KR200314117Y1 - Multistage control type slow shut check valve - Google Patents
Multistage control type slow shut check valve Download PDFInfo
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- KR200314117Y1 KR200314117Y1 KR20-2003-0003343U KR20030003343U KR200314117Y1 KR 200314117 Y1 KR200314117 Y1 KR 200314117Y1 KR 20030003343 U KR20030003343 U KR 20030003343U KR 200314117 Y1 KR200314117 Y1 KR 200314117Y1
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- control
- piston rod
- piston
- closed
- cushion cylinder
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/18—Check valves with actuating mechanism; Combined check valves and actuated valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0209—Check valves or pivoted valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
- F16K47/02—Means in valves for absorbing fluid energy for preventing water-hammer or noise
- F16K47/023—Means in valves for absorbing fluid energy for preventing water-hammer or noise for preventing water-hammer, e.g. damping of the valve movement
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Actuator (AREA)
Abstract
본 고안은 완폐역지변에 다단(3단)제어 유압쿠션실린더를 설치하여 펌프정지시 완폐역지변의 닫힘을 다단으로 제어하는 것으로서, 더욱 상세하게는 피스톤로드 끝단부가 완만하게 테이퍼지도록 가공되어진 다단(3단)제어 유압쿠션실린더를 부착하여 완폐역지변의 닫힘을 3단으로 제어함으로써 기기의 파손방지, 수충격 완화 및 작동효율을 높이는 구조의 완폐역지변에 관한 것이다.The present invention is to control the closing of the closed zone in multiple stages by installing a multi-stage (three-stage) control hydraulic cushion cylinder in the closed zone, more specifically, the piston rod end is processed to taper smoothly ( Three-stage) Control The hydraulic cushion cylinder is attached to control the closing of the completely closed area in three stages.
본 고안은 완폐역지변(100)의 닫힘시 제어에 있어서 유압쿠션실린더(10)의 튜브(11) 내부에 구비되어진 피스톤로드(12) 및 피스톤(15)과, 일측에 안착부(14a)가 형성되어지되 이 안착부(14a)와 연통되어지게 배출공(14c)이 형성된 헤드(14)가 몸체(11) 일끝단에 장착되어진 유압쿠션실린더(10)에 있어서, 상기 피스톤로드(12)에 제어봉(13)이 형성되어지되 이 제어봉(13) 끝단이 완만하게 테이퍼(13a)지도록 구성하여 다단으로 완폐역지변(100)의 닫힘을 다단으로 제어함을 특징으로 한다.According to the present invention, the piston rod 12 and the piston 15 provided in the tube 11 of the hydraulic cushion cylinder 10 and the seating portion 14a at one side in the control at the closing of the fully closed region 100 are closed. In the hydraulic cushion cylinder 10 is formed, but the head 14, the discharge hole 14c is formed to communicate with the seating portion 14a is mounted at one end of the body 11, the piston rod 12 The control rod 13 is formed, but the end of the control rod 13 is configured to be gently tapered (13a) is characterized in that the control of the closed closing area 100 in multiple stages in multiple stages.
Description
본 고안은 완폐역지변에 다단(3단)제어 유압쿠션실린더를 설치하여 펌프정지시 완폐역지변의 닫힘을 다단으로 제어하는 것으로서, 더욱 상세하게는 피스톤로드 끝단부가 완만하게 테이퍼지도록 가공되어진 다단(3단)제어 유압쿠션실린더를 부착하여 완폐역지변의 닫힘을 3단으로 제어함으로써 기기의 파손방지, 수충격 완화 및 작동효율을 높이는 구조의 완폐역지변에 관한 것이다.The present invention is to control the closing of the closed zone in multiple stages by installing a multi-stage (three-stage) control hydraulic cushion cylinder in the closed zone, more specifically, the piston rod end is processed to taper smoothly ( Three-stage) Control The hydraulic cushion cylinder is attached to control the closing of the completely closed area in three stages.
