i 200828092 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於接觸人指或觸摸筆等就可進行資訊 入的觸摸板顯示裝置。 【先前技術】 接觸人指或觸摸筆等就可進行資訊的輸入的觸摸 裝置，是可說在進行畫面顯示的顯示器也兼具資訊的 功能者，在金融機關的現金分配器，車站的售票機， 手冊等，作爲各功能的人爲介面在各領域廣泛地被使. 觸摸板顯示裝置，是可定義爲持續進行畫面顯示 由對於表面的接觸來進行資訊的輸入者，惟原理上有 不相同的型式。觸摸板的代表性者，爲電阻膜式者， 阻膜式作爲例子，針對於習知的觸摸板顯示裝置加以 。第1 2圖是表示電阻膜式的習知的觸摸板顯示裝置 面槪略圖。 表示於第1 2圖的觸摸板顯示裝置是具備：進行 顯示的顯示單元1，及設置於顯示單元1的前側，施 觸而進行資訊的輸入的觸摸板單元η。顯示單元1 晶顯示器的情形較多，惟也有採用CRT顯示器等。 於第1 2圖的習知例，爲液晶顯示器的情形，成爲於 液晶基板1 9 1、1 9 2之間封入液晶1 9 3的構造。又， 板單元11是以接合部190接合一對透明的面板194、 成爲黏貼的構造，而在內部封入有多數間隔壁1 96。 的輸 顯示 輸入 電子 用。 而藉 幾種 以電 說明 的斷 畫面 以接 是液 表不 一對 觸f吴 195 -5- 200828092 (2) 在觸摸板單元1 1中，位於前面側（操作人員所在的 一側）的面板（以下’稱爲前面面板）194，是成爲厚度 薄到0.2mm程度者。前面面板1 94是也有玻璃製的情形 ，惟也有如以PET (聚對苯二甲酸乙二醇酯）的透明樹脂 所形成。前面面板194是厚度薄而柔軟之故，因而稱爲薄 膜或薄片者也有適用的情形。 相對於前面面板194的面板（以下，主面板）195， 是確保強度之故，因而厚度成爲1 · 1 mm程度的透明的玻 璃板。在一對面板194、195的相對面，設有如以IT Ο ( Indium Tin Oxide)的透明導電膜所形成的電極柵極197 、1 9 8。接觸前面面板1 94施以按壓，則在被按壓的部位 ，使得一對面板194、195的電極柵極197、198接觸而流 動電流。檢測該電流，就可知道前面面板1 94的那一部位 被接觸的位置。又，觸摸板單元1 1是對於顯示單元1經 由固定部199被固定在端部。 非專利文獻1 :河村正行著「認識觸摸板」（股份有 % 限公司製電波新聞社發行） 【發明內容】 上述的觸摸板是謀求提高導電膜的光透過性等的技術 改良，而在視認性，操作性等上優異者變多。隨著此，作 爲各種資訊機器的人爲介面普遍地進步。又，如手機的小 型資訊機器也被承載，惟在薄型化上有課題。 以上述電阻膜式的觸摸板顯示裝置作爲例子來說明此 -6- 200828092 (3) 課題。在上述觸摸板顯示裝置中，前面面板是使用〇.2mm 程度的極薄者，惟主面板是成爲1 . 1 mm程度的相當程度 厚度。該主要理由是爲了確保機器性強度。觸摸板顯示裝 置是以手指等按壓而進行資訊輸入者之故，因而能耐於重 複按壓般地，觸摸板單元是必須具備某程度的剛性或機械 式耐久性。所以，主面板是玻璃製，具有1 . 1 mm程度的 厚度。因此，作爲觸摸板單元全體，厚度達到1.6mm程 度。 如此地，在習知的觸摸板顯示裝置中，在觸摸板單元 的部分因厚度未能形成較薄，因此，雖有如手機的電子機 器被要求薄型化，惟全體會變厚。 本發明是爲了解決此種課題而創作者，可提供可薄型 化的觸摸板顯示裝置的構造者，具有提供適合地承載於被 要求薄型化的如手機的電子機器的觸摸板顯示裝置的意義 者。 爲了解決上述課題，本案發明的申請專利範圍第1項 所述的發明，是一種觸摸板顯示裝置，屬於具備：進行畫 面顯示的顯示單元’及設於顯示單元的前側，施以接觸就 可進行資訊輸入的觸摸板單元的觸摸板顯示裝置，其特徵 爲 · 觸摸板單元是藉由被全面塗佈於顯示單元的前面的透 明黏接劑被黏接， 觸摸板單兀是具有覆蓋顯示單元的狀態的至少一枚玻 璃面板’該玻璃面板是噴射洗脫液而以比自重所產生的加 200828092 (4) 速度還大的加速度噴上洗脫液被衝擊，表面被機械硏磨， 具有厚度爲0.5mm以下，表面最大粗糙度爲0.5μηι以下 的平坦性。 又，爲了解決上述課題，申請專利範圍第2項所述的 發明，是一種觸摸板單元製造方法，屬於使用於施以接觸 就可進行資訊輸入的觸摸板顯示裝置，而設於進行畫像顯 示的顯示單元的前側的觸摸板單元的製造方法，其特徵爲 觸摸板單元是具備成爲覆蓋顯示單元的狀態的至少一 枚玻璃面板， 具有朝玻璃面板的表面噴射洗脫液而以比自重所產生 的加速度還大的加速度噴上洗脫液被衝擊，來進行機械硏 磨玻璃面板的表面，將厚度削減成〇 · 5mm以下的削減工 程，藉由削減工程的機械硏磨，將玻璃面板的表面的最大 粗糙度作成〇·5μιη以下。 又，爲了解決上述課題，申請專利範圍第3項所述的 發明是在上述申請專利範圍第2項的構成中，上述洗脫液 所產生的上述表面的衝擊之際的壓力，是具有在〇.5kg/ cm2至3.5kg / cm2的範圍的構成。 又，爲了解決上述課題，申請專利範圍第4項所述的 發明是在上述申請專利範圍第2項或第3項的構成中，上 述洗脫液是具有氟酸的構成。 又，爲了解決上述課題，申請專利範圍第5項所述的 發明是在上述申請專利範圍第2項至第4項中任一項構成 -8- 200828092 (5) 中，從開始硏磨之際的上述噴嘴的噴射孔至上述玻璃面板 的表面的距離，是具有成爲5mm以上1 00mm以下的構成 〇 又，爲了解決上述課題，申請專利範圍第6項所述的 發明是在上述申請專利範圍第2項至第5項中任一項構成 中，上述噴嘴的各噴射孔，是排列設置於與上述玻璃面板 的表面平行的方向， 在上述機械硏磨中，從上述複數噴射孔所噴射的洗脫 液，在與上述玻璃面板的表面平行之面觀看之際，對於各 噴射孔的排列方向朝斜方向擴展般地衝擊上述玻璃面板的 表面，而對於上述噴嘴的噴射孔機械式相對地移動上述玻 璃面板，而在從鄰接的噴嘴所噴射的洗脫液的擴展端部， 作成上述玻璃面板重複而受到洗脫液所產生的衝擊，將上 述玻璃面板的表面各點藉由洗脫液均勻地衝擊來進行硏磨 〇 又，爲了解決上述課題，申請專利範圍第7項所述的 發明，是一種玻璃硏磨機，屬於使用於申請專利範圍第2 項所述的觸摸板單元製造方法的玻璃硏磨機，其特徵爲： 具備： 在內部進行外面機械硏磨處理的處理室；及 於處理室內的所定位置垂直地保持上述玻璃面板的保 持具；及 具有將洗脫玻璃面板的表面材料的洗脫液朝被保持於 保持具的玻璃面板的該表面噴射的噴射孔的噴嘴；及 -9 - 200828092 (6) 將洗脫液供給於噴嘴的洗脫液供給系， 上述洗脫液供給系是附與比自重所產生的加速度還大 的加速度，將洗脫液噴在上述外面而衝擊上述外面，利用 衝擊所產生的物理性作用而以可硏磨上述外面的壓力，將 洗脫液供給於上述噴嘴者， 又具備對於噴嘴的噴射孔，將保持具機械式相對地移 動’使得洗脫液均勻地供給於玻璃面板的表面各領域的移 動機構。 如下所述地，依照本案的各申請專利範圍所述的發明 ，可將玻璃面板的強度充分地持續確保而可將厚度變薄且 可提高表面平坦性。所以，可提供適用於承載於被要求薄 型化的如手機的電子機器的觸摸板顯示裝置。 【實施方式】 針對於實施本案發明所用的最佳形態（以下，稱爲實 施形態），一面參照圖式一面加以說明。 第1圖是表示本案發明的實施形態的觸摸板顯示裝置 的斷面槪略圖。表示於第1圖的觸摸板顯示裝置是具備： 進行畫面顯示的顯示單元1，及設於顯示單元1的前側， 施以接觸就可進行資訊輸入的觸摸板單元1 1。 作爲顯示單元1，在本實施形態中，液晶顯示器被假 設，於一對玻璃基板1 9 1、1 92之間封入液晶丨93的構造 。在本實施形態中，尤其是，薄型液晶顯示器適用地被採 用，惟與在手機等被採用者同樣也可以之故，因而省略詳 -10 _ 200828092 (7) 細說明。又，除了液晶顯示器之外，在有機E L顯示器等 也被開發薄型者之故，因而也使用如此些者。 觸摸板單元11是具有覆蓋顯示單元1的至少一枚玻 璃面板。在本實施形態中，觸摸板單元11是成爲電阻膜 式者，具有一對玻璃面板1 2、1 3。在一對玻璃面板1 2、 1 3的相對面，設有以如IΤ Ο的透明導電膜所形成的電極 柵極14、15。 電極柵極1 4、1 5是藉由如濺鍍的成膜技術製作透明 導電膜之後，藉由微影成像進行圖案化所形成。電極柵極 1 4、1 5的材料或構造，是與習知的觸摸板單元同樣就可 以，所以省略詳細說明。又，在電極柵極14、1 5的表面 也有形成凹凸的情形。此爲在被接觸時用以容易接觸到電 極柵極1 4、1 5。 一對玻璃面板1 2、1 3，是硼矽酸玻璃或鈉鈣玻璃等 。一對玻璃面板1 2、1 3，一面介著具有彈性的間隔壁1 6 ，一面以接合邰1 〇加以黏接就被黏貼。又，在接合部1 〇 的黏接，重疊於顯示單元1所產生的顯示領域的情形等， 視需要使用著透明黏接劑。針對於間隔壁1 6及黏貼，也 與習知的玻璃面板單元同樣就可以，所以省略詳細說明。 又，間隔壁是也有混合設置於接合部1 〇的情形。 本實施形態的觸摸板單元11的大特徵點之一，是各 玻璃面板12、1 3持續保持所需要的強度、厚度（在第1 圖中以tl、t2表示）變薄至〇.5mm以下，且最大粗糙度 (在第1圖中以Rmax表示）具有所謂〇 5μπι以下的表面 -11 - 200828092 (8) 平坦性之處。以下，針對於此點加以說明。 如上所述地，玻璃板是厚度變薄則強度一定會降低。 在本實施形態中，採用了藉由某一特殊加工來削減玻璃板 的厚度而能確保所需要的強度與表面平坦性者。 第2圖是槪略地表示針對於製作圖示於第1圖的玻璃 面板1 2、1 3之際的加工方法的圖式。本實施形態的玻璃 面板1 2、1 3，是噴射洗脫液以比自重所產生的加速度還 ， 大的加速度噴上洗脫液而被衝擊，就可機械硏磨表面。又 ，爲了更均勻地進行硏磨，一面將玻璃面板1 2、1 3，對 於噴射洗脫液的噴嘴4的噴射孔相對地機械式地移動’一 面以所噴射的洗脫液衝擊玻璃面板1 2、1 3。 又，「機械硏磨」是合倂具有指利用以所謂噴上壓力 的洗脫液的物理性作用的硏磨的意思，及指在硏磨之際玻 璃面板1 2、1 3機械式地移動的意思。「機械式移動」是 指「利用機械進行移動」的意思。 作爲洗脫液，使用著如氟酸的強酸。氟酸的情形’例 如對於水1〇〇稀釋成1〇至50%程度（體積百分比）而被 使用。衝擊壓力是在黏貼玻璃面板1 2、1 3的表面上爲 0.5kg/ cm2 至 3.5kg / cm2。 藉由從噴嘴4所噴射的洗脫液被衝擊的外面’是被洗 脫液所洗脫，而藉由洗脫液的衝擊被流出。藉由此’表面 被機械硏磨，使得玻璃面板1 2、1 3的厚度變薄。 如此地，採用使用洗脫液的機械硏磨’則可充分地持 續確保玻璃面板1 2、1 3的強度而將厚度變薄且可提高表 -12- 200828092 (9) 面平坦性。針對於此點使用第3圖加以說明。第3圖是表 示針對於使用洗脫液的機械硏磨的作用效果的圖式。 一*般玻璃是在破損上軟弱’惟由其理由之一’是存在 於表面的微小裂縫。作爲玻璃板的製法，浮動法爲主流， 而熔融法、輸入法等也被實用化。在任何情形所製造的玻 璃板的表面，如第3 ( 1 )圖所示地形成有多數小傷痕（ 微小裂縫）1 〇〇。所以，若欲製造薄厚度者，則強度一定 變弱。 一方面，如第3 ( 2 )圖所示地，藉由使用如上述的 洗脫液的機械硏磨加工，若將厚度成爲較薄，則洗脫形成 有微小裂縫1 00的表面層而被除去。因此，削減後的玻璃 面板1 2、1 3的表面，是成爲沒有微小裂縫的狀態。因此 ，即使厚度變薄，也可確保充分的強度。又，作爲將玻璃 板的厚度變薄的技術，有熱軋法等，惟在此種方法中，於 變薄的玻璃板的表面依然也形成有微小裂縫之故，因而無 法確保充分的強度。 換言之，在現狀的玻璃板的製造方法及玻璃板的削減 加工方法中，若未依照使用如本實施形態的洗脫液的機械 硏磨，則於表面未形成有微小裂縫的狀態下，不可能得到 最大粗糙度0.5 μπι以下的玻璃板。因此，藉由使用洗脫液 的機械硏磨法作爲厚度0.5 mm以下，最大粗糙度〇·5μτη 以下的玻璃板，及不依靠使用洗脫液的機械硏磨法作爲厚 度0.5mm以下，最大粗糙度〇.5 μπι以下的玻璃板，是藉 由於表面是否形成有微小裂縫就可明確地分明。 -13- 200828092 (10) 又，表面平坦性是如後述地適當選定噴嘴4的配置或 噴射強度就可確保。若表面平坦性不好，則光線通過玻璃 面板1 2、1 3之際，微妙地折射光線，以此作爲原因會使 視認性變差。亦即，對於觀看觸摸板顯示裝置者，會在畫 面上有不均稱的感覺，依照本實施形態，最大粗糙度 Rmax爲0.5 μιη以下之故，因而沒有此種問題。又，最大 粗糙度爲0.1 μηι以下更佳，若使用後述的玻璃硏磨機，也 , 可實現0.1 μιη以下的最大粗糙度。 又，玻璃面板1 2、1 3，是因應於所承載的機器的薄 型化的要求，愈薄愈佳。但由強度上有界限，雖也依材質 等，惟厚度的下限是0.1mm程度，作成0.1mm以上的厚 度較佳。 本實施形態的另一大特徵處，是上述的觸摸板單元 1 1對於顯示單元1藉由全面黏接被固定之處。亦即，如 第1圖所示地，觸摸板單元1 1與顯示單元1，是以附著 ： 黏接材17的狀態下被黏接於界面的全面。 作爲該黏接材1 7，覆蓋顯示單元1的前面者之故， 因而採用具有充分的光透過性者。例如可使日本協立化學 產業股份有限公司所製的XVL-90。黏接材17的層厚是 3 0 μ m至1 0 0 μ m程度。黏接材1 7的層，是持Ih可確保所 必需的黏接強度儘量作成較薄，作成50μηι至70μιη的範 圍較佳。 如此地，觸摸板單元1 1與顯示單元1是藉由光透過 性黏接材1 7被全面黏接之故，因而觸摸板單元1 1的強度 -14- 200828092 (11) 變高。如表示於第1 2圖的習知所述地，觸摸板單元1 1對 於顯示單元1以固定部i 99固定在端部，於兩者之間形成 有空洞的情形，爲了耐於觸摸時的推壓力，主面板1 9 5是 必須作成相等程度較厚。一方面，在本實施形態中，觸摸 板單元1 1對於顯示單元1被全面黏接之故，因而即使主 面板厚度變薄，也確保充分的耐觸摸強度。亦即，觸摸之 際的推壓力，是成爲在顯示單元1所接受，而將顯示單元 1適當地安裝對於機器，就成爲可確保充分的耐觸摸強度 〇 依照上述實施形態的觸摸板顯示裝置，玻璃面板1 2 、13極薄到〇.5mm以下之故，因而觸摸板單元11全體的 厚度也可作成較薄，結果裝置全體的厚度也可作成較薄。 具體而言，當將各玻璃面板12、13厚度作成〇.2mm，則 觸摸板單元1 1的厚度是成爲〇.5mm程度。又，作爲顯示 單元1，若採用薄型液晶顯示器，則觸摸板顯示裝置全體 的厚度是可薄至例如1 . 6 m m程度。所以，作爲如手機的 薄型化被要求的電子機器的人爲介面可適當地採用。 這時候，各玻璃面板1 2、1 3是藉由使用洗脫液的機 械硏磨法被削減之故，因而即使在表面沒有微小裂縫，變 薄也可確保充分強度。又，觸摸板單元11與顯不單兀1 是藉由透明黏接材1 7被全面黏接之故，因而在此點，觸 摸板單元1 1的強度也變高。又，玻璃面板1 2、1 3的最大 粗糙度高至〇·5 μιη以下，則提供無顯示不均勻，且高視認 性的觸摸板顯示裝置。 -15- 200828092 (12) 以下，針對於電阻膜式以外的觸摸板顯示裝置的實施 形態加以說明。第4圖是表示針對於電阻膜式以外的觸摸 板顯示裝置的實施形態的槪略圖。 在第4(1)圖，表示靜電容量式的觸摸板單元的斷 面槪略圖。如第4(1)圖所示地，在靜電容量式中，觸 摸板單元是由玻璃面板1 01，及形成於玻璃面板1 〇 1的表 面的導電膜102，及形成於導電膜102，及形成於導電膜 102上的表面膜103所構成。表面膜103是反射防止膜或 防污膜。也有於玻璃面板1 〇 1的背面形成有屏蔽用的導電 膜所形成的情形。 在此種靜電容量式的觸摸板單元，沿著玻璃面板1 0 1 施加著低電場，捕捉流在形成於觸摸的人類手指與玻璃面 板1 〇 1之間的電容器的微弱充電電流而進行資訊的輸入。 在本實施形態的觸摸板單元中，玻璃面板1 0 1是與上述的 電阻膜式的主面板同樣地，噴射洗脫液而利用比自重所致 的加速度還大的加速度噴上洗脫液被衝擊，會使表面被機 械硏磨，具有厚度爲〇.5mm以下，表面最大粗糙度爲 0.5 μπι以下的平坦性。 又’在第4 ( 2a )圖，表示表面彈性波式的觸摸板單 元的平面槪略圖，而在第4 ( 2b )圖，表示表面彈性波式 的觸摸板單元的斷面槪略圖。如第4 ( 2a )圖所示地，表 面彈性波式的觸摸板單元，是於方形的玻璃面板1 04的隅 設有X方向發振子1 05，與該隅對角的隅設有Y方向發振 子106。又’在其他的隅設有X方向收訊子107與γ方向 -16- 200828092 (13) 收訊子1 08。又，沿著玻璃面板1 〇4的周緣形成有反射行 列1 09。反射行列1 09是對於X方向或Y方向排列具有 45度角度的的多數共振子所配置者。在玻璃面板104的 表面，爲了反射防止或防污形成有表面膜的情形。 當從各發振子105、106發出超音波，一面通過反射 行列1 09傳送，一面90度反射朝方形內側方向傳送，作 爲彈性波擴展在玻璃面板1 〇4的表面。當以手指觸摸玻璃 , 面板104 (在表面膜形成於玻璃面板104上時，當觸摸其 表面膜），表面彈性波被收於手指，而達到收訊子的表面 彈性波是成爲較弱者。計測其弱彈性波達到的時間，可知 在那裏被觸摸，來進行資訊輸入。 此種表面彈性波式的觸摸板單元，玻璃面板1 04是也 成爲覆蓋顯示單元的狀態。該玻璃面板1 04是與上述各實 施形態同樣，噴射洗脫液而利用比自重所致的加速度還大 的加速度噴上洗脫液被衝擊，會使表面被機械硏磨，具有 厚度爲0.5mm以下，表面最大粗糙度爲〇·5μιη以下的平 坦性。 在第4(3)圖，表示著光學式觸摸板單元的斷面槪 略圖。光學式觸摸板單元是在玻璃面板1 1 〇的縱橫的四個 邊中在縱方向的一邊與橫方向的一邊設有發光器（通常是 LED ) 1 1 1，在縱橫的另一方的邊設有受光器1 12。當觸摸 玻璃面板11 〇的表面，則在被觸摸的位置光被遮蔽。因此 ，由對於受光器1 1 2的光的入射狀況可知在那個位置被觸 摸，藉由此可進行資訊輸入。 -17- 200828092 (14) 在本實施形態的光學式觸摸板單元，玻璃面板1 1 0是 也成爲覆蓋顯示單元的狀態。又，該玻璃面板11 〇是與上 述各實施形態同樣，噴射洗脫液而利用比自重所致的加速 度還大的加速度噴上洗脫液被衝擊，會使表面被機械硏磨 ，具有厚度爲0.5mm以下，表面最大粗糙度爲0.5μπι以 下的平坦性。 除了表示於第4圖的各實施形態之外，還知道有使用 < 觸摸筆的電磁感應式的觸摸板單元或以照相機攝影觸摸畫 像而檢測觸摸位置的畫像認識式的觸摸板單元等。在此些 觸摸板單元中也有成爲覆蓋顯示單元的狀態的至少一枚玻 璃面板，該玻璃面板是噴射洗脫液，而利用比自重所致的 加速度還大的加速度噴上洗脫液被衝擊，會使表面被機械 硏磨，具有厚度爲〇.5mm以下，表面最大粗糙度爲0.5 μιη 以下的平坦性者。 以下，針對於觸摸板單元製造方法的發明的實施形態 及被使用於該方法的玻璃硏磨機的發明的實施形態加以說 明。以下說明是也包括上述的玻璃面板的機械硏磨的更具 體性說明。 第5圖是表示實施形態的觸摸板單元製造方法的槪略 圖。表示於第5圖的方法，是使用至少一枚的大玻璃基板 來製作觸摸單元母盤。觸摸單元母盤是指將作爲製品的觸 摸板單元1 1的構造製作於玻璃基板的各個領域者，而指 切斷作成各個領域即可作成複數觸摸板單元1 1者。在以 下的說明中，作爲一例，與上述同樣，採用電阻膜式觸摸 -18- 200828092 (15) 板單元 1 1。 如第5圖所示地，實施形態的觸摸板單元製造方法， 是包括：觸摸單元母盤製造工程，及使用洗脫液來機械硏 磨觸摸單元母盤1 20的外面進行削減厚度的削減工程，及 分斷觸摸單元母盤1 20而得到各個觸摸板單元1 1的分斷 工程。 觸摸單元母盤製造工程，是包括：在相當於觸摸單元 母盤於大小的一對玻璃基板181、182的表面形成電極柵 極1 4、1 5的電極形成工程，及經由間隔壁1 6黏貼，形成 有電極柵極1 4、1 5的一對玻璃基板1 8 1、1 8 2的黏貼工程 〇 電極形成工程是將如ITO的透明導電膜藉由濺鍍等的 成膜技術來製作玻璃基板1 8 1、1 8 2的表面，並藉由微影 成像來形成所定圖案的電極柵極1 4、1 5的工程。在黏貼 工程中，一對玻璃基板1 8 1、1 8 2，是相對形成電極珊極 1 4、1 5的面而藉由黏接劑進行黏貼。黏貼之際，相對的 電極柵極1 4、1 5成爲所定的位置關係般地，在觸摸之際 功能作爲功能層。此些工程，是與習知的觸摸板單元11 的製造同樣就可以。 以下，針對於削減工程進行。 如第5圖所示地，在本實施形態的觸摸板單元製造方 法，組裝觸摸單元母盤120之後，進行削減玻璃面板12 、1 3。