KR20210113047A - Drawing device and drawing method - Google Patents

Abstract

Provided is a technique for reducing the device area of a drawing device. The drawing device according to an embodiment includes a drawing unit and a maintenance unit. The drawing unit discharges a functional liquid from a plurality of heads to a work moving along a conveying direction to perform drawing on the work. The maintenance unit has an inspection unit that inspects the plurality of heads after being moved to the lower part of the drawing unit along the conveying direction.

Description

DRAWING DEVICE AND DRAWING METHOD

The present disclosure relates to a drawing apparatus and a drawing method.

Patent Document 1 discloses application of droplets of a coating liquid to a substrate to be conveyed by an inkjet method.

Japanese Patent Laid-Open No. 2018-49805

The present disclosure provides a technique for reducing the device area of a drawing apparatus.

A drawing apparatus according to an aspect of the present disclosure includes a drawing unit and a maintenance unit. The writing unit discharges a functional liquid from a plurality of heads to the work moving along the conveying direction to perform writing on the work. The maintenance unit has an inspection unit that inspects the plurality of heads in a state of moving downward of the drawing unit along the conveyance direction.

According to this indication, the apparatus area of a drawing apparatus can be made small.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows the schematic structure of the drawing apparatus which concerns on embodiment.
It is a side view which shows the schematic structure of the drawing apparatus which concerns on embodiment.
2 is a plan view showing a schematic configuration of a part of a drawing unit according to an embodiment.
It is a top view which shows the outline of the maintenance part which concerns on embodiment.
It is a top view which shows the outline of the measurement part which concerns on embodiment.
It is a top view which shows the outline of the windbreak part which concerns on embodiment.
6 is a schematic diagram showing a state in which each suction unit according to the embodiment has moved to a suction position.
Fig. 7 is a schematic diagram for explaining the movement of the wiping unit when performing wiping processing in the maintenance unit according to the embodiment.
8 is a flowchart for explaining a suction process and a wiping process according to the embodiment.
9 is a schematic diagram showing a state in which each suction unit has moved to a cover position according to the embodiment;
It is a schematic diagram which shows the state which each measurement part moves from a measurement position in the maintenance part which concerns on embodiment.
11 is a flowchart for explaining a weight measurement process according to the embodiment.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the drawing apparatus and drawing method which this application discloses with reference to an accompanying drawing is described in detail. In addition, the drawing apparatus and drawing method disclosed by embodiment shown below are not limited.

<Entire configuration>

The drawing apparatus 1 which concerns on embodiment is demonstrated with reference to FIG. 1A and FIG. 1B. 1A is a plan view showing a schematic configuration of a drawing apparatus 1 according to an embodiment. 1B is a side view showing a schematic configuration of the drawing apparatus 1 according to the embodiment. In addition, in FIG. 1A, some structures, such as the control apparatus 9, are abbreviate|omitted.

The drawing apparatus 1 is a substrate processing apparatus which performs drawing on the board|substrate S by an inkjet system, conveying the board|substrate S which is a work-in in a horizontal direction. The board|substrate S is a board|substrate used for a flat panel display, for example.

The drawing device 1 includes a loading stage 2 , a drawing stage 3 , a carrying out stage 4 , a moving device 5 , a maintenance section 6 , a drawing state detection section 7 , and flushing. A unit (8) and a control device (9) are provided.

In each drawing referenced below, in order to make the description easy to understand, the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other are defined, and the Cartesian coordinate system in which the positive Z-axis direction is a vertically upward direction is shown.

Here, the forward and backward directions with the positive Y-axis direction as the front and the negative Y-axis direction as the rear are defined, and the left-right direction with the negative X-axis direction to the right and the positive X-axis direction to the left is defined. Further, an up-down direction in which the positive Z-axis direction is upward and the negative Z-axis direction is downward is defined. The Y-axis direction, that is, the front-back direction, coincides with the conveyance direction in which the board|substrate S is conveyed. In addition, the X-axis direction, that is, the left-right direction, coincides with the horizontal direction orthogonal to the conveying direction.

In the drawing apparatus 1, the carrying-in stage 2, the drawing stage 3, and the carrying-out stage 4 follow the Y-axis direction in the order of the carrying-in stage 2, the drawing stage 3, and the carrying out stage 4. are placed The drawing apparatus 1 draws, conveying the board|substrate S carried in to the carrying-in stage 2 with the carrying-in arm along the Y-axis direction, and carrying out the board|substrate S which performed drawing to the carrying-out stage 4 It is taken out by the unloading arm from.

In addition, in a conveyance direction, the carrying-in stage 2 side may be made upstream, and the carrying-out stage 4 side may be described as downstream. In addition, in FIG. 1A and FIG. 1B, the state which arrange|positioned the board|substrate S on each stage 2 - 4 is shown for description.

The board|substrate S is carried in to the carrying-in stage 2 by a carrying-in arm. In the carrying-in stage 2, the transfer of the board|substrate S from a carrying-in arm to the 1st sorter 50 is performed. The board|substrate S carried in to the carrying-in stage 2 is supported from below by the 1st sorter 50 of the moving apparatus 5. As shown in FIG.

The carrying-in stage 2 is equipped with the some 1st floating part 20, the some 2nd floating part 21, and the adhesion|attachment detection apparatus 22. As shown in FIG.

