SG10201407632UA - Transducer and method for forming the same - Google Patents
Transducer and method for forming the sameInfo
- Publication number
- SG10201407632UA SG10201407632UA SG10201407632UA SG10201407632UA SG10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA
- Authority
- SG
- Singapore
- Prior art keywords
- transducer
- forming
- same
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0651—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
- G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
- G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/308—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG10201407632UA SG10201407632UA (en) | 2013-11-26 | 2014-11-17 | Transducer and method for forming the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG2013087515 | 2013-11-26 | ||
SG10201407632UA SG10201407632UA (en) | 2013-11-26 | 2014-11-17 | Transducer and method for forming the same |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201407632UA true SG10201407632UA (en) | 2015-06-29 |
Family
ID=53182053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201407632UA SG10201407632UA (en) | 2013-11-26 | 2014-11-17 | Transducer and method for forming the same |
Country Status (2)
Country | Link |
---|---|
US (1) | US10076772B2 (en) |
SG (1) | SG10201407632UA (en) |
Families Citing this family (51)
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FR3000354B1 (en) * | 2012-12-20 | 2015-01-30 | Commissariat Energie Atomique | MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT |
WO2015156859A2 (en) * | 2014-01-13 | 2015-10-15 | Board Of Regents, The University Of Texas System | Surface micromachined microphone with broadband signal detection |
US10153713B2 (en) * | 2014-04-11 | 2018-12-11 | Fondzione Istituto Italiano Di Tecnologia | Device for harvesting energy from a fluidic flow including a thin film of piezoelectric material |
CN106575498A (en) * | 2014-10-31 | 2017-04-19 | 株式会社村田制作所 | Sound generation device |
SG11201802852RA (en) * | 2015-10-21 | 2018-05-30 | Agency Science Tech & Res | Ultrasound transducer and method of forming the same |
EP3211393A1 (en) | 2016-02-29 | 2017-08-30 | ETH Zürich | Mems device using a released device layer as membrane |
US10445547B2 (en) | 2016-05-04 | 2019-10-15 | Invensense, Inc. | Device mountable packaging of ultrasonic transducers |
US10656255B2 (en) | 2016-05-04 | 2020-05-19 | Invensense, Inc. | Piezoelectric micromachined ultrasonic transducer (PMUT) |
US10325915B2 (en) | 2016-05-04 | 2019-06-18 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
US10315222B2 (en) | 2016-05-04 | 2019-06-11 | Invensense, Inc. | Two-dimensional array of CMOS control elements |
US10670716B2 (en) | 2016-05-04 | 2020-06-02 | Invensense, Inc. | Operating a two-dimensional array of ultrasonic transducers |
US10452887B2 (en) | 2016-05-10 | 2019-10-22 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
US10441975B2 (en) | 2016-05-10 | 2019-10-15 | Invensense, Inc. | Supplemental sensor modes and systems for ultrasonic transducers |
US10706835B2 (en) | 2016-05-10 | 2020-07-07 | Invensense, Inc. | Transmit beamforming of a two-dimensional array of ultrasonic transducers |
US10408797B2 (en) | 2016-05-10 | 2019-09-10 | Invensense, Inc. | Sensing device with a temperature sensor |
US10632500B2 (en) | 2016-05-10 | 2020-04-28 | Invensense, Inc. | Ultrasonic transducer with a non-uniform membrane |
US10539539B2 (en) | 2016-05-10 | 2020-01-21 | Invensense, Inc. | Operation of an ultrasonic sensor |
US10562070B2 (en) | 2016-05-10 | 2020-02-18 | Invensense, Inc. | Receive operation of an ultrasonic sensor |
US10600403B2 (en) | 2016-05-10 | 2020-03-24 | Invensense, Inc. | Transmit operation of an ultrasonic sensor |
US11673165B2 (en) | 2016-05-10 | 2023-06-13 | Invensense, Inc. | Ultrasonic transducer operable in a surface acoustic wave (SAW) mode |
US10721568B2 (en) | 2016-07-01 | 2020-07-21 | Intel Corporation | Piezoelectric package-integrated acoustic transducer devices |
JP7239467B2 (en) * | 2016-10-03 | 2023-03-14 | コーニンクレッカ フィリップス エヌ ヴェ | Temperature insensitive backing structures for intraluminal imaging devices |
US10891461B2 (en) | 2017-05-22 | 2021-01-12 | Invensense, Inc. | Live fingerprint detection utilizing an integrated ultrasound and infrared sensor |
US10474862B2 (en) | 2017-06-01 | 2019-11-12 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
CN107271029A (en) * | 2017-06-06 | 2017-10-20 | 纽威仕微电子(无锡)有限公司 | A kind of hydrophone integration module and its manufacturing process |