因此，噴射洗脫液L的硏磨的對象，是在觸摸單元 母盤120成爲外側的表面（外面）。 -19- 200828092 (16) 第6圖是表示實施形態的玻璃硏磨機的俯視斷面槪略 圖，第7圖是表示圖示於第6圖的裝置的側面斷面槪略圖 。表示於第6圖及第7圖的玻璃硏磨機是具備：在內部進 行機械硏磨處理的處理室2，及於處理室2內的所定位置 保持觸摸單元母盤1 20的母盤保持具3，及設置於朝被保 持於母盤保持具3的觸摸單元母盤1 2 0的外面噴射洗脫液 L的位置的噴嘴4，及於噴嘴4供給洗脫液L的洗脫液供 給系5。 在處理室2具備：搬入觸摸單元母盤120的搬入口 2 1，及在機械硏磨處理後搬出觸摸單元母盤1 2 0的搬出口 22。搬入口 21及搬出口 22是成爲以封鎖閘23進行開閉 。又，開閉是將封鎖閘23朝垂直於搬運方向的水平方向 (第6圖的紙面垂直方向）進行移動。 該裝置是具備將洗脫液所噴射的觸摸單元母盤1 20， 對於噴嘴4的噴射孔相對性地機械式移動的移動機構。作 爲被兼用於該移動機構者，設有經搬入口 21及搬出口 22 進行搬運觸摸單元母盤1 20的搬運機構3 0。母盤保持具3 是設置作爲構成搬運機構30的構件。第8圖是表示圖示 於第6圖及第7圖的裝置的母盤保持具3的立體槪略圖。 如第8圖所示地，母盤保持具3是大約垂直地豎立保 持觸摸單元母盤1 20的構件。母盤保持具3主要由水平姿 勢的底座板3 1，及豎設於底座板3 1的支柱32，及被安裝 於支柱32的緩衝具33所構成。 支柱3 2是分別設於細長長方形的底座板3 1的隅部分 -20- 200828092 (17) ，合計設置4支。設有沿著底座板3 1的長邊方向延伸的 梁構件3 4，而連結各支柱3 2的上端以增強母盤保持具3 。各支柱32是比所豎設的觸摸單元母盤120稍高。底座 板3 1的短邊的兩支支柱3 2的間隔，是比觸摸單元母盤 120的厚度稍大。底座板31的長邊方向的兩支支柱32的 間隔，是比觸摸單元母盤1 2 0的長度稍長。觸摸單元母盤 1 2 0是作成被插入在以此些支柱3 2所作出的空間而被保 持。 / 緩衝具33是直接接觸於觸摸單元母盤120的構件， 作成觸摸單元母盤1 2 0不會搖晃者。緩衝具3 3是以對於 洗脫液L不會被腐触（具耐樂品性）材料所形成，例如特 氟隆（杜邦公司的登錄商標）的氟樹脂所形成。 如第8圖所示地，緩衝具3 3是由在底座板3 1的長邊 方向的兩端設成連結各支柱3 2的下端者，及在同長邊方 向的兩端設成連結支柱3 2的上端者所構成。被保持的觸 摸單元母盤1 20，是於此些緩衝具33接觸著各隅部。接 觸於觸摸單元母盤1 20的下端隅部的下側緩衝具3 3，是 短邊方向的斷面形狀呈凹狀，而長邊方向的斷面形狀呈L 狀。抵接於觸摸單元母盤120的上端隅部的緩衝具33， 是短邊方向的斷面形狀呈橫向凹狀。如第8圖所示地，裝 設觸摸單元母盤1 20時，由上方插入，而作成掉進各緩衝 具3 3的凹部。 作爲搬運機構3 0，例如作成依齒條與齒輪機構者。 底座板3 1是作爲齒條，而以嚙合於此的齒輪3 〇 1，搬運 -21 - 200828092 (18) 機構3 0是被構成。齒輪是沿著搬運線以所定間隔設置 數。齒輪301是配置於處理室2內外。又，適當地設有 移動的母盤保持具3引導至全體的引導構件。 如第7圖所示地，噴嘴4是設成位於被保持在母盤 持具3的觸摸單元母盤1 20的兩側，作成可朝觸摸單元 盤1 2 0的兩側外面同時地噴射洗脫液L。第9圖是表示 示於第7圖的噴嘴4的形狀的立體槪略圖。 如第9圖所示地，噴嘴4是具有噴射孔41的管狀 件。如第9圖所示地，噴嘴4是配置成朝垂直方向延伸 而於觸摸單元母盤120的長度方向（搬運方向）隔著均 間隔排列設置複數。噴射孔4 1是設於噴嘴4中面臨觸 單元母盤120的部分，於管的延伸方向（垂直方向）隔 均等間隔所設置。又，作爲噴嘴4的構成，也有比表示 第9圖排列更多（或更少）者的情形，或是沿著水平方 或傾斜方向排列複數的噴嘴的情形。又，噴嘴4並不是 狀，而是板狀或其他形狀也可以。 洗脫液供給系5是由積存洗脫液L的液積存部5 1 及連接液積存部5 1與各噴嘴4的配管5 2，及設於配管 上的閥53或送液泵54等所構成。由所供給的洗脫液L 去雜質或麈埃等的過濾器或調壓用閥等，視需要被設置 藉由洗脫供給系5，各噴嘴4的洗脫液L，是由各 射孔41朝被保持於母盤保持具3的觸摸單元母盤120 外面噴射。所噴射的洗脫液L是衝擊外面而被洗脫，以 行硏磨外面。 多 將 保 母 圖 構 J 等 摸 著 於 向 管 5 2 除 〇 噴 的 進 22- 200828092 (19) 又，如第6圖所示地，處理室2的底部是 ，而在最下部設有排出孔24。在排出孔24連 使用過的洗脫液L的排出管2 5。如上所述地 摸單元母盤1 2 0的材料的洗脫液L，是掉至處 部，成爲經排出孔24及排出管25被排出。 又，處理室2的內壁面，或處理室2內的 面是對於洗脫液L成爲耐藥品性的構成。例 , 爲氟酸時，則內壁面或各構件的表面作成塗敷 杜邦公司的登錄商標）的氟樹脂加以覆蓋的構 閉搬入口 21或搬出口 22的封閉鎖23，是作 不會漏出般地液密地進行封鎖。 本實施形態的裝置，是爲了更提高機械硏 的平坦性，在噴嘴4的構成上下了特別工夫。 於此點，使用第9圖及第1 0圖進行說明。第 從各噴射孔41對觸摸單元母盤120的外面均 脫液L的情形的槪略圖。 如第9圖所示地，各噴射孔41是對於噴 延伸的方向（垂直方向）朝傾斜45度的方向 ，由各噴射孔4 1所噴射的洗脫液L是如第9 成爲朝該斜方向擴展成長錐狀（或喇11八狀）。 L的各擴展部，在觸摸單元母盤1 20的外面上 狀態。若在觸摸單元母盤1 2 0的外面上重疊著 各擴展部，則洗脫液L散亂，容易產生如紊流 流動，結果，很難得到平坦性良好的硏磨。所 成爲漏斗狀 接有排出已 ’溶入有觸 理室2的底 各構件的表 如洗脫液L 如特氟隆（ 成。又，開 成洗脫液L 磨後的外面 以下，針對 1 0圖是表不 勻地噴射洗 嘴4的管所 細長。因此 圖所示地， 又，洗脫液 不會重疊的 洗脫液L的 的不規則的 以，作成不 -23- 200828092 (20) 會重疊。擬作成不會重疊，適當地選定噴射孔41的尺寸 ，噴嘴4與觸摸單元母盤1 2 0的距離，噴射壓力等就可以 。但是，即使洗脫液L的各擴展部重疊於外面上，也有可 得平坦性良好的硏磨時，也可作成該情形。 在第10圖的中央處，表示由一種噴嘴4的各噴射孔 4 1所噴射的洗脫液L。在第1 〇圖的右邊，表示在觸摸單 元母盤1 2 0的高度方向觀看的來自各噴射孔4 1的洗脫液 L的噴射量分布。當觸摸單元母盤1 20通過兩側的噴嘴4 之間之際，觸摸單元母盤1 20的外面各點，是接受從任何 噴射孔4 1所噴射的洗脫液L的供給。這時候，面臨上下 地相鄰接的兩個噴射孔4 1的剛好中間位置般地所通過的 外面上的點P，成爲從其相鄰的兩個噴射孔4 1接受洗脫 液L的供給。這時候，該點P是位於錐狀的洗脫液L的 擴展部的端部之故，因而如第1 0圖的右邊所示地，從一 個噴射孔4 1所接受的洗脫液L的量，是其他點的1 / 2程 度，而以上下兩鄰接的噴射孔41接受一個噴射孔41分量 "I, 的洗脫液L的供給。因此，在觸摸單元母盤1 2 0的高度方 向，在外面各點的洗脫液L的供給量是均勻。又，並不是 僅在如第9圖所示的斷面形狀有擴展洗脫液L的情形，也 可在橢圓狀、圓狀、方形狀（正方形、長方形）、菱形狀 、平行四邊形狀等的斷面形狀等的斷面形狀有擴展洗脫液 L的情形。 以下，針對於上述玻璃硏磨機的情形進行說明。 經過如上述的電極形成工程及黏貼工程所製成的觸摸 -24- 200828092 (21) 單元母盤1 2 0，是在處理室2外被承載於母盤保持具3。 承載動作是也有藉由機械手所進行的情形，或是也有藉由 操作人員的手所進行的情形。在承載於母盤保持具3之前 ，也有進行依遮蔽帶的遮蔽的情形。 當令搬運機構3 0進行動作，打開搬入口 2 1的封鎖閘 23，母盤保持具3經搬入口 21移動至處理室2內。母盤 保持具3是在觸摸單元母盤1 20位於兩側噴嘴4之間的所 定位置的時機停止。搬入口 21的封鎖閘23是被關閉。在 該狀態，打開洗脫液供給系5的閥53，送液泵54以所定 壓力將洗脫液L送至各噴嘴4。結果，由各噴嘴4的各噴 射孔4 1噴射出洗脫液L，而以所定壓力衝擊觸摸單元母 盤120的外面。藉由此，觸摸單元母盤120的外面被削減 。溶有外面材料的洗脫液L，是掉下而從排出孔24被排 出。 進行噴射洗脫液L所定時間之後，停止送液泵54， 關閉閥53。之後，令搬運機構30進行動作，來移動母盤 保持具3，打開搬出口 22的封鎖閘23而將觸摸單元母盤 120搬出到處理室2外面。被搬出的觸摸單元母盤120是 進行著依純水等洗淨液的洗淨或除去遮蔽帶等的作業。 在上述玻璃硏磨機的動作中，在洗脫液L的噴射中， 視需要有將觸摸單元母盤1 20予以變位的情況。觸摸單元 母盤1 20的外面上的各點中，在對各噴嘴4的各噴射孔 4 1位於最短距離之點有衝擊壓力變過高時，在洗脫液L 的噴射中朝前後移動觸摸單元母盤1 20，則可將時間平均 -25- 200828092 (22) 的各點的衝擊壓力作成均勻。藉由此’可更提高機械 後的外面的平坦性。觸摸單元母盤12 0的移動是也有 下方向進行者。 玻璃硏磨機是具備控制整體的未圖示的控制部。 部是包括順序控制各部的功能，而控制上述動作，或 衝擊均勻化所用的母盤保持具3的移動等，是以控制 進行的順序控制就可達成。 # 又，在上述玻璃硏磨機的構成中，依送液泵54 液壓力，是被設成依外面的洗脫液L的衝擊壓力 0.5kg/ cm2至3.5kg/ cm2的範圍。這時候，各噴嘴 各噴射孔41與外面的距離（在第7圖以d表示）是 要素。若距離d變過大，則必須將依送液泵54的送 力成爲較高，而在上述範圍內的壓力變成無法衝擊外 很難成爲實用。又，距離d小時，雖容易將衝擊壓力 在最適値，惟對於噴射孔4 1的最短點的衝擊壓力會 ，而在均勻性上發生問題。爲了持續確保衝擊的均勻 亦即，硏磨的平坦性）作成實用性的構成，距離d是 5mm以上100mm以下較佳。又，在進行依洗脫液L 磨的過程，從噴射孔41至外面的距離是變稍長，惟 以上100mm以下是作爲開始硏磨之際的距離。 又，若衝擊壓力比0.5kg/ cm2還小，則新鮮洗 L的供給變少之故，因而除了無法進行充分的硏磨之 物理性作用也未充分地進行之故，因而在玻璃組成或 狀態不均勻的部位無法充分地硏磨，而有降低平坦性 硏磨 朝上 控制 控制 部所 的送 成爲 4的 重要 液壓 面， 保持 過局 性（ 作成 的硏 5 mm 脫液 外， 結晶 的問 -26- 200828092 (23) 題。又，若衝擊壓力比3.5kg/cm2還大，則僅距噴嘴4 的噴射孔4 1最短點會被多硏磨，而平坦性在此點惡化。 因此作爲0.5kg/cm2至3.5kg/cm2的範圍的衝擊壓力較 佳。 以下，針對於分斷工程進行說明。 在分斷工程中，使用切斷裝置來切斷被機械硏磨的觸 摸單元母盤1 20。作爲切斷裝置，可轉用在製造液晶顯示 , 器等所使用的裝置，亦即可轉用由一枚玻璃基板來製造複 數液晶顯示器之際所使用的裝置。分斷工程之後，安裝稱 爲引線的連接線，就完成觸摸板單元。 又，安裝引線，是也有在黏貼工程之際進行。亦即， 於一對玻璃基板之間以所定位置插入引線的前端，而在夾 住引線前端的狀態下進行黏貼。針對於此點，使用第11 圖進行說明。第1 1圖是表示針對於由一對玻璃基板來製 造四個觸摸板單元1 1的例子的槪略圖。如此例地，黏貼 一對玻璃基板181、182之際，如第11圖所示地，在所定 % 位置作成夾住引線140的前端。這時候，在引線140被安 裝的狀態下進行削減工程之故，因而於引線1 40不會施加 洗脫液般地施以遮蔽。之後，經分斷工程，完成四個觸摸 板單元。 在上述的製造方法，例如準備厚約1 mm的玻璃基板 1 8 1、1 8 2，而在黏貼後的削減工程，玻璃基板1 8 1、1 8 2 的厚度是被減薄至〇·1至0.2mm。因此，所製成的觸摸板 單元是與習知相比較成爲較薄，而適用於被承載於如手機 -27- 200828092 (24) 等的薄型電子機器。又，觸摸板單元是變薄 的表面也沒有微小裂縫之故，因而可確保充 又，在上述的製造方法，將洗脫觸摸單 外面材料的洗脫液L朝外面噴射，附與比自 度還大的加速度，將洗脫液噴上外面而衝擊 所謂依洗脫液L的衝擊的物理性作用進行機 故，因而除了接連不斷地供給新鮮洗脫液L , 面材料的洗脫液L藉由衝擊接連不斷地流出 異且均勻性優異地可進行機械硏磨。即使在 成或結晶狀態有不均勻部位，也倂用著物理 充分均勻地可進行機械硏磨。所以可提高機 面平坦性，而所製成的觸摸板單元的視認性 又，依照上述玻璃硏磨機，除了利用洗 性作用之外，還利用物理性作用來進行外面 因而可進行高平坦性的硏磨，而且觸摸單元 運與機械硏磨處理被自動化之故，因而生產 又，噴嘴4的各噴射孔41隔著均等間 各噴射孔4 1至外面的距離是一定之故，因 射的洗脫液L所致的衝擊壓力作成均勻，在 高平坦性的硏磨處理。 又，在觸摸單元母盤120垂直地所保持 洗脫之處，是具有促進在外面的洗脫液L的 具有充分地有效率地進行外面機械硏磨的技 又，噴嘴4設於觸摸單元母盤1 2 0的兩 而在玻璃面板 分的強度。 元母盤120的 重所致的加速 外面，而利用 械硏磨外面之 之外，溶有外 。因此效率優 外面的玻璃組 性作用，因此 械硏磨後的外 也成爲高者。 脫液L的化學 的硏磨之故， 母盤1 2 0的搬 性也高。 隔所設置，且 而容易將所噴 此點上有助於 的狀態下進行 置換的效果， 術上意義。 側，可將雙方 -28- 200828092 (25) 的外面同時地進行機械硏磨之故，因而除了有助於觸摸單 元母盤1 20的薄型化之外，生產性也高。 還有，在觸摸單元母盤1 20的兩側，也有依洗脫液L 的衝擊壓力作成不相同的情形。亦即，在一側將噴射壓力 作成較高，在另一側將噴射壓力作成較低的情形。此爲也 有將觸摸單元母盤1 20的外面中增加一側的面的削減量， 而減少另一方的一側的削減的情形。 又，使用上述的洗脫液L的機械硏磨，是也可應用在 製造如液晶顯示器的平面顯示器的情形也可應用。亦即， 機械硏磨黏貼的顯示器用玻璃面板的外面進行削減時也同 樣地進行。在該場合，也可同時地機械硏磨兩側的外面進 行削減之同時，也可用互相地不相同的噴射壓力具有進行 削減。 在上述各實施形態的構成中，依洗脫液L的外面硏磨 ，是利用依洗脫液的衝擊的物理性作用者，與僅浸漬於蝕 刻液或僅散佈蝕刻液的飩刻，本質上不相同。 又，在上述實施形態的裝置中，搬運機構3 0被兼用 於移動機構，惟與搬運機構30另外設置移動機構也可以 。例如，也有將母盤保持具3設置作爲移動機構的一部分 ，而將以搬運機構3 0所搬運的觸摸單元母盤1 20承載至 母盤保持具進行移動的情形。 又，「相對地移動」是指觸摸單元母盤120與噴嘴4 的噴射孔4 1的位置關係會變化而移動的情形，如上述實 施形態般地，對於靜止的噴嘴4的噴射孔4 1移動觸摸單 -29 - 200828092 (26) 元母盤120也可以，或對於靜止的觸摸單元母盤120移 噴射孔4 1也可以，又也有移動兩者的情形。 在上述實施形態中，在電阻膜式觸摸板單元，間隔 1 6兩側的面板1 2、1 3兩者都是玻璃製，惟如在習知技 所說明的前面面板爲如PET的塑膠製而僅主面板爲玻 製，也同樣地可實施。此情形是使用一枚大塑膠基板， 同樣大小的玻璃基板，同樣地形成功能層。又，黏貼之 ，僅針對於玻璃基板進行機械硏磨。機械硏磨之際，若 洗脫液沾上塑膠基板之問題，則進行遮蔽。 在上述實施形態的觸摸板單元製造方法，在削減工 之後進行分斷工程，惟分斷工程之後，進行削減工程也 以。此情形，成爲被分斷的各個觸摸板單元別地進行削 工程。但是，與此相比較，在觸摸單元母盤一倂進行削 工程的上述實施形態者，生產性較高。 又，在上述觸摸板單元製造方法的實施形態，黏貼 對玻璃面板之後進行削減工程，惟在黏貼之前進行削減 程也可以。此情形，機械硏磨玻璃基板而削減成所定厚 之後進行電極柵極的形成也可以，或形成高極柵極之後 行削減工程也可以。在形成電極柵極後進行削減工程時 在所形成的電極柵極不會沾上洗脫液地施以遮蔽較佳。 又，在上述實施形態的觸摸板單元製造方法的實施 態，製造電阻膜式觸摸板單元，惟針對於靜電容量式、 面彈性波式、光學式等，其他方式的觸摸板單元，只要 備覆蓋顯示單元的至少一枚玻璃面板者，可同樣地製造 動 壁 術 璃 及 後 有 程 可 減 減 工 度 進 形 表 具 -30- 200828092 (27) 亦即，可包括使用上述玻璃硏磨機進行玻璃面板的工程。 【圖式簡單說明】 第1圖是表示本發明的實施形態的觸摸板顯示裝置的 斷面槪略圖。 第2圖是槪略地表示製作圖示於第1圖的玻璃面板 1 2、1 3之際的加工方法的圖式。 第3圖是表示針對於使用洗脫液的機械硏磨的作用的 圖式。 第4圖是表示針對於電阻膜式以外的觸摸板顯示裝置 的實施形態的槪略圖。 第5圖是表示實施形態的觸摸板單元製造方法的槪略 圖。 第6圖是表示實施形態的玻璃硏磨機的俯面斷面槪略 圖。 第7圖是表示圖示於第6圖的玻璃硏磨機的側面斷面 槪略圖。 第8圖是表示圖示於第6圖及第7圖的裝置的母盤保 持具3的立體槪略圖。 第9圖是表示圖示於第7圖的噴嘴4的形狀的立體槪 略圖。 第1 〇圖是表示洗脫液L從各噴射孔4 1對於觸摸單元 母盤1 20的外面均勻地噴射的情形的槪略圖。 第1 1圖是表示針對於從一對玻璃基板來製造四個觸 -31 - 200828092 (28) 摸板單元的例子的槪略圖。 第1 2圖是表示電阻膜式的習知觸摸板顯示裝置的斷 面槪略圖。 【主要元件符號說明】 1 :顯示單元 1 1 :觸摸板單元 1 2、1 3 :玻璃面板 1 4、1 5 :電極柵極 1 6 :間隔壁 1 7 :黏接材 1 8 1、1 8 2 :玻璃基板 2 :處理室 3 :基板保持具 3 〇 :搬運機構 4 :噴嘴 41 :噴射孔 5 =洗脫液供給系 L :洗脫液 -32-i 200828092 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a touch panel display device that can perform information input by touching a human finger or a touch pen. [Prior Art] A touch device that can input information by touching a person's finger or a touch pen, etc., is a function that can be said that a display that displays a screen also has information, a cash dispenser at a financial institution, and a ticket vending machine at a station. , manuals, etc., as the human interface for each function is widely used in various fields. The touch panel display device is an input that can be defined as continuous display of information by contact with the surface, but in principle is different. Type. The representative of the touch panel is a resistive film type, and the resist film type is taken as an example for a conventional touch panel display device. Fig. 12 is a schematic cross-sectional view showing a conventional touch panel display device of a resistive film type. The touch panel display device shown in Fig. 2 is provided with a display unit 1 for performing display, and a touch panel unit η provided on the front side of the display unit 1 to perform information input by touching. There are many cases in which the display unit 1 crystal display is used, but a CRT display or the like is also used. In the conventional example of Fig. 2, in the case of a liquid crystal display, a liquid crystal 193 is sealed between the liquid crystal substrates 191 and 192. Further, the plate unit 11 has a structure in which a pair of transparent panels 194 are joined by the joint portion 190, and a plurality of partition walls 196 are sealed therein. The input display is for input electronics. And by means of several broken pictures by electricity, the liquid meter is not a pair of touches. Wu Wu 195 -5- 200828092 (2) In the touch panel unit 1 1 , the panel on the front side (the side where the operator is located) (hereinafter referred to as 'front panel 194') is a thickness as small as 0.2 mm. The front panel 1 94 is also made of glass, but it is also formed of a transparent resin of PET (polyethylene terephthalate). The front panel 194 is thin and flexible, and is therefore also suitable for use as a film or sheet. The panel (hereinafter, the main panel) 195 of the front panel 194 is a transparent glass panel having a thickness of about 1. 