KR102570532B1 - Multi-probe inspection device - Google Patents

Abstract

The present invention, a plurality of movable blocks installed to be movable in the left and right directions along guide rails provided in the fixed block; a lifting block slidably installed on the moving block so as to be able to move up and down by the operation of a driving unit provided in the moving block; A connecting block installed to protrude from the lifting block and disposed opposite to the end of the test object; a contact block that is detachably connected to the connection block and is provided with a probe pin to contact the test object; a plurality of motion drivers installed on the fixed block in the same number as the moving block to individually transmit power and driving signals for each of the moving blocks; and a signal board to which a plurality of the contact blocks are connected to transmit and receive test signals sensed by the probe pins, and to transmit test signals to a control unit, wherein the motion driver or the signal board, respectively, It is characterized in that it is connected by a cable to the contact block.

Description

Multi-probe inspection device {Multi-probe inspection device}

The present invention relates to a multi-probe inspection device, and more particularly, since an inspection operation is performed while a plurality of moving blocks align and lift according to power and driving signals supplied from each motion driver, the moving block Power rails and signal rails that must be rubbed to receive power and drive signals can be omitted, so the amount of particles generated by the friction of the moving block can be significantly reduced, and malfunctions and inspections caused by particles generated during inspection operation It is a multi-probe inspection device that can prevent damage to the object and can easily replace the contact block detachably installed on the moving block with a different type of contact block compatible with the object to be inspected when the type of object to be inspected is replaced. it's about

In general, display (QD, OLED, MICROLED, MICRO OLED) inspection equipment automatically transfers the display panel to the point where the operator is located so that the display panel can be easily inspected with the naked eye whether it is defective or good, and the inspection is completed It refers to a device that classifies display panels into good, repair, and reject according to the inspection results and places them in cassettes.

In general display inspection equipment, an inspection unit for inspecting a display panel is disposed on one side of the main body, and a loading/unloading unit for supplying and collecting display panels is disposed on one side of the inspection unit.

In addition, in the display inspection equipment, a carrier that transports the display panel from the loading/unloading unit to the inspection unit and from the inspection unit to the loading/unloading unit is installed to be able to move left/right.

The inspection unit is composed of a probe unit and a work stage for contacting the display panel to the probe unit and providing a light source.

The work stage is composed of a polarizing plate and a backlight, and an XYθ stage is installed behind the work stage to align the work stage with respect to the probe unit and connect it to the probe unit.

A sub-table is installed in the loading/unloading unit to incline the display panel transported from the loader at a predetermined angle (eg, 60 degrees).

In addition, in front of the inspection unit, a microscope is installed so that the operator can move up and down and left and right to more accurately check if an abnormality is found during a visual inspection of the display panel.

The display panel is transferred to the subtable from the loader of the loading/unloading unit, and the subtable transfers the display panel to the carrier while tilting at a predetermined angle.

Subsequently, the carrier transports the display panel to the inspection unit, and when the display panel to be tested is located in the inspection unit, the XYθ stage advances from the rear to vacuum-adsorb and fix the display panel of the carrier, and the pad of the fixed display panel to the probe unit. Connect to the lead pin.

In this way, when the electrical connection between the display panel and the probe unit is made, a predetermined video signal is applied through the probe unit, and at the same time, the illumination of the backlight is changed into various patterns by a pattern generator, which is an external video signal input device. And the operator determines the defect of the panel by the pattern implemented at this time.

The probe unit includes a rectangular base plate, a probe block installed at equal intervals on one end of the upper surface of the base plate, and a data PCB electrically connected thereto to transmit signals to the probe block and installed on the upper surface of the base plate; It consists of an alignment camera installed on the upper surface of the base plate to check the alignment.

On the other hand, such a conventional probe unit is used by attaching a probe unit corresponding to the panel to the display inspection equipment according to the display panel standard, and then goes through a unit set-up process after attaching the probe unit.

However, since this unit set-up process proceeds by aligning the pads of the display panel and the lead pins of the probe unit in a 1:1 ratio, the work usually takes several hours.

