201039931 . 六、發明說明： • 【發明所屬之技術領域】 、 本發明係關於一種玻璃基板清潔裝置及方法，特別是指一 種了達到有效人力配置及改善產品良率之玻璃基板清潔裝置 及方法。 【先前技術】 〇 按’隨著光電科技的日新月異，平面顯示ϋ逐漸取代了 以往的CRT顯示器，成為家庭、企業、教育、研發及政府等單 位重要的資訊設備。由於平面顯示器具備外型輕巧不佔空間、 環保省電、晝質與應答速度不斷提升等特性，使得它被大量運 用於電子錶、電子計算機、行動電話、pDA、筆記型及桌上型 電腦、液晶電視、電子儀表等產品，成為資訊時代中人們不可 或缺的聯絡與資訊取得的介面。平面顧示器可分類為主動發光 0 1 (例如·PDP、LED、0LED等）及被動發光型的液晶顯示器。 主動發光麵示器具備自發光的特性，無須使用背光板，故可 製造出更為輕量化與薄型化的產品，預期將是未來平面顯示器 的主抓被動發光型的液晶顯示器經過多年的研發，技術逐漸 f熟’各種面板的尺寸包含大、中、小型等均已商品化，且廣 又4費者歡迎。液晶顯示器依技術可分類為主動矩陣 (TFT-LCD)及單純矩陣式（TN、stn_lcd)兩類，其中主動矩 陣式液晶顯示器（TFT侧的製作流程雖然較為複雜，但因 201039931 影像品質與應答速度均優於其他型式職晶顯示器，所以應用 領域較廣。TFT-LCD元件的基本構造包含偏光片、玻璃基板、 彩色濾光片、ΙΤ0玻璃、液晶、及TFT陣列等，其作用原理係 當電流使TFT陣列產生電場變化時，液晶分子會產生偏轉，改 變光線的偏極性，再利用偏光片決定晝素的明暗狀態。上層玻 璃若進一步貼合彩色濾光片，則可形成紅藍綠色彩的晝素，構 成面板上的彩色影像晝面。 一般TFT-LCD液晶顯示器的面板組裝製程中會包含有一 偏光片貼合之貼片製程’主要係將偏光片貼附於玻璃基板之上 表面及下表面，因偏光片係製作液晶面板的重要組件，故貼片 之良窳至為影響液晶顯示器之品質。而要完成良好之貼片製 程’基本要求係先確保玻璃基板之清潔，亦即在貼合過程中務 必清除玻璃基板上的灰塵與油污，並避免產生靜電，以保持貼 片成品的清潔。 目前習知之貼片製程，有相當高比例的業者係採用人工 方式進行玻璃基板之清潔；其主要動作係將玻璃基板從匣盤 (Tray)取出，將數個玻璃基板排列放置於工作平台上同時進 行清潔工作，清潔工具則包括刀片、無塵布與酒精，清潔完畢 後再將玻璃基板放回匣盤（Tray)内，以等待搬運到貼片區。 採甩人工清潔玻璃基板雖係目前製作液晶面板之貼片製程中 習知常見之清潔方式，惟因其實為非標準性之作業，導致明顯 201039931 存在箸如下缺失： 一、 各種面板尺寸有所不同，故在貼合中尺寸以上之面板時， 必須增加清潔玻璃基板的人力，造成在不同面板尺寸時備 工不一致之麻煩。 二、 由於每個人的個性與細心度不同，故以人工清潔玻璃基 板時頗為影響玻璃基板的乾淨度與作業速度。 二、當人工清潔玻璃基板成為貼片作業中的必要過程時，為 了提高產能，業者在採用人工清潔玻璃基板之後，會利用 设備進打自動化貼片作業。惟由於人工清潔玻璃板的速度 無法與設備貼片速度配合’以致形成工作的瓶頸，造成其 他作業人員的閒置。 【發明内容】 針對以上缺失，本發明人乃深入構思研發改良，在經長時 間努力後遂有本發明產生。 緣是，本發明之主要目的即在提供一種能達到有效人力配 置及改善產品良率之玻璃基板清潔裴置及方法。 為達成上述目的，本發明即設計一種玻璃基板清潔裝置， 構造組成上具有一座體，其上二側分別設有一第一縱向移動機 構及一第一縱向移動機構，主要係各帶動一座板作直向進退運 動，藉以調整座板之縱深位置；在各座板之内側面分別結合— 5 201039931 ㈣片固定機構及擦拭糊定機構，使分別位在座體頂面之 j後侧’刀片固疋機構底部裝設有靜電產生器與風刀裝置及 刮刀，擦拭布固定_底部雕設材由轉㈣動轉動之無塵 :’該座體上位於該第—縱向移動機構、第二縱向移動機構及 兩 '後側列固定機構與擦拭布固定機構間之範圍内設置有一 ^片工作平台、一下片工作平台及一翻轉機構，該上片工作平 :口之頂面上穿設有錄吸孔，並開設有數道呈平行之容置槽， =下片工作平台與該上紅作平台相距—距離，頂面上穿設有 多數吸孔’該翻轉機構由一架座固定架設於該座體上，有一轉 動軸牙&雜座’外側端受—動力城帶動而可作往復翻轉動 作，内側端接設-連桿，再於該連桿之另端樞接一由若干支可 對應容置入該上片工作平台之容置槽内之桿件接設而成之承 载平台，該等桿件與該上h作平台併置之面上穿对多數吸 孔。 在上述發明中’該第一縱向移動機構及第二縱向移動機構 係以馬達帶解螺桿猶，以_該雜作直向進退運動。 在上述發明中，刀片固定機構及擦拭布固定機構可作橫向 位置之微調及可調整作用時之下壓位置。 在上述發明中，該上片工作平台固定架設於座體上，可微 調其高低及平面之位置。 在上述發明令，該下片工作平台固定架設於座體上，可微 調其高低及平面之位置。 201039931 .μ t錢财’該上紅作平台之吸孔朗連通至一真空 :她=雜财，訂^作料之魏制連通至一真空 魏种’該承载平台之桿件上之吸孔共同連通至-真空抽吸器。 ❹ 本㈣_触—種麵紐赫方法，雜肖一清潔裝 玻璃基板之清潔工作，該清潔裝置具有-座體，其上二 條：設有—第―縱向移動機構及—第二縱向移動機構，主要 糸各帶動—座板作直向進退運動，藉以調整座板之縱深位置； j各座板之内侧面分別結合—組刀片固定機構及擦拭布固定 機構，使分耻在座_蚊前、後側；刀Μ定機構底部裝 j有靜電產生器與風刀裝置及刮刀，擦拭布固定機構底部則裝 D 叹有可由轉軸帶動猶之無塵布；該座體上位於該第-縱向移 動機構、第一縱向移動機構及前、後侧刀片固定機構與捧拭布 固定機·之範_設置有_以工作平台、—下片工作平么 口及，轉機構，上片工作平台之頂面上穿設有連通至一真細 f器之多數吸孔，並開設植道呈平行之容置槽，下片工作平 °與上片J1作平台相距—距離，頂面上粒有連通至—真空抽 吸之夕數吸孔，翻轉機構由—架座固定架設於該座體上，有 一轉動軸穿設該架座，外側端受—動力缸體帶動而可作往復翻 轉動作’内侧端接設-連桿，再於該連桿之另端樞接—由若干 7 201039931 支可對應谷置人該上片功平台之容置槽内之桿件接設而成 之承載平台，該等桿件與上片工作平台併置之面上穿設有連通 至一真空抽吸器之多數吸孔； —使用該清潔裝置時，翻轉機構之承载平台之桿件一對一對 f谷置入上片工作平台之容置彻，使承餅台與上片工作平 台共同形成—平面’錢啟動真空抽吸器，使該等桿件上之吸 孔與該上狂作平台上之飢具核力；接著將-麵基板放 ^其上心卩嶋德㈣，纟规共同將玻 土反的面雜；接始對該玻縣板之第 潔工作，其步驟如下： 灯π 由。亥第-縱向移動機構帶動刀片固定機構底部所設之靜電 產生器與助奸通财魏板第―面上方， 面的靜電與粉塵； /于、玻离表 以濕潤玻 璃基板之表面； 二鹿2第—縱向移動機構帶動擦拭布固定機構底部所設之益 塵布噴相精對麵基板第—面進行接觸性擦拭， 三、由該第-縱向移動機構帶動刀片固 作接觸性施力到過破璃基板的第-面’· " ^ 177 =該第一縱向移動機構帶動擦拭布固定機 塵布再度對玻璃基板第一面進行接觸性擦拭； ' 五 '由該第-縱向移動機構帶動刀 產生哭盘風77 觸底麵設之靜電 〜裝置再度通過玻絲« — *切，《清除玻 201039931 璃表面的靜電； 接著，翻轉機構之承載平台繼續吸住該玻璃基板的第二面 4上片工作平台上之吸孔則停止吸力，域啟動動力缸體帶 動轉動軸轉動’進而連動該連桿、承載平台與玻璃基板往下片 工作平台處轉縣，同時啟動妓抽吸器，使下片工作平台 上之吸孔具有吸力，以將玻璃基板的第一面吸住；接著，停:201039931. VI. Description of the Invention: • Technical Field of the Invention The present invention relates to a glass substrate cleaning apparatus and method, and more particularly to a glass substrate cleaning apparatus and method for achieving effective manpower configuration and improving product yield. [Prior Art] 〇 Press 'With the rapid development of optoelectronic technology, the flat display ϋ has gradually replaced the previous CRT monitors and become an important information device for families, businesses, education, R&D and government. Because the flat panel display has the characteristics of light weight, no space, environmental protection, high quality and high response speed, it is widely used in electronic watches, electronic computers, mobile phones, pDA, notebook and desktop computers. LCD TVs, electronic instruments and other products have become the indispensable contact and information interface for people in the information age. The planar indicator can be classified into active illumination 0 1 (for example, PDP, LED, OLED, etc.) and a passive