KR200342433Y1 - Crucible for deposting organic matter of high pressure spouting type - Google Patents
Crucible for deposting organic matter of high pressure spouting type Download PDFInfo
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- KR200342433Y1 KR200342433Y1 KR20-2003-0037891U KR20030037891U KR200342433Y1 KR 200342433 Y1 KR200342433 Y1 KR 200342433Y1 KR 20030037891 U KR20030037891 U KR 20030037891U KR 200342433 Y1 KR200342433 Y1 KR 200342433Y1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
본 고안은 고압용 유기물증착용 도가니를 개시한다. 개시된 고안은, 분말 유기물 증착시에 사용되는 도가니에 있어서, 내부에 분말용 유기물이 들어 있는 도가니; 및 상기 도가니의 상면에 덮여져 도가니내부를 밀폐시키고 기화되는 유기물 입자가 통과할 수 있도록 분사구멍이 형성된 덮개부;를 포함하여 구성되어, 유기물 진공증착시에 급격한 온도변화에 의해 유기물 입자가 튀어 증착되는 것을 줄일 수 있어 불량화소가 발생되는 현상을 줄일 수 있는 것이다.The present invention discloses a crucible for vapor deposition of high pressure organic material. Disclosed is a crucible for use in depositing powdered organic materials, comprising: a crucible having an organic material for powder therein; And a cover part covering the upper surface of the crucible to seal the inside of the crucible and having an injection hole formed therein so that the vaporized organic particles can pass therethrough, wherein the organic particles are splashed by a sudden temperature change during the vacuum deposition of the organic material. It can reduce the occurrence of defective pixels can be reduced.
Description
본 고안은 고압 분사형 유기물 증착 도가니에 관한 것으로서, 보다 상세하게는 유기물을 이용하여 유기 EL 패널 제작시에 유기물 진공증착을 위해 유기물을 담아 두는 도가니(crucible)의 형태로 밀폐형으로 제작하여 가열시 고온 고압으로 유기물을 완전기화한후 증착하도록한 고압 분사형 유기물 증착 도가니에 관한 것이다.The present invention relates to a high pressure spray type organic material deposition crucible, and more particularly, to produce an airtight type in the form of a crucible containing organic materials for vacuum deposition of organic materials during organic EL panel fabrication using organic materials at high temperature and high pressure when heated. The present invention relates to a high-pressure spraying organic material deposition crucible for vaporizing the organic material after completely vaporizing it.
종래의 분말 유기물 증착용 도가니(11)는, 도 1에서와 같이, 뚜껑없이 단지 도가니(11)를 가열하여 적정 온도에 도달하면 도가니(11)내에 들어 있는 유기물(13)이 고온에서 기화하는 현상을 이용하여 패널(21)에 증착(25)하도록 구성되어 있다.In the conventional crucible 11 for powder organic matter deposition, as shown in FIG. 1, the organic material 13 contained in the crucible 11 vaporizes at a high temperature when only the crucible 11 is heated without reaching a suitable temperature. It is configured to deposit 25 on the panel 21 by using.
이러한 종래의 유기물 증착용 도가니를 이용하는 경우, 유기물 도가니(11)의 가열시에 온도조절이 쉽지 않기 때문에 이에 따라 분말 유기물(23)이 튀어 올라 유기 EL 패널(21)에 영향을 주는 경우가 발생하여 작은 입자가 패널에 붙어 유기 EL의 줄빠짐 현상(cross defect, line defect)이나 다크지점(dark spot)을 일으키는 요인이 된다.In the case of using such a conventional organic material deposition crucible, since the temperature control is not easy when the organic material crucible 11 is heated, there is a case where the powder organic material 23 springs up and thus affects the organic EL panel 21. Small particles adhere to the panel, causing cross defects (line defects) and dark spots of the organic EL.
