KR20040088633A - SECS controller and system for networking a semiconductor apparatus using the SECS controller - Google Patents

Abstract

PURPOSE: An SECS controller and a semiconductor equipment network system using the same are provided to form an efficient network system of the semiconductor equipment by using the SECS controller. CONSTITUTION: A control unit(25) controls all operations of a controller. A memory(27) is used for storing various programs and state data according to the operations of the controller. A plurality of serial communication drivers(29) are connected to serial communication units according to control commands of the controller. An Ethernet communication driver(31) is connected to a host computer according to the control commands of the controller. An extended UART chip(33) is used for interfacing the serial communication drivers with the Ethernet communication driver. A media access controller(35) is used for controlling an Ethernet communication process between the Ethernet communication driver and the host computer.

Description

SCS controller and system for networking a semiconductor apparatus using the SECS controller

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor equipment networking system, and more particularly, to a SECS (SEMI Equipment Communications Standard) controller and a semiconductor equipment networking system using the same, which are suitable for networking each equipment in a production line having a communication protocol.

In general, production management in the production site of semiconductor equipment is mainly performed by engineers, and each equipment is operated by a programmable logic controller (PLC) or a microprocessor, but the production status according to the operation of the equipment is The engineer monitors the equipment and collects data from each equipment independently and records it or makes a database directly.

That is, as shown in the conceptual diagram of Figure 1, all the equipment (1) is controlled by a built-in PLC and the operation status for each equipment by the engineer directly monitors through a variety of display means, by checking the situation of each equipment one by one The collected data are collected by the engineer using the production management computer 3 directly connected to the host computer 5, and the production status of each device, for example, whether there is a defect, a defect factor, a defect point, a yield, In order to improve productivity and reliability by providing the host computer 5 with a general status of each manufacturing process, such as workload.

However, as the integration of semiconductor devices increases, the reliability of equipment becomes an important factor in determining the competitiveness of equipment. As a result, the necessity of automation of manufacturing process has emerged. Efforts are being made to maximize reliability and productivity by introducing them. In other words, the semiconductor factory was brought online to manage manufacturing equipment, measuring equipment, and inspection equipment centrally from a host computer, thereby improving productivity and reliability.

To this end, standardization of related technologies was urgently needed, and finally, SEMI (Semiconductor Equipment and Materials Internet) required SECS (SEMI Equipment), the standard protocol for data processing for the interface between semiconductor equipment and external computer, in order to efficiently establish communication network between semiconductor equipment. Communications Standard protocol has been enacted and most semiconductor production equipment follows this standard at the interface, requiring manufacturers of semiconductor equipment to apply it as an option.

For the centralized management of production resources, semiconductor equipment receives work instructions from the host computer to carry out the manufacturing process or transmits parameter data such as operation status and process conditions to the host computer for analysis and utilization. It has to be composed of a network that is physically connected between the host computer and the host computer, and a communication protocol for recognizing and responding to the transmitted data is required. In this context, the SECS protocol is a standard protocol that regulates communication between semiconductor devices and the host computer. It consists of SECS-I which defines the message transmission system and SECS-II which specifies the structure of the message content.

However, because the SECS-Ⅰ uses RS-232C as a communication protocol, it is difficult to transmit large messages due to the slow communication speed, and the distance between the equipment and the host computer must be close because only near field communication is possible. There was an inconvenience. In addition, it is difficult to connect new equipment additionally because the connection between the host computer and the equipment must be made 1: 1.

In this regard, SEMI established HSMS for applications where it is necessary to communicate at higher speed than SECS-I or insufficient for simple serial line, and is basically used where TCP / IP, a high-speed message transmission protocol, is used. It is a communication interface suitable for exchanging messages between computers in a semiconductor factory.

The function of HSMS is fast and large message can be transmitted because message transfer and data exchange are made by using TCP / IP, which is a communication method that configures LAN. In addition, it is possible to cut off the communication line without any additional device for blocking the communication network, to check the communication line to increase the connection density, and to reject the connection of incompatible equipment. In addition, depending on the basic functions of TCP / IP, the timeout function and the multiple access control function of the network can be exhibited.

However, even this useful HSMS is not necessary if the semiconductor equipment does not accept it. Moreover, since there is not a long time since the establishment of HSMS, there is not much equipment supporting HSMS in most production sites. It's working.

In addition, although the SECS protocol is used as a standard in the semiconductor manufacturing process, software is very expensive to apply to the film production line, and it is difficult to use, so that it is economical to develop a product based on SECS communication for equipment manufacturers. It is also a matter of fact that it is acting as a burden of personnel.