illumination type liquid crystal display. The active light-emitting surface display has self-illuminating characteristics, and it is not necessary to use a backlight board, so that a lighter and thinner product can be manufactured, and it is expected that the liquid crystal display of the passive light-emitting type of the flat panel display will be developed for many years. The technology is gradually familiar with 'the size of various panels including large, medium and small, etc. have been commercialized, and wide and 4 are welcome. Liquid crystal displays can be classified into active matrix (TFT-LCD) and simple matrix (TN, stn_lcd) according to technology, among which active matrix liquid crystal displays (the TFT side production process is more complicated, but due to 201039931 image quality and response speed) They are superior to other types of occupational crystal displays, so they have a wide range of applications. The basic structure of TFT-LCD components includes polarizers, glass substrates, color filters, ΙΤ0 glass, liquid crystals, and TFT arrays. When the electric field of the TFT array is changed, the liquid crystal molecules will deflect, change the polarity of the light, and then use the polarizer to determine the light and dark state of the element. If the upper glass is further fitted with the color filter, it can form a red, blue and green color. The element is a color image on the panel. Generally, the panel assembly process of the TFT-LCD liquid crystal display includes a polarizer-bonded patch process, which mainly attaches the polarizer to the upper surface and the lower surface of the glass substrate. On the surface, since the polarizer is an important component of the liquid crystal panel, the quality of the patch affects the quality of the liquid crystal display. The basic requirement for a good patch process is to ensure the cleanness of the glass substrate, that is, to remove dust and oil from the glass substrate during the bonding process, and to avoid static electricity to keep the finished product clean. In the patch process, a relatively high percentage of the manufacturers use manual methods to clean the glass substrate; the main action is to take the glass substrate out of the Tray, and arrange several glass substrates on the working platform while cleaning. The cleaning tool includes a blade, a dust-free cloth and alcohol. After cleaning, the glass substrate is placed back into the tray (Tray) to be transported to the patch area. The manual cleaning of the glass substrate is currently made of a liquid crystal panel. In the process of patching, the common cleaning method is known. However, due to the fact that it is a non-standard operation, the following 201039931 has the following defects: 1. The dimensions of various panels are different, so when fitting the panel above the size, it must be Increasing the manpower of cleaning the glass substrate, causing inconsistencies in the preparation of different panel sizes. The personality and the degree of care are different, so the cleaning of the glass substrate manually affects the cleanliness and operation speed of the glass substrate. 2. When the manual cleaning of the glass substrate becomes a necessary process in the patching operation, in order to increase the productivity, the manufacturer adopts After manually cleaning the glass substrate, the device will be used to perform automated patching work. However, since the speed of manually cleaning the glass plate cannot be matched with the device patch speed, the bottleneck of the work is formed, causing other workers to idle. [Summary of the Invention] In view of the above, the present inventors have intensively conceived research and development improvements, and have produced the present invention after a long period of effort. The reason is that the main object of the present invention is to provide a glass substrate capable of achieving effective manpower configuration and improving product yield. In order to achieve the above object, the present invention provides a glass substrate cleaning device having a structural body having a first longitudinal movement mechanism and a first longitudinal movement mechanism, respectively. Each of the plates is driven to move straight forward and backward to adjust