일반적으로, 각종 펌프장, 유체의 송수관로에 필수적인 배관방식으로, 첨부된 도면 도 1에서와 같이, 설치펌프를 기준으로 하여 펌프의 토출측으로 유체의 속도 및 유량을 조절하는 제수변(400)과 관로를 통하여 토출된 유체의 역류를 방지하고 수충격을 흡수하여 관로 및 주변기기를 보호하는 완폐역지변(100) 및 하절기와 동절기에 발생하는 관로의 신축량의 흡수와 펌프(200), 유체 송수관로의 설치에 따른 관로 길이조정 편의 도모를 위한 신축관(300) 등이 배관 설치되어 관로를 형성하면서 널리 사용되는 바, 이러한 각종 기기들이 배관용 플랜지 규격 등의 상호 연관성이 없을 경우에는 설치상 어려울 뿐만 아니라, 설치장소도 넓게 차지함에 따라 부대 건물 등 구축물에 부대 경비가 상당히 소요되며, 각 제품이 서로 완전히 조정 결합되어야만 펌프, 모터 등의 구동효율도 상승시키며, 각종 펌프장 및 관로 등에서 요구하는 유량조정도 정확을 기할 수 있다.In general, in the piping system essential to the various pumping stations, fluid pipelines, as shown in Figure 1, through the dilution valve 400 and the pipeline to control the speed and flow rate of the fluid to the discharge side of the pump based on the installation pump The pipeline according to the installation of the pump 200 and the fluid water supply pipe and the absorption of the expansion and contraction of the pipeline occurring in the summer and winter, preventing the reverse flow of the discharged fluid and absorbing the water shock to protect the pipeline and the peripheral equipment. Expansion pipes (300) for the convenience of adjustment of the length is installed in the pipe is widely used while forming a pipe, when these various devices are not correlated with the pipe flange specifications, such as installation difficult, and also the installation place Due to the large occupancy, the unit costs considerably in the building such as the unit building, and each product must be fully coordinated and combined to pump, The driving efficiency of the rotor and the like is also increased, and the flow rate adjustment required by various pump stations and pipelines can also be accurate.
종래의 완폐역지변 완충장치인 유압쿠션실린더(10)는 첨부된 도면 도 3 에 나타낸 바와 같이, 튜브(2) 내부에 피스톤로드(3)가 구비되어지되 이 피스톤로드(3) 외주에 피스톤(4)이 장착되어지고, 상기 피스톤로드(3) 끝단에 제어봉(5)이 형성되어지며, 상기 튜브(2) 일끝단에 헤드(6)가 고정되어지되 이 헤드(6)는 일측에 안착부(6a)가 형성되어지고 안착부(6a)와 연통되어져 유체가 배출되어지는 배출공(6b)이 형성되어진다.Hydraulic cushion cylinder 10 is a conventional fully closed zone shock absorber 10 is provided with a piston rod (3) inside the tube (2), as shown in Figure 3 attached to the piston rod (3) 4) is mounted, the control rod (5) is formed at the end of the piston rod (3), the head (6) is fixed to one end of the tube (2), the head (6) is seated on one side 6a is formed and communicates with the seating portion 6a, whereby a discharge hole 6b through which fluid is discharged is formed.
