SU489775A1 - Composition for temporary protection of semiconductor wafers - Google Patents
Composition for temporary protection of semiconductor wafersInfo
- Publication number
- SU489775A1 SU489775A1 SU1941093A SU1941093A SU489775A1 SU 489775 A1 SU489775 A1 SU 489775A1 SU 1941093 A SU1941093 A SU 1941093A SU 1941093 A SU1941093 A SU 1941093A SU 489775 A1 SU489775 A1 SU 489775A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- composition
- semiconductor wafers
- temporary protection
- temporary
- protection
- Prior art date
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
3 Сравнительные данные свойств известного защитного состава и оиисываемого приведены в таблице. Поет,мет изобретени Состав дл временной защиты полупроводниковых пластин при резке их на кристаллы, содержащий поливинилацетат и низший спирт. 4 отличающийс тем, что, с целью сокращени времени сушки и исключени набухани пленки при обработке пластин водными суспензи ми, он дополнительно содержит метакриловую кислоту при следующем соотношении комнонентов, вес. ч.: Поливинилацетат8,7-11,1 Метакрилова кислота5,4-6,7 Низший спирт100.3 Comparative data of the properties of the known protective composition and that determined are given in the table. Sings, met invention Composition for the temporary protection of semiconductor wafers when cutting them into crystals, containing polyvinyl acetate and lower alcohol. 4 characterized in that, in order to shorten the drying time and prevent the film from swelling when the plates are treated with aqueous suspensions, it additionally contains methacrylic acid in the following ratio of components, weight. h .: Polyvinyl acetate 8,7-11,1 Methacrylic acid 5.4-6.7 Lower alcohol 100.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU1941093A SU489775A1 (en) | 1973-06-25 | 1973-06-25 | Composition for temporary protection of semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU1941093A SU489775A1 (en) | 1973-06-25 | 1973-06-25 | Composition for temporary protection of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
SU489775A1 true SU489775A1 (en) | 1975-10-30 |
Family
ID=20559107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU1941093A SU489775A1 (en) | 1973-06-25 | 1973-06-25 | Composition for temporary protection of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU489775A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014164206A1 (en) * | 2013-03-09 | 2014-10-09 | John Moore | Aqueous detergent soluble coating and adhesive and methods of temporary bonding for manufacturing |
-
1973
- 1973-06-25 SU SU1941093A patent/SU489775A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014164206A1 (en) * | 2013-03-09 | 2014-10-09 | John Moore | Aqueous detergent soluble coating and adhesive and methods of temporary bonding for manufacturing |
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