1 mm. Electrode grids 197 and 198 formed of a transparent conductive film of IT Ο (Indium Tin Oxide) are provided on the opposite faces of the pair of panels 194 and 195. When the front panel 1 94 is pressed, the electrode electrodes 197 and 198 of the pair of panels 194 and 195 are brought into contact with each other to flow a current. By detecting this current, it is possible to know the position at which the portion of the front panel 1 94 is touched. Further, the touch panel unit 11 is fixed to the end portion of the display unit 1 via the fixing portion 199. Non-Patent Document 1: In the case of Kawamura, "Improve the touch panel" (issued by the company's company), the above-mentioned touch panel is a technical improvement to improve the light transmittance of the conductive film. There are many people who are excellent in sex, operability, and the like. Along with this, the human interface as a variety of information machines has generally progressed. In addition, small information devices such as mobile phones are also carried, but there are problems in thinning. The above-mentioned resistive film type touch panel display device will be described as an example of the problem of -6-200828092 (3). In the above touch panel display device, the front panel is extremely thin to a degree of about 2 mm, but the main panel has a considerable thickness of about 1.1 mm. The main reason is to ensure machine strength. Since the touch panel display device presses a finger or the like to input information, it is resistant to repeated pressing, and the touch panel unit must have a certain degree of rigidity or mechanical durability. Therefore, the main panel is made of glass and has a thickness of about 1.1 mm. Therefore, as a whole of the touch panel unit, the thickness reaches 1.6 mm. As described above, in the conventional touch panel display device, the thickness of the portion of the touch panel unit cannot be made thin. Therefore, although an electronic device such as a mobile phone is required to be thinned, the entire thickness is increased. The present invention has been made in order to solve such a problem, and it is possible to provide a structure of a touch panel display device that can be thinned, and to provide a touch panel display device that is suitably mounted on an electronic device such as a mobile phone that is required to be thinned. . In order to solve the above problem, the invention according to claim 1 of the present invention is a touch panel display device which is provided with a display unit that performs screen display and a front side provided on a display unit, and can be contacted. The touch panel display device of the information input touch panel unit is characterized in that: the touch panel unit is adhered by a transparent adhesive which is completely coated on the front surface of the display unit, and the touch panel unit has a cover display unit. At least one glass panel in the state, the glass panel is ejected with an eluent sprayed at an acceleration greater than the speed of 200828092 (4) generated by its own weight, and the surface is mechanically honed to have a thickness of 0.5 mm or less, the surface roughness is 0.5 μηι or less flatness. In order to solve the above problems, the invention described in claim 2 is a method of manufacturing a touch panel unit, and is a touch panel display device that can perform information input by applying contact, and is provided for image display. A method of manufacturing a touch panel unit on a front side of a display unit, wherein the touch panel unit is provided with at least one glass panel that is in a state of covering the display unit, and has an ejecting liquid sprayed toward a surface of the glass panel to be produced by a self-weight When the acceleration is large, the eluent is sprayed on the surface to mechanically honing the surface of the glass panel, and the thickness is reduced to 〇·5 mm or less. The surface of the glass panel is cut by mechanical honing of the engineering. The maximum roughness is 〇·5μιη or less. In order to solve the above problem, the invention according to the third aspect of the invention is the configuration of the second aspect of the above-mentioned patent application, wherein the pressure at the impact of the surface generated by the eluent is The composition of the range of .5 kg / cm 2 to 3.5 kg / cm 2 . Further, in order to solve the above problems, the invention according to the fourth aspect of the invention is the configuration of the second or third aspect of the above-mentioned patent application, wherein the eluent is a structure having hydrofluoric acid. Moreover, in order to solve the above-mentioned problems, the invention described in claim 5 is in the case of any of the second to fourth aspects of the above-mentioned patent scope, -8-200828092 (5), The distance from the injection hole of the above-mentioned nozzle to the surface of the glass panel is such that it has a configuration of 5 mm or more and 100 mm or less. In order to solve the above problem, the invention described in claim 6 is in the above-mentioned patent application scope. In any one of the items 2 to 5, each of the injection holes of the nozzle is arranged in a direction parallel to a surface of the glass panel, and the washing is performed from the plurality of injection holes in the mechanical honing. When the liquid is detached from the surface parallel to the surface of the glass panel, the surface of the glass panel is impacted by the direction in which the ejection holes are arranged to extend obliquely in the oblique direction, and the ejection holes of the nozzles are mechanically relatively moved. In the glass panel, the glass plate is repeatedly formed at the extended end portion of the eluate ejected from the adjacent nozzle, and the impact is generated by the eluent. In order to solve the above problems, the invention described in claim 7 is a glass honing machine, which is used in the patent application scope, in order to solve the above problems at each point on the surface of the glass panel. The glass honing machine of the touch panel unit manufacturing method according to the second aspect of the invention, further comprising: a processing chamber that performs an external mechanical honing process inside; and holds the glass panel vertically at a predetermined position in the processing chamber And a nozzle having an ejecting liquid for ejecting the surface material of the glass panel toward the ejection hole held by the surface of the glass panel of the holder; and -9 - 200828092 (6) supplying the eluent to the nozzle The eluent supply system, wherein the eluent supply system has an acceleration that is greater than an acceleration generated by its own weight, and ejects the eluate onto the outer surface to impact the outer surface, thereby utilizing the physical effect of the impact. The external pressure can be honed, and the eluent is supplied to the nozzle, and the injection hole for the nozzle is used to mechanically move the holder relatively. The eluent is uniformly supplied to the moving mechanism of each area of the surface of the glass panel. As described below, according to the invention described in the respective patent application scopes of the present invention, the strength of the glass panel can be sufficiently continuously ensured, and the thickness can be made thinner and the surface flatness can be improved. Therefore, it is possible to provide a touch panel display device suitable for being carried on an electronic device such as a mobile phone which is required to be thinned. [Embodiment] The