KR101758051B1 - Stripping composition for color filter - Google Patents
Stripping composition for color filter Download PDFInfo
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- KR101758051B1 KR101758051B1 KR1020140161356A KR20140161356A KR101758051B1 KR 101758051 B1 KR101758051 B1 KR 101758051B1 KR 1020140161356 A KR1020140161356 A KR 1020140161356A KR 20140161356 A KR20140161356 A KR 20140161356A KR 101758051 B1 KR101758051 B1 KR 101758051B1
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- KR
- South Korea
- Prior art keywords
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- parts
- alcohol
- carbon atoms
- group
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 55
- 239000007788 liquid Substances 0.000 claims abstract description 34
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000003463 adsorbent Substances 0.000 claims abstract description 19
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 claims abstract description 17
- 125000000623 heterocyclic group Chemical group 0.000 claims abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 8
- 239000005456 alcohol based solvent Substances 0.000 claims abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 7
- 229910052717 sulfur Inorganic materials 0.000 claims abstract description 7
- 125000004122 cyclic group Chemical group 0.000 claims abstract description 3
- -1 alkylene glycol ethers Chemical class 0.000 claims description 38
- 150000001412 amines Chemical class 0.000 claims description 25
- 229910052739 hydrogen Inorganic materials 0.000 claims description 17
- 125000000217 alkyl group Chemical group 0.000 claims description 16
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 16
- 239000001257 hydrogen Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 14
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 14
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 13
- 239000002904 solvent Substances 0.000 claims description 12
- 229920000642 polymer Polymers 0.000 claims description 10
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 claims description 9
- 239000003513 alkali Substances 0.000 claims description 8
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 8
- 230000001476 alcoholic effect Effects 0.000 claims description 7
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 claims description 7
- KQRWEUPIDARYMA-UHFFFAOYSA-N 1-(oxolan-2-yl)butan-1-ol Chemical compound CCCC(O)C1CCCO1 KQRWEUPIDARYMA-UHFFFAOYSA-N 0.000 claims description 6
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 claims description 6
- 229920000178 Acrylic resin Polymers 0.000 claims description 5
- 239000004925 Acrylic resin Substances 0.000 claims description 5
- 229910001854 alkali hydroxide Inorganic materials 0.000 claims description 5
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 5
- 238000004064 recycling Methods 0.000 claims description 5
- 125000005210 alkyl ammonium group Chemical group 0.000 claims description 4
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 235000019445 benzyl alcohol Nutrition 0.000 claims description 4
- 229960004217 benzyl alcohol Drugs 0.000 claims description 4
- 239000002736 nonionic surfactant Substances 0.000 claims description 4
- WAPNOHKVXSQRPX-SSDOTTSWSA-N (R)-1-phenylethanol Chemical compound C[C@@H](O)C1=CC=CC=C1 WAPNOHKVXSQRPX-SSDOTTSWSA-N 0.000 claims description 3
- FGNVEEOZAACRKW-UHFFFAOYSA-N 1-(oxolan-2-yl)ethanol Chemical compound CC(O)C1CCCO1 FGNVEEOZAACRKW-UHFFFAOYSA-N 0.000 claims description 3
- YURZFYINXLRBDR-UHFFFAOYSA-N 1-(oxolan-2-yl)propan-1-ol Chemical compound CCC(O)C1CCCO1 YURZFYINXLRBDR-UHFFFAOYSA-N 0.000 claims description 3
- HQRWWHIETAKIMO-UHFFFAOYSA-N 1-phenylbutan-1-ol Chemical compound CCCC(O)C1=CC=CC=C1 HQRWWHIETAKIMO-UHFFFAOYSA-N 0.000 claims description 3
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 claims description 3
- UVLSCMIEPPWCHZ-UHFFFAOYSA-N 3-piperazin-1-ylpropan-1-amine Chemical compound NCCCN1CCNCC1 UVLSCMIEPPWCHZ-UHFFFAOYSA-N 0.000 claims description 3
- YONXRSPFKCGRNL-UHFFFAOYSA-N 4-piperazin-1-ylbutan-1-amine Chemical compound NCCCCN1CCNCC1 YONXRSPFKCGRNL-UHFFFAOYSA-N 0.000 claims description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical class [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 3
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 claims description 3
- OVGORFFCBUIFIA-UHFFFAOYSA-N Fenipentol Chemical compound CCCCC(O)C1=CC=CC=C1 OVGORFFCBUIFIA-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- RVCJLLONZMNCFH-UHFFFAOYSA-N O1C(CCC1)C(CC)O.O1C(CCC1)C(C)O Chemical compound O1C(CCC1)C(CC)O.O1C(CCC1)C(C)O RVCJLLONZMNCFH-UHFFFAOYSA-N 0.000 claims description 3
- DYUQAZSOFZSPHD-UHFFFAOYSA-N Phenylpropanol Chemical compound CCC(O)C1=CC=CC=C1 DYUQAZSOFZSPHD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical class 0.000 claims description 3
- 125000005262 alkoxyamine group Chemical group 0.000 claims description 3
- 125000003277 amino group Chemical group 0.000 claims description 3
- 150000008064 anhydrides Chemical group 0.000 claims description 3
- GHAIYFTVRRTBNG-UHFFFAOYSA-N piperazin-1-ylmethanamine Chemical compound NCN1CCNCC1 GHAIYFTVRRTBNG-UHFFFAOYSA-N 0.000 claims description 3
- 229920000058 polyacrylate Polymers 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 claims description 3
- WVZKCPLDLSPRPQ-UHFFFAOYSA-N 1-(thiolan-2-yl)butan-1-ol Chemical compound CCCC(O)C1CCCS1 WVZKCPLDLSPRPQ-UHFFFAOYSA-N 0.000 claims description 2
- UOGONHGJMSRQJS-UHFFFAOYSA-N 1-(thiolan-2-yl)ethanol Chemical compound CC(O)C1CCCS1 UOGONHGJMSRQJS-UHFFFAOYSA-N 0.000 claims description 2
- OYPSVJUSPRJBGJ-UHFFFAOYSA-N 1-(thiolan-2-yl)propan-1-ol Chemical compound CCC(O)C1CCCS1 OYPSVJUSPRJBGJ-UHFFFAOYSA-N 0.000 claims description 2
- DJOMQWLHMODCEG-UHFFFAOYSA-N 1-pyrrolidin-1-ylbutan-1-ol Chemical compound CCCC(O)N1CCCC1 DJOMQWLHMODCEG-UHFFFAOYSA-N 0.000 claims description 2
- KEVKXUZQHIMSCM-UHFFFAOYSA-N 1-pyrrolidin-1-ylethanol Chemical compound CC(O)N1CCCC1 KEVKXUZQHIMSCM-UHFFFAOYSA-N 0.000 claims description 2
- SLRACUOCNBFRPC-UHFFFAOYSA-N 1-pyrrolidin-1-ylpropan-1-ol Chemical compound CCC(O)N1CCCC1 SLRACUOCNBFRPC-UHFFFAOYSA-N 0.000 claims description 2
- UNYBDCWLVBARRC-UHFFFAOYSA-N 5-piperazin-1-ylpentan-1-amine Chemical compound NCCCCCN1CCNCC1 UNYBDCWLVBARRC-UHFFFAOYSA-N 0.000 claims description 2
- 239000001089 [(2R)-oxolan-2-yl]methanol Substances 0.000 claims description 2
- IMUDHTPIFIBORV-UHFFFAOYSA-N aminoethylpiperazine Chemical compound NCCN1CCNCC1 IMUDHTPIFIBORV-UHFFFAOYSA-N 0.000 claims description 2
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 2
- GUFUWKKDHIABBW-UHFFFAOYSA-N pyrrolidin-1-ylmethanol Chemical compound OCN1CCCC1 GUFUWKKDHIABBW-UHFFFAOYSA-N 0.000 claims description 2
- CCWMXACNCKOLEO-UHFFFAOYSA-N thiolan-2-ylmethanol Chemical compound OCC1CCCS1 CCWMXACNCKOLEO-UHFFFAOYSA-N 0.000 claims description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 claims 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 claims 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 claims 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 abstract description 29
- 230000002950 deficient Effects 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 49
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 24
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 12
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 241000220259 Raphanus Species 0.000 description 6
- 235000006140 Raphanus sativus var sativus Nutrition 0.000 description 6
- 229910017053 inorganic salt Inorganic materials 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 5
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 4
- 239000000908 ammonium hydroxide Substances 0.000 description 4
- 238000004090 dissolution Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 4
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000004299 exfoliation Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- JNODDICFTDYODH-UHFFFAOYSA-N 2-hydroxytetrahydrofuran Chemical compound OC1CCCO1 JNODDICFTDYODH-UHFFFAOYSA-N 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000003495 polar organic solvent Substances 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- SCVFZCLFOSHCOH-UHFFFAOYSA-M potassium acetate Chemical compound [K+].CC([O-])=O SCVFZCLFOSHCOH-UHFFFAOYSA-M 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- 238000001029 thermal curing Methods 0.000 description 2
- KAKVFSYQVNHFBS-UHFFFAOYSA-N (5-hydroxycyclopenten-1-yl)-phenylmethanone Chemical compound OC1CCC=C1C(=O)C1=CC=CC=C1 KAKVFSYQVNHFBS-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- VYTRXLKAYKOFKL-UHFFFAOYSA-N 1,3-dimethoxy-2-methylpropan-2-amine Chemical compound COCC(C)(N)COC VYTRXLKAYKOFKL-UHFFFAOYSA-N 0.000 description 1
- JPIGSMKDJQPHJC-UHFFFAOYSA-N 1-(2-aminoethoxy)ethanol Chemical compound CC(O)OCCN JPIGSMKDJQPHJC-UHFFFAOYSA-N 0.000 description 1
- KQIXMZWXFFHRAQ-UHFFFAOYSA-N 1-(2-hydroxybutylamino)butan-2-ol Chemical compound CCC(O)CNCC(O)CC KQIXMZWXFFHRAQ-UHFFFAOYSA-N 0.000 description 1
- NXMXETCTWNXSFG-UHFFFAOYSA-N 1-methoxypropan-2-amine Chemical compound COCC(C)N NXMXETCTWNXSFG-UHFFFAOYSA-N 0.000 description 1
