KR102003659B1 - Robot system, manufacturing apparatus of device, manufacturing method of device, method for adjusting teaching positions, and computer-readable recording medium - Google Patents

Abstract

According to the present invention, a robot system comprises a robot including a robot arm part and a robot hand part rotationally connected to the robot arm part, and a control part for controlling operation of the robot. The control part includes a memory part for storing information about a plurality of teaching positions used for controlling the robot. The control part corrects at least two pieces of information on the plurality of teaching positions stored in the memory part respectively on the basis of the information about the measured position of the robot hand part in a state that the robot hand part is set at a predetermined position. Therefore, the robot can be precisely controlled by measuring a rotation angle of the robot hand part.

Description

Technical Field [0001] The present invention relates to a robot system, a device manufacturing apparatus, a device manufacturing method, a teaching position adjusting method, and a computer readable recording medium.

The present invention relates to a robot.

2. Description of the Related Art In recent years, a manufacturing line of an organic EL display device receiving a light as a flat panel display device has used a robot in which a hand is connected to a multi-joint arm of a link structure, , A buffer chamber, a mask stock chamber, and the like.

When the robot is first installed on a manufacturing line or when the robot arm or the robot hand is exchanged for maintenance, in order to allow the robot to carry the substrate or the mask to an accurate target position, A teaching operation is performed for teaching the starting point of the motion and the sequence (conveying trajectory).

As a teaching method of the robot, there is a method of allowing a worker to directly grasp a waiting position and a conveying position of a substrate or a mask by holding the robot hand, a method in which an operator operates the robot with the operation panel to sequentially designate a position to be a starting point of the carrying operation And the like are generally known.

Information about the waiting position and the carrying position of the robot hand taught by the teaching operation is stored in the control means of the robot, and during the actual carrying operation, the robot reproduces the carrying operation in accordance with the stored waiting position and carrying position information.

Normally, the teaching of the waiting position of the robot hand and the carrying position for giving / receiving the substrate / mask is manually performed by the operator. That is, since the operator performs the teaching operation manually while visually confirming the movement of the robot, the operator is required to have a high degree of proficiency, and the teaching operation takes time.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: JP-A-2008-251968

In the technique disclosed in Patent Document 1 (Japanese Patent Application Laid-Open No. 2008-251968), although the positions of the robot hand portion in the X direction and the Y direction are measured, the control of the robot can not be precisely performed.

An object of the present invention is to provide a robot, a robot system, a device manufacturing apparatus, a device manufacturing method, and a teaching position adjusting method that can precisely control such problems.

A robot system according to a first aspect of the present invention includes a robot including a robot arm portion, a robot hand portion rotatably connected to the robot arm portion, and a control portion for controlling the operation of the robot, And a memory section for storing information on a plurality of teaching positions used for controlling the operation of the robot, wherein the control section controls the robot hand section to move the robot hand section And corrects at least two of the information related to the plurality of teaching positions stored in the memory unit.

A device manufacturing apparatus according to a second aspect of the present invention includes a plurality of chambers and a robot system for transporting a carrying object between the plurality of chambers, wherein the robot system is a robot system according to the first aspect.

A method of manufacturing a device according to a third aspect of the present invention is a method for manufacturing a device using a robot system including a robot including a robot hand unit and a memory unit and including a control unit for controlling the operation of the robot, A method for manufacturing a device that carries a substrate on the basis of information about a teaching position and processes the substrate to manufacture a device, the method comprising: setting a position of the robot hand unit at a predetermined position, Based on the information on the position of the robot hand portion acquired in the position information acquiring step, the teaching position correction for correcting at least two of the information about the plurality of teaching positions stored in the memory unit, .

A teaching position adjusting method according to a fourth aspect of the present invention is a teaching position adjusting method in a robot system including a robot including a robot hand portion and a memory portion and a control portion for controlling the operation of the robot, A position information acquiring step of acquiring information about a position of the robot hand part by setting the robot hand part to a predetermined position and a position information acquiring step of acquiring information about the position of the robot hand part acquired in the position information acquiring step And a teaching position correcting step of correcting at least two of the stored information on the plurality of teaching positions of the robot hand unit.

A computer-readable recording medium according to the fifth aspect of the present invention is a computer-readable recording medium storing a program for causing a computer to execute a teaching position adjustment method in a robot system, And the teaching position adjustment method according to the embodiment.

According to the present invention, it is possible to precisely control the robot by measuring the rotation angle of the robot hand portion.

1 is a schematic view of a part of a manufacturing line of an organic EL display device
2 is a schematic diagram of a robot system according to the present invention.
3 is a schematic diagram of a robot system for teaching position adjustment according to the present invention.

Hereinafter, preferred embodiments and examples of the present invention will be described with reference to the drawings. However, the following embodiments and examples are illustrative of preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations. In the following description, the hardware configuration, the software configuration, the process flow, the manufacturing conditions, the size, the material, the shape, and the like of the apparatus are intended to limit the scope of the present invention unless otherwise specified no.

<Electronic Device Manufacturing Line>

1 is a plan view schematically showing a part of the configuration of a manufacturing line of an electronic device.

The manufacturing line of Fig. 1 is used, for example, in the manufacture of a display panel of an organic EL display device for a smart phone. In the case of a display panel for a smart phone, after forming an organic EL film on a substrate having a full size (about 1500 mm x about 1850 mm) or a half-cut size (about 1500 mm x 925 mm) Are cut out to produce a plurality of panels of small size.

