KR102650419B1 - light sensor device - Google Patents

Abstract

The signal processing device 9 in the optical sensor device 1000 calculates the frequency variation of the light output from the wavelength sweep light source 1 based on the internal reception signal converted into a digital signal by the analog-to-digital converter 7. The first frequency change reference signal data that serves as a reference is further calculated, and the digital-to-analog converter 8 converts the first frequency change reference signal data calculated by the signal processing device 9 into an analog signal, thereby converting the first frequency change reference signal data to an analog signal. A first frequency variation reference signal is generated as a clock signal, and the analog-to-digital converter 7 synchronizes with the first frequency variation reference signal generated by the digital-to-analog converter 8, and receives the received signal acquired by the optical heterodyne receiver 6. Sample the signal.

Description

light sensor device

This disclosure relates to an optical sensor device.

Swept Source-OCT (SS-OCT), which employs a wavelength scanning interferometry system, detects wavelength swept light whose frequency changes over time. Branches into signal light and reference light. SS-OCT emits branched signal light toward a measurement target, receives signal light reflected by the measurement target, and causes the received signal light to interfere with the branched reference light to produce interference light. The bit signal is acquired by generating . SS-OCT measures the distance from the light source to the measurement object by measuring the frequency of the acquired beat signal.

When SS-OCT as described above sweeps the frequency of light over a wide band, the distance resolution described above deteriorates because the time change in the frequency of the swept light does not exhibit ideal linearity but exhibits nonlinearity. Therefore, the optical distance measuring device described in Patent Document 1 compensates for the nonlinearity of such wavelength swept light. More specifically, the optical distance measuring device uses a laser light source whose frequency modulation waveform is already known, and performs regression analysis on the beat signal based on the already known frequency modulation waveform through digital signal processing, thereby determining the wavelength. Compensates for non-linearity of sweep light.

Patent Document 1: International Publication No. 2018/230474

However, the method of Patent Document 1 has a problem in that regression analysis to compensate for the nonlinearity of wavelength sweep light is required for each measurement, and the signal processing load increases.

The present disclosure was made to solve the above problems, and provides a technique for reducing the signal processing load caused by compensating for nonlinearity of wavelength swept light.

The optical sensor device according to the present disclosure includes a wavelength sweep light source that outputs light whose frequency changes with time, an optical splitter that splits the light output from the wavelength sweep light source 1 into signal light and local oscillation light. , an optical sensor head that emits the signal light branched by the optical splitter toward the measurement target and receives the reflected light reflected by the measurement target, the locally oscillated light branched by the optical splitter, and the reflected light received by the optical sensor head. An optical heterodyne receiver that acquires a received signal as an electrical signal by multiplexing and photoelectrically converting the multiplexed light, and converts the received signal into a digital signal by sampling the received signal acquired by the optical heterodyne receiver. An analog-to-digital converter, a first digital-to-analog converter for generating a first clock signal of the analog-to-digital converter, a phase-locked loop for generating a second clock signal for the analog-to-digital converter, and a received signal converted into a digital signal by the analog-to-digital converter. Based on this, the optical heterodyne receiver is provided with a signal processing device that calculates measurement data related to the measurement target, and the optical heterodyne receiver produces locally oscillated light branched by the optical branch and internally reflected light obtained by internal reflection of the signal light branched by the optical branch. By multiplexing and photoelectrically converting the multiplexed light, an internal reception signal as an electrical signal is further acquired, and the analog-to-digital converter further converts the internal reception signal acquired by the optical heterodyne receiver into a digital signal by sampling the signal. The processing device further calculates first frequency change reference signal data that serves as a standard for the frequency change of the light output from the wavelength sweep light source, based on the internal received signal converted into a digital signal by the analog-to-digital converter, and first digital analog The converter generates a first frequency variation reference signal as a first clock signal by converting the first frequency variation reference signal data calculated by the signal processing device into an analog signal, and the analog-to-digital converter converts the first digital-to-analog signal into an analog signal. Sampling the received signal acquired by the optical heterodyne receiver in synchronization with the first frequency variation reference signal generated by the converter, or internal reception acquired by the optical heterodyne receiver in synchronization with the second clock signal generated by the phase-locked loop Sample the signal.

According to the present disclosure, the signal processing load generated by compensating for nonlinearity of wavelength swept light is reduced.

1 is a block diagram showing the configuration of an optical sensor device according to Embodiment 1.
Figure 2 is a graph for explaining a specific example of signal processing by an optical sensor when the frequency of wavelength swept light exhibits linearity.
Figure 3 is a graph to explain a specific example of signal processing by an optical sensor device when non-linearity is not compensated.
FIG. 4 is a graph for explaining a specific example of signal processing for internally reflected light by the optical sensor device according to Embodiment 1.
FIG. 5 is a graph for explaining a specific example of signal processing for reflected light by the optical sensor device according to Embodiment 1.
Figure 6 is a block diagram showing the configuration of an optical sensor device according to Embodiment 2.
FIG. 7 is a graph for explaining a specific example of signal processing for internally reflected light by the optical sensor device according to Embodiment 2.
FIG. 8 is a graph for explaining a specific example of signal processing for reflected light by the optical sensor device according to Embodiment 2.
Fig. 9 is a block diagram showing the configuration of an optical sensor device according to Embodiment 3.
FIG. 10 is a graph for explaining a specific example of a method of separating a received signal and an internal received signal by the optical sensor device according to Embodiment 3.
Fig. 11 is a block diagram showing the configuration of an optical sensor device according to Embodiment 4.
12 is a graph showing the time change in the frequency of the internal reception signal acquired by the optical heterodyne receiver multiplexing locally oscillating light and internally reflected light and photoelectrically converting the multiplexed light, in a specific example of Embodiment 4. am.
FIG. 13(a) is a block diagram showing a hardware configuration that realizes the functions of the signal processing device according to Embodiments 1 to 4. FIG. 13(b) is a block diagram showing a hardware configuration that executes software that realizes the functions of the signal processing device according to Embodiments 1 to 4.

Hereinafter, in order to explain the present disclosure in more detail, modes for carrying out the present disclosure will be described with reference to the attached drawings.

Embodiment form 1.

FIG. 1 is a block diagram showing the configuration of an optical sensor device 1000 according to Embodiment 1. As Figure 1 shows, the optical sensor device 1000 includes a wavelength sweep light source 1, an optical splitter 2, an optical circulator 3, a reference reflection point 4, an optical sensor head 5, and an optical sensor 1000. Heterodyne receiver (6), analog-to-digital converter (ADC) (7), digital-to-analog converter (DAC) (8) (first digital-to-analog converter), signal processing device (9), reference clock (10), branch ( 11), a phase locked loop (PLL) 12, and a switch 13.

The wavelength sweep light source 1 outputs light (wavelength sweep light) whose frequency changes with time to the optical splitter 2. In other words, the wavelength sweep light source 1 performs frequency sweep (wavelength sweep). In other words, the wavelength sweep light source 1 outputs light whose wavelength changes over time to the optical splitter 2.

For example, as the wavelength sweep light source 1, a laser light source whose wavelength can be controlled by controlling the resonator length, or a laser light source whose wavelength changes depending on the amount of injection current can be used. For example, the wavelength sweep light source 1 may output light that alternately repeats continuous triangle waves of up chirp and down chirp by performing frequency sweep, or repeats the sawtooth wave of up chirp. You may output light that repeats the sawtooth wave of a down chirp, or you may output a pulsed up chirp or down chirp pulse signal.

The optical splitter 2 splits the light output from the wavelength sweep light source into signal light and locally oscillated light. The optical splitter 2 outputs the branched signal light to the optical circulator 3, and outputs the branched local oscillation light to the optical heterodyne receiver 6 (22 in FIG. 1).

The optical circulator 3 outputs the signal light branched by the optical splitter 2 to the reference reflection point 4.

The reference reflection point 4 partially reflects the signal light branched by the optical splitter 2, thereby causing internal reflection. More specifically, in Embodiment 1, the reference reflection point 4 internally reflects the signal light output from the optical circulator 3 by partially reflecting it. The internally reflected light internally reflected by the reference reflection point 4 passes through the optical circulator 3 and is output to the optical heterodyne receiver 6. The signal light passing through the reference reflection point 4 is output to the optical sensor head 5. Examples of reference reflection points 4 include partially reflective mirrors or connector cross-sections.

The optical sensor head 5 emits the signal light (51 in FIG. 1) branched by the optical splitter 2 toward the measurement target 999, and reflects the reflected light (in FIG. 1) reflected by the measurement target 999. 51) is received. More specifically, in Embodiment 1, the optical sensor head 5 emits signal light (51 in FIG. 1) that has passed through the reference reflection point 4 toward the measurement target 999, and ) receives the reflected light (51 in FIG. 1) reflected by . The optical sensor head 5 outputs the received reflected light to the optical heterodyne receiver 6 via the reference reflection point 4 and the optical circulator 3 (31 in FIG. 1).

