TW200416685A - Magnetic spin valve sensor having an exchange stabilization layer recessed from the active track edge - Google Patents

Magnetic spin valve sensor having an exchange stabilization layer recessed from the active track edge Download PDF

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Publication number
TW200416685A
TW200416685A TW092132001A TW92132001A TW200416685A TW 200416685 A TW200416685 A TW 200416685A TW 092132001 A TW092132001 A TW 092132001A TW 92132001 A TW92132001 A TW 92132001A TW 200416685 A TW200416685 A TW 200416685A
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Taiwan
Prior art keywords
layer
ferromagnetic
offset
magnetic
free
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TW092132001A
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Chinese (zh)
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TWI285369B (en
Inventor
Hardayal Singh Gill
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Hitachi Global Storage Tech Nl
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects

Abstract

A magnetic spin valve sensor is provided which has antiparallel coupled end tabs to magnetically stabilize the free layer. The antiparallel coupled bias stabilization tabs include antiferromagnetic layers which are laterally recessed from the ends of the ferromagnetic bias layers. A disk drive is provided having the novel spin valve sensor as the read element.

Description

200416685 玖、發明說明: 【發明所屬之技術領域】 本發明係關於—般用於磁性磁碟機的磁性旋轉 ,,更明確地說係關於具有一反平行攔標結構的磁性旋轉;; 感測器,該結構具有自主動軌道、嘉 ^ 【先前技術】 純料緣凹人的-交換穩定層。 ,採用數位資訊之磁性記錄的磁碟機儲存將大部分 當代電腦系統中。磁碟機具有至少一旋轉磁碟,該磁 有資料之離散同心轨道。每個磁碟機還具有至少一記錄磁 頭,該磁頭一般具有一分離寫入元件及讀取元件,用: 入並且讀取軌道上的資料。記錄磁頭係構造在—滑動塊丄 而且该滑動塊係附著於一懸置結構。記錄磁頭、滑動塊及 懸置結構之組合係稱為磁頭萬向架裝配件。此外,且有將 記錄磁頭定位在相關的特定軌道上之—驅動器。該驅動哭 首先旋轉以尋找相關的軌道。將記錄磁頭定位在軌道上: 後’驅動器保持記錄磁頭與該軌道精確配準。磁碟機中的 磁碟具有-基板及-磁性層,該層係形成於用於磁性記錚 之该基板上。承載記錄磁頭的滑動塊具有一面對磁碟的表 面,:空氣轴承係構造在該表面上。空氣轴承使滑動塊可 以在-空氣墊上浮動並且可以接近於磁碟表面而定位。或 者’面對磁碟的滑動塊表面可以調適以局部或連續與磁碟 接觸。 磁性旋轉間感測器係在大多數當代磁碟機中用作讀取元 件。磁性旋轉闕感測器為若干夹入的層,包括一鐵磁固定200416685 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to the magnetic rotation of magnetic disk drives in general, and more specifically to the magnetic rotation with an anti-parallel barrier structure; , a structure having the initiative from the track, Ka ^ [prior art] materials edge recess pure human - exchange stabilization layer. Magnetic disk storage using digital information will be stored in most contemporary computer systems. The disk drive has at least one rotating disk with discrete concentric tracks of magnetic data. Each disk drive also has at least one recording head. The head generally has a separate writing element and a reading element for: reading in and reading out data on the track. The recording head is constructed in a slider 滑动 and the slider is attached to a suspension structure. The combination of the recording head, slider and suspension structure is called a head gimbal mount. In addition, there is a drive for positioning the recording head on a related specific track. The driver cries first to find the relevant orbit. Positioning the recording head on the track: The rear 'drive keeps the recording head accurately registered with the track. The disk drives having - a substrate and - a magnetic layer, the magnetic layer is formed on a substrate on which the note Zheng. The slider carrying the recording head has a surface facing the magnetic disk, and an air bearing is formed on the surface. The air bearing allows the slider to float on the air cushion and can be positioned close to the disk surface. Or 'facing the sliding surface may be adapted to the local disk or in continuous contact with the disk. Magnetic rotary sensors are used as reading elements in most contemporary disk drives. The magnetic rotation sensor is a number of sandwiched layers, including a ferromagnetic fixed