the depth of the seat plate. Position; respectively, the inner side of each seat plate is combined - 5 201039931 (four) sheet fixing mechanism and wiping paste mechanism, so that the bottom of the top surface of the seat is located at the bottom of the blade solid-state mechanism is equipped with an electrostatic generator and a wind knife The device and the scraper, the wiping cloth is fixed _ the bottom carving material is turned by the rotating (four) moving dust: 'the seat is located on the first-longitudinal moving mechanism, the second longitudinal moving mechanism and the two 'rear side column fixing mechanism and the wiping cloth A working platform, a lower working platform and a turning mechanism are arranged in the range between the fixing mechanisms, and the upper working piece is flat: the top surface of the mouth is provided with a recording suction hole, and a plurality of parallel receiving grooves are opened. , = the lower working platform is spaced apart from the upper red platform - the distance is, the top surface is provided with a plurality of suction holes'. The turning mechanism is fixedly mounted on the seat body by a seat, and has a rotating shaft & The outer end is driven by the power city and can be reciprocated, the inner end is connected with a connecting rod, and then the other end of the connecting rod is pivotally connected with a plurality of receiving slots corresponding to the working platform of the upper working piece. The inner rod is connected to the bearing , Such juxtaposition of the rod member and the upper surface of the platform through h for most of the suction holes. In the above invention, the first longitudinal movement mechanism and the second longitudinal movement mechanism are driven by the motor belt, and the movement is forward and backward. In the above invention, the blade fixing mechanism and the wiping cloth fixing mechanism can be used for fine adjustment of the lateral position and pressure position at the time of adjustment. In the above invention, the upper working platform is fixedly mounted on the base body, and the position of the height and the plane can be finely adjusted. In the above invention, the lower working platform is fixedly mounted on the base body, and the position of the height and the plane can be finely adjusted. 201039931 .μt钱财' The suction hole of the red platform is connected to a vacuum: she = miscellaneous wealth, ordering the Wei system of the material to connect to a vacuum Wei species 'the suction hole on the rod of the bearing platform Connect to - vacuum aspirator. ❹ (4) _ touch-species Newh method, the cleaning work of the cleaning glass substrate, the cleaning device has a body, the upper two: provided - the first - longitudinal movement mechanism and - the second longitudinal movement mechanism The main 糸 糸 — 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座The back side; the bottom of the knife setting mechanism has an electrostatic generator and a wind knife device and a scraper, and the bottom of the wiping cloth fixing mechanism is provided with a D-slack that can be driven by the rotating shaft; the seat is located in the first-longitudinal movement The mechanism, the first longitudinal moving mechanism, and the front and rear side blade fixing mechanisms and the holding cloth fixing machine are provided with a working platform, a working piece for the lower piece, a turning mechanism, and a top of the working platform. The surface is provided with a plurality of suction holes connected to a true fine device, and the storage path is parallel to the receiving groove, and the lower piece works at a distance from the upper piece J1 as a platform-distance, and the top surface is connected to the grain. - vacuum suction, the number of suction holes, turn The mechanism is fixedly mounted on the base body by a frame, and a rotating shaft is passed through the frame seat, and the outer end is driven by the power cylinder to be reciprocated and flipped, and the inner end is connected to the connecting rod, and then the connecting rod is connected to the connecting rod. The other end of the pivotal connection—a number of 7 201039931 bearers that can be connected to the rods in the receiving slots of the upper working platform of the valley, and the