KR20240008697A - Manufacturing method of inductor and inductor manufactured by using the same - Google Patents

Abstract

The present invention relates to a method of manufacturing an inductor and an inductor manufactured using the same. It provides a method of manufacturing an inductor that reduces dielectric loss loss and increases inductance, and is manufactured through a method of manufacturing an inductor to meet the needs of miniaturization and low resistance. Provides an inductor that satisfies the requirements.

Description

Inductor manufacturing method and inductor manufactured using the same {MANUFACTURING METHOD OF INDUCTOR AND INDUCTOR MANUFACTURED BY USING THE SAME}

The present invention relates to a method of manufacturing an inductor and an inductor manufactured using the same.

An inductor is a passive component that uses the action of electromagnetism generated by flowing current through a conductor wound around a core. A variety of inductors are being developed, including for high-frequency circuits, general circuits, decoupling circuits, and power circuits. There are variable inductors whose inductance varies, but most are fixed inductors. It is available in lead type and surface mount type in shape, and is structurally classified into wire-wound type, stacked type, and thin film type.

Inductors can be combined with capacitors to form resonance circuits, and can be used in filter circuits to filter specific signals or for impedance matching. Recently, with the development of electronic and communication devices, problems such as environmental and communication failures are occurring. Accordingly, technology is developing in terms of functional complexity, high integration, and high efficiency.

As the miniaturization and high performance of electronic and communication devices accelerate, there is a need to suppress heat generation through miniaturization and low resistance in the parts and devices used. Accordingly, research is needed to miniaturize and reduce the resistance of inductors used in electronic and communication devices.

The wire-wound inductor being developed to date involves forming a coil element by winding a conductor while heat-sealing it to maintain the coiled shape of the wire, then embedding the coil element in a slurry-type magnetic core, and pressing and hardening the magnetic core. It is produced through Thin-film inductors are manufactured through the process of providing a support member, forming a conductive layer on the upper and lower surfaces of the support member, patterning it to form a coil pattern, and forming a magnetic body by laminating a magnetic sheet on top of it, pressing and curing it, and then forming a magnetic body. . A multilayer inductor is manufactured by punching a ceramic sheet using a laser to form a via, stacking several conductor patterns printed with conductive metal on the ceramic sheet to fill the via, and then firing and integrating them.

However, the structure of the inductor manufactured through the above manufacturing process has limitations in meeting the needs for miniaturization and low resistance demanded by the market.

Additionally, there is a conventional technology for manufacturing an inductor by forming a hole in a ceramic, silicon, or glass base material and filling the inside of the hole with metal.

However, since ceramic, silicon, or glass base material is conventionally used as a dielectric, the ceramic, silicon, or glass base material remains without being removed even after the manufacturing of the inductor is completed. For this reason, conventional inductor manufacturing technology has limitations in lowering the loss permittivity or increasing inductance.

Additionally, conventional inductor manufacturing technology uses ceramic, silicon, or glass base materials in various steps of manufacturing the inductor. Accordingly, there is a problem that the quality of the base material deteriorates during the manufacturing process of the inductor.

Korean Patent Publication Publication No. 10-2020-0115286 Korean Patent Publication Registration No. 10-2093558

The present invention was developed to solve the problems of the prior art described above, and its purpose is to provide an inductor that can meet the needs of miniaturization and low resistance by using an anodized metal base material.

In addition, the present invention was developed to solve the problems of the prior art described above, and its purpose is to provide a method of manufacturing an inductor using an anodized metal base material to reduce dielectric loss and increase inductance.

In order to achieve the purpose of the present invention, the method of manufacturing an inductor according to the present invention includes a preparation step of preparing a mold made of metal; forming a plurality of vertical penetrating portions to penetrate the upper and lower surfaces of the mold; anodizing the mold; forming a plurality of vertical connection parts by filling the vertical penetration part with a conductive material; and forming a first horizontal connector formed at the top of the mold to connect the upper surface of the vertical connector, and forming a second horizontal connector formed at the bottom of the mold to connect the lower surface of the vertical connector to form the vertical connector. It includes; forming a plurality of horizontal connectors connecting the vertical connectors at the top of the.

In addition, the mold was formed so that only the coil portion consisting of the connection of the first horizontal connecting portion having an anodic oxide layer on the lower surface, the second horizontal connecting portion having an anodic oxidizing layer on the upper surface, and the vertical connecting portion having an anodic oxide layer on the outer peripheral surface remained. It includes a removing step.

Additionally, the mold is a metal that can be anodized.

In addition, it includes the step of molding the entire coil portion with an embedded material to form a body in which the coil portion is provided in an embedded form.

Meanwhile, the inductor according to the present invention includes a plurality of vertical connectors and a plurality of horizontal connectors including a first horizontal connector connecting the plurality of vertical connectors at the top and a second horizontal connector connecting the vertical connectors at the bottom. A coil unit that does; A terminal unit including a first terminal connected to one end of the coil unit and a second terminal connected to the other end of the coil unit; and an anodized film portion surrounding the outer peripheral surface of the vertical connection portion.

Additionally, an anodic oxide film portion is provided on the lower surface of the first horizontal connecting portion and the upper surface of the second horizontal connecting portion.

Additionally, it includes a space portion, and at least a portion of the space portion is provided inside the coil portion.

Additionally, it includes a body in which the coil portion is embedded.

In addition, the body is made of silicon dioxide (SiO2), COP (Cyclic Clefin Polymer), fluorinated silicon oxide (SiOF), polyimides, Parylene, Fluorinated Parylene, and Benzocyclobutene. It is made of either Benzocyclobutene or Teflon.

Additionally, the body is made of a magnetic material containing ferrite.

According to the inductor manufacturing method of the present invention as described above and the inductor manufactured using the same, the following effects are achieved.

The method of manufacturing an inductor of the present invention completely removes the metal mold used to form the coil portion, and provides a body composed of a material with a low dielectric constant or an embedded material with a high permeability characteristic, and an anodic oxide film is provided. An inductor is manufactured in which the coil part including the part is buried inside the body. The inductor manufacturing method of the present invention manufactures a coil part that has the function of insulating between the vertical connection part and the embedded material, and completely removes the metal mold used as a base material for manufacturing the coil part.

The inductor of the present invention has a structure that is provided only on the outside of the coil unit, or has a body of newly formed embedded material on the outside of the coil unit and the inside of the coil unit. Accordingly, by using a base material made of ceramic, silicon, or glass as a dielectric, the loss of dielectric constant can be reduced or high inductance can be guaranteed compared to a structure in which the base material is left as it is without removing it.

1 is a perspective view of an inductor according to a preferred embodiment of the present invention.
Figure 2 is a perspective view of a coil portion according to a preferred embodiment of the present invention.
3(a) to 16 illustrate a process for manufacturing an inductor according to a preferred embodiment of the present invention according to a method for manufacturing an inductor according to a preferred embodiment of the present invention.
17 is a top view of the package substrate.
Figure 18 is an enlarged view of one mounting area among a plurality of mounting areas.

The following merely illustrates the principles of the invention. Therefore, those skilled in the art will be able to invent various devices that embody the principles of the invention and are included in the concept and scope of the invention, although not clearly described or shown herein. In addition, all conditional terms and embodiments listed in this specification are, in principle, expressly intended only for the purpose of ensuring that the inventive concept is understood, and should be understood as not limiting to the embodiments and conditions specifically listed as such. .

The above-mentioned purpose, features and advantages will become clearer through the following detailed description in relation to the attached drawings, and accordingly, those skilled in the art in the technical field to which the invention pertains will be able to easily implement the technical idea of the invention. .

Embodiments described herein will be explained with reference to cross-sectional views and/or perspective views, which are ideal illustrations of the present invention. The thicknesses of films and regions shown in these drawings are exaggerated for effective explanation of technical content. The form of the illustration may be modified depending on manufacturing technology and/or tolerance. In addition, the number of molded products shown in the drawings is illustrative and only a portion is shown in the drawings. Accordingly, embodiments of the present invention are not limited to the specific form shown, but also include changes in form produced according to the manufacturing process.

In describing various embodiments, components that perform the same function will be given the same names and same reference numbers for convenience even if the embodiments are different. In addition, the configuration and operation already described in other embodiments will be omitted for convenience.

Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

Figure 1 is a perspective view of an inductor (hereinafter referred to as 'inductor 1 of the present invention') according to a preferred embodiment of the present invention, and Figure 2 is a perspective view of a coil portion according to a preferred embodiment of the present invention.

Referring to FIGS. 1 and 2, the inductor 1 of the present invention includes a plurality of vertical connectors 20 including a front vertical connector 21 and a rear vertical connector 22 and an upper portion of the vertical connector 20. A plurality of vertical connection parts 20, including a first horizontal connection part 31 connecting the vertical connection parts 20 and a second horizontal connection part 32 connecting the vertical connection parts 20 at the lower part of the vertical connection part 20. A coil portion 10 including a plurality of horizontal connection portions 30 for connecting, and a terminal portion including a first terminal 51 connected to one end of the coil portion 10 and a second terminal 52 connected to the other end. (50) and an anodized film portion 60 surrounding the outer peripheral surface of the vertical connecting portion 20.

The coil unit 10 includes a plurality of vertical connection parts 20 arranged to be spaced apart from each other, a plurality of horizontal connection parts 30 above and below the plurality of vertical connection parts 20, and a plurality of vertical connection parts 20 and horizontal connection parts 20. The connection portion 30 has a form of being integrally connected.

Specifically, the plurality of vertical connecting portions 20 include a plurality of front vertical connecting portions 21 arranged to be spaced apart from each other in the column direction on the front side of FIGS. 1 and 2, and a plurality of front vertical connecting portions 21 disposed from each other in the column direction on the rear side of FIGS. 1 and 2. It includes a plurality of rear vertical connection parts 22 that are spaced apart and are located rearward than the front vertical connection part 21.