As shown in Fig. 1, the film-forming cluster 1 of the production line of the organic EL display device generally comprises a plurality of film-forming chambers 11 in which processing (for example, film-forming) A plurality of mask stock chambers 12 in which front and rear masks are accommodated, and a transport chamber 13 disposed at the center thereof.

A robot 14 is provided in the transport chamber 13 for transporting the substrate 10 between a plurality of deposition chambers 11 and transporting the mask between the deposition chamber 11 and the mask stock chamber 12. The robot 14 may be, for example, a robot having a structure in which a robot hand for holding the substrate 10 is mounted on a multi-joint arm. The structure of the robot 14 of the present invention will be described in detail with reference to Fig. In the present embodiment, the robot 14 is described as an example of a transport robot for transporting a substrate or a mask. However, the present invention is not limited to this and can be applied to other robots.

Each deposition chamber 11 is provided with a deposition apparatus (also referred to as a deposition apparatus). In the film forming apparatus, the evaporation material stored in the evaporation source is heated and evaporated by the heater, and is deposited on the substrate through the mask. A series of film formation processes such as transferring and receiving the substrate 10 with the robot 14, alignment (alignment) of the relative positions of the substrate 10 and the mask, fixing of the substrate 10 onto the mask, Is automatically performed by the film forming apparatus. The deposition apparatus may be a dual stage type having two stages. In the film deposition apparatus of the dual stage type, alignment is performed with respect to another substrate 10 brought into another stage while the film formation progresses on the substrate 10 carried in one stage.

In the mask stock chamber 12, a mask to be used in the film forming process in the film formation chamber 11 and a used mask are stored in two cassettes. The robot 14 transfers the used mask from the film formation chamber 11 to the cassette of the mask stock chamber 12 and transfers a new mask stored in another cassette of the mask stock chamber 12 to the deposition chamber 11 Return.

The film formation cluster 1 of the production line of the organic EL display device is provided with a pass room 15 for transferring the substrate 10 from the upstream side in the flow direction of the substrate 10 to the film formation cluster 1, 1 is connected to the buffer chamber 16 for transferring the substrate 10 on which the film formation process has been completed to another film formation cluster on the downstream side. The robot 14 of the transfer chamber 13 receives the substrate 10 from the pass space 15 on the upstream side and transfers the substrate 10 to one of the deposition chambers 11 in the deposition clusters 1. [ The robot 14 receives the substrate 10 on which the film formation process in the film formation cluster 1 has been completed from one of the plurality of deposition chambers 11 and transfers the substrate 10 to the buffer chamber 16 connected to the downstream side.

As described above, the robot 14 transports the substrate and the object to be transferred such as a mask between various chambers disposed around the transfer chamber 13.

1, the deposition clusters 1 of the present invention have been described. However, the deposition clusters 1 of the present invention are not limited thereto, and they may have different kinds of chambers, and the arrangement among the chambers may be different.

Hereinafter, the configuration of the robot system including the robot 14 will be described.

<Robot System>

Fig. 2 exemplarily shows the structure of a robot system including a robot 14. Fig.

In the following description, an XYZ coordinate system in which the direction parallel to the rotation axis of the connection portion between the robot arm portion and the robot hand portion of the robot 14 is the Z axis is used. When the Z-axis direction is the third direction, one of the X and Y directions perpendicular to the Z-axis direction is set as the first direction and the other is set as the second direction. Further, the rotation angle about the Z-axis direction is represented by?, And the rotation direction about the Z-axis is defined as the rotation angle direction.

The robot system of the present invention includes a controller (25) for controlling the operation of the robot (14) and the robot (14).

The robot 14 includes a base 21 provided on the bottom surface of the transport chamber 13 and a shaft 21 extending in the vertical direction or in the Z-axis direction (third direction) from the base 21 and movable in the Z- And a robot arm portion 23 rotatably connected to the shaft portion 22. 2 (a), the robot 14 has one robot arm portion 23, but the robot 14 may have two or more robot arm portions 23. As a result, the transport efficiency of the substrate 10 and the mask can be increased, and the processing time can be shortened.

The robot arm portion 23 may have a structure in which a plurality of arms are rotatably connected to each other through a joint portion. For example, the robot arm portion 23 includes a first arm 231 having one end rotatably connected to the shaft portion 22, a second arm 231 having one end rotatably connected to the other end of the first arm 231, 232). 2 (a) shows a structure in which two arms are rotatably connected to each other through a joint portion. However, the present invention is not limited to this structure, and a structure in which two arms are relatively displaced in the direction of the long side of the arm to expand and contract . The first arm 231 is rotatably connected to the shaft portion 22 but the present invention is not limited thereto and the first arm 231 may be fixedly connected to the shaft portion 22, The shaft portion 22 itself may be rotated.

At the other end of the second arm 232, a robot hand portion 24 is rotatably installed. The robot hand section 24 has a structure in which a substrate and a mask can be placed thereon. Although not shown in Fig. 2, in order to stably support the substrate, the robot hand part 24 intersects the longitudinal direction of the robot hand part 24 (the direction toward the free distal end of the robot hand part from the connection part with the robot arm part) And a plurality of supporting portions extending in a direction in which the plurality of supporting portions are provided. A fluorine coating or the like may be performed on the substrate / mask surface of the robot hand portion 24 to prevent damage to the substrate 10. [ It may also include holding means such as a gripping mechanism to prevent the substrate 10 from moving or dropping on the robot hand portion 24 during transportation.

