TW201213850A - Reduced capacitance display element - Google Patents

Abstract

A display element, such as an interferometric modulator, comprises a transparent conductor configured as a first electrode and a movable mirror configured as a second electrode. Advantageously, the partial reflector is positioned between the transparent conductor and the movable mirror. Because the transparent conductor serves as an electrode, the partial reflector does not need to be conductive. Accordingly, a greater range of materials may be used for the partial reflector. In addition, a transparent insulative material, such as a dielectric, may be positioned between the transparent conductor and the partial reflector in order to decrease a capacitance of the display element without changing a gap distance between the partial reflector and the movable mirror. Thus, a capacitance of the display element may be reduced without changing the optical characteristics of the display element.

Description

201213850 VI. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The field of the invention relates to microelectromechanical systems (MEMS). [Prior Art] Microelectromechanical systems (MEMS) include micromechanical components, actuators, and electronic devices. Micromechanical components can produce one type of MEMS device by using deposition, etching, and/or other micromachining methods that etch away portions of the substrate and/or deposited material layers or add layers to form electrical and electromechanical devices. It is called an interference modulator. As used herein, the term interferometric modulator or interferometric optical modulator refers to a device that selectively absorbs and/or reflects light by using the principle of optical interference. In some embodiments, the interference modulator can include a pair of conductive plates, one or both of which can be transparent and/or reflective, and once the appropriate electrical signal is applied The plate can comprise a stabilizing layer deposited on the substrate, and the other plate can comprise a metal film separated from the stabilizing layer by an air gap. As described in more detail herein, the position of one plate relative to the other plate can change the optical interference of light incident on the interferometric modulator. These devices are widely used and are useful in the art to utilize and/or modify the characteristics of these types of devices. Therefore, the features of such devices can improve existing products and develop new products that have not yet been developed. SUMMARY OF THE INVENTION The system and method of the present invention each have a plurality of aspects, and aspects thereof form the cause of the desired attribute. Without limiting the reading of the invention in the μ y' u, the reading of the M is more pronounced. 154176.doc 201213850 • After the discussion, and especially in the reading title, specifically After the sections of the "embodiments", it will be appreciated that the features of the present invention are how to provide advantages over other display devices. In an embodiment, the display element includes a substantially transparent conductive layer, a portion of the reflective insulator, and a movable reflective layer, the partially reflective insulating system being positioned between the conductive layer and the movable reflective layer, wherein one is applied to The voltage between the conductive layer and the movable reflective layer causes the movable reflective layer to move. In another embodiment, a method of fabricating a display device includes forming a substantially transparent conductive layer, forming a portion of a reflective insulator, and forming a movable reflective layer, the partially reflective insulating system being positioned on the conductive layer and the conductive layer Between the moving reflective layers, a voltage applied between the conductive layer and the movable reflective layer causes the movable reflective layer to move. In another embodiment, a display element includes a member for conducting 'the conductive member is substantially transparent; a member for partial reflection, the Φ portion of the reflective member is insulated; and a movable portion for reflection A member, wherein the partially reflective member is positioned between the conductive member and the movable reflective member. A voltage applied between the conductive member and the movable reflective member causes the movable reflective member to move. In another embodiment, a display system includes a display that includes a plurality of display elements. In one embodiment, each display element includes a substantially transparent conductive layer, a portion of a reflective insulator, and a movable reflective layer, the partially reflective insulating system being positioned between the conductive layer and the movable reflective layer, wherein one A voltage applied between the conductive layer and the movable reflective layer 154176.doc 201213850 causes the movable reflective layer to move. In one embodiment, the display system further comprises: - a processor in electrical communication with the display, the processor configured to process the seek data, and to communicate with the processor Memory device. In another embodiment, the display element comprises: a substantially transparent conductive layer, and a portion of the reflective layer, wherein the dielectric layer is positioned between the far conductive layer and the partially reflective layer; A movable reflective layer, wherein a voltage applied between the conductive layer and the movable reflective layer causes the movable reflective layer to move. In another embodiment, a display element includes: a member for conducting electricity, the conductive member is substantially transparent; a member for insulating; and a member for partially reflecting 'where the insulating member is positioned Between the conductive member and the partially reflective member; and a movable member for reflection, wherein a voltage applied between the conductive member and the movable reflective member causes the movable reflective member to move. In another embodiment, a method of fabricating a display device includes: forming a substantially transparent conductive layer; forming a dielectric layer; forming a portion of the reflective layer, wherein the dielectric layer is positioned between the conductive layer and the portion of the reflective layer Between the layers; and forming a movable reflective layer', a voltage applied between the conductive layer and the movable reflective layer causes the movable reflective layer to move. In another embodiment, a display system includes a display that includes a plurality of display elements. In one embodiment, each display element comprises: a substantially transparent conductive layer; a dielectric layer; a portion of the reflective layer, wherein the dielectric layer is positioned between the conductive layer and the partially reflective layer; and 154176 .doc 201213850 A movable reflective layer 'one of the voltages applied between the conductive layer and the movable reflective layer causes the movable reflective layer to move" - in an embodiment, the display system further comprises: a display A processor for electrical communication, the processor configured to process image data; and a memory device electrically coupled to the processor. In another embodiment, a display element includes: a substantially transparent conductive layer; a dielectric layer; a portion of the reflective layer, wherein the dielectric layer is positioned