- CHHHXKFHOYLYRE-UHFFFAOYSA-M 2,4-Hexadienoic acid, potassium salt (1:1), (2E,4E)- Chemical compound [K+].CC=CC=CC([O-])=O CHHHXKFHOYLYRE-UHFFFAOYSA-M 0.000 description 1
- GIAFURWZWWWBQT-UHFFFAOYSA-N 2-(2-aminoethoxy)ethanol Chemical compound NCCOCCO GIAFURWZWWWBQT-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- COBPKKZHLDDMTB-UHFFFAOYSA-N 2-[2-(2-butoxyethoxy)ethoxy]ethanol Chemical compound CCCCOCCOCCOCCO COBPKKZHLDDMTB-UHFFFAOYSA-N 0.000 description 1
- APLNAFMUEHKRLM-UHFFFAOYSA-N 2-[5-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-1,3,4-oxadiazol-2-yl]-1-(3,4,6,7-tetrahydroimidazo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1=NN=C(O1)CC(=O)N1CC2=C(CC1)N=CN2 APLNAFMUEHKRLM-UHFFFAOYSA-N 0.000 description 1
- ZEHHJSJCLNQQRH-UHFFFAOYSA-N 2-amino-1-butoxybutan-2-ol Chemical compound CCC(O)(N)COCCCC ZEHHJSJCLNQQRH-UHFFFAOYSA-N 0.000 description 1
- BKMMTJMQCTUHRP-UHFFFAOYSA-N 2-aminopropan-1-ol Chemical compound CC(N)CO BKMMTJMQCTUHRP-UHFFFAOYSA-N 0.000 description 1
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- BLFRQYKZFKYQLO-UHFFFAOYSA-N 4-aminobutan-1-ol Chemical compound NCCCCO BLFRQYKZFKYQLO-UHFFFAOYSA-N 0.000 description 1
- DFGKGUXTPFWHIX-UHFFFAOYSA-N 6-[2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]acetyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)C1=CC2=C(NC(O2)=O)C=C1 DFGKGUXTPFWHIX-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 1
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 description 1
- NITMNSFBAAIEMV-UHFFFAOYSA-N N1CCNCC1.NCCCCCC Chemical compound N1CCNCC1.NCCCCCC NITMNSFBAAIEMV-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- GGVMFXUTQWQCHA-UHFFFAOYSA-N S1C(CCC1)C(CC)O.S1C(CCC1)C(C)O Chemical compound S1C(CCC1)C(CC)O.S1C(CCC1)C(C)O GGVMFXUTQWQCHA-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- ZZXDRXVIRVJQBT-UHFFFAOYSA-M Xylenesulfonate Chemical compound CC1=CC=CC(S([O-])(=O)=O)=C1C ZZXDRXVIRVJQBT-UHFFFAOYSA-M 0.000 description 1
- ITLVJEYRPIYSOW-UHFFFAOYSA-N [K].[K].[K] Chemical compound [K].[K].[K] ITLVJEYRPIYSOW-UHFFFAOYSA-N 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- NDKBVBUGCNGSJJ-UHFFFAOYSA-M benzyltrimethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)CC1=CC=CC=C1 NDKBVBUGCNGSJJ-UHFFFAOYSA-M 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000001055 blue pigment Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- QNFQYLRYCQTBEP-UHFFFAOYSA-L dipotassium;dibenzoate Chemical compound [K+].[K+].[O-]C(=O)C1=CC=CC=C1.[O-]C(=O)C1=CC=CC=C1 QNFQYLRYCQTBEP-UHFFFAOYSA-L 0.000 description 1
- 229940093476 ethylene glycol Drugs 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 229940051250 hexylene glycol Drugs 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
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- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- KDCHKULYGWACNY-UHFFFAOYSA-N n-(butoxymethyl)-n-ethylethanamine Chemical compound CCCCOCN(CC)CC KDCHKULYGWACNY-UHFFFAOYSA-N 0.000 description 1
- DDUWYDGMCLTDDC-UHFFFAOYSA-N n-(methoxymethyl)-n-methylethanamine Chemical compound CCN(C)COC DDUWYDGMCLTDDC-UHFFFAOYSA-N 0.000 description 1
- QGRBGPKKFIYPSW-UHFFFAOYSA-N n-ethyl-n-(methoxymethyl)ethanamine Chemical compound CCN(CC)COC QGRBGPKKFIYPSW-UHFFFAOYSA-N 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- YPOXCORKNGJVLP-UHFFFAOYSA-N pentan-1-amine;piperazine Chemical compound CCCCCN.C1CNCCN1 YPOXCORKNGJVLP-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
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- 229940057199 potassium aminobenzoate Drugs 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 229940096992 potassium oleate Drugs 0.000 description 1
- KAQHZJVQFBJKCK-UHFFFAOYSA-L potassium pyrosulfate Chemical compound [K+].[K+].[O-]S(=O)(=O)OS([O-])(=O)=O KAQHZJVQFBJKCK-UHFFFAOYSA-L 0.000 description 1
- 239000004302 potassium sorbate Substances 0.000 description 1
- 235000010241 potassium sorbate Nutrition 0.000 description 1
- 229940069338 potassium sorbate Drugs 0.000 description 1
- OTYBMLCTZGSZBG-UHFFFAOYSA-L potassium sulfate Chemical compound [K+].[K+].[O-]S([O-])(=O)=O OTYBMLCTZGSZBG-UHFFFAOYSA-L 0.000 description 1
- 229910052939 potassium sulfate Inorganic materials 0.000 description 1
- 229940093914 potassium sulfate Drugs 0.000 description 1
- DPLVEEXVKBWGHE-UHFFFAOYSA-N potassium sulfide Chemical compound [S-2].[K+].[K+] DPLVEEXVKBWGHE-UHFFFAOYSA-N 0.000 description 1
- 235000011151 potassium sulphates Nutrition 0.000 description 1
- LPNYRYFBWFDTMA-UHFFFAOYSA-N potassium tert-butoxide Chemical compound [K+].CC(C)(C)[O-] LPNYRYFBWFDTMA-UHFFFAOYSA-N 0.000 description 1
- MLICVSDCCDDWMD-KVVVOXFISA-M potassium;(z)-octadec-9-enoate Chemical compound [K+].CCCCCCCC\C=C/CCCCCCCC([O-])=O MLICVSDCCDDWMD-KVVVOXFISA-M 0.000 description 1
- VLSHYHUKASKGPF-UHFFFAOYSA-M potassium;2-aminobenzoate Chemical compound [K+].NC1=CC=CC=C1C([O-])=O VLSHYHUKASKGPF-UHFFFAOYSA-M 0.000 description 1
- 150000003141 primary amines Chemical class 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003335 secondary amines Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229940048842 sodium xylenesulfonate Drugs 0.000 description 1
- QUCDWLYKDRVKMI-UHFFFAOYSA-M sodium;3,4-dimethylbenzenesulfonate Chemical compound [Na+].CC1=CC=C(S([O-])(=O)=O)C=C1C QUCDWLYKDRVKMI-UHFFFAOYSA-M 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000002522 swelling effect Effects 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 229940071104 xylenesulfonate Drugs 0.000 description 1
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Abstract
본 발명에 따른 칼라필터용 박리액 조성물은 탄소수 3 내지 20의 고리형 알코올, 방향족 알코올, 그리고 N, S, O에서 선택되는 하나 이상의 원소를 함유하는 헤테로고리형 알코올로부터 선택되는 알코올계 용제와 고분자형 흡착제를 포함하며, 칼라필터의 아크릴막과 칼라레지스트막을 빠른 시간 내 효율적으로 제거 할 뿐 아니라 제거 공정 중 노출되는 절연막 또는 금속배선의 손상을 최소화 함으로써, 불량기판으로부터 TFT 배열기판의 재활용을 가능하게 할 수 있다. The release liquid composition for a color filter according to the present invention comprises an alcohol-based solvent selected from a cyclic alcohol having 3 to 20 carbon atoms, an aromatic alcohol, and a heterocyclic alcohol containing at least one element selected from N, S, and O, Type adsorbent and efficiently removes the acrylic film and the color resist film of the color filter in a short period of time and minimizes the damage of the insulating film or the metal wiring exposed during the removing process so that the TFT array substrate can be recycled from the defective substrate can do.
Description
본 발명은 TFT-LCD의 칼라필터 공정 중 발생되는 불량 기판을 재활용하는 데 유용한 박리액 조성물로서, 아크릴막 및 칼라레지스트를 효율적으로 제거할 수 있게 하는 박리액 조성물에 관한 것이다. The present invention relates to a peeling liquid composition useful for recycling a defective substrate generated during a color filter process of a TFT-LCD, and relates to a peeling liquid composition capable of efficiently removing an acrylic film and a color resist.
액정표시장치(LCD) 제조공정 중 적(Red), 녹(Green), 청(Blue)의 칼라레지스트 화소를 형성하는 칼라필터의 제조과정은 유기 BM이라고 불리우는 흑(black)의 안료분산형 감광제로 도포공정, 노광공정, 현상공정 및 열경화공정 등을 거쳐서 화소의 경계역할을 하는 블랙 매트릭스(black matrix)를 형성하고 Red, Green, Blue의 안료분산형 감광제로 도포공정, 노광공정, 현상공정 및 열경화공정 등을 반복하여 칼라필터를 형성한다.The manufacturing process of a color filter for forming color resist pixels of red, green and blue in the process of manufacturing a liquid crystal display (LCD) is a black pigment dispersing photoresist called organic BM A black matrix serving as a boundary of pixels is formed through a coating process, an exposure process, a development process, and a thermal curing process, and is coated with a red pigment, a green pigment and a blue pigment, The thermal curing process is repeated to form a color filter.
상기와 같은 방식은 그 제조공정이 매우 복잡하다. 종래의 액정 표시장치의 제조공정을 단순화 하기 위해 박막 트랜지스터 배열기판에 컬러필터를 형성하는 이른바 "컬러필터 온 TFT(Color Filter on TFT; COT) 방식"이라는 새로운 개념의 박막 트랜지스터 상의 적, 녹, 청의 컬러 수지를 형성하는 방식으로 제작된다. 이러한 COT 공정은 assembly margin 축소, 개구율 개선, 생산성(tact time) 향상으로 원가 절감이 가능하다. The above-described method is complicated. In order to simplify the manufacturing process of a conventional liquid crystal display device, a new concept of a "color filter on TFT (TFT) (COT) type" in which a color filter is formed on a thin film transistor array substrate And a color resin is formed. This COT process can reduce costs by reducing assembly margin, improving aperture ratio, and improving productivity (tact time).
또한 최근에는 도 1에 도시된 바와 같이, TFT-LCD 개구율을 높이기 위해 화소 경계역할을 하는 BM을 제외하고 회로 기판 위에 적, 녹, 청 칼라레지스트를 생성하고 상부에 칼라필터의 안료를 보호하기 위해 아크릴(Acryl)계 수지(resin)와 같은 투명한 유기절연물질을 도포하여 컬러필터 보호막(60)을 형성한다(도 1에서 10: 유리기판, 15: 게이트, 20: 게이트 절연막, 25: 반도체, 27 : S/D 전극, 30: 절연막, 35: 화소, 40: Green 필터, 50: Red 필터, 60: 아크릴막). In recent years, as shown in FIG. 1, except for a BM serving as a pixel boundary in order to increase a TFT-LCD aperture ratio, a red, green, and blue color resist is formed on a circuit board and a color filter A transparent organic insulating material such as an acrylic resin is applied to form a color filter protective film 60 (10 in FIG. 1: glass substrate, 15: gate, 20: gate insulating film, 25: semiconductor, 27 : S / D electrode, 30: insulating film, 35: pixel, 40: Green filter, 50: Red filter, 60: acrylic film).