O:\88\88902.DOC 200416685 層、-:磁性導電層及一鐵磁自由層。旋轉閥感測… 阻根據-施加磁場(例如來自磁碟上的寫入磁 $ 場)之方向及幅度而改變。為了偵測電阻變化 :之磁 流流經感測器。 而 a ’則電 磁性旋轉閥感測器中的自由層通常係在出錄定弱❹ 時操作,、以確保磁性穩定性並且防止虛擬信號。將弱磁^ 施加於感測器有時稱為磁性偏移感測器。可以有效地用: 磁性偏移之-結構為-對磁性欄標,該等搁標係與自由層 之部分反平行摩馬合。反平行搞合搁標包括_鐵磁偏移層及 -··與該鐵磁偏移層交換耦合的一反鐵磁層。此結構係有效地 ,但疋當偏移層係、%全由反鐵磁層覆蓋時,心則器變得磁 性僵硬而且敏感性劣化。因此若採用傳統感測器,則當達 到穩定性時,敏感性減小。 需要一種磁性旋轉閥感測器,其具有反平行耦合偏移攔 標,而且當獲得穩定性時不犧牲敏感性。 【發明内容】 本發明之一較佳具體實施例提供一磁性旋轉閥感測器, 其具有新穎反平行耦合偏移欄標。每個反平行偏移欄標包 括一鐵磁偏移層及與該鐵磁偏移層交換耦合的一反鐵磁層 。反鐵磁層係自鐵磁偏移層而橫向凹入。因此所提供的磁 性旋轉閥感測器具有磁性穩定性而且具有高敏感性。本發 明之另一具體實施例提供具有一讀取元件之磁碟機,該元 件包括一磁性旋轉閥感測器,該感測器具有反平行耦合端 攔標,該等攔標係與一橫向凹入反鐵磁層耦合。O: \ 88 \ 88902.DOC 200416685 layer, -: magnetic conductive layer and a ferromagnetic free layer. Rotary valve sensing ... The resistance changes depending on the direction and magnitude of the applied magnetic field (for example, from a write magnetic field on a magnetic disk). In order to detect the resistance change: the flow through the magnetic sensor. The a 'is the free layer in the electro-magnetic rotary valve sensor, which is usually operated at the time of recording and recording to ensure magnetic stability and prevent virtual signals. Applying a weak field to the sensor is sometimes referred to as a magnetic offset sensor. It can be effectively used: a magnetic offsets - structure - magnetic fields marked, part of such rest of the free layer standard based Moma together antiparallel. The anti-parallel coupling shelf includes a ferromagnetic offset layer and -... an antiferromagnetic layer that is exchange-coupled with the ferromagnetic offset layer. This structure effectively system, but when the layer system is shifted Cloth,% coverage by the antiferromagnetic layer, the magnetic core from becoming stiff the sensitivity and deterioration. Therefore, if a conventional sensor is used, when stability is reached, the sensitivity is reduced. There is a need for a magnetic rotary valve sensor that has anti-parallel coupling offset barriers without sacrificing sensitivity when stability is obtained. SUMMARY OF THE INVENTION A preferred embodiment of the present invention provides a magnetic rotary valve sensor having a novel anti-parallel coupling offset column. Each anti-parallel offset column includes a ferromagnetic offset layer and an anti-ferromagnetic layer exchange-coupled with the ferromagnetic offset layer. The antiferromagnetic layer is recessed laterally from the ferromagnetic offset layer. The magnetic rotary valve sensor provided is therefore magnetically stable and highly sensitive. Another embodiment of the present invention provides a magnetic disk drive having a reading element, the element includes a magnetic rotary valve sensor, the sensor has an anti-parallel coupling end stop, and the stop is connected with a horizontal Recessed antiferromagnetic layer coupling.