상기와 같이 이루어진 유압쿠션실린더(10)의 작동은 첨부된 도면 도 2a 내지 도 2c를 참조하면, 펌프장의 펌프(200)가 정전시 웨이트(101)의 자중에 의해 피스톤로드(3) 및 피스톤(4)이 하강운동하게 되고, 이때 유체의 흐름은 유로(6c)와 안착부(6a)을 통해 배출공(6b)으로 배출되어 제어봉(5)이 안착부(6a)내로 슬라이드되어지기 전까지 완폐역지변 디스크(104)가 80%정도 닫히는 위치까지 급폐되어 역류되는 물을 차단하여 펌프(200)의 역회전을 막고, 상기 제어봉(5)이 안착부(6a)로 슬라이드 되어짐에 따라 안착부(6a)로의 유체의 흐름은 차단되고 유로(6c)를 통해 배출공(6b)으로 배출되어 완폐역지변 디스크(104)가 완전 닫힘시까지 수충격을 흡수하는 구조로 되어 있다.Operation of the hydraulic cushion cylinder 10 made as described above with reference to the accompanying drawings, Figures 2a to 2c, when the pump 200 of the pump station by the weight of the weight 101 when the power outage of the piston rod 3 and the piston ( 4) the downward movement, the fluid flow is discharged to the discharge hole (6b) through the flow path (6c) and the seating portion (6a) until the control rod (5) slides into the seating portion (6a) The water discharge disk 104 is closed to the position where 80% of the closing disk is closed to block the water flowing backward to prevent the reverse rotation of the pump 200, and the control rod 5 is slid to the seating portion 6a, and the seating portion 6a. The flow of the fluid to the) is blocked and is discharged to the discharge hole (6b) through the flow path (6c) has a structure that absorbs the water shock until the fully closed reverse displacement disk 104 is completely closed.
그런데, 완폐역지변 디스크(104)가 80% 닫힘시까지 급폐되고 제어봉(5)이 안착부(6a)내로 슬라이드되는 지점에서 급격한 속도 변화 및 역류로 인한 수충격으로 인해 완폐역지변 축(102)의 비뜰림 현상 및 완폐역지변 디스크 힌지(103) 부분의 손상과 관로의 심한 진동 및 소음이 발생하게 되는 문제가 있다.However, at the point where the fully closed reverse displacement disk 104 is closed until 80% closed and the control rod 5 slides into the seating portion 6a, the fully closed reverse displacement shaft 102 is caused by a sudden impact change due to rapid speed change and backflow. There is a problem that the occurrence of severe rain and noise of the pipeline and the damage of the closed hinged disk hinge 103 portion of the pipeline.
따라서, 상기한 문제를 해결하기 위하여 본 고안은 완폐역지변에 다단(3단)제어 유압쿠션실린더를 설치하여 펌프정지시 완폐역지변의 닫힘을 다단으로 제어하는 것으로서, 더욱 상세하게는 피스톤로드 끝단부를 완만하게 테이퍼지도록 가공되어진 다단(3단)제어 유압쿠션실린더를 부착하여 완폐역지변의 닫힘을 3단으로 제어함으로써 기기의 파손방지, 수충격 완화 및 작동효율을 높이는 구조의 완폐역지변을 제공하고자 하는데 그 목적이 있다.Therefore, in order to solve the above problem, the present invention is to install a multi-stage (three-stage) control hydraulic cushion cylinder in the closed zone, and to control the closing of the closed zone in multiple stages when the pump is stopped, more specifically the piston rod end A multi-stage (three-stage) control hydraulic cushion cylinder, which is machined to taper the part gently, is attached to control the closing of the fully closed region in three stages to provide a fully closed region of the structure that prevents damage to the machine, reduces water shock, and increases operating efficiency. There is a purpose.
상기한 목적을 달성하기 위한 본 고안은 튜브 내부에 구비되어진 피스톤로드 및 피스톤과, 일측에 안착부가 형성되어지되 이 안착부와 연통되어지게 배출공이 형성된 헤드가 몸체 일끝단에 장착되어진 유압쿠션실린더에 있어서, 상기 피스톤로드에 제어봉이 형성되어지되 이 제어봉 끝단이 완만한 경사각으로 테이퍼지게 가공되어진 유압쿠션실린더가 부착된 완폐역지변을 제공함에 있다.The present invention for achieving the above object is a piston rod and a piston provided in the inside of the tube, and a seating portion is formed on one side, the head is formed in the discharge hole to communicate with the seating portion in the hydraulic cushion cylinder mounted on one end of the body In the piston rod, a control rod is formed, but the end of the control rod provides a fully closed reverse displacement with a hydraulic cushion cylinder tapered at a gentle inclination angle.