Referring to FIGS. 1 and 2, the front vertical connecting portions 21 are arranged at regular intervals in the column direction on the front side. In addition, the rear vertical connection portion 22 is arranged to be spaced apart at a certain interval in the column direction on the rear side.

The front vertical connection portion 21 and the rear vertical connection portion 22 are arranged alternately in the column direction when viewed from the front side of FIGS. 1 and 2. Accordingly, when the front vertical connection portion 21 is projected toward the rear vertical connection portion 22, the front vertical connection portion 21 is located between the rear vertical connection portions 22.

The inductor 1 of the present invention is provided with an anodized film portion 60 on the outer peripheral surface of the plurality of vertical connecting portions 20. The anodized film portion 60 is provided in each of the plurality of vertical connecting portions 20 and is provided in a form that surrounds the outer peripheral surface of the vertical connecting portion 20. The anodized film portion 60 is provided on the outer surface of the vertical connection portion 20 in the front, rear, left, and right directions in FIG. 1.

Additionally, the anodic oxide film portion 60 is provided on the lower surface of the first horizontal connecting portion 31 and the upper surface of the second horizontal connecting portion 32.

의 열팽창 계수를 갖는다. 이로 인해 고온의 환경에 노출될 경우, 온도에 의한 열변형이 적다. 이에 따라 수직 연결부(20)의 열변형이 최소화될 수 있다. 수직 연결부(20)는 수직 연결부(20)의 상, 하부에 구비되는 수평 연결부(30)를 지지하는 기능을 한다. 본 발명의 인덕터(1)는 이러한 수직 연결부(20)의 외주면에 양극산화막부(60)를 구비함으로써 코일부(10)가 손상되어 인덕턴스가 변화되는 것을 방지할 수 있다.The anodic oxide film portion 60 is made of an anodic oxide film material. Anodic oxide film is 2~3ppm/

It has a thermal expansion coefficient of . For this reason, when exposed to a high temperature environment, thermal deformation due to temperature is small. Accordingly, thermal deformation of the vertical connection portion 20 can be minimized. The vertical connecting portion 20 functions to support the horizontal connecting portion 30 provided at the upper and lower portions of the vertical connecting portion 20. The inductor 1 of the present invention has an anodized film portion 60 on the outer peripheral surface of the vertical connection portion 20, thereby preventing damage to the coil portion 10 and a change in inductance.

Additionally, the anodized film portion 60 includes pores formed during anodization of the anodized film. Accordingly, an anodized film portion 60 including hollow pores is provided on the outer peripheral surface of the vertical connecting portion 20. The anodized film portion 60 serves to insulate the vertical connection portion 20 from a low-dielectric constant material or high permeability material provided inside the coil portion 10 through the pores.

The plurality of horizontal connection parts 30 includes a plurality of first horizontal connection parts 31 provided at the upper part of the front vertical connection part 21, and a plurality of second horizontal connection parts 32 provided at the lower part of the front vertical connection part 21. Includes.

The first horizontal connecting portion 31 is connected to the upper surface of the front vertical connecting portion 21 at one end, and the other end is connected to the upper surface of the rear vertical connecting portion 22 of the front and rear vertical connecting portions 21 and 22. It is provided at the top.

The first horizontal connecting portion 31 connects one of the plurality of front vertical connecting portions 21 and the rear vertical connecting portion 22 located at the rear at the shortest distance from any one of the plurality of front vertical connecting portions 21.

The first horizontal connection portion 31 is connected to the front vertical connection portion 21 through one end and to the rear vertical connection portion 22 through the other end. The first horizontal connecting portion 31 has an anodic oxide film portion 60 on the lower surface of the middle portion excluding one end and the other end.

The first horizontal connecting portion 31 is provided as a diagonal line with an upward slope to the right in FIGS. 1 and 2. This is implemented by having the front vertical connection portion 21 and the rear vertical connection portion 22 arranged alternately in the column direction. The plurality of first horizontal connecting portions 31 have the same inclination angle.

The second horizontal connecting portion 32 is connected to the upper surface of the front and rear vertical connecting portions 21 and 22 with one end connected to the upper surface of the rear vertical connecting portion 22 and the other end connected to the upper surface of the front vertical connecting portion 21. It is provided in

The second horizontal connector 32 connects one of the plurality of rear vertical connectors 22 to the front vertical connector 21 located in the front at the shortest distance from any one of the plurality of rear vertical connectors 22.

The second horizontal connection portion 32 is connected to the front vertical connection portion 21 through one end and to the rear vertical connection portion 22 through the other end. The second horizontal connecting portion 32 has an anodized film portion 60 on the upper surface of the middle portion excluding one end and the other end.

In FIGS. 1 and 2, the second horizontal connecting portion 32 is provided as a diagonal line with an upward-left inclination. This is implemented by having the rear vertical connection portion 22 and the front vertical connection portion 21 arranged alternately in the column direction.

If you draw an imaginary line connecting the two adjacent front vertical connectors 21 and the rear vertical connector 22 located between them when projected toward the rear vertical connector 22, , the imaginary line becomes the hypotenuse of an isosceles triangle. Through this, it is possible to obtain a more stable inductance by minimizing the difference between the direction of the magnetic flux generated by the second horizontal connector 32 and the direction of the magnetic flux generated by the first horizontal connector 31.

Additionally, the first horizontal connecting portion 31 and the second horizontal connecting portion 32 are provided in diagonal shapes that are opposite to each other with respect to the left and right directions. At this time, the lengths of the first horizontal connection part 31 and the second horizontal connection part 32 are the same. As a result, the time for the current to flow through the first horizontal connection part 31 and the time for the current to flow through the second horizontal connection part 32 are the same, thereby obtaining a stable inductance.

The horizontal connector 30 includes a terminal connector 40 including a first terminal connector 41 connected to one of the plurality of horizontal connectors 30 and a second terminal connector 42 connected to the other one. do.

Specifically, the first terminal connection part 41 is connected to the horizontal connection part 30 located at the leftmost end among the plurality of first horizontal connection parts 31 relative to the left and right directions in FIGS. 1 and 2. .

In other words, the first terminal connection part 41 is connected to the first horizontal connection part 31 located outermost in the left direction based on the left and right directions.

The first terminal connection part 41 is provided at the front end of the horizontal connection part 30 located at the most left end and is provided in a form that protrudes in the left (outward) direction. Because of this, the first terminal connection portion 41 forms one end of the coil portion 10.

The second terminal connection part 42 is connected to the horizontal connection part 30 located at the other end in the right direction among the plurality of first horizontal connection parts 31 in the left and right directions in FIGS. 1 and 2.

In other words, the second terminal connection part 42 is connected to the first horizontal connection part 31 located outermost in the right direction based on the left and right directions.

The second terminal connection part 42 is provided at one end of the rear side of the horizontal connection part 30, which is located at the most end to the right, and is provided in a form that protrudes in the right (outward) direction. Because of this, the second terminal connection portion 42 forms the other end of the coil portion 10.

Referring to FIG. 2, the coil unit 10 according to a preferred embodiment of the present invention has a first horizontal connection part 31 and a second horizontal connection part 32, a front vertical connection part 21 and a rear vertical connection part 22. It has a shape that is wound as a whole while being connected through.

The plurality of vertical connecting portions 20, the plurality of horizontal connecting portions 30, and the terminal connecting portion 40 preferably all have the same cross-sectional area.

Specifically, referring to Figure 2, the coil unit 10 according to a preferred embodiment of the present invention has a first horizontal connection part 31 and a second horizontal connection part 32, a front vertical connection part 21 and a rear vertical connection part ( 22) and has an overall wound shape.

At this time, when the plurality of vertical connecting portions 20, the plurality of horizontal connecting portions 30, and the terminal connecting portion 40 all have the same cross-sectional area, the bottleneck section is prevented from occurring due to the difference in cross-sectional area of the coil portion 10. can do. As a result, a smooth flow of electricity is formed throughout the coil unit 10, thereby ensuring high inductance of the inductor 1 of the present invention.

The plurality of vertical connection parts 20, the plurality of horizontal connection parts 30, and the terminal connection part 40 may have a square cross-section, a square cross-section, and a circular cross-section.

The first terminal 51 is connected to the coil unit 10 through a first terminal connection part 41 provided at one end of the coil unit 10. The first terminal 51 is connected to the first terminal connection portion 41 through the inner side (right side in FIGS. 1 and 2). More specifically, the inner surface (right side in FIGS. 1 and 2) of the first terminal 51 and the outer surface (left side in FIGS. 1 and 2) of the first terminal connection portion 41 are contacted to form a coil portion ( 10) and the first terminal 51 are electrically connected.

The second terminal 52 is connected to the coil unit 10 through the second terminal connection part 42 provided at the other end of the coil unit 10. The second terminal 52 is connected to the second terminal connection portion 42 through the inner side (left side in FIGS. 1 and 2). More specifically, the inner surface (left side in FIGS. 1 and 2) of the second terminal 52 and the outer side (right side in FIGS. 1 and 2) of the second terminal connection portion 42 are in contact with each other to form the coil portion (10). ) and the second terminal 52 are electrically connected.

The inductor 1 of the present invention has the first and second terminals 51 and 52 exposed to the outside. Accordingly, the inductor 1 of the present invention can be easily electrically connected to a substrate, etc. through the first and second terminals 51 and 52.

The inductor 1 of the present invention includes a body 70 in which the coil portion 10 is embedded. In this case, the body 70 is wrapped around the outside of the coil unit 10 and fills the empty space provided inside the coil unit 10 according to the winding shape of the coil unit 10. Accordingly, when the inductor 1 of the present invention is provided with a body 70, it is provided with a structure in which the coil portion 10 is buried inside the body 70.

