KR102615555B1 - Apparatus for manufacturing display device and method for manufacturing display device - Google Patents

Abstract

A display device manufacturing apparatus and a display device manufacturing method are provided. An apparatus for manufacturing a display device according to an embodiment of the present invention includes a chamber, a robot hand for loading and unloading into the chamber, a mark assembly attached to the robot hand and having an alignment mark formed thereon, a center of view is defined, and the alignment mark A camera that acquires location information, a control unit that adjusts the position of the robot hand so that the center of view and the alignment mark match, and a device that stores the location information of the robot hand with the center of view and the alignment mark aligned. Includes a memory unit.

Description

Manufacturing device of a display device and method of manufacturing a display device {APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE}

The present invention relates to a display device manufacturing apparatus and a display device manufacturing method.

The importance of display devices is increasing with the development of multimedia. In response to this, various types of display devices such as liquid crystal displays (LCD) and organic light emitting displays (OLED) are being used.

Among display devices, the liquid crystal display device is one of the most widely used flat panel displays. It consists of two substrates on which electric field generating electrodes, such as a pixel electrode and a common electrode, are formed, and a liquid crystal layer inserted between them, generating an electric field. A voltage is applied to an electrode to generate an electric field in the liquid crystal layer, which determines the orientation of the liquid crystal molecules in the liquid crystal layer and controls the polarization of incident light to display an image.

Meanwhile, among display devices, organic light-emitting displays display images using organic light-emitting diodes (OLEDs), which generate light by recombination of electrons and holes. Such organic light emitting display devices have the advantage of having a fast response speed, high brightness and viewing angle, and being driven with low power consumption.

As various types of display devices become larger and have better picture quality, more sophisticated processes are required. In particular, the alignment process, which is the basis of each step of the process, is essential to implement a precise display device.

The problem to be solved by the present invention is to provide a display device manufacturing apparatus that can accurately perform alignment.

The problem to be solved by the present invention is to provide a method of manufacturing a display device that can accurately perform alignment.

The problem to be solved by the present invention is to provide a manufacturing apparatus for a display device that can automatically learn the alignment position.

The problem to be solved by the present invention is to provide a manufacturing apparatus for a display device that can automatically learn the alignment position.

The problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below.

An apparatus for manufacturing a display device according to an embodiment of the present invention for solving the above problem includes a chamber, a robot hand for loading and unloading into the chamber, a mark assembly attached to the robot hand and forming an alignment mark, and a center of view is defined. , a camera that acquires location information of the alignment mark, a control unit that adjusts the position of the robot hand so that the center of the field of view coincides with the alignment mark, and the robot hand with the center of the field of view and the alignment mark aligned. It includes a memory unit that stores location information.

Additionally, there are a plurality of chambers, and a deposition source may be placed in each chamber.

Additionally, the robot hand may include a stem portion extending in a first direction and a plurality of branch portions extending in a second direction different from the first direction.

Additionally, the mark assembly may be fastened to the stem portion.

Additionally, the mark assembly may be formed integrally with the stem portion.

In addition, it may further include a robot arm that is engaged with the robot hand and moves the robot hand.

Additionally, the mark assembly may include a first mark assembly and a second mark assembly, and the camera may include a first camera and a second camera to correspond thereto.

In addition, it may further include a linear movement driving unit that moves the mark assembly in one or more selected directions among the xyz directions.

In addition, it may further include a rotation driving unit that rotates the mark assembly clockwise or counterclockwise.

An apparatus for manufacturing a display device according to an embodiment of the present invention to solve the above problem includes a chamber, a robot hand for loading and unloading into the chamber, a dummy glass mounted on the robot hand, a guide portion formed inside the chamber, and the dummy glass. and a camera that acquires position information of the guide part, a control part that adjusts the position of the robot hand so that the edge of the dummy glass and the guide part are aligned, and a camera that acquires position information of the robot hand while the dummy glass and the guide part are aligned. Includes a memory unit for storing.

Additionally, the robot hand may include a stem portion extending in a first direction and a plurality of branch portions extending in a second direction different from the first direction.

Additionally, the dummy glass may be fastened to the stem portion and may be seated on the branch portion.

An apparatus for manufacturing a display device according to an embodiment of the present invention for solving the above problem includes a chamber, a robot hand for loading and unloading into the chamber, a dummy glass mounted on the robot hand, and an apparatus attached to the dummy glass, and within the chamber. It may include a sensing unit that obtains interval information, a control unit that adjusts the position of the robot hand based on the interval information, and a memory unit that stores the adjusted position information of the robot hand.

Additionally, the sensing unit may include a plurality of gap sensors, and the gap sensors may be disposed along an edge of the dummy glass.

Additionally, each of the gap sensors may include an upper sensor disposed on an upper portion of the dummy glass and a lower sensor disposed on a lower portion of the dummy glass.

A method of manufacturing a display device according to an embodiment of the present invention to solve the above problem includes learning the alignment position of a robot hand in a chamber and moving the robot hand on which the substrate is placed to the learned alignment position. Processing a substrate, wherein the step of learning the alignment position of the robot hand in the chamber includes acquiring position information of the robot hand using a first camera, and the robot based on the acquired position information. It includes adjusting the position of the hand and storing the adjusted position of the robot hand.

In addition, the center of view of the first camera is defined, and a first mark assembly on which a first alignment mark is formed is fastened to the robot hand,

Obtaining location information of the robot hand using the first camera includes acquiring location information of the center of view of the first camera and the first alignment mark,

Adjusting the position of the robot hand based on the acquired position information may include adjusting the position of the robot hand so that the center of view of the first camera matches the first alignment mark.