특허공개번호 제2007-0075277호는 하이드록사이드 화합물, 알킬렌글리콜에테르 및 알킬렌글리콜, 하이드록실아민, 알콕시알킬아민 및 물을 포함하는, 칼라레지스트 박리액 조성물을 개시하고 있으나, 알킬렌글리콜에테르 및 알킬렌글리콜 용제 및 알콕시알킬아민의 첨가제로는 아크릴막 및 칼라필터용 감광제의 제거 속도가 느리며, 제거 이후 노출되는 하부막(절연막 및 금속막)에 대한 손상이 발생하는 문제가 있다.Patent Publication No. 2007-0075277 discloses a color resist stripping liquid composition comprising a hydroxide compound, an alkylene glycol ether and an alkylene glycol, a hydroxylamine, an alkoxyalkylamine and water, but an alkylene glycol ether And as an additive of an alkylene glycol solvent and an alkoxyalkylamine, the removal rate of the acrylic film and the photosensitizer for the color filter is low, and there is a problem that the lower film (insulating film and metal film) exposed after the removal is damaged.
본 발명이 해결하고자 하는 과제는, 칼라필터의 아크릴막 및 감광제를 효율적으로 제거할 수 있는 칼라필터용 박리액 조성물을 제공하는 것이다.SUMMARY OF THE INVENTION It is an object of the present invention to provide a release liquid composition for a color filter capable of efficiently removing an acrylic film and a photosensitizer of a color filter.
본 발명이 해결하고자 하는 다른 과제는, 칼라필터용 박리액 조성물을 이용하여 불량기판으로부터 아크릴막 및 감광제를 제거하여 TFT 배열기판을 재활용하는 방법을 제공하는 것이다. Another problem to be solved by the present invention is to provide a method for recycling a TFT array substrate by removing an acrylic film and a photosensitive agent from a defective substrate using a peeling liquid composition for a color filter.
상기 과제를 해결하기 위한 칼라필터용 박리액 조성물은, 탄소수 3 내지 20의 고리형 알코올, 방향족 알코올, 그리고 N, S, O에서 선택되는 하나 이상의 원소를 함유하는 헤테로고리형 알코올로부터 선택되는 알코올계 용제와 고분자형 흡착제를 포함하는 칼라필터용 박리액 조성물일 수 있다. To solve the above problems, a peeling liquid composition for a color filter comprises an alcohol-based alcohol selected from a cyclic alcohol having 3 to 20 carbon atoms, an aromatic alcohol, and a heterocyclic alcohol containing at least one element selected from N, S, And may be a release liquid composition for a color filter containing a solvent and a polymeric adsorbent.
상기 고분자형 흡착제는 하기 화학식 1로 표시되는 것일 수 있다.The polymeric adsorbent may be represented by the following formula (1).
[화학식 1][Chemical Formula 1]
여기서 X, Y는 각각 수소, 탄소수 1 내지 6의 알킬, -COOM3 이거나 X나 Y가 -COOM2 와 무수물 환을 만들고, Z는 수소, 탄소수 1 내지 6의 알킬, 또는 CH2COOM3 이며, M2, M3 는 각각 수소, 알칼리금속, 암모늄, 유기아민기로 이루어진 그룹에서 선택되는 하나 이상이고,Wherein X and Y are each hydrogen, alkyl having 1 to 6 carbon atoms, -COOM 3 , X or Y is -COOM 2 and an anhydride ring, Z is hydrogen, alkyl having 1 to 6 carbon atoms, or CH 2 COOM 3 , M 2 and M 3 are each at least one selected from the group consisting of hydrogen, an alkali metal, an ammonium and an organic amine group,
R1, R2 는 각각 수소 혹은 탄소수 1 내지 6의 알킬이고, R3 는 탄소수 2 내지 4의 알킬렌기이며, R 1 and R 2 are each hydrogen or alkyl having 1 to 6 carbon atoms, R 3 is an alkylene group having 2 to 4 carbon atoms,
m은 1-100의 정수, n은 0 내지 4의 정수, a, b는 각각 1 내지 20의 정수이다. m is an integer of 1-100, n is an integer of 0-4, and a and b are each an integer of 1-20.
일 구현예에 따르면, 상기 고분자형 흡착제는 수평균 분자량이 500 내지 50,000이며, 폴리아크릴레이트계의 앵커그룹 및 폴리알릴알코올에톡시레이트계의 고분자그룹으로 이루어진 것일 수 있다.According to one embodiment, the polymeric adsorbent may have a number average molecular weight of 500 to 50,000, and may be composed of a polyacrylate-based anchor group and a polyallyl alcohol ethoxylate-based polymer group.
일 실시예에 따르면, 상기 알코올계 용제가 하기 화학식 2로 표시되는 방향족 알코올을 포함하는 것일 수 있다.According to one embodiment, the alcohol-based solvent may include an aromatic alcohol represented by the following formula (2).
[화학식 2](2)
상기 화학식 2에 있어서,In Formula 2,
R은 수소 또는 탄소수 2 내지 4의 알킬기에서 선택되는 하나 이상의 치환기이고, c는 0 내지 5의 정수이다.R is at least one substituent selected from the group consisting of hydrogen or an alkyl group having 2 to 4 carbon atoms, and c is an integer of 0 to 5.
일 실시예에 따르면, 방향족 알코올은 페닐메탄올, 메틸페닐메탄올, 에틸페닐메탄올, 프로필페닐메탄올, 이소프로필메탄올, 부틸페닐메탄올으로 이루어진 군에서 선택된 1종 이상일 수 있다.According to one embodiment, the aromatic alcohol may be at least one selected from the group consisting of phenylmethanol, methylphenylmethanol, ethylphenylmethanol, propylphenylmethanol, isopropylmethanol and butylphenylmethanol.
일 실시예에 따르면, 상기 알코올계 용제가 하기 화학식 3의 구조를 갖는 헤테로고리형 알코올을 포함하는 것일 수 있다.According to one embodiment, the alcohol-based solvent may include a heterocyclic alcohol having a structure represented by the following formula (3).
[화학식 3] (3)
상기 화학식 3에 있어서,In Formula 3,
X는 N, S, O에서 선택되는 하나 이상의 원소이고, d는 1 내지 4의 정수다.X is at least one element selected from N, S, and O, and d is an integer of 1 to 4.
일 실시예에 따르면, 상기 박리액 조성물은 전체 조성물 함량 100 중량부를 기준으로, 알코올계 용제 10 내지 50 중량부와 고분자형 흡착제 0.5 내지 10 중량부를 포함하는 것일 수 있다.According to one embodiment, the release liquid composition may comprise 10 to 50 parts by weight of an alcoholic solvent and 0.5 to 10 parts by weight of a polymeric adsorbent based on 100 parts by weight of the total composition.
일 실시예에 따르면, 헤테로고리형 알코올은 테트라히드로퓨라닐메탄올, 테트라히드로퓨라닐에탄올 테트라히드로퓨라닐프로판올, 테트라히드로퓨라닐부탄올, 테트라히드로티오페닐메탄올, 테트라히드로퍼퓨릴알코올, 테트라히드로퓨릴에탄올, 테트라히드로퓨릴프로판올, 테트라히드로퓨릴부탄올, 테트라히드로티오페닐에탄올 테트라히드로티오페닐프로판올, 테트라히드로티오페닐부탄올, 피롤리디닐메탄올, 피롤리디닐에탄올, 피롤리디닐프로판올, 피롤리디닐부탄올로 이루어진 군으로부터 선택된 1종 이상일 수 있다.According to one embodiment, the heterocyclic alcohol is selected from the group consisting of tetrahydrofuranylmethanol, tetrahydrofuranylethanol tetrahydrofuranylpropanol, tetrahydrofuranylbutanol, tetrahydrothiophenylmethanol, tetrahydrofurfuryl alcohol, tetrahydrofuryl ethanol , Tetrahydrofuryl propanol, tetrahydrofuryl butanol, tetrahydrothiophenyl ethanol, tetrahydrothiophenyl propanol, tetrahydrothiophenyl butanol, pyrrolidinyl methanol, pyrrolidinyl ethanol, pyrrolidinyl propanol, and pyrrolidinyl butanol And the like.
일 실시예에 따르면, 분자구조 중에 산소원자를 함유하지 않는 아민계 박리촉진제를 조성물 100 중량부를 기준으로 1 내지 20 중량부 더 포함할 수 있다.According to one embodiment, the amine structure-based release promoter that does not contain an oxygen atom in the molecular structure may further include 1 to 20 parts by weight based on 100 parts by weight of the composition.
일 실시예에 따르면, 상기 아민계 박리 촉진제는 하기 화학식 4 또는 화학식 5로 표시되는 구조를 포함하는 것일 수 있다.According to one embodiment, the amine-based exfoliating promoter may include a structure represented by the following general formula (4) or (5).
[화학식 4][Chemical Formula 4]
상기 e는 1 내지 4의 정수이고,E is an integer of 1 to 4,
[화학식 5][Chemical Formula 5]
상기 f는 1 내지 6의 정수이다.F is an integer of 1 to 6;
일 실시예에 따르면, 상기 아민계 박리촉진제는 디에틸렌트리아민, 트리에틸렌테트라아민, 테트라에틸렌펜타아민, 피페라진메틸아민, 피레라진에틸아민, 피페라진프로필아민, 피페라진부틸아민, 피페라진부틸아민, 피페라진펜틸아민, 피페라진헥실아민으로 이루어진 군으로부터 선택되는 것일 수 있다.According to one embodiment, the amine-based release promoter is selected from the group consisting of diethylenetriamine, triethylenetetramine, tetraethylenepentamine, piperazinemethylamine, pyreazine ethylamine, piperazinpropylamine, piperazinebutylamine, Amine, piperazine pentylamine, piperazine hexylamine, and the like.