Between the 3 Xuan conductive layer and the partially reflective layer; and - the movable reflective layer, 1 the movable reflective layer is separated from the partially reflective layer by a gap, wherein the display element is in an unsteady state, the display The component presents a white color to the viewer, and when in a released state, the display element presents a non-white color to the viewer. [Embodiment] The following detailed description refers to certain specific embodiments of the invention. However, the invention can be implemented in a multitude of different ways. In the present specification, reference is made to the drawings, in which like reference numerals It will be apparent from the following description that the present invention can be implemented in any apparatus that is displayed in a moving (e.g., video) or stationary (e.g., still image) and text or picture format. More specifically, 'we expect that such embodiments can be applied to or in conjunction with various electronic device devices such as, but not limited to, mobile phones, wireless devices, personal data assistants (PM), handheld or portable Computer, GPS receiver/navigator, camera, purchased player, camcorder, game console, watch, clock, calculator, TV monitor, flat panel display, computer monitor, car display (example 154176.doc 201213850 For example, odometer display, etc., cockpit control mode and / or display, camera view display (for example, car / rear view camera display), electronic display, electronic billboard or symbol, projector, building structure , packaging and aesthetic structure (for example, a piece of jewelry on the shadows ~ like not shown). Pure (10) devices having similar construction to the devices described herein can also be used in non-display applications such as electronic switching devices. w Description - An embodiment of an interference modulator display that includes a dry (four) listening component. In such devices, the pixels are in a bright or dark state. In the bright "open" or "on" state, the display component reflects most of the incident visible light to the user. When in the dark ("off" or "close") state, the display component is almost The incident visible light is reflected to the user. Depending on the embodiment, the light reflection properties of the "open" and "off" states can be reversed. The mems pixels can be configured to primarily reflect the selected color, allowing for the display of black and White shows color. Figure 1 is an isometric view depicting two adjacent pixels in a series of pixels of a visual display, each of which includes a MEMS interferometric modulator. In some embodiments, the interferometric modulation The transducer display includes a column/row array of one of the interference modulators. Each of the interference modulators includes a pair disposed at a variable and controllable distance from each other to form an optical resonant cavity having at least one variable size. a reflective layer. In one embodiment, one of the 'reflective layers' can be moved between two positions. In the first position (referred to herein as a relaxed position), the movable reflective layer is positioned. At a relatively distant distance from a fixed portion of the reflective layer. In the second position (referred to herein as the actuated position), the movable reflective layer is positioned closer to the partially reflective layer. 154176.doc -8 - 201213850 "The human illuminates the interference constructively or interferes with the position of the movable reflective layer" to produce an overall reflective state or a non-reflective state for each pixel. The portion of the array includes two adjacent interferometric modulators 12a and 12b. In the left interfering modulator (3), the movable reflective layer A is illustrated at a relaxed position from the optical stack 16a a predetermined distance, the optical stack Including the p-reflective layer. In the interference modulator (3) on the right, the movable reflective layer 14b is illustrated at an actuating position adjacent to the optical stack 16b. Optical stacks 16a and 16b as referred to herein (collectively referred to as The optical stack Μ) typically comprises a plurality of fused layers, which may include an electrode layer such as indium tin oxide (ITO), a partially reflective layer such as chrome, and a transparent dielectric. Thus, the optical stack 16 is Conductive, partially transparent, and partially reflective, and can be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. In some embodiments, the layers are patterned into parallel stripes, and The column electrodes in the display device can be further described as follows. The movable repair layers 14a, 14b can be formed as a deposited metal layer or a plurality of deposited metal layers (orthogonal to the column electrodes 16a, 16b) deposited on top of the pillars 18 and A series of parallel strips of intervening sacrificial material deposited between the pillars 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum can be used for the reflective layer 14, and the stripes can form the row electrodes in the display device. As shown by the pixel 12a in Fig. 1, the cavity 19 is held between the movable reflective layer 14a and the optical stack 16a when no voltage is applied, and the movable reflective layer 154176.doc 201213850 is in a mechanically relaxed state. However, when a potential difference is applied to the selected column and row, the capacitor formed at the intersection of the column of the corresponding pixel and the row electrode is electrically and electrostatically attracted to the electrodes. If the power is sufficiently high, the movable reflective layer 14 is deformed and forced against the optical stack μ. As described for pixel m on the right side, the dielectric layer (not illustrated in this figure) within optical stack 16 prevents shorting and separates the separation distance between layers 14 and 16. This behavior is the same regardless of the polarity of the applied potential difference. In this manner, the column/row actuation of the reflective and non-reflective pixel states can be controlled in many respects similar to the column/row actuations used in conventional LCD and other display technologies. Figure 2 to Figure XI - an exemplary method and system for using an interferometric modulator array in a display application. 2 is a system block diagram illustrating an embodiment of an electronic device in accordance with aspects of the present invention. In an exemplary embodiment, the electronic device includes a processor 21, which can be any general purpose single or multi-chip microprocessor, 'ARM, Pentiu, Pentium II, pentiumin@, -IV > Pentium® Pro. 8051 MIPS® ^ Power PC® . ALPHA® or any-specific microprocessor such as a digital signal processor, microcontroller or programmable gate array. Processors as conventional in the art can be configured to execute - or multiple software modules. In addition to executing the operating system, the processor can be configured to execute one or more software applications, including a web browser, a phone application, an email program, or any other software application. In one embodiment, processor 21 is also configured to communicate with the array driver (4). In the embodiment, the array driver 22 includes a column driver circuit 24 and a row driver circuit % for providing signals to the display 154176.doc -10·201213850^car or face (4). The section of the modulation n is determined by the (four) line. For the MEMS Intervention Agency:, δ, column/row actuation protocol can use the equipment described in the figure = green. For example, a hard potential difference is required to make the movable: self-gas, relax state to an actuated state. However, when the electric dust is reduced from this value, the movable layer maintains its state when the voltage drops below the duty. In the example implementation of =3, the movable layer is completely loose until the electric material is low to small (four) dogs. Thus, there is a range of electricity houses (the range t illustrated in Figure 3 is about 3 volts to 7 volts), the towel is present - the window of the applied electricity house, in which the device can be stabilized in loose or In the actuated state. This window is referred to herein as a "hysteresis window, or "stabilization window." For a display array having the hysteresis feature of Figure 3, the column/row actuation protocol can be designed to be in the column gating process , the pixels in the gate row to be & h >, west 4 1 are exposed to a voltage difference of about 1 volt, and the pixel to be relaxed is exposed to a voltage difference close to zero volts. After the strobe' The pixel is exposed to a steady-state voltage difference of about 5 volts 'to keep the pixel in any state where the column strobe is placed. After being written 'in this example, every - pixel experienced - at 3 volts to 7 volts &quot The potential difference in the "stability window". This feature allows the pixel illustrated in Figure 1 to be designed to settle in a pre-existing actuated or released state under the same voltage application. Since each pixel of the interferometric modulator in an actuated or relaxed state is substantially a capacitor formed by a fixed and moving reflective layer, the steady state can be maintained at a voltage within the hysteresis window with little Power dissipation. If the applied potential is fixed, substantially no current flows into the pixel. 154176.doc 201213850 In a typical application, a display frame can be formed by determining a row electrode group according to the desired pixel group in the first column. Subsequently, a column pulse is applied to the m electrode to actuate the pixel corresponding to the row line. The determined row electrode group is then changed to correspond to the desired actuation pixel group in the second column. Subsequently, a pulse is applied to the column 2 electrodes to actuate the appropriate pixels in column 2 in accordance with the determined row electrode. Column! The pixel is not affected by the column 2 pulse and remains in the state set by the column m period (4). The above process can be repeated in a sequential manner for the (four) sequence to generate a frame. In general, (iv) (four) μ (four) # and/or update the frame by continuously repeating the process at a desired number of frames per second. Various types of protocols for driving the columns and row electrodes of the pixel array to produce a display frame are also well known and can be used with the present invention. Figures 4, 5A and 5B illustrate a possible actuation protocol for creating a display frame on the 3χ3 array of Figure 2. Figure 4 illustrates a set of possible row and column voltage levels that can be used to display the pixels of the hysteresis curve of Figure 3. In the embodiment of FIG. 4, actuating the pixels involves setting the appropriate row to _Vbias and setting the appropriate column to +ΔΥ, which can be divided into (4) by _5 volts and +5 volts. The appropriate row is set to +¥1)1^ and the appropriate column is set to the same +AV to achieve a zero volt potential difference across the pixel. The columns in which the column voltage is maintained at zero volts, regardless of whether the row is or -Vbias, the pixels are stable in either of their original states. As also illustrated in FIG. 4, it will be appreciated that a voltage of a polarity opposite to the voltages described above can be used, for example, actuating a pixel can involve setting the appropriate row to +Vbias and setting the appropriate column to - AV. In this embodiment, the release of 154176.doc -12 - 201213850 pixels is achieved by setting the appropriate row to _Vbias and setting the appropriate column to the same -AV to produce a zero volt potential difference across the pixel. As also illustrated in FIG. 4, it will be appreciated that a voltage of opposite polarity to the voltages described above can be used, for example, actuating a pixel can involve setting the appropriate row to +Vbias ' and setting the appropriate column to _ Δν ^ In this embodiment, the release of the pixel is achieved by setting the appropriate row to _Vbias and setting the appropriate column to the same -Δν to produce a zero volt potential difference across the pixel.