The robot 14 according to the present invention having such a structure is configured such that the rotation angle of the first arm 231 about the shaft portion 22, the angle between the first arm 231 and the second arm 232, By adjusting the angle between the arm 232 and the robot hand 24 and the height of the shaft 22, the linear movement, the rotational movement, and the compound movement of the substrate or mask placed on the robot hand 24 And move the substrate or mask to any desired location on the XYZ coordinate system.

The robot hand portion 24 of the robot 14 of the present invention is used to measure the positional shift amount of the robot hand portion 24 in a rotational angle or rotational angle direction at a predetermined position (for example, The mark portion 241 is formed. The specific configuration and function of the mark portion 241 will be described later with reference to Fig.

The robot system of the present invention includes a control unit (25) for controlling the operation of the robot (14). The control unit 25 may be implemented by a computer having a processor, memory, storage, I / O, and the like. For example, the control unit 25 includes a memory unit 251 in which a program for controlling the returning operation of the robot 14 is stored, a processor 251 configured to control the robot 14 by executing a program stored in the memory unit 251, (252). As the computer, a general-purpose personal computer may be used, or an embedded type computer or a PLC (programmable logic controller) may be used. Alternatively, some or all of the functions of the control unit 25 may be configured by a circuit such as an ASIC or an FPGA. In the present embodiment, the controller 25 is described as being installed separately from the robot 14, but the present invention is not limited thereto, and the robot 14 may have the controller 25.

In the memory unit 251, information on a plurality of teaching positions (waiting position and carrying position) for controlling the carrying operation of the robot 14 can be stored. The control unit 25 controls the robot hand unit 24 to move to the corresponding position based on the information about the teaching position stored in the memory unit 251. [

2 (b), the robot 14 includes a first arm driving portion 2311 for rotating the shaft of the first arm 231, a second arm driving portion 2311 for rotating the shaft of the second arm 24, A robot hand driving section 242 for rotating the shaft of the robot hand section 24 and an elevation driving section 221 for driving the shaft section 22 in a vertical direction.

These drive units each include a servo motor (not shown) and a power transmission mechanism (not shown). The rotary power is transmitted from the servo motor to the shaft of the first arm 231, the shaft of the second arm 232, and the shaft of the robot hand portion 24 via the power transmission mechanism, whereby the first arm 231, The second arm 232, and the robot hand unit 24, respectively.

The lifting drive part 221 is installed in the base part 21 of the robot 14 and can be realized by a ball screw mechanism including a rotary motor. For example, the lifting drive section 221 includes a screw shaft, a ball nut configured to be engaged with the screw shaft, and a rotation motor configured to rotate the screw shaft. In this case, the shaft portion 22 is fixed to the ball nut, and is lifted and lowered together with the ball nut as the screw shaft rotates.

The control unit 25 receives information about the angular position of the first arm 231, the angular position of the second arm 232, the angular position of the robot hand unit 24, and the height of the shaft unit 22 from these driving units It is possible to perform feedback control of each driving unit. Thereby, the robot hand unit 24 can be moved to the teaching position with high accuracy.

<Robot teaching>

The robot 14 transports the substrate 10 between a plurality of deposition chambers 11 in the deposition clusters 1 and the passages 15 or the buffer chambers 16 as described with reference to Fig.

The robot arm portion 23 of the robot 14 is contracted (that is, when the substrate 10 is transferred from the pass room 15 to the first film formation chamber 11a by the robot 14) The joint of the robot arm portion 23 is folded so that the angle between the first arm and the second arm is small) and the free end of the robot hand portion 24 is moved from the first standby position , The robot arm portion 23 is extended to a carrying-out position on the substrate stage in the pass chamber 15 (this position becomes the teaching position for the pass space) and the substrate 10 on the substrate stage of the pass chamber 15 And retracts the robot arm portion 23 to return to the first standby position.

Next, the robot arm portion 23 is pivoted about the shaft portion 22 so that the free end of the robot hand portion 24 is moved to the second standby position (another teaching position . In this state, the robot arm portion 23 is extended again to move to the substrate carry-in position (the teaching position for the first film forming chamber) in the first film forming chamber 11a, thereby bringing the substrate into the first film forming chamber 11a do. Thereafter, the robot hand unit 24 returns to the second standby position.

This process is repeated until all the film forming processes in the film formation clusters 1 are finished and the substrates are transferred to the buffer chamber 16 on the downstream side of the substrate flow. Information on the waiting position in the film deposition cluster 1 and the carry-in / carry-out position of the substrate 10 is stored as information of the teaching position in the control section 25 In the memory unit 251 of FIG.

(For example, measuring the corresponding position and storing it in the memory unit 251 of the control unit 25) of teaching positional information (e.g., X, Y, Z, When the robot 14 is placed in the film formation cluster 1 or when the robot arm portion 23 or the robot hand portion 24 is removed or replaced for maintenance, Lt; / RTI &gt;

In the teaching operation, the operator moves the robot hand portion 24 to each teaching position while moving the robot 14 little by little through the operation panel, and moves the robot hand portion 24 to the first The rotation angle of the arm 231, the rotation angle between the first arm 231 and the second arm 232, the rotation angle between the second arm 232 and the robot hand 24, By calculating the coordinate value of the teaching position on the basis of the information about the position in the direction of the robot and storing it in the control unit 25. [ At this time, the angle of rotation and the like are determined by the driving unit 2311 of the shaft of the first arm 231, the driving unit 2321 of the shaft of the second arm 232, the driving unit 242 of the shaft of the robot hand unit 24, And the lifting and driving portion 221 of the shaft portion 22.