In addition, a dummy glass having the same size as the substrate is disposed on the robot hand, and the step of acquiring position information of the robot hand using the first camera includes the positions of the guide portion disposed in the chamber and the dummy glass. It includes acquiring information, and adjusting the position of the robot hand based on the obtained position information may include adjusting the position of the robot hand so that the guide portion and the edge of the dummy glass are aligned. You can.

A method of manufacturing a display device according to an embodiment of the present invention to solve the above problem includes learning the alignment position of a robot hand in a chamber and moving the robot hand on which the substrate is placed to the learned position to collect the substrate. Including the step of processing, wherein the step of learning the alignment position of the robot hand in the chamber includes introducing a dummy glass to which a plurality of sensors are attached into the chamber, between the dummy glass and an object placed inside the chamber. It includes acquiring interval information, adjusting the position of the robot hand based on the interval information, and storing the adjusted position of the robot hand.

In addition, the interval information includes distance information between the object and the dummy glass, and the step of adjusting the position of the robot hand based on the interval information includes the robot so that the distance between the dummy glass and the object does not become 0. The position of the hand can be adjusted.

Specific details of other embodiments are included in the detailed description and drawings.

According to embodiments of the present invention, alignment can be performed accurately.

Additionally, the alignment position can be automatically learned before, during, or after the process.

The effects according to the present invention are not limited to the contents exemplified above, and further various effects are included in the present specification.

1 is a schematic diagram illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention.
FIG. 2 is a plan view of a portion of the configuration of FIG. 1.
FIG. 3 is a block diagram for explaining a manufacturing apparatus for a display device according to the embodiment of FIG. 1 .
4 is a partial plan view of an apparatus for manufacturing a display device according to an embodiment of the present invention.
Figure 5 is a schematic diagram to explain some concepts in the present invention.
6 is a plan view of a display device manufacturing apparatus according to another embodiment of the present invention.
Figure 7 is a partial enlarged view of the ““A”” part of Figure 6.
Figure 8 is a block diagram of a display device manufacturing apparatus according to another embodiment of the present invention.
9 is a partial plan view of a display device manufacturing apparatus according to an embodiment of the present invention.
FIG. 10 is a cross-sectional view taken along line I-I' of FIG. 9.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below and will be implemented in various different forms. The present embodiments only serve to ensure that the disclosure of the present invention is complete and that common knowledge in the technical field to which the present invention pertains is not limited. It is provided to fully inform those who have the scope of the invention, and the present invention is only defined by the scope of the claims.

When an element or layer is referred to as “on” or “on” another element or layer, it refers not only to being directly on top of another element or layer, but also to having another element or layer in between. Includes all. On the other hand, when an element is referred to as “directly on” or “directly on”, it indicates that there is no intervening element or layer.

Spatially relative terms "below", "beneath", "lower", "above", "on", "on", "above" upper)" and the like can be used to easily describe the correlation between one element or component and other elements or components, as shown in the drawing. Spatially relative terms should be understood as terms that include different directions of the element during use or operation in addition to the direction shown in the drawings. For example, if an element shown in the drawings is turned over, an element described as “below” another element may be placed “above” the other element. Additionally, an element described as being located to the “left” of another element based on the drawing may be located to the “right” of another element depending on the viewpoint. Accordingly, the illustrative term “down” may include both downward and upward directions. Elements can also be oriented in other directions, in which case spatially relative terms can be interpreted according to orientation.

Although first, second, etc. are used to describe various components, these components are of course not limited by these terms. These terms are merely used to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below may also be a second component within the technical spirit of the present invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In addition, terms such as "include" or "have" are intended to designate the presence of features, numbers, steps, operations, components, parts, or a combination thereof described in the specification, but are not intended to indicate the presence of one or more other features or numbers, The existence or addition of steps, operations, components, parts or combinations thereof is not excluded in advance.

The same reference numerals are used for identical or similar parts throughout the specification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a schematic diagram illustrating a manufacturing apparatus for a display device according to an embodiment of the present invention. FIG. 2 is a plan view of a portion of the configuration of FIG. 1. FIG. 3 is a block diagram for explaining a manufacturing apparatus for a display device according to the embodiment of FIG. 1 .

1 to 3, the display device manufacturing apparatus according to an embodiment of the present invention includes at least one chamber (CH1, CH2, CH3, TC1, TC2), a robot hand (RH), and cameras 410 and 420. ), mark assemblies 310 and 320, a control unit 910 and a memory unit 930.

In one embodiment, the chamber may include one or more selected from the first chamber (CH1), the second chamber (CH2), the third chamber (CH3), the first transfer chamber (TC1), and the second transfer chamber (TC2). there is.

The plurality of chambers listed here are illustrative, and of course, the scope of the display device manufacturing apparatus is not limited by the number and type of chambers.

In one embodiment, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) may be processing chambers that process an object (eg, a substrate).

In one embodiment, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) may be deposition chambers for depositing an organic layer of an organic light emitting display device. That is, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) may be deposition chambers for depositing organic layers that emit light of different colors. Specifically, a first organic layer may be formed in the first chamber CH1, a second organic layer may be formed in the second chamber CH2, and a third organic layer may be formed in the third chamber CH3. In one embodiment, the first organic layer, the second organic layer, and the third organic layer may each emit different colors. When the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) are deposition chambers for depositing the organic layer of the organic light emitting display device, each chamber includes a deposition source (not shown) and a deposition source (not shown) for deposition. May include a mask (not shown).

