TW201131975A - Vibrating reed, vibrator, oscillator, and electronic device - Google Patents

Abstract

A vibrating reed includes: a base; at least one vibrating arm extending from the base; at least one support arm extending from the base, and at least a part of which extends in parallel to the vibrating arm; and at least one receiving section formed of a part of the support arm, the part extending to have a shape of a projection so that a distance from the vibrating arm is reduced.

Description

[Technical Field] The present invention relates to, for example, a vibrating piece such as a piezoelectric vibrating piece including a piezoelectric material, a vibrating body, an oscillator, and an electronic apparatus using the same. [Prior Art] Previously, a vibrating piece that vibrates in a bending vibration mode or other vibration mode, for example, a piezoelectric vibrating piece of the following type is widely used: a pair of vibrations are made from the base of a substrate including a piezoelectric material such as a crystal. The arms extend in parallel and cause the vibrating arms to vibrate in a direction approaching or departing from each other in the horizontal direction. Various products such as HDD (hard disk drive), mobile computer, or ic (integ plus circuit 'integrated circuit) card, such as HDD (hard disk drive), mobile phone, and car, are installed. The demand for miniaturization of the mobile communication device, such as a mobile communication device or a vibrating gyro sensor, is increasing, and the requirements for miniaturization of the vibrating element and the vibrating piece accommodated in the vibrating element are further improved. In addition, as a problem other than miniaturization, when the vibrating arm of the vibrating piece is excited, the vibration energy is lost, and the value of the CUCrysW Impedance 'crystal impedance is increased or the Q value is lowered. b) g) In order to achieve both the miniaturization of the vibrating piece and the reduction of the vibration energy loss, a variety of studies have been conducted. : As is well known, there is a long groove provided on the main surface of the vibrating arm, and the base is vibrated. A sound-type crystal vibrating piece having a notch portion or a slit (cutting groove) is formed on both side portions of p (for example, refer to the patent document... The sheet is performed 150337.doc 201131975: Description: Fig. 8 is a plan view schematically showing a θ-type crystal vibrating piece as an example of the prior vibrating piece. In Fig. 8, the 'tuning fork type crystal vibrating piece 1' includes a part (2) and two pairs of vibrating arms i 2 2 extending parallel to each other from the end portion of the base portion 121. Each vibrating arm! 2 2 has two main faces of the vibrating arm ι 2 2 and connecting the two main faces In addition, each of the vibrating arms (10) is provided with a bottomed long groove 126 formed by opening at least one of the main surfaces of the two main faces in the longitudinal direction of the vibrating arm 122. In the region including the long groove m, an excitation electrode for vibrating the vibrating arm 122 is provided. Further, on the other end side in the direction orthogonal to the one end side of the base portion 121 where the vibrating arm 122 is extended (both sides) ), so that the two main faces of the base 121 exhibit a shape of a contraction shape A pair of slits H1A, 141B are formed along a straight line in the opposing direction. The base portion 121 includes a first portion 11a and a second portion 121b which are located on both sides with a pair of slits 141, ΐ4ΐβ, and a pair of slits The connection portion 121c of the second portion and the second portion uib is connected between the first portion and the second portion uib. The second portion 12b is provided with an external connection electrode (not shown) for electrically connecting to an external substrate such as a package. The acoustic-type crystal resonator element 100 has the second portion 1 2 1 b of the base portion 12 1 as a fixed portion, so that an external connection such as a package can be electrically connected and fixed and fixed. The crystal vibrating piece 1 is provided with a long sample 126' in each of the vibrating arms 122. Thereby, the vibrating arm 122 is easily moved to vibrate effectively, so that the vibration loss is reduced and the CI value can be suppressed to a low level. Doc 201131975 Further, when the vibration of the vibrating arm 122 also includes a component in the vertical direction, the vibration of each of the vibrating arms 122 is blocked by the pair of slits 141A and 141B provided in the base portion 121, so that the vibration passes through the base portion. I]! The so-called vibration leakage to the outside is suppressed, and the effect of preventing the increase of the CI value is exhibited, and the CI value between the respective vibrating arms 122 is prevented from being uneven. [Prior Art Document] [Patent Document] [Patent Document 1] [Problem to be Solved by the Invention] However, in the acoustic-type crystal vibrating piece 1 described in Patent Document 1, there is a possibility that it is formed in the base portion 121. The slits 141A, 141B cause a problem that the rigidity of the base portion 121 is lowered to deteriorate the impact resistance. Specifically, when a specific driving voltage is applied to the excitation electrode in the tuning-fork type crystal vibrating piece 1A shown in FIG. 8, each of the vibrating arms 122 approaches or leaves each other in the horizontal direction indicated by the arrow in the figure. The direction of vibration. When the impact caused by the large displacement of the vibrating arm 1 22 in the direction in which the vibration directions of the two turns are applied to the acoustic-type crystal vibrating piece (10), the local property on the base (2) side is a large stress. That is, if the second portion 12 of the base portion 121 is fixed at the solid end and the front end side of each of the vibrating arms 122 is largely displaced, the stress concentrates on the opposite direction of the displacement of the vibration f 122 in the pair of cut σ 141 Α, 141B. '141A or slit 1418 front end 142A or front end 142B. In particular, the mechanical strength with respect to the tensile stress is weak in the case of the crystal, and therefore, for example, when the vibrating arm 122 is in the direction of the arrow + 图 in the figure (left side 150337.doc 201131975

When the impact caused by the large shift is applied to the A gi crystal vibrating piece 100, a large tensile stress is applied to the end portion 142B before the slit 41 in the -X direction (right direction) in the figure of the base portion 121, The person will be damaged.彳 There may be cracks or [Technical means for solving the problem] The present invention has been made to solve at least four points of the above problems, and can be realized as the following aspects or application examples. [Applicable Example 1] The vibrating piece of this application example is characterized in that it includes a vibrating arm which extends from the base portion; ° 0 , a symbol # ' which extends from the base portion, and to > a part of the vibrating arm J month Extending the ; ; 以 „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ „ When the protruding portion is subjected to an impact by the side 7 narrowed by the interval between the vibrating arms, and the vibrating arm exceeds the vibrating piece or the like, the displacement of the front end side of the vibrating arm is shifted by the circumference. E, and not 0. Since the enthalpy is restricted, it is possible to suppress an increase in the stress applied to the erecting islands of the vibrating arm and the base, thereby preventing occurrence of defects such as cracks or breakage. [Applicable Example 2] The application example is as follows: · The moving piece' is such that the support portion is displaced by the amplitude range of the vibration of the vibrating arm generated by the electric field applied by the vibrating arm, and the vibrating arm exceeds the monthly opening 7 (1) The above vibration arm is connected The position. According to this configuration, the displacement of the front end side of the vibrating arm is shifted when the amplitude of the vibrating arm is shifted by the amplitude of the vibrating arm and the vibration amplitude of the vibrating arm, and the displacement is 150337.doc 201131975 by the supporting portion Since it is limited, it is possible to suppress an increase in stress applied to the connecting root portion of the vibrating arm and the base portion, thereby preventing occurrence of defects such as cracks or breakage. [Aspect 3] The vibrating piece according to the above application example, wherein the support portion is provided on a front end side of the support arm. According to this configuration, when an impact is applied to the