joints of the rods and the upper working platform Wearing a plurality of suction holes connected to a vacuum aspirator; - when the cleaning device is used, a pair of rods of the bearing platform of the inverting mechanism are placed in the upper working platform to accommodate the cake The platform is formed together with the upper working platform - the plane 'money starts the vacuum aspirator, so that the suction holes on the rods and the hunger on the upper platform are nuclear; then the substrate is placed on the upper core Jude (four), the rules and regulations will jointly make the surface of the glassy soil; the first step of the clean work of the glass county plate, the steps are as follows: Light π. The Haidi-longitudinal moving mechanism drives the static electricity generator set at the bottom of the blade fixing mechanism and the electrostatic and dust on the surface of the top of the surface of the helper, and the surface of the glass substrate to wet the glass substrate; 2 The first-longitudinal moving mechanism drives the dust-repellent cloth sprayed on the bottom of the wiping cloth fixing mechanism to perform the contact wiping on the first surface of the surface of the substrate, and the third-side moving mechanism drives the blade to make the contact force applied to the surface. The first side of the glass substrate '· " ^ 177 = the first longitudinal moving mechanism drives the wiper to fix the dust cloth to contact the first side of the glass substrate again; 'five' is driven by the first-longitudinal moving mechanism The knife produces a crying wind 77. The static electricity is set on the bottom of the touch. The device is again cut through the glass wire « — *, "clearing the static electricity on the surface of the glass 201039931; then, the carrying platform of the flip mechanism continues to suck the second side of the glass substrate 4 The suction hole on the upper working platform stops the suction, and the domain starts the power cylinder to drive the rotating shaft to rotate 'and further links the connecting rod, the carrying platform and the glass substrate to the lower working platform, and simultaneously starts The aspirator is activated so that the suction hole on the lower working platform has suction to suck the first side of the glass substrate; then, stop:
承載平台之動，並啟_力_帶_猶細轉，使連 該連桿與承齡台往該上h作平台處翻翻去，直至平 台之桿件重行—對—容置人該上“作平台之容置槽内為 同時對該玻璃基板之第二面進行清紅作，其步驟如下: 一、由該第二縱向移動機構帶動刀片固定機構底部所設之靜 電產生器與風膽置通過玻璃基板2第二面上方，以 璃表面的靜電與粉塵； Z月承破 以濕潤 二、由該第二縱向移動機構帶動擦拭布固定機構底 ‘、、、塵布嗔沾酒精對玻璃基板第二面進行接觸性 又 破璃基板表面； τ 三、由該第二縱向移動機構帶動刀片固定機構底 刀作接觸性施力到過玻璃基板的第二面。 心之刮 該第二縱向移動機構㈣顧相定機構底 塵布再度對玻璃基板第二面進行接觸性擦找。。又之無 设之靜電 β清除破 I由該第二縱向移動機構帶動刀片固定機構底部所 產生器與風刀裝置再度通過玻璃基板第二面上方 9 201039931 璃表面的靜電。 【實施方式】 本發明為達成上述目的，所採狀技術手段及可達致之功 效，兹舉町較佳可行實施紙合關進行詳轉說明，俾能 完全暸解。 請參閱第-圖所示，本發明實施例整體為一清潔裝置卜 其構造組祕在-座體1G上二側分別設有—第—縱向移動機 構21及一第二縱向移動機構22，其設置之構造方式可以有很 多種’本實施係分別以馬達211、221帶動導螺桿212、瓜 轉動’以帶動一座板213、223作直向進退運動之方式達成， 藉以膽座板213、223之縱深位置；冑配合參閱第二圖所示， 在座板213、223之内側面藉由架設架體之方式分別結合一組 橫向設置之刀片固定機構23 (如第三圖所示）及擦拭布°固定 機構24 (如第四圖所示），其係可作橫向位置之微調（藉由在 長槽孔内移動以達成）及可調整作用時之下屋位置（藉由^服 馬達或立向動力缸達成），二組之刀片固賴構23與擦拭布固 定機構24係分別位在座體1〇頂面之前、後側；該等刀片固定 機構23底部裝設有靜電產生器與風刀裝置231 (如第五圖戶^ 示）及刮刀232 (如第六圖所示）；而該等擦钱布固定機構以 底部則裝設有可由轉軸帶動轉動之無塵布241 V方1弟七圖所 示）。 接著，請配合參閱第八圖所示，在座體10上位於詨第一 10 201039931 ' 縱向純麟21、第二縱向移軸構22及前、賴之刀片固 疋機構23與擦拭布固定機構％間之範圍内設置有一上片工 作平σ 25、-下片工作平台％及一鋪機構;其中，該 •上片工作平台25係被固定架設於_體1〇上（可微調其高 低及平面之位錢再加以固定），頂面上穿設有多數吸孔 251，並開設有數道呈平行之容置槽说，該等吸孔⑸共同 連通至-另設之真空抽吸器（未設於圖）；該下片工作平台％ 〇 純固定架設_賴1G上（可微雛高低及平面之位置後 再加以固定），並與該上片工作平台25相距一距離，其頂面 上亦穿設有多數吸孔261，係共同連通至一另設之真空抽吸器 (未δ又於圖）’該翻轉機構27由一架座271固定架設於該座 體10上’-轉動軸272穿設該架座27卜外側端受一動力紅 體273帶動而可使轉動轴说作特定角度（接近明之往 〇 復翻轉動作’内側端接設一連桿274，再於該連桿謂之另端 _接&右干支可對應容置入該上片工作平台b之容置槽 252内之捍件275!接設而成之承載平台2乃，在該等桿件奶1 之一面（與該上片工作平台25併置之面）上穿設有多數吸孔 2752 ’係共同連通至一另設之真空抽吸器（未設於圓）。 使用清潔裝置1時，該翻轉機構27之承载平台奶之桿 件275!係一對一對應容置入該上片工作平㈣之毅槽= 内’使該賴平台275與該上紅作平台％刺形成一平 面，然後啟動真空抽吸器，使該等捍件2751上之吸孔奶2 201039931 /、該上片工作平台25上之吸孔251冑具有吸力；接著即將一 玻璃基板2放置於其上（可藉由人卫作置放之動作或藉由機 械手臂作自動置放之動作），並㈣該等桿件2751上吸孔 52^、該上片工作平台25上吸孔251之吸力共同將玻璃基板 2的第二面吸住（如第人圖所示）；接騎開始對該玻璃基板 之第面進行清潔工作，其係經過如下步驟·· 一、對玻璃基板2的第-面進行清除靜電與粉塵之工作。由 於玻璃基板在儲存與搬運的過程中，常會因縣而累積靜 電，導致吸附粉塵而影響貼片的良率，為避免此一現象發 生，本發明清潔工作的第一步驟即由該第一縱向移動機構 21帶動刀片固定機構23底部所設之靜電產生器與風刀裝置 231 (如第五圖所示）通過破璃基板2第一面上方，藉以清 除玻璃表面的靜電與粉塵。 ―、對玻縣板2的第—面進行酒精布擦拭之工作。由於玻 璃基板經過第-步驟後表面呈現乾狀，導致殘留的里物會 以塊狀模式附著在玻喊面上；除外，_基板2的表面 右沾染了油垢’上述靜電產生器與風刀衷置231可能益法 f，因此本發明清紅麵第二步卿由該第-縱向移 動機構2!