The first floating part 20 is installed to extend along the conveying direction. The first floating part 20 is provided in parallel along the left and right directions. The first floating portion 20 blows air from the lower side of the substrate S supported by the first sorter 50 toward the substrate S, and a force ( Hereinafter, referred to as levitation force). The levitation force is a force for stabilizing the levitation height of the substrate S, and is a force that reduces gravity acting on the substrate S. The 1st floating part 20 adjusts the floating height of the board|substrate S supported by the 1st sorter 50 by providing a floating force. Specifically, the first floating portion 20 adjusts the floating height of the substrate S to be stable within the range of 200 μm to 2000 μm. In addition, blowing in the air toward the board|substrate S by the 1st floating part 20 also has the effect|action of the curvature correction of the board|substrate S.

The 2nd floating part 21 is downstream from the 1st floating part 20, and is provided above the 1st floating part 30 of the drawing stage 3 mentioned later. The second floating part 21 is provided in parallel along the left and right directions.

The second floating portion 21 blows air toward the substrate S from below the substrate S supported by the first sorter 50 to impart a floating force to the substrate S. In addition, the second floating part 21 sucks air existing between the substrate S and the substrate S. Thereby, the 2nd floating part 21 adjusts the floating height of the board|substrate S supported by the 1st sorter 50.

Specifically, the second floating part 21 adjusts the floating height of the substrate S with high precision so as to be stable within the range of 30 μm to 60 μm, and adheres to the substrate S by the deposit detection device 22 . It makes it possible to detect deposits. Moreover, the 2nd floating part 21 can adjust the flow volume of the air blown with respect to the board|substrate S. The second floating part 21 can adjust the flow rate of air blown toward the lower surface of the substrate S according to the size, thickness, or the like of the substrate S. Thereby, the 2nd floating part 21 can adjust the floating height of the board|substrate S with high precision. In addition, blowing in the air toward the board|substrate S by the 2nd floating part 21 also has the effect|action of the curvature correction of the board|substrate S.

In this way, the first floating part 20 and the second floating part 21 blow air from below with respect to the substrate S supported at a plurality of locations by the first sorter 50 to remove the Adjust injuries.

The deposit detection apparatus 22 detects the presence or absence of an adhesion|attachment with respect to the board|substrate S blown with air by the 2nd floating part 21. As shown in FIG. The deposit detection device 22 includes a laser unit 22a and a light receiving unit 22b.

The laser part 22a is provided at one end of the carrying-in stage 2 of the left-right direction. The light receiving part 22b is provided at the other end of the carrying-in stage 2 of the left-right direction. That is, the deposit detection device 22 arranges the laser unit 22a and the light receiving unit 22b to face each other with the substrate S interposed therebetween. The deposit detection apparatus 22 detects the light quantity of the laser irradiated from the laser part 22a by the light receiving part 22b, and detects the presence or absence of the deposit|attachment to the board|substrate S.

The board|substrate S is conveyed from the carrying-in stage 2 by the 1st sorter 50 to the drawing stage 3 . In the drawing stage 3 , the transfer of the substrate S from the first sorter 50 to the second sorter 51 is performed. The board|substrate S conveyed to the drawing stage 3 is supported from below by the 2nd sorter 51 of the moving apparatus 5. As shown in FIG.

The writing stage 3 includes a plurality of first floating units 30 , a second floating unit 31 , and a writing unit 32 .

The first floating part 30 is installed to extend along the conveying direction. The first floating part 30 is provided in parallel along the left and right directions. The first floating part 30 is provided on the upstream side of the drawing part 32 in the conveyance direction.

The first floating part 30 blows air from the lower side of the substrate S supported by the first sorter 50 or the second sorter 51 toward the substrate S, to the substrate S. give levitation to The 1st floating part 30 adjusts the floating height of the board|substrate S supported by the 1st sorter 50 or the 2nd sorter 51 by providing a floating force. Specifically, the first floating part 30 adjusts the floating height of the substrate S to be stable within the range of 200 μm to 2000 μm. In addition, blowing in the air toward the board|substrate S by the 1st floating part 30 also has the effect|action of the curvature correction of the board|substrate S.

The second floating part 31 is provided downstream from the first floating part 30 , and is provided below the drawing part 32 . The second floating part 31 is installed extending in the left and right direction.

The 2nd floating part 31 blows air toward the board|substrate S from the downward direction of the board|substrate S supported by the 2nd sorter 51, and provides a floating force with respect to the board|substrate S. In addition, the second floating part 31 sucks air existing between the substrate S and the substrate S. Thereby, the 2nd floating part 31 adjusts the floating height of the board|substrate S supported by the 2nd sorter 51. The second floating part 31 adjusts the floating height of the substrate S more precisely than the first floating part 30 .

Specifically, the second floating part 31 holds the substrate S horizontally, and adjusts the floating height of the substrate S with high precision so as to be stable within the range of 30 µm to 60 µm, and the drawing unit 32 It makes it possible to draw on the board|substrate S with high precision by this. Moreover, the 2nd floating part 31 can adjust the flow volume of the air blown in with respect to the board|substrate S similarly to the 2nd floating part 21 of the carrying-in stage 2 . In addition, blowing in the air toward the board|substrate S by the 2nd floating part 31 also has the effect|action of the curvature correction of the board|substrate S. A groove 31a through which the second sorter 51 is movable is formed in the second floating part 31 .

In this way, the first floating part 30 and the second floating part 31 are air blown from below with respect to the substrate S supported at a plurality of locations by the first sorter 50 or the second sorter 51 . Adjust the floating height of the substrate (S) by blowing.

