TW201901766A - Spacer and spacing method - Google Patents

Abstract

The present invention provides a separation device and a separation method capable of firmly holding the end portions of the adhered sheets on the separation holding means, which comprises a plurality of separation holding means (20) which are held on at least one of the surface (AS1) on one side of the adhered sheets (AS) and the surface (AS2) on the other side, and adhered with a plurality of adherends (CP) or divided to become the ends (AE1) of the adhered sheets (AS) in an integrated body (WK) of the plurality of adherends (CP); a separation means (30) which may enable the separation holding means (20) for holding the end portions (AE1) of the adhered sheets (AS) making a relative movement and applying tension to the adhered sheets (AS) to expand the intervals between the adherends (CP); and, a receiving means (40) for holding the integrated body (WK) and receiving the integrated body (WK) into the plurality of separation holding means (20). The receiving means (40) comprises: a plurality of receiving holding means (41) which are held on the other ends (AE2) of the adhered sheet (AS) in the integrated body (WK); a tension applying means (42) for enabling the receiving holding means (41) for holding the other ends (AE2) of the adhered sheets (AS) making a relative movement for applying a specific tension on the outer edge of the adhered sheets (AS) including the end portions (AE1) held by the separation holding means (20); and, a conveying means (43) for conveying the integrated body (WK) held by the receiving holding means (41).

Description

Spacer and method

The present invention relates to a spacer device and a spacer method.

Conventionally, there has been known a spacer device for increasing the distance between a plurality of adherends adhered to an adhesive sheet (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2014-232843

[Problems to be Solved by the Invention]

However, in the conventional spacer device described in Patent Document 1, the dicing tape S (adhesive sheet) to which the wafer W (adherent body) is adhered is directed toward the frame-like member F like the frame member F. The drawing means 26 (retaining means for spacing) is adopted. Therefore, when there is no such frame-shaped member, the end of the adhesive sheet is drooped or shaken, and the end of the adhesive sheet cannot be reliably received. To the bad situation such as holding means.

An object of the present invention is to provide a spacer device and a spacer method capable of reliably holding an end portion of an adhesive sheet to a spacer holding means. [Means to solve the problem]

The present invention employs a configuration described in the claims. [Inventive effect]

According to the present invention, since the outer edge portion of the adhesive sheet including the end portion held by the holding means by the space is given a specific tension, and the integrated body is accepted to the holding means by the space, there is no sticking of the adhesive sheet. When the end portion sags and shakes, it is possible to reliably hold the end portion of the adhesive sheet to the holding means for the interval.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis in the present embodiment have orthogonal relationships. The X-axis and Y-axis are set as axes in a specific plane, and the Z-axis is set as an axis orthogonal to the specific plane. In addition, in this embodiment mode, the case is viewed from the direction of the arrow BD parallel to the Y axis as a reference, and when the direction is shown without a reference icon as a reference, "up" is the direction of the Z axis arrow , "Down" is the opposite direction, "Left" is the direction of the X-axis arrow, "Right" is the direction of the X-axis arrow, "Front" is the direction of the Y-axis arrow, and "Back" is the opposite direction.

The spacer device 10 of the present invention is provided with a plurality of spacer holding means 20, which are held on one surface AS1 of one of the adhesive sheets AS, and the ends of the adhesive sheet AS in the body WK of the plurality of adherends CP are adhered. AE1; spacing means 30, which is used to relatively move the distance between the ends AE1 of the adhesive sheet AS using the holding means 20 to apply tension to the adhesive sheet AS to increase the interval between the adherends CP; 40, which holds the integrated body WK and transfers the integrated body WK to the plural interval holding means 20; and the detection means 50, which is a photographing means such as a camera or a projector, or an optical sensor or an ultrasonic sensor Sensors and other sensors. In addition, the body WK, which is one embodiment of this embodiment, has a plurality of adherends CP adhered to the center of the square adhesive sheet AS in a square view.

The interval holding means 20 includes a lower holding member 21 supported by the interval means 30, a rotary motor 22 as a driving device supported by the lower holding member 21, and an upper holding member 23 supported by Its output shaft 22A.

The distance means 30 includes a linear motor 31 as a driving device, and a holding arm 32 that is supported by the slider 31A and holds the member 21 under the upper surface side support.