일 실시예에 따르면, 상기 칼라필터용 박리액 조성물은 조성물 100 중량부를 기준으로 알코올계 용제 10 내지 50 중량부와 고분자형 흡착제 0.5 내지 10 중량부를 포함하며, 추가적으로 알칼리 화합물 1 내지 20 중량부; 수용성 아민 5 내지 30 중량부; 알킬렌글리콜에테르, 알킬렌글리콜, 디알킬렌글리콜디알킬에테르, 알킬렌글리콜디알킬에테르로부터 선택되는 1종 이상 1 내지 20 중량부; 및 비이온계 계면활성제 0 내지 5 중량부에서 선택되는 하나 이상의 성분을 더 포함할 수 있다.According to one embodiment, the release liquid composition for a color filter comprises 10 to 50 parts by weight of an alcoholic solvent and 0.5 to 10 parts by weight of a polymeric adsorbent based on 100 parts by weight of the composition, further comprising 1 to 20 parts by weight of an alkali compound; 5 to 30 parts by weight of a water-soluble amine; 1 to 20 parts by weight of at least one selected from alkylene glycol ethers, alkylene glycols, dialkylene glycol dialkyl ethers and alkylene glycol dialkyl ethers; And 0 to 5 parts by weight of a nonionic surfactant.
상기 알칼리 화합물은 무기 알칼리 하이드록사이드, 암모늄 하이드록사이드, 탄소수 1 내지 6의 알킬 암모늄 하이드록사이드 및 탄소수 1 내지 6의 알킬기를 갖는 페닐알킬 암모늄 하이드록사이드로부터 선택되는 것일 수 있다.The alkali compound may be selected from inorganic alkali hydroxides, ammonium hydroxides, alkylammonium hydroxides having 1 to 6 carbon atoms, and phenylalkylammonium hydroxides having alkyl groups having 1 to 6 carbon atoms.
상기 수용성 아민은 탄소수 2 내지 10의 알칸올아민 또는 탄소수 2 내지 15의 알콕시 아민으로부터 선택되는 것일 수 있다.The water-soluble amine may be selected from alkanolamine having 2 to 10 carbon atoms or alkoxyamine having 2 to 15 carbon atoms.
본 발명의 다른 과제를 해결하기 위해, 상기의 칼라필터용 박리액 조성물을 이용하여 불량 기판으로부터 아크릴 수지 및 칼라레지스트를 제거하여 TFT 배열기판을 재활용하는 방법을 제공할 수 있다.In order to solve the other problems of the present invention, it is possible to provide a method of recycling a TFT array substrate by removing an acrylic resin and a color resist from a defective substrate using the stripper composition for a color filter.
본 발명에 따른 칼라필터용 박리액 조성물은 COT공정에서 발생되는 불량 기판에서 박막트랜지스터(TFT) 배열 기판을 재사용하기 위해 아크릴막과 칼라레지스트막을 빠른 시간 내 효율적으로 제거하고 제거 공정 중 노출되는 절연막 또는 금속배선의 손상을 최소화할 수 있다. The stripper liquid composition for a color filter according to the present invention efficiently removes an acrylic film and a color resist film in a short time to reuse a TFT array substrate in a defective substrate generated in a COT process, Damage to the metal wiring can be minimized.
도 1은 액정표시장치의 칼라필터 구조도이다.
도 2는 실시예 1의 박리액을 사용하여 아크릴막 및 칼라레지스트가 제거된 기판의 사진이다.
도 3은 비교예 5에 따른 박리액을 사용한 기판의 하부막 사진이다. 1 is a structural view of a color filter of a liquid crystal display device.
2 is a photograph of a substrate on which an acrylic film and a color resist are removed using the peeling solution of Example 1. Fig.
3 is a photograph of the lower film of the substrate using the peeling solution according to Comparative Example 5. Fig.
본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과 함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다. 그러나, 본 발명은 이하에서 개시되는 실시예들에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 것이며, 단지 본 실시예들은 본 발명의 개시가 완전하도록 하며, 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명은 청구항의 범주에 의해 정의될 뿐이다. 이하 본 발명에 따른 TFT LCD용 칼라필터용 박리액 조성물에 관하여 상세히 설명하기로 한다.BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. It should be understood, however, that the invention is not limited to the disclosed embodiments, but is capable of many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Hereinafter, the release liquid composition for a color filter for a TFT LCD according to the present invention will be described in detail.
본 발명에 따른 칼라필터 박리액 조성물은,In the color filter stripping solution composition according to the present invention,
탄소수 3 내지 20의 고리형 알코올, 방향족 알코올, 그리고 N, S, O에서 선택되는 하나 이상의 원소를 함유하는 헤테로고리형 알코올로부터 선택되는 알코올계 용제와 고분자형 흡착제를 포함한다. An alcoholic solvent selected from cyclic alcohols having 3 to 20 carbon atoms, aromatic alcohols, and heterocyclic alcohols containing at least one element selected from N, S, and O, and a polymeric adsorbent.
본 발명의 바람직한 실시예에 따르면, 상기 고분자형 흡착제는 하기 화학식 1로 표시되는 것일 수 있다.According to a preferred embodiment of the present invention, the polymeric adsorbent may be represented by the following general formula (1).
[화학식 1] [Chemical Formula 1]
여기서 X, Y는 각각 수소, 메틸, -COOM3 이거나 X나 Y가 -COOM2 와 무수물 환을 만들고, Z는 수소, 메틸 또는 CH2COOM3 이며, M2, M3 는 각각 수소, 알칼리금속, 암모늄, 유기아민기로 이루어진 그룹에서 선택되는 하나 이상이고, Wherein X and Y are each hydrogen, methyl, -COOM 3 or X or Y forms -COOM 2 and an anhydride ring, Z is hydrogen, methyl or CH 2 COOM 3 , M 2 and M 3 are each hydrogen, an alkali metal , Ammonium, organic amine group,
R1, R2 는 각각 수소 혹은 메틸이고, R3 는 탄소수 2-4의 알킬렌기이며, R 1 and R 2 are each hydrogen or methyl, R 3 is an alkylene group having 2-4 carbon atoms,
m은 1-100의 정수, n은 0 내지 4의 정수, a, b는 1-20의 정수이다.m is an integer of 1-100, n is an integer of 0-4, and a and b are integers of 1-20.
상기 고분자형 흡착제는 폴리아크릴레이트를 포함하며 절연막에 흡착할 수 있는 앵커그룹 및 폴리알릴알코올에톡시레이트를 포함하며 절연막 및 금속배선을 알칼리성 용제로부터 보호하여 부식을 억제할 수 있는 고분자 그룹으로 이루어진 폴리아크릴레이트-폴리알릴알코올에톡시레이트 계열의 고분자일 수 있다.Wherein the polymeric adsorbent comprises polyacrylate and an anchor group capable of adsorbing to an insulating film and polyallyl alcohol ethoxylate and is a polymer group comprising a polymer group capable of inhibiting corrosion by protecting an insulating film and a metal wiring from an alkaline solvent, Acrylate-polyallyl alcohol ethoxylate-based polymer.
상기 고분자 흡착제를 사용하는 칼라필터용 박리액 조성물은 COT공정이후 생성된 불량기판으로부터 칼라필터의 오버코트로 사용된 아크릴막 및 칼라레지스트 제거하는 공정에 있어서, 상기 제거공정에서 발생하는 하부 노출된 절연막을 상기 박리액에 포함된 고분자 흡착제로서 흡착-보호함으로써 강알칼리성 박리액으로 인한 손상을 감소 시킬 수 있으며, 불량기판으로부터 TFT배열기판을 효율적으로 분리 및 회수하여 재활용 할 수 있다.In the removing liquid composition for a color filter using the polymeric adsorbent, in the step of removing an acrylic film and a color resist used as an overcoat of a color filter from a defective substrate produced after the COT process, a lower exposed insulating film It is possible to reduce the damage due to the strongly alkaline peeling liquid by adsorption-protection as the polymer adsorbent contained in the peeling liquid, and the TFT array substrate can be efficiently separated and recovered from the defective substrate and recycled.
본 발명의 일 실시예에 따르면, 상기 고분자형 흡착제의 수평균 분자량은 500 내지 50,000일 수 있으며, 박리액 조성물의 100중량부를 기준으로 0.5 내지 10중량부로 포함될 수 있으며, 바람직하게는 0.5 내지 5 중량부 일 수 있다. 상기 고분자형 흡착제의 함량이 0.5중량부 이하 포함되면 알칼리성 박리액으로부터 하부 절연막을 효과적으로 보호하지 못하여 하부 절연막이 손상을 입게 될 수 있으며, 상기 고분자형 흡착제의 함량이 박리액 조성물 전체 중량에 대해 10중량부 이상 포함되면 부식방지제의 흡착에 의한 증착 불량과 같은 후공정 불량을 초래할 수 있다.According to one embodiment of the present invention, the polymeric adsorbent may have a number average molecular weight of 500 to 50,000, and may be contained in an amount of 0.5 to 10 parts by weight, preferably 0.5 to 5 parts by weight, based on 100 parts by weight of the release liquid composition Can be. If the content of the polymeric adsorbent is less than 0.5 part by weight, the lower insulating layer may not be effectively protected from the alkaline stripper, and the lower insulating layer may be damaged. When the content of the polymeric adsorbent is less than 10 weight% If the amount is more than the above amount, it may lead to defective deposition such as poor deposition due to the adsorption of the corrosion inhibitor.
상기 방향족 알코올을 포함하는 알코올계 용제는 하기 화학식 2로 표시되는 구조를 갖는 것일 수 있다.The alcohol-based solvent containing the aromatic alcohol may have a structure represented by the following formula (2).
[화학식 2](2)
상기 식에 있어서,In the above formula,
R은 수소, 탄소수 2 내지 4의 알킬렌기에서 선택되는 하나 이상의 치환기이고,R is at least one substituent selected from the group consisting of hydrogen and an alkylene group having 2 to 4 carbon atoms,
c는 0 내지 5의 정수이다.and c is an integer of 0 to 5.
본 발명에 따른 방향족 알코올은 업계에서 통상적으로 사용되는 것이면 제한없이 사용할 수 있으나, 바람직하게는, 페닐메탄올, 메틸페닐메탄올, 에틸페닐메탄올, 프로필페닐메탄올, 이소프로필메탄올, 부틸페닐메탄올로 이루어진 군에서 선택된 1종이상의 방향족 알코올일 수 있다.The aromatic alcohols according to the present invention can be used without limitation as long as they are commonly used in the art, but are preferably selected from the group consisting of phenylmethanol, methylphenylmethanol, ethylphenylmethanol, propylphenylmethanol, isopropylmethanol and butylphenylmethanol It may be one or more aromatic alcohols.
상기 헤테로고리형 알코올은 하기 화학식 3의 구조를 갖는 것일 수 있다.The heterocyclic alcohol may have a structure represented by the following formula (3).
[화학식 3] (3)
상기 화학식 3에 있어서,In Formula 3,
X는 N, S, O에서 선택되는 하나 이상의 원소이고, d는 0 내지 5의 정수다.X is at least one element selected from N, S, and O, and d is an integer of 0 to 5.