Such a teaching operation is usually performed by manually turning the robot arm unit 23 and / or the robot hand unit 24 of the robot 14 by operating the operation panel manually, May be performed in such a manner that the robot hand unit 24 is guided to the target position by using the robot hand unit 24 to obtain the position information thereof. Further, the teaching operation may be performed by a method of recognizing the marker placed on the robot hand unit 24 moved to the target position as a sensor and obtaining the coordinate value of the teaching position.

When the relative position between the chambers is constant, for example, when the teaching position (substrate carry-in / out position) in each chamber is located at substantially the same distance from the shaft portion 22 of the robot 14 14), it is possible to quickly perform a teaching operation for another chamber (teaching position) by using the relative positional relationship between these chambers.

It should be noted that the teaching operation is generally performed in a state in which the substrate 10 is not placed on the robot hand portion 24 but the substrate 10 may be placed on the robot hand portion 24. [ As a result, accurate teaching can be performed in accordance with the actual transporting condition.

<Robot System for Adjustment of Teaching Position>

Hereinafter, a robot system for adjusting the teaching positions (waiting position and carrying position) according to the present invention will be described with reference to Fig.

The robot arm portion 23 is moved in the direction of the robot arm 14 and the robot arm portion 23 when the substrate 14 or the mask is transported using the actual robot 14 after the initial installation of the robot 14 or the maintenance of the robot arm portion 23 / Or the robot hand part 24 may collide with other parts of the manufacturing line. For example, in the process of transporting the substrate 10 or the mask into each chamber by the robot 14 in the film formation cluster 1, the robot hand portion 24, etc. are transported to the deposition chamber 11, May collide with a substrate holder or substrate stage or substrate support such as the buffer chamber 16 and may collide with the mask receiving cassette in the mask stock chamber 12 or the mask support within the cassette.

The robot hand unit 24 and the robot arm unit 23 may be deformed and the joints between the robot hand unit 24 and the robot arm unit 23 may be deformed .

Even if the collision does not occur, since the robot hand portion 24 itself is deformed by the weight of the substrate 10 due to the enlargement of the substrate or the joint portion is deformed due to the load continuously applied to the joint portion of the robot 14, The movement position of the hand portion 24 may be different from that at the initial teaching.

In this case, the control unit 25 instructs the robot hand unit 24 to move the robot hand unit 24 to the teaching position based on the information about the teaching position stored in the memory unit 251, The robot hand section 24 can not be moved to the teaching position and is moved to the position deviated from the teaching position. That is, even if the substrate 10 held by the robot hand section 24 is moved to the teaching position (standby position and transportation position) stored in the control section 25, the substrate does not move to the position assumed at the time of teaching , X, Y, Z, and θ directions. Such a positional deviation may increase the possibility of collision with other apparatuses or the like of the manufacturing line in the process of transporting the substrate or the mask, and may cause a failure in processing (e.g., film formation) on the substrate.

In particular, in the case of a rectangular substrate used for an organic EL display, unlike a semiconductor substrate having a circular substrate shape, the positional deviation of the substrate in the rotation angle direction (? Direction) about the Z- There is a great need to adjust the positional deviation of the robot hand portion 24 or the like in the rotational angle direction due to a collision of the robot 14 or the like.

In the prior art, a positional deviation occurs in the robot hand portion 24 due to a collision or the like of the robot 14, so that the carrying operation of the robot 14 is performed at a position different from that taught at the time of teaching, The teaching operation is again performed for all the teaching positions (the waiting position and the carrying position such as the carrying-in / carrying-out position) in the film-forming cluster 1.

In the manufacturing line of the organic EL display device, the teaching position of the robot 14 is the position where the substrate and the mask are placed in the processing chamber (film forming chamber) arranged around the transfer chamber provided with the robot 14, Since it includes a plurality of positions such as a position at which the mask before and after use is stored in the buffer chamber 12, a position at which the mask is transferred to the pass room 15 and the buffer chamber 16, and so forth, It takes.

Furthermore, the robot 14 may have two robot arm portions 23 so that more carrying operations can be performed for a unit time, and teaching is separately performed in the atmospheric release state and the vacuum state with respect to the respective teaching positions Therefore, in a large-scale manufacturing line, it takes several tens of times to perform a teaching operation, which takes several hours to teach, and the manufacturing line itself is stopped during this time.

In the present invention, when a positional deviation of the robot (14), particularly, the robot hand unit (24) occurs due to a collision or the like of the robot (14) , The positional deviation amount of the robot hand portion 24 at a predetermined position (in the present embodiment, it is referred to as the origin position, and the origin position may be, for example, the substrate / mask transfer position in the specific chamber) And corrects the position information of the plurality of different teaching positions based on the measured position information. This makes it possible to omit the teaching operation for the other plurality of teaching positions and shorten the time required for the re-teaching operation.

The robot system 30 of the present invention used thereon includes a robot 14, a control unit 25, and a detection means 31 as shown in Fig.