The receiving means 40 is provided with a plurality of receiving and retaining means 41 for retaining the other end portion AE2 of the adhesive sheet AS in the integrated body WK, and a tension applying means 42 for retaining the other end portion of the adhesive sheet AS. The receiving and retaining means 41 for AE2 performs relative movement to give a specific tension to the outer edge of the adhesive sheet AS including the end portion AE1 held by the retaining means 20 for the interval; and the conveying means 43 is used for conveying and receiving The integrated body WK held by the holding means 41. The receiving / holding means 41 includes four adsorption pads 41A capable of being sucked and held by a pressure reducing means (not shown) such as a pressure reduction pump or a vacuum aspirator, and a support arm 41B which supports each of the adsorption pads 41A. The tension applying means 42 includes four XY stages 42A as driving devices, and includes sliders 42B capable of moving in both the X-axis direction and the Y-axis direction. Each of the sliders 42B supports a support arm 41B. The conveying means 43 includes a multi-joint robot 43A composed of a plurality of robot arms, and a bottom frame 43C which is supported on its operation portion, that is, a front-end robot arm 43B, and supports four XY platforms 42A. In addition, the articulated robot 43A may be a so-called 6-axis robot capable of displacing the object supported by the front end robot arm 43B at any position and angle within its operating range. For example, it is disclosed in Japanese Patent Application Laid-Open No. 2016- 81974 articulated robot 111 and so on.

The operation of the above-mentioned spacer device 10 will be described. First, the spacer device 10 in which each component stands by at the initial position indicated by a solid line in FIGS. 1 (A) and (B), and a user of the spacer device 10 (hereinafter, simply referred to as a “user”) passes the operation panel. Or an unillustrated operating means, such as a personal computer, to input a signal to start automatic operation. In this way, the receiving and receiving means 40 drives the articulated robot 43A so that the suction pad 41A abuts on the other end AE2 of the adhesive sheet AS supplied to the body WK, which is one of the specific integrated supply positions (not shown) The pressure-reducing means (not shown) is driven to start adsorption and holding of the adhesive sheet AS. Next, the receiving means 40 drives the articulated robot 43A, and as shown by the solid line in FIG. 1 (B), the body WK adsorbed and held by the adsorption pad 41A is transferred above the holding means 20 for each interval, and then driven. The XY stage 42A moves the suction pad 41A to the diagonal direction of the adhesive sheet AS with a specific torque, and applies a specific tension to the outer edge portion of the adhesive sheet AS including the end portion AE1 held by the interval holding means 20.

At this time, the detection means 50 drives the camera and the like to detect the adherent CP, and the receiving means 40 drives the articulated robot 43A. According to the detection result of the detection means 50, the adherence CP is positioned as shown in the figure. In 1 (B), as shown by a two-dot chain line, the end portion AE1 of the adhesive sheet AS in a state where a specific tension is applied to the outer edge portion is placed on the lower holding member 21. The receiving means 40 is such that the central position of the entire adherend CP does not deviate from a specific position of the spacer device 10 (for example, the central position of the spacer device 10), or the outline of the entire adherend CP Positioning of the adherend CP is performed in such a manner that the edges or the contour edges outside the adherend CP become parallel to the X axis and the Y axis, respectively.

Thereafter, each rotation motor 22 is driven by the interval holding means 20, and when the lower holding member 21 and the upper holding member 23 hold the end portion AE1 of the adhesive sheet AS, the receiving means 40 stops driving the pressure reducing means (not shown) and releases it. After the adsorption and holding of the adhesive sheet AS, the articulated robot 43A is driven to return the adsorption pad 41A to the initial position. Next, the spacer means 30 drives the linear motors 31 to space the spacer holding means 20 apart from each other as shown in FIG. 1 (C), and applies tension to the adhesive sheet AS to increase the interval between the adherends CP. at this time. Each of the adherends CP may not be enlarged to a specific piece interval due to deformation of the adhesive sheet AS or the like. Then, according to the detection result of the detection means 50, the interval means 30 drives the linear motors 31 to move each interval individually by the holding means 20 so that the interval between the adherends CP becomes a specific interval.

