KR20210063164A - Tester coupling portion - Google Patents

Abstract

The invention relates to a handler, and specifically, according to one embodiment of the present invention, provided is a tester coupling part, which is capable of coupling with any one of a processor and a tester provided with a socket base capable of accommodating a device, and includes docking plate in which an opening part and a plurality of guide parts are formed, an opening part for exposing the device provided in the socket base to the handler, and a guide part having a shape of one of a groove and a protrusion to separably engage the tester, and the docking plate may be provided with a tester coupling part, wherein at least a portion of the plurality of guide parts may be engaged with a plurality of tester guides formed on the tester to be coupled to the tester.

Description

Tester coupling part {TESTER COUPLING PORTION}

The present invention relates to a tester joint.

A test handler is a device that supports testing of devices, such as semiconductor devices, manufactured through a predetermined manufacturing process, classifies electronic components according to test results, and loads them on a customer tray.

In order for the test handler to test a device such as a semiconductor element, a tester that electrically connects the device to test the device is required. These testers are manufactured separately from the test handler and can be transported separately from the test handler. Meanwhile, in order to use the test handler and the tester, it is necessary to connect the tester to the test handler. Conventionally, the test handler and the tester were fastened by bolting.

However, regular or irregular inspection is required for stable operation of the equipment, and when a problem occurs in the tester, it is necessary to separate the tester from the test handler. Since this separation operation is performed by the user putting his or her hand inside the test handler and directly loosening the bolts, once the tester is docked in the test handler, it is difficult to separate the tester from the test handler.

In addition, when the test handler and tester are separated and combined several times, the screw line formed in the socket base, which is a part of the tester, is damaged. In order to replace the socket base, it is necessary to reconnect a large number of wires installed around the socket base, and the replacement takes a lot of time. In addition, if the wiring is not precisely connected after replacing the socket base, the entire tester is replaced.

Accordingly, there is a need for a tester coupling unit capable of easily coupling and separating the tester and the test handler.

Embodiments of the present invention were invented based on the above background, and are intended to provide a tester coupling unit that can be easily coupled and separated from the tester.

In addition, it is intended to provide a tester coupling part that can prevent dew condensation occurring around the device while testing the device.

According to an aspect of the present invention, in the tester coupling portion that can be coupled to any one of a tester and a handler equipped with a socket base that can accommodate a device,

An opening for exposing the device provided in the socket base to the handler, and a docking plate formed with a plurality of guide portions having a shape of one of a groove and a protrusion for detachably engaging the tester, the docking plate At least a portion of the plurality of guide portions may engage with a plurality of tester guides formed on the tester to be coupled to the tester, a test coupling portion may be provided.

In addition, in the tester coupling portion that can be coupled to any one of a tester and a handler having a socket base that can accommodate a device, the socket base and the docking assembly capable of coupling; and a docking plate having an opening for exposing the device provided in the socket base to the handler and enclosing at least a portion of the docking assembly, wherein the docking plate is configured such that the tester is positioned at a predetermined distance or less with respect to the docking plate. Upon access, a tester coupling may be provided that may secure the position of the socket base relative to the docking plate by supporting the docking assembly.

The docking assembly also includes an auxiliary docking unit connectable to the socket base, and the docking plate includes a clamper driven to advance and retract toward the auxiliary docking unit to selectively support the auxiliary docking unit. The locking device may include a device, wherein the clamper supports the auxiliary docking unit connected to the socket base, thereby fixing the position of the socket base with respect to the docking plate, a tester coupling portion may be provided.

In addition, the auxiliary docking unit may be provided with a roller portion rotating by contacting the clamper advancing toward the auxiliary docking unit, the clamper being driven to advance and retreat toward the roller portion, a tester coupling portion may be provided.

In addition, the docking assembly may form a purge flow path together with the socket base, and includes a purge kit for flowing a humidity control fluid through the purge flow path in order to lower the humidity around the socket base, the tester coupling unit is provided can be

In addition, the docking assembly is formed with a coupling hole through which the coupling protrusion formed in the socket base can be inserted, and the docking plate is engaged with the coupling protrusion passing through the coupling hole, whereby the socket base with respect to the docking plate is formed. A tester coupling may be provided, capable of fixing the position.

Further, a docking assembly capable of being coupled to any one of a tester having a socket base capable of accommodating a device, and a handler for transferring the device to the tester, comprising: an auxiliary docking unit connectable to the socket base; It is possible to form a purge flow path together with the socket base in order to lower the humidity around the socket base, and a purge kit for flowing the humidity control fluid received from any one of the tester and the handler through the purge flow path, A docking assembly may be provided.

According to embodiments of the present invention, there is an effect that can be easily combined and separated from the tester.

In addition, there is an effect that can prevent dew condensation occurring around the device during device testing.