Moreover, semiconductor devices installed in most production sites are older devices driven through communication between PLC and touch panel, and these devices have a problem that it is impossible to network as well as SECS communication. There is a semiconductor device that is controlled by DOS-based computer instead of being driven by communication, but this also requires the upgrade of the DOS-based computer to the Windows environment because SECS communication must satisfy the Windows-based computer. .

The present invention has been made to solve the above problems, and provides a SECS (SEMI Equipment Communications Standard) controller and a semiconductor device networking system using the same to secure the universality of the equipment through a standardized communication protocol and to efficiently network the equipment. Its purpose is to.

Another object of the present invention is to network each device on the basis of SECS communication in a production site where a semiconductor device controlled by a computer in a window environment and a semiconductor device controlled by a computer in a DOS environment are mixed. Because there is no need to upgrade to an environment, it is to provide a SECS (SEMI) Equipment Communications Standard (SECS) controller and a semiconductor equipment networking system using the same, which can network all the equipments with minimum cost.

1 is a conceptual diagram for explaining the prior art

2 is a block diagram of a SECS controller according to an embodiment of the present invention;

3 to 4 is a conceptual diagram for explaining a connection state between the SECS controller and the semiconductor device of the present invention;

5 is a block diagram of a semiconductor device networking system using a SECS controller of the present invention.

* Description of the symbols for the main parts of the drawings *

21: Ethernet port 23: Serial port

25 control unit 27 memory unit

29: driver for serial communication 31: driver for Ethernet communication

33: expandable UART chip 35: media access controller

100: SECS controller 200: semiconductor equipment

300: host computer

SECS (SEMI Equipment Communications Standard) controller of the present invention for achieving the above object is a controller for supporting SECS communication between a semiconductor device having a plurality of serial communication devices or a semiconductor device controlled by a computer in a DOS environment and the host computer A control unit for controlling the overall operation of the controller, a memory unit for storing the various programs necessary for the operation of the controller and the state data according to the operation of the controller, and serial communication with each serial communication device under the control of the controller A plurality of serial communication drivers, an Ethernet communication driver which performs Ethernet communication with the host computer under the control of the controller, an extended UART chip which is in charge of the interface between the serial communication driver and the controller, the driver for Ethernet communication and the host Com It is characterized in that comprises a media access controller that controls communication between the Ethernet emitter.

Here, the driver for serial communication includes serial communication with a computer in the DOS environment.

The memory unit includes a booting program, a first memory storing data such as various programs and system information necessary for operating a SECS controller, and a Linux kernel program (LINUX Kernel program) providing basic services according to the operation of the SECS controller. A second memory, a third memory in which various programs and data loaded from the first and second memories are stored for driving the SECS controller, and a controller is operated when the SECS controller is powered off. It is preferable that the fourth memory including the fourth memory for storing the final data generated.

The serial communication apparatus includes a bar code reader including a PLC which is an equipment controller for controlling the overall operation of the semiconductor device and a touch panel which communicates with the PLC and inputs control information for controlling the semiconductor device. code reader), a camera, and a debugging computer that performs debugging such as program registration and error correction necessary for the operation of the SECS controller.

On the other hand, the semiconductor equipment networking system using a SECS (SEMI Equipment Communications Standard) controller of the present invention has a semiconductor device having a plurality of serial communication devices, and a plurality of serial ports and Ethernet ports, each semiconductor through the serial port A plurality of SECS controllers connected to the serial communication devices of the devices, a plurality of serial communication ports and Ethernet ports, and a plurality of SECSs corresponding to the semiconductor devices and connected to the serial communication devices of the semiconductor devices through the serial ports. A switching hub for performing Ethernet communication with a controller, the plurality of SECS controllers and for switching between each SECS controller and a host computer, and each semiconductor device for performing Ethernet communication with the switching hub and being transmitted from the SECS controller. Various wave conditions Collecting data related to the meter is characterized in that comprises a host computer that is databased.

Here, the SECS controller controls data transmission between serial communication devices connected to the serial port, collects data required for device control and management including operation states and process conditions of semiconductor devices, and transmits the data to the host computer. .

In addition, the semiconductor devices include equipment operated by a communication between a PLC and a touch panel and equipment operated by a computer in a DOS environment.

EXAMPLE

Hereinafter, a preferred embodiment of a SECS controller of the present invention and a semiconductor equipment networking system using the same will be described in detail with reference to the accompanying drawings.