본 발명에 따른 헤테로고리형 알코올은 업계에서 통상적으로 사용되는 것이면 제한없이 사용할 수 있으나, 바람직하게는, 테트라히드로퓨라닐메탄올, 테트라히드로퓨라닐에탄올 테트라히드로퓨라닐프로판올, 테트라히드로퓨라닐부탄올, 테트라히드로티오페닐메탄올, 테트라히드로퍼퓨릴알코올, 테트라히드로퓨릴에탄올, 테트라히드로퓨릴프로판올, 테트라히드로퓨릴뷰탄올, 테트라히드로티오페닐에탄올 테트라히드로티오페닐프로판올, 테트라히드로티오페닐부탄올, 피롤리디닐메탄올, 피롤리디닐에탄올, 피롤리디닐프로판올, 피롤리디닐부탄올으로 이루어진 군으로부터 선택된 1종 이상일 수 있다.The heterocyclic alcohols according to the present invention can be used without limitation as long as they are ordinarily used in the art, but preferable examples thereof include tetrahydrofuranylmethanol, tetrahydrofuranylethanol tetrahydrofuranylpropanol, tetrahydrofuranylbutanol, tetra Examples of the organic solvent include methanol, ethanol, isopropanol, isopropanol, isopropanol, isopropanol, isopropanol, isopropanol, isopropanol, isobutanol, isobutanol, tetrahydrofuryl alcohol, tetrahydrofuryl alcohol, tetrahydrofuryl ethanol, tetrahydrofuryl propanol, tetrahydrofurylbutanol, tetrahydrothiophenylethanol tetrahydrothiophenylpropanol, Ethanol, propanol, isopropanol, isopropanol, isopropanol, isopropanol, isopropanol, butanol, isobutanol,
상기 방향족 알코올 및 헤테로고리형 알코올은 단독 또는 혼합되어 사용될 수 있으며, 본 발명의 일 실시예에 따르면, 상기 알코올계 용제는 혼합되어 사용될 수 있다. 상기 방향족 알코올 및 헤테로고리형 알코올을 포함하는 알코올계 용제의 함량은 박리액 조성물 100중량부를 기준으로 10 내지 50 중량부로 포함될 수 있으며, 바람직하게는 20 내지 35 중량부 일 수 있다. The aromatic alcohol and the heterocyclic alcohol may be used alone or in combination. According to one embodiment of the present invention, the alcohol-based solvent may be mixed and used. The content of the alcoholic solvent containing the aromatic alcohol and the heterocyclic alcohol may be 10 to 50 parts by weight, preferably 20 to 35 parts by weight, based on 100 parts by weight of the release agent composition.
상기 칼라필터용 박리액 조성물은 상기와 같은 방향족 알코올 또는 헤테로고리형 알코올에서 선택되는 용제를 사용함으로써, 통상적으로 사용되는 알킬렌글리콜에테르 및 디메틸설폭사이드 등의 극성용제로는 제거가 어려운 가교된 아크릴막 및 칼라필터용 감광제에 대해 침투 및 용해력이 우수하여 빠른 시간내 제거가 가능할 수 있다.By using a solvent selected from the aromatic alcohols or heterocyclic alcohols as described above, the release agent composition for a color filter can be used as a polar solvent, such as alkylene glycol ethers and dimethyl sulfoxide, which are conventionally used, The photoresist for a film and a color filter is excellent in penetration and dissolution power and can be removed within a short time.
본 발명의 일 실시예에 따르면, 상기 아민계 박리 촉진제는 하기 화학식 4 또는 화학식 5로 표시되는 분자구조내에 산소가 없는 구조를 갖는 아민계 화합물일 수 있다.According to an embodiment of the present invention, the amine-based release promoter may be an amine-based compound having a structure in which no oxygen is present in the molecular structure represented by the following general formula (4) or (5)
[화학식 4][Chemical Formula 4]
상기 e는 1 내지 10의 정수이고,E is an integer of 1 to 10,
[화학식 5][Chemical Formula 5]
상기 f는 1 내지 6의 정수이다.F is an integer of 1 to 6;
상기 화학식 4로 표시되는 아민계 박리촉진제는 제거된 아크릴막 및 칼라필터용 감광제의 분해를 촉진할 수 있고, 화학식 5으로 표시되는 아민계 박리촉진제는 한 분자 내에 1차, 2차, 3차 아민의 기능을 모두 포함한 것을 특징으로 하는 것으로 제거된 아크릴막 및 칼라레지스트의 분해를 촉진하며 하부막에 대한 손상을 방지할 수 있다. 상기 화학식 4 및 화학식 5로 표시되는 화합물은 다수의 N(질소원자)으로 구성되는 아민 성분으로 알칼리(alkali)도에 의해 박리 성능을 극대화 시키며 다수의 -N기에 의해 금속 표면을 보호하여 금속 전극 손상을 최소화 하면서도 제거된 아크릴막 및 칼라필터용 감광제의 분해를 촉진할 수 있게 된다. The amine-based exfoliation promoter represented by Formula 4 can promote the decomposition of the acrylic film and the photosensitizer for the color filter, and the amine-based exfoliation promoter represented by Formula 5 can contain primary, secondary, and tertiary amines And the decomposition of the removed acrylic film and the color resist can be promoted and damage to the lower film can be prevented. The compounds represented by Chemical Formulas 4 and 5 are amine components composed of a plurality of N (nitrogen atoms), maximizing the peeling performance by the alkali, and protecting the metal surface by a plurality of -N groups, The decomposition of the photoresist for the removed acrylic film and the color filter can be promoted.
본 발명에 따른 박리액은 화학식 4, 화학식 5 또는 이들의 혼합물을 포함하는 아민계 박리촉진제를 박리액 조성물 100중량부를 기준으로 1 내지 20중량부로 포함할 수 있으며, 상기 아민계 박리촉진제가 1 중량부 미만인 경우에는 부식방지에 효과적이지 못하고, 20 중량부를 초과하는 경우에는 상대적으로 극성 유기 용매의 함량이 감소하게 되어 박리 성능을 저하 시키게 된다. The peelable solution according to the present invention may contain 1 to 20 parts by weight of the amine-based peel accelerating agent based on 100 parts by weight of the peel-off solution composition, wherein the amine-based peel accelerator contains 1 weight% When the amount of the polar organic solvent is less than 20 parts by weight, the amount of the polar organic solvent is decreased and the peeling performance is lowered.
상기 아민계 박리촉진제는 디에틸렌트리아민, 트리에틸렌테트라민, 테트라에틸렌펜타아민, 피페라진메틸아민, 피레라진에틸아민, 피페라진프로필아민, 피페라진부틸아민, 피페라진펜틸아민, 피페라진헥실아민으로부터 선택되는 하나 이상일 수 있다.The amine-based release promoter may be at least one selected from the group consisting of diethylenetriamine, triethylenetetramine, tetraethylenepentamine, piperazinemethylamine, pyrrolazineethylamine, piperazinepropylamine, piperazinebutylamine, piperazinepentylamine, ≪ / RTI >
또한, 본 발명에서 사용하는 물은 이온 교환 수지를 통해 여과한 순수가 바람직하며, 비저항이 18 MΩ 이상인 초순수를 사용하는 것이 더욱 바람직하다. 상기 물의 사용량은 박리액 조성물의 잔량으로 포함할 수 있으며, 바람직하게는 박리액 조성물 100중량부를 기준으로 5 내지 70 중량부로 사용될 수 있다. 이때, 물의 함량이 5 중량부 미만이면 공정온도에서 상기 조성물의 조성이 변화하여 무기 알칼리 이온이 석출되어 상기 칼라필터용 박리액 조성물의 가사시간의 저하를 초래하는 문제점이 발생하고, 70 중량부를 초과하면 공정 온도에서 물의 증발로 인해 상기 칼라필터용 박리액 조성물의 손실이 많아지는 문제점이 있다.The water used in the present invention is preferably pure water filtered through an ion exchange resin, and more preferably, ultra pure water having a resistivity of 18 M? Or higher is used. The amount of water used may be included as a residual amount of the release liquid composition, and preferably 5 to 70 parts by weight based on 100 parts by weight of the release liquid composition. If the amount of water is less than 5 parts by weight, the composition of the composition changes at the process temperature, and inorganic alkali ions are precipitated to cause a deterioration of the time of use of the peeling liquid composition for a color filter. When the content of water exceeds 70 parts by weight There is a problem that the loss of the peeling liquid composition for the color filter increases due to evaporation of water at the lower process temperature.
본 발명에 따른 칼라필터용 박리액은 추가로 수용성 아민, 알킬렌글리콜에테르, 알킬렌글리콜, 디알킬렌글리콜디알킬에테르, 알킬렌글리콜디알킬에테르로부터 선택되는 1종 이상의 화합물, 비이온계 계면활성제 및 무기염 화합물을 더 포함할 수 있다.The peeling solution for a color filter according to the present invention may further contain at least one compound selected from water-soluble amines, alkylene glycol ethers, alkylene glycols, dialkylene glycol dialkyl ethers and alkylene glycol dialkyl ethers, An activator and an inorganic salt compound.
본 발명에 따른 박리액 조성물은 수용성 아민을 더 포함하는 것일 수 있다. 상기 수용성 아민으로는 알칸올아민, 알콕시아민 또는 이들의 혼합물이 사용될 수 있다.The release liquid composition according to the present invention may further comprise a water-soluble amine. As the water-soluble amine, alkanolamine, alkoxyamine or a mixture thereof may be used.
상기 수용성 아민은 탄소수 1 내지 10의 알칸올아민일 수 있으며, 구체적으로, 모노메탄올아민, 메틸메탄올아민, 모노에탄올아민, 디에탄올아민, 트리에탄올아민, 모노프로판올아민, 2-아미노에탄올, 2-(에틸아미노)에탄올, 2-(메틸아미노)에탄올, N-메틸 디에탄올아민, N,N-디메틸에탄올아민, N,N-디에틸아미노에탄올, 2-(2-아미노에틸아미노)-1-에탄올, 1-아미노-2-프로판올, 2-아미노-1-프로판올, 3-아미노-1-프로판올, 4-아미노-1-부탄올, 디부탄올아민으로 이루어진 군에서 선택되는 하나 이상일 수 있으나 이에 한정되는 것은 아니다.The water-soluble amine may be an alkanolamine having 1 to 10 carbon atoms. Specific examples thereof include monomethanolamine, methylmethanolamine, monoethanolamine, diethanolamine, triethanolamine, monopropanolamine, 2-aminoethanol, 2- Ethylamino) ethanol, 2- (methylamino) ethanol, N-methyldiethanolamine, N, N-dimethylethanolamine, N, N-diethylaminoethanol, 2- Amino-1-propanol, 4-amino-1-butanol, and dibutanolamine, but is not limited thereto no.
