201016574 六、發明說明： 【發明所屬之技術領域】 本發明關於一種於液晶顯示器（Liquid Crystal Display, LCD)、電漿顯示面板（Plasma Display Panel, PDP)等各種平 板型顯示裝置之玻璃表面繪製微細圖案的曝光裝置，特別地， 本發明關於一種可對裝載有複數個玻璃板之匣盒之位置進行 精密排列的曝光設備用匣盒之位置排列裝置。 φ 【先前技術】 一般而言，曝光設備係指在半導體或薄膜電晶體液晶顯示 器（Thin_Film Transistor-Liquid Crystal Display，TFT LCD )等 需要電路製程之生產線中，利用照相原理，向光罩等光掩模 (photomask)照射光線而在半導體晶圓或薄膜電晶體液晶顯 示器（TFTLCD)玻璃基板上繪製電路的設備。 其中，特別地，在液晶顯示器（LCD)之玻璃基板上繪製 ⑩電路的曝光設備中，為了在作業過程中簡單又準確且順利地傳 送複數個玻璃板，可利用裝載有複數個玻璃板之匣盒，此匣盒 通常在開放-側面的支架之内侧以上下多段裝載有複數個玻 璃板’並且使用普通機械手將裝載於g盒之玻璃板傳送至曝光 設備之索引部，用以藉由曝光作業形成電路，或者將完成曝光 作業之玻璃板重新收回至g盒中。 特別地，上述H盒補由顯示裝置之製作步驟且可傳送地 形成，由此在要求精密作業之曝光設備中，需要預先對匡盒之 位置進行精密排列用以舰盒配置於一準確之位置，然後，使 201016574 用機械手抽取出g盒，由此可減少曝光作業之不良率，並且可 進一步迅速且順利地進行作業。 然而’如上所述，在將E盒傳送至曝光設備之索引部之情 況下，當藉由普通機械手或手推車傳送時，時常存在其配置位 置產生誤差之問題。 為了解決上述之問題，如「第4圖」所示，提出一種利用 直角形狀之夾具200，在支架101之内側固定裝載有複數個玻 璃板1之匣盒100之隅角的裝置。 然而，如上所述，在利用夾具固定匣盒之情形下，當匣盒 之整體大小產生變化時，必須移動夾具之配設位置，由此存在 產生作動誤差之情況’當-對夾具以對角線方向相面對配設 時，更存在匣盒整體向侧面方向旋轉之配設情況，由此可產生 曝光作業之不良率上升之問題。 【發明内容】 由此，鑒於上述習知技術之問題，本發明之目的在於提供 一種曝光設備用匣盒之位置排列裝置，此位置排列裝置以簡單 之結構不僅可將各種尺寸之匣盒始終排列於固定位置，而且可 最小化曝光作業過程中匣盒之搖擺及移動。 而且，本發明之目的在於使位置排列塊順利地插入至位置 排列凹槽中’同時可進行位置排列。 並且，本發明之目的在於使位置排列塊在一平面上移動。 而且’本發明之目的在於減少位置排列塊與位置排列凹槽 之接觸面積。 201016574 為了實現上述之目的，本發明關於一種曝光設備用£盒之 位，排列農置，其特徵在於：在一支架之内侧具有一匿盒，此 S盒以上下多段裝載有玻璃板，並且具有一曝光部份之傳送機 械^ ’其用以將裝載於£盒之玻璃板傳送至曝光設備中，在此 S盒之下部形成有下陷之位置排列凹槽，用以對匿盒之位置進 行微細調整，並且在匿盒之下側具有一位置排列塊，此位置排 職-方面進行上下方向之升降，另一方面可插入至位置排列 ©凹槽中用以移動匣盒之位置。 此外，曝光設備用匣盒之位置排列裝置之特徵在於：在位 置排列塊之外侧面形成有一傾斜面。 而且，曝光備用匣盒之位置排列裝置之特徵在於··更具 有一位置調節機構，以使得此位置排列塊沿一平面上之上、 下、左、右方向移動。 而且，曝光設備用匣盒之位置排列裝置之特徵在於：在位 置排列塊之外侧面，形成有複數個朝向位置排列塊之内側中心 β 下陷之下陷部份。 由此，本發明提供一種曝光設備用匣盒之位置排列裝置， 其透過位置排列凹槽與位置排列塊之簡單結構，不僅可將各種 尺寸之匣盒始終排列於固定位置，而且能夠最小化曝光作業過 程中匣盒之搖擺及移動，並且與匣盒之大小不相關，可進行始 終固定且精密穩定之位置排列，因此，當藉由傳送機械手傳送 玻璃板時，可具有進一步提高玻璃板之位置精密度的效果。 而且，在本發明之實施例中，形成有傾斜面以使得位置排 201016574 列塊可順利地插人至位置排列凹射，同時進行位置排列，因 此具有進一步順利進行匣盒位置之微細移動的效果。 並且’本發明之實施例中具有一位置調節機構，以使得使 位置排列塊在-平面上移動，由此不僅可實現位置排列塊本身 之位置排列，而且可進-步增加Ε盒用於位置排列之移動距 離。 此外，在本發明之實施例中，形成下陷部份可減少位置排 列塊與位置排列凹槽之間的接觸面積，因此能夠最小化當位置 排列塊插人至位置排列凹槽之内側時，由摩擦所引起之抵抗 力，因此具有可進一步迅速且順利地進行位置排列作業之效 果。 ' 【實施方式】 以下，將結合圖式部份詳細描述本發明之較佳實施例。 「第1圖」係為本發明之一實施例之立體圖，「第2圖」 係為「第1 @」之使用狀態之俯視圖，「第3圖」係為沿「第 2圖」之Α-Α線之剖視圖，如圖所示，本發明之實施例具有一 匣I 10，匣盒1〇之上下多段裝載有用於進行曝光作業之複數 個玻璃板1用以進行傳送，並且將玻璃板丨供給至曝光設備之 平板且取出完成曝光作業之玻璃板1，特別地，在匣盒10之 下部具有一下陷之位置排列凹槽13，在裝載有匣盒1〇之曝光 設備之索引部具有一位置排列塊3〇，位置排列塊3〇一方面進 灯上下升降運動，另一方面可插入至位置排列凹槽13中以將 匣盒10排列於準確之作業位置，從而可準確設定玻璃板傳送 201016574 機械手20自匣盒10抽出玻璃板丨或將玻璃板丨收回至匣盒 10之作業位置。 在支架11之内侧，匣盒10具有支撐玻璃板丨之底面的複 數個支撐台12,以便在製造過程中可整體且簡單地移動顯示 裝置中使用的複數個玻璃板丨，由此能夠全面開放且順利地收 回及抽取玻璃板1，並且一方面，可將支架n整體裝載於手 推車等之上，另一方面，可將支架11固定於曝光設備之索引 部。 ❹ 在向X、Y、z軸方向及旋轉方向移動之致動部份21之上 端’玻璃板傳送機械手20形成有一支樓玻璃板i之夹爪22， 以使得夾爪22-方面在匿盒1〇與曝光設備之平板之間作往復 移動，另一方面可按順序抽取出裝載於匣盒1〇中之玻璃板】， 並且將玻璃板1傳送至曝光設備之平板，從而進行曝光作業， 並且將完成曝光之玻璃板丨重新裝載於匣盒1〇之中。 此外’匡盒10之底面形成有一朝向上侧下陷之位置排列 凹槽13，g盒1〇之索引部具有一位置排列塊％，位置排列塊 3〇按照與位置排列凹槽13相對應之形狀形成，以使得在其外 側面與位置排列凹槽13之内侧面相連接之同時可插入至位置 排列凹槽13之内部，一方面，位置排列塊3〇進行上下升降， 另-方面，其可插入至位置排列凹槽13之中由此將匿盒⑺ 排列於固定位置，因此可在作_程中實現牢固之固定。 此時，較佳地，與位置排列凹槽13相連接之位置排列塊 3〇之外侧面形成有-傾斜面31，以使得當位置排列塊％插入 7 201016574 至位置排列凹槽13中時，£盒1()—方面沿傾斜面3ι移動， 另-方面可整體緩慢地移動，以使得當位置排列凹槽η最終 與位置排列塊3G完全減合時，g盒⑴最終能夠移動至其準 確位置。 而且’較佳地，位置排列塊30具有一位置調節機構32， 位置調節機構32在—平面上的上、下、左、右方向上移動且 包含有普通油㈣筒或LM導軌等，由此可簡單地對位置排列 塊30之配置位置進行調節，因此能夠最大化實現匡盒ι〇之準 確位置排列的移動距離。 並且，在位置排列塊3〇之外侧面，形成有向其内側中心 下陷之複數個下陷部份33，而當位置排列塊3〇插入至位置排 列凹槽13中時，可最小化接觸面積，由此可防止因為位置排 列凹槽13與位置排列塊3〇之過度摩擦所引起之磨耗與損傷， 並且可防止由摩擦所引起之振動在匣盒1〇之配置位置中產生 誤差之情形。 由此，在使用普通玻璃板傳送機械手20或手推車將裝載 有複數個玻璃板1之匣盒10移動至曝光設備之索引部之後， 使得位置排列塊30上升且插入至匣盒1〇之底面形成的位置排 列凹槽13中，由此可微細移動匣盒1〇之位置以使得匣盒1〇 配置於曝光作業之準確位置，而且藉由位置排列塊30與位置 排列凹槽13之結合可防止匣盒10之移動，因此可進一步準確 且精密地實現玻璃板1之移動。 而且，在裝載於匣盒10中之玻璃板1之曝光作業全部結 201016574 束且自曝光設備重新分離匣盒10之情況下，位置排列塊30重 新下降，以致位置排列塊30脫離開位置排列凹槽13 ’由此可 結束!