best mode (hereinafter, referred to as an embodiment) used in carrying out the invention of the present invention will be described with reference to the drawings. Fig. 1 is a schematic cross-sectional view showing a touch panel display device according to an embodiment of the present invention. The touch panel display device shown in Fig. 1 includes a display unit 1 for displaying a screen, and a touch panel unit 11 provided on the front side of the display unit 1 to perform information input by contact. In the present embodiment, as the display unit 1, the liquid crystal display is assumed to have a structure in which the liquid crystal germanium 93 is sealed between the pair of glass substrates 191 and 192. In the present embodiment, in particular, a thin liquid crystal display is suitably used, but it may be the same as that used in a mobile phone or the like, and thus the detailed description is omitted in detail -10 _ 200828092 (7). Further, in addition to liquid crystal displays, organic EL displays and the like have also been developed as thinner, and thus such use is also used. The touch panel unit 11 is at least one glass panel having a cover display unit 1. In the present embodiment, the touch panel unit 11 is a resistive film type, and has a pair of glass panels 1/2 and 133. On the opposite side of the pair of glass panels 1, 2, 3, electrode grids 14, 15 formed of a transparent conductive film such as I Τ are provided. The electrode grids 14 and 15 are formed by patterning by lithography after the transparent conductive film is formed by a sputtering film forming technique. The material or structure of the electrode grids 14 and 15 is the same as that of the conventional touch panel unit, and therefore detailed description thereof will be omitted. Further, irregularities may be formed on the surfaces of the electrode grids 14, 15 as well. This is for easy access to the electrode grids 14, 4 when being contacted. A pair of glass panels 1 2, 1 3 are borosilicate glass or soda lime glass. A pair of glass panels 1 2, 1 3 are adhered to each other with a flexible partition wall 16 on one side and bonded by a joint 邰 1 。. Further, in the case where the bonding portion 1 黏 is adhered to the display region generated by the display unit 1, a transparent adhesive is used as needed. The partition wall 16 and the adhesion are also the same as those of the conventional glass panel unit, and therefore detailed description thereof will be omitted. Further, the partition walls may be mixed and disposed on the joint portion 1A. One of the large feature points of the touch panel unit 11 of the present embodiment is that the required strength and thickness (indicated by t1 and t2 in the first drawing) of each of the glass panels 12 and 13 are kept thin to 〇5 mm or less. And the maximum roughness (indicated by Rmax in Fig. 1) has a surface -11 - 200828092 (8) flatness of 〇 5 μm or less. Hereinafter, this point will be described. As described above, when the thickness of the glass sheet is reduced, the strength is surely lowered. In the present embodiment, the thickness of the glass sheet is reduced by a special processing to ensure the required strength and surface flatness. Fig. 2 is a view schematically showing a processing method for producing the glass panels 1 2 and 1 3 shown in Fig. 1 . In the glass panels 1 2 and 1 3 of the present embodiment, the eluate is ejected at an acceleration higher than the self-weight, and the eluate is sprayed with a large acceleration to be impacted, whereby the surface can be mechanically honed. Further, in order to perform the honing more uniformly, the glass panels 1 2, 1 3 are mechanically moved relative to the ejection orifices of the nozzles 4 for ejecting the eluent, and the ejected liquid is ejected against the glass panel 1 2, 1 3. In addition, the term "mechanical honing" means honing by the physical action of the eluent to which the pressure is applied, and means that the glass panels 1 2, 1 3 are mechanically moved during honing. the meaning of. "Mechanical movement" means "moving by machine". As the eluent, a strong acid such as hydrofluoric acid is used. The case of hydrofluoric acid is used, for example, for dilution of water to 1% to 50% by volume. The impact pressure is 0.5 kg/cm2 to 3.5 kg/cm2 on the surface of the adhered glass panels 1 2, 13. The outer surface of the ejected liquid ejected from the nozzle 4 is eluted by the eluent, and is ejected by the impact of the eluent. By this, the surface is mechanically honed, so that the thickness of the glass panels 1 2, 13 is thinned. Thus, the use of the mechanical honing using the eluent can sufficiently maintain the strength of the glass panels 1 2, 13 to make the thickness thin and improve the surface flatness of Table -12-200828092 (9). This will be explained using FIG. 3 for this point. Fig. 3 is a view showing the effect of the mechanical honing on the use of the eluent. A glass is weak in damage, 'but one of the reasons' is a tiny crack that exists on the surface. As a method of producing a glass plate, the floating method is the mainstream, and the melting method, the input method, and the like are also put into practical use. In the case of the glass plate manufactured in any case, many small scratches (micro cracks) are formed as shown in Fig. 3 (1). Therefore, if you want to make a thin thickness, the strength must be weak. On the other hand, as shown in Fig. 3 (2), by mechanical honing using the eluent as described above, if the thickness is made thin, the surface layer in which the microcracks 100 are formed is eluted and is Remove. Therefore, the surface of the glass panels 1 2 and 13 after the reduction is in a state where there are no minute cracks. Therefore, even if the thickness is thin, sufficient strength can be ensured. Further, as a technique for thinning the thickness of the glass sheet, there is a hot rolling method or the like. However, in this method, fine cracks are formed on the surface of the thinned glass sheet, and thus sufficient strength cannot be secured. In other words, in the current method for producing a glass sheet and the method for reducing the glass sheet, if the mechanical honing using the eluent according to the present embodiment is not performed, it is impossible to form a micro crack on the surface. A glass plate having a maximum roughness of 0.5 μm or less was obtained. Therefore, the mechanical honing method using the eluent is used as a glass plate having a thickness of 0.5 mm or less, a maximum roughness of 〇·5 μτη or less, and a mechanical honing method without using an eluent as a thickness of 0.5 mm or less, and the maximum roughness. A glass plate of less than 5 μπι can be clearly distinguished by the presence of tiny cracks in the surface. Further, the surface flatness is ensured by appropriately selecting the arrangement of the nozzles 4 or the ejection strength as will be described later. If the surface is not flat, the light is subtly refracted by the light passing through the glass panels 1 2 and 1 3, which causes the visibility to deteriorate. That is, when viewing the touch panel display device, there is a feeling of unevenness on the screen. According to the present embodiment, the maximum roughness Rmax is 0.5 μm or less, and thus there is no such problem. Further, the maximum roughness is preferably 0.1 μηη or less, and the maximum roughness of 0.1 μm or less can be achieved by using a glass honing machine to be described later. Further, the glass panels 1 2, 1 3 are thinner and thinner in response to the demand for thinning of the machine to be carried. However, there is a limit in strength, and depending on the material, etc., the lower limit of the thickness is about 0.1 mm, and the thickness of 0.1 mm or more is preferable. Another major feature of this embodiment is that the touch panel unit 11 described above is fixed to the display unit 1 by integral bonding. That is, as shown in Fig. 1, the touch panel unit 11 and the display unit 1 are bonded to the interface in a state in which the adhesive member 17 is attached. As the bonding material 177, the front surface of the display unit 1 is covered, and therefore, a person having sufficient light transmittance is used. For example, XVL-90 manufactured by Kyoritsu Chemical Industry Co., Ltd. can be used. The layer thickness of the bonding material 17 is about 30 μm to 100 μm. The layer of the adhesive material 17 is Ih to ensure that the necessary bonding strength is made as thin as possible, and it is preferable to form a range of 50 μm to 70 μm. As a result, the touch panel unit 11 and the display unit 1 are completely bonded by the light transmissive bonding material 17, so that the strength -14-200828092 (11) of the touch panel unit 11 becomes high. As described