KR20230133827A - Vacuum pump management system and vacuum pump management method using the same - Google Patents

Abstract

A vacuum pump management system and a vacuum pump management method using the same are disclosed.
A vacuum pump management method according to an embodiment of the present invention includes a data generation step of generating data in the vacuum pump; A data transmission step in which a node receives the data; A signal transmission step of transmitting either an operation signal or a stop signal generated by the node based on the data to the vacuum pump; And it may include a vacuum pump operation control step of controlling the operation of the vacuum pump based on the operation signal or the stop signal.
A vacuum pump management system according to another embodiment of the present invention includes a sensor that detects data of a vacuum pump; And a node that processes data received from the sensor and controls the operation of the vacuum pump by generating a signal based on the data, and the node may be capable of communicating with the vacuum pump in one-to-one or one-to-many manner. .

Description

Vacuum pump management system and vacuum pump management method using the same {VACUUM PUMP MANAGEMENT SYSTEM AND VACUUM PUMP MANAGEMENT METHOD USING THE SAME}

The present invention relates to a vacuum pump management system and a vacuum pump management method using the same. More specifically, it relates to a vacuum pump management system that facilitates management of a vacuum pump installed in a vacuum chamber and a vacuum pump management method using the same.

Vacuum technology is widely used in various industrial fields such as semiconductors and displays, as well as food and pharmaceuticals, optical coatings, surface science, nanoscience, nuclear fusion, and space science. As the integration of semiconductors increases and cutting-edge technologies such as quantum device development develop, its importance increases. It is increasing day by day.

A vacuum pump is used to maintain vacuum and control gas atmosphere and flow. Control of vacuum level is directly related to product productivity. Since loss of vacuum pump function can cause product defects, maintaining the performance of the vacuum pump is of utmost importance in terms of reliability and economic efficiency.

Vacuum pumps are often in full operation 24 hours a day, 365 days a year. In the environment in which the vacuum pump operates, there is a high risk that the vacuum pump may easily deteriorate or break down during operation. The maintenance, repair, and replacement cycle of the vacuum pump also varies depending on the product process and manufacturing facility. The average replacement cycle of the vacuum pump is 5 to 7 years, and maintenance, repair, and replacement are required 1 to 2 times a year. .

In this manufacturing environment, verification of the vacuum pump is necessary to reduce production costs, and considerable effort and technology are required for management. During the manufacturing process, it is most important to monitor and evaluate the degree of vulnerability of the vacuum pump over time and to prevent a rapid decrease in vacuum due to sudden cessation of operation of the vacuum pump.

The life expectancy of a vacuum pump also varies depending on the environment in which it is used. For example, in manufacturing processes such as chemical vapor deposition (CVD), etching, and diffusion, powder is generated during the reaction of the process gas, which acts as a factor impeding vacuum performance, leading to maintenance and Replacement requires more careful attention.

In the case of the conventional method, the exhaust speed, inlet pressure, current, consumption pressure, temperature, exhaust pressure, etc. measured during operation of the vacuum pump are measured, or the operator's visual observation, touch, sound, etc. are used to make empirical judgments about defects in the operating condition. The abnormal condition of the vacuum pump was checked.

Vacuum pump management methods such as vacuum pump replacement cycle analysis using conventional methods are not only difficult to provide reliability in selecting the maintenance and replacement cycle of the vacuum pump, but also have insufficient various measurement data due to poor operation of the vacuum pump, making it difficult to determine the exact replacement time. It was difficult to decide.

In addition, vacuum pump management methods such as analysis of the replacement cycle of the vacuum pump using the conventional method have the problem of making accurate judgments about whether replacement or maintenance is necessary, as each worker makes his or her own judgment when maintaining or replacing the vacuum pump. There was this.

Korean Publication No. 10-2020-0092187 (Publication date: 2020.08.03.)

The technical problem that the present invention aims to solve is to provide a vacuum pump management system that predicts performance deterioration of a vacuum pump to facilitate maintenance and management, and a vacuum pump management method using the same.

Another technical problem to be solved by the present invention is to provide a vacuum pump management system that improves the service life of the vacuum pump and a vacuum pump management method using the same.

In order to solve the above technical problems, the present invention provides a vacuum pump management method.

