SG11202005650WA - 2 dimensional variable line spacing grating based optical spectrometer - Google Patents

2 dimensional variable line spacing grating based optical spectrometer

Info

Publication number
SG11202005650WA
SG11202005650WA SG11202005650WA SG11202005650WA SG11202005650WA SG 11202005650W A SG11202005650W A SG 11202005650WA SG 11202005650W A SG11202005650W A SG 11202005650WA SG 11202005650W A SG11202005650W A SG 11202005650WA SG 11202005650W A SG11202005650W A SG 11202005650WA
Authority
SG
Singapore
Prior art keywords
line spacing
based optical
optical spectrometer
variable line
dimensional variable
Prior art date
Application number
SG11202005650WA
Inventor
Weiming Zhu
Hao Li
jia yun Liu
Ying Zhang
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Publication of SG11202005650WA publication Critical patent/SG11202005650WA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804—Plane gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1838—Diffraction gratings for use with ultraviolet radiation or X-rays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2813—2D-array
SG11202005650WA 2017-12-21 2018-12-21 2 dimensional variable line spacing grating based optical spectrometer SG11202005650WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG10201710659Q 2017-12-21
PCT/SG2018/050627 WO2019125308A1 (en) 2017-12-21 2018-12-21 2 dimensional variable line spacing grating based optical spectrometer

Publications (1)

Publication Number Publication Date
SG11202005650WA true SG11202005650WA (en) 2020-07-29

Family

ID=66992810

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202005650WA SG11202005650WA (en) 2017-12-21 2018-12-21 2 dimensional variable line spacing grating based optical spectrometer

Country Status (2)

Country Link
SG (1) SG11202005650WA (en)
WO (1) WO2019125308A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112578493A (en) * 2020-12-07 2021-03-30 北京信息科技大学 Grating with self-temperature compensation function and preparation method thereof
CN112945382B (en) * 2021-02-03 2024-02-02 中国科学院长春光学精密机械与物理研究所 PGP imaging spectrometer for correcting spectral line bending and design method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274435A (en) * 1992-02-26 1993-12-28 Hettrick Michael C Grating monochromators and spectrometers based on surface normal rotation
JP3905226B2 (en) * 1998-07-23 2007-04-18 独立行政法人 日本原子力研究開発機構 Conical diffraction oblique incidence spectrometer and diffraction grating for the spectrometer
JP5948558B2 (en) * 2012-04-06 2016-07-06 国立研究開発法人日本原子力研究開発機構 Spectrometer

Also Published As

Publication number Publication date
WO2019125308A1 (en) 2019-06-27

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