That is, the display device manufacturing apparatus according to an embodiment of the present invention may be a manufacturing apparatus for manufacturing an organic light emitting display device.

In one embodiment, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) are sealed, and the internal space of each chamber may be physically separated.

The first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) can be opened and closed. That is, while the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) are open, the robot hand (RH), which will be described later, can enter the inside of the chamber. To this end, although not shown in the drawings, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) may include an entrance through which the robot hand (RH) deposits and withdraws.

1 illustrates a case where the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) are arranged sequentially, but is not limited to this, and the first chamber (CH1), the second chamber ( CH2) and the third chamber (CH3) may be arranged to be spaced apart from each other.

In one embodiment, the display device manufacturing apparatus may include a first transfer chamber TC1 and a second transfer chamber TC2. The first transfer chamber TC1 and the second transfer chamber TC2 may function as an entrance and/or an exit through which an object enters the system. For example, the object is brought into the first transfer chamber TC1, passes through processing steps performed in the first chamber CH1, second chamber CH2, and third chamber CH3, and then transferred to the second transfer chamber TC2. It can be taken out.

A robot hand (RH) may be placed adjacent to each chamber. In one embodiment, the robot hand (RH) supports the object and can bring the object into each chamber or take the processed object out of the chamber.

Referring to FIG. 2, in one embodiment, the robot hand (RH) includes a stem portion 100 extending in the longitudinal direction and branch portions 210, 220, 230, and 240 extending to intersect the stem portion 100. It can be included.

In one embodiment, the stem portion 100 may have a bar shape extending in the x-axis direction of FIG. 2 . The branch portions 210, 220, 230, and 240 may have a bar shape extending in the y-axis direction. That is, in one embodiment, the stem portion 100 and the branch portions 210, 220, 230, and 240 may intersect each other perpendicularly. However, it is not limited to this, and in another embodiment, the stem portion 100 and the branch portions 210, 220, 230, and 240 may intersect at an angle.

In one embodiment, the branch portions 210, 220, 230, and 240 may be plural. For convenience of explanation, the case where the branch has a first branch 210, a second branch 220, a third branch 230, and a fourth branch 240 will be described as an example, but the number of branches is limited to this. It is not limited.

That is, in other embodiments, the number of branches may be less than 4 or more than 5.

The first branch 210, the second branch 220, the third branch 230, and the fourth branch 240 are spaced apart from each other and may be arranged side by side. The first branch 210, the second branch 220, the third branch 230, and the fourth branch 240 may support the object. That is, a substrate, etc. is supported by the first branch 210, the second branch 220, the third branch 230, and the fourth branch 240, and can enter or exit each chamber.

The robot hand (RH) can form a transfer robot (TR) together with the robot arm (RA).

In one embodiment, the robot hand (RH) may be driven by the robot arm (RA). That is, the robot arm (RA) having at least one joint can move the robot hand (RH) forward/backward, up/down, and rotationally. The rotational movement may include a clockwise or counterclockwise rotational movement performed on any one of the xy plane, yz plane, and xz plane. For this purpose, one end of the robot arm (RA) may be engaged with the robot hand (RH). When the robot arm (RA) and the robot hand (RH) are fixed, the robot arm (RA) brings the robot hand (RH) into the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3). Alternatively, it may be taken out from the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3).

Referring to FIG. 2, the mark assemblies 310 and 320 are disposed adjacent to the first branch 210, the second branch 220, the third branch 230 and the fourth branch 240. You can.

In one embodiment, a display device manufacturing apparatus may include at least two mark assemblies 310 and 320. For convenience of explanation, these will be referred to as the first mark assembly 310 and the second mark assembly 320.

In one embodiment, the first mark assembly 310 and the second mark assembly 320 include a first branch 210, a second branch 220, a third branch 230, and a fourth branch 240. ) can be placed on the outside.

Specifically, the first mark assembly 310 may be disposed outside the first branch 210, and the second mark assembly 320 may be disposed outside the fourth branch 240.

In another embodiment, the first mark assembly 310 and/or the second mark assembly 320 may be disposed between one branch and an adjacent branch.

The first mark assembly 310 may be substantially the same as the second mark assembly 320. Accordingly, the description of the first mark assembly 310 below may also be applied to the second mark assembly 320.

FIG. 4 may be referred to for a detailed description of the first mark assembly 310. 4 is a partial plan view of an apparatus for manufacturing a display device according to an embodiment of the present invention.

Referring to FIG. 4, the first mark assembly 310 may be fastened to the robot hand (RH). In one embodiment, the first mark assembly 310 may be fastened to the stem portion 100 of the robot hand (RH).

In one embodiment, the first mark assembly 310 and the robot hand (RH) may be fastened to be detachable.

In another embodiment, the first mark assembly 310 and the robot hand (RH) may be formed as one piece and may not be detachable.

In one embodiment, the first mark assembly 310 may be fastened to move on the robot hand (RH).

In one embodiment, the first mark assembly 310 may move linearly in one or more directions selected from the x-axis, y-axis, and z-axis directions.

For this purpose, the first mark assembly 310 may include a linear movement driving unit. The linear movement driver may include one or more selected from an x-axis driver (DX), a y-axis driver (DY), and a z-axis driver (not shown).

The x-axis driver (DX) can linearly move the first mark assembly 310 in the x-axis direction, and the y-axis driver (DY) can linearly move the first mark assembly 310 in the y-axis direction.

