KR101730039B1 - apparatus for examining edge of flat panel display panel and method of using the same - Google Patents

Abstract

A variable table provided with a pair of variable frames which are movable in one axial direction along a fixed frame and which are elongated in the direction of another axis intersecting the one axial direction and have a linear support on which the substrate is placed, An edge inspection unit installed in each of the variable frames to move in a direction of the other axis along a variable frame, and a rotation unit capable of rotating the substrate on a linear support, and an edge inspection method using the apparatus. do.
According to the present invention, the structure of the panel edge inspection apparatus is simplified as a whole to be simpler and lighter than the conventional structure, so that it is advantageous in manufacturing and installation. In operation, inspection operation can eliminate artifacts and the inspection time can be reduced. .

Description

[0001] The present invention relates to a flat panel display, and more particularly,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an edge inspection apparatus and method for a flat panel display panel (substrate), and more particularly, to an apparatus and a method for edge inspection of a flat panel display panel having a structure that can simplify the overall structure lightweight.

In general, a flat panel display panel is used as a substrate by cutting a disk to a required size. The panel thus cut is polished and inspected.

1 shows a conventional edge inspection apparatus. Referring to FIG. 1, a variable table 40 is provided at a central portion of the substrate, which is rotatable in a state where the substrate is seated and aligned with the substrate size.

Two fixed frames 10 parallel to each other on both sides of the variable table 40 are provided in the y-axis direction. Both ends of the movable frame 20 perpendicular to the fixed frame are coupled to the fixed frame 10 axis direction.

In the moving frame 20, two edge inspection cameras 30 are installed so as to be movable along the moving frame 20 in the x-axis direction.

First, the variable table 40 is changed in accordance with the size of the substrate to be loaded, and the alignment member for carrying and aligning the panel is mounted on the variable table 40 in the fixed position, So that the long side is aligned with the fixed frame 10. The two inspection cameras 30 are moved on the movable frame 20 so as to fit the two long side positions of the substrate. When the movement is completed, the movable frame 20 itself is moved in the y-axis direction along the fixed frame 10 The substrate is scanned and scanned in two steps, one at each side.

The movable frame 20 and the inspection camera 30 perform the avoidance operation to one end of the fixed frame 10 so that the movable table 20 and the inspection camera 30 do not collide with each other while the variable table 40 So that the two short sides of the substrate are parallel to the fixed frame 10.

The inspection camera 30 moves on the movable frame 20 in accordance with the two short side positions of the substrate and when the movement frame 20 is again scanned in the y axis direction along the fixed frame 10, (30) takes charge of the two short sides of the substrate one by one and inspects them.

The moving frame 20 and the inspection camera 30 again move to one end of the fixed frame 10 and the substrate having been subjected to the edge inspection of the two long sides and the two short sides is transferred to the alignment member or other transfer member And moves out of the variable table 40 to the next step.

However, in the conventional panel edge inspection apparatus, since the moving frame 20 itself having the inspection camera 30 is moved for edge inspection, the capacity of the driving member for moving the moving frame 20 must be increased, .

In addition, since the moving frame 20 and the inspection camera 30 frequently move to the predetermined end of the fixed frame 10 for avoiding operation when the substrate is mounted, detached, or rotated, the time for the avoidance operation is increased, There is a problem that the efficiency is lowered.

Korean Patent Publication No. 10-2011-0026258

SUMMARY OF THE INVENTION It is an object of the present invention to provide an apparatus and method for edge inspection of a flat panel display panel having a structure that can simplify the overall structure lightweight and simplify the problems of the conventional panel edge inspection apparatus.

It is another object of the present invention to provide an edge inspection apparatus and method of a flat panel display panel capable of reducing inspection time of edge inspection of a flat panel display panel and improving inspection efficiency.

According to an aspect of the present invention, there is provided a flat panel display panel inspection apparatus comprising:

a fixed frame extending in the x-axis direction,

A variable table provided with a pair of variable frames which can move in the x-axis direction along the fixed frame and which are installed in the y-axis direction and have a linear support on which the substrate is placed,

An inspection camera installed in each of the variable frames and capable of moving in the y axis direction along the variable frame;

And a rotating part capable of rotating the substrate on the linear support.