1 is a plan view of a handler according to an embodiment of the present invention.
2 is a perspective view of a tester coupling unit according to an embodiment of the present invention.
Figure 3 is a bottom perspective view of the tester coupling portion of Figure 2;
4 is an exploded perspective view of the tester coupling part of FIG. 2 .
FIG. 5 is a side view illustrating the locking device moving toward the roller unit of FIG. 2 .
6 is a perspective view of the auxiliary docking unit, the purge kit, and the socket base of FIG. 2 ;
7 is a cross-sectional view of the main docking unit of FIG. 2 ;
8 is a cross-sectional view of the temperature control unit of FIG. 2 ;
9 is a bottom view of the purge kit of FIG. 7 .
10 is a perspective view of a docking assembly and a socket base according to a second embodiment of the present invention;

Hereinafter, specific embodiments for implementing the spirit of the present invention will be described in detail with reference to the drawings.

In addition, in describing the present invention, when it is determined that a detailed description of a related known configuration or function may obscure the subject matter of the present invention, a detailed description thereof will be omitted.

In addition, when it is stated that a component is 'connected', 'supported', 'transferred', 'supplied', 'docked', 'coupled', 'fastened' or 'fixed' to another component, it is directly connected to the other component. It may be connected, supported, transferred, supplied, docked, coupled, fastened, or fixed as a method, but it should be understood that other components may exist in between.

The terms used in the present specification are only used to describe specific embodiments and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise.

In addition, terms including ordinal numbers such as first and second may be used to describe various elements, but the corresponding elements are not limited by these terms. These terms are only used for the purpose of distinguishing one component from another.

The meaning of "comprising" as used in the specification specifies a specific characteristic, region, integer, step, action, element and/or component, and other specific characteristic, region, integer, step, action, element, component and/or group It does not exclude the existence or addition of

In addition, in the present specification, the expression of the bottom surface, etc. is described with reference to the drawings, and it is clarified in advance that it may be expressed differently if the direction of the object is changed. Meanwhile, in the present specification, the vertical direction may be the vertical direction of FIG. 4 .

The tester coupling unit 10 according to an embodiment of the present invention may be coupled to any one of the handler 1 and the tester 2 . Hereinafter, the tester 2 will be described first.

The tester 2 may test the device received from the handler 1 . In addition, the tester 2 may be provided with a socket base 2a in which a socket is formed. A device to be tested can be seated in such a socket. The device to be tested may be loaded into the socket base 2a by an element supply unit 60 to be described later.

Also, the tester 2 may be coupled to the handler 1 and electrically connected to the handler 1 . In addition, the tester 2 may be disposed under the handler 1 to elevate the socket base 2a, and the lifted socket base 2a may be coupled to the handler 1 . The lift of the tester 2 may be driven by a manipulator (not shown).

Hereinafter, a detailed configuration of the handler 1 including the tester coupling unit 10 according to an embodiment of the present invention will be described with reference to the drawings.

The handler 1 may test the device manufactured through the manufacturing process, classify it by grade according to the test result, and load it on the customer tray. In addition, the handler 1 may be detachably coupled to the tester 2 . The handler 1 includes a tester coupling unit 10 , a base plate 20 , a frame 30 , a first shuttle unit 40 , a second shuttle unit 50 , an element supply unit 60 , and a temperature control unit. 70 , a loading unit 80 , and an unloading unit 90 may be included.

A detailed description of the tester coupling unit 10 will be described later.

The base plate 20 may provide a portion coupled to the tester coupling unit 10 . The tester coupling part 10 may be coupled to the bottom surface of the base plate 20 , and the base plate 20 may be coupled to the tester coupling part 10 through bolts.

The frame 30 includes a tester coupling unit 10 , a base plate 20 , a first shuttle unit 40 , a second shuttle unit 50 , an element supply unit 60 , a temperature control unit 70 , and a loading unit. 80 and the unloading unit 90 may be supported.

The first shuttle unit 40 transfers the device to be tested from the first loading area 41 to the first exchange area 42 , and transfers the tested device from the first exchange area 42 to the first unloading area ( 43) can be transferred.

The second shuttle unit 50 transfers the device to be tested from the second loading area 51 to the second exchange area 52 , and transfers the tested device from the second exchange area 52 to the second unloading area ( 53) can be transferred.

The element supply unit 60 transfers the device to be tested from the first exchange area 42 and the second exchange area 52 to the socket base 2a, or transfers the tested device from the socket base 2a to the first exchange area. It is possible to transfer to the area 42 and the second exchange area 52 .

The temperature controller 70 may heat or cool the device to be tested before it is supplied to the first shuttle unit 40 and the second shuttle unit 50 .

The loading unit 80 may provide a space in which a device to be tested by the tester 2 is loaded.

The unloading unit 90 may provide a space in which the device tested by the tester 2 is loaded.

2 to 4 , the tester coupling unit 10 may provide a space for loading or unloading a device to the tester 2 and a portion coupled to the tester 2 . The tester coupling part 10 may be coupled to the bottom surface of the base plate 20 , and may be coupled to the base plate 20 through bolts. In addition, when the tester coupling unit 10 is coupled to the tester 2 , the position of the tester 2 may be aligned and fixed. In this specification, the tester coupling unit 10 may be docked or undocked directly/indirectly with the tester 2 through a hard docking or auto docking method to be described later. Here, docking may mean that the tester coupling unit 10 and the tester 2 are coupled or connected, and undocking may mean that the coupling or connection is released. Meanwhile, in the present specification, the tester coupling unit 10 is described as being included in the handler 1 , but may be a separate configuration not included in the handler 1 . Accordingly, it is also possible for the tester coupling portion 10 to be coupled to any one of the handler 1 and the tester 2 . The tester coupling unit 10 may include a docking plate 100 and a docking assembly 200 .