For fine movement, one or more selected from the x-axis drive unit (DX), y-axis drive unit (DY), and z-axis drive unit (not shown) may be fastened with a screw.

For example, in the case of the

However, this is an example, and the structures of the x-axis driver (DX), y-axis driver (DY), and z-axis driver (not shown) are not limited thereto.

In one embodiment, the first mark assembly 310 may further include a rotation driver (RO). The rotation driver RO may rotate the first mark assembly 310 clockwise or counterclockwise on the xy plane.

The driving of the first mark assembly 310 may be performed automatically or manually.

The first alignment mark M1 may provide a reference position to the robot hand RH. For this purpose, the first alignment mark M1 needs to be aligned in advance with a specific position on the substrate. That is, in the process of matching the substrate and the first alignment mark (M1) in advance (only through this process can the alignment position be learned without a substrate), the linear movement driver and the rotation driver described above are connected to the first alignment mark (M1). ) can play a role in adjusting the position of

The first mark assembly 310 may include a first alignment mark M1 formed on the upper surface. The first alignment mark M1 formed on the first mark assembly 310 may be formed in a position that can be seen when viewed from above and downward. That is, it can be formed on the upper surface of a bird's eye view.

The first alignment mark M1 may have a polygonal or circular shape, and its shape is not particularly limited. 5 and the like illustrate a case where the first alignment mark M1 has a ring shape in order to match the first alignment mark M1 and the first viewing center VC1. In this specification, “the first alignment mark (M1) and the first center of view (VC1) coincide” means that the first center of view (VC1) is disposed in the hollow part of the first alignment mark (M1). It can be defined as a case. However, it is not limited to this, and when the first alignment mark M1 has a different shape, it may mean a case where the first alignment mark M1 and the center of the field of view overlap at least partially.

In one embodiment, the first alignment mark M1 may be an embossed pattern formed using a metal or non-metallic material, or an intaglio pattern that is at least partially recessed.

The display device manufacturing apparatus according to an embodiment of the present invention may include cameras 410 and 420 disposed inside each chamber. That is, each chamber may include at least one camera.

For convenience of explanation, the first camera 410 and the second camera 420 disposed in the first chamber CH1 will be described as an example.

It has been stated in advance that the description of the first chamber (CH1) related to the camera can also be applied to the second chamber (CH2), the third chamber (CH3), the first transfer chamber (TC1), and the second transfer chamber (TC2). put it

Referring to Figure 3, the first camera 410 may be placed at a position corresponding to the first mark assembly 310, and the second camera 420 may be placed at a position corresponding to the second mark assembly 320. there is.

In one embodiment, the first camera 410 may be placed on the top of the first mark assembly 310, and the second camera 420 may be placed on the top of the second mark assembly 320.

The first camera 410 may collect location information of the first alignment mark M1 formed on the first mark assembly 310. Likewise, the second camera 420 may collect location information of the second alignment mark M2 formed on the second mark assembly 320.

The location information collected by the first camera 410 and the second camera 420 will be described in detail with reference to FIG. 5. Figure 5 is a schematic diagram to explain some concepts in the present invention.

FIG. 5 shows first data d1 captured by the first camera 410 and second data d2 captured by the second camera 420.

In one embodiment, the first data d1 may include location information of the first viewing center VC1 and the first alignment mark M1 of the first camera 410.

Referring to FIG. 5 , first data d1 may include location information of the first alignment mark MP1 before correction.

Terms are defined for convenience of explanation. In this specification, the center of view may mean the geometric center of an image or video captured by a camera.

The first viewing center VC1 is the screen center of the first data d1 captured by the first camera 410 (here, the first data may be in the form of an image or a video). In other words, the first data d1 may mean the geometric center of the screen being captured.

The first data d1 may include location information of the first alignment mark MP1 before correction.

Accordingly, the first data d1 may include the positional relationship between the first alignment mark MP1 before correction and the first center of view VC1. As will be explained in detail later, the control unit 910 may control the robot hand (RH) so that the first alignment mark (M1) and the first center of view (VC1) coincide with each other based on this positional relationship.

The second data d2 captured by the second camera 410 may also be substantially the same as the first data d1. Specifically, the second data d2 may include location information of the second viewing center VC2 and the second alignment mark MP2 before correction.

As such, when the display device manufacturing apparatus according to some embodiments of the present invention performs an alignment operation using at least two cameras, the accuracy of the alignment operation can be improved.

Referring again to FIG. 3 , the display device manufacturing apparatus according to an embodiment of the present invention may include a data processing unit 800, a control unit 910, a memory unit 930, and a driver 920.

The data processing unit 800 may process information acquired by the first camera 410 and/or the second camera 420. That is, the data processing unit 800 may process the information acquired by the first camera 410 and/or the second camera ( 420) can convert the acquired information into a format suitable for transmission and provide it to the control unit 910.

The data processing unit 800 may provide necessary information to the control unit 910 through wired or wireless communication.

The wired communication method may be, for example, a method using USB (Universal serial bus), HDMI (High definition multimedia interface), RS-232 (recommended standard 232), or POTS (plain old telephone service).

Wireless communication methods include, for example, Wi-Fi, Bluetooth, Zigbee, GPS, cellular communication (LTE, LTE-A, CDMA, WCDMA, UMTS, Wibro, GsSM) and It may be NFC communication.

However, this is an example, and wired and wireless communication methods are not limited to this.

The control unit 910 may adjust the position of the robot hand (RH) based on information provided from the data processing unit 800. The control unit 910 may include a central processing unit (CPU) to process the provided information and control the driving unit 920, which will be described later, based on this.

