TW200703326A - Ultraviolet ray irradiation device - Google Patents

Ultraviolet ray irradiation device

Info

Publication number
TW200703326A
TW200703326A TW095117322A TW95117322A TW200703326A TW 200703326 A TW200703326 A TW 200703326A TW 095117322 A TW095117322 A TW 095117322A TW 95117322 A TW95117322 A TW 95117322A TW 200703326 A TW200703326 A TW 200703326A
Authority
TW
Taiwan
Prior art keywords
ultraviolet ray
supplying
irradiation
ray irradiation
ultraviolet
Prior art date
Application number
TW095117322A
Other languages
Chinese (zh)
Inventor
Masahito Namai
Shigenori Nakata
Hiroki Hayashi
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200703326A publication Critical patent/TW200703326A/en

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Led Device Packages (AREA)

Abstract

To provide an ultraviolet ray irradiation device for irradiating a rotated processed object with an ultraviolet ray which can easily control an irradiation amount by partially changing the light intensity of a light irradiation area. This device is provided with an ultraviolet ray irradiation part for supplying ultraviolet rays, a power supply part for supplying power to the ultraviolet ray irradiation part, and a control unit for supplying a control signal to the power supply part, and irradiates a rotated processed object with an ultraviolet ray. The ultraviolet ray irradiation part is provided with a plurality of linearly arrayed ultraviolet ray emission diodes. The ultraviolet ray emitted from the ultraviolet ray emission diode is formed in a thin and long light irradiation area by a lens, and the ultraviolet ray intensity of the light irradiation area is partially changed by controlling power supplied to each emission diode.
TW095117322A 2005-07-14 2006-05-16 Ultraviolet ray irradiation device TW200703326A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005205765A JP2007026517A (en) 2005-07-14 2005-07-14 Ultraviolet ray irradiation device

Publications (1)

Publication Number Publication Date
TW200703326A true TW200703326A (en) 2007-01-16

Family

ID=37609249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095117322A TW200703326A (en) 2005-07-14 2006-05-16 Ultraviolet ray irradiation device

Country Status (4)

Country Link
JP (1) JP2007026517A (en)
KR (1) KR20070009389A (en)
CN (1) CN1896670A (en)
TW (1) TW200703326A (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4193947B2 (en) * 2006-06-13 2008-12-10 京都電機器株式会社 UV irradiation equipment
JP4554646B2 (en) * 2007-07-02 2010-09-29 オリジン電気株式会社 Resin film forming method and resin film forming apparatus
WO2008029615A1 (en) 2006-09-04 2008-03-13 Origin Electric Company, Limited Method and apparatus for forming resin film
DE102007022895B9 (en) * 2007-05-14 2013-11-21 Erich Thallner Device for transferring structures provided in a mask onto a substrate
JP5386232B2 (en) * 2009-05-26 2014-01-15 日東電工株式会社 UV irradiation equipment
JP5313778B2 (en) * 2009-06-15 2013-10-09 リンテック株式会社 Light irradiation apparatus and light irradiation method
JP2012099197A (en) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp Optical imprint method
CN107567597B (en) * 2015-03-31 2020-08-11 东京毅力科创株式会社 Exposure dose homogenization by rotation, translation, and variable processing conditions
CN106678625A (en) * 2017-03-06 2017-05-17 成都恒坤光电科技有限公司 Ultraviolet light source assembly, ultraviolet optical system and ultraviolet printing device
JP6825956B2 (en) * 2017-03-28 2021-02-03 株式会社Ｓｃｒｅｅｎホールディングス Selection method of substrate processing equipment, substrate processing method and ultraviolet irradiation means

Also Published As

Publication number Publication date
CN1896670A (en) 2007-01-17
JP2007026517A (en) 2007-02-01
KR20070009389A (en) 2007-01-18

Similar Documents

Publication Publication Date Title
TW200703326A (en) Ultraviolet ray irradiation device
WO2008027093A3 (en) High-efficiency light- emitting apparatus using light emitting diodes
TW200727044A (en) Backlight unit and light source for use in same
RU2015141708A (en) PHOTOTHERAPEUTIC DEVICE, METHOD AND APPLICATION
EP1742049A3 (en) Laser-based maintenance apparatus
WO2006121939A3 (en) Optical signaling apparatus with precise beam control
WO2008147583A3 (en) Multi-led ophthalmic illuminator
WO2004073353A3 (en) Method and apparatus for the efficient collection and distribution of light for illumination
EP2032895A4 (en) Illumintion system and method for recycling light to increase the brightness of the light source
MX2021009590A (en) Led lighting apparatus and lighting system having same.
WO2006100303A3 (en) Lighting means and method for obtaining lighting means
RU2012144005A (en) BACKLIGHT LED LAMP
WO2005041254A3 (en) Improved light source using light emitting diodes and an improved method of collecting the energy radiating from them
DE60229546D1 (en) THERAPEUTIC LIGHT EMITTING DEVICE
EP1735815A4 (en) Illumination systems utilizing light emitting diodes and light recycling to enhance output radiance
ATE444717T1 (en) LASER MICROPORATOR
EP2325883A3 (en) Light emitting module and vehicle lamp
TW200621072A (en) Light-generating body
ATE460069T1 (en) LUMINAIRE PROVIDING AN OUTPUT BEAM WITH A CONTROLLED PHOTOMETRIC DISTRIBUTION
ATE552885T1 (en) COMPUTER CONTROLLED LIGHT THERAPY DEVICE
RU2016124990A (en) Systems and methods for controlling the radiation intensity of a group of light emitting diodes
WO2012006128A3 (en) High brightness illumination devices using wavelength conversion materials
WO2009041562A1 (en) Optical scanning device, optical scanning type image display device, and retinal scanning type image display device
JP5035272B2 (en) Light irradiation device
KR101532417B1 (en) LED shadowless lamp using double reflector