帶動擦拭布固定機構24底部所設之無塵布糾 七騎示）料鱗對玻板2第-面進行翻 似玻璃基板2之表面，以減少異物的附著 力亚同日错潔玻璃基板2表面上可能的油垢。 12 201039931 二2麵基板2的第—面進行刮除表面之4。玻璃基板2 =弟-面經過喷沾酒精的無塵布241擦拭後，即進行第三步 =即由該第-縱向移動機構21帶動刀片固定機構23底部 又之刮刀232 (如第六圖所示）作接觸性施力刮過玻璃基 板2的第—面’以將_清_麵硬塊刮除。 Ο ❹ 四、對麵基板2的第-面進行酒精布擦拭之工作。玻璃基板 的第-面經由上述刮刀232到除之步驟後，可能留下硬塊 ^塵等異物與酒精產生反應所遺留職狀物，因此本發明 2潔工作的第四步驟即由該第—縱向移動機構η帶動擦拭 相定機構24底部所設之無塵物再賴玻璃基板2第 面進行接觸性擦拭’確保清除其它細小的異物。 五、對破璃基板2的第-面進行清除靜電之工作。為了避免前 迷各步驟之作料致朗基板2 _ —面產生靜電，故本發 ^潔工作的第五步斷由該第—縱向移動機構以帶動刀 片固疋機構23底部所設之靜電產生器與風刀裝置231再度 通過破璃基板2第-面上方，藉以清除玻璃表面的靜電。 4接著/該翻轉機構27之承载平台275繼續吸住該玻璃基 的第一面’但该上片工作平台％上之吸孔Mi則停止吸 (h止抽吸）’織啟動該動力缸體273帶動轉動轴奶 下動工進而連動該連桿274、承載平台2乃與玻璃基板2往該 、乍平σ 26處翻轉過去，同時啟動真空抽吸器，使該下 乍平D 26上之吸孔261具有吸力，以將玻璃基板2的第 201039931 一面吸住（如第九騎示）；接著，停均承齡台275之吸 力，並啟動該動力缸體273帶動該轉動轴272回轉，使 連桿274與承載平台275往該上叫鄉台25處轉回去，X 直至該承載平台275之桿件加重行一對-容置入士亥上片 作平台Μ之容置槽252内為止。同時即對該麵基板2之= -面進行清潔工作，其係經過與上述相同之步驟，即. 一、 第-步_對玻魏板2的第二面進行清除靜電與粉塵之 工作。即由該第二縱向移動機構22帶動刀片固定機構 底部所設之靜電產生器與風刀裝置231通過麵基板2第二 面上方，藉以清除玻璃表面的靜電與粉塵。 二、 第二步驟雜玻璃基板2的第二面進行酒精布捧执之工 作。即由該第二縱向移動機構22帶動擦执布固定機 底部所設之無塵布241噴沾酒精對玻璃基板2第二面 觸性擦拭，藉以濕潤玻璃基板2之表面。 接 三、 第三步驟賴玻麵板2的第二面進行懈表面之 即由該第二縱向移動機構22帶動刀片固定機構23底部所^ 之到刀说作接雛施力刮過玻璃基板2的第二面 ^ 四、 第四步驟係職璃基板2的第二面進行酒精轉& 。即由該第二縱向移動機構21帶動擦拭布固定機構 所设之無塵布241再度對玻璃基板2 栻。 ^弟—面進行接觸性擦 五、第 五步驟係對玻璃基板2的第二面進行清除 靜電之工作 14 201039931 即由該第二縱向移動機構2] μ a 稱以τ動刀片固定機構23底部所 权之靜紐織彻⑼_蝴基板2第二 面上方，以清除玻璃表面的靜電。 ❹ ❹ 經過上述步驟將玻璃基板2的第―、二面皆加以清潔乾淨 後，即可停止該下片工作平台％上吸孔加對破璃基板2之 吸力，然後將玻璃基板2取離該下片工作平台％ (可藉由人 工作取離之動作或藉由機械手臂作自動取離之動作），並即放 _盤（㈣）内’以等待搬運到貼片區作貼片使用。而在清 潔第-片破璃基板2的第二面之同時，另—片（第二片）玻璃 基板2也已放置於由該承载平台奶與該上片工作平台％共 同形成之平面上，並隨即受到抽吸住並且進行並第一面 步驟。藉由如此自動且快速的逐片雙面清潔，達成有效人力配 置及改善產品良率之主要目的功效。 由以上說明可知，本發明主要即設計一種清潔裝置卜以 對玻璃1^板2進行轉定步齡成之赫方法；其t，尤其藉 由叹置摘轉機構27達成可以將玻璃基板2抽吸住，以方便 進行自動化之清紅作，及方便進行細之控獅作，更是使 本發明之自動清財法郷肢。 综上所述’本發明清潔裝置之構造組成及清潔方法之操作 步驟確為f知所無’而能具備麟獅性，同時，使用本發明 確可達致所職之翻目的及姐，故亦減實麟步性，爰 請依法准予發明專利。 15 201039931 【圖式簡單說明】 第一圖所示係本發明實施例之立體圖 第二圖所示係本發明實施例之部份立體圖 第三圖所示係本發明實施例之刀片固定機構之立體圖 第四圖所示係本發明實施例之擦拭布固定機構之立體圖 第五圖卿躲發明實施射靜電產㈣麵骑置 意圖 意圖 第六圖所示係本發明實施例中刮刀之作用示音固 第七圖所示係本發明實施例中無塵布之作用示土回 第八圖所示係本發明實施例中翻轉機構之作用厂、土。 第九圖所示係本發明實施例中翻轉機構翻轉後之作用 16 201039931 【主要元件符號說明】 • 1—清潔裝置 10—座體 21—第一縱向移動機構 22第二縱向移動機構 211、221—馬達 212、222---導螺桿 213 ' 223—座板 23—刀片固定機才冓 231---靜電產生器與風刀裝置 232刮刀 24—擦拭布固定機構 241—無塵布 Ο 25-一上片工作平台 251吸孔 252---容置槽 26---下片工作平台 261---吸孔 27—翻轉機構 271~架座 272—轉動轴 273—動力缸體 274---連桿 275---承載平台 2751桿件 2752吸孔 〇 17Carrying the movement of the platform, and starting the _ force _ belt _ 细 细 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , "In the accommodating groove of the platform, the second surface of the glass substrate is simultaneously red-red, the steps are as follows: 1. The second longitudinal moving mechanism drives the electrostatic generator and the air blast provided at the bottom of the blade fixing mechanism Passing through the second surface of the glass substrate 2, the static electricity and dust on the surface of the glass; breaking through the wetness in the month of Z, driving the bottom of the fixing mechanism of the wiping cloth by the second longitudinal moving mechanism, and dusting the glass against the glass The second surface of the substrate is in contact with the surface of the glass substrate; τ 3. The second longitudinal moving mechanism drives the blade fixing mechanism to apply a force to the second surface of the glass substrate. The moving mechanism (4) takes care of the second surface of the glass substrate by the bottom cloth of the phase-determining mechanism. The static-free β-clearing I is driven by the second longitudinal moving mechanism to drive the bottom of the blade fixing mechanism and the air knife. Device re-pass The static electricity of the surface of the glass on the second surface of the second surface of the glass substrate 9 201039931. [Embodiment] The present invention achieves the above-mentioned purpose, the technical means of picking and the effect of achieving the effect, and it is better to implement the paper closure in the town of Illustrated, the 俾 can be fully understood. Referring to the first figure, the embodiment of the present invention is a cleaning device as a whole, and the structure group is respectively provided on the two sides of the body 1G - the first longitudinal movement mechanism 21 and one The two longitudinal moving mechanisms 22 can be arranged in a variety of ways. The present embodiment is achieved by driving the lead screws 212 and