The drawing part 32 is an inkjet type, and discharges functional liquids, such as ink, to the board|substrate S, and performs drawing on the board|substrate S. The writing unit 32 discharges droplets of the functional liquid to the substrate S moving along the conveying direction in a state held horizontally by the second sorter 51 and the second floating unit 31 .

The drawing unit 32 includes a plurality of carriages 32a. As shown in FIG. 2, the carriage 32a is provided side by side in the left-right direction. Further, the carriages 32a are provided in two rows in the conveying direction. In addition, one row of carriages 32a may be provided in a conveyance direction, and three or more rows may be provided. 2 is a plan view showing a schematic configuration of a part of the drawing unit 32 according to the embodiment.

The carriage 32a has a plurality of heads 32b for discharging the functional liquid. The heads 32b are provided in two rows in the left-right direction with respect to one carriage 32a. Further, the heads 32b may be arranged in a row in the left-right direction, or a plurality of rows of three or more may be provided.

Further, the heads 32b are provided side by side in the conveying direction. For example, the heads 32b are provided in six rows in the conveyance direction. Further, the heads 32b may be arranged in a row in the conveying direction, or may be provided in a plurality of rows such as 8 rows. In this way, the drawing unit 32 has a plurality of heads 32b, respectively, and includes a plurality of carriages 32a arranged along the left-right direction (an example of a horizontal direction orthogonal to the conveying direction). The writing unit 32 performs writing on the substrate S by discharging a functional liquid from a plurality of heads 32b to the substrate S (an example of a work) moving along the conveyance direction.

Returning to Figs. 1A and 1B, the position of the drawing unit 32 in the conveying direction is fixed. In addition, the drawing unit 32 moves along the vertical direction when the maintenance unit 6 performs maintenance of the drawing unit 32 or when the drawing state detection unit 7 detects the drawing state. .

The board|substrate S is conveyed from the drawing stage 3 by the 2nd sorter 51 to the carrying out stage 4 . In the carrying out stage 4, the board|substrate S is exchanged from the 2nd sorter 51 to the 3rd sorter 52 of the moving device 5. As shown in FIG. The substrate S is supported from below by the third sorter 52 .

Moreover, in the carrying out stage 4, the board|substrate S conveyed downstream by the 3rd sorter 52 is exchanged from the 3rd sorter 52 to the carrying arm.

The carrying-out stage 4 is provided with a plurality of floating parts 40 . The floating part 40 is installed to extend along the conveying direction. The floating part 40 is provided side by side along the left and right directions.

The floating part 40 blows air toward the board|substrate S from the downward direction of the board|substrate S supported by the 2nd sorter 51 or the 3rd sorter 52, and floats with respect to the board|substrate S. give power Thereby, the floating part 40 adjusts the floating height of the board|substrate S supported by the 2nd sorter 51 or the 3rd sorter 52 so that it may be stabilized within the range of 200 micrometers - 2000 micrometers. In addition, blowing in the air toward the board|substrate S by the floating part 40 also has the effect|action of the curvature correction of the board|substrate S.

The moving device 5 includes a plurality of first sorters 50 , a plurality of second sorters 51 , a plurality of third sorters 52 , and a driving unit 53 .

Four first sorters 50 are provided, for example, and move along the vertical direction and the conveying direction by the driving unit 53 . The first sorter 50 supports the substrate S from below. Specifically, the 1st sorter 50 is adsorb|sucked to the lower surface of the board|substrate S carried in by the carrying-in arm, and supports the board|substrate S from below. The 1st sorter 50 conveys the board|substrate S from the carrying-in stage 2 to the drawing stage 3 in the state which supported the board|substrate S from below, and it conveys the board|substrate S to the 2nd sorter 51. exchange the

Four second sorters 51 are provided, for example, and are moved along the vertical direction and the conveying direction by the driving unit 53 . The second sorter 51 supports the substrate S from below. Specifically, the second sorter 51 is adsorbed to the lower surface of the substrate S conveyed by the first sorter 50 , and supports the substrate S from below. Moreover, the 2nd sorter 51 can perform adjustment in the horizontal direction of the board|substrate S based on the image of the board|substrate S image|photographed with the alignment camera 55. As shown in FIG. The 2nd sorter 51 conveys the board|substrate S between the drawing stage 3 and the carrying-in stage 2 in the state which supported the board|substrate S from below, and carries out the board|substrate S to the 3rd sorter 52. ) are exchanged.

Four third sorters 52 are provided, for example, and are moved along the vertical direction and the conveying direction by the driving unit 53 . The third sorter 52 supports the substrate S from below. Specifically, the third sorter 52 is adsorbed to the lower surface of the substrate S conveyed by the second sorter 51 , and supports the substrate S from below. The 3rd sorter 52 moves in the conveyance direction in the state which supported the board|substrate S from below, and transfers the board|substrate S to and from a carrying arm.

In addition, the number of the 1st sorters 50 etc. is not limited to four, For example, six may be sufficient.

The drive part 53 has, for example, an electric motor, a chain device, a belt device, etc., and moves the 1st sorter 50, the 2nd sorter 51, and the 3rd sorter 52, respectively. The driving unit 53 moves the first sorter 50 and the like along the conveying direction.