A vacuum pump management method according to an embodiment of the present invention includes a data generation step of generating data in the vacuum pump; A data transmission step in which a node receives the data;

A signal transmission step of transmitting either an operation signal or a stop signal generated by the node based on the data to the vacuum pump; and a vacuum pump operation step in which the vacuum pump operates based on the operation signal or the stop signal.

According to one embodiment, the data may be at least one of vibration, noise, heat, and position deviation.

According to one embodiment, the operation signal may be a control signal of the vacuum pump that increases or decreases the vacuum pressure intensity of the vacuum pump.

According to one embodiment, when the node generates the stop signal, an abnormality symptom determination step of determining whether an abnormality is present by analyzing the data in conjunction with accumulated data; And in an abnormal state, it may further include a replacement signal transmission step of generating a replacement signal for the vacuum pump and transmitting it to a central management server or cloud server.

According to one embodiment, in the anomaly sign determination step, the presence of an anomaly is determined based on a deep learning or other mathematical algorithm or a judgment algorithm based on workplace experience, and the operator's control information is selectively called to determine the algorithm. can be reflected in

According to one embodiment, in an abnormal state, a calling step of outputting at least one of a warning light, a siren, a speaker, and a text message may be further included.

In order to solve the above technical problems, the present invention provides a vacuum pump management system.

A vacuum pump management method according to an embodiment of the present invention includes a sensor that detects data of the vacuum pump; And a node that processes data received from the sensor and controls the operation of the vacuum pump by generating a signal based on the data, and the node may be capable of communicating with the vacuum pump in one-to-one or one-to-many manner. .

According to one embodiment, the vacuum pump includes a first vacuum pump and a second vacuum pump that can operate simultaneously or sequentially with the first vacuum pump, and the node generates an operation signal or a stop signal. When controlling the operation of the first vacuum pump, the operation time of the second vacuum pump may be extended or the operation start time of the second vacuum pump may be advanced.

According to an embodiment of the present invention, there is an advantage that a failure of the vacuum pump can be diagnosed and detected in advance based on data generated from the vacuum pump.

According to one embodiment of the present invention, there is an advantage in that the abnormal state of the vacuum pump can be predicted in advance, thereby promoting stable operation of the manufacturing equipment and increasing the service life of the manufacturing equipment.

According to another embodiment of the present invention, there is an advantage in improving data processing efficiency and increasing security by implementing management of the vacuum pump by the node itself using an edge computing method based on data generated during operation of the vacuum pump. .

According to another embodiment of the present invention, the node prepares for an abnormal state of the vacuum pump by cumulatively learning data by deep learning or other mathematical-based algorithms or judgment algorithms based on the operator's experience, thereby performing maintenance, maintenance of the vacuum pump, It has the advantage of being more accurate in determining the need for replacement.

According to another embodiment of the present invention, individual maintenance and replacement cycles for each vacuum pump can be predicted considering the characteristics of the vacuum pump for vacuum pumps with different installation information, operation information in different usage modes, etc., thereby improving work efficiency. There is an advantage of increasing .

1 is a diagram schematically showing a vacuum pump management system according to an embodiment of the present invention.
Figure 2 is a diagram schematically showing vacuum pumps according to different embodiments to which unit nodes forming a vacuum pump management system can be connected.
FIG. 3 is a diagram showing a vacuum pump management system configured to connect a node and a vacuum pump on a one-to-one basis according to an embodiment of FIG. 2.
Figures 4(a) and 4(b) are diagrams schematically showing a state in which a unit node is connected to a plurality of vacuum pumps according to different embodiments.
Figure 5 is a block diagram showing a method of processing signals from a node, central management server, or cloud server based on data generation of the vacuum pump in the vacuum pump management system according to an embodiment of the present invention.
Figure 6 is a block diagram showing a method of processing signals from a node, a central management server, or a cloud server based on data generation of a vacuum pump in a vacuum pump management system according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. However, the technical idea of the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosed content will be thorough and complete and so that the spirit of the present invention can be sufficiently conveyed to those skilled in the art.

In this specification, when an element is referred to as being on another element, it means that it may be formed directly on the other element or that a third element may be interposed between them. Additionally, in the drawings, the shape and size are exaggerated for effective explanation of technical content.

Additionally, in various embodiments of the present specification, terms such as first, second, and third are used to describe various components, but these components should not be limited by these terms. These terms are merely used to distinguish one component from another. Accordingly, what is referred to as a first component in one embodiment may be referred to as a second component in another embodiment. Each embodiment described and illustrated herein also includes its complementary embodiment. Additionally, in this specification, 'and/or' is used to mean including at least one of the components listed before and after.

