SG10201407632UA - Transducer and method for forming the same - Google Patents

Transducer and method for forming the same

Info

Publication number
SG10201407632UA
SG10201407632UA SG10201407632UA SG10201407632UA SG10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA SG 10201407632U A SG10201407632U A SG 10201407632UA
Authority
SG
Singapore
Prior art keywords
transducer
forming
same
Prior art date
Application number
SG10201407632UA
Inventor
Jinghui Xu
Hongbin Yu
Liang Lou
Gu Yuandong Alex
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG10201407632UA priority Critical patent/SG10201407632UA/en
Publication of SG10201407632UA publication Critical patent/SG10201407632UA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0651Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of circular shape
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/308Membrane type
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making
SG10201407632UA 2013-11-26 2014-11-17 Transducer and method for forming the same SG10201407632UA (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG2013087515 2013-11-26
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Publications (1)

Publication Number Publication Date
SG10201407632UA true SG10201407632UA (en) 2015-06-29

Family

ID=53182053

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201407632UA SG10201407632UA (en) 2013-11-26 2014-11-17 Transducer and method for forming the same

Country Status (2)

Country Link
US (1) US10076772B2 (en)
SG (1) SG10201407632UA (en)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3000354B1 (en) * 2012-12-20 2015-01-30 Commissariat Energie Atomique MEMBRANE DEVICE WITH CONTROLLED DISPLACEMENT
WO2015156859A2 (en) * 2014-01-13 2015-10-15 Board Of Regents, The University Of Texas System Surface micromachined microphone with broadband signal detection
US10153713B2 (en) * 2014-04-11 2018-12-11 Fondzione Istituto Italiano Di Tecnologia Device for harvesting energy from a fluidic flow including a thin film of piezoelectric material
CN106575498A (en) * 2014-10-31 2017-04-19 株式会社村田制作所 Sound generation device
SG11201802852RA (en) * 2015-10-21 2018-05-30 Agency Science Tech & Res Ultrasound transducer and method of forming the same
EP3211393A1 (en) 2016-02-29 2017-08-30 ETH Zürich Mems device using a released device layer as membrane
US10445547B2 (en) 2016-05-04 2019-10-15 Invensense, Inc. Device mountable packaging of ultrasonic transducers
US10656255B2 (en) 2016-05-04 2020-05-19 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (PMUT)
US10325915B2 (en) 2016-05-04 2019-06-18 Invensense, Inc. Two-dimensional array of CMOS control elements
US10315222B2 (en) 2016-05-04 2019-06-11 Invensense, Inc. Two-dimensional array of CMOS control elements
US10670716B2 (en) 2016-05-04 2020-06-02 Invensense, Inc. Operating a two-dimensional array of ultrasonic transducers
US10452887B2 (en) 2016-05-10 2019-10-22 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10441975B2 (en) 2016-05-10 2019-10-15 Invensense, Inc. Supplemental sensor modes and systems for ultrasonic transducers
US10706835B2 (en) 2016-05-10 2020-07-07 Invensense, Inc. Transmit beamforming of a two-dimensional array of ultrasonic transducers
US10408797B2 (en) 2016-05-10 2019-09-10 Invensense, Inc. Sensing device with a temperature sensor
US10632500B2 (en) 2016-05-10 2020-04-28 Invensense, Inc. Ultrasonic transducer with a non-uniform membrane
US10539539B2 (en) 2016-05-10 2020-01-21 Invensense, Inc. Operation of an ultrasonic sensor
US10562070B2 (en) 2016-05-10 2020-02-18 Invensense, Inc. Receive operation of an ultrasonic sensor