2 is a block diagram illustrating a SECS controller according to an embodiment of the present invention.

As shown in the figure, the SECS controller 100 of the present invention can be connected to an Ethernet port (COM0) 21 that can be connected to a host computer via a LAN line, and a plurality of serial communication devices provided in semiconductor equipment. A plurality of serial ports (COM1 to COM6) 23, a controller 25 for controlling the overall operation of the controller, and a booting program to store various programs necessary for operating the controller, A memory unit 27 including a plurality of memories storing state data according to an operation, and a plurality of memories operating under the control of the controller 25 and transmitting and receiving data to and from a serial communication device connected through the serial port 23. Serial communication driver 29 for transmitting and receiving data to and from the host computer (not shown) connected through the Ethernet port 21 under the control of the serial communication driver 29 and the controller 25. It is configured to include a driver (31).

The SECS controller 100 as described above is connected to various serial communication devices constituting the semiconductor equipment through an RS-232C cable to perform serial communication with each other, and the host computer through an Ethernet port. Connected to perform Ethernet communication using TCP / IP protocol.

The serial communication device includes a bar code reader including a PLC, a so-called equipment controller for controlling the overall operation of semiconductor devices, and a touch panel for inputting control information for controlling semiconductor devices through communication with the PLC. code reader), a camera, and a debugging computer that performs debugging such as program registration and error correction necessary for the operation of the SECS controller, and these serial communication devices are provided in the SECS controller by RS-232C cables, respectively. Is connected to the serial port and performs serial communication with the SECS controller.

Here, when the semiconductor device is a device operating by communication between the PLC and the touch panel, the PLC and the touch panel are connected to the serial port of the SECS controller by an RS-232C cable, respectively, and the semiconductor device is connected to the DOS environment. In the case of computer-operated equipment, the computer in the DOS environment is connected to the serial port of the SECS controller by an RS-232C cable.

The memory unit 27 includes a booting program, a first memory 27a storing data such as various programs and system information necessary for operating a SECS controller, and a Linux kernel program (LINUX) that provides basic services according to the operation of a SECS controller. A second memory 27b in which a kernel program is stored, and a third memory 27c in which various programs and data loaded from the first and second memories 27a and 27b are stored for driving a SECS controller. And a fourth memory 27d in which final state data according to the operation of the controller is stored when the SECS controller is powered off. The first and second memories 27a and 27b may be flash memories. Flash memory), and the third memory 27c is preferably SDRAM, and the fourth memory 27d is preferably NVRAM.

For reference, the kernel program includes an interrupt function for processing all of the competitively demanding services of the kernel, such as a completed input / output operation, a schedule function for determining which programs share the processing time of the kernel, and in what order. It manages the address space of the operating system within other storage devices and has memory management that is divided evenly among all the peripherals and other users using kernel services.

The serial communication driver 29 is preferably an RS-232C driver, and serial communication devices connected through a serial port, for example, the aforementioned touch panel, a PLC which is an equipment controller, a barcode reader, a camera and a debugging computer. And serial communication driver 29 are configured as a card type in the SECS controller to expand up to 16. Thus, up to 16 serial communications can be made to one SECS controller. You can connect and use the device.

For reference, the debugging computer is a computer for debugging such as registering a program in the semiconductor device or correcting an error. When debugging is completed, the debugging computer disconnects from the SECS controller and connects to the SECS controller of another semiconductor device for debugging. Used.

In addition, the SECS controller 100 of the present invention further includes an extended UART chip 33 that is responsible for the interface between the plurality of serial communication drivers 29 and the control unit 25, and the driver 31 for Ethernet communication. And a media access controller (MAC) 35 for controlling Ethernet communication with the host computer.

In addition, although not shown in the figure, the SECS controller 100 of the present invention further includes an interrupt controller for determining the priority of communication in the communication between the SECS controller 100 and each serial communication device. And a decoder which decodes an output signal of the chip 33 and transfers the output signal to the bus 37, which is a data transmission path, and displays the operation state of the SECS controller 100 for the engineer to see. A part 39 is further provided.

In addition, the SECS controller 100 of the present invention calculates a time from a clock signal generated by a real time clock (RTC) 41 and displays the display even when the SECS controller is powered off. It is further provided with an RTC chip 43 adopting the I ² C communication method for controlling the display in real time to the unit.