The docking plate 100 may provide a portion to be coupled to the tester 2 . The docking plate 100 may be directly/indirectly coupled to the tester 2 through a hard docking or auto docking method. The docking plate 100 may include a docking base 110 , a locking device 120 , and a manipulation unit 130 .

Referring to FIG. 3 , the docking base 110 may provide a portion to which the tester 2 is coupled and a space through which the device passes to the tester 2 . An opening 111 for exposing the device provided in the socket base 2a to the handler 1 may be formed in the docking base 110 . In other words, the opening 111 may be formed to expose the device provided in the socket base 2a to the element supply unit 60 . The opening 111 is formed open from the center of the docking base 110 . can be

The docking base 110 may provide a portion to which the tester 2 is coupled. The docking base 110 may be coupled to the tester 2 when the tester 2 rises toward the bottom of the docking base 110 by the manipulator. Referring to FIG. 3 , guide parts 112 and 113 having a shape of one of a groove and a protrusion may be formed in the docking base 110 to be separably engaged with the tester 2 . The groove may be a groove inserted to a predetermined depth from the docking base 110 , and the protrusion may be a pin or a rod protruding from the docking base 110 . In addition, the guide part 112 may have a hole shape. As such, the docking base 110 may be coupled to the tester 2 by engaging at least a portion of the plurality of guide parts 112 and 113 with a tester guide (not shown) formed on the tester 2 . Here, the tester guide may have one of a protrusion and a groove corresponding to the shape of the guide portions 112 and 113 . In addition, a fastening hole 114 into which a bolt (not shown) for fastening with the base plate 20 can be inserted may be formed in the docking base 110 . By fastening the bolt inserted into the fastening hole 114 to the base plate 20 , the docking base 110 may be coupled to the base plate 20 .

Hereinafter, a hard docking method will be described with reference to FIG. 3 . The hard docking may be performed by engaging the groove-shaped guide part 112 formed on the docking base 110 and the tester guide formed on the tester 2 . In other words, while the tester 2 rises toward the bottom of the docking base 110, the tester guide is inserted into the groove-shaped guide part 112 of the docking base 110, the docking plate 100 is the tester ( 2) can be combined. In addition, the tester guide is inserted into the groove-shaped guide part 112 while the hard docking is in progress, so that the position of the tester 2 with respect to the docking base 110 may be aligned. When the hard docking is completed, the socket base 2a of the tester 2 may be in close contact with the bottom surface of the docking base 110 , and the location of the socket base 2a may be below the opening 111 .

On the other hand, the type of the tester (2) may be various according to the tester (2) manufacturer. In addition, the position of the tester guide formed on the tester 2 may be different depending on the type of the tester 2 , and the size and shape of the tester guide may also vary. Accordingly, a plurality of groove-shaped guide portions 112 may be formed in the docking base 110 , and the plurality of groove-shaped guide portions 112 include tester guides provided in various types of testers 2 inserted therein. to be formed at different positions of the docking base 110 . In addition, the plurality of groove-shaped guide portions 112 may have different sizes and shapes in order to insert the tester guides formed in various types of testers 2 . Therefore, in the guide part 112 of the plurality of grooves of the docking base 110 according to an embodiment of the present invention, the tester guides (having different positions, sizes and shapes) formed in various types of testers 2 are provided. can be engaged In other words, various types of testers 2 may be coupled to the docking plate 100 by a hard docking method.

In addition, a protrusion-shaped guide part 113 may be formed on the docking base 110 , and a groove-shaped tester guide may be formed on the tester 2 . Therefore, during hard docking, the tester guide of the protrusion shape of the tester 2 is first inserted into the guide part 112 of the groove shape of the docking base 110 to make the first calibration, and the docking base 110 of The protrusion-shaped guide part 113 may be inserted later into the groove-shaped tester guide to perform secondary correction. In this way, one or more calibrations are made while the hard docking is in progress, so that the position of the tester 2 with respect to the docking base 110 can be precisely adjusted. The protrusion-shaped guide part 113 and the groove-shaped tester guide may be formed in plurality. In addition, the groove-shaped guide part 112 for the first correction may be formed at a position farther away from the opening 111 than the protrusion-shaped guide part 112 for the secondary correction. The protrusion-shaped tester guide for this primary correction may be longer and thicker than the protrusion-shaped guide part 113 for the secondary correction. Due to the difference in the shape of the protrusion for the primary correction and the protrusion for the secondary correction, more precise position correction may be possible when the secondary correction is made.

On the other hand, it is also possible that the primary correction is made through the protrusion-shaped guide part 113 and the secondary correction is made through the groove-shaped guide part 112 . In this case, the protrusion-shaped guide part 113 may be formed at a position farther away from the opening 111 than the groove-shaped guide part 112 . In addition, the protrusion-shaped guide part 113 for the primary correction may be shorter and thinner than the protrusion-shaped tester guide for the secondary correction.

