KR102355086B1 - A measurement method for energy consumption using closed type chamber and its measurement system thereof - Google Patents

Abstract

The present invention relates to an apparatus and method for measuring human metabolism using a closed chamber, and an object of the present invention is to control the air supply and exhaust to the closed chamber so that the measurement of the experimenter's metabolic rate is accurately performed. .
According to the present invention, gas is supplied into the sealed chamber from the air supply unit according to the set air supply flow rate value (Ci), the gas is exhausted from the closed chamber from the exhaust unit according to the exhaust flow rate set value (Co), and the air is supplied by the air supply unit. The gas components of the gas and the gas exhausted by the exhaust part are analyzed by the analysis part, respectively, and the air supply value (Vi) of the gas supplied into the sealed chamber from the integrated control part and the gas exhausted in the sealed chamber The average value (Vavg) of the exhaust value (Vo) and the supply/exhaust flow rate set values (Ci, Co) are compared to calculate the supply/exhaust correction values (Ii, Io), respectively, and based on the supply/exhaust correction values (Ii, Io) Supply/exhaust flow rate set values (Ci, Co) are first corrected to generate supply/exhaust corrected flow rate set values (Cmi, Cmo), and supply/exhaust corrected flow rate set values (Cmi, Cmo) and feed/exhaust feedback By control, the supply/exhaust fan rotation speed of the supply/exhaust part is controlled by the operation signal according to the comparison of the feedback value (the amount to be controlled). While maintaining the same, gas components of the gas supplied into the sealed chamber and the gas exhausted from the sealed chamber are analyzed by the analysis unit.

Description

An apparatus and method for measuring human metabolism using a closed chamber {A measurement method for energy consumption using closed type chamber and its measurement system thereof}

The present invention relates to an apparatus and method for measuring human metabolism using a closed chamber, and the gas supplied and exhausted while interlocking and controlled so that the amount of gas supplied into the sealed chamber and the exhaust amount of the gas exhausted from the sealed chamber match The present invention relates to an apparatus and method for measuring the metabolism of a human body using a closed chamber, which can measure the metabolic rate according to exercise and non-exercise of an experimenter in the closed chamber through the gas component analysis of the falling gas.

A person consumes energy through physical activity, and consumption of an appropriate amount of energy through such a person's physical activity is an important factor in maintaining a healthy body.

In recent years, as interest in personal health increases, awareness of personalized health care that can improve quality of life increases, and as overweight or obesity in adults and children is highlighted as an important health issue, each Individuals are increasingly interested in energy/calorie consumption required for health through appropriate amount of physical activity. Methods and devices that can do this are being studied.

Conventionally, as a method of estimating the amount of physical activity or energy consumption, a method of estimating energy expenditure or metabolic equivalents using acceleration data is used, and these conventional methods predict various types of acceleration data. Although methods for calculating a user's physical activity amount or classifying life patterns by predicting through a formula are provided, these energy consumption estimation methods have limitations in their estimation accuracy in estimating the user's actual metabolic rate from the output value of the acceleration sensor. .

Laid-Open Patent Publication No. 10-2012-0053481 (2012.05.25) Registered Patent Publication No. 10-1870630 (2018.06.19) Registered Patent Publication No. 10-1379666 (2014.03.25) Registered Patent Publication No. 10-1576666 (2015.12.04)

It is an object of the present invention to provide an apparatus and method for measuring human metabolism using a closed chamber capable of measuring energy metabolism and consumption during exercise and non-exercise.

It is an object of the present invention to provide an apparatus and method for measuring human metabolism using a closed chamber that is controlled to match the air supply and exhaust to the sealed chamber so that the experimenter's metabolic rate can be accurately measured.

According to the present invention, gas is supplied into the sealed chamber by the air supply unit according to the supply air flow rate set value (Ci), the gas is exhausted from the sealed chamber by the exhaust unit according to the exhaust flow rate set value (Co), and the sealed type by the air supply unit The gas component of the gas supplied into the chamber and the gas exhausted from the sealed chamber by the exhaust unit is analyzed by the analysis unit, and the air supply value (Vi) of the gas supplied into the sealed chamber by the integrated control unit and the inside of the sealed chamber are analyzed. The average value (Vavg) of the exhaust value (Vo) of the exhausted gas is compared with the supply/exhaust flow rate set values (Ci, Co) to calculate the supply/exhaust correction values (Ii, Io), respectively, and the supply/exhaust correction values ( Supply/exhaust flow rate set values (Ci, Co) are first corrected by Ii, Io) to generate supply/exhaust corrected flow rate set values (Cmi, Cmo), and supply/exhaust corrected flow rate set values (Cmi, Cmo) By the feedback control of the supercharger/exhaust unit, the supply/exhaust fan rotation speed of the supply/exhaust unit is controlled by the operation signal according to the comparison of the feedback value (the amount to be controlled). While the displacement value Vo is kept the same, the gas components of the gas supplied into the sealed chamber and the gas exhausted from the sealed chamber are analyzed by the analysis unit.