In order to solve the above problems, a multi-probe unit has been developed, and the multi-probe unit according to the prior art is formed in a rectangular shape with a metal material, and a base fixedly installed in the display inspection equipment with align cameras installed at both ends in the longitudinal direction. A plate and a linear motor installed in the longitudinal direction on the base plate and provided with a plurality of movers to move the movers according to the control signal of the display inspection equipment, one end fixed to each mover of the linear motor by a linear bracket, and the other end A movable bracket to which the probe block is fixedly installed, a pair of LM guides installed in the longitudinal direction on the base plate to guide the movable bracket, and spaced apart from each other, and a scale installed between the LM guides, and a header on the bottom of the movable bracket is installed to detect the movement amount of the movable bracket and output it to the display inspection equipment, a cover formed in a rectangular shape made of metal or synthetic resin and fixed by a post on the top of the base plate, and a fixed bracket on the top of the base plate It consists of a data PCB that is installed by the probe block and transmits data signals to the probe block.

The background art of the present invention is disclosed in Republic of Korea Patent Publication No. 10-2011-0022202 (published on March 7, 2011, title of the invention: multi-probe unit).

In the multi-probe unit according to the prior art, the encoder is composed of a scale and a header, and the inspection operation is performed because the friction structure of the moving bracket for transmitting the inspection signal made by the contact block and the friction structure of the moving bracket for power supply are provided. There is a problem in that particles are generated by friction generated during inspection, which may cause malfunction in inspection operation or damage the inspection object.

In addition, in the multi-probe unit according to the prior art, since the movable bracket and the contact block are fixedly installed by a fastening member, when the type of object to be inspected is changed, the operator releases the fastening member to obtain a different type compatible with the object to be inspected. Since it needs to be replaced with a contact block, it is difficult to reduce the time and cost required for contact block replacement work.

Therefore, there is a need to improve this.

In the present invention, a plurality of movable blocks are aligned and lifted according to the power and drive signals supplied from each motion driver, and the inspection operation is performed. and signal rail can be omitted, so the amount of particles generated by the friction of the moving block can be significantly reduced, malfunctions caused by particles generated during inspection operation and damage to inspection objects can be prevented, and types of inspection objects Its purpose is to provide a multi-probe inspection device that can easily replace the contact block detachably installed on the moving block with a different type of contact block compatible with the test object when the is replaced.

The present invention, a plurality of movable blocks installed to be movable in the left and right directions along guide rails provided in the fixed block; a lifting block slidably installed on the moving block so as to be able to move up and down by the operation of a driving unit provided in the moving block; A connecting block installed to protrude from the lifting block and disposed opposite to the end of the test object; a contact block that is detachably connected to the connection block and is provided with a probe pin to contact the test object; a plurality of motion drivers installed on the fixed block in the same number as the moving block to individually transmit power and driving signals for each of the moving blocks; and a signal board to which a plurality of the contact blocks are connected to transmit and receive test signals detected by the probe pins and to transmit test signals to a control unit, wherein the motion driver or the signal board, respectively, It is characterized in that it is connected by a cable to the contact block.

In addition, the moving block of the present invention is slidably installed on guide rails installed in the left and right directions on the fixed block, and a linear coil is installed to slide along the linear motor installed on the fixed block, and the lifting block It is characterized in that a driving unit for raising or lowering is provided.

In addition, the cable of the present invention includes a first cable connected to the motion driver and the linear coil to transmit and receive power or driving signals; a second cable connected to the motion driver and the driver to transmit and receive power or a driving signal; a third cable connecting the signal board and the contact block; and a fourth cable connecting the contact block and the encoder.

In addition, the present invention further includes an interference prevention unit for partitioning a distance between the cables to prevent the cables from interfering with each other, wherein the interference prevention unit determines the distance between the first cable and the third cable and the and a spacer plate protruding from the moving block to define a space between the second cable and the fourth cable.