vibrating piece or the like and the vibrating arm is displaced beyond the amplitude range of the normal vibration, the displacement of the front end side of the vibrating arm is restricted by the support portion, so that the application to the vibrating arm can be suppressed. The stress at the base of the base portion is increased to prevent problems such as cracking or breakage. Further, since the support arm having the support portion at the tip end is included, the support portion is used to bond the vibrating piece to the outside of the package or the like. This can be kept externally in a state where the vibrating arm and the base are floated, so that it is possible to prevent the vibration characteristic from becoming unstable due to the vibration transmitted from the vibrating arm to the base or the excess vibration transmitted to the vibrating arm via the base. Therefore, it is possible to provide a vibrating piece having stable vibration characteristics and having excellent impact resistance. [Application 4] The vibrating piece according to the above application example, wherein the support portion is provided in the support arm in plural, and is configured In order to be able to perform the above-described bending deformation of the vibrating arm, and the plurality of positions in the longitudinal direction of the swaying According to this configuration, when the vibrating arm is bent and deformed, the three vibrating arms are formed at a plurality of positions and a plurality of support portions provided on the support arm. Thus, when the vibrating arm is in contact with the support portion, [Aspect 5] The vibrating piece according to the above application example, wherein the vibrating arm has two main faces and connects the two main faces and is in the vibrating arm And two side surfaces extending in the longitudinal direction, and the vibrating arm further has a bottomed long groove having an opening on a main surface of at least one of the two main surfaces along the longitudinal direction of the vibrating arm, and the support The portion is arranged such that when the vibrating arm is displaced beyond the amplitude range of the normal vibration and the vibrating arm is in contact with the support portion, a portion of the support portion that abuts against the vibrating arm is formed with the long groove According to this configuration, the vibrating arm is easily moved by the long groove to effectively vibrate, thereby suppressing an increase in the CI value and being restricted by the support portion. When the vibrating arm is displaced, the abutting portion of the vibrating arm and the supporting portion is disposed so as to be located at a distal end side of the region in which the long arm of the vibrating arm is formed, and the damage is suppressed. [Applied Example 6] In the vibrating piece according to the above aspect of the present invention, a weight portion having a width wider than the base portion side of the vibrating arm is provided on a front end side of the vibrating arm, and the vibrating piece (4) is disposed such that the vibrating piece (four) generates a vibration exceeding the normal vibration. When the amplitude range is displaced and contacts the support portion, the portion of the support portion that abuts against the vibration f is in contact with the upper portion. According to this configuration, the vibration 眢$f A5 , and the width of the turbulence Width and high strength weight

Since the side surface becomes the point A of the A-P abutting on the support portion, it is possible to suppress the damage of the vibrating arm and improve the impact resistance of the vibrating piece. [Applicable Example 7] The WA h '+· i ^ * moving piece according to the above-described application example, wherein the middle s-vibrating piece is disposed such that the abutting portion of the support portion and the above-mentioned weight of the vibrating arm are I50337. Doc 201131975 Face contact on the side of the volume. For example, it is possible to prevent the vibration hips that are struck by the weight portion from being in contact with the abutting portion of the support portion. When the month is used, the pressure of the angle is concentrated to cause the corner portion or the support portion. — ° The impact resistance of the high vibration diaphragm is impacted. . In the case of the vibration of the above-mentioned application example, the above-mentioned support arm has a portion which is thinner than the above-mentioned two sides of the above-mentioned vibrating arm.

A finer part. According to this configuration, the support arm is more easily bent than the vibrating arm, so that the damage applied to the vibrating arm when the vibrating arm collides with the support portion of the support arm is alleviated, so that the vibration arm can be prevented from being damaged and the impact resistance is high. The vibrating piece. [Aspect 9] The vibrating piece according to the above application example, wherein the width of the support portion is formed to be smaller than a width of the base portion side of the support arm. According to this configuration, the front end side of the support arm having the support portion is easily bent with respect to the base portion side of the support arm, whereby the damage applied to the vibrating arm when the vibrating arm collides with the support portion of the support arm is alleviated, so that it can be used for Prevent the vibration arm from being damaged and improve the impact resistance of the vibrating piece. [Application Example 10] The vibrating piece according to the above application example is a piezoelectric vibrating piece formed of a piezoelectric material. According to this configuration, a piezoelectric vibrating piece such as a crystal resonator piece having high impact resistance and excellent vibration characteristics can be provided. [Aspect 11] The vibrating piece according to the above application example, wherein the crystal is used as the piezoelectric material, the base portion has a pair of slits which are disposed along the X-axis and the γ-axis of the crystal, And the Z-axis consists of the positive 150337.doc •10·201131975 in the direction of the x-axis direction of the two coordinate system in the opposite direction, the two main faces of the base show a retracted shape, the above-mentioned vibrating arm The end portion of the base portion in the Y-axis direction extends in the γ-axis direction, and the support arm having the support portion is provided on at least the +X side of the vibrating arm. The crystal system is widely used as a piezoelectric material of a piezoelectric vibrating piece. As described above, when a slit is formed by contact in the x-axis direction in the orthogonal coordinate system of the crystal axis, the crystal axis is relative to the crystal. The anisotropy of the inner wall of the slit formed by the slit processing from the x side (the corner portion is a so-called flash portion that generates an undesired hole portion or a residual portion of the last name. The cut: the flash edge When an impact is applied to the vibrating piece, cracking or breakage may occur, and in particular, the tensile stress may be significantly deteriorated when applied to the burr portion. According to the configuration of the above-described application example, the vibrating piece formed by the crystal is formed. The support arm extends from the end of the base on the opposite side (+X direction) of the slit in the x-direction of the burr portion, and has a support portion on the front end side of the support arm. The movable support portion of the vibrating arm displaced in the direction in which the tensile stress is applied to the burr portion is particularly resistant to impact resistance in the direction of displacement with weak impact. x is set to be only one end of the base. Part with a support In the case of supporting the arm, the support arm is formed from the other end, and the support arm is formed as compared with the case where the support arm is formed. The vibration plate can be miniaturized. The application example 12 is as described above. In the vibrating piece of the example, the impact absorbing member is provided on the abutting portion. According to this configuration, the yoke is supported by the shock absorbing member I50337.doc 201131975, thereby suppressing the shock. The vibrating arm is damaged or damaged. [Applicable to the vibrating body of the application example of the present invention: includes: [the vibrating piece of any one of the applicable examples; and the package, the housing of the package 0 according to the composition, The vibrations described in the example can provide the vibration characteristics of the crucible and the vibration of the impact (four) high [Applicable Example 14] The vibrating piece of any of the special examples of the vibrating device of this application example; the circuit component, which has = The upper oscillating circuit oscillating circuit and the squirting body are described as vibration circuit elements. ^ According to the configuration, the vibration piece described in the above application example is provided, thereby providing stable vibration characteristics. Vibration of the vibration-resistant vibration of the electronic device according to the application example of the present invention, the vibrating body of the above-described application example, the oscillator of the above-mentioned application example According to this configuration, the characteristics can be stabilized and the vibration characteristics of the machine can be ensured. 