According to the present invention, the supply air flow rate set value and the exhaust flow rate set value are first corrected by the average value of the air supply amount and the exhaust amount, and the second correction is made by feedback control of the air supply and exhaust units, so that air is supplied into the sealed chamber. There is an effect that the amount of air supplied and the amount of exhaust exhausted from the sealed chamber are quickly matched.

That is, in the present invention, the amount of supply/exhaust into the sealed chamber is variably controlled, and the supply and exhaust amount are kept the same, so that the experimenter's metabolism and calorie consumption are accurately measured in the sealed chamber.

In the present invention, since a differential pressure is not generated in the sealed chamber, the precision of gas analysis of gas is improved, thereby improving the reliability of the experimenter's energy consumption and energy consumption pattern.

The present invention can measure not only the amount of exercise, but also the amount of energy consumed according to the non-exercise state, that is, in real life, so that it is possible to efficiently measure the amount of metabolism according to the experimenter's overall life pattern.

According to the present invention, the metabolic rate according to the experimenter's usual activity pattern can be measured through the lifestyle in the sealed chamber, so that the experimenter's poor life pattern can be efficiently corrected.

The present invention has many effects, such as being able to measure the amount of metabolism according to the amount of exercise in the closed chamber, suggesting the amount of exercise suitable for the health and physical condition of the experimenter, and suggesting an exercise method suitable for the characteristics of the experimenter.

1 is an exemplary diagram showing a block diagram according to the configuration of the present invention;
2 is a block diagram showing a basic configuration according to the present invention;

1 is an exemplary diagram showing a block diagram according to the configuration of the present invention, Figure 2 is a block diagram showing a basic configuration according to the present invention,

The present invention is a closed chamber (10) provided with a predetermined space;

The air supply unit 20 connected to the sealed chamber 10 and controlling the supply air amount value (Vi) for the supply gas supplied into the sealed chamber 10 according to the supply air flow rate set value (Ci) while feedback control is performed;

an exhaust unit 30 connected to the hermetic chamber 10 and controlling the exhaust amount Vo for the exhaust gas discharged from the hermetic chamber 10 according to the exhaust flow rate set value Co while feedback control is performed;

Analysis units 40 and 40' that are connected to the air supply unit 20 and the exhaust unit 30, respectively, and analyze the gas composition of the supply/exhaust gas supplied/exhausted into the sealed chamber 10;

The average value (Vavg) of the air supply value (Vi) of the air supply unit 20 and the exhaust amount value (Vo) of the exhaust unit 30 is calculated, and the difference between the average value (Vavg) and the supply/exhaust amount (Vi, Vo) an integrated control unit 50 for calculating supply/exhaust correction values Ii and Io;

1st, 1` summing unit (60, 60) where the supply/exhaust correction value (Ii, Io) is added to the supply/exhaust flow rate set value (Ci, Vi) to generate the supply/exhaust corrected flow rate set value (Cmi, Vmi) `);

The 2nd, 2' summing unit (70, 70`); including;

While the supply air amount value Vi supplied into the sealed chamber 10 and the exhaust amount value Vo discharged from the sealed chamber remain the same, the gas of the supply/exhaust gas by the analyzers 40 and 40' The components are analyzed so that the metabolic rate for the experimenter in the closed chamber 10 is accurately analyzed.

In the present invention, supply/exhaust means supply and exhaust, and supply/exhaust means air supply and exhaust.

The sealed chamber 10 is a space for measuring the amount of energy metabolism and consumption according to the life style of the experimenter, and for measuring the change of the metabolic rate according to the task performance and exercise, a predetermined space to enable the real life or exercise of the experimenter It is provided and formed, and is configured to have airtightness that blocks the inflow of gas from the outside and the exhaust of the internal gas to the outside.