또한, 유기물이 기화할 때를 기다려 적정비율의 증착속도가 될 때까지 셔터(shutter)을 닫아 두어 먼저 기화된 유기물이 패널이 닿지 않도록 막아 둠으로써 유기물을 낭비하는 경우가 발생한다.In addition, the organic material may be wasted by waiting for the time when the organic material evaporates and closing the shutter until the deposition rate at an appropriate ratio, thereby preventing the vaporized organic material from touching the panel.
이에 본 고안은 상기 종래기술의 제반 문제점을 해결하기 위하여 안출한 것으로서, 유기물 진공증착시에 급격한 온도변화에 의해 유기물 입자가 튀어 증착되는 것을 줄일 수 있어 불량화소가 발생되는 현상을 줄일 수 있는 유기물 진공 증착용 도가니를 제공함에 그 목적이 있다.Therefore, the present invention has been devised to solve all the problems of the prior art, the organic vacuum can reduce the phenomenon that the defective pixels are generated by reducing the deposition of organic particles by a sudden temperature change during the vacuum deposition of organic matter The purpose is to provide a crucible for deposition.
도 1는 종래기술에 따른 유기물 도가니의 개략도,1 is a schematic view of an organic crucible according to the prior art,
도 2는 본 고안의 일실시예에 따른 고압 분사형 유기물 증착 도가니의 기본 제작물을 도시한 개략도로서, (a)는 도가니와 덮개의 분해 사시도이고, (b)는 덮개부의 분사구멍을 확대도시한 사시도,Figure 2 is a schematic diagram showing the basic fabrication of the high-pressure spraying organic vapor deposition crucible according to an embodiment of the present invention, (a) is an exploded perspective view of the crucible and the cover, (b) is an enlarged perspective view showing the injection hole of the cover ,
도 3은 본 고안의 다른 실시예에 따른 밀폐형 도가니의 사시도,3 is a perspective view of a hermetic crucible according to another embodiment of the present invention,
도 4는 본 고안의 또 다른 실시예에 따른 도가니로서, 그물형태의 도가니 덮개를 구비한 도가니의 사시도,Figure 4 is a crucible according to another embodiment of the present invention, a perspective view of the crucible having a crucible cover of the net form,
도 5는 본 고안의 또 다른 실시예에 따른 도가니로서, 십자 형태의 구멍이 형성된 덮개를 구비한 도가니의 사시도,Figure 5 is a crucible according to another embodiment of the present invention, a perspective view of the crucible having a lid formed with a cross-shaped hole,
도 6은 본 고안의 또 다른 실시예에 따른 도가니로서, 방사형태의 구멍이 형성된 덮개를 구비한 도가니의 사시도.Figure 6 is a crucible according to another embodiment of the present invention, a perspective view of the crucible having a cover with a radial hole formed.
[도면부호의설명][Description of Drawing Reference]
31, 41, 51, 61, 71 : 도가니 33, 43, 53, 63, 73 : 덮개부31, 41, 51, 61, 71: crucible 33, 43, 53, 63, 73: cover
37, 47, 57, 67, 77 : 분사구멍37, 47, 57, 67, 77: injection hole
상기 목적을 달성하기 위한 본 고안에 따른 유기물 진공 증착용 도가니는,Crucibles for organic vacuum deposition according to the present invention for achieving the above object,
분말 유기물 증착시에 사용되는 도가니에 있어서,In the crucible used for the deposition of powder organic matter,
내부에 분말용 유기물이 들어 있는 도가니; 및A crucible containing an organic substance for powder therein; And
상기 도가니의 상면에 덮여져 도가니내부를 밀폐시키고 기화되는 유기물입자가 통과할 수 있도록 분사구멍이 형성된 덮개부;를 포함하여 구성되는 것을 특징으로한다.And a cover part covering the upper surface of the crucible to seal the inside of the crucible and having an injection hole formed therein so that the organic material particles to be vaporized can pass therethrough.