The robot hand portion 24 of the robot 14 is provided with a mark portion 241 used for measuring the rotational angle of the robot hand portion 24 or the positional shift amount in the rotational angle direction of the robot hand portion 24 do. Here, the rotation angle means a rotation angle about a virtual axis passing through the robot hand portion 24 parallel to the Z axis.

The mark portion 241 is provided on the robot hand portion 24 so as to measure the positional shift amount in the rotation angle direction or the rotation angle direction (? Direction) around the virtual axis passing through the robot hand portion 24 And a plurality of marks arranged along the long side direction (direction from the connecting portion with the robot arm portion 23 toward the free distal end of the robot hand portion 24). 3 (a) shows a configuration in which the mark portion 241 has two marks (the first mark and the second mark), the present invention is not limited to this, and may include three or more marks. The present invention is not limited to the configuration in which a plurality of marks are disposed on a straight line extending along the long side direction of the robot hand portion 24. The displacement between the plurality of marks is a component along the long side direction of the robot hand portion 24 You have to. In this case, however, it is preferable that the plurality of marks are arranged on a straight line along the long-side direction of the robot hand portion 24, since the image processing by the detecting means 31 described later can be further complicated.

In this embodiment, the mark of the mark portion 241 may be a + mark formed on the robot hand portion 24, but the present invention is not limited to this and may be a mark of any other shape.

As another embodiment, the mark portion 241 of the present invention may be a linear mark extending along the long side direction of the robot hand portion 24 as shown in Fig. 3 (b).

As described above, the mark portion 241 is disposed along the long side direction of the robot hand portion 24 (that is, the direction from the connecting portion with the second arm 232 toward the free distal end of the robot hand portion 24) Axis direction and the Y-axis direction of the robot hand unit 24 as well as the positional deviation of the robot hand unit 24 in the X-axis direction and the Y-axis direction by using a plurality of marks or a linear mark extending along the long side direction of the robot hand unit 24. [ It is possible to measure the rotational angle around the imaginary axis passing through the optical axis or the positional shift amount in the rotational angle direction. At this time, the rotation angle of the robot hand unit 24 around the imaginary axis of the robot hand unit 24 is set such that a line segment connecting a plurality of marks (the first mark and the second mark) Is measured by the angle formed.

3, the robot hand unit 24 is formed of one finger. However, the robot hand unit 24 may be formed of two split fingers. In this case, the mark unit 241 may be formed of any one of two fingers Can be installed in one.

The detecting means 31 of the robot system 30 of the present invention detects the mark portion 241 of the robot hand portion 24 to detect the X axis direction and the Y axis direction, It is possible to measure the positional shift amount of the robot hand portion 24 in the rotational angle direction about the imaginary axis.

The detection means 31 detects the mark 241 at the origin position so that the robot hand portion 24 can detect the mark portion 241 in a state where the robot hand portion 24 is set at the home position (for example, (241). For example, when the home position is the substrate carry-out position of the pass room 15, the detecting means 31 is provided at a position where the mark portion 241 can be detected from below the substrate stage of the pass room 15 . When a camera for photographing is used as the detecting means 31 as described later, a transparent window may be provided on the bottom surface of the pass room 15, and a camera for photographing may be provided outside the pass space 15. However, the present invention is not limited thereto And an image pickup camera may be provided in the pass room 15. [

It is preferable that the detecting means 31 is a plurality of imaging cameras 311 capable of detecting the positions of the individual marks by photographing the individual marks when the mark portion 241 includes a plurality of individual marks However, the present invention is not limited to this, and may be other means as long as the position of the individual mark can be detected.

As described above, the mark portion 241 is constituted by a plurality of individual marks arranged along the long side direction of the robot hand portion 24, and the detecting means 31 is constituted by a plurality of cameras capable of measuring the positions of these individual marks , The rotation angle and the position shift amount of the robot hand section 24, in particular, the position shift amount in the rotation angle direction can be measured.

That is, the robot hand unit 24 is set at the home position before the positional deviation occurs in the robot 14 due to a collision or the like (for example, immediately after the first teaching operation) (Reference position information, first information) about the position of the robot hand portion 24 when the robot hand portion 24 is set at the origin position by detecting the respective marks of the robot hand portion 241. [ Particularly, in the present invention, since the mark portion 241 includes a plurality of marks arranged along the long side direction of the robot hand portion 24, the rotation around the virtual axis passing through the robot hand portion 24 The position (rotation angle) in each direction can be measured. Therefore, the reference position information includes information about the position of the robot hand portion 24 in at least the X-axis direction, the Y-axis direction, and the rotational angle direction about the virtual axis passing through the robot hand portion 24, The reference position information is stored in the memory unit 251 of the control unit 25. [ Information on the position of the robot hand portion 24 in the Z axis direction can be measured by a separate laser sensor or an image pickup camera provided below the robot hand portion 24 so as to be spaced apart from the robot hand portion 24 .

Thereafter, when a positional deviation occurs due to a collision of the robot 14 or the like, control for resetting the robot hand unit 24 to the origin position is performed (even if this control is performed, , The robot hand unit 24 can not move to the original origin position) and the detection unit 31 detects the mark of the mark unit 241 again so that the position information of the plurality of marks . Acquires the positional information of the robot hand unit 24 on the basis of the position information of the re-acquired marks and supplies the position information (second information) of the re-acquired robot hand unit 24 to the memory unit 251 Of the robot hand portion 24 in the direction of the X-axis and the Y-axis of the robot hand 24 before and after the collision and in the rotational angle direction about the imaginary axis passing through the robot hand portion 24 DELTA Y, DELTA &amp;thetas; The positional shift amount DELTA Z in the Z axis direction of the robot hand portion 24 is also compared with the reference position information in the Z axis direction stored in advance in the memory unit 251 and the reference position information in the Z axis direction after collision Can be obtained by comparing information.