Further, the drive unit 53 moves the maintenance unit 6 , the rolled paper 71 of the drawing state detection unit 7 , and the flushing unit 8 along the conveying direction. In addition, the drive unit 53 operates the drawing unit 32 when performing maintenance by the maintenance unit 6, detecting the drawing state by the drawing state detecting unit 7, or performing flushing. move in the up-down direction.

Further, the driving unit 53 moves each suction unit 60 (refer to FIG. 3 ) and the like of the maintenance unit 6 .

In addition, a plurality of driving units 53 may be provided corresponding to the sorters 50 to 52, the maintenance unit 6, and the like. That is, each of the sorters 50 to 52 and the maintenance unit 6 may be driven by different driving units 53 .

The maintenance part 6 is provided on the opposite side to the roll paper 71 (inspection film part) of the drawing state detection part 7 mentioned later with respect to the writing part 32 in a conveyance direction. Next, the maintenance part 6 is demonstrated with reference to FIG. 3 : is a top view which shows the outline of the maintenance part 6 which concerns on embodiment.

The maintenance part 6 moves along the rail extended and installed in the conveyance direction. When not performing maintenance work, the maintenance part 6 exists in the standby position upstream from the drawing part 32, and when performing maintenance work, from a standby position, it maintains below the drawing part 32 from a standby position. move to location

The maintenance unit 6 executes a suction process, a wiping process, and a weight inspection process as maintenance work. The suction process is a process for sucking the functional liquid remaining in the head 32b and forcibly discharging ink. The wiping process is a process in which the functional fluid is sucked out of the head 32b. The weight inspection process is a process for measuring the weight of the functional liquid discharged from the head 32b.

The maintenance unit 6 executes a suction process and a wiping process at a preset first timing. The maintenance unit 6 executes, for example, a suction process and a wiping process several times a day.

The maintenance unit 6 executes a weight inspection process at a preset second timing. The maintenance unit 6 executes a weight inspection process, for example, once a week. In addition, the suction process, the wiping process, and the weight inspection process may be executed based on the operator's operation.

The maintenance unit 6 includes a plurality of suction units 60 , a plurality of wiping units 61 , and a plurality of inspection units 62 .

The plurality of suction portions 60 are provided according to the number of carriages 32a in the left-right direction. That is, the plurality of suction portions 60 are provided corresponding to the plurality of carriages 32a. The plurality of suction portions 60 may be provided in two rows in the conveying direction according to the number of carriages 32a in the conveying direction. Each suction part 60 is movable in a conveyance direction and an up-down direction, respectively. The plurality of suction units 60 suck the functional fluid from the plurality of heads.

Each suction part 60 is provided with a plurality of caps 60a. Each cap 60a is provided corresponding to the number of heads 32b, and is provided so that it may be replaced with the heads 32b in an up-down direction. For example, the plurality of caps 60a are provided in 2 rows in the left-right direction and 12 rows in the conveying direction.

Each cap 60a can be closely attached to the corresponding head 32b by the suction part 60 moving in the vertical direction. Each cap 60a is in close contact with the corresponding head 32b during the suction treatment, and receives the functional fluid sucked from the corresponding head 32b. In the suction treatment, the functional liquid remaining in the head 32b is sucked by the suction mechanism in the cap 60a in close contact with the head 32b to create a negative pressure. In addition, each cap 60a is in close contact with the corresponding head 32b at the time of weighing.

Each suction part 60 moves along a conveyance direction with respect to the support stand 6a of the maintenance part 6, respectively. Specifically, each suction unit 60 moves between the retracted position, the suction position, or the cover position along the conveying direction, respectively. 3 shows a state in which each suction unit 60 is in the retracted position.

The retracted position is a position at which each suction unit 60 corresponding to the carriage 32a on which the wiping process is performed by each wiping unit 61 is retracted. Incidentally, the retracted position is a position at which the suction unit 60 corresponding to the carriage 32a on which the weight measurement processing is performed by each measuring unit 63 of the inspection unit 62 is retracted. In addition, the retracted position is also the reference position of each suction part 60. As shown in FIG.

The suction position is a position on the downstream side in the conveying direction from the retracted position, and is a position where each cap 60a is below the corresponding head 32b when performing the suction process and the wiping process.

The cover position is a position on the upstream side in the conveying direction from the retracted position, and is a position where the plurality of caps 60a is below the corresponding head 32b when the weight measurement process is performed.

The wiping unit 61 performs a wiping process on each head 32b from which the functional fluid has been sucked by the suction process. That is, the wiping unit 61 blots out the plurality of heads 32b in which the functional fluid is sucked by the plurality of suction units 60 .

The wiping portion 61 is provided on the downstream side in the conveying direction from the retracted positions of the plurality of suction portions 60 . The wiping parts 61 are provided at both ends of the maintenance part 6 in the left-right direction (an example of a horizontal direction orthogonal to a conveyance direction), respectively. That is, two wiping parts 61 are provided, one wiping part 61 is provided at one end in the left-right direction of the support 6a, and the other wiping part 61 is provided on the support 6a. It is provided at the other end of the left-right direction in in.

Each wiping unit 61 is movable along the left and right directions. Each of the wiping units 61 moves in the left-right direction while rotating the wiping sheet 61a by means of a roll unit to dislodge the functional liquid adhering to the tip of the head 32b. Each wiping unit 61 rotates the wiping sheet 61a by the roll unit, so that the wiping surface for wiping the functional liquid of the head 32b becomes new.