(실시예)(Example)
이하, 본 고안에 따른 유기물 진공 증착용 도가니의 바람직한 실시예에 대해 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, with reference to the accompanying drawings for a preferred embodiment of the crucible for organic vacuum deposition according to the present invention will be described in detail.
도 2는 본 고안의 일실시예에 따른 고압 분사형 유기물 증착 도가니의 기본 제작물을 도시한 개략도로서, (a)는 도가니와 덮개의 분해 사시도이고, (b)는 덮개부의 분사구멍을 확대도시한 사시도이다.Figure 2 is a schematic diagram showing the basic fabrication of the high-pressure spraying organic vapor deposition crucible according to an embodiment of the present invention, (a) is an exploded perspective view of the crucible and the cover, (b) is an enlarged perspective view showing the injection hole of the cover to be.
도 3은 본 고안의 다른 실시예에 따른 밀폐형 도가니의 사시도이다.3 is a perspective view of a hermetically sealed crucible according to another embodiment of the present invention.
본 고안의 일실시예에 따른 고압 분사형 유기물 증착 도가니는, 유기물 증착시 고온고압을 이용하여 유기물을 완전히 기화하여 증착할 수 있도록 제작한 밀폐형 도가니이다. 도가니는 고온고압에 견딜 수 있는 재질로 하여 제작한다.The high pressure spraying organic material deposition crucible according to the embodiment of the present invention is a hermetically sealed crucible manufactured so that the organic material can be completely vaporized and deposited using high temperature and high pressure during organic material deposition. Crucibles are made of materials that can withstand high temperatures and pressures.
본 고안에 따른 밀폐형 도가니는, 도 2에 도시된 바와같이, 도가니부(31)와 상기 도가니부(31)상면에 장착되는 덮개부(33)로 구성되고, 이들 도가니부(31)와 덮개부(33)를 고정할 수 있도록 연결고리(미도시)가 설치되어 있다.As shown in FIG. 2, the hermetically sealed crucible is composed of a crucible part 31 and a lid part 33 mounted on an upper surface of the crucible part 31, and the crucible part 31 and the lid part thereof. A connecting ring (not shown) is provided to fix the 33.
또한, 상기 덮개부(33)의 중앙(35)에는 기화된 유기물을 분사할 수 있도록 분사구멍(37)이 다수 형성되어 있다. 여기서, 가열하는 동안에는 분사구멍(37)을 막아 압력을 유지해야 하므로 분사구멍(37)을 막는 별도의 덮개(미도시)가 필요하다. 또한, 유기물 분사구멍(37)의 크기는 유기물에 따라 다르게 제작할 수 있다. 그리고, 분사구멍의 덮개는 열고 닫기가 쉽게 제작하되, 기체가 새어 나오지 않게 제작한다.In addition, a plurality of injection holes 37 are formed in the center 35 of the cover part 33 so as to spray vaporized organic substances. Here, a separate cover (not shown) that blocks the injection hole 37 is required because the pressure must be maintained by blocking the injection hole 37 during heating. In addition, the size of the organic material injection hole 37 may be manufactured differently depending on the organic material. And, the cover of the injection hole is made easy to open and close, but not to leak the gas is produced.
그리고, 상기 덮개부(33) 또는 외부 연결창(미도시)에는 도가니(31)내부의 온도와 압력을 측정할 수 있도록 압력 및 온도측정기(미도시)가 구비되어 있다.In addition, the cover part 33 or the external connection window (not shown) is provided with a pressure and temperature measuring instrument (not shown) to measure the temperature and pressure inside the crucible 31.
한편, 본 고안의 다른 실시예인 도 3에서와 같이 도가니(41)외주면에 도가니 부분을 가열할 수 있도록 열선(43)을 감아 사용하거나, 기존의 방법과 같이 도가니를 히터에 담아 가열하는 방법을 사용할 수 있다.Meanwhile, as shown in FIG. 3, which is another embodiment of the present invention, the heating wire 43 may be wound around the crucible 41 to circumscribe the outer surface of the crucible 41, or the method of heating the crucible into a heater as in the conventional method may be used. Can be.
