TW200845014A - A bit line structure for a multilevel, dual-sided nonvolatile memory cell array - Google Patents

A bit line structure for a multilevel, dual-sided nonvolatile memory cell array Download PDF

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TW200845014A
TW200845014A TW97106496A TW97106496A TW200845014A TW 200845014 A TW200845014 A TW 200845014A TW 97106496 A TW97106496 A TW 97106496A TW 97106496 A TW97106496 A TW 97106496A TW 200845014 A TW200845014 A TW 200845014A
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Taiwan
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volatile memory
double
voltage
charge
charge trapping
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TW97106496A
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Chinese (zh)
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Peter W Lee
Fu-Chang Hsu
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Aplus Flash Technology Inc
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Priority claimed from US12/069,228 external-priority patent/US20080205140A1/en
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Publication of TW200845014A publication Critical patent/TW200845014A/en

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Abstract

A nonvolatile memory array includes a plurality of dual-sided charge-trapping nonvolatile memory cells arranged in rows and columns. The dual-sided charge-trapping nonbolatile memory cess on each column form at least one grouping that is arranged in a NAND seires string of dual-sided charge-trapping nonbolatile memory cells. Each NAND seires string has a top select transistor and a bottom select transistor. A plurality of bit lines is connected in a cross connective columar bit line structure such tha each column of the dual-sided charge-trapping nonbolatile memory cells is connected to an associated pair of bit lines. The first of the associated pair of bit lines is further connected to a first adjacent column of dual-sided charge-trapping nonbolatile memory cells and the second of the associated pair of bit lines is further associated with a second adjacent column of dual-sided charge-trapping nonbolatile memory cells.

Description

200845014 九、發明說明: 【發明所屬之技術領域】 本發明涉及非揮發性記憶體陣列結構及操作,特別是涉及雙面電荷捕 ^式,揮發性記憶體單元之位元線結構,更特別地,涉及多階層雙面電荷 捕捉式非揮發性記憶體單元之_位元線結構,翻於程式規劃、讀取、 除_捉_荷,該翻_電荷顧雙面電·捉式轉發性記 fe體早元的電荷捕捉區中代表多個位資料位元。 【習知技術】 •非2發性記憶體為此技術中所熟知。不同種類之非揮發性記憶體包 括·、唯讀記憶體(ROM)、電性可程式唯讀記憶體(epr〇m)、電性可拭除可 程式=讀記舰(EEPRC)M)、N()R _記倾、以㈣勘賴記情體。 f目前例如:個人數位親器、手機、筆記型制和膝上型制、語音記錄 鍵位系統等應用t 記憶體已成為非揮發性記憶體中更為流 之。㈣記憶體具有密度高、♦面積小、成本低、以及能夠使用 單的低電麼電源重複程式化與拭除之組合之優點。 在此,術中所知之快閃記憶體結構使用電荷儲存機構和電荷捕捉機 。,電荷儲存機構,例如在浮動祕轉發性記髓巾,代表數位資料 =電荷贿於該裝置囉_極上。該被儲存的電荷修正此肋確定數位 貧料所館存的浮動閘極記憶體單元的臨界電塵。在電荷捕捉結構中,如同 在石夕-氧化物.氮化物-氧化物,SONOS)或金屬_氧化物_氮化物_氧化物-石夕 (MONOS)型單元中’電荷捕捉於位於兩個絕緣層間之電荷捕捉層中。 NOS/MONOS &置中的该電荷捕捉層具有相對較高的介電常數⑻,例 如石夕氮化物(SiNx)。荷概概結縣減,以致於可以將兩個 位_資料儲存於單- SONOS/M〇N〇s非揮發性記憶體單元中。 美國專利申请案號第5,768,192號(Eitan)說明一種使用非對稱電荷捕 捉機構的電荷概式非㈣性半賴記賴單元。可程式唯讀記憶體 200845014 (PROM)在兩個二氧化矽層之間插入一捕捉介電質。該捕捉介電質為:矽 氧化物々氮化物<氧化物(〇N〇)、以及具有埋設多晶石夕島之二氧化石夕。 一非導電的介電層作為一電子電荷捕捉媒體。該電荷捕捉層插入作為電絕 緣體之兩個二氧化矽層之間。一導電控制閘極層設置於上二氧化矽層之 上。當源極接地時,通過將程式規劃電壓施加至該閘極與汲極,使用熱電 洞以賴該記㈣敍。_洞被足夠加速以注人綠醜_捉介電層 之區域=。所述裝置以其被寫入的相反的方向被讀取。當汲極接地時,該 讀取電壓被施加至閘極與源極。對於施加的相同的閘極電壓,反向讀取大 幅降低跨觸捉電荷區的電位。通過放大在局部概區帽驗電荷的效 應,而允許更短的規劃時間。 士美國專利t賴絲7,187,G3G號(Chae等人)綱-種SQNOS記憶 體裝置’以及用於從該S0N0S記憶體裝置中拭除資料之方法。所述拭除 包,L符號的電荷載體注人於她薄财,而該捕捉薄膜已捕捉第 :符號的電荷賴㈣資繼存職舰薄财。所料二符號的電荷載 體由龟场產生’该電場形成於:位於至少與一條位元線接觸的第一及第二 電極之一,以及與-字元線接觸的一閘極電極之間。 於該閉《極與該概賴之間。所娜二符_储健 洞0200845014 IX. Description of the Invention: [Technical Field] The present invention relates to a non-volatile memory array structure and operation, and more particularly to a double-sided charge trapping type, a bit line structure of a volatile memory cell, and more particularly , involving the multi-level double-sided charge trapping non-volatile memory unit _ bit line structure, turning to program planning, reading, dividing _ catching_load, the turning _ charge Gu double-sided electric · catching forwarding The charge trapping region of the fe early element represents a plurality of bit data bits. [Prior Art] • Non-two-dimensional memory is well known in the art. Different types of non-volatile memory include ·, read-only memory (ROM), electrical programmable read-only memory (epr〇m), electrical erasable programmable = read recorder (EEPRC) M), N () R _ 记 倾, to (4) to investigate the situation. f Currently, for example, personal digital devices, mobile phones, notebook and laptop systems, voice recording key systems, etc. t memory has become more volatile in non-volatile memory. (4) The memory has the advantages of high density, ♦ small area, low cost, and the ability to use a combination of single low-power power supply reprogramming and erasing. Here, the flash memory structure known in the art uses a charge storage mechanism and a charge trap. The charge storage mechanism, for example, in the floating secret forwarding essay, represents digital information = charge bribes on the device 啰 _ pole. The stored charge correction rib determines the critical dust of the floating gate memory unit stored in the digital poor. In the charge trapping structure, as in the case of the stone-oxide-nitride-oxide, SONOS or metal-oxide-nitride-oxide-MONOS type, the charge is trapped in two insulations. The charge trapping layer between the layers. The charge trapping layer centered by NOS/MONOS & has a relatively high dielectric constant (8), such as Shi Ni nitride (SiNx). The charge is reduced to the county, so that two bits of data can be stored in the single-SONOS/M〇N〇s non-volatile memory unit. U.S. Patent Application Serial No. 5,768,192 (Eitan) describes a charge-distribution non-(four) semi-reactive cell using an asymmetric charge trapping mechanism. Programmable Read Memory 200845014 (PROM) inserts a capture dielectric between two layers of germanium dioxide. The trapping dielectric is: yttrium oxide cerium nitride <oxide (〇N〇), and cerium oxide having buried polycrystalline stone islands. A non-conductive dielectric layer acts as an electronic charge trapping medium. The charge trapping layer is interposed between two ruthenium dioxide layers as electrical insulators. A conductive control gate layer is disposed over the upper erbium oxide layer. When the source is grounded, a thermoelectric hole is used to apply the programming voltage to the gate and the drain, as described in (4). The hole is accelerated enough to attract the green ugly _ catching the area of the dielectric layer =. The device is read in the opposite direction in which it was written. When the drain is grounded, the read voltage is applied to the gate and source. For the same gate voltage applied, the reverse read greatly reduces the potential across the charge-trapping region. A shorter planning time is allowed by amplifying the effect of checking the charge in the localized region. U.S. Patent No. 7,187, G3G (Chae et al.), SQNOS Memory Device, and a method for erasing data from the SONOS memory device. The erase pack, the charge carrier of the L symbol is injected into her thin wealth, and the capture film has captured the charge of the first symbol (4). The second sign of the charge carrier is generated by the turtle field. The electric field is formed between one of the first and second electrodes in contact with at least one bit line and a gate electrode in contact with the word line. Between the closed and the general. Senna two characters _ Chu Jian hole 0

美國專利申請案號第7,170,785號(Yeh)說明一種用於操作一串電荷 捕捉式記憶體單元的方法及裝置。具有電荷捕捉結構的該_記憶體單元藉 由二對由-字元線娜的一記憶體單元的部分進行選擇峨讀取。該部分 讀體单7L之-部份藉由導通在辦記㈣單元的㈣__觸通過電晶 體之-而料。選擇部分的储槠狀祕_量與兩麵過電晶 接的位元線上的電流而決定。 美國專利申請案號第7,158,411號卿等人)提供 ^己憶,架構’其包括:第-記憶體陣列,其被_以儲存藤資料使用 二’之貝料,以及第二記憶體_,其被組態以健存用於資料使用另—产 式之資料。該第-及第二記歷_由依據非揮紐記舰單元的電荷^ 7 200845014 憶體形成。 美國專利申請案號第7,151,293號(Shimiwa等人)說明具有逆位元線的 SONOS記憶體。在一半導體基板中形成的該s〇N〇s記憶體單元包括··一 设置於該半導縣^上的底部介電質;—設置於該麵介電質上的電荷捕 捉材料,·以及一設置於該電荷捕捉材料上的頂部介電質。此外,該s〇n〇s 記憶體單元更包括·· 置於所述頂部介電fJL的字元線酿結構;以及 至少一個位線閘極,用於感應在所述半導體基板中至少一反向位元線。 美國專利申請案號第7,120,063號(Liu等人)說明快閃記憶體單元,其 包括:一f成於一基板通道區之上的介電質材料;一形成於該介電質材赤斗 之上的電荷捕捉材料;以及一形成於該電荷捕捉材料之上的控制閘極。所 述單元可藉由將電子從所述控制閘極導向所述電荷捕捉材料以提升該單 兀的臨界電壓,而被程式規劃。藉由將一基板耦合至一基板電壓電位,以 及將所述控_軸合至—酿電壓電位,可將電子從所述鋪閘極導向 所述電荷捕捉材料,其中該閘極電壓電位低於該基板電壓電位。藉由將電 子從所述電荷槪觀導⑽雜侧極、崎健快閃記㈣單元的臨 界電壓,而將所述單元拭除,例如,可將一基板耦合至一基板電壓電位, 以及將所述控制閘極_合至—閘極電壓電位,其中該,電壓電位高於該 基板電壓電位。 習知技術中的所述非揮發性記憶體單元通常被組態為NAND單元結 $冓。美國專利案縣6,614,_號和類專鑛號第6,163,_號(Hirose 等人)說明·一具有NAND單元結構的半導體非揮發性記憶體裝置。非揮 發性圮憶體單元電晶體的一 NAND堆疊被設置於一形成於半導體基板上 1中。碌非揮發性記憶體單元電晶體系列具有在耗減值範圍内電性變化的 臨界電壓。當在一特定NAND堆疊中的一單元被選擇進行讀取操作時, 一,圍電路驅動選擇的閘極字元線至所述阱電位,並驅動該選擇的NAND 堆豐中其他閘極的字元線至—電位,該電位的大小至少等於參考電壓加上 έ己憶體單絲被財棚狀糾邮界錢的大小。A method and apparatus for operating a string of charge trapping memory cells is described in U.S. Patent No. 7,170,785 (Yeh). The _memory unit having a charge trapping structure is read by two pairs of portions of a memory cell of the word line. The portion of the portion of the read body sheet 7L is turned on by the conduction of the (4) __ in the unit (4) unit through the electro-crystal. The selection of the portion of the reservoir is determined by the current on the bit line of the double-sided over-metallization. U.S. Patent Application Serial No. 7,158,411, et al., the disclosure of which is incorporated herein by reference in its entirety in its entirety in its entirety in its entirety in its entirety in its entirety in It is configured to store data for the use of another data. The first and second calendars are formed by the charge according to the charge of the non-counting unit. U.S. Patent Application Serial No. 7,151,293 (Shimiwa et al.) describes a SONOS memory having an inverse bit line. The s〇N〇s memory cell formed in a semiconductor substrate includes a bottom dielectric disposed on the semiconductor material; a charge trapping material disposed on the surface dielectric, and A top dielectric disposed on the charge trapping material. In addition, the s〇n〇s memory unit further includes: a word line brewing structure disposed on the top dielectric fJL; and at least one bit line gate for sensing at least one reverse in the semiconductor substrate To the bit line. No. 7,120,063 (Liu et al.) describes a flash memory cell comprising: a dielectric material formed over a substrate channel region; and a dielectric material formed in the dielectric material a charge trapping material over the bucket; and a control gate formed over the charge trapping material. The unit can be programmed by directing electrons from the control gate to the charge trapping material to raise the threshold voltage of the unit. Electron can be directed from the gate to the charge trapping material by coupling a substrate to a substrate voltage potential and aligning the control to a voltage potential, wherein the gate voltage potential is lower than The substrate voltage potential. The cell is erased by directing electrons from the charge to the threshold voltage of the (4) impurity side, and the substrate is coupled to a substrate voltage potential, and The control gate is coupled to a gate voltage potential, wherein the voltage potential is higher than the substrate voltage potential. The non-volatile memory cells in the prior art are typically configured as NAND cell junctions. U.S. Patent No. 6,614, _ and Class No. 6,163, _ (Hirose et al.) describe a semiconductor non-volatile memory device having a NAND cell structure. A NAND stack of non-volatile memory cell transistors is disposed on a semiconductor substrate 1 . The non-volatile memory cell transistor series has a threshold voltage that varies electrically within the depletion range. When a cell in a particular NAND stack is selected for a read operation, a surrounding circuit drives the selected gate word line to the well potential and drives the words of the other gates in the selected NAND stack The line is up to the potential, and the magnitude of the potential is at least equal to the reference voltage plus the size of the money that the 单 忆 体 单 被 被 被 被 纠 纠 纠 纠 纠 纠 纠.

Hara等人所著文章“具有70奈米CMOS技術的一 146平方毫米的多 200845014 階層 NAND 快閃記憶體(a 146-mm2 8-Gb Multi-Level NAND Flash Memory with 70-rnn CMOS Technology) ”( IEEE 固態電路雜誌(ieeE Journal of Solid-State Circuits),2〇〇6 年 1 月,第 41 卷,刊號:1,第 161·169 頁)中, 提供一種具有4階層程式化單元的8Gb多階層NAND快閃記憶體。Hara et al., "A 146-mm2 8-Gb Multi-Level NAND Flash Memory with 70-rnn CMOS Technology" with 70 nm CMOS Technology" ( IEEE's Solid State Circuits (IEeE Journal of Solid-State Circuits, January, 2016, Vol. 41, issue number: 1, pp. 161.169) provides 8Gb with 4 levels of stylized units. Hierarchical NAND flash memory.

Eitan等人所著文章“NROM : —種新穎的局部捕捉,2位元非揮發性 記憶體單元(NROM: A Novel Localized Trapping,2-Bit Nonvolatile Memory Cell)” ’ (IEEE 電子器件快報(IEEE Electron Device Letters),2000 年 11 月,第 21卷’刊號.11 ’第543-545頁)中,呈現一種新穎的快閃記憶體,其系依 據在’I笔層進行局部的電荷捕捉’依據在一 n+/p接面上儲存一額定〜4〇〇 個電子。猎由通道熱電子注入執行程式規劃,並藉由隧道強化熱電洞注入 執4亍拭除。5買取方法對被捕捉的電荷在源極上方的位置敏感。該單個裝置 單元具有兩個物理位元的儲存能力。Eitan et al., "NROM: A Novel Localized Trapping, 2-Bit Nonvolatile Memory Cell" (IEEE Electronic Device Express (IEEE Electron) Device Letters), November 2000, Vol. 21 'Publication No. 11. 'pp. 543-545) presents a novel flash memory based on local charge trapping in the 'I pen layer'. Store a nominal ~4〇〇 electron on an n+/p junction. Hunting is programmed by the channel hot electron injection program and is erased by the tunnel enhanced thermoelectric hole injection. 5 The buying method is sensitive to the position of the trapped charge above the source. The single device unit has the storage capacity of two physical bits.

Cho等人所著文章“一雙模式NAND快閃記憶體:1Gb多階層和高性 能 512Mb 單層模式(a Dual-Mode NAND Flash Memory: 1-Gb Multilevel and High-Performance 512-Mb Single-Level Modes)’’,( IEEE 固態電路雜諸 (IEEE Journal of Solid-State Circuits)),2001 年 11 月,第 36 卷,刊號·· η, 第17004706頁)中,描述了 116.7mm2NAND快閃記憶體,其具有兩種模 式· 1Gb多階層程式規劃(MLC)模式和高性能512Mb單階層程式規劃單元 (SLC)模式。兩級位元線設定設計防止峰值電流低於⑼㈤人。字元線修整斜 坡技術避免程式干擾。SLC模式使用〇·5ν遞增步進脈衝和自增壓程式克 服方案以實現高規劃性能表現。MLC模式使用0.15V遞增量步進脈衝和 局部自增壓程式克服設計,以緊密地控制單元的臨界電壓Vth的分佈。 美國專利案號第7,203,092號(Nazarian)提供一種具有快閃記憶體單元的 行與列的記憶體陣列。該記憶體單元的各行配置如同記憶體單元之NAND 序列串。各NAND串聯串具有:一頂部選擇電晶體,和一底部選擇電晶 體。该頂部選擇電晶體和該底部選擇電晶體連接至位元線,以致於響應於 位元線選擇與偏壓,交替位元線彳皮操作為源極線或位元線。 ^ 非揮發性§己憶體單元的多位元程式規劃的結構於Atwood等人所著文章 9 200845014 “Intel StrataFlash ΤΜ 記憶體技術概述(Intel StrataFlash ™ MemoryCho et al. "One-mode NAND flash memory: 1Gb multi-level and high-performance 512Mb single-layer mode (a Dual-Mode NAND Flash Memory: 1-Gb Multilevel and High-Performance 512-Mb Single-Level Modes ) '', (IEEE Journal of Solid-State Circuits), November 2001, Vol. 36, issue η, page 17004706), describes 116.7mm2 NAND flash memory It has two modes: 1Gb multi-level programming (MLC) mode and high-performance 512Mb single-level programming unit (SLC) mode. The two-level bit line setting design prevents peak currents below (9) (five) people. Technology avoids program disturb. SLC mode uses 〇·5ν incremental stepping pulse and self-boosting program to overcome the program to achieve high planning performance. MLC mode uses 0.15V incremental stepping pulse and partial self-boosting program to overcome the design, close The distribution of the threshold voltage Vth of the ground control unit. U.S. Patent No. 7,203,092 (Nazarian) provides a memory array having rows and columns of flash memory cells. Configuring a NAND sequence string like a memory cell. Each NAND series string has: a top select transistor, and a bottom select transistor. The top select transistor and the bottom select transistor are connected to the bit line such that in response to The bit line is selected and biased, and the alternating bit line is operated as a source line or a bit line. ^ The structure of the multi-bit programming of the non-volatile § memory unit is written by Atwood et al. 9 200845014 "Intel StrataFlash ΤΜ Memory Technology Overview (Intel StrataFlash TM Memory

Technology Overview)”,(英代爾技術雜誌(Intel Technology J0Umai),卷^ 刊號2, Q4 1997,發表於www.intel.com,2007年4月23日)中為此技術中 所知。該非揮發性記憶體單元包括:具有一隔離的浮動閘極的一單個電晶 體。該快閃單元為類比儲存裝置,儲存電荷(以單一電子而量化)而不是儲 存位元。藉由使用控制程式規劃技術,而可以在浮動閘極上設置精確數量 的電荷。電荷被準確地設置於描述兩個位元的四個電荷狀態(或範圍)之 一。四個電荷狀態中的每個電荷狀態與兩位元的資料圖案有關。需要的狀 態數量等於2N,其中N為所想要之位元數。然後決定快閃單元的臨界值, 以讀取儲存在該快閃單元中的數位資料。 美國專利案號第7,113,431號(Hamilton等人)屬於用於拭除雙位元記憶 體中的位元的技術,其系以保持記憶體單元的位元對的互補位元干擾控 的方式進行该拭除,其中該雙位元記憶體單元的各位元能夠被程式規劃至 多個階層。一個典型方法包含:在初始拭除後提供記憶體單元的一個字, 並將4子的位元知式規劃至更鬲程式規劃階層的一個或更多階層。對所述 字的各個所述位元對決定干擾位準。然後計算組合的干擾位準以代表該個 別干擾位準。汲極電壓圖案隨後被應用於該字以實施若干次數的程式規 劃,一直到目標圖案依據組合干擾位準而儲存記憶體單元之字中為止,以 及位元對中的未程式規劃位元被拭除為一單一程式規劃位準為止。此補償 存在於字之互補位元對之間之干擾辦,改善在所述拭除雜的程式規劃 位準的臨界賴(Vt)的分佈,錢目此改善隨更高娜的程式規劃操作 的準確度’並且減少對這個程式規劃位準狀態的錯誤或不正確的讀取。 【發明内容】 本發明的-目的在於提供-種相交連接的柱狀位元線結構,其用於多 階層可程式規劃雙面非揮發性記憶體單元之陣列。 本發賴另-目的在於提供電路和方法,其㈣於操作一種具有相交 連接的柱狀位讀結構❹階層可程式軸雙面非揮發性記憶體單元之 200845014 陣列。 體陣tΐΐίΊ 中的至少一個,本發明提供—非揮發性記憶 Γ Τ各列上的所述雙面電制捉式轉發性記憶體單 ί ΝΛ、Γ置在雙面電荷捕捉式非揮發性記憶體單元之NAND _聯串中。 個位-綠;t 2串具有.頂部選擇電晶體、和—底部選擇電晶體。複數 對你凡㉝目接’以致於雙面電荷槪式轉雜記髓單元之各列盘一 接=,選_體的"源錄極連接至所述有關驗元 選擇電晶體的一源極/没極連接至所述有關的位 '、的弟一仏。所述有關的位元線對中的所述第一條更與雙面 上务性記憶體單f的一 · 一相鄰列連接,並且有關的位元線對之第 所ft面電荷捕捉式非揮發性記憶體單元的一第二相鄰列連 m 頂部選擇電晶體的一源極/汲極連接至所述有關的位 =二的所逃第二條,並且所述第二相鄰列的所述底部選擇電晶體的一 “、汲極連接至所述有關的位元線對中的所述第一條。 、阳4SL彳元線t制為連接至所述複數個位元線,將位元線操作電壓移轉至 雙面電何捕捉式非揮發性記憶體單元,因用於被捕捉的電荷程式規 二播二t以及ί除’此被捕捉的電荷代表各所述選擇的雙面電荷捕捉式 軍务性§己憶體單元一電荷捕捉區中多個數位資料位元。 元一 所述非=發性記憶體單元牵列更包括:複數個字元線、複數個頂部選 ^以及複數個底部選縣。各字元線與所述複數健面電荷捕捉 ^生記憶體單元中的一行有關。各頂部選擇線連接至雙面電荷捕捉式非 ,性記憶體單元的Ν娜串聯串之至少―個之頂部選擇電晶體 Ϊ L各底部選擇線連接至雙面電荷槪式非揮發性記憶體單元的NAND 聯串之至少-個之底部選擇電晶體之祕。—字元線控㈣,其連接至 =述字元線、所述頂部選擇線、以及所述底部選擇線,以移轉字元線操作 讀用於將所捕捉的電荷實施選擇、程式規劃、讀取、以及拭除,其中該 被捕捉的私荷代表各所述選擇的雙面電荷捕捉式非揮發性記憶體單 11 200845014 電荷捕捉區中之多個位資料位元。 所述位元線控制器具有:一第一位元線程式規劃電壓源、和一第二位 元線程式規劃電壓源。一第一位元線程式規劃電壓源,經所述有關的位元 線對中的第一條至所述頂部選擇電晶體的所述源極/汲極,將代表多個數位 資料位元的一部分的複數個臨界調整電壓之一提供至··所選擇雙面電荷捕 捉式非揮發性記憶體單元的一第一汲極/源極,以設定此代表至電荷捕捉區 之夕個數位負料位元的一部分之熱載子電荷的一第一位準。第二位元線程 式規劃電壓源,將代表多個數位資料位元的另一部分之第二複婁欠個臨界調 整電壓提供至:所選擇雙面電荷捕捉式非揮發性記憶體單元的一第一沒極 /源極以δ又疋此代表至電荷捕捉區之多個數位資料位元的一部分之熱載子 電荷的一第二位準。 所述字元線控制器具有一字元線程式規劃電壓源,其提供一負極中等 大之程j規劃電壓以及中等正源極或沒極電壓,用於產生位於所述選擇的 雙面電荷捕捉式非揮發性記憶體單元之控制閘極、與該選擇的雙面電荷捕 捉式非揮發性記憶體單元的沒極和源極區域之間的電壓場,而從注入於所 選擇雙面電荷捕捉式非揮發性記憶體單元的一電荷捕捉區中之沒極和 極區域產生熱載子。 /、 所述字元線控制器更包括一第一選擇線程式規劃電壓源和一第 擇線程式規劃電壓源。該第一選擇線程式規劃電壓源選擇地提供一適 ====2部_ ’ _雙面電荷捕捉_$性 口己L體早70所讀NAND串聯串的頂部選擇電晶體。該第二 ί劃電iff擇!I提供—適敍的選擇電壓,碰㈣輯述底部選擇 二捉式料發歧鍾單元·擇NAND㈣串的 2述字7控制器更包括_字元線輕顧,其產生複數個臨測 體單元的複數 元一選择複數個臨;:=r一 12 200845014 包括-讀取祕賴產生n,其產生—汲極賴鲜,舰極電壓位準經 所边位兀^對的所述第一條和第二條被有選擇地移轉至所述第一沒極/源 極和所述第二祕/源極,_取決於電荷捕捉區中被捕捉的電荷位準,啟 動所選擇雙φ電荷概式轉雜記髓單元。所述侃線控繼中第一 ,地參考賴產生||產生—接轉考賴,麵位元麟騎述第一條和 f二條被有麵地轉至所述第-和第二雜娜…感應魏經所述成 山位兀線被連接至:所選擇的雙面電荷槪式非揮發性記憶體單元,以經 姑=線對的f條鮮二條,以侧代表多健位資料位元的所述電荷 捕捉區之程式規劃狀態。 •壓所更包括—字猶拭輯跡細_大的拭除 电用於在又面龟荷捕捉式非揮發性記憶體單元之通道區、盥兩 ===辟元場赚繼娜。絲峨大二 除电£之_%使用FGwler_NOTdheim穿隧,將來自通道區域之孰載子、主 荷槪式轉發性記髓單元之電荷觀區。触元線控制器 :有弟—接地辨電壓產m將該接地參考電壓施加至第一與 —沒源極。 /、 例子捕捉式非揮發性記憶體單元為n-通道記憶體單元的 祕U ! 式規劃電壓位準為大約顿至大約-ι〇·〇ν,以造 ㈡洞注入至所述電荷捕捉層。所述複數個臨界調整電壓 數位資料位元之第-和第二部分。所== 個til 至大約+5·ϋν,《劃分為區分所述複數Technology Overview)", (Intel Technology J0Umai, Vol. 2, Q4 1997, published on www.intel.com, April 23, 2007) is known in the art. The volatile memory cell includes a single transistor having an isolated floating gate. The flash cell is an analog storage device that stores charge (quantized in a single electron) rather than a memory bit. Technique, but a precise amount of charge can be placed on the floating gate. The charge is accurately set to one of the four charge states (or ranges) describing the two bits. Each of the four charge states has two bits. The data pattern of the element is related. The number of states required is equal to 2N, where N is the desired number of bits. Then the critical value of the flash cell is determined to read the digital data stored in the flash cell. No. 7,113,431 (Hamilton et al.) belongs to the technique for erasing the bits in the dual-bit memory, which is performed in such a manner as to maintain the interference control of the complementary bits of the bit pairs of the memory cells. except, The elements of the dual-bit memory unit can be programmed into multiple levels. A typical method includes: providing a word of the memory unit after the initial erasure, and planning the four-bit bit knowledge to a more detailed level. Program programming one or more levels of the hierarchy. Each of the bit pairs of the word determines an interference level. The combined interference level is then calculated to represent the individual interference level. The drain voltage pattern is then applied to the The word is programmed a number of times until the target pattern is stored in the word of the memory unit according to the combined interference level, and the unprogrammed bits in the bit pair are erased to a single programming level. This compensation exists in the interference between the complementary bit pairs of the words, improving the distribution of the critical (Vt) distribution in the program level of the erased program, and the improvement of the money is planned with the higher program. Accuracy' and reduce errors or incorrect readings of the program's leveling state. SUMMARY OF THE INVENTION The present invention is directed to providing a columnar bit line junction with intersecting connections Structure for multi-level programmable programming of double-sided non-volatile memory cells. The present invention is directed to providing a circuit and method for (4) operating a columnar read structure having intersecting connections. The at least one of the array of double-sided non-volatile memory cells of the program axis, the at least one of the body arrays, the present invention provides - the non-volatile memory Τ 所述 the double-sided electrical capture-type forward memory on each column ΝΛ, Γ in the NAND _ series of double-sided charge-trapping non-volatile memory cells. Cascade-green; t 2 strings have. Top select transistor, and - bottom select transistor. Sighting so that the two sides of the double-sided charge 槪-type 杂 记 记 一 = , , , , , , , , , , , , , , , 源 源 源 源 源 源 源 源 源 源 源 源 源 源 源 源 源The relevant bit ', the younger brother. The first one of the related bit line pairs is further connected to one adjacent column of the double-sided upper memory unit f, and the first ft surface charge trapping of the associated bit line pair A second adjacent column of non-volatile memory cells has a source/drain of a top select transistor connected to the escaped second strip of the associated bit = two, and the second adjacent column The bottom of the bottom select transistor is connected to the first one of the associated bit line pairs. The positive 4SL unit line t is connected to the plurality of bit lines. Shifting the bit line operating voltage to a double-sided electrically-capable non-volatile memory cell, because the charge code used for the capture is secondarily broadcasted, and the captured charge represents the selected one. Double-sided charge-trapping military § 己 体 体 单元 单元 一 电荷 电荷 电荷 电荷 电荷 电荷 电荷 电荷 电荷 电荷 电荷 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元 元Selecting ^ and a plurality of bottom selections. Each word line and the complex surface charge trapping memory unit One row is selected. Each top selection line is connected to the double-sided charge trapping type. At least one of the top serial strings of the memory cells is selected from the top of the transistor. L The bottom selection line is connected to the double-sided charge type. The bottom of at least one of the NAND strings of the memory cells selects the secret of the transistor. The word line control (4) is connected to the word line, the top selection line, and the bottom selection line to shift The word line operation read is used to perform selection, programming, reading, and erasing of the captured charge, wherein the captured private charge represents each of the selected double-sided charge trapping non-volatile memory sheets 11 200845014 A plurality of bit data bits in the charge trapping area. The bit line controller has: a first bit threaded planning voltage source, and a second bit threaded planning voltage source. a meta-threaded planning voltage source that passes through the first one of the associated bit line pairs to the source/drain of the top select transistor, and will represent a plurality of portions of the plurality of digital data bits One of the critical adjustment voltages Providing a first drain/source of the selected double-sided charge trapping non-volatile memory cell to set the hot carrier charge representative of a portion of the digital negative negative bit of the charge trapping region a first level of quasi-planning voltage source, providing a second retracement threshold voltage representing another portion of the plurality of digit data bits to: selected double-sided charge trapping non-volatile A first gate/source of the memory cell is at a second level of the hot carrier charge of the portion of the plurality of digital data bits of the charge trapping region by δ. Having a character-threaded programming voltage source that provides a negative medium-sized process j planning voltage and a medium positive source or no-pole voltage for generating a double-sided charge trapping non-volatile memory cell located in the selected Controlling a gate, a voltage field between the gate and source regions of the selected double-sided charge trapping non-volatile memory cell, and implanting from the selected double-sided charge trapping non-volatile memory cell One charge The hot and cold regions in the capture zone produce hot carriers. The word line controller further includes a first selected threaded planning voltage source and a first threaded planning voltage source. The first selected threaded planning voltage source selectively provides a top select transistor for the NAND series string of 70 read _ _ _ double sided charge traps. The second 划 择 ! I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I Gu, which generates a plurality of complex elements of a single body unit, selects a plurality of copies;:=r-12 12450450, including - reading secrets to produce n, which produces - 汲 赖 ,, ship voltage level The first and second strips of the edge pair are selectively transferred to the first gate/source and the second secret/source, depending on the trapped charge trapping region The charge level is initiated by the selected double φ charge generalized to the nucleus unit. The 侃 line control succeeds in the first, the ground reference 赖 produces ||produces - picks up the test, the face position Yuan lion rides the first and f two are turned face to the first - and second miscellaneous ...inductive Wei Jing said Chengshan position 兀 line is connected to: the selected double-sided charge 槪 type non-volatile memory unit, with the pair of f = two fresh lines, the side represents the multi-station data bit The programmed state of the charge trapping region. • The pressure is more included—the word is still fine. _ Large eraser The electricity is used in the channel area of the face-to-face turtle-type non-volatile memory unit, and the two are ===峨 峨 除 除 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用Touch line controller: There is a brother-grounding voltage generator m to apply the ground reference voltage to the first and the - no source. /, the example capture type non-volatile memory unit is the secret of the n-channel memory unit. The pattern voltage level is about - 至 大约 , , ν to make the (two) hole injection into the charge trap layer. . The plurality of critical adjustment voltages are the first and second portions of the digital data bits. == til to about +5·ϋν, divided into different numbers