the melons to rotate the motors 211 and 221 respectively to drive the plates 213 and 223 in a straight forward and backward movement. The depth position of the slabs 213, 223; as shown in the second figure, the inner side of the seat plates 213, 223 are respectively combined with a set of laterally disposed blade fixing mechanisms 23 by means of erecting frames (such as the third figure) And the wiping cloth ° fixing mechanism 24 (as shown in the fourth figure), which can be used for fine adjustment of the lateral position (by moving in the long slot to achieve) and adjustable position of the house By ^ service The motor or the vertical power cylinder is achieved), the two sets of the blade fixing mechanism 23 and the wiping cloth fixing mechanism 24 are respectively located before and behind the top surface of the seat body 1; the bottom of the blade fixing mechanism 23 is provided with an electrostatic generator And the air knife device 231 (as shown in the fifth figure) and the scraper 232 (as shown in the sixth figure); and the wiping cloth fixing mechanism is provided with a dust-free cloth 241 V that can be rotated by the rotating shaft at the bottom. Next, please see the figure in the seventh figure.) Next, please refer to the eighth figure, which is located on the seat body 10 on the first 10 201039931 'longitudinal pure lining 21, the second longitudinally moving shaft structure 22 and the front and the front blade A top working level σ 25, a lower working platform % and a paving mechanism are disposed in the range between the 疋 mechanism 23 and the wiping cloth fixing mechanism %; wherein the top working platform 25 is fixedly mounted on the _ body 1 On the raft (the height can be fine-tuned and the position of the plane is fixed), the top surface is provided with a plurality of suction holes 251, and a plurality of parallel-shaped accommodating grooves are opened, and the suction holes (5) are connected to each other to - another Vacuum aspirator (not shown); the lower working platform % 〇 pure The erection 1G (on the position of the height and the plane can be fixed), and is separated from the upper working platform 25 by a distance, and the top surface is also provided with a plurality of suction holes 261, which are connected to each other. A vacuum aspirator (not δ and FIG.) is provided. The inverting mechanism 27 is fixedly mounted on the base body 10 by a seat 271. The rotating shaft 272 passes through the outer side of the frame 27 and is subjected to a power red. The body 273 drives the rotating shaft to be said to be a specific angle (close to the right side of the turning function), the inner end is connected with a connecting rod 274, and then the other end of the connecting rod is connected to the right side. The loading platform 2 connected to the 275! in the receiving groove 252 of the upper working platform b is worn on one side of the rod milk 1 (the side juxtaposed with the upper working platform 25) A plurality of suction holes 2752' are provided to communicate with each other to a separate vacuum aspirator (not provided in a circle). When the cleaning device 1 is used, the lever 275! of the platform of the inverting mechanism 27 is one-to-one correspondingly accommodated into the upper working piece (four) of the groove = inner 'the platform 275 and the upper red platform The % thorn forms a plane, and then the vacuum aspirator is activated to make the suction hole 2 201039931 /, the suction hole 251 上 on the upper working platform 25 have suction; then a glass substrate 2 is placed And (4) the movement of the rod member 2751, and the suction hole 251 of the upper working platform 25 The suction force collectively sucks the second surface of the glass substrate 2 (as shown in the figure); the riding starts to clean the first surface of the glass substrate, which is subjected to the following steps: 1. For the glass substrate 2 The first side performs the work of removing static electricity and dust. In the process of storage and transportation of the glass substrate, static electricity is often accumulated in the county, which causes adsorption of dust and affects the yield of the patch. To avoid this phenomenon, the first step of the cleaning work of the present invention is performed by the first longitudinal