In the specification, singular expressions include plural expressions unless the context clearly dictates otherwise. In addition, terms such as "include" or "have" are intended to designate the presence of features, numbers, steps, components, or a combination thereof described in the specification, but are not intended to indicate the presence of one or more other features, numbers, steps, or components. It should not be understood as excluding the possibility of the presence or addition of elements or combinations thereof. Additionally, in this specification, “connection” is used to mean both indirectly connecting and directly connecting a plurality of components.

Additionally, in the following description of the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description will be omitted.

Figure 1 is a diagram schematically showing a vacuum pump management system 10 according to an embodiment of the present invention, and Figure 2 is a vacuum pump management system 10 according to different embodiments to which unit nodes constituting the vacuum pump management system 10 can be connected. It is a diagram schematically showing the pump (P), and FIG. 3 is a diagram showing the vacuum pump management system 10 configured to connect the node 200 and the vacuum pump (P) in a one-to-one connection according to an embodiment of FIG. 2, FIGS. 4(a) and 4(b) are diagrams schematically showing a state in which a unit node 200 is connected to a plurality of vacuum pumps P according to different embodiments, and FIG. 5 is an embodiment of the present invention. It is a block diagram showing a method of processing signals of a node, central management server, or cloud server based on data generation of the vacuum pump (P) in the vacuum pump management system 10 according to, and Figure 6 is another embodiment of the present invention. This is a block diagram showing how to process signals from a node, central management server, or cloud server based on data generation of the vacuum pump (P) in the vacuum pump management system 10 according to .

Hereinafter, the configuration and operational relationship of the present invention will be examined with reference to FIGS. 1 to 6.

The vacuum pump (P) according to an embodiment of the present invention can be created in a state where the gas pressure in a specific space, such as inside the chamber 2, is lower than atmospheric pressure, that is, the molecular density is low. The vacuum pump (P) can suck fluids such as liquid, gas, and other particles. By driving the vacuum pump (P), a vacuum state of a certain vacuum capacity can be formed inside the chamber (1).

The type and quantity of vacuum pumps (P) used vary depending on the process and equipment type.

The vacuum pump P according to one embodiment may be made of different vacuum pumps for each capacity unit of low vacuum, medium vacuum, high vibration, and ultra-high vacuum. The vacuum pump P according to another embodiment may be a vacuum pump composed of a plurality of vacuum pumps to form a unit roll of the same vacuum capacity at the same time. The vacuum pump (P) according to another embodiment is, depending on the specific manufacturing equipment, a claw pump, roots pump, scroll pump, screw pump, multi-stage Roots pump or Roots claw combination pump. A suitable type and quantity can be selected among hybrid methods such as these. However, the vacuum pump (P) is not limited to the above-described embodiment.

The vacuum pump management system 10 according to an embodiment of the present invention predicts abnormal signs of the vacuum pump (P) using data generated during the operation of at least one vacuum pump (P) and operates the vacuum pump (P). P) Maintenance and replacement times can be tracked and managed.

Referring again to FIGS. 1, 3, 4, and 5, the vacuum pump management system 10 includes a sensor 100 and a node 200, and further includes a central management server or cloud server 300. It can be included.

Referring again to FIG. 1, the sensor 100 may generate a series of data about the vacuum pump (P). The sensor 100 can detect data of the vacuum pump (P). The data may be standard information for determining whether the vacuum pump (P) is non-standardized. The sensor 100 can detect abnormal signs during the operation of the vacuum pump (P) and provide data for early detection of equipment failure of the vacuum pump (P).

The sensor 100 according to one embodiment may be at least one of a vibration sensor 110, a noise sensor 120, a heat sensor 130, or a laser displacement sensor 140. The sensor 100 can provide data that can read whether there is an abnormality in the vacuum pump (P), such as vibration, noise, heat, or misalignment.

The sensor 100 according to another embodiment includes a vibration sensor 110, and may additionally include a noise sensor 120, a heat sensor 130, or a laser displacement sensor 140. The vibration sensor 110 operates peripherally, and when vibration data is generated by the vibration sensor 110, the noise sensor 120, the heat sensor 130, or the laser displacement sensor 140 is configured to be preliminarily driven. You can. In other words, the vibration data acquired by the vibration sensor 110 can be used as the basis for determining abnormal signs, but preliminary data such as noise, heat, and position deviation can be additionally obtained and used as the basis for determining abnormal signs.