도 1 은 일반적인 펌프장 등의 배관방식을 나타낸 예시도1 is an exemplary view showing a piping method such as a general pumping station
도 2a 는 종래의 완폐역지변을 나타낸 정면예시도Figure 2a is a front view showing a conventional fully closed area
도 2b 는 종래의 완폐역지변을 나타낸 측면예시도Figure 2b is a side view illustrating a conventional complete closed zone
도 2c 는 종래 완폐역지변의 내부를 나타낸 예시도Figure 2c is an exemplary view showing the interior of the conventional complete closed zone
도 3 은 종래의 유압쿠션실린더 내부 단면예시도Figure 3 is an exemplary cross-sectional view of a conventional hydraulic cushion cylinder
도 4 는 본 고안의 다단(3단)제어 유압쿠션실린더 내부 단면예시도Figure 4 is an exemplary cross-sectional view of the multi-stage (three stage) control hydraulic cushion cylinder of the present invention
도 5 는 도 4 의 "A"부 확대도5 is an enlarged view of a portion “A” of FIG. 4;
도 6a 는 본 고안에 따른 다단(3단) 유압쿠션실린더가 1단으로 제어되는 상태에서의 단면도Figure 6a is a cross-sectional view in a state in which the multi-stage (three stages) hydraulic cushion cylinder according to the present invention is controlled in one stage
도 6b 는 본 고안이 2단으로 제어되는 상태에서의 단면도Figure 6b is a cross-sectional view in a state in which the subject innovation is controlled in two stages
도 6c 는 본 고안이 3단으로 제어되는 상태에서의 단면도Figure 6c is a cross-sectional view in a state in which the subject innovation is controlled in three stages
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
(10) : 유압쿠션실린더 (11) : 튜브(10): hydraulic cushion cylinder (11): tube
(12) : 피스톤로드 (13) : 제어봉(12): piston rod (13): control rod
(13a) : 테이퍼 (14) : 헤드13a: taper 14: head
(14a) : 안착부 (14b) : 유로14a: seating portion 14b: flow path
(14c) : 배출공 (15) : 피스톤14c: discharge hole 15: piston
이하, 첨부된 도면을 참조하여 본 고안의 일실시예를 상세히 설명하면 다음과 같다.Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 4 는 본 고안의 유압쿠션실린더 내부 단면예시도,Figure 4 is an exemplary cross-sectional view of the hydraulic cushion cylinder of the present invention,
도 5 는 도 4 의 "A"부 확대도,5 is an enlarged view of a portion “A” of FIG. 4;
도 6a 는 본 고안에 따른 유압쿠션실린더가 1단으로 제어되는 상태에서의 단면도,Figure 6a is a cross-sectional view in a state in which the hydraulic cushion cylinder according to the present invention is controlled in one stage,
도 6b 는 본 고안이 2단으로 제어되는 상태에서의 단면도,Figure 6b is a cross-sectional view in the state in which the subject innovation is controlled in two stages,
도 6c 는 본 고안이 3단으로 제어되는 상태에서의 단면도이다.6C is a cross-sectional view of the present invention in a state controlled in three stages.
본 고안은 관 내부의 유체 흐름을 제어할 수 있도록 완폐역지변(100)에 장착되어지는 유압쿠션실린더(10)에 있어서, 튜브(11) 내부에 설치되어 작동에 따라 왕복운동하게 되는 피스톤로드(12), 및 상기 피스톤로드(12) 외주에 튜브(11) 내면과 밀착되어져 피스톤로드(12)의 작동에 따라 왕복운동하게 되는 피스톤(15)과, 상기 피스톤로드(12) 끝단에 장착되어진 제어봉(13)과, 상기 튜브(11) 일끝단에 고정되어져 피스톤로드(12) 및 피스톤(15)의 왕복운동에 따라 유체가 배출되어지는 헤드(14)로 구성되어진다.The present invention, in the hydraulic cushion cylinder (10) which is mounted to the closed zone 100 to control the flow of fluid in the tube, the piston rod is installed in the tube 11 to reciprocate according to the operation ( 12) and a piston 15 which is in close contact with the inner surface of the tube 11 on the outer circumference of the piston rod 12 and reciprocates according to the operation of the piston rod 12, and a control rod mounted to the end of the piston rod 12. 13 and a head 14 fixed to one end of the tube 11 to discharge the fluid in accordance with the reciprocating motion of the piston rod 12 and the piston 15.