direction. The moving mechanism 21 drives the electrostatic generator and the air knife device 231 (shown in FIG. 5) provided at the bottom of the blade fixing mechanism 23 to pass over the first surface of the glass substrate 2, thereby removing static electricity and dust on the surface of the glass. ―, the first surface of the glass plate 2 is wiped with alcohol cloth. Since the surface of the glass substrate is dry after the first step, the residual particles will adhere to the glass surface in a block mode; except that the surface of the substrate 2 is stained with grease on the right side. 231 may benefit the method f, so the second step of the clear red surface of the present invention is driven by the first-longitudinal moving mechanism 2! to drive the dust-free cloth on the bottom of the wiping cloth fixing mechanism 24 to correct the seven scales of the scales to the glass plate 2 The first surface is turned over to the surface of the glass substrate 2 to reduce the adhesion of the foreign matter. The same day, the grease stain may be on the surface of the glass substrate 2. 12 201039931 The first surface of the two-sided substrate 2 is scraped off the surface 4. After the glass substrate 2 is wiped by the dust-free cloth 241 which is sprayed with alcohol, the third step is performed, that is, the scraper 232 at the bottom of the blade fixing mechanism 23 is driven by the first-longitudinal moving mechanism 21 (as shown in the sixth figure). The contact force is applied to the first surface of the glass substrate 2 to scrape off the _clear surface. Ο ❹ 4. Work on the first side of the opposite substrate 2 with an alcohol cloth. After the first surface of the glass substrate is passed through the above-mentioned doctor blade 232 to the step of removing, the foreign matter such as hard lump and dust may be left to react with the alcohol, so the fourth step of the cleaning work of the present invention is the first longitudinal direction. The moving mechanism η drives the dust-free material provided on the bottom of the wiping mechanism 24 and then performs the contact wiping on the first side of the glass substrate 2 to ensure the removal of other small foreign matter. 5. The work of removing static electricity from the first surface of the broken glass substrate 2. In order to avoid the static electricity generated by the front substrate, the fifth step of the cleaning operation is driven by the first-longitudinal moving mechanism to drive the electrostatic generator provided at the bottom of the blade fixing mechanism 23. The air knife device 231 is again passed over the first surface of the glass substrate 2 to remove static electricity from the surface of the glass. 4 then / the carrying platform 275 of the turning mechanism 27 continues to suck the first side of the glass base 'but the suction hole Mi on the upper working platform % stops sucking (h suction) 'woven start the power cylinder 273 drives the rotating shaft to work under the milk and then interlocks the connecting rod 274, and the carrying platform 2 is turned over with the glass substrate 2, and the vacuum suction device is activated to activate the vacuum suction device. The hole 261 has a suction force to suck the first surface of the glass substrate 2 (such as the ninth ride); then, the suction of the average age platform 275 is stopped, and the power cylinder 273 is activated to drive the rotary shaft 272 to rotate. The connecting rod 274 and the carrying platform 275 are turned back to the upper calling station 25, and X is extended until the rods of the carrying platform 275 are paired into the receiving slots 252 of the platform. At the same time, the cleaning operation of the surface of the substrate 2 is performed, and the same steps as above are performed, that is, the first step _ the second surface of the glass plate 2 is subjected to the work of removing static electricity and dust. That is, the second longitudinal moving mechanism 22 drives the electrostatic generator and the air knife device 231 provided at the bottom of the blade fixing mechanism to pass over the second surface of the surface substrate 2, thereby removing static electricity and dust on the surface of the glass. 