KR20000002110A - Semiconductor plant management system - Google Patents
Semiconductor plant management system Download PDFInfo
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- KR20000002110A KR20000002110A KR1019980022687A KR19980022687A KR20000002110A KR 20000002110 A KR20000002110 A KR 20000002110A KR 1019980022687 A KR1019980022687 A KR 1019980022687A KR 19980022687 A KR19980022687 A KR 19980022687A KR 20000002110 A KR20000002110 A KR 20000002110A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
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Abstract
Description
본 발명은 반도체 관리 시스템에 관한 것으로, 더욱 상세하게는 복수개의 반도체 설비를 제어하는 설비 서버를 프라이머리 설비 서버와 세컨드리 설비 서버로 구축하고 프라이머리 설비 서버와 세컨드리 설비 서버에 접속 전환 모듈을 온라인 시킨 다음 접속 전환 모듈과 반도체 설비가 TCP/IP에 의하여 통신하도록 온라인 연결하여 RS-232C 프로토콜에 의하여 통신 거리의 제한을 없앰과 동시에 어느 하나의 설비 서버가 다운 상태일 때 다른 설비 서버와 자동으로 컨넥팅되어 설비 관리 효율을 극대화시킨 반도체 설비 관리 시스템에 관한 것이다.The present invention relates to a semiconductor management system, and more particularly, a facility server for controlling a plurality of semiconductor facilities is constructed as a primary facility server and a secondary facility server, and a connection switching module is provided to the primary facility server and the secondary facility server. After the on-line connection, the connection switching module and the semiconductor equipment are connected online by TCP / IP to remove the restriction of the communication distance by RS-232C protocol. The present invention relates to a semiconductor facility management system that is connected to maximize facility management efficiency.
최근들어 급속하게 발전하고 있는 반도체 기술의 발달에 힘입어 고집적도를 갖는 반도체 제품이 개발, 보급되고 있는 실정이다. 이와 같은 반도체 제품에 의하여 반도체 제품을 필요로 하는 다양한 분야의 제품들은 보다 소형화, 고성능화를 추구할 수 있게 되었다.Recently, with the development of semiconductor technology, which is rapidly developing, a semiconductor product having a high degree of integration has been developed and distributed. Such semiconductor products are able to pursue miniaturization and high performance of products in various fields that require semiconductor products.
또한, 최근들어서는 반도체 기술의 개발과 함께, 반도체 설비의 운용 효율을 높이고, 공정 불량없이 반도체 제품을 생산하기 위한 반도체 설비 관리 시스템의 개발이 꾸준하게 진행되고 있다.In recent years, with the development of semiconductor technology, the development of semiconductor facility management systems for improving the operational efficiency of semiconductor facilities and producing semiconductor products without process defects has been steadily progressing.
도 1은 이와 같은 종래 반도체 설비 관리 시스템을 도시하고 있다.1 illustrates such a conventional semiconductor equipment management system.
첨부된 도면을 참조하면, 반도체 설비 관리 시스템(100)은 관리의 직접적인 대상이면서 반도체 공정을 진행하는 반도체 설비(10)와, 반도체 설비(10)가 공정을 진행하는데 필요한 각종 데이터, 예를 들어 공정 온도, 공정 압력, 공정에 사용되는 반응가스의 종류, 공정이 진행될 웨이퍼의 개수, 웨이퍼의 ID 등 무수히 많은 공정 환경 데이터 및 공정 진행 순서, 공정 진행 방식 등 공정 진행과 관련된 데이터를 제공하는 호스트(20)와, 반도체 설비(10)와 호스트(20)가 상호 온라인 연결 및 호스트(20)로부터 제공된 데이터에 의하여 반도체 설비(10)에 공정을 진행시키는 설비 서버()를 포함하고 있다.Referring to the accompanying drawings, the semiconductor equipment management system 100 is a direct target of management and the semiconductor equipment 10 for performing a semiconductor process, and the various data necessary for the semiconductor equipment 10 to proceed with a process, for example, a process. Host (20) that provides process related data such as temperature, process pressure, type of reaction gas used in process, number of wafers to be processed, number of wafers, ID of wafers, process order, process progress method, etc. ), And a facility server () which allows the semiconductor facility 10 and the host 20 to process the semiconductor facility 10 by the online connection and data provided from the host 20.