In addition to the data acquired by the vibration sensor 110, the data acquired by the noise sensor 120, heat sensor 130, or laser displacement sensor 140 is used as complementary data to detect abnormal signs of noise, heat, and position deviation. It can be provided as data to be used as a standard as a supplementary element for determining availability.

The vibration sensor 110 may be attached to one surface of the vacuum pump (P). More specifically, the vibration sensor 110 may be attached to a specific location such as the rotor, gearbox, or bearing of the vacuum pump (P).

The noise sensor 120 can provide data to determine whether noise above a certain level is generated. The noise sensor 120 may be provided by a contact or non-contact method with the vacuum pump (P). The noise sensor 120 may be provided on one side of the vacuum pump (P), facing the vacuum pump (P). The noise sensor 120 can extract the frequency bandwidth and amplitude of sound generated during operation of the vacuum pump (P).

The thermal sensor 130 may provide data to determine whether the temperature rise range exceeds the reference temperature range while the vacuum pump P is operating. The thermal sensor 130 may be provided by a contact or non-contact method with the vacuum pump (P).

The laser displacement sensor 140 may provide data to determine whether the position of the vacuum pump (P) is misaligned due to vibration that occurs during operation of the vacuum pump (P). The laser displacement sensor 140 may be provided by a contact or non-contact method with the vacuum pump (P). The laser displacement sensor 140 includes a light emitter and a receiver, and the light source of the light emitter is irradiated to the vacuum pump (P), and determines whether the position of the vacuum pump (P) has shifted and the amount of position shift based on the value returned to the light receiver. It can be detected.

Referring again to FIGS. 1 to 4, the node 200 can control the vacuum pump (P) by determining abnormal signs and generating a replacement signal for the vacuum pump (P) in an abnormal state. Node 200 may receive at least one type of data from sensor 100. Node 200 may record data received from sensor 100. The node 200 may control the vacuum pump P based on data received from the sensor 100.

Node 200 may process the received data. The node 200 can convert analog data into digital data. Node 200 can store and collect a series of data. The node 200 can calculate the normal operation parameters of the vacuum pump (P) in connection with the accumulated data. Normal operation parameters of the vacuum pump (P) include pumping speed (volume flow rate), maximum and minimum operating pressure, power consumption, residual gas, etc. The node 200 may obtain normal operation parameters from the vacuum pump (P).

The node 200 can calculate an appropriate replacement time for the vacuum pump (P). The node 200 can collect data and calculate the replacement time of the vacuum pump P by considering different aspects such as manufacturing equipment, manufacturing process, and frequency of use based on the collected accumulated data. The node 200 according to an embodiment may calculate the replacement time of the vacuum pump P based on accumulated data based on deep learning or other mathematical-based algorithms or judgment algorithms based on the operator's experience.

The node 200 can track significant state changes of the vacuum pump (P) through data analysis. The node 200 may learn data in a normal state generated by the sensor 100 using a deep learning method or other mathematical-based algorithm, or a judgment algorithm based on the operator's experience. The node 200 according to one embodiment may store the operator's operation history and learn by a judgment algorithm based on the operator's experience, such as the operator's operation history.

The node 200 may obtain a reference data value in a normal state based on the data. The node 200 may determine an abnormal state when data exceeding the reference data value is received.

For example, the node 200 calculates the maximum, minimum, and average values of data in a normal state using accumulated data, calculates a threshold value in an abnormal state, and calculates the number of times it exceeds the threshold value, so that the received data is vacuum. Whether the pump (P) is outside its normal operating range can be tracked using deep learning methods.

The node 200 may be matched to at least one vacuum pump (P) within the vacuum pump management system 10. The node 200 can communicate with the vacuum pump in one of two ways: one-to-one or one-to-many.

The vacuum pump (P) may include a first vacuum pump (P1) and a second vacuum pump (P2). The second vacuum pump (P2) may operate simultaneously or sequentially with the first vacuum pump (P1).

The node 200 can control the operation of the vacuum pump P by generating an operation signal or a stop signal.

The node 200 according to one embodiment may control a plurality of vacuum pumps (P1, P2, etc.) provided inside the chamber 2 on a per chamber 2 basis.