Sl㉟1龍之遞增4。所舰極電驗準必須為—電壓位準,足 夠大以克服所述第一和篥二恭丼妯构F从心田兩矿 包平疋 雙面電荷捕捉式非揮發性;』界电壓’並且不足以造成所述 f以財為大約+1请至大約+20V。該非常大的拭除電壓使用 H_Norxiheim f隧使得熱電子從所述通道區注入所述雙面電荷捕捉式 祕記憶鮮福所述電荷歡層,以遞增騎雙面f荷捕捉式非i 13 200845014 發性記憶體單元的臨界電壓。 在所述雙面電荷捕捉式非揮發性記憶體單元為ρ·通道記憶體單元的 例子中’所述非常大的程式規畫;j電慶位準為大约·ν至大約,以 造成熱載子注入為熱電洞注入至電荷捕捉層。所述複數個臨界調整電麼的 :麼範圍攸大約-1.0V到大约-6.0V,而所劃分為區間足夠大,而能決定複 數個多,數位資料位元的所述第—和第二部分。所述複數個臨界侧賴 =電堡扼圍從大約-2.0V到大約娜,並被劃分為區分所述複數個程式規 泰界電顯_量。所歧極電驗準必縣—襲辦,足夠大以克 第,汲極_界龍,並且不足崎成所述雙面電荷捕捉式 體早7°的軟寫。此外’在所述雙面電荷酿式轉發性記憶 為P-通道記憶體單元的例子中,所述非常大的的拭除電·準為大 、·、- 5.〇ν至大約-20V。該非常大的拭除電壓使用F〇wler N滅eim穿隨, 通道區注入所述雙面電荷捕捉式非揮發性記憶體單元 界電^祕足品’以降低所述雙面電荷捕捉式非揮發性記憶體單元的臨 【實施方式】 本發明的-非揮發觀舰_由以行翻配置之雙面電荷捕捉式非 形^立於各個列上的雙面電荷捕捉式非揮發性記憶體組配 3二ΐ ΐ 之雙面電荷捕捉式非揮發性記憶體單元串聯。所 Α又面輯捕捉式非揮發性記憶體單元的各個 :獅電晶體的一祕及極連接至所述有關 ;= :底部選擇電晶體的一源錄極連接至所述有關的位= 所 =關的位,線對中的所述第一條更與雙面電荷捕 更與所述雙®電荷她式轉魏記髓一 (i^ 第-相_賴錢”制赋鱗紐記憶體單元^ 鄰列有關’並且所述有關的位元線對中的所條 早疋的一第二相鄰列有關。所述 的所述頂部選 200845014 擇電晶體的一源極/汲極連接至:所述有關的位元線對中的所述第二修、、, 且所述第二相_㈣Φ電翻減轉發性記㈣單底: 選擇電晶體的一源極/汲極連接至所述有關的位元線對中的所述第一佟'The increase of Sl351 dragon is 4. The ship's pole electrical calibration must be - the voltage level, large enough to overcome the first and second 丼妯 丼妯 从 F from the Xintian two mines flat 疋 double-sided charge trapping non-volatile; Not enough to cause the f to be about +1 to about +20V. The very large erase voltage uses H_Norxiheim f tunneling so that hot electrons are injected from the channel region into the double-sided charge trapping type memory to increase the riding double-sided f-load capture type non-i 13 200845014 The threshold voltage of the memory unit. In the example where the double-sided charge trapping non-volatile memory unit is a ρ·channel memory unit, the very large program is drawn; the j-level is about ν to about, to cause a hot load. Sub-injection is injected into the charge trapping layer for the thermal cavity. The plurality of critical adjustments: the range 攸 about -1.0V to about -6.0V, and the interval is sufficiently large to determine the plurality of, the first and second of the digital data bits section. The plurality of critical side = = electric 扼 扼 从 大约 from about -2.0V to about 娜, and is divided to distinguish the plurality of programs. The singularity of the electric squad is to be counted, and it is large enough to be grammatical, 汲 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Further, in the case where the double-sided charge-transfer memory is a P-channel memory cell, the very large erase current is large, ·, - 5.〇ν to about -20V. The very large erase voltage is flipped with F〇wler N, and the channel region is injected into the double-sided charge-trapping non-volatile memory cell boundary to reduce the double-sided charge trapping VOID MEMORY UNIT [Embodiment] The non-volatile view ship of the present invention is a two-sided charge trapping type non-volatile memory that is disposed on each column by a double-sided charge trapping configuration A double-sided charge-trapping non-volatile memory unit in series with 3 ΐ ΐ is connected in series. Each of the capture-type non-volatile memory cells: a secret and a pole of the lion's transistor connected to the said; =: a source of the bottom-selective transistor is connected to the associated bit = = off bit, the first pair in the pair is more with double-sided charge trapping and the double-charged her-style transfer Wei Jiuyi (i^第-相_赖钱) system The cell ^ neighbor is associated with 'and a second adjacent column of the preceding bit in the associated bit line pair. The top select 200845014 selects a source/drain of the electrification transistor to : the second repair in the related bit line pair, and the second phase _ (four) Φ electric turn-off forwarding (4) single bottom: select a source/drain of the transistor to connect to the Said first 佟 in the associated bit line pair

VV

-位元線控制器連接至所述複數個位元線,將位元線操作電 所選擇雙面電荷敵式非揮發性記憶體單元,將被捕捉的電荷程】 劃、讀取、以及拭除,其中該被捕捉的電荷代表各此等所選擇雙面^ 捉式非揮發性記憶體單元之電荷捕捉區中之多個數位資料位元。包° 本發明所述非揮發性記憶體陣列的各列上之各此等雙面電荷捕 非揮發性記憶體單元之控制閘極連接至一字元線。所述雙面電荷捕捉 揮發性記憶體單元之NAND串聯組之頂部選擇電晶體的各閘極連接至 部選擇線。_地,電荷她式_發性記舰單摘nand串雜 的底部選擇電晶體的各閘極連接至一底部選擇線。一字元線控制器^接 至:所述字元線、所述頂部選擇線、以及所述底部選擇線,以移轉&元 操作電壓,麟將被捕㈣電荷卿、程式_、讀取、以及拭除,其中 該被捕捉的,荷代表各此等所選擇雙面電荷捕捉式非揮發性記紐單&之 電荷捕捉區中之多個數位資料位元。 产現在茶考第la圖和第lb ,用於討論第la圖的石夕氧化物_氮化物_ 石夕(SONOS)或金屬-氧化物_氮化物_氧化物·雜〇N〇s)雙面快閃記 fe體早碰構,和帛lb關本發明轉雜記憶 電荷捕捉式鱗細繼單元5形成在—基板财。—祕== =區2G在基板1〇内形成。—相對薄_極氧化物細道氧化物%沉積 ;土板10上。-電荷捕捉層35隨後形成於氧化物層3〇之上並且位於没極 =5和源極區20之間的通道區25上方。一第二介電質氧化物層4〇被設 置於電何捕捉層35的頂部,將該電荷捕捉層35與―多跋層45分開。多 $層45形成雙面電荷捕捉式非揮發性記憶體單元$的控制閉極。當雙面 捉式轉發性讀體單元5的控侧極Μ在被設置於雙面電荷捕捉 二1揮發,己憶體單元5的一陣列中時,連接至一字元線端子50 。汲極15 連接至-第-位元線端子55,並且源極2G連接至—第二位元線端子分。 15 200845014 體單以綺紐錄料位元作為_㈣電荷而儲存於電 Ϊ道電荷捕捉層35設置在此形成於没極15和源極20之間的 多階層雙面快閃記憶體單元5的操作包含··—拭除操作, 刼作,以及-讀取操作。在拭除操作t,字元線端子50被設定一的』 拭除,並被施加至控制閘極45,因而將電子從位於沒極· 15和源極 ,20之間的通道區注入被捕捉的電荷65和7〇巾。該第一和第二位元線 端子55和60以及該汲極區15和源極區2〇因此被設定為接地參考電壓。 多階層雙面快閃記憶體單元5的程式規劃操作由向字元線端子%設定一施 加至控制’45的中等的大程式規劃電壓關始。射等的大喊規劃雷 壓與該非常大的拭除電塵極性相反。為了將離汲極區ls最近的電荷捕捉區 65程式規劃,第一-位元線端子55和没極區ls先後被設定為位元線電壓位 準j亚且第二位元線端子60和源極區2〇先後被設定為接地參考電壓。為 了對離源麵2G最_電獅娜%奴賊,帛二位猶端㈣以及 因此源極區2G被設定為位元線電壓鱗,並且第—位元線軒%和沒極 區15被設定為接地參考電壓。讀取操作藉由將字元線端? %以及因此控 制閘極45言受定至-讀取電壓位準作為開始。要讀取電荷捕捉區&的程^ 規劃^態,第-位元線端子55以及因此没極區15被設定為接地參考電壓, 亚且第二位7〇線端子60以及0此源極區2G被設定驗極讀賴位準。由 電荷捕捉區65的電荷位準所調整的臨界電壓⑽決定儲存於該電荷捕捉區 65中的數位資料。要讀取電荷捕捉㉟7〇的程式規劃狀態,帛一位元線端 子55以及因此汲極區15被設定為沒極讀電壓位準,並且第二位元線端子 60以及因此源極區20被設定為接地參考電邀。由電荷捕捉區%的電荷位 準調整的臨界電壓(Vt)決定儲存於該電荷捕捉區7〇中的數位資料。 本發明用於一 SONOS/MONOS雙面快閃記憶體單元的操作方法提供 儲存於第la圖中各個電荷捕捉區65和7〇的多個位元。在第lc圖中,各 個電荷捕捉區可具有四個位準100、110、12〇以及13〇其中之一的位準, 以及因此代表數位資料的兩個二進位位元。作為拭除電壓位準的臨界電壓 位準130也作為用於數位η之數位資料之電壓位準。s〇N〇s/M〇N〇s雙 200845014 面快閃記憶體單元的-_被進行足夠長的時_程式規劃,_使臨界 電壓(Vt)102、112、122以及132的分佈允許對字元線電壓的設定,以及因 此該陣列的控綱極對程式規劃電壓WV1 1〇5、WV2 115以及⑵ 的$又疋。,一碩取操作期間,該控制閘極被設定為用以決定臨界電壓(Vt) 的各個電壓辦,其t該臨界賴代表儲存於電荷捕捉層的各健位資 的該兩個位元。 ' 本發明的非揮發性記憶體陣列200由第la圖中的雙面電荷捕捉式非 揮發性范憶體單元按列與行配置而形成,如第2a圖所示。位於本發明非揮 發性記憶體陣列200的各個行上的雙面電荷捕捉式非揮發性記憶體單元 205的組210a、210b、··· 210η-卜210η相連接而形成雙面電荷捕捉式非 揮發性記憶體單元205的NAND串聯串。各個NAND串聯串組2l〇a、 210b、…210n-l、21〇n具有一頂部選擇電晶體215a、215b、…215n l、21允, 以及一底部選擇電晶體220a、220b、…220n-l、220η。各頂部選擇電晶體 215a、215b、…215η-1、215η具有一第一源極/沒極,連接至各ΝΑΝ〇串 聯串組210a、210b、…210n-l中頂部的雙面電荷捕捉式非揮發性記憶單元 205的沒極。各底部選擇電晶體22〇a、22〇b、…220η-、220η具有一第一 源極/汲極,連接至各NAND串聯串組210a、210b、…210η-:1、220η中底 部的雙面電荷捕捉式非揮發性記憶單元205的源極。頂部選擇電晶體 215a、215b、…215η]、215η以及底部選擇電晶體220a、22〇b、…22〇11_卜 220η的源極和汲極在功能上是可互換的,因此為表述清楚,被指定為第一 和第二源極/汲極。 各頂部選擇電晶體215a、215b、…犯以、以允之第二源極/汲極, 連接至位元線225a、225b、225c、…225η-2、225η-1、225η中所述有關的 位元線對的第一條。底部選擇電晶體220a、220b、…22〇η-1、220η的第二 源極/没極,連接至位元線 225a、225b、225c、…225n-2、225n-l、225n 中所述有關的位元線對的第二條。 本發明的非揮發性記憶陣列200的各個行(在本實施中指NAND串聯 串組 210a、210b、…210η-1、210η 之一)與位元線中 225a、225b、225c、… 17 200845014 225n-2、225n-l、225η 的一對位元線有關。位元線 225a、225b、225c、... 225n_2、225n-l、225η中有關的各成對位元線中的一條更與雙面電荷捕捉 式非揮發性記憶單元單元的一第一相鄰行2i〇a、21〇b、…210η-卜210η有 關,並且位元線225a、225b、225c、··_ 22511-2、225H-卜225η中有關的各 成對位元線中的第二條更與該雙面電荷捕捉式非揮發性記憶單元單元的一 第二相鄰行 21(^、21013、".21〇11-1、21〇11有關。第一相鄰行21(^、21013、·.· 210η-1、210η的頂部選擇電晶體的一第二源極/沒極連接至位元線225a、 225b、225c、…225η_2、225η·:1、225η中有關的位元線對的該第二條,並 且第二相鄰行的底部選擇電晶體的一源極/汲極連接至位元線225a、225b、 225c、··· 225n-2、225n-l、225n中有關的位元線對的該第一條。具有2i〇a、 210b'··· 210n4、210n 中一行的頂部選擇電晶體與 21〇a、21〇b、... 210n-l、 210n中一相鄰行的底部選擇電晶體連接至位元線225a、225b、225c、... 225n-2、225η-卜225η令的一條,提供了本發明所述相交連接柱狀的位元 線結構。 所有的位元線225a、225b、225c、…225η-2、225η-卜225η均連接至 位元線控制器230。位元線控制器230向選擇的雙面電荷捕捉式非揮發性 記憶體單元205提供必需的位元線操作電壓,用於對被捕捉的電荷進行程 式規劃、讀取、以及拭除,其中該被捕捉的電荷代表各所述選擇的雙面電 荷捕捉式非揮發性記憶體單元的一電荷捕捉區中的多個數位資料位元。 本發明所述非揮發性記憶體陣列200各列上的各雙面電荷捕捉式非揮 發性記憶體單元205的一控制閘極連接至字元線235a、235b、... 235j-l、 235j、235j+l、…235m]、235m其中之一。頂部選擇電晶體215a、215b、… 215n_ 1、215η的閘極連接至頂部選擇閘極線240a和240b。在本發明所述 非揮發性記憶體陣列200的此實施例中,頂部選擇電晶體215a、215b、… 215n-1、215n其中的一半與頂部閘極選擇線240a和240b中的一條相連接, 並且其中另一半與頂部閘極選擇線240a和240b中的另一條相連接。底部 選擇電晶體220a、220b、…220η-1、220η的閘極連接至底部選擇閘極線 245。所有字元線 235a、235b、…235j]、235j·、235j+卜…235m小 235瓜、 頂部選擇閘極線240a和240b、以及底部選擇閘極線245均連接至一字元 18 200845014 線控制器250。字元線控制器250轉字元線的操作電壓,用於選擇、程 j規劃、讀取、以及拭除被捕捉的電荷,其中該被捕捉的電荷代表各所述 選擇的雙面電荷槪式非揮發性記憶體單元2〇5 #一電荷捕捉區中多健 位資料位元。 由第la圖中的雙面電荷捕捉式非揮發性記憶體單元所形成的本發明 的非揮發性記憶體陣列200的第二實施例,而顯示於第2b圖中。除了底部 選擇電晶體22Ga、22Gb、··· 22Gn.:l、薦_極,此實歸⑽結構和功能 均等同於第2a圖者。底部選擇電晶體22〇a、220b、…220η-1、220η交替 地連接至兩條底部選擇閘極線245a和245b其中的一條。啟動兩條底部選 擇閘極線245a和245b其中之一允許NAND串聯串組21〇a、21〇b、… 210η-1、210η 的交替行連接至位元線 225a、225b、225c、... 225nJ、、 225n ’ 而使 NAND 串聯串組 210a、21Gb、··· 210η·1、21Gn 交替行隔離, 此NAND串聯串組使底部選擇電晶體22〇a、22〇b、…22〇11_卜22〇n連接 至兩條底部選擇閘極線245a和245b中未啟動者。 本發明之非揮發性記憶體陣列300之更一般性結構是由第ia圖的雙 面電荷捕捉式非揮發性記憶體單元依列與行配置而形成,如同第3圖中所 說明。本發明所述非揮發性記憶體陣列300各行上的各雙面電荷捕捉式非 揮發性記憶體單元 305 的組 310a、310b、310c、310d、_、310i、310j、 310k、3101、…、310w、310x、310y、310z按前述方式相連接,以形成雙 面電荷捕捉式非揮發性記憶體單元305的NAND串聯串。各個NAND串 聯串組 310a、310b、310c、3ΠΜ、…、310i、310j、310k、3101、…、310w、 310x、310y、310z 具有:一頂部選擇電晶體 3i5a、315b、315e、315d、、 315i、315j、315k、3151、···、315w、315x、315y、315z ;以及一底部選擇 電晶體 320a、320b、320c、320d、…、320i、320j、320k、3201、…、320w、 320x、320y、320z。各頂部選擇電晶體 315a、315b、315c、315d、…、315i、 315j、315k、315卜···,315w、315x、315y、315z 有一第一源極/汲極連接 至:各NAND 串聯串組310a、310b、310c、310d、…、310i、310j、310k、 3101、…、310w、31〇x、310y、310z頂部的雙面電荷捕捉式非揮發性記憶 體單元305的汲極。各底部選擇電晶體具有一第一源極/汲極連接至各 19 200845014 NAND 串聯串組 3i〇a、31〇b、310c、310d、···、310i、310j、310k、3101、…、 31Gw ' 310χ、310y、310z底部的雙面電荷捕捉式非揮發性記憶體單元305 的源極。頂部選擇電晶體 315a、315b、315c、315d、...、315i、315j、315k、 3151、·_·、315w、315x、315y、315z 及底部選擇電晶體 320a、320b、320c、 320d、...、320i、320j、320k、3201、···、320w、320x、320y、320z 的源 極和没極在功能上可互換,因此為了表述清楚,特指定為第一和第二源極/ 沒極。 頂部遂擇電晶體 315a、315b、315c、315d、…、315i、315j、315k、 3151、· · ·、315w、315x、315y、315z的一第二源極/沒極連接至位元線325a、 325b、325c、325d中有關的位元線對的第一條。底部選擇電晶體320a、320b、 320c、320d、…、320i、320j、320k、320卜…、320w、320x、320y、320z 的一第二源極/汲極連接至:位元線325a、325b、325c、325d中有關的位元 線對的第二條。頂部選擇電晶體315a、315b、315c、和315d的第二源極/ 没極連接至位元線325a。頂部選擇電晶體315i、315j、315k、和3151的第 二源極/汲極連接至位元線325b。頂部選擇電晶體315w、315x、315y、和 315z的第二源極/汲極連接至位元線325C。 底部選擇電晶體320a、320b、320c、和320d的第二源極/没極連接至 位元線325b。底部選擇電晶體320i、320j、320k、和3201的第二源極/沒極 連接至位元線325c。底部選擇電晶體320w、320x、320y、和320z的第二 源極/汲極連接至位元線325d。a bit line controller is connected to the plurality of bit lines, and the bit line operation is selected to select a double-sided charge enemy non-volatile memory unit, and the captured charge path is swiped, read, and wiped. In addition, the captured charge represents a plurality of digital data bits in the charge trapping regions of each of the selected double-sided non-volatile memory cells. The control gates of each of the double-sided charge trapping non-volatile memory cells on each column of the non-volatile memory array of the present invention are connected to a word line. The gates of the top select transistors of the NAND series of multiplexed charge trapping volatile memory cells are coupled to the select lines. _ ground, charge her type _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ A word line controller is connected to: the word line, the top selection line, and the bottom selection line, to transfer & yuan operation voltage, Lin will be arrested (four) charge Qing, program _, read And the erased, wherein the captured, charge represents a plurality of digital data bits in the charge trapping regions of each of the selected double-sided charge trapping non-volatile bills & Production of the tea test, the first map and the lb, for discussing the Lashi oxide _ nitride _ Shi Xi (SONOS) or metal-oxide _ nitride _ oxide · 〇 〇 N〇 s double The surface flash flashes the FF body early collision structure, and the 帛 lb off the invention turns the memory memory charge trapping scale relay unit 5 to form in the substrate. - Secret == = Zone 2G is formed in the substrate 1〇. - relatively thin _ extreme oxide oxide oxide % deposition; on the soil plate 10. - A charge trapping layer 35 is then formed over the oxide layer 3A and above the channel region 25 between the poleless = 5 and the source region 20. A second dielectric oxide layer 4 is placed on top of the electron capture layer 35 to separate the charge trap layer 35 from the multi-layer 45. The multi-layer 45 forms a controlled closed-pole of the double-sided charge trapping non-volatile memory unit $. When the control side of the double-sided transfer type read unit 5 is disposed in an array of double-sided charge traps 2, the memory unit 5 is connected to a word line terminal 50. The drain 15 is connected to the -th bit line terminal 55, and the source 2G is connected to the second bit line terminal. 15 200845014 The body sheet is stored as a _ (four) charge in the Ϊ (4) charge and stored in the electric channel charge trapping layer 35. The multi-layer double-sided flash memory unit 5 formed between the pole 15 and the source 20 is disposed. The operations include ··—erase operations, operations, and read operations. At the erase operation t, the word line terminal 50 is set to erased and applied to the control gate 45, thereby injecting electrons from the channel region between the gate 15 and the source 20, being captured. The charge is 65 and 7 wipes. The first and second bit line terminals 55 and 60 and the drain region 15 and the source region 2 are thus set to a ground reference voltage. The program planning operation of the multi-layer double-sided flash memory unit 5 is set by applying a medium program size voltage to the word line terminal % to the control '45. The screaming plan lightning pressure of the shot is opposite to the polarity of the very large erased dust. In order to program the charge trapping region 65 closest to the drain region ls, the first-bit line terminal 55 and the non-polar region ls are sequentially set to the bit line voltage level j and the second bit line terminal 60 and The source region 2〇 is set to the ground reference voltage. In order to be the most detached from the source 2G, the 狮 娜 % % 奴 帛 帛 帛 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四 四Set to ground reference voltage. Read operation by placing the word line end? % and thus the control gate 45 are determined to start with the read voltage level. To read the charge trapping area & the state, the first bit line terminal 55 and thus the non-polar region 15 are set to the ground reference voltage, and the second bit 7 〇 line terminal 60 and 0 this source Zone 2G is set to check the pole reading level. The threshold voltage (10) adjusted by the charge level of the charge trapping region 65 determines the digital data stored in the charge trapping region 65. To read the program planning state of the charge trap 357, the one bit line terminal 55 and thus the drain region 15 are set to the immersed voltage level, and the second bit line terminal 60 and thus the source region 20 are Set to ground reference. The threshold voltage (Vt) adjusted by the charge level of the charge trapping region % determines the digital data stored in the charge trapping region 7A. The method of operation of the present invention for a SONOS/MONOS double-sided flash memory cell provides a plurality of bits of respective charge trapping regions 65 and 7〇 stored in FIG. In the lc diagram, each of the charge trapping regions may have a level of one of four levels 100, 110, 12, and 13, and thus two binary bits representing digital data. The threshold voltage level 130, which serves as the erase voltage level, also serves as the voltage level for the digital data of the digit η. s〇N〇s/M〇N〇s double 200845014 face flash memory unit -_ is made long enough _ program planning, _ allows the distribution of threshold voltages (Vt) 102, 112, 122 and 132 to allow The word line voltage is set, and thus the array of the array is programmed for voltages WV1 1〇5, WV2 115, and (2). During a master operation, the control gate is set to determine the threshold voltage (Vt) of each voltage, and the critical value represents the two bits of each of the health care resources stored in the charge trapping layer. The non-volatile memory array 200 of the present invention is formed by a double-sided charge trapping non-volatile memory cell unit in the first drawing in a column and row configuration, as shown in Fig. 2a. The sets 210a, 210b, 210N, 210n, 210n of the double-sided charge trapping non-volatile memory cells 205 located on the respective rows of the non-volatile memory array 200 of the present invention are connected to form a double-sided charge trapping type. A NAND series string of volatile memory cells 205. Each of the NAND series strings 21a, 210b, ... 210n-1, 21〇n has a top selection transistor 215a, 215b, ... 215n l, 21, and a bottom selection transistor 220a, 220b, ... 220n-l 220η. Each of the top selection transistors 215a, 215b, ... 215n-1, 215n has a first source/no pole, and is connected to the top of each of the series series strings 210a, 210b, ... 210n-1. The pole of the volatile memory unit 205. Each of the bottom selection transistors 22A, 22B, ... 220n-, 220n has a first source/drain, connected to the bottom of each of the NAND series strings 210a, 210b, ... 210n-: 1, 220n The source of the surface charge trapping non-volatile memory unit 205. The source and drain electrodes of the top selection transistors 215a, 215b, ... 215n], 215n and the bottom selection transistors 220a, 22〇b, ... 22〇11_b 220n are functionally interchangeable, and therefore are clearly stated. Designated as the first and second source/drain. Each of the top selection transistors 215a, 215b, ... is operative to allow the second source/drain to be connected to the relevant ones of the bit lines 225a, 225b, 225c, ... 225n-2, 225n-1, 225n. The first line of the bit line pair. The second source/nopole of the bottom selection transistors 220a, 220b, ... 22〇η-1, 220n is connected to the bit lines 225a, 225b, 225c, ... 225n-2, 225n-1, 225n The second line of the bit line pair. The various rows of the non-volatile memory array 200 of the present invention (in this embodiment, referred to as one of the NAND series strings 210a, 210b, ... 210n-1, 210n) and the bit lines 225a, 225b, 225c, ... 17 200845014 225n- 2. A pair of bit lines of 225n-l and 225η are related. One of the pair of bit lines associated with the bit lines 225a, 225b, 225c, ... 225n_2, 225n-1, 225n is further a first adjacent to the double-sided charge trapping non-volatile memory cell unit The rows 2i 〇 a, 21 〇 b, ... 210 η - 卜 210 η are related, and the second of the pair of bit lines in the bit lines 225a, 225b, 225c, . . . 22511-2, 225H-b 225n The strip is further related to a second adjacent row 21 (^, 21013, ".21〇11-1, 21〇11) of the double-sided charge trapping non-volatile memory cell unit. The first adjacent row 21 (^ a second source/no pole of the top select transistor of 21011, 210, 210n-1, 210n is connected to the bit in the bit line 225a, 225b, 225c, ... 225n_2, 225n·: 1, 225η The second strip of the pair, and a source/drain of the bottom select transistor of the second adjacent row is connected to the bit line 225a, 225b, 225c, ... 225n-2, 225n-1, 225n The first strip of the associated bit line pair. The top select transistor having one row of 2i〇a, 210b'.. 210n4, 210n and 21〇a, 21〇b, ... 210n-l, 210n Bottom selection of an adjacent row The transistor is connected to one of the bit lines 225a, 225b, 225c, ... 225n-2, 225n-b 225n, providing the intersecting columnar bit line structure of the present invention. All bit lines 225a , 225b, 225c, ... 225η-2, 225η-b 225η are all connected to the bit line controller 230. The bit line controller 230 provides the necessary bit to the selected double-sided charge trapping non-volatile memory unit 205. a line operating voltage for programming, reading, and erasing the captured charge, wherein the captured charge represents a charge trapping region of each of the selected double-sided charge trapping non-volatile memory cells a plurality of digital data bits in a row. A control gate of each double-sided charge trapping non-volatile memory unit 205 on each column of the non-volatile memory array 200 of the present invention is connected to word lines 235a, 235b One of 235j-l, 235j, 235j+l, ... 235m], 235m. The gates of the top selection transistors 215a, 215b, ... 215n_1, 215n are connected to the top selection gate lines 240a and 240b. This embodiment of the non-volatile memory array 200 of the present invention In the example, one of the top select transistors 215a, 215b, ... 215n-1, 215n is connected to one of the top gate select lines 240a and 240b, and the other half is in the top gate select lines 240a and 240b The other one is connected. The gates of the bottom selection transistors 220a, 220b, ... 220n-1, 220n are connected to the bottom selection gate line 245. All word lines 235a, 235b, ... 235j], 235j ·, 235j + ...... 235m small 235 melon, top select gate lines 240a and 240b, and bottom select gate line 245 are all connected to one character 18 200845014 line controller 250. The word line controller 250 rotates the operating voltage of the word line for selecting, reading, reading, and erasing the captured charge, wherein the captured charge represents each of the selected double-sided charges Non-volatile memory unit 2〇5 # A multi-station data bit in a charge trapping area. A second embodiment of the non-volatile memory array 200 of the present invention formed by the double-sided charge trapping non-volatile memory cells of Figure la is shown in Figure 2b. Except for the bottom selection transistor 22Ga, 22Gb, ··· 22Gn.:l, recommended _ pole, the structure and function of this (10) are equivalent to the 2a figure. The bottom selection transistors 22A, 220b, ... 220n-1, 220n are alternately connected to one of the two bottom selection gate lines 245a and 245b. Enabling one of the two bottom select gate lines 245a and 245b allows alternate rows of NAND series string sets 21〇a, 21〇b, ... 210η-1, 210n to be connected to bit lines 225a, 225b, 225c, ... 225nJ, 225n ' and NAND series series strings 210a, 21Gb, ..., 210n · 1, 21Gn are alternately isolated, the NAND series string sets the bottom selection transistors 22〇a, 22〇b, ... 22〇11_ Bu 22〇n is connected to the unstarters of the two bottom select gate lines 245a and 245b. A more general structure of the non-volatile memory array 300 of the present invention is formed by the two-sided charge trapping non-volatile memory cell of the ia diagram in a row and row configuration, as illustrated in Figure 3. Groups 310a, 310b, 310c, 310d, _, 310i, 310j, 310k, 3101, ..., 310w of each double-sided charge trapping non-volatile memory unit 305 on each row of the non-volatile memory array 300 of the present invention 310x, 310y, 310z are connected in the manner described above to form a NAND series string of double-sided charge trapping non-volatile memory cells 305. Each of the NAND series strings 310a, 310b, 310c, 3, ..., 310i, 310j, 310k, 3101, ..., 310w, 310x, 310y, 310z has: a top selection transistor 3i5a, 315b, 315e, 315d, 315i, 315j, 315k, 3151, ···, 315w, 315x, 315y, 315z; and a bottom selection transistor 320a, 320b, 320c, 320d, ..., 320i, 320j, 320k, 3201, ..., 320w, 320x, 320y, 320z. Each of the top selection transistors 315a, 315b, 315c, 315d, ..., 315i, 315j, 315k, 315, ..., 315w, 315x, 315y, 315z has a first source/drain connected to each NAND series string The drains of the double-sided charge trapping non-volatile memory cells 305 at the top of 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 3101, ..., 310w, 31〇x, 310y, 310z. Each of the bottom selection transistors has a first source/drain connected to each of the 19 200845014 NAND series strings 3i〇a, 31〇b, 310c, 310d, . . . , 310i, 310j, 310k, 3101, ..., 31Gw The source of the double-sided charge trapping non-volatile memory cell 305 at the bottom of '310χ, 310y, 310z. The top selection transistors 315a, 315b, 315c, 315d, ..., 315i, 315j, 315k, 3151, ···, 315w, 315x, 315y, 315z and bottom selection transistors 320a, 320b, 320c, 320d, .. .. 320i, 320j, 320k, 3201, ···, 320w, 320x, 320y, 320z The source and the pole are functionally interchangeable, so for the sake of clarity, they are specifically designated as the first and second sources / no pole. a second source/no pole of the top selection transistors 315a, 315b, 315c, 315d, ..., 315i, 315j, 315k, 3151, 315, 315x, 315y, 315z is connected to the bit line 325a, The first of the associated bit pairs in 325b, 325c, 325d. A second source/drain of the bottom selection transistors 320a, 320b, 320c, 320d, ..., 320i, 320j, 320k, 320, ..., 320w, 320x, 320y, 320z is connected to: bit lines 325a, 325b, The second line of the bit line pair in 325c, 325d. The second source/nopole of the top select transistors 315a, 315b, 315c, and 315d are connected to the bit line 325a. The second source/drain of the top select transistors 315i, 315j, 315k, and 3151 are connected to bit line 325b. The second source/drain of the top select transistors 315w, 315x, 315y, and 315z are connected to bit line 325C. The second source/no pole of the bottom select transistors 320a, 320b, 320c, and 320d are connected to the bit line 325b. The second source/nothing of the bottom select transistors 320i, 320j, 320k, and 3201 is coupled to the bit line 325c. The second source/drain of the bottom select transistors 320w, 320x, 320y, and 320z are connected to the bit line 325d.

