MY130149A - Process for smoothing the edge of semiconductor wafers. - Google Patents
Process for smoothing the edge of semiconductor wafers.Info
- Publication number
- MY130149A MY130149A MYPI94001563A MYPI9401563A MY130149A MY 130149 A MY130149 A MY 130149A MY PI94001563 A MYPI94001563 A MY PI94001563A MY PI9401563 A MYPI9401563 A MY PI9401563A MY 130149 A MY130149 A MY 130149A
- Authority
- MY
- Malaysia
- Prior art keywords
- edge
- smoothing
- semiconductor wafers
- semiconductor wafer
- working surface
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000009499 grossing Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 235000012431 wafers Nutrition 0.000 title abstract 2
- 239000010432 diamond Substances 0.000 abstract 1
- 239000004744 fabric Substances 0.000 abstract 1
- 238000005498 polishing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
THE INVENTION RELATES TO A PROCESS FOR SMOOTHING THE EDGE OF SEMICONDUCTOR WAFERS, IF REQUIRED ALSO IN THE NOTCH OF A SEMICONDUCTOR WAFER, IN WHICH A COMPRESSIBLE CLOTH IMPREGNATED WITH DIAMONDS IS PRESSED, AS WORKING SURFACE OF A POLISHING TOOL, WITH A SPECIFIED FORCE AGAINST THE EDGE OF A SEMICONDUCTOR WAFER AND THE SEMICONDUCTOR WAFER AND/OR THE WORKING SURFACE EXECUTE A ROTATIONAL MOVEMENT.(FIG 2)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4325518A DE4325518A1 (en) | 1993-07-29 | 1993-07-29 | Method for smoothing the edge of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
MY130149A true MY130149A (en) | 2007-06-29 |
Family
ID=6494026
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI94001563A MY130149A (en) | 1993-07-29 | 1994-06-16 | Process for smoothing the edge of semiconductor wafers. |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPH0760624A (en) |
KR (1) | KR950004435A (en) |
CN (1) | CN1103511A (en) |
DE (1) | DE4325518A1 (en) |
IT (1) | IT1272345B (en) |
MY (1) | MY130149A (en) |
TW (1) | TW260812B (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11245151A (en) * | 1998-02-27 | 1999-09-14 | Speedfam Co Ltd | Work periphery polishing device |
JP3197253B2 (en) * | 1998-04-13 | 2001-08-13 | 株式会社日平トヤマ | Wafer chamfering method |
JP2000158315A (en) * | 1998-11-27 | 2000-06-13 | Speedfam-Ipec Co Ltd | Notch polishing method of notch polishing device in end surface polishing device |
EP1043120A1 (en) * | 1999-03-31 | 2000-10-11 | Nippei Toyama Corporation | Method and apparatus for grinding a workpiece |
JP3510584B2 (en) * | 2000-11-07 | 2004-03-29 | スピードファム株式会社 | Peripheral polishing device for disk-shaped workpiece |
JP2002329687A (en) * | 2001-05-02 | 2002-11-15 | Speedfam Co Ltd | Apparatus and method of polishing periphery of device wafer |
JP3949941B2 (en) * | 2001-11-26 | 2007-07-25 | 株式会社東芝 | Semiconductor device manufacturing method and polishing apparatus |
JP5112703B2 (en) * | 2007-01-18 | 2013-01-09 | ダイトエレクトロン株式会社 | Wafer chamfering method and apparatus |
DE102009030294B4 (en) | 2009-06-24 | 2013-04-25 | Siltronic Ag | Process for polishing the edge of a semiconductor wafer |
JP2011194561A (en) * | 2010-02-26 | 2011-10-06 | Nakamura Tome Precision Ind Co Ltd | Chamfering device for disk-like workpiece |
CN102642253B (en) * | 2012-05-04 | 2014-12-10 | 上海华力微电子有限公司 | Silicon slice edge cutting method and device of silicon slice edge cutting method |
KR101985219B1 (en) * | 2012-05-07 | 2019-06-03 | 신에쯔 한도타이 가부시키가이샤 | Circumferential polishing device for disc-shaped workpieces |
DE102013210057A1 (en) | 2013-05-29 | 2014-12-04 | Siltronic Ag | Process for polishing the edge of a semiconductor wafer |
CN113182971B (en) * | 2021-05-12 | 2022-11-25 | 四川雅吉芯电子科技有限公司 | High-precision edge grinding device for monocrystalline silicon epitaxial wafer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57184662A (en) * | 1981-05-09 | 1982-11-13 | Hitachi Ltd | Chamfering method and device of wafer |
JPS5958827A (en) * | 1982-09-28 | 1984-04-04 | Toshiba Corp | Semiconductor wafer and method and apparatus for manufacturing semiconductor wafer |
JP2719855B2 (en) * | 1991-05-24 | 1998-02-25 | 信越半導体株式会社 | Mirror chamfering device around wafer |
US5128281A (en) * | 1991-06-05 | 1992-07-07 | Texas Instruments Incorporated | Method for polishing semiconductor wafer edges |
DE4120003A1 (en) * | 1991-06-18 | 1992-12-24 | Mueller Georg Nuernberg | DEVICE AND METHOD FOR EDGE-ROUNDING SEMICONDUCTOR RODS |
US5185965A (en) * | 1991-07-12 | 1993-02-16 | Daito Shoji Co., Ltd. | Method and apparatus for grinding notches of semiconductor wafer |
-
1993
- 1993-07-29 DE DE4325518A patent/DE4325518A1/en not_active Withdrawn
-
1994
- 1994-06-16 MY MYPI94001563A patent/MY130149A/en unknown
- 1994-06-30 CN CN94107806A patent/CN1103511A/en active Pending
- 1994-07-12 TW TW083106329A patent/TW260812B/zh active
- 1994-07-20 KR KR1019940017541A patent/KR950004435A/en not_active Application Discontinuation
- 1994-07-20 JP JP6189009A patent/JPH0760624A/en active Pending
- 1994-07-27 IT ITRM940495A patent/IT1272345B/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
IT1272345B (en) | 1997-06-16 |
CN1103511A (en) | 1995-06-07 |
KR950004435A (en) | 1995-02-18 |
JPH0760624A (en) | 1995-03-07 |
DE4325518A1 (en) | 1995-02-02 |
ITRM940495A1 (en) | 1996-01-27 |
ITRM940495A0 (en) | 1994-07-27 |
TW260812B (en) | 1995-10-21 |
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