이러한 고압분사 도가니를 이용한 증착방법에 대해 도 2를 참조하여 설명하면 다음과 같다.The deposition method using the high-pressure spray crucible will be described with reference to FIG. 2.
먼저 외부와의 기체 출입이 없도록 도가니 뚜껑을 덮은 후 가열하면 도가니 내부의 온도와 압력이 상승한다.First, cover the crucible with a lid to prevent gas from entering the outside, and when heated, the temperature and pressure inside the crucible increase.
이렇게 외부의 온도, 압력 게이지(gauge)를 통하여 도가니내부의 온도와 압력이 일정 수준에 도달하면 도가니 덮개부(33)의 분사구멍(37)을 개방한다. 이때, 고압분사 도가니를 이용한 유기물 증착비율은 여러 차례의 실험을 통하여 각 온도와 압력 별로 수치로 나타낼 수 있다.When the temperature and pressure inside the crucible reach a predetermined level through the external temperature and pressure gauge, the injection hole 37 of the crucible cover part 33 is opened. In this case, the deposition rate of the organic material using the high-pressure spray crucible can be represented numerically for each temperature and pressure through several experiments.
이렇게 분사된 유기물은 충분히 기화하여 증착되므로 분말가루 또는 유기물 덩어리들이 튀어 오르거나 날려 기판에 묻어 유기 EL 소자를 손상시키는 경우를 크게 줄일 수 있다.Since the sprayed organic substance is sufficiently vaporized and deposited, it is possible to greatly reduce the case of powder powder or organic substance splashing or blowing and buried on the substrate to damage the organic EL element.
또한, 별도의 셔터가 필요없어 셔터에 묻어 버리게 되는 유기물의 양도 크게 줄일 수 있다.In addition, the amount of organic matter buried in the shutter can be greatly reduced because a separate shutter is not required.
또한편, 본 고안의 또다른 실시예에 따른 증착용 도가니에 대해 첨부된 도면을 참조하여 설명하면 다음과 같다.In addition, with reference to the accompanying drawings for the deposition crucible according to another embodiment of the present invention as follows.
도 4는 본 고안의 또 다른 실시예에 따른 도가니로서, 그물형태의 도가니 덮개를 구비한 도가니의 사시도이다.Figure 4 is a crucible according to another embodiment of the present invention, a perspective view of the crucible having a crucible cover of the net form.
도 5는 본 고안의 또 다른 실시예에 따른 도가니로서, 십자 형태의 구멍이 형성된 덮개를 구비한 도가니의 사시도이다.5 is a crucible according to another embodiment of the present invention, which is a perspective view of a crucible having a lid having a cross-shaped hole formed therein.
도 6은 본 고안의 또 다른 실시예에 따른 도가니로서, 방사형태의 구멍이 형성된 덮개를 구비한 도가니의 사시도이다.6 is a perspective view of a crucible having a lid having a radial hole formed therein according to another embodiment of the present invention.
본 고안의 또다른 실시예에 따른 도가니는, 유기물 입자의 튐을 막을 수 있는 가림막을 더해 주는 구조로 이루어져 있다. 여기서, 상기 가림막은 기화된 유기물 기체의 진행을 막아서는 안되는 구조로 구성되어 있다.The crucible according to another embodiment of the present invention is made of a structure that adds a shielding film that can prevent the particles of organic matter. Here, the shielding film has a structure that should not prevent the progress of vaporized organic gas.