In the present invention, the rotary part may be formed as a rotary conveying part serving also as a conveying part for conveying the substrate from the outside to the linear support or for carrying the substrate out to the outside. Also, the rotating portion may be to hold the substrate from above and away from the linear support, then rotate to seat the substrate back onto the linear support.

In the present invention, between the pair of variable frames, a central fixed table for supporting the central part of the substrate can be provided separately from the variable table.

According to an aspect of the present invention, there is provided a method of inspecting a panel edge using the panel edge inspecting apparatus, comprising the steps of: adjusting a distance between a pair of variable frames of a variable table in accordance with a size of a substrate to be loaded; Scanning a pair of opposite sides of the substrate while inspecting a pair of inspection cameras mounted on the variable frame in the direction of the variable frame length, Rotating the movable frame by 90 degrees in the variable frame, adjusting the spacing of the pair of variable frames of the variable table in accordance with the size of the rotating substrate, Placing the two inspection cameras in the variable frame length direction; Standing by having a step, moving out of the variable table by two long sides and transporting the substrate completed for the edge of the two short-side scan means for scanning and checking the credit of the other pair of substrates is characterized in that formed.

According to the present invention, the structure of the panel edge inspection apparatus is simplified as a whole to be lighter and easier to manufacture and install, and it is possible to save time and cost by reducing the possibility of malfunction even in operation.

According to the present invention, it is possible to increase the operation rate of the equipment and reduce the time for edge inspection of individual flat panel display panels, thereby enhancing inspection efficiency.

1 is a perspective view schematically showing a configuration of a conventional panel edge inspection apparatus,
FIG. 2 and FIG. 3 are a plan view and a perspective view together showing a state in which the interval between the pair of movable frames is narrowed and a state in which the pair of movable frames are widened in the panel edge inspection apparatus of the present invention,
FIG. 4 is a side view showing a side view of one of a pair of variable frames forming a variable table in the panel edge inspection apparatus of the present invention. FIG.
5 is a conceptual diagram for explaining that the inspection camera of the present invention is located at one end of a variable frame and does not collide with each other when the substrate is rotated or detached.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Referring to FIGS. 2 and 3, a panel edge inspection apparatus according to an embodiment of the present invention includes a pair of fixed frames 120 installed in the x-axis direction, And a pair of variable frames 110a and 110b which are installed in a long y-axis direction. The inspection unit 130 is installed on the variable frames 110a and 110b so as to move along the variable frames 110a and 110b. Between the pair of variable frames 110a and 110b, a fixing table 140 is installed so that the center of the substrate can be placed. The fixed table is preferably omitted if the substrate size is small.

More specifically, each of the variable frames 110a and 110b is coupled to the fixed frame 120 at two places and is stably supported by the fixed frame 120, Lt; / RTI > Various means of transportation can be used for this purpose. For example, the two portions where the variable frames 110a and 110b are combined with the fixed frame 120 have projecting jaws (not shown), respectively, which are fixed to the inter-tooth grooves of the fixed frame (not shown) And a pinion gear (not shown) for linearly moving one point of the pinion gear is rotated by a step motor (not shown) at the end of the fixed frame. The step motor of the fixed frame is synchronized and the two parts coupled with the fixed frame move at the same speed in the x-axis direction, and the whole variable frame moves in the x-axis direction along the fixed frame at the same speed.

The fixed frame has a rail groove for stable movement of the variable frame in the x-axis direction, and the variable frame has a linear protrusion coupled to the frame groove, so that the variable frame can move along the fixed frame without leaving the track.

The long upper surface of the variable frame forms a linear support on which the substrate is mounted, and a long rail block may be provided on the side wall far from the center of the variable frame. In the rail block, a groove is provided on the surface in the direction of the length of the variable frame, and a part of the support of the inspection camera is fitted in the groove, so that the inspection camera can move along the groove in the y-axis direction.

Here again, a moving means such as between a fixed frame and a variable frame for movement can be provided. For example, a recoil gear is installed along the groove, and a protruding jaw of the support is fixed by being caught between the teeth of the recoil gear at one point of the recoil gear, and one end of the recoil gear is linearly moved at one end of the groove, A driving member such as a step motor 114 having a pinion gear for advancing the gear and a rotation shaft connected to the pinion gear may be installed.