In the hard docking method, while the tester 2 rises toward the bottom of the docking base 110, a protrusion-shaped tester guide is inserted into the groove-shaped guide part 112 of the docking base 110, and the protrusion shape of the guide part 113 is inserted into the groove-shaped tester guide, it has been described that the docking base 110 is coupled to the tester (2). However, this is only an example, and it is also possible that only one of the groove-shaped guide part 112 and the protrusion-shaped guide part 113 is formed on the docking base 110 . Therefore, during hard docking, the protrusion-shaped guide part 113 of the docking base 110 is inserted into the groove-shaped tester guide so that the docking base 110 is combined with the tester 2, or a protrusion-shaped tester guide. It is also possible that the docking base 110 is coupled to the tester 2 by being inserted into the groove-shaped guide part 112 of the docking base 110 .

The locking device 120 may support the auxiliary docking unit 230 of the docking assembly 200 to be described later, and may fix the socket base 2a to the docking base 110 . In other words, the locking device 120 may fix the relative position of the socket base 2a with respect to the docking base 110 by supporting the auxiliary docking unit 230 connected to the socket base 2a. The locking device 120 may include a clamper 121 and a driving unit 122 .

Referring to FIG. 5 , the clamper 121 may be driven to advance and retreat toward the auxiliary docking unit 230 in order to selectively support the auxiliary docking unit 230 . The clamper 121 may fix the auxiliary docking unit 230 by supporting the roller part 232 of the auxiliary docking unit 230 . In addition, the clamper 121 may advance and retreat toward the roller unit 232 , and may be driven by the driving unit 122 . A plurality of such clampers 121 may be provided, and the plurality of clampers 121 may support the auxiliary docking unit 230 at different positions. In the present specification, the clamper 121 moves toward the roller part 232 in FIG. 5 and is expressed as supporting the roller part 232 on one side of the roller part 232, but this is only an example, and the roller part ( It is also possible to grip the roller part 232 on both sides of the 232 . In this locking device 120, the auxiliary docking unit 230 is integrated with the socket base 2a, thereby supporting the auxiliary docking unit 230 without directly supporting the socket base 2a to position the socket base 2a. can be fixed.

The driving unit 122 may advance and retreat the clamper 121 toward the roller unit 232 . For example, the driving unit 122 may be configured as a hydraulic cylinder, and may drive the clamper 121 by the hydraulic pressure of the hydraulic cylinder. In addition, a plurality of driving units 122 may be provided and may drive a plurality of clampers 121 .

The manipulation unit 130 may control the operation of the plurality of driving units 122 . In other words, the manipulation unit 130 may operate or stop the operation of the clamper 121 through the plurality of driving units 122 . The manipulation unit 130 may be provided on one side of the docking base 110 .

Hereinafter, an auto docking method will be described. In the auto docking method, when the tester 2 is raised by the manipulator, the locking device 120 supports and fixes the auxiliary docking unit 230 in order to fix the socket base 2a. In other words, when the tester 2 approaches the docking plate 100 by a predetermined distance or less with respect to the docking plate 100 in the auto docking method, the docking plate 100 supports the docking assembly 200 by supporting the docking plate 100 with respect to the socket base ( 2a) can be fixed. As such, the docking assembly 200 may be used to determine a position as well as to fix the socket base 2a. In addition, if more precision is required, similar to the hard docking method, the position of the socket base 2a may be guided by at least one or more pins such as the main alignment pin 214 .

Such auto docking may be controlled by the manipulation unit 130 . When the tester 2 rises toward the bottom of the docking base 110 and approaches the docking base 110 by a predetermined distance or less, the manipulation unit 130 may be rotated at a predetermined angle. When the manipulation unit 130 is rotated at a predetermined angle, the plurality of driving units 122 may drive the plurality of clampers 121 to move the plurality of clampers 121 toward the auxiliary docking unit 230 . When the auto docking is completed, the plurality of clampers 121 may support the auxiliary docking unit 230 at different positions, and the socket base 2a connected to the auxiliary docking unit 230 is formed from the lower side of the opening 111 . can be fixed.

In order to release the auto docking, when the manipulation unit 130 rotates at an angle before the driving unit 122 is driven, the operation of the plurality of driving units 122 may be stopped. In addition, the driving of the plurality of clampers 121 is stopped, and the plurality of clampers 121 move toward the plurality of driving units 122 , so that the support of the auxiliary docking unit 230 may be released. When the support of the auxiliary docking unit 230 is released, the socket base 2a may be released.

Meanwhile, although it has been described herein that auto docking is performed after hard docking is performed, auto docking may be independently performed in a docking method separate from hard docking. Therefore, only hard docking may be made, and even if hard docking is not made, the socket base 2a may be fixed by auto docking.