Furthermore, when all the adherends CP or a specific amount of the adherends CP are removed from the adhesive sheet AS by a non-illustrated adherend removal means such as a pickup device or a conveying device, the spacer means 30 drives each linear After the motor 31 resets each slider 31A to the initial position, the rotation motor 22 is driven by the interval holding means 20 to return the upper holding member 23 to the initial position. Next, the operator or a conveyance means (not shown) removes the adhesive sheet AS remaining on the lower holding member 21 and repeats the same operation as described above.

When the spacer device 10 as described above is used, a specific tension is applied to the outer edge portion of the adhesive sheet AS including the end portion AE1 held by the spacer holding means 20, and the integrated body WK is imparted to the spacer holding means 20. Therefore, there is no case where the end portion AE1 of the adhesive sheet AS sags and shakes, and the end portion AE1 of the adhesive sheet AS can be surely maintained at the interval holding means 20.

The means and processes in the present invention are not limited in any way as long as they can perform the actions, functions, or processes described with respect to those means and processes, and they are not completely limited to only one implementation shown in the above-mentioned implementation types A type of structure or project. For example, if the holding means for space is composed of plural or singular, it can be held on at least one of the surface of the adhesive sheet and the surface of the other, and the plural adhered or divided to become the plural adhered When the end of the adhesive sheet in the integrated body is compared with the technical common sense at the time of application, if it is within its technical scope, it is not limited (even if it is the same by other means and engineering).

As shown in FIG. 2 (A), the spacer device of the present hairpin can be provided with a spacer device 10A provided with the following members: holding means 20 for spacing and abutment means 60, which are attached to a relatively adhesive sheet AS The adhered area CE to which the plurality of adherends CP are pasted is further outside, that is, the inside of the held area HE held by the holding means 20 abuts against the bonding sheet AS; and the spacing means 30A, It is to relatively maintain the distance between the ends AE1 of the adhesive sheet AS by the holding means 20 and the abutment means 60, and apply tension to the adhesive sheet AS to expand the interval between the adherends CP; 40. In the spacer device 10A, those having the same structure as the spacer device 10 and having the same function are given the same number as the spacer device 10, and the description of the structure is omitted to simplify the operation description.

The distance means 30A includes a direct drive motor 33 as a driving device supported on the bottom plate BP, and the lower holding member 21 is supported by the output shaft 33A. The abutment means 60 includes a cylindrical contact member 61 supported by the contact plate BP.

The spacer device 10A is the same as the spacer device 10, and the receiving means 40 drives the articulated robot 43A, the pressure reducing means (not shown) and the XY platform 42, as shown by the two-point chain line in FIG. 2 (A). The outer edge portion of the adhesive sheet AS that is sucked and held by the suction pad 41A is given a specific tension, and the end portion AE1 of the adhesive sheet AS is placed on the lower holding member 21. After that, each of the rotary motors 22 is driven by the interval holding means 20. As shown in FIG. 2 (B), after the lower holding member 21 and the upper holding member 23 hold the end portion AE1 of the adhesive sheet AS, the interval means 30A drives each direct drive. The type motor 33 lowers the interval holding means 20 and relatively moves the interval holding means 20 and the abutment means 60 to apply tension to the adhesive sheet AS to increase the interval between the adherends CP. Then, when the adherend CP is removed from the adhesive sheet AS by the unillustrated adherend removal means, each means drives each driving machine to reset each component to the initial position, and then removes and retains the remaining After the bonding sheet AS on the member 21 is repeated, the same operations as described above are repeated.

Even with such a spacer device 10A, the same effect as that of the spacer device 10 can be obtained.

The spacer holding means 20 may have a configuration in which the end surface AE1 of the plurality of adherends CP is adhered to the other surface AS2, or the surfaces of both the surface AS1 and the other surface AS2 are adhered to each other. Even if it is a structure that holds the end portion AE1 of the bonding sheet AS by a mechanical chuck or a chuck cylinder, a coulomb force, a cement, an adhesive, a magnetic force, a cypress, and a machine, the AE1 can be held at an interval. In the case of the device 10, even if the interval holding means 20 moving to the right is set as one unit, and the interval holding means 20 moving to the left is set as two units, It may be configured by three or more units that are moved to the right, left, and other directions, for example. When the interval holding means 20 is the spacer device 10A, even if it is one, it may be two or more.

