NL7804035A - ELECTRONIC MICROSKOP. - Google Patents

ELECTRONIC MICROSKOP.

Info

Publication number
NL7804035A
NL7804035A NL7804035A NL7804035A NL7804035A NL 7804035 A NL7804035 A NL 7804035A NL 7804035 A NL7804035 A NL 7804035A NL 7804035 A NL7804035 A NL 7804035A NL 7804035 A NL7804035 A NL 7804035A
Authority
NL
Netherlands
Prior art keywords
microskop
electronic
electronic microskop
Prior art date
Application number
NL7804035A
Other languages
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7804035A priority Critical patent/NL7804035A/en
Priority to GB7912903A priority patent/GB2019083A/en
Priority to DE19792915206 priority patent/DE2915206A1/en
Priority to JP4655379A priority patent/JPS54140454A/en
Priority to FR7909629A priority patent/FR2423859A1/en
Publication of NL7804035A publication Critical patent/NL7804035A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/14Lenses magnetic
    • H01J37/141Electromagnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7804035A 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP. NL7804035A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7804035A NL7804035A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP.
GB7912903A GB2019083A (en) 1978-04-17 1979-04-12 Electron Microscopes
DE19792915206 DE2915206A1 (en) 1978-04-17 1979-04-14 ELECTRON MICROSCOPE
JP4655379A JPS54140454A (en) 1978-04-17 1979-04-16 Electron microscope
FR7909629A FR2423859A1 (en) 1978-04-17 1979-04-17 ELECTRONIC MICROSCOPE IMPROVEMENTS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804035A NL7804035A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP.

Publications (1)

Publication Number Publication Date
NL7804035A true NL7804035A (en) 1979-10-19

Family

ID=19830662

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7804035A NL7804035A (en) 1978-04-17 1978-04-17 ELECTRONIC MICROSKOP.

Country Status (5)

Country Link
JP (1) JPS54140454A (en)
DE (1) DE2915206A1 (en)
FR (1) FR2423859A1 (en)
GB (1) GB2019083A (en)
NL (1) NL7804035A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181447A (en) * 1983-03-31 1984-10-15 Jeol Ltd Shaft slip compensator for electromagnetic lens

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE563662A (en) * 1957-01-03
FR1348368A (en) * 1961-07-10 1964-01-10 Philips Nv Adjustment device for correcting image defects in an electronic optical system
DE1614688C3 (en) * 1967-12-20 1974-10-24 Siemens Ag, 1000 Berlin Und 8000 Muenchen Corpuscular beam device, in particular an electron microscope, with a double condenser arrangement
JPS4929089B1 (en) * 1970-05-13 1974-08-01
DE2221122C3 (en) * 1972-04-28 1979-03-01 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Electron beam anastigmatic magnetic deflection system, method for its operation and application
DE2541915A1 (en) * 1975-09-19 1977-03-31 Max Planck Gesellschaft BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE

Also Published As

Publication number Publication date
FR2423859B1 (en) 1985-05-10
GB2019083A (en) 1979-10-24
FR2423859A1 (en) 1979-11-16
DE2915206A1 (en) 1979-10-25
JPS54140454A (en) 1979-10-31

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BV The patent application has lapsed