또한, 상기 수용성 아민은 탄소수 2 내지 15의 알콕시알킬아민일 수 있으며, 구체적으로는, (부톡시메틸)디에틸아민, (메톡시메틸)디에틸아민, (메톡시메틸)디메틸아민, (부톡시메틸)디메틸아민, (이소부톡시메틸)디메틸아민, (메톡시메틸)디에탄올아민, (하이드록시에틸옥시메틸)디에틸아민, 메틸(메톡시메틸)아미노에탄, 메틸(메톡시메틸)아미노에탄올, 메틸(부톡시메틸)아미노에탄올, 2-(2-아미노에톡시)에탄올으로 이루어진 군에서 선택되는 하나 이상일 수 있으나 이에 한정되는 것은 아니다.The water-soluble amine may be an alkoxyalkylamine having 2 to 15 carbon atoms. Specific examples thereof include (butoxymethyl) diethylamine, (methoxymethyl) diethylamine, (methoxymethyl) (Methoxymethyl) aminoethane, methyl (methoxymethyl) aminomethane, methyl (methoxymethyl) dimethylamine, But are not limited to, ethanol, methyl (butoxymethyl) amino ethanol, and 2- (2-aminoethoxy) ethanol.
상기 수용성 아민은 박리액 총 함량에 대해 5 내지 30중량부로 더 포함될 수 있다.The water-soluble amine may further be included in an amount of 5 to 30 parts by weight based on the total amount of the release agent.
본 발명에 따른 박리액 조성물에 있어서 상기 알칼리 화합물은 무기 알칼리 하이드록사이드, 암모늄 하이드록사이드, 탄소수 1 내지 4의 알킬기를 갖는 알킬 암모늄 하이드록사이드 및 탄소수 1 내지 4의 알킬기를 갖는 페닐알킬 암모늄 하이드록사이드로 이루어진 군으로부터 선택되는 하나 이상의 것을 사용할 수 있다.In the release liquid composition according to the present invention, the alkali compound may be an inorganic alkali hydroxide, an ammonium hydroxide, an alkylammonium hydroxide having an alkyl group having 1 to 4 carbon atoms and a phenylalkylammonium hydroxide having an alkyl group having 1 to 4 carbon atoms And a lockside.
또한, 상기 알칼리 화합물은 무기계 알칼리 하이드록사이드 및 페닐알킬 암모늄 하이드록사이드가 불안정한 성질이 있기 때문에 물에 녹아 있는 형태로 사용하는 것이 바람직할 수 있다.In addition, since the alkaline compound has an unstable property of inorganic alkali hydroxide and phenylalkylammonium hydroxide, it may be preferable to use it in the form of being dissolved in water.
본 발명에 따른 박리액에 사용되는 무기 알칼리 하이드록사이드의 구체적인 예로는, 리튬 하이드록사이드(lithium hydroxide), 나트륨 하이드록사이드(sodium hydroxide), 포타슘 하이드록사이드(potassium hydroxide) 및 이들의 혼합물로 이루어진 군으로부터 선택되는 것이 사용 될 수 있으나 이에 한하는 것은 아니다. 상기 탄소수 1 내지 4의 알킬기를 갖는 알킬 암모늄 하이드록사이드는 테트라에틸 암모늄 하이드록사이드(tetraethyl ammonium hydroxide), 테트라메틸 암모늄 하이드록사이드(tetramethyl ammonium hydroxide), 테트라부틸 암모늄 하이드록사이드(tetrabutyl ammonium hydroxide), 및 이들의 혼합물로 이루어진 군으로부터 선택되는 것일 수 있으나, 이에 한정하는 것은 아니다. 또한, 탄소수 1 내지 4의 알킬기를 갖는 페닐알킬 암모늄 하이드록사이드는 벤질트리메틸암모늄 하이드록사이드(benzyl trimethyl ammonium hydroxide)를 사용하는 것이 바람직할 수 있다.Specific examples of the inorganic alkali hydroxide used in the exfoliation solution according to the present invention include lithium hydroxide, sodium hydroxide, potassium hydroxide, and mixtures thereof. But it is not limited thereto. The alkylammonium hydroxide having an alkyl group having 1 to 4 carbon atoms is preferably selected from the group consisting of tetraethyl ammonium hydroxide, tetramethyl ammonium hydroxide, tetrabutyl ammonium hydroxide, , And mixtures thereof, but are not limited thereto. In addition, benzyl trimethyl ammonium hydroxide may be preferably used as the phenylalkyl ammonium hydroxide having an alkyl group having 1 to 4 carbon atoms.
상기 알칼리 화합물은 전체 박리액 조성물에 대하여 1 내지 20중량부 일수 있으며, 바람직하게는 3 내지 15 중량부 일 수 있다. 알칼리 화합물의 함량이 1중량부 미만이면 칼라 레지스트를 구성하는 고분자 성분으로의 침투 능력이 떨어져 칼라 레지스트를 완전하게 제거하기 어렵고, 20 중량부를 초과하면 기타 용제의 성분 비율이 떨어져 오히려 제거 시간이 길어지는 문제가 나타날 수 있다. The alkali compound may be used in an amount of 1 to 20 parts by weight, preferably 3 to 15 parts by weight, based on the whole stripper composition. If the content of the alkaline compound is less than 1 part by weight, the ability to penetrate into the polymer component constituting the color resist is poor and it is difficult to completely remove the color resist. If the amount is more than 20 parts by weight, Problems may appear.
상기 알킬렌글리콜 에테르(alkyleneglycol ether) 또는 알킬렌글리콜(alkyleneglycol)로 이루어진 군에서 1종 이상 선택되는 화합물은 칼라레지스트에 대한 용해력과 표면장력을 저하시키는 능력이 뛰어나서 들떠있는 칼라레지스트와 유리면 사이에 작용하는 표면장력을 저하시켜 손쉽게 칼라레지스트가 스트립되도록 하며, 또한 상기 스트립된 칼라레지스트의 바인더나 폴리머 등을 용해하는 기능을 한다. 상기 알킬렌 글리콜 에테르의 사용량은 전체 1 내지 20 중량부 일수 있으며, 바람직하게는 조성물에 대하여 5 내지 12 중량부가 바람직할 수 있다. 이때 그 함량이 1 중량부 미만이면 칼라 레지스트를 완전하게 제거가 용이하지 않으며, 20 중량부를 초과하면 박리액의 극성이 떨어져 오버코팅 재료인 아크릴 수지를 용해하는 성능이 떨어지는 단점이 있다. The compound selected from the group consisting of alkyleneglycol ether and alkyleneglycol is excellent in the dissolving power and ability to lower the surface tension of the color resist, The color resist is easily stripped, and the function of dissolving the binder, polymer, etc. of the striped color resist is achieved. The amount of the alkylene glycol ether to be used may be 1 to 20 parts by weight, preferably 5 to 12 parts by weight based on the composition. If the amount is less than 1 part by weight, the color resist can not be completely removed. If the amount is more than 20 parts by weight, the polarity of the peeling liquid is deteriorated and the performance of dissolving the acrylic resin as the overcoating material is deteriorated.
본 발명에서 사용하는 알킬렌 글리콜 에테르는 에틸렌글리콜모노부틸에테르(ethyleneglycol monobutylether), 디에틸렌글리콜모노부틸에테르(diethylene glycol monobutylether), 트리에틸렌글리콜모노부틸에테르(triethyleneglycol monobutylether), 에틸렌글리콜모노메틸에테르(ethyleneglycol monomethylether), 디에틸렌글리콜모노메틸에테르(diethyleneglycol monomethylether), 트리에틸렌글리콜모노메틸에테르(triethyleneglycol monomethylether), 에틸렌글리콜모노에틸에테르(ethyleneglycol monoethylether)일 수 있고, 알킬렌 글리콜은, 에틸렌 글리콜(ethylene glycol), 디에틸렌 글리콜(diethylene glycol), 트리에틸렌 글리콜(triethylene glycol), 헥실렌 글리콜(hexylene glycol), 글리세롤(glycerol) 또는 이들의 혼합물로 이루어진 군으로부터 선택되는 것을 사용할 수 있다.The alkylene glycol ethers to be used in the present invention include ethyleneglycol monobutylether, diethylene glycol monobutylether, triethyleneglycol monobutylether, ethyleneglycol monomethylether, ethyleneglycol monobutylether, monomethylether, diethyleneglycol monomethylether, triethyleneglycol monomethylether and ethyleneglycol monoethylether. The alkylene glycols may be ethylene glycol, diethylene glycol monomethyl ether, Diethylene glycol, triethylene glycol, hexylene glycol, glycerol, or a mixture thereof may be used as the organic solvent.
계면활성제는, 소수성의 층간 절연막에 대해 젖음성을 증가시켜, 패턴의 형상에 따라서는 잔사 제거액이 골고루 미치지 않는 경우 등을 막기 위해서 사용할 수 있으며, 본 발명에 사용될 수 있는 비이온계 계면활성제로는 통상적으로 업계에서 사용되는 것이면 제한 없이 사용될 수 있으나, 예를 들면 친수기가 -R'(CH2CH2O)qR" 또는 -R'O(CH2CH2O)qR"(R"는 수소 원자, 탄소수 1내지10의 알킬기; R'는 수소 원자가 불소 원자로 치환되어 있어도 되는 탄소수 1 내지 20의 탄화수소기; q는 0 내지 20의 정수를 나타낸다)로 표시되는 폴리에틸렌글리콜형의 계면활성제가 바람직하다. 구체적으로는, C9F17O(CH2CH2O)rCH3(r은 2 내지 30의 정수이다), C9H19Ph(CH2CH2O)10H, C12H25O(CH2CH2O)9H, C9H19PhO(CH2CH2O)10H, C9H19PhO(CH2CH2O)5H, C8H17PhO(CH2CH2O)3H, C8H17Ph(CH2CH2O)10H(Ph는 페닐렌기이다) 등을 들 수 있으며, 상기 비이온계 계면활성제는 박리액 100중량부를 기준으로 0 내지 5중량부로 포함될 수 있다.The surfactant can be used to increase wettability with respect to the hydrophobic interlayer insulating film and to prevent the residue removing liquid from reaching evenly depending on the shape of the pattern. As the nonionic surfactant that can be used in the present invention, (CH 2 CH 2 O) q R "or -R'O (CH 2 CH 2 O) q R" (where R "represents a hydrogen atom, an alkyl group, An alkyl group having 1 to 10 carbon atoms; R 'is a hydrocarbon group of 1 to 20 carbon atoms in which a hydrogen atom may be substituted with a fluorine atom; and q is an integer of 0 to 20). as is, C 9 F 17 O (CH 2 CH 2 O) r CH 3 (r is an integer of 2 to 30), C 9 H 19 Ph (CH 2 CH 2 O) 1 0H, C 12 H 25 O ( CH 2 CH 2 O) 9 H , C 9 H 19 PhO (CH 2 CH 2 O) 1 0H, C 9 H 19 PhO (CH 2 CH 2 O) 5 H, C 8 H 17 PhO (CH 2 CH 2 O ) 3 H, C 8 H 17 Ph (CH 2 CH 2 O) 1 0H (Ph is a phenylene group) and the like, the non-ionic surfactant may be included as part of 0 to 5 parts by weight based on 100 parts by weight of the removing solution.