이들중 반도체 설비(10)와 설비 서버(30)는 RS-232C 프로토콜에 의하여 통신되고, 설비 서버(30)와 호스트(20)는 잘 알려진 TCP/IP 프로토콜에 의하여 커뮤니케이션된다. 미설명 도면 부호 50은 데이터 인풋/아웃풋 컴퓨터.Among them, the semiconductor facility 10 and the facility server 30 are communicated by the RS-232C protocol, and the facility server 30 and the host 20 are communicated by the well-known TCP / IP protocol. Reference numeral 50 denotes a data input / output computer.
그러나, 이와 같은 종래 반도체 설비 관리 시스템은 반도체 설비와 설비 서버가 단거리 통신에 적합한 RS-232C 프로토콜에 의하여 통신됨으로 인하여 원격지에서 반도체 설비의 상황을 점검 및 반도체 설비를 제어할 수 없는 문제점이 있다.However, such a conventional semiconductor equipment management system has a problem that the semiconductor equipment and the equipment server can not check the status of the semiconductor equipment and control the semiconductor equipment at a remote location because the communication through the RS-232C protocol suitable for short distance communication.
따라서, 본 발명은 이와 같은 종래 문제점을 감안한 것으로써 본 발명의 목적은 반도체 설비와 설비 서버를 TCP/IP를 통하여 원거리 통신 가능토록 하여 반도체 설비가 구축된 생산 라인 어느 곳에서라도 쉽게 반도체 설비의 현재 상황을 점검 및 반도체 설비를 제어할 수 있도록 함에 있다.Accordingly, the present invention has been made in view of such a conventional problem, and an object of the present invention is to enable a semiconductor device and a facility server to be remotely communicated through TCP / IP so that the current situation of a semiconductor facility can be easily established anywhere in the production line where the semiconductor facility is constructed. To check and control the semiconductor equipment.
본 발명의 다른 목적은 설비 서버를 프라이머리 설비 서버와 세컨드리 설비 서버로 구축하고 각각의 설비 서버가 공통적으로 접속 전환 모듈과 온라인 연결되도록 하여 설비 서버중 어느 하나가 다운되더라도 나머지 설비 서버와 반도체 설비가 자동적으로 연결되도록 함에 있다.It is another object of the present invention to construct a facility server as a primary facility server and a secondary facility server, and each facility server is commonly connected to the connection switching module online so that any one of the facility servers and the semiconductor facility are down. Is to connect automatically.
도 1은 종래 반도체 설비 관리 시스템을 도시한 블록도.1 is a block diagram showing a conventional semiconductor equipment management system.
도 2는 본 발명에 의한 반도체 설비 관리 시스템을 도시한 블록도.2 is a block diagram showing a semiconductor equipment management system according to the present invention.
이와 같은 본 발명의 목적을 달성하기 위한 본 발명 반도체 설비 관리 시스템은 공정 데이터를 포함하는 호스트와, 상기 호스트와 온라인 연결된 적어도 2 이상의 설비 서버와, 상기 설비 서버의 제어에 의하여 반도체 공정을 수행하는 반도체 설비를 포함하며, 상기 설비 서버들에는 TCP/IP에 의하여 상기 설비 서버들을 선택적으로 상기 반도체 설비와 접속시켜주는 접속 전환 모듈이 온라인 연결된 것을 특징으로 한다.The semiconductor equipment management system of the present invention for achieving the object of the present invention comprises a host that includes process data, at least two or more equipment servers online connected to the host, and a semiconductor to perform the semiconductor process under the control of the equipment server It includes a facility, the facility server is characterized in that the connection connection module for connecting the facility server to the semiconductor facility selectively by TCP / IP is connected online.
이하, 본 발명 반도체 설비 관리 시스템을 첨부된 도 2를 참조하여 보다 상세하게 설명하면 다음과 같다.Hereinafter, the semiconductor device management system of the present invention will be described in more detail with reference to FIG. 2.