Accordingly, when the driving member is actuated, the pinion gear also rotates so that one point of the rectilinear motion moves linearly, and the inspection unit 130 fixed to the support base and the support base having the protruding jaw fixed at this point linearly moves along the y axis Panel edges can be inspected.

On the other hand, it may be difficult to support the substrate sufficiently horizontally only with the supports of the two variable frames 110a and 110b while the substrate becomes large. Therefore, in this embodiment, a fixing table 140 is additionally provided between the two variable frames 110a and 110b. Since the fixed table 140 always lies in the center of the two variable frames 110a and 110b to support the central portion of the substrate, it is possible to prevent the substrate from sagging, and therefore, So that it can be confirmed. The fixed table 140 is installed at a width smaller than the width of the smallest side of the smallest substrate placed on the variable table of the inspection apparatus. Even when the smallest substrate is placed, the variable frames 110a and 110b are not disturbed by the fixed table 140, To be able to inspect the two sides of the panel.

FIG. 4 is a side view showing the variable frames 110a and 110b and the inspection unit 130 installed in the inspection apparatus in more detail. The lower portions of the variable frames 110a and 110b are placed on the fixed frame 120 and the upper ends of the variable frames 110a and 110b form a support base 112 on which the upper surface of the variable frame 110a and 110b is placed. The end portion 100a of the substrate is protruded into the space of the inspection camera 134 through the support stand 112. [

A rail block 116, which can serve as a guide rail on which the inspection unit 130 moves, is provided on a side wall of the outer side (right side in the drawing) of the variable frame 110b. A camera support 132 of the inspection unit is installed on the rail block 116 so as to move along the rail block and an inspection camera 134 is installed on the camera support 132.

The inspection camera 134 inspects the substrate end 100a protruded past the support table 112 while scanning along the y-axis of the substrate 100. [ The inspection camera 134 consists of a pair of the light emission sensor 134a and the light reception sensor 134b provided above and below the protruding substrate end portion 100a. The light from the light emitting sensor 134a is detected by the light receiving sensor 134b through the protruding substrate end portion 100a and if the amount of the sensed light is larger or smaller than the reference amount, the substrate end portion 100a, It can be judged that it is defective.

Of course, the inspection camera 134 may detect a direct image, and the computer may directly judge whether the edge is abnormal or defective through a known image analysis technique.

The method by which the inspection camera 134 inspects the edge of the substrate is well known, and a detailed description thereof will be omitted here.

5 is a plan view showing that the unillustrated rotating part rotates the substrate.

Referring to FIG. 5, the rotation radius R, the variable frames 110a and 110b, and the inspection unit 130 coupled to the inspection unit 130 are shown. This position is where the inspection camera naturally positions after inspecting the substrate edge. Therefore, even if the inspection camera or the variable frames 110a and 110b do not perform separate avoiding operations, You can also rotate other edges (edges). For example, after the inspection camera is initially positioned at the lower end of the variable frames 110a and 110b on the drawing and the two long sides are inspected first, the inspection camera is located at the upper end of the variable frames 110a and 110b, Even if rotated 90 degrees, the test camera will not touch the substrate. The inspection camera does not touch the substrate even when the inspection camera moves to a position where the short side of the substrate can be inspected by moving the flexible frame outward along the fixed frame after the rotation of the substrate, Moving to position, the short side is inspected.

A rotating part (not shown) capable of rotating the substrate on the variable frame typically performs an operation of holding the upper surface of the substrate by vacuum and gripping the substrate, moving the substrate upward by a predetermined distance, rotating the substrate 90 degrees, And a rotary arm mounted on the base, a rotary plate rotated by the motor under the base, a cylinder arm extending and extending downward from the rotary plate to expand and contract, and a cylinder arm, An adsorption plate or the like.

The rotary part may be a rotary transfer part that also serves as a transfer part for transferring the substrate from the outside to the support frame of the variable frame or the transfer part for transferring the substrate to the outside. In addition, when the substrate is gripped from the outside, It may also be an aligner, which is responsible for correcting the alignment.

In the panel edge inspection apparatus according to an embodiment of the present invention, when a pair of variable frames of the variable table are adjusted in accordance with the size of a substrate on which the variable frame is to be mounted, do. This step may have already been done in the previous substrate processing.