』 丨 丨 疋 疋 [ [Application 16] The vibration vibration f of this application example is from the _ end of the base; And the other end portion of the base portion holds the arm, and the vibrating arm extends in parallel, and the vibrating piece has a Z portion and a support portion disposed on the support arm 胄 'the support portion, and is disposed on the support portion Vibration I50337.doc -12. 201131975 #Outside the amplitude range of the normal vibration, and disposed at a position where the vibrating arm is displaced when the vibrating arm exceeds the amplitude range of the vibration of the tenth. According to this configuration, when an impact is applied to the vibrating piece and the vibrating arm is displaced beyond the amplitude range of the normal vibration, the displacement of the front end side of the vibrating arm is restricted by the support αΡ, thereby suppressing the application to the vibrating arm. The stress at the base connecting the root portion is increased, and problems such as cracking or breakage are prevented. Further, since the support arm having the support portion at the front end is included, the vibrating piece is bonded to the outside of the package or the like by the support portion, whereby the vibrating arm can be held outside while floating the base portion, thereby preventing the vibration arm from being vibrated. The vibration is transmitted to the base and the leakage or excess vibration is transmitted to the vibrating arm via the base, resulting in a vibration characteristic. Therefore, it is possible to provide a vibrating piece having stable vibration characteristics and excellent impact resistance. [Embodiment] Hereinafter, an embodiment in which a vibrating piece of the present invention is embodied will be described with reference to the drawings. (First Embodiment) Fig. 1 is a plan view schematically showing a crystal resonator piece as a diaphragm of a second embodiment viewed from one main surface side. 2 is a view schematically showing a cross section of each portion of the crystal resonator piece, FIG. 2(a) is a cross-sectional view of the line, FIG. 2(b) is a cross-sectional view taken along line cc of FIG. 1, and FIG. 2(c) Figure i2b_b line profile. In this example, an example in which crystal is used as the piezoelectric material will be described. In Fig. 1, the crystal resonator piece 20 is a piezoelectric vibrating piece containing crystal. 50337.doc ]3 201131975 The crystal wafer (crystal substrate) which is the original shape of the crystal constituting the crystal resonator element 2 of the present embodiment (4) is composed of an x-axis, a ¥-axis, and a z-axis. In the orthogonal coordinate system, the crystal z-cut plate cut out by the clockwise rotation of the range of ~5 degrees from the z-axis is cut to a specific thickness. The crystal resonator element 20 of the present embodiment has a shape t-shaped, that is, includes a base portion 21 formed by processing the crystal z-plate, and a double point from one end side (upper end side in the figure) of the base portion 21 The forks and the pair of vibrating arms 22 extend in parallel with each other. In the base portion 2, a pair of slits 4, A, 4, B, are formed along the straight line in such a manner that the two main faces thereof are in the shape of a contraction. The base portion 2^ includes an i-th portion 2u and a second portion 2ib which are located on both sides with a pair of slits 41A, 41B, and connects the i-th portion 21 & and the second portion 21b between the pair of slits 41, 41β. The connecting portion 21e. In the crystal resonator element 20 of the present embodiment, the transmission of the vibration of each of the vibrating arms 22 is blocked by the slits 41, so that vibration can be suppressed from being transmitted to the outside via the base 2丨 or the support arm 30 described below. The so-called vibration leakage prevents the CI value from rising. Furthermore, the width of the pair of slits UA, 41A (the width of the connecting portion 2ic) may be smaller than the distance between the side faces of the pair of vibrating arms 22, or may be larger than the distance from the side opposite to the pair of vibrating arms 22. Further, the width of the pair of slits a ” 41B (the width of the connecting portion 21c) may be the distance from the side faces in the opposite directions to each other, and the distance from the side faces facing the opposite directions. The length of the pair of vibrating arms 22 may be larger than one. The pair of vibrating arms 22 of the vibrating arm 22 extend from the i-th portion 2a1 of the base portion 21 in parallel with the two main faces (the front side and the inner side of the paper 150337.doc -14·201131975). Further, each vibrating arm 22 The two main faces are provided with two side faces connecting the two main faces on both sides. Further, a weight portion 29 having a width wider than the base portion 21 side of the vibrating arm 22 is provided on each of the front end sides of the vibrating arms 22. In this manner, the weight portion 29 of the front end portion of each of the vibrating arms 22 functions as a weight portion, whereby the frequency can be reduced without increasing the length of the vibrating arm 22. Further, the vibrating arm 22 of the present embodiment shows the weight portion 29 The outside part has a fixed width The configuration is not limited thereto, and the main portion of the vibrating arm 22 (portion different from the weight portion 29) may be tapered toward the distal end. For example, "the side portion 21 from the base portion 21 of the vibrating arm 22 is formed toward the front end. The tapered taper allows the vibrating arm 22 to easily vibrate. As shown in Fig. 1, the main surface of one of the vibrating arms 22 is provided with a bottomed long groove 26a along the respective longitudinal directions. As shown in FIG. 2(a), a long groove 26b is also provided along the longitudinal direction of the vibrating arm 22 on the other main surface of the vibrating arm 22. By the long grooves 26a and 26b provided in the vibrating arms 22, Further, the vibrating arm 22 is easily moved and efficiently vibrated, whereby the CI value can be lowered. Further, in the vibrating arm 22 of the embodiment shown in Fig. 1, the long grooves 26a (and 26b) are formed to One end side (the front end side of the vibrating arm 22) is located closer to the front end side (the weight portion 29 side) than the boundary of the weight portion 29 of the vibrating arm 22. Thus, the stress generated when the vibrating arm 22 vibrates The concentrated area is dispersed in the extending direction of the vibrating arm 22, so that stress concentration can be avoided The weight portion 29 of the boom 22 is connected to the root portion to cause damage such as breakage. Conversely, the one end side of the long grooves 26a and 26b (vibration 150337.doc •15·201131975 front end side of the arm 22) may be formed. The position is closer to the base 21 side than the boundary of the weight portion 29 of the vibrating arm 22, whereby the effect obtained is also obtained. That is, the region where the stress is concentrated when the vibrating arm 22 vibrates is dispersed in the vibrating arm 22. By extending the direction, it is possible to prevent stress from being concentrated on the joint root portion of the weight portion 29 of the vibrating arm 22, resulting in damage such as breakage, and the mass addition effect of the weight portion 29 in each of the vibrating arms 22 is increased, so that it is not necessary to make the crystal vibrating piece 20 The size is increased to achieve low frequency. However, the 'in each of the vibrating arms 22' does not occur even if one end side of the long grooves 26a and 26b (the front end side of the vibrating arm 22) is disposed at the boundary with the weight 邛 29 of the vibrating arm 22. When the stress is concentrated on the root portion of the weight portion of the vibrating arm, damage may occur, for example, if the vibrating arm 22 has a width that can be sufficiently rigid, or the base portion 21 side of the vibrating arm 22 is formed. In the case of a shape in which the width is widened toward the weight portion 29 (for example, a tapered shape or