In addition, the present invention further includes a detachable portion for detachably connecting the connection block and the contact block, wherein the detachable portion includes a detachable protrusion protruding from the contact block; a detachable groove portion into which the detachable protrusion is inserted and coupled or separated from the detachable protrusion depending on whether or not pneumatic pressure is provided; Separation grooves formed in the contact block; a separation block disposed on one side of the fixed block so that the contact block of a different type, which is an object of replacement work, is seated; a separation protrusion that protrudes from the separation block and is inserted into the separation groove; and a pneumatic supply unit provided in the separation block to provide air pressure for protruding or inserting a plurality of ball members protruding from the separation protrusion from the separation protrusion.

In the multi-probe inspection apparatus according to the present invention, each motion driver is provided for each of a plurality of moving blocks, and power and driving signals are transmitted to the driving unit of the moving block by cables extending from the motion drivers, so that power and driving signals can be received. Power rails and signal rails that need to be rubbed for inspection can be omitted to reduce the frictional part of the moving block, and as the frictional part of the moving block is reduced, the amount of particles generated during the inspection operation can be reduced. can be prevented, and there is an advantage in preventing damage to the inspection target due to particles.

In addition, since the multi-probe inspection apparatus according to the present invention is provided with a detachable unit for detachably connecting the movable block and the contact block, when the type of object to be inspected is replaced, when the contact block replacement operation proceeds, the movable block moves toward the separation block. After moving and seating the contact block on the upper surface of the separation block, combining the contact block and the separation block, separating the movement block and the contact block, seating a different type of contact block on the separation block, and combining the movement block and the new contact block. Block replacement work can be performed without manual work, which has the advantage of reducing the time and cost required for contact block replacement work.

1 is a perspective view showing a multi-probe inspection apparatus according to an embodiment of the present invention.
2 is a perspective view showing a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention.
3 is a front view showing a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention.
4 is an exploded perspective view showing a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention.
5 is an exploded perspective view showing a contact block mounting structure of a multi-probe inspection device according to an embodiment of the present invention.
6 is an exploded perspective view showing a moving block mounting structure of a multi-probe inspection device according to an embodiment of the present invention.
7 is an exploded perspective view showing a connection structure of a contact block, a connection block, and an elevating block of a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention.
8 is an operating state diagram showing a contact block coupling operation of a multi-probe inspection apparatus according to an embodiment of the present invention.
9 is an operating state diagram showing a contact block separation operation of the multi-probe inspection apparatus according to an embodiment of the present invention.

Hereinafter, an embodiment of a multi-probe inspection apparatus according to the present invention will be described with reference to the accompanying drawings.

In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation.

In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of a user or operator.

Therefore, definitions of these terms will have to be made based on the content throughout this specification.

1 is a perspective view showing a multi-probe inspection device according to an embodiment of the present invention, FIG. 2 is a perspective view showing a contact block assembly of the multi-probe inspection device according to an embodiment of the present invention, and FIG. It is a front view showing the contact block assembly of the multi-probe inspection device according to an embodiment of the present invention.

4 is an exploded perspective view showing a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention, and FIG. 5 shows a contact block mounting structure of a multi-probe inspection apparatus according to an embodiment of the present invention. 6 is an exploded perspective view showing a moving block mounting structure of a multi-probe inspection device according to an embodiment of the present invention.

In addition, FIG. 7 is an exploded perspective view showing a connection structure of a contact block, a connection block, and an elevation block of a contact block assembly of a multi-probe inspection apparatus according to an embodiment of the present invention, and FIG. 8 is an exploded perspective view according to an embodiment of the present invention. It is an operating state diagram showing the contact block coupling operation of the multi-probe testing device, and FIG. 9 is an operating state diagram showing the contact block separation operation of the multi-probe testing device according to an embodiment of the present invention.

1 to 9, the multi-probe inspection apparatus according to an embodiment of the present invention includes a plurality of movable blocks installed to be movable in left and right directions along guide rails 12 provided on a fixed block 10. (16) and a lifting block 30 slidably installed on the moving block 16 so as to be able to move up and down by the operation of a driving unit provided in the moving block 16, and installed to protrude from the lifting block 30, A connection block 32 disposed opposite to the end of the test object, a contact block 34 detachably connected to the connection block 32 and provided with a probe pin 36 to contact the test object, and each A plurality of motion drivers 50 installed in the fixed block 10 in the same number as the moving block 16 to individually transmit power and drive signals for each moving block 16, and detected by the probe pin 36 A plurality of contact blocks 34 are connected to transmit and receive test signals, and a signal board 56 transmits test signals to the control unit.