Next, the panel transfer section transfers the substrate to the variable table and places it in the correct position. Then, two inspection cameras, each of which is installed in the variable frame, move in the variable frame length direction while the substrate is not moving, and scan a pair of opposite sides of the substrate, for example, a pair of long sides.

When the scan of the long side is completed, the inspection camera is positioned at the other end of the variable frame, and the rotating part lifts the substrate from the variable frame and rotates 90 degrees, while a pair of variable frames of the variable table moves By moving to the distance between the short sides, the spacing distance is readjusted. Then, the rotating part places the rotated substrate on a pair of variable frame supports of the variable table where the separation distance is readjusted.

Again, with the substrate in motion, the two inspection cameras scan the opposite sides of the other pair of substrates, i.e., the two short sides, while moving from the other end to the original position along the variable frame length direction.

After the edges of both sides of the substrate and edges of both sides are examined, the substrate is moved away from the variable table by the panel transfer part to the next process step.

The above operation may be performed by an operation of a controller which controls each element of the inspection apparatus, and may be performed by an automatic control system by a normal program. For example, when the transfer unit confirms that the variable table is vacant by a separate sensor of the inspection apparatus, the control unit is given a signal so that the transfer unit places the next substrate on the variable table, and the separation distance of the variable frame is set to a predetermined distance according to the size of the substrate Can be adjusted. When the scan and inspection of the pair of opposite sides are completed after the movement of the test camera to one side is completed, the control unit controls the rotation unit to rotate the substrate, the operation of re-adjusting the separation distance of the pair of variable frames, It is possible to send out a control signal.

According to the inspection method of the present invention performed through such operation, the inspection camera or the variable frame does not need to perform the avoidance operation even when the substrate is rotated for inspecting the substrate, and only the minimum path is moved. Therefore, the overall inspection operation time can be shortened, and the time for avoiding operation can be saved, compared with the conventional case.

The specific embodiments of the present invention have been described above. It is to be understood, however, that the spirit and scope of the invention are not limited to these specific embodiments, but that various changes and modifications may be made without departing from the spirit of the invention, If you are a person, you will understand.

Therefore, it should be understood that the above-described embodiments are provided so that those skilled in the art can fully understand the scope of the present invention. Therefore, it should be understood that the embodiments are to be considered in all respects as illustrative and not restrictive, The invention is only defined by the scope of the claims.

100: Substrate (panel) 110a, 110b: Variable frame
112: support frame 116: rail block
120: fixed frame 130:
132: camera support 134: inspection camera
140: stationary table

Claims (5)

A fixed frame which is long in one axial direction,
A variable table having a pair of variable frames which are movable in the uniaxial direction along the fixed frame and are elongated in the direction of the other axis intersecting with the uniaxial direction and have a linear support on which a substrate is placed,
An edge checking unit installed in each of the variable frames and capable of moving in the other axis direction along the variable frame,
A rotating part capable of placing the substrate on the linear support by rotating the substrate after separating the linear supporting part from the linear supporting part,
And a substrate transferring unit (panel transferring unit) for transferring the substrate from the outside to the linear supporting table or for carrying out the edge inspection of the substrate from the linear supporting table to the outside. The method according to claim 1,
Wherein the rotating unit is configured as a rotary conveying unit that also serves as the substrate transferring unit. The method according to claim 1,
Wherein a fixed table for supporting a central portion of the substrate is additionally provided between the pair of variable frames. The method according to claim 1,
Wherein the edge inspecting unit comprises a combination of an image camera or a light receiving sensor and a light emitting sensor. 6. A panel edge inspection apparatus according to any one of claims 1 to 4,
Adjusting the spacing distance according to a size of the substrate on which the pair of variable frames of the variable table are to be mounted,
Transferring the substrate to the variable table by the substrate transfer unit and placing the substrate in a fixed position,
Scanning and examining a pair of opposite sides of the substrate while moving the edge inspection unit in the direction of the variable frame length,
Rotating the substrate by 90 degrees by lifting the substrate from the variable frame,
Adjusting the spacing of the pair of variable frames according to the size of the rotating substrate,
Placing the rotated substrate on the variable frame,
Scanning and examining a pair of opposite sides of the substrate while moving the edge inspection unit in the direction of the variable frame length,
And moving the substrate having been subjected to the edge inspection of the two long sides and the two short sides to the substrate transferring portion to be deviated from the variable table.

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