Specifically, as shown in FIG. 5, the control unit 910 adjusts the first alignment mark M1 and the second alignment mark M2 after correction to the first viewing center VC1 and the second viewing center VC2. The position of the robot hand (RH) can be corrected to match.

In one embodiment, the position of the robot hand (RH) may be adjusted by the robot arm (RA) as described above. The control unit 910 issues a control command to the driving unit 920, and according to this, the driving unit 920 can drive the robot arm RA in the manner described above. To drive the robot arm (RA), the driving unit 920 may include at least one motor or actuator.

By adjusting the position of the robon hand (RH) so that the first alignment mark (M1) and the second alignment mark (M2) are aligned with the first center of view (VC1) and the second center of view (VC2), the control unit 910 ) can store the location information of the robot hand (RH) in the memory unit 930.

To this end, the memory unit 930 may include built-in and/or external memory.

Built-in memory is, for example, volatile memory (e.g., dynamic RAM (DRAM), static RAM (SRAM), synchronous dynamic RAM (SDRAM), etc.) or non-volatile memory (e.g., one time memory (OTPROM)). It may include at least one of programmable ROM (programmable ROM), programmable ROM (PROM), erasable and programmable ROM (EPROM), electrically erasable and programmable ROM (EEPROM), mask ROM, flash ROM, NAND flash memory, NOR flash memory, etc.) .

External memory may be, for example, a flash drive, such as compact flash (CF), secure digital (SD), micro secure digital (Micro-SD), mini secure digital (Mini-SD), extreme digital (xD), or Memory Stick. It may include etc.

When the location information of the robot hand (RH) is stored, the robot hand (RH) can move to the stored position while mounting an object (eg, a substrate) thereon in a subsequent process.

That is, the display device manufacturing apparatus according to an embodiment of the present invention can learn the alignment position of the robot hand (RH) before the full-scale manufacturing process begins. And when the manufacturing process begins, the robot hand (RH) can move to the learned alignment position. Accordingly, the accuracy of the process can be improved, and the time spent on separate alignment can be saved, thereby improving process efficiency.

Next, a manufacturing apparatus for a display device according to another embodiment of the present invention will be described.

6 is a plan view of a display device manufacturing apparatus according to another embodiment of the present invention.

Figure 7 is a partial enlarged view of the ““A”” part of Figure 6.

Referring to FIGS. 6 and 7 , the display device manufacturing apparatus according to one embodiment is different from the embodiment of FIG. 1 in that it includes a dummy glass DG disposed on the robot hand RH.

In one embodiment, a display device manufacturing apparatus may include dummy glass (DG). The dummy glass DG may have substantially the same size as the substrate that is the object of the display device manufacturing method described later. If the dummy glass (DG) has the same size as the substrate, the accuracy of the process can be improved by accurately learning position information before the substrate is inserted and the process begins.

In one embodiment, the dummy glass (DG) may be fastened and fixed to the robot hand (RH). Specifically, the dummy glass (DG) may be fastened to the stem portion 100 of the robot hand (RH).

Since the dummy glass DG is replaced by a substrate in a process to be described later, it can be detachably fastened to the stem portion 100. Additionally, since the dummy glass DG is replaced with the substrate in a process to be described later, it can be seated on the branch portions 210, 220, 230, and 240 like the substrate. That is, it can be supported by the branch portions 210, 220, 230, and 240. In other words, the substrate has the same size as the dummy glass DG and can be placed at the same location as the dummy glass DG.

However, since the dummy glass (DG) needs to be securely fixed to the robot hand (RH) until the stage of learning the alignment position information, at least two fixing members (the first fixing member 610 and the second fixing member in FIG. 6) (620)) may be used to fasten the stem portion (ST) and the dummy glass (DG).

In one embodiment, the first chamber CH1 may include a guide unit 510 that guides the dummy glass DG.

The guide unit 510 may guide the position of the dummy glass DG. To this end, the guide portion 510 may be drawn in a line shape inside the chamber or may be formed in a concave or embossed pattern. In one embodiment, the guide portion 510 may be disposed at a position corresponding to a corner portion of the dummy glass DG.

FIG. 6 illustrates a case where four guide parts 510 are disposed at four corners of the dummy glass DG.

Referring to FIG. 7 , the first camera 410 may photograph the corner portion and guide portion 510 of the dummy glass DG.

That is, the first data d1 of the first camera 410 may include location information of the corner portion of the dummy glass DG and the guide portion 510. Specifically, the first data d1 may include an x-axis gap (x) and a y-axis gap (y) between the dummy glass DG and the guide unit 510.

The control unit 910 controls the robot hand ( The position of RH) can be adjusted.

Figure 7 illustrates a case where the first camera 410 photographs the positional relationship between the dummy glass DG and the guide unit 510, but the number of cameras is not limited thereto.

In one embodiment, the second camera 420 may perform substantially the same role as the first camera 410. Specifically, the second camera 420 may photograph the guide unit 510 and the dummy glass DG from corners other than the corner of the dummy glass DG that the first camera 410 photographs.

Additionally, the control unit 910 may adjust the position information of the robot hand (RH) based on the second data (d2) captured by the second camera 420.

In this way, when the second camera 420 is additionally used, it may be advantageous in terms of alignment accuracy compared to when only the first camera 410 is used.

Referring to FIG. 8 , an apparatus for manufacturing a display device according to an embodiment of the present invention may include a sensing unit 700. The sensing unit 700 may include a plurality of sensors.