in the conventional example of FIG. 2, the touch panel unit 11 is fixed to the display unit 1 with the fixing portion i 99 at the end portion, and a cavity is formed therebetween, in order to withstand the touch. Pushing the pressure, the main panel 195 must be made to be equal to a greater extent. On the other hand, in the present embodiment, the touch panel unit 11 is completely bonded to the display unit 1, and therefore, even if the thickness of the main panel is reduced, sufficient touch resistance is ensured. In other words, the pressing force at the time of the touch is received by the display unit 1, and the display unit 1 is appropriately attached to the device, so that the touch panel display device according to the above embodiment can be secured. Since the glass panels 1 2 and 13 are extremely thin to 〇.5 mm or less, the thickness of the entire touch panel unit 11 can be made thin, and as a result, the thickness of the entire apparatus can be made thin. Specifically, when the thickness of each of the glass panels 12 and 13 is 〇. 2 mm, the thickness of the touch panel unit 11 is about 0.5 mm. Further, as the display unit 1, when a thin liquid crystal display is used, the thickness of the entire touch panel display device can be as thin as, for example, about 1.6 m. Therefore, a human interface as an electronic device such as a thinner mobile phone can be suitably employed. At this time, each of the glass panels 1 2 and 13 is reduced by the mechanical honing method using the eluent, so that even if there are no minute cracks on the surface, the thickness can be ensured to be sufficient. Further, since the touch panel unit 11 and the display unit 1 are integrally bonded by the transparent adhesive member 17, the strength of the touch panel unit 11 is also increased at this point. Further, when the maximum roughness of the glass panels 1 2, 1 3 is as high as 〇 5 μm or less, a touch panel display device having no display unevenness and high visibility is provided. -15- 200828092 (12) Hereinafter, an embodiment of a touch panel display device other than the resistive film type will be described. Fig. 4 is a schematic diagram showing an embodiment of a touch panel display device other than the resistive film type. Fig. 4(1) is a cross-sectional view showing the capacitance type touch panel unit. As shown in FIG. 4(1), in the electrostatic capacitance type, the touch panel unit is formed of a glass panel 101, a conductive film 102 formed on the surface of the glass panel 1〇1, and a conductive film 102, and The surface film 103 formed on the conductive film 102 is formed. The surface film 103 is an anti-reflection film or an anti-fouling film. There is also a case where a conductive film for shielding is formed on the back surface of the glass panel 1 〇 1 . In such a capacitive-type touch panel unit, a low electric field is applied along the glass panel 110, and a weak charging current of a capacitor formed between the touched human finger and the glass panel 1 〇1 is captured to perform information. Input. In the touch panel unit of the present embodiment, the glass panel 101 is ejected with the eluent at a higher acceleration than the self-weight by ejecting the eluate in the same manner as the main film of the resistive film type described above. The impact causes the surface to be mechanically honed, and has a flatness of 〇.5 mm or less and a surface roughness of 0.5 μm or less. Further, in the fourth (2a) diagram, a plan view of the surface acoustic wave type touch panel unit is shown, and in the fourth (2b) diagram, a sectional view of the surface acoustic wave type touch panel unit is shown. As shown in Fig. 4 (2a), the surface acoustic wave type touch panel unit is provided with an X-direction oscillator 051 on the square glass panel 104, and a Y-direction opposite to the 隅. The vibrator 106. In addition, the X-direction receiver 107 and the γ-direction -16-200828092 (13) receivers 1 08 are provided. Further, a reflection row 109 is formed along the periphery of the glass panel 1 〇4. The reflection matrix 1 09 is a configuration in which a plurality of resonators having an angle of 45 degrees are arranged in the X direction or the Y direction. On the surface of the glass panel 104, a surface film is formed for reflection prevention or antifouling. When the ultrasonic waves are emitted from the respective transducers 105 and 106, they are transmitted through the reflection row and line 109, and are transmitted 90 degrees toward the inside of the square to expand the surface of the glass panel 1 to 4 as elastic waves. When the glass is touched with a finger, the panel 104 (when the surface film is formed on the glass panel 104, when the surface film is touched), the surface elastic wave is caught on the finger, and the surface elastic wave reaching the receiver becomes weak. The time at which the weak elastic wave reaches is measured, and it is known that it is touched there to input information. In such a surface acoustic wave type touch panel unit, the glass panel 104 is also in a state of covering the display unit. In the glass panel 104, as in the above-described embodiments, the eluent is ejected and the eluent is sprayed with an acceleration greater than the self-weight, and the surface is mechanically honed to have a thickness of 0.5 mm. Hereinafter, the surface maximum roughness is 〇·5 μmη or less flatness. Fig. 4(3) is a cross-sectional view showing the optical touch panel unit. The optical touch panel unit is provided with an illuminator (usually an LED) 1 1 in one of the four sides in the vertical direction and four sides in the lateral direction of the four sides of the glass panel 1 1 , and is disposed on the other side of the vertical and horizontal sides. There is a light receiver 1 12. When the surface of the glass panel 11 is touched, light is blocked at the touched position. Therefore, it is known from the incident state of the light to the light receiver 1 12 that it is touched at that position, whereby information input can be performed. -17- 200828092 (14) In the optical touch panel unit of the present embodiment, the glass panel 110 is also in a state of covering the display unit. Further, in the same manner as in the above embodiments, the glass panel 11 is sprayed with an eluent which is ejected with an acceleration larger than the self-weight, and the surface is mechanically honed to have a thickness of 0.5 mm or less, the surface roughness is 0.5 μm or less flatness. In addition to the various embodiments shown in Figure 4, it is known to use < An electromagnetic induction type touch panel unit of a touch pen or a touch panel unit of a portrait recognition type in which a touch position is detected by a camera. In the touch panel unit, there is also at least one glass panel that is in a state of covering the display unit, and the glass panel is sprayed with an eluent, and the eluent is sprayed with an acceleration greater than the acceleration due to its own weight. The surface will be mechanically honed and have a flatness of 〇.5 mm or less and a surface roughness of 0.5 μm or less. Hereinafter, embodiments of the invention of the touch panel unit manufacturing method and embodiments of the invention of the glass honing machine used in the method will be described. The following description is a more detailed description of the mechanical honing of the above-described glass panel. Fig. 5 is a schematic view showing a method of manufacturing a touch panel unit according to an embodiment. The method shown in Fig. 5 is to fabricate a touch unit master using at least one large glass substrate. The touch unit master refers to a structure in which the touch panel unit 11 as a product is fabricated in various fields of the glass substrate, and the plurality of touch panel units 1 can be formed by cutting the respective fields. In the following description, as an example, a resistive film type touch -18-200828092 (15) board unit 1 1 is used in the same manner as described above. As shown in FIG. 5, the touch panel unit manufacturing method according to the embodiment includes a touch unit master manufacturing process and a mechanical reduction of the outer surface of the touch unit master 120 by using an eluent to reduce the thickness. And breaking the touch unit master 1 20 to obtain the breaking process of each touch panel unit 11. The touch unit master manufacturing process includes an electrode forming process for forming electrode gates 14 and 15 on the surface of a pair of glass substrates 181 and 182 corresponding to the size of the touch unit master, and pasting via the partition 16 The bonding process of the pair of glass substrates 1 8 1 and 1 8 2 in which the electrode grids 14 and 15 are formed is a film forming technique in which a transparent