In addition, as described above, the optical circulator 3 outputs the signal light (21 in FIG. 1) input from the optical splitter 2 side to the reference reflection point 4, and inputs it from the reference reflection point 4 side. The reflected light or internally reflected light (31 in FIG. 1) is output to the optical heterodyne receiver 6.

The optical heterodyne receiver 6 multiplexes the locally oscillated light (22 in FIG. 1) branched by the optical splitter 2 and the reflected light (31 in FIG. 1) received by the optical sensor head 5, and performs the multiplexing process. By photoelectrically converting the light, a received signal (beat signal) is obtained as an electrical signal. In other words, the optical heterodyne receiver 6 responds to the locally oscillated light (22 in FIG. 1) branched by the optical splitter 2 and the reflected light (31 in FIG. 1) received by the optical sensor head 5. Heterodyne processing is performed. Additionally, the optical heterodyne receiver 6 uses, for example, a photodiode (PD) to photoelectrically convert the multiplexed light.

On the other hand, the optical heterodyne receiver 6 produces locally oscillated light (22 in FIG. 1) branched by the optical branching device 2 and internally reflected light obtained by internally reflecting the signal light branched by the optical branching unit 2 (FIG. 31) of 1 is multiplexed, and the multiplexed light is photoelectrically converted to further obtain an internal reception signal as an electrical signal. More specifically, the optical heterodyne receiver 6 receives locally oscillated light (22 in FIG. 1) branched by the optical splitter 2 and internally reflected light (31 in FIG. 1) reflected by the reference reflection point 4. ) is multiplexed, and the multiplexed light is photoelectrically converted to further acquire an internal reception signal as an electrical signal. The optical heterodyne receiver 6 outputs the acquired received signal and the internal received signal (61 in FIG. 1) to the analog-to-digital converter 7, respectively.

The reference clock 10 generates a reference clock signal. The reference clock 10 outputs the generated reference clock signal to the branch 11. The branch 11 branches the reference clock signal generated by the reference clock 10 to the signal processing device 9 and the phase locked loop 12.

The phase locked loop 12 (PLL) generates the second clock signal of the analog-to-digital converter 7. More specifically, in Embodiment 1, the phase locked loop 12 generates the second clock signal of the analog-to-digital converter 7 in synchronization with the reference clock signal branched by the branch 11. The phase locked loop 12 outputs the generated second clock signal (121 in FIG. 1) to the digital-analog converter 8, and also outputs the generated second clock signal (122 in FIG. 1) to the switch 13. Printed to

The digital-to-analog converter (8) (DAC) generates the first clock signal of the analog-to-digital converter (7). More specifically, the digital-to-analog converter 8 generates the first clock signal of the analog-to-digital converter 7 in synchronization with the second clock signal generated by the phase-locked loop 12. The digital-analog converter 8 outputs the generated first clock signal (81 in FIG. 1) to the switch 13. Details of the first clock signal will be described later.

Also, as described above, in Embodiment 1, the digital-to-analog converter 8 generates the first clock signal of the analog-to-digital converter 7 in synchronization with the second clock signal generated by the phase-locked loop 12. The configuration will be explained. However, the optical sensor device 1000 may further include a separate circuit for generating a clock, and the digital-to-analog converter 8 may synchronize with the clock generated by the circuit, 1 It is okay to generate a clock signal. In other words, the frequency of the first clock signal and the frequency of the second clock signal do not need to be synchronized.

The switch 13 switches the clock signal of the analog-to-digital converter 7 to either the first clock signal generated by the digital-analog converter 8 or the second clock signal generated by the phase-locked loop 12. do. For example, when the optical sensor device 1000 acquires the first frequency variation reference signal data described later, the switch 13 converts the clock signal of the analog-to-digital converter 7 into the first frequency change reference signal data generated by the phase-locked loop 12. 2 Switch to clock signal. For example, when the optical sensor device 1000 acquires measurement data related to the measurement object 999 described later, the switch 13 generates the clock signal of the analog-to-digital converter 7, and the digital-to-analog converter 8 generates the clock signal. Switch to the first clock signal.

The analog-to-digital converter 7 samples the internally received signal acquired by the optical heterodyne receiver 6 and converts it into a digital signal. More specifically, in Embodiment 1, the analog-to-digital converter 7 samples the internal reception signal acquired by the optical heterodyne receiver 6 in synchronization with the second clock signal generated by the phase-locked loop 12. do. More specifically, in Embodiment 1, the analog-to-digital converter 7 samples the internal reception signal acquired by the optical heterodyne receiver 6 in synchronization with the second clock signal switched by the switch 13. The analog-to-digital converter 7 outputs the internal reception signal (71 in FIG. 1) converted into a digital signal to the signal processing device 9.

The signal processing device 9 provides a first frequency change reference signal that serves as a reference for the frequency change of the light output from the wavelength sweep light source 1, based on the internal reception signal converted into a digital signal by the analog-to-digital converter 7. Calculate data.

More specifically, in Embodiment 1, the signal processing device 9 synchronizes with the reference clock signal branched by the branch 11 and receives the internal reception signal converted into a digital signal by the analog-to-digital converter 7. Based on this, first frequency variation reference signal data is calculated. The signal processing device 9 outputs the calculated first frequency change reference signal data to the digital-analog converter 8 (91 in FIG. 1). More specifically, the signal processing device 9 stores the calculated first frequency change reference signal data in a memory (not shown), and the memory stores the stored first frequency change reference signal data in the digital-to-analog converter 8. Printed to Details of the first frequency change reference signal data will be described later.

The digital-to-analog converter 8 converts the first frequency change reference signal data calculated by the signal processing device 9 into an analog signal, thereby generating a first frequency change reference signal as the above-described first clock signal. More specifically, in Embodiment 1, the digital-to-analog converter 8 synchronizes with the second clock signal generated by the phase-locked loop 12 and uses the first frequency variation reference calculated by the signal processing device 9. By converting the signal data into an analog signal, a first frequency variation reference signal is generated as the above-described first clock signal. The digital-to-analog converter 8 outputs the generated first frequency change reference signal to the switch 13.

The analog-to-digital converter 7 (ADC) samples the received signal acquired by the optical heterodyne receiver 6 and further converts it into a digital signal. More specifically, the analog-to-digital converter 7 samples the received signal acquired by the optical heterodyne receiver 6 in synchronization with the first frequency variation reference signal generated by the digital-to-analog converter 8. More specifically, in Embodiment 1, the analog-to-digital converter 7 samples the received signal acquired by the optical heterodyne receiver 6 in synchronization with the first frequency variation reference signal switched by the switch 13. . The analog-to-digital converter 7 outputs the received signal (71 in FIG. 1) converted into a digital signal to the signal processing device 9.

The signal processing device 9 calculates measurement data regarding the measurement object 999 based on the received signal converted into a digital signal by the analog-to-digital converter 7. The signal processing device 9 outputs the calculated measurement data to the outside (92 in FIG. 1). Although not shown, the optical sensor device 1000 may further include a display device that displays the calculated measurement data as an image. Examples of measurement data calculated by the signal processing device 9 include information indicating the distance from the optical sensor device 1000 to the measurement object 999, or information indicating the position of the measurement object 999. .

Hereinafter, a specific example of a method for compensating for nonlinearity of wavelength swept light by the optical sensor device 1000 according to Embodiment 1 will be described with reference to the drawings. First, for comparison and contrast, an example where the frequency of the wavelength sweep light exhibits linearity will be described. FIG. 2 is a graph for explaining a specific example of signal processing by the optical sensor device 1000 when the frequency of wavelength swept light exhibits linearity. In other words, in this specific example, the wavelength sweep light source 1 outputs wavelength sweep light showing linearity (for example, a linear up chirp, etc.).

Figure 2 (a) shows the time change (dashed line) of the frequency of the locally oscillated light branched by the optical splitter 2 and the time change of the frequency of the reflected light received by the optical sensor head 5 from the measurement object 999 ( This is a graph showing a solid line). Figure 2(b) shows the time of the frequency (heterodyne frequency) of the received signal (difference bit A) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and reflected light and photoelectrically converting the multiplexed light. This is a graph showing change. Figure 2 (c) is a graph showing the frequency spectrum resulting from the fast Fourier transform (FFT) of the signal processing device 9 on the received signal converted into a digital signal by the analog-to-digital converter 7.