도 4에 도시된 본 고안의 또다른 실시예에 따른 유기물 증착용 도가니에 의하면, 도가니(51)상면에 도가니 내부에 들어 있는 유기물(53) 기체가 충분히 통과할 수 있도록 그물 형태의 덮개(55)가 배치되어 있다. 여기서, 상기 그물 형태의 덮개(55)는 도가니 제작시에 분리될 수도 있고, 분리되지 않게 제작할 수도 있다. 또한, 상기 그물간의 간격은 유기물에 따라 수 nm ∼ 수 μm 또는 그 이상일 수도 있다.According to the crucible for organic material deposition according to another embodiment of the present invention shown in Figure 4, the cover 55 in the form of a net so that the organic material 53 gas contained in the crucible enough to pass through the upper surface of the crucible 51 Is arranged. Here, the net cover 55 may be separated at the time of manufacturing the crucible, or may be manufactured not to be separated. Further, the spacing between the nets may be several nm to several μm or more depending on the organic material.
또한, 도 5에 도시된 본 고안의 또다른 실시예에 따른 유기물 증착용 도가니에 의하면, 도가니(61)상면에 도가니 내부에 들어 있는 분말 형태의 유기물(63)이 기화되어 충분히 통과할 수 있도록 덮개(65)의 분사구멍(67)이 한 방향으로 한 라인 또는 여러 라인으로 형성되도록 제작할 수도 있고, 십자형으로도 제작할 수가 있다.In addition, according to the crucible for organic material deposition according to another embodiment of the present invention shown in Figure 5, the cover to allow the organic material 63 in the form of powder contained in the crucible on the upper surface of the crucible 61 to pass through sufficiently The injection hole 67 of 65 may be manufactured so that it may be formed in one line or several lines in one direction, and can also be made crosswise.
그리고, 도 6에 도시된 본 고안의 또다른 실시예에 따른 유기물 증착용 도가니에 의하면, 도가니(71)상면에 도가니 내부에 들어 있는 분말 형태의 유기물(73)이 기화되어 충분히 통과할 수 있도록 덮개(75)의 선형 분사구멍(77)이 방사 형태로 제작할 수도 있다. 여기서, 선형 분사구멍(77)의 개수는 유기물에 따라 다르게 형성할 수도 있고 그 크기 또한 다르게 형성할 수가 있다.And, according to the crucible for the organic material deposition according to another embodiment of the present invention shown in Figure 6, the lid so that the organic material 73 in the form of powder contained in the crucible on the upper surface of the crucible 71 is sufficiently passed through The linear injection holes 77 of 75 may be manufactured in a radial form. Here, the number of the linear injection holes 77 may be formed differently depending on the organic material and the size may be formed differently.
상기에서 설명한 바와같이, 본 고안에 따른 고압 분사용 유기물 증착 도가니에 의하면, 분사된 유기물이 충분히 기화하여 증착되므로 분말가루 또는 유기물 덩어리들이 튀어 오르거나 날려 기판에 묻어 유기 EL 소자를 손상시키는 경우를 크게 줄일 수 있다.As described above, according to the organic vapor deposition crucible for high-pressure injection according to the present invention, since the sprayed organic material is deposited by vaporization sufficiently, powder powder or agglomerates of organic matter may be splashed or blown onto the substrate to damage the organic EL device. Can be reduced.
또한, 별도의 셔터가 필요없어 셔터에 묻어 버리게 되는 유기물의 양도 크게 줄일 수 있다.In addition, the amount of organic matter buried in the shutter can be greatly reduced because a separate shutter is not required.
한편, 유기물 증착 공정시에 유기물 입자의 튐현상을 줄여 패널위에 유기물 입자가 붙어 불량 화소가 발생하는 현상을 줄일 수 있다.In the meantime, the organic particles are stuck on the panel by reducing the phenomenon of organic particles during the organic deposition process, thereby reducing a phenomenon in which defective pixels are generated.
한편, 본 고안은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 고안의 요지를 벗어남이 없이 당해 고안이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능할 것이다.On the other hand, the present invention is not limited to the above-described specific preferred embodiment, any person having ordinary knowledge in the field to which the present invention belongs without departing from the gist of the present invention claimed in the claims can be variously modified. will be.
Claims (6)
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