RU2143343C1 - Microinjector and microinjector manufacture method - Google Patents

Abstract

FIELD: ink-jet printing equipment. SUBSTANCE: microinjector has liquid chamber locking layer and first film layer of organic substance, which are obtained from solution containing mild polyimide acid. Method involves subjecting polyimide acid solution to thermal treatment at predetermined conditions to maintain it in solid state. When mild polyimide acid solution is held at temperature of 280-300 C and pressure of 0.5-2 kg/sq cm, the solution acquires adhesive properties. Thus, locking layer and first layer of membrane formed from organic substance based on and obtained from mild solution of polyimide acid, may be tightly connected to other constructional members without using strengthening connecting layer. Such properties improve adhesive force between cooperating locking layer of heating chamber and locking layer of liquid chamber to prevent working fluid leakage from related chambers and to allow ink to be smoothly discharged from liquid chambers. EFFECT: increased efficiency and simplified construction. 25 cl, 30 dwg

Description

 The present invention relates to a micro-injector and, more specifically, to a micro-injector and a method of manufacturing a micro-injector, which is able to increase cohesive force between structural elements without a layer that improves the connection.

 In general, a micro-injector is a device that is designed to supply a certain amount of liquid, such as ink, injected liquid or oil, to a printing paper, human body or vehicle, using a method in which a predetermined amount of electrical or thermal energy is applied to the liquid so that the volumetric transformation of such a liquid can be caused. Thus, a predetermined amount of such a liquid can be supplied to a specific object.

 Recently, the development of electrical and electronic technology has made possible rapid progress in the development of such microinjectors. As a result of this, microinjectors are universally widely used by humans in everyday life and in production. An example of the use of a microinjector in a person’s life is an inkjet printer.

 Unlike a conventional dot matrix printer, the low-noise inkjet print head is able to use a variety of colors when printing using ink cartridges. In addition, its advantage lies in the fact that the letters are thin and clear when printing them on paper using an inkjet printer. For this reason, inkjet printers are increasingly used.

 In the inkjet printer, which has the above-mentioned advantages, a micro-injector with a nozzle, the diameter of which is microns, is built-in. The micro-injector allows ink to escape from the injection device after converting ink from a liquid form by increasing it in volume to air bubbles in accordance with the electrical signals from external devices with respect to the printer, thereby printing letters and images on paper.

 US Pat. No. 4,490,728, entitled "Thermal inkjet printer", No. 4,809,428, entitled "Thin film device for an ink jet printer head and process for manufacturing the same" printhead and method of its manufacture "), N 5140345, entitled" Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method "(" Method of manufacturing a substrate for an inkjet recording head and a substrate made by this method "), N 5274400 entitled "Ink path geometry for high temperature operation of micro injecting device" silt for high-temperature operation of the micro-injector "), and N 54220627, entitled" Micro injecting device "(" Micro-injector "), the design and operation of each micro-injector in accordance with the previous technical level.

 As a rule, a high temperature is used in a microinjector created by a resistive heating layer in order to release ink onto the paper. Therefore, the high temperature created by the resistive heating layer acts on the ink contained in the ink chamber for a long time. As a result, thermal transformations of the ink occur, and this leads to a rapid decrease in the durability of the ink-containing device.

 In the recent past, to solve this problem, a new method has been proposed for smoothly spraying ink from the ink chamber to the outside by placing a plate membrane between the resistive heating layer and the ink chamber and dynamically deforming the membrane under vapor pressure of a working fluid, such as liquid heptane.

 In a case similar to the above, due to the fact that the membrane is located between the ink chamber and the resistive heating layer so that direct contact of the ink with the resistive heating layer can be prevented, the ink itself undergoes a slight thermal transformation.

 In the microinjector according to the prior art, ink and a working fluid are typically used for printing letters and images. Therefore, chambers for containing ink and working fluid must be provided in the microinjector.

 For this purpose, a locking layer of a liquid chamber and a locking layer of a heating chamber are provided in the micro-injector, which are formed in them and accordingly limit the chambers. Cameras must contain ink and working fluid.

 Typically, the locking layer of the ink chamber and the (locking) layer of the heating chamber are more than 10 microns thick, so that the chambers accordingly have a sufficient volume. Organic material is used as a starting material for ink and working fluid taking into account its chemical resistance.

 As described above, since the chambers, which are limited by the locking layer of the ink chamber and the locking layer of the heating chamber, contain chemicals such as ink and working fluid, the chambers must be corrosion resistant.

 The locking layer of the heating chamber and the locking layer of the ink chamber corrode due to chemicals when these chemicals have been in the chambers for a long time. Therefore, in the locking layer of the heating chamber and the locking layer of the ink chamber there are gaps at the boundaries between the layers and the nozzle plate with holes or a membrane and these layers.

 Therefore, the chemical substance that is contained in the chambers flows from the chambers to structural elements that are not resistant to this chemical substance. Leakage of a chemical substance leads to a noticeable deterioration of such an indicator of the microinjector as durability.

 Accordingly, to overcome the above problems, a new method is proposed to prevent leakage of ink or working fluid.

 US Pat. No. 5,189,83, entitled "Ink jet printer head having two hard photo imaged barrier layers", discloses a method for preventing leakage of ink contained in ink chambers. In accordance with US Pat. No. 5,189,883, the barrier layer of the ink chamber comprises two layers, such as a base barrier layer and a bond reinforcing layer. Since the connection of the locking layer of the ink chamber and the nozzle plate is improved by attaching the bonding reinforcing layer of the locking layer of the ink chamber to the nozzle plate, a gap between the locking layer of the ink chamber and the nozzle plate is prevented.

 However, in this case, there is a disadvantage in that the number of processing operations increases, since the barrier layer of the ink chamber must be formed of two layers, such as a base barrier layer and a bond reinforcing layer.

 In addition, when the locking layer of the ink chamber is attached to the nozzle plate, the bonding reinforcing layer prevents alignment of the locking layer of the ink chamber and the nozzle plate with respect to each other. Accordingly, a problem arises in that the locking layer of the ink chamber may not be precisely attached to the nozzle plate.

 As described above, the locking layer of the ink chamber is not aligned with the nozzle plate, so that there is some tolerance between the locking layer of the ink chamber and the hole plate. Accordingly, due to some disorder, the ink passage may be partially blocked. This does not allow for smooth ink output.

 As a result, the general printing characteristics of an inkjet printhead are noticeably deteriorated.

 The present invention has been made to overcome the above problems inherent in the prior art. The first objective of the present invention is to provide a micro-injector and a method of manufacturing a micro-injector, in which the adhesive force between the locking layer of the heating chamber and the locking layer of the liquid chamber is increased.