the like), one end side of the long grooves 26a and 2 (the front end side of the vibrating arm 22) may be disposed to be located with the vibrating arm 22 The boundary of the weight portion 29. The crystal vibrating piece 20 has one pair extending from the second portion 21b of the base portion 2b to support #30〇-the two opposite directions of the support arm 3's from the direction in which the pair of vibrating arms 22 extend from the base portion 2 1 The end portions extend in opposite directions from each other, and further extend in the direction in which the curved portion 31 extends in the direction of the vibration f22. The support arm 3 is miniaturized by bending in this way. The support arm is used for mounting a portion of an external substrate such as a package (not shown), and the fixing portion 39 of the dummy external substrate exemplified in the figure is fixed by an adhesive or the like. Mounted on an external substrate. Thus, in the crystal resonator element 20 mounted on the external substrate, Yu An 150337.doc -16·201131975, the vibrating arm 22 and the base portion 21 can be placed in a floating state. As shown in FIG. 2, an excitation electrode 44 is formed on each surface of each of the vibrating arms 22 including the long grooves 26 & 2, and an excitation electrode 43 is formed on a surface including each of the two side faces (®i Omit the illustration). In one of the vibrating arms 22, a voltage is applied between the excitation electrodes 43, 44 to contract the two side faces of the vibrating arm 22, thereby vibrating the vibrating arm 22. The excitation electrodes 43 and 44 can be formed by etching a crystal to form a long groove 26a, 26b including the crystal resonator piece 2, and then forming nickel (Ni) or chromium (Cr) as a base layer, for example. An electrode layer containing, for example, gold (Au) is formed by steaming or deplating, and then patterned using photolithography. Here, it is known that chromium and crystal are highly entangled, and gold has low electrical resistance and is difficult to oxidize. A portion where the thickness is narrowed in the same direction as the vibration direction of the vibrating arm 22 is provided on the front end side of each of the support arms 30, and a part of the support arm 30 is provided with a direction-oriented vibration so that the interval between the support arm 3〇 and the vibration I22 is narrowed. The support portion 35 is formed by bending the arm. In other words, the support portion 35 becomes a projection in which a part of the support arm 3 is formed in a protruding shape from the extending direction of the support arm 30 toward the vibrating arm 22. The dam support portion 35 is disposed in the amplitude range of the normal vibration of the adjacent vibrating arm 22, and is disposed when the adjacent vibration (4) is displaced beyond the normal amplitude by a specific amount. In addition, the amplitude range of the normal vibration of the vibrating arm 22 is oscillated by a specific resonance frequency by applying a driving voltage (electric field) to the excitation electrodes 43 and 44 of the crystal resonator element 2 The vibration region of the vibrating arm 22 when the amplitude of the vibrating arm 22 is maximum is increased by y. That is, the vibrating arm 22 adjacent to the support arm 35 of the support arm 30 is not in contact even when the amplitude of the vibrating arm 22 vibrating at the resonance frequency of the special 150337.doc -17-201131975 is maximum. Also, the vibrating arm. When a displacement exceeding a certain amount in the normal amplitude range is generated, it means a case where the vibrating arm 22 is largely displaced due to an impact applied to the crystal resonator piece 20 by dropping or the like. In the crystal resonator element 20 shown in Fig. 1, each of the support arms 30 has a portion having a width smaller than a portion having the smallest width between the two side faces of the adjacent vibrating arms 22. Further, in the support arm 30, the width of the base portion 2i side of the support portion 35 and the support portion 35 is formed to be smaller than the width of the base portion 21 side of the support arm 30. As will be described in detail, in the drawing, the pair of support arms 30 extending from the base portion 21 in opposite directions and extending in the curved portion 31 and extending in the direction parallel to the vibrating arm 22 have a width on the side of the base portion 21 The wide portion of the wide portion is formed with a narrow portion 33 having a narrowed width on the front end side of the wide portion 32, and the front end side of the narrow portion 33 serves as a support portion 35. That is, as shown in Fig. 2(b) The width t2 of the narrow portion 33 of the support arm 30 and the width t3 of the wide portion 32 of the support arm shown in Fig. 2(c) are in the relationship of t2 < t3. Further, each of the wide portion 32 and the narrow portion 33 of the support arm 3〇 is not square in cross section as in the present embodiment, for example, when a groove having a bottom is provided or has an imaginary center line with respect to the cross section. In the case of a line-symmetric cross-sectional shape, the cross-sectional area S2 of the narrow portion 33 of the support arm 30 shown in Fig. 2(b) and the cross-sectional area of the wide portion 32 of the support arm shown in Fig. 2(c) S3 can also be a relationship of 82 < § 3. Further, the relationship between the width η between the two side faces of the vibrating arm 22 shown in Fig. 2(a) and the width in the same direction of the support arm 30 is at least as shown in Fig. I50337.doc -18·201131975 The width t2 of the narrow portion 33 of the arm 30 is tl > t2. Further, in the present embodiment, the width t1 of the vibrating arm 22 and the width t3 of the wide portion 32 of the support arm 3'' shown in Fig. 2(c) are also in the relationship of t1 > t3. Further, the cross-sectional area S1 of the vibrating arm 22 shown in Fig. 2(a) and the cross-sectional area S2 of the narrow portion 33 of the supporting arm 3'' shown at least in Fig. 2(b) are S1 > S2. Further, the vertical tj surface area S1 of the vibrating arm 22 and the cross-sectional area S3 of the wide portion 32 of the support arm 30 shown in Fig. 2(c) may be in the relationship of S1 > S3. As described above, in the crystal resonator element 20, each of the support arms 3 has a narrow portion 33 (and a wide portion 32) which is thinner than the width of the portion having the narrowest width between the two side faces of the adjacent vibrating arms 22. Formed thereby, the support arm 3〇 exhibits elasticity that is easier to bend than the vibrating arm 22. Thereby, when the vibrating arm 22 is largely displaced on the support arm side and collides with the support portion 35, the damage to the vibrating arm 22 is alleviated, so that the damage of the vibrating arm 22 can be prevented and the vibrating arm 22 can be restricted from being excessively displaced. The impact resistance of the crystal resonator piece 20 is improved. Further, the width t2 of the narrow portion 33 on the side of the base portion 21 of the support portion 35 and the support portion 35 is formed to be smaller than the width u of the wide portion on the side of the base portion 21 of the support arm 30, thereby being relative to the support arm 30. The side of the base portion 21 (the wide portion 32 & side) has elasticity that is easily bent on the front end side (narrow portion side) of the support arm 30 of the support portion 35, so that the vibrating arm 22 is largely displaced on the side of the support arm 30 to collide When the support portion is in time, the damage to the vibrating arm 22 is reduced to prevent the vibration arm η from being damaged and the impact resistance of the crystal vibrating piece 2 is improved. In the present embodiment, the width of each support arm 3 is narrowed. The narrow portion 33 is closer to the direction of the adjacent vibration f22 (four) at the front end side, and is further curved to form a support portion 150337.doc -19-201131975 35 ° in the manner that the front end side is parallel to the adjacent vibrating arm 22 In the present embodiment, a folded portion 35a that is bent in a direction away from the adjacent vibrating arm 22 is formed on the distal end side of the support portion 35 of the support arm 3A, and the distal end portion including the support arm 3〇 is formed. The corner portion 35a does not abut against the vibrating arm 22, thereby In the configuration of the support arm 3A having the support portion 35 described above, the crystal resonator element 20 is fixed to the fixing portion 39 of the external substrate such as the package, and the fixing portion 39 is disposed. The wide portion 32 of the support arm 30 is closer to the base portion 21 than the support portion 35. Thereby, the support portion 35 which mitigates the impact with the