The inspection unit 62 inspects the plurality of heads 32b while moving downward of the drawing unit 32 along the conveyance direction. Specifically, the inspection unit 62 executes a weight measurement process for measuring the weight of the functional liquid discharged from the plurality of heads 32b. The inspection part 62 is provided on the opposite side to the wiping part 61 with respect to the some suction part 60 in a conveyance direction. Specifically, the inspection unit 62 is provided on the upstream side in the conveyance direction rather than the retracted positions of the plurality of suction units 60 . In the maintenance unit 6 , a working space is formed between the wiping unit 61 and the inspection unit 62 in the conveying direction.

The inspection part 62 is provided at both ends of the maintenance part 6 in the left-right direction, respectively. That is, two inspection parts 62 are provided, one inspection part 62 is provided at one end of the left-right direction in the support base 6a, and the other inspection part 62 is the left and right in the support base 6a. is provided at the other end of the direction.

Each inspection unit 62 includes a measurement unit 63 and a windbreak unit 64 , respectively.

Each measurement part 63 is movable along the left-right direction, respectively. Specifically, each measurement part 63 moves along the left-right direction from each measurement position which is the position of the edge part of a left-right direction.

Each measurement part 63 is provided with the some balance part 63a, as shown in FIG. 4 : is a top view which shows the outline of the measurement part 63 which concerns on embodiment. Each of the balance parts 63a is provided corresponding to the number of heads 32b in one carriage 32a, and is provided so that it may be substituted for each head 32b in an up-down direction. For example, the plurality of balance portions 63a are provided in two rows in the left-right direction and 12 rows in the conveyance direction.

Each of the balance portions 63a is provided with an opening 63b that opens upwards, respectively. Droplets of the functional liquid are discharged from each head 32b through the opening 63b to each of the balance portions 63a, and the discharged functional liquid is stored respectively. Each balance part 63a measures the weight of the stored functional liquid. That is, the measurement unit 63 can individually measure the weight of the droplet of the functional liquid discharged from each head 32b by the respective balance units 63a.

Each measurement unit 63 moves to each measurement position in a state in which the droplet of the functional liquid is discharged, and measures the weight of the droplet.

Returning to FIG. 3 , each of the windbreaks 64 is movable in the vertical direction, respectively. Each windbreak part 64 covers the upper side of each measurement part 63, when each measurement part 63 exists in a measurement position. Specifically, each windbreak unit 64 shields the openings 63b of the plurality of balance units 63a when the weight of the functional liquid is measured by the respective measurement units 63 . Accordingly, when the weight of the droplet of the functional liquid is measured by each measuring unit 63, it is prevented that a measurement error is generated due to the influence of the surrounding wind.

As shown in FIG. 5, each windbreak part 64 is provided with the some suction nozzle 65. As shown in FIG. 5 : is a top view which shows the outline of the windbreak part 64 which concerns on embodiment. The plurality of suction nozzles 65 move along the vertical direction with respect to each windbreak portion 64 . When the measurement of the weight of the functional liquid is finished, the plurality of suction nozzles 65 are inserted into each of the balances 63a from the openings 63b of each of the balances 63a, and drain the functional liquid in each of the balances 63a. It sucks and discharges the functional liquid from each balance part 63a.

The plurality of suction nozzles 65 are provided corresponding to the number of the balance portions 63a, and suck droplets from the plurality of balance portions 63a. That is, the plurality of suction nozzles 65 are provided corresponding to the number of heads 32b of the drawing unit 32 . For example, when the heads 32b are provided in 6 rows in the conveying direction and 2 rows in the left-right direction, the suction nozzles 65 are provided in 6 rows in the conveying direction and 2 rows in the left-right direction.

Returning to FIG. 1A and FIG. 1B, the drawing state detection part 7 is provided above the floating part 40 of the carrying out stage 4, and detects the drawing state of the drawing part 32. As shown in FIG. The drawing state detection unit 7 includes an imaging device 70 and a plurality of roll papers 71 . Two roll papers 71 are provided along the conveying direction. In the roll paper 71 , the height from the installation surface of the drawing apparatus 1 to the upper end is lower than the height from the installation surface of the drawing apparatus 1 to the upper end in the maintenance unit 6 .

The drawing state detection unit 7 captures the functional liquid discharged to the roll paper 71 with the imaging device 70 . The imaging result is output to the control device 9 , and it is determined by the control device 9 whether or not the drawing state in the drawing unit 32 is normal.

The drawing state detection part 7 is a drawing state when drawing to the board|substrate S is complete|finished by the drawing part 32, and the next board|substrate S is conveyed to the 1st floating part 30 of the drawing stage 3 to detect That is, the writing state detection part 7 detects a writing state every time writing is performed on the board|substrate S of 1 sheet.

The roll paper 71 (an example of the inspection film unit) is discharged from a plurality of heads 32b with a functional fluid in a drawing state inspection (an example of ejection imaging inspection) performed at a different cycle than the inspection in the maintenance unit 6 . this is ejected

The flushing part 8 is provided above the floating part 40 of the carrying out stage 4 . The flushing section 8 is provided on the downstream side of the drawing state detection section 7 in the conveying direction, and regular flushing of the drawing section 32 is performed. Regular flushing is performed at a preset flushing timing. Regular flushing is performed, for example, several times a day. In the regular flushing, the functional liquid is discharged from the drawing unit 32 .