The body 70 is made of silicon dioxide (SiO ₂ ), COP (Cyclic Clefin Polymer), fluorinated silicon oxide (SiOF), polyimides, Parylene, Fluorinated Parylene, and Benzocyclo. It may be made of a material with a low dielectric constant such as benzocyclobutene or Teflon. In this case, the body 70 has a low dielectric constant characteristic. When the inductor 1 of the present invention is provided with a body 70 having a low dielectric constant, the loss of dielectric constant is relatively low and has a high quality coefficient value at a higher frequency. The inductor 1 of the present invention can function as an inductor 1 including a dielectric with a high quality factor value by providing a body 70 with a low dielectric constant.

Alternatively, the body 70 may be made of a material having the high magnetic permeability characteristics of a magnetic material containing ferrite. In this case, the body 70 includes Mn-Zn-based ferrite, Ni-Zn-based ferrite, Ni-Zn-Cu-based ferrite, Mn-Mg-based ferrite, Ba-based ferrite, or Li-based ferrite. In this case, the body 70 has characteristics of high permeability.

When the inductor 1 of the present invention is provided with a body 70 having high permeability characteristics, it has a structure in which a low dielectric constant material with high permeability is provided in the empty space inside the coil portion 10. Accordingly, the inductor 1 of the present invention can have high inductance.

When the inductor 1 of the present invention is provided with a structure including a body 70, the material constituting the body 70 is made of a material with a low dielectric constant, so that the inductor 1 has a high quality factor at high frequencies. ) can function as.

On the other hand, when the inductor 1 of the present invention is provided with a structure including a body 70, the material constituting the body 70 is made of a material with high permeability characteristics to form an inductor with high capacitance and high inductance ( 1) It can also function as.

When the inductor 1 of the present invention includes a body 70, it has a first terminal 51 on one side of the body 70 (left side in FIGS. 1 and 2) and a first terminal 51 on the other side of the body 70 (FIGS. 1 and 2). A second terminal 52 is provided on the right side in 1 and 2.

More specifically, the first terminal 51 surrounds a portion of the left end portion of the entire upper surface of the body 70 on the left side of the body 70 . In addition, the first terminal 51 surrounds a part of the left end of the upper surface and a part of the entire area of the lower surface of the body 70 that corresponds to the left end of the upper and lower surfaces. The first terminal 51 is located on one side of the body 70 (left side in FIGS. 1 and 2) between a portion surrounding a portion of the upper surface of the body 70 and a portion surrounding a portion of the lower surface of the body 70. It is provided with a middle part that surrounds the. Accordingly, the left side of the body 70 is surrounded by the middle portion of the first terminal 51.

In other words, the first terminal 51 is provided in a form that surrounds a portion of one end (left end) of the upper and lower surfaces of the body 70 and the left side of the body 70.

The second terminal 52 is provided in a symmetrical shape with the first terminal 51 based on the vertical center line of the body 70. Specifically, the second terminal 52 surrounds a portion of the entire upper surface of the body 70 on the right side of the body 70 located at one end of the right side. In addition, the first terminal 51 surrounds a portion of the right end of the upper surface and a portion of the entire area of the lower surface of the body 70 corresponding to the upper and lower directions. The second terminal 52 is located on the other side of the body 70 (right side in FIGS. 1 and 2) between a portion surrounding a portion of the upper surface of the body 70 and a portion surrounding a portion of the lower surface of the body 70. It is provided with a middle part that surrounds it. Accordingly, the right side of the body 70 is surrounded by the middle portion of the first terminal 51.

In other words, the second terminal 52 is provided in a form that surrounds a portion of the other end (right end) of the upper and lower surfaces of the body 70 and the right side of the body 70.

Before providing the first and second terminals 51 and 52, respectively, on one side (left) and the other side (right) of the body 70, the coil portion 10 embedded inside the body 70 has one side and the other side. The cross section is exposed to the outside.

Specifically, the coil unit 10 has one end of the coil unit 10 embedded in the inside of the body 70 in a structure before the first and second terminals 51 and 52 surround the body 70. One side of the first terminal connection part 41 (left side in FIGS. 1 and 2) and one side of the second terminal connection part 42 (right side in FIGS. 1 and 2) forming the other end of the coil unit 10. exposed to the outside. Accordingly, the body 70 has a shape in which the area corresponding to one side (left side) of the first terminal connection part 41 has been removed, and the area corresponding to one side (right side) of the second terminal connection part 42 has been removed. It is a form.

At this time, the first terminal 51 is provided on one side (left side) of the body 70 and comes into contact with the first terminal connection portion 41 through the middle portion surrounding the left side of the body 70. Additionally, the second terminal 52 is provided on the other side (right side) of the body 70 and comes into contact with the second terminal connection portion 42 through the middle portion surrounding the right side of the body 70. Accordingly, the first and second terminals 51 and 52 and the coil unit 10 are electrically connected.

The inductor 1 of the present invention includes a space portion 80.

The inductor 1 of the present invention has a structure in which the first and second terminals 51 and 52 are connected to one end and the other end of the coil unit 10, and is installed on the outside of the coil unit 10 and on the outside of the coil unit 10. It is provided with a space portion (80). Accordingly, at least a portion of the space portion 80 is provided surrounding the outside of the coil portion 10, and the remaining portion is provided on the inside (inside) of the coil portion 10. In this case, the inductor 1 of the present invention preferably has a structure that does not include the body 70.

The inductor 1 of the present invention has a space 80 on the outside of the coil unit 10 and on the inside (inside) of the coil unit 10, so that There is a gas (preferably air) inside. Air has the characteristic of low dielectric constant. Therefore, the inductor 1 of the present invention can function as an inductor 1 including a dielectric with a high quality coefficient value by allowing air to exist inside the coil portion 10 in a structure including a space portion 80. You can.

Meanwhile, the inductor 1 of the present invention may be provided with a structure including a body 70 and a space 80. In this case, the space portion 80 is provided only inside the coil portion 10.

More specifically, the inductor 1 of the present invention has a body 70 to surround the outside of the coil unit 10, and a body 70 is inside the coil unit 10 in a state embedded in the body 70. ), the space 80 is provided as the material constituting the space does not exist. Air exists in the space portion 80. In this structure, the body 70 is preferably made of a material having the above-described low dielectric constant characteristics.

The inductor 1 of the present invention preferably has a body 70 having low dielectric constant characteristics outside the coil portion 10, and low dielectric constant air flows through the space portion 80 to the coil portion ( 10), it can function as an inductor 1 including a dielectric with a high quality coefficient value.

Hereinafter, a method of manufacturing the inductor 1 according to a preferred embodiment of the present invention will be described with reference to FIGS. 3(a) to 14.

3(a) to 14 are diagrams showing a process for manufacturing the inductor 1 of the present invention according to the manufacturing method of the inductor 1 according to a preferred embodiment of the present invention.

Hereinafter, plan views of FIGS. 3(a), 4(a), 5(a), 6(a), 7(a), 8(a), 9(a), and 10(a) are shown in plan view. a), Figure 11(a), Figure 12(a), Figure 13(a) and Figure 14, the upper direction is the rear of the inductor 1 of the present invention, and the lower direction is the front of the inductor 1 of the present invention. am.

FIG. 3(a) is a plan view of a metal mold (MD), and FIG. 3(b) is a cross-sectional view taken along line A-A' of FIG. 3(a).

As shown in FIGS. 3(a) and 3(b), first, the manufacturing method of the inductor 1 of the present invention includes preparing a mold (MD) made of metal. The metal material constituting the mold (MD) is made of a material that can be anodized. Specifically, the metal materials are aluminum (Al), tantalum (Ta), niobium (Nb), titanium (Ti), zirconium (Zr), hydrogen fluoride (Hr), zinc (Zn), tungsten (W), and anti-oxidant. Includes mony (Sb) and their alloys.

Then, a step of forming the vertical penetration portion 110 in the metal mold MD is performed.

FIG. 4(a) is a plan view of the mold MD in which a plurality of vertical penetrating portions 110 are formed, and FIG. 4(b) is a cross-sectional view taken along line A-A' of FIG. 4(a). .

As shown in FIG. 4(b), the vertical penetrating portion 110 is formed to penetrate the upper and lower surfaces of the mold MD. A plurality of vertical penetrating portions 110 are provided at a spaced apart distance from each other.

Referring to FIG. 4(a), a plurality of vertical penetrating portions 110 are provided at a distance apart in the column direction from the upper direction. In addition, a plurality of vertical penetrating portions 110 are provided at a distance apart in the column direction from the lower direction.

The plurality of vertical penetrating parts 110 provided in the upper direction and the plurality of vertical penetrating parts 110 provided in the lower direction are formed by shifting the positions of their central axes in the row direction rather than making them the same.

Specifically, among the plurality of vertical penetrating parts 110 provided in the upper direction, the vertical penetrating part 110 located on the leftmost side in Figure 4 (a) is referred to as the rear vertical penetrating part 111 in the first row and first column. , Among the plurality of vertical penetrating parts 110 provided in the lower direction, the vertical penetrating part 110 located on the leftmost side in FIG. 4(a) is referred to as the front vertical penetrating part 112 in the second row and first column.

When projecting the rear vertical penetrating part 111 in the first row and first row toward the front vertical penetrating part 112 in the second row and first row, the central axis of the rear vertical penetrating part 111 in the first row and first row is: The central axes of the front vertical penetrating portions 112 in the second row and first row are not located at the same location but are spaced apart in the column direction.

In other words, the central axes of the plurality of vertical penetrating parts 110 provided in the upper direction are not located at the same position with respect to the row direction as the plurality of vertical penetrating parts 110 provided in the lower direction, but are positioned offset from each other. formed to do so.