fixed portion 39 as a fulcrum and limits the displacement of the vibrating arm 2 2 can be realized. Further, the arrangement of the support portion 35 in the crystal vibrating piece 2A will be described with reference to Figs. 1 and 3. Here, Fig. 3, which is newly referred to, schematically illustrates the support arm 30 of the vibrating arm 22. The arrangement of the abutting portions of the support portions 35 is a partial enlarged view of a part of the side surface of the vibrating arm 22 viewed from the direction of the arrow E in Fig. 1. The crystal vibrating piece 2 shown in Figs. 1 and 3 In the middle, when the vibrating arm 22 is largely displaced from the adjacent support arm 30 side and comes into contact with the support portion 35 of the support arm 3, the abutting portion of the support portion 35 with the vibrating arm 22 is as shown below. In this way, the support portion 35 is arranged. That is, the support portion 35 of the support arm 30 is provided. To be located closer to the front end than the region in which the long grooves 26a, 26b are formed when the vibrating arm 22 is largely displaced. This is configured to contact the adjacent support arm 30 when the vibrating arm 22 is displaced greatly. In the support portion 35, the abutting portion of the vibrating arm 22 and the support portion 35 is 150337.doc • 20· 201131975, which is located at a portion higher than the region on the front end side of the region in which the long grooves 26a and 26b are formed, thereby preventing vibration The damage of the arm 22 is increased, and the impact resistance of the crystal vibrating piece 20 is improved. Further, the support portion 35 of the support arm 30 is disposed at a width of the front end side of the vibrating arm 22 when the vibration (four) is displaced by the width. The portion where the weight portion 29 contacts. Further, the support portion 35 is disposed in surface contact with the side surface on the side of the support portion 35 of the two side faces of the weight portion of the vibrating arm 22. In other words, in the crystal resonator piece 2, the support portion 35 of the support arm 30 is avoided. The corner portion 27 formed at one end of the weight portion 29 of the vibrating arm 22 is disposed. Thereby, the side portion of the wide portion of the vibrating arm 22 and having the high strength portion 29 is in surface contact with the support portion 35, and thus the vibrating arm 22 The damage is suppressed. Further, by avoiding the corner portion arrangement, it is possible to prevent the corner portion 27 from being in contact with the abutting portion of the support portion 35 when the corner portion 27 of the vibrating arm 22 formed by the weight portion 29 is disposed. In the case where one of the support portions 35 is broken by contact, the impact resistance of the crystal resonator element 2 can be increased. Further, in the crystal resonator element 2 of the present embodiment, the support portion is formed in the support portion. An impact cushioning member 38 is provided on the surface of the abutting portion of the adjacent vibrating arm 22. Preferably, the shock absorbing member 38 is formed of a material that can relax the impact when the vibrating arm 22 is displaced by the middle field and contacts the support portion 35, and the contact portion with the vibrating arm 22 is ensured to be as large as possible. The contact area is in contact with the surface contact, and is disposed in parallel with the surface of the vibrating arm 22 which is abutting portion and has a fixed area. As the material used for the impact buffer member 38, a member such as rubber or resin which is elastic may be used. However, it is not limited thereto, and a metal film such as gold or the like which is softer than 150337.doc -21 - 201131975 may be used. In the case where the shock absorbing member 38 is formed by the metal film, for example, it is simultaneously formed by the electrode forming steps of the excitation electrodes 43 and 44 (see FIG. 2(a)) of the crystal resonator element 20, whereby The impact cushioning member 38 can be provided without adding a manufacturing step. In this way, the shock absorbing member 38 is provided on the abutting portion of the support portion 35 and the adjacent vibrating arm 22, whereby the vibration arm 22 can be relaxed against the support portion, so that the vibrating arm 22 or the support arm 3 can be restrained. The support buckle is missing or damaged. As described above, the crystal resonator element 20 according to the above embodiment is provided with the slits 41, 41B, the long grooves 26a, (10), the weight portion, etc., thereby suppressing the vibration m CI value above 彳, or (10) The lower portion is provided with a support portion 35 that both moderates the shock and restricts the displacement of the vibrating arm 22 when the vibrating arm 22 is largely displaced by the impact of the crystal vibrating piece 20 or the like.

This provides the crystal vibration piece 20 having stable vibration characteristics and high impact resistance. The crystal resonator element 2 (piezoelectric vibrating piece) of the resonator element described in the above embodiment may be implemented as the following modification. (Modification of the first embodiment) In the above embodiment, the crystal resonator element 2 of the configuration in which the support arm 30 having the support portion 35 is provided on both sides of the pair of vibrating arms 22 has been described. However, the present invention is not limited to the case where the crystal axis direction of the crystal material (piezoelectric material) constituting the crystal resonator piece is considered, and the support portion can be disposed on either side of the vibration direction of the vibrating arm. And to achieve an improvement in impact resistance. Fig. 4 is a plan view schematically showing a modification of the crystal vibrating piece having the support arm of the support portion, which is arranged only on one side of the vibration direction of the vibrating arm 150337.doc -22- 201131975. In the embodiment of the present invention, the same components as those of the above-described embodiment are denoted by the same reference numerals, and their description will be omitted. In FIG. 4, the crystal vibrating piece 50 includes a crystal substrate obtained by cutting and polishing a crystal z-plate into a specific thickness, which includes a base portion 2'' and a side end side from the base portion 21 (in the figure upwards (γ The end side of the _direction) is bifurcated and parallel to each other to extend one of the pair of vibrating arms 22. A pair of slits 41A, 41B are formed in the base portion 21, and the pair of slits 41A, 41B are disposed along the χ-axis direction in the orthogonal coordinate system formed by the X-axis, the Y-axis, and the Z-axis of the crystal. In the opposite direction of a straight line, the two main faces of the base portion 21 are in a retracted shape, and the base portion 21 includes a first portion 213 and a second portion 21b which are located on both sides via a pair of slits 41, sin, And connecting the connection portion thresholds of the second portion 21a and the second portion 21b between the pair of knife edges 41, 41, and 41. The pair of vibrating arms 22 are respectively provided with a wide portion, that is, a weight portion, on the front end side. Further, on the main surface of each of the vibrating arms 22, a bottomed long groove 26a is provided along each of the longitudinal direction of each of the vibrating arms 22. Although not shown, the surface of each of the long grooves 26a and the two side faces of each of the vibrating arms 22 is formed with an excitation electric current. The crystal vibrating piece 50 has the second portion from the base portion 21. The part is called extension =:, Mb. Each of the support arms I 鸠 and - the two ends of the vibrating arm 22 from the direction of the base two T intersections extend in opposite directions to each other, and are directed to the curved portions 31, 31b. a pair of bending and backward-step extension. The direction in which the vibrating arm 22 extends