本發明所述非揮發性記憶體陣列300的各行(在此實施例中,為NAND 串聯串組 310a、310b、310c、310d、···、310i、310j、310k、310卜…、310w、 310x、310y、3i0z 之一)與位元線 325a、325b、325c、325d 中一有關的位 元線對相連接。在此例中,多組NAND串聯串3i〇a、3i〇b、310c、310d、...、 310i、310j、310k、310卜…、310w、310χ、310y、310z 與位元線 325a、 325b、325c、325d中一單獨的位元線對有關。如圖所示,NAND串聯串31〇a, 310b、310c 和 310d 與位元線 325a 和 325b 有關。NAND 串聯串 310i、310j、 310k、和3101與位元線325b和325c有關。NAND串聯串310w、310x、 20 200845014 310y和310z與位元線325c和325d有關。 顯而易見地,位元線325a、325b、325c、325d中各有關的位元線對更 與雙面電荷捕捉式非揮發性記憶體單元的行3i〇a、3i〇b、31〇c、310d、…、 310ι、310j、310k ' 310卜…、310w、310x、310y、310z 中兩個相鄰設定 的行有關。舉例而言,位元線325b和325c主要與NAND串聯串310i、310j、 3101〇和3101有關,但位元線3251)也與相鄰行的>^>©串聯串31(^、31013、 310c和310d有關,並且位元線325c與相鄰行的NAND串聯串310w、310x、 310y和310z有關。 具有一組NAND 串聯串 310a、310b、310c、310d、…、310i、310j、 310k、31(Π、…、310w、310x、310y、310z行的頂部選擇電晶體,以及一 相鄰組NAND 串聯串 310a、310b、310c、310d、…、310i、310j、310k、 3101、…、310w、310x、310y、310z行的底部選擇電晶體,共同連接至位 元線325a、325b、325c、325d,以提供本發明所述相交連接柱狀的位元線 結構。 所有位元線325a、325b、325c以及325d均連接至一位元線控制器 330。位元線控制器330向選擇的雙面電荷捕捉式非揮發性記憶體單元3〇5 提供必需的位元線操作電壓,用於被捕捉的電荷進行程式規劃,讀取,以 及拭除,其中該被捕捉的電荷代表各所述選擇的雙面電荷捕捉式非揮發性 5己十思體早元一電何捕捉區内的多個數位資料位元。 本發明所述非揮發性記憶體陣列300各列上的各雙面電荷捕捉式非揮 發性記憶體單元305的一控制閘極連接至字元線335a、335b、...、兕习一、 335j、335j+卜…、335m-l、335m其中之一。頂部選擇電晶體315a、315b、 315c、315d、…、315i、315j、315k、315卜…、3l5w、315x、315y、315z 的閘極與頂部選擇閘極線34〇a、34〇b、340k-l、以及34〇k相連。在本發明 所述非揮發性記憶體陣列300的此實施例中,各組NAND串聯串310a,310b, 310c、310d、…、310i、310j、310k、310卜···、310w、310x、310y、310z 的各頂部選擇電晶體 315a、315b、315c、315d、···、315i、315j、315k、 3151、···、315w、315x、315y、315z連接至頂部選擇閘極線 34〇a、340b、 21 200845014 340k-l、以及340k其中的一條,以致於頂部選擇閘極線34〇a、340b、340k-l、 及 340k 的數量與各組 NAND 串聯串 310a、310b、310c、310d、...、310i、 310j、310k、31(M、…、310w、310x、310y、310z 中的行的數量相等。底 部選擇電晶體 320a、320b、320c、320d、…、320i、320j、320k、3201、…、 320w、320x、320y、320z的閘極連接至底部選擇閘極線345a、345b、345k-1 和 345k。所有字元線 335a、335b、…、335H、335j、335j+卜…、335m-;l、 335m ’頂部選擇閘極線340a、340b、340k-l和340k,以及底部選擇閘極 線345a、345b、345k-l和345k均連接至一字元線控制器350。字元線控制 斋350移轉字元線的操作電壓,用於被捕捉的電荷進行程式規劃,讀取, 以及拭除,其中該被捕捉的電荷代表各所述選擇的雙面電荷捕捉式非揮發 性記憶體單元305 —電荷捕捉區内的多個數位資料位元。 NAND串聯串組310a、310b、310c、310d,頂部選擇電晶體315a、 315b、315c、315d,以及底部選擇電晶體32〇a、3施、32〇c、32〇d形成一 雙面電荷捕捉式非揮發性記憶體區塊355。在第3圖中,位於位元線32乂、 325b、325c、325d中各位元線對之間的雙面電荷捕捉式非揮發性記憶體單 疋f35 各行為一個單個的雙面電荷捕捉式非揮發性記憶體區塊355。現 f蒼考第4圖’所有雙面電荷捕捉式非揮發性記憶體區塊455在結構和功 均與第3圖巾的雙面電荷槪式非揮發性記憶體區塊355相同。在此 貫施例中,討論了本發明所述非揮發性記憶體陣列4〇〇的一更一般的版 $ °多個雙面電荷捕捉式非揮發性記憶體區塊稅在此按列和行配置。如 第3圖中所描述,各雙面電荷槪式非揮發性記憶體區塊奶具有一多個 =AND串聯串組,其系具有相連的頂部選擇電晶體和相連的底部選擇電晶 ,。頂部選擇電晶體連接至位元線425a、概、425η·2、···、心]、概 ,關的位7〇線對的第_條。底部選擇電晶體連接至位元線4仏、425b、 η 2 ···、425n-l、425η中有關的位元線對的第二條。 發性性記憶體陣列獅各列上的各雙面電荷捕捉式非揮 二。,思體早70的一控制閘極連接至字元線435a、435b、...435m其中之 _电發月所述非揮發性兄憶體陣列400的此實施例中,各組NAND串 %串的各頂部選擇電晶體連接至頂部選擇閘極線她、娜、…440m, 22 200845014 以致於使頂部選擇閘極線440a、440b、...440111的數量與雙面電荷捕捉式 非揮發性記憶體區塊455内各組NAND串聯串中行的數量相等。雙面電荷 捕捉式非揮發性記憶體區塊455的底部選擇電晶體的閘極連接至:底部選 擇閘極線445a、445b、…445m。所有字元線435a、435b、…435m,頂部 選擇閘極線440a、440b、…440m,以及底部選擇閘極線445a、445b、... 445m 均連接至一字元線控制器450。字元線控制器450移轉字元線的操作電壓, 用於對被捕捉的電荷進行選擇,程式規劃,讀取,以及拭除,其中該被捕 捉的電荷代表在本發明所述非揮發性記憶體陣列4〇〇的各所述選擇的雙面 電荷捕捉式非揮發性記憶體單元一電荷捕捉區中之多個數位資料位元。 藝現在參考第5圖,描述了本發明所述非揮發性記憶體陣列的字元線控 制器500的功能結構。字元線控制器5〇〇接收:一程式規劃控制信號5〇5、 =拭除控制信號510、以及一讀取控制信號515。程式規劃控制信號5〇5、 拭除控制信號510、以及讀取控制信號515提供決定本發明非揮發性記憶 體陣列的彳祕模式所必需的啟動命令。熟習此技術人士應當理解,程式規 劃控制信號5〇5,拭除控制信號51〇,以及讀取控制信號515可以事實上作 為應用於子元線控制器500以執行程式規劃,拭除以及讀取功能的命令字 結構的組成部分。-控制解碼器52〇接收程式規劃控制信號5〇5,拭除控 制信號510,以及讀取控制信?虎515,對該程式規劃控制信號5〇5,該拭除 f制信號51G,以及該讀取控制信號515進行解碼,並且啟動對本發明非 才呆作單元。 與控制解碼器520相連接的功能操作單元接收命令,以便有選擇地啟 動字讀舰單元,射游樣姐單元包括:—字元職式規劃電路 ’一子儿線拭除電路540,以及一字元線讀取電路545。程式規劃電路 心u具有一字元線程式規劃電壓源536,該源極536連接至字元線56〇a、 • 56Gm 1 56Gm巾選擇的字元線,因而提供-非常大的程式規 Γ、=,以械擇的雙面電荷捕捉式麵發性記健單元的-控制閑極與 =擇的雙面電何捕捉式非揮發性記憶體單元的—通道區之間產生一電壓 琢。熱載子被從該通道區中擷取並被注入選擇的雙面電荷捕捉式非揮發性 23 200845014 吕己憶體單元的一電荷捕捉區中。 你私式規劃電路奶具有-第一選擇線程式規劃電壓源537,該雜S37 有延擇地提供-適度的大魏紐。該適度的大麵電壓將被轉至頂部 =閘極線555a、555b、··· 555k]、挪中選擇的一條之上,以啟動雙面 電荷捕捉式非揮發性記憶體單元崎擇的NAND串聯串的頂部選擇電晶 體。;7第二選擇線程式規劃電壓源538有選擇地提供一適度的大選擇電 壓。该適度的大選擇電壓將被移轉至底部選擇閘極、線池、獅、… =65k-卜5紙之上’以啟動雙面電荷捕捉式非揮發性記憶體單元的選擇的 A^iD串%串的底部選擇電晶體。該程式規劃電路提供一連接線別至接 =考糕源,射雜地參考電壓·杨醉元線偷、働,… m 1 560m巾未被运中的字元線,閘極線555&、555b、··· 卜55处 =被選中的閘極線,以及底部選擇線中淑、鳩、···遞]、慨 中未被選中的底部選擇線。 ⑽子Γηί除電路54G具有'字元線拭除電壓源543,其連接至字元線 ^芦用二、I—、麻帽擇的字元線’因而提供—非常大的拭 ^擇的雙面電荷捕捉式非揮發性記紐單元的"-控制閘極 = <擇的雙面電荷槪式轉發性記,隨單元的—通道區之間產生一· Ϊ捉式轉發性記 i 1 並被注人該電荷捕捉區中。在所述非揮發性記 記紐單元賴子巾,馳注人的練子為熱電子。在 接ίΐΓ 除電路540具有一第一選擇線找除電壓源541,其選擇地 55m,選35^。該第'"高選擇電壓將被移轉至頂部選擇閘極線 555b、... 555k·卜555k中選擇的—條之上,以啟 非揮發性記龍單元的選_NAND㈣串的 二 擇閘極線565a、565b、··· 565k-卜565k之上,以啟動雔而帝朴上、 nand wii 祕-連接線544至接地參考電塵源,甚中該接地參考·源被^ 24 200845014 到字元線560a、560b、…560m-卜560m巾未被選中的字元線,頂部選擇 閘極線555a、555b、... 555k-卜555k中未被選中的頂部選擇閘極線,以及 底部選擇射施、565b、·.· 565k4、565k巾未被選㈣絲選擇線。 —一字7G線讀取電路545具有一字元線讀取電壓源546,該電壓源連接至 字兀線56〇a、獅、...56〇111_卜56〇m中選擇的字元線,因而為選擇的雙 面電荷捕捉式非揮發性記憶體單元的控制閘極提供一讀取電壓(v_),^ 中該控制閘極的打開與否取決於該讀取電塵(v_)的值。字元線讀壓 源546的電壓位準是遞增❸,以確定選擇的雙面電荷捕捉式非揮發性 界位準W ’其代表該選擇的雙面電荷捕捉式非揮發性記^The rows of the non-volatile memory array 300 of the present invention (in this embodiment, the NAND series strings 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 310, ..., 310w, 310x) One of 310y, 3i0z) is connected to a pair of bit lines associated with one of bit lines 325a, 325b, 325c, 325d. In this example, a plurality of sets of NAND series strings 3i〇a, 3i〇b, 310c, 310d, ..., 310i, 310j, 310k, 310, ..., 310w, 310χ, 310y, 310z and bit lines 325a, 325b A separate bit line pair in 325c, 325d is related. As shown, NAND series strings 31A, 310b, 310c, and 310d are associated with bit lines 325a and 325b. The NAND series strings 310i, 310j, 310k, and 3101 are associated with bit lines 325b and 325c. NAND series strings 310w, 310x, 20 200845014 310y and 310z are associated with bit lines 325c and 325d. Obviously, each of the associated bit line pairs in the bit lines 325a, 325b, 325c, 325d is further connected to the rows 3i〇a, 3i〇b, 31〇c, 310d of the double-sided charge trapping non-volatile memory unit. ..., 310ι, 310j, 310k '310b..., 310w, 310x, 310y, 310z are related to two adjacently set lines. For example, bit lines 325b and 325c are primarily associated with NAND series strings 310i, 310j, 3101A, and 3101, but bit lines 3251) are also associated with adjacent lines of >^>© series strings 31 (^, 31013) , 310c and 310d are related, and bit line 325c is associated with adjacent rows of NAND series strings 310w, 310x, 310y, and 310z. There is a set of NAND series strings 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 31 (Π, ..., 310w, 310x, 310y, 310z rows of top select transistors, and an adjacent set of NAND series strings 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 3101, ..., 310w, The bottom select transistors of the 310x, 310y, 310z rows are commonly connected to bit lines 325a, 325b, 325c, 325d to provide the bit line structure of the intersecting pillars of the present invention. All bit lines 325a, 325b, Both 325c and 325d are coupled to a bit line controller 330. The bit line controller 330 provides the necessary bit line operating voltage to the selected double-sided charge trapping non-volatile memory unit 3〇5 for capture. The charge is programmed, read, and erased, where the captured electricity The charge represents a plurality of digital data bits in each of the selected double-sided charge-trapping non-volatile cells. The non-volatile memory array 300 of the present invention is arranged on each column. A control gate of each of the double-sided charge trapping non-volatile memory cells 305 is connected to one of the word lines 335a, 335b, ..., 兕一, 335j, 335j+b..., 335m-l, 335m The top selects the gates of the transistors 315a, 315b, 315c, 315d, ..., 315i, 315j, 315k, 315, ..., 3l5w, 315x, 315y, 315z and the top select gate lines 34〇a, 34〇b, 340k -l, and 34〇k are connected. In this embodiment of the non-volatile memory array 300 of the present invention, each set of NAND series strings 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 310 Each of the top selection transistors 315a, 315b, 315c, 315d, ..., 315i, 315j, 315k, 3151, ..., 315w, 315x, 315y, 315z of 310w, 310x, 310y, 310z is connected to The top selects one of the gate lines 34〇a, 340b, 21 200845014 340k-l, and 340k, so that the top select gate line The number of 34〇a, 340b, 340k-1, and 340k and each group of NAND series strings 310a, 310b, 310c, 310d, ..., 310i, 310j, 310k, 31 (M, ..., 310w, 310x, 310y, The number of rows in 310z is equal. The gates of the bottom selection transistors 320a, 320b, 320c, 320d, ..., 320i, 320j, 320k, 3201, ..., 320w, 320x, 320y, 320z are connected to the bottom selection gate lines 345a, 345b, 345k-1 and 345k . All word lines 335a, 335b, ..., 335H, 335j, 335j+b..., 335m-; 1, 335m 'top select gate lines 340a, 340b, 340k-1 and 340k, and bottom select gate lines 345a, 345b, Both 345k-1 and 345k are connected to a word line controller 350. The word line controls the operating voltage of the zigzag 350 shift word line for programming, reading, and erasing the captured charge, wherein the captured charge represents each of the selected double-sided charge trapping Volatile memory unit 305 - a plurality of digital data bits within the charge trapping region. NAND series string sets 310a, 310b, 310c, 310d, top select transistors 315a, 315b, 315c, 315d, and bottom select transistors 32〇a, 3, 32〇c, 32〇d form a double-sided charge trapping Non-volatile memory block 355. In Fig. 3, the double-sided charge-trapping non-volatile memory unit f35 between the pairs of bit lines in the bit lines 32乂, 325b, 325c, 325d each behaves a single double-sided charge trapping type. Volatile memory block 355. Now, the double-sided charge-trapping non-volatile memory block 455 has the same structure and function as the double-sided charge-type non-volatile memory block 355 of the third figure. In this embodiment, a more general version of the non-volatile memory array 4 of the present invention is discussed in which a plurality of double-sided charge trapping non-volatile memory block taxes are listed herein. Line configuration. As depicted in Figure 3, each double-sided charge-type non-volatile memory block milk has a plurality of =AND series strings having connected top select transistors and associated bottom select cells. The top selection transistor is connected to the _th line of the bit line 425a, 425η·2, ···, heart], and the closed bit 7〇 line pair. The bottom selection transistor is connected to the second line of the associated bit line pair in the bit lines 4仏, 425b, η 2 ···, 425n-1, 425η. Each double-sided charge-trapping type on each column of the horn array of hairy memory. A control gate of the body 70 is connected to the word lines 435a, 435b, ... 435m. In this embodiment of the non-volatile brother memory array 400, each group of NAND strings is % The top select transistors of the string are connected to the top select gate line her, Na, ... 440m, 22 200845014 so that the number of top select gate lines 440a, 440b, ... 440111 and double-sided charge trapping non-volatile The number of rows in each group of NAND series strings in memory block 455 is equal. The gate of the bottom select transistor of the double-sided charge capture non-volatile memory block 455 is connected to: the bottom select gate lines 445a, 445b, ... 445m. All word lines 435a, 435b, ... 435m, top select gate lines 440a, 440b, ... 440m, and bottom select gate lines 445a, 445b, ... 445m are all connected to a word line controller 450. The word line controller 450 shifts the operating voltage of the word line for selecting, programming, reading, and erasing the captured charge, wherein the captured charge represents non-volatile in the present invention. Each of the selected double-sided charge trapping non-volatile memory cells of the memory array 4 is a plurality of digital data bits in a charge trapping region. Referring now to Figure 5, the functional structure of the word line controller 500 of the non-volatile memory array of the present invention is described. The word line controller 5 receives: a program planning control signal 5〇5, an erase control signal 510, and a read control signal 515. The program planning control signal 5〇5, the erase control signal 510, and the read control signal 515 provide the startup commands necessary to determine the secret mode of the non-volatile memory array of the present invention. Those skilled in the art will appreciate that the program planning control signal 5〇5, the erase control signal 51〇, and the read control signal 515 may in fact be applied to the sub-line controller 500 to perform program planning, erasing, and reading. A component of the function's command word structure. Control decoder 52 receives program planning control signal 5〇5, erases control signal 510, and reads control signal 515, plans control signal 5〇5 for the program, erases f signal 51G, and The read control signal 515 is decoded and the non-dead unit of the present invention is initiated. The function operating unit connected to the control decoder 520 receives a command to selectively activate the word reading unit, and the traveling sample unit includes: a character job planning circuit, a child line erasing circuit 540, and a Word line read circuit 545. The programming circuit core u has a character-threaded planning voltage source 536 connected to the word line selected by the word line 56〇a, • 56Gm 1 56Gm, thereby providing a very large program size, =, a voltage 琢 is generated between the control channel and the channel region of the double-sided charge-and-capacity non-volatile memory cell. The hot carrier is extracted from the channel region and injected into a charge trapping region of the selected double-sided charge trapping non-volatile 23 200845014 LV. Your privately-planned circuit milk has a first-choice threaded planning voltage source 537, which is provided in an extended manner - moderately large. The moderate large-face voltage will be transferred to the top = gate line 555a, 555b, ... 555k], one of the selected ones to initiate the NAND of the double-sided charge trapping non-volatile memory cell The top of the series string selects the transistor. The second selected threaded planning voltage source 538 selectively provides a moderately large selection voltage. The modest large selection voltage will be transferred to the bottom selection gate, line pool, lion, ... =65k-b 5 on paper 'to start the double-sided charge-trapping non-volatile memory unit selection A^iD The bottom of the string % string selects the transistor. The program planning circuit provides a connection line to the connection = test cake source, the ground reference voltage · Yang drunk yuan line steal, 働, ... m 1 560m towel is not in the word line, gate line 555 & 555b, ··· Bu 55 = the selected gate line, and the bottom selection line in the bottom selection line, Shu, ·,····]. (10) The sub-decrance circuit 54G has a 'word line erase voltage source 543, which is connected to the word line ^Lu with two, I-, and a hat-selected word line' thus providing - a very large wipe selection The "-control gate of the surface charge-trapping non-volatile counter unit=<selected double-sided charge 转发-type repeatability, with the unit-channel area generating a Ϊ catch-through forwarding record i 1 And is injected into the charge trapping area. In the non-volatile recording unit, the practitioner is a hot electron. The summing circuit 540 has a first select line to find the voltage source 541, which is selected 55m, which is 35^. The '" high selection voltage will be transferred to the top of the top selection gate line 555b, ... 555k· 555k, to select the non-volatile dragon unit to select the second _ NAND (four) string Select the gate line 565a, 565b, ··· 565k-Bu 565k, to start the 雔 雔 帝 帝 、, nand wii secret-connection line 544 to the ground reference electric dust source, even the ground reference source is ^ 24 200845014 to the word line 560a, 560b, ... 560m - 560m towel unselected word line, top select gate line 555a, 555b, ... 555k- 555k unselected top selection gate Line, and the bottom selection of the application, 565b, ··· 565k4, 565k towel is not selected (four) silk selection line. - A word 7G line read circuit 545 has a word line read voltage source 546 connected to the selected character of the word line 56 〇 a, lion, ... 56 〇 111 _ 56 〇 m a line, thus providing a read voltage (v_) for the control gate of the selected double-sided charge trapping non-volatile memory unit, and whether the control gate is turned on or not depends on the read electric dust (v_) Value. The voltage level of the word line sense source 546 is incremented to determine the selected double-sided charge trapping non-volatile boundary level W' which represents the selected double-sided charge trapping non-volatile memory.