As in this specific example, when the frequency of the wavelength sweep light output by the wavelength sweep light source 1 exhibits ideal linearity, as shown in Figure 2 (a), the locally oscillated light and the measurement target 999 The time delay A between the reflected reflected lights becomes constant, and as Figure 2(b) shows, the frequency of the difference bit A, which is a beat signal obtained by summing them, also becomes constant. Therefore, as Figure 2(c) shows, the frequency spectrum based on difference bit A shows a sharp peak at a specific frequency. As a result, the signal processing device 9 can calculate the position information of the measurement target based on the FFT bin number that includes the specific frequency.

Next, for comparison and contrast, an example will be described where the frequency of the wavelength sweep light exhibits non-linearity, but the optical sensor device 1000 does not compensate for the non-linearity. FIG. 3 is a graph to explain a specific example of signal processing by the optical sensor device 1000 when non-linearity is not compensated. In other words, in this specific example, the wavelength sweep light source 1 outputs wavelength sweep light showing nonlinearity (for example, a linear up chirp, etc.). In addition, in this specific example, the analog-to-digital converter 7 is not synchronized with the first frequency variation reference signal generated by the digital-to-analog converter 8, as described above, but to the first frequency variation reference signal generated by the phase-locked loop 12. 2 It is assumed that the received signal acquired by the optical heterodyne receiver 6 is sampled in synchronization with the clock signal.

Figure 3 (a) shows the time change (dashed line) of the frequency of the locally oscillated light branched by the optical splitter 2 and the frequency received by the optical sensor head 5 from the measurement object 999 in the specific example. This is a graph showing the time change (solid line) of the frequency of reflected light. Figure 3(b) shows the frequency of the received signal (difference bit A) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and the reflected light and photoelectrically converting the multiplexed light in the specific example. This is a graph showing the time change of (heterodyne frequency). Figure 3(c) is a graph showing the frequency spectrum resulting from fast Fourier transform (FFT) by the signal processing device 9 on the received signal converted into a digital signal by the analog-to-digital converter 7 in this specific example. am.

As in this specific example, when the frequency of the wavelength sweep light output by the wavelength sweep light source 1 shows nonlinearity, as shown in Figure 3 (a), the frequency of the locally oscillated light and the measurement target 999 The frequencies of the reflected light reflected each represent a curve, and the time delay A between the locally oscillated light and the reflected light reflected by the measurement object 999 changes with the passage of time. Therefore, as Figure 3(b) shows, the frequency of the difference bit A, which is a bit signal obtained by summing them, also changes with the passage of time. Therefore, as Figure 3(c) shows, the frequency spectrum based on the difference bit A spreads in the direction of the frequency axis, and the resolution of the position measurement of the measurement object decreases.

Next, a specific example of signal processing by the optical sensor device 1000 according to Embodiment 1 will be described. In other words, a specific example of a configuration in which the frequency of the wavelength sweep light exhibits non-linearity and the optical sensor device 1000 compensates for the non-linearity will be described.

First, in a state in which the reflected light reflected from the measurement object 999 is blocked, the optical heterodyne receiver 6 receives the locally oscillated light diverged by the optical splitter 2 and the reflected light reflected by the reference reflection point 4. Internally reflected light is multiplexed, and the multiplexed light is photoelectrically converted to obtain an internal reception signal as an electrical signal. The analog-to-digital converter 7 synchronizes with the second clock signal switched by the switch 13 (the second clock signal generated by the phase-locked loop 12), and receives the internal reception signal acquired by the optical heterodyne receiver 6. Convert it to a digital signal by sampling.

The signal processing device 9 calculates first frequency change reference signal data based on the internally received signal converted into a digital signal by the analog-to-digital converter 7 and stores it in a memory (not shown). For example, the signal processing device 9 calculates the instantaneous frequency of the internally received signal by performing Hilbert transformation on the internally received signal converted to a digital signal by the analog-to-digital converter 7, and multiplies the calculated instantaneous frequency ( By multiplying, the first frequency change reference signal data is calculated. More specifically, for example, the signal processing device 9 performs Hilbert transformation on the internal reception signal converted into a digital signal by the analog-to-digital converter 7, thereby converting the instantaneous frequency f _ref (t) of the internal reception signal to By calculating and multiplying the calculated instantaneous frequency f _ref (t) by K, first frequency change reference signal data of the frequency component Kf _ref (t) is calculated. Additionally, K here is a positive integer.

The digital-to-analog converter 8 converts the first frequency change reference signal data calculated by the signal processing device 9 and stored in a memory (not shown) into an analog signal, thereby converting the first frequency change as a first clock signal. Generate a reference signal.

In this specific example, the analog-to-digital converter 7 synchronizes with the first frequency variation reference signal generated by the digital-to-analog converter 8, and the above-described internal reception signal acquired by the optical heterodyne receiver 6 and the above-described reception Each signal is converted into a digital signal by sampling each signal. In addition, the internal reception signal here is again acquired by the optical heterodyne receiver 6. As described above, the received signal here is the sum of the locally oscillated light diverged by the optical heterodyne receiver 6 and the reflected light received by the optical sensor head 5. It is obtained as an electric signal by photoelectric conversion of the split and multiplied light.

In this specific example, the signal processing device 9 performs fast Fourier transform (FFT) on the internal reception signal and the reception signal converted into a digital signal by the analog-to-digital converter 7, respectively.

FIG. 4 is a graph for explaining a specific example of signal processing for internally reflected light by the optical sensor device 1000 according to Embodiment 1. Figure 4(a) shows the time change (dashed line) of the frequency of the locally oscillated light branched by the optical splitter 2 and the frequency of the internally reflected light reflected by the reference reflection point 4 in this specific example. This is a graph showing change (dotted line).

Figure 4(b) shows an internal reception signal (difference bit B) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and internally reflected light and photoelectrically converting the multiplexed light in this specific example. This is a graph showing the time change (dotted line) of the frequency (heterodyne frequency). Additionally, the dashed and dotted line in Figure 4(b) represents the first frequency change reference signal.

Figure 4(c) is a graph showing the frequency spectrum (dashed line) resulting from the fast Fourier transform of the internal reception signal by the signal processing device 9 in this specific example. In addition, the internal reception signal here is reacquired by the optical heterodyne receiver 6, and converted into a digital signal by the analog-to-digital converter 7 by sampling in synchronization with the above-described first frequency variation reference signal. will be. In addition, the dotted line in (c) of FIG. 4 represents the case where the analog-to-digital converter 7 converts the internal received signal into a digital signal by sampling it in synchronization with the second clock signal of the phase-locked loop 12 described above. Represents the frequency spectrum.

As shown in Figure 4 (a), the frequency of the locally oscillated light and the frequency of the internally reflected light reflected by the reference reflection point 4 respectively show a curve, and the time delay B between the locally oscillated light and the internally reflected light changes with the passage of time. Therefore, as shown by the dotted line in Figure 4(b), the frequency of difference bit B, which is a bit signal obtained by summing them, is also the same as the difference bit A in Figure 3(b), with the passage of time. changes with However, in this specific example, the non-linearity of the wavelength sweep light is compensated by the analog-to-digital converter 7 sampling the internal reception signal in synchronization with the above-described first frequency variation reference signal, (c) in FIG. 4 As the dashed line indicates, the spread of the spectrum is suppressed.

FIG. 5 is a graph for explaining a specific example of signal processing for reflected light by the optical sensor device 1000 according to Embodiment 1. Figure 5(a) shows the time change (dashed line) of the frequency of the locally oscillated light branched by the optical splitter 2 and the frequency received by the optical sensor head 5 from the measurement object 999 in this specific example. This is a graph showing the time change (solid line) of the frequency of reflected light.

Figure 5(b) shows the frequency of the received signal (difference bit A) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and the reflected light and photoelectrically converting the multiplexed light in this specific example. This is a graph showing the time change (solid line) of (heterodyne frequency). Additionally, the dashed-dotted line in Figure 5(b) represents the first frequency change reference signal.

Figure 5(c) is a graph showing the frequency spectrum (dashed line) resulting from the fast Fourier transform of the received signal by the signal processing device 9 in this specific example. The received signal here is converted into a digital signal by sampling in synchronization with the above-described first frequency variation reference signal by the analog-to-digital converter 7. In addition, the solid line in Figure 5 (c) is the frequency spectrum when the analog-to-digital converter 7 converts the received signal into a digital signal by sampling it in synchronization with the second clock signal of the phase-locked loop 12 described above. represents.