For example, the sealed chamber 10 may be formed in the form of a studio, or may be formed in the form of a treatment room in which a bedroom, exercise room, toilet, rest room, etc. are separated, and various exercise equipment and furniture according to real life are installed therein. can

In addition, the sealed chamber 10 is provided with a temperature sensor 11 and a humidity sensor 12 so that the temperature and humidity can be kept constant for a long time. For example, the hermetic chamber 10 may be controlled to have environmental conditions of 15 to 30° C. in temperature and 40 to 60% in humidity.

In addition, lighting equipment for the experimenter's life is installed in the sealed chamber 10, and an air conditioning system (not shown) for creating a comfortable environment for the experimenter may be installed to be connected to the supply/exhaust units 20 and 30. .

The air supply unit 20 supplies a gas such as external fresh air into the sealed chamber 10, and the set air supply flow rate Ci is sequentially corrected while passing through the first and second summing units 60 and 70. Thus, the rotation speed of the air supply fan 22 (supply air blower) is controlled by the air supply controller 21, and the air supply value Vi of the gas supplied into the sealed chamber 10 by the control of the air supply fan 22 ) is regulated.

The exhaust part 30 sucks and exhausts the gas in the sealed chamber 10, and the exhaust flow rate set value Co is sequentially corrected while passing through the first 'and 2' summing parts 60' and 70'. The rotation speed of the exhaust fan 32 (exhaust blower) is controlled by the exhaust controller 31, and the exhaust value Vo of the gas exhausted into the sealed chamber 10 by this exhaust fan 32 is controlled. is regulated

The air supply part 20 and the exhaust part 30 are installed to be connected to the upper side of the sealed chamber 10, preferably in the sealed chamber 10 at a height of about 2.0 to 5.0 m, preferably about 2.5 to 4.0. It is installed to be connected to a height of m, so that the environmental impact inside the sealed chamber due to the gas supplied or exhausted is minimized.

The supply air flow rate set value (Ci) and exhaust flow rate set value (Co) are preset values, taking into account the experimenter's breathing volume and ventilation requirements in the sealed chamber 10, within the range of 40 to 360 ℓ/min. may be set/input respectively to the setting unit 80 in . As an example, when there is one experimenter in the sealed chamber 10, the respiratory rate 40~160ℓ/min or the ventilation requirement 70~360ℓ/min according to the standard of use for one person is the supply air flow rate set value (Ci) and the exhaust flow rate set value ( C o) can be set. In addition, information about the experimenter may be input to the setting unit 80 , for example, body-related information such as age, gender, weight, height, etc., information related to injury or disease, and the like.

In addition, the air supply unit 20 is provided with an air supply flow meter 23 for measuring the air supply value Vi, and the exhaust unit 30 is provided with an exhaust flow rate meter 33 for measuring the exhaust value Vo. .

The air supply flowmeter 23 is installed to be positioned before or after the air supply fan 22 based on the flow direction of the gas, and the exhaust flowmeter 33 is installed to be positioned before or after the exhaust fan 33, preferably supply air The air supply flowmeter 23 is installed to be positioned between the fan 22 and the sealed chamber 10 , and the exhaust flowmeter 33 is installed to be positioned between the sealed chamber 10 and the exhaust fan 32 .

In addition, the supply/exhaust units 20 and 30 are configured as a closed-loop control system so that feedback control connected to the second and second summing units 70 and 70 ′ is performed, respectively.

The analysis units 40 and 40 ′ include the gas supplied into the sealed chamber 10 through the air supply unit 20 and the gas component of the gas exhausted into the sealed chamber 10 through the exhaust unit 30 . to be analyzed, respectively, connected to the supply/exhaust units 20 and 30, respectively.

The analysis units 40 and 40' are sufficient if the analysis of the gas component in the gas is made, so the type is not limited, but for example, it is composed of a metering pump, an inverter, and a flow meter, so that nitrogen (N2), oxygen (O2) ), a mass spectrometer system capable of measuring gases such as carbon dioxide (CO2), argon (Ar), and the like may be installed. Since the mass spectrometer system is a known technology, a description thereof will be omitted.

In addition, the information analyzed by the analysis units 40 and 40 ′ is input to a storage unit (not shown), and is converted into DB so that a report or the like can be automatically output and stored.