Accordingly, the plurality of vertical penetrating parts 110 provided in the upper direction and the plurality of vertical penetrating parts 110 provided in the lower direction alternate when projected in opposite directions based on the upper and lower directions. It is located as

More specifically, when the plurality of vertical penetrating parts 110 provided in the upper direction are projected toward the plurality of vertical penetrating parts 110 provided in the lower direction, the plurality of vertical penetrating parts 110 provided in the upper direction are , each is located at a distance between the plurality of vertical penetrating parts 110 provided in the lower direction.

Conversely, when the plurality of vertical penetrating parts 110 provided in the lower direction are projected toward the plurality of vertical penetrating parts 110 provided in the upper direction, the plurality of vertical penetrating parts 110 provided in the lower direction are each It is located at a distance between the plurality of vertical penetrating parts 110 provided in each direction.

The manufacturing method of the inductor 1 of the present invention is to form a plurality of vertical penetrating portions 110 alternately arranged in the column direction, thereby filling the vertical penetrating portions 110 with a conductive material 100. A plurality of vertical connection parts 20 may be arranged alternately in the column direction.

As shown in FIG. 4(a), the vertical penetrating portion 110 may have a square cross-sectional shape or a circular cross-sectional shape. The cross-sectional shape of the vertical penetrating portion 110 is not limited to this. The vertical penetration portion 110 is formed by tool processing, laser processing, and punching methods.

Then, a step of anodizing the mold MD in which the vertical penetration portion 110 is formed is performed.

FIG. 5(a) is a plan view of an anodized mold (MD), and FIG. 5(b) is a view cut along line A-A' of FIG. 5(a).

Referring to Figures 5 (a) and (b), as the mold (MD) is anodized, an anodized film portion 60 is formed on the surface (top, bottom, and left and right outer surfaces) of the mold (MD). do. At this time, the mold MD is provided with a vertical penetrating portion 110. Accordingly, referring to FIG. 5(b), the anodized film portion 60 is also formed on the inner surface of the vertical penetrating portion 110.

Then, a step of filling the vertical penetration portion 110 with a conductive material to form a plurality of vertical connection portions 20 is performed.

FIG. 6(a) is a top view of a state in which a plurality of vertical penetrating portions 110 are filled with the conductive material 100, and FIG. 6(b) shows a mold (MD) filled with the conductive material 100 as a seed layer ( This is a diagram showing the state provided on SD) as a plane cut along A-A' in FIG. 6(a).

As shown in FIGS. 6(a) and 6(b), the plurality of vertical penetrating portions 110 are filled with the conductive material 100. The conductive material 100 is preferably made of a metal with high electrical conductivity. The conductive material 100 is silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni), titanium (Ti), gold (Au), copper (Cu), platinum (Pt), or an alloy thereof. Includes.

The conductive material 100 is filled into the vertical penetrating portion 110 using a plating method, a press-fitting method, etc.

As the vertical penetration portion 110 is filled with the conductive material 100, a plurality of vertical connection portions 20 are formed in the mold MD. The vertical connection portion 20 is formed of a conductive material 100 and is made of silver (Ag), palladium (Pd), aluminum (Al), nickel (Ni), titanium (Ti), gold (Au), and copper (Cu). , platinum (Pt), or alloys thereof.

At this time, the inner wall, which is the inner surface of the vertical penetrating portion 110, is in a state in which the anodized film portion 60 is formed. Accordingly, the conductive material 100 is filled into the anodized film portion 60 to form the vertical connection portion 20 within the vertical penetration portion 110. In the process of forming the vertical connecting portion 20 inside the vertical penetrating portion 110, the inner wall of the vertical penetrating portion 110 is insulated by the anodic oxide film portion 60 provided on the inner wall.

The conductive material 100 is filled by growing from a downward direction close to the seed layer SD to an upward direction away from the seed layer SD based on the upper and lower directions of FIG. 6(b). Accordingly, the vertical connection portion 20 is formed in a dense structure.

The method of manufacturing the inductor 1 of the present invention is to form the rear vertical connection portion 22 by filling the vertical penetration portion 110 provided in the upper direction of Figure 5(a) with a conductive material 100, and forming the rear vertical connection portion 22 in the downward direction. The vertical penetration portion 110 provided in is filled with a conductive material 100 to form the front vertical connection portion 21.

Referring to FIG. 6(b), the manufacturing method of the inductor 1 of the present invention includes forming a plurality of vertical penetrating portions 110 with a conductive material ( 100) is filled to provide a mold (MD) with a vertical connection portion 20 on the seed layer (SD).

Then, a step of forming a patternable material (PR) is performed on one surface (upper surface) of the mold (MD).

FIG. 7(a) is a plan view of a mold (MD) in which a patternable material (preferably photoresist, PR) is formed on one side (top surface), and FIG. 7(b) is a plan view of a mold (MD) formed along the line A-A' of FIG. 7(a). This is a diagram showing a surface cut along .

Referring to FIGS. 7(a) and 7(b) , a patternable material PR is formed on one surface (upper surface) of the mold MD having a plurality of vertical connecting portions 20.

Then, a step of forming a patterning region 90 in the patternable material PR is performed.

FIG. 8(a) is a plan view of a state in which the first patterning area 91 is formed by patterning the patternable material (PR), and FIG. 8(b) is a plan view cut along A-A' in FIG. 8(a). It is a diagram showing the sides.

Referring to FIG. 8(a), the method of manufacturing the inductor 1 of the present invention forms a patterning area 90 through a photoresist process, and forms one surface of the plurality of vertical connection portions 20 through the patterning area 90. (top surface) is exposed.

The patterning area 90 includes a first patterning area 91 formed on the upper part of the vertical connecting part 20 and a second patterning area 92 formed on the lower part of the vertical connecting part 20.

The first patterning area 91 is formed continuously on the front vertical connection portion 21 and the upper portion of the corresponding rear vertical connection portion 22 at the shortest distance from the front vertical connection portion 21, as shown in FIG. 8(a). It is formed continuously in the longitudinal direction based on the upper and lower directions.

Due to this, one surface (upper surface) of the front vertical connector 21, one surface (upper surface) of the rear vertical connector 22 corresponding to the shortest distance from the front vertical connector 21, and the separation distance provided between them At least a portion of one surface (upper surface) of the mold MD is exposed to the outside through the first patterning area 91. The first patterning area 91 is formed in the form of a continuous diagonal line connecting the front vertical connection portion 21 and the corresponding rear vertical connection portion 22 at the shortest distance from the front vertical connection portion 21.

A plurality of first patterning areas 91 are formed on each front vertical connection portion 21 and the upper portion of the corresponding rear vertical connection portion 22 at the shortest distance from the front vertical connection portion 21.

Then, the step of forming the horizontal connector 30 connecting the vertical connector 20 is performed.

Forming the horizontal connecting portion 30 includes forming a first horizontal connecting portion 31 formed at the top of the mold MD and connecting the upper surface of the vertical connecting portion 20, and forming the first horizontal connecting portion 31 at the lower part of the mold MD. and forming a second horizontal connection part 32 connecting the lower surface of the vertical connection part 20.

In the step of forming the horizontal connection portion 30, a step of forming the first horizontal connection portion 31 is performed by filling the first patterning area 91 with a conductive material 100.

FIG. 9(a) shows a state in which the first patterning area 91 is filled with the conductive material 100, and FIG. 9(b) is a plane cut along A-A' of FIG. 9(b). This is a diagram showing .

The conductive material 100 filled in the first patterning area 91 is the same as the conductive material 100 constituting the vertical connection portion 20. Additionally, the method of filling the first patterning area 91 with the conductive material 100 may be a pressing method or a sputtering method.

By filling the first patterning area 91 with the conductive material 100, the formation of the first horizontal connection part 31 on the upper part of the front vertical connection part 21 and the rear vertical connection part 22 is completed.

As the first horizontal connecting portion 31 is formed in the first patterning area 91, one end is connected by contacting the upper surface of the front vertical connecting portion 21, and the other end is connected by contacting the upper surface of the rear vertical connecting portion 22. do. Through this, the first horizontal connector 31 integrally connects the front vertical connector 21 and the rear vertical connector 22, and the first horizontal connector 31, the front vertical connector 21, and the rear vertical connector 22 ) is implemented.

The manufacturing method of the inductor 1 of the present invention involves forming the first horizontal connection portion 31 and then forming the first terminal connection portion 41 and the second terminal connection portion 42.

The process of forming the first and second terminal connectors 41 and 42 may be performed simultaneously with the formation of the first horizontal connector 31 in the step of forming the first horizontal connector 31. ) can also be achieved after forming.

The first terminal connection part 41 is one end of the side connected to the front vertical connection part 21 of the first patterning area 91 provided on the leftmost side among the plurality of first patterning areas 91 in FIG. 8(a). It is formed through an extended area on one side of the part extending in the outward (left) direction. In Figure 8(a), one side of the extended area is omitted.

In the method of manufacturing the inductor 1 of the present invention, one extension area is also filled with the conductive material 100 in the same manner as the method of filling the first patterning region 91 with the conductive material 100. Through this, the first terminal connection part 41 is formed, which is integrally connected with the first horizontal connection part 31. The first horizontal connecting portion 31 connected to the first terminal connecting portion 41 is located at the most extreme end (leftmost relative to the left and right directions of FIG. 8(a)) among the plurality of first horizontal connecting portions 31. It is a first horizontal connection portion 31 formed through the first patterning area 91. The first terminal connection part 41 is connected to one end of the first horizontal connection part 31 on the side connected to the front vertical connection part 21.