That is, in the present invention, the position of the mark portion 241 of the robot hand portion 24 is detected by the detection means 31 before the displacement of the robot hand portion 24 occurs, and the robot hand portion 24 And stores it in the control unit 25 in advance. When the positional deviation occurs due to a collision or the like of the robot hand portion 24, the control for setting the robot hand portion 24 back to the origin position is performed and then the position of the mark portion 241 deviated from the detection means 31) of the robot hand portion 24 to calculate the position of the displacement of the robot hand portion 24 and calculate the position shift amounts DELTA X, DELTA Y, DELTA &amp;thetas; ).

On the other hand, instead of a method of providing a plurality of detecting means 31 so as to correspond to a plurality of marks and detecting marks by each of the detecting means 31, one detection means 31, For example, after acquiring image data by photographing a plurality of marks with an image pickup camera having a field of view in which a plurality of marks can be photographed, information on the position of each mark can be obtained through image processing.

The method of detecting the position of the mark portion 241 may be applied to a case where the mark portion 241 is a linear mark 2412 extending along the long side direction of the robot hand portion 24.

For example, as shown in Fig. 3 (b), a camera 312 having a relatively wide viewing angle is provided as a detecting means 31 below the teaching position of the pass room 15, which is the home position.

The robot hand unit 24 is set at the origin position and then the linear mark 2412 formed on the robot hand unit 24 is photographed by the camera 312 serving as the detection means 31 to obtain a captured image of the linear mark. Axis direction, the Y-axis direction, and the rotation direction of the robot hand section 24 by performing image processing by the image processing section (not shown) of the control section 25 or the image processing section provided separately from the control section 25, The position in each direction is calculated. And stores the calculated position information in the memory unit 251 of the control unit 25 as information of the reference position of the robot hand unit 24. [

When the positional deviation occurs in the robot hand unit 24 due to a collision or the like, control is performed again to set the robot hand unit 24 to the home position, The robot hand unit 24 is photographed, image processing of the photographed image is performed, and the position of the robot hand unit 24 is remeasured. The X-axis direction, the Y-axis direction, and / or the X-axis direction of the robot hand section 24 are set based on information on the re-measured position of the robot hand section 24 and information on the reference position previously stored in the memory section 251. [ Or the positional shift amounts DELTA X, DELTA Y, DELTA &amp;thetas; in the rotational angular direction. Thereby, the positional displacement amount of the robot hand portion 24 before and after the collision is obtained.

As described above, when the position shift amount is calculated by image processing of the image of the mark portion 241 (image of a plurality of marks, image of a linear mark) obtained through one camera 312, Determines the adjustable range of the teaching position described later. That is, by using the camera 312 having a wide field of view, the adjustable range of the transport position can be widened.

In this embodiment, among the plurality of teaching positions in the film formation cluster 1, the substrate carry-out position of the pass room 15 is set as the origin position for measuring the position shift amount of the robot hand portion 24. [ This is because the transfer position of the pass room 15 among the plurality of teaching positions in the film deposition cluster 1 is the farthest from the shaft portion 22 of the robot 14 (that is, the robot arm portion 23) And the robot hand portion 24 are at the positions corresponding to the most unfolded positions), the positional displacement amount due to the collision of the robot hand portion 24 is the largest position. In the case of the pass room 15, unlike the deposition chamber 11 in which the evaporation source is provided at the lower part of the chamber, there is an advantage that the detection means 31 can be easily provided below the substrate stage.

However, the origin position of the present invention is not limited to the substrate carry-out position of the pass room 15 but may be a transport position in another chamber (for example, a film formation chamber, a buffer chamber, a mask stock chamber) , And a standby position of the conveying chamber). By setting the origin position to any one of a plurality of standby positions in the transportation room, the installation of the detection means 31 is facilitated. Furthermore, the origin position of the present invention may be a third position other than the teaching position of the film formation cluster 1.

As described above, according to the present invention, a plurality of marks formed along the long side direction of the robot hand portion or a linear mark extending along the long side direction of the robot hand portion are detected by the detection means such as a camera in the robot hand portion, (In particular, the positional shift amount in the direction of the rotation angle about the imaginary axis passing through the robot hand portion 24) at a predetermined position of the robot hand portion is calculated, and the positional shift amount , Information on a plurality of other teaching positions (waiting position and carrying position) of the carrying operation is corrected. As a result, the equipment can be restarted only by confirming the teaching position without re-teaching the other plurality of teaching positions, and the time required for re-teaching can be greatly shortened.

<Method of Adjusting Teaching Position and Device Manufacturing Method>

A method of adjusting a plurality of different teaching positions in the film formation cluster 1 based on the positional shift amount of the robot hand portion 24 at the origin position and a method of manufacturing a device such as an organic EL display device using the same Will be described.

First, a plurality of teaching positions (a carrying position and a standby position) to which the substrate 10 is to be transported are taught to the robot 14. [ That is, position information of a plurality of transfer positions and waiting positions is stored in the memory unit 251 of the control unit 25 as teaching position information (S1).