The end portion of the base portion 21 on the opposite side of the slit 41B formed by cutting from the direction of -X 150337.doc •23·201131975 in the orthogonal coordinate system of the crystal (+X side) The support arm 30 of one of the extensions has a support portion 35 on the front end side. On the other hand, the other support arm 30b extending from the end portion of the base portion 21 on the slit 41B side in the -X direction in the orthogonal coordinate system of the crystal is shorter than the support arm 30 having one of the support portions 35. The holder has a fixing portion 39 without a support portion. In the crystal resonator piece 50 formed of the crystal Z plate, when formed by etching in two directions of the X-axis direction of the base portion 2, the pair of slits 41A, 41B are formed along the crystal axis. When the slit 41B in the χ direction is intersected, the etching anisotropy of the crystal Z plate causes the front end portion (corner portion) 42B of the inner wall of the slit 41B to form an undesired hole portion or an etch residue portion. The so-called flash side. The burr portion generated by the slit 41B may cause cracking and rupture when an impact is applied to the crystal resonator piece 50 due to dropping or the like, particularly when a tensile stress is applied to the burr portion, that is, when the vibration is applied. When the arm 22 is largely displaced in the +X direction, the strength is significantly deteriorated. According to the configuration of the crystal resonator element 50 of the present modification, the front end of the support arm 30 extending from the end portion (+X direction) of the base portion 21 on the opposite side to the slit in the X direction of the burr portion is formed. The support portion 35 is provided on the side, and the other support arm 30b has a fixing portion 39 that functions as a support structure for the crystal resonator piece 5, and is shorter than one of the support arms 3'' and has no support portion on the distal end side. Thereby, when the vibrating arm 22 is largely displaced in the direction in which the tensile stress is applied to the burr portion, that is, in the +X direction, the displacement of the vibrating arm 22 is restricted by the support portion 35, thereby preventing the impact resistance from being particularly weak. Flashing edge = cracking or breaking. 150337.doc •24·201131975 Here, the corner portion 42A of the inner wall of the slit 41A which is formed with the slit 41B on the side of the burr portion is not formed with a burr portion, and it is also difficult to cause a strong yield drop. The other support arm on the side of the base 21: the support portion may not be provided, and the length of the support arm 3〇15 may be short. Therefore, compared with the configuration in which the support arm % having the support portion 35 is disposed on both sides of the vibrating arm 22, the crystal resonator piece 5 which is small in size and excellent in impact resistance can be formed. The present invention has been described in detail with reference to the embodiments of the present invention. The invention is not limited to the embodiments described above, and various modifications may be made without departing from the spirit and scope of the invention. In the above-described embodiments and modifications, for example, the crystal vibrating piece 2, 5 having the configuration in which the slits 41A and 41B for suppressing the vibration leakage effect are provided in the base portion 21 is described as an embodiment in which the effects of the present invention are remarkably exhibited. Hey. The present invention is not limited to this. In the configuration in which the base portion is not provided with a slit, for example, in the vibrating piece having a narrow width in the same direction as the vibration direction of the vibrating arm and (4) small, the impact resistance can be improved. In the above-described embodiments and modifications, the crystal resonator element 2A including the vibrating arm 22 having the long groove 26b and the weight portion 29 is described as an example, but the vibration is not provided. Further, in the above-described embodiments and modifications, it is explained that in the support arm 3G including the support portion, an impact buffer member is provided at abutment portion of the support portion 35 with the vibration f22. The composition of 38. However, the configuration of the shock absorbing member 38 is also improved in impact resistance as compared with the vibration piece having no configuration of the support portion 35. 150337.doc •25· 201131975 The folding portion 35a provided on the distal end side of the support portion 35 of the support arm 30 may be configured not to be provided. Further, in the above-described embodiment, the crystal vibrating piece 2 of the U bending vibration mode has been described as an example. However, the present invention is not limited thereto, and the vibration mode of the vibration mode other than the bending vibration mode such as the twisting vibration mode is not the same as the above-described embodiment and the above-described embodiment. Impact resistance and the like. Further, in the above-described embodiments and modifications, the embodiment or the modification of the present invention in which the two vibrating arm base portions 21 are formed to extend in parallel with each other and which are formed in parallel with each other. However, the present invention is not limited to this, and even if it is a so-called beam-type vibrating piece composed of a vibrating arm having a base portion that is a fixed end, even a vibrating piece having three or more vibrating arms can obtain 4 The same effects as those of the above embodiments and modifications. In the above-described embodiments and modifications, the crystal resonator plates 20 and 50 including the crystal material which is one of the (four) body materials have been described. However, the present invention is not limited thereto, and lithium niobate, lithium niobate 箄泱a, and wenjing temple may be used. It is composed of piezoelectric materials other than water. Further, even if the vibration of, for example, Shishi Semiconductor, other than the body of the electric body, I, / aL, ^ ^, is used, the same effects as those of the above-described embodiment and modification can be obtained. The crystal vibrations described in the above embodiments and modifications are applicable to various electronic components other than components or piezoelectric elements. In the package, any one of the crystal vibrating reeds 2 〇 and 5 封装 in the package is joined by the holding arm 30 as a fixing portion, and at least the crystal vibrating pieces 20 and 50 are oscillated. The oscillation of the oscillator consisting of 70 pieces of Lei Zhengshi Ying 11 is increased, the Q value is decreased, or the vibrating bubble leaks to suppress the high performance. I50337.doc •26· 201131975 and can be miniaturized (Second Embodiment) Next, a crystal oscillation/description of the vibrating piece according to the second embodiment will be described. Fig. 5 is a view showing a crystal resonator piece ffcV and a Dingyang diagram according to the second embodiment. The crystal vibration % ^ ' T ' of the second embodiment described below will be mainly described with respect to the aspects of the embodiment, and the description of the same matters will be omitted. The crystal vibrating piece 7A of the embodiment of the present invention is provided with two vibrating arms 78 and (9) (10)) supporting arms extending from the end of the base portion 77 (the outer arm portions (10), MB's; the pair (two) support The arm 鸠 and the 75 Β are provided in parallel with the vibrating arms 78 and 79 with respect to the vibrating arm μ and the outer sides in the z-axis direction. The two vibrating arms 78 and 79 are provided with openings on the respective main faces. The bottomed long grooves 72 and 73. The two support arms 74A and 75b extend from the base portion 77 in the γ-axis direction and are arranged side by side in the X-axis direction. In the present embodiment, the support arms 74A and 75B are set to face end portions. The length of the end portions of the vibrating arms 78, 79. The distance between the support arms 74, 75, and the front end is wider than the base end side. Further, the end portion of the support arm 74 is provided with a shock absorbing support portion. (buffer portion) 241A, a support portion (buffer portion) 242b having impact absorption is provided in the middle of the support arm 74. Similarly, a support portion having shock absorption is provided at the end portion before the support arm 75A (buffer) Department) 25 1Β 'on the support arm 75Β A support portion (buffer portion) 252 具有 having a shock absorbing property is also provided. 150337.doc • 27.3. 