The spacing means 30 and 30A may be singular even if they are not plural. In this case, for example, even if the spacing device 10 is provided with two sliders of one linear motor, and one holding means 20 is used to support the spacing, the space is expanded. A configuration in which the adherends CP are spaced apart from each other, and a configuration in which the interval between the adherends CP are only enlarged in one axial direction (for example, the X-axis direction or the Y-axis direction) may be used. The spacing means 30 may have a configuration in which the distance between each other (for example, the X-axis direction, the Y-axis direction, and other axis directions) is increased in three or more axes. For example, it may be a holding means for moving a plurality of intervals in the X-axis direction. The structure in which the 20 moves in the Y axis direction (the structure in which the plural intervals moving in the Y axis direction moves in the X axis direction by the holding means 20) can increase the interval between the adherends CP, even if it cannot be moved The structure in which the CPs are spaced apart from each other may be a specific interval. Even if the spacer means 30A stops or moves the spacer holding means 20, the abutment means 60 is moved, and the spacer holding means 20 and the abutment means 60 are moved relative to each other to increase the tension on the adhesive sheet AS. The adherends CP may be spaced apart from each other. The interval means 30 and 30A may drive the linear motor 31 and the direct drive motor 33 even if the operator operates a button or an operation lever. In this case, for example, even if it is configured to display the detection result by the detection means 50 on the screen or In a display such as a detector, the distance between the adherends CP is set to a specific interval by the detection result displayed on the display, or the overall collective shape of each adherent CP is relative to the overall collective shape of the substrate. To form a similar relationship, the operator may drive the linear motor 31 and the direct drive motor 33.

Even if the receiving means 40 does not perform positioning of the adherend CP, the end portion AE1 of the adhesive sheet AS in a state where a specific tension is applied to the outer edge portion may be placed on the lower holding member 21. The tension applying means 42 may apply a specific tension only to the X-axis direction, the Y-axis direction, or other directions to the outer edge portion of the adherend AS. Even if the torque is not specified, the adsorption pad 41A is moved by a specific distance to adhere the adhesive. It is also possible to apply specific tension to the outer edge portion of the sheet AS, even if the suction pad 41A is moved to a direction deviating from the diagonal direction of the adhesive sheet AS, even if it is not plural but singular, in this case, for example, even if It is set as a structure in which two sliders of a linear motor are respectively provided with a set of holding support means 41 for receiving and receiving, and a specific tension is given to the outer edge portion of the adhesive sheet AS, and only in a uniaxial direction (for example, X (The axial direction or the Y-axis direction, etc.) may be configured to increase the distance between the adherends CP. The holding means 41 for receiving and receiving is a holding means such as a mechanical chuck or a chuck cylinder, a coulomb force, a cement, an adhesive, a magnetic force, a cypress, and a machine for holding the other end of the adhesive sheet AS. The structure of AE2 is also acceptable. The tension applying means 42 may drive the XY stage 42A even if the operator operates a button or an operation lever. In this case, for example, even if a display configured on a screen or a detector displays the torque output from the XY stage 42A, and the composition is displayed, When the torque value of the display becomes a specific value, or the movement amount of the slider 42B of the XY platform 42A is displayed on the display, and the movement amount displayed on the display becomes a specific movement amount, the operator makes the XY platform 42A Drive is also available. The specific tension given to the outer edge portion of the adhesive sheet AS by the receiving means 40, if the tension is more than the degree that the outer edge portion of the adhesive sheet AS does not loosen, the user can arbitrarily determine the value.

The detection means 50 may be, for example, the eyes of an operator. In this case, in order to provide the eyes of the operator with specific tension to the outer edge portion of the adhesive sheet AS, or perform the position of the adherend CP and the spacer device. The positioning of 10 makes the specific distance between the adherent CPs to each other, or makes the overall collective shape of each adherent CP similar to the overall collective shape of the substrate, even if it constitutes an operation driving button or operation. It is also possible to drive the XY stage 42A, the linear motor 31, and the direct-drive motor 33 by using a rod or the like, even if none of the spacer devices 10 and 10A of the present invention is provided.

The abutting means 60 may be a rectangular tube shape or an elliptical tube shape, or a contact member 61 having another shape such as a column, a corner column, or an elliptical column.

