equal to the length and width of the pallet base. The smart pallet box according to claim 1, wherein the upper peripheral edge and the lower peripheral edge of the peripheral wall respectively have concave portions that are positioned in cooperation with the upper cover and the pallet seat. The smart pallet according to claim 1, wherein the sensing device includes a plurality of sensors, and the sensors may be selected from a temperature sensor, a humidity sensor, a pressure sensor, and a position Sensor, or any combination of the aforementioned various sensors. The smart pallet box according to claim 1, wherein the sensing device includes a temperature sensor and a temperature controller located in the accommodating space. The smart pallet box according to claim 1, wherein the sensing device includes a humidity sensor located in the accommodating space, and a humidity controller. The smart pallet box according to claim 1, wherein the sensing device includes a pressure sensor, and the smart pallet box has a weight reminder for displaying or prompting the weight state of the smart pallet box , The pressure sensor is electrically connected to the weight indicator. The smart pallet box according to claim 1, wherein a solar charging device is provided on the upper cover, the peripheral wall or the outer side of the pallet base, and the solar charging device is electrically connected to the sensing device. The smart pallet as described in claim 1 further includes an identification method. The smart pallet according to claim 34, wherein the identification means is a barcode or a radio frequency identification tag. The smart pallet box according to claim 1, further comprising a transmission device for outputting the data sensed by the sensing device, the transmission device is electrically connected to the sensing device. The smart pallet according to claim 36, wherein the transmission device is a wireless transmission device. The smart pallet box according to claim 1, further includes a plurality of gripping grooves provided on the upper cover. The intelligent pallet box according to claim 38, further comprising a plurality of elastic members respectively located in the clamping grooves, and a plurality of elastic members respectively connected to the elastic members and at least partially located in the clamping grooves The peripheral wall of the fastener has a plurality of perforations or slots corresponding to the respective fasteners, each of the fasteners can be fixed into the corresponding perforation or a closed position of the card slot, and away from the corresponding perforation Or move between an open position of the card slot. The smart pallet box according to claim 39, further includes an anti-theft device provided on the upper cover. The smart pallet box according to claim 40, wherein the anti-theft device includes an electromagnetic lock that can press or release the card firmware through the elastic member, so that the card firmware is in the closed position and the open position To move.

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