201131975 The support portions (buffer portions) 241B and 2 are formed in such a manner that the width of the temple arm 74b is increased. In order to narrow the interval between the support f 74B and the vibration (four), in other words, the support portions (buffer portions) 241B and 242b are formed from the support arm 74B toward the vibrating arm 78 so as to be convex portions provided in a projecting shape from the support f 74b. (4) The support portions (buffer portions) 251B and 2 are formed such that the width of the support arm 75B is increased to narrow the distance between the support arm and the vibrating arm 79. In other words, the support portion (buffer portion) 25 ΐ β The support arm 75B is formed as a convex portion provided in a protruding shape from the support arm 75β toward the vibrating arm 79. Further, the support portions (buffer portions) 24ΐβ, 242B, 251B, and 252B of the present example are oriented and supported from the above. The arm 74b is also provided with a convex portion in a direction opposite to the direction in which the vibrating arms 78 and 79 are opposite to each other. However, as described above, the convex portion may be provided only in the direction from the support arms 746 and 75B toward the vibrating arms 78 and 79. The composition of The support portions (buffer portions) 241B and 251B at the front end portions of the arms 74B and 75B and the support portions 242B' 252B at the intermediate portion are provided apart from the respective vibration arms 78 and 79, and are configured as the respective vibration arms 78. When the axial direction is bent and deformed, at least i of the vibrating arms 78, 79 are contacted to block (limit) the further bending deformation preventing portion (restricting portion). In other words, the supporting portions 241B, 251B, 242B, 252B In ancient times, the support portions 241B' 251B, 242B, and 252B are disposed outside the amplitude range of the normal vibration of the adjacent vibrating arms 78, 79, and are disposed when the adjacent vibrating arms 78, 79 generate a range exceeding the normal amplitude range. When the amount is shifted, the position of the vibrating arms 78, 79 is abutted. 150337.doc -28- 201131975 Furthermore, it is clear that the above-mentioned vibrating arms 78 and 79 are the same as the above-described embodiment, and are in the range of the amplitude range of the m-passing movement, and are assisted by a specific resonance frequency (electricity, movement When the amplitudes of the vibrating arms 78 and 79 are the largest, the vibrations of the vibrating arms 78 and 79 are F # <pregnant, dare and large u. That is, even if the vibrating arm 78 vibrating at a specific resonance frequency is more special, When the amplitude of _y is the largest, the adjacent vibrating arms 78 and 79 are in contact with the support portion 241. The 251B, 242B, and 252B are also not connected to the vibrating arm 78 side of the straight support portion 241B provided at the front end of the support arm 74B. The portion 2411B is in contact with the vibrating arm 78 when the vibrating jaw 78&gt;^ + exceeds the amplitude range of the normal vibration to the support arm 74B side, and the vibrating arm 78 is in contact with the vibrating arm 78. At the same time, the support arm 74β &lt; r逑The portion 242 1 R,# _ of the side of the vibrating arm 78 provided on the support portion 242 会 is in contact with the vibrating arm π when the vibrating arm 78 is deformed in the X-axis direction toward the support arm 74B side. Similarly, the support arm 75B a portion of the vibrating arm 79 side 2511B measured by the support portion provided at the front end portion, When the vibration arm 79 reaches the amplitude range of the normal vibration and the bending deformation in the X-axis direction occurs, the vibration arm 79 comes into contact with the vibrating arm 79. This is the same as the support portion provided in the middle of the support arm 75B. The portion on the side of the vibrating arm 79 is ib, and is in contact with the vibrating arm when the vibrating arm 79 is bent in the X-axis direction toward the support arm 75B side. This supports portions 24iib, 2421B, 2511B, 2521B of #74B, 75B (blocking) The portion is brought into contact with a plurality of positions in the longitudinal direction of the vibrating arms 78 and 79 by the bending deformation of the vibrating arms π and 79 as described above. Thereby, the vibrating arms 78 and 79 and the supporting arms 74β and 75β are used. When the 24uB, 2421B, 25UB, and 2521B (blocking portions) are in contact, the impact of the vibration arms 78, 79 on the 150337.doc -29-201131975 can be prevented or alleviated. Also, the support arms 74β and 75B are halfway (the blocking portion) The portion 2421B ' 2521B respectively forms a curved convex surface that protrudes toward the side of the vibrating arm 78 ' 79. Therefore, the portion 2421B of the middle of the support arm 74B (the blocking portion) is vibrated by the bending deformation of the vibrating arm 28 as described above. Arm 78 is face-to-face Similarly, the portion 2521B of the middle of the support arm 75B (blocking portion) is in surface contact with the vibrating arm 79 by the bending deformation of the vibrating arm 79 as described above. Thereby, the vibrating arms 78, 79 and the supporting arm 74B When the portions 2421B and 2521B of the middle of the 75B (blocking portion) are in contact with each other, the vibration of the vibrating arms 78 and 79 can be prevented or alleviated from being locally applied. According to the second embodiment described above, the same effects as those of the first embodiment described above are exerted. (Third Embodiment) Next, a vibrating body including a crystal resonator piece as the resonator element described in the above embodiment will be described as a third embodiment. Fig. 6 is a schematic view showing a schematic configuration of a vibrating body according to a third embodiment, and Fig. 6(a) is a plan view. Fig. 6(b) is a cross-sectional view taken along line f_f of Fig. 6(a). In the present embodiment, a configuration in which the crystal resonator element 2A as the resonator element described in the first embodiment is used as an example will be described. As shown in Fig. 6, the crystal vibrating body 5 as the vibrating body includes the crystal vibrating piece 20 of the first embodiment and the package 80 for accommodating the crystal vibrating piece 20. The package body includes a package base 81, a seamless ring 82, a cover 85, and the like. The package base 81 is formed with a recessed portion so as to accommodate the crystal resonator element 20, and is provided with a mounting electrode (not shown) of the crystal resonator element 2 at two portions of the recess 150337.doc • 30·201131975. The connection pad 88. The connection pad 88 is formed to be connected to the wiring in the package base 81, and is electrically connected to the external connection terminal 83 provided on the outer peripheral portion of the package base 81. A seamless ring 82 is provided around the recess of the package base 81. Further, a through hole 86 is formed in the bottom of the package base 81. The crystal resonator element 2 is bonded to the connection pad 88 of the package base 81 via the conductive adhesive 84. Further, the package 8 is formed by seamlessly bonding the cover 85 covering the recess of the package base 81 to the seamless ring 82. The through hole % of the package base 81 is filled with a sealing material 87 containing a metal material or the like. The sealing material 87 is melted in a reduced-pressure gas atmosphere and solidified to hermetically seal the through-holes 86 so that the inside of the package base 81 can be maintained in a reduced pressure state. In the crystal resonator 5, the crystal resonator element 2 is excited by a drive signal from the outside via the external connection terminal 83, and is oscillated (resonant) at a specific frequency (for example, 32 kHz). As described above, since the crystal vibrating body 5 includes the crystal vibrating piece 20 described in the above embodiment, the crystal vibrating body 5 having stable vibration characteristics and high impact resistance can be provided. Further, the crystal vibrating body 5 can obtain the same effect even if a vibrating piece of another form such as the crystal vibrating piece 70 is used instead of the crystal vibrating piece 20. Further, in the present embodiment, the configuration in which the crystal resonator element 2 is fixed to the connection pads 88 provided at two locations has been described. However, the connection pad 88 is not limited to two locations' and may be provided in a desired number. The connection to the crystal resonator piece 2 can also be performed at a desired connection portion. (Fourth Embodiment) 150337.doc -31 - 201131975 Next, as a fourth embodiment, an oscillator including a crystal resonator piece as the above-described diaphragm will be described. Fig. 7 is a schematic view showing a schematic configuration of an oscillator according to a fourth embodiment, Fig. 7(a) is a plan view, and Fig. 7(b) is a cross-sectional view taken along line G_G of Fig. 7(a). In the present embodiment, a description will be given of a configuration in which the vibrating piece "crystal vibrating piece 2" described in the above-described third embodiment is used as an example. The crystal oscillator 6 as an oscillator is configured to include a circuit element in the configuration of the crystal resonator 5 described above. The same components as those of the crystal vibrating body 5 will be denoted by the same reference numerals and will not be described in detail. As shown in Fig. 7, the crystal oscillator 6 includes