The flushing unit 8 recovers the discharged functional liquid. That is, the flushing unit 8 recovers the functional liquid discharged by flushing. In addition, the functional liquid recovered by the flushing unit 8 is discharged through the waste liquid pipe.

The control device 9 is, for example, a computer, and includes a control unit 90 and a storage unit 91 . The storage unit 91 stores a program for controlling various processes executed in the drawing apparatus 1 . The control unit 90 controls the operation of the drawing apparatus 1 by reading and executing the program stored in the storage unit 91 .

In addition, such a program may be recorded in a computer-readable storage medium, and may be installed in the storage unit 91 of the control device 9 from the storage medium. Examples of the computer-readable storage medium include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical disk (MO), and a memory card.

<Suction sequence and wiping sequence>

Next, the suction procedure and the wiping procedure according to the embodiment will be described.

The maintenance unit 6 is in the standby position when the suction processing and the wiping processing are not executed. Moreover, in the maintenance part 6, as shown in FIG. 3, each suction part 60 exists in the retracted position.

When performing the suction process and the wiping process, in the maintenance unit 6, each suction unit 60 moves from the retracted position to the suction position as shown in FIG. 6 . 6 is a schematic diagram showing a state in which each suction unit 60 according to the embodiment has moved to a suction position. Moreover, the maintenance part 6 moves from a standby position to a 1st maintenance position. The 1st maintenance position is a position where each suction part 60 moved to a suction position becomes below each carriage 32a.

Each suction part 60 moves upward in a suction position. Thereby, each cap 60a is in close contact with the corresponding head 32b. Then, the maintenance unit 6 performs a suction process by each suction unit 60 to suction the functional liquid remaining in each head 32b.

In addition, the maintenance unit 6 performs the suction processing in the order in which the wiping is performed by each wiping unit 61 . Thereby, the time from the suction process to the execution of the wiping process can be made the same for each carriage 32a.

The suction unit 60 that has sucked the functional fluid remaining in the head 32b moves downward, and then moves from the suction position to the retracted position as shown in FIG. 7 . Then, the maintenance unit 6 moves each wiping unit 61 in the left-right direction to dislodge the head 32b from which the functional fluid has been sucked by the wiping unit 61 to perform a wiping process. Fig. 7 is a schematic diagram for explaining the movement of the wiping unit 61 when the wiping process is performed in the maintenance unit 6 according to the embodiment.

The maintenance unit 6 performs wiping processing by the respective wiping units 61 from both ends in the left-right direction, for example. The maintenance unit 6 moves the suction unit 60 from the retracted position to the suction position so as to cover the underside of the head 32b on which the wiping process has been performed, so that each cap 60a is brought into close contact with each head 32b. . In this case, suction by the suction unit 60 is not performed.

When the wiping process is performed on the entire carriage 32a, each wiping portion 61 returns to both ends in the left and right directions, and each suction portion 60 moves from the suction position to the retracted position. Further, the maintenance unit 6 moves from the first maintenance position to the standby position.

Next, a suction process and a wiping process according to the embodiment will be described with reference to the flowchart of FIG. 8 . 8 is a flowchart for explaining a suction process and a wiping process according to the embodiment.

The control device 9 moves the maintenance unit 6 from the standby position to the first maintenance position (S100).

The control apparatus 9 moves each suction part 60 to a suction position (S101), and performs a suction process and a wiping process (S102). For example, the control device 9 performs a suction process and a wiping process from both ends in the left-right direction.

The control device 9 determines whether or not the suction processing and the wiping processing have been performed on the entire carriage 32a (S103).

If there is a carriage 32a that has not been subjected to suction processing and wiping processing (S103: NO), the control device 9 controls the carriage 32a to which suction processing and wiping processing have not been performed. A suction process and a wiping process are executed (S102).

When the suction processing and the wiping processing are performed on the entire carriage 32a (S103: Yes), the control device 9 moves each suction unit 60 to the retracted position (S104), and the maintenance unit 6 ) from the first maintenance position to the standby position (S105).

<Weight inspection procedure>

Next, the weight inspection procedure according to the embodiment will be described.

The maintenance part 6 exists in a standby position, when the weight inspection process is not performed. In addition, in the maintenance part 6, as shown in FIG. 3, each measurement part 63 exists in each measurement position, and the upper direction is covered with each windbreak part 64. As shown in FIG.

When carrying out a weight inspection process, in the maintenance part 6, each suction part 60 moves from a retracted position to a cover position as shown in FIG. 9 is a schematic diagram showing a state in which each suction unit 60 according to the embodiment has moved to a cover position. Moreover, the maintenance part 6 moves from a standby position to a 2nd maintenance position. The 2nd maintenance position is a position where each suction part 60 moved to the cover position becomes below each carriage 32a.

Each suction part 60 moves upward in the cover position. Thereby, each cap 60a is in close contact with the corresponding head 32b.

As shown in FIG. 10 , each suction unit 60 corresponding to the carriage 32a on which the weight of the functional fluid is measured by each measurement unit 63 moves from the cover position to the retracted position, and each measurement unit 63 . moves along the left and right direction from the measurement position. Specifically, each measurement unit 63 moves to a position where the opening 63b of each balance unit 63a of each measurement unit 63 is below the corresponding head 32b. 10 : is a schematic diagram which shows the state which each measurement part 63 moves from a measurement position in the maintenance part 6 which concerns on embodiment.

The maintenance unit 6 measures the weight of the functional liquid by each measuring unit 63 from both ends in the left-right direction, for example.