The robot hand portion 24 of the robot 14 is set to the origin position which is one of the plurality of teaching positions (S2). The position information of the robot hand part 24 calculated based on the detection result is detected by the detection part 31 of the robot hand part 24, Is stored in the memory unit 251 of the control unit 25 as the reference position information (first information) (S3).

Thereafter, in the case where a displacement occurs in the robot hand portion 24 due to a deformation or the like generated in the robot 14 due to a collision with another portion of the film formation cluster 1 or the like in the transporting process, in order to measure the position displacement amount, Control for setting the hand unit 24 back to the home position is performed (S4). That is, information of the origin position is inputted to the driving unit of the robot 14. However, due to deformation caused by a collision or the like, the robot hand portion 24 can not move to the origin position before collision, and moves to a position shifted from the original position. The position of the robot hand portion 24 moved to the shifted position is again measured by detecting the mark portion 241 of the robot hand portion 24 by the detection means 31 (S5).

The control unit 25 calculates the position of the robot hand unit before and after the collision from the information about the re-measured position of the robot hand unit 24 and the reference position previously stored in the memory unit 251 of the control unit 25 24 is calculated. According to the configuration of the present invention, it is possible to measure not only the positional shift amount in the X-axis direction (first direction) and the Y-axis direction (second direction), but also the positional shift amount in the? Direction . Similarly, the displacement amount of the robot hand portion 24 in the Z-axis direction is also measured.

The control unit 25 compares the measured positional shift amount with a predetermined threshold value for each of the X-axis direction, the Y-axis direction, the Z-axis direction, and the? Direction. If it is determined that the positional shift amount in any one of the X-axis direction, the Y-axis direction, the Z-axis direction, and the [theta] direction exceeds the threshold value in the corresponding direction, the control unit 25 calculates the positional shift amount The position information on the plurality of teaching positions stored in the memory unit 251 is corrected.

For example, the positional shift amount in the corresponding direction calculated by the control unit 25 is added to or subtracted from the positional information in the corresponding direction of the other teaching position, and the positional information of the teaching position is corrected.

When the position information on all the teaching positions is corrected, the robot 14 is operated on the basis of the corrected teaching position so that the robot hand portion 24 is moved to the other portion of the film formation cluster 1 And whether or not it is moving properly to the target position without collision. If it is confirmed that the robot 14 can carry out the transportation operation to a plurality of teaching positions without any problem, the transportation of the substrate / mask by the robot 14 is resumed.

As described above, according to the teaching position adjusting method of the present invention, after the robot 14 is caused to collide with other portions of the film formation cluster 1, instead of performing the teaching operation for all of the plurality of teaching positions, Only the position shift amount of the hand unit 24 is measured, and correction for the other teaching positions is performed. As a result, it is possible to greatly shorten the time required for reattaching the robot 14 after the collision.

In the present embodiment, when a positional deviation occurs in the robot hand portion 24 due to a collision or the like, the control for setting the robot hand portion 24 to the origin position is performed and then the position of the mark portion 241 is remeasured The present invention is not limited to this. Even after the robot 14 has been used for a predetermined period of time or longer, the robot hand unit 24 is controlled to be set at the home position, It is also possible to re-measure the position of the arm 24. This makes it possible to prevent the robot 14 from colliding with other parts of the deposition clusters 1 due to the deformation of joints or the like due to the continuous use of the robots 14. [

The above-described embodiment shows an example of the present invention, and the present invention is not limited to the configuration of the above-described embodiment, and may be appropriately modified within the scope of the present invention.

1: Tape Clusters
11: Deposition chamber (treatment chamber)
12: mask stock chamber
13: Carrier
14: Robot
15: Pass room
16: buffer chamber
22: shaft portion
23: robot arm arm
24: Robot hand part
25:
31:
241:

Claims (27)