 A second object of the present invention is to provide a micro-injector and a method for manufacturing a micro-injector, in which due to the increased adhesive force, leakage of the working fluid from the fluid chambers and the heating chambers can be prevented.

 A third object of the present invention is to provide a microinjector and a method for manufacturing a microinjector in which the adhesive force can be increased without a bonding layer.

 A fourth object of the present invention is to provide a micro-injector and a method for manufacturing a micro-injector, in which the locking layer of the heating chamber can be easily attached to the rest of the structure due to the elimination of the need for a reinforcing joint layer.

 A fifth object of the present invention is to provide a micro-injector and a method for manufacturing a micro-injector in which ink is smoothly discharged from fluid chambers.

To achieve the above objectives of the present invention, a microinjector comprising:
a plate-like base with a protective film attached to it;
resistive heating layers formed on the protective film;
an electrode layer formed on the protective film and intended to transmit an electrical signal to the resistive heating layer; a locking layer of the heating chamber located on the electrode layer and designed along with resistive heating layers to limit the chambers for heating;
a membrane comprising a first layer of a film of organic matter and a second layer of a film of organic matter arranged in a stack on the locking layer of the heating chamber, the membrane being configured to oscillate when the volume of the working fluid filling each of the heating chambers changes;
a locking layer of the liquid chamber located on the membrane and intended along with the membrane to limit the liquid chambers to ensure their alignment with respect to the heating chambers;
a nozzle plate having a plurality of nozzles corresponding to fluid chambers located on a locking layer of the fluid chamber;
moreover, the locking layer of the liquid chamber is formed by heat treatment of the solution of hard polyimidic acid, the first layer of the film of organic matter is formed by heat treatment of the solution of soft polyimidic acid, and the second layer of the film of organic matter is formed by heat treatment of the solution of hard polyimidic acid, and the locking layer of the chamber for heating is formed by heat treatment of the solution soft polyimido acids.

Целесообразно, чтобы структурная формула раствора мягкой полиимидокислоты имела следующий вид:

Желательно, чтобы раствор мягкой полиимидокислоты был изготовлен из состава, в котором диангидрид, имеющий 3,3,4,4- тетракарбокси-дифенилоксид, добавлен к смеси диамина P, имеющего 1,3-бис-(4-аминофенокси) бензол, и амидоподобного (вещества) при заданном соотношении.Preferably, the structural formula of the solution of hard polyimidic acid has the following form:

It is advisable that the structural formula of the solution of soft polyimidic acid has the following form:

Preferably, the soft polyimidic acid solution is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxy-diphenyl oxide is added to a mixture of diamine P having 1,3-bis- (4-aminophenoxy) benzene and an amide-like (substances) at a given ratio.

Желательно, чтобы структурная формула диангидрида имела следующий вид:

Полезно, чтобы запирающий слой камеры для нагрева был выполнен с возможностью вхождения в контакт с первым слоем мембраны, образованным пленкой из органического вещества, а запирающий слой камеры для жидкости был выполнен с возможностью вхождения в контакт со вторым слоем пленки из органического вещества.It is possible that the structural formula of diamine P has the following form:

It is desirable that the structural formula of the dianhydride has the following form:

It is useful that the locking layer of the heating chamber is configured to come into contact with the first layer of the membrane formed by the film of organic matter, and the locking layer of the chamber for liquid is configured to come into contact with the second layer of the film of organic matter.

To achieve the above objectives of the present invention, according to another aspect of the invention, a method for manufacturing a microinjector comprising:
assembling a unit containing a resistive heating layer and a locking layer of a heating chamber formed in the first procedure with a membrane formed in the second procedure;
the assembly of the node containing the nozzle plate and the locking layer of the fluid chamber formed in the third procedure, with a membrane formed in the second procedure,
wherein the first procedure comprises:
the formation of the electrode layer on the protective film of the first plate-like base with the contact of this layer with the resistive heating layer after deposition of the resistive heating layer on the first base on which there is a protective film;
coating a solution of hard polyimidic acid on a resistive heating layer and an electrode layer by rotating the first substrate to form a first layer of an organic substance solution on a resistive heating layer and an electrode layer;
converting the first layer of the organic substance solution into the locking layers of the chamber for heating after drying and heat treatment of the first layer of the organic substance solution;
etching the barrier layer of the heating chamber to expose the resistive heating layer, limiting the chambers for heating by the resistive heating layer and the locking layer of the heating chambers;
The second procedure contains:
coating a solution of soft polyimidic acid on a second plate-like base, on which there is a protective film, during rotation of the second base with the formation of a second layer of a solution of organic matter on the protective film;
converting the second layer of the organic substance solution to the first layer of the film of organic matter after drying and heat treatment of the second layer of the organic substance solution;
coating a solution of a rigid polyimidic acid on a first layer of an organic material film by rotating the second base to form a third layer of an organic substance solution on a first layer of an organic substance film;
converting a third layer of an organic substance solution into a second layer of an organic substance film after drying and heat treatment of the third layer of an organic substance solution;
separating the first and second layers of the film from organic matter from the second base;
The third procedure contains:
forming a nozzle plate having nozzles on a third plate-like base coated with a protective film;
coating from a solution of soft polyimidic acid on the nozzle plate during rotation of the third base with the formation of the fourth layer of a solution of organic matter;
converting the fourth layer of the organic substance solution into the locking layer of the liquid chamber after drying and heat treatment of the fourth layer of the organic substance solution;
etching the locking layer of the liquid chamber with exposing the nozzle plate to limit the liquid chambers to the locking layer of the liquid chamber and the nozzle plate; and
separating the nozzle plate and the locking layer of the fluid chamber from the third base;
moreover, the first, second and third procedures are preferably performed separately from each other.

Целесообразно, чтобы структурная формула раствора мягкой полиимидокислоты имела следующий вид:

Желательно, чтобы раствор мягкой полиимидокислоты был изготовлен из состава, в котором диангидрид, имеющий 3,3,4,4- тетракарбоксидифенилоксид, добавлен к смеси диамина P, имеющего 1,3-бис-(4-амино-фенокси) бензол, и амидоподобного (вещества) в заданном соотношении.Preferably, the structural formula of the solution of hard polyimidic acid has the following form:

It is advisable that the structural formula of the solution of soft polyimidic acid has the following form:

Preferably, the soft polyimidic acid solution is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxydiphenyl oxide is added to a mixture of diamine P having 1,3-bis- (4-amino-phenoxy) benzene and an amide-like (substances) in a given ratio.