Therefore, if the alignment operation is performed before the inspection operation is performed, the moving block 16 is moved in the left and right directions along the fixed block 10 according to the power and driving signals transmitted from the motion driver 50 to accurately When the alignment operation is completed, the driving unit is operated according to the driving signal transmitted from the motion driver 50, and the lifting block 30 descends so that the contact block 34 contacts the inspection object and proceeds with the inspection operation. do.

At this time, since the motion driver 50 or the signal board 56 of this embodiment is connected to the moving block 16 or the contact block 34 by a cable, power and driving signals are supplied to the contact block 34 or the driving unit. In order to do this, it is possible to omit the installation of power rails or signal rails, thereby reducing the frictional parts of the moving block 16.

As described above, in this embodiment, a motion driver 50 connected by a cable is installed for each moving block 16, and the moving block 16 and the moving block 16 and Since the inspection operation is performed while the lifting block 30 is moved, the friction area of the moving block 16 is reduced and the generation of particles generated by the alignment operation of the moving block 16 and the lifting operation of the lifting block 30 is reduced. It is possible to prevent malfunction due to particles and damage to the inspection object.

In addition, the moving block 16 of this embodiment is slidably installed on the guide rail 12 installed in the left and right directions on the fixed block 10, and along the linear motor 17 installed on the fixed block 10 Since the linear coil 18 is installed to slide, and a drive unit for raising or lowering the lifting block 30 is provided, power and driving signals provided from the motion driver 50 are provided to the linear coil 18 and the drive unit along the cable. And, the signal board 56 and the contact block 34 are connected by a cable so that the test signal generated when the probe pin 36 comes into contact with the test object is transmitted to the signal board 56 and then transmitted to the control unit. It is possible to determine whether or not the

In addition, the cable of this embodiment is connected to the first cable 52 connected to the motion driver 50 and the linear coil 18 to transmit and receive power or drive signals, and the first cable 52 connected to the motion driver 50 and the drive unit to transmit power or drive. A second cable 54 for transmitting and receiving signals, a third cable 57 connecting the signal board 56 and the contact block 34, and a fourth cable 58 connecting the contact block 34 and the encoder includes

Therefore, the first cable 52 and the second cable 54 extending from the motion driver 50 installed on the upper surface of the fixed block 10 extend downward and are connected to the moving block 16, and the motion driver 50 The third cable (57) extending from the signal board (56) disposed on the upper side extends downward and is connected to the contact block (34), and the fourth cable (58) extends upward through the signal board (56). The lower end is connected to the contact block 34 to connect the encoder and the contact block 34.

As described above, since the encoder is connected to the contact block 34 by the fourth cable 58 and the position of the contact block 34 can be measured, the contact block moves according to the driving signal transmitted from the motion driver 50. It is possible to control the position of the contact block 34 while accurately determining the position of (34).

In addition, the present embodiment further includes an interference prevention unit 70 for partitioning a distance between cables to prevent cables from interfering with each other. A spacer plate 72 protrudes from the moving block 16 to define a space between the cables 57 and a space between the second cable 54 and the fourth cable 58.

The spacer plate 72 of this embodiment is formed in a long panel shape in the vertical direction, the lower end is coupled to the lower part of the moving block 16, and the center of the spacer plate 72 is bent in a direction away from the moving block 16. A bypass bending portion 74 is formed so that the first cable 52 and the second cable 54 extend at the interval between the spacing plate 72 and the moving block 16, and the third cable 52 extends outside the spacing plate 72. The cable 57 and the fourth cable 58 are positioned so that interference between the cables can be prevented from twisting and malfunctioning of the plurality of cables.