The integrated control unit 50 calculates the supply/exhaust flow rate correction values Ii and Io for first correcting the supply/exhaust flow rate set values Ci and Co based on the average value Vavg. At this time, the average value Vavg is the average value of the air supply value Vi supplied into the sealed chamber 10 and the exhaust value Vo exhausted from the sealed chamber 10, that is, {[air supply value Vi )+ displacement value (Vo)]/2 }.

The integrated control unit 50 is connected to the air supply unit 20 and the exhaust unit 30 and includes an average calculator 51 for calculating an average value Vavg, an average calculator 51 and a supply/exhaust unit 20 ,30) to compare the average value (Vavg) and the supply air flow rate set value (Ci), and the average value (Vavg) and the exhaust flow rate set value (Co) are compared with the comparator 52 and the comparator 52 connected to the supply/exhaust and an integrated controller 53 for generating and outputting supply/exhaust flow rate correction values (Ii, Io) for primary correction of the flow rate set values (Ci, Co).

In this case, the average calculator 51 and the comparator 52 of the integrated control unit 50 may be connected and installed on the feedback paths 20 ′ and 30 ′ of the supply/exhaust units 20 and 30 .

The first summing unit 60 is connected to the air supply setting unit 80, the air supply unit 20 and the integrated controller 53, and the first 'summing unit 60' includes the exhaust setting unit 80' and It is connected to the exhaust unit 30 and the integrated controller 53, and the supply/exhaust flow rate correction values (Ii, Io) generated and output by the integrated controller 53 are respectively the supply/exhaust flow rates in the first and 1' summing units. They are added to the set values (Ci, Co), respectively, and the supply/exhaust corrected flow rate set values (Cmi, Vmi) are generated and output.

That is, in the first summing unit 60, the supply air flow rate set value Ci is input as a reference input (target value), and the supply air corrected flow rate set value Cmi generated by summing the supply air flow rate correction value Ii is output. will lose

In addition, in the first 'summing unit 60', the exhaust flow rate set value Co is input as a reference input (target value), and the exhaust corrected exhaust flow rate set value Cmo generated by summing the exhaust flow rate correction value Io is will be output.

The second summing unit 70 is connected to the first summing unit 60 and the air supply unit 20, that is, the air supply controller 21 of the air supply unit, and the second 'summing unit 70' is the first summing unit. It is connected to the part 60` and the exhaust part 30, that is, the exhaust controller 31 of the exhaust part, and the feedback values of the supply/exhaust parts 20 and 30 ( Controlled amount) the summed operation signal is output to the supply/exhaust unit, that is, the supply/exhaust controllers 21 and 31 of the supply/exhaust unit.

That is, in the second summing unit 70 , the supply air corrected flow rate set value Cmi is input as a reference input (target value), and the feedback value (controlled amount) according to the feedback control is summed, and the air supply fan of the air supply unit 20 is (22) An operation signal for controlling the rotation speed is output.

In addition, in the second 'summing unit 70', the exhaust corrected flow rate set value Cmo is input as a reference input (target value), and the feedback value (controlled amount) according to the feedback control is summed, and the exhaust unit 30 An operation signal for controlling the rotation speed of the exhaust fan 32 is output.

According to the present invention, gas is supplied into the sealed chamber 10 by the air supply unit 20 according to the supply air flow rate set value Ci, and the sealed chamber 10 is supplied by the exhaust unit 30 according to the exhaust flow rate set value Co. ), the gas is exhausted,

Gas components of the gas supplied into the sealed chamber 10 by the air supply unit 20 and the gas exhausted from the sealed chamber 10 by the exhaust unit 30 are analyzed by the analysis units 40 and 40' But,

The set value of supply/exhaust flow rate (Ci, Co) is for comparison of the average value (Vavg) of the air supply value (Vi) of the gas supplied into the sealed chamber and the exhaust value (Vo) of the gas exhausted in the sealed chamber. The supply/exhaust correction values (Ii, Io) are respectively calculated by

The supply/exhaust flow rate set values (Ci, Co) are first corrected by the supply/exhaust correction values (Ii, Io), and the supply/exhaust corrected flow rate set values (Cmi, Cmo) are generated.

Supply/exhaust fan rotation of the supply/exhaust part by the operation signal according to the comparison of the feedback value (controlled amount) by the feedback control of the supply/exhaust unit 20 and 30 with the supply/exhaust corrected flow rate set value (Cmi, Cmo) Each speed is controlled so that the air supply value (Vi) and the exhaust amount value (Vo) centering on the closed chamber are kept the same.