Полезно, чтобы структурная формула диангидрида имела следующий вид:

Предпочтительно, чтобы на операции сборки запирающего слоя камеры для нагрева с мембраной давление составляло около 0,5-2 кг/см².It is possible that the structural formula of diamine P has the following form:

It is useful that the structural formula of the dianhydride has the following form:

Preferably, in the assembly operation of the locking layer of the chamber for heating with the membrane, the pressure is about 0.5-2 kg / cm ² .

It is advisable that during the assembly operation of the locking layer of the chamber for heating with the membrane, the temperature is maintained in the range of 250-350 ^o C.

Preferably, in the operation of combining the nozzle plate with the first plate-like base having a membrane, the nozzle plate was placed on the membrane, the pressure being about 0.5-2 kg / cm ² .

It is possible that in the operation of combining the nozzle plate with the first plate-like base having a membrane, the nozzle plate was placed on the membrane, and the temperature was maintained in the range of 250-300 ^o C.

It is useful that in the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the drying temperature is maintained in the range of 80-100 ^o C.

 Preferably, in the step of converting the second layer of the organic substance solution to the first layer of the organic substance film, drying of the second layer of the organic substance solution is carried out for 15-20 minutes.

It is advisable that the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the temperature during heat treatment was maintained in the range of 170-180 ^o C.

 It is desirable that in the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the heat treatment time is about 20-30 minutes.

It is useful that in the operation of converting the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the drying temperature is maintained in the range of 80-100 ^o C.

 It is possible that in the conversion operation of the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the drying time of the fourth layer of the organic substance solution was about 15-20 minutes.

It is advisable that during the conversion of the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the temperature during heat treatment is maintained in the range of 170-180 ^o C.

 Preferably, in the conversion operation of the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the heat treatment time is about 20-30 minutes.

 In other words, to achieve the above objectives of the present invention, there is provided a micro-injector in which, upon forming the barrier layer of the fluid chamber, the soft polyimide acid solution is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxydiphenyl oxide is added to a mixture of diamine P having 1,3-bis- (4-amino-phenoxy) benzene, and amide-like (substance) in a given ratio.

The solution of soft polyimidic acid becomes solid under the action of heat treatment under a certain mode, while it has a large adhesive force at a given temperature and pressure, for example, at a temperature of 280-300 ^o C and a pressure of 0.5-2 kg / cm ² . Accordingly, the locking layer of the fluid chamber, made from a solution of soft polyimidic acid, can be brought into close contact with other structural elements.

 In this case, even if the ink acts on the boundaries between the barrier layer of the fluid chamber and other structural elements, ink leakage from the fluid chambers can be prevented. In addition, a solution of soft polyimidic acid can be used for other structural elements, such as a membrane and a locking layer of a chamber for heating. When the membrane is formed from a solution of polyimidic acid as the main element of the membrane, the membrane can be tightly attached to the barrier layer of the chamber for heating, and at the same time do not separately form a layer reinforcing the connection. Therefore, it is possible to prevent leakage of the working fluid, which fills the heating chambers, from the heating chambers.

 Preferably, the barrier layer of the heating chamber is formed from a solution of hard polyimidic acid, which reacts and mixes with a solution of soft polyimidic acid so as to form a tight contact with the membrane.

 As a result, the injection characteristics of the microinjector according to the present invention are markedly improved.

The above objectives and other advantages of the present invention will become more apparent when studying a detailed description of a preferred embodiment with reference to the attached drawings, in which:
FIG. 1 is an isometric view of an inkjet printhead according to the present invention;
FIG. 2 is a sectional view of a micro-injector according to the present invention, illustrating a first operation during operation of a micro-injector;
FIG. 3 is a cross-sectional view of a micro-injector according to the present invention, illustrating a second operation during operation of a micro-injector;
FIG. 4a-6f show an assembly order of a micro-injector according to the manufacturing method of the micro-injector of the present invention;
FIG. 7a-7f is a process for manufacturing a microinjector according to the present invention.

 Next, an inkjet printhead and a method for manufacturing an inkjet printhead according to the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, in a microinjector according to the present invention, a protective film 2 made of SiO ₂ is arranged so that it is adhered to the upper surface of the base 1 made of silicon. Resistive heating layers 11 are placed in a predetermined position on the upper surface of the protective film 2, and electrical energy is supplied to said resistive heating layers 11 from an external power source (not shown) to heat the resistive heating layers 11. The electrode layer 3 is located on the edge portion of each resistive heating layer 11, and this electrode layer 3 supplies electrical energy to the resistive heating layers 11 from an external power source. In addition, the electrode layer is connected to the common electrode 12. The electric energy that is supplied from the electrode layer 3 to the resistive heating layers 11 is converted into thermal energy with the formation of high temperature using the resistive heating layers 11.

 In addition, the heating chamber 4 is limited by a locking layer 5 of the heating chamber located on top of the electrode layer 3 on top of the resistive heating layers 1 so as to cover the resistive heating layers 11. Heat generated by each resistive heating layer 11 is transferred to the heating chamber 4 .

 The chamber 4 for heating is filled with a working fluid, which contributes to the formation of steam pressure. The working fluid quickly evaporates under the influence of heat transferred from the resistive heating layer 11. In addition, the vapor pressure generated due to the evaporation of the working fluid is supplied to the membrane 20 formed on the locking layer 5 of the heating chamber.

 The fluid chamber 9 is limited by the locking layer 7 of the fluid chamber above the membrane 20 so that it is coaxial with the chamber 4 for heating. The fluid chamber 9 is filled with a predetermined amount of ink.

 On the other hand, in the locking layer 7 of the liquid chamber and in the nozzle plate 8, holes are formed corresponding to the liquid chambers 9, these holes functioning as nozzles 10 for discharging ink outward from the liquid chambers 9. Such nozzles 10 are made in the locking layer 7 of the fluid chamber, which delimits the fluid chambers 9, and in the nozzle plate 8 so that these holes are coaxial with the chambers 4 for heating and with the chambers 9 for the fluid.

 According to the present invention, the locking layer 7 of the liquid chamber is made of a soft polyimidic acid solution having the structure shown below.

Когда раствор мягкой полиимидокислоты, имеющий показанную выше структуру, находится при определенной температуре и под определенным давлением, он обладает способностью превращения в вещество с сильными адгезионными свойствами. ^* Structural formula of a solution of soft polyimidic acid

When a solution of soft polyimidic acid having the structure shown above is at a certain temperature and under a certain pressure, it has the ability to turn into a substance with strong adhesive properties.

 Accordingly, when the locking layer 5 of the heating chamber is combined with the membrane 20, the locking layer 5 of the heating chamber is converted into a substance with strong adhesive properties at a certain temperature and pressure in order to maintain a large bonding force between the membrane 20 and this layer without a bonding layer .