a crystal resonator element 20 of the first embodiment, a 1C chip 91 having circuit elements for vibrating the crystal resonator element 2, and a crystal resonator piece 2; And 1 (: the package 80 of the wafer 91. The IC chip 91 is fixed to the bottom of the package base 81, and is connected to other wirings by a metal wire 92 such as a gold wire. In the crystal oscillator 6, by the chip from the 1C 91 The crystal oscillator 2 is excited by the drive signal of the oscillation circuit and is oscillated (resonant) at a specific frequency (for example, '32 kHz). As described above, the crystal oscillator 6 includes the crystal described in the above embodiment. The vibrating piece 20 can provide a crystal vibrator 6 having stable vibration characteristics and high impact resistance. Further, the crystal oscillator 6 can obtain the same even if the crystal vibrating piece 7 is used instead of the crystal vibrating piece 20'. Further, in the present embodiment, the configuration in which the crystal resonator element 20 is fixed to the connection pads 88 provided at two locations has been described. However, the connection pad 88 is not limited to 150337.doc •32·201131975 in two locations. ,also The desired amount is set, and the connection to the crystal resonator element 2 is also performed at a desired connection portion. [Industrial Applicability] The crystal resonator piece 20, 70 as the above-mentioned vibration piece includes a support portion, and the support When the vibrating arm is largely displaced due to the impact of the lower arm, the shock is both moderated and the displacement of the vibrating arm is restricted, so that the impact resistance and the stable vibration characteristics can be ensured. Therefore, the crystal vibrating piece is maintained. 2G, 7G packaged crystal vibrating body ^ or crystal oscillator mi|6 can be widely used as digital components, such as digital mobile devices, personal computers, electronic clocks, video recorders, televisions and other electronic devices. It can be preferably used for miniaturization of these electronic devices, etc., and is particularly suitable for use in an action machine that requires impact resistance, etc. [Simplified description of the drawing] A-type 杈-type steeply ° 明 明 observe from the main side of the side Fig. 2 is a plan view schematically showing a cross section of each portion of the crystal vibrating piece, Fig. 2U) is a cross-sectional view taken along line aa of Fig. 1, and Fig. 2 Fig. 2 b) is the line cc of Figure 1 FIG, b-b line cross-sectional view of FIG. 1 (c) of FIG. 2 lines. Fig. 3 is a partially enlarged view showing a portion of the side of the vibrating arm viewed from the direction of the arrow E of Fig. i. Fig. 4 is a plan view schematically showing a modification of the crystal resonator piece as a vibrating piece. =5 is a plan view schematically showing a crystal oscillation piece as the resonator element of the second embodiment. Fig. 6 is a schematic view showing a schematic configuration of a vibrating body according to a third embodiment, Fig. 6(a) is a plan view, and Fig. 6(b) is a cross-sectional view taken along line iF_F of Fig. 6(a). Fig. 7 is a schematic view showing a schematic configuration of an oscillator according to a fourth embodiment, Fig. 7(a) is a plan view, and Fig. 7(b) is a cross-sectional view taken along line G_G of Fig. 7(a). Fig. 8 is a plan view schematically showing a tuning fork type crystal boring piece as a prior vibrating piece. [Explanation of main components] 5 6 20, 50 21 , 77 , 121 21a , 121a 21b , 121b 21c , 121c 22 , 78 , 79 ' 122 26a, 26b, 72 ' 73, 126 27 29

30, 30b, 74B, 75B 31, 31b 32 33

35, 241B, 242B, 251B, 252B crystal vibrating body crystal vibrator as crystal vibrating piece base part 1 part 2 connecting part vibrating arm long groove corner part weight support arm bending part wide part narrow part Supporting portion 150337.doc -34- 201131975 35a 38 39 41A, 41B, 141A, 141B 42A, 42B, 142A, 142B 43 ' 44 80 81 82 83 84 85 86 87 88 91 92 100

2411B, 2421B, 2511B, 2521B SI 'S2 ' S3 tl, t2, t3 Folding section Shock absorbing member fixing section σ (notched) front end excitation electrode package package base pedestal seamless ring external connection terminal conductivity Agent cover through-hole sealing material connection pad 1C wafer metal wire as the previous vibration piece> 部分 type crystal resonator piece support arm 74Β, 75Β partial cross-sectional area width 150337.doc -35-

Claims (1)

201131975 VII. Patent application scope: a vibrating piece, characterized in that: a base portion; a vibration #, which extends from the base portion; a ''the system extends from the base portion' and at least a part of the vibrating arms extend in parallel; and Two: 邛, which is formed by extending one of the support arms to a protrusion shape so as to become narrower than the vibration arm. 2' wherein the vibrating piece of the item 1 is disposed outside the amplitude range of the vibration of the vibrating arm generated by an electric field applied to the vibrating arm from the outside, and the vibrating arm exceeds the above The position where the above-mentioned vibrating arm contacts when the amplitude range is shifted. 3. The vibrating piece according to the item 1 or 2, wherein the support portion is provided with a front end side of the support arm. The vibrating piece according to claim 1 or 2, wherein the support portion is provided in the plurality of support arms, and is configured to be plural in a longitudinal direction of the vibrating arm by the bending deformation of the vibrating arm Location contact. 5. The vibrating piece according to any one of the preceding claims, wherein the vibrating arm has two main faces and two sides connecting the two main faces and extending in the longitudinal direction of the vibrating arm, and the vibrating arm Further, the longitudinal direction of the vibrating arm is further provided with a bottomed long groove having an opening on at least one of the two main faces, and the support portion is disposed such that the vibrating arm exceeds the normal vibration 150337 When the amplitude range of the .doc 201131975 is displaced and the vibrating arm is in contact with the support portion, the portion of the support portion that abuts against the vibrating arm is closer to the distal end than the region where the long groove is formed. 6. The vibrating piece according to any one of claims 1 to 5, wherein a weight portion wider than a width of the base portion of the vibrating arm is provided on a front end side of the vibrating arm, and the vibrating piece is configured to be When the vibrating arm is displaced beyond the amplitude range of the normal vibration and comes into contact with the support portion, a portion of the support portion that abuts against the vibrating arm comes into contact with the weight portion. 7. The vibrating piece according to claim 6, wherein the vibrating piece is disposed such that the abutting portion of the support portion is in surface contact with a side surface of the weight portion of the vibrating arm. 8. The vibrating piece according to any one of claims 1 to 7, wherein the support arm has a portion which is thinner than a portion of the thinnest portion between the two side faces of the vibrating arm. 9. The vibrating piece according to any one of the preceding claims, wherein the width of the support portion is formed to be smaller than a width of the base portion side of the support arm. 10. The vibrating piece according to any one of claims 9 to 9, which is a piezoelectric vibrating piece formed of a piezoelectric material. 11. The vibrating piece of claim 10, wherein crystal is used as the piezoelectric material, the base has a pair of slits disposed along the X-axis, the γ-axis, and the In the orthogonal coordinate system formed by the shaft 150337.doc 201131975, the straight line of the X-axis direction is upward, and the two main faces of the base exhibit a retracted shape, and the vibrating arm is from the γ-axis of the base. The upper end is extended, and the end portion of the direction is provided with a support arm on the 乂-axis side of at least the side of the vibrating arm. - provided with the above support portion 12 13. 14. 15. 15. The vibration component according to any one of claims 1 to 1! is provided with an impact buffer member. The vibrating body of the above-mentioned abutting portion, comprising: the vibrating piece according to any one of claims 1 to 12; and a package that accommodates the vibrating piece. An oscillator characterized by: The vibrating piece according to any one of items 1 to 2, wherein the circuit 7L is provided with the vibrating piece oscillating package, the vibrating piece and the circuit, and the electronic device are characterized in that As requested: A vibrating piece, such as any of the vibrating bodies 12 of claim 13. For example, h seeks the vibration of item 14 150337.doc