Figure 5A is a timing diagram showing the series and row signals applied to a series of 3x3 arrays of Figure 2, which results in the formation of the display arrangement illustrated in Figure 5, wherein the actuation pixels are non-reflective. The pixels can be in either state before writing the frame illustrated in Figure 5, and in this example, all columns are 0 volts and all rows are +5 volts. At these applied voltages, all pixels are stable at It is currently in an actuated or relaxed state. In the frame of Figure 5, the pixels (u), 〇, 2), (2, 2), and (3, 3) are actuated. To achieve this, during row "line time(1) plus the), set row! and row 2 to 5 volts, and set row 3 to (4) volts. Since all pixels remain at 3 volts to 7 volts stabilizes the window A, so the above operation does not change the state of any pixel. Then, using a self-increase to 5 volts and back to zero volts, the pulse strobe column is activated and 7 pixels and slack (1, 3) Pixels. Other pixels in the array are not subjected to / need to be set column 2' to set row 2 to -5 volts, and row 1 : butyl ... volts. Subsequently, the same strobe-actuated pixel applied to column 2 (2 2) and other pixels of Qin (10) and ... array are not affected. The error is set to line 5 and line 3 to 5 volts and line (four) to +5 volts 154I76.doc 201213850 Set column 3. If ms λ is & - *, J As shown in Figure 5A, the strobe of column 3 sets the column 3 pixels. After writing the frame, the column potential is zero and the row potential can be maintained at +5 or • 5 volts, and then stabilize the display from which the map is arranged. It should be understood that the same procedure can be used for tens or hundreds of columns and row arrays. It will be appreciated that the timing, sequence, and dust levels used to perform the column and row actuations can vary widely within the basic principles outlined above, and the above examples are merely illustrative, any-actuation voltage methods. It can be used in conjunction with the systems and methods described herein. Figures 6A and 10(10) are system block diagrams illustrating an embodiment of a display device 4. The display device 40 can be, for example, a cellular or mobile phone. The same components of the device 40 or minor variations thereof also illustrate various types of display devices, such as televisions and portable media players. The display device 40 includes a housing 41, a display 3, an antenna 43, a speaker 45 input device 48, and - Microphone 46. The outer casing 41 is typically formed from any of a number of manufacturing methods that are well known in the art, including, but not limited to, injection molding and vacuum forming. Further, the outer casing may be constructed of any of a variety of materials. The materials include, but are not limited to, plastic, metal, glass, rubber, ceramics, or combinations thereof. In one embodiment, the outer casing 41 includes a movable portion ( The portion may be interchanged with different colors or other movable portions containing different numbers, pictures or symbols. The display 3 of the exemplary display device 40 may be any of a variety of displays including the bi-stable display described herein. In other embodiments, display 30 includes a flat panel display such as a plasma, OLED, STN LCD or TFT LCD as described above or includes a non-flat panel display such as 154176.doc • 14-201213850 CRT or other picture tube The device 'is well known to those skilled in the art. However, for the purposes of describing the present embodiment, the display 3 includes an interferometric modulator display as described herein. FIG. 6B schematically illustrates components of one embodiment of an exemplary display device 40. The illustrated exemplary display device 4 includes a housing 4 and may include additional components at least partially enclosed within the housing. For example, in an embodiment, the exemplary display device 40 includes a network interface 27 that includes an antenna 43 coupled to the transceiver 47. Transceiver 47 is coupled to processor 21, which is coupled to conditioning hardware 52. The adjustment hardware w can be configured to adjust the signal (e.g., 'filter signal'). The adjustment hardware 52 is connected to the speaker 45 and the microphone 46. Processor 21 is also coupled to input device 48 and driver controller 29. The driver controller 29 is lightly coupled to the frame buffer 2 and coupled to the array driver 22, which is also coupled to the display array 30. Power source 50 provides power to all components as needed for the design of a particular exemplary display device 40. The network interface 27 includes an antenna 43 and a transceiver 47 such that the exemplary display device 40 can communicate with one or more devices via a network. In one embodiment, the network interface 27 may also have some processing power to reduce the processor 21 requirements. Antenna 43 is an antenna known to those skilled in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives radio frequency (RF) signals in accordance with the IEEE 8 〇 2 丨 i standard (including IEEE 802.11 (a), (b) or (g)). In another embodiment, the antenna transmits and receives RF signals in accordance with the Bluetooth standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS or other well-known signals for communication within the wireless cellular telephone network. The transceiver 47 preprocesses the 154176.doc 15 201213850 signals received from the antenna 43 such that the signals can be received and further processed by the processor 21. The transceiver 47 also preprocesses the signals received from the processor 21 such that the signals can be transmitted from the exemplary display device 4 via the antenna 43. In an alternate embodiment, the transceiver 47 can be replaced by a receiver. Alternatively, instead of the embodiment, the network interface 27 can be replaced by an image source to store or generate material (4) to be processed (10). For example, the image source may be a digital video disc (DVD) or a hard disk drive containing image data, or a software module for generating image data. The processor 21 typically controls the overall operation of the exemplary display device 4. The processor 21 receives the compressed image data, such as from the network interface 27 or the image source, and processes the data into raw image data or into a format that is easily processed into the original image data. The processor 21 then sends the processed data to the drive controller 29 or the frame buffer 28 for storage. Raw material is usually used to identify information about image features at each location within the image. By way of example, such image features may include color, saturation, and gray levels. In one embodiment, processor 21 includes a microprocessor, cpu or logic unit to control the operation of exemplary display device 4. The adjustment hardware 52 typically includes an amplification state and a filter for transmitting signals to the speaker 45 and receiving signals from the microphones. The conditioning hardware 52 can be a discrete component of an exemplary display device or can be incorporated into the processor 21 or other components. The drive controller 29 directly acquires the raw material image data generated by the (10) from the processor 21 or from the frame buffer 28, and reformats the original image data as appropriate to transfer to the array driver 22 at a high speed. Specifically, the drive controller 29 reformats the original image data into a data stream having a format similar to the raster 154176.doc 201213850 so that there is a time sequence suitable for scanning the entire display array 30. The drive hacker 29 then sends the formatted information to the array driver 22. Although the driver is associated with the system control circuit (IC), which is often used as an independent integrated circuit (IC), the control unit can be implemented in a number of ways. The controllers can be embedded in the processor 21 as hardware embedded in the processor 21 or fully integrated with the array driver 22 in hardware.