상기, 피스톤(15) 외주에 튜브(11) 내면과 밀착되어져 유체의 누출을 방지할 수 있도록 피스톤링(15a)이 장착되어진다.The piston ring 15a is mounted on the outer circumference of the piston 15 to be in close contact with the inner surface of the tube 11 to prevent leakage of the fluid.
상기, 제어봉(13)은 끝단이 테이퍼(13a)지게 형성되어진다.The control rod 13 is formed so that the end is tapered (13a).
상기, 헤드(14)는 일측 중앙에 상기 제어봉(13)이 삽입되어지게 안착부(14a)가 형성되어지고, 내ㆍ외면에 상기 안착부(14a)와 연통되어지게 유로(14b) 및 배출공(14c)이 형성되어진다.The head 14 has a seating portion 14a formed to insert the control rod 13 at one side center thereof, and a flow passage 14b and a discharge hole to communicate with the seating portion 14a on the inner and outer surfaces thereof. 14c is formed.
상기와 같이 이루어진 유압쿠션실린더(10)의 작동은 펌프장의 펌프(200)가 정전시 웨이트(101)의 자중에 의해 피스톤로드(12) 및 피스톤(15)이 하강운동하게 되고, 이때 첨부된 도면 도 6a 에서와 같이 배출공(14c)을 통해 배출되는 유체의 배출량이 많게 되어 완폐역지변 디스크(104)가 80%정도 닫히는 위치까지 급폐되어 역류되는 물을 차단하여 펌프(200)의 역회전을 막는다.The operation of the hydraulic cushion cylinder 10 made as described above, the piston rod 12 and the piston 15 is moved downward by the weight of the weight 101 when the pump 200 of the pump station is blackout, the accompanying drawings As shown in FIG. 6A, the amount of fluid discharged through the discharge hole 14c increases, thereby blocking the water flowing back to the position where the fully closed reverse displacement disk 104 is closed by about 80%, thereby preventing the reverse rotation of the pump 200. Prevent.
그리고, 상기 피스톤로드(12) 및 피스톤(15)이 계속적으로 슬라이드되어져 상기 제어봉(13) 끝단이 안착부(14a) 선단에 위치하게 되면 첨부된 도면 도 6b 에서와 같이, 상기 제어봉(13) 끝단이 완만한 테이퍼(13a)구조로 형성되어져 이 테이퍼(13a)각 만큼 공간이 발생하여 공간을 통해 유체가 흐르게 된다.When the piston rod 12 and the piston 15 are continuously slid and the end of the control rod 13 is positioned at the front end of the seating portion 14a, as shown in FIG. 6B, the end of the control rod 13 is attached. The taper 13a is formed in a gentle structure so that a space is generated by the angle of the taper 13a so that fluid flows through the space.
이때, 상기 안착부(14a)와 제어봉(13) 사이의 이격공간이 협소하게 형성되어 피스톤(15)이 슬라이드 될수록 유체의 배출량이 감소하게 되므로 밸브 시트에 근접한 상태에서는 밸브가 저속으로 폐쇄되어진다.At this time, the space between the seating portion 14a and the control rod 13 is narrowly formed so that the displacement of the fluid decreases as the piston 15 slides, so that the valve is closed at a low speed in the state close to the valve seat.