In one embodiment, the sensing unit 700 may include a plurality of sensors.

A plurality of sensors may be arranged along the edge of the dummy glass DG. 8 shows a first sensor (SE1), a second sensor (SE2), a third sensor (SE3), a fourth sensor (SE4), a fifth sensor (SE5), and a sixth sensor along the edge of the dummy glass (DG). This illustrates the case where (SE6) is placed.

However, this is an example and the location or number of sensors is not limited thereto.

In one embodiment, the first sensor (SE1), the second sensor (SE2), the third sensor (SE3), the fourth sensor (SE4), the fifth sensor (SE5), and the sixth sensor (SE6) may be gap sensors. there is. A gap sensor is a concept that includes a displacement sensor and may mean a sensor that can sense the gap with a specific object.

In one embodiment, the gap sensor may include a laser sensor. In this case, the gap sensor may include a light emitting unit (not shown) and a light receiving unit (not shown).

When a plurality of gap sensors are disposed on the edge of the dummy glass DG, information on the gap between the dummy glass DG and an object placed in the chamber or the space inside the chamber can be obtained.

In one embodiment, an object disposed in the chamber or an internal space of the chamber may include an inner wall of the chamber, an entrance to the chamber, a deposition source or stage disposed when the chamber is a deposition chamber, etc. However, this is an example, and the type of chamber or object placed inside the chamber is not limited thereto.

In one embodiment, the distance information between the dummy glass DG and an object placed in the chamber interior space may include distance information between the dummy glass DG and an object disposed in the chamber interior space.

The data processing unit 800 may provide the information collected by the sensing unit 700 to the control unit 910. The method of providing information to the control unit 910 may be substantially the same as that previously described in the display device manufacturing apparatus according to an embodiment of the present invention. That is, wired and/or wired communication methods may be used. The control unit 910 may adjust the position of the robot hand (RH) based on the transmitted interval information. Specifically, the position of the dummy glass DG can be controlled so that it does not contact other components within the chamber.

In one embodiment, the controller 910 may control the robot hand (RH) so that the distance between the dummy glass (DG) and the object does not become “0”. When the distance between the dummy glass (DG) and the object is “0”, it means that the object and the dummy glass (DG) are in contact. If the distance between the dummy glass (DG) and the object is “0”, the substrate described later may collide with the object inside the chamber, which may cause damage to the substrate. Accordingly, the control unit can control the position of the robot hand (RH) so that the distance between the dummy glass (DG) and the object does not become “0”.

In addition, when a plurality of sensors are placed on the dummy glass (DG), the control unit 910 prevents all interval information obtained from each sensor from becoming 0 (only in this way can collisions in all directions be prevented). The position of the hand (RH) can be controlled.

Once a position that does not contact other objects is determined, the control unit 910 can store this position in the memory unit 930.

The method of controlling the robot hand (RH) by controlling the control unit 910 and the driving unit 920 and the memory unit 930 may be substantially the same as those previously described in the display device manufacturing apparatus according to an embodiment of the present invention. . Therefore, detailed description thereof will be omitted.

If the alignment is misaligned during the process, the substrate may come into contact with other components, which may cause damage to the substrate. As described above, when the interval information between each component is extracted using a plurality of sensors and the position of the robot hand (RH) is learned and memorized, the loading or unloading of the substrate placed on the robot hand (RH) is carried out. It can prevent damage during the process.

9 is a plan view of a display device manufacturing apparatus according to another embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line I-I' of FIG. 9.

9 and 10, one of the first sensor SE1, the second sensor SE2, the third sensor SE3, and the fourth sensor SE4 is disposed on the upper surface of the dummy glass DG. It includes an upper sensor and a lower sensor disposed on the bottom of the dummy glass (DG).

In one embodiment, one or more selected from the first sensor (SE1), the second sensor (SE2), the third sensor (SE3), and the fourth sensor (SE4) may include an upper sensor and a lower sensor.

10 shows that the first sensor SE1 includes a first upper sensor (SE1_1) and a first lower sensor (SE1_2), and the second sensor (SE2) includes a second upper sensor (SE2_1) and a second lower sensor (SE2_2) ) is an example.

In one embodiment, the first sensor SE1 may be substantially the same as the second sensor SE2, the third sensor SE3, and the fourth sensor SE4. Accordingly, the description of the first sensor SE1 below may be equally applied to the second sensor SE2, third sensor SE3, and fourth sensor SE4.

The first upper sensor SE1_1 and the second upper sensor SE1_2 may be disposed with the dummy glass DG interposed therebetween. Accordingly, the first upper sensor (SE1_1) and the first lower sensor (SE1_2) may overlap each other. The first upper sensor (SE1_1) and the first lower sensor (SE1_2) are both gap sensors, and can sense gap information between the first upper sensor (SE1_1) and the first lower sensor (SE1_2) and surrounding objects.

As described above, when sensors are placed on the upper and lower surfaces of the dummy glass DG, information on the interval between the dummy glass DG and various objects placed in the chamber can be obtained in more detail. Accordingly, it is possible to prevent the substrate, which will be described later, from colliding with other objects within the chamber and being damaged.

Hereinafter, a method of manufacturing a display device according to some embodiments of the present invention will be described. Next, a method of manufacturing a display device according to an embodiment of the present invention will be described. In the following embodiments, the same components as those already described will be referred to by the same reference numerals, and redundant descriptions will be omitted or simplified.