4 and 6, when the docking assembly 200 is placed under the opening 111 as the socket base 2a rises by hard docking or auto docking, the position of the socket base 2a is aligned to can be fixed. In addition, the docking assembly 200 may adjust the temperature of a portion or a periphery of the socket base 2a, and further may adjust the temperature of the device supported on the socket base 2a. The docking assembly 200 may reduce the humidity around the socket base 2a, thereby preventing condensation. The docking assembly 200 may pre-cool or preheat the device by supplying a temperature control fluid to the device before the test is performed, and may adjust the temperature of the device during the test and even after the test is completed. Meanwhile, the docking assembly 200 may supply a temperature control fluid to the socket base 2a in order to control the temperature of the device before hard docking or auto docking is made. The docking assembly 200 may include a main docking unit 210 , a temperature control unit 220 , an auxiliary docking unit 230 , and a purge kit 240 .

The main docking unit 210 may align the socket base 2a to a predetermined position when the socket base 2a rises and is positioned below the opening 111 . Also, the main docking unit 210 may heat the socket base 2a. The main docking unit 210 may include an auxiliary temperature control unit 211 , a bimetal 212 , a shield 213 , and a main alignment pin 214 .

Referring to FIG. 7 , the heating device 211 may change the temperature of the socket base 2a by heating the socket base 2a. Such a heating device 211 heats the socket base 2a when it is necessary to rapidly change the temperature of the socket base 2a, which is controlled to a predetermined temperature range by the temperature control unit 220, by heating the socket base. The temperature of (2a) can be adjusted. For example, the heating device 211 may be a heater, and the heater may heat the socket base 2a to heat it. A plurality of such heating devices 211 may be provided.

The bimetal 212 may prevent the socket base 2a from being overheated. The bimetal 212 may stop the operation of the heating device 211 by automatically shutting off the power of the heating device 211 when the socket base 2a is overheated.

The shield 213 may prevent heat generated from the heating device 211 from being diffused to the outside. Such a shield 213 may be a heat insulating material.

4 and 6, the main alignment pin 214 may align the position of the socket base (2a). The main alignment pin 214 may be inserted inside the auxiliary alignment pin 234 of the auxiliary docking unit 230 to be described later. For example, the main alignment pin 214 is inserted into the auxiliary alignment pin 234 inserted into the alignment member 270 fixed to the socket base 2a, thereby aligning and fixing the position of the socket base 2a. have. As such, the main alignment pin 214 may align and fix the position of the socket base 2a with respect to the main docking unit 210 .

The temperature control unit 220 may supply a temperature control fluid for heating the device or cooling the device to the socket base 2a. In other words, a high-temperature fluid may be supplied to the socket base 2a to heat the device, and a low-temperature fluid may be supplied to the socket base 2a to cool the device. The temperature control unit 220 may supply a fluid whose temperature has been previously adjusted, that is, a high-temperature or low-temperature fluid adjusted to a predetermined temperature, to the device. In addition, the temperature control unit 220 may control the temperature around the socket base 2a by supplying the temperature control fluid to the socket base 2a, and may adjust the temperature of the device seated on the socket base 2a. .

The temperature control unit 220 may be selectively connected to the contact unit 250 in order to supply the temperature control fluid. For example, the temperature control unit 220 is connected to the contact unit 250 when the docking base 110 and the tester 2 are coupled, and a fluid for temperature control for heating the device or cooling the device is supplied to the socket base 2a. ) can be supplied to the device. In addition, the temperature control unit 220 may be separated from the contact unit 250 when the docking base 110 and the tester 2 are separated. The temperature control unit 220 may supply a fluid to the plurality of contact units 250 simultaneously or independently. Also, the temperature control of the temperature control unit 220 may be controlled in real time. For example, the temperature control unit 220 may be an Automatic Temperature Control (ATC). The temperature control unit 220 may be supported by the main docking unit 210 . The temperature control unit 220 may include a body portion 221 , a fluid inlet 222 , and a stopper 223 .

The body 221 may support the fluid inlet 222 and the stopper 223 . Also, the body 221 may be supported by the main docking unit 210 . Referring to FIG. 8 , a transfer passage 221a through which the temperature control fluid supplied from the fluid inlet 222 may flow may be formed in the body portion 221 . The transfer passage 221a may provide a passage through which the temperature control fluid supplied from the fluid inlet 222 flows to a communication member (not shown). A portion of the transfer passage 221a may communicate with the fluid inlet 222 , and another portion of the transfer passage 221a may communicate with a contact unit 250 to be described later through a communication member. In addition, the transfer flow path 221a may be separated from the contact unit 250 when the docking base 110 is separated from the tester 2 , and when the docking base 110 is coupled to the tester 2 , the contact It may be in communication with the unit 250 .

The fluid inlet 222 may receive a temperature control fluid for heating the device or cooling the device from the outside. The fluid inlet 222 may be connected to one end of the body 221 . In addition, a plurality of fluid inlets 222 may be provided, and the plurality of fluid inlets 222 may be connected to the transfer passage 221a.

The stopper 223 may prevent the socket base 2a connected to the tester 2 from rising more than a predetermined range. In other words, when the socket base 2a rises, the stopper 223 contacts the auxiliary docking unit 230 connected to the socket base 2a, so that the socket base 2a and the auxiliary docking unit 230 are above a predetermined range. rise can be prevented. In addition, the stopper 223 may be inserted into a groove (not shown) formed in the auxiliary docking unit 230 when the socket base 2a and the auxiliary docking unit 230 rise, and the auxiliary docking unit 230 in the groove. ) can be in contact with The stopper 223 may be connected to the body part 221 and may be formed to protrude from the body part 221 . In addition, a plurality of stoppers 223 may be provided, and are inserted into a plurality of grooves of the auxiliary docking unit 230 to prevent the socket base 2a and the auxiliary docking unit 230 from rising above a predetermined range. .