본 발명에서 사용하는 상기 무기염은 상기 하이드록사이드 화합물과 함께 사용하여 레지스트 제거력의 상승효과를 기대할 수 있다. 특히, 무기염을 알킬 암모늄 하이드록사이드 및 페닐알킬 암모늄 하이드록사이드와 함께 사용할 경우 오버코팅 재료인 아크릴 수지 및 폴리이미드 수지에 대한 침투 및 팽윤 특성을 상승시켜 제거 시간을 현저히 앞당길 수 있는 장점이 있다. 본 발명에서 사용하는 무기염은 포타슘 아세테이트(potassium acetate), 포타슘 나이트레이트(potassium nitrate), 포타슘 카보네이트(potassium carbonate), 포타슘 피로포스페이트(potassium pyrophosphate), 포타슘 올레이트(potassium oleate), 포타슘 벤조에이트(potassium benzoate), 포타슘 라우레이트(potassium laurate), 포타슘 터트-부톡사이드(potassium tert-butoxide), 포타슘 설페이트(potassium sulfate), 포타슘 소르베이트(potassium sorbate), 포타슘 아미노 벤조에이트(potassium aminobenzoate), 포타슘 디설페이트(potassium disulfate), 포타슘 시아네이트(potassium cyanate), 포타슘 설피드(potassium sulfide), 포타슘 자이렌 설포네이트(potassium xylene sulfonate), 소듐자일렌설포네이트(sodium xylene sulfonate) 및 이들의 혼합물로 이루어진 군으로부터 선택되는 것이 사용될 수 있으며, 상기 무기염의 사용량은 박리액 조성물 100중량부를 기준으로 0 내지 10 중량부 포함될 수 있다. 상기 무기염은 각 성분들의 상승효과에 의해 칼라레지스트 및 오버코팅재료를 단시간 내에 쉽게 제거하기위해 사용될 수 있다.The inorganic salt used in the present invention can be expected to have a synergistic effect of removing the resist when used together with the above hydroxide compound. Particularly, when the inorganic salt is used together with the alkyl ammonium hydroxide and the phenylalkyl ammonium hydroxide, the penetration and swelling properties of the acrylic resin and the polyimide resin as the overcoating materials are increased, and the removal time can be significantly shortened . The inorganic salt used in the present invention may be selected from the group consisting of potassium acetate, potassium nitrate, potassium carbonate, potassium pyrophosphate, potassium oleate, potassium benzoate potassium benzoate, potassium laurate, potassium tert-butoxide, potassium sulfate, potassium sorbate, potassium aminobenzoate, potassium di Potassium persulfate, potassium disulfate, potassium cyanate, potassium sulfide, potassium xylene sulfonate, sodium xylene sulfonate, and mixtures thereof. And the amount of the inorganic salt to be used may be selected from the peeling
본 발명에 따른 칼라필터용 박리액은 TFT-LCD의 칼라필터 공정에서 발생되는 불량 기판의 아크릴막 및 칼라레지스트를 제거하여 상기 불량기판으로부터 TFT배열기판을 재활용할 수 있는 방법을 제공하며, 본 발명에 따른 칼라필터용 박리액 조성은 높은 제거 속도와 동시에 박리 공정에 노출되는 절연막 및 금속배선의 손상을 최소화 하여 기판상의 아크릴막 및 칼라레지스트의 제거를 양호하게 완료 시킬 수 있는 조성물을 제공한다.The peeling solution for a color filter according to the present invention provides a method of removing an acrylic film and a color resist of a defective substrate generated in a color filter process of a TFT-LCD and recycling the TFT array substrate from the defective substrate. Has a high removal rate and at the same time minimizes the damage of the insulating film and the metal wiring exposed in the peeling process, thereby providing a composition that can satisfactorily complete the removal of the acrylic film and the color resist on the substrate.
<실시예><Examples>
하기 표 1에 도시된 조성으로 박리액 조성물을 제조하였다. A release liquid composition was prepared with the compositions shown in Table 1 below.
중량부
Weight portion
상기 표 1에서 약어는 다음을 의미한다. Abbreviations in Table 1 refer to the following.
KOH : 포타슘히드록시드KOH: Potassium hydroxide
TMAH : 테트라메틸암모늄히드록시드TMAH: tetramethylammonium hydroxide
AEE : 아미노에톡시에탄올AEE: Aminoethoxyethanol
MEA : 모노에탄올아민MEA: Monoethanolamine
DMSO : 디메틸술폭시드DMSO: dimethylsulfoxide
NMP : N-메틸피롤리돈NMP: N-methylpyrrolidone
BDG : 부틸디글리콜BDG: butyl diglycol
MDG : 메틸디글리콜MDG: methyl diglycol
BzOH : 벤질알코올BzOH: benzyl alcohol
THFA : 테트라히드록퍼퍼릴알코올THFA: tetrahydroperfurfuryl alcohol
TEPA : 테트라에틸렌펜타아민TEPA: tetraethylene pentaamine
APEZ : 아미노에틸피페라진APEZ: Aminoethylpiperazine
PCE : 화학식 1의 구조에서 X, Y가 H이고, Z가 메틸이며, M이 Na, R1, R2가 H, R3는 에틸렌이고, m은 20, a는 14, b는 6, n은 1인 화학식 6으로 표시되는 폴리아크릴레이트-폴리알릴알코올에톡시레이트 계열의 고분자이다.PCE: In the structure of formula (1), X and Y are H, Z is methyl, M is Na, R 1 and R 2 are H, R 3 is ethylene, m is 20, a is 14, b is 6, n Is a polyacrylate-polyallyl alcohol ethoxylate-series polymer represented by the general formula (6)
[화학식 6][Chemical Formula 6]
<시험예><Test Example>
상기 실시예 1 내지 6, 비교예 1 내지 5의 박리액 조성물을 하기의 방법으로 아크릴막을 포함하는 칼라레지스트 감광제가 생성된 기판으로 상기 박리액의 아크릴막 및 칼라레지스트 감광제 제거력을 평가하였다.The peeling liquid compositions of Examples 1 to 6 and Comparative Examples 1 to 5 were evaluated in terms of removing ability of the acrylic film and color resist photoresist of the peeling liquid from the substrate on which the color resist photoresist containing an acrylic film was formed by the following method.
<시험예 1> 아크릴막 및 칼라레지스트 제거 시험≪ Test Example 1 > Acrylic film and color resist removal test
아크릴막 및 칼라레지스트가 형성된 기판을 온도 60 ℃에서 상기 표 1에 해당하는 실시예 1 내지 실시예 6 및 비교예 1 내지 비교예 5의 박리액 조성물에 침지하여 기판에서 아크릴막 및 칼라레지스트가 완전히 박리되는 시간을 측정하였다. The acrylic film and the substrate on which the color resist was formed were immersed in the release liquid compositions of Examples 1 to 6 and Comparative Examples 1 to 5 corresponding to Table 1 at a temperature of 60 캜 to form an acrylic film and a color resist completely The time to peel off was measured.
상기 시편을 칼라레지스트 박리액 조성물로부터 꺼낸 후, 초순수로 수세하고 질소가스로 건조하고, 패턴내에 칼라레지스트가 잔류하는지 여부를 육안확인 및 광학현미경으로 확대하여 확인함으로써, 기판내 잔류 아크릴막 및 칼라 레지스트의 여부를 관찰하였다. 하기 표 2는 아크릴막 및 칼라레지스트가 완전히 박리되어 잔사가 발견되지 않는 시간을 측정하여 나타내었고, 실시예1의 박리액을 사용하여 아크릴막 및 칼라레지스타가 제거된 TFT-기판의 SEM사진을 도2에 나타내었다.The specimen was taken out of the color resist stripper composition, washed with ultrapure water, dried with nitrogen gas, and whether or not a color resist remained in the pattern was visually confirmed and magnified by an optical microscope to confirm that the residual acrylic film and color resist . Table 2 below shows the measurement results of the time when the acrylic film and the color resist were completely peeled off and no residue was found. SEM photographs of the TFT-substrate from which the acrylic film and the color register were removed using the peeling solution of Example 1 2.
<시험예 2> 아크릴막 및 칼라레지스트 감광제 용해 확인 Test Example 2 Confirmation of dissolution of acrylic film and color resist photoresist
상기 <시험예 1>에서 박리된 아크릴막 및 칼라레지스트를 포함하는 박리액 조성물을 추가로 30분 교반한 후 박리액상의 아크릴막 및 칼라레지스트의 용해 여부를 육안으로 관찰하여 표 2에 나타내었다.The peeling liquid composition including the acrylic film and the color resist peeled off in <Test Example 1> was further stirred for 30 minutes and visually observed for dissolution of the peeling liquid acrylic film and color resist is shown in Table 2.
<시험예 3>: TFT 기판 하부막 손상 확인≪ Test Example 3 >
아크릴막 및 칼라레지스트가 제거된 TFT기판을 상기 <시험예 2>의 조성물에 추가로 60분간 침지한 후 이를 초순수로 30초간 세정한 후 질소로 10초간 건조하였다. 건조된 시편을 SEM으로 표면과 단면을 관찰하여 하부막 부식 여부를 확인하여 표2에 나타내었고, 비교예 5의 박리액을 사용한 TFT기판의 하부막에 대한 SEM사진을 도 3에 나타내었다.The TFT substrate on which the acrylic film and the color resist had been removed was further immersed in the composition of the <Test Example 2> for 60 minutes, washed with ultrapure water for 30 seconds, and then dried with nitrogen for 10 seconds. The dried specimens were observed with a SEM to observe the surface and cross-section thereof, and the corrosion of the lower film was confirmed. The results are shown in Table 2, and an SEM photograph of the lower film of the TFT substrate using the peeling liquid of Comparative Example 5 is shown in FIG.
상기 실험 결과를 하기 표 2에 나타내었다.The experimental results are shown in Table 2 below.
○ : 용해됨.○: Dissolved.
△ : 약간 용해됨.?: Slightly soluble.
X : 용해되지 않고 필름형태로 존재함.X: Not dissolved, but in film form.