The second terminal connection portion 42 is connected to the rear vertical connection portion 22 of the first patterning region 91 provided on the rightmost side among the plurality of first patterning regions 91 in FIG. 8(a). It is formed through the other extension area extending the end in the outward (right) direction. In Figure 8(a), the other extension area is omitted.

In the method of manufacturing the inductor 1 of the present invention, the other extension region is filled with the conductive material 100 in the same manner as the method of filling the first patterning region 91 with the conductive material 100. Through this, the second terminal connection part 42 is formed, which is integrally connected to the first horizontal connection part 31. The first horizontal connecting portion 31 connected to the second terminal connecting portion 42 is located at the most extreme end (leftmost relative to the left and right directions of FIG. 8(a)) among the plurality of first horizontal connecting portions 31. It is a first horizontal connection portion 31 formed through the first patterning area 91. The second terminal connection part 42 is connected to one end of the first horizontal connection part 31 on the side that becomes the rear vertical connection part 22.

The manufacturing method of the inductor 1 of the present invention includes forming a second patterning area 92 on the other surface (lower surface) of the mold MD having the vertical connecting portion 20.

FIG. 10(a) is a plan view of the mold MD in which the patternable material PR is formed on the other side (lower surface) and the second patterning region 92 is formed, and FIG. 10(b) is A of FIG. 10(a). This is a diagram showing a surface cut along -A'.

The step of forming the second patterning region 92 may be performed before forming the first patterning region 91, or may be performed after forming the first patterning region 91. Additionally, it may be performed before or after forming the first horizontal connection portion 31 in the first patterning area 91.

Referring to FIG. 10(a), the manufacturing method of the inductor 1 of the present invention includes providing a patterning material (PR) on the other side (lower surface) of the mold (MD) and then forming a second patterning region 92. Carry out the steps.

The second patterning area 92 is formed continuously at the lower part of the front vertical connection portion 21 and the corresponding rear vertical connection portion 22 at the shortest distance from the front vertical connection portion 21, as shown in FIG. 10(a). It is formed continuously in the longitudinal direction based on the upper and lower directions.

Due to this, the other surface (lower surface) of the front vertical connector 21 and the other surface (lower surface) of the rear vertical connector 22, which is at the shortest distance from the front vertical connector 21, and the separation distance provided between them. At least a portion of the other surface (lower surface) of the mold MD is exposed to the outside through the second patterning area 92. The second patterning area 92 is formed in the form of a continuous diagonal line connecting the front vertical connection portion 21 and the corresponding rear vertical connection portion 22 at the shortest distance from the front vertical connection portion 21.

The diagonal inclination directions of the second patterning area 92 and the first patterning area 91 are opposite to each other. As an example, with reference to FIG. 8(a), if the first patterning area 91 has a diagonal shape that slopes to the right from the top to the bottom in FIG. 8(a), with reference to FIG. 10(a) The second patterning area 92 may have a diagonal shape that slopes to the left from upward to downward. As a result, a first horizontal connection 31 formed by filling the first patterning area 91 with the conductive material 100 and a second horizontal connection formed by filling the second patterning area 92 with the conductive material 100 ( 32) has a diagonal shape, but the slopes of the diagonals are opposite to each other. As a result, when the first horizontal connection part 31 and the second horizontal connection part 32 are projected to opposite sides based on the upper and lower directions, the first horizontal connection part 31 and the second horizontal connection part 32 A zigzag shape is formed.

In the step of forming the horizontal connection portion 30, the step of forming the second horizontal connection portion 32 is performed.

FIG. 11(a) shows a state in which the second patterning area 92 is filled with the conductive material 100, and FIG. 11(b) is a plane cut along A-A' of FIG. 11(a). This is a diagram showing .

The method of manufacturing the inductor 1 of the present invention is to fill the first patterning region 91 with the conductive material 100 using the same method (pressing method, sputtering method, etc.) to form the second patterning region 92. Filled with a conductive material (100). Through this, the formation of the second horizontal connection portion 32 in the second patterning area 92 is completed.

As the second horizontal connecting portion 32 is formed in the second patterning area 92, one end is connected by contacting the lower surface of the front vertical connecting portion 21, and the other end is connected by contacting the lower surface of the rear vertical connecting portion 22. do. Through this, the second horizontal connector 32 integrally connects the front vertical connector 21 and the rear vertical connector 22, and the second horizontal connector 32, the front vertical connector 21, and the rear vertical connector 22 ) is implemented.

Then, the step of removing the mold (MD) is performed.

FIG. 12(a) is a plan view of the mold (MD) being removed, leaving only the coil portion 10, and FIG. 12(b) is a view cut along line A-A' of FIG. 12(a). am.

Referring to FIGS. 12(a) and 12(b), the manufacturing method of the inductor 1 of the present invention connects the plurality of vertical connectors 20 and the plurality of vertical connectors 20 by removing only the mold (MD). A coil portion 10 is provided with a plurality of horizontal connection portions 30 integrally connected to each other.

The manufacturing method of the inductor 1 of the present invention includes, in the step of removing the mold (MD), providing an anodic oxide film portion 60 on the outer peripheral surface of the vertical connecting portion 20 and lower surface of the first horizontal connecting portion 31. And the mold MD is removed with the anodized film portion 60 provided on the upper surface of the second horizontal connecting portion 32.

Specifically, the step of removing the mold MD will be described with reference to FIGS. 11(a) to 12(b).

Referring to FIG. 11(b), a first horizontal connecting portion 31 is formed on one side (lower part of FIG. 11(b)) of the vertical connecting portion 20, and a second horizontal connecting portion 31 is formed on the other side (upper part of FIG. 11(b)). With the horizontal connection portion 32 formed, a step of removing the mold MD is performed.

The step of removing the mold (MD) includes removing the patternable material (PR) present around the first and second horizontal connecting portions 31 and 32, and the lower surface of the first horizontal connecting portion 31 and the second horizontal connecting portion 31. It includes the step of removing the mold (MD) including the remaining anodized film portion 60 except for the anodized film portion 60 formed on the upper surface of the horizontal connecting portion 32 and the outer peripheral surface of the vertical connecting portion 20. It includes the step of removing the mold (MD) existing between the anodized film portion 60 formed on the upper and lower surfaces of the mold (MD).

In the step of removing the mold (MD), a step of removing the patternable material (PR) is preferably performed.

In the step of removing the patternable material (PR), the patternable material (PR) provided on one side of the mold (MD) (the lower part of the mold (MD) in FIG. 11b) to form the first horizontal connection portion 31 The process of removing is performed. At this time, the mold MD has an anodized oxide film portion 60 formed on its surface (including the upper surface and lower surface) and the inner wall of the vertical penetrating portion 110. In other words, the anodized film portion 60 exists on the outer peripheral surface of the vertical connecting portion 20 and the upper and lower surfaces of the mold MD. The patternable material (PR) provided around the first horizontal connecting portion 31 is called a first patternable material. The first patternable material is removed by the same method as the method of patterning and removing the first patternable material to form the first patterning area 91 (photoresist process). Accordingly, the patternable material (PR, first patternable material) existing around the first horizontal connecting portion 31 is removed.

In addition, in the step of removing the patternable material PR, a patternable material provided on the other side of the mold MD (top of the mold MD in FIG. 11(b)) to form the second horizontal connection portion 32 A process is performed to remove the substance (PR). At this time, the mold MD has an anodized oxide film portion 60 formed on its surface (including the upper surface and lower surface) and the inner wall of the vertical penetrating portion 110. In other words, the anodic oxide film portion 60 exists on the lower surface of the middle portion of the first horizontal connecting portion 31 and the upper surface of the middle portion of the second horizontal connecting portion 32. The patternable material (PR) provided around the second horizontal connecting portion 32 is called a second patternable material. The second patternable material is removed by the same method as the method of patterning and removing the second patternable material to form the second patterning area 92. Accordingly, the patternable material (PR, second patternable material) existing around the second horizontal connecting portion 32 is removed.

By removing the patternable material (PR), the vertical connecting portion 20, the first horizontal connecting portion 31 provided on one side of the vertical connecting portion 20, and the second horizontal connecting portion 31 provided on the other side of the vertical connecting portion 20. A mold (MD) having an anodized oxide film portion 60 is present on the connection portion 32 and the surfaces (upper and lower surfaces) and the inner wall of the vertical penetrating portion 110.

Then, a step of removing at least a portion of the anodized film portion 60 is performed.

In the step of removing at least a portion of the anodic oxide film portion 60, the anodic oxide film portion 60 present on one side (upper surface in FIG. 11(b)) and the other side (lower surface in FIG. 11(b)) of the mold MD. Removing the anodic oxide film portion 60 in the remaining region except for the anodized oxide film portion 60 present in the region corresponding to the first horizontal connecting portion 31 and the region corresponding to the second horizontal connecting portion 32. The process is carried out. The manufacturing method of the inductor 1 of the present invention includes a vertical connecting portion 20 having an anodic oxide film portion 60 on the outer peripheral surface, a first horizontal connecting portion 31 having an anodic oxide film portion 60 on the lower surface, and an upper portion. A coil portion 10 including a second horizontal connection portion 32 including an anodized film portion 60 on the surface is manufactured. Accordingly, in the step of removing at least a portion of the anodic oxide film portion 60, the anodic oxide film portion 60 provided on the inner wall of the vertical penetrating portion 110 of the mold MD and one surface of the mold MD (FIG. 11 ( The anodized film portion 60 and the A process of removing the anodic oxide film portion 60 present in the remaining area except for the anodized oxide film portion 60 present in the area corresponding to the two horizontal connecting portions 32 is performed.

In the step of removing at least a portion of the anodic oxide film portion 60, the anodic oxide film portion 60 formed on at least one of the one side and the other side of the mold MD is present in the region corresponding to the horizontal connection portion 30 among the entire area of the anodic oxide film portion 60 formed on at least one side of the mold MD. A process of removing the anodized film portion 60 in the remaining areas excluding the anodized film portion 60 is performed. Then, a process of removing the anodized film portion 60 formed on the other one of the one side and the other side of the mold MD is performed.