US10600403B2 (en) 2016-05-10 2020-03-24 Invensense, Inc. Transmit operation of an ultrasonic sensor
US11673165B2 (en) 2016-05-10 2023-06-13 Invensense, Inc. Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
US10721568B2 (en) 2016-07-01 2020-07-21 Intel Corporation Piezoelectric package-integrated acoustic transducer devices
JP7239467B2 (en) * 2016-10-03 2023-03-14 コーニンクレッカ フィリップス エヌ ヴェ Temperature insensitive backing structures for intraluminal imaging devices
US10891461B2 (en) 2017-05-22 2021-01-12 Invensense, Inc. Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
CN107271029A (en) * 2017-06-06 2017-10-20 纽威仕微电子(无锡)有限公司 A kind of hydrophone integration module and its manufacturing process
US10643052B2 (en) 2017-06-28 2020-05-05 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
CN107520110A (en) * 2017-07-31 2017-12-29 瑞声科技(新加坡)有限公司 Piezoelectric ultrasonic transducer and preparation method thereof
IT201700124348A1 (en) * 2017-10-31 2019-05-01 St Microelectronics Srl MEMIE DEVICE OF PIEZOELECTRIC TYPE WITH SUSPENDED MEMBRANE AND ITS MANUFACTURING PROCESS
US10936841B2 (en) 2017-12-01 2021-03-02 Invensense, Inc. Darkfield tracking
US10997388B2 (en) 2017-12-01 2021-05-04 Invensense, Inc. Darkfield contamination detection
US10984209B2 (en) 2017-12-01 2021-04-20 Invensense, Inc. Darkfield modeling
US11151355B2 (en) 2018-01-24 2021-10-19 Invensense, Inc. Generation of an estimated fingerprint
KR20200130375A (en) * 2018-03-09 2020-11-18 버터플라이 네트워크, 인크. Ultrasonic transducer devices and methods for manufacturing ultrasonic transducer devices
US10755067B2 (en) 2018-03-22 2020-08-25 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
US10936843B2 (en) 2018-12-28 2021-03-02 Invensense, Inc. Segmented image acquisition
CN111811638A (en) * 2019-04-12 2020-10-23 广州辰方互联信息科技有限公司 Piezoelectric type induction unit and hydrophone applying same
US11188735B2 (en) 2019-06-24 2021-11-30 Invensense, Inc. Fake finger detection using ridge features
WO2020264046A1 (en) 2019-06-25 2020-12-30 Invensense, Inc. Fake finger detection based on transient features
US11216632B2 (en) 2019-07-17 2022-01-04 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11176345B2 (en) 2019-07-17 2021-11-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11232549B2 (en) 2019-08-23 2022-01-25 Invensense, Inc. Adapting a quality threshold for a fingerprint image
EP4029068A4 (en) * 2019-09-12 2023-12-13 Exo Imaging Inc. Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries
US11399231B2 (en) * 2019-09-27 2022-07-26 United States Of America As Represented By The Administrator Of Nasa Extreme low frequency microphone/hydrophone for exploration of oceanic and atmospheric dynamics
US11392789B2 (en) 2019-10-21 2022-07-19 Invensense, Inc. Fingerprint authentication using a synthetic enrollment image
WO2021183457A1 (en) 2020-03-09 2021-09-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11243300B2 (en) 2020-03-10 2022-02-08 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor
US11328165B2 (en) 2020-04-24 2022-05-10 Invensense, Inc. Pressure-based activation of fingerprint spoof detection
WO2022120025A1 (en) * 2020-12-04 2022-06-09 Murata Manufacturing Co., Ltd. Acoustic wave device
CN112637748B (en) * 2020-12-22 2022-04-26 上海交通大学 Piezoelectric MEMS loudspeaker with double annular surrounding circular vibrating membrane and preparation method
FR3131291A1 (en) * 2021-12-24 2023-06-30 Commissariat à l'Energie Atomique et aux Energies Alternatives Process for functionalizing a membrane of a resonant electromechanical sensor
CN114950924B (en) * 2022-04-02 2024-03-26 华东师范大学 MEMS piezoelectric ultrasonic transducer array with arc or inclined plane acoustic cavity