When the opening 63b of each balance part 63a moves to the lower side of the corresponding head 32b, droplets of the functional liquid are discharged from each head 32b. Each head 32b ejects droplets a preset number of times. The maintenance unit 6 returns to the measurement position when a droplet of the functional liquid is discharged to each balance unit 63a, covers the upper side of each measurement unit 63 with each windbreak unit 64, and adjusts the weight of the functional liquid. measure The maintenance unit 6 moves the suction unit 60 from the retracted position to the cover position so as to cover the lower side of the head 32b where the discharge of the functional liquid has been completed, so that each cap 60a is closely attached to each head 32b. make it

When the measurement of the weight of the functional fluid is finished, each windbreak unit 64 moves downward, and the functional fluid is sucked from each balance unit 63a by each suction nozzle 65, and the The functional fluid is discharged.

Then, after each windbreak unit 64 moves upward, each measurement unit 63 moves in the left-right direction, so that for the carriage 32a on which the weight of the droplet of the functional fluid is not measured, the amount of the droplet of the functional fluid is Weighing is performed.

When the weighing process is performed on the entire carriage 32a, each suction unit 60 moves from the cover position to the retracted position. Further, the maintenance unit 6 moves from the second maintenance position to the standby position.

Next, the weight measurement process according to the embodiment will be described with reference to the flowchart shown in FIG. 11 . 11 is a flowchart for explaining a weight measurement process according to the embodiment.

The control device 9 moves the maintenance unit 6 from the standby position to the second maintenance position (S200), and moves each suction unit 60 to the cover position (S201).

The control device 9 moves each suction unit 60 corresponding to the carriage 32a for measuring the weight of the droplet of the functional liquid by each measuring unit 63 from the cover position to the retracted position (S202).

The control device 9 moves each measurement unit 63 from the measurement position to the left and right (S203). Specifically, when moving each measurement part 63 from a measurement position to the left-right direction, the control apparatus 9 moves each windbreak part 64 which covers the upper side of each measurement part 63 upward. The control device 9 moves each measurement unit 63 to a position where each of the balance units 63a can receive the functional fluid from the corresponding head 32b. The control device 9 measures the weight of the functional liquid from both ends in the left-right direction, for example.

The control device 9 discharges a droplet of the functional liquid from each head 32b of the carriage 32a to each balance unit 63a of each measurement unit 63 (S204).

The control device 9 moves each measurement unit 63 in which droplets of the functional liquid are stored in each balance unit 63a to a measurement position (S205), and measures the weight of the functional liquid (S206). Specifically, the control device 9 moves each windbreak unit 64 downward, covers the upper side of each balance unit 63a with each windbreak unit 64, and measures the weight of the functional liquid.

The control device 9 discharges the functional liquid from each balance part 63a by each suction nozzle 65 (S207). Specifically, the control device 9 moves each windbreak unit 64 downward, and discharges the functional liquid from each balance unit 63a by each suction nozzle 65 .

The control device 9 determines whether or not the weight measurement of the functional liquid has been performed for the entire carriage 32a (S208). When there is a carriage 32a that has not been weighed (S208: NO), the control device 9 weighs the carriage 32a that has not been weighed (S202).

When the weight of the functional fluid is measured for all carriages 32a (S208: Yes), the control device 9 moves each suction unit 60 to the retracted position (S209), and the maintenance unit 6 moves from the second maintenance position to the standby position (S210).

Moreover, although the said embodiment demonstrated an example in which the suction process, the wiping process, and the weight measurement process are performed at different timing, it is not limited to this. The drawing apparatus 1 may perform a suction process, a wiping process, and a weight measurement process at the same timing. That is, the drawing apparatus 1 may perform a suction process, a wiping process, and a weight measurement process continuously.

<Effect>

The drawing apparatus 1 is provided with the drawing part 32 and the maintenance part 6 . The writing unit 32 performs writing on the substrate S by discharging a functional liquid from a plurality of heads 32b to the substrate S (an example of a work) moving along the conveyance direction. The maintenance unit 6 includes an inspection unit 62 that inspects the plurality of heads 32b while moving downward of the drawing unit 32 along the conveyance direction.

Thereby, the drawing apparatus 1 can make the apparatus area small. The drawing apparatus 1 can make the apparatus area in a left-right direction small by moving the test|inspection part 62 along the front-back direction which is a conveyance direction, and can make the whole apparatus area small.

The inspection unit 62 measures the weight of the functional fluid discharged from the plurality of heads 32b.

Thereby, the drawing apparatus 1 can make small the overall apparatus area including the inspection part 62 which measures the weight of a functional liquid.

The maintenance unit 6 includes a plurality of suction units 60 and a wiping unit 61 . The plurality of suction units 60 suck the functional fluid from the plurality of heads 32b. The wiping unit 61 blots out the plurality of heads 32b in which the functional fluid is sucked by the plurality of suction units 60 . The inspection part 62 is provided on the opposite side to the wiping part 61 with respect to the some suction part 60 in a conveyance direction.

As a result, the drawing apparatus 1 secures a working space between the wiping unit 61 and the inspection unit 62 in the conveying direction while providing the wiping unit 61 and the inspection unit 62 in the maintenance unit 6 . can do. Therefore, in the drawing apparatus 1, while the maintenance part 6 is downsized, the maintenance operation|work of the wiping part 61 etc. becomes easy.

