TW200510714A - Method for manufacturing an array pH sensor and its readout circuit - Google Patents

Method for manufacturing an array pH sensor and its readout circuit

Info

Publication number
TW200510714A
TW200510714A TW092124277A TW92124277A TW200510714A TW 200510714 A TW200510714 A TW 200510714A TW 092124277 A TW092124277 A TW 092124277A TW 92124277 A TW92124277 A TW 92124277A TW 200510714 A TW200510714 A TW 200510714A
Authority
TW
Taiwan
Prior art keywords
array
sensor
egfet
readout circuit
gate
Prior art date
Application number
TW092124277A
Other languages
Chinese (zh)
Other versions
TWI223062B (en
Inventor
Stephen-Kan Hsiung
Jung-Chuan Chou
Tai-Ping Sun
Chung-We Pan
Jing-Sheng Jiang
Original Assignee
Univ Chung Yuan Christian
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Chung Yuan Christian filed Critical Univ Chung Yuan Christian
Priority to TW092124277A priority Critical patent/TWI223062B/en
Application granted granted Critical
Publication of TWI223062B publication Critical patent/TWI223062B/en
Publication of TW200510714A publication Critical patent/TW200510714A/en

Links

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

In this invention, an extended gate ion sensitive field effect transistor (EGFET) was used to be an array pH sensor and its readout circuit. The multi-structures of this EGFET, which used to be an array pH sensor, are SnO2/Al/SiO2 gate EGFET and SnO2/ITO/glass gate EGFET, respectively. The characteristics of the EGFET have high performances such as a linear pH sensitivity of approximately 56~58mV/pH in a concentration range between pH2 and pH10. Besides that, two clock signals were used to control the data of readout circuits and devices. Especially, the device of the array pH sensor has increased the resolution and decreased the noise. In addition, this invention has other advantages, such as the inexpensive fabrication system, low cost, and mass production characteristics. Based on the above characteristics, a disposal sensing device can be achieved. Thus, this invention has a high feasibility in array pH sensor.
TW092124277A 2003-09-03 2003-09-03 Manufacture of an array pH sensor and device of its readout circuit TWI223062B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW092124277A TWI223062B (en) 2003-09-03 2003-09-03 Manufacture of an array pH sensor and device of its readout circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092124277A TWI223062B (en) 2003-09-03 2003-09-03 Manufacture of an array pH sensor and device of its readout circuit

Publications (2)

Publication Number Publication Date
TWI223062B TWI223062B (en) 2004-11-01
TW200510714A true TW200510714A (en) 2005-03-16

Family

ID=34546292

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092124277A TWI223062B (en) 2003-09-03 2003-09-03 Manufacture of an array pH sensor and device of its readout circuit

Country Status (1)

Country Link
TW (1) TWI223062B (en)

Cited By (15)

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US9951382B2 (en) 2006-12-14 2018-04-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9958414B2 (en) 2010-09-15 2018-05-01 Life Technologies Corporation Apparatus for measuring analytes including chemical sensor array
US9960253B2 (en) 2010-07-03 2018-05-01 Life Technologies Corporation Chemically sensitive sensor with lightly doped drains
US9964515B2 (en) 2008-10-22 2018-05-08 Life Technologies Corporation Integrated sensor arrays for biological and chemical analysis
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
TWI624665B (en) * 2010-06-30 2018-05-21 生命技術公司 Ion-sensing charge-accumulation circuits and methods
US9989489B2 (en) 2006-12-14 2018-06-05 Life Technnologies Corporation Methods for calibrating an array of chemically-sensitive sensors
US10436742B2 (en) 2013-01-08 2019-10-08 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
US10605767B2 (en) 2014-12-18 2020-03-31 Life Technologies Corporation High data rate integrated circuit with transmitter configuration
US10641729B2 (en) 2010-06-30 2020-05-05 Life Technologies Corporation Column ADC
US10718733B2 (en) 2009-05-29 2020-07-21 Life Technologies Corporation Methods and apparatus for measuring analytes
US10767224B2 (en) 2014-12-18 2020-09-08 Life Technologies Corporation High data rate integrated circuit with power management
US10809226B2 (en) 2009-05-29 2020-10-20 Life Technologies Corporation Methods and apparatus for measuring analytes
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9951382B2 (en) 2006-12-14 2018-04-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US11435314B2 (en) 2006-12-14 2022-09-06 Life Technologies Corporation Chemically-sensitive sensor array device
US10633699B2 (en) 2006-12-14 2020-04-28 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9989489B2 (en) 2006-12-14 2018-06-05 Life Technnologies Corporation Methods for calibrating an array of chemically-sensitive sensors
US10816506B2 (en) 2006-12-14 2020-10-27 Life Technologies Corporation Method for measuring analytes using large scale chemfet arrays
US10502708B2 (en) 2006-12-14 2019-12-10 Life Technologies Corporation Chemically-sensitive sensor array calibration circuitry
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US9964515B2 (en) 2008-10-22 2018-05-08 Life Technologies Corporation Integrated sensor arrays for biological and chemical analysis
US11137369B2 (en) 2008-10-22 2021-10-05 Life Technologies Corporation Integrated sensor arrays for biological and chemical analysis
US11768171B2 (en) 2009-05-29 2023-09-26 Life Technologies Corporation Methods and apparatus for measuring analytes
US11692964B2 (en) 2009-05-29 2023-07-04 Life Technologies Corporation Methods and apparatus for measuring analytes
US10809226B2 (en) 2009-05-29 2020-10-20 Life Technologies Corporation Methods and apparatus for measuring analytes
US10718733B2 (en) 2009-05-29 2020-07-21 Life Technologies Corporation Methods and apparatus for measuring analytes
TWI624665B (en) * 2010-06-30 2018-05-21 生命技術公司 Ion-sensing charge-accumulation circuits and methods
US10641729B2 (en) 2010-06-30 2020-05-05 Life Technologies Corporation Column ADC
US10481123B2 (en) 2010-06-30 2019-11-19 Life Technologies Corporation Ion-sensing charge-accumulation circuits and methods
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
US9960253B2 (en) 2010-07-03 2018-05-01 Life Technologies Corporation Chemically sensitive sensor with lightly doped drains
US9958414B2 (en) 2010-09-15 2018-05-01 Life Technologies Corporation Apparatus for measuring analytes including chemical sensor array
US9958415B2 (en) 2010-09-15 2018-05-01 Life Technologies Corporation ChemFET sensor including floating gate
US10365321B2 (en) 2011-12-01 2019-07-30 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US10598723B2 (en) 2011-12-01 2020-03-24 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US10436742B2 (en) 2013-01-08 2019-10-08 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
US10605767B2 (en) 2014-12-18 2020-03-31 Life Technologies Corporation High data rate integrated circuit with transmitter configuration
US11536688B2 (en) 2014-12-18 2022-12-27 Life Technologies Corporation High data rate integrated circuit with transmitter configuration
US10767224B2 (en) 2014-12-18 2020-09-08 Life Technologies Corporation High data rate integrated circuit with power management

Also Published As

Publication number Publication date
TWI223062B (en) 2004-11-01

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