That is, in the present invention, gas is supplied into the sealed chamber 10 by the air supply unit 20 according to the supply air flow rate set value Ci, and the gas in the sealed chamber 10 is exhausted according to the exhaust flow rate set value Co. Supply / exhaust step to be exhausted by the base (30);

The air supply value Vi of the gas supplied into the sealed chamber 10 is measured by the air supply flow meter 23, and the exhaust value Vo of the gas exhausted from the sealed chamber 10 is measured by the exhaust flow meter 33. Supply / exhaust amount measurement step measured by the;

The average value (Vavg) of the air supply value (Vi) and the displacement value (Vo) is calculated, and the average value (Vavg) and the air supply amount value (Vi) by the air supply part (Vi), and the average value (Vavg) and the displacement value by the exhaust part (Vavg) a correction value calculation step in which the supply/exhaust correction values (Ii, Io) are calculated by comparing Vo);

The supply air correction value (Ii) is added to the supply air flow rate set value (Ci) to calculate the supply air corrected flow rate set value (Cmi), and the exhaust correction value (Io) is added to the exhaust flow rate set value (Co) to calculate the exhaust corrected flow rate set value ( a correction step in which Cmo) is calculated;

The feed/exhaust corrected flow rate set value (Cmi, Cmo) is summed with the feedback value (controlled amount) according to the feedback control of the supply/exhaust unit, respectively, and an operation signal is output. 22, 32) a supply/exhaust amount control step in which the rotation speed is controlled to adjust the supply/exhaust amount (Vi, Vo);

Supply/exhaust stage, supply/exhaust measurement stage, correction value calculation stage, correction stage, supply/exhaust amount adjustment so that the supply/exhaust corrected flow rate set value (Cmi, Cmo) matches the supply/exhaust flow rate set value (Ci, Co) A repeating step in which the steps are repeatedly performed;

Through the gas analysis step in which the gas supplied into the sealed chamber 10 and the gas exhausted from the sealed chamber 20 are transferred to the analysis units 40 and 40', respectively, and analyzed; ) and the displacement value (Vo) are kept the same, and the gas to be supplied and the gas to be exhausted are analyzed.

As described above, in the present invention, the supply/exhaust amount into the sealed chamber is variably controlled, and the supply air amount and the exhaust amount are maintained to be the same, so that the metabolic rate of the experimenter in the sealed chamber is accurately measured.

The present invention is not limited to the specific preferred embodiments described above, and various modifications are possible by anyone with ordinary skill in the art to which the invention pertains without departing from the gist of the invention as claimed in the claims. Of course, such modifications are intended to be within the scope of the claims.

(10): sealed chamber (11): temperature sensor
(12): humidity sensor (20): air supply
(20`): feedback path (21): supply air controller
(22): supply fan (23): supply air flow meter
(30): exhaust part (30`): feedback path
(31): exhaust controller (32): exhaust fan
(33): Exhaust flow meter (40, 40`): Analysis unit
(50): integrated control unit (51): average calculator
(52): comparator (53): integrated controller
(60): first summing unit (60'): first summing unit
(70): second summing unit (70'): second summing unit
(80): air supply setting unit (80`): exhaust setting unit
(100): measuring device

Claims (6)