또한, 첨부된 도면 도 6c 에서와 같이, 상기 안착부(14a)에 제어봉(13)의 테이퍼(13a) 부위가 삽입되어지면 상기 제어봉(13)이 안착부(14a) 내면에 밀착되어져 유체의 흐름이 차단되어지는데, 이때 상기 피스톤(15)이 헤드(14)에 밀착되어질때까지 유로를 통해 극소의 유체가 배출되어져 밸브의 완전한 폐쇄를 이룰 수 있다.In addition, as shown in FIG. 6C, when the taper 13a portion of the control rod 13 is inserted into the seating portion 14a, the control rod 13 is brought into close contact with the inner surface of the seating portion 14a to flow the fluid. In this case, the fluid is discharged through the flow path until the piston 15 is brought into close contact with the head 14, thereby achieving a complete closure of the valve.
따라서, 상기 배출공(14c)을 통해 배출되어지는 유체의 배출량을 3단으로 제어하게 되어 밸브 본체 등 부대설비의 손상을 방지할 수 있는 작용을 한다.Accordingly, the discharge of the fluid discharged through the discharge hole 14c is controlled in three stages, thereby preventing damage to auxiliary equipment such as a valve body.
본 고안은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 고안의 요지를 벗어남이 없이 당해 고안이 속하는 기술분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형실시가 가능한 것은 물론이고, 그와 같은 변경은 청구범위 기재의 범위내에 있게 된다.The present invention is not limited to the above-described specific preferred embodiments, and any person having ordinary skill in the art to which the present invention pertains may make various modifications without departing from the gist of the present invention claimed in the claims. Of course, such changes will fall within the scope of the claims.
따라서, 본 고안은 유압쿠션실린더내 피스톤로드에 구비된 제어봉 끝단을 완만한 테이퍼 구조를 형성함으로 인해 유체의 배출량을 단계적으로 조절할 수 있어 밸브의 폐쇄를 완화시키게 되어 밸브의 닫힘이 용이하게 이루어지게 되며, 또한 밸브 등 각종 기기의 손상을 방지하게 되는 효과가 있다.Therefore, the present invention forms a gentle tapered structure at the end of the control rod provided in the piston rod in the hydraulic cushion cylinder, so that the discharge of fluid can be adjusted step by step to ease the closing of the valve, thereby facilitating the closing of the valve. In addition, there is an effect to prevent damage to various devices such as valves.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7666474B2 (en) | 2008-05-07 | 2010-02-23 | Asm America, Inc. | Plasma-enhanced pulsed deposition of metal carbide films |
US7713874B2 (en) | 2007-05-02 | 2010-05-11 | Asm America, Inc. | Periodic plasma annealing in an ALD-type process |
US8268409B2 (en) | 2006-10-25 | 2012-09-18 | Asm America, Inc. | Plasma-enhanced deposition of metal carbide films |
US8993055B2 (en) | 2005-10-27 | 2015-03-31 | Asm International N.V. | Enhanced thin film deposition |
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2003
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8993055B2 (en) | 2005-10-27 | 2015-03-31 | Asm International N.V. | Enhanced thin film deposition |
US9127351B2 (en) | 2005-10-27 | 2015-09-08 | Asm International N.V. | Enhanced thin film deposition |
US9831094B2 (en) | 2005-10-27 | 2017-11-28 | Asm International N.V. | Enhanced thin film deposition |
US10297444B2 (en) | 2005-10-27 | 2019-05-21 | Asm International N.V. | Enhanced thin film deposition |
US10964534B2 (en) | 2005-10-27 | 2021-03-30 | Asm International | Enhanced thin film deposition |
US8268409B2 (en) | 2006-10-25 | 2012-09-18 | Asm America, Inc. | Plasma-enhanced deposition of metal carbide films |
US7713874B2 (en) | 2007-05-02 | 2010-05-11 | Asm America, Inc. | Periodic plasma annealing in an ALD-type process |
US7666474B2 (en) | 2008-05-07 | 2010-02-23 | Asm America, Inc. | Plasma-enhanced pulsed deposition of metal carbide films |
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