▲ pass Φ 'Array driver 22 receives the formatted information from the driver controller and reformats the video data into a set of parallel waveforms that are applied multiple times per second to the "pixel matrix from the display. And sometimes thousands of leads. In an embodiment, the driver controller 29, the array driver 22, and the display panel are used for any of the types of displays described herein. For example, in the example only, the driver controller 29 is a conventional display controller or a bistable display controller (e.g., an 'interference modulator controller'). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an 'interferometric modulator display). In the embodiment, the driver controller 29 is integrated with the array driver 22 as a body. This embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In another embodiment, the 'display column 3' is a typical display array or a bi-stable display array (eg, a display including an array of interferometric modulators). The input device 48 allows the user to control the exemplary display device 4 () operation. In one embodiment, the input device 48 includes a keypad (such as qwerty 154176.doc 17 201213850 switch, a touch screen, microphone 46 for - for example keyboard or telephone keypad), a button, - a pressure Sensitive film or heat sensitive film. In an embodiment, an input device of the display device 40 is shown. When microphone 46 is used to input data to the device, the user can provide audio commands to control the operation of exemplary display device 40. The power source 50 can include various energy storage devices well known in the art. For example, in the embodiment, the power source 50 is a rechargeable battery such as a chrome-plated battery or a clock-ion battery. In another embodiment, the power source is a renewable energy source, a capacitor, or a solar cell including a plastic solar cell and a solar cell coating. In another embodiment, the power source 5 is configured to receive energy from a wall outlet. In some embodiments, as described above, control programmability exists in a driver controller that can be located at several locations in an electronic display system. In some cases, control can be programmed to exist in array driver 22. Those skilled in the art will appreciate that the above optimizations can be implemented in any number of hardware and/or software components and in a variety of configurations. The structural details of the interference modulator operating in accordance with the principles described above can vary significantly. For example, Figures 7A-7E illustrate five different embodiments of the movable reflective layer 14 and its supporting structure. Figure 7A is a cross-sectional view of the embodiment of Figure i with strips of metallic material 14 deposited on orthogonally extending supports 18. In Fig. 7B, the movable reflective layer 14 is attached to the end corners of the support only by means of the tether 32. In Figure 7 (wherein, the movable reflective layer 14 is suspended from a deformable layer 34 which may comprise a levisable metal. The deformable layer 34 is connected directly or indirectly to the surrounding substrate 20 around its periphery. The piece is referred to as a support 154176.doc 201213850. The embodiment illustrated in Figure 7D has a support plunger 42 that is attached to the support plunger. Figure 7A-7 (in, movable reflective layer) Staying suspended from the cavity, but the deformable layer 34 does not form a support post by filling the deformable layer "with the aperture between the optical stack 16. Instead the support column is formed by a planarizing material used to form the support plunger 42. The embodiment illustrated in Figure 7E is based on the embodiment illustrated in Figure 7D, but may also be adapted to function with any of the embodiments illustrated in Figures 7A-7C and additional embodiments not shown. In the embodiment shown in Figure 7E, additional layers of metal or other conductive material have been used to form the bus bar structure 44. This mode allows signals to be routed along the back side of the interference modulator to remove in other cases. a plurality of electrodes that must be formed on the substrate 20 In an embodiment such as that shown in Figure 7, the interferometric modulator acts as a direct-view display device in which the image is viewed from the front side of the transparent substrate 2, which side is opposite the side on which the modulator is disposed. In these embodiments The reflective layer 4 is visually shielded from portions of the interferometric modulator on the side of the reflective layer opposite the substrate 20, the portions including the deformable layer 34, which allows the shielded area to be inferior to image quality. Configuration and operation in the event of a negative impact. This shielding allows the busbar structure 44 of Figure 7E to provide the ability to separate the optical properties of the modulator from the electromechanical properties of the modulator, such as addressing and location. The separate modulator architecture allows for the selection of the structural design and materials for the electromechanical and optical aspects of the modulator and functions independently of each other. Furthermore, the embodiment shown in Figures 7C to 7E has a reflection The additional benefit of separating the optical properties of layer 14 from its mechanical properties is performed by deformable layer 34. This allows for the relative optical properties to be optimized for reflective layer 14 154176.doc -19· 20121385 0 Structural design and material, and optimized for the structural design and material of the deformable layer 34 with respect to the desired mechanical properties. Figure 8 is a cross-sectional view of an exemplary interferometric modulator 1 干涉. The interferometric modulator 1 〇〇 includes a substrate 120, a transparent conductor 140, a portion of the reflector 116, a dielectric 112, a movable mirror 114, and a support 118. In the embodiment of FIG. 8, the support 118 supports the movable mirror 114 and defines the dielectric layer 112. An air gap 119 with the movable mirror. In an advantageous embodiment, the size of the air gap 119 depends on the optical characteristics of the interfering modulator. For example, the desired color can be achieved by self-interference modulator reflection. The size of the air gap 119 is determined. As described above with respect to Figures 7A, 7B, and 7C, a voltage difference is typically applied to the movable mirror 14 and the partial reflector 16 to actuate the interference modulator. Thus, in the embodiment of Figures 7A, 7B, and 7C, for example, the movable mirror 14 and the partial reflector 16 are at least partially electrically conductive such that they are connectable to the columns and rows of display devices. In an exemplary embodiment in which the partial reflector 16 is also an electrode of an interferometric modulator (e.g., Fig. 7A 'Fig. 7B and Fig. 7C), the partial reflector may comprise chromium, titanium and/or molybdenum. In the exemplary interferometric modulator 100, the transparent conductor 14 is shown positioned between the partial reflector 116 and the substrate 120. In this embodiment, the transparent conductor 140 is configured as one of the electrodes of the interference modulator, so the interference modulator ι can be applied with an appropriate voltage difference between the movable mirror 114 and the transparent conductor 14〇 ( For example, '10 volts' is activated. In an exemplary embodiment, the transparent conductor 140 comprises indium tin oxide (IT〇), zinc oxide, alkali-doped oxidized, oxidized oxidized tin, aluminum-doped oxidized, alkali-doped tin oxide, and/or doped with gallium, boron or indium. Zinc oxide. In this embodiment, the partial reflector 116 need not be electrically conductive, 154176.doc • 20-201213850 and thus the partial reflector 116 may comprise any suitable conductive or non-conductive partially reflective material. In some embodiments of the interference modulator, the partial reflector 116 has a reflectivity of between about 30 and about 36 degrees. Within the scope. For example, in one embodiment, the reflectivity of the partial reflector 116 is about 31%. In other embodiments, other reflectivities can be used with the systems and methods described herein. In other embodiments, the partial reflection is based on the desired output standard for the interferometric modulator 100.

