KR20010025858A - system for managing resource for fabricating semiconductor device and method for managing data using the same - Google Patents

Abstract

PURPOSE: A material management system and method is provided to read bar codes of materials before putting the materials into semiconductor production lines, compare the read bar code data with the data stored in advance, and generate an alarm if the compared result is not identical so that it can prevent a wrong processing. CONSTITUTION: The method comprises steps of reading manufacturing data from bar codes adhered to materials put into a production process line or a supply equipment(S100), reading data from bar codes adhered to a target and a vessel(S102), a bar code data management computer determining if the bar code data is read, and storing the read bar code data in a database(S104, S106), the computer searching for a corresponding bar code data for a table in relation with the read bar code data, and comparing the searched data with the read data(S110), and generating an interlock signal and an alarm signal if the searched data is not to the read data(S120).

Description

System for managing resource for fabricating semiconductor device and method for managing data using the same}

The present invention relates to a data management system for raw and subsidiary materials for manufacturing semiconductor devices, and a data management method for raw and subsidiary materials using the same. More particularly, the bar code reading data of raw and subsidiary materials input to the corresponding process equipment and supply equipment and The present invention relates to a data management system of raw subsidiary materials for semiconductor device manufacturing and to a method of managing raw subsidiary materials using the same, by comparing barcode data to prevent misinput of raw subsidiary materials.

In general, as the science and technology of the modern society develops, various electronic devices are also being developed, and these electronic devices are becoming highly functionalized and miniaturized due to the development of semiconductor devices having high density.

The manufacture of semiconductor devices requires a high degree of precision, and in order to manufacture semiconductor devices, semiconductor manufacturing facilities, for example, thin film deposition equipment and etching facilities, according to a semiconductor device manufacturing process are arranged in a semiconductor manufacturing line. Most manufacturing processes are carried out.

Such semiconductor manufacturing facilities are generally divided into a process facility where a predetermined process for a wafer is substantially progressed, and a supply facility that is connected to the process facility and assists a predetermined process performed in the process facility to be performed smoothly. .

At this time, the process equipment and supply equipment are separated and arranged in a mutually connected state in order to prevent accidental accidents that may occur during the space utilization side or process progress.

Thus, the process equipment is provided in the FAB (Fablication) line, the supply equipment is disposed in the underground tank or service area (Service area).

On the other hand, the process equipment is connected on-line with a host computer having a predetermined data collection function, and various data related to the process equipment are input and stored in the host computer.

In this case, the process facility may perform continuous data exchange through a predetermined communication port that is responsible for data communication with the host computer, for example, by a Semi Equipment Communication Standard (SECS) protocol.

However, since the supply facility arranged separately from the process facility does not have the above-described online system, it is difficult to automate management, and when the process gas, chemicals, etc. suitable for the process are supplied to the raw and subsidiary material supply part of the supply facility, After checking the contents of the paper has been prepared and put it.

Of course, even in the case of the raw material, which is directly added to the process equipment, for example, a target used in the deposition process, the operator checks the contents of the paper prepared in the same manner as mentioned above, and then inputs them.

However, when the operator inadvertently checks the contents of the paper inadvertently and injects completely different process gases, chemicals, and targets into the supplying and processing equipment, there is a problem that an unexpected process accident occurs and the yield of the product is lowered. .

Therefore, it is an object of the present invention to prevent unintentional process accidents caused by raw materials that are incorrectly input to the process equipment and supply equipment to reduce the yield of the product.

Other objects of the present invention will become more apparent from the following detailed description and the accompanying drawings.

1 is a conceptual diagram schematically showing a data management system of raw and subsidiary materials for semiconductor device manufacturing according to an embodiment of the present invention.

2 is a flow chart schematically showing a method for managing data of raw and subsidiary materials according to an embodiment of the present invention.

In order to achieve the above object, the present invention reads and manages barcode reading data in a barcode data management computer by reading barcodes of raw and subsidiary materials input to process equipment and supply equipment with a barcode reading device, barcode reading data and stored barcode data. It is configured to generate a predetermined control signal according to whether or not.

On the other hand, the present invention reads the bar code of the raw subsidiary materials and stores the data in the corresponding storage table, then compares the bar code reading data and the bar code data previously stored in the storage table, if not the same, interlock signal and warning for the facility Generate a signal.

Hereinafter, a data management system of raw and auxiliary materials for manufacturing semiconductor devices and a data management method of raw and auxiliary materials using the same will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, raw subsidiary materials supplied from the raw subsidiary manufacturer A are put into a predetermined process carried out in the semiconductor manufacturing plant B, and data management of the raw subsidiary materials to be introduced is described below. It is made by data management system of raw subsidiary materials for manufacturing.

The data management system for raw and subsidiary materials for semiconductor device manufacturing includes bar code reading devices (2) and (4) which are respectively installed at predetermined positions and read bar codes having predetermined manufacturing information attached to the raw and subsidiary materials, and are connected online to a predetermined network. A bar code data management computer 6 storing and managing bar code reading data transmitted from the reading device 2, 4, and comparing the bar code reading data with the corresponding bar code data previously stored in the memory, And generate a control signal.

At this time, the bar code reading device 2 is installed on the process equipment 8, for example, the process equipment for the thin film deposition process provided with the alarm device 9, a predetermined process is carried out raw materials directly input, For example, the barcode of the target 10 required for the thin film deposition process is read.