conductive film such as ITO is formed by sputtering or the like. The surface of the substrate 1 8 1 , 1 8 2 and the formation of the electrode gates 14 , 15 of the predetermined pattern by lithography imaging. In the pasting process, a pair of glass substrates 1 8 1 and 1 8 2 are pasted with respect to the faces of the electrode electrodes 1 4 and 15 and are adhered by an adhesive. At the time of pasting, the opposing electrode grids 14 and 15 have a predetermined positional relationship, and function as a functional layer at the time of touch. These works are the same as the manufacture of the conventional touch panel unit 11. The following is for the reduction project. As shown in Fig. 5, after the touch unit master 120 is assembled in the method of manufacturing the touch panel unit of the present embodiment, the glass panels 12 and 13 are cut. Therefore, the object of the honing of the ejection eluent L is the surface (outer surface) on the outer side of the touch unit master 120. -19- 200828092 (16) Fig. 6 is a schematic cross-sectional view showing a glass honing machine according to an embodiment, and Fig. 7 is a side cross-sectional view showing the apparatus shown in Fig. 6. The glass honing machine shown in Figs. 6 and 7 is provided with a processing chamber 2 that performs mechanical honing processing inside, and a master holder that holds the touch unit master 120 in a predetermined position in the processing chamber 2. 3, and a nozzle 4 provided at a position where the eluent L is ejected toward the outside of the touch unit master 120 that is held by the master holder 3, and an eluent supply system that supplies the eluent L to the nozzle 4. 5. The processing chamber 2 includes a loading port 2 1 that is carried into the touch unit master 120 and a carrying port 22 that carries out the touch unit master 1 120 after the mechanical honing process. The carry-in port 21 and the carry-out port 22 are opened and closed by the lock gate 23. Further, the opening and closing is to move the lock gate 23 in the horizontal direction (the vertical direction of the paper surface in Fig. 6) perpendicular to the conveyance direction. This device is a moving mechanism including a touch unit master 120 that ejects an eluent and relatively mechanically moves the injection holes of the nozzle 4. As the person who is also used for the moving mechanism, the transport mechanism 30 that carries the touch unit master 120 through the carry-in port 21 and the carry-out port 22 is provided. The master holder 3 is provided as a member constituting the transport mechanism 30. Fig. 8 is a schematic perspective view showing the master holder 3 of the apparatus shown in Figs. 6 and 7. As shown in Fig. 8, the master holder 3 is a member that vertically holds the touch unit master 120. The master holder 3 is mainly composed of a base plate 3 1 of a horizontal posture, a pillar 32 erected on the base plate 31, and a cushion 33 attached to the pillar 32. The struts 3 2 are respectively provided on the 隅 portion -20- 200828092 (17) of the elongated rectangular base plate 3 1 , and a total of four are provided. A beam member 34 extending in the longitudinal direction of the base plate 3 1 is provided, and the upper ends of the respective legs 3 2 are joined to reinforce the master holder 3. Each of the struts 32 is slightly taller than the erected touch unit master 120. The interval between the two legs 32 of the short side of the base plate 3 1 is slightly larger than the thickness of the touch unit master 120. The interval between the two pillars 32 in the longitudinal direction of the base plate 31 is slightly longer than the length of the touch unit master 120. The touch unit master 120 is created to be inserted into the space made by the pillars 3 2 . / The cushioning member 33 is a member that directly contacts the touch unit master 120, and the touch unit master 1 2 0 is not shaken. The cushioning device 3 3 is formed of a fluororesin which is formed of a material which is not corroded (toughness) for the eluent L, such as Teflon (registered trademark of DuPont). As shown in Fig. 8, the cushioning member 3 3 is provided at the both ends in the longitudinal direction of the base plate 3 1 so as to connect the lower ends of the respective pillars 3 2 and to be connected to the pillars at both ends in the same longitudinal direction. The upper end of the 3 2 is composed. The held unit master 120 is held such that the cushions 33 contact the respective jaws. The lower cushion 3 3 that is in contact with the lower end portion of the touch unit master 120 has a concave shape in the short-side direction and an L-shaped cross-sectional shape in the longitudinal direction. The cushioning member 33 that abuts against the upper end portion of the touch unit master 120 has a laterally concave shape in a cross-sectional shape in the short-side direction. As shown in Fig. 8, when the touch unit master 1 20 is mounted, it is inserted from the upper side, and is formed into a recessed portion of each of the buffers 33. As the transport mechanism 30, for example, it is made up of a rack and a gear mechanism. The base plate 31 is configured as a rack, and the gear 3 〇 1 engaged therewith is transported - 21 - 200828092 (18). The gears are placed at regular intervals along the conveyor line. The gear 301 is disposed inside and outside the processing chamber 2. Further, the moving master holder 3 is appropriately guided to guide the entire guide member. As shown in Fig. 7, the nozzles 4 are disposed on both sides of the touch unit master 120 held by the master holder 3 so as to be sprayed simultaneously toward the outside of both sides of the touch unit tray 120. Deliquoring L. Fig. 9 is a perspective schematic view showing the shape of the nozzle 4 shown in Fig. 7. As shown in Fig. 9, the nozzle 4 is a tubular member having an injection hole 41. As shown in Fig. 9, the nozzles 4 are arranged to extend in the vertical direction, and are arranged in a plurality of intervals in the longitudinal direction (transport direction) of the touch unit master 120 at equal intervals. The injection holes 41 are provided in the nozzles 4 facing the contact unit master 120, and are disposed at equal intervals in the extending direction (vertical direction) of the tubes. Further, as the configuration of the nozzle 4, there are cases where more (or less) are arranged than in the ninth diagram, or a plurality of nozzles are arranged in the horizontal or oblique direction. Further, the nozzle 4 is not in the form of a plate or other shape. The eluent supply system 5 is composed of a liquid reservoir 5 1 in which the eluent L is stored, a connection reservoir 5 1 and a pipe 5 2 of each nozzle 4, a valve 53 or a liquid supply pump 54 provided in the pipe, and the like. Composition. From the supplied eluent L, a filter such as an impurity or a ruthenium or a pressure regulating valve or the like is provided, if necessary, by eluting the supply system 5, and the eluent L of each nozzle 4 is made of each perforation. 41 is ejected toward the outside of the touch unit master 120 held by the master holder 3. The ejected liquid L ejected is impacted outside and is eluted to honing the outside. In the meantime, the bottom of the processing chamber 2 is provided at the bottom of the processing chamber 2, and the discharge hole is provided at the lowermost portion. As shown in Fig. 6, the bottom of the processing chamber 2 is provided as shown in Fig. 6. twenty four. The discharge pipe 25 of the eluent L used is connected to the discharge port 24. The eluent L of the material of the unit master 120 is dropped to the portion as described above, and is discharged through the discharge port 24 and the discharge pipe 25. Further, the inner wall surface of the processing chamber 2 or the surface in the processing chamber 2 has a configuration in which the eluent L has chemical resistance. For example, in the case of fluoric acid, the clogging of the inner wall surface or the surface of each member to form a fluororesin coated with DuPont's trademark, the closing lock 23 of the clogging inlet 21 or the outlet 22 is not leaking. The ground is densely sealed. In the apparatus of the present embodiment, in order to further improve the flatness of the mechanical cymbal, a special effort has been made in the configuration of the nozzle 4. At this point, description will be made using FIG. 9 and FIG. A schematic diagram of the case where the liquid droplets are desorbed from the outer surfaces of the touch unit master 120 from the respective ejection holes 41. As shown in Fig. 9, each of the injection holes 41 is inclined at a direction of 45 degrees with respect to the direction in which the spray is extended (vertical direction), and the eluent L ejected from each