The auxiliary docking unit 230 may be connected to the purge kit 240 connected to the socket base 2a to support the socket base 2a and the purge kit 240 . In addition, the auxiliary docking unit 230 may provide a portion supported by the locking device 120 when the tester 2 and the docking base 110 are coupled. The auxiliary docking unit 230 is supported by the locking device 120 , so that the socket base 2a is positioned below the opening 111 . The auxiliary docking unit 230 may include an auxiliary docking body 231 , a roller part 232 , a protrusion 233 , and an auxiliary alignment pin 234 .

Referring to FIG. 6 , the auxiliary docking body 231 may support the roller unit 232 , the protrusion 233 , and the auxiliary alignment pin 234 . The auxiliary docking body 231 may be connected to the purge kit 240 . Also, a groove may be formed in the auxiliary docking body 231 through which the stopper 223 of the temperature control unit 220 may contact. For example, when the auxiliary docking body 231 rises toward the docking base 110 together with the socket base 2a, the stopper 223 is inserted into the groove formed in the auxiliary docking body 231, and the auxiliary docking body 231 is inserted. ) and the stopper 223 may be in contact.

The roller part 232 may be a part supported by the clamper 121 of the locking device 120 when auto docking is performed. The roller part 232 may rotate with respect to the auxiliary docking unit 230 in order to prevent damage by the clamper 121 . As such, the roller unit 232 rotates in response to the movement of the clamper 121 , thereby preventing the auxiliary docking unit 230 from being damaged by the pressing force of the forward and backward clamper 121 .

The protrusion 233 may support the auxiliary alignment pin 234 to be described later. For example, a hole (not shown) into which the auxiliary alignment pin 234 can be inserted may be formed in the protrusion 233 , and the auxiliary alignment pin 234 is inserted into the hole, so that the protrusion 233 is The auxiliary alignment pin 234 may be supported. The protrusion 233 may be formed to protrude from the outer circumferential surface of the auxiliary docking body 231 .

The auxiliary alignment pin 234 may align the position of the socket base 2a. The auxiliary alignment pin 234 is inserted into the hole formed in the alignment member 270 fixed to the socket base 2a, thereby aligning and fixing the position of the socket base 2a. In addition, the main alignment pin 214 may be inserted inside the auxiliary alignment pin 234 , and may support the main alignment pin 214 . This auxiliary alignment pin 234 may be inserted into the kit alignment hole 242 to be described later, and is inserted into the kit alignment hole 242 and the alignment member 270 to align and fix the position of the socket base 2a. can

The purge kit 240 may supply a humidity control fluid to the socket base 2a to prevent condensation around the socket base 2a. In other words, the purge kit 240 supplies low-humidity air to the socket base 2a when the temperature control unit 220 supplies a low-temperature temperature control fluid to the device to cool the device, thereby preventing condensation. can do. For example, dry air or purge air may be used as the fluid for humidity control. In addition, the purge kit 240 may be powered off when the device is heated (eg, during a high-temperature test) and may be operated when the device is cooled (eg, during a low-temperature test).

The purge kit 240 may have a purge inlet 241 through which a fluid may be supplied from an external device (not shown). In addition, the purge kit 240 may form a purge flow path together with the socket base 2a. In other words, the purge passage may be formed surrounded by the purge kit 240 and the socket base 2a. Referring to FIG. 9 , when the fluid for humidity control is supplied from the outside to the purge inlet 241 , the fluid flows in a predetermined direction (for example, the arrow direction in FIG. 9 ) from the purge flow path formed in the purge kit 240 . can be discharged outside. A plurality of such purge inlets 241 may be formed. As such, the humidity control fluid is circulated and discharged inside the purge kit 240 , thereby preventing condensation that may occur in the socket base 2a.

In addition, the kit alignment hole 242 into which the auxiliary alignment pin 234 can be inserted may be formed in the purge kit 240 .

The contact unit 250 may receive a temperature control fluid for heating the device or cooling the device from the temperature control unit 220 of the temperature control unit 220 and supply it to the manifold 260 . One side of the contact unit 250 may selectively communicate with the transfer flow path 221a of the temperature control unit 220 through the communication member, and the other side of the contact unit 250 may communicate with the manifold 260 . have. Accordingly, the contact unit 250 may be separated from the temperature control unit 220 when the tester 2 and the docking base 110 are separated. A plurality of such contact units 250 may be provided.

The manifold 260 may receive a temperature control fluid for heating the device or cooling the device from the contact unit 250 , and may supply the supplied fluid around the socket base 2a. Also, the manifold 260 may directly supply the fluid supplied from the contact unit 250 to the device.

