SG10201801169SA - Processing liquid supplying apparatus - Google Patents
Processing liquid supplying apparatusInfo
- Publication number
- SG10201801169SA SG10201801169SA SG10201801169SA SG10201801169SA SG10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA SG 10201801169S A SG10201801169S A SG 10201801169SA
- Authority
- SG
- Singapore
- Prior art keywords
- weight
- reservoir
- supplying apparatus
- additive
- processing liquid
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F3/00—Severing by means other than cutting; Apparatus therefor
- B26F3/004—Severing by means other than cutting; Apparatus therefor by means of a fluid jet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/08—Means for treating work or cutting member to facilitate cutting
- B26D7/088—Means for treating work or cutting member to facilitate cutting by cleaning or lubricating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F1/00—Preventing the formation of electrostatic charges
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Dicing (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
PROCESSING LIQUID SUPPLYING APPARATUS A processing liquid supplying apparatus includes: a reservoir containing an additive to be added to a liquid flowing through a passage connected at its one end to a liquid supply source and connected at its other end to a processing apparatus; an injection pump adapted to inject the additive in the reservoir into the passage; a weight measuring unit adapted to measure the weight of the reservoir and convert the weight into an electrical signal at a predetermined interval during when the liquid flows in the passage and the additive is injected; a deciding unit adapted to receive the electrical signal from the weight measuring unit and decide whether or not the measured value of the weight of the reservoir is being reduced in a predetermined rate; and a warning unit adapted to issue a warning that injection is improper when it is decided by the deciding unit that the measured value of the weight is not being reduced at the predetermined rate. (Figure 1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017031800A JP7015638B2 (en) | 2017-02-23 | 2017-02-23 | Machining liquid supply device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201801169SA true SG10201801169SA (en) | 2018-09-27 |
Family
ID=63046149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201801169SA SG10201801169SA (en) | 2017-02-23 | 2018-02-12 | Processing liquid supplying apparatus |
Country Status (8)
Country | Link |
---|---|
US (1) | US10751903B2 (en) |
JP (1) | JP7015638B2 (en) |
KR (1) | KR102342128B1 (en) |
CN (1) | CN108511367B (en) |
DE (1) | DE102018202621A1 (en) |
MY (1) | MY189804A (en) |
SG (1) | SG10201801169SA (en) |
TW (1) | TWI735745B (en) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4411649A (en) * | 1979-07-12 | 1983-10-25 | Baxter Travenol Laboratories, Inc. | Fluid flow control system |
US4778450A (en) * | 1979-07-12 | 1988-10-18 | Baxter Travenol Laboratories, Inc. | Fluid flow control system |
US4600401A (en) * | 1981-04-15 | 1986-07-15 | Baxter Travenol Laboratories | Fluid flow control system |
JP2595985B2 (en) * | 1987-08-28 | 1997-04-02 | 株式会社島津製作所 | Flow control device for chemical liquid injection |
JPH0386251A (en) * | 1989-08-28 | 1991-04-11 | Todoroki Sangyo Kk | Chemical reaction controller |
KR960001415A (en) * | 1994-06-20 | 1996-01-25 | 김태구 | Variable Silencer for Intake Manifold of Automobile |
KR100454120B1 (en) | 2001-11-12 | 2004-10-26 | 삼성전자주식회사 | Device of supplying chemical for slurry mechanical polishing apparatus and method thereof |
US7770448B2 (en) * | 2005-09-16 | 2010-08-10 | Air Liquide Electronics U.S. LP. | Chemical storage device with integrated load cell |
JP4908097B2 (en) | 2006-07-28 | 2012-04-04 | 株式会社ディスコ | Cutting equipment |
JP2014527881A (en) * | 2011-09-21 | 2014-10-23 | ベイヤー メディカル ケア インク. | Continuous multi-fluid pump device, drive and actuation system and method |
JP6039512B2 (en) | 2013-07-18 | 2016-12-07 | Towa株式会社 | Cutting apparatus and method for manufacturing electronic parts |
JP6208498B2 (en) | 2013-08-29 | 2017-10-04 | 株式会社ディスコ | Polishing pad and wafer processing method |
JP2016165771A (en) | 2015-03-10 | 2016-09-15 | 株式会社ディスコ | Processing liquid circulation type processing system |
-
2017
- 2017-02-23 JP JP2017031800A patent/JP7015638B2/en active Active
-
2018
- 2018-02-12 SG SG10201801169SA patent/SG10201801169SA/en unknown
- 2018-02-12 CN CN201810144376.8A patent/CN108511367B/en active Active
- 2018-02-14 KR KR1020180018726A patent/KR102342128B1/en active IP Right Grant
- 2018-02-15 MY MYPI2018700624A patent/MY189804A/en unknown
- 2018-02-21 TW TW107105798A patent/TWI735745B/en active
- 2018-02-21 US US15/901,090 patent/US10751903B2/en active Active
- 2018-02-21 DE DE102018202621.1A patent/DE102018202621A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20180097452A (en) | 2018-08-31 |
MY189804A (en) | 2022-03-08 |
DE102018202621A1 (en) | 2018-08-23 |
TWI735745B (en) | 2021-08-11 |
JP2018134714A (en) | 2018-08-30 |
TW201832282A (en) | 2018-09-01 |
KR102342128B1 (en) | 2021-12-21 |
CN108511367A (en) | 2018-09-07 |
JP7015638B2 (en) | 2022-02-03 |
US10751903B2 (en) | 2020-08-25 |
CN108511367B (en) | 2024-05-14 |
US20180236684A1 (en) | 2018-08-23 |
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