Even if the spacer device 10 is configured to drive the XY stage 42A by the first receiving means 40, and after applying a specific tension to the outer edge portion of the adhesive sheet AS only in the X-axis direction, the spacer holding means 20 drives the rotary motor 22 only in the X-axis direction The arrangement interval holds the end portion AE1 of the adhesive sheet AS by the holding means 20, and thereafter, similarly, the outer edge portion of the adhesive sheet AS is given a specific tension only in the Y-axis direction, and then is aligned only in the Y-axis direction. The interval holding means 20 may hold the end portion AE1 of the adhesive sheet AS (in this case, even if X and Y are opposite). In the case where the adhesive strength of the adhesive sheet AS is reduced by a specific energy, even before the adherend CP is removed from the adhesive sheet AS by the unpatterned adherend removal method, the specific energy It is also possible to reduce the adhesive force of the adhesive sheet AS by the energy application method. In addition, even if such an energy imparting means is an electromagnetic wave of a so-called wavelength (for example, X-rays or infrared rays), a heated or cooled gas, a liquid, or the like can be applied to the adhesive sheet AS as energy, Any energy may be used as long as it is capable of reducing the adhesive force of the adhesive sheet AS in accordance with the configuration of the adhesive sheet AS.

The materials, types, shapes, etc. of the adhesive sheet AS and the adherend CP in the present invention are not particularly limited. For example, the adhesive sheet AS or the adherend CP may have a polygonal shape such as a circle, an oval, a triangle, or a quadrangle, and other shapes may be used. The adhesive sheet AS may have pressure-sensitive adhesiveness, heat-sensitive adhesiveness, or the like. Adhesive type is also available. Furthermore, even if the adhesive sheet AS is, for example, a single layer having only an adhesive layer, one having an intermediate layer between the substrate and the adhesive layer, and three or more layers including a cover layer on the substrate And, the so-called double-sided adhesive sheet that can peel the substrate from the adhesive layer is also acceptable, so that the double-sided adhesive sheet has a single layer or a multilayer intermediate layer, or a single layer or a multilayer without an intermediate layer. Yes. Moreover, as the adherend CP, even information recording substrates such as food, resin containers, silicon semiconductor wafers or compound semiconductor wafers, semiconductor wafers, circuit boards, optical discs, glass plates, steel plates, A single object such as pottery, wood, resin, etc. may be used, even if it is a composite formed of two or more, any type of component or article can be targeted. In addition, even if the adhesive sheet AS is replaced with functional and usable terms, such as information recording labels, decorative labels, protective sheets, dicing tapes, die-bonding films, die-bonding tapes, recording layer forming resin sheets, etc. Any sheet, film, tape, etc. are also possible. The adherend CP may be plural in the adhesion sheet AS in advance, and even when external force is applied by the interval means 30, 30A, other mechanisms, or labor, it is divided into plural numbers, and it is divided into existence on the adhesion sheet AS. A plurality may be used. As the to-be-adhered object CP divided in this way, for example, a semiconductor wafer or a substrate is irradiated with a laser, and a fragile fragile layer such as a line or a grid is formed on the semiconductor wafer or the substrate. When the tension is applied to the adhesive sheet AS, the semiconductor wafer or the substrate is sometimes directly or indirectly applied with an external force, and when it is singulated, it becomes a plurality of adherends CP. For the glass plate, etc., firstly, the resin or the glass plate is formed into a cut line such as a line or a lattice shape that does not penetrate the front and back of the groove or cut point, and the tension is sometimes applied to the adhesive sheet AS. From time to time, when external force is directly or indirectly applied to a resin, a glass plate, or the like, it is singulated into a plurality of adherends, such as CP, without any limitation.

In addition to the driving machines in the above implementation modes, in addition to electric machines such as rotary motors, direct-drive motors, linear motors, single-axis robots, articulated robots, cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, etc. Actuators and the like may be combined directly or indirectly.

10, 10A‧‧‧ Spacer

20‧‧‧ Interval holding means

30, 30A‧‧‧ Interval Means

40‧‧‧ Means of Grant

41‧‧‧ Receiving means

42‧‧‧ Means of giving tension

43‧‧‧handling means

60‧‧‧Arrival means

AE1‧‧‧End

AE2‧‧‧Other end

AS‧‧‧Adhesive sheet

AS1‧‧‧ surface

AS2‧‧‧ surface of the other party

CE‧‧‧ Adhesive area

CP‧‧‧ Adhesive

HE‧‧‧ holding area

WK‧‧‧One

Fig. 1 (A) is a top view of a spacer device related to an embodiment of the present invention. (B) and (C) are side views of (A), and their operation explanatory diagrams. (2) (A) and (B) are explanatory diagrams of other examples of the present invention.