상기 표 2에서 살펴본 바와 같이, 본 발명에 따른 박리액 조성물은 통상적으로 사용되는 알킬렌글리콜에테르 및 디메틸설폭사이드 등의 극성용제 대신 방향족 알코올 및 헤테로고리형 알코올을 용제로 사용함으로써, 아크릴막 및 칼라레지스트에 구조적으로 침투가 용이하여 아크릴막 및 칼라레지스트에 대한 용해력이 우수하여 박리력이 향상하게 되며, 폴리아크릴레이트-폴리알릴알코올에톡시레이트 계열의 고분자를 사용함으로써 하부막(절연막 및 금속막)에 대한 손상을 최소화함으로써, 칼라필터 공정에서 발생된 불량기판으로 부터 양호한 상태의 배열기판을 얻어 재활용 할 수 있게 된다.As shown in Table 2, the stripping solution composition according to the present invention was prepared by using an aromatic alcohol and a heterocyclic alcohol as solvents instead of a polar solvent such as alkylene glycol ether and dimethyl sulfoxide, It is easy to penetrate the resist structurally to improve the peelability of the acrylic film and the color resist because of its excellent solubility in the acrylic film and color resist. By using the polyacrylate-polyallyl alcohol ethoxylate-based polymer, the lower film (insulating film and metal film) It is possible to obtain an array substrate in a good state from the defective substrate generated in the color filter process and to recycle the array substrate.
Claims (15)
상기 고분자형 흡착제는 수평균 분자량이 500 내지 50,000이고, 폴리아크릴레이트계의 앵커그룹 및 폴리알릴알코올에톡시레이트계의 고분자그룹을 포함하는 것인 칼라필터용 박리액 조성물.An alcoholic solvent selected from a cyclic alcohol having 3 to 20 carbon atoms, an aromatic alcohol, and a heterocyclic alcohol containing at least one element selected from N, S, and O, and a polymeric adsorbent,
Wherein the polymeric adsorbent has a number average molecular weight of 500 to 50,000 and comprises a polyacrylate anchor group and a polyallyl alcohol ethoxylate based polymer group.
[화학식 1]
여기서 X, Y는 각각 수소, 탄소수 1 내지 6의 알킬, -COOM3 이거나 X나 Y가 -COOM2 와 함께 무수물 환을 형성하고,
Z는 수소, 탄소수 1 내지 6의 알킬 또는 -CH2COOM3 이며,
M2, M3 는 각각 수소, 알칼리금속, 암모늄 또는 유기 아민기이고,
R1, R2 는 각각 수소 혹은 탄소수 1 내지 6의 알킬이고,
R3 는 탄소수 2 내지 4의 알킬렌기이며,
m은 1 내지 100의 정수, n은 0 내지 4의 정수,
a, b는 각각 1 내지 20의 정수이다. The peelable liquid composition for a color filter according to claim 1, wherein the polymeric adsorbent is represented by the following Formula 1:
[Chemical Formula 1]
Wherein X and Y are each hydrogen, alkyl having 1 to 6 carbon atoms, -COOM 3, or X or Y together with -COOM 2 form an anhydride ring,
Z is hydrogen, alkyl having 1 to 6 carbon atoms or -CH 2 COOM 3 ,
M 2 and M 3 are each hydrogen, an alkali metal, ammonium or organic amine group,
R 1 and R 2 are each hydrogen or alkyl having 1 to 6 carbon atoms,
R 3 is an alkylene group having 2 to 4 carbon atoms,
m is an integer of 1 to 100, n is an integer of 0 to 4,
a and b each represent an integer of 1 to 20;
상기 알코올계 용제가 하기 화학식 2로 표시되는 구조를 갖는 방향족 알코올을 포함하는 것인 칼라필터용 박리액 조성물:
[화학식 2]
상기 화학식 2에 있어서,
R은 수소, 탄소수 1 내지 6의 알킬기에서 선택되는 하나 이상의 치환기이고,
c는 0 내지 5의 정수이다The method according to claim 1,
Wherein the alcohol-based solvent comprises an aromatic alcohol having a structure represented by the following formula (2): < EMI ID =
(2)
In Formula 2,
R is at least one substituent selected from the group consisting of hydrogen and an alkyl group having 1 to 6 carbon atoms,
c is an integer from 0 to 5
상기 방향족 알코올은 페닐메탄올, 메틸페닐메탄올, 에틸페닐메탄올, 프로필페닐메탄올, 이소프로필메탄올, 부틸페닐메탄올로 이루어진 군에서 선택된 1종 이상인 칼라필터용 박리액 조성물.The method according to claim 1,
Wherein the aromatic alcohol is at least one selected from the group consisting of phenylmethanol, methylphenylmethanol, ethylphenylmethanol, propylphenylmethanol, isopropylmethanol, and butylphenylmethanol.
상기 알코올계 용제가 하기 화학식 3의 구조를 갖는 헤테로고리형 알코올을 포함하는 것인 칼라필터용 박리액 조성물:
[화학식 3]
상기 화학식 3에 있어서,
X는 N, S, O에서 선택되는 원소이고,
d는 0 내지 5의 정수다. The method of claim 1, wherein
Wherein the alcohol-based solvent comprises a heterocyclic alcohol having a structure represented by the following formula (3): < EMI ID =
(3)
In Formula 3,
X is an element selected from N, S, and O,
and d is an integer of 0 to 5.
상기 헤테로고리형 알코올은 테트라히드로퓨라닐메탄올, 테트라히드로퓨라닐에탄올 테트라히드로퓨라닐프로판올, 테트라히드로퓨라닐부탄올, 테트라히드로티오페닐메탄올, 테트라히드로퍼퓨릴알코올, 테트라히드로퓨릴에탄올, 테트라히드로퓨릴프로판올, 테트라히드로퓨릴부탄올, 테트라히드로티오페닐에탄올 테트라히드로티오페닐프로판올, 테트라히드로티오페닐부탄올, 피롤리디닐메탄올, 피롤리디닐에탄올, 피롤리디닐프로판올, 피롤리디닐부탄올로 이루어진 군으로부터 선택된 1종 이상인 칼라필터용 박리액 조성물.The method according to claim 6,
The heterocyclic alcohol may be at least one selected from the group consisting of tetrahydrofuranylmethanol, tetrahydrofuranylethanol tetrahydrofuranylpropanol, tetrahydrofuranylbutanol, tetrahydrothiophenylmethanol, tetrahydrofurfuryl alcohol, tetrahydrofuryl ethanol, tetrahydrofuryl propanol , At least one selected from the group consisting of tetrahydrofuryl butanol, tetrahydrothiophenyl ethanol, tetrahydrothiophenyl propanol, tetrahydrothiophenyl butanol, pyrrolidinyl methanol, pyrrolidinyl ethanol, pyrrolidinyl propanol and pyrrolidinyl butanol Gt; < tb >
조성물 100 중량부를 기준으로, 알코올계 용제 10 내지 50 중량부와 고분자형 흡착제 0.5 내지 10 중량부를 포함하는 칼라필터용 박리액 조성물.The method according to claim 1,
10 to 50 parts by weight of an alcoholic solvent and 0.5 to 10 parts by weight of a polymeric adsorbent based on 100 parts by weight of the composition.
분자구조 중에 산소원자를 함유하지 않는 아민계 박리촉진제를 조성물 100 중량부를 기준으로 1 내지 20 중량부 더 포함하는 칼라필터용 박리액 조성물.The method according to claim 1,
Wherein the composition further comprises 1 to 20 parts by weight, based on 100 parts by weight of the composition, of an amine-based detachment accelerator which does not contain oxygen atoms in the molecular structure.
상기 아민계 박리 촉진제는 하기 화학식 4 또는 화학식 5로 표시되는 화합물인 칼라필터용 박리액 조성물:
[화학식 4]
상기 e는 1 내지 10의 정수이고;
[화학식 5]
상기 f는 0 내지 6의 정수이다.10. The method of claim 9,
Wherein the amine-based peeling accelerator is a compound represented by the following Chemical Formula 4 or Chemical Formula 5:
[Chemical Formula 4]
E is an integer from 1 to 10;
[Chemical Formula 5]
F is an integer of 0 to 6;
상기 아민계 박리촉진제는 디에틸렌트리아민, 트리에틸렌테트라아민, 테트라에틸렌펜타아민, 피페라진메틸아민, 피페라진에틸아민, 피페라진프로필아민, 피페라진부틸아민, 피페라진펜틸아민, 피페라진헥실아민으로 이루어진 군으로부터 선택되는 것인, 칼라필터용 박리액 조성물.11. The method of claim 10,
The amine release promoter may be selected from the group consisting of diethylenetriamine, triethylenetetraamine, tetraethylenepentamine, piperazinemethylamine, piperazinylethylamine, piperazinpropylamine, piperazinebutylamine, piperazinopentylamine, Wherein the release agent is selected from the group consisting of polyvinylpyrrolidone and polyvinylpyrrolidone.
조성물 100 중량부를 기준으로 알코올계 용제 10 내지 50 중량부와 고분자형 흡착제 0.5 내지 10 중량부를 포함하며, 추가적으로
알칼리 화합물 1 내지 20 중량부;
수용성 아민 5 내지 30 중량부;
알킬렌글리콜에테르, 알킬렌글리콜, 디알킬렌글리콜디알킬에테르, 알킬렌글리콜디알킬에테르로부터 선택되는 1종 이상 1 내지 20 중량부; 및
비이온계 계면활성제 0 내지 5 중량부에서 선택되는 하나 이상의 성분을 더 포함하는 것인 칼라필터용 박리액 조성물. The method according to claim 1,
10 to 50 parts by weight of an alcoholic solvent and 0.5 to 10 parts by weight of a polymeric adsorbent based on 100 parts by weight of the composition,
1 to 20 parts by weight of an alkali compound;
5 to 30 parts by weight of a water-soluble amine;
1 to 20 parts by weight of at least one selected from alkylene glycol ethers, alkylene glycols, dialkylene glycol dialkyl ethers and alkylene glycol dialkyl ethers; And
And 0 to 5 parts by weight of a non-ionic surfactant.
상기 알칼리 화합물은 무기 알칼리 하이드록사이드, 암모늄 하이드록사이드, 탄소수 1 내지 6의 알킬 암모늄 하이드록사이드 및 탄소수 1 내지 6의 알킬기를 갖는 페닐알킬 암모늄 하이드록사이드로부터 선택되는 것인, 칼라필터용 박리액 조성물. 13. The method of claim 12,
Wherein the alkali compound is selected from inorganic alkali hydroxides, ammonium hydroxides, alkyl ammonium hydroxides having 1 to 6 carbon atoms and phenyl alkyl ammonium hydroxides having alkyl groups having 1 to 6 carbon atoms. / RTI >
상기 수용성 아민은 탄소수 2 내지 10의 알칸올아민 또는 탄소수 2 내지 15의 알콕시 아민으로부터 선택되는 것인, 칼라필터용 박리액 조성물.13. The method of claim 12,
Wherein the water-soluble amine is selected from alkanolamine having 2 to 10 carbon atoms or alkoxyamine having 2 to 15 carbon atoms.
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