早7G的兩個電荷捕捉區内儲存的多個數位資料位元。 讀取電路545具有-第—選擇線讀取電壓源548, =TDD相等的観位準。該電源電壓源Vd遍移轉至頂部選擇 閘極線555a、555b、…555k-卜555k中選擇的一條之上,以啟動雔— ί ί i; NAND t 位551有選擇地提供—與電源電壓源Vdd相等的電壓 位皁,而被移轉至底部選擇線56允、Μ%、 5 、 雙面電荷捕捉式非揮發性記情體單 上’以啟動 晶體。讀取電路545 擇的N娜串聯串的底部選擇電 -a ^ 560b . .: 至接地失者#Π η 棘電路545提供一連接線544 555a、5说、$ 參考雜源被施加_部選擇閘極線 擇線中565a、鄕、織/^^/了麵觸極線,以及底部選 • 565k中未被選中的底部選擇線。 除,,被拭 從字元線位址解碼請^=^==^收:經解碼的位址 發明所述非揮發性記憶體陣列2〇〇 解碼位址決定本 被傳輸至列選擇電路550,該列那n被啟動;;經解碼的控制信號 、包路55〇用於決定將被移轉至字元線 25 200845014 560a、560b、.·· 560m-卜 560m,頂部選擇閘極線 555a、555b、... 555k-l、 555k以及底部選擇線565a、565b、…565k-l、565k的操作電壓,因而對 本發明所述非揮發性記憶體陣列的選擇的列進行程式規劃、拭除、以及讀 取提供所必需的電壓位準。 ' 現在參考第6圖,用於說明本發明非揮發性記憶體陣列的位元線控制 為600的功此結構。位元線控制器6〇〇接收一程式規劃控制信號5仍,一 拭除控制信號510,以及一讀取控制信號515。如前面所描述的,程式規劃 《 控制信號505,拭除控制信號510,以及讀取控制信號515提供決定本發明 非揮务性5己丨思體陣列的操作模式所必需的啟動命令。一控制解碼器6仍接 收程式規劃控制信號505,拭除控制信號510,以及讀取控制信號515,將 該程式規劃控制信號505、該拭除控制信號510、以及該讀取控制信號515 φ 進行解碼,並且啟動本發明非揮發性記憶體陣列進行程式規劃,拭除以及 讀取功能所必要的位元線功能操作單元。 連接至控制解碼器605的功能操作單元接收命令,以有選擇地啟動位 兀線功能單元,該位元線功能單元包括··一位元線程式規劃電路615、一 位το線拭除電路62〇、以及一位元線讀取電路625。位元線程式規劃電路 615 具有:與位元線 635a、635b、635c、 635m 2、635m_卜纪5瓜中一 選擇的位元線相連接的一第一和第二位元線程式規劃電壓源617和6i8, 用於提供對選擇列的雙面快閃記憶體單元的各電荷捕捉區進行程式規割所 必需的位元線程式規劃電壓(vBLn)。該等電位的設定依據二進位數字資料,· 其中該二進位數字資料將被儲存為選擇的雙面快閃記憶體單元的第一和第 二電荷捕捉區中被捕捉電荷。 △位兀線拭除電路620提供一連接線623至接地參考電壓源,其中該接 地參^電塵源被施加到位元線635a、咖、635e、· · · 635m_2、6伽小6遍 中被選中的位元線。-位元線禁止電壓源622連接至位元線伽、_、 =、··· 635ιη·2、635m_卜635m中未被選中的位元線,以提供一位元線 不止_(V麵),因而禁止對未被選中的雙面電荷捕捉式非揮發性記憶體 元的拭除。 〜 26 200845014 位元線讀取電路625具有一位元線汲極電壓源627,該電壓源連接至 位元線635a、635b、635c、…635m-2、635m-l、635m中被選中的位元線, 因而為選擇的雙面電荷捕捉式非揮發性記憶體單元的源極/汲極提供一讀 取汲極電壓(VDRAIN),其中該源極/汲極的導通與否取決於該字元線讀取電 壓的值。位元線讀取電路625提供一連接線628至接地參考電壓源,其中 該接地茶考電壓源通過位元線635a、635b、635c、…635m-2、635m-1、635m 中被選中的位元線被施加到選擇雙面電荷捕捉式非揮發性記憶體單元的反 向的源極/汲極。 位址子525定義本發明所述非揮發性記憶體陣列之所選擇部份,其藉 由位元線位址解碼g 61〇而被程式規劃、拭除、或讀取。經解碼的位址從 位元線位址解碼器610被傳輸至位元線選擇電路63〇,該經解碼位址決定 本發明所it非揮發性記憶體陣歹,J 200的哪一行將被啟動。、經解碼的控制信 號被傳輸至位元線選擇電路61〇,触猶轉魏⑽驗蚊將被移 轉至位元線 635a、635b、635e、··· 635m-2、635m_卜 635m 帽擇的位元 線的操作電壓’因而對本發明所述非揮發性記憶體陣列的選擇的列提供進 行程式規劃、拭除、以及讀取所需的電壓位準。 在讀取操作顧’ _擇缝面電荷觀式轉·記鍾單元產生 的,流穿過位元線 635a、635b、635c、…635πι·2、635m]、635m 中有關 2選擇的”元_娜輸至位元線選擇電路和感職大器_。感測放大 &根據該讀取電壓(卩_)遞增的電壓辦、制選擇的雙面電荷捕捉式非 揮^性雜體單το是否導通。從此所選擇的雙面電荷捕捉式轉發性記憶 體,元的被敝電荷的位準之蚊,而決定在兩個電荷捕捉區_多個^ 位資料位元。 、>再返b回第ia圖’各電荷捕捉區65和7〇内的電荷位準被調整,以致 :y界位準(Vt)饭疋為.依據電荷捕捉區内設置的電荷的一組臨界電壓 2一個。第1c圖中本發明一雙面電荷捕捉式非揮發性記憶體單元的陣列 了餘齡在職面電荷概式非揮 又\己!^體單元的各電荷捕捉區的兩個二進位數字的臨界電壓位準 27 200845014 1〇5,115以及125。再次,程式規劃時間被調整,以提供s〇N〇s/M〇N〇s 雙面快閃記憶體單元之分佈102、112、122、以及132,以致於程式規劃 電壓VPV1 105、VPV2 115、VPV3 125、以及拭除電壓VEV 135作為字 元線電壓被依序施加至雙面電荷捕捉式非揮發性記憶體單元的控制閘極, 以偵測該雙面電荷捕捉式非揮發性記憶體單元的程式規劃狀態。 此各相鄰於雙面電荷捕捉式非揮發性記憶體單元之汲極和源極區域 15和20第一或第二電荷捕捉區65和70之臨界電壓(Vt)控制、由帶-帶電洞 注入程式獨立地貫施。此稱為對該雙面電荷捕捉式非揮發性記憶體單元 的一側程式規劃。由於串擾程式規劃干擾效應,當隨後在該雙面電荷捕捉 式非揮發性記憶體單元的通道區的相對的側面的電荷捕捉區進行程式規劃 h,與;及極15相鄰的弟一電荷捕捉區65或與源極20相鄰的第二電荷捕捉 區70兩者之一的第一程式規劃臨界電壓(%)將被降低。 舉例而言,穿過所述第一位元線或第二位元線施加至所述汲極或源極 的位元線電壓位準被設定為VBL4=3.5V、VBL3=4.0V、VBL2=4.5V、以及 VBL1 -5.0V。應請注意以上設定為近似值,並且可根據特殊應用的需要而 改變。此外,示例說明了兩個分別儲存于電荷捕捉區65和7〇中的兩個二 進位數字資訊位元。當所示電壓在150jliS的程式規劃時間被施加至該第一 位兀線或第二位元線時,然後至該汲極和汲極,如果位元線電壓位準VgL] 被施加至汲極或源極端子兩者之一,則臨界電壓位準的變化不會改 變。類似地,當位元線電壓位準VBL2被施加至汲極或源極端子兩者之一, 則6品界電壓位準的變化AVt大约為〇·7ν。如果位元線電壓位準VB£2被施 加至汲極或源極端子兩者之一,則臨界電壓位準的變化AVt大約為i 7v。 如果位元線電壓位準VBL1被施加至汲極或源極端子兩者之一,則臨界雷 壓位準的變化AVt大約為2.5V。 ’ 。包 再參考第2a圖討論用於程式規劃,讀取以及拭除被捕捉電荷的本發 明所述非揮發性記憶體陣列200的控制操作,其中被捕捉電荷代表選擇^ ^電荷衡足式非揮發性記憶體單元2〇5的兩個電荷捕捉區内的多個數位 貧料位元。本發明所述非揮發性記憶體陣列2〇〇的各雙面電荷捕捉式非揮 28 200845014 與第U圖中所示的結構實質上相同。多個數位資料位 荷捕捉式雜發性記憶體單—兩個各 列進ί蝴ΜΜ的一選擇的 路615啟㈣二 内部第6圖所示的位元線程式規劃電 =^^二弟二位元線程_]電壓源617和618,因而提供對選 戈規東丨所^謂捕捉式轉發性記憶體單元的各個電荷捕捉區進行程 程式棚電壓^)。字元線控制器250中第5圖所示 路535啟動字元線程式規劃電壓源536,而提供所述 單元·if ^產生位於選擇雙面電荷捕捉式非揮發性記憶體 :L!tr 選擇的雙面電荷捕捉式非揮發性記憶體的-通道區 元3二於"通道型選擇的雙面電荷捕捉式非揮發性記憶體單 的所赫㊉大的程式規劃電壓為從大約_7Όν至大約·v。以替代 2式’如果選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5為一 ρ·通道型 二置’則子70線電壓位準為從大約+7娜至大約+则V。應當注意的是, 在Π-通這雙面電荷捕捉式非揮發性記憶體單元2〇5的熱载子電荷為熱電 洞’而在ρ-通運所選擇雙面電荷捕捉式非揮發性記憶體單元挪的敎載子 電荷為熱電子。選擇的雙面電荷捕捉式非揮發性記憶體單元2G5的電荷捕 捉區的程式規躲態姐人各該等電荷觀區巾的賊子的數量決定。 為了對兩個電荷捕捉區中的電荷同時進行程式規劃,第一位元線 規劃電壓源617被蚊域表難絲劃至鱗—€荷觀_數位資料 的位兀線Ί:壓辦(vBLN),並且第二位元線赋賴電卿、618被設定為 代表被程式規tm該第二電荷敵區的數位龍的位元線電塵位準 (:BLN)。例如,如果將有_二進錄字被程式賴至各電制捉區中, 第-位元線程式規劃電壓源617和第二位元線程式規劃電觀618根據表 1的電壓位準進行設定。 被規劃至第一圖中 被規劃至第一圖中 VbLh 位 VlJLn 位 29 200845014A plurality of digital data bits stored in two charge trapping regions of the early 7G. The read circuit 545 has a -first select line read voltage source 548, = TDD equal 観 level. The supply voltage source Vd is traversed to a selected one of the top select gate lines 555a, 555b, ... 555k-b 555k to enable the NAND t bit 551 to be selectively provided - with the supply voltage The source Vdd is equal to the voltage level of the soap and is transferred to the bottom select line 56, Μ%, 5, double-sided charge trapping non-volatile ticks on the 'on to start the crystal. The bottom of the N-series string selected by the read circuit 545 selects the electric -a ^ 560b . . : to the grounded loser #Π η The spine circuit 545 provides a connection line 544 555a, 5 says, the reference source is applied _ part selection In the gate line selection, the 565a, 鄕, woven/^^/ surface touch line, and the bottom selection line in the bottom selection 565k are not selected. Except, the data is decoded from the word line address. ^=^==^: The decoded address is invented. The non-volatile memory array 2 〇〇 decoding address decision is transmitted to the column selection circuit 550. The column n is activated; the decoded control signal, the packet 55 is used to determine that it will be transferred to the word line 25 200845014 560a, 560b, . . . 560m-b 560m, top select gate line 555a , 555b, ... 555k-1, 555k and the operating voltages of the bottom select lines 565a, 565b, ... 565k-1, 565k, thus programming and erasing the selected columns of the non-volatile memory array of the present invention And read the voltage level necessary to provide. Reference is now made to Fig. 6 for explaining the structure of the bit line control of the nonvolatile memory array of the present invention of 600. The bit line controller 6 receives a program planning control signal 5, a wipe control signal 510, and a read control signal 515. As previously described, the program plan control signal 505, the erase control signal 510, and the read control signal 515 provide the start commands necessary to determine the mode of operation of the non-descriptive 5 array of the present invention. A control decoder 6 still receives the program planning control signal 505, the erase control signal 510, and the read control signal 515, and the program planning control signal 505, the erase control signal 510, and the read control signal 515 φ are performed. The bit line function operation unit necessary for decoding, and starting the non-volatile memory array of the present invention for program planning, erasing, and reading functions. A functional operating unit coupled to control decoder 605 receives a command to selectively activate a bit line functional unit including a one-bit threaded planning circuit 615 and a one-bit line erase circuit 62. 〇, and a bit line read circuit 625. The bit threaded planning circuit 615 has a first and second bit threaded planning voltage connected to a selected bit line of the bit line 635a, 635b, 635c, 635m 2, 635m Sources 617 and 6i8 are used to provide the bit threaded planning voltage (vBLn) necessary to program the charge trapping regions of the double-sided flash memory cells of the selected column. The equipotential setting is based on the binary digital data, wherein the binary digital data is stored as the captured charge in the first and second charge trapping regions of the selected double-sided flash memory cell. The delta sigma wiping circuit 620 provides a connection line 623 to a ground reference voltage source, wherein the ground gangue source is applied to the bit line 635a, the coffee, the 635e, the 635m_2, and the 6 gamma 6 times. The selected bit line. - Bit line inhibit voltage source 622 is connected to bit line gamma, _, =, ··· 635ιη·2, 635m_ 635m unselected bit line to provide one bit line more than _ (V Face), thus eliminating the erasure of unselected double-sided charge trapping non-volatile memory elements. ~ 26 200845014 Bit line read circuit 625 has a one-bit drain voltage source 627 that is connected to selected bit lines 635a, 635b, 635c, ... 635m-2, 635m-1, 635m a bit line, thus providing a read drain voltage (VDRAIN) for the source/drain of the selected double-sided charge trapping non-volatile memory cell, wherein the source/drain conduction is dependent on the The value of the word line read voltage. The bit line read circuit 625 provides a connection line 628 to a ground reference voltage source, wherein the ground tea reference voltage source is selected by the bit lines 635a, 635b, 635c, ... 635m-2, 635m-1, 635m The bit line is applied to the opposite source/drain of the double-sided charge trapping non-volatile memory cell. Address sub-525 defines a selected portion of the non-volatile memory array of the present invention that is programmed, erased, or read by bit line address decoding g 61 。. The decoded address is transmitted from bit line address decoder 610 to bit line select circuit 63, which determines the non-volatile memory array of the present invention, which line of J 200 will be start up. The decoded control signal is transmitted to the bit line selection circuit 61〇, and the mosquito is transferred to the bit line 635a, 635b, 635e, 635m-2, 635m_b 635m cap. The operating voltage of the selected bit line ' thus provides the selected voltage levels for programming, erasing, and reading of the selected columns of the non-volatile memory array of the present invention. In the read operation, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Na loses to the bit line selection circuit and the sensory unit _. Sensing amplification & according to the voltage of the read voltage (卩_), the double-sided charge trapping type non-volatile single το Whether it is turned on. From then on, the double-sided charge-trapping type of forward-receiving memory is selected by the mosquitoes of the meta-charged level of the element, and is determined in two charge trapping regions _ a plurality of bits of data bits. b back to the ia diagram 'The charge levels in each of the charge trapping regions 65 and 7〇 are adjusted such that the y bound level (Vt) is a set of threshold voltages 2 according to the charge set in the charge trapping region. In Figure 1c, an array of double-sided charge-trapping non-volatile memory cells of the present invention has two binary digits of each charge trapping region of the body-level charge profile. Threshold voltage level 27 200845014 1〇5, 115 and 125. Again, the program planning time is adjusted to provide s〇N〇s/ M〇N〇s the distribution of the double-sided flash memory cells 102, 112, 122, and 132, so that the program planning voltages VPV1 105, VPV2 115, VPV3 125, and the erase voltage VEV 135 are used as the word line voltages. The sequence is applied to the control gate of the double-sided charge trapping non-volatile memory unit to detect the program planning state of the double-sided charge trapping non-volatile memory unit. The threshold voltage (Vt) control of the first or second charge trapping regions 65 and 70 of the drain and source regions 15 and 20 of the volatile memory cell is independently performed by the band-banded hole injection program. One side programming of the double-sided charge trapping non-volatile memory unit. Since the crosstalk program plans the interference effect, the charge trapping is then performed on the opposite side of the channel region of the double-sided charge trapping non-volatile memory unit. The first program planning threshold voltage (%) of the program programming h, and the polarity of one of the charge trapping regions 65 adjacent to the pole 15 or the second charge trapping region 70 adjacent to the source 20 will be Reduce. For example, wear The bit line voltage level applied to the drain or source by the first bit line or the second bit line is set to VBL4=3.5V, VBL3=4.0V, VBL2=4.5V, and VBL1 − 5.0 V. Please note that the above settings are approximate and can be changed according to the needs of the particular application. In addition, the example illustrates two binary digital information bits stored in charge trapping regions 65 and 7 respectively. The voltage shown is applied to the first or second bit line at a programmed time of 150 jliS, and then to the drain and drain, if the bit line voltage level VgL] is applied to the drain or In either of the source terminals, the change in the threshold voltage level does not change. Similarly, when the bit line voltage level VBL2 is applied to either the drain or the source terminal, the change in the 6-level voltage level, AVt, is approximately 〇·7ν. If the bit line voltage level VB £2 is applied to either the drain or the source terminal, the change in the threshold voltage level, AVt, is approximately i 7v. If the bit line voltage level VBL1 is applied to either the drain or source terminal, the change in the critical lightning level, AVt, is approximately 2.5V. ’ Referring again to FIG. 2a, a control operation of the non-volatile memory array 200 of the present invention for program planning, reading, and erasing of trapped charges is discussed, wherein the captured charge represents a selection of ^^charge-balanced non-volatile A plurality of digital poor cells in the two charge trapping regions of the memory cell 2〇5. The double-sided charge trapping type of the non-volatile memory array 2 of the present invention is substantially the same as the structure shown in the U-picture. Multiple digital data bit-loading type of mixed-type memory single-two separate columns into a single choice of road 615 Kai (four) two internal figure 6 threaded planning electric = ^ ^ two brother The two-bit thread _] voltage sources 617 and 618, thus providing a process block voltage ^) for each charge trapping region of the capture-type forward memory unit. The path 535 shown in Figure 5 of the word line controller 250 initiates the character threaded planning voltage source 536, while providing the unit ·if ^ generation is located in the selective double-sided charge trapping non-volatile memory: L!tr selection The double-sided charge-trapping non-volatile memory-channel area element 3 is in the channel-selected double-sided charge-trapping non-volatile memory single. The program programming voltage is from about _7Όν To about ·v. Alternatively, if the selected double-sided charge trapping non-volatile memory unit 2〇5 is a ρ·channel type two-position, the sub-70 line voltage level is from about +7 na to about + then V. It should be noted that the hot carrier charge of the double-sided charge trapping non-volatile memory unit 2〇5 is a thermoelectric hole in the Π-pass and the double-sided charge trapping non-volatile memory is selected in the ρ-transport. The charge of the unit carrier is a hot electron. The size of the charge trapping area of the selected double-sided charge-trapping non-volatile memory unit 2G5 is determined by the number of thieves of each of these charge-viewing areas. In order to program the charge in the two charge trapping regions at the same time, the first bit line planning voltage source 617 is difficult to be drawn to the scale by the mosquito net table - the position of the 荷 _ _ digital data Ί line: pressure office (vBLN And the second bit line is assigned to the electrician, 618 is set to represent the bit line electric dust level (: BLN) of the digital dragon of the second charge enemy zone. For example, if a _ binary input word is used in each of the electric capture zones, the first bit threaded planning voltage source 617 and the second bit threaded planning electrical point 618 are based on the voltage level of Table 1. set up. Planned to the first figure is planned to the first figure VbLh bit VlJLn bit 29 200845014

如Atwood等人所著文章中所提到的,“快閃記憶體 力對在一單個單元中的多個位元的儲存為關鍵。快閃單元β 一^何儲存能 置而不是-數位儲存裝置,其儲存的是電荷(以一單個電子 位兀。”本發明所述位元線控制器230和字元線控制器25〇在電荷捕捉區中 30 200845014 =°^致於使本發明所述非揮發性記憶體陣_中 如flc ®中所4 s何的分佈受到賴陳制,使各個電荷捕捉區的程^ 為=測出的。在本發明所述所述非揮發性記憶體陣列二 只知例中’知式規劃狀態的分佈被設定為臨界電壓㈣在一小範的 異,因而有-大約,的偵_口。假設有能力區分被程式_的^ ^位數字的臨界電壓位準CVt)的變化,則觀念上任何數^的位元可“ 本Ϊ2,70線控制器230和字元線控制器250被程式規劃至選擇的雙 面电何捕捉式非揮發性記憶體單元2〇5的該電荷捕捉區中。 一為了拭除雙面電荷捕捉式非揮發性記憶體單元2〇5的一選擇的 元線控制器23G内第6圖的位元線拭除電路_將位元線225a、獅、 225c、…22511-2、225n-l、225η中的位元線對連接至接地參考電壓源必。 2欠2= 225b、225c、…22511-2、225x1-1、225η 中有關的位元線對的 ,思一條未被拭除的位元線被連接至位元線禁止電壓源622,以防止該電 荷捕捉區的拭除。位元線禁止電壓源622被設定為一禁止電壓位準,^ 圍從大=7.5V至大約+10V。為了注入在選擇的雙面電荷捕捉式非揮^性 體單元2〇5雜式規劃期間被注入的熱載子,字元線拭除電路姆被 設定向η-通道雙面電荷捕捉式非揮發性記憶體單元2〇5提供一字元線拭除 電壓,其細從大約+15V至大約+20V。以替代方式,如果雙面電荷捕捉 式非揮發性雜體單元2〇5為ρ_通道裝置,則該字元線拭除電堡為從大約 -15V 至大約-20V。 ' 本發明所述非揮發性§己憶體陣列2〇〇的一讀取操作,是在所述第一電 荷捕捉區被從一個方向讀取,並且所述第二電荷捕捉區被從相反方向讀取 的地方進行。在各方向的讀取操作期間,字元線控制器25〇的字元線讀取 電路545内的字元線讀取電壓源546連接至字元線235a、235b、…、 235j、235j+:l、…235m_:l、235m中選擇的字元線,因而提供一讀取電壓 (Vread)。為了讀取該第一電荷捕捉區的程式規劃狀態,字元線讀取電壓源 546被設定為該讀取電壓位準(Vr£ad)。位元線讀取電路必將有關的位元 線對425a、425b、425n-2、…425η1 425η中的該第一位元線對設定為接 地參考電壓位準(ον),該第二位元線對設定為汲極讀取電壓位準(Vd_)。 31 200845014 如前面提到的,該讀取電壓位準(ν_)必須經過第lc圖中所示各臨界臨界 電壓位準遞增變化,以確定該第一電荷捕捉區的程式規劃狀態。為了讀取 $亥第二電荷捕捉區的程式規劃狀態,字元線電壓源485被設定為該讀取電 壓位準(Vread)。位元線讀取電路625將有關的位元線對225a、225b,225c、.·· 225〜2、225n-l、225η中的該第一位元線對設定為該汲極讀取電壓 (Vdrain) ’ 將有關的位元線對 225a、225b、225c、…225η-2、225η-1、225η 中該第一位元線對設定為該汲極讀取電壓(Vd_),以及該第二位元線對設 疋為接地參考電壓(0V)。再度,如上所述,該讀取電壓位準(Vr£ad)必須經 過第lc圖中所示各臨界臨界電壓位準(vpVn)遞增變化,以確定雙面電荷捕As mentioned in the article by Atwood et al., "Flash memory power is critical to the storage of multiple bits in a single unit. Flash units beta can be stored instead of - digital storage devices , which stores the charge (in a single electron position.) The bit line controller 230 and the word line controller 25 of the present invention are in the charge trapping region 30 200845014 = ° ^ to enable the present invention The distribution of 4 s in the non-volatile memory array _, such as flc ® , is determined by the aging of each charge trapping region. The non-volatile memory array of the present invention is described. In the two known cases, the distribution of the 'information planning state is set to the threshold voltage (four) in a small difference, and thus has - about, the _ _ mouth. Suppose there is the ability to distinguish the threshold voltage of the ^ ^ bit number of the program _ The change of the level CVt), then any number of bits can be "the 2, 70 line controller 230 and the word line controller 250 are programmed to select the double-sided electric capture type non-volatile memory. Unit 2〇5 in the charge trapping region. One for erasing double-sided charge trapping non-volatile The bit line erase circuit of FIG. 6 in a selected element line controller 23G of the memory unit 2〇5 _ bits in the bit line 225a, lion, 225c, ... 22511-2, 225n-1, 225n The pair of potentials must be connected to the ground reference voltage source. 2 Under 2 = 225b, 225c, ... 22511-2, 225x1-1, 225η related bit line pairs, consider an unerased bit line connected The voltage source 622 is disabled to the bit line to prevent erasing of the charge trapping region. The bit line inhibit voltage source 622 is set to a disable voltage level, from a large = 7.5V to about +10V. The selected double-sided charge-trapping non-volatile body unit 2〇5 is injected into the hot carrier during the miscellaneous planning, and the word line erase circuit is set to the η-channel double-sided charge trapping non-volatile memory. Cell 2〇5 provides a word line erase voltage that is from about +15 V to about +20 V. Alternatively, if the double-sided charge trapping non-volatile interstitial unit 2〇5 is a ρ_channel device, then The word line erases the electric fort from about -15V to about -20V. A read of the non-volatile § memory array 2〇〇 of the present invention The processing is performed where the first charge trapping region is read from one direction and the second charge trapping region is read from the opposite direction. During the read operation in each direction, the word line controller The word line read voltage source 546 in the 25-inch word line read circuit 545 is connected to the selected word line among the word lines 235a, 235b, ..., 235j, 235j+: 1, ... 235m_: 1, 235m, A read voltage (Vread) is thus provided. To read the programmed state of the first charge trap, the word line read voltage source 546 is set to the read voltage level (Vr£ad). The bit line read circuit must set the first bit line pair in the associated bit line pair 425a, 425b, 425n-2, ... 425n1 425n to a ground reference voltage level (ον), the second bit The pair is set to the drain read voltage level (Vd_). 31 200845014 As mentioned earlier, the read voltage level (ν_) must be incrementally changed through the critical threshold voltage levels shown in Figure lc to determine the programmed state of the first charge trap. In order to read the programming state of the second charge trapping region, the word line voltage source 485 is set to the read voltage level (Vread). The bit line read circuit 625 sets the first bit line pair in the associated bit line pair 225a, 225b, 225c, . . . 225~2, 225n-1, 225n to the drain read voltage ( Vdrain) 'Set the first bit line pair of the associated bit line pair 225a, 225b, 225c, ... 225n-2, 225n-1, 225n to the drain read voltage (Vd_), and the second The bit line pair is set to the ground reference voltage (0V). Again, as described above, the read voltage level (Vr£ad) must be incrementally changed by each critical threshold voltage level (vpVn) shown in Figure lc to determine double-sided charge trapping.

捉式非揮發性§己憶體單元205的該選擇的列的該第二電荷捕捉區的程式規 劃狀態。 、在項取操作期間,第6·圖中的感測放大器64〇確定選擇的雙面電荷捕 捉辅揮發性域體單元撕在各方向上枝鱗通的。根據該臨界臨界 電壓位準(VPVn)以及選擇雙面電荷捕捉式非揮發性記憶體單元2〇5的導 通,感測放大器決定在各電荷捕捉區中被程式規劃的二進位數字資料,並 經由資料登錄/輸出匯流排645將該二進位數字資料傳輸至外部電路。 如上所述,位元線控制器515和字元線控制器5〇5為本發明所述非名 發性記憶體陣列綱的操作在功能是—致的。參考第2a圖和第%圖,系 述了雙面電荷捕捉式非揮發性記憶體單元2〇5的該陣列的一程式規劃击The programmed state of the second charge trapping region of the selected column of the non-volatile § memory unit 205. During the item fetching operation, the sense amplifier 64 in Fig. 6 determines that the selected double-sided charge trapping auxiliary volatile domain unit is torn in all directions. According to the critical threshold voltage level (VPVn) and the conduction of the double-sided charge trapping non-volatile memory unit 2〇5, the sense amplifier determines the binary digital data that is programmed in each charge trapping region, and via The data log/output bus 645 transmits the binary digital data to an external circuit. As described above, the bit line controller 515 and the word line controller 5〇5 are functional in the operation of the non-essential memory array of the present invention. Referring to Fig. 2a and Fig. %, a program planning shot of the array of double-sided charge trapping non-volatile memory cells 2〇5 is described.

作。雙面電荷捕捉式非揮發性記憶體單元2〇5的一選擇的列連接至字元袭 235a ^ 235b ... 235H . 235j ^ 235j+l ... 235m.l ^ 235m t’ 因而也連接至該選擇的雙面電荷捕捉式非揮發性記憶體單& Μ5的控糊 極’其中該廷擇的字元線被施加該字元線程式規劃電壓位準(u。雙遠 捉ΐίϊ發性記憶體單元2G5的未被科的列連接至本發明所 揮發性德體_ 的字元線伽、2视、·_· 2剛、2均、235j+卜.. =35m-l、235m中其餘的字元線。字元線控制器將該等字元線孤、235卜. 、阳j 均23习+1、…之35111·1、235m中未被選中的字元線,以及未祐 =的雙面電荷捕捉式非揮發性記憶體單元2()5設定為接地參考電壓位準 32 200845014 #位7G線控勤230產生用於對選擇列的雙面快閃記憶體單元2〇5的各 電何捕捉區物程式蝴所必騎位元線程式賴電壓 程式規劃輕辦(1)抛加錄猶225a、2现、225。、.. 線 225η-卜225η巾有關的位元線對’以及該選擇的雙面電荷捕捉式非揮n發性 =體早το 205的該源極和酿1等位準的設定是依據二進位數字資料 進打的,其找二進錄字:紐紐猶縣輕面電荷捕㈣非揮發性 記憶體單元205的該第一和第二儲存區中儲存為被捕捉的電荷。該二進位 數字資料的該等位準的示例如表i所示。Work. A selected column of the double-sided charge trapping non-volatile memory unit 2〇5 is connected to the word hit 235a ^ 235b ... 235H . 235j ^ 235j+l ... 235m.l ^ 235m t' thus also connected To the selected double-sided charge-trapping non-volatile memory single & 的5 control paste pole' where the selected character line is applied to the character threaded planning voltage level (u. The uncharacteristic column of the memory unit 2G5 is connected to the character line gamma of the volatile corpus _ of the present invention, 2 、, ··· 2 2, 2 、, 235j+b.. =35m-l, 235m The remaining word line. The word line controller isolates the word lines, 235 bu, yang j, 23 +1, ..., 35111·1, 235m unselected word lines, and佑='s double-sided charge-trapping non-volatile memory unit 2()5 is set to ground reference voltage level 32 200845014 #bit 7G line console 230 generates double-sided flash memory unit for pair of selected columns〇 5, each of the electric capture area, the program, the butterfly must be riding the bit thread-based voltage program planning lightly (1) throwing the record 225a, 2 now, 225... line 225η-卜225η towel related bits line 'And the choice of the double-sided charge-trapping non-swing n = the early το 205 of the source and the 1st level of the brewing is based on the binary digital data into the play, it is looking for the second entry: New Zealand The first and second storage areas of the New York County light surface charge trapping (four) non-volatile memory unit 205 are stored as captured charges. Examples of such levels of the binary digital data are shown in Table i.