As an example, of the entire area of the anodized film portion 60 formed on one surface (upper surface) of the mold MD, the remaining region excluding the anodized oxide film portion 60 present in the region corresponding to the first horizontal connecting portion 31 A process of removing the anodized film portion 60 present in is performed. More specifically, except for the anodic oxide film portion 60 that corresponds to the first horizontal connecting portion 31 and is in contact with the lower surface of the first horizontal connecting portion 31, it is formed on the upper surface of the mold MD to form the first horizontal connecting portion 31. A process of removing the anodized film portion 60 that does not correspond to 31 but is present in an area that is not in contact with the first horizontal connecting portion 31 is performed. The anodized film portion 60 may be removed through etching using a solution that reacts with the anodized film portion 60, or, preferably, at least a portion of the anodized film portion 60 may be removed using CMP or the like.

In addition, of the entire area of the anodized film portion 60 formed on the other surface (lower surface) of the mold (MD), except for the anodized film portion 60 that exists in the region corresponding to the second horizontal connecting portion 32, it is present in the remaining regions. A process of removing the anodic oxide film portion 60 is performed. More specifically, except for the anodized film portion 60 that corresponds to the second horizontal connecting portion 32 and is in contact with the upper surface of the second horizontal connecting portion 32, it is formed on the lower surface of the mold MD to form the second horizontal connecting portion 32. A process of removing the anodized film portion 60 that does not correspond to 32 but is present in an area that is not in contact with the second horizontal connecting portion 32 is performed. At this time, at least part of the anodic oxide film portion 60 formed on the other surface (lower surface) of the mold (MD) is removed through etching using a solution that reacts with the anodic oxide film portion 60, or preferably, using CMP, etc. At least some of them can be eliminated.

Then, at least part of the anodized film portion 60 formed on one side (upper surface) and the other surface (lower surface) is removed, and the remaining part is present, and the anodized oxide film portion 60 is present on the inner wall of the vertical penetrating portion 110. A step of removing the mold (MD) is performed. At this time, the mold MD is formed by removing at least a portion of the anodic oxide film portion 60 to form an anodic oxide film portion in an area corresponding to the first horizontal connecting portion 31 and an area corresponding to the second horizontal connecting portion 31. (60) and is provided around the vertical connection portion 20 with an anodized film portion 60 on the inner wall of the vertical penetrating portion 110. The mold (MD) is formed by etching the metal. Specifically, the mold (MD) is removed by etching using a solution that reacts with the metal material. As a result, the first horizontal connecting portion 31 having the anodic oxide film portion 60 on the lower surface is formed on one side. A second horizontal connecting portion 32 having an anodic oxide layer 60 on the upper surface is provided on the other side, and a vertical connecting portion 20 including an anodizing oxide layer 60 on the outer peripheral surface is provided on the seed layer SD. In other words, a plurality of vertical connection parts 20 integrally connected through a plurality of horizontal connection parts 30 remain on the seed layer SD. At this time, the first horizontal connection part 30 An anodized film portion 60 is present on the lower surface and the upper surface of the second horizontal connecting portion 32, and an anodized film portion 60 is present on the outer peripheral surface of the vertical connecting portion 20.

Then, a process of removing the seed layer SD and the support substrate supporting the seed layer below the seed layer SD is performed. The step of removing the mold (MD) is completed by performing a process of removing the seed layer (SD) and the support substrate.

When the step of removing the mold (MD) is completed, the first horizontal connection portion 31 having the anodic oxide film portion 60 on the lower surface and the second horizontal connecting portion 32 having the anodic oxide film portion 60 on the upper surface ) A coil unit 10 consisting of a plurality of horizontal connection parts 30 including ) and a plurality of vertical connection parts 20 having an anodized film portion 60 on the outer peripheral surface is manufactured.

Meanwhile, the method of manufacturing the inductor 1 of the present invention includes providing an anodizing film portion 60 only on the outer peripheral surface of the vertical connecting portion 20, and providing an anodic oxide layer on the horizontal connecting portions (first and second horizontal connecting portions 31 and 32). The coil portion 10 may be manufactured without the portion 60. In the case of the coil portion 10 having this structure, the patternable material (PR) is removed, and then the anodic oxide film portion 60 present on the upper and lower surfaces of the mold (MD) is preferably reacted with the anodic oxide film. It can be manufactured by removing everything through etching using a solution.

Meanwhile, the manufacturing method of the inductor 1 of the present invention involves anodizing the mold (MD) without performing the step of removing at least a portion of the anodized film portion 60 in the step of removing the mold (MD). After the step and before the step of forming the plurality of vertical connecting portions 20, the step of removing at least a portion of the anodized film portion 60 may be performed.

In this case, anodic oxidation treatment is performed on the mold (MD) in which the vertical penetrating portion 110 is formed, and then, among the entire area of the anodized film portion 60 formed on one surface (upper surface) and the other surface (lower surface) of the mold MD. A process of removing only the anodized film portion 60 in the remaining region, excluding the anodized film portion 60 present in the region corresponding to the first and second horizontal connecting portions 31 and 32, may be performed using CMP or the like.

Then, a process of filling the vertical penetration portion 110 with the conductive material 100 to form the vertical connection portion 20 may be performed.

In contrast, after anodizing the mold (MD), forming the vertical connection portion 20, and before forming the horizontal connection portion 30, the mold (MD) is formed on one surface (upper surface) and the other surface (lower surface) of the mold (MD). Even if the step of removing the anodic oxide film portion 60 present in the remaining area except for the anodized oxide film portion 60 present in the area corresponding to the horizontal connecting portion 30 among the entire area of the anodized film portion 60 is performed, It's okay.

In the step of removing the mold (MD), only the metal mold (MD) is removed, so that the mold (MD) is anodized to form a wall formed on the inner wall of the vertical penetration portion 110 and connected to the vertical connection portion 20. The anodized film portion 60 remains in the form surrounding the outer peripheral surface of the vertical connecting portion 20. In addition, an anodic oxide film portion 60 formed in an area corresponding to the horizontal connecting portion 30 and coupled to the lower surface of the first horizontal connecting portion 31 and an anodizing film portion bonded to the upper surface of the second horizontal connecting portion 32. (60) remains as is. In other words, the vertical connecting portion 20 is formed in the vertical penetrating portion 110 in which the anodized film portion 60 is formed on the inner wall. Accordingly, the outer peripheral surface of the vertical connecting portion 20 is integrated with the anodized film portion 60. In addition, among the entire area of the anodized film portion 60 formed on the upper and lower surfaces of the mold MD, the anodized film portion 60 present in the area corresponding to the horizontal connecting portion 30 is not removed. Accordingly, the lower surface of the first horizontal connecting portion 31 is integrated with the anodized oxide layer portion 60, and the upper surface of the second horizontal connecting portion 32 is integrated with the anodized oxide layer portion 60.

The method of manufacturing the inductor 1 of the present invention is to mold the coil portion 10 entirely with an embedded material (specifically, a material with low dielectric constant characteristics or a material with high permeability characteristics) to form a coil portion 10 inside the coil portion 10. ) is performed to form the body 70 so that it is provided in an embedded form.

FIG. 13(a) is a plan view of the body 70 surrounding the coil unit 10, and FIG. 13(b) is a view cut along line A-A' of FIG. 13(b). am.

In the manufacturing method of the inductor 1 of the present invention, when manufacturing the inductor 1 having a structure including the body 70 and the coil portion 10, the mold (MD) is removed to form the anodized film portion 60. After providing the coil unit 10, a step of forming the body 70 surrounding the coil unit 10 can be performed.

The body 70 is formed by entirely molding the coil portion 10 from the outside of the coil portion 10. Accordingly, the coil unit 10 is provided in an embedded form inside the body 70.

At this time, the body 70 has one surface of the first terminal connection part 41 of the coil unit 10 (left outer surface in FIG. 13(a)) and one surface of the second terminal connection part 42 (FIG. 13(a)) It is formed to surround the coil portion 10 in a form that exposes the right outer side of ( ) to the outside.

In the step of forming the body 70, the body 70 fills the empty space existing inside the coil portion 10 and is wrapped along the outer peripheral surface of the coil portion 10 from the outside of the coil portion 10. can be formed. In this case, with the coil unit 10 embedded in the body 70, a form is formed in which at least a portion of the body 70 exists inside the coil unit 10.

In contrast, in the step of forming the body 70, the body 70 is not formed inside the coil unit 10, but is wrapped around the outer peripheral surface of the coil unit 10 from the outside of the coil unit 10. may be formed. In this case, when the coil unit 10 is embedded in the body 70, at least a portion of the body 70 is not present and an empty space is formed inside the coil unit 10.

In the manufacturing method of the inductor 1 of the present invention, in the step of forming the body 70, the body 70 is formed only on the outside of the coil unit 10 without forming the body 70 inside the coil unit 10. By forming , the space 80 can be formed inside the coil unit 10. When the inductor 1 of the present invention is manufactured through the manufacturing method of the inductor 1 of the present invention including the step of forming the body 70 including the process of forming the space 80, the coil portion ( A space portion 80 made of empty space may be provided inside 10).

When the manufacturing method of the inductor 1 of the present invention includes the step of forming the body 70, the step of forming the body 70 is performed, and then the first terminal ( 51) and forming a second terminal 52 on the other side.

Figure 14 is a plan view of the first terminal 51 formed on one side of the body 70 in which the coil portion 10 is embedded, and the second terminal 52 formed on the other side. In other words, this is a top view of the inductor 1 of the present invention including the body 70, the coil portion 10, and the first and second terminals 51 and 52.