In addition, the present embodiment further includes a detachable portion 80 that detachably connects the connection block 32 and the contact block 34, and the detachable portion 80 protrudes from the contact block 34. A protrusion 82, a detachable protrusion 82 is inserted, and a detachable groove 84 coupled or separated from the detachable protrusion 82 depending on whether or not pneumatic pressure is supplied, and a separation groove 94 formed in the contact block 34 And, the separation block 90 disposed on one side of the fixing block 10 so that the other type of contact block 34, which is the object of the replacement work, is seated, and protrudes from the separation block 90 and is inserted into the separation groove 94 Air pressure provided in the separation block 90 to provide air pressure for protruding or inserting the separation protrusion 92 and the plurality of ball members 96 protrudingly installed from the separation protrusion 92 from the separation protrusion 92. A provision unit 86 is included.
As shown in FIG. 8 , the separation block 90 of this embodiment is installed in an inspection device in which the fixing block 10 is installed so as to be disposed while maintaining a distance from the fixing block 10 .

The pneumatic supply unit 86 of this embodiment includes an injection pipe 88 provided in the separation block 90, and when air pressure is supplied along a flow path formed from the injection pipe 88 to the separation protrusion 92, the ball member 96 is inserted into the separation protrusion 92, and the separation protrusion 92 and the separation groove 94 are converted into a separable state.

Also in the detachable groove 84 of this embodiment, the ball member 96 is installed so as to be able to protrude into the detachable groove 84, and when air pressure is provided along the passage provided in the connection block 32, the ball member 96 is detachable. As the recess 84 is retreated to the outside, the detachable protrusion 82 and the detachable groove 84 are changed into a detachable state.

Therefore, when the coupling operation of the contact block 34 proceeds, as shown in FIG. 8, after the connection block 32 is moved to the separation block 90, air pressure is supplied to the connection block 32 so that the ball member 96 ) After retracting, when the connection block 32 descends, the detachable protrusion 82 is inserted into the detachable groove 84, and when the air pressure supplied to the connection block 32 is released, the ball member 96 is supported and compressed. As the elastic member expands to its original state, the ball member 96 protrudes inward from the detachable groove 84 and engages with the stepped portion formed on the circumferential surface of the detachable protrusion 82 to form a contact block 34 and a connection block 32. This is coupled, and at this time, the probe pin 36 provided on the contact block 34 is in contact with the connection block 32, and electrical coupling is made.

As described above, the inspection operation is performed by the contact block 34 coupled to the connection block 32, and when the type of the inspection object is replaced, the type of the contact block 34 is changed to a contact type compatible with the inspection object. block 34, which is achieved by a separation process as shown in FIG.

When the separation process of the contact block 34 is started, a new type of contact block 34 is moved to the upper side of the separation block 90, and air pressure is supplied to the separation block 90 through the injection pipe 88 to remove the ball member. When the contact block 34 is seated on the upper surface of the separation block 90 after inserting the separation protrusion 96 into the separation protrusion 92, the separation protrusion 92 is inserted into the separation groove 94, and then, the separation block When the air pressure supplied to (90) is released, the compressed elastic member expands to its original state, protruding the ball member 96 out of the separation protrusion 92, and engaging and engaging with the stepped portion formed on the inner wall of the separation groove 94 to make contact. The block 34 and the separation block 90 are combined so that the contact block 34 is seated in an accurate position.

After that, after the connection block 32 is placed on the separation block 90, the above-described coupling operation of the contact block 34 proceeds, and after the contact block 34 and the connection block 32 are combined, If air pressure is provided to the separation block 90, the separation block 90 and the contact block 34 are converted into a separable state, so when the connection block 32 is raised, the contact block 34 combined with the connection block 32 As it rises at the same time, the replacement work of the contact block 34 is completed.

Here, the coupling structure in which the ball member 96 protrudes or is inserted depending on whether or not air pressure is supplied and connects or separates the protrusion to the groove is a technique that can be easily performed by a person with ordinary knowledge who recognizes the technical configuration of the present invention. Since it is configured, specific drawings and descriptions will be omitted.

Reference numeral 14 denotes a sliding block 14 slidably installed on the guide rail 12 and to which the moving block 16 is coupled.

As a result, since the inspection operation is performed while the alignment operation and the lifting operation of the plurality of moving blocks are performed according to the power and driving signals supplied from each motion driver, the power rail and Since the signal rail can be omitted, the amount of particles generated by the friction of the moving block can be significantly reduced, and malfunction and damage to the inspection object due to particles generated during inspection operation can be prevented. In the case of replacement, it is possible to provide a multi-probe inspection device that can easily replace the contact block detachably installed on the moving block with a different type of contact block compatible with the inspection object.