The reflectivity of the device 116 can be set to other levels. In a typical interferometric modulation number, as the thickness of the partial reflector increases, the reflectivity of the partial reflector also increases' thus reducing the effectiveness of the dark state and limiting the contrast of the interferometric modulator. Therefore, in order to achieve the desired reflectivity of the partial reflector, it is desirable in many embodiments to reduce the thickness of the partial reflector. In the embodiment of Fig. 8, due to the fact that the transparent conductor 14 is used as an electrode, the partial reflector 116 is advantageous when it is thin. Therefore, since the transparent conductor is used as an electrode, the partial reflector does not need to have conductivity. Thus, in embodiments including a transparent conductor (such as transparent conductor 140), the thickness of the partial reflector can be reduced in order to achieve the desired reflectance. In the embodiment, the partial reflector 116 has a thickness of about 75 angstroms. In another embodiment, partial reflector 116 has a thickness in the range of about 60-100 angstroms. In another embodiment, the partial reflector 116 has a wide thickness in the range of about 40-15 angstroms. In an embodiment, the partial reflector comprises a nitrogen cut, which is a non-conductive partial reflection (four). In other implementations, the secret oxides, (but not limited to) Cr〇2, Cr〇3, Cr2〇3, (4) and. In some embodiments, a low conductivity dielectric material is used as a partial reflector. " 154176.doc 201213850 Conductivity dielectric materials are commonly referred to as ''high-k dielectrics', where "high-k dielectric" means a material having a dielectric constant greater than or equal to about 3.9. The high-k dielectric may include, for example, Si〇2, Si3N4, Al2〇3, γ2〇3, La203, Ta205,

