SG118380A1 - Composition and method comprising same for removing residue from a substrate - Google Patents
Composition and method comprising same for removing residue from a substrateInfo
- Publication number
- SG118380A1 SG118380A1 SG200503875A SG200503875A SG118380A1 SG 118380 A1 SG118380 A1 SG 118380A1 SG 200503875 A SG200503875 A SG 200503875A SG 200503875 A SG200503875 A SG 200503875A SG 118380 A1 SG118380 A1 SG 118380A1
- Authority
- SG
- Singapore
- Prior art keywords
- substrate
- composition
- same
- removing residue
- residue
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58000104P | 2004-06-15 | 2004-06-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG118380A1 true SG118380A1 (en) | 2006-01-27 |
Family
ID=36102724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200503875A SG118380A1 (en) | 2004-06-15 | 2005-06-11 | Composition and method comprising same for removing residue from a substrate |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN1776532A (en) |
SG (1) | SG118380A1 (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101561641A (en) * | 2008-04-14 | 2009-10-21 | 安集微电子(上海)有限公司 | Plasma etching residual washing liquid |
KR20120073228A (en) * | 2009-09-02 | 2012-07-04 | 와코 쥰야꾸 고교 가부시키가이샤 | Processing agent composition for semiconductor surface and method for processing semiconductor surface using same |
CN102998915A (en) * | 2012-07-17 | 2013-03-27 | 张峰 | Positive photoresist and stripping agent composition |
CN103383529B (en) * | 2012-07-18 | 2015-12-02 | 张峰 | Fluid composition removed by positive photo glue |
CN103383530B (en) * | 2012-07-18 | 2015-12-02 | 张峰 | Positive photoresist-cleaningagent agent composition |
TWI593783B (en) * | 2012-07-24 | 2017-08-01 | Ltc股份有限公司 | Composition for removal and prevention of formation of oxide on surface of metal wiring |
CN102880017B (en) * | 2012-09-28 | 2014-07-23 | 京东方科技集团股份有限公司 | Stripping liquid composition for photoresist and preparation and applications of stripping liquid composition |
CN104238287A (en) * | 2013-06-20 | 2014-12-24 | 安集微电子科技(上海)有限公司 | Cleaning solution for removing photoresist residues |
KR20160017477A (en) * | 2014-08-06 | 2016-02-16 | 동우 화인켐 주식회사 | Cleaning composition |
CN104845768B (en) * | 2015-05-12 | 2017-12-05 | 深圳市美克科技有限公司 | A kind of neutral water-base cleaning agent composition of wiring board |
CN105543008A (en) * | 2015-12-30 | 2016-05-04 | 上海新阳半导体材料股份有限公司 | Detergent composition for cleaning treatment of low-K dielectric material |
WO2018058341A1 (en) * | 2016-09-28 | 2018-04-05 | Dow Global Technologies Llc | Sulfoxide/glycol ether based solvents for use in the electronics industry |
US11035044B2 (en) * | 2017-01-23 | 2021-06-15 | Versum Materials Us, Llc | Etching solution for tungsten and GST films |
CN107312662A (en) * | 2017-07-03 | 2017-11-03 | 中山翰华锡业有限公司 | A kind of scolding tin residue environment-friendlywater-based water-based cleaning agent and its preparation and application method |
US11175587B2 (en) * | 2017-09-29 | 2021-11-16 | Versum Materials Us, Llc | Stripper solutions and methods of using stripper solutions |
JP7204760B2 (en) * | 2018-02-14 | 2023-01-16 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツング | photoresist remover composition |
-
2005
- 2005-06-11 SG SG200503875A patent/SG118380A1/en unknown
- 2005-06-15 CN CN 200510089619 patent/CN1776532A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1776532A (en) | 2006-05-24 |
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