£盒10之固定狀態且實現匣盒1〇之移動° 而且，在匣盒ίο之大小發生變化之情況下，在匣盒10之 底面’與位置排列塊30相對應，形成大小及形狀始終固定之 位置排列凹槽13,因此可在一個曝光設備簡單且準確地排列 各種大小之g盒1〇。 【圖式簡單說明】 第1圖係為本發明之一實施例之立體圖； 第2圖係為第1圖之使用狀態之俯視圖； 第3圖係為沿第2圖之A-A線之剖視圖；以及 第4圖係為習知技術之曝光設備用匣盒之一實例之俯視 圖。 【主要元件符號說明】 1 :玻璃板201016574 VI. Description of the Invention: [Technical Field] The present invention relates to a fine glass surface of various flat panel display devices such as a liquid crystal display (LCD) and a plasma display panel (PDP). BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position aligning apparatus for a cassette for an exposure apparatus which can precisely arrange the positions of cassettes loaded with a plurality of glass sheets. φ [Prior Art] In general, an exposure device refers to a photomask that is used in a circuit such as a semiconductor or a thin film transistor liquid crystal display (TFT LCD) that requires a circuit process. A device that illuminates light and draws a circuit on a semiconductor wafer or thin film transistor liquid crystal display (TFTLCD) glass substrate. In particular, in an exposure apparatus for drawing 10 circuits on a glass substrate of a liquid crystal display (LCD), in order to transfer a plurality of glass sheets simply, accurately, and smoothly during the operation, a plurality of glass sheets may be loaded. a cassette, which is usually loaded with a plurality of glass sheets on the inside of the open-side bracket, and the glass plate loaded on the g-box is transferred to the indexing portion of the exposure apparatus by an ordinary robot for exposure. The job forms a circuit, or the glass plate that has completed the exposure operation is retracted into the g-box. In particular, the above-mentioned H-box complements the manufacturing process of the display device and is transportably formed, whereby in an exposure apparatus requiring precise operations, it is necessary to precisely arrange the position of the cassette in advance for the ship box to be disposed at an accurate position. Then, the 201016574 is used to extract the g-box by the robot, whereby the defective rate of the exposure operation can be reduced, and the work can be performed more quickly and smoothly. However, as described above, in the case where the E-box is transported to the index portion of the exposure apparatus, when it is transported by a general robot or a cart, there is often a problem that the position of the configuration is inaccurate. In order to solve the above problem, as shown in Fig. 4, there has been proposed a device for fixing a corner of a cassette 100 in which a plurality of glass sheets 1 are mounted on the inner side of the holder 101 by using a right-angled jig 200. However, as described above, in the case where the cassette is fixed by the jig, when the overall size of the cassette changes, the arrangement position of the jig must be moved, whereby there is a case where an operation error occurs. When the line direction faces the arrangement, there is a case where the entire case is rotated in the side direction, whereby the problem of an increase in the defective rate of the exposure work can be caused. SUMMARY OF THE INVENTION Therefore, in view of the above problems of the prior art, an object of the present invention is to provide a position aligning device for a cassette for an exposure apparatus, which can be arranged not only in a variety of sizes, but also in a simple structure. It is in a fixed position and minimizes the sway and movement of the cassette during the exposure process. Moreover, the object of the present invention is to enable the position alignment block to be smoothly inserted into the position alignment groove while being positionally arranged. Moreover, it is an object of the invention to move the position alignment block in a plane. Further, the object of the present invention is to reduce the contact area between the position alignment block and the position alignment groove. 