In addition, the bar code reading device 4 is mounted on a supply facility 14 connected to a process facility 8 in which a predetermined process proceeds, for example, a process facility for thin film deposition process having an alarm device 9. The barcode of the container 12 containing the predetermined process gas is read.

For example, the supply facility 14 has a structure in which a pump, a pressure gauge, a scrubber, a raw material mounting part, and the like are connected and installed by a pipe.

The barcodes scanned by the barcode reading devices 2 and 4 include manufacturing information for manufacturing raw and auxiliary materials, for example, a target 10, a container 12 containing a process gas, for example, a manufacturer, This includes the item, quality class, factory name, lot number, date of manufacture and expiration date.

In addition, the bar code data management computer 6 is installed online connected to the host computer 16 connected to the network, and the target 10 and the process gas storage container (injected into the process facility 8 and the supply facility 14, respectively) The bar code reading data for 12) is stored in the bar code data management computer 6 and then compared with the previously stored bar code data, and is input to the host computer 16 if it is the same.

However, if the data are not the same, the bar code data management computer 6 generates a predetermined control signal, for example, an interlock signal for stopping the driving of the facility and an alarm generation signal for driving the alarm device.

In addition, the work management PC 18 is installed and connected to the host computer 16 online so that the worker searches and manages data stored in the host computer 16 through the work management PC 18.

Here, a bar code management method of raw subsidiary materials using the bar code management system of raw subsidiary materials for semiconductor device manufacturing according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2.

First, a step (S100) of reading and storing a bar code having predetermined manufacturing information attached to raw and subsidiary materials input to the process facility 8 and the supply facility 14 is performed.

Looking at step (S100) in more detail, a wafer (not shown) is loaded into the process equipment 8, for example, a thin film deposition process equipment in a lot unit, raw materials required for thin film deposition on the wafer surface, for example, The target 10 is introduced into a thin film deposition process facility.

In addition, the raw subsidiary material mounting portion (not shown) of the supply facility 14 connected to the process facility 8 collides with the raw subsidiary material required for the process proceeding of the process facility 8, for example, the target 10, thereby causing the target 10 to be attacked. A container 12 containing a predetermined process gas for ejecting and depositing the component particles constituting the C) is mounted.

At this time, the bar code reading device (2) (4) before the target 10, the container containing the process gas 12 is put into the mounting of the process equipment 8 and the supply equipment 14, respectively, The barcodes of the target 10 and the container 12 are read. (S102)

Then, the barcode data management computer 6 determines whether the barcode reading data read by the barcode reading device 2 or 4 is input, and then stores the barcode reading data in the database. (S104) (S106)

At this time, the bar code reading data is stored in the tables for the process equipment 8 and the supply equipment 14 in the database, which is generated when the target 10 and the process gas storage container 12 are manufactured. Manufacturing information includes, for example, the manufacturer, item, quality class, factory name, lot number, date of manufacture, and expiration date.

Subsequently, the bar code data management computer 6 compares the bar code data related to the corresponding table with the bar code reading data read out from the bar code reading device 2 and 4 and stored therein, and compares the bar code data with the input bar code reading data. (S110)

If the determination result is not the same, the bar code data management computer 6 generates an interlock signal and an alarm device 9 and 15 for stopping the operation of the facility, for example, the supply facility 14 and the process facility 8. Outputs a warning signal to drive. (S120)

The interlock signal output from the bar code data management computer 6 stops the operation of the corresponding supply facility 14 and the process facility 8, and the alarm devices 9, 15 are operated by the warning signal. Recognize that there is another kind of raw and subsidiary material that you want to put in.

However, if the determination result is the same, the barcode data management computer 6 transmits the data for this to the host computer 16 via a predetermined network.

Subsequently, the worker connects to the host computer 16 through the work management PC 18 to retrieve and manage data of raw and subsidiary materials for the process facility 8 and the supply facility 14.

As described above, the barcodes of the raw and subsidiary materials are read by a barcode reading device, and the barcode reading data and the stored barcode data are compared and judged. By interlocking and warning, the worker can be informed that the raw and subsidiary materials to be injected are different.

As described above, the present invention compares the received barcode reading data with the corresponding barcode data of the stored raw subsidiary materials by reading the barcodes of the raw subsidiary materials with the barcode reading apparatus before inputting the raw subsidiary materials to the process and supply facilities, respectively. After the judgment, if the data are not the same, the equipment is interlocked and a warning is issued to alert the worker that the raw and subsidiary materials to be put in are other raw and subsidiary materials. It can work.

Claims (4)

A barcode reading device installed at a predetermined position to read a barcode having predetermined manufacturing information attached to the raw and subsidiary material; A bar code data management computer connected to a predetermined network and storing and managing the bar code reading data transmitted from the bar code reading device, And comparing the barcode reading data with the corresponding barcode data previously stored in the memory, and generating a predetermined control signal according to the determination result. The data management system according to claim 1, wherein the bar code reading device is provided for a process facility into which the raw subsidiary materials are input. The data management system of raw and subsidiary materials for semiconductor device manufacturing according to claim 1, wherein the predetermined control signal is a predetermined warning signal or an interlock signal for the facility. Reading a bar code having predetermined manufacturing information attached to the raw subsidiary material and storing the data in a corresponding storage table; Comparing the barcode reading data with previously stored barcode data related to the storage table to determine whether the barcode reading data is the same; And if it is not the same, generating an interlock signal and a warning generation signal for the corresponding facility.