SG11201912679WA - Transport system and transport method - Google Patents

Transport system and transport method

Info

Publication number
SG11201912679WA
SG11201912679WA SG11201912679WA SG11201912679WA SG11201912679WA SG 11201912679W A SG11201912679W A SG 11201912679WA SG 11201912679W A SG11201912679W A SG 11201912679WA SG 11201912679W A SG11201912679W A SG 11201912679WA SG 11201912679W A SG11201912679W A SG 11201912679WA
Authority
SG
Singapore
Prior art keywords
transport
transport system
transport method
Prior art date
Application number
SG11201912679WA
Inventor
Yoichi Motoori
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201912679WA publication Critical patent/SG11201912679WA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11201912679WA 2017-06-30 2018-06-01 Transport system and transport method SG11201912679WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017128570 2017-06-30
PCT/JP2018/021167 WO2019003799A1 (en) 2017-06-30 2018-06-01 Conveying system and conveying method

Publications (1)

Publication Number Publication Date
SG11201912679WA true SG11201912679WA (en) 2020-01-30

Family

ID=64740597

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201912679WA SG11201912679WA (en) 2017-06-30 2018-06-01 Transport system and transport method

Country Status (9)

Country Link
US (1) US10947041B2 (en)
EP (1) EP3647230B1 (en)
JP (1) JP6849065B2 (en)
KR (1) KR102253938B1 (en)
CN (1) CN110831873B (en)
IL (1) IL271609B (en)
SG (1) SG11201912679WA (en)
TW (1) TWI763871B (en)
WO (1) WO2019003799A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3647229B1 (en) * 2017-06-30 2022-09-07 Murata Machinery, Ltd. Conveying system and conveying method
WO2020066458A1 (en) * 2018-09-27 2020-04-02 村田機械株式会社 Control method, transport system, and communication device
KR102531956B1 (en) 2019-01-25 2023-05-12 무라다기카이가부시끼가이샤 storage system
US11615975B2 (en) * 2019-01-25 2023-03-28 Murata Machinery, Ltd. Storage system
JP7322801B2 (en) * 2020-05-13 2023-08-08 株式会社ダイフク Container handling equipment
KR20230058777A (en) 2021-10-25 2023-05-03 삼성전자주식회사 Substrate transfer system

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07323905A (en) * 1994-06-03 1995-12-12 Daifuku Co Ltd Carrying device
DE19543321B4 (en) 1995-11-21 2006-11-16 Diehl Stiftung & Co.Kg Method and device for the wireless exchange of information between stations
JP3669057B2 (en) * 1996-06-03 2005-07-06 アシスト シンコー株式会社 Transport system to stocker
JP4807579B2 (en) * 2006-09-13 2011-11-02 株式会社ダイフク Substrate storage equipment and substrate processing equipment
JP2008172062A (en) * 2007-01-12 2008-07-24 Murata Mach Ltd Article feeding apparatus
CN103201198B (en) * 2010-11-04 2015-03-11 村田机械株式会社 Conveying system and conveying method
WO2012138453A1 (en) 2011-04-03 2012-10-11 The General Hospital Corporation Efficient protein expression in vivo using modified rna (mod-rna)
JP5472209B2 (en) * 2011-05-31 2014-04-16 株式会社ダイフク Goods transport equipment
JP5880693B2 (en) * 2012-04-05 2016-03-09 村田機械株式会社 Transport system
US9415934B2 (en) * 2014-05-14 2016-08-16 Murata Machinery, Ltd. Transport system and transport method
US10358291B2 (en) * 2014-08-26 2019-07-23 Murata Machinery, Ltd. Picking system and picking method
JP6304045B2 (en) * 2015-01-06 2018-04-04 株式会社ダイフク Goods storage facility
JP6168476B2 (en) * 2015-03-19 2017-07-26 村田機械株式会社 Transport cart and transport cart system
WO2017029873A1 (en) * 2015-08-14 2017-02-23 村田機械株式会社 Conveyor car system
SG11201801076VA (en) 2015-08-14 2018-03-28 Murata Machinery Ltd Conveyance system
JP6698399B2 (en) * 2016-03-29 2020-05-27 北陽電機株式会社 Transfer control device and method for passing a confluence point of a carrier

Also Published As

Publication number Publication date
KR102253938B1 (en) 2021-05-20
JP6849065B2 (en) 2021-03-24
EP3647230A4 (en) 2021-03-10
CN110831873A (en) 2020-02-21
TWI763871B (en) 2022-05-11
WO2019003799A1 (en) 2019-01-03
CN110831873B (en) 2021-07-16
TW201904854A (en) 2019-02-01
US10947041B2 (en) 2021-03-16
US20200172333A1 (en) 2020-06-04
EP3647230B1 (en) 2023-03-22
EP3647230A1 (en) 2020-05-06
IL271609A (en) 2020-02-27
IL271609B (en) 2021-03-25
JPWO2019003799A1 (en) 2020-05-21
KR20200010412A (en) 2020-01-30

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