The first and second terminals 51 and 52 are formed using a known metal patterning technique.

The first terminal 51 covers one side (outer left side in FIG. 13(a)) of the first terminal connection portion 41 that is not surrounded by the body 70 and is exposed to the outside, and one side of the body 70 ( formed on the left).

The first terminal 51 includes one end (left end) of the entire upper surface of the body 70, one outer surface (left outer surface) of the body 70, and the entire lower surface of the body 70. It is formed in a shape that surrounds the area of one end (left end) of the middle. The left outer surface of the first terminal connection part 41 exposed to the outside while the coil part 10 is embedded in the body 70 is the first terminal 51 formed on the left outer surface of the body 70. It is covered in a form that is not exposed, at least in part.

The first terminal 51 is at least partially formed on the left outer surface of the body 70 and is in contact with the left outer surface of the first terminal connection portion 41, through which the first terminal 51 and the coil portion 10 are connected. ) is electrically connected.

The second terminal 52 covers one side (outer right side in FIG. 13(a)) of the second terminal connection portion 42 that is not surrounded by the body 70 and is exposed to the outside, and the other side of the body 70 ( formed on the right).

The second terminal 52 is the area of the other end (right end) of the entire upper surface of the body 70, the other outer surface (right outer surface) of the body 70, and the entire area of the lower surface of the body 70. It is formed in a shape that surrounds the area of the other end (right end). The right outer side of the second terminal connection portion 42 exposed to the outside while the coil portion 10 is embedded in the body 70 is the second terminal 52 formed on the right outer side of the body 70. It is covered in a form that is not exposed, at least in part.

The second terminal 52 is at least partially formed on the right outer surface of the body 70 and is in contact with the right outer surface of the second terminal connection portion 42, through which the second terminal 52 and the coil portion 10 are connected. ) is electrically connected.

Meanwhile, the method of manufacturing the inductor 1 of the present invention includes removing the mold (MD) to provide a coil portion 10 including an anodized film portion 60, and then connecting the first and second terminals ( 51, 52) forming steps can be performed.

In this case, the inductor 1 of the present invention including the coil portion 10 including the anodized film portion 60 and the first and second terminals 51 and 52 is manufactured. In other words, the inductor 1 of the present invention with a structure that does not include the body 70 is manufactured.

The manufacturing method of the inductor 1 of the present invention includes providing an anodic oxide film portion 60 on the outer peripheral surface of the vertical connecting portion 20 through the step of removing the mold (MD), and forming an anodic oxide layer portion 60 on the lower surface of the first horizontal connecting portion 31. and a coil portion 10 including an anodized film portion 60 on the upper surface of the second horizontal connecting portion 32. Alternatively, the coil portion 10 including the anodized film portion 60 is provided only on the outer peripheral surface of the vertical connecting portion 20 through the step of removing the mold (MD).

Then, the step of forming the first terminal 51 on the left outer surface of the first terminal connection portion 41 of the coil portion 10 is performed.

The first terminal 51 has a middle portion that contacts the left outer surface of the first terminal connection portion 41 and is formed as a flat surface, and extends from the top of the middle portion in the inner direction where the first terminal connection portion 41 is located. It may be formed in a form including an upper extension portion and a lower extension portion extending inward from the bottom of the middle portion where the first terminal connection portion 41 is located. The shape of the first terminal 51 is not limited to this.

The method of manufacturing the inductor 1 of the present invention includes forming the second terminal 52 on the right outer surface of the second terminal connection portion 42 of the coil portion 10.

The second terminal 52 has a middle portion that contacts the right outer surface of the second terminal connection portion 42 and is formed as a flat surface, and extends from the top of the middle portion in the inner direction where the second terminal connection portion 42 is located. It may be formed to include an upper extension portion and a lower extension portion extending inward from the bottom of the middle portion where the second terminal connection portion 42 is located. In this case, the second terminal 52 may be provided in a form symmetrical to the first terminal 51 with respect to the vertical center line of the coil unit 10. The shape of the second terminal 52 is not limited to this.

The method of manufacturing the inductor 1 of the present invention involves connecting the first terminal 51 to one end of the coil unit 10, connecting the second terminal 52 to the other end, and connecting the second terminal 52 to the other end of the coil unit 10. The inductor 1 of the present invention can be manufactured in a structure that does not include the body 70 surrounding the coil portion 10.

In this case, a space 80 is provided on the outside of the coil unit 10 and on the inside (inside) of the coil unit 10. More specifically, at least part of the space 80 is provided outside the coil unit 10, and the remaining part of the space 80 is provided inside the coil unit 10. In this case, the inductor 1 of the present invention can function as an inductor 1 having a dielectric with a high quality factor value through the air present in the space 80.

The manufacturing method of the inductor 1 of the present invention completely removes the metal mold (MD) used to form the coil portion 10, and embeds a material with a low dielectric constant characteristic or a high permeability characteristic. The inductor 1 is manufactured by providing a body 70 made of material and embedding the coil portion 10 inside the body 70.

At this time, the coil part 10 is provided with an anodized film part 60 on the outer peripheral surface of the plurality of vertical connecting parts 20 by the removed mold MD, and the lower surface of the first horizontal connecting part 31 and the second It is manufactured by providing an anodized film portion 60 on the upper surface of the horizontal connecting portion 32 to have the function of insulating the horizontal connecting portion 30 and the vertical connecting portion 20 from the embedding material provided inside the vertical connecting portion 20.

Accordingly, the inductor 1 of the present invention is provided with a coil portion 10 that has the function of insulating between the horizontal connection portion 30 and the vertical connection portion 20 and the embedded material, and serves as a base material for manufacturing the coil portion 10. The metal mold (MD) used as a mold is provided in a completely removed structure. The inductor 1 of the present invention is provided only on the outside of the coil unit 10, or has a structure including a body 70 of newly formed embedded material outside the coil unit 10 and inside the coil unit 10. .

Therefore, the inductor 1 of the present invention manufactured by the manufacturing method of the inductor 1 of the present invention uses a base material made of ceramic, silicon, or glass as a dielectric, resulting in a loss of dielectric constant compared to a structure in which the base material is left as is without removing it. can be lowered, or high inductance can be guaranteed.

The inductor 1 of the present invention preferably has a body 70 having a low dielectric constant, or is installed inside the coil unit 10 or outside the coil unit 10 without the body 70. The loss of dielectric constant can be reduced by providing a space part 80 in which air with low dielectric constant exists inside the coil part 10. In this case, the inductor 1 of the present invention can function as an inductor 1 with a high quality factor value at higher frequencies.

In addition, the inductor 1 of the present invention is preferably manufactured in a structure in which the coil portion 10 is embedded in the body 70 with high permeability characteristics, so that it can function as an inductor 1 with high inductance. there is.

On the other hand, the inductor 1 of the present invention is provided in an anodized state without removing the base metal mold (MD) made of metal, and the anodized metal mold (MD) is formed in the coil portion 10. It may also be manufactured in a structure that supports.

FIG. 15A is a plan view of the metal mold (MD) in which the vertical penetrating portion 110 and the groove (HP) are formed, and FIG. 15B is a view cut along line A-A' of FIG. 15A. , FIG. 16 is a cross-sectional view of the inductor 1 of the present invention in which a mold (MD) made of an anodized metal supports the coil portion 10.

The manufacturing method of the inductor 1 of the present invention includes preparing a mold (MD) made of metal, and forming a concave groove (HP) in some areas of the entire mold (MD) so as not to penetrate the mold (MD). Forming step, forming the vertical penetrating portion 110 in the entire area of the mold (MD) except for the region where the groove portion (HP) is not formed, anodizing the mold (MD), groove portion ( An anode including forming a core (CR) in the HP), forming a vertical connection portion 20 in the vertical penetration portion 110, and forming a horizontal connection portion 30 connecting the vertical connection portion 20. The inductor 1 having a structure in which a mold (MD) made of oxidized metal supports the coil portion 10 can be manufactured.

Hereinafter, the inductor 1 of the present invention including the body 70, the coil portion 10, and the terminal portion 50, or the inductor 1 of the present invention including the coil portion 10 and the terminal portion 50. Detailed description of steps that are the same as those of the manufacturing method of the inductor 1 of the present invention will be omitted.

Referring to FIGS. 15A and 15B, the manufacturing method of the inductor 1 of the present invention includes forming a groove (HP) in a prepared mold (MD) made of metal. The mold (MD) has a groove (HP) formed in the center through etching. The groove HP has a predetermined depth and is formed to have a bottom surface and a wall part. The floor and walls are made of a metal mold (MD). The cross-sectional area of the groove HP is larger than the cross-sectional area of the vertical penetrating part 110.

The manufacturing method of the inductor 1 of the present invention is to form a vertical penetrating part 110 in the mold MD so as to penetrate the upper and lower surfaces of the mold MD in the outer area except for the central area where the groove HP is formed. Perform the steps to form . In the method of manufacturing the inductor 1 of the present invention, as an example, the step of forming the groove portion (HP) is performed before the step of forming the vertical penetrating portion 110, but the step of forming the groove portion HP and the vertical penetrating portion are performed before the step of forming the vertical penetrating portion 110. One of the steps forming 110 may be performed first and the other steps may be performed sequentially.

The vertical penetration portion 110 is formed by etching the mold MD. The vertical penetrating portion 110 is formed on the outer portion of the groove portion HP. Specifically, in FIG. 15A, the vertical penetration part 110 is formed in the lower direction of the groove 110 to provide a front vertical penetration, and the vertical penetration part 110 is formed in the upper direction of the groove 110 to provide a rear vertical penetration. Supplements are provided. In other words, the groove portion 110 is provided between the vertical penetrating portions 110 formed at the front and rear. Referring to FIG. 15B, a front vertical penetrating portion is provided on one side (left side) of the groove portion 110, and a rear vertical penetrating portion is provided on the right side of the groove portion 110.