US10643052B2 (en) | 2017-06-28 | 2020-05-05 | Invensense, Inc. | Image generation in an electronic device using ultrasonic transducers |
CN107520110A (en) * | 2017-07-31 | 2017-12-29 | 瑞声科技(新加坡)有限公司 | Piezoelectric ultrasonic transducer and preparation method thereof |
IT201700124348A1 (en) * | 2017-10-31 | 2019-05-01 | St Microelectronics Srl | MEMIE DEVICE OF PIEZOELECTRIC TYPE WITH SUSPENDED MEMBRANE AND ITS MANUFACTURING PROCESS |
US10936841B2 (en) | 2017-12-01 | 2021-03-02 | Invensense, Inc. | Darkfield tracking |
US10997388B2 (en) | 2017-12-01 | 2021-05-04 | Invensense, Inc. | Darkfield contamination detection |
US10984209B2 (en) | 2017-12-01 | 2021-04-20 | Invensense, Inc. | Darkfield modeling |
US11151355B2 (en) | 2018-01-24 | 2021-10-19 | Invensense, Inc. | Generation of an estimated fingerprint |
KR20200130375A (en) * | 2018-03-09 | 2020-11-18 | 버터플라이 네트워크, 인크. | Ultrasonic transducer devices and methods for manufacturing ultrasonic transducer devices |
US10755067B2 (en) | 2018-03-22 | 2020-08-25 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers |
US10936843B2 (en) | 2018-12-28 | 2021-03-02 | Invensense, Inc. | Segmented image acquisition |
CN111811638A (en) * | 2019-04-12 | 2020-10-23 | 广州辰方互联信息科技有限公司 | Piezoelectric type induction unit and hydrophone applying same |
US11188735B2 (en) | 2019-06-24 | 2021-11-30 | Invensense, Inc. | Fake finger detection using ridge features |
WO2020264046A1 (en) | 2019-06-25 | 2020-12-30 | Invensense, Inc. | Fake finger detection based on transient features |
US11216632B2 (en) | 2019-07-17 | 2022-01-04 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11176345B2 (en) | 2019-07-17 | 2021-11-16 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11232549B2 (en) | 2019-08-23 | 2022-01-25 | Invensense, Inc. | Adapting a quality threshold for a fingerprint image |
EP4029068A4 (en) * | 2019-09-12 | 2023-12-13 | Exo Imaging Inc. | Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries |
US11399231B2 (en) * | 2019-09-27 | 2022-07-26 | United States Of America As Represented By The Administrator Of Nasa | Extreme low frequency microphone/hydrophone for exploration of oceanic and atmospheric dynamics |
US11392789B2 (en) | 2019-10-21 | 2022-07-19 | Invensense, Inc. | Fingerprint authentication using a synthetic enrollment image |
WO2021183457A1 (en) | 2020-03-09 | 2021-09-16 | Invensense, Inc. | Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness |
US11243300B2 (en) | 2020-03-10 | 2022-02-08 | Invensense, Inc. | Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor |
US11328165B2 (en) | 2020-04-24 | 2022-05-10 | Invensense, Inc. | Pressure-based activation of fingerprint spoof detection |
WO2022120025A1 (en) * | 2020-12-04 | 2022-06-09 | Murata Manufacturing Co., Ltd. | Acoustic wave device |
CN112637748B (en) * | 2020-12-22 | 2022-04-26 | 上海交通大学 | Piezoelectric MEMS loudspeaker with double annular surrounding circular vibrating membrane and preparation method |
FR3131291A1 (en) * | 2021-12-24 | 2023-06-30 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Process for functionalizing a membrane of a resonant electromechanical sensor |
CN114950924B (en) * | 2022-04-02 | 2024-03-26 | 华东师范大学 | MEMS piezoelectric ultrasonic transducer array with arc or inclined plane acoustic cavity |
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JP2009537337A (en) * | 2006-05-17 | 2009-10-29 | ミクロガン ゲーエムベーハー | Micromechanical actuators containing group III nitride semiconductors |
JP5184811B2 (en) * | 2007-05-07 | 2013-04-17 | パナソニック株式会社 | Vibration type actuator |
JP5408935B2 (en) * | 2007-09-25 | 2014-02-05 | キヤノン株式会社 | Electromechanical transducer and manufacturing method thereof |
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WO2012073829A1 (en) | 2010-11-30 | 2012-06-07 | 株式会社 村田製作所 | Bulk elastic wave resonator |
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US8819912B2 (en) * | 2012-03-08 | 2014-09-02 | GM Global Technology Operations LLC | Method of assembling workpieces utilizing shape memory polymer activation to facilitate alignment and retention |
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-
2014
- 2014-11-17 SG SG10201407632UA patent/SG10201407632UA/en unknown
- 2014-11-25 US US14/553,023 patent/US10076772B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US10076772B2 (en) | 2018-09-18 |
US20150145374A1 (en) | 2015-05-28 |
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