在第2a圖和f 7b目中說明了本發明所述雙面電荷捕捉式非揮發性記 憶體單兀205的非揮發性記憶體陣列·的拭除。該拭除顯示為列拭除, -選擇的列自字元線 235a、235b、··. 235H、235j、235j+卜·.· 235m-l、 235m中選擇的字元線接收由字元線控制器25〇施加的一字元線拭除電壓位 準(Vers)。為η-通迢雙面電荷捕捉式非揮發性記憶體單元2〇5向電荷捕捉區 注入熱電子提供的字元雜除電壓位準為幼+15V至大約+肩。以替代 方式’如果雙面電荷捕捉式非揮發性記憶體單元2〇5 & ρ·通道裝置,則供 給向電荷捕捉區注入熱電洞的該字元線拭除電壓位準為從大約_15V至大約 _20V。字元線控制器250將接地參考電壓位準(〇v)施加至字元線23祉 235b、…235H、235j、235j+l、…235m-:l、235m 中未被選中的字元線, 因而也施加至雙面電荷捕捉式非揮發性記憶體單元2〇5,以防止被捕捉的 電荷從該未選擇雙面電荷捕捉式非揮發性記憶體單元2〇5的該第一和第二 電荷捕捉區被移除。 位元線控制益 230 向位元線 225a、225b、225c、... 225n-2、225x1-1、 225n中各有關的位元線對施加接地參考電壓位準(〇v),用於完全的拭除。 在一陣列組態中,特定的單元要求不經受該拭除操作。在這種情況下,位 元線控制器230向位元線225a、225b、225c、…225H-2、225η-卜22511中 忒專被充分拭除且不需要被進一步拭除的有關的位元線對,施加一大約為 +7.5V至大約+10V的禁止電壓位準(Vn^)。 再參考第2a圖和第7c圖,描述了對雙面電荷捕捉式非揮發性記憶體 33 200845014 單兀205 -讀列的讀取。雙面電荷捕捉式非揮發性記憶體單元挪的一 選擇的列具有字元線讀取電準(v_),該電壓被施加至字元線加, j 1 235j、235j+l、…235m-l、235m中有關的字元線對,因 而也施加至該選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5醜控綱 極又面包街捕捉式非揮發性記憶體單元2〇5的未被選中的列連接至陣列 ,元線 23= ' 235b、··· 235>卜 235j、235j+卜…2遍_卜 235m 中其餘 的字兀線。字元線控制器將該等字元線235a、235b、…235H、235j、 235川、…235m-:l、235m中未被選中的字元線,以及因此未被選中的雙 面電荷捕 = 足式非揮發性記憶體單元2G5設定為字元線讀通電壓位準 (^w)。字兀線讀通電壓位準(Vpass)確保雙面電荷捕捉式非揮發性記憶體 單το 205的未被選中的列在讀取期間不被啟動。 為了頃取雙面電荷捕捉式非揮發性記憶體單元2〇5選擇列的該第一電 荷捕捉區,位元線控_ 23G將連接至第—電荷捕捉區的位元線心、 225b : 225c、…、22Sn]、225n中有關的位元線對的第一條設定為 接地參考電壓(GV),並膽連接至第二電荷捕捉_位元線放、2说、 22^ 1··· 225ϊ>2、2251>1、225n巾有關的位元線對的第二條設定為沒極讀 取電,(vDRAIN)。如上所述,該讀取電壓位準(v_)必須經過第ic圖中所 不各臨界邊界電壓辦(VPVn)遞增變化,以確定各選擇的雙面電荷捕捉式 非揮發性記憶體單元2G5的該第-電荷捕捉區的程式賴狀態。為了讀取 選擇雙面電荷捕捉式非揮發性記憶體單元2GS的該第二電荷捕捉區之程式 規劃狀態,位元線控彻23〇料接至第一電荷捕捉區的位元線2仏、 二5b: 225:、··. 225η·2、225η·1、225η中該有關的位元麟的該第一條設 疋為及極讀取電壓(V_) ’並且將連接至第二電荷捕捉區的位元線、 =5b、225:、··· 225η-2、225η·1、225η中該有關的位元線對的該第二條設 定,接地荼考電壓_。再度,如上所述,該讀取電壓位準(乂誦)必須經 過第lc圖中所示各臨界邊界電壓位準(%▽〇)遞增變化,以確定各選擇的雙 面電荷捕捉式非揮發性記憶體單元2G5的該第二電荷捕捉區的程式規雛 態。 請注意没極讀取電壓位準(Vd_)必須足夠大以克服第一和第二電荷 34 200845014 捕捉區的臨界電壓,並且不足以導致所述雙面電荷捕捉式非揮發性 單元205的軟寫。 ^ f讀取操作期間,位元線控制器230中的一感測放大器確定選擇的雙 面^捕捉式非揮發性㊁己憶體單元2〇5在各方向上是否為導通的。根據該 臨界臨界辦(ypVn)以及麟雙面電荷概式 = I的導通:該_放大器確定在㈣細__式規議 :貝料,亚經由資料登錄/輸出匯流排645將該二進位數字資料傳輸至外部 電路。 ^再參考第8圖,為構建本發明所述雙面非揮發性記憶體單元的 猶觸流程目。乡辦面電綱㈣轉雜記憶鮮元被提供 (方塊700)並被按列和行配置(方塊7〇5)。位於本發明所述雙面非 揮發性記憶體陣列的各行上的雙面非揮發性記憶體單尬形 成又面%何捕捉式鱗發性記憶鮮元的_ _串(方塊。 接(方塊715)至各雙面電荷捕捉式非揮發性記憶體單元的 ㈣串的—頂部雙面電荷捕捉式非揮發性記憶體單元。類似地,一 晶體連接(方塊715)至各雙面電荷捕捉式非揮發性記憶體單元 的=雙面錢歡式轉發性記紐單元 =^發性記憶體單元的各個行與—對位元線有關(方塊7外“= 頂Ϊ選擇^^面電荷捕捉式非揮發性記‘隨單元的,鄰行有關。各 阳體的-源極/沒極連接至(方塊725)該有關的位元線對的第一 後對ίί各^選擇電晶體的一源極/没極連接至(方塊725)該有關的位元 ft :二位元線控制器連接至本發明所述非揮發性記憶體陣列的 塊BO)該相關聯的位元線對。一字元線與該雙面電荷捕捉式非 料元的各射關。該雙面電荷敝式鱗發性記憶體單元接 元綱丨=735)與其有_壯雜面電荷敝式非揮發性記憶體單 二#_]_至(方塊740)各條字元線’因而也連接 4的又面电何捕捉式非揮發性記憶體單元的控制閘極。 各組所述雙面電荷捕捉式非揮發性記憶體單元的所述頂部選擇電晶 35 200845014 ==有_位元線朗第—條相連接,以及所述底部選擇電晶體與所 的位^線對的第二條相連接’因而形成了本發明所述非揮發性記憶 體陣列的相父連接的位元線結構。The erasing of the non-volatile memory array of the double-sided charge trapping non-volatile memory unit 205 of the present invention is illustrated in Figures 2a and 7b. The erase is displayed as a column erase, - the selected column is selected from the word line 235a, 235b, ··· 235H, 235j, 235j+b··· 235m-l, 235m selected word line reception is controlled by the word line A word line is applied to erase the voltage level (Vers). Injecting hot electrons into the charge trapping region for the η-through 迢 double-sided charge trapping non-volatile memory cell 2〇5 provides a character miscellaneous voltage level of +15V to about + shoulder. Alternatively, if the double-sided charge trapping non-volatile memory cell 2〇5 & ρ·channel device, the word line erase voltage level supplied to the charge trapping region into the thermoelectric hole is from about _15V. Up to about _20V. The word line controller 250 applies a ground reference voltage level (〇v) to the unselected word lines of the word lines 23祉235b, . . . 235H, 235j, 235j+1, . . . 235m-:l, 235m. And thus also applied to the double-sided charge trapping non-volatile memory unit 2〇5 to prevent the captured charge from the first and the first of the unselected double-sided charge trapping non-volatile memory unit 2〇5 The two charge trapping regions are removed. Bit line control benefit 230 applies a ground reference voltage level (〇v) to each of the associated bit line pairs in bit line 225a, 225b, 225c, ... 225n-2, 225x1-1, 225n for complete Erase. In an array configuration, a particular cell requirement is not subject to the erase operation. In this case, the bit line controller 230 to the bit line 225a, 225b, 225c, ... 225H-2, 225n-b 22511 is specifically erased and does not need to be further erased. For the pair, apply a large inhibit level (Vn^) of approximately +7.5V to approximately +10V. Referring again to Figures 2a and 7c, the reading of the double-sided charge trapping non-volatile memory 33 200845014 single 205-read column is described. A selected column of double-sided charge trapping non-volatile memory cells has a word line read level (v_) applied to the word line plus, j 1 235j, 235j+1, ... 235m- l, 235m related word line pairs, and thus also applied to the selected double-sided charge-trapping non-volatile memory unit 2〇5 ugly control pole and bread street capture type non-volatile memory unit 2〇5 The unselected columns are connected to the array, and the meta lines 23 = ' 235b, ··· 235> 235j, 235j+b... 2 times _ 235 235m the remaining word lines. The word line controller encodes the unselected word lines of the word lines 235a, 235b, ... 235H, 235j, 235, ... 235m-: 1, 235m, and thus the unselected double-sided charges Capture = Foot-type non-volatile memory unit 2G5 is set to the word line read-through voltage level (^w). The word 兀 line read voltage level (Vpass) ensures that the double-sided charge-trapping non-volatile memory single unselected column of το 205 is not activated during reading. In order to take the first charge trapping region of the double-sided charge trapping non-volatile memory cell 2〇5, the bit wire_23G will be connected to the bit line center of the first charge trapping region, 225b: 225c The first strip of the bit line pair in the ..., 22Sn], 225n is set to the ground reference voltage (GV), and is connected to the second charge trap _ bit line, 2 said, 22^ 1··· The second line of the bit line pair associated with 225ϊ>2, 2251> 1, 225n towel is set to immersed reading power, (vDRAIN). As described above, the read voltage level (v_) must be incrementally changed by the non-critical boundary voltage (VPVn) in the ic diagram to determine the selected double-sided charge trapping non-volatile memory unit 2G5. The program-dependent state of the first-charge trapping region. In order to read the programming state of the second charge trapping region of the double-sided charge trapping non-volatile memory cell 2GS, the bit line is controlled to be connected to the bit line 2 of the first charge trapping region, 2b: 225:, 225., 225η·2, 225η·1, 225η, the first bit of the relevant bit lining is set to the polarity read voltage (V_)' and will be connected to the second charge trapping The bit line of the region, =5b, 225:, ··· 225η-2, 225η·1, 225η, the second bit setting of the relevant bit line pair, the ground reference voltage _. Again, as described above, the read voltage level (乂诵) must be incrementally changed through the critical boundary voltage levels (%▽〇) shown in Figure lc to determine the selected double-sided charge trapping non-volatile The second charge trapping region of the memory unit 2G5 is programmed. Please note that the immersive read voltage level (Vd_) must be large enough to overcome the threshold voltage of the first and second charge 34 200845014 capture regions and insufficient to cause soft writing of the double sided charge trapping non-volatile cell 205 . During the f f read operation, a sense amplifier in the bit line controller 230 determines whether the selected two-sided capture type non-volatile second memory unit 2〇5 is conductive in all directions. According to the critical threshold (ypVn) and the double-sided charge profile = I conduction: the _ amplifier is determined in (4) fine __ formula: shell material, sub-data registration / output bus 645 the binary digit Data is transferred to an external circuit. Referring again to Fig. 8, the construction of the double-sided non-volatile memory unit of the present invention is carried out. The township office (4) turns the memory fresh element is provided (block 700) and is configured by column and row (block 7〇5). The double-sided non-volatile memory unit on each row of the double-sided non-volatile memory array of the present invention forms a __string of square capture and scaly memory fresh elements (blocks. a (four) string-top double-sided charge trapping non-volatile memory cell to each of the double-sided charge trapping non-volatile memory cells. Similarly, a crystal is connected (block 715) to each double-sided charge trapping non-volatile memory cell. Volatile memory unit = double-sided money-like forwarding counter unit = ^ each line of the memory unit is related to the bit line (block 7 outside "= top Ϊ select ^^ surface charge capture type non The volatility record is related to the adjacent line of the cell. The source/source of each anode is connected to (block 725) the first post-pair of the associated bit line pair. /not connected to (block 725) the associated bit ft: the two bit line controller is coupled to the block BO of the non-volatile memory array of the present invention) the associated bit line pair. a line and each of the double-sided charge trapping non-material elements. The double-sided charge 敝-type scalar memory unit is connected丨 丨 = 735) instead of having a _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ a control gate of the memory cell. The top selects the crystals of the set of double-sided charge trapping non-volatile memory cells of each group. 200845014 == there is a _ bit line-long-strip connection, and the bottom The transistor is selected to be connected to the second strip of the bit line pair ' thus forming a bit line structure of the father-join of the non-volatile memory array of the present invention.

第如圖說明第2a圖中所示本發明所述非揮發性記憶體陣列2〇〇的一 部分。如第2a目所描述,位於本發明所述非揮發性記憶體陣列遍各行上 的雙面電荷捕捉式非揮發性記憶體單元2〇5組篇、鳩、廳、以及· 相連接以形成雙面電荷捕捉式非揮發性記憶體單元2G5⑽細串聯串。 各NAND串聯串組21〇a、21〇b、210c、210d具有-頂部選擇電晶體215a、 b和215c以及一底部每擇電晶體22〇a、220b和220c。各頂部選擇電 晶體215a、215b和215c具有-第一源極/沒極連接至各ΝΑΝ〇串聯串組 2l〇a、210b、210c以及210d的頂部雙面電荷敝式非揮發性記憶體單元 2〇5的沒極。各底部選擇電晶體2施,2施和22〇c具有一第一源極/沒極連 接至各NAND串聯串組21〇a、210b、21〇c以及21〇d的底部雙面電荷捕捉 式非揮發性記憶體單元2〇5的源極。頂部選擇電晶體心、織和215。、 以及底部選擇電晶體施、2施和雇的祕和錄在魏上可互換, 因此為了表述清楚被指定為第一和第二源極/沒極。A portion of the non-volatile memory array 2 of the present invention shown in Figure 2a is illustrated. As described in FIG. 2a, the double-sided charge trapping non-volatile memory unit 2〇5, 鸠, 厅, and· are connected in a row on the non-volatile memory array of the present invention to form a double Surface charge trapping non-volatile memory unit 2G5 (10) fine series string. Each of the NAND series strings 21a, 21〇b, 210c, 210d has a top selection transistor 215a, b and 215c and a bottom per transistor 22a, 220b and 220c. Each of the top selection transistors 215a, 215b, and 215c has a top-side double-sided charge-type non-volatile memory cell 2 with a first source/no-pole connected to each of the tantalum series strings 21a, 210b, 210c, and 210d. 〇5 is not very good. Each of the bottom selection transistors 2, 2 and 22〇c has a first source/no-pole connected to each of the NAND series strings 21〇a, 210b, 21〇c, and 21〇d. The source of the non-volatile memory cell 2〇5. Select the cell core, weave, and 215 at the top. And the selection of the bottom of the transistor, the application and the secret of the application are interchangeable, so it is designated as the first and second source / no pole for clarity.

頂部選擇電晶體215a、215b和215c的一第二源極/汲極連接至位元線 225a、225b、225c和225d中有關的位元線對的第一條。各底部選擇電晶 體220a、220b和220c具有一第二源極/沒極連接至位元線225a、225b、225c 和225d中有關的位元線對的第二條。 本發明所述非揮發性記憶體陣列2〇〇的各行(在此實施例中,指nand 串聯串組210a、210b和210c其中之一)與位元線225a、225b、225c和225d 中的一對位元線有關。位元線225a、225b、225c和225d中的各有關的位 兀線對其中一條更與雙面電荷捕捉式非揮發性記憶體單元的一第一相鄰行 210a、210b和210c有關,並且位元線225a、225b、225c和225d中有關 位兀線對的第二條更與雙面電荷捕捉式非揮發性記憶體單元的一第二相鄰 行21(^、21〇1)、以及210(:有關。第一相鄰行21(^、21〇13和21〇(:的頂部選 擇電晶體的一第二源極/沒極連接至位元線225&、22513、22允和225(1中該 36 200845014 有關的位元線對的該第二條,並且該第二相鄰行的各底部選擇電晶體的一 源極/汲極連接至位元線21、225b、225e和225d巾該有關驗元線對的 該第一條。210a、210b和210c中一個行上的頂部選擇電晶體21%、21沁 和215c、以及210¾ 210b和210c中一個相鄰行上的底部選擇電晶體22加、 220b和220c連接至位元線225a、225b、225c和225d其中的一條,因而 提供了本發明所述相交連接的柱狀位元線結構。 舉例而言,包含NAND串聯串組210b的行與位元線225b和225e有 關。第一相鄰NAND串聯串組210a與位元線:祝有關,並且其底部選擇 電晶體220a的第二源極/汲極連接至位元線225b。第二相鄰nand串聯串 組210c與位兀線225c有關,並且其頂部選擇電晶體225c的第二源極/沒極 連接至位元線225c。 一所有的位元線225a、225b、225c和225d均連接至位元線控制器23〇。 位兀線控制器23G為選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5提供 程式規劃、讀取、以及拭除被捕捉的電荷所必需的位元線操作電壓,其中 被捕捉的電荷代表各選擇的雙面電荷捕捉式非揮發性記碰單元的電荷捕 捉區内的多個數位資料位元。 位於本發明所述非揮發性記憶體陣列2〇〇各列上的各雙面電荷捕捉式 非揮發性記憶體單元205的一控制閘極連接至字元線2祝、…23別、 235j、235j+:l、··· 235m中的一條。頂部選擇電晶體2i5a、21沁和2⑸ 的閘極連接至頂部選擇閘極'線24〇a # 24〇b。在本發明所述非揮發性記憶 體陣列200的該實施例中,頂部選擇電晶體2以、㈣和⑽其中的二 半連接至頂部選擇閘極線240a* 24〇b中的一條,並且其中的另二半連接 至頂部選擇閘極線240a和24〇b中的另一條。底部選擇電晶體魏、繼 和220c的閘極連接至底部選擇閘極、線245。所有字元線2祝、··· 2均]、 235j 235j+l、··· 235m、頂部選擇閘極線240a和240b、以及底部選擇閘 極線均連接至一子元線控制器25〇。字元線控制器,轉字元線操 =壓,驗選擇程式賴、讀取、以及拭除被捕㈣電荷,此被捕捉的 私荷代表各選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5的電荷捕捉區 37 200845014 内的多個數位資料位元。 “具有共用的字元線235a、…235j-l、235j、235j+l、…235m的雙面 電荷捕捉式非揮發性記憶體單元205的NAND串聯串組210a、210b和210c 被定義為一頁面。程式規劃、拭除、以及讀取可以一頁面或半頁面為基準 進行,如下面所說明。在以下對操作進行的說明中,字元線控制器25〇以 , 適當的電壓位準啟動字元線WLj 235j,其用於將選擇的雙面電荷捕捉式非 揮發性記憶體單元2〇5a、205b和205c進行程式規劃、拭除、或讀取。同 時地,該字元線控制器向頂部選擇線24此和24〇b施加適當的選擇線電壓 位準以啟動頂部選擇電晶體215a、215b和215c,並且向底部選擇線施加該 適當的選擇線電壓位準,以啟動底部選擇電晶體22〇a、22〇b*22〇c,因而 將NAND串聯串組210a、21〇b和21〇c與位元線225a、22沁、22允和225d φ 連接。 將一全頁面的程式規劃為將以下裝置依序程式規劃:將選擇的雙面電 荷捕捉式_發性記鍾單元施、獅和版㈣—電翻捉區施、 265b和26允、該選擇的雙面電荷捕捉式非揮發性記憶體單元2〇兄、2〇沁 和205c的第二電荷捕捉區270a、270b和270c進行程式規劃。 、—字元線控制器250啟動第5圖中的字元線程式規劃電壓源伽,因而 為字元線WLj项施加所述非常大的程式規舰壓。該非常大的程式規劃 電壓隨後被施加至選擇的雙面電荷捕捉式非揮發性記憶體單元2脱、2〇5b 和205c的控制閘極。字元線控制器,啟動第一選擇線程式規劃電壓源 · 537 ’因而為頂部獅電晶體池、膽和❿的閘極施加適度的大選擇 電壓,以啟動頂部選擇電晶體215a、215b和215c,因而將Nand串聯串 組2i0a、2i0b和2i〇c連接至與其有關的位元線225a、2现、2仏。字元 線控制器250將第5圖中的接地參考電壓源539連接至底部 曰 220a、220b和220c的閘極,以取消啟動底部選擇電晶體2施、 因而防止NAND串聯串組21〇a、21〇b和210c底部的雙面電荷捕捉式非揮 發性記憶體單元205連接至與位元線225a、225b、22允中與其有關的第二 條位元線。位元線控制器23()啟動第一位元線程式規劃賴源617,因: 38 200845014 在各位元線225a、225b、225c和225d施加位元線程式規劃電壓(VBLn)。該 位元線程式規劃電壓(VBLn)經頂部選擇電晶體215a、215b和215c被移轉至 選擇的雙面電荷捕捉式非揮發性記憶體單元205a、205b和205c的第一電 何捕捉區265a、265b和265c。A second source/drain of the top select transistors 215a, 215b, and 215c is coupled to the first strip of associated bit line pairs in bit lines 225a, 225b, 225c, and 225d. Each bottom select transistor 220a, 220b, and 220c has a second source/nothing connected to a second strip of associated bit line pairs in bit lines 225a, 225b, 225c, and 225d. Each row of the non-volatile memory array 2 of the present invention (in this embodiment, one of the nand series strings 210a, 210b, and 210c) and one of the bit lines 225a, 225b, 225c, and 225d Related to the bit line. Each of the associated bit line pairs in bit lines 225a, 225b, 225c, and 225d is more related to a first adjacent row 210a, 210b, and 210c of the double-sided charge trapping non-volatile memory cell, and The second line of the pair of bit lines 225a, 225b, 225c, and 225d is further connected to a second adjacent line 21 (^, 21〇1), and 210 of the double-sided charge trapping non-volatile memory unit. (:Related. The first adjacent row 21 (^, 21〇13 and 21〇 (: a second source/no pole of the top selection transistor is connected to the bit line 225&, 22513, 22 and 225 ( 1 in the 36 200845014 related bit line pair, and a source/drain of each bottom selection transistor of the second adjacent row is connected to the bit line 21, 225b, 225e and 225d The bottom selection transistor on an adjacent row of the top selection transistors 21%, 21A and 215c, and 2103⁄4 210b and 210c on the first row of the first pair 210a, 210b, and 210c 22 plus, 220b and 220c are connected to one of the bit lines 225a, 225b, 225c and 225d, thus providing the intersecting connections of the present invention For example, the row containing the NAND series string 210b is associated with the bit lines 225b and 225e. The first adjacent NAND series string 210a is associated with the bit line: and the bottom is selected for the transistor The second source/drain of 220a is connected to bit line 225b. The second adjacent nand series string 210c is associated with bit line 225c and the second source/nopole of top select transistor 225c is connected to the bit A line 225c. All of the bit lines 225a, 225b, 225c, and 225d are connected to the bit line controller 23A. The bit line controller 23G is a selected double-sided charge trap type non-volatile memory unit 2 5 providing a bit line operating voltage necessary for programming, reading, and erasing the captured charge, wherein the captured charge represents a charge trapping region of each selected double-sided charge trapping non-volatile cell a plurality of digital data bits. A control gate of each double-sided charge trapping non-volatile memory unit 205 located on each column of the non-volatile memory array 2 of the present invention is connected to the word line 2 ,...23, 235j, 235j+: l,··· 235 One of the m. The gates of the top selection transistors 2i5a, 21A, and 2(5) are connected to the top selection gate 'line 24〇a # 24〇b. This embodiment of the non-volatile memory array 200 of the present invention. The top select transistor 2, (4) and (10) are connected to one of the top select gate lines 240a* 24〇b, and the other two of them are connected to the top select gate lines 240a and 24〇b The other one. The gates of the bottom selection transistor Wei, and 220c are connected to the bottom selection gate, line 245. All word lines 2, 2, 2, 235, 235, +1, 235, 235m, top select gate lines 240a and 240b, and bottom select gate lines are connected to a sub-line controller 25〇 . The word line controller, the word line operation = pressure, the selection program depends on, reads, and erases the trapped (four) charge, and the captured private charge represents each selected double-sided charge trap type non-volatile memory. A plurality of digital data bits within the charge trapping region 37 200845014 of the cell 2〇5. "The NAND series string sets 210a, 210b, and 210c of the double-sided charge trap type non-volatile memory unit 205 having the shared word lines 235a, ... 235j-1, 235j, 235j+1, ... 235m are defined as one page. Program planning, erasing, and reading can be performed on a page or half page basis, as explained below. In the following description of the operation, the word line controller 25 starts with the appropriate voltage level. A line WLj 235j for programming, erasing, or reading the selected double-sided charge trapping non-volatile memory cells 2〇5a, 205b, and 205c. Simultaneously, the word line controller is The top select line 24 and 24 〇 b apply appropriate select line voltage levels to activate the top select transistors 215a, 215b, and 215c, and apply the appropriate select line voltage level to the bottom select line to initiate the bottom select transistor 22〇a, 22〇b*22〇c, thus connecting the NAND series strings 210a, 21〇b, and 21〇c with the bit lines 225a, 22沁, 22 and 225d φ. In order to program the following devices in sequence: the selected pair Charge-trapping _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The second charge trapping regions 270a, 270b, and 270c are programmed. The word line controller 250 initiates the character threaded planning voltage source gamma in FIG. 5, thus applying the very large value to the word line WLj term. The program gauge pressure. This very large program planning voltage is then applied to the selected double-sided charge-trapping non-volatile memory unit 2, 2〇5b and 205c control gates. Word line controller, starts The first select threaded planning voltage source · 537 ' thus applies a moderately large selection voltage to the gates of the top lion cell, biliary and germanium to activate the top select transistors 215a, 215b and 215c, thus aligning the Nand series 2i0a, 2i0b, and 2i〇c are connected to bit lines 225a, 2, 2仏 associated therewith. The word line controller 250 connects the ground reference voltage source 539 in FIG. 5 to the bottom turns 220a, 220b, and 220c. Gate to cancel the start of the bottom selection transistor 2 Thus, the double-sided charge trapping non-volatile memory unit 205 at the bottom of the NAND series strings 21a, 21〇b, and 210c is prevented from being connected to the second bit associated with the bit lines 225a, 225b, 22 The bit line controller 23() starts the first bit threaded programming Laiyuan 617 because: 2008 200814 applies a bit threaded planning voltage (VBLn) to each of the element lines 225a, 225b, 225c, and 225d. The bit threaded planning voltage (VBLn) is transferred to the first electrical capture region 265a of the selected double-sided charge trapping non-volatile memory cells 205a, 205b, and 205c via top select transistors 215a, 215b, and 215c, 265b and 265c.