2. The second step of the second glass substrate 2 is performed by an alcohol cloth. That is, the second longitudinal moving mechanism 22 drives the dust-free cloth 241 provided at the bottom of the wiping cloth fixing machine to spray the alcohol on the second surface of the glass substrate 2 to wet the surface of the glass substrate 2. Third, the third step of the second surface of the glass panel 2 to perform the surface relaxation, that is, the second longitudinal moving mechanism 22 drives the bottom of the blade fixing mechanism 23 to the knife as a squeezing force to scrape the glass substrate 2 The second side of the ^ ^, the fourth step of the second side of the glass substrate 2 for alcohol transfer & That is, the second longitudinal moving mechanism 21 drives the dust-free cloth 241 provided by the wiping cloth fixing mechanism to smash the glass substrate 2 again. ^弟-surface contact rub 5, the fifth step is to remove the static electricity on the second side of the glass substrate 2 201039931 by the second longitudinal moving mechanism 2] μ a called the bottom of the blade moving mechanism 23 The right quilt is woven (9) _ above the second side of the substrate 2 to remove static electricity from the glass surface. ❹ ❹ After the first and second sides of the glass substrate 2 are cleaned by the above steps, the suction of the lower working platform and the suction of the glass substrate 2 can be stopped, and then the glass substrate 2 is removed. % of the next working platform (can be taken by the action of the person to take off or automatically removed by the robot arm), and put in the _ disk ((4)) 'waiting to be transported to the patch area for patch use. While cleaning the second side of the first glass substrate 2, the other (second) glass substrate 2 is also placed on the plane formed by the carrier platform milk and the upper working platform %. It is then sucked and carried out and the first step. With such automatic and rapid two-sided cleaning, the main purpose of effective manpower configuration and product yield improvement is achieved. It can be seen from the above description that the present invention mainly designs a cleaning device to perform the method of determining the age of the glass 1 2; and t, in particular, by staking the reversing mechanism 27, the glass substrate 2 can be pumped. Suction, in order to facilitate the automation of the red, and facilitate the fine control of the lion, but also make the automatic money-saving method of the present invention. In summary, the operation steps of the structural composition and the cleaning method of the cleaning device of the present invention are true, and the lion lion can be provided. At the same time, the use of the present invention can achieve the purpose of the job and the sister. It also reduces the spurs of the spurs and asks for patents for inventions. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a second embodiment of the present invention. The third embodiment of the present invention is a perspective view of a blade fixing mechanism according to an embodiment of the present invention. The fourth figure is a perspective view of the wiping cloth fixing mechanism of the embodiment of the present invention. The fifth figure shows the intention of the electrostatic generation (four) surface riding. The sixth figure is shown in the embodiment of the present invention. The seventh figure shows the function of the dust-free cloth in the embodiment of the present invention. The eighth figure shows the function plant and soil of the turning mechanism in the embodiment of the present invention. The ninth figure shows the function of the flipping mechanism after the flipping of the embodiment of the present invention. 16 201039931 [Description of main components] 1. 1 - cleaning device 10 - seat 21 - first longitudinal moving mechanism 22 second longitudinal moving mechanism 211, 221 - motor 212, 222---lead screw 213 ' 223 - seat plate 23 - blade fixing machine 冓 231 - electrostatic generator and air knife device 232 blade 24 - wiper fixing mechanism 241 - dust-free cloth 25- A working platform 251 suction hole 252--- accommodating groove 26---lower working platform 261---suction hole 27-turning mechanism 271~frame 272-rotating shaft 273-power cylinder 274--- Connecting rod 275---bearing platform 2751 rod 2752 suction hole 〇 17