Claims (4)

A spacer device comprising: a plurality of retaining means for retaining, which is held on at least one of the surface of one of the adhesive sheets and the surface of the other, and has a plurality of adherends or is divided into a plurality of adhered pieces; An end portion of the adhesive sheet in one of the objects; and a space means, which relatively moves the interval holding the end portion of the adhesive sheet by the holding means, and applies tension to the adhesive sheet to make the above The distance between the adherends is enlarged. It also has a means of receiving, which is to hold the above-mentioned one body and to receive the one-piece to the above-mentioned plural holding means; The other end portion of the adhesive sheet held in the above-mentioned one body; the tension applying means is a relative movement of the receiving and holding means for holding the other end of the adhesive sheet, and the holding means is used for holding the interval. The outer edge of the above-mentioned adhesive sheet including the end portion is given a specific tension; Holding means for holding the above-described one was. A spacer device comprising: a plurality of retaining means for retaining, which is held on at least one of the surface of one of the adhesive sheets and the surface of the other, and has a plurality of adherends or is divided into a plurality of adhered pieces; The end of the adhesive sheet in one of the objects; abutment means, which is more outside than the adhered region of the adhered to which the plurality of adherends are pasted in the adhesive sheet, that is, used in the above-mentioned interval The inside of the holding area held by the holding means abuts against the adhesive sheet; and the spacing means makes the holding means and the abutting means holding the ends of the adhesive sheet relatively moved relative to each other, and The adhesive sheet gives tension to expand the interval between the adherends, and has a receiving means, which holds the integrated body and receives the integrated body to the interval holding means. The receiving means includes: The holding means is provided to hold the other end of the adhesive sheet in the above-mentioned one body; the tension applying means is to hold the above The above-mentioned holding means for receiving and receiving at the other end of the adhesive sheet are relatively moved to give a specific tension to the outer edge of the above-mentioned adhesive sheet including the end held by the holding means for the interval; and a conveying means for conveying The above-mentioned integrated body held by the above-mentioned receiving and holding means. A spacing method, comprising: (1) a holding method for spacing, which is held on at least one of the surface of one of the adhesive sheets and the other of the surfaces by a plurality of holding methods using a plurality of intervals; The end portion of the adhesive sheet in the body to be divided into a plurality of adherends; and the interval engineering, which is to relatively move the above-mentioned interval holding the end portion of the adhesive sheet with a holding means to perform relative movement on the adhesive The sheet is given tension to expand the distance between the adherends, and further has a receiving process, which holds the integrated body and transfers the integrated body to the plural interval maintaining means. The receiving process includes: The maintenance process is to maintain the other end portion of the adhesive sheet in the above-mentioned unit by a plurality of receiving and retaining means; the tension imparting process is to maintain the other end portion of the adhesive sheet by the above-mentioned retaining means Relative movement is performed to specify the outer edge portion of the adhesive sheet including the end portion held by the holding means by the interval Force; and handling works, which conveying system by giving or receipt of the above-described composition is integrally holding said holding means. A spacing method, comprising: (1) a holding method for spacing, which is held on at least one of the surface of one of the bonding sheets and the other of the surfaces by the holding method of the spacing, and a plurality of adherends or divisions are adhered; The end of the adhesive sheet in the body of the plurality of adherends; and the interval engineering, which is to make the outer side of the adherend adhesion area where the plurality of adherends are pasted in the adhesive sheet, That is, the abutment means that abuts on the adhesive sheet inside the held region that is held by the aforesaid retaining means and the space maintaining means that holds the ends of the aforesaid adhesive sheet are relatively moved to the adhesion. The sheet is given tension to expand the distance between the adherends, and further has a receiving means, which holds the integrated body and imparts the integrated body to the above-mentioned holding means for interval. The receiving process includes: Retention engineering, which is the other end of the adhesive sheet held in the above-mentioned unit by a plurality of receiving and retaining means; the tension imparting process It is to relatively move the receiving and retaining means for receiving and holding the other end of the adhesive sheet, and to give specific tension to the outer edge of the adhesive sheet including the end, which is held by the retaining means for the interval; A process for conveying the above-mentioned integrated body held by the receiving and retaining means.