在所選擇雙面電荷捕捉式非揮發性記憶體單元205a、205b和205c的 第一電荷捕捉區265a、265b和265c被充分程式規劃後,字元線控制器250 取消啟動第一選擇線程式規劃電壓源537,並且將第5圖的接地參考電壓 539連接至頂部選擇電晶體215a、215b和215c的閘極,以切斷頂部選擇電 晶體215a、215b和215c。字元線控制器25〇啟動第5圖的第二選擇線程式 規劃電壓源538,因而向底部選擇電晶體22〇a、22〇b和22〇c的閘極提供適 度的大選擇電壓,以導通底部選擇電晶體22〇a、22〇b和22〇c。底部選擇電 晶體220a、220b和220c的導通將所選擇的雙面電荷捕捉式非揮發性記憶 體單元205a和205b的第二電荷捕捉區270a、270b和270c與有關的位元 線225b、225c和225d連接。位元線控制器230啟動第6圖中的第二位元 線程式規劃電壓源618,因而在有關的位元線225b、225c和225d上施加 位元線程式規劃電壓(vBLn),該位元線程式規劃電壓(VBLn)亦施加至所選擇 的雙面電荷捕捉式非揮發性記憶體單元2〇5a、2〇5b和2〇5c的第二電荷捕 捉區 270a、270b 和 270c。 ° 在程式規劃期間,所有字元線控制器將字元線235a、…235>1、 、…、235m中未被選中的字元線連接至第5圖中的接地參考電壓源 、對本發明所述非揮發性記憶體陣列2〇〇的陣列上的選擇的雙面電荷捕 捉式非揮紐記_料漁、鶴*版的讀轉作,紅本二明 ,非揮發性記憶體陣列細的一半頁面上實施。該半頁面為雙面電^捕 式f揮發性記憶體單元2〇5的NAND串聯串組21〇a、21%和的交鈇 要執行半頁面讀取,字元線控制器250啟動第一選擇線讀取電ii 梦結弟一選擇線讀取電壓源551,因而將電源電壓源Vdd的電壓位準八別 夕專至頂部選擇線24〇a和底部選擇線245,隨後也移轉至頂部選擇電=體 39 200845014 215a和215c,因而將非揮發性記憶體陣列2〇〇的該第一半頁面連接至有關 的位元線225a和225c。字元線控制器250將頂部選擇線240b連接至第5 圖的接地參考電壓源539,以從頂部選擇電晶體215b有關的位元線225b 取消啟動頂部選擇電晶體215b。為了讀取選擇的雙面電荷捕捉式非揮發性 記憶體單元205a和205c的第一電荷捕捉區265a和265c,位元線控制器 230將第一玄豊的位元線225a和225c與第6圖中的接地參考電壓628相 連,並且啟動苐6圖中的位元線没極電壓源627,因而將讀取沒極電壓 (Vdrain)移轉至第二交替的位元線225b和225d。字元線控制器25〇啟動讀 取電壓源546,因而將讀取電壓(Vr£ad)移轉至選擇的雙面電荷捕捉式非揮 發性ό己憶體單元205a、205b和205c的控制閘極,該控制閘極的導通與否 =决於該碩取電壓(ν^^)的值。此外,字元線控制器250遞增該讀取電 壓(Vread)的電壓位準。字元線控制器230感測穿過選擇雙面電荷捕捉式 非揮發性記憶體單元205a和205c的電流,以確定選擇雙面電荷捕捉式非 揮發性記憶體單元205a和205c的臨界以及電荷位準的值,因而確定保留 在每擇雙面電荷捕捉式非揮發性記憶體單元2〇5a和205c的第一電荷捕捉 區265a和265c中的多個數位資料位元的值。 “立在多個數位資料位元的值被決定之後,選擇雙面電荷捕捉式非揮發性 纪憶體單元205a、205b和205c的第二電荷捕捉區270a、270b和270c隨 後被讀取。位元線控制器230將第二交替的位元線22沁和22兄連接至第 6圖=的接地參考電壓628,並啟動第6圖中的位元線汲極電壓源627,因 而將碩取没極電壓(vDRAIN)移轉至第一交替的位元線22兄和225c。字元線 控制,250啟動讀取電壓源546,因而將讀取電壓(v_)移轉至選擇的雙 面電荷捕捉式非揮發性記憶體單元205a,205b和2〇5c的控制閘極,該控 制,極的&通與否取決於該璜取電壓的值此外,字元線控制器mo 遞t該?取電壓(VREAD)的電壓位準,^決定選擇雙面電荷捕捉式非揮發性 屺憶體單元205a、205b和205c的臨界以及選擇雙面電荷捕捉式非揮發性 記單元205a、205b和205c的第二電荷捕捉區27〇a、巧此和r^中 的,荷位準的值,以及因而決定保留在選擇雙面電荷捕捉式非揮發性記憶 體早元205a、205b和20允的第二電荷捕捉區27〇a、27〇b和27〇c中的多 200845014 個數位資料位元的值。 要執行半頁面讀取,字元線控制器25〇啟動第一選擇線讀取電壓源撕 和第二選擇線讀取電壓源55卜因而將電源電舰Vdd的電壓位準分別移 轉至頂部選擇線240b和底部選擇線勘,以及因此至頂部選擇電晶體鳩 和底部選擇電晶體220b,而將非揮發性記憶體陣列2〇〇的該第二半頁面連 接至有關的位兀線225b和225c。字元線控制器250將頂部選擇線240a和 底部選擇'線24h連接至第5圖的接地參考電壓源S39,以從有關的位元線 25a和225c取/肖啟動頂部選擇電晶體2i5a和215c,並從底部選擇電晶體 220a和220c有關的位元線225b和225d取消啟動底部選擇電晶體22此和 φ 2施。為了讀取選擇的雙面電荷捕捉式非揮發性記憶體單元205b第一電荷 捕捉區265b,位元線控制器230將第二交替的位元線22允與第6圖中的 接地f考電壓628相連,並且啟動第6圖中的位元線沒極電壓源627,因 而將讀取汲極電壓(VDRAiN)移轉至第一交替的位元線225b。字元線控制器 250啟動讀取電壓源546目而將讀取電壓(Vr^)移轉至選擇的雙面電荷捕 捉式非揮發性圯憶體單元205b的控制閘極,其中該控制閘極的導通與否取 決於該讀取電壓(Vread)的值。此外,字元線控制器—遞增該讀取電壓 (Vread)的電壓位準。字元線控制器230感測穿過選擇雙面電荷捕捉式非揮 發性記憶體單元205b的電流,以確定選擇雙面電荷捕捉式非揮發性記憶體 單元205b的臨界以及記憶體單元2〇5b電荷位準的值,以及因而確定保留 _ 在選擇雙面電荷捕捉式非揮發性記憶體單元205b的第-電荷槪區265b 中的多個數位資料位元的值。 在多個數位資料位元的值被:確定之後,然後讀取選擇雙面電荷捕捉式 非揮發性記憶體單元205b的第二電荷捕捉區270b。位元線控制器230將 第二交替的位元線225b連接至第6圖中的接地參考電壓628,並啟動第6 圖中的位元線汲極電壓源627,因而將讀取汲極電壓(ydrajn)移轉至第一交 替的位元線225c。字元線控制器250啟動讀取電壓源546,因而將讀取電 壓(Vread)移轉至選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5a、2〇允 和205c的控制閘極,而該控制閘極的導通與否取決於該讀取電壓的值 (Vread)。此外,字元線控制器250遞增該讀取電壓(Vread)的電壓位準。字 200845014 捉物發性記瓣元2娜的 摆雔而何捕㈣麵發性輯辟元2G5b的臨界以及選 Γ 式非揮發性記憶體單元2G5b㈣二電荷捕減2·情 2^ 1的=,而叙保留在選擇雙面電荷捕捉式非揮發性記憶體單元 205b的弟二電荷捕捉區27〇b中多個數位資料位元的值。 、第%圖說明第此圖所示本發明所述非揮發性記憶體陣列·的一部 为。如第2b ®所說明’除底部選擇電晶體施,讓和纖的間極之外, 該實施例齡驗魏解圖。底部·電晶體施和纖的 閘極連接至底部選擇酿線245a。底部選擇電晶體遞關極連接至底 部選擇_線245b。底賴擇祕線245a·動允許ΝΑΝ〇串辦组施After the first charge trapping regions 265a, 265b, and 265c of the selected double-sided charge trapping non-volatile memory cells 205a, 205b, and 205c are adequately programmed, the word line controller 250 cancels the first selected threaded plan. Voltage source 537, and ground reference voltage 539 of FIG. 5 is coupled to the gates of top select transistors 215a, 215b, and 215c to sever top select transistors 215a, 215b, and 215c. The word line controller 25 initiates the second selected threaded planning voltage source 538 of FIG. 5, thereby providing a modest large selection voltage to the gates of the bottom select transistors 22a, 22〇b, and 22〇c to The bottom electrodes are selected to turn on the transistors 22〇a, 22〇b, and 22〇c. The conduction of the bottom select transistors 220a, 220b, and 220c turns the second charge trap regions 270a, 270b, and 270c of the selected double-sided charge trapping non-volatile memory cells 205a and 205b with associated bit lines 225b, 225c and 225d connection. The bit line controller 230 activates the second bit threaded planning voltage source 618 of FIG. 6, thereby applying a bit threaded planning voltage (vBLn) on the associated bit lines 225b, 225c, and 225d, the bit line A threaded planning voltage (VBLn) is also applied to the second charge trapping regions 270a, 270b, and 270c of the selected double-sided charge trapping non-volatile memory cells 2〇5a, 2〇5b, and 2〇5c. ° During word programming, all word line controllers connect unselected word lines of word lines 235a, ... 235 > 1, ..., 235m to the ground reference voltage source in Figure 5, for the present invention The selected double-sided charge-trapping non-slip mark on the array of the non-volatile memory array 2〇〇, the fisherman, the crane* version of the read-forward, the red book, the non-volatile memory array Half of the page is implemented. The half-page is a double-sided electrical capture type f volatile memory unit 2〇5 NAND series string group 21〇a, 21% and the intersection is to perform half page reading, and the word line controller 250 starts the first Selecting the line reading power ii Meng Jiedi a selection line reads the voltage source 551, thus the voltage level of the power voltage source Vdd is applied to the top selection line 24〇a and the bottom selection line 245, and then moved to The top selects the electrical = body 39 200845014 215a and 215c, thus connecting the first half of the non-volatile memory array 2A to the associated bit lines 225a and 225c. Word line controller 250 connects top select line 240b to ground reference voltage source 539 of FIG. 5 to cancel activation of top select transistor 215b from bit line 225b associated with top select transistor 215b. In order to read the first charge trapping regions 265a and 265c of the selected double-sided charge trapping non-volatile memory cells 205a and 205c, the bit line controller 230 sets the first metaphysical bit lines 225a and 225c with the sixth The ground reference voltage 628 in the figure is connected and the bit line no-pole voltage source 627 in the Figure 6 is activated, thereby shifting the read gate voltage (Vdrain) to the second alternating bit lines 225b and 225d. The word line controller 25A initiates the read voltage source 546, thereby shifting the read voltage (Vr£ad) to the control gates of the selected double-sided charge trapping non-volatile memory elements 205a, 205b, and 205c. The pole of the control gate is turned on or not = depending on the value of the master voltage (ν^^). In addition, word line controller 250 increments the voltage level of the read voltage (Vread). The word line controller 230 senses the current through the selected double-sided charge trapping non-volatile memory cells 205a and 205c to determine the critical and charge levels of the double-sided charge trapping non-volatile memory cells 205a and 205c. The quasi-values thus determine the values of the plurality of digital data bits remaining in the first charge trapping regions 265a and 265c of each of the double-sided charge trapping non-volatile memory cells 2〇5a and 205c. "After the values of the plurality of digital data bits are determined, the second charge trapping regions 270a, 270b, and 270c of the double-sided charge trapping non-volatile memory cells 205a, 205b, and 205c are subsequently read. The line controller 230 connects the second alternating bit lines 22 and 22 to the ground reference voltage 628 of FIG. 6 and activates the bit line drain voltage source 627 of FIG. 6, thus The immersive voltage (vDRAIN) is shifted to the first alternating bit line 22 and 225c. The word line control, 250 initiates the read voltage source 546, thereby shifting the read voltage (v_) to the selected double sided charge The control gates of the capture type non-volatile memory cells 205a, 205b and 2〇5c, the control, the polarity & pass or not depends on the value of the capture voltage. Furthermore, the word line controller mo hands t? Taking the voltage level of the voltage (VREAD), determining the criticality of selecting the double-sided charge trapping non-volatile memory cells 205a, 205b, and 205c and selecting the double-sided charge trapping non-volatile cells 205a, 205b, and 205c The second charge trapping region 27〇a, the value of this and the r^, the level of the charge level, and thus the decision The values of the multiple 200845014 digital data bits in the second charge trapping regions 27a, 27〇b, and 27〇c of the double-sided charge trapping non-volatile memory cells 205a, 205b, and 20 are selected. To perform a half page read, the word line controller 25 initiates the first select line read voltage source tear and the second select line read voltage source 55, thereby shifting the voltage level of the power supply ship Vdd to the top. Select line 240b and bottom select line, and thus to top select transistor and bottom select transistor 220b, and connect the second half of non-volatile memory array 2 to associated bit line 225b and 225c. The word line controller 250 connects the top select line 240a and the bottom select 'line 24h to the ground reference voltage source S39 of FIG. 5 to take the top select transistor 2i5a from the associated bit lines 25a and 225c. And 215c, and selecting bit lines 225b and 225d associated with transistors 220a and 220c from the bottom cancels the activation of bottom select transistor 22 and φ2. For reading the selected double-sided charge trapping non-volatile memory unit 205b First charge trapping region 265b, The line controller 230 connects the second alternating bit line 22 to the ground reference voltage 628 in FIG. 6, and activates the bit line no-pole voltage source 627 in FIG. 6, thus reading the drain The voltage (VDRAiN) is shifted to the first alternating bit line 225b. The word line controller 250 initiates the read voltage source 546 and shifts the read voltage (Vr^) to the selected double-sided charge trapping non-volatile The control gate of the memory unit 205b, wherein the conduction of the control gate depends on the value of the read voltage (Vread). In addition, the word line controller - increments the voltage level of the read voltage (Vread). The word line controller 230 senses the current through the selected double-sided charge trapping non-volatile memory unit 205b to determine the criticality of selecting the double-sided charge trapping non-volatile memory unit 205b and the memory unit 2〇5b The value of the charge level, and thus the value of the plurality of digital data bits in the selected first-charge buffer region 265b of the double-sided charge trapping non-volatile memory unit 205b. After the values of the plurality of digit data bits are determined: the second charge trapping region 270b of the double-sided charge trapping non-volatile memory unit 205b is then read. The bit line controller 230 connects the second alternating bit line 225b to the ground reference voltage 628 in FIG. 6, and activates the bit line drain voltage source 627 in FIG. 6, thus reading the drain voltage (ydrajn) shifts to the first alternating bit line 225c. The word line controller 250 activates the read voltage source 546, thereby shifting the read voltage (Vread) to the control gate of the selected double-sided charge trapping non-volatile memory unit 2〇5a, 2〇 and 205c And the conduction of the control gate depends on the value of the read voltage (Vread). Additionally, word line controller 250 increments the voltage level of the read voltage (Vread). Word 200845014 catching the hair of the sacred element 2 Na's pendulum and what to catch (four) face-to-face collection of the 2G5b critical and selective 非 type non-volatile memory unit 2G5b (four) two charge capture 2 · love 2 ^ 1 = The value of the plurality of digital data bits in the second charge trapping region 27〇b of the double-sided charge trapping non-volatile memory unit 205b is selected. The % diagram illustrates a portion of the non-volatile memory array of the present invention shown in the figure. As described in Section 2b ®, except for the selection of the transistor at the bottom and the interpole of the fiber, the embodiment is tested. The bottom of the transistor and the gate of the fiber are connected to the bottom selection strand 245a. The bottom select transistor diverter is connected to the bottom select_line 245b. Bottom line selection 245a

和210c的行可被連接至位元線概和㈣,而隔離ΝΑΝ〇串聯串組鳩 的行’、巾4等行的底# %晶體22Gb的閘極連接至被取消啟動的底部選擇 閘極線245b。 · 如上所述,具有共用的字元線现、…23SH、235j、23利、…235m 之雙面電荷捕捉式非揮發性記憶體單元2〇5的ΝΑΝ〇 _聯串組篇、鳩 和210c被定義為一頁面。程式規劃、拭除、以及讀取可依據一頁面或半頁 面上進行’如下面所說明。在以下所描述操作說明中,字元線控制器25〇 以適當的電壓位準啟動字元線% 235』,因而對選擇的雙面電荷捕捉式非 ,發性記《單元2G5a、2G5b和2G5e it行喊賴、拭除、或讀取。同 時地,該字元線控制器向頂部選擇線織和鳩施加適當的選擇線電壓 位準以啟動頂部選擇電晶體215a、215b和⑽,並且向底部選擇線斯 和245b施加該適當的選擇線電壓位準以啟動底部選擇電晶體22〇&、22此 和22〇c,因而將NA—nd串聯串組肅、鳩和·與位元線2仏、2挪、 225c和225d相連接。 對王頁面的秋式規劃為依序對選擇的雙面電荷捕捉式非揮發性記 憶體單兀205a,205b和205c的第一電荷捕捉區265a、265b* 265c,該選 擇的雙面電荷捕捉式非揮發性記憶體單元2〇5a、2〇5b和2〇5c的第二電荷 捕捉區270a、270b和270c進行程式規劃。除了底部選擇線245a和鳩 42 200845014 均被同時啟動以外,對第9b圖之結構之程式規劃等同於對第9a 之程式規劃。 、'再 具有多條底部選擇線2物和245b允許多個數位f料位元被同時儲 於選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5a、2〇5b和2〇允的第一 包荷捕捉區265a、265b和265c,以及第二電荷捕捉區27〇a、270b和270c。 多個數位資料位元的同時儲存在一半頁面單元中完成。 —為了將第-半頁面單元程式規劃,字元線控制器25〇啟動第5圖的字 το線程式規劃電壓源536,以將所述非常大的程式規劃電壓施加至字元線 WLj 235j上。該非常大的程式規劃電壓隨後被施加至選擇的雙面電荷捕捉 • 式非揮發性記憶體單元205a、205b和205c的控制閘極,字元線控制器25〇 啟動第一選擇線程式規劃電壓源537,以在頂部選擇電晶體215a和21父 的閘極施加所述適度的大程式規劃電壓,因而啟動頂部選擇電晶體和 215c,並將NAND串聯♦組210a和210c連接至與其有關的位元線22兄 和225c。字元線控制器250將第5圖的接地參考電壓539連接至頂部選擇 線240b,因而也連接至頂部選擇電晶體215b的閘極,以將NAN〇串聯串 組210b與其第一有關的位元線225b相隔離。 字元線控制器250啟動第二選擇線程式規劃電壓源538,以在底部選 擇電晶體220a和220c的閘極施加適度的大程式規劃電壓,因而啟動底部 • k擇笔曰曰體220a和220c,並將NAND串聯串組210a和210c的底部雙面 電荷捕捉式非揮發性記憶體單元205連接至與其有關的第二條位元線225b 和225d。字元線控制器250將第5圖的接地參考電壓539連接至底部選擇 線245b ’因而也連接至底部選擇電晶體220b的閘極,以將NAND串聯串 組210b與其有關的第二條位元線225c相隔離。 位元線控制器230啟動第一位元線程式規劃電壓源617,以在各位元 線220a和22〇c上施加位元線程式規劃電壓(VBLn)。位元線程式規劃電壓 (VBLn)被移轉至頂部選擇電晶體215a和215c,以及選擇的雙面電荷捕捉式 非揮發性記憶體單元205a和205c的第一電荷捕捉區265a和265c。同時地, 位元線控制器230啟動第6圖中的第二位元線程式規劃電壓源618,以在 43 200845014 有關位元線225b和225d上施加位元線程式規劃電壓(VBLn),因而也將該位 元線程式規劃電壓(VBLn)施加至選擇的雙面電荷捕捉式非揮發性記憶體單 元205a和205c的第二電荷捕捉區270a和270c。 為了將該第二半頁面單元程式規劃,字元線控制器25〇保持對第5圖 的字元線程式規劃電壓源536的啟動,以將該非常大的程式規劃電壓施加 至字元線WLj 235j上。該非常大的程式規劃電壓隨後被施加至選擇的雙面 電荷捕捉式非揮發性記憶體單元205a、205b和205c的控制閘極。字元線 控制斋250啟動第一選擇線程式規劃電壓源537,以將該適度的大程式規 劃電壓施加至頂部選擇線240b,因而也施加至頂部選擇電晶體215b的閘 極,以啟動頂部選擇電晶體215b,使NAND串聯串組21〇b和21〇c連接至 與其有關的位元線225b。字元線控制器250將第5圖的接地參考電壓539 連接至頂部選擇線240a,因而也連接至頂部選擇電晶體21兄和215c的閘 極,以將NAND串聯串組210a和210c與其有關的第一條位元線225a和 225c相隔離。 子元線控制器250啟動第二選擇線程式規劃電壓源538,以在底部選 擇電晶體220b的閘極施加適度的大程式規劃電壓,因而啟動底部選擇電晶 體220b ’並將NAND串聯_組210b的底部雙面電荷捕捉式非揮發性記憶 體單元205連接至與其有關的第二條位元線225c。字元線控制器250將第 5圖的接地參考電壓源539連接至底部選擇線245a,因而也連接至底部選 擇電晶體220a和245c的閘極,以將NAND串聯串組210a和245c與其第 二條有關的位元線225b和225d相隔離。 位元線控制器230啟動第一位元線程式規劃電壓源617,以在各位元 線220b和220d上施加位元線程式規劃電壓(vBLn)。位元線程式規劃電壓 (VbliO被移轉至頂部選擇電晶體215b,以及選擇的雙面電荷捕捉式非揮發 性5己體早元205b的弟一電荷捕捉區265b。同時地,位元線控制器230 啟動弟ό圖中的弟^一位元線程式規劃電壓源618,以在有關位元線225c上 施加位元線程式規劃電壓(VBLn),因而也將該位元線程式規劃電壓(%】^)施 加至:選擇的雙面電荷捕捉式非揮發性記憶體單元2〇5b的第二電荷捕捉區 44 200845014 270b 〇 在程式規劃期間,所有字元線控制器將字元線235a、…235j4、 235J+1、…、235m中未被選中的字元線連接至第5圖中的接地泉考 539 〇 ’、 對本發明所述非揮發性記憶體陣列200的陣列上的選擇的雙面電荷捕 捉式非揮發性記憶體單元205a、2〇5b和2〇5c的讀取操作,是在本發明所 述非揮發性記憶體陣列2()()的-半頁面上實施。為了執行第—半^面讀 取,字元線控制器250啟動第一選擇線讀取電壓源548和第二選擇線讀取 電壓源551,因而將電源電壓源Vdd的電壓位準分別移轉至頂部選擇線2他 和底部選擇線245a,以及因此至頂部選擇電晶體21兄和21兄,因而將非 ,發性記憶體陣列200的該第一半頁面連接至有關的位元線225a和225〇。 予兀線控制器250將頂部選擇線240b和底部選擇線245b連接至第5圖的 接地參考電壓源539,以從有關的位元線225b取消啟動頂部選擇電晶體 =5b,並從有關的位元線225c取消啟動底部選擇電晶體22此。為了讀取 ,擇的雙面電荷捕捉式非揮發性記憶體單元2〇%和2〇5c的第一電荷捕捉 區265a和265c,位元線控制器23〇將第二交替的位元線22北和22兄與第 6圖中的接地參考電壓628相連,並且啟動第6圖中的位元線汲極電壓源 f 7一’因而將讀取汲極電壓(%_)移轉至第_交替的位元線2仏和2仏。 子鱗控制器250啟動讀取電壓源546因而將讀取電壓^膽)移轉至:選 擇的雙面電荷敵式轉雜記紐單元施和施的控侧極,該控 制閘極的$通與否取決於該讀取電壓的值。此外,字元線控制器 25〇遞H貝取電壓(Vr£ad)的電壓位準。字元線控制器23〇感測穿過選 2雙荷捕捉式非揮發性記憶體單元2G5a和施的電流,以決定選擇 又面包荷捕捉式非揮發性記憶體單元SO%和2〇5〇的臨界以及選擇雙面電 f捕^式非揮發性記憶體單元施和施之電荷位準的值,因而確定保 邊,廷擇雙面電荷捕捉式非揮發性記憶體單元205a和205c的第一電荷捕 捉區265a和265c中的多個數位資料位元的值。 在多個數位資料位元的值被確定之後,然後選擇雙面電荷捕捉式非揮 45 200845014 發性記憶體單元205a和205c的第二電荷捕捉區270a和27〇c被讀取。位 元線控制器230將第二交替的位元線225b和觀連接至第6圖中的接地 參考電壓628,並啟動第6圖中的位元線汲極電壓源幻7,因而將讀取汲極 電,(VDRAiN)#多轉至第-交替的位元線225a和取。字元線控制器細啟 動讀取電壓源M6,因硫讀取電壓(v_)轉至選觸雙面電荷捕捉式 非揮發性記憶體單元205a、屢和尬的控制閘極,該控制間極的導ς 與否取決於該讀取電壓的值(ν議)。此外,字元線控制器25〇遞增該讀取 電壓(Vrbad)的電壓位準。字元線控制器23〇感測穿過 、 非揮發性記憶體單元術和脈的電流,以確定選擇雙面電=== 揮„體單元施和施的臨界以及選擇雙面電荷槪式非揮發性 兄憶體單元205a和205c的第二電荷捕捉區織和27〇c中的電荷位準的 值^而石^疋保留在選擇雙面電荷捕捉式非揮發性記憶體單元205a和205c 的弟-電荷捕捉區27Ga和27Ge中的多個數位資料位元的值。 第二半頁面讀取,字元線控制器250啟動第一選擇線讀取電壓 二 °弟—透擇線取電獅,因而將電源電觀v的電壓準 24〇b 24" * 〜也和底口^擇電晶體220b,因而將非揮發性記憶體陣列200的該 ί辦=連接至有關的位兀、線225b和225C。字元線控制器250將頂部 ^部鶴兩^選擇線顺連接至第5圖的接地參考電壓源539,以從 擇·3曰曰_ 215&和2150有關的位元線225a和225c取消啟動頂部選 225Γ; ^ 215C 5 220a ^ 220c 肖啟動底部選擇電晶體22〇a和22〇c。為了讀取選擇的雙面 =Ϊ發性記憶體單元_第一電荷捕捉區獅^ 且啟錢ή ϋ替的位疋線225C與第6圖中的接地參考電壓628相連,並 轉3二^線沒極電壓源、627,因而將讀取汲極電壓(Vd画)移 而蔣M t二的位兀線機。字元線控制器250啟動讀取電壓源、546,因 205 b'二丨錄咖)移轉至選擇的料電荷捕捉式非揮發性記憶體單元 值。此夕Γ,^閑極’ ^亥控制間極的導通與否取決於該讀取電壓(Vread)的 ’子兀線控制器250遞增該讀取電壓(v_)㈣壓位準。字元 46 200845014 f控制^3〇_穿贼輕岭荷舰式麟發 決定選擇雙面錢概式雜發性記麵單元聽=;值= ί揮發性峨體單元雇之1荷鱗驗,因而確定 保邊在廷擇又面笔何捕捉式非揮發性記憶體The rows of 210c and 210c can be connected to the bit line sum (4), while the gates of the row %, the row 4, etc. of the ΝΑΝ〇 series string 鸠 are connected to the bottom of the row #% crystal 22Gb to the bottom selection gate that is deactivated Line 245b. · As described above, the 双面_联组组, 鸠, and 210c of the double-sided charge-trapping non-volatile memory unit 2〇5 having a shared word line, ... 23SH, 235j, 23, ..., 235m Is defined as a page. Program planning, erasing, and reading can be performed on a page or half page as described below. In the operational description described below, the word line controller 25 turns on the word line % 235" at the appropriate voltage level, thus the selected double-sided charge trapping type, "cells 2G5a, 2G5b, and 2G5e" It lines shout, erase, or read. Simultaneously, the word line controller applies appropriate select line voltage levels to the top select wires and turns to activate the top select transistors 215a, 215b, and (10), and applies the appropriate select lines to the bottom select lines and 245b. The voltage level is used to activate the bottom select transistors 22 〇 & 22 and 22 〇 c, thus connecting the NA nd series string, 鸠 and · with the bit lines 2 仏, 2 。, 225 c and 225 d. The autumn plan for the king page is the first charge trapping region 265a, 265b* 265c of the selected double-sided charge trapping non-volatile memory cells 205a, 205b and 205c, the selected double-sided charge trapping The second charge trapping regions 270a, 270b, and 270c of the non-volatile memory cells 2〇5a, 2〇5b, and 2〇5c are programmed. The programming of the structure of Figure 9b is equivalent to the programming of the 9a program, except that both the bottom selection line 245a and the 鸠 42 200845014 are simultaneously activated. , 'There are multiple bottom selection lines 2 and 245b allow multiple digital f-levels to be simultaneously stored in the selected double-sided charge-trapping non-volatile memory unit 2〇5a, 2〇5b and 2 The first charge trapping regions 265a, 265b, and 265c, and the second charge trapping regions 27a, 270b, and 270c. Simultaneous storage of multiple digital data bits is done in half of the page units. - In order to program the first-half page unit, the word line controller 25 starts the word τ Threaded Planning Voltage Source 536 of Figure 5 to apply the very large programming voltage to the word line WLj 235j . The very large programming voltage is then applied to the control gates of the selected double-sided charge trapping non-volatile memory cells 205a, 205b, and 205c, and the word line controller 25 initiates the first selected threaded planning voltage. Source 537 applies the modest large programming voltage to the gates of the top select transistors 215a and 21, thereby activating the top select transistor and 215c, and connecting the NAND series ♦ groups 210a and 210c to the bits associated therewith. Yuan 22 brother and 225c. The word line controller 250 connects the ground reference voltage 539 of FIG. 5 to the top select line 240b and thus also to the gate of the top select transistor 215b to connect the NAN〇 series string 210b with its first associated bit. Line 225b is isolated. The word line controller 250 activates a second selected threaded planning voltage source 538 to apply a moderately large programming voltage at the gates of the bottom select transistors 220a and 220c, thereby enabling the bottom k-type pens 220a and 220c And connecting the bottom double-sided charge trapping non-volatile memory unit 205 of the NAND series string sets 210a and 210c to the second bit line 225b and 225d associated therewith. The word line controller 250 connects the ground reference voltage 539 of FIG. 5 to the bottom select line 245b' and thus also to the gate of the bottom select transistor 220b to connect the NAND series string 210b with the second bit associated therewith. Line 225c is isolated. The bit line controller 230 activates a first bit threaded planning voltage source 617 to apply a bit threaded planning voltage (VBLn) on each of the bits 220a and 22C. The bit threaded planning voltage (VBLn) is shifted to the top select transistors 215a and 215c, and the first charge trapping regions 265a and 265c of the selected double-sided charge trapping non-volatile memory cells 205a and 205c. Simultaneously, the bit line controller 230 activates the second bit threaded planning voltage source 618 in FIG. 6 to apply a bit threaded planning voltage (VBLn) on the bit 2008 lines 225b and 225d. The bit threaded planning voltage (VBLn) is also applied to the second charge trapping regions 270a and 270c of the selected double-sided charge trapping non-volatile memory cells 205a and 205c. In order to program the second half page unit, the word line controller 25A maintains the activation of the character threaded planning voltage source 536 of FIG. 5 to apply the very large programming voltage to the word line WLj. 235j. This very large programming voltage is then applied to the control gates of the selected double-sided charge trapping non-volatile memory cells 205a, 205b and 205c. The word line control 250 initiates a first selection of the threaded planning voltage source 537 to apply the modest large programming voltage to the top select line 240b and thus also to the gate of the top select transistor 215b to initiate the top selection. The transistor 215b connects the NAND series strings 21〇b and 21〇c to the bit line 225b associated therewith. The word line controller 250 connects the ground reference voltage 539 of FIG. 5 to the top select line 240a, and thus also to the gates of the top select transistor 21 and 215c to relate the NAND series strings 210a and 210c thereto. The first bit line 225a and 225c are isolated. The sub-line controller 250 activates the second selected threaded planning voltage source 538 to apply a moderately large programming voltage at the gate of the bottom select transistor 220b, thereby activating the bottom select transistor 220b' and NAND in series_group 210b The bottom double-sided charge trapping non-volatile memory unit 205 is coupled to a second bit line 225c associated therewith. The word line controller 250 connects the ground reference voltage source 539 of FIG. 5 to the bottom select line 245a, and thus also to the gates of the bottom select transistors 220a and 245c to connect the NAND series string sets 210a and 245c with its second The strip-related bit lines 225b and 225d are isolated. The bit line controller 230 activates a first bit threaded planning voltage source 617 to apply a bit threaded planning voltage (vBLn) on each of the bits 220b and 220d. The bit threaded planning voltage (VbliO is transferred to the top select transistor 215b, and the selected double-sided charge trapping non-volatile 5 hex early 205b dian-charge trapping region 265b. Simultaneously, bit line control The device 230 initiates a bitwise threaded planning voltage source 618 in the diphant diagram to apply a bit threaded planning voltage (VBLn) on the associated bit line 225c, thereby also threading the bit threaded planning voltage ( %)^) applied to: the second charge trapping region 44 of the selected double-sided charge trapping non-volatile memory cell 2〇5b 200845014 270b 所有 During the programming period, all word line controllers will have word line 235a, The unselected word lines of ... 235j4, 235J+1, ..., 235m are connected to the grounded spring 539' in Figure 5, for selection on the array of non-volatile memory arrays 200 of the present invention. The read operation of the double-sided charge trap type non-volatile memory cells 205a, 2〇5b, and 2〇5c is performed on the half page of the non-volatile memory array 2()() of the present invention. Performing the first-half-face reading, the word line controller 250 starts the first selection Line read voltage source 548 and second select line read voltage source 551, thereby shifting the voltage level of supply voltage source Vdd to top select line 2 and bottom select line 245a, respectively, and thus to top select transistor 21 The brother and the 21st brother thus connect the first half of the non-volatile memory array 200 to the associated bit lines 225a and 225A. The pre-wire controller 250 connects the top select line 240b and the bottom select line 245b. To ground reference voltage source 539 of Figure 5, to cancel the top select transistor = 5b from the associated bit line 225b, and to cancel the start of bottom select transistor 22 from the associated bit line 225c. The two-sided charge trapping non-volatile memory cells 2〇% and 2〇5c of the first charge trapping regions 265a and 265c, the bit line controller 23〇 will be the second alternating bit line 22 north and 22 brothers The ground reference voltage 628 in FIG. 6 is connected, and the bit line drain voltage source f 7 - ' in FIG. 6 is activated to thereby shift the read drain voltage (%_) to the _ alternating bit line 2仏 and 2仏. The subscale controller 250 activates the read voltage source 546 and will read ^ Bladder pressure) to transfer: the selected transfer type double-sided charge enemy facilities and control unit miscellany York side dressing of the electrode, the control gate of $ depends on the value of the read voltage. In addition, the word line controller 25 transmits the voltage level of the voltage (Vr£ad). The word line controller 23 〇 senses the current through the selected two-charged non-volatile memory unit 2G5a and the applied current to determine the selection of the bread-capturing non-volatile memory unit SO% and 2〇5〇. The critical value and the value of the charge level applied to the non-volatile memory cell are selected, thereby determining the margin, and selecting the double-sided charge trapping non-volatile memory cells 205a and 205c The values of a plurality of digital data bits in a charge trapping region 265a and 265c. After the values of the plurality of digit data bits are determined, the second charge trapping regions 270a and 27〇c of the double-sided charge trapping non-volatile memory cells 205a and 205c are then selected. The bit line controller 230 connects the second alternating bit line 225b and the view to the ground reference voltage 628 in FIG. 6, and activates the bit line drain voltage source 7 in FIG. 6, thus reading汲 电, (VDRAiN) # multi-turn to the first-alternating bit line 225a and take. The word line controller fine-starts the read voltage source M6, and the sulfur read voltage (v_) is transferred to the double-sided charge trap type non-volatile memory unit 205a, the control gate of the repeat and the ,, the control terminal The derivative or not depends on the value of the read voltage. In addition, the word line controller 25 〇 increments the voltage level of the read voltage (Vrbad). The word line controller 23 〇 senses the current through the non-volatile memory unit and the pulse to determine the choice of double-sided electricity === the threshold of the body unit and the choice of the double-sided charge The values of the charge levels in the second charge trapping region and 27〇c of the volatile buddy unit cells 205a and 205c are retained in the selective double-sided charge trapping non-volatile memory cells 205a and 205c. - the value of a plurality of digital data bits in the charge trapping regions 27Ga and 27Ge. The second half of the page reads, the word line controller 250 activates the first selection line to read the voltage of the second brother - the transparent selection of the electric lion Therefore, the voltage of the power supply circuit v is 24 〇 b 24 " * 〜 and the bottom port is selected to the transistor 220b, thus connecting the non-volatile memory array 200 to the relevant bit 兀, line 225b And the 225C. The word line controller 250 connects the top and the second selection lines to the ground reference voltage source 539 of FIG. 5 to select the bit line 225a associated with the 3? 215 & 2150 and 225c cancels the top selection of 225Γ; ^ 215C 5 220a ^ 220c Shaw starts the bottom selection of transistors 22〇a and 22〇c. Read the selected double-sided = burst memory unit _ first charge trap area lion ^ and the money ή 的 的 疋 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 225 The line has no pole voltage source, 627, thus shifting the bucker voltage (Vd draw) to the position of the line twister. The word line controller 250 starts the read voltage source, 546, because 205 b'丨 咖 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) The twist line controller 250 increments the read voltage (v_) (four) pressure level. Character 46 200845014 f control ^ 3 〇 _ thief light ridge ship type Lin Fa decided to choose double-sided money summary type hair mask unit Listen =; value = ί volatile steroid unit hired 1 squad test, thus determining the margins in the stipulations and the capture of non-volatile memory