O:\88\88902.DOC 200416685 攸以下4細說明’結合附圖以及藉由範例說明的本發明 之原理,將更明白本發明之其他方面與優點。 【實施方式】 依據本發明之一較佳具體實施例的磁性旋轉閥感測器, 包括具有反平行耦合端攔標之一自由層,每個欄標具有一 橫向凹入反鐵磁層。本發明之具體實施例提供具有良好磁 性穩定性而不犧牲敏感性之感測器。 茶考圖1,一磁碟機100具有至少一可旋轉磁碟1〇2,該磁 碟係由一轉軸104支援並且由一馬達(圖中未顯示)旋轉。具 有至少一滑動塊106,其具有一附著記錄磁頭1〇8,當讀取 及寫入時,該磁頭定位於磁碟1〇2表面上。記錄磁頭1〇8包 括寫入元件,用於將資料寫入磁碟1 〇2。記錄磁頭還包括 依據本發明的一磁性旋轉閥感測器(詳細顯示在下文中),其 (丁、用作一碩取元件用於從磁碟讀取資料。滑動塊丨係附著 於一懸置結構11 0而該懸置結構i丨〇係附著於一驅動器丨丨2。 驅動器112係轉動式將附著114附著於磁碟機1〇〇之外殼116 ,亚且係由一語音線圈馬達丨丨8轉動。隨著磁碟在轉動,驅 動器112沿磁碟1〇2表面上的一徑向弓形路徑12〇定位滑動 塊106連同懸置結構110,以存取相關資料執道。 麥考圖1,在磁碟機100操作期間,轉動磁碟1〇2相對於滑 動塊106之運動在滑動塊106與磁碟1〇2表面之間產生一空 氣軸承,該空氣軸承施加一向上力於滑動塊1〇6上。此向上 力係藉由來自懸置結構110的一彈簧力而平衡,從而促使滑 動塊106滑向磁碟1〇2之表面。或者,滑動塊1〇6可以在操作O: \ 88 \ 88902.DOC 200416685 The following 4 detailed descriptions', combined with the drawings and the principles of the present invention illustrated by examples, will further understand other aspects and advantages of the present invention. [Embodiment] A magnetic rotary valve sensor according to a preferred embodiment of the present invention includes a free layer having an anti-parallel coupling end stop, and each column has a laterally concave anti-ferromagnetic layer. A specific embodiment of the present invention provides a sensor having good magnetic stability without sacrificing sensitivity. As shown in Fig. 1, a magnetic disk drive 100 has at least one rotatable magnetic disk 102, which is supported by a rotating shaft 104 and rotated by a motor (not shown). It has at least one slider 106, which has an attached recording magnetic head 108, which is positioned on the surface of the magnetic disk 102 when reading and writing. The recording head 108 includes a writing element for writing data to the magnetic disk 102. The recording head also includes a magnetic rotary valve sensor (shown in detail below) according to the present invention, which is used as a master device for reading data from a magnetic disk. The slider is attached to a suspension Structure 110 and the suspension structure i 丨 〇 are attached to a drive 丨 2. 2. Drive 112 is a type of rotation that attaches the attachment 114 to the enclosure 116 of the disk drive 100, and is powered by a voice coil motor. 8. Rotate. As the magnetic disk rotates, the drive 112 locates the sliding block 106 along with the suspension structure 110 along a radial arcuate path 120 on the surface of the magnetic disk 102 to access the relevant data. McCaw Figure 1 During the operation of the magnetic disk drive 100, the movement of the rotating disk 102 relative to the slider 106 creates an air bearing between the slider 106 and the surface of the disk 102, which exerts an upward force on the slider On the 106. This upward force is balanced by a spring force from the suspension structure 110, thereby causing the slider 106 to slide toward the surface of the magnetic disk 102. Alternatively, the slider 106 can be operated

O:\88\88902.DOC 200416685 期間局部或連續與磁碟1〇2表面接觸。 圖2解說一滑動塊200之一更詳細才見圖。言己錄磁頭最好係 構造在滑動塊200之尾部表面2〇6上。圖2解說記錄磁頭之寫 入元件的線圈214之上磁極2〇8及線阻21〇。讀取元件係形成 於滑動塊200與寫入元件之間,因此未在圖2中解說。圖中 解說電連接觸點區212,其允許與寫入元件及讀取元件連接。 圖3解說一記錄磁頭3〇〇(不必按比例),其係在滑動塊3〇2 之面對磁碟的表面上觀察到。記錄磁頭3〇〇係構造在滑動塊 302上而且通常係包裝在一絕緣材料(圖中未顯示)中。依據 •本發明的讀取元件感測器3〇8係夾在二磁性遮罩3〇4、1〇6之 間以改善空間解析度。磁性遮罩3〇6之一還係普遍用作寫入 磁頭的磁極之一。寫入元件包括一第二磁極312及一寫入間 隙 310 〇 圖4解說依據本發明的磁性旋轉閥感測器4〇〇的讀取元件 之一放大圖(不必按比例)。感測器4〇〇包括一固定層4〇2,該 層可以為一單一鐵磁層。或者,固定層4〇2可以為一層壓結 構,其包括二鐵磁層及一中間層(適合為釕),該中間層提升 該等二鐵磁層之間的反平行耦合。固定層4〇2可以為自固定 層,或者固定層402可與一鄰近反鐵磁層(圖中未顯示)交換 耦合。一導電非磁性層404(適合為銅)係形成於固定層4〇2 上。一鐵磁自由層406然後係形成於導電非磁性層4〇4上。 一釕層408係形成於鐵磁自由層4〇6上。 參考圖4,自由層406係採用二反平行耦合偏移穩定欄標 422、424而得到磁性穩定。第一反平行搞合偏移穩定欄標O: \ 88 \ 1〇2 partial or continuous contact with the disk surface during 88902.DOC 200416685. FIG. 2 illustrates one of the sliding blocks 200 in more detail. The Yanji recording head is preferably constructed on the rear surface 206 of the slider 200. Fig. 2 illustrates a magnetic pole 208 and a wire resistance 208 above a coil 214 of a writing element of the recording head. Since the reading element is formed between the slider 200 and the writing element, it is not illustrated in FIG. 2. The figure illustrates an electrical connection contact area 212 that allows connection to a writing element and a reading element. FIG. 3 illustrates a recording head 300 (not necessarily to scale), which is observed on the surface of the slider 30 facing the magnetic disk. The recording head 300 is constructed on the slider 302 and is usually packaged in an insulating material (not shown). 3〇8 sensor element according to the read system of the present invention • sandwiched between two magnetic shield 3〇4,1〇6 to improve the spatial resolution. One of the magnetic masks 306 is also one of the magnetic poles commonly used as a write head. The writing element includes a second magnetic pole 312 and a writing gap 310. FIG. 4 illustrates an enlarged view of one of the reading elements of the magnetic rotary valve sensor 400 according to the present invention (not necessarily to scale). The sensor 400 includes a fixed layer 402, which may be a single ferromagnetic layer. Alternatively, a fixing layer may be 4〇2 laminated structure which includes two ferromagnetic layers and an intermediate layer (suitably ruthenium), the antiparallel coupling intermediate layer between the lifting these two ferromagnetic layers. The fixed layer 402 may be a self-fixed layer, or the fixed layer 402 may be exchange-coupled with an adjacent antiferromagnetic layer (not shown). A conductive non-magnetic layer 404 (suitably copper) is formed on the fixed layer 402. A ferromagnetic free layer 406 is then formed on the conductive nonmagnetic layer 404. A ruthenium layer 408 is formed on the ferromagnetic free layer 406. Referring to FIG. 4, the free layer 406 is magnetically stabilized using two antiparallel coupling offset stabilization columns 422, 424. First anti-parallel engagement offset stability bar

O:\88\88902.DOC -9- 200416685 422包括一第一鐵磁偏移層41〇,該層具有置放於釕層4〇8上 的一端部412。第一鐵磁偏移層41〇係與橫跨釕層4〇8的自由 層406之一部分414反平行耦合。與第一鐵磁偏移層41〇相對 立的自由層406之部分4 14中的磁化418,係在方向上與第一 鐵磁偏移層410中的磁化416相對立。第一反平行耦合偏移 穩定攔標422還包括一第一反鐵磁層420,該層係形成於第 一鐵磁偏移層41 0上並且與該偏移層交換耦合。第一反鐵磁 層420在第一鐵磁偏移層41〇中建立磁化416之方向。 以相同方式,第二反平行耦合偏移穩定欄標42#包括一第 二鐵磁偏移層426,該層具有置放於釕層408上的一端部428 。第二鐵磁偏移層426係與橫跨釕層408的自由層406之一部 分430反平行|馬合。與第二鐵磁偏移層426相對立的自由層 406之部分430中的磁化434,係在方向上與第二鐵磁偏移層 426中的磁化432相對立。第二反平行耦合偏移穩定攔標424 還包括一第二反鐵磁層436,該層係形成於第二鐵磁偏移層 426上並且與該偏移層交換耦合。第二反鐵磁層436在第二 鐵磁偏移層426中建立磁化432之方向。 參考圖4,與鐵磁偏移層410、426耦合的自由層4〇6之部 分414、430從一外部磁場激磁後貢獻很少或不貢獻信號。 因此,第一鐵磁偏移層410之端部412與第二鐵磁偏移層426 之端部428之間的距離450,決定感測器400之主動部分442 的實體寬度450。實體寬度450還稱為實體執道寬度。如圖4 所示,第一偏移欄標422中的鐵磁偏移層410之端部412的位 置决疋最右主動執道邊緣,而第一偏移搁標424中的鐵磁偏 O:\88\88902.DOC -10- 200416685 移層426之端部428的位置決定最左主動執道邊緣。 第一反鐵磁層420係自第一鐵磁偏移層41〇橫向凹入一距 離,該距離係採用參考編號44〇代表。第二反鐵磁層4刊係 自第二鐵磁偏移層426橫向凹入一距離,該距離係採用參考 編號444代表。因為鐵磁層41〇及426係採用一軟鐵磁材料形 成,所以磁化係在端部412、428附近次堅硬地固定,該等 端部未直接與反鐵磁層420、436交換耦合。插一句,若反 鐵磁層之端部並未自鐵磁偏移層之端部橫向凹入,則自由 層之主動部分將受到自由層之更鄰近反平行耦合部分的不 利影響:感測器變得磁性僵硬而且損失敏感性。為了防止 此敏感性損失,反鐵磁層之端部係自鐵磁偏移層之端部橫 向凹入,如以上所解說。對於每個偏移攔標而言,橫向凹 入距離440 444隶好為約〇 _5③m;而橫向凹入距離之有用 範圍係從約0.3③m至約〇·7 φιη。施加感測電流於感測器的 引線452、454最好係與鐵磁偏移層41〇、426之端部412、428 自對準。 或者,反鐵磁層420、436之端部440、448之間的橫向分 離距離最好為約0.6③m至約1_4③m,寬於感測器400之主 動部分442的實體寬度450。反鐵磁層42〇、436之端部446、 448之間的橫向分離距離為,由參考編號4料、45〇及44〇所 代表的距離之總和。 用於製造由本發明提供之磁性旋轉閥感測器的材料及方 法在該技術中已為吾人所熟知。每個反平行耦合欄標中的 偏移層係採用軟鐵磁材料形成,例如鎳鐵合金,或採用鎳O: \ 88 \ 88902.DOC -9-200416685 422 includes a first ferromagnetic offset layer 41o, which has an end portion 412 placed on the ruthenium layer 408. The first ferromagnetic offset layer 41o is coupled in antiparallel to a portion 414 of the free layer 406 across the ruthenium layer 408. The magnetization 418 in the part 4 14 of the free layer 406 opposite to the first ferromagnetic offset layer 410 is opposed to the magnetization 416 in the first ferromagnetic offset layer 410 in the direction. The first anti-parallel coupling offset stabilization bar 422 further includes a first antiferromagnetic layer 420, which is formed on the first ferromagnetic offset layer 410 and is exchange-coupled with the offset layer. The first antiferromagnetic layer 420 establishes the direction of the magnetization 416 in the first ferromagnetic offset layer 410. In the same manner, the second antiparallel coupling 42 # standard deviation stabilizer bar includes a second offset ferromagnetic layer 426, the layer having an end portion 408 disposed on the ruthenium layer 428. The second ferromagnetic offset layer 426 is antiparallel to a portion 430 of the free layer 406 across the ruthenium layer 408. And a second ferromagnetic free layer 426 opposite the drift layer 434. The magnetization 406 of section 430, based on the direction of magnetization of the second ferromagnetic layer 426 is offset 432 opposed. A second antiparallel coupling standard deviation stabilizer bar 424 further comprises a second antiferromagnetic layer 436, the second ferromagnetic layer is formed on the drift layer 426 and the layer offset exchange coupling. The second antiferromagnetic layer 436 establishes a direction of the magnetization 432 in the second ferromagnetic offset layer 426. Referring to FIG. 4, portions 414, 430 of the free layer 406 coupled to the ferromagnetic offset layers 410, 426 contribute little or no signal after being excited from an external magnetic field. Thus, a first ferromagnetic layer 410 is offset from the end of the offset portion 412 of the second ferromagnetic layer 428 between the ends 426 of 450, a substantial portion of the active sensor 442 determines the width of 450,400. The physical width 450 is also referred to as a physical execution width. As shown in FIG. 4, the position of the end 412 of the ferromagnetic offset layer 410 in the first offset column 422 determines the rightmost active edge, and the ferromagnetic offset O in the first offset shelf 424 : \ 88 \ 88902.DOC -10- 200416685 The position of the end 428 of the shift layer 426 determines the leftmost active execution edge. The first antiferromagnetic layer 420 is recessed laterally from the first ferromagnetic offset layer 41 by a distance, and the distance is represented by the reference number 44o. The second antiferromagnetic layer 4 is recessed laterally from the second ferromagnetic offset layer 426 by a distance, which is represented by the reference number 444. Because the ferromagnetic layers 410 and 426 are formed of a soft ferromagnetic material, the magnetization is fixed rigidly near the ends 412, 428, which are not directly coupled to the antiferromagnetic layers 420, 436. In a word, if the end of the anti-ferromagnetic layer is not recessed laterally from the end of the ferromagnetic offset layer, the active part of the free layer will be adversely affected by the anti-parallel coupling part closer to the free layer: the sensor Becomes magnetically stiff and loses sensitivity. To prevent this loss of sensitivity, the ends of the antiferromagnetic layer are recessed laterally from the ends of the ferromagnetic offset layer, as explained above. For each offset stop, the lateral recessed distance 440 444 is approximately 0_5③m; and the useful range of the lateral recessed distance is from approximately 0.3③m to approximately 0.7 φιη. Leads 452, 454 for applying a sensing current to the sensor are preferably self-aligned with the ends 412, 428 of the ferromagnetic offset layers 41, 426. Alternatively, the lateral separation distance between the ends 440, 448 of the antiferromagnetic layers 420, 436 is preferably about 0.6? The lateral separation distance between the end portions 446 and 448 of the antiferromagnetic layers 42o and 436 is the sum of the distances represented by the reference numerals 4, 45 and 44. The materials and methods used to make the magnetic rotary valve sensor provided by the present invention are well known in the art. The offset layer in each antiparallel coupling column is formed of a soft ferromagnetic material, such as nickel-iron alloy, or nickel

O:\88\88902.DOC -11 - 200416685 载及始开/成的其他適合二元或三元合金。因為一軟鐵磁 材料係用於每個偏移層,所以對於每個偏移層之未與反鐵 磁層接觸的部&,該偏移層中的磁化並未強烈固定偏移偏 移、,口引,在自由層之主動部分的邊緣附近,自由層受到 反平行耦合的影響不是很大。感測器保持穩定,然後敏感 性並未明顯劣化。 【圖式簡單說明】 圖1解說一磁碟機; 圖2解說-滑動塊上的一記錄磁頭 圖3解說該滑動塊之面對磁碟的— 圖4解說具有一凹入交換穩定層的 【圖式代表符號說明】 側上的記錄磁頭;及 一旋轉閥感測器。 100 磁碟機 102 磁碟 104 轉軸 106 108 110 112 114 滑動塊 記錄磁頭 懸置結構 驅動器 附著 116 外殼 118 120 2〇〇 馬達 弓形路徑 滑動塊O: \ 88 \ 88902.DOC -11-200416685 Other suitable binary or ternary alloys containing alloys and alloys. Because a soft ferromagnetic material is used for each offset layer, for the portion of each offset layer that is not in contact with the antiferromagnetic layer & In the vicinity of the edge of the active part of the free layer, the free layer is not greatly affected by antiparallel coupling. The sensor remains stable, but the sensitivity is not significantly degraded. [Schematic description] Figure 1 illustrates a magnetic disk drive; Figure 2 illustrates a recording head on a sliding block; Figure 3 illustrates the sliding block facing the magnetic disk-Figure 4 illustrates a recessed exchange stabilization layer [ Description of the representative symbols of the drawings] Recording head on the side; and a rotary valve sensor. 100 Disk drive 102 Disk 104 Spindle 106 108 110 112 114 Slider Recording head Suspension structure Drive Attach 116 Housing 118 120 2〇 Motor Bow path Slider

O:\88\88902.DOC ' 12- 200416685 206 尾部表面 208 上磁極 210 線匝 212 觸點區 214 線圈 300 記錄磁頭 302 滑動塊 304 磁性遮罩 306 磁性遮罩 308 讀取元件感測器 310 寫入間隙 312 第二磁極 400 磁性旋轉閥感測器 402 固定層 404 導電非磁性層 406 鐵磁自由層 408 釕層 410 第一鐵磁偏移層 412 端部 414 部分 416 磁化 418 磁化 420 第一反鐵磁層 422 第一反平行耦合偏移穩定欄標 O:\88\88902.DOC -13 - 200416685 424 第二反平行耦合偏移穩定欄標 426 第二鐵磁偏移層 428 端部 430 部分 432 磁化 434 磁化 436 第二反鐵磁層 440 距離 442 主動部分 444 距離 446 端部 448 端部 450 實體寬度 452 引線 454 引線 O:\88\88902.DOC - 14 -O: \ 88 \ 88902.DOC '12- 200416685 206 Tail surface 208 Upper magnetic pole 210 Turns 212 Contact area 214 Coil 300 Recording head 302 Slider 304 Magnetic shield 306 Magnetic shield 308 Read element sensor 310 Write Entering gap 312 Second magnetic pole 400 Magnetic rotary valve sensor 402 Fixed layer 404 Conductive non-magnetic layer 406 Ferromagnetic free layer 408 Ruthenium layer 410 First ferromagnetic offset layer 412 End portion 414 Part 416 Magnetization 418 Magnetization 420 First reaction Ferromagnetic layer 422 First anti-parallel coupling offset stability bar O: \ 88 \ 88902.DOC -13-200416685 424 Second anti-parallel coupling offset stability bar 426 Second ferromagnetic offset layer 428 End 430 part 432 magnetization 434 magnetization 436 second antiferromagnetic layer 440 distance 442 active portion 444 distance 446 end 448 end 450 solid width 452 lead 454 lead O: \ 88 \ 88902.DOC-14-

Claims (1)