 The membrane 20 according to the present invention has two layers, a first layer of an organic film and a second layer 22 of an organic film. The second layer 22 of the film of organic matter in contact with the locking layer 7 of the liquid chamber is made of a solution of hard polyimidic acid, which is able to react well with a solution of soft polyimidic acid. The hard polyimidic acid solution has the structure shown below.

Поскольку запирающий слой 7 камеры для жидкости выполнен из раствора мягкой полиимидокислоты, а второй слой 22 мембраны 20, образованный пленкой из органического вещества, выполнен из раствора жесткой полиимидокислоты, запирающий слой 7 камеры для жидкости оказывается в течение длительного времени плотно присоединенным ко второму слою мембраны 20, образованному пленкой из органического вещества. Образование зазора предотвращается за счет плотного соединения, так что предотвращается утечка чернил, содержащихся в камере 9 для жидкости. ^* Structural formula of a solution of hard polyimidic acid

Since the locking layer 7 of the liquid chamber is made of a solution of soft polyimidic acid, and the second layer 22 of the membrane 20 formed by a film of organic matter is made of a solution of hard polyimidic acid, the locking layer 7 of the liquid chamber is tightly attached to the second layer of the membrane 20 formed by a film of organic matter. Gap formation is prevented by tight connection, so that the ink contained in the fluid chamber 9 is prevented from leaking.

 On the other hand, the first layer 21 of the membrane 20, formed by a film of organic matter, is made of a solution of soft polyimidic acid, as is the locking layer 7 of the liquid chamber. This leads to the preservation for a long time of a large strength of the connection between the first layer 21 of the film of organic matter and the second layer 22 of the film of organic matter, which form the membrane.

 In addition, the reason that the first layer 21 of the film from the organic substance is formed from a solution of soft polyimidic acid is that the locking layer 5 of the heating chamber, which is in contact with the first layer 21 of the film from the organic substance, can be formed from a solution of hard polyimidic acid which reacts well with a solution of soft polyimidic acid.

 Since the locking layer 5 of the heating chamber is made of a solution of soft polyimidic acid, and the first layer 21 of the membrane 20 formed by a film of organic matter is made of a solution of hard polyimidic acid, the locking layer 5 of the heating chamber is tightly attached for a long time to the first layer 21 of the film from the organic matter of the membrane 20. Due to the tight connection, the formation of a gap is prevented, and thereby the leakage of the working solution contained in the chamber 4 for heating is prevented.

 In addition, the first layer 21 of the membrane 20, formed by a film of organic matter, is made of a solution of soft polyimidic acid, as is the locking layer 7 of the liquid chamber. When the locking layer 5 of the heating chamber is connected to the membrane 20, the locking layer 5 of the heating chamber is converted into a substance with strong adhesive properties at a certain temperature and pressure to maintain a large bonding force between the membrane 20 and this layer without a bonding layer.

 Preferably, a solution of soft polyimidic acid, which forms a barrier layer 7 of the liquid chamber and a second layer 22 of an organic material film, is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxydiphenyl oxide is added to a mixture of diamine P having 1 , 3-bis (4-aminophenoxy) benzene, and amide-like (substance) in a predetermined ratio.

Ниже показана структурная формула диангидрида:
структурная формула диангидрида ^*

В микроинжекторе согласно предшествующему уровню техники усиливающий соединение слой образовывали посредством отдельного процесса с целью усиления силы контактного взаимодействия между запирающим слоем камеры для жидкости и другими конструктивными элементами. В результате заметно увеличивалось число операций изготовления микроинжектора.The structure of diamine P is shown below:
^* structural formula of diamine P ^*

The structural formula of dianhydride is shown below:
structural formula of dianhydride ^*

In the prior art micro-injector, a bonding reinforcing layer is formed by a separate process in order to enhance the contact force between the locking layer of the fluid chamber and other structural elements. As a result, the number of microinjector manufacturing operations increased markedly.

 As described above, the locking layer 7 of the liquid chamber is formed from a solution of soft polyimidic acid, which is able to turn into a substance with cohesive properties under certain conditions. In addition, the locking layer 7 of the liquid chamber allows you to maintain a large connection force without reinforcing the connection layer, while ensuring tight contact with other structural elements for a long time. As a result, it is possible to reduce the number of operations performed (to eliminate unwanted operations) of the technological process.

 As described above, according to the present invention, the membrane 20 is attached to the locking layer 5 of the chamber for heating by using the ability of the soft polyimidic acid solution and the hard polyimidic acid solution to react (with each other), so that the durability of the microinjector can be increased. In addition, leakage of the working fluid from the heating chambers can be prevented.

 On the other hand, US Pat. No. 5,417,835, entitled "Solid state ion sensor with polyimide membrane", discloses a sensor that utilizes a bonding strength of a polyimide similar to the polyimidic acid solution of the present invention.

 From the point of view of using the bonding force (adhesive force) of the polyimide, the present invention is similar to the above patent according to the prior art. However, the present invention differs from the above technical level with respect to the processing of polyimide to obtain the adhesion force, the use of polyimide and structural elements from polyimide. The present invention is a completely new invention, different from the prior art.

 Below will be explained the operation of the above microinjector according to the present invention.

As shown in FIG. 2, first, when electric energy is supplied to the electrode layer 3 from an external power source, the resistive heating layer 11, which is connected to the electrode layer 3, will receive electric energy. When this heating layer 11 is instantly heated to a high temperature in excess of 500 ^o C. In this state, the electrical energy is converted into thermal energy with a temperature of 500-550 ^o C.

 After that, thermal energy is transferred to the heating chamber 4, connected to the resistive heating layer 11, while the working fluid filling the heating chamber 4, due to the thermal energy, quickly evaporates with the formation of a vapor pressure of a predetermined value.

 As described above, the locking layer 5 of the heating chamber defining the heating chambers 4 is formed from a rigid polyimidic acid solution. The first layer 21 of an organic material film that comes into contact with the barrier layer 5 of the heating chamber is formed from a solution of soft polyimidic acid, which has the desired ability to react with a solution of hard polyimidic acid. Therefore, it is possible to prevent the leakage of the working solution (working fluid) from the chambers for heating, since the locking layer 5 of the chambers for heating is in close contact with the first layer 21 of the film of organic matter.

 Steam pressure is supplied to the membrane 20 located on the surface of the barrier layer 5 of the heating chamber, and therefore, a shock force P of a predetermined value will be applied to the membrane 20.

 In this case, the membrane 20 rapidly expands outward, bending, as shown by arrows. Therefore, a shock force A will be applied to the ink 100 that fills the fluid chamber 9 formed on the membrane 20, so that the ink 100 is in a state in which they can be injected.