The alignment member 270 may provide a portion into which the auxiliary alignment pin 234 is inserted. The alignment member 270 may be fixedly supported on one side of the socket base 2a. Accordingly, by inserting the auxiliary alignment pin 234 into the alignment member 270, the positions of the socket base 2a and the alignment member 270 with respect to the docking base 110 may be aligned and fixed.

Hereinafter, the action and effect of the handler 1 having the above-described configuration will be described.

A user may combine the docking plate 100 and the tester 2 using a hard docking method. While hard docking is in progress, the tester 2 may rise toward the docking plate 100 . As such, while the tester 2 ascends toward the bottom of the docking base 110, the protrusion-shaped tester guide is first inserted into the groove-shaped guide part 112 of the docking base 110, and the first correction is made, The protrusion-shaped guide part 113 of the docking base 110 is later inserted into the groove-shaped tester guide, so that secondary correction can be made. When the hard docking is completed, the socket base 2a of the tester 2 may be disposed below the opening 111 formed in the docking base 110 , and the position of the socket base 2a may be fixed.

Meanwhile, the user may combine the docking plate 100 and the tester 2 using an auto docking method. While auto docking is in progress, it may rise toward the docking plate 100 . When the tester 2 is positioned on the bottom of the docking base 110 , the user may rotate the manipulation unit 130 to drive the plurality of locking devices 120 . When the manipulation unit 130 is rotated, the plurality of driving units 122 may advance the plurality of clampers 121 at different positions toward the roller unit 232 of the auxiliary docking unit 230 . The plurality of clampers 121 support the auxiliary docking unit 230 , thereby fixing the position of the socket base 2a connected to the auxiliary docking unit 230 .

While the position of the socket base 2a is disposed under the opening 111 of the docking base 110 by at least one of a hard docking method and an auto docking method, the main alignment pin 214 is an auxiliary alignment pin ( 234 , the auxiliary alignment pin 234 may be inserted into the kit alignment hole 242 and the alignment member 270 . As such, the main alignment pin 214 is inserted into the alignment member 270 fixed to the socket base 2a and the auxiliary alignment pin 234 inserted into the kit alignment hole 242, the main alignment pin 214 is the socket. It is possible to align and fix the position of the base (2a). When the position of the socket base 2a is aligned and fixed by the main alignment pin 214 , the tester 2 is electrically connected to the socket base 2a to perform a device test.

Meanwhile, while the test is in progress, the temperature control unit 220 may adjust the device temperature of the socket base 2a. The temperature control unit 220 may receive a temperature control fluid for heating the device or cooling the device from the fluid inlet 222 and supply it to the contact unit 250 . The fluid flowing to the contact unit 250 may be supplied to the device through the manifold 260 . The device temperature control of the temperature control unit 220 may be controlled in real time. In addition, the purge kit 240 supplies dry air to the socket base 2a when the device is cooled by the temperature control unit 220 to prevent condensation that may occur around the socket base 2a. can The operation of the purge kit 240 may be performed simultaneously with temperature control of the device.

When the test is completed, the device of the socket base 2a may be transferred to the first exchange area 42 or the second exchange area 52 by the element supply unit 60 .

The handler 1 according to an embodiment of the present invention has an effect that can be easily coupled and separated from the tester 2 . In addition, while the test is in progress, there is an effect of controlling the temperature of the device. In addition, when the auxiliary docking unit 230 is damaged, by separating the auxiliary docking unit 230 from the socket base 2a and replacing only the auxiliary docking unit 230, there is an effect that it is not necessary to replace the socket base 2a. .

On the other hand, in addition to this configuration, according to the second embodiment of the present invention, the docking assembly 200, the main docking unit 210, the temperature control unit 220, the auxiliary docking unit 230 and the purge kit 240 are omitted. can be Hereinafter, a second embodiment of the present invention will be described with further reference to FIG. 10 . In describing the second embodiment, differences compared to the above-described embodiment are mainly described, and the same description and reference numerals refer to the above-described embodiment.

A hole (not shown) through which the coupling protrusion 2b of the socket base 2a can be engaged may be formed in the docking base 110 . The docking base 110 may be engaged with a coupling protrusion 2b passing through a coupling hole 201 to be described later in the hole, thereby fixing the position of the socket base 2a with respect to the docking base 110 .

The docking assembly 200 may be coupled to the socket base 2a and may be supported on the docking base 110 . A coupling hole 201 into which the coupling protrusion 2b of the socket base 2a can be inserted may be formed in the docking assembly 200 . The coupling hole 201 and the coupling protrusion 2b may be formed in plurality. Accordingly, by inserting the plurality of coupling protrusions 2b of the socket base 2a into the plurality of coupling holes 201 of the docking assembly 200, the position of the socket base 2a with respect to the docking assembly 200 is to be fixed. can In addition, when the coupling protrusion 2b is inserted into the coupling hole 201 , the docking assembly 200 and the socket base 2a may be coupled by bolting.

The docking assembly 200 may be provided with an engagement roller 202 . The coupling roller 202 may rotate in order to prevent it from being damaged by the locking device 120 . In addition, the coupling roller 202 may be supported by the locking device 120 .

Hereinafter, the action and effect of the handler 1 according to the second embodiment of the present invention will be described.