of the injection holes 41 is as ninth. The direction is expanded by a tapered shape (or eleven eleven). Each of the extensions of L is on the outer surface of the touch unit master 120. When the respective expansion portions are superposed on the outer surface of the touch unit master 120, the eluent L is scattered, and turbulent flow is likely to occur, and as a result, it is difficult to obtain a flatness with good flatness. The funnel is connected to a table in which the components of the bottom portion of the contact chamber 2 are discharged, such as the eluent L, such as Teflon (in addition, the outside of the eluent after the eluate is ground, for 10 0 The figure shows that the tube which sprays the nozzle 4 unevenly is elongated. Therefore, as shown in the figure, the irregularity of the eluent L which does not overlap with the eluate is not -23-200828092 (20) It is intended to be superimposed. It is intended that the size of the injection hole 41, the distance between the nozzle 4 and the touch unit master 120, the ejection pressure, etc., may be appropriately selected. However, even if the expansion portions of the eluent L overlap In the case of honing which is excellent in flatness on the outside, this may also be the case. In the center of Fig. 10, the eluent L ejected from each of the injection holes 41 of the nozzle 4 is shown. The right side of the map shows the injection amount distribution of the eluent L from each of the ejection holes 4 1 viewed in the height direction of the touch unit master 120. When the touch unit master 120 passes between the nozzles 4 on both sides At the time, the outer points of the touch unit master 120 are received from any of the injection holes 4 1 The supply of the eluent L. At this time, the point P on the outer surface that passes through the immediately adjacent intermediate position of the two injection holes 4 1 adjacent to each other in the upper and lower directions becomes the two injection holes 4 adjacent thereto. 1. The supply of the eluent L is received. At this time, the point P is located at the end of the expanded portion of the tapered eluent L, and thus, as shown on the right side of FIG. The amount of the eluent L received is 1 / 2 of the other points, and the upper and lower adjacent injection holes 41 receive the supply of the eluent L of the injection hole 41 component "I, therefore, In the height direction of the touch unit master 120, the supply amount of the eluent L at each outer point is uniform. Further, the extended eluent L is not only in the cross-sectional shape as shown in Fig. 9. In the cross-sectional shape such as an elliptical shape, a circular shape, a square shape (square shape, a rectangular shape), a rhombic shape, or a parallelogram shape, the eluent L may be expanded. Hereinafter, the glass crucible may be used. The case of the mill is explained. The touch made by the electrode forming engineering and the pasting process as described above触-24- 200828092 (21) The unit master 1 2 0 is carried on the master holder 3 outside the processing chamber 2. The carrying operation is also carried out by the robot, or by the operator The situation of the hand is carried out. Before being carried on the master holder 3, there is also a case where the masking is shielded. When the transport mechanism 30 is operated, the lock gate 23 of the carry-in port 2 is opened, and the master holder 3 is held. The transfer tray 21 is moved into the processing chamber 2. The master holder 3 is stopped at a timing when the touch unit master 120 is positioned at a predetermined position between the nozzles 4 on both sides. The lock gate 23 of the carry-in port 21 is closed. In this state, the valve 53 of the eluent supply system 5 is opened, and the liquid supply pump 54 sends the eluent L to the respective nozzles 4 at a predetermined pressure. As a result, the eluent L is ejected from the respective ejection holes 41 of the respective nozzles 4, and the outer surface of the touch unit master 120 is impacted at a predetermined pressure. Thereby, the outside of the touch unit master 120 is cut. The eluent L in which the outer material is dissolved is dropped and discharged from the discharge hole 24. After the elapsed time for ejecting the eluent L, the liquid supply pump 54 is stopped and the valve 53 is closed. Thereafter, the transport mechanism 30 is operated to move the master holder 3, and the lock gate 23 of the outlet 22 is opened to carry the touch unit master 120 out of the processing chamber 2. The touch unit master 120 that has been carried out is an operation of cleaning or removing a masking tape or the like according to a cleaning liquid such as pure water. In the operation of the above-described glass honing machine, in the ejection of the eluent L, the touch unit master 120 may be displaced as needed. Among the points on the outer surface of the touch unit master 120, when the impact pressure becomes too high at the point where the respective injection holes 41 of the respective nozzles 4 are located at the shortest distance, the touch is moved back and forth in the ejection of the eluent L. With the unit master 1 20, the impact pressure at each point of the time average -25 - 200828092 (22) can be made uniform. By this, the flatness of the outer surface after the machine can be further improved. The movement of the touch unit master 120 is also performed in the downward direction. The glass honing machine is a control unit (not shown) that controls the entire body. The portion includes a function of sequentially controlling each unit, and the control of the above-described operation or the movement of the master holder 3 for uniformizing the impact is achieved by sequential control by control. # Further, in the configuration of the above-described glass honing machine, the liquid pressure of the liquid supply pump 54 is set to be in the range of 0.5 kg/cm 2 to 3.5 kg/cm 2 of the external pressure of the eluent L. At this time, the distance between the respective injection holes 41 of the nozzles and the outside (indicated by d in Fig. 7) is an element. When the distance d is excessively large, the force of the liquid supply pump 54 must be made high, and the pressure within the above range becomes impossible to be impacted. Further, when the distance d is small, the impact pressure is easily optimized, but the impact pressure on the shortest point of the injection hole 4 1 may occur, and a problem occurs in uniformity. In order to continuously ensure the uniformity of the impact, that is, the flatness of the honing, a practical configuration is adopted, and the distance d is preferably 5 mm or more and 100 mm or less. Further, in the process of performing the L-grinding by the eluent, the distance from the injection hole 41 to the outside is slightly longer, but the distance of 100 mm or less is the distance at which the honing is started. Further, when the impact pressure is smaller than 0.5 kg/cm2, the supply of the fresh wash L is reduced, and therefore the physical composition of the fresh wash is not sufficiently performed, so that the composition or state of the glass is insufficient. The uneven portion cannot be sufficiently honed, and the flatness is reduced. The important hydraulic surface of the control unit is increased to 4, and the transient is maintained (the 硏5 mm is deliquefied, the crystallization is asked - 26-200828092 (23) In addition, if the impact pressure is larger than 3.5 kg/cm2, only the shortest point from the injection hole 4 1 of the nozzle 4 is honed, and the flatness is deteriorated at this point. The impact pressure in the range of kg/cm 2 to 3.5 kg/cm 2 is preferable. Hereinafter, the breaking project will be described. In the breaking process, the cutting device is used to cut the mechanically honed touch unit master 1 20 As a cutting device, it can be used in the manufacture of a device for liquid crystal display, etc., or it can be transferred to a device used to manufacture a plurality of liquid crystal displays from a single glass substrate. Connecting wire for the lead In addition, the mounting of the lead wire is performed at the time of the pasting process, that is, the tip end of the lead wire is inserted between the pair of glass substrates at a predetermined position, and the lead wire is stuck in the state in which the lead wire is clamped. In this regard, description will be made using Fig. 11. Fig. 1 is a schematic view showing an example in which four touch panel units 11 are manufactured from a pair of glass substrates. In this example, a pair of glass substrates 181 are adhered. At the time of 182, as shown in Fig. 11, the leading end of the lead wire 140 is clamped at the predetermined % position. At this time, since the lead wire 140 is mounted in a state