 The locking layer 7 of the liquid chamber is also formed from a solution of soft polyimidic acid. When the locking layer 7 of the liquid chamber is attached to the membrane 20, the locking layer 7 of the liquid chamber is converted to a substance with cohesive properties, since pressure is applied to the locking layer 7 of the liquid chamber at a predetermined temperature. Therefore, the locking layer 7 of the fluid chamber can be tightly attached to the membrane 20 without a bond reinforcing layer.

 As shown in FIG. 3, when the supply of electric energy from an external power source to the resistive heating layer 11 is stopped, the resistive heating layer 11 is cooled so that the vapor pressure in the heating chamber 4 decreases rapidly. Therefore, the heating chamber 4 is in a vacuum state. In this case, a reaction force B corresponding to the vacuum pressure arising due to the state of vacuum in the heating chamber 4 will be applied to the membrane 20. Accordingly, the membrane 20 instantly contracts, returning to its original state.

 In this case, the membrane 20 is rapidly compressed with the transfer of the reaction force B in the direction of the fluid chamber, as shown by the arrow. Therefore, the ink 100, which was ready for release due to the expansion of the membrane 20, is converted due to their own weight into water droplets and then pushed onto the printing paper. Printing on paper is done with droplets of ink when they are injected from a micro-injector.

 Below will be described in detail a method of manufacturing an inkjet print head according to the present invention.

 A method of manufacturing an inkjet printhead according to the present invention includes three operations that are performed separately. The assembly comprising the resistance heater 11 and the locking layer 5 of the heating chamber, the membrane 20 and the assembly comprising the nozzle plate 8 and the locking layer 7 of the fluid chamber, which are made in separate operations, are assembled together with each other, while exposing them relative to each other thereby manufacturing the microinjector.

As shown in FIG. 4, in accordance with the method of the present invention, in the first steps, first the metal 11 ', for example polycrystalline silicon, is deposited from the vapor phase onto the base plate 1, which has a coating in the form of a protective film 2 of SiO ₂ . After polycrystalline silicon 11 'is covered with a photomask 30, an operation is performed in which the photomask 30 is exposed to radiation (exposed) using an ultraviolet radiation source 40 and a lens 50. At this moment, pattern elements 30' are formed on the photomask 30, which correspond to the shape of the resistive heating layers 11 in the plane. Then, the ultraviolet radiation emitted from the ultraviolet radiation source 40 passes through the pattern elements 30 ′ to form a pattern (configuration) of the resistive heating layer 11 on the polycrystalline silicon 11 ′.

 As shown in FIG. 4b, after the photomask 30 has been removed from the base 1 with a chemical, the base 1 is placed in a development chamber 60 filled with a developer. During the development of the base 1, the silicon part of the base 1, which was not exposed to ultraviolet radiation due to the presence of the elements 30 'of the pattern, remains on the base 1, despite contact with the developer. The rest of the base 1, which was exposed to ultraviolet radiation, is removed from the base 1 by the developer. Accordingly, on the protective film of the base 1, a resistive heating layer 11 is finally formed having the same shape as the pattern of the photomask.

 As shown in FIG. 4c, by using vapor deposition, such as sputtering, a metal, such as aluminum, is deposited on the protective film 2 so that it covers the resistive heating layer 11, whereby a metal layer 3 'is formed on the basis of 1.

 As shown in FIG. 4d, after the metal layer 3 'is covered with a photomask 31, the metal layer 3' is exposed to ultraviolet radiation using an ultraviolet radiation source 40 and a lens 50. At this point, the desired pattern elements 31 'that have a layer shape are formed on the photomask 31 3 electrodes. The ultraviolet radiation emitted by the ultraviolet radiation source 40 passes through the pattern elements 31 ′ to form the configuration of the electrode layer 3 on the metal layer 3 ′.

 As shown in FIG. 4e, after the photomask 31 has been removed from the metal layer 3 ′ using a chemical substance, the base 1, on which the heating layer 11 and the metal layer 3 ′ are arranged in a stack, are placed in a developer chamber 60 filled with a developer . In the process of developing the metal layer 3 ', that part of the metal layer 3' that was not exposed to ultraviolet radiation remains on the basis of 1 due to the shape of Figure 31 ', while the rest of the metal layer 3' that was exposed to ultraviolet radiation, removed from the metal layer 3 'by the developer. As shown in FIG. 7a, an electrode layer 3 is formed on the metal layer 3 ′ such that this electrode layer 3 only contacts the edge of the resistive heating layer 11.

 After washing the base 1 with distilled water, as shown in FIG. 4f, a resistive heating layer 11 and an electrode layer 3 are coated with a hard polyimide acid solution 400 using a coating device (not shown), the substrate 1 being rotated using a centrifuge 70. The rotation speed of the centrifuge 70 on which the substrate 1 is located regulated by controller 80.

 Thus, the rigid polyimidic acid solution 400 is uniformly distributed over the electrode layer 3 due to centrifugal force. The solution 400 of rigid polyimidic acid spreads in a wavy form due to its viscosity. As shown in FIG. 4g, on the basis of 1, a first layer of an organic substance solution 5 'is formed, which maintains a uniform thickness, while covering the resistive heating layer 11 and the electrode layer 3.

 As shown in FIG. 4h, then, after the base 1 with the first layer of organic matter solution 5 'formed on it is removed from the centrifuge 70 and transferred to the heating tank 90, in the heating tank 90, the first layer of the organic matter solution 5' is dried and heat treated this layer. As a result, the first layer 5 'of the organic matter solution is converted into a barrier layer 5 of the chambers for heating.

 In the case of the type described above, due to the fact that the locking layer 5 of the heating chamber is formed from a hard polyimide acid solution 400, the locking layer 5 of the heating chamber comes into tight contact with the first layer 21 of the membrane 20 formed by an organic material film which is made of a solution of soft polyimidic acid, in the process of assembling a microinjector. The rigid polyimidic acid solution, which forms the barrier layer 5 of the heating chamber, has the structure as described and shown above.

As shown in FIG. 4i, after a photomask 32 is applied to the locking layer 5 of the heating chambers, the locking layer 5 of the heating chambers is exposed to ultraviolet radiation by using an ultraviolet radiation source 40 and a lens 50. At this moment,
the mask 32, the desired pattern elements 32 'are formed, which are in the form of a chamber 4 for heating. The ultraviolet radiation emitted by the ultraviolet radiation source 40 passes through the pattern elements 32 ′ to form configurations of the heating chambers 4 on the locking layer 5 of the heating chamber.