첨부된 도면을 참조하면, 반도체 설비 관리 시스템(200)은 관리의 직접적인 대상이면서 반도체 공정을 진행하는 반도체 설비(110)와, 반도체 설비(110)가 공정을 진행하는데 필요한 각종 데이터, 예를 들어 공정 온도, 공정 압력, 공정에 사용되는 반응가스의 종류, 공정이 진행될 웨이퍼의 개수, 웨이퍼의 ID 등 무수히 많은 공정 환경 데이터 및 공정 진행 순서, 공정 진행 방식 등 공정 진행과 관련된 데이터를 제공하는 호스트(120)와, 호스트(120)와 온라인 연결된 2 개의 설비 서버인 프라이머리 설비 서버(135)와, 세컨드리 설비 서버(132)와, 프라이머리 설비 서버(135)와 세컨드리 설비 서버(132)와 TCP/IP에 의하여 온라인 연결된 접속 전환 모듈(140)과, 접속 전환 모듈(140)로 구성된다.Referring to the accompanying drawings, the semiconductor equipment management system 200 is a direct target of management and the semiconductor equipment 110 that performs the semiconductor process, and the various data required for the semiconductor equipment 110 to proceed with the process, for example, a process Host (120) providing numerous process environment data such as temperature, process pressure, type of reaction gas used in the process, number of wafers to be processed, ID of wafer, and process progress data such as process order and process progress method. ), A primary facility server 135, a secondary facility server 135, a secondary facility server 132, a primary facility server 135, a secondary facility server 132, and TCP that are online connected to the host 120. The connection switching module 140 and the connection switching module 140 connected online by / IP.
이때, 반도체 설비(110)들은 접속 전환 모듈(140)에 의하여 프라이머리 설비 서버(135)에 온라인 연결되어 있으나, 프라이머리 설비 서버(135)가 예상치 못하게 다운되거나 수리를 요구할 때에는 접속 전환 모듈(140)이 프라이머리 설비 서버(135)와의 접속을 강제적으로 종료하고, 세컨드리 설비 서버(132)와 반도체 설비(110)를 자동적으로 온라인 연결시켜 설비의 가동 효율을 증대시킨다.At this time, the semiconductor facilities 110 are online connected to the primary facility server 135 by the connection conversion module 140, but when the primary facility server 135 unexpectedly goes down or requires repair, the connection facility module 140 is connected. ) Forcibly terminates the connection with the primary facility server 135 and automatically connects the secondary facility server 132 and the semiconductor facility 110 online to increase the operational efficiency of the facility.
이상에서 설명한 바와 같이, 호스트-프라이머리, 세컨드리 설비 서버-접속 전환 모듈-다수 반도체 설비를 TCP/IP에 의하여 온라인 연결시킴으로써 설비 서버와 반도체 설비를 RS-232C 프로토콜에 의하여 온라인 연결하였을 때에 비하여 원격 제어 및 원격 모니터링이 가능해지고, 두 개의 설비 서버중 어느 하나가 다운되었을 때 자동으로 설비 서버의 접속을 전환시켜줌으로써 설비 가동 효율을 증대시키는 효과가 있다.As described above, the host-primary, secondary facility server-connection switching module-multiple semiconductor facilities are connected online by TCP / IP to provide a remote connection when the facility server and semiconductor facilities are connected online by the RS-232C protocol. Control and remote monitoring are enabled, and the efficiency of plant operation is increased by automatically switching the connection of the plant server when one of the two plant servers goes down.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019980022687A KR20000002110A (en) | 1998-06-17 | 1998-06-17 | Semiconductor plant management system |
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| Application Number | Priority Date | Filing Date | Title |
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| KR1019980022687A KR20000002110A (en) | 1998-06-17 | 1998-06-17 | Semiconductor plant management system |
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| KR20000002110A true KR20000002110A (en) | 2000-01-15 |
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| KR1019980022687A KR20000002110A (en) | 1998-06-17 | 1998-06-17 | Semiconductor plant management system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030001299A (en) * | 2001-06-22 | 2003-01-06 | 닛뽕덴끼 가부시끼가이샤 | Communication monitoring system in which monitoring server is connected with network |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20030001299A (en) * | 2001-06-22 | 2003-01-06 | 닛뽕덴끼 가부시끼가이샤 | Communication monitoring system in which monitoring server is connected with network |
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