In addition, the SECS controller 100 of the present invention may have a built-in switching hub (not shown), and in the case of embedding the switching hub, a plurality of semiconductor devices (actually, each semiconductor device) may be included in one SECS controller 100. Serial communication devices) to be connected to each other to enable networking by transmitting and receiving data between the semiconductor devices and the host computer.

SECS controller 100 of the present invention configured as described above is a semiconductor device is a device that is operated by a computer in the DOS environment, installed between the computer and equipment in the DOS environment serial used for the computer and RS-232C cable of the DOS environment Based on SECS communication by controlling the data transmitted to the equipment through communication and collecting data related to various parameters such as the operation status and process conditions of the semiconductor equipment and transmitting it to the host computer connected to the Ethernet port 21 Through the construction of the network, it is possible to centralize management of semiconductor equipment.

In addition, the SECS controller 100 of the present invention, when the semiconductor device is a device operating by the communication between the PLC and the touch panel, by connecting the PLC and the touch panel to the serial port with RS-232C cable, respectively, each serial port (23) control the data input from the touch panel and the PLC and transmit it to the touch panel and the PLC, and at the same time to collect data related to various parameters such as the operation status and process conditions of the semiconductor equipment and the Ethernet port (21 The centralized management of semiconductor equipment is possible through the construction of a network based on SECS communication by transmitting to the host computer connected to the network.

Therefore, using the SECS controller 100 of the present invention as described above, even if the equipment is operated by the various types of equipment installed in the production site, for example, the PLC and the touch panel described in the previous example, SECS communication There is no need to modify the device additionally, and even if the device is operated by a computer in the DOS environment, the computer in the DOS environment does not need to be replaced with the computer in the Windows environment for SECS communication. It is possible to realize the networking of semiconductor devices through SECS communication without the hassle of upgrading.

For reference, the semiconductor devices mentioned in the present invention may be wire bonding, die bonding, sawing, cleaning, deposition, etching, molding, or the like. In general, it is obvious that the semiconductor equipment for each process performed in the semiconductor manufacturing process.

Meanwhile, FIGS. 3A to 3B are diagrams illustrating a form in which the SECS controller of the present invention is installed in a semiconductor device operating by communication between a PLC and a touch panel, and FIG. 3A shows that the SECS controller of the present invention is connected to the semiconductor device 200. 3B is a case where the SECS controller is separated from the semiconductor equipment and fixed to a specific part.

Therefore, in the structure as shown in FIG. 3A, a serial communication device such as a PLC 51a and a touch panel 51b, a barcode reader 51c, and a camera 51d in the semiconductor device is connected to the serial of the SECS controller by an RS-232C cable. A plurality of serial ports and the host computer to be connected to the ports COM1 to COM6 and to be connected to a debugging computer 53 or other serial communication equipment that may be used according to a situation. Ethernet port COM0 for connection with 300 is exposed.

For reference, in the drawing, two debugging computers are connected to the SECS controller 100. Actually, in a manufacturing site, debugging is performed using one computer. However, as shown in the drawing, an extra debugging computer is connected to the serial port. Can also be used in conjunction with

On the other hand, Figure 4 is a diagram illustrating the installation of the SECS controller 100 of the present invention in a semiconductor device operated by a computer 61 in a DOS environment, unlike Figures 3a to 3b there is no PLC and touch panel. Instead, it can be seen that the computer 61 in the DOS environment controlling the semiconductor equipment is connected to the serial port of the SECS controller by an RS-232C cable.

In the above, the connection state between one semiconductor device and the SECS controller of the present invention has been described, but in the following, a networking system in which all the devices mentioned in the previous example, which are scattered in a production site, is integrated into one network will be described. do.

5 illustrates a networking system between semiconductor devices using the SECS controller of the present invention. The networking system of the semiconductor device using the SECS controller of the present invention includes a plurality of semiconductor devices 200, Ethernet ports, and a plurality of serial communications. A plurality of SECS controllers 100 corresponding to respective semiconductor devices 200 and connected to serial communication devices of the semiconductor devices 200 through the serial ports, and the plurality of SECS controllers 100. And a switching hub 71 that performs Ethernet communication with each other and performs switching between each SECS controller 100 and the host computer 300, and performs Ethernet communication with the switching hub 71 and is transmitted from the SECS controller. Host computer that collects and databases data related to various parameters such as operation status and process condition of each semiconductor device 200 ( 300).

As described above, each semiconductor device is connected to the SECS controller, and the SECS controller 100 is connected to the host computer 300 through the switching hub 71, thereby connecting the host computer 300 with each SECS controller 100. Through Ethernet communication, it is possible to collect various parameters related to the operation status and process conditions of each equipment, and to database them.