Additionally, the node 200 may correspond to a vacuum pump (P) that operates when the manufacturing facility is driven, in units of manufacturing facilities.

The node 200 according to another embodiment may correspond to a plurality of vacuum pumps (P) to form a specific vacuum capacity.

The node 200 according to another embodiment may control a plurality of vacuum pumps P that operate sequentially to form different vacuum capacities. More specifically, the node 200 may control the operation time of the second vacuum pump (P2) when controlling the operation of the first vacuum pump (P1) by generating an operation signal or a stop signal. That is, the operation time of the second vacuum pump (P2) can be extended or the operation start time of the second vacuum pump (P2) can be controlled to advance.

The node 200 according to one embodiment may perform control processing for the vacuum pump (P) based on edge computing. The node 200 may process data on its own without transmitting it to the central management server or cloud server 300.

The node 200 may include a configuration that enables data processing independently from the central management server or cloud server 300. The node 200 can call, process, and record activation information such as installation information, operation information, current during operation, and power of the vacuum pump P without being connected to the central management server or cloud server 300. The node 200 can perform all data related to determination of abnormalities in the matched vacuum pump P without going through the central management server or cloud server 300.

The node 200 can be matched with a plurality of vacuum pumps (P) without the mediation of the central management server or cloud server 300.

By processing data generated from the vibration pump (P) by the node 200 using an edge computing method, data processing efficiency can be improved. By distributing processing across a plurality of nodes 200, security can be improved compared to the centralized method, and vacuum pump management control is possible flexibly even when the network with the central management server or cloud server 300 is unstable.

When data on the vacuum pump (P) is generated, the node 200 according to another embodiment may call the operation information of the vacuum pump (P) corresponding to the data from the central management server or the cloud server 300. At this time, the central management server or cloud server 300 can optionally receive operation information of the vacuum pump P from the node 200. In addition, when the node 200 determines that the vacuum pump (P) is in an abnormal state, the node 200 may transmit not only data on the abnormal state but also quantitative data on the vacuum pump (P) to the central management server or cloud server 300. Again, the central management server or cloud server 300 can transmit the abnormal state of each vacuum pump (P) to each node 200 through the network. Different nodes 200 can obtain information on the abnormal state of the vacuum pump (P) and quantitative data such as current and driving power of the vacuum pump (P) when it is in an abnormal state. That is, the central management server or cloud server 300 can perform data processing on the received abnormal state information of the vacuum pump (P). In this case, since data processing for a plurality of nodes 200 must be performed on the central management server or cloud server 300, a delay may occur in data processing, but as a precaution against abnormal signs of different vacuum pumps (P), It can be carried out in a preliminary and secondary manner.

The node 200 can be selectively operated by compatible edge computing and cloud computing methods.

The central management server or cloud server 300 can collect status information of different vacuum pumps (P) from a plurality of nodes (200). The central management server or cloud server 300 can monitor a plurality of vacuum pumps (P). Additionally, the central management server or cloud server 300 can control the vacuum pump (P) by accessing the node through cloud computing.

Referring again to FIG. 2, the manufacturing facility 1 includes at least one chamber 2 and may be connected to at least one vacuum pump P. The manufacturing facility 1 can provide a space where a process occurs.

The chamber 2 may provide a closed space for maintaining a constant vacuum state created by the vacuum pump P.

Below, we will look at a vacuum pump management method using the vacuum pump management system 10 according to an embodiment of the present invention.

The vacuum pump management method according to an embodiment of the present invention includes a data generation step (S100), a data transmission step (S200), a signal transmission step (S300), and a vacuum pump control step (S400), and further determines abnormality symptoms. It may further include a step (S500), a replacement signal transmission step (S600), and a calling step (S700).

In the data generation step (S100), data may be generated in the vacuum pump. In the data generation step, data generated from the vacuum pump can be acquired by at least one sensor while the vacuum pump is operating.

The data may be at least one of vibration, noise, heat, and position deviation.

In the data generation step (S100), vibration data may be additionally generated as preliminary data at least one of noise, heat, and position deviation.

In the data transmission step (S200), the node can receive data. At this time, the node controls one-to-one or one-to-many vacuum pumps, so that in the data transmission stage, setting information about the vacuum pump can also be received when data is received.

In the signal transmission step (S300), the node may generate an operation signal or a stop signal based on data. In the signal transmission step, either an operation signal or a stop signal can be transmitted to the vacuum pump.