where the lead wire 140 is mounted, the lead wire 140 is not applied. The eluent is applied as a mask. After that, the four touch panel units are completed by the breaking process. In the above manufacturing method, for example, a glass substrate 1 8 1 , 1 8 2 having a thickness of about 1 mm is prepared, and after pasting, In the reduction project, the thickness of the glass substrate 1 8 1 , 1 8 2 is thinned to 〇·1 to 0.2 mm. Therefore, the prepared touch panel unit is thinner than conventional ones, and is suitable for being Hosted in, for example, mobile phone -27- 200828092 (24) Thin electronic devices, etc. In addition, the touch panel unit has a thinned surface and no micro-cracks, thus ensuring charging. In the above manufacturing method, the eluent L of the material outside the touch sheet is eluted. Spraying outward, attaching an acceleration greater than self-degree, spraying the eluate to the outside and impacting the so-called physical action of the impact of the eluent L, so that in addition to successively supplying fresh eluent L The eluent L of the surface material can be mechanically honed by the continuous flow out of the impact and excellent in uniformity. Even if there is an uneven portion in the state of formation or crystallization, the machine can be mechanically and uniformly used. mill. Therefore, the flatness of the machine surface can be improved, and the visibility of the manufactured touch panel unit is further improved according to the above-described glass honing machine by using a physical action to perform the outer surface in addition to the washing action. The honing, and the touch unit operation and the mechanical honing process are automated, so that the respective injection holes 41 of the nozzle 4 are separated by the distance between the injection holes 41 to the outside, and the distance is fixed. The impact pressure caused by the eluent L is made uniform and honed at a high flatness. Further, in the place where the touch unit master 120 is vertically maintained, it is a technique for facilitating external mechanical honing with the eluent L on the outside, and the nozzle 4 is provided on the touch unit mother. The strength of the disc 1 2 0 and the glass panel. The acceleration of the weight of the primary disk 120 is accelerated outside, and the outer surface of the outer disk is mechanically honed. Therefore, the efficiency is excellent outside the glass group, so the outer part of the machine is also the highest. The chemistry of the deliquoring L is also high, and the mobility of the master disk 120 is also high. The effect of the replacement is set, and it is easy to replace the state where the spray is helpful. On the other side, the outer surfaces of both sides -28-200828092 (25) can be mechanically honed at the same time, so that the productivity is also high in addition to the thinning of the touch unit master 120. Further, on both sides of the touch unit master 120, there are cases where the impact pressure of the eluent L is different. That is, the injection pressure is made higher on one side and the injection pressure is made lower on the other side. This is also the case where the amount of the surface on the outer side of the touch unit master 120 is increased by one side, and the other side is reduced. Further, the mechanical honing using the above-described eluent L can also be applied to the case of manufacturing a flat panel display such as a liquid crystal display. That is, the same is also performed when the mechanically honed and affixed display is cut outside the glass panel. In this case, the outer surfaces of both sides may be mechanically honed at the same time, and the injection pressures different from each other may be reduced. In the configuration of each of the above embodiments, the outer surface of the eluent L is honed by the physical action of the impact of the eluent, and the engraving is performed only by immersing in the etching liquid or only the etching liquid. Not the same. Further, in the apparatus of the above embodiment, the transport mechanism 30 is also used as the moving mechanism, but the transport mechanism 30 may be separately provided with the moving mechanism. For example, the master holder 3 is also provided as a part of the moving mechanism, and the touch unit master 120 transported by the transport mechanism 30 is carried to the master holder to move. In addition, the "relative movement" means that the positional relationship between the touch unit master 120 and the injection hole 4 1 of the nozzle 4 changes and moves, and as in the above embodiment, the injection hole 4 1 of the stationary nozzle 4 moves. Touching the single -29 - 200828092 (26) The master disk 120 is also possible, or it is also possible to move the jet hole 4 1 to the stationary touch unit master 120, and also to move both. In the above embodiment, in the resistive film type touch panel unit, both of the panels 1 2 and 1 3 on both sides of the gap 16 are made of glass, but the front panel as described in the prior art is made of plastic such as PET. Only the main panel is made of glass, and it can be implemented in the same way. In this case, a large plastic substrate, a glass substrate of the same size, is used to form a functional layer in the same manner. Moreover, it is adhered to mechanical honing only for the glass substrate. At the time of mechanical honing, if the eluent is contaminated with a plastic substrate, it is shielded. In the method of manufacturing a touch panel unit according to the above-described embodiment, the cutting process is performed after the work is cut, and the cutting process is performed after the cutting process. In this case, the respective touch panel units that have been disconnected are separately cut. However, in comparison with this, the above-described embodiment in which the touch unit master performs the cutting process is high in productivity. Further, in the embodiment of the above-described method of manufacturing the touch panel unit, the glass panel may be subjected to a reduction after the bonding, but the reduction may be performed before the bonding. In this case, the glass substrate may be mechanically honed and reduced to a predetermined thickness, and then the electrode grid may be formed, or the high-pole grid may be formed and the structure may be reduced. When the reduction process is performed after the electrode grid is formed, it is preferable that the formed electrode grid is not shielded with the eluent. Further, in the embodiment of the method for manufacturing a touch panel unit according to the above-described embodiment, the resistive touch panel unit is manufactured, but the touch panel unit of the other type is provided for the electrostatic capacitance type, the surface acoustic wave type, the optical type, and the like. The at least one glass panel of the display unit can be similarly manufactured for the kinetic glass and the post-reduction reduction tool -30-200828092 (27), that is, the glass can be made using the above glass honing machine Panel engineering. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a touch panel display device according to an embodiment of the present invention. Fig. 2 is a view schematically showing a processing method when the glass panels 1 2 and 1 3 shown in Fig. 1 are produced. Fig. 3 is a view showing the action of mechanical honing for using an eluent. Fig. 4 is a schematic diagram showing an embodiment of a touch panel display device other than the resistive film type. Fig. 5 is a schematic view showing a method of manufacturing a touch panel unit according to an embodiment. Figure 6 is a cross-sectional elevational view showing the glass honing machine of the embodiment. Fig. 7 is a schematic side sectional view showing the glass honing machine shown in Fig. 6. Fig. 8 is a perspective view showing the master holder 3 of the apparatus shown in Figs. 6 and 7. Fig. 9 is a perspective schematic view showing the shape of the nozzle 4 shown in Fig. 7. The first diagram is a schematic diagram showing a state in which the eluent L is uniformly ejected from the respective ejection holes 4 1 to the outside of the touch unit master 120. Fig. 1 is a schematic diagram showing an example of manufacturing a four-touch-31 - 200828092 (28) template unit from a pair of glass substrates. Fig. 1 is a schematic cross-sectional view showing a conventional touch panel display device of a resistive film type. [Description of main component symbols] 1 : Display unit 1 1 : Touch panel unit 1 2, 1 3 : Glass panel 1 4, 1 5 : Electrode grid 1 6 : Partition wall 1 7 : Adhesive material 1 8 1 , 1 8 2: Glass substrate 2: Process chamber 3: Substrate holder 3 〇: Transport mechanism 4: Nozzle 41: Spray hole 5 = Eluent supply line L: Eluent-32-