The drawing unit 32 includes a plurality of carriages 32a. The plurality of carriages 32a have a plurality of heads 32b, respectively, and are disposed along a horizontal direction orthogonal to the conveying direction. The plurality of suction portions 60 are provided corresponding to the plurality of carriages 32a. The wiping section 61 is provided at both ends of the maintenance section 6 in the horizontal direction orthogonal to the conveying direction, respectively. The inspection part 62 is provided at both ends of the maintenance part 6 in the horizontal direction orthogonal to a conveyance direction, respectively.

Thereby, the drawing apparatus 1 can quickly perform a suction process, a wiping process, and a weight measurement process with respect to the some carriage 32a. In addition, the drawing apparatus 1 can secure a working space for each wiping unit 61 and each measuring unit 63 , so that the maintenance work of each wiping unit 61 and each measuring unit 63 is easy. will do In addition, when maintenance work etc. are being performed on one wiping part 61 or one measuring part 63, the drawing apparatus 1 performs a suction process by the other wiping part 61 and the other The weight measurement process can be performed by the measurement unit 63 of the .

The drawing apparatus 1 includes a roll paper 71 (an example of an inspection film unit) from which a functional fluid is discharged from a plurality of heads 32b in a discharge imaging inspection performed at a different cycle than the inspection in the maintenance unit 6 . to provide The maintenance section 6 is provided on the opposite side to the roll paper 71 with respect to the drawing section 32 in the conveying direction.

Thereby, the drawing apparatus 1 can easily move the maintenance unit 6 and the rolled paper 71 that move at different cycles, so that the amount of movement of the maintenance unit 6 and the rolled paper 71 can be reduced. That is, the drawing apparatus 1 can downsize the maintenance unit 6 and the apparatus for moving the roll paper 71 .

<Modified example>

In the drawing apparatus 1 according to the modification, one of the two wiping units 61 may perform the wiping process. The drawing apparatus 1 according to the modified example is disposed on the other wiping unit 61 when, for example, one of the two wiping units 61 fails or when the wiping sheet 61a is replaced. The wiping process may be performed by In addition, in the drawing apparatus 1 which concerns on a modified example, you may perform a weight measurement process by one measurement part 63 of the two measurement parts 63 similarly.

Although the drawing apparatus 1 which concerns on the said embodiment provided the levitating force to the board|substrate S, and described the apparatus which conveys the board|substrate S by the 1st sorter 50 etc. as an example, it is limited to this none. The writing apparatus 1 which concerns on a modification is the state mounted on the pedestal, for example, moves a pedestal, and may perform writing on the board|substrate S conveyed together with a pedestal.

In the writing apparatus 1 according to the modification, the flushing unit 8 may be provided on the upstream side of the writing unit 32 . That is, a drawing state detection unit 7 that detects a drawing state whenever drawing is performed on one substrate S, a maintenance unit 6 whose cycle of processing to be executed is longer than that of the drawing state detection unit 7 , and flushing You may provide the part 8 with respect to the drawing part 32 upstream.

In addition, it should be considered that embodiment disclosed this time is an illustration and is not restrictive in every point. Indeed, the above-described embodiment may be embodied in various forms. In addition, said embodiment may be abbreviate|omitted, substituted, and may be changed in various forms, without deviating from an attached claim and the meaning.

1: drawing apparatus 3: drawing stage
6: Maintenance unit 7: Drawing state detection unit
8: flushing part 9: control device
32: drawing unit 32a: carriage
32b: head 60: suction unit
60a: cap 61: wiping part
62: inspection unit 63: measurement unit
63a: balance 64: windproof part
65: suction nozzle 71: roll paper (inspection film part)
S: substrate (workpiece)

Claims (6)

a drawing unit that discharges a functional liquid from a plurality of heads to a work moving along a conveyance direction to perform drawing on the work;
and a maintenance unit having an inspection unit that inspects the plurality of heads while moving downward of the drawing unit along the conveyance direction.
drawing device. The method of claim 1,
The inspection unit measures the weight of the functional fluid discharged from the plurality of heads
drawing device. 3. The method according to claim 1 or 2,
The maintenance unit,
a plurality of suction units for sucking the functional fluid from the plurality of heads;
and a wiping unit for wiping off the plurality of heads from which the functional fluid is sucked by the plurality of suction units,
The inspection unit is provided on a side opposite to the wiping unit with respect to the plurality of suction units in the conveying direction.
drawing device. 4. The method of claim 3,
The drawing unit includes a plurality of carriages each having the plurality of heads and arranged along a horizontal direction orthogonal to the conveying direction;
The plurality of suction parts are provided corresponding to the plurality of carriages,
The wiping unit is provided at both ends of the maintenance unit in a horizontal direction orthogonal to the conveying direction,
The inspection unit is provided at both ends of the maintenance unit in a horizontal direction orthogonal to the conveying direction, respectively.
drawing device. 3. The method according to claim 1 or 2,
an inspection film unit in which the functional fluid is discharged from the plurality of heads in the ejection imaging inspection performed at a different cycle than the inspection in the maintenance unit;
The maintenance section is provided on the opposite side to the inspection film section with respect to the drawing section in the conveying direction.
drawing device. A step of discharging a functional liquid from a plurality of heads to a work moving along a conveying direction to perform drawing on the work;
moving downward of the plurality of heads along the conveying direction, and performing inspection of the plurality of heads;
drawing method.

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