265b中的多個數赠料位元的值。 ㈣私何捕捉S 在多個數位資料位元的值被確定之後, 非揮發性記舰單元鳩的第1袖㈣道,擇广何捕捉式 榮- a 一 的弟一包何捕捉£ 270b。位元線控制器230將 線225b連接至第6圖中的接地參考電M 628,並啟動第6 源、627 ’因而將讀取没極電雖咖)㈣至第-交The value of multiple number of gift bits in 265b. (4) Private capture S After the value of multiple digit data bits is determined, the first sleeve (four) of the non-volatile record unit ,, select the capture of the glory - a one of the brothers to capture £ 270b. The bit line controller 230 connects the line 225b to the ground reference power M 628 in Fig. 6, and activates the sixth source, 627 'and thus reads the immersive power, although the coffee is) (four) to the first

登子70線控制器250啟動讀取電麼源546,因而將讀取電 [OW)縛至·毅面電㈣非揮雜輯辟元漁、猶 和205c的控侧極,雜咖極的導通無取決於該讀取電磨的值 (vy。此外’字元線控制器25〇遞增該讀取電壓^歸)的電壓位準。字 ^控彻230感測穿過選擇雙面電荷捕捉式非揮發性記憶體單元鳩的 讀,以較聊雙面騎觀式轉發性記舰單元施_界以及選 擇雙面電荷敝式轉發性記麵科2G5b的第二電荷敝區纖中的 電荷位準的值,_確定儲在選擇雙面電荷捕捉式非揮發性記憶體單元 205b的第二電荷捕捉區27〇b中多個數位資料位元的值。 第9a圖和第9b圖的拭除如在第%圖中所說明,該拭除顯示為列方 式拭除,一選擇的列自字元線幻%、23sb、…2均_卜23习、23护卜… ^!^1、235111巾選擇力字元線接收由字元線控制器250施加的一字元線拭 除電壓位準(vERS)。此用於η·通道雙面電荷捕捉式非揮發性記憶體單元2〇5 將熱電子注入於電荷捕捉區中之字元線拭除電壓辦為A_5V至大約 20V以替代方式,如果雙面電荷捕捉式非揮發性記憶體單元挪為ρ· 通逼裝置’麟熱電祖人於電荷概區巾之字元賴除電壓位準為從大 ,15V至大約-20V。字元線控制器25〇將接地參考電壓位準(〇v)施加至 予元線235&、2351^、..235>卜 235』、235』+1、...235111-卜 235111 中未被選 中的字το線,因而也施加至雙面電荷捕捉式非揮發性記憶體單元2〇5,以 防止被捕捉的電荷從該雙面電荷捕捉式非揮發性記憶體單元Ms的該第一 47 200845014 和弟^一電何捕捉區被移除。 位元線控制器23G向位元線225a、225b、225e、··· 225n_2、225n卜 225n中各有關的位元線對施加接地參考電壓位準(〇v),以進&八 除。在-陣列組態中,某些單元要求不經受該拭除操作。在這種=下: 位το線控制器 23G 向位元線 225a、225b、225e、··· 225n-2、225n_/、22511 中該等被充分拭除且不需要被進—步拭除的有_位元線對,施加二= 為+7.5V至大約+i〇V的禁止電壓位準^顧)。 、 雖然以上參考較佳實施__顯讀觀本發明,細,熟習此技 術^瞭解,可崎本發明之形式與崎作各觀化,科離 之精神與範圍。 & 【圖式簡單說明】 第la圖與第lb®分縣-雙面電荷概式轉發性記髓 與橫截面圖; ^ 第圖^此用於程式規劃雙面電荷捕捉式非揮發性記憶體單元之陣列之 各記憶體單元之臨界電壓(VW㈣:具有特定臨界電壓之雙面電荷捕捉式 非揮發性兄憶體單元之數目之圖式,此特定臨界電壓用於由本發明之控制 裝置之程式規劃電路實施多位元程式規劃; 第2a圖和帛2b圖為本發明具有相交連接的柱狀位元線結構的多階層可程 # 式規劃雙面轉發性記鐘單元之_之第—與第二實細之概要圖; 弟3、圖為本發明具有用於各列之相交連接柱狀位元線結構之具有多階層可 程式規劃雙面非揮發性記憶體單元之單一 ΝΑΝ〇串聯串之陣列之一&組 態之概要圖; 第4圖為本發明具有多階層可程式規劃雙面非揮發性記憶體單元之多個 NAND串聯串之陣狀—般域之方塊圖,此單元具有麟各狀相交連 接的柱狀位元線結構; 48 200845014 第5圖為本發明具有相交連接的柱狀位元線結構的多階層可程式規劃雙面 非揮發性記憶體單元之陣列之字元線控制器之概要圖; 第6圖為本發明具有相交連接的柱狀位元線結構的多階層可程式規劃雙面 非揮發性記憶體單元之陣列之位元線控制器的概要圖; 第7a、7b、以及7c圖分別為之用於程式規劃、拭除、以及讀取本發明具 f相交連接的柱狀位元線結構的多階層可程式規劃雙面非揮發性記憶體 單元的所述陣列各所需電壓的表格; 第8圖為用於形成本發明具有相交連接的柱狀位元線結構的多階層可程式 規劃雙面非揮發性記憶體單元之過程流程圖 ;以及 第9a與%圖分別為本發明第2a肖%暖示具有相交 結構的續層可程式規酸轉揮發性記憶體單元之_之—此部份,^ 用於說明騎選擇醇階層可程式規雛面電荷敝式非揮發性記憶體 5、205Dengzi 70 line controller 250 starts to read the power source 546, thus binding the reading [OW] to the face of the face (4) non-spending series of Yuan Yu fishing, Ju and 205c control side pole, miscellaneous coffee The conduction does not depend on the value of the read electric grind (vy. In addition, the 'word line controller 25 〇 increments the read voltage ^). The word ^ control 230 senses the reading through the selection of the double-sided charge-trapping non-volatile memory unit ,, in order to compare the two-sided riding of the forward-looking ship unit and select the double-sided charge 转发The value of the charge level in the second charge region of the face 2G5b, _determining a plurality of digital data stored in the second charge trap region 27b of the double-sided charge trap type non-volatile memory unit 205b The value of the bit. The erase of the 9a and 9b diagrams is as shown in the % diagram, the erase is shown as a column mode erase, and a selected column is selected from the character line %, 23sb, ... 2 23 Guardian... The ^^^1, 235111 towel selection force word line receives a word line erase voltage level (vERS) applied by the word line controller 250. This is used for the η·channel double-sided charge trapping non-volatile memory unit 2〇5. The word line erase voltage for injecting hot electrons into the charge trapping region is A_5V to about 20V instead, if double-sided charge The capture type non-volatile memory unit is moved to the ρ· force device. The energy level of the ancestors of the lining thermoelectric ancestors is from the large, 15V to about -20V. The word line controller 25 施加 applies the ground reference voltage level (〇v) to the pre-element 235 &, 2351^, .. 235 > 235 』, 235 』 +1, ... 235111 - 235 351111 The selected word το line is thus also applied to the double-sided charge trapping non-volatile memory unit 2〇5 to prevent the trapped charge from the double-sided charge trapping non-volatile memory unit Ms A 47 200845014 and the brothers ^ one electric capture area was removed. The bit line controller 23G applies a ground reference voltage level (〇v) to each of the bit line pairs in the bit lines 225a, 225b, 225e, ..., 225n_2, 225n, 225n to enter & In an array configuration, certain units are not required to undergo this erase operation. Under this =: bit το line controller 23G is sufficiently erased into bit lines 225a, 225b, 225e, ... 225n-2, 225n_/, 22511 and does not need to be erased step by step. There are _ bit line pairs, and the application of two = +7.5V to about +i〇V forbidden voltage level). Although the above description is based on the preferred embodiment of the present invention, it is understood that the form and the scope of the invention can be varied and the spirit and scope of the invention. & [Simplified Schematic] Lath and lb® sub-counties - double-sided charge generalization reversal and cross-section; ^ Figure ^ This program is used to program double-sided charge trapping non-volatile memory Threshold voltage of each memory cell of the array of body cells (VW (4): a pattern of the number of double-sided charge trapping non-volatile brother cells having a specific threshold voltage, which is used by the control device of the present invention The program planning circuit implements multi-bit programming; the 2a and 帛2b diagrams are the multi-level routable units of the present invention having intersecting columnar bit line structures. A schematic diagram of the second solid detail; FIG. 3 is a single tantalum series with multi-level programmable bi-directional non-volatile memory cells having interconnected columnar bit line structures for each column. A schematic diagram of one of the arrays of arrays; FIG. 4 is a block diagram of a plurality of NAND series strings of multi-layer programmable non-volatile memory cells of the present invention. The unit has a symmetry Connected columnar bit line structure; 48 200845014 FIG. 5 is a diagram of a character line controller of an array of multi-level programmable double-sided non-volatile memory cells having intersecting columnar bit line structures of the present invention FIG. 6 is a schematic diagram of a bit line controller of an array of multi-level programmable double-sided non-volatile memory cells having intersecting columnar bit line structures; 7a, 7b, And the array of 7c for programming, erasing, and reading the array of multi-level programmable double-sided non-volatile memory cells of the present invention having a columnar bit line structure with f-joined connections a table of voltage requirements; FIG. 8 is a flow chart of a process for forming a multi-level programmable double-sided non-volatile memory unit having intersecting columnar bit line structures of the present invention; and 9a and %Fig. For the second aspect of the present invention, the continuation layer of the programmable layer of acid-transferable volatile memory unit having the intersecting structure of the present invention is used to illustrate the riding of the alcoholic layer. Volatile memory 5,205

10 15 20 30 35 40 45 50 55 60 65、70 【主要元件符號說明】 雙面電荷捕捉式非揮發性記憶體單元 基板 >及極區 源極區 氧化物層 電荷捕捉層 弟一介電質氧化物層 多晶石夕層/閘極 子元線端子 第一位元線端子 弟位兀線端子 電荷捕捉區 100、110、120、130 位準 49 200845014 102 、 112 105 、 115 200 210a 〜η 215a 〜η 220a 〜η 225a 〜η 230 235a 〜m 240a、b 245a、b 250 300 310a 〜z 315a 〜z 320a 〜z 330 350 355 400 425a 〜n 430 435a 〜m 44〇a 〜m 445a 〜m 450 455 505 510 、122、132 臨界電壓 、125 程式規劃電壓 非揮發性記憶體陣列 NAND串聯串組 頂部選擇電晶體 底部選擇電晶體 位元線 位元線控制器 字元線 頂部選擇閘極線 底部選擇閘極線 字元線控制器 非揮發性記憶體陣列 NAND串聯串組 頂部選擇電晶體 底部選擇電晶體 位元線控制器 字元線控制器 雙面電荷捕捉式非揮發性記憶體區塊 非揮發性記憶體陣列 位元線 位元線控制器 字元線 頂部選擇閘極線 底部選擇閘極線 字元線控制器 雙面電荷捕捉式非揮發性記憶體區塊 程式規劃控制信號 拭除控制信號 20084501410 15 20 30 35 40 45 50 55 60 65, 70 [Description of main component symbols] Double-sided charge trap type non-volatile memory cell substrate> and polar region source region oxide layer charge trapping layer-dielectric Oxide layer polycrystalline layer/gate source line terminal first bit line terminal bit position line terminal charge trapping area 100, 110, 120, 130 level 49 200845014 102 , 112 105 , 115 200 210a ~ η 215a 〜 η 220a η 225a η η 230 235a 〜 m 240a, b 245a, b 250 300 310a 〜 315a 〜 340 430a 〜 340 330 355 400 425a 〜 n 430 435a 〜 m 44〇a 〜 m 445a 〜 m 450 455 505 510, 122, 132 threshold voltage, 125 program planning voltage non-volatile memory array NAND series string top selection transistor bottom selection transistor bit line bit line controller word line top selection gate line bottom selection gate Polar line word line controller non-volatile memory array NAND series string set top selection transistor bottom selection transistor bit line controller word line controller double-sided charge trap type non-volatile memory block non-volatile Remember The top of the array bit line bit line controller selected word line at the bottom gate line selection gate line word-line controller formula sided charge trapping non-volatile memory block erase control signal planning program control signals 200,845,014

515 讀取控制信號. 520 控制解碼器 525 位址字 530 字元線位址解碼器 535 程式規劃電路 536 字元線程式規劃電壓源 537 第一選擇線程式規劃電壓源 538 第二選擇線程式規劃電壓源 539 連接線 540 字元線拭除電路 541 第一選擇線拭除電壓源 542 第二選擇線拭除電壓源 543 字元線拭除電壓源 544 連接線 545 字元線讀取電路 546 字元線讀取電壓源 547 讀通電壓源 548 第一選擇線讀取電壓源 550 列選擇電路 551 第二選擇線讀取電壓 555a 〜k 頂部選擇閘極線 560a 〜m 字元線 565a〜k 底部選擇線 600 位元線控制器 605 控制解碼器 610 位元線選擇電路 615 位元線程式規劃電路 617 第一位元線程式規劃電壓源 618 第二位元線程式規劃電壓源 51 200845014 620 位元線拭除電路 622 位元線禁止電壓源 623 連接線 625 位元線f買取電路 627 位元線汲極電壓源 628 連接線 630 位元線選擇電路 63 5a〜η 位元線 640 感測放大器 645 資料登錄/輸出匯流排 700、705、710、715、720、725、730、735、740 方塊515 Read Control Signal. 520 Control Decoder 525 Address Word 530 Character Line Address Decoder 535 Program Planning Circuit 536 Character Threaded Planning Voltage Source 537 First Select Threaded Planning Voltage Source 538 Second Select Threaded Planning Voltage source 539 connection line 540 word line erase circuit 541 first selection line erase voltage source 542 second selection line erase voltage source 543 word line erase voltage source 544 connection line 545 word line read circuit 546 word Yuan line read voltage source 547 Read voltage source 548 First select line read voltage source 550 Column select circuit 551 Second select line read voltage 555a ~ k Top select gate line 560a ~ m Word line 565a~k Bottom Select Line 600 Bit Line Controller 605 Control Decoder 610 Bit Line Selection Circuit 615 Bit Threaded Planning Circuit 617 First Bit Threaded Planning Voltage Source 618 Second Bit Threaded Planning Voltage Source 51 200845014 620 Bits Line erase circuit 622 bit line disable voltage source 623 connection line 625 bit line f buy circuit 627 bit line drain voltage source 628 connection line 630 bit line selection 63 5a~η bit line circuit 640 sense amplifier 645 data entry / output bus block 700,705,710,715,720,725,730,735,740

5252

Claims (1)