The user may couple the docking assembly 200 to the socket base 2a before coupling the tester 2 and the docking plate 100 . The user may fix the socket base 2a to the docking assembly 200 by inserting the plurality of coupling protrusions 2b of the socket base 2a into the plurality of coupling holes 201 of the docking assembly 200 . In addition, the docking assembly 200 and the other part of the socket base (2a) can be fastened by bolting.

When the socket base 2a is fastened to the docking assembly 200 , the tester 2 may be raised toward the bottom of the docking plate 100 . The coupling protrusion 2b of the socket base 2a passing through the coupling hole 201 of the docking assembly 200 may be inserted into the hole formed in the docking base 110 . As such, the coupling protrusion 2b of the socket base 2a is inserted together into the coupling hole 201 of the docking assembly 200 and the hole formed in the docking base 110, and the docking assembly 200 positions the docking base ( 110) can be aligned and fixed. In addition, when the socket base 2a is disposed below the opening 111 , the user may drive the locking device 120 through the manipulation unit 130 . Since the clamper 121 of the locking device 120 supports the coupling roller 202 of the docking assembly 200, the docking assembly 200 and the socket base 2a are fixed to the docking plate 100 at a fixed position. have.

The tester coupling portion 10 has an effect that the socket base 2a is easily coupled to or separated from the docking base 110 through the docking assembly 200 .

The embodiments of the present invention have been described above as specific embodiments, but these are only examples, and the present invention is not limited thereto, and should be construed as having the widest scope according to the basic idea disclosed in the present specification. A person skilled in the art may combine/substitute the disclosed embodiments to implement a pattern of a shape not indicated, but this also does not depart from the scope of the present invention. In addition, those skilled in the art can easily change or modify the disclosed embodiments based on the present specification, and it is clear that such changes or modifications also belong to the scope of the present invention.

1: Handler 2: Tester
2a: socket base 2b: mating projection
10: tester coupling portion 20: base plate
30: frame 40: first shuttle unit
41: first loading area 42: first exchange area
43: first unloading area 50: second shuttle unit
51: second loading area 52: second exchange area
53: second unloading area 60: element supply unit
70: temperature control unit 80: loading unit
90: unloading unit 100: docking plate
110: docking base 111: opening
112, 113: guide part 114: fastening hole
120: locking device 121: clamper
122: driving unit 130: operation unit
200: docking assembly 201: coupling hole
210: main docking unit 211: heating device
212: bimetal 213: shield
214: main alignment pin 220: temperature control unit
221: body portion 221a: transfer flow path
222: fluid inlet 223: stopper
224: stopper 230: auxiliary docking unit
230: auxiliary docking unit 231: auxiliary docking body
232: roller portion 233: protrusion
234: auxiliary alignment pin 240: purge kit
241: kit inlet 242: kit alignment hole
250: contact unit 260: manifold
270: alignment member

Claims (7)

In the tester coupling part that can be coupled to any one of a tester and a handler equipped with a socket base that can accommodate a device,
An opening for exposing the device provided in the socket base to the handler, and a docking plate formed with a plurality of guide portions having a shape of one of a groove and a protrusion to separably engage the tester,
The docking plate may be coupled to the tester by engaging at least a portion of the plurality of guide parts with a plurality of tester guides formed on the tester,
tester joint. In the tester coupling part that can be coupled to any one of a tester and a handler equipped with a socket base that can accommodate a device,
a docking assembly engageable with the socket base; and
and a docking plate having an opening for exposing the device provided on the socket base to the handler and enclosing at least a portion of the docking assembly,
The docking plate is capable of fixing the position of the socket base with respect to the docking plate by supporting the docking assembly when the tester approaches the docking plate at less than a predetermined distance,
tester joint. The method of claim 2,
the docking assembly includes an auxiliary docking unit connectable to the socket base;
The docking plate includes a locking device having a clamper driven to advance and retreat toward the auxiliary docking unit to selectively support the auxiliary docking unit,
The locking device can fix the position of the socket base with respect to the docking plate by supporting the auxiliary docking unit in which the clamper is connected to the socket base,
tester joint. The method of claim 3,
The auxiliary docking unit is provided with a roller portion rotating by contacting the clamper advancing toward the auxiliary docking unit,
The clamper is driven to advance and retreat toward the roller part,
tester joint. The method of claim 2,
The docking assembly,
A purge flow path can be formed together with the socket base, and a purge kit that flows a humidity control fluid through the purge flow path in order to lower the humidity around the socket base.
tester joint. The method of claim 2,
A coupling hole is formed in the docking assembly through which a coupling protrusion formed in the socket base can be inserted,
By engaging the docking plate with the coupling protrusion passing through the coupling hole, it is possible to fix the position of the socket base with respect to the docking plate,
tester joint. A docking assembly capable of being coupled to any one of a tester having a socket base capable of receiving a device, and a handler for transferring the device to the tester, the docking assembly comprising:
an auxiliary docking unit connectable to the socket base;
It is possible to form a purge flow path together with the socket base in order to lower the humidity around the socket base, and a purge kit for flowing the humidity control fluid received from any one of the tester and the handler through the purge flow path,
docking assembly.

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