As Figure 5(a) shows, the frequency of the locally oscillated light and the frequency of the reflected light received by the optical sensor head 5 from the measurement object 999 respectively represent a curve, and are between the locally oscillated light and the reflected light. The time delay A changes with the passage of time. Therefore, as shown by the solid line in Figure 5(b), the frequency of the difference bit A, which is a bit signal obtained by summing them, also changes with the passage of time. However, in this specific example, the non-linearity of the wavelength sweep light is compensated by the analog-to-digital converter 7 sampling the received signal in synchronization with the above-described first frequency variation reference signal, in (c) of FIG. 5 As the dashed line indicates, the spread of the spectrum is suppressed. As a result, the signal processing device 9 can calculate the position information of the measurement target based on the FFT bin number.

As described above, in Embodiment 1, a configuration in which sampling is performed based on first frequency variation reference signal data calculated in advance based on internal reflected light is adopted, making it simple and reducing the signal processing load during measurement. A high-precision optical sensor device 1000 can be realized.

As described above, the optical sensor device 1000 according to Embodiment 1 includes a wavelength sweep light source 1 that outputs light whose frequency changes with the passage of time, and light output by the wavelength sweep light source 1. An optical sensor head that radiates the signal light branched by the optical splitter 2 toward a measurement target and receives the reflected light reflected by the measurement target. (5), the locally oscillated light branched by the optical splitter 2, and the reflected light received by the optical sensor head 5 are multiplexed, and the multiplexed light is photoelectrically converted to obtain a received signal as an electrical signal. An optical heterodyne receiver 6, an analog-to-digital converter 7 that converts the received signal acquired by the optical heterodyne receiver 6 into a digital signal by sampling, and a first clock signal of the analog-to-digital converter 7. It is provided with a digital-to-analog converter (8) for generating and a signal processing device (9) for calculating measurement data about the measurement object based on the received signal converted into a digital signal by the analog-to-digital converter (7), and an optical heterodyne The receiver 6 combines the locally oscillated light branched by the optical splitter 2 and the internally reflected light obtained by internally reflecting the signal light branched by the optical splitter 2, and photoelectrically converts the combined light. The internal reception signal as an electrical signal is further acquired, the analog-to-digital converter 7 further converts the internal reception signal acquired by the optical heterodyne receiver 6 into a digital signal by sampling, and the signal processing device 9 , Based on the internal received signal converted into a digital signal by the analog-to-digital converter 7, first frequency change reference signal data that serves as a standard for the frequency change of the light output from the wavelength sweep light source 1 is further calculated, and the digital The analog converter 8 converts the first frequency change reference signal data calculated by the signal processing device 9 into an analog signal, thereby generating a first frequency change reference signal as a first clock signal, and the analog-to-digital converter (7) samples the received signal acquired by the optical heterodyne receiver 6 in synchronization with the first frequency variation reference signal generated by the digital-to-analog converter 8.

According to the above configuration, the nonlinearity of the wavelength swept light can be compensated for by sampling the received signal derived from the reflected light from the measurement target in synchronization with the first frequency variation reference signal derived from the internal received signal. As a result, signal processing to compensate for the nonlinearity of the wavelength swept light becomes unnecessary for each measurement, and thus the signal processing load generated by compensating for the nonlinearity of the signal processed wavelength swept light can be reduced.

Embodiment form 2.

In Embodiment 1, a configuration in which the waveform of the wavelength sweep light output by the wavelength sweep light source 1 does not change has been described. However, when the waveform of the wavelength sweep light changes, the resolution of the position measurement of the measurement object decreases. Therefore, in Embodiment 2, a configuration for compensating for the nonlinearity of wavelength sweep light whose waveform changes will be described.

Below, Embodiment 2 will be described with reference to the drawings. In addition, components having the same functions as those described in Embodiment 1 are given the same reference numerals and their descriptions are omitted. FIG. 6 is a block diagram showing the configuration of an optical sensor device 1001 according to Embodiment 2. As Figure 6 shows, the optical sensor device 1001 includes, in addition to the configuration of the optical sensor device 1000 according to Embodiment 1, a digital-to-analog converter 14 (second DAC) (second digital-to-analog converter). , a frequency phase comparator 15, a loop filter 16, and a second branch 17 (shunt) are further provided. Additionally, in Embodiment 2, as described above, the waveform of the wavelength sweep light output by the wavelength sweep light source 1 changes.

The second branch 17 branches the internal reception signal acquired by the optical heterodyne receiver 6 to the frequency phase comparator 15 and the analog-to-digital converter 7. In addition, as described above, the internal reception signal here is the locally oscillated light branched by the optical heterodyne receiver 6 and the optical splitter 2, and the internally reflected light reflected by the reference reflection point 4. It is obtained as an electric signal by multiplexing and photoelectrically converting the multiplexed light. In Embodiment 2, the optical heterodyne receiver 6 acquires the internal reception signal while blocking the reflected light from the measurement object 999.

The analog-to-digital converter 7 samples the internal reception signal branched by the second branch 17 in synchronization with the second clock signal generated by the phase-locked loop 12 and converts it into a digital signal. The analog-to-digital converter 7 outputs the internally received signal converted into a digital signal to the signal processing device 9.

The signal processing device 9 further calculates second frequency change reference signal data based on the internal received signal converted into a digital signal by the analog-to-digital converter 7. More specifically, in Embodiment 2, the signal processing device 9 synchronizes with the reference clock signal branched by the branch 11 and receives the internal reception signal converted into a digital signal by the analog-to-digital converter 7. Based on this, second frequency variation reference signal data is further calculated. The signal processing device 9 outputs the calculated second frequency change reference signal data to the digital-analog converter 14 (93 in FIG. 6). More specifically, in Embodiment 2, the signal processing device 9 stores the calculated second frequency change reference signal data in a memory (not shown), and the memory stores the stored second frequency change reference signal data. It is output to the digital analog converter (14).

The second frequency change reference signal data may be, for example, the internal reception signal itself converted into a digital signal by the analog-to-digital converter 7. Alternatively, the signal processing device 9 may calculate the second frequency change reference signal data by removing unnecessary frequency components from the internal received signal converted into a digital signal by the analog-to-digital converter 7.

The digital-to-analog converter 14 generates a second frequency change reference signal by converting the second frequency change reference signal data calculated by the signal processing device 9 into an analog signal. More specifically, in Embodiment 2, the digital-to-analog converter 14 synchronizes with the second clock signal generated by the phase-locked loop 12 and uses the second frequency variation reference calculated by the signal processing device 9. By converting the signal data into an analog signal, a second frequency variation reference signal is generated. The digital-analog converter 14 outputs the generated second frequency change reference signal to the frequency phase comparator 15 (141 in FIG. 1).

The frequency phase comparator 15 generates a frequency error signal by comparing the internal received signal branched by the second branch 17 and the second frequency change reference signal generated by the digital-to-analog converter 14. do. The frequency phase comparator 15 outputs the generated error signal to the loop filter 16.

The loop filter 16 generates a control signal by integrating the error signal generated by the frequency phase comparator 15. The loop filter 16 outputs the generated control signal to the wavelength sweep light source 1.

The wavelength sweep light source 1 adjusts the frequency of the output light based on the control signal generated by the loop filter 16.

Below, a specific example of a method for compensating for nonlinearity of wavelength swept light by the optical sensor device 1001 according to Embodiment 2 will be described with reference to the drawings. FIG. 7 is a graph for explaining a specific example of signal processing for internally reflected light by the optical sensor device 1001 according to Embodiment 2. Figure 7(a) shows an internal reception signal (difference bit B) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and internally reflected light and photoelectrically converting the multiplexed light in this specific example. This is a graph showing the time change (dotted line) of the frequency (heterodyne frequency). The dashed line in (a) of FIG. 7 represents the second frequency change reference signal generated by the digital-to-analog converter 14.

As the dotted line in Figure 7(a) indicates, the waveform of the wavelength sweep light changes each time the wavelength sweep light source 1 sweeps, so the curve drawing the instantaneous frequency of the difference bit B changes. So, at a specific sweep time, the frequency phase comparator 15, as described above, compares the difference bit B, which is the internal reception signal branched by the second branch 17, and the second frequency generated by the digital-to-analog converter 14. By comparing the variable reference signal, a frequency error signal is generated. The loop filter 16 generates a control signal by integrating the error signal generated by the frequency phase comparator 15. The wavelength sweep light source 1 adjusts the frequency of the output light based on the control signal generated by the loop filter 16, so that the frequency and phase of the output wavelength sweep light are the same as the second reflection point frequency change signal. Converges to frequency and phase. This convergence operation improves the reproducibility of the nonlinearity of the wavelength swept light.