The method of manufacturing a display device according to some embodiments of the present invention may be performed by the manufacturing apparatus of a display device according to some embodiments described above. However, this is one of several embodiments, and the manufacturing method is not limited to the type of device.

A method of manufacturing a display device according to an embodiment includes learning the alignment position of a robot hand (RH) in a chamber and processing the substrate by moving the robot hand (RH) on which the substrate is placed to the alignment position. do.

Specifically, the step of learning the alignment position of the robot hand (RH) includes acquiring position information of the robot hand (RH) using a camera, and adjusting the position of the robot hand (RH) based on the acquired position information. It may include the step of storing the position of the step and the adjusted robot hand (RH).

In one embodiment, the step of learning the alignment position of the robot hand (RH) using a camera may be performed in the same manner as described in FIGS. 3 and 5. Here, the camera may be the first camera 410 and/or the second camera 420.

Specifically, the first camera 410 with a defined first viewing center VC1 may acquire position information of the first alignment mark M1 formed on the first mark assembly 310. The acquired location information may be provided to the control unit 910 through the data processing unit 800.

The control unit 910 can control the robot hand (RH) and adjust its position. Specifically, the control unit 910 may adjust the position of the robot hand (RH) so that the first alignment mark (M1) and the first center of view (VC1) coincide.

If the first alignment mark (M1) and the first viewing center (VC1) coincide, the control unit 910 may store the position information of the robot hand (RH) in the memory unit 930.

The above-described process may be performed in the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3), respectively. That is, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) have respective alignment positions, and the robot hand (RH) can move to each alignment position.

Next, a step of processing the substrate may be performed by moving the robot hand (RH) on which the substrate is placed to the alignment position.

As described above, a substrate may be placed on the robot hand RH as an object. With the substrate seated, the robot hand (RH) can move to any one chamber selected from the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3). Additionally, within each chamber, the substrate may be processed according to a defined method. As described above, when the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) are chambers for the deposition process, the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3) In CH3), an organic layer can be deposited on the substrate.

In another embodiment, the step of learning the alignment position of the robot hand (RH) may be performed in the same manner as described in FIG. 6.

Specifically, acquiring position information of the robot hand (RH) using a camera may include acquiring position information of the guide unit 510 and the dummy glass (DG) partitioned within the chamber. Specifically, the camera may obtain information on the gap between the guide unit 510 and the edge of the dummy glass DG.

Next, a step of adjusting the position of the robot hand (RH) based on the acquired position information may be performed. The control unit 910 may adjust the position of the robot hand (RH) so that the edges of the guide unit 510 and the dummy glass (DG) are aligned.

When the edges of the dummy glass DG and the guide unit 510 are aligned, the control unit 910 may store the adjusted position of the robot hand (RH) in the memory unit 930. The step of processing the substrate by moving the robot hand (RH) on which the substrate is placed to the alignment position is the same as the previous embodiment, so description thereof will be omitted.

A method of manufacturing a display device according to an embodiment of the present invention includes learning the alignment position of a robot hand (RH) in a chamber and processing the substrate by moving the robot hand (RH) on which the substrate is placed to the alignment position. Includes.

Specifically, the step of learning the alignment position of the robot hand (RH) includes bringing a dummy glass (DG) with a plurality of sensors attached into the chamber, and spacing information between the dummy glass (DG) and an object placed inside the chamber. It may include acquiring and adjusting the position of the robot hand (RH) based on interval information.

The dummy glass DG to which a plurality of sensors are attached may be substantially the same as that previously described in FIG. 8 . While bringing the dummy glass (DG) to which a plurality of sensors are attached into the chamber, information on the gap between the dummy glass (DG), the chamber, and objects placed inside the chamber can be acquired. The chamber or an object placed inside the chamber may include an inner wall of the chamber, an entrance to the chamber, a deposition source stage placed when the chamber is a deposition chamber, etc. However, this is an example, and the type of chamber or object placed inside the chamber is not limited thereto.

A plurality of sensors may sense spacing information between chambers or types of objects placed inside the chamber at each location. The sensed interval information may be provided to the data processing unit 800. The data processing unit 800 may transmit this interval information to the control unit 910.

The control unit 910 may drive the robot hand (RH) based on the transmitted interval information. Specifically, the control unit 910 may control the position or movement of the robot hand (RH) based on the interval information so that the dummy glass (DG) does not collide with the chamber or an object inside the chamber.

Specifically, it is possible to find an alignment position where the distance between a plurality of sensors and the chamber or an object inside the chamber does not become 0 (if the distance is 0, the sensor or dummy glass may contact the object). When the control unit 910 finds the alignment position, the control unit can store it in the memory unit 930.

Subsequently, the step of removing the dummy glass DG may proceed. Since the dummy glass (DG) is designed to learn the alignment position, it can be removed before the process begins. Next, the step of placing the substrate on the robot hand (RH) may proceed. As described above, the substrate may be a substrate for a display device, particularly a substrate for an organic light emitting display device.

Next, it includes the step of processing the substrate by moving the robot hand (RH) on which the substrate is placed to an alignment position. The step of processing the substrate by moving the robot hand (RH) on which the substrate is placed to the alignment position may be performed in one or more chambers selected from the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3). there is. In one embodiment, the step of processing the substrate may be sequentially performed through the first chamber (CH1), the second chamber (CH2), and the third chamber (CH3). Specifically, a first organic layer is formed on the substrate in the first chamber (CH1), a second organic layer is formed on the substrate in the second chamber (CH2), and a third organic layer is formed on the substrate in the third chamber (CH3). can be formed. The first organic layer, the second organic layer, and the third organic layer may each include an organic light emitting layer that emits light of different colors.

