KR20040063326A - Shadow Mask temperature control system by Peltier effect - Google Patents

Abstract

PURPOSE: A temperature control unit of a shadow mask using a Peltier effect and a method for controlling the same are provided to cool effectively a local area by selecting a cooling method using the Peltier effect. CONSTITUTION: A temperature control unit of a shadow mask using a Peltier effect includes a main power supply, a cooling module, a shadow mask holder, and a sink tank. The main power supply is used for supplying the power to the cooling module. The cooling module is used for receiving the power from the power supply by using the Peltier effect. The shadow mask holder is close to one side of the cooling module. The sink tank is used for removing the heat from the cooling module.

Description

Shadow mask temperature control system by Peltier effect

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shadow mask temperature control apparatus using the Peltier effect, and more particularly, to removing a thermal deformation by maintaining a shadow mask at a predetermined temperature, which is essential for fabricating a full color organic light emitting display device.

With the development of information and communication technology, the demand for electronic displays is increasing according to the needs of diversified information society, and the required displays are also diversifying. In order to satisfy the demands of the diversified information society, electronic display devices are required to have characteristics such as high definition, large size, low price, high performance, thinness, and miniaturization. To this end, existing cathode ray tubes In addition to Ray Tube (CRT), new flat panel display (FPD) devices are being developed.

One such flat panel display is an electroluminescent display. ELDs are classified into organic electroluminescent displays and inorganic electroluminescent displays according to the type of material used as the light emitting layer.

An inorganic electroluminescent display device emits light by collision of electrons accelerated by a high electric field, and according to the thickness and driving method of the thin film, an AC thin film electroluminescence display device, an AC thick film electroluminescence display device, and a DC thick film electroluminescence And display elements.

The organic light emitting display device emits light by the flow of electric current, and is classified into a low molecular weight organic light emitting display device and a high molecular weight organic light emitting display device according to the classification of organic materials as light emitting layers.

1 is a schematic diagram illustrating a conventional organic light emitting display device. Referring to FIG. 1, the organic light emitting display device forms a transparent anode layer 12 on a transparent substrate 11 by wiring, and uses a negative type organic photosensitive film for cathode patterning. (13) a hole injection layer 14, a hole transport layer 15, an organic emitting layer 16, an electron transport layer, and the like. 17) and the cathode layer 18 are sequentially stacked, and the cathode and cathode lines are short-circuited by a preformed partition wall, and a current flow selectively applied through the anode and cathode lines It is a principle that the organic electroluminescent layer 16 emits light. In this case, the hole injection layer 14, the hole transport layer 15, and the electron transport layer 17 have an auxiliary function of increasing the luminous efficiency of the organic light emitting display device.

An essential step in the manufacture of such an organic light emitting device is a vacuum deposition process of an organic thin film using a shadow mask. Various methods such as evaporation and e-beam are used for vacuum thin film deposition process, and evaporation method is mainly used.

In the vacuum thin film deposition process, the material is heated to a high temperature to be deposited, and thus the temperature of the shadow mask is increased while the material of the high temperature adheres to the shadow mask. In particular, when the cathode layer is deposited, the melting point of the cathode material increases, which greatly increases the temperature of the shadow mask.

This increase in temperature causes thermal deformation of the shadow mask, which causes the organic ELD device characteristics to be greatly deteriorated, such as causing deposition misses of R, G, and B organic materials when producing full color organic ELD devices.

Accordingly, the present invention is to solve the above-mentioned disadvantages and problems of the prior art, the thermal deformation of the shadow mask due to the temperature rise of the shadow mask generated during the vacuum thin film deposition process used in the manufacture of the organic electroluminescent device An object of the present invention is to propose a method of maintaining the temperature of a shadow mask in a certain temperature range by contacting the shadow mask with an electronic cooling device using the Peltier effect and adjusting the voltage applied to the electronic cooling device.

1 is a schematic diagram illustrating a conventional organic light emitting display device.

2 is a view for explaining the Peltier effect.

3 is a cross-sectional view of the shadow mask to which the Peltier effect according to the present invention is applied.

<Description of Reference Numbers for Main Parts of Drawings>

11: transparent substrate 12: transparent conductive electrode layer

13: partition wall 14: hole injection layer

15: hole import layer 16: organic electroluminescent layer

17: electron transport layer 18: cathode layer

The above object of the present invention is achieved by a shadow mask temperature control device using a Peltier effect consisting of a shadow mask, a shadow mask holder, an electronic cooling module, a DC power supply, a heat sink.

The present invention controls the temperature of the shadow mask by attaching an electronic cooling device using the Peltier effect to the shadow mask holder in order to eliminate the temperature rise of the shadow mask used for fabricating the organic EL device. The configuration consists of a shadow mask, shadow mask holder, electronic cooling module, DC power supply, and heat sink.

The Peltier effect is a French watchmaker and later physicist JeanCharles Athanase Peltier who discovered and summarized the phenomenon of temperature differences on both sides of two different metals when they were energized by two different metals.