Ti02, Hf02 and Zr02. In other embodiments, partial reflector 116 includes a dielectric stack having alternating layers of dielectrics having different indices of refraction. As known to those skilled in the art, the output characteristics of the interferometric modulator 100 (e.g., the color of the light reflected from the interferometric modulator 100) are affected by the reflectivity of the partial reflector U6. Therefore, in order to achieve the desired output characteristics, the adjustment of the reflectivity of the partial reflector 116 can be performed. In one embodiment, the refractive index of the partial reflector 116 can be fine tuned by using a partial reflector 116 comprising a dielectric material composition of a stacked structure. For example, in one embodiment, the partial reflector 116 can include a si〇2 layer and a CrOCN layer. In an exemplary embodiment of an interference modulator having a partial reflector including a dielectric stack, the material layer on the substrate 120 includes an IT layer of about 5 angstroms thick. A thick layer of Si 〇 2 layer, a layer of about 110 angstroms of Cr 〇 C] s ^, a layer of about 275 angstroms of Si 〇 2 layer, an air gap of about 2000 angstroms thick and a μ reflector. Thus, in the exemplary embodiment, the partial reflector comprises a layer of Si〇2 of about 1000 angstroms thick and a CrOCN layer of about U0 angstrom thick. Those skilled in the art will appreciate that there are many other suitable electrically conductive or non-conductive materials that can be used alone or in combination with other materials as part of a partial reflector. The use of such materials in combination with the systems and methods described herein is expressly contemplated. In a typical display, when the power of the independent display element (for example, the interferometric modulator) increases, the power required to change the voltage on the display element is also 154I76.doc •22·201213850 曰Example and s 'When When any of the interferometric modulators is actuated, the current required to change the voltage level on the display line is also increased. Therefore, with Φ, 士 | and to reduce the capacitance of the display components. The display elements of Figures 9 and 10 are illustrative embodiments having reduced capacitance display s. Figure 9 is a cross-sectional view of the reduced capacitive interference modulator 2A. The interferometer 250 of FIG. 9 includes a substrate 120, a transparent conductor 140, a dielectric 130, a blade reflector 116', a movable 112, a movable mirror 114, and a snubber 118, and 119. In the exemplary embodiment, the relative thicknesses of the layers are selected such that the thickness of the air gap 119 is greater than the combined thickness of the partial reflector 116, the dielectric m, and the dielectric 13G. In the embodiment of FIG. 9, the lower capacitance is achieved by decoupling the partial reflection 116 from the transparent conductor 14〇, thereby increasing the electrodes of the interference modulator (eg, the movable mirror 114 and the transparent conductor 14〇). the distance between. More specifically, in the embodiment of FIG. 9, additional dielectric 130 is positioned between the transparent conductor 14A and the partial reflector 116. The addition of the dielectric 130 does not change the distance between the partial reflector 116 and the movable mirror 114, but does increase the distance between the transparent conductor 140 and the movable mirror 114. In one embodiment, the dielectric material 13 has a thickness of about 卯. In other embodiments, the dielectric 130 has a thickness in the range of about 800 Å, 〇〇〇. As described above with respect to Figure 8, for example, an interferometric modulator comprising a transparent conductor "o" can be actuated by applying a voltage between the transparent conductor and the movable mirror 114. In an exemplary embodiment of the present invention, when the movable mirror 114 collapses toward the dielectric layer 112, the thickness of the dielectric layer 13〇 increases the final distance 154176 between the movable mirror 114 and the energized transparent conductor 14〇. Doc • 23·201213850. Because the capacitance and the distance of the capacitor electrode separated by increasing the distance between the electrodes of the interferometer 200 are reversed, the capacitance of the interferometric modulator 200 is correspondingly reduced. The addition of dielectric 13 does not significantly affect the optical characteristics of the interferometric modulator 200, but does reduce the capacitance between, for example, the movable mirror 114 and the transparent conductor 140. Figure 10 is an illustratively reduced capacitance. A cross-sectional view of the interferometer modulator 3. The interferometric modulator 300 of FIG. 1 includes a substrate 312, a transparent conductor 31, a dielectric 308, a portion of the reflector 306, a dielectric 3〇4, a movable mirror 302, a support 3 1 8 ' and an air gap 303 In the embodiment of FIG. 1, the movable mirror 302 and the partial reflector 306 are separated by a dielectric layer 3〇4 and an air gap 3〇3. In this embodiment, the air gap 3〇3 and the dielectric 308 are The size is selected such that in a released state (eg, the state shown in FIG. 1A), the interferometric modulator 300 substantially absorbs all of the light incident on the substrate 312, so the observer observes that the interferometric modulator 300 is Black. When the interferometric modulator 3 is actuated (eg, 'the movable mirror 302 collapses such that it contacts the dielectric 3〇4), the interferometric modulator 300 generally reflects incident light of all wavelengths, thus The 'interference modulator 300' appears white. In some embodiments, substantially all wavelengths of light reflection can provide white light, which is referred to as "broad white." Due to the interference with the interferometric modulators 1 and 2, the interferometric modulator 300 operates in the opposite manner (eg, the interferometric modulator 3 produces a color or white in the released state and is actuated The fact that the black is generated in the state, the interference modulator 300 is referred to as an "inverse interference modulator". In one embodiment, the optical gap of the inverse interference modulator 3 (including the air gap 303 and The electrical material 306) produces a black color or a release state under the actuated state 154176.doc •24·201213850. The color of the stalk is much smaller (for example, the figure 10). For example, the dielectric 3〇4 shell 4 has a thickness of less than about 150 angstroms and the air gap 304 can have a thickness of about 1,4 angstroms, while the interference modulator 100 can have a range About 350 to 850 angstroms - & ° ° 丨 丨 丨 丨 丨 丨 丨 丨 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 2,000 Regular interference modulator ΠI state small optical gap, and therefore