 As shown in FIG. 4j, further, after the photomask 32 is removed from the barrier layer 5 of the chambers for heating by using a chemical substance, the base 1, on which, in order, in the form of a stack, a resistive heating layer 11, a metal layer 3 'and a barrier layer 5 are formed the heating chambers are placed in the developing chamber 60 filled with the developer. In the process of developing the locking layer 5 of the heating chamber, that part of the locking layer 5 of the heating chamber that has not been exposed to ultraviolet radiation remains on the basis of 1 due to the shape of Figure 32 ', while the rest of the locking layer 5 of the heating chamber, which was exposed to ultraviolet radiation, is removed from the base 1 by the developer. Therefore, as shown in FIG. 7b, the barrier layer 5 of the heating chamber is formed on the electrode layer 3 so that the barrier layer contacts the edge of the resistive heating layer 11. As described above, the first steps of the microinjector manufacturing process according to the present invention are thus completed.

 The second operations for manufacturing the membrane 20 are performed separately from the first operations.

As shown in FIG. 5, a silicon substrate 200 having a SiO ₂ protective film 201 is coated with a soft polyimide acid solution 500 using a coating device, and the substrate 200 is rotated using a centrifuge 70. The speed of rotation of the centrifuge 70 on which the substrate 200 is located adjusted by controller 80.

 Thus, the solution 500 of soft polyimidic acid is evenly distributed over the layer 3 of the electrode due to centrifugal force. A solution of 500 soft polyimidic acid spreads in a wavy form due to its viscosity. On a plate-like base 200, a second layer 21 'of an organic matter solution is formed that maintains a uniform thickness.

 As shown in FIG. 5b, then, after the plate-like base 200 with the second organic matter solution layer 21 ′ formed on it is removed from the centrifuge 70 and transferred to the heating tank 90, the second layer of the organic matter solution 21 is dried in the heating tank 90 and heat treated this layer. As a result, the second layer 21 'of the organic matter solution quickly turns into the first film 21 of the membrane 20 made of organic matter.

In this step of converting the second layer 21 'of the organic substance solution to the first layer 21 of the film of organic matter, it is preferable to maintain the drying temperature at a level of 80-100 ^o C and carry out drying for 15-20 minutes. In addition, in this operation, it is preferable to maintain the heat treatment temperature at the level of 170-180 ^o C and conduct heat treatment for 20-30 minutes.

 In the case of the type described above, due to the fact that the first layer 21 of the film from the organic substance is formed from a solution of 500 soft polyimidic acid, the first layer 21 of the film from the organic substance comes into tight contact with the locking layer 5 of the chambers for heating, which is formed from a solution of 400 hard polyimido acids during the assembly of the microinjector. The solution 500 soft polyimidic acid, which forms the first layer 21 of the film of organic matter, has the structure as described and shown above.

 As shown in FIG. 5c, on a plate-like base 200, on which there is a first layer 21 of an organic material film, by means of a coating device, a coating is made of a solution 400 of rigid (hardened) polyimidic acid, while the plate-like base 200 is rotated using a centrifuge 70. The speed of rotation of the centrifuge 70 on which the base 200 is located is controlled by the controller 80.

 Thus, the solution 400 of rigid polyimidic acid is evenly distributed over the first layer 21 of the film of organic matter due to centrifugal force. The solution 400 of rigid polyimidic acid spreads undulating due to its viscosity. As a result, on the first layer 21 of the film of organic matter, a third layer 22 'of the organic matter solution is formed having a uniform thickness.

 As shown in FIG. 5d, then, after the plate-like base 200, on which the first layer 21 of the film of organic matter and the third layer 22 of the solution of organic matter are stacked in order, in the form of a stack, removed from the centrifuge 70 and transferred to the tank 90 for heating, in the tank 90 for heating, drying of the third layer 22 'of the organic matter solution and heat treatment of this layer is performed. As a result, the third layer 22 'of the organic matter solution quickly turns into the second layer 22 of the membrane 20 formed by a film of organic matter.

 In the case described above, due to the fact that the second layer 22 of the film from the organic substance is formed from a solution of hard polyimidoic acid 400, the second layer 22 of the film from the organic substance comes into tight contact with the first layer 21 of the film from organic matter, which is formed from a solution 500 of soft polyimidic acid. The rigid polyimidic acid solution 400, which forms a second organic material film layer 22, has the structure described above.

 In addition, since the second organic material film layer 22 is formed from a rigid polyimidic acid solution 400, the second organic material film layer 22 can be brought into close contact with the barrier layer 7 of the liquid chamber, which is formed from a soft polyimidic acid solution 500.

 In accordance with the indicated operations, as shown in FIG. 5e, a membrane 20 is formed on a plate-like base 200 having a protective film 201, in which the first and second layers 21 and 22 of organic material films are stacked on top of each other.

 After the structure of the membrane 20 is completely ready by forming it, as described above, the membrane 20 is separated from the plate-like base 200 using a chemical substance such as HF.

 Accordingly, the completion of the second operations intended for the manufacture of the membrane.

 The manufacturing operations of the assembly comprising the nozzle plate 8 and the locking layer 7 of the fluid chamber are performed separately from the second operations.

As shown in FIG. 6a, a silicon wafer base 300 having a SiO ₂ protective film is placed in an electrolytic bath 61 containing an electrolyte.

 On the basis of 300, a base layer of the template (not shown) is formed to limit the area of the nozzle holes during the manufacturing of the nozzle plate 8.

 In the electrolytic bath along with the base 300 is placed a target plate 63 of metal, such as nickel. The base 300 and the target plate 63 are connected to the external power supply 62 so that the target plate 63 is connected to the positive electrode of the power supply 62, and the base 300 is connected to the negative electrode.

 When electric current is supplied to the target plate 63 and the base 300, the target plate 63, which is connected to the positive electrode of the power supply, dissolves, quickly ionizes, and forms nickel ions. Nickel ions that are ionized are accelerated by the electrolyte and precipitated, in turn, on the basis of 300, which is connected to the negative electrode of the power source. Therefore, the base 300 is electrolytically coated with nickel ions so that nickel ions are attached to the surface of the nozzle plate 8 and to the area of the nozzle holes of the base layer of the template (pattern layer).

 As shown in FIG. 6b, the base 300, on which the nozzle plate 8 is provided, is coated with a soft polyimidic acid solution 500 using a coating device, the base 300 being rotated by means of a centrifuge 70. The rotation speed of the centrifuge 70 on which the base 300 is located is controlled by controller 80.

 Thus, a solution of 500 soft polyimidic acid is evenly distributed over the base 300 due to centrifugal force. A solution of 500 soft polyimidic acid spreads in a wavy form due to its viscosity. On the basis of 300, a fourth layer 7 'of an organic matter solution is formed, maintaining a uniform thickness.