Figure 7(b) is a graph showing the frequency spectrum (solid line) resulting from the fast Fourier transform of the internal reception signal by the signal processing device 9 in this specific example. In addition, the internal reception signal here is an internal reception signal derived from the wavelength sweep light of which the wavelength sweep light source 1 has adjusted the frequency based on the control signal generated by the loop filter 16. The optical heterodyne receiver (6) acquires it, and the analog-to-digital converter (7) converts it into a digital signal by sampling in synchronization with the above-described first frequency change reference signal. In addition, the dotted line in (b) of FIG. 7 represents the case where the analog-to-digital converter 7 converts the internal reception signal into a digital signal by sampling it in synchronization with the second clock signal of the phase-locked loop 12 described above. Represents the frequency spectrum. Additionally, the broken line in Figure 7(b) represents the frequency spectrum when the wavelength sweep light source 1 does not adjust the frequency of the wavelength sweep light.

When the wavelength sweep light source 1 does not adjust the frequency of the wavelength sweep light, the nonlinearity of the wavelength sweep light whose waveform changes is not compensated, so as the dashed line in Figure 7(b) indicates, the spectrum of the difference bit B It spreads in the direction of this frequency axis. On the other hand, when the wavelength sweep light source 1 adjusts the frequency of the wavelength sweep light as described above, since the nonlinearity of the wavelength sweep light whose waveform changes is compensated, as indicated by the solid line in Figure 7(b), the difference The spread of the spectrum of bit B is suppressed.

FIG. 8 is a graph for explaining a specific example of signal processing for reflected light by the optical sensor device 1001 according to Embodiment 2. Figure 8(a) shows the frequency of the received signal (difference bit A) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and the reflected light and photoelectrically converting the multiplexed light in this specific example. This is a graph showing the time change (dashed line) of (heterodyne frequency). The dotted line in (a) of FIG. 8 is a graph showing the time change in the frequency of the difference bit A when the wavelength sweep light source 1 does not adjust the frequency of the wavelength sweep light. The dashed-dotted line in (a) of FIG. 8 represents the first frequency change reference signal.

As the dotted line in Figure 8(a) indicates, the waveform of the wavelength sweep light changes each time the wavelength sweep light source 1 sweeps, so the curve drawing the instantaneous frequency of the difference bit A changes. Therefore, by adjusting the frequency of the light output from the wavelength sweep light source 1 by the above-described means, the frequency and phase of the wavelength sweep light are converged to the same frequency and phase as the second reflection point frequency fluctuation signal. As a result, as shown by the broken line in Fig. 8(a), the instantaneous frequency of the difference bit A also converges, and the fluctuation range for each sweep becomes small.

Figure 8(b) is a graph showing the frequency spectrum (inner solid line) resulting from the fast Fourier transform of the received signal by the signal processing device 9 in this specific example. In addition, the received signal here is a received signal derived from the wavelength swept light whose frequency has been adjusted by the wavelength swept light source 1 based on the control signal generated by the loop filter 16 to the optical heterodyne receiver 6. ) is acquired, and the analog-to-digital converter 7 converts it into a digital signal by sampling in synchronization with the above-described first frequency change reference signal. In addition, the solid line outside (b) of FIG. 8 represents a case where the analog-to-digital converter 7 converts the received signal into a digital signal by sampling it in synchronization with the second clock signal of the phase-locked loop 12 described above. represents the frequency spectrum. Additionally, the broken line in Figure 8(b) represents the frequency spectrum when the wavelength sweep light source 1 does not adjust the frequency of the wavelength sweep light.

When the wavelength sweep light source 1 does not adjust the frequency of the wavelength sweep light, the nonlinearity of the wavelength sweep light whose waveform changes is not compensated, so as the dashed line in Figure 8(b) indicates, the spectrum of the difference bit A It spreads in the direction of this frequency axis. On the other hand, when the wavelength sweep light source 1 adjusts the frequency of the wavelength sweep light as described above, the nonlinearity of the wavelength sweep light whose waveform changes is compensated, as indicated by the inner solid line in Figure 8(b). , the spread of the spectrum of difference bit A is suppressed. As a result, the signal processing device 9 can calculate the position information of the measurement target based on the FFT bin number.

As described above, in Embodiment 2, the sensor resolution can be improved without using an additional interferometer to compensate for the nonlinearity of the wavelength sweep light whose waveform changes. In addition, non-linearity of wavelength sweep light due to environmental fluctuations, etc., and drift of measurement data due to changes in sweep frequency width can be suppressed, and measurement accuracy can be improved by, for example, averaging multiple measurement data. there is.

Embodiment form 3.

In Embodiment 3, a configuration that separates the received signal derived from the reflected light reflected by the measurement object 999 and the internally received signal derived from the internally reflected light reflected by the reference reflection point 4 will be described.

Below, Embodiment 3 will be described with reference to the drawings. In addition, components having the same function as those described in Embodiment 1 or Embodiment 2 are given the same reference numerals and their descriptions are omitted. Fig. 9 is a block diagram showing the configuration of an optical sensor device 1002 according to Embodiment 3. As Figure 9 shows, the optical sensor device 1002 includes, in addition to the configuration of the optical sensor device 1001 according to Embodiment 2, an optical frequency shifter 18, a shift frequency oscillator 19, and a third shunt. (20), it is provided with a low-pass filter 201 (first filter), a high-pass filter 202 (second filter), a frequency doubler 203, and a frequency mixer 204. The optical frequency shifter 18 is installed between the reference reflection point 4 and the optical sensor head 5. The low-pass filter 201 is installed between the second branch 17 and the frequency phase comparator 15. The high-pass filter 202 and the frequency mixer 204 are installed between the second branch 17 and the analog-to-digital converter 7.

The shift frequency oscillator 19 outputs a frequency shift signal for performing a frequency shift to the third branch 20.

The third branch 20 branches the frequency shift signal output from the shift frequency oscillator 19 to the optical frequency shifter 18 and the doubler 203.

The 2 multiplier 203 doubles the frequency shift signal branched by the third branch 20. The double multiplier 203 outputs the doubled frequency shift signal to the frequency mixer 204.

The optical frequency shifter 18 frequency-shifts the signal light that has passed the reference reflection point 4. More specifically, in Embodiment 3, the optical frequency shifter 18 frequency-shifts the signal light that has passed through the reference reflection point 4 based on the frequency shift signal branched by the third branch 20. . More specifically, in Embodiment 3, the optical frequency shifter 18 downshifts the frequency of the signal light that has passed the reference reflection point 4. The optical frequency shifter 18 outputs frequency-shifted (downshifted) signal light to the optical sensor head 5.

As the optical frequency shifter 18, for example, an acousto-optic modulator (AOM) can be used. In that case, the waveform of the frequency shift signal output by the shift frequency oscillator 19 is a sin waveform. For example, as the optical frequency shifter 18, a LiNbO3 phase modulator that applies serrodyne modulation by applying a linear phase chirp to the signal light that has passed through the reference reflection point 4 can be used. In that case, the waveform of the frequency shift signal output by the shift frequency oscillator 19 is a sawtooth waveform that repeats linear voltage changes.

The optical sensor head 5 emits signal light whose frequency has been shifted by the optical frequency shifter 18 toward a measurement target, and receives reflected light reflected by the measurement target. The optical sensor head 5 outputs the received reflected light to the optical frequency shifter 18. The optical frequency shifter 18 frequency-shifts the reflected light output from the optical sensor head 5 again. The optical frequency shifter 18 outputs the frequency-shifted reflected light to the optical heterodyne receiver 6 via the reference reflection point 4 and the optical circulator 3.

The optical heterodyne receiver 6 multiplexes the locally oscillated light branched by the optical splitter 2 and the reflected light output from the optical frequency shifter 18, and performs photoelectric conversion on the multiplexed light, thereby receiving the signal as an electric signal. Acquire the signal. In addition, the optical heterodyne receiver 6 combines the locally oscillated light branched by the optical splitter 2 and the internally reflected light reflected by the reference reflection point 4, and photoelectrically converts the combined light into electricity. The internal reception signal as a signal is further acquired.

The second branch 17 branches the received signal and the internal received signal acquired by the optical heterodyne receiver 6 to the low-pass filter 201 and the high-pass filter 202.

The low-pass filter 201 passes the internal received signal branched by the second branch 17 and blocks the received signal branched by the second branch 17. In other words, by downshifting by the above-described optical frequency shifter 18, the received signal, which is a beat signal based on the frequency difference between reflected light and locally oscillated light, becomes an internal beat signal based on the frequency difference between internally reflected light and locally oscillated light. Because the frequency is higher than the received signal, it is blocked by the low-pass filter 201.