This is a phenomenon in which heat and cooling occur simultaneously in two different cross-sections of a metal when an electrical load is applied to two different cross-section metals.

* π = αab * Tj * I = Peltier coefficient.

* I = current.

* Qp = absolute value of calories generated in unit time.

* a-ab = relative thermoelectricity in a, b gold according to ambient temperature.

After all, the Peltier effect is the release and absorption of heat that occurs when a current flows through a junction between two different materials. When current flows in a circuit including a collection of different materials, heat may be transferred from the low temperature portion to the high temperature portion by the Peltier effect.

An object of the present invention is to adjust the temperature of the shadow mask by applying the electronic cooling device using the Peltier effect to the shadow mask.

Details of the above object and technical configuration of the present invention and the effects thereof according to the present invention will be more clearly understood by the following detailed description with reference to the accompanying drawings.

2 is a view for explaining the Peltier effect.

When the DC power is delivered to the cooling module by the power supply, Peltier effect occurs by cooling one side and heating the other side through P and N type thermoelectric semiconductors connected in series.

3 is a cross-sectional view of the shadow mask to which the Peltier effect is applied.

The shadow mask electronic cooling device using the Peltier effect consists of a shadow mask, a shadow mask holder, an electronic cooling module, a DC power supply, a heat sink, and the like. It is attached so that the shadow of the shadow mask holder made of Al and the cooling part of the electronic cooling module are in contact with each other.

The configuration is described in detail as follows.

A DC power supply for supplying power to the cooling module, a fixed connection terminal for transmitting power from the DC power supply, a rotary contact connected to the fixed connection terminal for rotating the thin film deposition, and a contact with the rotary contact A rotary connection terminal, a cooling module using the Peltier effect supplied with power from the rotary connection terminal, a shadow mask holder in contact with one side of the cooling module, and a sink in contact with the other side of the cooling module and removing heat radiated from the cooling module. It consists of a tank.

The apparatus configured as described above may be configured to supply power to a cooling module by a power supply device, to cool down a mask holder and a mask in which a cooling module supplied with power from the power supply device contacts one side by a Peltier effect, Heat dissipation in the other direction and removing heat dissipated from the cooling module by using a think tank.

By the Peltier effect, the cooling module cools the part which contacts the mask and the mask holder, and the cooled heat dissipates to the opposite part. To remove this heat dissipation, a heat sink can be connected to dissipate to the outside.

Since the mask is rotated during the thin film deposition process to improve the characteristics of the organic thin film, a rotary contact is applied to the connection terminal of the external DC power supply.

The electronic cooling module is driven by a DC voltage, so a power supply is required for applying the DC voltage. Since the shadow mask must rotate during thin film deposition, the power supply is designed so that the external power and cooling modules are contacted by the rotating contacts.

The organic EL device may be manufactured by using the shadow mask temperature control apparatus using the Peltier effect manufactured as described above.

Therefore, the shadow mask temperature control apparatus using the Peltier effect of the present invention cools the shadow mask and the mask holder in order to eliminate the deterioration of the characteristics of the organic ELD device due to thermal deformation of the shadow mask in the vacuum thin film deposition process, which is essential for the fabrication of the organic light emitting device. By applying the cooling module applying the Peltier effect to the cooling method, it is possible to effectively cool the local area and to apply the rotating shadow mask method that is difficult to apply in the conventional cooling water method.

Such cooling of the shadow mask has a great effect on improving the deposition alignment of the R, G, and B organic materials when the full color organic ELD is manufactured by removing the thermal deformation of the mask.

Claims (6)

In the device for preventing the temperature rise of the shadow mask generated during the vacuum thin film deposition process used in the manufacture of the organic electroluminescent device, A power supply for supplying power to the cooling module; Cooling module using the Peltier effect receives power from the power supply; A shadow mask holder in contact with one side of the cooling module; And A think tank that contacts the other side of the cooling module and removes heat radiated from the cooling module. Shadow mask temperature control device using a Peltier effect, characterized in that it comprises a. The apparatus of claim 1, wherein the power supply includes: a fixed connection terminal for transmitting power; A rotary contact connected to the fixed connection terminal to rotate when the thin film is deposited; And A rotary connection terminal in contact with the rotary contact Shadow mask temperature control device using a Peltier effect, characterized in that it comprises a. The shadow mask temperature control apparatus of claim 1 or 2, wherein the external power source of the power supply device is in contact with the cooling module by a rotation contact. In the method for preventing the temperature rise of the shadow mask generated during the vacuum thin film deposition process used in the manufacture of the organic electroluminescent device, Supplying power to the cooling module by a power supply; Cooling the mask holder and the mask which are in contact with one side by a Peltier effect by the cooling module supplied with power from the power supply device, and dissipating heat in the other direction; And Removing heat dissipated from the cooling module using a think tank Shadow mask temperature control method using a Peltier effect, characterized in that it comprises a. The method of claim 4, wherein the external power source of the power supply device is in contact with the cooling module by a rotation contact. An organic EL device produced using the device manufactured by the method of claim 4.