A sealed chamber 10 provided with a predetermined space;
The air supply unit 20 connected to the sealed chamber 10 and controlling the supply air amount value Vi for the supply gas supplied into the sealed chamber 10 according to the supply air flow rate set value Ci while feedback control is performed;
an exhaust unit 30 connected to the hermetic chamber 10 and adjusting the exhaust value Vo of the exhaust gas discharged from the hermetic chamber 10 according to the exhaust flow rate set value Co while feedback control is performed;
Analysis units 40 and 40' that are connected to the air supply unit 20 and the exhaust unit 30, respectively, and analyze gas components for the supply/exhaust gas supplied/exhausted into the sealed chamber 10;
The average value (Vavg) of the air supply value (Vi) of the air supply unit 20 and the exhaust amount value (Vo) of the exhaust unit 30 is calculated, and the difference between the average value (Vavg) and the supply/exhaust amount (Vi, Vo) is an integrated control unit 50 for calculating supply/exhaust correction values (Ii, Io);
The first and first summing units (60, 60) that add the supply/exhaust correction values (Ii, Io) to the supply/exhaust flow rate set values (Ci, Vi) to generate the supply/exhaust corrected flow rate set values (Cmi, Vmi) `);
The 2nd, 2' summing unit (70, 70`); including;
While the supply air amount value Vi supplied into the sealed chamber 10 and the exhaust amount value Vo discharged from the sealed chamber remain the same, the gas of the supply/exhaust gas by the analyzers 40 and 40' The component is analyzed to measure the metabolism of the human body using a closed chamber, characterized in that the metabolic rate for the experimenter in the closed chamber (10) is analyzed.
The method of claim 1 ;
The hermetic chamber 10 is controlled so that environmental conditions of temperature conditions of 15 to 30° C. and humidity conditions of 40 to 60% are provided,
The supply air flow rate set value (Ci) and exhaust flow rate set value (Co) are set within the range of 40 to 360 ℓ/min according to the experimenter in the sealed chamber 10. An apparatus for measuring body metabolism using a closed chamber .
The method of claim 1 ;
The air supply unit 20 is configured such that the rotation speed of the air supply fan 22 is controlled by the air supply controller 21 according to the operation signal by the summation of the second summing unit,
The exhaust unit 30 is configured such that the rotational speed of the exhaust fan 32 is controlled by the exhaust controller 31 according to the operation signal of the second summing unit,
The air supply unit 20 and the exhaust unit 30 are installed to be connected to a height of 2.0 to 5.0 m in the sealed chamber 10.
The method of claim 1 ;
The analyzer (40, 40') is a body metabolism measuring device using a closed chamber, characterized in that consisting of a mass spectrometer system.
The method of claim 1 ;
The integrated control unit 50 includes an average calculator 51 connected to the air supply unit 20 and the exhaust unit 30 to calculate an average value Vavg, an average calculator 51 and a supply/exhaust unit 20, 30) connected to the comparator 52 to compare the average value (Vavg) and the supply air flow set value (Ci), and the average value (Vavg) and the exhaust flow rate set value (Co), and the comparator 52 connected to the supply/exhaust flow rate An apparatus for measuring body metabolism using a closed chamber, characterized in that it includes an integrated controller 53 that generates and outputs supply/exhaust flow rate correction values (Ii, Io) for primary correction of the set values (Ci, Co).
A method for measuring human metabolism using a closed chamber;
Gas is supplied into the sealed chamber 10 by the air supply unit 20 according to the supply air flow set value Ci, and the gas in the sealed chamber 10 is supplied to the exhaust unit 30 according to the exhaust flow rate set value Co. supply / exhaust step exhausted by the;
The air supply value Vi of the gas supplied into the sealed chamber 10 is measured by the air supply flow meter 23, and the exhaust value Vo of the gas exhausted from the sealed chamber 10 is measured by the exhaust flow meter 33. Supply / exhaust amount measurement step measured by the;
The average value (Vavg) of the air supply value (Vi) and the displacement value (Vo) is calculated, and the average value (Vavg) and the air supply amount value (Vi) by the air supply part (Vi), and the average value (Vavg) and the displacement value by the exhaust part (Vavg) a correction value calculation step in which the supply/exhaust correction values (Ii, Io) are calculated by comparing Vo);
The supply air correction value (Ii) is added to the supply air flow rate set value (Ci) to calculate the supply air corrected flow rate set value (Cmi), and the exhaust correction value (Io) is added to the exhaust flow rate set value (Co) to calculate the exhaust corrected flow rate set value ( a correction step in which Cmo) is calculated;
The feed/exhaust corrected flow rate set value (Cmi, Cmo) is summed with the feedback value (controlled amount) according to the feedback control of the supply/exhaust unit, respectively, and an operation signal is output. 22, 32) a supply/exhaust amount control step in which the rotation speed is controlled to adjust the supply/exhaust amount (Vi, Vo);
Supply/exhaust stage, supply/exhaust measurement stage, correction value calculation stage, correction stage, supply/exhaust amount adjustment so that the supply/exhaust corrected flow rate set value (Cmi, Cmo) matches the supply/exhaust flow rate set value (Ci, Co) A repeating step in which the steps are repeatedly performed;
Through the gas analysis step in which the gas supplied into the sealed chamber 10 and the gas exhausted from the sealed chamber 20 are transferred to the analysis units 40 and 40', respectively, and analyzed; ) and the displacement value (Vo) are kept the same, and the analysis of the gas supplied and the gas being exhausted is performed.

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