TW200510714A - Method for manufacturing an array pH sensor and its readout circuit - Google Patents
Method for manufacturing an array pH sensor and its readout circuitInfo
- Publication number
- TW200510714A TW200510714A TW092124277A TW92124277A TW200510714A TW 200510714 A TW200510714 A TW 200510714A TW 092124277 A TW092124277 A TW 092124277A TW 92124277 A TW92124277 A TW 92124277A TW 200510714 A TW200510714 A TW 200510714A
- Authority
- TW
- Taiwan
- Prior art keywords
- array
- sensor
- egfet
- readout circuit
- gate
- Prior art date
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
In this invention, an extended gate ion sensitive field effect transistor (EGFET) was used to be an array pH sensor and its readout circuit. The multi-structures of this EGFET, which used to be an array pH sensor, are SnO2/Al/SiO2 gate EGFET and SnO2/ITO/glass gate EGFET, respectively. The characteristics of the EGFET have high performances such as a linear pH sensitivity of approximately 56~58mV/pH in a concentration range between pH2 and pH10. Besides that, two clock signals were used to control the data of readout circuits and devices. Especially, the device of the array pH sensor has increased the resolution and decreased the noise. In addition, this invention has other advantages, such as the inexpensive fabrication system, low cost, and mass production characteristics. Based on the above characteristics, a disposal sensing device can be achieved. Thus, this invention has a high feasibility in array pH sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092124277A TWI223062B (en) | 2003-09-03 | 2003-09-03 | Manufacture of an array pH sensor and device of its readout circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092124277A TWI223062B (en) | 2003-09-03 | 2003-09-03 | Manufacture of an array pH sensor and device of its readout circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI223062B TWI223062B (en) | 2004-11-01 |
TW200510714A true TW200510714A (en) | 2005-03-16 |
Family
ID=34546292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092124277A TWI223062B (en) | 2003-09-03 | 2003-09-03 | Manufacture of an array pH sensor and device of its readout circuit |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI223062B (en) |
Cited By (15)
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US9951382B2 (en) | 2006-12-14 | 2018-04-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
US9958414B2 (en) | 2010-09-15 | 2018-05-01 | Life Technologies Corporation | Apparatus for measuring analytes including chemical sensor array |
US9960253B2 (en) | 2010-07-03 | 2018-05-01 | Life Technologies Corporation | Chemically sensitive sensor with lightly doped drains |
US9964515B2 (en) | 2008-10-22 | 2018-05-08 | Life Technologies Corporation | Integrated sensor arrays for biological and chemical analysis |
US9970984B2 (en) | 2011-12-01 | 2018-05-15 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
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US9989489B2 (en) | 2006-12-14 | 2018-06-05 | Life Technnologies Corporation | Methods for calibrating an array of chemically-sensitive sensors |
US10436742B2 (en) | 2013-01-08 | 2019-10-08 | Life Technologies Corporation | Methods for manufacturing well structures for low-noise chemical sensors |
US10605767B2 (en) | 2014-12-18 | 2020-03-31 | Life Technologies Corporation | High data rate integrated circuit with transmitter configuration |
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US10718733B2 (en) | 2009-05-29 | 2020-07-21 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
US10767224B2 (en) | 2014-12-18 | 2020-09-08 | Life Technologies Corporation | High data rate integrated circuit with power management |
US10809226B2 (en) | 2009-05-29 | 2020-10-20 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
US11307166B2 (en) | 2010-07-01 | 2022-04-19 | Life Technologies Corporation | Column ADC |
US11339430B2 (en) | 2007-07-10 | 2022-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
-
2003
- 2003-09-03 TW TW092124277A patent/TWI223062B/en not_active IP Right Cessation
Cited By (27)
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US9951382B2 (en) | 2006-12-14 | 2018-04-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
US11435314B2 (en) | 2006-12-14 | 2022-09-06 | Life Technologies Corporation | Chemically-sensitive sensor array device |
US10633699B2 (en) | 2006-12-14 | 2020-04-28 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
US9989489B2 (en) | 2006-12-14 | 2018-06-05 | Life Technnologies Corporation | Methods for calibrating an array of chemically-sensitive sensors |
US10816506B2 (en) | 2006-12-14 | 2020-10-27 | Life Technologies Corporation | Method for measuring analytes using large scale chemfet arrays |
US10502708B2 (en) | 2006-12-14 | 2019-12-10 | Life Technologies Corporation | Chemically-sensitive sensor array calibration circuitry |
US11339430B2 (en) | 2007-07-10 | 2022-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
US9964515B2 (en) | 2008-10-22 | 2018-05-08 | Life Technologies Corporation | Integrated sensor arrays for biological and chemical analysis |
US11137369B2 (en) | 2008-10-22 | 2021-10-05 | Life Technologies Corporation | Integrated sensor arrays for biological and chemical analysis |
US11768171B2 (en) | 2009-05-29 | 2023-09-26 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
US11692964B2 (en) | 2009-05-29 | 2023-07-04 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
US10809226B2 (en) | 2009-05-29 | 2020-10-20 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
US10718733B2 (en) | 2009-05-29 | 2020-07-21 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
TWI624665B (en) * | 2010-06-30 | 2018-05-21 | 生命技術公司 | Ion-sensing charge-accumulation circuits and methods |
US10641729B2 (en) | 2010-06-30 | 2020-05-05 | Life Technologies Corporation | Column ADC |
US10481123B2 (en) | 2010-06-30 | 2019-11-19 | Life Technologies Corporation | Ion-sensing charge-accumulation circuits and methods |
US11307166B2 (en) | 2010-07-01 | 2022-04-19 | Life Technologies Corporation | Column ADC |
US9960253B2 (en) | 2010-07-03 | 2018-05-01 | Life Technologies Corporation | Chemically sensitive sensor with lightly doped drains |
US9958414B2 (en) | 2010-09-15 | 2018-05-01 | Life Technologies Corporation | Apparatus for measuring analytes including chemical sensor array |
US9958415B2 (en) | 2010-09-15 | 2018-05-01 | Life Technologies Corporation | ChemFET sensor including floating gate |
US10365321B2 (en) | 2011-12-01 | 2019-07-30 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
US9970984B2 (en) | 2011-12-01 | 2018-05-15 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
US10598723B2 (en) | 2011-12-01 | 2020-03-24 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
US10436742B2 (en) | 2013-01-08 | 2019-10-08 | Life Technologies Corporation | Methods for manufacturing well structures for low-noise chemical sensors |
US10605767B2 (en) | 2014-12-18 | 2020-03-31 | Life Technologies Corporation | High data rate integrated circuit with transmitter configuration |
US11536688B2 (en) | 2014-12-18 | 2022-12-27 | Life Technologies Corporation | High data rate integrated circuit with transmitter configuration |
US10767224B2 (en) | 2014-12-18 | 2020-09-08 | Life Technologies Corporation | High data rate integrated circuit with power management |
Also Published As
Publication number | Publication date |
---|---|
TWI223062B (en) | 2004-11-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |