200300930 經濟部智慧財產局員工消費合作社印製 A7 -----B7五、發明説明（1 ) 本發明係有關於光學資料儲存之領域並且根據本發明 第〜個申請專利範圍獨立項之標的係有關於可寫入一次之 光學資料儲存媒體。特別是關於DVD-R格式之光學儲存媒 體.°本發明又關於壓模器及製造該壓模器之方法，根據相 對應申請專利範圍獨立項之標的，該壓模器可用於製造根 據本發明之光學資料儲存媒體。 根據本發明之資料儲存媒體包括具有界定記憶區之凹 槽結構的塑膠基材、實質上由染料組成並覆蓋該凹槽結構 之記錄層以及沉積於該記錄層上之反射層。再者，該資料 儲存媒體包括經製造廠商預先界定之資料儲存記憶區部分 〇 DVD-R中該記錄層及該反射層係置於二塑膠基材圓盤 之間（大部分係聚碳酸酯圓盤）。一朝向該記錄層之基材圓盤 表面具有規則的凹槽結構，其中該記錄層實質上滿載凹槽 〇 關於該DVD-R上之記錄資料，使DVD-R相對於雷射光 束（寫入光束）移動，該雷射光束根據欲記錄之資料控制並具 有645至665奈米區域之波長，依此方式使該凹槽基底與 置於該凹槽基底上之記錄媒體藉由寫入光束沿凹槽產生一 連串之凹處（藉由照射改變位置）及陸地（未照射，未改變位 置）。爲讀取依上述方法在DVD-R上記錄之資料，藉由另一 具有波長通常等於寫入光束並且強度小約兩級之雷射光束（ 讀取光束）掃描該凹槽。該讀取光束被反射層反射的光線藉 I. I- -1 1 - ......- m Γ — 1 I -I I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 200300930 A7 B7 五、發明説明（2 ) 助於偵測器及電子輔助裝置譯碼。 用以將資料記錄於DVD-R上並讀取資料之裝置可由市 面上購得。利用此裝置可將任何資料記錄於DVD-R上，特 別是市面上亦可自例如DVD-ROM拷貝獲得之資料，但大都 會侵犯到作者及生產者的權利。由於難以察覺並懲罰此權 利侵犯，因此資料記憶產業之目標在藉由防止未經授權之 資料拷貝或至少使得資料難以拷貝以保護作者及生產者。 DVD領域中此等拷貝保護之實現先將資料以譯成密碼 之方式儲存於DVD-ROM上，並將解讀密碼儲存於同一 OVD_R〇M之預定編碼區，其次由製造廠商將資料記錄於 DVD-R上對應於該DVD-ROM之預定編碼區之記憶區部分中 。如果接著將資料自DVD-ROM拷貝至此DVD-R，該編碼將 儲存於該DVD-R記憶區中已寫入的部分而無法再正確讀取 該資料，亦即剩餘的資料無法解碼。致使該拷貝無效。 製造廠商根據目前的水準將記錄於可寫入一次之光學 資料儲存媒體上之資料以習知爲「預記錄」之方法記錄於 經處理之資料記憶上。特別是應用於記錄於DVD-R記憶區 部分（控制資料區）之資料，該區對應於DVD-ROM之編碼區 。預記錄係藉助於雷射光束進行之一般資料記錄方法。爲 了預記錄，將經處理之光磁置於記錄裝置中，執行相對應 記錄程式，等記錄步驟完成以後自該裝置移除該光磁。 每片光磁大約花費半分鐘進行此等預記錄。使用習知 可於數秒週期製造DVD-R的製造裝置，代表預記錄整體輸 出需要複數台記錄裝置同時並行。因此相對於工資及成本 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -6 - (請先閱讀背面之注意事項再填寫本頁} 衣·200300930 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----- B7 V. Description of the Invention (1) The present invention relates to the field of optical data storage and is the subject of independent items in the scope of the first to the patent application of the present invention. About write-once optical data storage media. In particular, it relates to an optical storage medium in the DVD-R format. The present invention also relates to a stamper and a method for manufacturing the stamper. According to the subject of the independent item corresponding to the scope of patent application, the stamper can be used for manufacturing according to the present invention. Optical data storage media. The data storage medium according to the present invention includes a plastic substrate having a groove structure defining a memory area, a recording layer consisting essentially of a dye and covering the groove structure, and a reflective layer deposited on the recording layer. Furthermore, the data storage medium includes a part of the data storage memory area defined by the manufacturer in advance. The recording layer and the reflective layer in the DVD-R are placed between two plastic substrate discs (most of which are polycarbonate discs). plate). A surface of the substrate disc facing the recording layer has a regular groove structure, wherein the recording layer is substantially full of grooves. Regarding the recorded data on the DVD-R, the DVD-R is written relative to the laser beam (write (Beam) movement, the laser beam is controlled according to the data to be recorded and has a wavelength in the region of 645 to 665 nanometers. In this way, the groove substrate and the recording medium placed on the groove substrate are moved along by the writing beam. The groove creates a series of dimples (the position is changed by irradiation) and land (unirradiated, the position is not changed). In order to read the data recorded on the DVD-R according to the above method, the groove is scanned by another laser beam (reading beam) having a wavelength generally equal to the writing beam and having an intensity about two orders smaller. The light reflected by the reading beam by the reflective layer is I. I- -1 1-......- m Γ — 1 I -II (Please read the precautions on the back before filling this page) This paper size applies China National Standard (CNS) A4 specification (210X297 mm) -5- 200300930 A7 B7 5. Description of the invention (2) It is helpful for the decoding of the detector and electronic auxiliary device. A device for recording and reading data on a DVD-R is commercially available. With this device, any material can be recorded on DVD-R, especially materials that are also available on the market for copying, for example, DVD-ROM, but most of them will violate the rights of authors and producers. Since it is difficult to detect and punish this infringement, the goal of the data memory industry is to protect authors and producers by preventing unauthorized copying or at least making it difficult to copy. The implementation of these copy protections in the DVD field first stores the data on a DVD-ROM by translating it into a password, and stores the decoded password in a predetermined encoding area of the same OVD_ROM, and then the manufacturer records the data on the DVD- R is in a memory area portion corresponding to a predetermined coding area of the DVD-ROM. If you then copy the data from the DVD-ROM to this DVD-R, the code will be stored in the written portion of the DVD-R memory area and the data can no longer be read correctly, that is, the remaining data cannot be decoded. Rendering the copy invalid. The manufacturer records the data recorded on the optical data storage medium that can be written once according to the current level on the processed data memory by a method known as "pre-recording". It is especially applied to the data recorded in the DVD-R memory area (control data area), which corresponds to the DVD-ROM coding area. Pre-recording is a general data recording method by means of a laser beam. For pre-recording, the processed magneto-optic is placed in a recording device, the corresponding recording program is executed, and the magneto-optical is removed from the device after the recording step is completed. It takes about half a minute for each of these magneto-optic magnets to perform these pre-recordings. It is known that a DVD-R manufacturing device can be manufactured in a cycle of a few seconds, which means that the overall output of the pre-recording requires multiple recording devices to be parallel. Therefore, relative to wages and costs, this paper size applies Chinese National Standard (CNS) Α4 specification (210X297 mm) -6-(Please read the precautions on the back before filling this page}
、1T 經濟部智慧財產局員工消費合作社印製 200300930 經濟部智慧財產局員工消費合作社印製 A7 __________ B7 五、發明説明（3 ) ’預錄極爲昂貴。 因此，本發明之目的在於揭示可寫入一次之光學資料 儲存媒體’特別是DVD-R，包括儲存資料之記憶區部分 (DVD-R之控制資料區），其中該資料儲存媒體製造時比相應 之習知資料儲存媒體更加便宜，該習知資料儲存媒體之製 造方法包括預記錄步驟。本發明另一個目的係揭示製造可 應用於根據本發明之製造資料儲存媒體方法的壓模。 此等目的係藉由可寫入一次之光學資料儲存媒體，藉 由可應用於製造資料儲存媒體之壓模以及藉由該壓模之製 造方法而達成，該等全都界定於申請專利範圍當中。 如習知之資料儲存媒體之相同方法中，根據本發明之 可寫入一次之光學資料儲存媒體之記憶區不可寫入部分包 括具有固定凹槽深度（dO)之凹槽的規則凹槽結構。資料以二 不同値d 1及d2的凹槽深度依凹槽方向交錯的方式儲存於 預定記憶區部分（例如對應標準之控制資料區），其中第一個 値d 1對應於可自由寫入記憶區之凹槽深度dO或更大於此 (dbdO)，其中第二個値d2比可自由寫入記憶區之凹槽深度 dO更小或等於0(0^d2^d0)。 DVD-R之凹槽深度通常介於150至220奈米之間，換 做是該控制資料區之凹槽深度則介於180至400奈米之第 一個値及0至1 20奈米之第二個値之間。 意外地發現以上述方法（交錯凹槽深度）儲存於根據本發 明之DVD-R控制資料區的資料可以其餘利用寫入光束記錄 之資料所用之相同方法讀取，並且利用該寫入光束無法成 (請先閱讀背面之注意事項存填寫本頁) tr 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 200300930 A7 B7 五、發明説明（4 ) 功地覆寫，亦即，以重覆讀取的方式。意外之處在於根據 本發明之DVD-R控制資料區之資料結構與DVD-ROM之資 料結構類似，然而，各凹處卻能實質上塡滿並爲該記錄層 之媒體覆蓋。 根據本發明之資料儲存媒體係以實質上與相應之習知 資料儲存媒體相同之方法製造。然而，相對於習知方法， 用於製造該塑膠基材之壓模並未包括具有固定凹槽深度之 凹槽結構，但該預定記憶區部分（控制資料區）中包括依凹槽 方向交錯凹槽深度之凹槽結構。再者，製造根據本發明之 資料儲存媒體不需要任何預記錄。表示用於製造根據本發 明包括製造廠商所儲存資料之資料儲存媒體的方法步驟及 循環週期與習知不包括此等資料或未進行預記錄之資料儲 存媒體相同。 用於射出成形根據本發明之資料儲存媒體用的塑膠基 材並且包括所欲之凹槽結構的負像壓模係依習知方法藉由 包括所欲之凹槽結構的正像玻璃原型製造。 製造該壓模時，將光阻層（上光阻層）沉積於玻璃圓盤上 ，以雷射曝光，然後顯影。如果該預定記憶區部分之較深 凹槽區比可自由寫入之記憶區更深，沉積該光阻層之前將 附加光阻層（下光阻層）及中間層沉積於該玻璃圓盤上，其中 該附加光阻層具有對應於該可自由寫入區附加深度之厚度 ，並且藉由曝光並使該預定記憶區部分顯影而完全移除。 在建構用於產生該凹槽結構之上光阻層時，該記憶區 可自由寫入之凹槽部分之光阻層係完全移除，各凹槽之間 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） I------V-I,ί衣|丨 (請先閲讀背面之注意事項再填寫本頁) 、1Τ 經濟部智慧財產局員工消費合作社印製 -8- 經濟部智慧財產局員工消費合作社印製 200300930 A7 __ B7__ 五、發明説明（5 ) 的光阻層維持原封不動。預定記憶區部分中，上光阻層完 全移除較深凹槽區並且部分移除或完全保留較淺區。各凹 槽之間完全保留。爲了產生各種凹槽深度，用於曝光之雷 射或電子束的能量係相對應地施與。 爲了以該玻璃原型製造壓模，以鎳（濺鍍接著電沉積）被 覆該玻璃原型經建構（上）之光阻層，然後使該鎳層自玻璃原 型分離出來。 現在本發明將結合以下之圖示詳細地說明，其中： 第1圖：顯示根據本發明之可寫入一次之光學資料儲 存媒體某部分之切斷面（切斷方向由該凹槽之橫向縱的方向） 第2圖：顯示根據本發明帶有該凹槽結構之資料儲存 媒體的塑膠基材，沿著控制資料區凹槽之中間線切開； 第3及4圖：顯示用於製造可用於生產根據本發明之 資料儲存媒體之方法的連續階段（第3圖：dl = dO，d2#〇 ;第 4 圖：dl>d0 ， d2/0) ° 元件對照表 dO:凹槽深度 dl:凹槽深度 d2:凹槽深度 (a) :中間產物 (b) :中間產物 (c) :中間產物 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁}1T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 200300930 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __________ B7 V. Description of Invention (3) ′ Pre-recording is extremely expensive. Therefore, an object of the present invention is to disclose a write-once optical data storage medium, particularly a DVD-R, including a memory area portion (control data area of the DVD-R) where the data storage medium is manufactured more than the corresponding The conventional data storage medium is cheaper. The manufacturing method of the conventional data storage medium includes a pre-recording step. Another object of the present invention is to disclose a stamper which can be applied to a method for manufacturing a data storage medium according to the present invention. These objects are achieved by a write-once optical data storage medium, by a stamper that can be applied to manufacture the data storage medium, and by a manufacturing method of the stamper, which are all defined in the scope of patent application. As in the conventional method of the conventional data storage medium, the non-writable portion of the memory area of the write-once optical data storage medium according to the present invention includes a regular groove structure having a groove with a fixed groove depth (dO). The data is stored in the predetermined memory area (such as the control data area corresponding to the standard) in a way that the groove depths of two different 値 d 1 and d2 are staggered according to the groove direction. The first 値 d 1 corresponds to a freely writable memory. The groove depth dO of the region is greater than or equal to this (dbdO), where the second 値 d2 is smaller than or equal to 0 (0 ^ d2 ^ d0) than the groove depth dO of the freely writable memory region. The groove depth of DVD-R is usually between 150 and 220 nanometers. In other words, the groove depth of the control data area is between the first of 180 to 400 nanometers and the depth of 0 to 120 nanometers. Between the second crickets. It was unexpectedly found that the data stored in the DVD-R control data area according to the present invention in the above-mentioned method (staggered groove depth) can be read by the same method as the rest of the data recorded by the writing beam, and it is impossible to make use of the writing beam. (Please read the notes on the back and fill in this page first) tr This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 200300930 A7 B7 V. Description of the invention (4) Overwrite successfully, that is, use Repeated reading. The surprise is that the data structure of the DVD-R control data area according to the present invention is similar to the data structure of the DVD-ROM, however, the recesses can be substantially full and cover the media of the recording layer. The data storage medium according to the present invention is manufactured in substantially the same manner as the corresponding conventional data storage medium. However, compared with the conventional method, the stamper used for manufacturing the plastic substrate does not include a groove structure having a fixed groove depth, but the predetermined memory area portion (control data area) includes staggered grooves according to the groove direction. Groove depth groove structure. Furthermore, no pre-recording is required to manufacture the data storage medium according to the present invention. Means that the steps and cycle of the method for manufacturing a data storage medium including the data stored by the manufacturer according to the present invention are the same as those of a data storage medium that does not include such data or is not pre-recorded. A negative image stamper for injection molding a plastic substrate for a data storage medium according to the present invention and including a desired groove structure is manufactured from a positive image glass prototype including a desired groove structure according to a conventional method. When the stamper is manufactured, a photoresist layer (upper photoresist layer) is deposited on a glass disc, exposed to laser light, and then developed. If the deeper groove area of the predetermined memory area portion is deeper than the freely writable memory area, an additional photoresist layer (lower photoresist layer) and an intermediate layer are deposited on the glass disc before the photoresist layer is deposited, The additional photoresist layer has a thickness corresponding to the additional depth of the freely writable area, and is completely removed by exposing and partially developing the predetermined memory area. When constructing a photoresist layer on the groove structure, the photoresist layer in the groove portion where the memory area can be freely written is completely removed, and the paper size between the grooves is in accordance with the Chinese National Standard (CNS ) Α4 specification (210X297 mm) I ------ VI, ί clothing | 丨 (Please read the precautions on the back before filling out this page), 1T Printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economic Affairs -8- Economy Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau 200300930 A7 __ B7__ V. The photoresist layer of the description of the invention (5) remains intact. In the portion of the predetermined memory area, the upper photoresist layer completely removes the deeper groove area and partially removes or completely retains the shallower area. The grooves are completely reserved. To produce various groove depths, the energy of the laser or electron beam used for the exposure is applied accordingly. In order to manufacture a stamper from the glass prototype, the structured (top) photoresist layer of the glass prototype was covered with nickel (sputtering followed by electrodeposition), and then the nickel layer was separated from the glass prototype. The present invention will now be described in detail with reference to the following drawings, in which: FIG. 1: shows a cut surface of a part of the write-once optical data storage medium according to the present invention (the cut direction is the horizontal and vertical direction of the groove) Direction) Figure 2: Plastic substrate showing the data storage medium with the groove structure according to the present invention, cut along the middle line of the groove in the control data area; Figures 3 and 4: Shown for manufacturing Successive stages of the method of producing a data storage medium according to the present invention (Figure 3: dl = dO, d2 # 〇; Figure 4: dl > d0, d2 / 0) ° Component comparison table dO: groove depth dl: concave Depth of groove d2: Depth of groove (a): Intermediate product (b): Intermediate product (c): Intermediate product This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back first Fill out this page again}
200300930 A7 B7 五、發明説明（6 ) (請先閱讀背面之注意事項再填寫本頁) (d):最終產物 a 1:中間產物 a2:中間產物 a3:中間產物 1:塑膠基材 2:塑膠基材 3:記錄層 4:反射層 4.1:黏著層 5:凹槽 6.1:凹槽區 6.2:凹槽區 11:(上）光阻層 1 Γ:(下）光阻層 12:金屬層 20:記憶局之預定部分 2 1:中間層 經濟部智慧財產局員工消費合作社印製 第1圖顯示切斷DVD-R之部分切斷面（切斷方向由該凹 槽之橫向縱的方向）當作根據本發明可寫入一次之光學資料 儲存媒體的實例。該DVD-R包括二塑膠基材1及2、記錄 層3、反射層4及黏著層4 · 1。朝向該記錄層3之第一塑膠 基材1表面包括界定該記憶區之凹槽結構’其中該凹槽實 質上係由該記錄層3之媒體塡滿。 -10- 本紙張尺度適用中.國國家標準（CNS ) A4規格（210X297公釐） 200300930 A7 B7 五、發明説明（7 ) (請先閲讀背面之注意事項再填寫本頁) 所示切斷面之左半部屬於該記憶區可自由寫入的部分 並且包括預定凹槽深度dO爲150至220奈米之凹槽5。想 像成使用寫入光束記錄資料之凹槽。切斷面之右半部屬於 該記憶區的部分（預定部分），其中資料由製造廠商儲存’亦 即屬於該控制資料區，根據沉積於該部分上之資料包括具 有凹槽深度dldO之凹槽區6.1，該凹槽區6.1與具有凹槽 深度d2小於該凹槽深度dl之凹槽區6.2交錯，其中 0<d2sd0。如所示，示範例係dl = dO及d2#0。 第2圖顯示切斷根據第1圖之DVD-R第一塑膠基材1 的切斷面，其中該切斷線沿該控制資料區中間線行進。由 此切斷面可見到於該二値dl及d2之間交錯的凹槽深度， 依此將儲存資料譯成電碼。 第3圖藉由中間產物（a)、（b)及（c)及最終產物（d)的方式 顯示製造壓模的方法，該壓模可用於射出成型該第一塑膠 基材（第1圖中之1)生產根據本發明之資料儲存媒體並且使 該資料儲存媒體具有dl = d0及d2/0之凹槽結構。 經濟部智慧財產局員工消費合作社印製 在第一步驟中將（上）光阻層沉積於玻璃圓盤（中間產物 (a))上，其中該光阻層實質上係等於該凹槽深度dO。然後藉 由聚焦雷射光束或電子束曝光建構光阻層11，接著顯影使 該欲建構之塑膠基材凹槽表面產生正像形狀（中間產物（b)， 顯示沿著凹槽之中間線橫向切開該凹槽）。 對於具有凹槽深度dO及dl=dO之凹槽5及凹槽區6.1 ，該光阻層11係曝光使於顯影時完全移除，亦即使該光阻 層正好落於該玻璃圓盤上。對於具有較小之凹槽深度d2的 -11 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 200300930 A7 B7 五、發明説明（8 ) (請先閱讀背面之注意事項再填寫本頁) 凹槽區6 · 2，該光阻層用較小的能量曝光，依該曝光僅使該 光阻層之外部被移除。因此將用於使該光阻層11曝光之雷 射或電子束調整至預定強度或較小於該預定強度之強度， 其中對應於欲儲存於該控制資料區之資料的調整模式本質 上與預記錄同一資料之寫入光束的調整模式相同。 然後經建構之光阻層Π係以習知方法被覆金屬，較佳 被覆鎳，藉由濺鍍接著電沉積（含金屬層12之中間產物（c)) 。從該玻璃原型之光阻層11將包括所欲凹槽結構之負像形 狀並代表該壓模的金屬層12分離出來。 第4圖顯示製造可用於製造根據本發明之資料儲存媒 體用之第一塑膠基材的相似方法。於此例中d 1係大於d 0。 顯示之切斷面橫向切過該凹槽，圖示之左側及右側係關於 該記憶區可自由寫入的部分，而此間係關於該凹·槽具有凹 槽深度根據預定資料交錯排列之預定部分。 經濟部智慧財產局員工消費合作社印製 所示之中間產物（a)及（b)以及壓模（最終產物（d))對應至 依第3圖之各指定產物。然而此等中間產物並非以第3圖 所示之簡單玻璃圓盤·建構，而係於玻璃圓盤上依預備步驟 製備，產生該中間產物（al)、（a2)及（a3)。 於該玻璃圓盤上沉積附加（下）光阻層11’（中間產物（al) 並且此層經由適當曝光及顯影使該記憶區之預定部分20完 全移除（中間產物（a2))。該附加光阻層1 Γ具有等同於dl-dO 之厚度。爲移除該記憶區之預定部分20的附加光阻層，以 製造凹槽結構之相同方法引導該光阻層1 Γ上之曝光光束， 然後使該光阻層顯影。然而與製造該凹槽結構之相同步驟 -12- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 200300930 A7 ___ B7 五、發明説明（9 ) 相比，該曝光光束具有較的截面積，該曝光強度較高及/或 該顯影時間較長，所以顯影時該光阻係完全移除，取而# 之地構成凹槽結構。然後，例如藉由DC或RF濺射、電聚 沉積、熱蒸發或相似的方法將中間層21沉積於該附加光p且 層1Γ上（中間產物U3))。依用於沉積於該中間層上之（上）光 阻層1 1之顯影介質尤其無法滲透的方式選擇此中間層21。 該中間層21係由例如金屬（例如纟太）組成，由金屬氧化物、 金屬碳化物或金屬氮化物組成，或由氧化矽組成。 建構該中間產物（a3)之後進行的步驟與第3圖中所示之 方法相同。使該光阻層11沉積（厚度：d0，中間產物（a))、 建構（中間產物（b)、玻璃原型）並被覆金屬（例如鈦）。自該玻 璃原型分離出來之金屬層12表示該壓模。 該二光阻層11及1Γ可由相同之光阻材料或不同之光 阻材料組成。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -13 -200300930 A7 B7 V. Description of the invention (6) (Please read the notes on the back before filling this page) (d): Final product a 1: Intermediate product a2: Intermediate product a3: Intermediate product 1: Plastic substrate 2: Plastic Substrate 3: Recording layer 4: Reflective layer 4.1: Adhesive layer 5: Groove 6.1: Groove area 6.2: Groove area 11: (top) photoresist layer 1 Γ: (bottom) photoresist layer 12: metal layer 20 : Scheduled part 2 of the Memory Bureau 1: Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Figure 1 shows the part of the cut-off surface of the DVD-R (the cutting direction is the horizontal and vertical direction of the groove). An example of a write-once optical data storage medium according to the present invention. The DVD-R includes two plastic substrates 1 and 2, a recording layer 3, a reflective layer 4, and an adhesive layer 4.1. The surface of the first plastic substrate 1 facing the recording layer 3 includes a groove structure ′ defining the memory area, wherein the groove is substantially filled with the medium of the recording layer 3. -10- This paper size is applicable. National National Standard (CNS) A4 specification (210X297 mm) 200300930 A7 B7 V. Description of the invention (7) (Please read the precautions on the back before filling this page) Cut surface shown The left half is a freely writable portion of the memory area and includes a groove 5 having a predetermined groove depth dO of 150 to 220 nm. Imagine a groove that uses a writing beam to record data. The right half of the cut surface belongs to the part of the memory area (predetermined part), where the data is stored by the manufacturer ', that is, the control data area. According to the data deposited on the part, it includes a groove with a groove depth dldO. Region 6.1, the groove region 6.1 is intersected with a groove region 6.2 having a groove depth d2 smaller than the groove depth dl, wherein 0 < d2sd0. As shown, the example is dl = dO and d2 # 0. Fig. 2 shows a cut surface of the DVD-R first plastic substrate 1 according to Fig. 1, wherein the cut line runs along the middle line of the control data area. From this section, the depth of the groove staggered between the two 値 d1 and d2 can be seen, and the stored data is translated into a code. Figure 3 shows the method of manufacturing a stamper by means of intermediate products (a), (b) and (c) and the final product (d). The stamper can be used for injection molding the first plastic substrate (Figure 1 1) The data storage medium according to the present invention is produced and the data storage medium has a groove structure of dl = d0 and d2 / 0. Printed in the first step by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the (top) photoresist layer is deposited on a glass disc (intermediate product (a)), where the photoresist layer is substantially equal to the groove depth dO . Then, the photoresist layer 11 is constructed by focusing laser beam or electron beam exposure, and then developed to produce a positive shape of the groove surface of the plastic substrate to be constructed (intermediate product (b), which shows the transverse direction along the middle line of the groove) Cut the groove). For groove 5 and groove region 6.1 with groove depths dO and dl = dO, the photoresist layer 11 is exposed so that it is completely removed during development, even if the photoresist layer falls exactly on the glass disc. For -11 with a small groove depth d2-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 200300930 A7 B7 V. Description of the invention (8) (Please read the precautions on the back before filling (This page) The grooved area 6 · 2. The photoresist layer is exposed with less energy. According to the exposure, only the outside of the photoresist layer is removed. Therefore, the laser or electron beam used to expose the photoresist layer 11 is adjusted to a predetermined intensity or a intensity smaller than the predetermined intensity, wherein the adjustment mode corresponding to the data to be stored in the control data area is essentially the same as the The adjustment mode of the writing beam for recording the same data is the same. The constructed photoresist layer Π is then coated with metal, preferably nickel, by sputtering, followed by electrodeposition (intermediate product (c) containing metal layer 12). From the photoresist layer 11 of the glass prototype, the metal layer 12 including the desired negative groove shape and representing the stamper is separated. Fig. 4 shows a similar method for manufacturing a first plastic substrate which can be used for manufacturing a data storage medium according to the present invention. In this example, d 1 is greater than d 0. The cut surface shown is transversely cut across the groove, and the left and right sides of the illustration are about the freely writable part of the memory area, and here the predetermined part of the groove with the groove depth staggered according to the predetermined data . The intermediate products (a) and (b) and the stamper (final product (d)) shown by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs correspond to the designated products according to Figure 3. However, these intermediate products are not based on the simple glass disc · structure shown in Figure 3, but are prepared on the glass disc according to the preliminary steps to produce the intermediate products (al), (a2), and (a3). An additional (lower) photoresist layer 11 ′ (intermediate product (al)) is deposited on the glass disc and this layer completely removes a predetermined portion 20 of the memory area through appropriate exposure and development (intermediate product (a2)). The The additional photoresist layer 1 Γ has a thickness equivalent to dl-dO. In order to remove the additional photoresist layer of the predetermined portion 20 of the memory area, the exposure beam on the photoresist layer 1 Γ is guided in the same way as the groove structure is manufactured. Then, the photoresist layer is developed. However, the same steps as those for manufacturing the groove structure are adopted. -12- This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 200300930 A7 ___ B7 V. Description of the invention (9) In comparison, the exposure beam has a relatively large cross-sectional area, the exposure intensity is high, and / or the development time is long, so the photoresist is completely removed during development, and the place # constitutes a groove structure. Then, for example The intermediate layer 21 is deposited on the additional light p and layer 1Γ by DC or RF sputtering, electrodeposition deposition, thermal evaporation, or a similar method (intermediate product U3)). The intermediate layer 21 is selected in such a way that the developing medium used for the (top) photoresist layer 11 deposited on the intermediate layer is particularly impermeable. The intermediate layer 21 is composed of, for example, a metal (such as fluorene), a metal oxide, a metal carbide, or a metal nitride, or a silicon oxide. The steps after constructing the intermediate product (a3) are the same as those shown in Fig. 3. The photoresist layer 11 is deposited (thickness: d0, intermediate product (a)), constructed (intermediate product (b), glass prototype) and coated with a metal (for example, titanium). The metal layer 12 separated from the glass prototype represents the stamper. The two photoresist layers 11 and 1Γ may be composed of the same photoresist material or different photoresist materials. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -13-