Then, a step of anodizing the metal mold (MD) having the groove portion (HP) and the vertical penetration portion 110 is performed. Through this, referring to FIG. 16 , the anodized film portion 60 is formed on the bottom and wall of the groove HP, and the anodized film portion 60 is formed on the inner wall of the vertical penetrating portion 110. Additionally, an anodized film portion 60 is formed on the surface including the upper surface, lower surface, and left and right outer surfaces of the metal mold MD.

Then, a step of forming the core CR is performed by filling the groove HP with a material having the high permeability characteristics of a magnetic material. A material having high permeability characteristics is filled to occupy at least a portion of the total area of the groove (HP). Accordingly, in Figure 15b, a state in which a material having high permeability characteristics is filled in the lower part of the groove (HP) in the longitudinal direction is formed. The method of manufacturing the inductor 1 of the present invention is to fill at least a part (lower region) of the groove HP with a material having high permeability characteristics, and to form a passivation layer made of an insulating material in the remaining part (upper region). do. Accordingly, a core CR made of a material having high permeability characteristics is provided inside the groove HP, and a passivation layer is provided on top of the core CR. In other words, there is a core CR inside the groove HP and a passivation layer provided on top of the core CR.

Then, the step of forming a plurality of horizontal connectors 30 connecting the vertical connectors 20 is performed. Accordingly, the first horizontal connection part 31 is formed at the top of the vertical connection part 20, and the second horizontal connection part 32 is formed at the bottom. Since this is the same as the step of forming the horizontal connection part 30 described above, detailed description is omitted.

Then, a step is performed to form terminal portions 50 on the left and right outer surfaces of the mold (MD) made of anodized metal. In Figure 16, the terminal portion 50 is shown omitted.

One side of at least one of the first and second terminals 51 and 52 is preferably in contact with the upper surface of the first horizontal connecting portion 31, and the other side is in contact with the lower surface of the second horizontal connecting portion 32. It is provided. For example, the upper portion of the first terminal 51 is provided to contact one end of the upper surface of the first horizontal connecting portion 31, and the lower portion is provided to contact one end of the lower surface of the second horizontal connecting portion 32. . The upper portion of the second terminal 52 is provided to contact the other end of the upper surface of the first horizontal connecting portion 31, and the lower portion is provided to contact the other end of the lower surface of the second horizontal connecting portion 32.

The method of manufacturing the inductor 1 of the present invention uses a mold (MD) made of an anodized metal material, has a core (CR) inside, and coil portion 10 is formed through the mold (MD). When manufacturing the inductor 1 with a structure that supports , it is easy to form a core (CR) of a magnetic material. In addition, the anodized film portion 60 formed on the wall and bottom of the groove portion HP facilitates insulation between the core CR and the metal mold MD.

The inductor (1) of the present invention has a core (CR) of a magnetic material embedded inside a mold (MD) made of metal that has been anodized by the manufacturing method of the inductor (1) of the present invention, and the mold (MD) is It can be manufactured into a structure that supports the coil unit 10.

Referring to FIGS. 3(a) to 16, the method for manufacturing the inductor 1 of the present invention can individually manufacture the inductor 1 of the present invention.

Alternatively, the manufacturing method of the inductor 1 of the present invention can also manufacture a plurality of inductors 1 using the package substrate 200.

In the manufacturing method of the inductor 1 of the present invention, when manufacturing a plurality of inductors 1 using the package substrate 200, the step of forming the terminal connection part 40 is preferably omitted and the terminal connection part ( A coil portion 10 having a structure that does not include 40) is manufactured. Accordingly, the coil portion 10 having a structure that does not include the terminal connection portion 40 is mounted on the package substrate 200.

FIG. 17 is a plan view of a package substrate 200 having a plurality of first electrode pads 201 on one surface (upper surface) and a plurality of second electrode pads 202 on the other surface (lower surface), and FIG. 18 shows a plurality of first electrode pads 201 on the other surface (lower surface). This diagram shows a state in which the coil unit 10 is mounted on at least one of the mounting areas.

Referring to Figures 17 and 18, a plurality of first electrode pads 201 are provided on the package substrate 200. The package substrate 200 is provided with a second electrode pad 202 on the lower surface at a position corresponding to the first electrode pad 201. The package substrate 200 has a plurality of mounting areas divided by a cutting line CL indicated by a dotted line. The package substrate 200 includes two first electrode pads 201 adjacent to one mounting area.

The package substrate 200 is provided with a first electrode pad 201 on one surface (upper surface) and a second electrode pad 202 on the other surface (lower surface) at a corresponding position. The package substrate 200 includes a via conductor 203 inside a via hole penetrating the upper and lower surfaces of the package substrate 200. Accordingly, a via conductor 203 connecting the first and second electrode pads 201 and 202 is provided on the package substrate 200. The first and second electrode pads 201 and 202 are electrically connected through a via conductor 203 and function as a terminal portion 50. Accordingly, in the manufacturing method of the inductor 1 of the present invention, when manufacturing a plurality of inductors 1 of the present invention using the package substrate 200, the step of forming the terminal portion 50 is omitted.

The manufacturing method of the inductor 1 of the present invention performs a process of mounting the coil unit 10 in each mounting area of the package substrate 200.

Referring to FIG. 18, one coil unit 10 is mounted corresponding to one mounting area.

The coil unit 10 is provided on the upper part of one of the two first electrode pads 201 adjacent to the second horizontal connecting part 32 located at one end of the coil unit 10, and located at the other end. The second horizontal connecting portion 32 is mounted in the mounting area so as to be provided on top of the other first electrode pad 202.

Then, the method of manufacturing the inductor 1 of the present invention is to form a first electrode pad (202) through a solder bonding layer interposed between the first electrode pad 202 and the second horizontal connection portion 32 located above A process of joining 202) and the second horizontal connection portion 32 is performed. Through this, the coil unit 10 is mounted in a state bonded to the first electrode pad 201 in each mounting area of the package substrate 200.

The manufacturing method of the inductor 1 of the present invention is to mount the coil portion 10 on each mounting area of the package substrate 200, thereby bonding a plurality of coil portions 10 to the package substrate 200. Equipped with

Then, a process of entirely molding the plurality of coil parts 10 with an embedded material is performed. The plurality of coil parts 10 provided on the package substrate 200 are molded in batches. Accordingly, a form in which a plurality of coil parts 10 are embedded in one body 70 made of an embedded material on the package substrate 200 is manufactured.

Then, a process of individualizing the plurality of coil parts 10 molded as a whole along the cutting line CL of the package substrate 200 is performed. Accordingly, a plurality of inductors 1 of the present invention are provided. In this case, the inductor 1 includes a package substrate 200 including first and second electrode pads 201 and 202, and a coil portion 10 bonded to the package substrate 200.

The manufacturing method of the inductor 1 of the present invention can improve manufacturing efficiency by manufacturing a plurality of inductors 1 using the package substrate 200.

As described above, although the present invention has been described with reference to preferred embodiments, those skilled in the art may modify the present invention in various ways without departing from the spirit and scope of the present invention as set forth in the following patent claims. Or, it can be carried out in modification.

*Main symbols in drawings
1: inductor
10: coil part 60: anodized film part
70: body 80: space part

Claims (11)

A preparatory step of preparing a mold made of metal;
forming a plurality of vertical penetrating portions to penetrate the upper and lower surfaces of the mold;
anodizing the mold;
forming a plurality of vertical connection parts by filling the vertical penetration part with a conductive material; and
Forming a first horizontal connector formed at the top of the mold to connect the upper surface of the vertical connector; and forming a second horizontal connector formed at the bottom of the mold to connect the lower surface of the vertical connector to form the vertical connector. A method of manufacturing an inductor comprising: forming a plurality of horizontal connectors connecting the vertical connectors at the top.
According to paragraph 1,
Removing the mold so that only the coil portion remaining is a connection of the first horizontal connecting portion having an anodic oxide layer on the lower surface, the second horizontal connecting portion having an anodizing layer on the upper surface, and the vertical connecting portion having an anodizing layer on the outer peripheral surface. A method of manufacturing an inductor, comprising:
According to paragraph 1,
A method of manufacturing an inductor, wherein the mold is a metal that can be anodized.
According to paragraph 1,
A method of manufacturing an inductor, comprising forming a first terminal on one side of the vertical connection part and forming a second terminal on the other side.
According to paragraph 1,
A method of manufacturing an inductor comprising: molding the entire coil portion with an embedded material to form a body in which the coil portion is provided in an embedded form.
A coil unit including a plurality of vertical connectors and a plurality of horizontal connectors including a first horizontal connector connecting the plurality of vertical connectors at the top and a second horizontal connector connecting the vertical connectors at the bottom;
A terminal unit including a first terminal connected to one end of the coil unit and a second terminal connected to the other end of the coil unit; and
An inductor comprising: an anodized film portion surrounding an outer peripheral surface of the vertical connection portion.
According to clause 6,
An inductor wherein an anodized film portion is provided on a lower surface of the first horizontal connection portion and an upper surface of the second horizontal connection portion.
According to clause 6,
Includes a space part,
An inductor, wherein at least a portion of the space portion is provided inside the coil portion.
According to clause 6,
An inductor including a body in which the coil portion is embedded.
According to clause 6,
The body is made of silicon dioxide (SiO2), COP (Cyclic Clefin Polymer), fluorinated silicon oxide (SiOF), polyimides, Parylene, Fluorinated Parylene, and Benzocyclobutene. ), an inductor made of any one of Teflon.
According to clause 6,
An inductor wherein the body is made of a magnetic material containing ferrite.

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