In the vacuum pump control step (S400), the vacuum pump may be controlled to operate based on an operation signal or a stop signal.

The operation signal may be a vacuum pump control signal that increases or decreases the vacuum pressure intensity of the vacuum pump. The operation signal does not completely stop the vacuum pump, but when the vacuum pump in an overloaded state operates at a vacuum pressure intensity of 100%, according to one embodiment, the operation signal operates at a vacuum pressure intensity of 60 to 70%, which is lower than 100%. As the operating strength of the vacuum pump is reduced, the load on the vacuum pump itself is lowered, thereby increasing the service life of the vacuum pump. According to another embodiment, in the case of a vacuum pump capable of operating at a vacuum pressure intensity of 150%, the operation signal is changed from 100% to a vacuum pressure intensity of 120 to 130%, and by increasing the operation intensity of the vacuum pump, the vacuum pump Self-operating performance can be improved.

The stop signal can stop the operation of the vacuum pump.

In the anomaly sign determination step (S500), when the node generates a stop signal, the presence of an anomaly can be determined by analyzing the data and accumulated data. Accumulated data may be values stored in a database of any one of a node, a central management server, or a cloud server. Edge computing allows nodes to record and view data in their own database. In addition, data can be transmitted to the cloud using the cloud method, recorded, recalled, and transmitted.

In the abnormality symptom determination step (S500), the node may determine whether there is an abnormality in the vacuum pump based on the data, accumulated data, and the setting information and status information of the vacuum pump. In the anomaly determination step (S500), the presence of anomalies is determined based on a deep learning or other mathematical algorithm, and the operator's control information can be selectively called and reflected in the algorithm.

In the replacement signal transmission step (S600), in an abnormal state, the node can generate a replacement signal for the vacuum pump and transmit it to the central management server or cloud server.

In the call step (S700), the operator can be notified of the abnormal state of the vacuum pump. In the calling stage, at least one of warning lights, sirens, speakers, and text messages can be called in an abnormal state.

Above, the present invention has been described in detail using preferred embodiments, but the scope of the present invention is not limited to the specific embodiments and should be interpreted in accordance with the appended claims. Additionally, those skilled in the art should understand that many modifications and variations are possible without departing from the scope of the present invention.

10: Vacuum pump management system
100: Sensor 110: Vibration sensor
120: noise sensor 130: temperature sensor
140: Laser displacement sensor
200: node
300: Cloud
P1: 1st vacuum pump P2: 2nd vacuum pump

Claims (8)

A data generation step in which data is generated in the vacuum pump;
A data transmission step in which a node receives the data;
A signal transmission step of transmitting either an operation signal or a stop signal generated by the node based on the data to the vacuum pump; and
A vacuum pump operation control step of controlling the operation of the vacuum pump based on the operation signal or the stop signal. According to claim 1,
A method of managing a vacuum pump, wherein the data is at least one of vibration, noise, heat, and position deviation. According to claim 1,
The operation signal is a control signal of the vacuum pump that increases or decreases the vacuum pressure intensity of the vacuum pump. According to claim 1,
When the node generates the stop signal, an abnormality symptom determination step of determining whether an abnormality is present by analyzing the data and accumulated data in conjunction with each other; and
In an abnormal state, a vacuum pump management method further comprising a replacement signal transmission step of generating a replacement signal for the vacuum pump and transmitting it to a central management server or cloud server. According to claim 4,
In the abnormality symptom determination step,
A vacuum pump management method that determines whether there are abnormalities based on deep learning or other mathematical-based algorithms or judgment algorithms based on the operator's experience, and selectively calls the operator's control information and reflects it in the algorithm. According to claim 4,
A vacuum pump management method further comprising a call step of outputting at least one of a warning light, a siren, a speaker, and a text message in an abnormal state. A sensor that detects data from the vacuum pump; and
It includes a node that processes data received from the sensor and generates a signal based on the data to control the operation of the vacuum pump,
A vacuum pump management system in which the node can communicate with the vacuum pump in either one-to-one or one-to-many communication. According to claim 7,
The vacuum pump is,
It includes a first vacuum pump and a second vacuum pump that can operate sequentially with the first vacuum pump,
The node is,
When controlling the operation of the first vacuum pump by generating an operation signal or a stop signal, a vacuum pump management system that can be controlled to extend the operation time of the second vacuum pump or to advance the operation start time of the second vacuum pump .