200845014 十、申請專利範圍: 1· 一種非揮發性記憶體陣列,包括: 複數$按列和行配置的雙面電荷捕捉式轉發性記憶體 她式轉發触紐私軸至少=雙 =何捕捉式非,發性記髓單元組,馳配㈣雙面電荷捕捉 二軍:記憶體單元的一 NAND串聯串中,各祕^串聯串具二 一頂部選擇電晶體和一底部選擇電晶體; /、 複數個位元線,其树接峨於該雙面電荷式轉發杜 的各個打與-對位元線有關,因而使該頂 1钣 没,該有關的位元線對中的第一條,以及該二= 的源極/;:及極連接至該有關的位元線對中的第二條,以致於闕 的位元線對中的該第一條更與一雙面電荷捕捉式非揮發性^體# 並使該有關的位元線對中的該第:條更 中該第-相鄰行的該頂部選晶體的一源極娜3關、 的=元線對中的該第二條,並且該第二相鄰行的該底部選^體 的源極/汲極連接至該有關的位元線對中的該第一條;以_ -位元線控制器,其連接至該複數個位元線,將位元 進仃私式規劃、項取、以及拭除,其中該被捕捉的電荷代表夂 擇的雙面電荷捕捉式非揮發性記憶體單元―電荷捕捉區内的^、 數位資料位元。 2’ ^申請專利範圍第1項所述之非揮發性記憶體陣列,更包括: 複數個字猶,各料線無概健岭制㈣轉發 元中的一列有關; °早 设數個頂部選職,各卿線連接至轉雙面電荷敝式非揮 記憶體單元之該等NAND φ聯串之至少—個之該頂部選擇電晶x體 之閘極; 53 200845014 複數個底部選姆,各底部獅線連接職錢面電荷捕 記憶體單元之該等NAND串聯串之至少一個之該底 ^軍曰 1 生 之閘極;以及 -子瓜線湖H,魏接至該字元線、該頂部選縣以及該底部選擇 線,而移轉字元線操作電壓,用於將被捕捉電荷選擇、程^規 讀取、、以及拭除,其中該被捕捉的電荷代表各該等選擇的&amp;面^ 捕捉式非揮發性記憶體單元一電荷捕捉區内的多個數位資料位= 3· 如申請專利範圍第2項所述之非揮發性記憶體陣列,其中 該位元線控制器包含: ^ -第-位元線程式規劃電麼源,其經由該有關的位元線對 該頂部選擇電晶體的該源極/沒極,為該選擇的雙 捉2 發性記憶體單元的-第一源描及極提供代表該多個數位資==揮 而為電荷捕捉區 以及 記 該 /多個數位貧料位元的該部分_熱載子電荷的一第一 j表 一弟線奴規舰觀,為該轉的雙面電翻«非揮笋性 k、體早元的n、極/汲極提供代表該多健位資料位 ^ 第,該複數個臨界調整電壓,因而為電荷捕捉區設定代表 夕個數位讀位70賴部分賴_子電荷的第二位準。 如申請專利範圍第2項所述之非揮發性記憶體陣列, 該字元線控制器包含: A 一字元線程式麵《源,提侧生—電壓_ 割電壓,其中該電壓場位於該選擇的雙面電荷捕捉 制ΓΓ選擇的雙面電荷捕捉式非揮發性記憶體單2 I 發性記憶體單元的-電荷槪區的賊子。 讀捕捉式非揮 其中 5·如申請專利範圍帛2項所述之非揮發性記憶體陣列, 54 200845014 該字元線控制器包含: 一第-獅線程式規劃電壓源,其有選擇地提供 =被雖_麵峨練 娜鱗列,其巾200845014 X. Patent application scope: 1. A non-volatile memory array, including: complex double-sided charge-captured forward memory configured by column and row. Her-style forwarding touch-only private axis at least = double = what capture type Non-initial recording unit, self-distributing (four) double-sided charge trapping two military: in a NAND series string of memory cells, each of the secret series series has two top-selective transistors and a bottom-selective transistor; a plurality of bit lines, the tree being connected to each of the double-sided charge-forwarding pairs and the bit-to-bit line, thereby causing the top 1 to be annihilated, the first of the related bit line pairs, And the source/;: and the pole of the two = are connected to the second one of the related bit line pairs, such that the first one of the bit line pairs of the 阙 is more than a double-sided charge trapping Volatile body # and making the first: in the associated bit line pair a first source of the first adjacent row of the first selected crystal Two, and the source/drain of the bottom select of the second adjacent row is connected to the associated bit line pair The first line; the _-bit line controller, which is connected to the plurality of bit lines, the bit element is privately planned, itemized, and erased, wherein the captured charge represents a choice Double-sided charge-trapping non-volatile memory cell - ^, digital data bit in the charge trap area. 2' ^The non-volatile memory array described in item 1 of the patent application scope includes: a plurality of words, each material line is not related to a column in the forwarding element (4) forwarding element; Jobs, each pair of wires connected to at least one of the NAND φ strings of the double-sided charge-type non-volatile memory unit; the top selects the gate of the electron crystal x body; 53 200845014 a plurality of bottom selections, each The bottom lion line connects at least one of the NAND series strings of the charge surface charge memory unit to the bottom of the NAND series string; and the sub-guar line lake H, Wei connects to the word line, The top selects the county and the bottom select line, and shifts the word line operating voltage for the captured charge selection, the program read, and the erase, wherein the captured charge represents each of the selected &amp;; a non-volatile memory array as described in claim 2, wherein the bit line controller includes : ^ - The first-bit threaded programming power source, its The associated bit line is the source/nothing pole of the top select transistor, and the first source trace and the pole of the selected dual capture memory unit are provided to represent the plurality of digits == wave And for the charge trapping region and the portion of the one or more digits of the poor material bit, the first j table, the younger line of the slave ship view, the double-sided electric turn of the turn The n, the pole/dip pole of the body k is provided to represent the multi-bit data bit ^, the plurality of threshold adjustment voltages, and thus the charge trapping region is set to represent the digits of the digits. The second level. For example, in the non-volatile memory array described in claim 2, the word line controller includes: A A-character threaded surface "source, side-voltage-cut voltage, wherein the voltage field is located in the The selected double-sided charge trapping system selects the double-sided charge-trapping non-volatile memory single- 2 I-to-one memory unit-charge scorpion thief. A non-volatile memory array as described in claim 2, 54 200845014 The word line controller includes: a first-lion threaded planning voltage source, which is selectively provided = Although it is _ 峨 峨 娜 娜 娜 娜 娜 娜 -子7L線讀取電壓源’其產生複數個臨界細電壓之―,以細 =雙=電荷捕捉式非揮發性記憶體單元的複數個程式規割臨界電 中該程式規劃臨界電縣代表多個數位龍位元的該部 刀的该禝數個臨界調整電壓中選擇的一個;以及 該位元線控制器包含: 靖取;及極包驗生$,其產生_汲極電壓辦,該丨雄賴位準經該 位元,對_第-條和第二條财選擇地移轉至該第—錄/源極Λ 和該第二祕/源極取決於該電荷捕捉_被捕捉的電荷位 _準,而啟動該選擇的雙面電荷捕捉式非揮發性記憶體單元; -第:接地參考電壓產生器,用於產生一接地參考電壓,該接地參考電 ,經該位元線對的該第一條和第二條被有選擇地移轉至該第一和 弟一源極/彡及極;以及 一感應電路,其經該成對位元線被連接至該選擇的雙面電荷捕捉式非揮 鲞性5己俶體單元,以藉由該位元線對的該第一條和第二條偵測代表 該多個數位資料位元的該電荷捕捉區的一程式規劃狀態。 7·如申請專利範圍第2項所述之非揮發性記憶體陣列,其中 該字元線控制器包含: 子元線拭除電壓源,提供用於產生一電壓場的一非常大的拭除電壓, 55 200845014 其中該電壓場位於該雙面電荷捕捉式非揮發性記憶體單元的該通 運區、與該雙面,荷捕捉式非揮發性記憶體單元的該控制閘極之 間,因而向該電荷捕捉區注入將被自該雙面電荷捕捉式非揮發性記 憶體單元的該通道區擷取的熱載子;以及 該位元線控制器包含: -第二接地參考電壓產生ϋ,驗將該接地參考電壓施加至該第一和 二汲極/源極。 8·如申請專利範圍第4項所述之非揮發性記憶體陣列,苴中 該雙面電荷捕捉式非揮發性記憶體單元為一 η_通道記^體單元。 9·如申請專利範圍第8項所述之非揮發性記憶體陣列,其中 該非常大的程式規劃電壓位準範圍從大約_6〇ν至大約ι〇ν,以使該熱 載子注入為熱電洞注入該電荷捕捉層。 10·如申請專利範圍第8項所述之非揮發性記憶體陣列,其中 忒複數個臨界調整電塵的電壓範圍從大約+10v至大約+60V,而被劃 t為區間,該區間足夠大以能確定該複數個該多個數位資料位元的該 第一和第二部分。 * 11·如申請專利範圍第6項所述之非揮發性記憶體陣列,其中 該複數個臨界侧電壓的電壓範圍從大約+20V至大咖50V,並被劃 分為區分該複數個程式規劃臨界電壓的遞增量。 12·如申咕專利乾圍弟11項所述之非揮發性記憶體陣列,其中 =及極領位準必需為一電壓位準,其足夠大以克服該第一和第二電 何捕捉區的臨界電麼,且不足以造成該雙面電荷捕捉式非揮發性記憶 體單元的軟寫。 56 200845014 I3.如申:專利範圍第7項所述之非揮發性記憶體陣列,其中 該非系大的拭除電壓位準範圍從大約+HOV至大約+2〇 〇v,以遞增該 雙面電荷捕料轉雜記題科的雜界電壓。 14.如申凊專利範圍第4項所述之非揮發性記憶體陣列,其中 該雙面電荷捕捉式非揮發性記憶體單元為- P-通道記憶體單元。 K如申請專利範圍帛14項之非揮發性記憶體陣列,其中 ,適度大的程式簡賴辦細從大約% GV至大約+则V,以使該- The sub 7L line reads the voltage source 'which generates a plurality of critical thin voltages', with a fine = double = charge trapping type of non-volatile memory unit, a plurality of programs, cutting the critical power, the program planning the critical electricity county representative a selected one of the plurality of critical adjustment voltages of the knives of the digits of the digits; and the bit line controller comprises: 靖取; and a polar package tester $, which generates _bungee voltage,丨 赖 赖 准 准 准 准 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择 选择a double-sided charge trapping non-volatile memory unit that activates the selection; a: ground reference voltage generator for generating a ground reference voltage, the ground referenced, via the bit line pair The first and second strips are selectively transferred to the first and second source/poles and poles; and a sensing circuit is coupled to the selected two sides via the pair of bit lines a charge trapping non-fluctuating 5 hexameric unit to the first and the first by the bit line pair Planning a program to detect the status bar on behalf of the plurality of digital data bits of the charge trapping region. 7. The non-volatile memory array of claim 2, wherein the word line controller comprises: a sub-line erase voltage source providing a very large erase for generating a voltage field Voltage, 55 200845014 wherein the voltage field is located between the traffic area of the double-sided charge trapping non-volatile memory unit and the control gate of the double-sided, charge-trapped non-volatile memory unit, and thus The charge trapping region injects a hot carrier to be extracted from the channel region of the double-sided charge trapping non-volatile memory cell; and the bit line controller comprises: - a second ground reference voltage generating chirp, The ground reference voltage is applied to the first and second drain/source. 8. The non-volatile memory array according to claim 4, wherein the double-sided charge trapping non-volatile memory unit is an η_channel memory unit. 9. The non-volatile memory array of claim 8, wherein the very large program programming voltage level ranges from about _6 〇 ν to about ι 〇 ν to cause the hot carrier to be injected A thermal hole is injected into the charge trapping layer. 10. The non-volatile memory array of claim 8, wherein the voltage of the plurality of critically-adjusted electric dust ranges from about +10 volts to about +60 volts, and is divided into intervals, the interval being sufficiently large The first and second portions of the plurality of the plurality of digit data bits can be determined. *11. The non-volatile memory array of claim 6, wherein the voltage of the plurality of critical side voltages ranges from about +20 V to 50 V, and is divided to distinguish the plurality of programming priorities. The amount of voltage increase. 12. For example, the non-volatile memory array described in the 11th patent application, wherein the = and the collar level must be a voltage level, which is large enough to overcome the first and second electrical capture regions. The critical power is not sufficient to cause soft writing of the double-sided charge trapping non-volatile memory unit. 56. The non-volatile memory array of claim 7, wherein the non-systematic erasing voltage level ranges from about +HOV to about +2 〇〇v to increase the double sided The charge-carrying turns to the miscellaneous voltage of the family. 14. The non-volatile memory array of claim 4, wherein the double-sided charge trapping non-volatile memory unit is a -P-channel memory unit. K is a non-volatile memory array with a patent coverage of 帛14, where a moderately large program is simple, from about %GV to about +V, so that …、載子注入為熱電洞注入該電荷捕捉層。 I6.如申睛專利範圍第14項所述之非揮發性記憶體陣列,盆中 ,複數舰界娜輯壓細從大約擔至大約·、 間足夠大以能確定該複數健多個數位資^ ’並被劃分 .如申晴專利範圍帛6項所述之非揮發性記憶體陣列,其中 該複數個臨界侧糕的電壓範圍從大約_而至大約如v 為區分該複數個程式規劃臨界電壓的遞增量。 其中 队如申請專利範圍第Π項所述之非揮發性記憶體陣列一 荷捕捉區的臨界電壓,且不足生士、 體單元的軟寫且不a造成該雙面電荷捕捉式非揮 為和第二電 發性記憶 以降低該雙 如申凊專她鮮Μ項所述之轉發性記隨陣列, 該非常大的拭除健位準範圍從大約_15 〇ν至大約说⑽, 面電荷捕捉式_發性記紐單元的馳界·。·’ 57 19. 200845014 20. 一種非揮發性記憶體積體電路,包含: 複數個按列和行配置的雙面電荷捕捉式非揮發性記憶體單元陣列, 位於各行上的該雙面電荷捕捉式非揮發性記憶體單元形成至少二 個雙面電荷捕捉式非揮發性記憶體單元組,驗配置於雙 捉式非揮發性記憶體單元的一 NAND串聯串中,各nand _ 具有一頂部選擇電晶體和一底部選擇電晶體; 複數個位域,其減接峨於使該雙面電荷撕试轉紐記憶體 摘各渐與-射L财關,@而使該卿獅電雜的 /汲極連接至財關的位元線對中㈣—條,並使職部選擇:曰 體的-源極/汲極連接至該有_位元線對中的第二條,以及: 於該有關的位元線對中_第_條更與_雙面電荷捕捉式 ,記憶體單元的-第-相鄰行有關,並使該有_位元線對中的% 第二條更與該雙面電荷術足式非揮發性記憶體單元的一第二相鄰/ 行有關,其中該第-才目鄰行的該頂部麵電晶體的一源極/沒極連 ,至該有_位猶對巾驗第二條,並且該第二轉行的該底部 選擇電晶體的一源極/汲極連接至該有關的位元線對中的該第一一 ° 條; 複數辨。猶’各林線雜㈣概健岭荷歡輕揮發性記憶 體單元的該陣列中的該列之-之所有該雙面電荷捕捉式非揮〜 記憶體單元的控制閘極; 又 複數個/1_線’各前馨鱗接至雜面電荷她式轉發性記 ί思體單元的NAND串聯串至少之一的該頂部選擇電晶體的一閘 複數個線,減舰雜至職s電荷她勃揮發性記 十思體單元的NAND串聯串至少之一的該底部選擇電晶體一 極; 阳、一閘 -位元線控彻,其賴至該減健元線,躲元職作電壓移轉至 選擇的雙面電荷捕捉式非揮發性記憶體單元,因而對被捕捉的電荷 進行程式規劃、讀取、以及拭除,其中該被捕捉的電荷代表各該選 58 200845014 擇的雙面電荷敝式轉發性記憶鮮元之電荷捕捉區中之 數位資料位元;以及 •子兀線控制器 /、逆接至該子元線、該頂部選擇線、以及該底部選擇 線,以移轉字元線操作電壓,用於對被捕捉的電荷進行選擇,程式 規^、讀取、以及拭除,其中該被捕捉的電荷代表各該選擇的雙^ 電荷捕捉式非揮發性記憶體單元之電荷捕捉區中之多個數位資料 位元。 、 21·如申請專利範圍帛2〇項所述之非揮發性記憶體積體電路,其中 該子兀線控制|§包含: -字70線程式規舰觀,提侧於產生__輕場的—非常大的 規劃電壓,其中該電壓場介於該選擇的雙面電荷捕捉式非揮發性記 體皁摘-控綱極、與該選擇輕&quot;荷捕捉式轉發性記情體^ 元的i道區之間,因而自該通道區擷取將被注入該選擇的雙面 捕捉式非揮發性記憶體單元的之電荷捕捉區的熱載子。 ^ 22·如申請專利範圍第2〇項所述之非揮發性記憶體積體電路, 該位元線控制器包含: -第^位^程式賴電觀,為賴擇的雙面電荷槪式非揮發性 • 聰體早源極级極、提供代表該多個數位資料位元的 -部分的鱗減舰界難之_,㈣電荷她區設定至代 表該多個數位f料位元的該部分_熱載子電荷的一第一位準;以 及 -第二位元線程式規劃電壓源,為該非揮發性記憶鮮元的 臟極提供代表該多個數位資料位元的另一部分的該等細^ 界調整電紅第ϋ將電侧贿奴城表够錄位^ 位元的遠部分的该熱載子電荷之第二位準。 、 23.如申請專利範圍第21項所述之非揮發性記憶體積體電路,其中 59 200845014 該字元線控制器更包括: -字元線讀取電壓源’其產生複數個臨界偵測電壓之一,以偵測 擇的雙面電荷舰錯㈣性記紐單·概個料_臨界電x壓 之一 ’其中練式規劃臨界電磨為代表多個數位資料位元的該部分 該被數個臨界調整電壓所選擇的一個所產生。 24·如申請專利範圍第1丨項所述之非揮發性記憶體積體電路,其中 該位元線控制器更包括: ’、 Ί及極』產生③’其產生_祕電壓位準,魏極電壓位準經 該該位元線對的該第-條和第二條被有選擇地移轉至該第一沒^ 源極和該第^^彻雜,而取決於該t制捉_被槪的電荷 位準’以啟動該選擇的雙面電荷捕捉式非揮發性記憶體單元; 一第-接地參考電壓產生器’用於產生—接地參考電壓,其經由該位 兀線對的該第-條和第二條被移轉至該第—和第二源本施極;以 及 -感應電路,其㈣賴位元紐連接至該選擇的雙面電荷捕捉式非 揮發性記憶體單元,而藉由該位元線對的該第一條和第二條,以谓 測代表該多健位資料位元的該電荷歡區的—喊規雛態。' 25·如申請專利範圍帛23項所述之非揮發性記憶體積體電路,其中 該字元線控制器更包括: ’、 一字元線拭除霞源,經該字元線連接聊的雙面電荷捕捉式非 揮發性記憶體單元,提供用於產生—電壓場的—非常大的拭除電壓, 其中該電壓場介於該聊的雙面電荷捕捉式非揮發性記憶體單元的該 通運區、與5亥廷擇的雙面電荷捕捉式非揮發性記憶體單元的該控制閘 極之間’因而向該電荷捕捉區注入將被自該選擇的雙面電荷捕捉式非 揮舍性5己憶體單元的該通道區操取的熱載子。 1 6·如申請專利範圍第%項所述之非揮發性記憶體積體電路,其中 200845014 該位元線控制器更包括: 用於將該接地參考電壓施加至該第一 一第二接地參考電壓產生器, 第二汲極/源極。 27·如申諳真利鉻囹筮who...., the carrier injection is injected into the charge trapping layer for the thermoelectric hole. I6. For example, in the non-volatile memory array according to Item 14 of the scope of the patent application, in the basin, the plural number of ships is from about 10,000 to about □, which is large enough to determine the plurality of digits. ^ ' is also divided. For example, the non-volatile memory array described in the scope of the patent application 帛6, wherein the voltage of the plurality of critical side cakes ranges from about _ to about v as a distinction between the plurality of programming priorities The amount of voltage increase. The core of the non-volatile memory array as described in the scope of the patent application, the threshold voltage of the charge-trapping region, and the soft writing of the raw and non-volatile cells, and the abundance of the double-sided charge-trapping The second electro-acoustic memory is used to reduce the repeatability of the pair as described in the application of the sputum, and the very large erase level ranges from about _15 〇ν to about (10), the surface charge Capture type _ _ _ _ _ _ _ _ _ _ _ · ' 57 19. 200845014 20. A non-volatile memory volume circuit comprising: a plurality of double-sided charge trapping non-volatile memory cell arrays arranged in columns and rows, the double-sided charge trapping on each row The non-volatile memory unit forms at least two double-sided charge-trapping non-volatile memory unit groups, and is disposed in a NAND series string of the dual-carrying non-volatile memory unit, each nand _ having a top selection power The crystal and a bottom selection transistor; a plurality of bit fields, the reduction is caused by the double-sided charge tearing test memory, and the memory is picked up, and the L-Gen is closed. The pole is connected to the bit line of the fiscal (4)-bar, and the job selection: the body-source/drain is connected to the second of the _ bit line pair, and: The bit line pair ___ is more related to the _ double-sided charge trapping type, the -first adjacent line of the memory unit, and the % of the _ bit line pair is the second A second adjacent/row of the surface charge-type non-volatile memory unit, wherein the first a source/no pole connection of the top surface transistor of the adjacent row, to the second row of the ray, and a source/drain connection of the bottom selection transistor of the second row To the first one-degree of the associated bit line pair; The control gates of all the double-sided charge-trapping non-swing-memory cells of the array in the array of the 健 各 各 ( 四 四 四 四 四 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; 1_Line' each front squama is connected to the miscellaneous charge. Her type of forward characterization is at least one of the NAND series strings of the top unit. The top selects a gate of a plurality of lines of the transistor, reducing the load of the miscellaneous s. At least one of the bottom row of the NAND series string of the volatility unit is selected from the bottom of the transistor; the anode and the gate are separated from the bit line, which depends on the reduction factor line, and the voltage shift of the element Transferring to the selected double-sided charge-trapping non-volatile memory cell, thereby programming, reading, and erasing the captured charge, wherein the captured charge represents the double-sided charge selected by each of the selected 2008 200845014 a digital data bit in a charge trapping region of the 转发-type forward memory fresh element; and a sub-twist controller/, a reverse-to-sub-line, the top select line, and the bottom select line to shift characters Line operating voltage for the trapped charge Row selection, the program rules ^, read, and erase, wherein charge representative of the captured each of the selected charge trapping dual ^ Formula charge trapping non-volatile memory cell region of the data bits as many as the number of bits. 21) The non-volatile memory volume circuit as described in the scope of claim 2, wherein the sub-twist control | § comprises: - the word 70 thread-type ship view, raised side to generate __ light field - a very large planning voltage, wherein the voltage field is between the selected double-sided charge-trapping non-volatile body soap-pick-control pole, and the selection is light &quot;charge-captured forward-sense Between the i-channel regions, the hot carrier to be injected into the charge trapping region of the selected double-sided capture non-volatile memory cell is thus drawn from the channel region. ^ 22 · The non-volatile memory volume circuit described in the second paragraph of the patent application scope, the bit line controller includes: - the ^^^^^^^^^^^^^^^^^^^^^^ Volatility • The early source of the genius, providing the part of the multi-digit data bit, is difficult to achieve, and (4) the charge her area is set to represent the part of the plurality of digits. a first level of the hot carrier charge; and a second bit threaded planning voltage source providing the thin portion of the non-volatile memory fresh element to represent another portion of the plurality of digital data bits ^ Boundary adjustment electric red Dijon will be able to record the second level of the hot carrier charge in the far part of the bit. 23. The non-volatile memory volume circuit of claim 21, wherein the 2008 20081414 word line controller further comprises: - a word line read voltage source 'which generates a plurality of critical detection voltages One, to detect the selected double-sided charge ship error (four) sex note, single material, one of the critical electric x pressures, where the practiced critical electric grind is the part representing the plurality of digital data bits. The selected one of several critical adjustment voltages is generated. 24. The non-volatile memory volume circuit as described in claim 1, wherein the bit line controller further comprises: ', Ί and poles to generate 3', which generates a _ secret voltage level, Weiji The first and second strips of the voltage level passing through the pair of bit lines are selectively transferred to the first source and the second source, and depending on the t a charge level of 槪 to initiate the selected double-sided charge trapping non-volatile memory unit; a first-ground reference voltage generator 'for generating a ground reference voltage via which the first pair - the strip and the second strip are transferred to the first and second source embodiments; and - the sensing circuit, wherein (4) the spacer element is connected to the selected double-sided charge trapping non-volatile memory unit, and By means of the first and second strips of the bit line pair, the swaying state of the charge zone representing the multi-station data bit is pre-measured. The non-volatile memory volume circuit as described in claim 23, wherein the word line controller further comprises: ', a word line wipes away the Xia source, and the character line is connected to the chat. A double-sided charge trapping non-volatile memory cell providing a very large erase voltage for generating a voltage field, wherein the voltage field is between the double-sided charge trapping non-volatile memory cells of the chat The transport zone, and the control gate of the double-sided charge-trapping non-volatile memory cell selected by the 5th chamber, thus injecting into the charge trapping region, the double-sided charge trapping non-slip property to be selected from the 5 The hot carrier of the channel region of the body unit. 1 6 The non-volatile memory volume circuit of claim 1 , wherein the 200845014 bit line controller further comprises: applying the ground reference voltage to the first second ground reference voltage Generator, second drain/source. 27·如申谙真利铬囹筮who. 28.如申晴專利範圍第2γ項之非揮發性記憶體積體電路,盆中 • 該非常大的程式規劃電壓位準範圍從大約-6.0V至大約:;0·0ν,以造成28. For example, the non-volatile memory volume circuit of the 2γth item of Shen Qing patent range, the very large program planning voltage level ranges from about -6.0V to about:; 0·0ν, to cause 9.如申印專利範圍第22項所述之非揮發性記憶體積體電路,笪中 該複數個臨界調整電壓的電塵範圍從大約+1〇v至大約+6 〇ν,被 為區間’該區間足狗大以能確定該複數健多個數位資料位元該^ 一和第二都公。 ^ 3〇·如申請專利範圍f 23項所述之非揮發性記憶體積體電路,其中 該複數個臨界細電壓的電壓範圍從大約+2 〇v至大約+5 〇v,並被劃9. The non-volatile memory volume circuit of claim 22, wherein the plurality of critically adjusted voltages of the electric dust range from about +1 〇 v to about +6 〇 ν, being the interval ' The interval foot dog is large enough to determine the plurality of digit data bits of the plurality of digits. ^ 3〇. The non-volatile memory volume circuit of claim 23, wherein the plurality of critical thin voltages range from about +2 〇v to about +5 〇v, and are drawn 31·如申請專利範圍第30項所述之非揮發性記憶體積體電路,其中 1汲極電Μ位準必需為-電壓位準,其足夠大以克服該第—和第二電 荷捕捉區的臨界電壓,且不足以造成該雙面電荷捕捉式非揮發性= 體單元的軟寫。 &quot;^ 32·如申請專利範圍第25項所述之非揮發性記憶體積體電路,其中 該非常大的栻除電壓位準之範圍從大約+15V至大約+2〇ν,以遞增該雙 面電荷捕捉式非揮發性記憶體單元的該臨界電壓。 200845014 33 體 =1專她圍第33項所述之非揮發性記紐積體電路,其中 二Ili的程式規劃電壓位準範圍從大約+6·〇ν至大約+丽,以造成 s〜、、载子庄入為熱電洞注入該電荷捕捉層。 35. 利範圍第22項所述之非揮發性記憶體積體電路,其中 ❿ =數^界調整電壓的電壓範大約擔至大約撕,被劃分為 和第二^狀夠大&quot;^決定該複數個該多健位資料位元的該第一 如二ί專她圍第23項所述之非揮發性記紐積體電路,盆中 臨界躺賴的賴翻從大約_廣至大約·5鄭 為&amp;刀該複數個程式規劃臨界電壓的遞增量。 一 =申明專利細第%項所述之非揮發性記憶體積體電路, “沒極電壓位準必f為―電壓辦 ’、 荷捕捉區的臨界電壓,且不足以造 弟—和弟二電 體單元的軟寫。 从“緣面铸她式非揮發性記憶 38·如申晴專利範圍第%項所述之非揮發性記憶體積體電路, Γ〜t的Ϊ除電壓位準範圍從大約_15·ον至大約_20卿,_低妒 面包何捕捉式非揮發性記憶體單元的該臨界電壓。 _^又 39· 一種形成非揮制生記憶體障列之方法,其包含以下步驟· 提供複荷槪 &lt; 轉發倾憶體單元; 62 200845014 將複數個雙面電荷槪式非揮發性記憶體單元按列和行配置; 位於各行亡的該雙面電荷捕捉式非揮發性記憶體單元形成至少雔 面電荷捕捉式非揮發性記憶體單元組; 又 配置該連接成為雙面電荷捕捉式非揮發性記憶體單元之咖^ 串,各NAND串聯串具有一頂部選擇電晶體和一底吾 : 連接複數她鱗,峨储概 ,目繼細輸θ_—源極/汲極 連接至違有關的位凡線對中的第-條,並使該底部 位元線對中的第二條,且:二: 的條更與—雙面電荷她式轉發性記憶體單元 :弟-相翁錢,以及財_位元騎巾的該第二停更與該 ,面電,捕捉式非揮發性記舰單元的_第二 二 1:=;ΐτ綱擇電晶體的一源極/沒極連接至該= 、’、、、、、〜弟一條,並且δ亥第一相鄰行的該底部選擇電晶體的一 源極/祕連接至該有_位元雜巾的鱗—條;以及 、 連接-位猶控制||頭·她錢’躲元_作賴轉 式非揮發性記憶體單元,用於將被捕捉的電荷進行 的雙面電荷捕捉式非揮發性記憶體單元之電荷捕 數擇 40·如申請專利範圍第39項所述之方法,更包括町步驟: 提供複數個字元線; 將各字元線觸魏姆面電荷捕㈣轉發性記髓單元中的 相連接; , 提供複數個頂部選擇線; 將各頂部選擇線連接爲雙面電荷概式轉雜雜體單元的 NAND串聯串之至少-個的該頂部選擇電晶體的—閉極. 提供複數個底部選擇線; ’ 63 200845014 將各底。p廷擇線連接至該雙面電荷捕捉式非揮發性記憶體單元的 =AND㈣串之至少_個的該底部選擇電晶體的—閘極;以及 將-,元線控繼連接·字元線擇線、以及該底部選擇 線,以,轉字元線操作電s,用於將被歡的電荷進行選擇、程 規』朴項取、以及拭除,其_該被捕捉的電荷代表各該等選擇的雔 面電荷捕捉式非揮發性記憶體單元之電荷捕捉區中之又 料位元。 /双征貝 41·如申請專利範圍第39項所述之方法,其中 該位元線控制器包含: 一第厂位元線程式規劃電壓源,其經該位元線對的該第一條至該頂部 選擇電晶體的該源極/汲極,對該選擇的雙面電荷捕捉式非揮發性記 憶體單元的一第一源極/沒極提供代表該多個數位資料位元的X一部 分的複數個臨界調整電壓之一,而將電荷捕捉區設定至代表該多°個 數位資料位元的該部分的該熱載子電荷的一第一位準;以及/ -第-位元線程式規劃電壓源’為該選擇的雙面電荷捕捉式非揮發性 圯憶體單元的一第二源極/汲極提供代表該多個婁文位資料位元的另 一部分的第二該複數個臨界調整電壓,而將電荷捕捉區設定至代表 該多個數位資料位元的該部分的該熱載子電荷的一第二位準。义 42·如申請專利範圍第39項所述之方法,其中 _ 該字元線控制器包含: 一字元線程式規劃電壓源,提供用於產生一電壓場的一非常大的程式 規劃電壓,其中該電壓場介於該選擇的雙面電荷捕捉式非揮發性 體單元的一控制閘極、與該選擇的雙面電荷捕捉式非揮發性記憶體單 元的一通道區之間,而自該通道區擷取將被注入該選擇的雙面電荷捕 捉式非揮發性記憶體單元的一電荷捕捉區的熱載子。 43·如申請專利範圍第39項所述之方法,其中 64 200845014 該字元線控制器包含: -第-選麟减賴電觀,財辦地提供—魅的域擇電遂, 该電壓被移轉至該頂部選擇線,以啟動該雙面電荷捕捉式非揮發性 記憶體單το輯翻NAND㈣㈣獅部聰電晶體;以及 -第二選擇絲式規劃電慶源,其有選擇地提供一適度的大選擇電 麼’該電壓被移轉至該底部選擇線,以啟動該雙面電荷捕捉式非揮 發性§己憶體單元的選擇的NAND串聯串的該底部選擇電晶體。 44·如申請專利範圍第39項所述之方法,其中 該字元線控制器更包括: ^ 字元線讀取電^,其產生複數舰界侧電壓之…以細該選 擇的雙面電荷捕捉式非揮發性記憶體單元的複數個程式規劃臨界 電壓之-,其中該程式規劃臨界電壓為代表多健位將位元的該 部分的該複數個臨界調整電壓中選擇的一個所產生;以及 該位元線控制器更包括: 項取沒極電壓產生器,其產生_汲極電壓鲜,該酿電壓位準經 由雜兀2對的鮮-條和第二條被有選擇地轉至該第一沒極/ 源極和該第二祕/雜,碌決於該電荷概_被捕捉的電荷 位準,以啟動該選擇的雙面電荷捕捉式非揮發性記憶體單元; 第-接地參考電壓產m於產生_接地參考電壓,該接地參考 電壓經該位元_職第-條和第二條、被有響地雜至該第一 和第二及極/源極;以及 -感應電路’其經誠對位元線被連接至該選擇的雙面電荷捕捉式非 揮發性5己憶體單70,以藉由該位元線對的該第一條和冑二條細代 表該多個數«料位元的該電荷捕捉__程式規劃狀態。 45*如申請專利範圍第39項所述之方法,其中 該字元線控制器更包括: 一字元線齡電舰,提棚於產生—賴場的—非社的拭除電 65 200845014 壓,其中該電麟位於該雙面電荷捕捉式非揮發性記 通道區、與該雙面電荷捕捉式非揮發性記賴 ^控^ 憶體單元的該通道區的熱載子;以及⑦订捕捉式非揮發性記 該位元、線控制器更包括: 一第第Hiir堅產生器’用於將該接地參考電壓施加至該第-和 46·如申請專利範圍第42項所述之方法,其中 該雙面電荷捕捉式非揮發性記憶體單元為一〜通道記憶體單元 47·如申請專利範圍第46項所述之方法,其中 以造成 該非常大的程式規劃電壓位準軸從^'約_6〇v至大約撕V 該熱載子注入為熱電洞注入該電荷捕捉層。 48·如申請專利範圍第46項所述之方法,其中 該複數舰界纖電壓的電壓範圍從大約+ι〇ν至大約+ 一和第二部分 為尸,該區間足夠大以能決定該複數個該多個數位資料位元= 49·如申請專利範圍第44項所述之方法,其中 =數個臨界_電壓的麵範雖’大約+2卿至大如 / 刀為區分該複數個程式規劃臨界電壓的遞增量。、.亚被^ 50·如申請專利範圍第49項所述之方法,其中 為::::成服該第-和第二電 體單元的軟寫。 足心成該雙面電何捕捉式非揮發性記憶 66 200845014 51.如申請專利範圍第45項所述之方法,其中 該非常大的拭除電壓位準範圍從大約也力以大約+2謂,以遞增該 雙面電荷捕捉式非揮發性記憶體單元的該臨界電壓。 52·如申請專利範圍第42項所述之方法,其中 該雙面電荷捕捉式非揮發性記憶體單元為—p_通道記憶體單元。 53·如申請專利範圍第52項所述之方法,其中 大的程式規劃電壓位準範圍從大約+6娜至大約+削V,以使該 熟載子注入為熱電洞注入該電荷捕捉層。 54·如申請專利範圍第52項所述之方法,其中 和第二部分 g數壓的電_圍從大則脚至大約·6撕,被劃分為 」^間足夠大以能決定該複數她多個數位:身料位元的該第一 55·如申請專利範圍第44項所述之方法,其中 臨界伽顚的電壓難從德至大約挪,並被劃分 為區刀該複數個程式規劃臨界電壓的遞增量。 56·如申請專利範圍第55項所述之方法,其中 =及極電齡準必需為餘準,其錢大以克雌第 i了電,且不足以造成該雙面電荷捕捉式非揮發性^ 如申請專利範圍第52項所述之方法,其中 該非常大的拭除電壓位準範圍從大約_ls 〇v至大約 面電荷捕減轉雜記憶辟摘雜界電屋。 -20.0V,以降低該雙 67 57.31. The non-volatile memory volume circuit of claim 30, wherein the 1 汲 electrode level must be a voltage level that is large enough to overcome the first and second charge trapping regions. The threshold voltage is not sufficient to cause soft writing of the double-sided charge trapping non-volatile = body unit. &quot;^ 32. The non-volatile memory volume circuit of claim 25, wherein the very large voltage removal level ranges from about +15V to about +2〇ν to increase the double The threshold voltage of the surface charge trapping non-volatile memory cell. 200845014 33 body = 1 she specializes in the non-volatile memory integrated circuit described in Item 33, in which the programming order voltage level of the two Ili ranges from approximately +6·〇ν to approximately +L, to cause s~, The carrier is injected into the thermal trap to inject the charge trapping layer. 35. The non-volatile memory volume circuit according to Item 22, wherein the voltage range of the ❿=number boundary voltage is approximately torn, and is divided into a second shape and is large enough. The first plurality of the plurality of health data bits are the first non-volatile memory circuit described in item 23, and the threshold in the basin is about _ wide to about 5. Zheng Wei & Knife The number of programs is programmed to increase the threshold voltage. A = the non-volatile memory volume circuit described in the patent item 5%, "The voltage level of the immersion voltage must be "voltage", the threshold voltage of the charge capture zone, and not enough to make the brother - and the second The soft writing of the body unit. From the "facial surface cast her type of non-volatile memory 38.", as described in the non-volatile memory volume circuit described in the ninth patent range of Shen Qing, the voltage level range of Γ~t is from approximately _15·ον to about _20 qing, _ low-lying bread, the threshold voltage of the capture non-volatile memory unit. _^又39· A method for forming a non-swept memory barrier comprising the following steps: providing a complex 槪 &lt; forwarding a memory unit; 62 200845014 a plurality of double-sided charge 非 non-volatile memory The unit is arranged in columns and rows; the double-sided charge trapping non-volatile memory unit located in each row of the dead forms at least a face charge trapping non-volatile memory unit group; and the connection is configured to be double-sided charge trapping non-volatile The memory unit of the memory unit, each NAND series string has a top selection transistor and a bottom: connecting multiple scales of her scale, 峨 概 , , , , , — — — — _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Where the first pair of the line pair, and the second line of the bottom bit line pair, and: the second: the strip is more than - double-sided charge her type of forward memory unit: brother - money, and The second stop of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ = , ', , , , , ~ brother one, and the first adjacent row of δ Hai The part selects a source/secret of the transistor to connect to the scale-strip with the _bit rag; and, the connection-position is still controlled||head·her money' hides the _ 赖 式 非 non-volatile memory a unit for charge trapping of a double-sided charge trapping non-volatile memory unit for carrying a trapped charge. 40. The method of claim 39, further comprising the step of: providing a plurality of words a line connecting the word lines to the Weim surface charge trapping (4) in the transmissive recording unit; providing a plurality of top selection lines; connecting the top selection lines to the double-sided charge generalized hetero-cell unit At least one of the NAND series strings is selected from the top of the transistor - a closed pole. A plurality of bottom select lines are provided; '63 200845014 will be each bottom. a t-wire is connected to at least one of the =AND (four) strings of the double-sided charge-trapping non-volatile memory unit - the gate of the bottom selection transistor; and the -, the meta-wire is connected to the word line Selecting the line, and the bottom selection line, to turn the word line operation power s, for selecting the charged charge, the rule rule, and the erase, the captured charge represents each A re-primed bit in the charge trapping region of the selected surface charge trapping non-volatile memory cell. The method of claim 39, wherein the bit line controller comprises: a first plant bit threaded planning voltage source, the first piece of the bit line pair Selecting the source/drain of the transistor to the top portion, and providing a first source/no pole of the selected double-sided charge trapping non-volatile memory unit with a portion of X representing the plurality of digital data bits One of a plurality of threshold adjustment voltages, and the charge trapping region is set to a first level of the hot carrier charge representing the portion of the plurality of digit data bits; and / - the first bit threaded The planning voltage source 'provides a second source/drain of the selected double-sided charge trapping non-volatile memory unit with a second plurality of thresholds representing another portion of the plurality of data bits The voltage is adjusted and the charge trapping region is set to a second level of the hot carrier charge representative of the portion of the plurality of digital data bits. The method of claim 39, wherein the word line controller comprises: a character-threaded planning voltage source providing a very large programming voltage for generating a voltage field, Wherein the voltage field is between a control gate of the selected double-sided charge trapping non-volatile body unit and a channel region of the selected double-sided charge trapping non-volatile memory unit, and The channel region captures a hot carrier that will be injected into a charge trapping region of the selected double-sided charge trapping non-volatile memory cell. 43. The method of claim 39, wherein 64 200845014 the word line controller comprises: - a first-choice-reduced power view, a financially provided-character domain selection, the voltage is Moving to the top selection line to activate the double-sided charge-trapping non-volatile memory single τ 翻 翻 NAND (4) (4) lion's Cong transistor; and - the second selection wire-type planning electric source, which selectively provides a Moderately large selection of electricity 'This voltage is shifted to the bottom select line to activate the bottom select transistor of the selected NAND series string of the double-sided charge trapping non-volatile memory cell. 44. The method of claim 39, wherein the word line controller further comprises: ^ a word line reading electric^, which generates a plurality of ballast side voltages to finely select the double-sided electric charge Capturing a plurality of programming threshold voltages of the non-volatile memory cells, wherein the program planning threshold voltage is generated by a selected one of the plurality of threshold adjustment voltages representing the portion of the bits of the plurality of bits; The bit line controller further includes: a term takeout pole voltage generator that generates a _bungee voltage fresh, the brewing voltage level being selectively transferred to the fresh bar and the second bar of the miscellaneous pair 2 a first immersive/source and the second crypto/cell, depending on the charge level of the charge _ captured, to initiate the selected double-sided charge trapping non-volatile memory unit; The voltage is generated by generating a ground reference voltage, the ground reference voltage is audibly mixed to the first and second sum poles/sources via the bit_position and the second strip; and the sensing circuit 'The true line of the bit line is connected to the selected double-sided charge Formula catch nonvolatile memory 5 has a single body 70, to the first bit line pair by the helmet and two fine represents the charge number of the plurality of «__ feed-bit capture state planning program. 45* The method of claim 39, wherein the word line controller further comprises: a character line-age electric ship, and the shed is generated--the non-social erasing power 65 200845014 pressure, Wherein the electric lining is located in the double-sided charge trapping non-volatile recording channel region, and the hot carrier of the channel region of the double-sided charge trapping non-volatile recording control unit; and the 7-capture capture type The non-volatile recording of the bit and the line controller further comprises: a first Hiir generator </ RTI> for applying the ground reference voltage to the method described in claim 42 and wherein the method of claim 42 is wherein The double-sided charge trapping non-volatile memory unit is a one-channel memory unit 47. The method of claim 46, wherein the voltage level axis is caused by the very large program. _6〇v to about torn V This hot carrier injection injects the charge trapping layer into the thermal cavity. 48. The method of claim 46, wherein the voltage of the plurality of ship boundary fibers ranges from about +ι〇ν to about +1 and the second portion is a corpse, the interval being large enough to determine the plural The plurality of digit data bits = 49. The method described in claim 44, wherein = a number of critical _ voltages of the face are 'about +2 qing to Daru / knife to distinguish the plurality of programs Plan the incremental amount of threshold voltage. The method described in claim 49, wherein:::: is to serve the soft writing of the first and second electric units. The method of claim 45, wherein the very large erasing voltage level ranges from about 2 to about 2 To increment the threshold voltage of the double-sided charge trapping non-volatile memory cell. 52. The method of claim 42, wherein the double-sided charge trapping non-volatile memory unit is a -p_channel memory unit. 53. The method of claim 52, wherein the large program programming voltage level ranges from about +6 nas to about + diced V to implant the cooked carrier into the thermoelectric hole to inject the charge trapping layer. 54. The method of claim 52, wherein the electric pressure of the second part of the g-pressure is divided from a large foot to about 6 and is divided into "m" to determine the plural. The plurality of digits: the method of claim 44, wherein the voltage of the critical gamma is difficult to change from German to about, and is divided into zone cutters. The amount of increase in the threshold voltage. 56. The method of claim 55, wherein = and the age of the electric potential must be a margin, and the money is greater than that of the female, and is insufficient to cause the double-sided charge trapping non-volatile ^ The method of claim 52, wherein the very large erasing voltage level ranges from about _ls 〇v to about the surface charge capture memory. -20.0V to lower the double 67 57.
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