 As shown in FIG. 6d, then, after the base 300 having the fourth layer of organic matter solution 7 'is removed from the centrifuge 70 and transferred to the heating tank 90, in the heating tank 90, the fourth layer of the organic matter solution 7 is dried and heat treated . As a result, the fourth layer 7 'of the organic matter solution quickly turns into the barrier layer 7 of the liquid chamber.

In this step of converting the fourth layer 7 'of the organic substance solution into the barrier layer 7 of the liquid chamber, it is preferable to maintain the drying temperature at 80-100 ^° C and carry out drying for 15-20 minutes. In addition, in this operation, it is preferable to maintain the heat treatment temperature at the level of 170-180 ^o C and conduct heat treatment for 20-30 minutes.

 In the case described above, due to the fact that the locking layer 7 of the liquid chamber is formed from a solution of soft polyimidic acid 500, the locking layer 7 of the liquid chamber comes into tight contact with the second layer 22 of the membrane 20 made of a film of organic matter, which is formed from solution 400 hard polyimidic acid in the process of assembling an inkjet printhead. The soft polyimidic acid solution 500, which forms the barrier layer 7 of the fluid chamber, has the structure as described and shown above.

 As shown in FIG. 6e, after a photomask 33 is applied to the liquid chamber 7's locking layer, the liquid chamber’s locking layer 7 is exposed to ultraviolet radiation by using an ultraviolet radiation source 40 and a lens 50. At this point, the desired pattern elements 33 'are formed on the photomask 33, which are in the form of fluid chambers 9. The ultraviolet radiation emitted by the ultraviolet radiation source 40 passes through the pattern elements 33 ′ to form the configurations of the fluid chambers 9 on the barrier layer 7 of the fluid chambers.

 As shown in FIG. 6f, after the photomask 33 is removed from the locking layer 7 of the liquid chamber by using a chemical substance, the base 300, on which the nozzle plate 8 and the locking layer 7 of the liquid chamber are stacked in order, are placed in the chamber 60 for manifestations filled with a developer. During the development of the liquid chamber lock layer 7, that part of the liquid chamber lock layer 7 that has not been exposed to ultraviolet light remains 300 based on the shape of Figure 33 ', while the rest of the liquid chamber lock layer 7, which was exposed to ultraviolet radiation, is removed from the nozzle plate 8 by the developer. As shown in FIG. 7e, the locking layer 7 of the liquid chamber is formed on the nozzle plate 8 so that the liquid chambers 9, respectively, are aligned with the nozzles 10.

 When the assembly of the nozzle plate 8 and the liquid chamber locking layer 7 is completed in these operations, the assembly containing the nozzle plate 8 and the liquid chamber locking layer 7 is separated from the plate-like base 300 using a chemical such as HF so that to complete the third operation.

 After the first, second and third operations are completed, perform the fifth operation for the manufacture of an inkjet print head by assembling all the elements with each other.

 In this case, the membrane 20 formed in the process of performing the second operations is connected to a plate-like base on which in the process of performing the second operations a resistive heating layer 11 and a locking layer 5 of the heating chamber are stacked. After that, the assembly containing the nozzle plate 8 and the locking layer 7 of the liquid chamber is placed on the membrane 20 and connected to the membrane 20 so that the heating chamber 4, the membrane 20, the liquid chamber 9 and the nozzle 10 are aligned aligned with each other .

When the membrane 20 formed during the second operations is attached to a plate-like base on which the resistive heating layer 11 and the locking layer 5 of the heating chamber are stacked in the form of a stack during the second operations, it is preferable to maintain a pressure of 0.5-2 kg / cm ² and a temperature of 250-300 ^o C.

 In this case, since the first layer 21 of the membrane 20 formed by a film of organic matter is made of a solution of soft polyimidic acid 500, the first layer 21 of a film of organic matter is converted to a substance with cohesive properties at the above pressure and temperature. Therefore, the first layer 21 of the film of organic matter can be tightly attached to the locking layer 5 of the chambers for heating without reinforcing the connection layer. As a result, you can reduce the number of operations performed (eliminate unwanted operations).

In addition, when the assembly containing the nozzle plate 8 and the locking layer 7 of the liquid chamber, which is made in the process of performing the third operations, is connected to the membrane 20 formed in the second operations, it is preferable to maintain a pressure of 0.5-2 kg / cm ² and a temperature 250-300 ^o C.

 In this case, since the locking layer 7 of the liquid chamber is formed from a solution of soft polyimidic acid 500, the locking layer 7 of the liquid chamber is converted into a substance with cohesive properties at the above pressure and temperature. Therefore, the locking layer 7 of the liquid chamber can be tightly attached to the second layer 22 of the film of organic matter of the membrane 20 without reinforcing the connection layer. As a result, you can reduce the number of operations performed (eliminate unwanted operations).

 Structural elements that are fully manufactured in the first operations and third operations are assembled with each other, aligning them with each other. As shown in FIG. 7f, an inkjet printhead can be manufactured in this way.

 As described above, since the locking layer of the liquid chamber and the first membrane layer made of a film of organic matter are formed from a solution of soft polyimidic acid, the locking layer of the liquid chamber and the first layer of the film of organic substance are transformed into a substance with cohesive properties at certain pressures and temperature. Therefore, the locking layer of the liquid chamber and the first layer of the film of organic matter can be tightly connected to other structural elements without reinforcing the connection layer in order to prevent leakage of ink and working fluid.

 Although the present invention has been shown and described specifically with respect to an inkjet printhead, it should be understood that the microinjector of the present invention can be used in a micropump of medical devices and in a fuel injection device.

 In the inkjet printhead and in the manufacturing method described in detail above, a locking layer of a liquid chamber, a first layer of a film of organic matter, and the like. made from a solution of soft polyimidic acid.

The solution of soft polyimidic acid is kept in a solid state under a certain heat treatment mode, but acquires adhesive properties at a pressure of 0.5-2 kg / cm ² and a temperature of 250-300 ^o C. Therefore, the locking layer of the liquid chamber and the first layer of a film of organic matter, which are formed from a solution of soft polyimidic acid, can be tightly attached to other structural elements without reinforcing the connection layer in order to prevent leakage of ink and working fluid.