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2811768B2 (en) 1989-07-17 1998-10-15 株式会社デンソー Semiconductor type acceleration sensor and method of manufacturing the same
EP0473425B1 (en) * 1990-08-29 1997-07-02 Kabushiki Kaisha Toshiba Optical disc apparatus for optically processing information
JP3120260B2 (en) * 1992-12-26 2000-12-25 日本碍子株式会社 Piezoelectric / electrostrictive film type element
FR2835981B1 (en) * 2002-02-13 2005-04-29 Commissariat Energie Atomique TUNABLE VOLUME MEMS ACOUSTIC WAVE MICRORESONATOR
US7656071B2 (en) * 2002-10-21 2010-02-02 Hrl Laboratories, Llc Piezoelectric actuator for tunable electronic components
WO2006014929A1 (en) * 2004-07-29 2006-02-09 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
JP2009537337A (en) * 2006-05-17 2009-10-29 ミクロガン ゲーエムベーハー Micromechanical actuators containing group III nitride semiconductors
JP5184811B2 (en) * 2007-05-07 2013-04-17 パナソニック株式会社 Vibration type actuator
JP5408935B2 (en) * 2007-09-25 2014-02-05 キヤノン株式会社 Electromechanical transducer and manufacturing method thereof
JP5385117B2 (en) * 2009-12-17 2014-01-08 富士フイルム株式会社 Method for manufacturing piezoelectric MEMS switch
US8607912B2 (en) * 2009-12-18 2013-12-17 Bombardier Recreational Products Inc. Snowmobile suspension
KR101696665B1 (en) * 2010-09-16 2017-01-16 삼성전자주식회사 Bulk acoustic wave resonator sensor
WO2012073829A1 (en) 2010-11-30 2012-06-07 株式会社 村田製作所 Bulk elastic wave resonator
KR20130054473A (en) 2011-09-29 2013-05-27 삼성전기주식회사 Inertial sensor
US8819912B2 (en) * 2012-03-08 2014-09-02 GM Global Technology Operations LLC Method of assembling workpieces utilizing shape memory polymer activation to facilitate alignment and retention
US9061320B2 (en) * 2012-05-01 2015-06-23 Fujifilm Dimatix, Inc. Ultra wide bandwidth piezoelectric transducer arrays

Also Published As

Publication number Publication date
US10076772B2 (en) 2018-09-18
US20150145374A1 (en) 2015-05-28

Similar Documents

Publication Publication Date Title
IL291446A (en) Anti-trop2 antibodies and methods for producing same
SG10201407632UA (en) Transducer and method for forming the same
HK1219642A1 (en) Opto-physiological sensor and method
IL241183A0 (en) Transducer system
EP2956796A4 (en) Integrated sonar devices and methods
EP2942327A4 (en) Layered-double-hydroxide-oriented film and method for producing same
EP2954154A4 (en) Floating apparatus and method for fabricating the apparatus
EP2947416A4 (en) Sensor and method for producing same
EP2973767A4 (en) Wafer-scale transducer coating and method
HK1223533A1 (en) Ultrasonic instrument and method for manufacturing same
EP2944462A4 (en) Laminate and method for producing same
HK1205214A1 (en) Earthboring implement and method for earthboring
GB201406038D0 (en) Autotroph-based deodorizer and method for manufacturing the same
EP2908553A4 (en) Ultrasonic transducer and method for manufacturing ultrasonic transducer
HK1216094A1 (en) Bonded material and method for producing same
IL240423A0 (en) Filter arrangement and method for using the same
EP3076227A4 (en) Transmittance-variable film and method for producing same
HK1217229A1 (en) Vibratory sensor and method
GB201300376D0 (en) Method and compound
GB2524202B (en) Seam-welding method and system
EP2979855A4 (en) Laminate and method for producing same
GB201304507D0 (en) Ultrasonic Inspection Method
EP3041383A4 (en) Cover member and method for manufacturing the same
EP2756766B8 (en) Brine and method for the manufacture thereof
IL246199A0 (en) Tampon and method for making the same