That is, by connecting each of the semiconductor device 200 to the serial port (Serial port) of the SECS controller 100, each SECS controller 100 is connected to the host computer 300 through the switching hub 71, The host computer 300 may transmit data related to the operation status and process conditions of each semiconductor device 200 such as whether each semiconductor device 200 is defective, a defect factor, a defective location, a yield, and a workload. It can be received from 100 and databased.

For reference, since the semiconductor device operated by the communication between the PLC and the touch panel and the semiconductor device operated by the computer in the DOS environment exist in a mixed state, the SECS controller 100 is connected to the semiconductor device. In the former case, serial communication devices such as a PLC and a touch panel, a camera, a barcode reader, and the like are connected to the serial port of the SECS controller, and in the latter case, a computer in a DOS environment is connected to the serial port of the SECS controller.

Therefore, all semiconductor devices can be networked using SECS controller regardless of the manufacturer or communication environment of semiconductor devices, so that all devices can be controlled from the host computer and the status of each device can be managed by database.

Although preferred embodiments of the present invention have been described above, it is clear that the present invention can use various changes, modifications, and equivalents, and that the above embodiments can be appropriately modified and applied in the same manner. Accordingly, the above description does not limit the scope of the invention as defined by the limitations of the following claims.

As described above, the SECS controller of the present invention and the semiconductor device networking system using the same have the following effects.

First, it is possible to efficiently network all semiconductor devices by securing universality of equipment through standardized communication protocol.

Second, there is no need to replace or modify existing semiconductor equipment for SECS communication-based networking, so centralized management by host computer is possible at low cost.

Third, even if the equipment is driven by the communication between the PLC and the touch panel, the PLC and the touch panel can be connected to the SECS controller that performs Ethernet communication with the host computer, so that the SECS communication-based network can be more easily constructed. Even semiconductor devices operated by a computer can be networked based on SECS communication more efficiently without the hassle of replacing the DOS-based computer with a computer in a Windows environment or at least upgrading to a Windows environment.

Claims (7)

A controller for supporting SECS communication between a semiconductor device having a plurality of serial communication devices or a semiconductor device controlled by a computer in a DOS environment and a host computer, A controller for controlling the overall operation of the controller; A memory unit for storing various programs necessary for operating the controller and storing state data according to the operation of the controller; A plurality of serial communication drivers for serial communication with each serial communication device under control of the controller; A driver for Ethernet communication performing Ethernet communication with the host computer under the control of the controller; An extended UART chip that interfaces with the serial communication driver and the controller; And a media access controller for controlling Ethernet communication between the driver for Ethernet communication and the host computer. The method of claim 1, wherein the serial communication driver, And serial communication with a computer in the DOS environment. The method of claim 1, wherein the memory unit, A first memory in which data such as a booting program and various programs and system information necessary for operating a SECS controller are stored; A second memory in which a Linux kernel program (LINUX Kernel program) providing basic services according to the operation of the SECS controller is stored; A third memory in which various programs and data loaded from the first and second memories are stored for driving the SECS controller; And a fourth memory configured to store final data generated as the controller operates when the SECS controller is powered off. The method of claim 1, wherein the serial communication device, Bar code reader and camera, including PLC which is an equipment controller for controlling the overall operation of the semiconductor equipment, and a touch panel which communicates with the PLC and inputs control information for controlling the semiconductor equipment. And a debugging computer that performs debugging such as program registration, error correction, and the like necessary for the operation of the SECS controller. Semiconductor devices having a plurality of serial communication devices; A plurality of SECS controllers having a plurality of serial ports and an Ethernet port and connected to serial communication devices of respective semiconductor devices through the serial ports; A switching hub for performing Ethernet communication with the plurality of SECS controllers and for switching between each SECS controller and a host computer; SECS controller comprising the host computer to perform Ethernet communication with the switching hub and collect and database data related to various parameters such as operation status and process conditions of each semiconductor device transmitted from the SECS controller. Semiconductor equipment networking system using. The method of claim 5, wherein the SECS controller, It controls the data transmission between the serial communication devices connected through the serial port, and collects the data required for the equipment control and management, including the operation status and process conditions of each semiconductor device to transmit to the host computer Semiconductor equipment networking system using SECS controller. The method of claim 5, wherein the semiconductor devices, A semiconductor device networking system using a SECS controller comprising a device operating by communication between a PLC and a touch panel, and a device operating by a computer in a DOS environment.