The electrodes of the inverse interference modulator are usually closer together. In the illustrated exemplary embodiment, when the interference modulator 300 is in the collapsed position, the distance between the movable mirror 3〇2 and the partial reflector 3〇6 is in the range of about (9) to angstrom. The distance includes the thickness of the dielectric 304 (about 150 angstroms in the embodiment of Fig. ι〇) and a small gap of about 〇50 Å, which is due to the movable mirror 3〇2 and the dielectric 3〇4. They are not in close contact with each other in the collapsed position. In other inverse interference modulators, the optical gap and the distance between the electrodes can be larger or smaller than the numbers described above. Due to the reduced distance between the electrodes, the capacitance of the inverse interference modulator is typically larger than that of a regular interference modulator. Therefore, the inverse interference modulator can consume additional power when the voltage on the column of the inverse interference modulator and/or the row terminals changes. In order to reduce the capacitance of the inverse interference modulator, the dielectric layer is finely positioned between the terminals of the interference modulation II. For example, the interferometric modulator 3 includes - a dielectric f adjacent to the transparent conductor 310, for example, in the same manner as described above, and the addition of the dielectric does not affect the partial reflector 6 The distance from the movable mirror 302, however, does increase the distance between the transparent conductor/movable mirror 3〇2, thus reducing the capacitance of the interference modulator 3〇0. Therefore, since the 154176.doc -25-201213850 dielectric layer 308 is added between the electrodes of the interference modulator, the capacitance of the inverse interference modulator 3〇〇 can be significantly reduced. Each of the interferometric modulators 100, 200, and 300 includes a movable mirror (mirror 114 in Figs. 8 and 9 and mirror 3〇2 in Fig. 1). The exemplary movable mirrors are deformable such that when an appropriate voltage is applied to the terminals of the interference modulator, the exemplary movable mirrored dielectrics 112 (Figs. 8 and 9) and 304 (Fig. 10) Collapse. However, those skilled in the art will appreciate that the improvements described above with respect to Figures 8, 9, and 10 can be implemented in other embodiments of interference modulators having different configurations of movable mirrors. For example: the interference modulators H) 0, and 3〇〇 can be modified to have a movable mirror that is only attached to the corner of the branch by, for example, a tether (eg, 'FIG. 7B), or There are other configurations that are suspended from the deformable layer (e.g., the movable mirror 1 of Fig. 7) covers the use of the improved system and method described with respect to Figs. 7, 8, and 9, and the movable mirror. The present invention has been described with reference to the preferred embodiments of the present invention, which are intended to be illustrative, and not to limit the scope of the invention Use 0

. A person skilled in the art can make various modifications to the present invention and a brief description of the drawings. FIG. 1 is an isometric view of a portion of an embodiment of an interference modulator display. The movable reflective layer is set, and one of the second interference modulators is located at the electronic device of the actuator. FIG. 2 is an illustration of incorporating a 3x3 interference modulator. • 26 - 201213850 System block diagram of an embodiment; movable diagram of one exemplary embodiment FIG. 3 is a diagram for the position and voltage applied to the interferometric mirror of FIG. 1; Figure 4 illustrates an exemplary display of the display data in a 3x3 interferometric modulator display of Figure 2;

5B illustrates an exemplary timing diagram for column and row signals, which may be used to write the frame of FIG. 5A; FIGS. 6A and 6B are diagrams illustrating an embodiment of a visual display device including a plurality of interferometric modulators. Figure 7A is a cross-sectional view of an alternative embodiment of the interferometric modulator; Figure 7C is a cross-sectional view of another alternate embodiment of the interferometric modulator; Figure 7D is a cross-sectional view of an alternate embodiment of the interferometric modulator; FIG. 7E is a cross-sectional view of an alternative embodiment of an interferometric modulator; FIG. 8 is a cross-sectional view of an exemplary interferometric modulator having a transparent conductor, 9 is a cross-sectional view of an exemplary reduced capacitive interference modulator; and FIG. 10 is a cross-sectional view of another exemplary reduced capacitive interference modulator. [Description of main component symbols] 1, 2, 3 rows/columns 12a, 12b Interference modulator 14 Reflective layer 154176.doc -27· 201213850 14a, 14b 16, 16a, 16b 18 19 20 21 22 24 26 27 28 29 30 32 34 40 41 42 43 44 45 46 47 48 Movable Reflective Layer Optical Stacking Support Defining Gap Substrate Processor Array Driver Column Driver Circuit Row Driver Circuit Network Interface Frame Buffer Driver Controller Display Array Tether Deformable Layer Display device housing supporting plunger antenna busbar structure speaker microphone transceiver input device

154176.doc -28· 201213850

50 52 100 112 114 116 118 119 120 130 140 200 ' 300 302 303 304 306 308 310 312 318 Power supply adjustment hardware interference modulator dielectric movable mirror part reflector support air gap substrate dielectric transparent conductor interference Modulator movable mirror air gap dielectric partial reflector dielectric transparent conductor substrate support 154176.doc -29-

Claims (1)