Although the present invention has been described with reference to an embodiment shown in the drawings, this is merely exemplary, and those skilled in the art can make various modifications and equivalent other embodiments therefrom. will understand

In addition, although the multi-probe inspection device has been described as an example, this is only exemplary, and the inspection device of the present invention can be used for other products other than the multi-probe inspection device.

Therefore, the true technical protection scope of the present invention should be determined by the claims below.

10: fixed block 12: guide rail
14: sliding block 16: moving block
17: linear motor 18: linear coil
30: lifting block 32: connection block
34: contact block 36: probe pin
50: motion driver 52: first cable
54: second cable 56: signal board
57: third cable 58: fourth cable
70: interference prevention unit 72: spacing plate
74: bypass bending part 80: detachable part
82: detachable protrusion 84: detachable groove
86: high pressure supply unit 88: injection pipe
90: separation block 92: separation protrusion
94: separation groove

Claims (5)

A plurality of movable blocks installed to be movable in left and right directions along guide rails provided in the fixed block;
a lifting block slidably installed on the moving block so as to be able to move up and down by the operation of a driving unit provided in the moving block;
A connecting block installed to protrude from the lifting block and disposed opposite to the end of the test object;
a contact block that is detachably connected to the connection block and is provided with a probe pin to contact the test object;
a plurality of motion drivers installed on the fixed block in the same number as the moving block to individually transmit power and driving signals for each of the moving blocks; and
A plurality of contact blocks are connected to transmit and receive test signals detected by the probe pins and include a signal board for transmitting test signals to a control unit;
The motion driver or the signal board is connected to the movement block or the contact block by a cable, respectively,
the cable,
a linear coil sliding along the linear motor of the fixed block and a first cable connected to the motion driver to transmit and receive power or drive signals;
a second cable connected to a driving unit that raises or lowers the lifting block and the motion driver to transmit and receive power or a driving signal;
a third cable connecting the signal board and the contact block; and
A fourth cable connecting the contact block and the encoder,
Since the position of the contact block can be measured by the encoder, the position of the contact block is determined while determining the position of the contact block moved according to the driving signal transmitted along the first cable and the second cable from the motion driver. Multi-probe inspection device characterized in that it can control.
delete delete According to claim 1,
Further comprising an interference prevention unit dividing a distance between the cables to prevent the cables from interfering with each other,
The interference prevention unit includes a spacing plate protruding from the moving block to define a spacing between the first cable and the third cable and a spacing between the second cable and the fourth cable,
The spacing plate 72 is formed in a long panel shape in the vertical direction, the lower end is coupled to the lower portion of the moving block 16, and the center of the spacing plate 72 is formed in a direction away from the moving block 16. A bypass bending portion 74 is formed so that the first cable 52 and the second cable 54 extend at a distance between the spacing plate 72 and the moving block 16, and the spacing plate ( 72) The third cable 57 and the fourth cable 58 are located outside so that interference between the first cable and the fourth cable can be prevented from twisting and malfunctioning of the plurality of cables. Characterized by a multi-probe inspection device.
According to claim 1,
Further comprising a detachable portion for detachably connecting the connection block and the contact block,
The detachable part,
Detachable protrusions protruding from the contact block;
a detachable groove portion into which the detachable protrusion is inserted and coupled or separated from the detachable protrusion depending on whether or not pneumatic pressure is provided;
Separation grooves formed in the contact block;
a separation block disposed on one side of the fixed block so that the contact block of a different type, which is an object of replacement work, is seated;
a separation protrusion that protrudes from the separation block and is inserted into the separation groove; and
A pneumatic supply unit provided in the separation block to provide air pressure for protruding or inserting a plurality of ball members protruding from the separation protrusion from the separation protrusion;
The separation block is a multi-probe inspection device, characterized in that installed in the inspection device in which the fixing block is installed so as to be disposed while maintaining a distance from the fixing block.