201016574 In order to achieve the above object, the present invention relates to an apparatus for arranging an exposure device, which is characterized in that: a box is arranged inside a bracket, and the S box is loaded with a glass plate in a plurality of sections, and has An exposure portion of the transfer machine ^' is used to transfer the glass plate loaded on the cassette to the exposure device, and a groove is formed at a position below the S-box to sag the position of the box The adjustment has a position arranging block on the lower side of the concealed box, and the position is moved in the up-and-down direction, and on the other hand, it can be inserted into the position alignment groove to move the cassette. Further, the position aligning device for the cassette for an exposure apparatus is characterized in that an inclined surface is formed on the outer side surface of the position alignment block. Further, the position aligning device for exposing the spare cassette is characterized in that it further has a position adjusting mechanism for moving the position aligning block in the upper, lower, left and right directions on a plane. Further, the position arranging device for the cassette for an exposure apparatus is characterized in that, on the outer side surface of the position arranging block, a plurality of recessed portions of the inner center β of the position alignment block are formed. Accordingly, the present invention provides a position aligning device for a cassette for an exposure apparatus, which has a simple structure of a position arranging groove and a position arranging block, so that not only the cassettes of various sizes can be always arranged at a fixed position, but also the exposure can be minimized. The swinging and moving of the cassette during the operation, and irrelevant to the size of the cassette, can be arranged in an always fixed and precise position. Therefore, when the glass sheet is conveyed by the transfer robot, the glass sheet can be further improved. The effect of positional precision. Moreover, in the embodiment of the present invention, the inclined surface is formed so that the position row 201016574 column can be smoothly inserted into the position alignment concave surface, and the position arrangement is performed at the same time, thereby having the effect of further smoothly performing the fine movement of the cassette position. . And 'the embodiment of the present invention has a position adjusting mechanism such that the position aligning block moves on the -plane, thereby not only realizing the positional arrangement of the position arranging block itself, but also further increasing the cassette for the position The moving distance of the arrangement. In addition, in the embodiment of the present invention, the formation of the depressed portion can reduce the contact area between the position alignment block and the position alignment groove, thereby minimizing when the position alignment block is inserted into the inside of the position alignment groove, Since the friction is caused by the friction, there is an effect that the position alignment operation can be performed more quickly and smoothly. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail in conjunction with the drawings. "Fig. 1" is a perspective view of an embodiment of the present invention, "2" is a top view of the use state of "1st @", and "3rd figure" is a line along "2nd figure" - A cross-sectional view of the rifling line, as shown in the figure, an embodiment of the present invention has a 匣I 10, and a plurality of upper and lower sections of the cassette 1 装载 are loaded with a plurality of glass sheets 1 for performing an exposure operation for transport, and the glass sheets are 丨The glass plate 1 supplied to the flat plate of the exposure apparatus and taken out to complete the exposure operation, in particular, the groove 13 is arranged at a lower portion of the lower portion of the cassette 10, and has an index portion at the index portion of the exposure device loaded with the cassette 1 The position arranging block 3 is arranged on the one hand to move up and down the lamp, and on the other hand, can be inserted into the position arranging groove 13 to arrange the cassette 10 in an accurate working position, so that the glass plate can be accurately set. 201016574 The robot 20 withdraws the glass plate from the cassette 10 or retracts the glass plate to the working position of the cassette 10. On the inner side of the bracket 11, the cassette 10 has a plurality of support tables 12 supporting the bottom surface of the glass sheet so as to be able to move the plurality of glass sheets used in the display device as a whole and simply during the manufacturing process, thereby being fully open The glass sheet 1 is smoothly taken back and extracted, and on the other hand, the holder n can be entirely mounted on a cart or the like, and on the other hand, the holder 11 can be fixed to the index portion of the exposure apparatus.玻璃 At the upper end of the actuating portion 21 moving in the X, Y, z-axis direction and the rotational direction, the glass plate transfer robot 20 is formed with a jaw 22 of a floor glass plate i so that the jaws 22 are hidden. The cassette 1〇 is reciprocated between the flat plate of the exposure device, and on the other hand, the glass plate loaded in the cassette 1〇 is sequentially extracted, and the glass plate 1 is transferred to the flat plate of the exposure device to perform the exposure operation. And re-loading the exposed glass plate 匣 in the cassette 1〇. Further, the bottom surface of the cassette 10 is formed with a groove 13 arranged to face the upper side, and the index portion of the g cartridge 1 has a position alignment block %, and the position alignment block 3 is shaped according to the position alignment groove 13. Formed so as to be insertable into the interior of the position alignment groove 13 while the outer side surface thereof is connected to the inner side surface of the position alignment groove 13, on the one hand, the position alignment block 3 is lifted up and down, and on the other hand, it can be inserted By arranging the concealed boxes (7) in a fixed position in the position aligning grooves 13, a firm fixing can be achieved in the course of the process. At this time, preferably, the outer side surface of the position alignment block 3 connected to the position alignment groove 13 is formed with an inclined surface 31 such that when the position alignment block % is inserted into the 7 201016574 to the position alignment groove 13 