201213850 VII. Patent Application Range: 1. A display device comprising: a substantially transparent conductive layer configured as a first electrode; a movable reflective layer; and a sub-reflective layer 'positioned thereon The partially reflective layer is decoupled from the transparent conductive layer between the transparent conductive layer and the movable reflective layer. 2. The display device of claim 1, wherein the optical function of the partially reflective layer is decoupled from the electronic function of the transparent conductive layer. 3. The display device of claim 2, wherein the movable reflective layer is configured as a second electrode. The display device of claim 3, wherein the decoupling portion reflects the layer Φβ. The conductive layer allows an increase in the distance between the first and the second electrode, and the one of the display devices is maintained for three days. The nature of K. 5. The display device of claim 4 wherein the increase in the distance between the first and the second electrode produces a reduced capacitance of the display device. Such as the display device of the item 1 'JL Zhongjin Qiu G G Bajia. The P-reflective layer contains a non-conductive layer. The display device of item 6, wherein the transparent layer is opposite to the transparent conductive layer, the partially reflective layer is independent of the lens for a desired optical property. 8. The display of claim 7 has a reflectance of 9 The display device of claim 8 is in the range of 30-36%, wherein the partially reflective layer is increased and increased. wherein the partially reflective layer is subjected to the 纟 纟 state and the reflectance is 154176.doc 201213850 The display device of claim 8, wherein the thickness of the partially reflective layer is in the range of 40 to 150 angstroms. 11. The display device of claim 1, wherein the transparent conductive layer is applied to the transparent conductive layer An electronic signal between the second electrodes causes movement of the movable reflective layer. 12. The display device of claim 1, further comprising: a dielectric layer necessarily located between the partially reflective layer and the movable reflective layer. The display device of claim 1, further comprising: a dielectric layer positioned between the conductive layer and the partially reflective layer. The display device of claim 13, wherein the dielectric layer comprises a component selected from the group consisting of Si〇2, gossip A material of the group of claim 3, wherein the dielectric layer has a thickness of between 8 Å and 30,000 Å. The display device of 12, wherein the reflective layer is electrically conductive. 17. The display device of claim 1, wherein the partially reflective layer comprises a gas phase comprising: (10), (10), Cr2〇3'Cr2, and 18. The display device of the group of Cr0CN, such as the display device of the request item _, the display device is white when the display device is in the state of the child, and the display device is in a state of being in a state of being released The observer exhibits a non-white color. 19. The display device of claim 18, wherein: * when the display device is in the third direction, a distance between the movable reflective layers is increased by less than 200 angstroms. The display device of claim 19, wherein the display device is in the state of 154176.doc 201213850, the partially reflective layer and the movable portion are less than 1,550 angstroms. A distance between the reflective layers is 21. The display device of 1, the further step comprises: moving the movable reflection One of the layers is electrically coupled to the conductive layer and configured to move at least one of the second electrodes to process the image data; and the processor is configured to receive a memory in electrical communication with the processor Device. In the display device of claim 21, a signal is sent to the conductive layer and the driver circuit. The step includes a display device configured to pass to at least one of the second electrodes. The display device of claim 22, wherein the step-by-step includes configuring to transmit at least a portion of the image data to the dirty uncle. . A controller for the dynamic circuit of a boat. 24_ The display device of claim 21, wherein the hexadecimal step comprises a video source module configured to transmit the image data to the processor. 25. The display device of claim 24, wherein the contention module comprises - receiving At least one of a transceiver, a transceiver, and a transmitter. 26. The display device of claim 2i, further comprising an input device configured to receive input data and to communicate the input data to the processor. 27. A display device as claimed in claim 1, wherein the display device comprises an interference modulator. 28. A display system having the feature of any one of the claims 丨 to 27. 29. A method of fabricating a display device, the method comprising: forming a substantially transparent conductive layer; forming a portion of a reflective layer that is decoupled from the conductive layer; and 154176.doc 201213850 forming a movable reflective layer, A partially reflective layer is positioned between the conductive layer and the movable reflective layer. 30. For example. The method of claim 29, wherein the de-emphasis comprises removing the portion of the counter-optical function from the electronic function of the conductive layer. 31. The method of claim 3, wherein the exiting surface allows for an increase in the distance between the conductive layer and the movable reflection while maintaining desired optical properties of one of the display devices. The method of claim 31, wherein the increase in the distance produces a reduced capacitance of one of the display devices. The method of Moon Length 29, wherein the partially reflective layer comprises an insulating layer. 34. The method of claim 33, wherein the portion of the reflective layer allows the partially reflective layer to be configured for a desired optical property independent of the conductive layer. The method of claim 34 wherein the formation of the partially reflective layer increases the reflectivity of the partially reflective layer as one of its thickness increases. Within one of 36%. 37. In the range of 150 angstroms of claim 35. 38. The method of claim 33 is 矽, Cr〇2, Cr03. 39. The method of claim 29, wherein the method of claim 35, wherein the reflectance of the partially reflective layer is at 30 - wherein the thickness of the partially reflective layer is 40 - wherein the partially reflective layer comprises a selected from the group consisting of nitrogen a material in the group of Ci*2〇3, Cr2〇, and cr〇CN, wherein when the display element is in an intermeshing state, the display device presents a white color to an observer, and when in a released state, The display device presents a non-white color to the viewer. The method of claim 39, wherein a distance between the partially reflective layer and the movable reflective layer is less than about 200 angstroms when the display device is in the actuated state. 41. The method of claim 40, wherein a distance between the partially reflective layer and the movable reflective layer is less than about 1,5 50 angstroms when the display device is in the released state. 42. The method of claim 29, further comprising forming a dielectric layer between the conductive layer and the partially reflective layer. The method of claim 42, wherein the dielectric layer comprises a material selected from the group consisting of Si〇2, Al2〇3, and tantalum nitride. 44. The method of claim 42, wherein the dielectric layer has a thickness between 800 angstroms and 3 angstroms. 45. The method of claim 42, wherein the partially reflective layer is electrically conductive. 46. A display device formed by the method of any one of claims 29 to 45. 47. A display device comprising: a member for modulating an optical signal, the modulating member comprising a movable reflective layer and a portion of the reflective layer; and a means for causing the movable reflective layer to be opposite to the A member in which the partially reflective layer moves, wherein at least one of the movable reflective layer and the partially reflective layer of the modulation member is decoupled from the movement promoting member. 48. The display device of claim 47, wherein the movement urging member comprises a substantially electrically conductive layer configured as a first electrode, and the movable reflective layer configured as a first electrode such that The partially reflective layer and the move 154176.doc 201213850 motivate the component to be decoupled. 49. An interference modulator comprising a portion of a reflective layer electrically decoupled from a plurality of electrodes that cause movement of a movable reflective layer. 50. An interference modulator configured to have a number of optical signal modulation sizes independent of a number of electrodes. 51. The interferometric modulator of claim 50, wherein the # optical signal modulation size is less than any of the distances associated with the electrodes. 154176.doc 6·