The high-pass filter 202 passes the received signal branched by the second branch 17 and blocks the internal received signal branched by the second branch 17. In other words, by downshifting by the above-described optical frequency shifter 18, the received signal, which is a beat signal based on the frequency difference between reflected light and locally oscillated light, becomes an internal beat signal based on the frequency difference between internally reflected light and locally oscillated light. Because the frequency is higher than the received signal, it passes through the high-pass filter 202.

The frequency phase comparator 15 generates a frequency error signal by comparing the internally received signal passed by the low-pass filter 201 with the second frequency change reference signal generated by the digital-to-analog converter 14. .

The frequency mixer 204 frequency-shifts the received signal passed by the high-pass filter 202 by a frequency twice the amount of the shift by the optical frequency shifter 18. More specifically, in Embodiment 3, the frequency mixer 204 multiplies the received signal passed by the high-pass filter 202 and the frequency shift signal multiplied by 2 by the 2 multiplier 203, thereby generating the received signal. Downshift the signal. The frequency mixer 204 outputs the frequency-shifted (downshifted) received signal to the analog-to-digital converter 7.

The analog-to-digital converter 7 samples the received signal passed by the high-pass filter 202 in synchronization with the first frequency change reference signal previously generated by the digital-to-analog converter 8. More specifically, in Embodiment 3, the analog-to-digital converter 7 receives a received signal frequency-shifted by the frequency mixer 204 in synchronization with the first frequency change reference signal generated by the digital-to-analog converter 8. Sample.

Below, a specific example of a method for separating a received signal and an internal received signal by the optical sensor device 1002 according to Embodiment 3 will be described. FIG. 10 is a graph for explaining a specific example of a method of separating a received signal and an internal received signal by the optical sensor device 1002 according to Embodiment 3. Figure 10 (a) shows the time change (dashed line) of the frequency of the locally oscillated light branched by the optical splitter 2 and the frequency of the internally reflected light reflected by the reference reflection point 4 in this specific example. It is a graph showing the change (dotted line) and the time change (solid line) of the frequency of the reflected light received by the optical sensor head 5 from the measurement object 999 and frequency-shifted again by the optical frequency shifter 18.

The optical frequency shifter 18 _shifts the frequency of the signal light passing through the reference reflection point 4 by f shift (corresponding to the frequency of the shift frequency oscillator 19), and the optical sensor head 5 shifts by f _shift . The frequency of the reflected light received from the measurement object 999 is downshifted again. As a result, as shown in (a) of FIG. 10, only the reflected light component among the light input to the optical heterodyne receiver 6 undergoes a downshift of 2f _shift .

Figure 10(b) shows an internal reception signal (difference bit B) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and internally reflected light and photoelectrically converting the multiplexed light in this specific example. The time change (dotted line) of the frequency (heterodyne frequency) and the received signal (difference bit A) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and the reflected light and photoelectrically converting the multiplexed light. This is a graph showing the time change (solid line) of frequency (heterodyne frequency).

For example, by setting f _shift so that 2f _shift is larger than the maximum value of the instantaneous frequency of bit B, the difference between the locally oscillated light and the internally reflected light by the reference reflection point 4 during sweep, (b) in Figure 10 As shown, the difference bit A between the locally oscillated light and the reflected light reflected by the measurement object can be selectively extracted by the high-pass filter 202. As a result, the difference bit B can be selectively extracted by the low-pass filter 201.

Figure 10(c) shows the time change in frequency of the received signal (difference bit A) input to the analog-to-digital converter 7. Figure 10(d) shows the time change in frequency of the internal reception signal (difference bit B) input to the frequency phase comparator 15.

As shown in FIG. 10(d), among the received signal and the internal received signal branched by the second branch 17 to the low pass filter 201, only the internal received signal (difference bit B) is transmitted to the low pass filter 201. It is selectively extracted by and input to the frequency phase comparator 15. Meanwhile, only the received signal (difference bit A) among the received signal branched by the second branch 17 to the high-pass filter 202 and the internal received signal is selectively extracted by the high-pass filter 202, and the frequency mixer It is entered in (204). Then, the frequency mixer 204 downconverts the input received signal by a frequency twice the amount of the shift by the optical frequency shifter 18. As a result, as shown in FIG. 10(c), the received signal is input to the analog-to-digital converter 7 with the shift component removed by the optical frequency shifter 18.

As described above, in Embodiment 3, in addition to the effects of Embodiment 2, unnecessary received signal components resulting from reflected light from the measurement object can be removed from the signal input to the frequency phase comparator 15, By improving the convergence precision of the wavelength swept light, the resolution of the position measurement of the measurement object can be improved.

In addition, the signal processing device 9 uses the optical frequency shifter 18 when calculating measurement data regarding the measurement object 999 based on the received signal converted into a digital signal by the analog-to-digital converter 7. It may be acceptable to compensate for the nonlinearity of the received signal caused by frequency shift.

Embodiment form 4.

In Embodiment 2, a configuration in which the wavelength sweep light source 1 adjusts the frequency of the wavelength sweep light to compensate for the nonlinearity of the wavelength sweep light whose waveform changes is explained. In Embodiment 4, a configuration that compensates for the nonlinearity of wavelength sweep light whose waveform changes by frequency shifting the locally oscillated light branched by the optical splitter 2 will be described.

Below, Embodiment 4 will be described with reference to the drawings. In addition, components having the same function as those described in Embodiment 1, Embodiment 2, or Embodiment 3 are given the same reference numerals and their descriptions are omitted. Fig. 11 is a block diagram showing the configuration of an optical sensor device 1003 according to Embodiment 4. As Figure 11 shows, the optical sensor device 1003 includes, in addition to the configuration of the optical sensor device 1001 according to Embodiment 2, an optical frequency shifter 18, a frequency mixer 204, and a voltage controlled oscillator ( 205) is further provided.

The loop filter 16 according to Embodiment 4 generates a control signal by integrating the error signal generated by the frequency phase comparator 15, and outputs the generated control signal to the voltage control oscillator 205.

The voltage controlled oscillator 205 generates a control signal for the optical frequency shifter 18 based on the control signal generated by the loop filter 16. The voltage controlled oscillator 205 outputs the generated control signal to the optical frequency shifter 18.

The optical frequency shifter 18 shifts the frequency of the locally oscillated light branched by the optical splitter 2 based on the control signal generated by the voltage-controlled oscillator 205. The optical frequency shifter 18 outputs frequency-shifted locally oscillated light to the optical heterodyne receiver 6.

The optical heterodyne receiver 6 multiplexes the locally oscillated light frequency-shifted by the optical frequency shifter 18 and the internally reflected light obtained by internally reflecting the signal light branched by the optical splitter 2, and converts the multiplexed light into a photoelectric device. The internal reception signal is acquired by conversion. More specifically, in Embodiment 4, the optical heterodyne receiver 6 combines the locally oscillated light frequency-shifted by the optical frequency shifter 18 and the internally reflected light reflected by the reference reflection point 4, An internal reception signal is acquired by photoelectrically converting the combined light.

When the optical sensor device 1003 measures measurement data about the measurement object 999, the optical heterodyne receiver 6 uses locally oscillated light frequency-shifted by the optical frequency shifter 18 and the optical sensor head 5 ) acquires a received signal by multiplexing the received reflected light and photoelectrically converting the multiplexed light.

The frequency mixer 204 frequency-shifts the internal reception signal branched by the second branch 17. When the optical sensor device 1003 measures measurement data about the measurement object 999, the frequency mixer 204 causes the received signal branched by the second branch 17 to frequency shift. More specifically, the frequency mixer 204 shifts the frequencies of the internal received signal and the received signal, respectively, in synchronization with the second clock signal (124 in FIG. 11) generated by the phase locked loop 12. The detailed configuration of the frequency mixer 204 will be described later.

Hereinafter, a specific example of a method for compensating for nonlinearity of wavelength swept light by the optical sensor device 1003 according to Embodiment 4 will be described with reference to the drawings. FIG. 12 shows the frequency (heterodyne signal) of the internal reception signal (difference bit B) acquired by the optical heterodyne receiver 6 multiplexing the locally oscillating light and internally reflected light and photoelectrically converting the multiplexed light in this specific example. This is a graph showing the time change (dotted line) of the dyne frequency. The dashed line in FIG. 12 represents the second frequency change reference signal generated by the digital-to-analog converter 14.

In this specific example, the optical frequency shifter 18, based on the control signal generated by the voltage-controlled oscillator 205, generates the locally oscillated light branched by the optical splitter 2 by the instantaneous frequency f _vco (t). Shift the frequency. As a result, as the dotted line in FIG. ₁₂ indicates, at a specific sweep time )+f _vco (t). f _bX (t) is the frequency of the difference bit B in X at a particular sweep.

The signal processing device 9 calculates second frequency change reference signal data by applying an offset to the frequency of the internal reception signal converted into a digital signal by the analog-to-digital converter 7. More specifically, in this specific example, the signal processing device 9 provides an offset f _offset to the frequency of the internal reception signal converted into a digital signal by the analog-to-digital converter 7, so that the broken line in FIG. 12 becomes As shown, second frequency change reference signal data with a frequency of f _ref (t) + f _offset is calculated. As a result, the control signal generated by the loop filter 16 based on the error signal generated by the frequency phase comparator 15 is f _bX (t) + f _vco (t) = f _ref (t) + f _offset . To achieve this, the instantaneous frequency f _vco (t) of the control signal output by the voltage control oscillator 205 is controlled.

The frequency mixer 204 downshifts the frequency of the internal reception signal branched by the second branch 17 by an offset. More specifically, in this specific example, the frequency mixer 204 downconverts the frequency of the internal reception signal (difference bit B) branched by the second branch 17 by an offset f _offset . As a result, the internal reception signal of the difference bit B converges to f _bX (t) + f _vco (t) - f _offset =f _ref (t). The analog-to-digital converter 7 samples the internally received signal downshifted by the frequency mixer 204.

When measuring measurement data regarding the measurement target 999, the frequency mixer 204 downshifts the frequency of the received signal branched by the second branch 17 by an offset f _offset . The analog-to-digital converter 7 samples the received signal downshifted by the frequency mixer 204 in synchronization with the first frequency change reference signal generated by the digital-to-analog converter 8.

As described above, in Embodiment 4, the comparison frequency in the frequency-phase comparator 15 can be increased by the offset, so the operation is stable and high-accuracy measurement data can be obtained. In addition, by frequency-shifting the locally oscillating light, the nonlinearity of the wavelength-swept light whose waveform changes can be compensated for, so a wavelength-swept light source whose wavelength sweep cannot be externally controlled can be used, and the degree of design freedom can be improved. there is.

The function of the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003 is realized by a processing circuit. That is, the signal processing device 9 is provided with a processing circuit for executing the above-described processing. This processing circuit may be dedicated hardware, but may also be a CPU (Central Processing Unit) that executes a program stored in memory.

FIG. 13(a) is a block showing a hardware configuration that realizes the function of the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003. It's a degree. 13(b) shows hardware executing software that realizes the functions of the signal processing unit 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003. This is a block diagram showing the configuration.

When the processing circuit is the processing circuit 300 of dedicated hardware shown in FIG. 13(a), the processing circuit 300 may be, for example, a single circuit, a complex circuit, a programmed processor, a parallel programmed processor, or an ASIC ( This applies to Application Specific Integrated Circuit (FPGA), Field-Programmable Gate Array (FPGA), or a combination thereof.

The function of the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003 may be realized by a separate processing circuit, or these functions can be combined. It may be realized with one processing circuit.

When the processing circuit is the processor 301 shown in FIG. 13(b), the signal processing device of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003 ( 9) The functions are realized by software, firmware, or a combination of software and firmware.

Additionally, software or firmware is written as a program and stored in the memory 302.

The processor 301 reads and executes the program stored in the memory 302, thereby Realizes the function of the signal processing device 9. That is, the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003 when each of these functions is executed by the processor 301. , and a memory 302 for storing a program through which the above-described processing is executed as a result.

These programs cause the computer to execute the procedures or methods of the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003. The memory 302 stores a program for causing the computer to function as the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003. It may be a storage medium that can be read by a computer.

The processor 301 includes, for example, a CPU, a processing unit, an arithmetic unit, a processor, a microprocessor, a microcomputer, or a digital signal processor (DSP).

The memory 302 includes, for example, non-volatile or volatile semiconductor memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), and EEPROM (Electrically-EPROM); This includes magnetic disks such as hard disks and flexible disks, flexible disks, optical disks, compact disks, mini disks, and DVDs (Digital Versatile Discs).

With respect to the functions of the signal processing device 9 of the optical sensor device 1000, the optical sensor device 1001, the optical sensor device 1002, or the optical sensor device 1003, some of the functions are realized with dedicated hardware, and some are implemented with software or It would be nice if it could be realized with firmware.

In this way, the processing circuit can realize each of the above functions by hardware, software, firmware, or a combination thereof.

In addition, free combination of each embodiment, modification of any component of each embodiment, or omission of any component in each embodiment is possible.

Since the optical sensor device according to the present disclosure can reduce the signal processing load generated by compensating for the nonlinearity of wavelength swept light, it can be used in technology for compensating for the nonlinearity of wavelength swept light.

1: Wavelength sweep light source, 2: Optical splitter, 3: Optical circulator, 4: Reference reflection point, 5: Optical sensor head, 6: Optical heterodyne receiver, 7: Analog-to-digital converter, 8: Digital-to-analog converter, 9: Signal processing unit, 10: reference clock, 11: shunt, 12: phase locked loop, 13: switch, 14: digital-to-analog converter, 15: frequency phase comparator, 16: loop filter, 17: second shunt, 18: Optical frequency shifter, 19: shift frequency oscillator, 20: third shunt, 201: low pass filter, 202: high pass filter, 203: doubler, 204: frequency mixer, 205: voltage controlled oscillator, 300: processing circuit, 301: processor, 302: memory, 999: measurement target, 1000, 1001, 1002, 1003: optical sensor device

Claims (11)