200416685 拾、申請專利範圍: 1. 2. 一種磁性旋轉閥感測器,包括: 自由層其具有第一及第二橫向置放部分; -第-偏移穩定攔標’其包括—第一鐵磁偏移層及一 第-反鐵磁層,該第_鐵磁㈣穩定卿係與該自由層 之該第一部分反平行耦合; ★ 一第二偏移敎欄標,其具有-第二鐵磁偏移層及一 第一反鐵磁層,該第二鐵磁偏移欄標係與該自由層之該 苐二部分反平行麵合, 其中a亥等第-與第二反鐵磁層之間的橫向分離係在約 ③m至約^之範圍内’大於該等第一與第二鐵磁 偏移層之間的橫向分離。 一種磁性旋轉閥感測器,包括: 一固定層; 一非磁性導電層,其係置放於該固定層上; 一鐵磁自由層,其係置放於該非磁性層上,該鐵磁自 由層係精由弟一及第二反平行耦合偏移穩定攔標而磁性 穩定; 釕層,其係置放於該鐵磁自由層上, ”中。亥第-反平㈣合偏移穩定襴標包括—第一鐵磁 偏移層’㈣係置放於心了層上並且與橫跨該釕層的該 自由層之-部分反平行轉合;及一第—反鐵磁層,該層 係置:於該第一鐵磁偏移層上’其中該第一反鐵磁層係 自4第一鐵磁偏移層橫向凹入,以及 O:\88\88902.DOC 200416685 其中該第二反平行耦合偏移穩 ^ ^ '爛^包括一第二鐵放 偏移層,該層係置放於該釘> 6 A s 了層上亚且與橫跨該釕層的哕 自由層之一部分反平行耦合;及一- 弟一反鐵磁層,兮展 係置放於該第二鐵磁偏移層上,1 /曰 A斗Μ /、干5亥第二反鐵磁層係 自该弟二鐵磁偏移層之該端部橫向凹入。 ’、 3. 4. 如申請專利範圍第2項之磁性旋轉閱感測器,其中 反鐵磁層係自該第一鐵磁偏 入 0.7③m。 向凹入約。.3③m至約 如申請專利範㈣2項之磁性旋㈣相器4中該第二 反鐵磁層係自該第二鐵磁偏移層橫向凹人約^③爪至約 0.7 ③m 〇 5. —種磁碟機,包括: 一磁碟; 一寫入元件,其用於將資料寫入該磁碟; °貝取元件,其用於自該磁碟讀取資料;該元件包括 一磁性旋轉閥感測器, 其中該磁性旋轉閥感測器包括·· 一固定層; 一非磁性導電層,其係置放於該固定層上; 鐵磁自由層’其係置放於該非磁性層上,該鐵磁自 由層係藉油第一及第二反平行耦合偏移穩定攔標而磁性 穩定; 一釕層’其係置放於該鐵磁自由層上, 其中a亥第一反平行耦合偏移穩定欄標包括一第一鐵磁 O:\88\88902.DOC -2- 200416685 偏移層,該層係置放於該釕屛 自由層之一部分反平行耦合9亚且與橫跨該釕層的該 係置放於該第—鐵磁偏移層上及~弟-反鐵磁層,該層 自該第一鐵磁偏移層橫向二::及中該第-反鐵磁層係 其中該第二反平行麵合偏移穩定: 偏移層,該層係置放於該釘 U第-鐵磁 自由層之一部分反平行耗合;及一第二:跨該釕層的該 係置放於該第二鐵磁偏移層上,其中::層:4層 自該第二鐵磁偏移層之該端部橫向凹:。 鐵磁層係 O:\88\88902.DOC200416685 Scope of patent application: 1. 2. A magnetic rotary valve sensor, comprising: a free layer having first and second lateral placement portions; a first magnetic layer, and offset - antiferromagnetic layer, the second ferromagnetic iv _ State Department stable antiparallel coupling to the first portion of the free layer; ★ column marked objective for a second offset having - a second iron A magnetic offset layer and a first antiferromagnetic layer, the second ferromagnetic offset column is anti-parallel to the second part of the free layer, in which the first and second antiferromagnetic layers The lateral separation between them is greater than the lateral separation between the first and second ferromagnetic offset layers in a range of about ③m to about ^. A magnetic rotary valve sensor includes: a fixed layer; a non-magnetic conductive layer, which is placed on the fixed layer; a ferromagnetic free layer, which is placed on the non-magnetic layer, and the ferromagnetic free layer The layer system is magnetically stable by the first and second anti-parallel coupling offset stabilizing barriers; the ruthenium layer, which is placed on the ferromagnetic free layer, "". Heidi-anti-level coupling offset stability 襕The standard includes-the first ferromagnetic offset layer is placed on the core layer and is antiparallel to the-part of the free layer across the ruthenium layer; and a first-antiferromagnetic layer, the layer System: on the first ferromagnetic offset layer, where the first antiferromagnetic layer is laterally recessed from the first ferromagnetic offset layer, and O: \ 88 \ 88902.DOC 200416685 where the second The anti-parallel coupling offset stability ^ ^ 'rotten ^ includes a second iron-displacement offset layer, which is placed on the pin> 6 A s on the layer and with the plutonium free layer across the ruthenium layer Part of the anti-parallel coupling; and the first anti-ferromagnetic layer, the Xixian system is placed on the second ferromagnetic offset layer, 1 / A A Μ /, Gan 5 Hai second anti- The ferromagnetic layer is recessed laterally from the end of the second ferromagnetic offset layer. ', 3. 4. If the magnetic rotary reading sensor of the second patent application range, the antiferromagnetic layer is from the The first ferromagnetic bias is 0.7③m. The recess is about .3③m to about the same as in the magnetic rotary phaser 4 of the patent application No. 2 item. The second antiferromagnetic layer is transverse to the second ferromagnetic offset layer. The concave person is about ^ ③ claw to about 0.7 ③ m 〇5. A kind of magnetic disk drive, including: a magnetic disk; a writing element, which is used to write data to the disk; The magnetic disk reads data; the element includes a magnetic rotary valve sensor, wherein the magnetic rotary valve sensor includes a fixed layer; a non-magnetic conductive layer, which is placed on the fixed layer; ferromagnetic The free layer is placed on the non-magnetic layer, and the ferromagnetic free layer is magnetically stabilized by the first and second antiparallel coupling offset stabilizing tags; a ruthenium layer is placed on the ferromagnetic layer. on the free layer, wherein a first antiparallel coupling Hai offset stabilizing bar comprising a first ferromagnetic subscript O: \ 88 \ 88902.DOC -2- 200416685 Offset layer, this layer is placed in a part of the ruthenium-osmium free layer in antiparallel coupling 9 sub-layers and the system across the ruthenium layer is placed on the first-ferromagnetic offset layer and ~ brother-anti A ferromagnetic layer, the layer is transverse to the first ferromagnetic offset layer, and the second anti-ferromagnetic layer is in which the second antiparallel plane is stable in offset: the offset layer, which is placed in the system Anti-parallel consumption at a part of the first U- ferromagnetic free layer; and a second: the system across the ruthenium layer is placed on the second ferromagnetic offset layer, where: layer: 4 layers from The end of the second ferromagnetic offset layer is laterally concave .: Ferromagnetic layer system O: \ 88 \ 88902.DOC
TW092132001A 2002-11-26 2003-11-14 Magnetic spin valve sensor having an exchange stabilization layer recessed from the active track edge TWI285369B (en)

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