As a robot system,
A robot including a robot arm portion and a robot hand portion rotatably connected to the robot arm portion;
And a control unit for controlling the operation of the robot,
Wherein the control unit includes a memory unit that stores information on a plurality of teaching positions used for controlling the operation of the robot,
Wherein the control unit sets at least two of the information related to the plurality of teaching positions stored in the memory unit to each of the plurality of teaching positions on the basis of information on the measured position of the robot hand unit in a state where the robot hand unit is set at a predetermined position The robot system to correct. The method according to claim 1,
Wherein the control unit controls the robot hand unit such that the robot hand unit is rotated in a direction of a rotation angle of the robot hand unit measured in a state where the robot hand unit is set at the predetermined position, And corrects at least two of the information related to the plurality of teaching positions stored in the memory unit based on information about the position in any one of the two directions. The method according to claim 1,
Wherein the control unit stores first information on the position of the robot hand unit measured while the robot hand unit is set at the predetermined position in the memory unit. The method of claim 3,
Wherein the control unit is configured to calculate the position of the robot hand unit based on the first information stored in the memory unit and the second information on the position of the robot hand unit measured again in a state in which the control unit has performed control for setting the robot hand unit to the predetermined position And obtains the positional shift amount of the robot hand unit. 5. The method of claim 4,
Wherein the control unit corrects at least two of the information concerning the plurality of teaching positions stored in the memory unit based on the positional displacement amount when the positional displacement amount exceeds a predetermined threshold value. The method according to claim 1,
Wherein the control unit controls the operation of the robot based on the corrected information about the plurality of teaching positions. The method according to claim 1,
Wherein the predetermined position is one of the plurality of teaching positions. The method according to claim 1,
Wherein the teaching position corresponding to the predetermined position is a position corresponding to the most unfolded state of the robot arm portion and the robot hand portion among the plurality of teaching positions. The method according to claim 1,
Wherein the predetermined position is one of the plurality of teaching positions,
Wherein the control unit controls the robot hand unit based on the information about the teaching position stored in the memory unit and the information about the position of the robot hand unit measured while the robot hand unit is set at the predetermined position, The robot system comprising: 10. The method of claim 9,
Wherein the control unit corrects at least two of the information concerning the plurality of teaching positions stored in the memory unit based on the positional displacement amount when the positional displacement amount exceeds a predetermined threshold value. 11. The method of claim 10,
Wherein the control unit controls the operation of the robot based on the corrected information about the plurality of teaching positions. A device manufacturing apparatus comprising:
A plurality of chambers,
And a robot system for transporting the object to be carried between the plurality of chambers,
The robot system according to any one of claims 1 to 11, wherein the robot system is a robot system according to any one of claims 1 to 11. 13. The method of claim 12,
The plurality of chambers includes a processing chamber in which processing is performed on the first object to be carried, a second object carrying chamber in which the second object to be carried is stored, And a buffer chamber on the downstream side in the flow direction,
And measurement means for measuring the position of the robot hand portion at the predetermined position is provided in the pass space. A robot system comprising a robot including a robot hand unit and a memory unit and having a control unit for controlling the operation of the robot is used to carry the substrate on the basis of information about a plurality of teaching positions stored in the memory unit, A method of manufacturing a device for processing a substrate to manufacture the device,
A position information acquiring step of setting the robot hand part to a predetermined position and acquiring information about a position of the robot hand part;
And a teaching position correction step of correcting at least two pieces of information on the plurality of teaching positions stored in the memory unit based on the information on the position of the robot hand part acquired in the position information acquisition step,
/ RTI &gt; 15. The method of claim 14,
Wherein the position information acquiring step includes setting the robot hand part to the predetermined position and moving the robot hand part in a first direction that intersects the rotation axis of the rotation angle and a second direction intersecting the rotation axis and the first direction, And acquiring information about a position in either one of the two directions. 15. The method of claim 14,
Further comprising an initial position storing step of storing first information on the position of the robot hand portion measured while the robot hand portion is set to the predetermined position before the position information obtaining step, / RTI &gt; 17. The method of claim 16,
Based on the first information stored in the memory unit in the initial position storing step and the information about the position of the robot hand unit acquired in the position information acquiring step, a positional shift amount for obtaining the positional shift amount of the robot hand unit Further comprising the step of acquiring the device. 15. The method of claim 14,
Wherein the predetermined position is one of the plurality of teaching positions,
The positional shift amount of the robot hand unit is acquired based on information on the teaching position stored in the memory unit and information on the position of the robot hand unit measured while the robot hand unit is set at the predetermined position Further comprising a position shift amount acquiring step. The method according to claim 17 or 18,
Wherein the teaching position correcting step corrects the teaching position based on the positional shift amount when the positional shift amount acquired in the positional shift amount acquiring step exceeds a predetermined threshold value , Respectively. A method of adjusting a teaching position in a robot system including a robot including a robot hand unit and a memory unit and a control unit for controlling the operation of the robot,
A position information acquiring step of setting the robot hand part to a predetermined position and acquiring information about a position of the robot hand part;
A teaching position correcting step of correcting at least two of the information related to the plurality of teaching positions of the robot hand unit stored in the memory unit based on the information about the position of the robot hand unit acquired in the position information acquiring step And a teaching position adjustment method. 21. The method of claim 20,
Wherein the position information acquiring step includes setting the robot hand part to the predetermined position and moving the robot hand part in a first direction that intersects the rotation axis of the rotation angle and a second direction intersecting the rotation axis and the first direction, And acquiring information about a position in either one of the two directions. 21. The method of claim 20,
Further comprising an initial position storing step of storing first information on the position of the robot hand portion measured while the robot hand portion is set to the predetermined position before the position information obtaining step, How to adjust the teaching position. 23. The method of claim 22,
Based on the first information stored in the memory unit in the initial position storing step and the information about the position of the robot hand unit acquired in the position information acquiring step, a positional shift amount for obtaining the positional shift amount of the robot hand unit Further comprising the step of acquiring the teaching position. 24. The method of claim 23,
Wherein the teaching position correcting step corrects the teaching position based on the positional shift amount when the positional shift amount acquired in the positional shift amount acquiring step exceeds a predetermined threshold value And correcting at least two of the teaching positions. 21. The method of claim 20,
Wherein the predetermined position is one of the plurality of teaching positions,
The positional shift amount of the robot hand unit is acquired based on information on the teaching position stored in the memory unit and information on the position of the robot hand unit measured while the robot hand unit is set at the predetermined position Further comprising a position shift amount acquiring step. 26. The method of claim 25,
The teaching position correcting step corrects the teaching position based on the positional shift amount when the positional shift amount acquired in the positional shift amount acquiring step exceeds a predetermined threshold value And correcting at least two of the information, respectively. A computer-readable recording medium recording a program for causing a computer to execute a teaching position adjusting method in a robot system,
The teaching position adjusting method according to any one of claims 20 to 26, wherein the teaching position adjusting method is a teaching position adjusting method according to any one of claims 20 to 26.

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