A wavelength sweep light source that outputs light whose frequency changes over time,
an optical splitter that splits the light output from the wavelength sweep light source into signal light and local oscillation light;
an optical sensor head that emits signal light branched by the optical splitter toward a measurement target and receives reflected light reflected by the measurement target;
An optical heterodyne receiver that combines the locally oscillated light branched by the optical splitter and the reflected light received by the optical sensor head, and obtains a received signal as an electric signal by photoelectrically converting the combined light;
an analog-to-digital converter that converts the received signal acquired by the optical heterodyne receiver into a digital signal by sampling;
a first digital-to-analog converter that generates a first clock signal of the analog-to-digital converter;
a phase-locked loop that generates a second clock signal of the analog-to-digital converter;
A signal processing device that calculates measurement data regarding the measurement target based on the received signal converted into a digital signal by the analog-to-digital converter.
Equipped with
The optical heterodyne receiver multiplexes the locally oscillated light branched by the optical splitter and internally reflected light obtained by internally reflecting the signal light split by the optical splitter, and converts the multiplexed light into a photoelectric signal, thereby internally receiving the signal as an electric signal. acquire more signals,
The analog-to-digital converter further converts the internally received signal acquired by the optical heterodyne receiver into a digital signal by sampling,
The signal processing device further calculates first frequency change reference signal data that serves as a reference for the frequency change of the light output from the wavelength sweep light source, based on the internal received signal converted into a digital signal by the analog-to-digital converter,
The first digital-to-analog converter converts the first frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a first frequency change reference signal as the first clock signal,
The analog-to-digital converter samples the received signal acquired by the optical heterodyne receiver in synchronization with the first frequency variation reference signal generated by the first digital-to-analog converter, or a second clock generated by the phase-locked loop. In synchronization with the signal, the optical heterodyne receiver samples the internal received signal acquired.
An optical sensor device characterized in that. A wavelength sweep light source that outputs light whose frequency changes over time,
an optical splitter that splits the light output from the wavelength sweep light source into signal light and local oscillation light;
an optical sensor head that emits signal light branched by the optical splitter toward a measurement target and receives reflected light reflected by the measurement target;
An optical heterodyne receiver that combines the locally oscillated light branched by the optical splitter and the reflected light received by the optical sensor head, and converts the combined light into a photoelectric signal to obtain a received signal as an electrical signal;
an analog-to-digital converter that converts the received signal acquired by the optical heterodyne receiver into a digital signal by sampling;
a first digital-to-analog converter that generates a first clock signal of the analog-to-digital converter;
A signal processing device that calculates measurement data regarding the measurement target based on the received signal converted into a digital signal by the analog-to-digital converter.
Equipped with
The optical heterodyne receiver multiplexes the locally oscillated light branched by the optical splitter and internally reflected light obtained by internally reflecting the signal light split by the optical splitter, and converts the multiplexed light into a photoelectric signal, thereby internally receiving the signal as an electric signal. acquire more signals,
The analog-to-digital converter further converts the internally received signal acquired by the optical heterodyne receiver into a digital signal by sampling,
The signal processing device calculates the instantaneous frequency of the internally received signal by performing Hilbert transformation on the internally received signal converted to a digital signal by the analog-to-digital converter, and multiplies the calculated instantaneous frequency. , further calculating first frequency variation reference signal data that serves as a reference for the frequency variation of the light output from the wavelength sweep light source,
The first digital-to-analog converter converts the first frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a first frequency change reference signal as the first clock signal,
The analog-to-digital converter samples the received signal acquired by the optical heterodyne receiver in synchronization with the first frequency variation reference signal generated by the first digital-to-analog converter.
An optical sensor device characterized in that. A wavelength sweep light source that outputs light whose frequency changes over time,
an optical splitter that splits the light output from the wavelength sweep light source into signal light and local oscillation light;
an optical sensor head that emits signal light branched by the optical splitter toward a measurement target and receives reflected light reflected by the measurement target;
An optical heterodyne receiver that combines the locally oscillated light branched by the optical splitter and the reflected light received by the optical sensor head, and converts the combined light into a photoelectric signal to obtain a received signal as an electrical signal;
an analog-to-digital converter that converts the received signal acquired by the optical heterodyne receiver into a digital signal by sampling;
a first digital-to-analog converter that generates a first clock signal of the analog-to-digital converter;
A signal processing device that calculates measurement data regarding the measurement target based on the received signal converted into a digital signal by the analog-to-digital converter;
quarter tile,
a second digital-to-analog converter;
a frequency phase comparator,
loop filter
Equipped with
The optical heterodyne receiver multiplexes the locally oscillated light branched by the optical splitter and internally reflected light obtained by internally reflecting the signal light split by the optical splitter, and converts the multiplexed light into a photoelectric signal, thereby internally receiving the signal as an electric signal. acquire more signals,
The analog-to-digital converter further converts the internally received signal acquired by the optical heterodyne receiver into a digital signal by sampling,
The signal processing device further calculates first frequency change reference signal data that serves as a reference for the frequency change of the light output from the wavelength sweep light source, based on the internal received signal converted into a digital signal by the analog-to-digital converter,
The first digital-to-analog converter converts the first frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a first frequency change reference signal as the first clock signal,
The analog-to-digital converter samples the received signal acquired by the optical heterodyne receiver in synchronization with the first frequency variation reference signal generated by the first digital-to-analog converter,
The branching device branches the internal reception signal acquired by the optical heterodyne receiver to the frequency phase comparator and the analog-to-digital converter,
The signal processing device further calculates second frequency change reference signal data based on the internal received signal converted into a digital signal by the analog-to-digital converter,
The second digital-to-analog converter converts the second frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a second frequency change reference signal,
The frequency phase comparator generates a frequency error signal by comparing an internal received signal branched by the branch and a second frequency change reference signal generated by the second digital-to-analog converter,
The loop filter generates a control signal by integrating the error signal generated by the frequency phase comparator,
The wavelength sweep light source adjusts the frequency of the output light based on the control signal generated by the loop filter.
An optical sensor device characterized in that. A wavelength sweep light source that outputs light whose frequency changes over time,
an optical splitter that splits the light output from the wavelength sweep light source into signal light and local oscillation light;
an optical sensor head that emits signal light branched by the optical splitter toward a measurement target and receives reflected light reflected by the measurement target;
An optical heterodyne receiver that combines the locally oscillated light branched by the optical splitter and the reflected light received by the optical sensor head, and converts the combined light into a photoelectric signal to obtain a received signal as an electrical signal;
an analog-to-digital converter that converts the received signal acquired by the optical heterodyne receiver into a digital signal by sampling;
a first digital-to-analog converter that generates a first clock signal of the analog-to-digital converter;
a signal processing device that calculates measurement data regarding the measurement target based on the received signal converted into a digital signal by the analog-to-digital converter;
quarter tile,
a second digital-to-analog converter;
a frequency phase comparator,
loop filter,
a voltage controlled oscillator,
optical frequency shifter
Equipped with
The optical heterodyne receiver multiplexes the locally oscillated light branched by the optical splitter and internally reflected light obtained by internally reflecting the signal light split by the optical splitter, and converts the multiplexed light into a photoelectric signal, thereby internally receiving the signal as an electric signal. acquire more signals,
The analog-to-digital converter further converts the internally received signal acquired by the optical heterodyne receiver into a digital signal by sampling,
The signal processing device further calculates first frequency change reference signal data that serves as a reference for the frequency change of the light output from the wavelength sweep light source, based on the internal received signal converted into a digital signal by the analog-to-digital converter,
The first digital-to-analog converter converts the first frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a first frequency change reference signal as the first clock signal,
The analog-to-digital converter samples the received signal acquired by the optical heterodyne receiver in synchronization with the first frequency variation reference signal generated by the first digital-to-analog converter,
The branching device branches the internal reception signal acquired by the optical heterodyne receiver to the frequency phase comparator and the analog-to-digital converter,
The signal processing device further calculates second frequency change reference signal data based on the internal received signal converted into a digital signal by the analog-to-digital converter,
The second digital-to-analog converter converts the second frequency change reference signal data calculated by the signal processing device into an analog signal, thereby generating a second frequency change reference signal,
The frequency phase comparator generates a frequency error signal by comparing an internal received signal branched by the branch and a second frequency change reference signal generated by the second digital-to-analog converter,
The loop filter generates a control signal by integrating the error signal generated by the frequency phase comparator,
The voltage controlled oscillator generates a control signal of the optical frequency shifter based on the control signal generated by the loop filter,
The optical frequency shifter frequency-shifts the locally oscillated light branched by the optical branch based on a control signal generated by the voltage-controlled oscillator,
The optical heterodyne receiver combines locally oscillated light frequency-shifted by the optical frequency shifter and internally reflected light obtained by internally reflecting the signal light branched by the optical splitter, and photoelectrically converts the multiplexed light into an internal reception signal. Acquires a received signal by multiplexing the locally oscillated light frequency-shifted by the optical frequency shifter and reflected light received by the optical sensor head, and photoelectrically converting the multiplexed light.
An optical sensor device characterized in that. The method according to any one of claims 1 to 4,
further comprising a reference reflection point for internal reflection by partially reflecting the signal light branched by the optical splitter,
The optical heterodyne receiver further acquires an internal reception signal as an electric signal by multiplexing the locally oscillated light branched by the optical branch and internally reflected light reflected by the reference reflection point, and photoelectrically converting the multiplexed light.
An optical sensor device characterized in that. According to claim 1,
A switch for switching the clock signal of the analog-to-digital converter to either a first frequency variation reference signal as the first clock signal generated by the first digital-to-analog converter or a second clock signal generated by the phase-locked loop. An optical sensor device further comprising: According to claim 3,
further comprising a reference reflection point, an optical frequency shifter, a first filter, and a second filter;
The reference reflection point causes internal reflection by partially reflecting the signal light branched by the optical splitter,
The optical frequency shifter frequency-shifts the signal light passing through the reference reflection point,
The optical sensor head emits signal light frequency-shifted by the optical frequency shifter toward the measurement target and receives reflected light reflected by the measurement target,
The optical heterodyne receiver further acquires an internal reception signal as an electric signal by multiplexing the locally oscillated light branched by the optical branch and internally reflected light reflected by the reference reflection point, and photoelectrically converting the multiplexed light, ,
The branching device branches the received signal and the internal received signal acquired by the optical heterodyne receiver to the first filter and the second filter,
The first filter passes the internal received signal branched by the branch and blocks the received signal branched by the branch,
The second filter passes the received signal branched by the branch and blocks the internal received signal branched by the branch,
The frequency phase comparator generates a frequency error signal by comparing an internally received signal passed by the first filter and a second frequency change reference signal generated by the second digital-to-analog converter,
The analog-to-digital converter samples the received signal passed by the second filter in synchronization with the first frequency change reference signal generated by the first digital-to-analog converter.
An optical sensor device characterized in that. According to claim 7,
Further provided with a frequency mixer,
The optical frequency shifter further frequency shifts the reflected light received by the optical sensor head,
The frequency mixer frequency-shifts the received signal passed by the second filter by a frequency twice the amount of the shift by the optical frequency shifter,
The analog-to-digital converter samples the received signal frequency-shifted by the frequency mixer in synchronization with the first frequency change reference signal generated by the first digital-to-analog converter.
An optical sensor device characterized in that. According to claim 7,
When calculating measurement data about the measurement object based on the received signal converted into a digital signal by the analog-to-digital converter, the signal processing device determines the nonlinearity of the received signal caused by the frequency shift by the optical frequency shifter. An optical sensor device characterized in that compensating. According to claim 4,
Further provided with a frequency mixer,
The signal processing device calculates the second frequency change reference signal data by applying an offset to the frequency of the internal received signal converted to a digital signal by the analog-to-digital converter,
The frequency mixer downshifts each frequency of the received signal branched by the branch and the internal received signal by the offset.
An optical sensor device characterized in that. delete