The box 1 () - side moves along the inclined surface 3, and the other side can be moved slowly as a whole, so that when the position alignment groove η is finally completely reduced with the position alignment block 3G, the g box (1) can finally move to its accuracy. position. Moreover, preferably, the position arranging block 30 has a position adjusting mechanism 32 which moves in the upper, lower, left and right directions on the plane and includes a common oil (four) cylinder or an LM rail or the like. The arrangement position of the position arranging block 30 can be simply adjusted, so that the moving distance of the accurate positional arrangement of the cassettes can be maximized. Further, on the outer side surface of the position alignment block 3, a plurality of depressed portions 33 which are depressed toward the inner center thereof are formed, and when the position alignment block 3 is inserted into the position alignment groove 13, the contact area can be minimized. Thereby, wear and damage due to excessive friction of the position alignment groove 13 and the position alignment block 3 can be prevented, and the occurrence of an error in the arrangement position of the cassette 1〇 can be prevented by the vibration caused by the friction. Thus, after the cassette 10 loaded with the plurality of glass sheets 1 is moved to the index portion of the exposure apparatus using the ordinary glass plate transfer robot 20 or the cart, the position alignment block 30 is raised and inserted into the bottom surface of the cassette 1 The formed position is arranged in the groove 13, whereby the position of the cassette 1〇 can be finely moved so that the cassette 1〇 is disposed at the exact position of the exposure operation, and the combination of the position alignment block 30 and the position alignment groove 13 can be The movement of the cassette 10 is prevented, so that the movement of the glass sheet 1 can be further accurately and precisely achieved. Further, in the case where the exposure operation of the glass sheet 1 loaded in the cassette 10 is completed in the 201016574 bundle and the cassette 10 is re-separated from the exposure apparatus, the position alignment block 30 is lowered again, so that the position alignment block 30 is disengaged from the position. The groove 13' can thus end! The fixed state of the cartridge 10 and the movement of the cassette 1 is achieved. Moreover, in the case where the size of the cassette ίο changes, the bottom surface of the cassette 10 is aligned with the position alignment block 30. Correspondingly, the grooves 13 are formed at positions where the size and shape are always fixed, so that the cartridges of various sizes can be easily and accurately arranged in one exposure apparatus. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an embodiment of the present invention; Fig. 2 is a plan view showing a state of use of Fig. 1; Fig. 3 is a cross-sectional view taken along line AA of Fig. 2; Fig. 4 is a plan view showing an example of a cassette for an exposure apparatus of the prior art. [Main component symbol description] 1 : Glass plate
10 11 12 13 20 21 22 30 匣盒 支架 支撐台 位置排列凹槽 玻璃板傳送機械手 致動部份 夾爪 位置排列塊 201016574 31 :傾斜面 32 :位置調節機構 33 :下陷部份 100 :匣盒 101 :支架 200 :夾具10 11 12 13 20 21 22 30 支架 box bracket support table position arrangement groove glass plate transfer robot actuation part jaw position alignment block 201016574 31 : inclined surface 32 : position adjustment mechanism 33 : sag portion 100 : 匣 box 101: bracket 200: fixture