Although the above description focuses on the embodiments of the present invention, this is only an example and does not limit the present invention, and those skilled in the art will understand the present invention without departing from the essential characteristics of the embodiments of the present invention. It will be apparent that various modifications and applications not exemplified above are possible. For example, each component specifically shown in the embodiments of the present invention can be modified and implemented. And these variations and differences in application should be construed as being included in the scope of the present invention as defined in the appended claims.

CH1: first chamber
CH2: Second chamber
CH3: Third chamber
RH: robot hand
310: first mark assembly
320: second mark assembly
410: first camera
420: second camera

Claims (20)

chamber;
a robot hand that enters and exits the chamber and transfers the target substrate;
a mark assembly attached to the robot hand and having an alignment mark that provides a reference position to the robot hand;
a camera whose center of view is defined and which acquires location information of the alignment mark when the target substrate is not seated on the robot hand;
a control unit that adjusts the position of the robot hand so that the center of the field of view coincides with the alignment mark;
a memory unit that stores position information of the robot hand in a state where the center of the field of view coincides with the alignment mark; and
An apparatus for manufacturing a display device including a linear movement driver that moves the mark assembly in one or more directions selected from xyz directions. According to paragraph 1,
An apparatus for manufacturing a display device, wherein the chambers are plural, and a deposition source is disposed in each chamber. According to paragraph 1,
The robot hand is a display device manufacturing apparatus including a stem portion extending in a first direction and a plurality of branch portions extending in a second direction different from the first direction. According to paragraph 3,
An apparatus for manufacturing a display device, wherein the mark assembly is coupled to the stem portion. According to paragraph 3,
An apparatus for manufacturing a display device, wherein the mark assembly is formed integrally with the stem portion. According to paragraph 1,
An apparatus for manufacturing a display device further comprising a robot arm engaged with the robot hand to move the robot hand. According to paragraph 1,
The mark assembly includes a first mark assembly and a second mark assembly, and the camera includes a first camera and a second camera to correspond thereto. delete According to paragraph 1,
An apparatus for manufacturing a display device, further comprising a rotation driver that rotates the mark assembly clockwise or counterclockwise. chamber;
a robot hand for putting in and out of the chamber;
Dummy glass mounted on the robot hand;
A guide portion formed inside the chamber;
a camera that acquires location information of the dummy glass and the guide unit;
a control unit that adjusts the position of the robot hand so that the edge of the dummy glass and the guide unit are aligned; and
An apparatus for manufacturing a display device, including a memory unit that stores position information of the robot hand in a state in which the dummy glass and the guide unit are aligned. According to clause 10,
The robot hand is a display device manufacturing apparatus including a stem portion extending in a first direction and a plurality of branch portions extending in a second direction different from the first direction. According to clause 11,
The dummy glass is coupled to the stem portion and is seated on the branch portion. chamber;
a robot hand for putting in and out of the chamber;
Dummy glass mounted on the robot hand; and
A sensing unit attached to the dummy glass and acquiring gap information within the chamber;
a control unit that adjusts the position of the robot hand based on the interval information; and
An apparatus for manufacturing a display device including a memory unit that stores position information of the adjusted robot hand. According to clause 13,
An apparatus for manufacturing a display device, wherein the sensing unit includes a plurality of gap sensors, and the gap sensors are disposed along an edge of the dummy glass. According to clause 14,
Each of the gap sensors includes an upper sensor disposed on an upper portion of the dummy glass and a lower sensor disposed on a lower portion of the dummy glass. Learning the alignment position of the robot hand within the chamber; And processing the substrate by moving the robot hand on which the substrate is placed to the learned alignment position,
The step of learning the alignment position of the robot hand in the chamber is
Obtaining location information of the robot hand using a first camera;
adjusting the position of the robot hand based on the acquired position information; and
A method of manufacturing a display device comprising the step of storing the adjusted position of the robot hand. According to clause 16,
The center of view of the first camera is defined, and a first mark assembly on which a first alignment mark is formed is fastened to the robot hand,
Obtaining location information of the robot hand using the first camera includes acquiring location information of the center of view of the first camera and the first alignment mark,
The step of adjusting the position of the robot hand based on the acquired position information includes adjusting the position of the robot hand so that the center of view of the first camera matches the first alignment mark. Manufacturing method. According to clause 16,
A dummy glass having the same size as the substrate is disposed on the robot hand, and the step of acquiring position information of the robot hand using the first camera includes position information of the guide part disposed in the chamber and the dummy glass. A display device comprising the step of acquiring, wherein the step of adjusting the position of the robot hand based on the acquired position information includes adjusting the position of the robot hand so that the guide portion and the edge of the dummy glass are aligned. Manufacturing method. Learning the alignment position of the robot hand within the chamber; And processing the substrate by moving the robot hand on which the substrate is placed to the learned position,
The step of learning the alignment position of the robot hand in the chamber is
Bringing a dummy glass with a plurality of sensors attached into the chamber;
acquiring interval information between the dummy glass and an object placed inside the chamber;
adjusting the position of the robot hand based on the interval information; and
A method of manufacturing a display device comprising the step of storing the adjusted position of the robot hand. According to clause 19,
The interval information includes distance information between the object and the dummy glass, and the step of adjusting the position of the robot hand based on the interval information includes adjusting the position of the robot hand so that the distance between the dummy glass and the object does not become 0. Method for manufacturing a display device that adjusts position.