 Despite the fact that the present invention has been shown and described above with reference to a specific variant of its implementation, specialists in this field should understand that various changes can be made in the form and details of the invention, without departing from the scope of patent protection of the invention defined by the attached claims claims

Claims (17)

 1. A microinjector containing a plate-like base with a protective film attached to it; resistive heating layers formed on the protective film; an electrode layer formed on the protective film and intended to transmit an electrical signal to the resistive heating layer; a locking layer of the heating chamber located on the electrode layer and designed along with resistive heating layers to limit the chambers for heating; a membrane comprising a first layer of a film of organic matter and a second layer of a film of organic matter arranged in a stack on the locking layer of the heating chamber, the membrane being configured to oscillate when the volume of the working fluid filling each of the heating chambers changes; a locking layer of the liquid chamber located on the membrane and intended along with the membrane to limit the liquid chambers to ensure their alignment with respect to the heating chambers, and a nozzle plate having a plurality of nozzles corresponding to liquid chambers located on the locking layer of the liquid chamber, the locking layer of the liquid chamber is formed by heat treatment of a solution of hard polyimidic acid, the first layer of a film of organic matter is formed by heat treatment of a solution of soft polyimide dokisloty and a second film layer of an organic substance is formed by heat-treating polyamide acid solution and chamber barrier layer is formed by heating the polyamide acid solution heat treatment. 2. The microinjector according to claim 1, characterized in that the structural formula of the solution of rigid polyimidic acid has the following form:

3. The microinjector according to claim 1, characterized in that the structural formula of the solution of soft polyimidic acid has the following form:

4. The microinjector according to claim 3, characterized in that the soft polyimidic acid solution is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxydiphenyl oxide is added to a mixture of diamine P having 1,3-bis- (4- aminophenoxy) benzene, and amide-like (substance) at a given ratio. 5. The microinjector according to claim 4, characterized in that the structural formula of diamine P has the following form:

6. The microinjector according to claim 4, characterized in that the structural formula of the dianhydride has the following form:

7. The microinjector according to claim 1, characterized in that the locking layer of the chamber for heating is configured to come into contact with the first layer of the membrane formed by the film of organic matter, and the locking layer of the chamber for liquid is configured to come into contact with the second layer of the film from organic matter.  8. A method of manufacturing a microinjector containing an assembly of a node containing a resistive heating layer and a locking layer of a chamber for heating formed in the first procedure, with a membrane formed in the second procedure and an assembly of a node containing a nozzle plate and a locking layer of a chamber for liquid formed in the third procedure, with a membrane formed during the second procedure, the first procedure comprising the formation of an electrode layer on the protective film of the first plate-like base to ensure that this layer contacts p with a resistive heating layer after deposition of the resistive heating layer on a first base on which a protective film is provided; coating a solution of hard polyimidic acid on a resistive heating layer and an electrode layer while rotating the first substrate to form a first layer of an organic substance solution on a resistive heating layer and an electrode layer; converting the first layer of the organic substance solution into the barrier layer of the heating chamber after drying and heat treatment of the first layer of the organic substance solution and etching the barrier layer of the heating chamber to expose the resistive heating layer, restricting the chambers to be heated by the resistive heating layer and the barrier layer of the heating chambers; the second procedure comprises coating from a solution of soft polyimidic acid on a second plate-like base on which there is a protective film, while rotating the second base with the formation of a second layer of an organic substance solution on the protective film; converting the second layer of the organic substance solution to the first layer of the film of organic matter after drying and heat treatment of the second layer of the organic substance solution; coating a solution of a rigid polyimidic acid on a first layer of a film of organic matter by rotating the second base to form a third layer of a solution of organic matter on the first layer of a film of organic matter; converting the third layer of the organic substance solution into the second layer of the organic substance film after drying and heat treatment of the third layer of the organic substance solution and separating the first and second layers of the organic substance film from the second base; the third procedure comprises forming a nozzle plate having nozzles on a third plate-like base coated with a protective film; coating from a solution of soft polyimidic acid on the nozzle plate during rotation of the third base with the formation of the fourth layer of a solution of organic matter; converting the fourth layer of the organic substance solution into the locking layer of the liquid chamber after drying and heat treatment of the fourth layer of the organic substance solution; etching the locking layer of the liquid chamber with the exposure of the nozzle plate to limit the liquid chambers to the locking layer of the liquid chamber and the nozzle plate and separating the nozzle plate and the locking layer of the liquid chamber from the third base, the first, second and third procedures are preferably performed separately from each other . 9. The method according to claim 8, characterized in that the structural formula of the solution of hard polyimidic acid has the following form:

10. The method according to claim 8, characterized in that the structural formula of the solution of soft polyimidic acid has the following form:

11. The method according to claim 10, characterized in that the soft polyimidic acid solution is made from a composition in which a dianhydride having 3,3,4,4-tetracarboxydiphenyl oxide is added to a mixture of diamine P having 1,3-bis- (4- aminophenoxy) benzene, and amide-like (substance) in a given ratio. 12. The method according to claim 11, characterized in that the structural formula of diamine P has the following form:

13. The method according to claim 11, characterized in that the structural formula of the dianhydride has the following form:

14. The method according to claim 8, characterized in that in the assembly operation of the locking layer of the chamber for heating with the membrane, the pressure is about 0.5 ~ 2 kg / cm ² . 15. The method according to 14, characterized in that during the assembly operation of the locking layer of the chamber for heating with the membrane, the temperature is maintained in the range of 250 ~ 350 ^o C. 16. The method according to claim 8, characterized in that in the operation of combining the nozzle plate with the first plate-like base having a membrane, the nozzle plate is placed on the membrane, the pressure being about 0.5 ~ 2 kg / cm ² . 17. The method according to clause 16, characterized in that in the operation of combining the nozzle plate with the first plate-like base having a membrane, the nozzle plate is placed on the membrane, and the temperature is maintained in the range of 250 ~ 300 ^o C. 18. The method according to p. 8, characterized in that in the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the drying temperature is maintained in the range 80 ~ 100 ^o C.  19. The method according to p. 18, characterized in that in the operation of converting the second layer of the organic substance solution into the first layer of the film of organic matter, the drying of the second layer of the organic substance solution is performed for 15 ~ 20 minutes 20. The method according to p. 8, characterized in that in the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the temperature during heat treatment is maintained in the range of 170 ~ 180 ^o C.  21. The method according to p. 20, characterized in that in the operation of converting the second layer of a solution of organic matter into the first layer of a film of organic matter, the heat treatment time is about 20 ~ 30 minutes 22. The method according to claim 8, characterized in that in the conversion operation of the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the drying temperature is maintained in the range of 80 ~ 100 ^o C.  23. The method according to p. 22, characterized in that in the operation of converting the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the drying time of the fourth layer of the organic substance solution is about 15 ~ 20 minutes. 24. The method according to claim 8, characterized in that during the conversion of the fourth layer of the organic substance solution into the locking layer of the liquid chamber, the temperature during heat treatment is maintained in the range of 170 ~ 180 ^o C.  25. The method according to p. 24, characterized in that the operation of converting the fourth layer of a solution of organic matter into the locking layer of the chamber for liquid heat treatment time is about 20 ~ 30 minutes

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